Drying device and substrate drying equipment

Abstract

The present application relates to a drying device, comprising a swing mechanism, a driving mechanism, a linkage and a drying mechanism, wherein the swing mechanism comprises a supporting assembly and a fixing member, wherein the fixing member has a mounting position for mounting an object to be dried, and the fixing member is rotatably mounted on the supporting assembly; the driving mechanism is arranged on one side of the swing mechanism; the drying mechanism and the swing mechanism are spaced apart; the linkage is used for transmission connection between the driving mechanism and the fixing member; wherein the linkage moves back and forth in a straight line in one direction under the drive of the driving mechanism, driving the fixing member to swing back and forth relative to the supporting assembly, thereby making the object to be dried uniformly during the hot drying process, increasing the contact area between the object to be dried on the supporting assembly and the air supply of the fan assembly, improving the hot drying efficiency, and shortening the drying time.

Description

Technical Field

[0001] The present application relates to the technical field of substrate processing, and in particular to a drying device and substrate drying equipment. Background Art

[0002] As the basic material for manufacturing PCBs, the substrate itself will contain moisture or absorb moisture from the outside during actual production and processing operations. The moisture will affect the performance of the substrate and even cause damage to the substrate, so it needs to be dried and cooled.

[0003] With the development of packaging substrate technology and the substantial increase in demand for substrates, higher requirements are placed on the drying efficiency and drying effect of the substrates.

[0004] In the related art, the substrate is often placed directly in a drying oven for drying, resulting in uneven drying of the substrate surface, poor drying effect, and long drying time. Summary of the invention

[0005] Based on this, it is necessary to provide a drying device and substrate drying equipment to address the problems of uneven drying of the substrate surface, poor drying effect, and long drying time.

[0006] A drying device, characterized in that it comprises:

[0007] The swing mechanism comprises a support assembly and a fixing member, wherein the fixing member has a mounting position for mounting the object to be dried, and the fixing member is rotatably mounted on the support assembly;

[0008] A driving mechanism, arranged on one side of the swing mechanism;

[0009] A linkage member, drivingly connecting the driving mechanism and the fixing member; and

[0010] A drying mechanism, spaced apart from the swing mechanism;

[0011] Wherein, the linkage member is driven by the driving mechanism to reciprocate linearly in one direction, driving the fixing member to swing back and forth relative to the supporting assembly.

[0012] In one embodiment, the support assembly includes a first rotating shaft plate and a second rotating shaft plate, the first rotating shaft plate and the second rotating shaft plate are spaced apart, and the fixing member is rotatably installed between the first rotating shaft plate and the second rotating shaft plate.

[0013] In one embodiment, the first rotating shaft plate and the second rotating shaft plate extend longitudinally in one direction, there are a plurality of fixing members, and all the fixing members are arranged at intervals in the extending direction of the first rotating shaft plate and the second rotating shaft plate.

[0014] In one embodiment, the fixing member includes a fixing portion, a first rotating portion, a second rotating portion and a connecting portion, the mounting position is formed on the fixing portion, the first rotating portion and the second rotating portion are respectively protruded at opposite ends of the fixing portion, the first rotating portion is rotatably inserted in the first rotating shaft plate, and the second rotating portion is rotatably inserted in the second rotating shaft plate.

[0015] In one embodiment, the fixing member also includes a connecting portion, the first rotating shaft plate is provided with an arc-shaped guide hole, the connecting portion is protruded from one end of the fixing portion and passes through the arc-shaped guide hole to be connected to the linkage member, and the connecting portion reciprocates in the arc-shaped guide hole driven by the linkage member.

[0016] In one embodiment, the driving mechanism includes a power part and a transmission part, and the power part is transmission-connected to the linkage member through the transmission part;

[0017] Wherein, the transmission part is used to convert the torque provided by the power part into the power for the reciprocating motion of the linkage part.

