A thermal wave chiral fluorescence confocal microscopic measuring device based on super-structure surface

Abstract

The application discloses a kind of based on superstructure surface thermal wave dark field fluorescence confocal microscopic measuring device, including thermal wave pump light generation module, linear vibration probe light generation module, illumination module and signal detection module;Thermal wave pump light generation module and the linear vibration probe light generation module generate thermal wave pump light and fluorescence excitation light respectively;The illumination module is used to receive the thermal wave pump light and the fluorescence excitation light, forms focused spot on the sample to be measured, and generates thermal wave fluorescence signal;Wherein, the thermal wave fluorescence signal includes left-handed circularly polarized light signal and right-handed circularly polarized light signal;The signal detection module obtains the signal value of left-handed circularly polarized light signal and right-handed circularly polarized light signal respectively, and calculates chiral information;The application can be used for thermal wave fluorescence imaging detection, and the detection of absorption defect has higher imaging sensitivity, and absorption pollution defect can be detected.

Description

Technical Field

[0001] This invention relates to the field of optical precision measurement technology, and more specifically to a thermal wave chiral fluorescence confocal microscopy measurement device based on a metastructured surface. Background Technology

[0002] High-performance optical components and materials have wide applications in precision instrument manufacturing and major optical engineering research, forming the foundation of optical system performance. Therefore, high-resolution precision detection of the mechanical structure, chemical composition, and lattice structure defects of optical components and materials at the surface and subsurface levels is crucial. In particular, the chiral structure of defects in optical components can severely affect the optical field distribution of the incident beam, reducing the beam quality.

[0003] Dark-field confocal microscopy, with its advantages of excellent optical tomography capabilities, high imaging resolution, and high imaging contrast due to the dark background, has become an important method for non-destructive three-dimensional inspection of optical components. Conventional optical dark-field confocal microscopy can only detect geometric defects in samples, such as scratches and bubbles, but it cannot obtain other physicochemical properties of the defects. To more comprehensively characterize the defect characteristics of optical components and materials, and to more accurately identify and classify defects, integrated multi-modal microscopy methods need to be developed and are expected to be more widely applied in the field of defect measurement.

[0004] Therefore, how to provide a thermal wave chiral fluorescence confocal microscopy measurement device based on a metastructured surface is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] In view of this, the present invention provides a thermo-chiral fluorescence confocal microscopy measurement device based on a superstructure surface, which can use thermo-fluorescence imaging detection to detect absorption defects and has higher imaging sensitivity, and can detect absorption contamination defects; it can separate the left and right circularly polarized thermo-fluorescence signals and perform circular dichroism analysis to realize the chiral detection of absorption defects.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A thermal wave chiral fluorescence confocal microscopy measurement device based on a metastructured surface includes a thermal wave pump light generation module, a linear vibration probe light generation module, an illumination module, and a signal detection module;

[0008] The thermal wave pump light generation module and the linear vibration detection light generation module generate thermal wave pump light and fluorescence excitation light, respectively.

[0009] The illumination module is used to receive the thermal wave pump light and the fluorescence excitation light, form a focused light spot on the sample to be tested, and generate a thermal wave fluorescence signal; wherein, the thermal wave fluorescence signal includes a left-handed circularly polarized light signal and a right-handed circularly polarized light signal;

[0010] The signal detection module acquires the signal values ​​of the left-hand circularly polarized light signal and the right-hand circularly polarized light signal respectively, and calculates the chirality information.

[0011] Furthermore, the thermal wave pump light generation module includes a first laser, a chopper, and a dichroic mirror; the linear vibration probe light generation module includes a second laser, a first aperture stop, and a polarizer.

[0012] The thermal wave pump light emitted by the first laser is frequency-modulated by the chopper and then enters one side of the dichroic mirror.

[0013] The fluorescence excitation light emitted by the second laser is modulated by the aperture of the first aperture stop and then enters the other side of the dichroic mirror.

[0014] The dichroic mirror combines the thermal pump light and the fluorescent excitation light and then emits them to the illumination module.

