Coupling enhanced spatial two-way light guiding device of coherent array laser and preparation method thereof

Abstract

The application discloses a coupling enhanced space bidirectional light guide device of a coherent array laser and a preparation method thereof. The space bidirectional light guide device comprises array laser units, a space bidirectional light guide element and a coherent array coupling layer which are sequentially arranged in correspondence and form a resonant cavity. The space bidirectional light guide element is formed by multiple layers of space bidirectional light guide thin layers. A micropore array is formed on the space bidirectional light guide element, and the micropore array is perpendicular to the surface of the light guide thin layer. A photonic crystal array formed by the micropore array of an incident light surface corresponds to the array laser units, and a photonic crystal array formed by the micropore array of an outgoing light surface is concentrated towards the array center. The photonic crystal array realizes the guidance of laser beams. According to the technical scheme, the light beams can be accurately guided to the target position step by step, strong mutual coupling is generated, the coherent array light is output, the structure is simple and compact, the stability is good, the damage threshold is high, the bidirectional guidance of high-power light beams is realized, and the efficient preparation of the device is realized.

Description

Technical Field

[0001] This invention relates to the fields of optics and laser technology, and in particular to a coupling-enhanced spatial bidirectional light guiding device for a coherent array laser and a method for fabricating such a device. Background Technology

[0002] High-energy laser sources are widely used in manufacturing, medical diagnosis and treatment, and military defense. Due to thermal and nonlinear effects, the output of a single laser unit (aperture) is often limited, making it difficult to meet the ever-increasing application demands. Coherent array lasers, which superimpose laser arrays in the far field through mutual interference, can achieve high power density and high beam quality laser output, and have become an important direction for the development of high-power laser systems.

[0003] Coherent array laser technology utilizes the nonlinear characteristics of the resonant cavity and the mutual coupling between laser units. The stronger the coupling, the more likely it is to generate in-phase supermodes, thus obtaining self-organized, stable, in-phase coherent output. However, due to limitations in laser structure, the spacing between laser units is usually large, while the laser aperture size is limited, making it difficult to achieve strong coupling between units. Furthermore, current coherent array lasers mostly employ spatial optical paths, optical fibers, or a hybrid of fiber-spatial optical paths to achieve coherent coupling. Spatial optical path optical elements often have a relatively high damage threshold, making them suitable for high-power optical systems, but these systems are often complex, resulting in poor stability, low environmental adaptability, and low anti-interference capabilities. Optical fibers have the advantages of low loss, small size, light weight, and strong anti-interference, but the presence of nonlinear effects in optical fibers makes them difficult to guide high-power beams.

[0004] Therefore, it is necessary to develop a coherent array laser coupling enhancement spatial bidirectional light guiding device to achieve strong mutual coupling of laser units, with a simple and compact structure, high damage threshold, and easy implementation. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a coherent array laser coupling enhancement spatial bidirectional light guiding device and its fabrication method. By forming an array of air micro-holes on a spatial bidirectional light guiding thin layer, and deleting one or more air holes at the center to form a photonic crystal, the beam is confined to the central region. Multiple spatial bidirectional light guiding thin layers are superimposed, enabling the beam to be progressively and precisely guided to the target position. The array laser unit outputs an array beam, which, after passing through the spatial bidirectional light guiding element, reduces the beam spacing, resulting in strong mutual coupling of the array beams in the coherent coupling layer. The beam is then reverse-injected into the array laser unit through the spatial bidirectional light guiding element, achieving coherent array in-phase mode locking and realizing the output of coherent array light. The device employs a spatial light guiding form, resulting in a simple and compact structure, good stability, and a high damage threshold, enabling bidirectional guidance of high-power beams. The device utilizes a parallel fabrication method combining etching and mechanical pressing, achieving efficient fabrication and facilitating its industrial production and application in various optical systems.

