Method of controlling a plane drive system and plane drive system

Abstract

The invention relates to a method (100) of controlling a planar drive system (200) having a stator unit (300) and a rotor (400), comprising: in a moving step (101), moving the rotor (400) to a rotational position (RP) of the rotor (400) on the stator unit (300), wherein in the rotational position (RP) each magnet unit (407) of the rotor (400) covers one coil group (321) of the stator unit (300) in each orientation of the rotor (400) relative to the stator unit (300), which coil group is not covered by any other magnet unit (407) of the rotor (400); in a steering step (103), steering the coil groups (321) covered by the magnet units (407) of the rotor (400) in the rotational position (RP) and generating a stator magnetic field through each steered coil group (321); and in a rotating step (105), rotating the rotor (400) by the stator magnetic fields of the controlled coil groups (321) covered by the magnet units (407) of the rotor (400) around an axis of rotation oriented perpendicular to a stator surface (303) of the stator unit (300) by a predetermined rotation angle (a). The invention also relates to a planar drive system (200).

Description

Technical Field

[0001] The present invention relates to a method for controlling a planar drive system and a planar drive system adapted to implement the method for controlling the planar drive system.

[0002] This patent application claims priority to German patent application DE 10 2020 130 795.0, the disclosure of which is incorporated herein by reference retrospectively.

[0003] Furthermore, planar drive systems are particularly useful in automation technologies, especially in manufacturing, material handling, and process technologies. A planar drive system enables the moving parts of a device or machine to move or be positioned in at least two linearly independent directions. A planar drive system may include a permanently excited electromagnetic planar motor having a planar stator and a rotor capable of moving along this stator in at least two directions.

[0004] In a permanently excited electromagnetic planar motor, a driving force is applied to the rotor by the magnetic interaction between the energized coil group of the stator unit and the driving magnets of multiple magnetic components of the rotor. Background Technology

[0005] Planar drive systems with elongated rectangular coil groups and elongated rectangular magnet units of the rotor are known from the prior art. DE 10 2017 131 304 A1 describes such a planar drive system. Planar drive systems with elongated rectangular coil groups and elongated rectangular magnet units of the rotor are advantageous for achieving linear translation of the rotor.

[0006] Planar drive systems with circular coil assemblies are known from existing technology (Proceedings of the 2008 ASME Dynamic Systems and Control Conference DSCC2008, October 20-22, 2008, Ann Arbor, Michigan, USA). While circular coil assemblies are advantageous for achieving rotor rotation, they present significant disadvantages for linear rotor translation and can potentially cause unstable, abrupt movements.

[0007] In a planar drive system having linearly arranged rectangular coil groups and magnet units, the rotor includes at least one first magnet unit for driving the rotor along a first direction and a second magnet unit for driving the rotor along a second direction linearly independent of the first direction, such as perpendicular to the first direction. The planar stator unit includes energized first coil groups and energized second coil groups. These first coil groups interact with the magnetism of the first magnet unit to drive the rotor along the first direction, and these second coil groups interact with the magnetism of the second magnet unit to drive the rotor along the second direction. The first and second coil groups can typically be energized independently of each other so that the rotors can move independently of each other along the first and second directions. If the conductors of the first and second groups are themselves at least partially energized independently of each other, multiple rotors can be moved simultaneously and independently of each other on a single stator.

[0008] For controlling the rotor of a planar drive system, in addition to rotor position changes primarily achieved through translational motion along the first and second directions, it is also crucial to induce an orientation change of the rotor relative to the stator unit for specific applications. This requires a rotational axis that allows the rotor to rotate about a surface perpendicular to the stator unit. However, due to the linear arrangement of the coil groups and the characteristic interaction between the coil groups and the magnet units, rotor rotation becomes difficult and limited to only a few degrees. Summary of the Invention

[0009] Therefore, one object of the present invention is to provide an improved method for controlling a planar drive system, which enables better orientation of the rotor. Another object of the present invention is to provide a planar drive system capable of implementing the method according to the present invention.

[0010] The solution to this objective lies in a method for controlling a planar drive system and a planar drive system according to the independent claim. Preferred embodiments are described in the dependent claims.

[0011] According to one aspect of the present invention, a method for controlling a planar drive system is provided, wherein the planar drive system includes a stator unit having a plurality of coil groups for generating a stator magnetic field and a rotor having a plurality of magnet units for generating a rotor magnetic field, wherein the rotor can be driven on the stator unit by magnetic coupling between the stator magnetic field and the rotor magnetic field, wherein the plurality of coil groups include a rectangular X-coil group and a rectangular Y-coil group, wherein the X-coil group extends along the X direction of the stator unit, and the Y-coil group extends along the Y direction of the stator unit, which is oriented perpendicular to the X direction; wherein the plurality of magnet units of the rotor include a rectangular X-magnet unit and a rectangular Y-magnet unit, wherein the X-magnet unit is oriented along the X direction of the rotor, and wherein the Y-magnet unit extends along the Y direction of the rotor, which is oriented perpendicular to the X direction; and wherein the method includes:

[0012] In the moving step, the rotor is moved to a rotational position on the stator module, wherein in the rotational position, in each orientation of the rotor relative to the stator module, each magnet assembly of the rotor covers a coil group of the stator unit, and the coil group is not covered by any other magnet assembly of the rotor;

[0013] In the control step, coil groups covered by the magnet assembly of the rotor in the said rotational position are manipulated, and a stator magnetic field is generated through each manipulated coil group; and

[0014] During the rotation step, the rotor rotates by a predetermined rotation angle around a rotation axis oriented perpendicular to the stator surface of the stator unit by the stator magnetic field of the manipulated coil group covered by the magnet unit of the rotor.