[0015] Furthermore, the chopper is used to modulate the thermal wave pump light, with a modulation frequency ranging from 10 kHz to 1 MHz.

[0016] Furthermore, the polarizer is used to adjust the fluorescent excitation light into 45° linearly polarized light.

[0017] Furthermore, the illumination module includes a second aperture stop, a non-polarizing beam splitter, an objective lens, and a three-dimensional displacement stage arranged sequentially according to the optical path;

[0018] The fluorescent excitation light and the thermal wave pump light are focused onto the three-dimensional displacement stage by the non-polarizing beam splitter and the objective lens, forming a light spot on the sample to be tested on the three-dimensional displacement stage for three-dimensional scanning.

[0019] The second aperture stop is used to adjust the outer diameter of the light spot;

[0020] The light beam reflected by the sample under test is reflected by the non-polarizing beam splitter and enters the signal detection module.

[0021] Furthermore, the signal detection module includes a superstructure surface, a ring mirror, a first detection component, a second detection component, a dual-channel lock-in amplifier, and a data processing terminal;

[0022] The superstructure surface is used to modulate the left-hand circularly polarized light signal into a solid beam and the right-hand circularly polarized light into a ring beam.

[0023] The solid beam of light is detected by the first detection component after passing through the center of the annular reflector.

[0024] The ring beam is detected by the second detection component after being reflected by the surface of the ring reflector;

[0025] The dual-channel lock-in amplifier is connected to the first detection component and the second detection component respectively, and is used to send the detection signal of the first detection component and the detection signal of the second detection component to the data processing terminal;

[0026] The data processing terminal is used to calculate the difference between the detection signal of the first detection component and the detection signal of the second detection component to obtain chiral information.

[0027] Furthermore, a filter is provided in front of the superstructure surface to remove ambient stray light other than the thermal fluorescence signal and to emit the thermal fluorescence signal to the superstructure surface.

[0028] Furthermore, the first detection component includes a first collecting lens, a first single-mode optical fiber, and a first photodetector; the solid beam is transmitted through the annular reflector, focused by the first collecting lens, and collected by the first photodetector through the first single-mode optical fiber;

[0029] The second detection component includes a second collecting lens, a second single-mode optical fiber, and a second photodetector; the ring beam is focused by the second collecting lens and collected by the second photodetector after passing through the second single-mode optical fiber.

[0030] Furthermore, the superstructure surface is distributed with an array of TiO2 nanopillars, satisfying a phase distribution of... Where r is the spatial radial coordinate, Let i be the angular coordinate, and i be the imaginary unit.

[0031] Furthermore, the detection frequency of the dual-channel lock-in amplifier is f, and the integration dwell time is 2 / f.

[0032] The beneficial effects of this invention are:

[0033] As can be seen from the above technical solutions, compared with the prior art, the present invention discloses a thermo-chiral fluorescence confocal microscopy measurement device based on a superstructure surface, which can use thermo-fluorescence imaging detection to detect absorption defects and has higher imaging sensitivity, and can detect absorption contamination defects; it can separate the left and right circularly polarized thermo-fluorescence signals and perform circular dichroism analysis to realize the chiral detection of absorption defects. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0035] Figure 1 The attached figure is a schematic diagram of the structure of a thermal wave chiral fluorescence confocal microscopy measurement device based on a metastructured surface provided by the present invention;

[0036] Among them, 1-first laser, 2-chopper, 3-dichroic mirror, 4-second laser, 5-first aperture stop; 6-polarizer, 7-second aperture stop, 8-unpolarized beam splitter, 9-objective lens, 10-sample to be tested; 11-three-dimensional displacement stage, 12-filter, 13-metastructure surface, 14-ring mirror, 15-first collecting lens, 16-first single-mode fiber, 17-first photodetector, 18-second collecting lens, 19-second single-mode fiber, 20-second photodetector, 21-dual-channel lock-in amplifier. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] This invention discloses a thermal wave chiral fluorescence confocal microscopy measurement device based on a metastructured surface, including a thermal wave pump light generation module, a linear vibration probe light generation module, an illumination module, and a signal detection module;