[0006] To achieve the above objectives, the present invention provides a coherent array laser coupling enhancement spatial bidirectional light guiding device, comprising an array laser unit, a spatial bidirectional light guiding element, and a coherent array coupling layer arranged sequentially from one side to the other.

[0007] The laser input end of the spatial bidirectional light guide element corresponds to the laser output end of the array laser unit, the coherent coupling layer is disposed at the output end of the spatial bidirectional light guide element, and the array laser unit, the spatial bidirectional light guide element and the coherent array coupling layer form a resonant cavity;

[0008] The spatial bidirectional light guiding element is formed by multiple spatial bidirectional light guiding thin layers. A micro-aperture array is formed on the spatial bidirectional light guiding element. The micro-aperture array is perpendicular to the surface of the light guiding thin layer and adjacent to one end of the array laser unit. The photonic crystal array formed by the micro-aperture array corresponds to the array laser unit and is adjacent to one end of the coherent array coupling layer. The photonic crystal array formed by the micro-aperture array is concentrated towards the center of the array, and the photonic crystal array guides the laser beam.

[0009] The coherent array coupling layer enables coherent coupling and reverse feedback of the array laser beam emitted from the array laser unit.

[0010] In the above technical solution, preferably, the spatial bidirectional light guiding element guides the emitted beam of each laser unit in the array laser unit in both directions without changing the propagation direction of the emitted beam of the array laser unit.

[0011] In the above technical solution, preferably, the spatial bidirectional light-guiding thin layer is made of a light-transmitting material, which is glass, crystal or sapphire, and the thickness of each layer of the spatial bidirectional light-guiding thin layer is the same as that of the material.

[0012] In the above technical solution, preferably, the micro-hole array is circular or polygonal, and the micro-holes formed by the micro-hole array on the single-layer spatial bidirectional light-guiding thin layer penetrate the thickness direction of the spatial bidirectional light-guiding thin layer, and the effective area of ​​the formed photonic crystal is the same as the output spot of the array laser unit.

[0013] In the above technical solution, preferably, the positions of the micro-hole array corresponding to the center position of the array laser unit and the micro-holes formed on the adjacent spatial bidirectional light-guiding thin layer coincide, while the positions of the micro-hole array corresponding to the non-center position of the array laser unit and the micro-holes formed on the adjacent spatial bidirectional light-guiding thin layer do not coincide, and the offset does not exceed the diameter of the micro-hole, so that the emitted beams from the non-center position of the array laser unit are all offset towards the center of the array.

[0014] In the above technical solution, preferably, the spatial bidirectional light-guiding thin layer is provided with micropore arrays of different arrangements and sizes, so that the spatial bidirectional light-guiding thin layer can limit light beams of preset wavelengths and preset sizes.

[0015] In the above technical solution, preferably, the output laser of the array laser unit is a semiconductor laser, a fiber laser, or a solid-state laser.

[0016] This invention also proposes a method for fabricating a coupling-enhanced spatial bidirectional light guiding device for a coherent array laser, applicable to the coupling-enhanced spatial bidirectional light guiding device for a coherent array laser disclosed in any of the above technical solutions, comprising:

[0017] Micropores were fabricated on a light-transmitting material using masking and wet etching methods to obtain a spatially bidirectional light-guiding thin layer.

[0018] After cleaning the bidirectional light-guiding thin film, the size of the micropores is reduced by applying mechanical pressure;

[0019] The upper and lower surfaces of the spatial bidirectional light-guiding thin layer are polished, and the spatial bidirectional light-guiding thin layer is bonded sequentially according to the preset light-guiding path and the corresponding position of the micropores to form a spatial bidirectional light-guiding element.

[0020] An array laser unit is provided at the input end of the spatial bidirectional light guide element, and a coherent array coupling layer is provided at the output end.

[0021] In the above technical solution, preferably, the spatial bidirectional light-guiding thin layer is a thin sheet structure, the micropore array is symmetrically distributed around the center of the spatial bidirectional light-guiding thin layer, and the mechanical pressure is uniformly applied from the side of the spatial bidirectional light-guiding thin layer towards the center.