[0015] This provides the following technical advantages: an improved method for controlling a planar drive system can be provided, wherein the rotor is capable of rotating by any rotation angle about a rotation axis oriented perpendicular to the stator surface of the stator unit of the planar drive system. For this purpose, the rotor is moved to a rotational position on the stator unit, and in this rotational position, the rotor is rotated by a predetermined rotation angle by manipulating appropriate coil groups of the stator unit. In this case, the rotational position is characterized by having at least one coil group of the stator unit for each magnet unit of the rotor, the coil group being covered only by the corresponding magnet unit of the rotor. This achieves the advantage that manipulating the corresponding coil group and the magnetic field generated by manipulating this coil group only affects the magnet unit of the rotor covering the corresponding coil group.

[0016] In this application, if, in any position of the rotor on the stator unit, a magnetic unit of the rotor is arranged at least partially above a coil group, then the coil group of the stator unit is covered by the magnetic unit of the rotor.

[0017] In a specific positioning, a coil group is covered by only one magnet unit of the rotor, while other magnet units of the rotor are not at least partially arranged above the corresponding coil group in that positioning. As the rotor rotates in different positions, the positioning of the individual magnet units changes based on the rotor's rotation, causing these magnet units to be arranged above different coil groups during rotation. Each magnet unit can be arranged above different coil groups depending on the rotor's orientation in the rotating position. Therefore, the coil group covered by only one magnet unit and not by any other magnet unit can be different for different rotor orientations.

[0018] Based on the geometry of the planar drive system, in terms of rotational position only, in each orientation of the rotor, there is a coil group for each magnet unit that is covered only by that magnet unit. This planar drive system has elongated rectangular coil groups arranged as X coil groups and Y coil groups on the stator unit along two perpendicular orientations, and elongated rectangular magnet units arranged as X magnet units and Y magnet units on the rotor along two perpendicular orientations.

[0019] However, based on the symmetry of the stator unit, multiple corresponding rotational positions can be provided on the stator unit.

[0020] The rectangular design based on coil groups and magnet units, and the orientation of these coil groups along two mutually perpendicular X and Y directions in the stator unit or the orientation of these magnet units along two mutually perpendicular X and Y directions in the rotor, ensures that, for any position of the rotor in its non-rotating position, a coil group covered only by the corresponding magnet unit is not generated for each magnet unit of the rotor for each orientation of the rotor relative to the stator unit.

[0021] Conversely, in any non-rotating position, the following situation arises: with a specific rotor orientation, the rotor's magnetic units only cover coil groups covered by multiple magnetic units of the rotor. Since a coil group is covered multiple times by multiple magnetic units, manipulation of a corresponding coil group affects all magnetic units of the rotor covering that coil group. This can cause the rotor's rotation to be hindered or impeded by the different magnetic fields of the different orientations of the coil groups acting on the rotor's magnetic units. Based on the rotor's geometry or the layout of the individual magnetic units, this prevents opposite sides of the rotor from moving in opposite directions, which is crucial for the rotor's rotation.

[0022] In the rotating position, for each orientation of the rotor, there is a coil group that is covered only by the corresponding magnet unit for each magnet unit. Thus, by manipulating the corresponding coil group that is covered only by a magnet unit, each magnet unit can be affected by the magnetic field of the coil group covered by that magnet unit.

[0023] This allows for the application of a specific magnetic force to each magnet unit by manipulating the coil groups covered by that magnet unit. The magnetic force acting on the respective magnet unit can be generated independently through the manipulation of the corresponding coil groups. By applying independent magnetic forces, potentially in different directions, to the different magnet units of the rotor, rotation of the rotor relative to the stator unit can be achieved for each orientation of the rotor. Therefore, the rotor can be rotated at any angle.

[0024] In this application, the rotor orientation is the orientation of the rotor relative to the preferred directions of the X and Y directions of the coordinate system spanned by the stator unit. The rotor orientation can be changed by rotating about a rotation axis oriented parallel to the Z-axis of the coordinate system spanned by the stator unit.

[0025] In this application, the rotor position refers to the rotor's position on the stator unit. The rotor's position can be changed by translational movement along the X and Y directions of the stator unit. Specifically, the rotor's position can be determined by the location of its center on the stator unit.

[0026] In this application, the rotation angle is the solid angle between the preferred direction of the rotor and the X or Y direction of the coordinate system spanned by the stator unit.

[0027] According to a second aspect of the present invention, a planar drive system is provided, wherein the planar drive system includes a stator unit having a plurality of coil groups for generating a stator magnetic field, at least one rotor having a plurality of magnet units for generating a rotor magnetic field, and a control unit for controlling the planar drive system, wherein the rotor can be driven on the stator unit by magnetic coupling between the stator magnetic field and the rotor magnetic field, wherein the plurality of coil groups include a rectangular X-coil group and a rectangular Y-coil group, wherein the X-coil group is oriented along the X direction of the stator unit, and the Y-coil group is oriented along the Y direction of the stator unit, which is perpendicular to the X direction; wherein the plurality of magnet units of the rotor include a rectangular X-magnet unit and a rectangular Y-magnet unit, wherein the X-magnet unit is oriented along the X direction of the rotor, and the Y-magnet unit is oriented along the Y direction of the rotor, which is perpendicular to the X direction; and wherein the planar drive system is configured to implement a method for controlling a planar drive system according to the present invention.

[0028] This achieves the following technical advantages: it can provide a planar drive system that has the aforementioned advantages of the method for controlling a planar drive system according to the present invention.

[0029] According to one embodiment, the stator unit includes a plurality of stator segments, wherein the stator segments are rectangular and arranged in pairs along the X or Y direction, wherein each stator segment includes an X coil group and a Y coil group, which are separate from the X coil groups and Y coil groups of other stator segments, and wherein the rotational position is the position where the four stator segments on the stator unit are adjacent to each other.