[0018] In one of the embodiments, the transmission part includes a reciprocating screw and a reciprocating seat, the reciprocating screw is connected to the power part, and the reciprocating seat is movably disposed on the reciprocating screw and connected to the linkage member.

[0019] In one of the embodiments, the drying mechanism includes at least one fan and at least one heat pipe, and the fan and the heat pipe are spaced apart.

[0020] According to another aspect of the present application, a substrate drying device is provided, including a box body, wherein a driving area and a drying area are provided in the box body, the driving mechanism is located in the driving area, and the swing mechanism and the drying mechanism are located in the drying area.

[0021] In one of the embodiments, the drying area is provided with a negative pressure vacuum port.

[0022] The above-mentioned drying device has a mounting position for mounting the workpiece to be dried on the fixing part, and the fixing part is rotatably mounted on the supporting assembly. In addition, a linkage part is provided which moves back and forth in a straight line in one direction under the drive of the driving mechanism, driving the fixing part to swing back and forth relative to the supporting assembly, so that the workpiece to be dried is evenly dried during the hot drying process, increasing the contact area between the substrate on the supporting assembly and the air supply of the fan assembly, improving the hot drying efficiency, and shortening the drying time. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A top view of a substrate drying device provided in one embodiment of the present application.

[0024] Figure 2A schematic diagram of a swing mechanism provided in one embodiment of the present application.

[0025] Figure 3 A partial schematic diagram of a swing mechanism provided in one embodiment of the present application.

[0026] Figure 4 A schematic diagram of a fixing member of a swing mechanism provided in an embodiment of the present application.

[0027] Figure 5 A front view of a substrate drying device provided in one embodiment of the present application.

[0028] Figure 6 A side view of a substrate drying device provided in one embodiment of the present application.

[0029] Reference numerals:

[0030] 1. Box body; 11. Baffle; 12. Linkage; 2. Driving area; 21. Driving mechanism; 211. Power unit; 2111. Motor; 2112. Synchronous belt; 2113. Synchronous pulley; 212. Transmission unit; 2121. Reciprocating screw rod; 2122. Reciprocating seat; 2123. Screw rod seat; 3. Drying area; 31. Swinging mechanism; 311. Support assembly; 3111. First rotating shaft plate; 3112. Second rotating shaft plate ; 3113, arc-shaped guide hole; 312, fixing piece; 3121, first fixing frame; 3122, second fixing frame; 3123, third fixing frame; 3124, first rotating part; 3125, second rotating part; 3126, connecting part; 3127, clamping part; 32, drying mechanism; 321, fan; 322, heat pipe; 323, heat pipe fixing seat; 33, negative pressure vacuum port; 4, substrate; 5, substrate drying equipment. DETAILED DESCRIPTION

[0031] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0032] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0034] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0036] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0037] See also Figure 1 , Figure 5 , Figure 6 , Figure 1 A schematic diagram of a substrate drying device 5 in an embodiment of the present application is shown. The substrate drying device 5 provided in an embodiment of the present application includes a box body 1 and a drying device. The drying device is at least partially installed in the box body 1. The substrate can be placed in the drying device in the box body 1 manually or automatically, and the drying device can dry the substrate 4.

[0038] Specifically, the box body 1 is a hollow shell structure, and the length direction of the box body is the first direction ( Figure 1 The width direction is the second direction ( Figure 1 Y direction), the height direction is the third direction ( Figure 6 Z direction). A driving area 2 and a drying area 3 are arranged adjacent to each other in the first direction in the box body 1, and a baffle 11 is provided between the driving area 2 and the drying area 3 to physically separate the two and respectively accommodate different parts of the drying device, so that the heat in the drying area 3 is more concentrated and the efficiency of thermal drying is improved. As a preferred embodiment, a negative pressure vacuum port 33 is provided in the drying area 3 to extract water vapor during thermal drying.