[0022] In the above technical solution, preferably, the chemical etching solution used in the wet etching process of the light-transmitting material includes at least one of phosphoric acid, hydrofluoric acid and sodium hydroxide, and the etching temperature is room temperature or heating.

[0023] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0024] By forming an array of air micro-holes on a spatially bidirectional light-guiding thin layer, and missing one or more air holes at the center to form a photonic crystal, the beam is confined to the central region. Multiple spatially bidirectional light-guiding thin layers can be stacked to guide the beam to the target position step by step with precision. The array beam output from the array laser unit passes through the spatially bidirectional light-guiding element, which reduces the beam spacing, enabling strong mutual coupling of the array beam in the coherent coupling layer. The beam is then injected back into the array laser unit through the spatially bidirectional light-guiding element, achieving coherent array in-phase mode locking and realizing the output of coherent array light. The device adopts a spatial light-guiding form, with a simple and compact structure, good stability, and a high damage threshold, achieving bidirectional guidance of high-power beams. The device employs a parallel fabrication method combining etching and mechanical pressing, achieving efficient fabrication and facilitating its industrial production and application in various lasers. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of a coupling enhancement spatial bidirectional light guiding device for a coherent array laser disclosed in one embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the end face of a single-beam spatial bidirectional light guide element disclosed in one embodiment of the present invention;

[0027] Figure 3 for Figure 1 A schematic cross-sectional view of the single-beam spatial bidirectional optical guide element disclosed in the embodiment shown in the figure.

[0028] Figure 4 This is a schematic diagram of the end face of a one-dimensional linearly arranged array laser unit disclosed in an embodiment of the present invention;

[0029] Figure 5 The present invention discloses a method for... Figure 4 A schematic diagram of the end face of a spatially bidirectional beamguide element matching the embodiment;

[0030] Figure 6 for Figure 5 A schematic cross-sectional view of the spatially bidirectional beam guiding element for parallel beams disclosed in the embodiment shown in the figure.

[0031] Figure 7 This is a schematic flowchart of a method for fabricating a coupling-enhanced spatial bidirectional light guiding device for a coherent array laser, as disclosed in one embodiment of the present invention.

[0032] Figure 8 This is a schematic diagram of the end face of a two-dimensional linearly arranged array laser unit disclosed in one embodiment of the present invention;

[0033] Figure 9 The present invention discloses a method for... Figure 8 A schematic diagram of the end face of a spatially bidirectional beamguide element matching the embodiment;

[0034] Figure 10 for Figure 9 A schematic cross-sectional view of the spatial bidirectional light guide element for a parallel beam disclosed in the embodiment shown in the figure.

[0035] In the diagram, the correspondence between the components and the reference numerals is as follows:

[0036] 1. Arrayed laser unit, 2. Spatial bidirectional light guiding element, 21. Spatial bidirectional light guiding thin layer, 22. Micro-pore array, 3. Coherent array coupling layer. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] The present invention will now be described in further detail with reference to the accompanying drawings:

[0039] like Figure 1 As shown, a spatial bidirectional light guiding device for coupling enhancement of a coherent array laser according to the present invention includes an array laser unit 1, a spatial bidirectional light guiding element 2, and a coherent array coupling layer 3 arranged sequentially from one side to the other.

[0040] The laser input end of the spatial bidirectional light guide element 2 corresponds to the laser output end of the array laser unit 1. The coherent coupling layer is disposed at the output end of the spatial bidirectional light guide element 2. The array laser unit 1, the spatial bidirectional light guide element 2 and the coherent coupling layer 3 form a resonant cavity.