[0030] This achieves the following technical advantages: precise control of the coil groups required for rotor rotation in a rotating position is possible. This allows for precise rotor rotation. By positioning the rotor, or particularly the rotor's center, at the contact points of four adjacent stator segments, coil groups covered by only one magnet unit of the rotor are arranged in one of the four adjacent stator segments based on the layout of the rotor's individual magnet units. Since the individual coil groups of the four adjacent stator segments can be controlled independently, the coil groups covered by these magnet units in each stator segment can be manipulated individually. Therefore, by correspondingly controlling the respective coil groups of each stator segment, an individual magnetic force can be applied to each magnet unit of the rotor, enabling the rotor to rotate about a rotation axis oriented relative to the Z-axis of the coordinate system spanned by the stator units.

[0031] In this application, the stator segment is characterized in that the X coil group and the Y coil group extend throughout the entire length or width of the stator segment. The X coil groups of the stator segment, arranged side-by-side along the X direction, can be arranged on a single line along the X direction, but these X coil groups remain separate coil groups from each other. The same applies to the Y coil groups.

[0032] This allows for the independent control of coil groups arranged on a single line.

[0033] In the above embodiment, the stator segments are arranged such that each stator segment has at least one stator segment adjacent along the X direction and at least one stator segment adjacent along the Y direction.

[0034] According to one embodiment, the control steps include:

[0035] In the first energizing step, each coil group covered by the magnet unit is energized individually.

[0036] This achieves the following technical advantages: it allows for precise control of the coil groups required for the rotor's rotation in a rotating position, thereby enabling the rotor to rotate precisely by a predetermined angle. By individually manipulating the coil groups covered by the magnet units of the rotor in the rotating position, the stator magnetic field generated by the respective coil groups can be individually adjusted. By adjusting the stator magnetic field generated by the respective coil groups, the magnetic force acting on each magnet unit of the rotor can be individually adjusted, such that the sum of the magnetic forces acting on each magnet unit causes the rotor to rotate around the rotation axis. Furthermore, by individually manipulating the selected coil groups, it prevents the manipulation of additional coil groups whose stator magnetic fields might adversely affect the rotor's rotation by influencing individual magnet units.

[0037] In this application, individual control of a coil group is achieved by energizing the coil group with a separate excitation current. In this case, the excitation currents of the two individually energized coil groups can differ in at least one value.

[0038] According to one embodiment, the control steps include:

[0039] In the force determination step, the magnetic force acting on the magnet unit covering the coil group through the stator magnetic field of the coil group is determined;

[0040] In the energizing determination step, for each of the coil groups covered by the magnet unit, individual energizing is determined such that the sum of the magnetic forces acting on the magnet unit by the stator magnetic field according to the individual energizing of the coil group generates a torque about the rotation axis of the rotor, said torque being used to cause the rotor to rotate by said rotation angle.

[0041] This achieves the following technical advantages: precise control and energization of the coil groups are possible, and consequently, precise rotation of the rotor around its axis of rotation is achieved. To this end, the magnetic force exerted on each magnet unit of the rotor by the stator magnetic field of the coil group energized with a specific energization is first determined. After identifying the relationship between the energization of the corresponding coil group and the magnetic force exerted on the corresponding magnet unit by the magnetic field of the energized coil group, the coil groups covered by the magnet units of the rotor in a rotating position are individually energized, such that the sum of the magnetic forces acting on the magnet units causes a torque acting on the rotor, which rotates the rotor by a predetermined rotation angle. By determining these relationships between the individual energization of each coil group and the desired rotation angle, precise energization of each coil group can be achieved for any rotation angle. This enables precise control of the rotor, and particularly, precise rotation of the rotor.

[0042] According to one embodiment, the force determination step includes:

[0043] In the torque calculation step, the torque required to rotate by a predetermined rotation angle is calculated;

[0044] In the force calculation step, the magnetic force required to generate torque and acting on each magnet unit of the rotor is calculated; and the energization determination step includes:

[0045] In the current supply calculation step, the single current supply required to generate the calculated magnetic force for the coil assembly is calculated.

[0046] This achieves the following technical advantages: accurately determining the magnetic force acting on each magnet unit of the rotor and, consequently, accurately determining the current supply that causes the rotor to rotate at a predetermined angle. To this end, the torque acting on the rotor for this predetermined angle of rotation is first calculated. Based on this, the individual magnetic forces that must act on the corresponding magnet units of the rotor are calculated, such that the sum of the magnetic forces acting on the magnet units causes the previously determined torque. In this way, the magnetic force acting on each magnet unit can be accurately determined for any given angle of rotation. Therefore, for any given angle of rotation, the magnetic force required to cause the predetermined angle of rotation is determined for each magnet unit of the rotor in the rotating position.

[0047] Furthermore, the relationship between the individual energization of the coil groups covered by the magnet units of the rotor in the rotating position and the magnetic force exerted by the stator magnetic field generated by the respective energized coil groups on the corresponding magnet units is calculated. Therefore, for any given rotation angle, the required current supply is determined for each of the coil groups covered by the magnet units of the rotor in the rotating position. The resulting predetermined rotation angle and the relationship between the individual energization of the coil groups covered by the magnet units of the rotor in the rotating position can, for example, be stored in a corresponding database. By calculating the required current supply for the coil groups covered by the magnet units of the rotor in the rotating position, precise control of the coil groups can be achieved, and consequently, precise rotation of the rotor can be realized.

[0048] The required torque can be calculated by taking into account factors such as rotor size, weight, load, or other characteristics.

[0049] The current supply required to generate the desired torque can be calculated by taking into account factors such as the size and magnetic properties of the magnet unit or rotor magnetic field, as well as the relevant characteristics of the magnetic coupling between the stator and rotor magnetic fields. In particular, the rotor elevation, i.e., the distance along the Z-direction between the magnet unit and the coil assembly, can be taken into account.

[0050] According to one embodiment, the torque and the force are calculated in the force determination step, and the current supply is calculated by the control unit of the planar drive system during rotor control in the energization determination step.

[0051] This technique offers the advantage of rapid rotor control by calculating, directly during rotor movement or rotor control, the current supply required to rotate the rotor to a predetermined angle by the individual coil groups covered by the rotor's magnet unit. Therefore, immediately after determining the desired rotation angle, rotation can be achieved by correspondingly energizing each coil group.