[0039] The drying device includes a swing mechanism 31, a driving mechanism 21, a linkage member 12 and a drying mechanism 32. The swing mechanism 31 is located in the drying area 3 and includes a support assembly 311 and a fixing member 312. The fixing member 312 has a mounting position for mounting the substrate 4, and the fixing member 312 is rotatably mounted on the support assembly 311. The driving mechanism 21 is located in the driving area 2 and is located on one side of the swing mechanism 31. One end of the linkage member 12 is located in the drying area 3, and the other end of the linkage member 12 is located in the driving area 2, thereby drivingly connecting the driving mechanism 21 and the fixing member 312. The drying mechanism 32 is at least partially located in the drying area and is spaced apart from the swing mechanism 31.

[0040] The linkage member 12 moves back and forth in a straight line in one direction under the drive of the driving mechanism 21, driving the swing mechanism 31 to swing back and forth in the same direction, so that the surface of the substrate 4 is dried evenly, the drying efficiency of the surface of the substrate 4 is improved, and the drying time is shortened.

[0041] Specifically, in some embodiments, see Figure 2 , Figure 3 , Figure 4 The swing mechanism 31 includes a supporting assembly 311 and a fixing member 312. One end of the supporting assembly 311 is fixedly connected to the housing 1. The fixing member 312 has a mounting position for mounting the object to be dried, and the fixing member 312 is rotatably mounted on the supporting assembly 311. The object to be dried can rotate on the supporting assembly 311 together with the fixing member 312.

[0042] Preferably, the support assembly 311 includes a first rotating shaft plate 3111 and a second rotating shaft plate 3112, and the first rotating shaft plate 3111 and the second rotating shaft plate 3112 are arranged at intervals in the third direction, and the fixing member 312 is rotatably installed between the first rotating shaft plate 3111 and the second rotating shaft plate 3112. In some embodiments, the first rotating shaft plate 3111 and the second rotating shaft plate 3112 extend longitudinally along the first direction, and both ends of the first rotating shaft plate 3111 and the second rotating shaft plate 3112 in the length direction are provided with mounting sections, and the mounting sections are arranged in contact with the box body 1, and the first rotating shaft plate 3111 and the second rotating shaft plate 3112 are fixed to the box body 1. Multiple fixing members 312 are arranged at intervals in the extension direction of the first rotating shaft plate 3111 and the second rotating shaft plate 3112, so that multiple items to be dried can be dried at one time, and multiple items to be dried can be synchronously deflected left and right, effectively improving the drying efficiency.

[0043] Preferably, the fixing member 312 includes a fixing portion, a first rotating portion 3124, a second rotating portion 3125 and a connecting portion 3126. The first rotating portion 3124 and the second rotating portion 3125 are respectively convexly disposed at opposite ends of the fixing portion, the first rotating portion 3124 is rotatably inserted in the first rotating shaft plate 3111, the second rotating portion 3125 is rotatably inserted in the second rotating shaft plate 3112, and an arc-shaped guide hole 3113 is provided on the first rotating shaft plate 3111, the connecting portion 3126 is convexly disposed at one end of the fixing portion and passes through the arc-shaped guide hole 3113 to be connected to the linkage member 12, and the connecting portion 3126 reciprocates in the arc-shaped guide hole 3113 driven by the linkage member 12. When the connecting portion 3126 is at one end of the arc-shaped guide hole 3113, the fixing member 312 and the piece to be dried are deflected at a certain angle. At this time, due to the deflection of the angle of the piece to be dried, the heat transferred from the drying mechanism 32 to the piece to be dried can be in contact with the piece to be dried more. At the same time, the pieces to be dried can also reflect heat from each other, so that the heat is fully in contact with the piece to be dried.

[0044] In some embodiments, the curvature of the arc-shaped guide hole 3113 can be set in a targeted manner according to actual work requirements and the characteristics of the object to be dried. When the degree of drying of the object to be dried is uneven at various places on the surface, it is necessary to carry out targeted drying of the key areas with higher humidity. At this time, the curvature of the arc-shaped guide hole 3113 can be adjusted so that the hot air delivered by the drying mechanism 32 can be accurately and repeatedly dried in the key areas, thereby improving the overall drying efficiency and shortening the drying time.