[0041] The spatial bidirectional light guiding element 2 is formed by multiple spatial bidirectional light guiding thin layers 21. A micro-aperture array 22 is formed on the spatial bidirectional light guiding element 2. The micro-aperture array 22 is perpendicular to the surface of the light guiding thin layer 21 and adjacent to one end of the array laser unit 1. The photonic crystal array formed by the micro-aperture array 22 corresponds to the array laser unit 1 and is adjacent to one end of the coherent array coupling layer 3. The photonic crystal array formed by the micro-aperture array 22 is concentrated towards the center of the array, and the photonic crystal array guides the laser beam.

[0042] The coherent array coupling layer 3 enables coherent coupling and reverse feedback of the emitted array beam of the array laser unit 1.

[0043] In this embodiment, by forming an array of air micro-holes 22 on a spatially bidirectional light-guiding thin layer 21, and missing one or more air holes at the center to form a photonic crystal to confine the beam to the central region, multiple spatially bidirectional light-guiding thin layers 21 can be stacked to guide the beam to the target position step by step with precision. The array beam output from the array laser unit 1 passes through the spatially bidirectional light-guiding element 2, which can reduce the beam spacing and generate strong mutual coupling in the coherent coupling layer. The beam is then injected back into the array laser unit 1 through the spatially bidirectional light-guiding element 2 to obtain coherent array in-phase mode locking and realize the output of coherent array light. The device adopts a spatial light-guiding form, which has a simple and compact structure, good stability, and high damage threshold, and realizes bidirectional guidance of high-power beams.

[0044] In the above embodiment, preferably, a preset number of micro-hole arrays 22 are provided on the spatial bidirectional light guiding element 2 to guide the corresponding number of light beams.

[0045] Specifically, the number of micro-hole arrays 22 on the spatial bidirectional light guide element 2 can be set to one or more, respectively suitable for guiding a single beam or an array of beams.

[0046] In the above embodiments, preferably, the spatial bidirectional light-guiding thin layer 21 is made of a light-transmitting material, such as glass, crystal, or sapphire, and the thickness of each spatial bidirectional light-guiding thin layer 21 is the same as that of the material.

[0047] In the above embodiments, preferably, the micro-hole array 22 is circular or polygonal, and the micro-holes formed on the single-layer spatial bidirectional light-guiding thin layer 21 penetrate the thickness direction of the spatial bidirectional light-guiding thin layer 21, and the effective area of ​​the formed photonic crystal is the same as the output light spot of the array laser unit.

[0048] like Figure 3 and Figure 5As shown, in the above embodiment, preferably, the positions of the micro-aperture array 22 forming micro-apertures on the adjacent spatial bidirectional light-guiding thin layer 21 coincide or do not coincide. Specifically, the positions of the micro-aperture array 22 corresponding to the center position of the array laser unit 1 forming micro-apertures on the adjacent spatial bidirectional light-guiding thin layer 21 coincide, ensuring that the beam emitted from the center position remains at the center of the light-emitting surface. The positions of the micro-aperture array 22 corresponding to the non-center position of the array laser unit 1 forming micro-apertures on the adjacent spatial bidirectional light-guiding thin layer 21 do not coincide, and the offset does not exceed the diameter of the micro-aperture, so that the beam emitted from the non-center position of the array laser unit 1 is offset towards the center of the array.

[0049] In the above embodiments, preferably, the spatial bidirectional light-guiding thin layer 21 is provided with micropore arrays 22 of different arrangements and sizes, so that the spatial bidirectional light-guiding thin layer 21 can limit the light beam of a preset wavelength and a preset size.

[0050] In the above embodiments, preferably, the output laser of the array laser unit is a semiconductor laser, a fiber laser, or a solid-state laser.