[0052] According to one embodiment, calculating the torque and / or the force in the force determination step and / or calculating the current supply in the energization determination step includes simulation, wherein the simulation is based on a model description of the relationship between the current supply to the coil group and the magnetic force acting on the magnet unit and / or a model description of the relationship between the current supply to the coil group and the torque acting on the rotor.

[0053] This approach offers the following technical advantages: it provides precise control of the rotor, particularly its precise rotation. Specifically, it saves computational power in the control unit of the planar drive system by determining the individual current supply required to rotate the coil groups covered by the rotor's magnet units at any given angle. This is based on a model describing the relationship between the current supply to the coil groups and the magnetic force acting on the magnet units, and relatedly, a previously performed simulation based on the predetermined rotation angle. For example, the simulation results can be stored in a database or lookup table. Therefore, to rotate the rotor to the predetermined angle, it is not necessary to recalculate the individual current supply required for each coil group covered by the rotor via the control unit; instead, the required individual current supply can simply be read from the database or lookup table. This saves the control unit's computational time and power spent on rotating the rotor.

[0054] According to one embodiment, the moving step includes:

[0055] In the coil determination step, the coil group of the stator unit covered by the magnet assembly of the rotor is determined.

[0056] This technique offers the advantage of precise rotor control by manipulating or energizing only the coil sets required to move or rotate the rotor. To do this, the coil sets covered by the rotor's magnet units in a rotating position are determined. These coil sets can obviously vary depending on the rotor's current position on the stator unit, the desired direction of movement, and the rotor's current orientation relative to the stator unit. Once the coil sets covered by the rotor's magnet units are determined, only these coil sets are controlled and energized to move the rotor. In this case, the rotor's movement can include linear translation or rotation. In the case of rotation, by selecting suitable coil sets, manipulation of coil sets that prevent or inhibit rotor rotation based on the corresponding orientation of the magnetic field can be avoided.

[0057] According to one embodiment, the coil determination step includes:

[0058] In the detection step, the rotor magnetic field of each magnet assembly of the rotor at the rotating position is detected by the magnetic field sensor of the stator unit.

[0059] In the definition step, a coverage area is defined for each magnet assembly, wherein the coverage area delineates the region of the stator unit including a magnetic field sensor for detecting the rotor magnetic field of the corresponding magnet assembly; and

[0060] In the measurement step, the coil group arranged at least partially in the coverage area is measured.

[0061] This achieves the following technical advantages: precise identification of coil groups and, consequently, precise control of the rotor. To determine the coil groups covered by the rotor's magnet units, the rotor magnetic field of each magnet unit of the rotor is detected by measurements from the stator unit's magnetic field sensors. Therefore, based on these rotor magnetic fields, each magnet unit of the rotor can be precisely positioned relative to these magnetic field sensors. A coverage area is then defined, describing the area of ​​the stator unit covered by one of the rotor's magnet units. This coverage area can be defined for each magnet unit of the rotor. Then, coil groups at least partially arranged within the coverage area are determined to be coil groups covered by the corresponding magnet units of the rotor. By measuring the rotor magnetic field of each magnet unit, the corresponding coil group covered by the magnet unit can be determined for each position and orientation of the rotor. Precise control of the rotor can be achieved by manipulating only the covered coil groups.

[0062] According to one embodiment, the moving step includes:

[0063] In the second energizing step, multiple coil groups are energized using a shared theoretical current supply.

[0064] This offers the technical advantages of simplified control and more precise rotor control. By energizing multiple coil groups with a shared theoretical current supply during only the period of linear rotor movement (where the rotor moves in linear translational motion), the control process is simplified because it is not necessary to determine or calculate a single current supply for each coil group. Furthermore, the shared energization of the coil groups to be energized for rotor movement saves computational power in the control unit.

[0065] According to one embodiment, the rotor includes two X-magnet units and two Y-magnet units, wherein the X-magnet units are arranged along the Y direction on opposite sides of the rotor, and the Y-magnet units are arranged along the X direction on opposite sides of the rotor, and wherein, in the rotating position, at least four coil groups are covered by the magnet units, and each of the four coil groups is arranged in a stator segment.

[0066] This achieves the following technical advantages: precise rotor rotation is realized by individually controlling and energizing the coil groups covered by the magnet units of the rotor in a rotating position. Specifically, each coil group can be precisely controlled and energized individually by having four magnet units of the rotor in a rotating position cover four coil groups of the stator unit, each covered by only one magnet unit and arranged in four separate stator segments.

[0067] In the above embodiment, each of the four magnet units of the rotor in the rotating position covers one coil group, which is not covered by any of the other magnet units. Therefore, all four magnet units cover only four coil groups. In this case, these four coil groups are arranged in four adjacent stator segments, with exactly one of the four proprietary covered coil groups arranged in each stator segment.

[0068] According to one embodiment, the rotation angle can be selected as any value between 0° and 360°.

[0069] This achieves the following technical advantages: improved rotor rotation and, consequently, improved rotor control. The method according to the invention allows the rotor to rotate at any angle between 0° and 360°. The invention also covers multiple rotations of the rotor, including multiples of the rotation angles described herein. Rotation in opposite directions is also covered.

[0070] According to one embodiment, an X-coil group is used to generate a stator magnetic field having Y and Z components, wherein a Y-coil group is used to generate a stator magnetic field having X and Z components, wherein the X component is oriented along the X direction of the stator unit, the Y component is oriented along the Y direction of the stator unit, and the Z component is oriented along the Z direction of the stator unit, which is perpendicular to the X and Y directions.

