A magnetron sputtering vacuum coating machine

Abstract

The application discloses a magnetron sputtering vacuum coating machine and belongs to the technical field of vacuum coating machines. The magnetron sputtering vacuum coating machine comprises a machine body, a cabinet door hingedly connected to the front of the machine body, a connecting block fixedly connected to the left side and the right side of the top of the machine body, a sealing plate movably connected to the front of the connecting block through a pin shaft, the inner side of the sealing plate in contact with the surface of the cabinet door, an extension plate fixedly connected to the top of the sealing plate, a movable block fixedly connected to the top of the machine body, a swing rod movably connected to the surface of the movable block through a pin shaft, the outer side of the swing rod in contact with the surface of the extension plate, a support fixedly connected to the top of the machine body, an electric telescopic rod fixedly connected to the top of the support, and a transmission block fixedly connected to the output end of the electric telescopic rod and penetrating through the bottom of the support. The magnetron sputtering vacuum coating machine can improve the connection mode of the existing vacuum coating machine and the cabinet door, assist in closing through the hinged mode, prevent gaps from being easily generated between the cabinet door and the vacuum coating machine, and improve the gas pressure extraction effect. The magnetron sputtering vacuum coating machine realizes automatic control of the whole coating process, collects data through feedback, adjusts control data, and adjusts the product process to reduce human intervention in the coating process as much as possible, thereby improving the stability of the coating product quality, the higher automation degree also reduces the operation demand on coating operators, and the coating process is more efficiently completed.

Description

Technical Field

[0001] This invention belongs to the field of vacuum coating machine technology, specifically a magnetron sputtering vacuum coating machine. Background Technology

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be carried out under high vacuum. They include many types, such as vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, and many others.

[0003] Vacuum coating machines require sealing and vacuuming during use. However, the connection between existing vacuum coating machines and cabinet doors is relatively simple, mainly using hinges for closure. Gaps can easily appear between the cabinet door and the vacuum coating machine, affecting the air pressure extraction effect.

[0004] Therefore, the design and modification of the magnetron sputtering vacuum coating machine are required. Summary of the Invention

[0005] To address the problems mentioned in the background art, the present invention aims to provide a magnetron sputtering vacuum coating machine that improves the vacuum effect of the coating machine and solves the problem that the existing vacuum coating machine has a relatively simple connection method with the cabinet door, which is mainly closed by hinges. This results in gaps between the cabinet door and the vacuum coating machine, which affects the air pressure extraction effect.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a magnetron sputtering vacuum coating machine, comprising a machine body;

[0007] A cabinet door hinged to the front of the machine body; the machine body (1) includes a coating chamber, a base fixedly connected to the bottom of the coating chamber, and a door hinged to the side of the coating chamber. A door closer is fixedly connected to the right side of the coating chamber for closing the door. The magnetron sputtering vacuum coating machine also includes:

[0008] A target sputtering mechanism for sputtering coating targets includes several magnetron sputtering targets. Each magnetron sputtering target includes a rotating cathode and a target material extending from the top of the vacuum coating machine into the coating machine chamber and its door. Several groups of magnetron sputtering targets are provided: two groups are positioned at the center of the coating machine chamber, two groups are symmetrically positioned on the sides of the coating machine chamber, and one group is positioned inside the door. An object holding mechanism is also provided at the bottom of the coating machine chamber for holding the objects to be coated. This mechanism includes a workpiece base rotatably connected to the bottom of the coating machine chamber. The rotating part of the workpiece base is equipped with a transmission component for controlling the rotation of the workpiece base. Several lens rotating frames are arranged on the top outer edge of the workpiece base. Each lens rotating frame is equipped with a rotation component for controlling the rotation of the lens rotating frame around its own axis.

[0009] The vacuum extraction mechanism is connected to the side of the coating machine away from the chamber door and is used to perform vacuuming treatment inside the coating machine.