[0051] Specifically, according to the coupling enhancement spatial bidirectional light guiding device for the coherent array laser disclosed in the above embodiments, one or more micro-aperture arrays 22 are provided in the spatial bidirectional light guiding element 2 for the number of beams to be guided. Specific embodiments are as follows:

[0052] Example 1

[0053] A set of micro-holes of a preset size are set at the center of the spatial bidirectional light guiding thin layer 21 to form a beam confinement area. According to the required light guiding path, micro-holes are set on the multi-layer spatial bidirectional light guiding thin layer 21 by aligning the micro-holes of the multi-layer spatial bidirectional light guiding thin layer 21 or by setting a preset offset for the micro-holes. The multi-layer spatial bidirectional light guiding thin layer 21 is then stacked and bonded so that the micro-holes on the multi-layer spatial bidirectional light guiding thin layer 21 can be stacked and combined to form a micro-hole array 22, forming a spatial bidirectional light guiding element 2 for a single beam.

[0054] During use, a single beam of light is incident on the spatial bidirectional light guiding element 2 through the micro-aperture array 22. In the micro-aperture array 22, the total internal reflection mechanism of the photonic crystal formed by the air holes of each spatial bidirectional light guiding thin layer 21 can confine the light, so that the beam of light is restricted in the micro-aperture array 22. Through the orientation of the micro-aperture array 22, the multi-layer spatial bidirectional light guiding thin layer 21 guides the beam of light to the target position step by step, realizing the spatial bidirectional light guiding of a single beam of light.

[0055] Specifically, such as Figure 2 As shown, a micro-aperture array 22 is disposed in the spatial bidirectional light guide element 2. For example... Figure 3As shown, during the upward light guiding process, the micro-apertures of the micro-aperture array 22 gradually shift to the right, allowing the light beam to be shifted to the right under the guidance of the micro-aperture array 22.

[0056] Example 2

[0057] Based on the spatial bidirectional light guiding element 2 for a single beam formed in Example 1, to construct a spatial bidirectional light guiding element 2 for multiple beams and guide multiple beams in parallel, multiple sets of micro-holes of a preset size need to be set at preset positions on the spatial bidirectional light guiding thin layer 21, with each set of micro-holes forming a beam confinement region. According to the required light guiding path for multiple beams, if no offset is required, the micro-holes are aligned; if the light guiding path needs to be gradually offset, a preset offset amount is set for the corresponding sets of micro-holes on adjacent spatial bidirectional light guiding thin layers 21. Different sets of micro-holes are set on multiple spatial bidirectional light guiding thin layers 21. These multiple spatial bidirectional light guiding thin layers 21 are then stacked and bonded, so that the different sets of micro-holes on these multiple spatial bidirectional light guiding thin layers 21 can be stacked and combined to form multiple sets of micro-hole arrays 22, forming a spatial bidirectional light guiding element 2 for multiple beams.

[0058] During use, multiple light beams are directed into the spatial bidirectional light guiding element 2 through a corresponding number of micro-aperture arrays 22. In different groups of micro-aperture arrays 22, the total internal reflection mechanism of the photonic crystal formed by the air holes of each spatial bidirectional light guiding thin layer 21 can confine the light, so that different light beams are confined in the corresponding micro-aperture arrays 22. According to the orientation of the micro-aperture arrays 22, the multi-layer spatial bidirectional light guiding thin layer 21 guides the corresponding light beams to the preset target positions, thereby realizing spatial light guiding of multiple light beams.

[0059] Specifically, such as Figure 4 As shown, the array laser unit 1 is a one-dimensional linear array of side-emitting semiconductor laser units. The unit laser wavelength is 850nm, the unit aperture is 20μm, the spacing is 50μm, and it is arranged in a 1×3 array.