[0071] This allows for improved rotor control. An X-coil group oriented along the X-direction of the coordinate system spanned by the magnet unit can generate a stator magnetic field with Y and Z components, while a Y-coil group oriented along the Y-direction can generate a stator magnetic field with X and Z components. Therefore, by energizing each X or Y coil group, a magnetic force along the Z-direction can act on the rotor to be controlled, thereby causing rotor movement along the Z-direction or a levitated state of the rotor above the stator surface of the stator unit. Furthermore, the magnetic force can act on the controlled rotor along the X or Y directions, or any combination thereof, thereby causing corresponding translational movements of the rotor in the XY plane of the coordinate system spanned by the stator unit. This allows the rotor to move precisely in any designed form of translational motion.

[0072] According to one embodiment, an X magnet unit is used to generate a rotor magnetic field having Y and Z components, wherein a Y magnet unit is used to generate a rotor magnetic field having X and Z components, wherein the X component is oriented along the X direction of the rotor, the Y component is oriented along the Y direction of the rotor, and the Z component is oriented along the Z direction of the rotor, which is perpendicular to the X and Y directions.

[0073] This technology offers the advantage of precise rotor control. By utilizing the stator magnetic field of the X magnet unit, which has both Y and Z components, and with the X magnet unit aligned parallel to the X coil group of the stator unit, coupling can be achieved between the stator magnetic field of the X coil group and the rotor magnetic field of the X magnet unit. This allows for rotor control along the Y direction of the stator unit. Similarly, by utilizing the rotor magnetic field of the Y magnet unit, which also has both X and Z components, and with the Y magnet unit aligned parallel to the Y coil group, coupling can be achieved between the stator magnetic field of the Y coil group and the rotor magnetic field of the Y magnet unit, allowing for rotor control along the X direction of the stator unit. This enables precise rotor control. Attached Figure Description

[0074] The present invention will now be described in detail with reference to the accompanying drawings. Wherein:

[0075] Figure 1 This is a schematic diagram of a planar drive system having a stator unit and a rotor according to one embodiment;

[0076] Figure 2 for Figure 1 A schematic diagram of the stator module of the stator unit in the diagram;

[0077] Figure 3 This is a schematic diagram of the lower side of a rotor according to one embodiment;

[0078] Figure 4 for Figure 1 An exploded view of the stator segment and rotor magnet assembly of the stator unit;

[0079] Figure 5 for Figure 1 A schematic diagram of the rotor shown;

[0080] Figure 6 For stator units using non-rotational orientation Figure 5 A schematic diagram of the rotor shown;

[0081] Figure 7 A schematic diagram of a rotationally oriented rotor on a stator unit;

[0082] Figure 8 A flowchart of a method for controlling a plane drive system according to one embodiment; and

[0083] Figure 9 This is another flowchart of a method for controlling a plane drive system according to another embodiment. Detailed Implementation

[0084] Figure 1 This is a schematic diagram of a planar drive system 200 having a stator unit 300 and a rotor 400.

[0085] according to Figure 1 In the embodiment described above, this planar drive system includes a control unit 201, a stator unit 300, and a rotor 400. The control unit 201 is connected to the stator unit 300 via a data link 203. The control unit 201 is used to implement a method 100 for controlling the planar drive system 200 according to the present invention.

[0086] For a detailed description of the method for controlling the planar drive system 200 according to the present invention, see the reference to... Figure 8 and Figure 9 The description made.

[0087] In the illustrated embodiment, the stator unit 300 includes a plurality of stator modules 301, which are arranged side-by-side along the X and Y directions of the stator unit 300 and form a continuous and flat stator surface 303 of the stator unit 300. In the illustrated embodiment, the stator unit 300 includes six stator modules 301. However, the number of interconnected stator modules 301 of the stator unit 300 should not be limited to this and can be arbitrarily varied. Therefore, the stator unit 300 according to the present invention can be composed of only one stator module 301, but it can also be composed of a plurality of arbitrarily arranged and connected stator modules 301, which subsequently form a continuous stator surface 303. In the illustrated embodiment, the control unit 201 is connected to each stator module 301, such that each stator module 301 can be operated independently. Since it is a perspective view, not all connections to all stator modules 301 are shown. Figure 1 All of them are visible in the middle.

[0088] Each of these stator modules 301 has four stator segments 308. Each stator segment includes an X coil group and a Y coil group, which are oriented along the X or Y direction, respectively. For a detailed description of the coil groups, see [link to documentation]. Figure 3 .

[0089] In the illustrated embodiment, the stator segments 308 are square and arranged in a aligned manner along the X and Y directions. Each stator segment 308 includes a plurality of energized stator conductors 309, such as... Figure 4 As shown, these stator conductors are integrated into the coil assembly and along the X-direction or along the Y-direction (not in...). Figure 1 (As shown in the diagram) Oriented. A stator magnetic field can be generated by energizing the stator conductors 309 of these coil groups. By means of the magnetic coupling between the stator magnetic field and the rotor magnetic field of the rotor 400, the rotor 400 can move in a suspended manner on the stator surface 303, at least along the X direction, Y direction, or a combination of XY directions. Furthermore, the rotor 400 can also move in the Z direction, which is perpendicular to the X and Y directions. In this way, the distance of the rotor 400 from the stator surface 303 can be varied, that is, the rotor 400 can be raised or lowered above the stator surface 303.

[0090] Each stator module 301 has a stator module housing 305, in which control electronics (not shown) for operating the stator module 301 are arranged. Additionally, a magnetic field sensor (not shown) for detecting the rotor magnetic field of the rotor 400 is also arranged in the stator module housing 305. Each stator module 301 has a corresponding connection line 307 to provide power and data to the control electronics.

[0091] Figure 2 for Figure 1 A schematic diagram of the stator module 301 of the stator unit 300 shown.

[0092] The stator module 301 includes four stator segments 308 having stator conductors 309 oriented in the X direction. The stator conductors 309 can be arranged in a manner that is electrically insulated from each other. The four stator segments 308 are square and form a square stator surface 303. The stator segments 308 are separated by a contact structure 311, which enables the stator conductors 309 to be connected to control electronics and enables a compact structure of the stator unit 300.