[0010] Connecting blocks are fixedly connected to the left and right sides of the top of the machine body. A sealing plate is movably connected to the front of the connecting block via a pin. The inner side of the sealing plate contacts the surface of the cabinet door. An extension plate is fixedly connected to the top of the sealing plate. A movable block is fixedly connected to the top of the machine body. A swing rod is movably connected to the surface of the movable block via a pin. The outer side of the swing rod contacts the surface of the extension plate. A bracket is fixedly connected to the top of the machine body. An electric telescopic rod is fixedly connected to the top of the bracket. The output end of the electric telescopic rod extends through to the bottom of the bracket and is fixedly connected to a transmission block. A sliding rod located inside the swing rod is fixedly connected to the front of the transmission block. The sliding rod is slidably connected to the swing rod.

[0011] In a preferred embodiment of the present invention, a guide rod is fixedly connected to the top of the transmission block. The guide rod is located on both sides of the electric telescopic rod. The top end of the guide rod passes through the bracket and extends to the top of the bracket. The guide rod is slidably connected to the bracket.

[0012] As a preferred embodiment of the present invention, a rubber pad is fixedly connected to the inner side of the sealing plate, and the side of the rubber pad away from the sealing plate contacts the surface of the cabinet door, and the rubber pad is elastic.

[0013] As a preferred embodiment of the present invention, a vertical plate is fixedly connected to the top of the body, the vertical plate is located outside the connecting block, and a spring plate is fixedly connected to the inner side of the vertical plate. The side of the spring plate away from the vertical plate contacts the outer side of the extension plate, and the spring plate is elastic.

[0014] In a preferred embodiment of the present invention, the end of the swing arm away from the movable block is movably connected to a roller via a pin, and the outer surface of the roller contacts the inner side of the extension plate.

[0015] As a preferred embodiment of the present invention, a support plate is fixedly connected to the front of the body, and the side of the support plate away from the body extends to the front of the movable block. The support plate and the swing rod are movably connected by a pin.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] 1. This invention improves the connection method between existing vacuum coating machines and cabinet doors by using a hinged connection for closure, preventing gaps between the cabinet door and the vacuum coating machine and improving air pressure extraction efficiency. This invention's magnetron sputtering vacuum coating machine achieves automated control of the entire coating process. Through data feedback and adjustment of control data and product processes, it minimizes human intervention in the coating process, thereby improving the stability of coated product quality. The higher degree of automation also reduces the operational requirements for coating personnel, enabling more efficient completion of the coating process.

[0018] 2. By setting a guide rod, the present invention can limit the movement of the transmission block, thereby improving the sliding stability of the transmission block. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the present invention;

[0020] Figure 2 This is a schematic front view of a partial structure of the present invention;

[0021] Figure 3 This is a three-dimensional schematic diagram of a partial structure of the present invention.

[0022] In the diagram: 1. Body; 2. Cabinet door; 3. Connecting block; 4. Sealing plate; 5. Extension plate; 6. Movable block; 7. Swing rod; 8. Bracket; 9. Electric telescopic rod; 10. Transmission block; 11. Slide rod; 12. Guide rod; 13. Rubber pad; 14. Vertical plate; 15. Spring plate; 16. Roller; 17. Support plate. Detailed Implementation

[0023] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0024] like Figures 1 to 3 As shown, the present invention provides a magnetron sputtering vacuum coating machine, which includes a machine body 1;

[0025] A cabinet door 2 is hinged to the front of the machine body 1; the machine body 1 includes a coating chamber, a base fixedly connected to the bottom of the coating chamber, and a door hinged to the side of the coating chamber. A door closer is fixedly connected to the right side of the coating chamber for closing the door. The magnetron sputtering vacuum coating machine also includes a target sputtering mechanism for sputtering coating targets. The target sputtering mechanism includes several magnetron targets. Each magnetron target includes a rotating cathode and a target material that extend from the top of the vacuum coating machine into the coating chamber and the door. Several groups of magnetron targets are configured. The coating machine chamber has two sets of magnetically controlled targets at its center, two sets of magnetically controlled targets symmetrically arranged on the sides of the chamber, and one set of magnetically controlled targets on the inside of the door; and an object holding mechanism located at the bottom of the coating machine chamber for holding the objects to be coated. The object holding mechanism includes a workpiece base rotatably connected to the bottom of the coating machine chamber, a transmission component on the rotating part of the workpiece base for controlling its rotation, and several lens rotating frames arranged on the top outer edge of the workpiece base. Each lens rotating frame has a self-rotation component for controlling its rotation around its own axis; and...