[0060] like Figure 5 As shown, three sets of micro-aperture arrays 22 (left, center, and right) are arranged in the spatial bidirectional light guide element 2. The micro-aperture diameter is 1.5 μm, and the micro-aperture array is decagonal. The effective area of ​​the resulting photonic crystal is the same as the output spot of the array laser unit. Figure 6As shown, the spatial bidirectional light guiding element 2 is formed by 10 layers of spatial bidirectional light guiding thin layers 21. The lower end face of the figure is the light-incident surface of the spatial bidirectional light guiding element 2, and the upper end face is the light-exit surface of the spatial bidirectional light guiding element 2. The photonic crystal array formed by the micro-aperture array on the light-incident surface corresponds to the array laser unit 1. The corresponding groups of micro-apertures on adjacent spatial bidirectional light guiding thin layers 21 are set with a preset offset of 0.6 μm. In the upward light guiding process, the micro-aperture array on the left side is offset to the right, so that the beam can be offset to the right by 6 μm under the guidance of this group of micro-aperture arrays. In the upward light guiding process, the micro-aperture array in the middle group does not shift, so that the beam can be offset without shifting under the guidance of this group of micro-aperture arrays 22. In the upward light guiding process, the micro-aperture array on the right side is offset to the left by 6 μm, so that the beam can be offset to the left under the guidance of this group of micro-aperture arrays. The photonic crystal array formed by the micro-aperture array on the light-exit surface is concentrated towards the center of the array.

[0061] like Figure 7 As shown, the present invention also proposes a method for fabricating a coupling-enhanced spatial bidirectional light guiding device for a coherent array laser, applicable to the coupling-enhanced spatial bidirectional light guiding device for a coherent array laser as disclosed in any of the above embodiments, comprising:

[0062] Micropores were fabricated on a light-transmitting material using a mask and wet etching method to obtain a spatially bidirectional light-guiding thin layer 21;

[0063] After cleaning the spatial bidirectional light-guiding thin film 21, the size of the micropores is reduced by applying mechanical pressure;

[0064] The upper and lower surfaces of the spatial bidirectional light guiding thin layer 21 are polished, and the spatial bidirectional light guiding thin layer 21 is bonded sequentially according to the preset light guiding path and the corresponding position based on the micropores to form the spatial bidirectional light guiding element 2.

[0065] An array laser unit 1 is set at the input end of the spatial bidirectional light guide element 2, and a coherent array coupling layer 3 is set at the output end.

[0066] In this embodiment, the device employs a parallel fabrication method combining etching and mechanical pressing, achieving efficient fabrication and facilitating its industrial production and application in various lasers.

[0067] In the above embodiments, preferably, the spatial bidirectional light-guiding thin layer 21 is a thin sheet structure, the micropore array 22 is symmetrically distributed around the center of the spatial bidirectional light-guiding thin layer 21, and the mechanical pressure is uniformly applied from the side of the spatial bidirectional light-guiding thin layer 21 towards the center.

[0068] In the above embodiments, preferably, the chemical etching solution used in the wet etching process of the light-transmitting material includes at least one of acid and alkaline solutions such as phosphoric acid, hydrofluoric acid, and sodium hydroxide, and the etching temperature can be room temperature or heated.

[0069] Example 3

[0070] Based on the spatial bidirectional light guiding element 2 for a single beam formed in Example 1, to construct a spatial bidirectional light guiding element 2 for multiple beams and guide multiple beams in parallel, multiple sets of micro-holes of a preset size need to be set at preset positions on the spatial bidirectional light guiding thin layer 21, with each set of micro-holes forming a beam confinement region. According to the required light guiding path for multiple beams, if no offset is required, the micro-holes are aligned; if the light guiding path needs to be gradually offset, a preset offset amount is set for the corresponding sets of micro-holes on adjacent spatial bidirectional light guiding thin layers 21. Different sets of micro-holes are set on multiple spatial bidirectional light guiding thin layers 21. These multiple spatial bidirectional light guiding thin layers 21 are then stacked and bonded, so that the different sets of micro-holes on these multiple spatial bidirectional light guiding thin layers 21 can be stacked and combined to form multiple sets of micro-hole arrays 22, forming a spatial bidirectional light guiding element 2 for multiple beams.

[0071] During use, multiple light beams are directed into the spatial bidirectional light guiding element 2 through a corresponding number of micro-aperture arrays 22. In different groups of micro-aperture arrays 22, the total internal reflection mechanism of the photonic crystal formed by the air holes of each spatial bidirectional light guiding thin layer 21 can confine the light, so that different light beams are confined in the corresponding micro-aperture arrays 22. According to the orientation of the micro-aperture arrays 22, the multi-layer spatial bidirectional light guiding thin layer 21 guides the corresponding light beams to the preset target positions, thereby realizing spatial light guiding of multiple light beams.