[0093] Figure 3 According to one embodiment Figure 1 A schematic diagram of the lower side of rotor 400 is shown.

[0094] During operation of the planar drive system 200, the lower side of the rotor 400 is arranged facing the stator surface 303 of the stator unit 300. The rotor 400 has a magnet assembly 401 on its lower side, which has four magnet units 407: a first X magnet unit 411, a second X magnet unit 413, a first Y magnet unit 415, and a second Y magnet unit 417. Each magnet unit 407 has multiple magnetic elements 409. In the illustrated embodiment, each magnet unit 407 has five magnetic elements 409, which are rectangular elongated elements. The magnet units 407 can be exemplarily constructed as Helbeck array magnet units. The magnet assembly 401 generates a rotor magnetic field for achieving magnetic coupling with the stator magnetic field of the stator unit 300. Through magnetic coupling, the rotor 400 can be controlled or moved relative to the stator unit 300.

[0095] In the illustrated embodiment, the first X magnet unit 411 and the second X magnet unit 413 are oriented parallel to the X direction of the rotor 400, while the first Y magnet unit 415 and the second Y magnet unit 417 are oriented along the Y direction. The first and second X magnet units 411 and 413 are used to drive the rotor 400 along the Y direction during operation, and the first and second Y magnet units 415 and 417 are used to drive the rotor 400 along the X direction during operation. Furthermore, the magnet unit 407 is used to drive in the Z direction, which is perpendicular to both the X and Y directions.

[0096] At the center of the magnet assembly 401, the rotor 400 has a free surface 403 that is not covered by the magnets of the magnet assembly 401. The rotor 400 has a fixing structure 405 in the region of the free surface 403.

[0097] Figure 4 for Figure 1 An exploded view of the stator segment 308 of the stator unit 300 and the magnet assembly 401 of the rotor 400. Figure 4 This is a top perspective view of rotor 400, which is relative to... Figure 3 The illustration is a view rotated 90° counterclockwise around the Z-axis.

[0098] Figure 4 Four separate stator layers are shown, which are components of stator segment 308.

[0099] According to the design shown, stator segment 308 has a first stator layer 313, a second stator layer 315, a third stator layer 317, and a fourth stator layer 319 stacked together along the Z direction. The first stator layer 313 includes only stator conductors 309 extending along the X direction and arranged side-by-side along the Y direction. The stator conductors 309 of the first stator layer 313 and... Figure 1 and Figure 2The stator conductors 309 shown correspond to those arranged on the stator surface 303. The stator conductors 309 of other stator layers are arranged along the Z-direction below the first stator layer 313, and therefore are not shown in the diagram. Figure 1 and Figure 2 As shown in the image.

[0100] The second stator layer 315 includes stator conductors arranged perpendicular to the stator conductors 309 of the first stator layer 313, which extend in the Y direction and are arranged side by side in the X direction.

[0101] In the third and fourth stator layers 317 and 319, the first and second stator layers 313 and 315 are repeated, such that stator conductors extending along the X and Y directions are alternately arranged in the four stator layers of the stator segment 308 shown. The design scheme of stator segment 308 is for... Figure 1 and Figure 2 The stator segment 308 shown is exemplary, and these stator segments also have Figure 4 The design scheme shown is as follows. Figure 4 In an alternative to the embodiment shown, stator segment 308 may also include four or more stator layers.

[0102] The stator conductors 309 of the first to fourth stator layers 313, 315, 317, and 319 are respectively combined into coil groups 321. In the illustrated embodiment, each stator layer 313, 315, 317, and 319 includes three coil groups 321 arranged side by side. The first and third stator layers 313 and 317 each have three X coil groups 323 oriented in the X direction and arranged side by side in the Y direction. The second and fourth stator layers 315 and 319 each have three Y coil groups 325 oriented in the Y direction and arranged side by side in the X direction. Therefore, each stator segment 308 has multiple X coil groups 323 and Y coil groups 325. The six stator conductors 309 in each coil group 321 are specifically combined into a three-phase system, wherein every two interconnected stator conductors 309 form one of the three phases U, V, and W of this three-phase system. By energizing the coil groups 321 of each stator layer of the stator section 308, particularly the three-phase system of the coil groups 321, a stator magnetic field in the form of a traveling wave magnetic field can be generated in the stator unit 300. These stator magnetic fields can then exert a magnetic force on the rotor 400, thereby causing the rotor 400 to move. Alternatively, the coil groups 321 of multiple stator layers can be connected together, such that the stacked X coil groups 323 or the stacked Y coil groups 325 each form a shared three-phase system.

[0103] By energizing the X coil group 323 accordingly, a stator magnetic field with Z and Y components can be generated. The Y coil group 325 generates a stator magnetic field with Z and X components. The Z component of the stator magnetic field enables the rotor 400 to move along the Z direction of the stator unit 300, and particularly, the rotor 400 to levitate above the stator surface 303 of the stator unit 300. The X or Y components of the stator magnetic field enable the rotor 400 to move relative to the stator unit 300 along the X or Y direction.

[0104] The movement of the rotor 400 through the stator magnetic field of the stator unit 300 is achieved by the magnetic coupling of this stator magnetic field or these stator magnetic fields with the rotor magnetic field of the rotor 400. In this case, the rotor magnetic field is generated by the X and Y magnet units of the rotor 400.

[0105] In this configuration, the first and second X magnet units 411 and 413 of the rotor 400 are configured to generate rotor magnetic fields having Z and Y components. The first and second Y magnet units 415 and 417, on the other hand, are capable of generating rotor magnetic fields having Z and X components. In this configuration, the Z component is oriented along the Z direction, and the X and Y components are oriented along the X and Y directions of the rotor.

[0106] According to rotor 400 Figure 1 When placed on the stator unit 300, the rotor can move along the Z direction of the stator unit 300 through the magnetic coupling between the Z component of the rotor magnetic field and the stator magnetic field.