[0045] Further, in some embodiments, the fixing portion includes a first fixing frame 3121 and a second fixing frame 3122, which are arranged at opposite ends of the fixing portion, and a mounting position is formed between the first fixing frame 3121 and the second fixing frame 3122 for mounting the items to be dried. The first rotating portion 3124 and the connecting portion 3126 are convexly arranged on a side of the first fixing frame 3121 away from the mounting position, and the second rotating portion 3125 is convexly arranged on a side of the second fixing frame 3122 away from the mounting position.

[0046] In some embodiments, the object to be dried is a substrate 4, and the first fixing frame 3121 and the second fixing frame 3122 can be a longitudinally extending rod-shaped member or a plate-shaped member, and on the side close to the aforementioned installation position, the first fixing frame 3121 and the second fixing frame 3122 are provided with a clamping portion 3127. In some embodiments, the clamping portion 3127 is a clamping groove, which is convexly provided on the first fixing frame 3121 and the second fixing frame 3122. It can be understood that, in some embodiments, the aforementioned clamping groove can also be directly opened on the first fixing frame 3121 and the second fixing frame.

[0047] Preferably, the fixing part also includes a third fixing frame 3123, the two ends of which are respectively connected to the first fixing frame 3121 and the second fixing frame 3122, and a clamping portion 3127 is also provided on the side close to the installation position, so as to further increase the stability of the workpiece to be dried on the fixing part, and prevent the workpiece to be dried from falling off the fixing part due to interference from factors such as wind blowing or swinging during the operation of the equipment, causing damage to the workpiece to be dried and affecting work efficiency.

[0048] In some embodiments, see Figure 1 , Figure 5 , Figure 6 The drying mechanism 32 includes at least one fan 321 and at least one heat pipe 322. The fan 321 is arranged on the fan fixing plate of the side wall of the box body 1. Heat pipe fixing seats 323 are provided at both ends of the heat pipe 322. The heat pipe fixing seats 323 at both ends of the heat pipe 322 are respectively fixedly connected to the top and bottom of the box body 1. The above-mentioned fan 321 and the heat pipe 322 are spaced apart in a direction perpendicular to the fan 321 fixing plate.

[0049] In some embodiments, the drying mechanism 32 includes a plurality of fans 321 and a plurality of heat pipes 322, and the plurality of fans 321 and the plurality of heat pipes 322 are arranged at intervals along the direction of the reciprocating motion of the fixing member 312. The plurality of fans 321 form a fan 321 group, and the plurality of heat pipes 322 form a heat pipe 322 group. The fan 321 group and the heat pipe 322 group are arranged at intervals. When cooling is required after drying is completed, the fan 321 can be turned on individually to achieve efficient cooling.

[0050] In some embodiments, the driving mechanism 21 includes a power unit 211 and a transmission unit 212 , wherein the power unit 211 is transmission-connected to the linkage 12 via the transmission unit 212 ; wherein the transmission unit 212 is used to convert the torque provided by the power unit 211 into power for the reciprocating motion of the linkage 12 .

[0051] Preferably, the transmission part 212 includes a reciprocating screw 2121 and a reciprocating seat 2122, the reciprocating screw 2121 is connected to the power part 211, the reciprocating seat 2122 is movably arranged on the reciprocating screw 2121 and connected to the linkage 12, and the reciprocating screw 2121 is fixed in the box 1 through the screw seat 2123. In some embodiments, the reciprocating seat 2122 is connected to the linkage 12 through a fisheye floating joint, which can maintain the stable operation of the equipment, reduce the swing error in the process of converting rotation into reciprocating linear motion, and effectively extend the service life of the relevant mechanism.