[0039] The thermal wave pump light generation module and the linear vibration detection light generation module generate thermal wave pump light and fluorescence excitation light, respectively;

[0040] The illumination module is used to receive thermal wave pump light and fluorescence excitation light, form a focused light spot on the sample 10 to be tested, and generate thermal wave fluorescence signal; wherein, the thermal wave fluorescence signal includes left-handed circularly polarized light signal and right-handed circularly polarized light signal;

[0041] The signal detection module acquires the signal values ​​of left-handed and right-handed circularly polarized light signals respectively, and calculates the chirality information.

[0042] In another embodiment, the thermal wave pump light generation module includes a first laser 1, a chopper 2, and a dichroic mirror 3; the linear vibration probe light generation module includes a second laser 4, a first aperture stop 5, and a polarizer 6.

[0043] The thermal pump light emitted by the first laser 1 is frequency-modulated by the chopper 2 and then enters one side of the dichroic mirror 3.

[0044] The fluorescence excitation light emitted by the second laser 4 is modulated by the aperture of the first aperture stop 5 and then enters the other side of the dichroic mirror 3.

[0045] Dichroic mirror 3 combines the thermal pump light and the fluorescent excitation light and emits them to the illumination module.

[0046] In another embodiment, chopper 2 is used to modulate the thermal wave pump light, with a modulation frequency ranging from 10 kHz to 1 MHz.

[0047] In another embodiment, polarizer 6 is used to adjust the fluorescence excitation light to 45° linearly polarized light.

[0048] In another embodiment, the illumination module includes a second aperture stop 7, a non-polarizing beam splitter 8, an objective lens 9, and a three-dimensional displacement stage 11 arranged sequentially according to the optical path;

[0049] Fluorescent excitation light and thermal wave pump light are focused onto the three-dimensional displacement stage 11 by the non-polarized beam splitter 8 and the objective lens 9, forming a light spot on the sample 10 to be tested on the three-dimensional displacement stage 11 for three-dimensional scanning; wherein, three-dimensional scanning imaging can be achieved through the three-dimensional displacement stage 11, and the single-point dwell time is greater than or equal to 2 / f.

[0050] The second aperture stop 7 is used to adjust the outer diameter of the light spot;

[0051] The beam reflected by the sample 10 is reflected by the non-polarizing beam splitter 8 and enters the signal detection module.

[0052] In another embodiment, the signal detection module includes a superstructure surface 13, a ring mirror 14, a first detection component, a second detection component, a dual-channel lock-in amplifier 21, and a data processing terminal.

[0053] The superstructure surface 13 is used to modulate the left-hand circular optical signal into a solid beam and the right-hand circular optical signal into a ring beam;

[0054] The solid beam of light passes through the center of the ring mirror 14 and is detected by the first detection component;

[0055] The ring beam is detected by the second detection component after being reflected by the surface of the ring mirror;

[0056] The dual-channel lock-in amplifier 21 is connected to the first detection component and the second detection component respectively, and is used to send the detection signal of the first detection component and the detection signal of the second detection component to the data processing terminal.

[0057] The data processing terminal is used to calculate the difference between the detection signals of the first detection component and the detection signals of the second detection component to obtain chiral information.

[0058] In another embodiment, a filter 12 is provided in front of the superstructure surface 13 to remove ambient stray light other than the thermoluminescence signal and to emit the thermoluminescence signal to the superstructure surface 13.

[0059] In another embodiment, the first detection component includes a first collecting lens 15, a first single-mode optical fiber 16, and a first photodetector 17; after the solid beam is transmitted through the ring mirror 14, it is focused by the first collecting lens 15 and collected by the first photodetector 17 after passing through the first single-mode optical fiber 16.

[0060] The second detection component includes a second collecting lens 18, a second single-mode fiber 19, and a second photodetector 20; the ring beam is focused by the second collecting lens 18 and collected by the second photodetector 20 after passing through the second single-mode fiber 19.