[0026] The vacuum extraction mechanism is located on the side of the coating machine furthest from the chamber door and is used to perform vacuum extraction inside the coating machine.

[0027] Connecting blocks 3 are fixedly connected to the left and right sides of the top of the body 1. A sealing plate 4 is movably connected to the front of the connecting block 3 via a pin. The inner side of the sealing plate 4 contacts the surface of the cabinet door 2. An extension plate 5 is fixedly connected to the top of the sealing plate 4. A movable block 6 is fixedly connected to the top of the body 1. A swing rod 7 is movably connected to the surface of the movable block 6 via a pin. The outer side of the swing rod 7 contacts the surface of the extension plate 5. A bracket 8 is fixedly connected to the top of the body 1. An electric telescopic rod 9 is fixedly connected to the top of the bracket 8. The output end of the electric telescopic rod 9 extends through to the bottom of the bracket 8 and is fixedly connected to a transmission block 10. A sliding rod 11 located inside the swing rod 7 is fixedly connected to the front of the transmission block 10. The sliding rod 11 is slidably connected to the swing rod 7.

[0028] refer to Figure 2 A guide rod 12 is fixedly connected to the top of the transmission block 10. The guide rod 12 is located on both sides of the electric telescopic rod 9. The top end of the guide rod 12 passes through the bracket 8 and extends to the top of the bracket 8. The guide rod 12 is slidably connected to the bracket 8.

[0029] As a technical optimization of the present invention, by setting the guide rod 12, the transmission block 10 can be limited, thereby improving the sliding stability of the transmission block 10.

[0030] refer to Figure 2 A rubber pad 13 is fixedly connected to the inner side of the sealing plate 4. The side of the rubber pad 13 away from the sealing plate 4 contacts the surface of the cabinet door 2. The rubber pad 13 is elastic.

[0031] As a technical optimization of the present invention, by setting the rubber gasket 13, the sealing effect of the sealing plate 4 can be improved, and the connection sealing between the sealing plate 4 and the cabinet door 2 can be improved.

[0032] refer to Figure 2 A vertical plate 14 is fixedly connected to the top of the body 1. The vertical plate 14 is located outside the connecting block 3. A spring plate 15 is fixedly connected to the inner side of the vertical plate 14. The side of the spring plate 15 away from the vertical plate 14 contacts the outer side of the extension plate 5. The spring plate 15 is elastic.

[0033] As a technical optimization of the present invention, by setting the upright plate 14 and the spring plate 15, the sealing plate 4 can be supported, so that the sealing plate 4 has the effect of elastic reset.

[0034] refer to Figure 2 The end of the swing arm 7 away from the movable block 6 is movably connected to a roller 16 via a pin, and the outer surface of the roller 16 contacts the inner side of the extension plate 5.

[0035] As a technical optimization of the present invention, by setting the roller 16, the swing arm 7 can be protected, and the wear of the swing arm 7 and the extension plate 5 during contact friction can be reduced.

[0036] refer to Figure 2 A support plate 17 is fixedly connected to the front of the body 1. The side of the support plate 17 away from the body 1 extends to the front of the movable block 6. The support plate 17 and the swing rod 7 are movably connected by a pin.

[0037] As a technical optimization of the present invention, by setting the support plate 17, the swing arm 7 can be supported, thereby increasing the contact area between the swing arm 7 and the body 1.

[0038] The electrical components are controlled by the control cabinet. The RP mechanical pump, MP Roots pump, and molecular pump in the vacuum extraction mechanism are turned on to create a vacuum environment inside the coating machine. The surface of the objects to be coated inside the coating machine is cleaned by the cleaning target. Then, the drive unit and sputtering power supply are run. The sputtering power supply controls the target material to sputter onto the objects. The cabinet door 2 is connected and closed to the machine body 1. Then, the electric telescopic rod 9 is started. The output end of the electric telescopic rod 9 drives the transmission block 10 to move vertically. During the movement, the transmission block 10 drives the slide rod 11 to slide inside the swing rod 7. The swing rod 7 is squeezed and swings around the pin inside the movable block 6. During the swing, the swing rod 7 can squeeze the extension plate 5. The sealing plate 4 connected to the extension plate 5 swings around the pin inside the connecting block 3. When the rubber pad 13 on the inner side of the sealing plate 4 contacts the surface of the cabinet door 2, it achieves the effect of assisting the connection between the cabinet door 2 and the machine body 1.