[0107] If the rotor 400 is placed on the stator unit 300 such that the X-direction of the stator unit 300 is parallel to the X-direction of the rotor 400, the rotor can move along the X-direction through the magnetic coupling of the X component of the rotor magnetic field with the stator magnetic field. Conversely, the rotor 400 can move along the Y-direction through the magnetic coupling of the Y component of the rotor magnetic field with the stator magnetic field.

[0108] During the operation of the planar drive system 100, the rotor 400 can be oriented above the stator unit 300, such that the X magnet units 411 and 413 are arranged parallel to the X coil group 323 and the Y magnet units 415 and 417 are arranged parallel to the Y coil group 325. Figure 4 This orientation of the rotor 400 is shown, and the figure shows the corresponding orientation of the magnet assembly 401 of the rotor 400 relative to the coil group 321 of the aforementioned stator layer.

[0109] In the shown orientation of the rotor 400 relative to the stator segment 308 of the stator unit 300, the rotor 400 can move along the Y direction of the stator unit 300 by energizing the X coil group 323 of the corresponding stator segment 308, while the movement of the rotor 400 along the X direction can be achieved by correspondingly energizing the Y coil group 325. The rotor 400 can move relative to the stator unit 300 in either direction by correspondingly energizing either the X or Y coil groups 323 and 325. In particular, when both the X and Y coil groups 323 and 325 are energized, diagonal movement of the rotor 400 relative to the X and Y directions can be achieved.

[0110] Figure 5 for Figure 1 The schematic top view of the rotor 400 shown shows only the magnet assembly 401 having a first X magnet unit 411, a second X magnet unit 413, a first Y magnet unit 415, and a second Y magnet unit 417. Figure 5 The top view shown is of rotor 400 relative to Figure 4 The illustration is a view rotated 90° counterclockwise around the Z-axis.

[0111] Each magnet unit 407 includes five magnetic elements 409 arranged side-by-side. For the X magnet units 411 and 413, these magnetic elements extend along the X direction of the rotor, and for the Y magnet units 415 and 417, these magnetic elements extend along the Y direction of the rotor 400. In this configuration, the magnetic elements 409 of the X magnet units 411 and 413 can generate a rotor magnetic field with a Z component 4BZ and a Y component 4BY. Due to the arrangement of the Y magnet units 415 and 417 perpendicular to the X magnet units 411 and 413, the Y magnet units 415 and 417 can generate a rotor magnetic field with a Z component 4BZ and an X component 4BX.

[0112] Figure 6 For the stator unit 300, a non-rotationally oriented Figure 5 A schematic diagram of rotor 400 is shown.

[0113] Figure 6 This is a top view of the stator module 301 of the stator unit 300, showing only the four square-arranged stator segments 308 in the stator unit 300, namely the first stator segment S1, the second stator segment S2, the third stator segment S3, and the fourth stator segment S4. Furthermore, Figure 6 Also shown is the arrangement on the stator unit 300 Figure 5 The rotor 400 is shown, of which only the magnet assembly 401 in the rotor 400 is shown.

[0114] Figure 6The influence of the stator magnetic field of each energized coil group on the rotor magnetic field of each magnet unit 407 is illustrated by way of linear translational motion of the stator unit 300 along the X or Y direction.

[0115] exist Figure 6 In this context, for each stator segment 308, it is similar to Figure 4 The diagram illustrates two stator layers stacked on top of each other along the Z-direction. Each stator layer includes three coil groups 321 that extend over the entire length or width of the stator segment 308. In this case, the stator layers are similar to... Figure 4 The ground includes three X coil groups 323 or three Y coil groups 325.

[0116] In the illustrated embodiment, the first stator segment S1 includes a first X-coil group X11, a second X-coil group X12, a third X-coil group X13, a first Y-coil group Y11, a second Y-coil group Y12, and a third Y-coil group Y13. Similarly, the second stator segment S2 includes a first X-coil group X21, a second X-coil group X22, a third X-coil group X23, a first Y-coil group Y21, a second Y-coil group Y22, and a third Y-coil group Y23. The third stator segment S3 also includes a first X-coil group X31, a second X-coil group X32, a third X-coil group X33, a first Y-coil group Y31, a second Y-coil group Y32, and a third Y-coil group Y33. Similarly, the fourth stator segment S4 includes a first X-coil group X41, a second X-coil group X42, a third X-coil group X43, a first Y-coil group Y41, a second Y-coil group Y42, and a third Y-coil group Y43. To illustrate the position and orientation of each X-coil group 323, these X-coil groups are... Figure 6 and Figure 7 The diagram is represented by dashed lines. To show the position and orientation of each Y-coil group 325, these Y-coil groups are... Figure 6 and Figure 7 The drawing is represented by dots and lines.

[0117] The first X-coil group X11 of the first stator segment S1 and the first X-coil group X21 of the second stator segment S2 are arranged on a line. However, the two X-coil groups 323 are separate coil groups 321 and can be operated independently of each other. The same applies to the second X-coil group X12 of the first stator segment S1 and the second X-coil group X22 of the second stator segment S2, as well as the third X-coil group X13 of the first stator segment S1 and the third X-coil group X23 of the second stator segment S2, which can also be operated independently of each other.

[0118] The above scheme also applies to the X coil group 323 of the fourth stator segment S4 and the X coil group 323 of the third stator segment S3. These X coil groups can also be controlled independently.

[0119] Similarly, the Y coil group 325 of the first stator segment S1 and the Y coil group 325 of the fourth stator segment S4 can be controlled independently.

[0120] The Y coil group 325 of the second stator section S2 and the Y coil group 325 of the third stator section S3 can also be controlled independently.

[0121] Similarly, the X-coil group 323 can generate a stator magnetic field with a Z component 3Bz and a Y component 3By. The Y-coil group 325, on the other hand, can generate a stator magnetic field with a Z component 3Bz and an X component 3Bx. Figure 6 In the example shown, only the corresponding magnetic field components are shown for the selected coil group 321, which are energized to move the rotor 400 in the example shown.