[0061] In another embodiment, the superstructure surface 13 is distributed with an array of TiO2 nanopillars, satisfying a phase distribution of... Where r is the spatial radial coordinate, is the angular coordinate, and i is the imaginary unit; left-handed light can be preserved as solid light, while right-handed light can be converted into ring light.

[0062] In another embodiment, the detection frequency of the dual-channel lock-in amplifier 21 is f, and the integration dwell time is 2 / f.

[0063] In another embodiment, the laser beam emitted by the first laser 1 has a wavelength of 405 nm, and the laser beam emitted by the second laser 6 has a wavelength of 532 nm.

[0064] This invention generates a thermal wave signal by intensity modulation of the pump light using a chopper 2, and adjusts the probe light to 45° linear polarization using a polarizer 6. Simultaneously, it extracts chiral photothermal fluorescence signals using a metastructure surface 13 and a ring mirror 14. The first and second detection components respectively collect the fluorescence and thermal wave signals excited by left-handed and right-handed circularly polarized light. Direct analysis of the thermal wave fluorescence signal excited by unidirectional circularly polarized probe light allows for the extraction of three-dimensional distribution information of subsurface absorption-type contamination defects. Analyzing the difference between the thermal wave fluorescence signals excited by left-handed and right-handed circularly polarized probe light yields chiral information about micro / nano structures, improving the accuracy of detecting defects containing chiral characteristics. Furthermore, the inherent sensitivity of thermal waves to defects enhances defect detection sensitivity.

[0065] The detection steps of this invention are as follows:

[0066] S1: The heat wave pump beam emitted by the first laser 1 passes through the chopper 2, and the frequency of the chopper 2 is set to f;

[0067] S2: The fluorescence excitation light is adjusted to 45° linearly polarized light by polarizer 6;

[0068] S3: The thermal wave pump light and the fluorescence excitation light are strictly combined by the dichroic mirror 3 and input into the subsequent optical path. The outer diameter of the light spot is adjusted by the aperture stop 7 to match the light transmission aperture of the objective lens 9.

[0069] S4: The thermal wave pump light and the fluorescence excitation light are incident on the objective lens 9 after passing through the non-polarized beam splitter 8, forming a focused spot on the sample 10 to illuminate the sample 10. The three-dimensional scanning of the sample is achieved by the three-dimensional displacement stage 11.

[0070] S5: The beam collected by the objective lens is reflected by the non-polarizing beam splitter 8 and then filtered by the filter 12 to remove the pump light and the fluorescence excitation light, while retaining the thermal fluorescence signal. The left-hand circularly polarized light signal is adjusted into a solid beam by the metasurface 13. After being transmitted through the ring mirror 14, it is converged into the first single-mode fiber 16 by the first collecting lens 15.

[0071] S6: The metasurface 13 modulates the right-hand circularly polarized light signal into a ring beam, which is then reflected by the ring mirror 14 and converged into the second single-mode fiber 19 by the second collecting lens 18.

[0072] S7: The output signals of the first single-mode fiber 16 and the second single-mode fiber 19 are collected by the first photodetector 17 and the second photodetector 20, respectively, and the two signals are output.

[0073] S8: The output signals of the first photodetector 17 and the second photodetector 20 are connected to the dual-channel lock-in amplifier 21. The detection frequency of the dual-channel lock-in amplifier 21 is set to f, so that the thermo-fluorescent signal excited by the left-handed probe light and the thermo-fluorescent signal excited by the right-handed probe light can be obtained.

[0074] S9: The chiral information of the sample to be tested can be obtained by subtracting the thermoluminescence signal excited by the left-handed probe light obtained by the dual-channel lock-in amplifier 21 from the thermoluminescence signal excited by the right-handed probe light.