[0072] Specifically, such as Figure 8 As shown, the array laser unit 1 is a two-dimensional linearly arranged fiber laser unit array with a unit laser wavelength of 1μm, a unit aperture of 20μm, a spacing of 125μm, and a 2×2 array arrangement.

[0073] like Figure 9 As shown, four sets of micro-aperture arrays 22 are arranged in the spatial bidirectional light guiding element 2. The micro-aperture diameter is 2μm, and the micro-aperture array is octagonal. The effective area of ​​the resulting photonic crystal is the same as the output spot of the array laser unit 1. Figure 10As shown, the spatial bidirectional light guiding element 2 is formed by 12 layers of spatial bidirectional light guiding thin layers 21. The lower end face of the figure is the light-incident surface of the spatial bidirectional light guiding element 2, and the upper end face is the light-exit surface of the spatial bidirectional light guiding element 2. The photonic crystal array formed by the micro-aperture array on the light-incident surface corresponds to the array laser unit 1. The corresponding groups of micro-apertures on adjacent spatial bidirectional light guiding thin layers 21 are set with a preset offset of 1μm. During the upward light guiding process, the micro-aperture array on the left side is offset to the right, so that the beam can be offset to the right by 12μm under the guidance of this group of micro-aperture array; during the upward light guiding process, the micro-aperture array on the right side is offset to the left by 12μm, so that the beam can be offset to the left under the guidance of this group of micro-aperture array. The photonic crystal array formed by the micro-aperture array on the light-exit surface is concentrated towards the center of the array.

[0074] like Figure 7 As shown, the present invention also proposes a method for fabricating a coupling-enhanced spatial bidirectional light guiding device for a coherent array laser, applicable to the coupling-enhanced spatial bidirectional light guiding device for a coherent array laser disclosed in any of the above embodiments, comprising:

[0075] Micropores were fabricated on a light-transmitting material using a mask and wet etching method to obtain a spatially bidirectional light-guiding thin layer 21;

[0076] After cleaning the spatial bidirectional light-guiding thin film 21, the size of the micropores is reduced by applying mechanical pressure;

[0077] The upper and lower surfaces of the spatial bidirectional light guiding thin layer 21 are polished, and the spatial bidirectional light guiding thin layer 21 is bonded sequentially according to the preset light guiding path and the corresponding position based on the micropores to form the spatial bidirectional light guiding element 2.

[0078] An array laser unit 1 is set at the input end of the spatial bidirectional light guide element 2, and a coherent array coupling layer 3 is set at the output end.

[0079] In this embodiment, the device employs a parallel fabrication method combining etching and mechanical pressing, achieving efficient fabrication and facilitating its industrial production and application in various lasers.

[0080] In the above embodiments, preferably, the spatial bidirectional light-guiding thin layer 21 is a thin sheet structure, the micropore array 22 is symmetrically distributed around the center of the spatial bidirectional light-guiding thin layer 21, and the mechanical pressure is uniformly applied from the side of the spatial bidirectional light-guiding thin layer 21 towards the center.

[0081] In the above embodiments, preferably, the chemical etching solution used in the wet etching process of the light-transmitting material includes at least one of acid and alkaline solutions such as phosphoric acid, hydrofluoric acid, and sodium hydroxide, and the etching temperature can be room temperature or heated.

