Manufacturing methods for discharge electrodes, anodes, and electronic devices.

By improving the shape and thickness distribution of the anode coating, the problem of unstable discharge in gas laser devices was solved, achieving discharge stability and extending electrode life, thereby improving the stability and resolution of laser generation.

CN116472652BActive Publication Date: 2026-05-26AURORA ADVANCED LASER CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
AURORA ADVANCED LASER CO LTD
Filing Date
2020-12-23
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

The discharge electrode design of existing gas laser devices leads to unstable discharge and the inability to effectively narrow the spectral linewidth, affecting resolution and the stability of laser generation.

Method used

Improving the coating shape and thickness distribution of the anode makes the first corner of the electrode substrate and the second corner of the coating closer to the cathode in the discharge direction, forming a specific combination of curves and straight lines, reducing electric field concentration and stabilizing the discharge space.

Benefits of technology

This achieved stable discharge and extended electrode life, while suppressing coating degradation and improving the stability and resolution of laser generation.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN116472652B_ABST
    Figure CN116472652B_ABST
Patent Text Reader

Abstract

The discharge electrode of the gas laser device used to excite a fluorine-containing laser gas by discharge has a cathode (11a) and an anode (11b). The anode (11b) is disposed opposite the cathode (11a) in the discharge direction perpendicular to the length direction of the cathode (11a). The anode (11b) includes an electrode substrate (111) containing metal and a coating (112) covering a portion of the surface of the electrode substrate (111) and containing an insulating material. The first corner (C1) of the anode in the cross section perpendicular to the length direction is closer to the cathode in the discharge direction than the second corner (C2) in the cross section. The first corner (C1) is connected to the first straight section (S1) formed by the first side surface (SS1) which is the side surface of the electrode substrate (111) and the first curved section (D1) formed by the first discharge surface (DS1) which is the discharge surface of the electrode substrate (111). The second corner (C2) is connected to the second straight section (S2) formed by the second side surface (SS2) which is the side surface of the coating (112) and the second curved section (D2) formed by the second discharge surface (DS2) which is the discharge surface of the coating (112).
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