[0075] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0076] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface, characterized in that, It includes a thermal wave pump light generation module, a linear vibration detection light generation module, an illumination module, and a signal detection module; The thermal wave pump light generation module and the linear vibration detection light generation module generate thermal wave pump light and fluorescence excitation light, respectively; The illumination module is used to receive the thermal wave pump light and the fluorescence excitation light, form a focused light spot on the sample to be tested, and generate a thermal wave fluorescence signal; wherein, the thermal wave fluorescence signal includes a left-handed circularly polarized light signal and a right-handed circularly polarized light signal; The signal detection module acquires the signal values ​​of the left-hand circularly polarized light signal and the right-hand circularly polarized light signal respectively, and calculates the chirality information; the signal detection module includes a superstructure surface, a ring mirror, a first detection component, a second detection component, a dual-channel lock-in amplifier, and a data processing terminal; The superstructure surface is used to modulate the left-hand circularly polarized light signal into a solid beam and the right-hand circularly polarized light into a ring beam. The solid beam of light is detected by the first detection component after passing through the center of the annular reflector. The ring beam is detected by the second detection component after being reflected by the surface of the ring reflector; The dual-channel lock-in amplifier is connected to the first detection component and the second detection component respectively, and is used to send the detection signal of the first detection component and the detection signal of the second detection component to the data processing terminal; The data processing terminal is used to calculate the difference between the detection signal of the first detection component and the detection signal of the second detection component to obtain chiral information.

2. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 1, characterized in that, The thermal wave pump light generation module includes a first laser, a chopper, and a dichroic mirror; the linear vibration probe light generation module includes a second laser, a first aperture stop, and a polarizer. The thermal wave pump light emitted by the first laser is frequency-modulated by the chopper and then enters one side of the dichroic mirror. The fluorescence excitation light emitted by the second laser is modulated by the aperture of the first aperture stop and then enters the other side of the dichroic mirror. The dichroic mirror combines the thermal pump light and the fluorescent excitation light and then emits them to the illumination module.

3. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 2, characterized in that, The chopper is used to modulate the thermal wave pump light, with a modulation frequency ranging from 10 kHz to 1 MHz.

4. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 2, characterized in that, The polarizer is used to adjust the fluorescent excitation light into 45° linearly polarized light.

5. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 2, characterized in that, The illumination module includes a second aperture stop, a non-polarizing beam splitter, an objective lens, and a three-dimensional displacement stage arranged sequentially according to the optical path. The fluorescent excitation light and the thermal wave pump light are focused onto the three-dimensional displacement stage by the non-polarizing beam splitter and the objective lens, forming a light spot on the sample to be tested on the three-dimensional displacement stage for three-dimensional scanning. The second aperture stop is used to adjust the outer diameter of the light spot; The light beam reflected by the sample under test is reflected by the non-polarizing beam splitter and enters the signal detection module.

6. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 1, characterized in that, A filter is provided in front of the superstructure surface to remove ambient stray light other than the thermal fluorescence signal and to emit the thermal fluorescence signal to the superstructure surface.

7. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 5, characterized in that, The first detection component includes a first collecting lens, a first single-mode optical fiber, and a first photodetector; the solid beam is transmitted through the annular reflector, focused by the first collecting lens, and collected by the first photodetector through the first single-mode optical fiber; The second detection component includes a second collecting lens, a second single-mode optical fiber, and a second photodetector; The ring beam is focused by the second collecting lens and collected by the second photodetector after passing through the second single-mode optical fiber.

8. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 5, characterized in that, The superstructure surface is distributed with an array of TiO2 nanopillars, and the array satisfies the following phase distribution: ； Where r is the spatial radial coordinate, Let i be the angular coordinate, and i be the imaginary unit.

9. The thermal wave dark-field fluorescence confocal microscopy measurement device based on a metastructured surface according to claim 5, characterized in that, The time constant of the dual-channel lock-in amplifier is set to 2 / f, and the integral time contains at least two detection cycles. The three-dimensional displacement stage moves the sample, and the dwell time at each position is greater than or equal to 2 / f. Each time the sample moves to a position, a lock-in amplifier output is recorded, thereby obtaining a two-dimensional or three-dimensional thermal wave image.

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