[0039] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A magnetron sputtering vacuum coating machine, comprising a machine body (1); a cabinet door (2) hinged on the front of the machine body (1); the machine body (1) comprises a coating chamber and a base fixedly connected to the bottom of the coating chamber, and a chamber door hingedly connected to the side of the coating chamber, a door closer is fixedly connected to the right side of the coating chamber, and the door closer is used for closing the chamber door, the magnetron sputtering vacuum coating machine further comprises: a target sputtering mechanism for sputtering of a coating target, the target sputtering mechanism comprises a rotating cathode and a target material installed from the top of the vacuum coating machine to the inside of the coating chamber and the chamber door, and a plurality of magnetron targets; the magnetron targets are arranged in groups, two groups of magnetron targets are arranged in the center of the coating chamber, two groups of magnetron targets are symmetrically arranged on the inside of the coating chamber, and one group of magnetron targets is arranged on the inside of the cabinet door; and an object holding mechanism arranged at the bottom of the coating chamber for holding of a coating object, the object holding mechanism comprises a workpiece chassis rotatably connected to the bottom of the coating chamber, a transmission assembly arranged at the rotating position of the workpiece chassis for controlling rotation of the workpiece chassis, and a plurality of lens carriages arranged at the outer edge of the top of the workpiece chassis, the lens carriages are provided with a self-rotation assembly for controlling rotation of the lens carriages around their own axes; and a vacuum extraction mechanism arranged in communication on the side of the coating chamber away from the chamber door for vacuumizing the inside of the coating chamber. Characterized in that: the left and right sides of the top of the machine body (1) are fixedly connected with connecting blocks (3), the front of the connecting block (3) is movably connected with a sealing plate (4) through a pin shaft, the inner side of the sealing plate (4) is in contact with the surface of the cabinet door (2), the top of the sealing plate (4) is fixedly connected with an extension plate (5), the top of the machine body (1) is fixedly connected with a movable block (6), the surface of the movable block (6) is movably connected with a swing rod (7) through a pin shaft, the outer side of the swing rod (7) is in contact with the surface of the extension plate (5), the top of the machine body (1) is fixedly connected with a bracket (8), the top of the bracket (8) is fixedly connected with an electric telescopic rod (9), the output end of the electric telescopic rod (9) penetrates to the bottom of the bracket (8) and is fixedly connected with a transmission block (10), the front of the transmission block (10) is fixedly connected with a sliding rod (11) located in the inside of the swing rod (7), and the sliding rod (11) is slidably connected with the swing rod (7).

2. A magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The top of the transmission block (10) is fixedly connected with a guide rod (12), the guide rod (12) is located on both sides of the electric telescopic rod (9), the top end of the guide rod (12) penetrates through the bracket (8) and extends to the top of the bracket (8), and the guide rod (12) is slidably connected with the bracket (8).

3. A magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The inner side of the sealing plate (4) is fixedly connected with a rubber pad (13), the side of the rubber pad (13) away from the sealing plate (4) is in contact with the surface of the cabinet door (2), and the rubber pad (13) has elasticity.

4. A magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The top of the machine body (1) is fixedly connected with a vertical plate (14), the vertical plate (14) is located outside the connecting block (3), the inner side of the vertical plate (14) is fixedly connected with an elastic plate (15), the side, away from the vertical plate (14), of the elastic plate (15) is in contact with the outer side of the extension plate (5), and the elastic plate (15) has elasticity.

5. A magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The end, away from the movable block (6), of the swing rod (7) is movably connected with a roller (16) through a pin shaft, and the outer surface of the roller (16) is in contact with the inner side of the extension plate (5).

6. A magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The front of the machine body (1) is fixedly connected with a supporting plate (17), the side, away from the machine body (1), of the supporting plate (17) extends to the front of the movable block (6), and the supporting plate (17) is movably connected with the swing rod (7) through a pin shaft.

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