[0082] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A spatial bidirectional light guiding device for coupling enhancement of a coherent array laser, characterized in that, It includes an array laser unit, a spatial bidirectional light guide element, and a coherent array coupling layer arranged sequentially from one side to the other. The laser input end of the spatial bidirectional light guide element corresponds to the laser output end of the array laser unit, the coherent array coupling layer is disposed at the output end of the spatial bidirectional light guide element, and the array laser unit, the spatial bidirectional light guide element and the coherent array coupling layer form a resonant cavity; The spatial bidirectional light guiding element is formed by multiple spatial bidirectional light guiding thin layers. A micro-aperture array is formed on the spatial bidirectional light guiding element. The micro-aperture array is perpendicular to the surface of the light guiding thin layer and adjacent to one end of the array laser unit. The photonic crystal array formed by the micro-aperture array corresponds to the array laser unit and is adjacent to one end of the coherent array coupling layer. The photonic crystal array formed by the micro-aperture array is concentrated towards the center of the array, and the photonic crystal array guides the laser beam. The coherent array coupling layer enables coherent coupling and reverse feedback of the array laser beam emitted from the array laser unit; The micro-aperture array is circular or polygonal. The micro-apertures formed on the single-layer spatial bidirectional light-guiding thin layer penetrate the thickness direction of the spatial bidirectional light-guiding thin layer. The effective area of ​​the photonic crystal formed is the same as the output spot of the array laser unit. The positions of the micro-hole arrays corresponding to the center position of the laser array unit coincide on the adjacent bidirectional light-guiding thin layer, while the positions of the micro-hole arrays corresponding to the non-center position of the laser array unit do not coincide on the adjacent bidirectional light-guiding thin layer, and the offset does not exceed the diameter of the micro-hole, so that the emitted beams from the non-center position of the laser array unit are all offset towards the center of the array.

2. The spatial bidirectional light guiding device according to claim 1, characterized in that, The spatial bidirectional light guide element guides the emitted beam of each laser unit in the array laser unit in both directions without changing the propagation direction of the emitted beam of the array laser unit.

3. The spatial bidirectional light guiding device according to claim 1, characterized in that, The spatial bidirectional light-guiding thin layer is made of a light-transmitting material, such as glass, crystal, or sapphire, and the thickness of each layer of the spatial bidirectional light-guiding thin layer is the same as that of the material.

4. The spatial bidirectional light guiding device according to claim 1, characterized in that, The spatial bidirectional light-guiding thin layer is provided with micropore arrays of different arrangements and sizes, which enables the spatial bidirectional light-guiding thin layer to confine light beams of preset wavelengths and sizes.

5. The spatial bidirectional light guiding device according to claim 1 or 2, characterized in that, The output laser of the array laser unit is a semiconductor laser, a fiber laser, or a solid-state laser.

6. A method for fabricating a coupling-enhanced spatial bidirectional light-guiding device for a coherent array laser, characterized in that, A coupling-enhancing spatial bidirectional light guiding device applied to a coherent array laser as described in any one of claims 1 to 5, comprising: Micropores were fabricated on a light-transmitting material using masking and wet etching methods to obtain a spatially bidirectional light-guiding thin layer. After cleaning the bidirectional light-guiding thin film, the size of the micropores is reduced by applying mechanical pressure; The upper and lower surfaces of the spatial bidirectional light-guiding thin layer are polished, and the spatial bidirectional light-guiding thin layer is bonded sequentially according to the preset light-guiding path and the corresponding position of the micropores to form a spatial bidirectional light-guiding element. An array laser unit is provided at the input end of the spatial bidirectional light guide element, and a coherent array coupling layer is provided at the output end.

7. The method for preparing the spatial light guiding device according to claim 6, characterized in that, The spatial bidirectional light-guiding thin layer has a sheet structure, and the micropore array is symmetrically distributed around the center of the spatial bidirectional light-guiding thin layer. Mechanical pressure is applied uniformly from the side of the spatial bidirectional light-guiding thin layer towards the center.

8. The method for preparing the space light guiding device according to claim 6, characterized in that, The chemical etching solution used in the wet etching process of the light-transmitting material includes at least one of phosphoric acid, hydrofluoric acid, and sodium hydroxide, and the etching temperature is room temperature or heated.

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