[0052] Preferably, the power unit 211 includes a stepper motor 2111, a synchronous belt 2112 and a synchronous pulley 2113. The stepper motor 2111 is fixed to the driving area 2 through a stepper motor 2111 seat, and is spaced apart from the transmission unit 212. Synchronous pulleys 2113 are respectively provided on the same side of the reciprocating screw rod 2121 and the stepper motor 2111. The aforementioned synchronous pulley 2113 smoothly transmits the power of the motor 2111 to the reciprocating screw rod 2121 through the synchronous belt 2112, wherein the length of the transmission belt can be adjusted and arranged according to actual needs to achieve an optimized design of the structure of the drying equipment box 1.

[0053] In some embodiments, the power unit 211 includes a stepper motor 2111 and a gear pair, and gears are respectively provided on the same side of the reciprocating screw rod 2121 and the stepper motor 2111, and the power of the stepper motor 2111 is transmitted to the reciprocating screw rod 2121 through gear transmission. At this time, the gear transmission replaces the belt transmission, which can further save the space of the box, meet the needs of actual production, and make the entire device occupy less space.

[0054] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A drying device, characterized in that: include: The swing mechanism comprises a support assembly and a fixing member, wherein the fixing member has a mounting position for mounting the object to be dried, and the fixing member is rotatably mounted on the support assembly; A driving mechanism, arranged on one side of the swing mechanism; A linkage member, transmission-connecting the driving mechanism and the fixing member; as well as A drying mechanism, spaced apart from the swing mechanism; wherein the linkage member is driven by the driving mechanism to move linearly reciprocatingly in one direction, driving the fixing member to swing reciprocatingly relative to the support assembly; the support assembly includes a first rotating shaft plate and a second rotating shaft plate, the first rotating shaft plate and the second rotating shaft plate are arranged at an interval, the fixing member also includes a fixing portion and a connecting portion, the mounting position is formed on the fixing portion, the first rotating shaft plate has an arc guide hole, the connecting portion is protruding at one end of the fixing portion and passes through the arc guide hole to be connected to the linkage member, and the connecting portion reciprocates in the arc guide hole under the drive of the linkage member, and the fixing member is multiple, all of the fixing members are arranged at intervals in the extending direction of the first rotating shaft plate and the second rotating shaft plate, and there is a reflection spacing for reflecting heat between adjacent fixing members, and the curvature of the arc guide hole is adjustable.

2. The drying device according to claim 1, characterized in that: The first rotating shaft plate and the second rotating shaft plate extend longitudinally along one direction.

3. The drying device according to claim 1, characterized in that: The fixing member includes a first rotating part and a second rotating part, the first rotating part and the second rotating part are respectively protruded at opposite ends of the fixing part, the first rotating part is rotatably inserted in the first rotating shaft plate, and the second rotating part is rotatably inserted in the second rotating shaft plate.

4. The drying device according to claim 1, characterized in that: The driving mechanism comprises a power part and a transmission part, and the power part is transmission-connected with the linkage member through the transmission part; Wherein, the transmission part is used to convert the torque provided by the power part into the power for the reciprocating motion of the linkage part.

5. The drying device according to claim 4, characterized in that: The transmission part comprises a reciprocating screw and a reciprocating seat, wherein the reciprocating screw is connected to the power part, and the reciprocating seat is movably arranged on the reciprocating screw and connected to the linkage member.

6. The drying device according to claim 1, characterized in that: The drying mechanism comprises at least one fan and at least one heat pipe, and any one of the heat pipes is arranged between one of the fans and the swing mechanism.

7. A substrate drying device, characterized in that: The drying device comprises the drying device according to any one of claims 1 to 6.

8. The substrate drying device according to claim 7, characterized in that: The substrate drying equipment also includes: The driving mechanism, the swinging mechanism and the drying mechanism are located in the box.

9. The substrate drying device according to claim 8, characterized in that: A driving area and a drying area are provided in the box body, the driving mechanism is located in the driving area, and the swing mechanism and the drying mechanism are located in the drying area.

10. The substrate drying device according to claim 9, characterized in that: The drying area is provided with a negative pressure vacuum port.

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