[0122] In the illustrated embodiment, the rotor 400 is arranged on the stator unit 300 to achieve a parallel arrangement of the X magnet units 411, 413 with respect to the X coil groups 323 of each stator segment 308 of the stator unit 300, and a parallel arrangement of the Y magnet units 415, 417 with respect to the Y coil groups 325.

[0123] By arranging the X magnet units 411 and 413 parallel to the X coil group 323, the rotor 400 can move along the Z direction and along the Y direction by energizing the corresponding X coil group 323 and generating a stator magnetic field with Z component 3Bz and Y component 3By. By arranging the Y magnet units 415 and 417 parallel to the Y coil group 325 and energizing the corresponding Y coil group 325, and generating a stator magnetic field with Z component 3Bz and X component 3Bx, the rotor 400 can move along the Z direction and along the X direction. Furthermore, the rotor 400 can move diagonally by energizing a combination of the X and Y coil groups 323 and 325.

[0124] exist Figure 6In the illustrated embodiment, the first X-coil group X11 of the first stator segment S1 is energized for this translational motion of the rotor. The resulting stator magnetic field, having a Z component 3Bz and a Y component 3By, generates a magnetic force Fz1 in the Z direction and a magnetic force Fy1 in the Y direction, which act on the first magnet unit 411 arranged above the first X-coil group X11. Furthermore, the second X-coil group X32 of the third stator segment S3 is energized, causing the correspondingly generated stator magnetic field, having a Z component 3Bz and a Y component 3By, to generate a magnetic force Fz2 in the Z direction and a magnetic force Fy2 in the Y direction, which act on the second X-magnet unit 413 arranged above the second X-coil group X32. Because in the rotor's shown positioning on stator unit 300, the second magnet unit 413 also covers the second X coil group X42 of the fourth stator segment S4, which is also manipulated, thereby generating a stator magnetic field with a Z component 3Bz and a Y component 3By, which contributes to the magnetic force Fz2 in the Z direction and the magnetic force Fy2 in the Y direction acting on the second X magnet unit 413. The forces acting on the first and second magnet units 411, 413 in the Z and Y directions cause the rotor to move in the Z and Y directions.

[0125] Furthermore, in the illustrated example, the first Y-coil group Y21 of the second stator segment S2 is manipulated to generate a stator magnetic field having a Z component 3Bz and an X component 3Bx. Similarly, the first Y-coil group Y31 of the third stator segment S3 is energized, also generating a stator magnetic field having a Z component 3Bz and an X component 3Bx. The stator magnetic fields of these two Y-coil groups Y21 and Y31 induce a magnetic force Fz3 in the Z direction and a magnetic force Fx3 in the X direction acting on the first Y-magnet unit 415. Furthermore, the second Y-coil group Y42 of the fourth stator segment S4 is energized, thereby generating a stator magnetic field having a Z component 3Bz and an X component 3Bx, causing the magnetic force Fz4 in the Z direction and the magnetic force Fx4 in the X direction to act on the second Y-magnet unit 417 arranged above the second Y-coil group Y42. By energizing the first Y coil group Y21, Y31 and the second Y coil group Y42, and by applying magnetic forces Fz3, Fz4 in the Z direction and Fx3, Fx4 in the X direction to the first and second Y magnet units 415, 417 thereon, the rotor moves in the Z and X directions.

[0126] When the X coil groups X11, X32, X42 and the Y coil groups Y21, Y31 and Y42 are energized simultaneously, the rotor 400 can move along the diagonal XY.

[0127] The sum of the magnetic forces Fz1, Fz2, Fz3, Fz4, Fy1, Fy2, Fx3, and Fx4 acting on each magnet unit 407 generates the resultant forces Fx, Fy, and Fz acting on the center Z of the rotor 400.

[0128] In addition, Figure 6 In the diagram, two coverage areas 329 are shown by dashed lines. These two coverage areas are respectively arranged above the two X-magnet units 411 and 413. The coverage areas 329 can be used to select the coil groups 321 to be energized, specifically, to select coil groups 321 for energizing the corresponding magnet unit 407. These coil groups are at least partially arranged within the coverage areas 329. In this case, the coverage area 329 represents the area of ​​the stator unit 300 covered by the corresponding magnet unit 407. For clarity, Figure 6 Only the coverage area 329 of the X magnet units 411, 413 is shown. However, similar to the coverage area 329 shown, the Y magnet units 415, 417 also have coverage areas, by which the coil group 321 for energizing covered by the Y magnet units 415, 417 can be measured.

[0129] In the illustrated embodiment, the stator unit 300 further includes a sensor module 500 comprising a plurality of magnetic field sensors 501. The magnetic field sensors 501 can be configured as Hall sensors, particularly as 1D, 2D, or 3D Hall sensors. To determine which coil group 321 is to be energized via the coverage area 329, the stator magnetic field of the magnet unit 407 can be detected by the magnetic field sensors 501. By detecting the rotor magnetic field of each magnet unit 407, these magnet units can be detected and calibrated relative to the corresponding magnetic field sensors 501 and the stator unit 300. Based on this calibration, a coverage area 329 of predefined shape and size can be determined and positioned relative to the stator unit 300. Therefore, coil groups 321 at least partially arranged in the somehow positioned coverage area 329 can be identified as coil groups 321 covered by the corresponding magnet units 407 and determined for energization.

[0130] To make the rotor 400 move relative to the stator unit 300 in the X, Y, or Z directions, forces Fx, Fy, and Fz acting on the center Z of the rotor 400 in the corresponding directions are required, which can cause the rotor 400 to move accordingly. By manipulating the individual coil groups 321 and by applying magnetic force to the four magnet units 407, a resultant force Fx, Fy, and Fz, consisting of the sum of the magnetic forces acting on the four magnet units 407, is generated acting on the center Z of the rotor. These magnetic forces are generated through the coupling of the stator magnetic field produced by the energization of the individual coil groups.

[0131] For the rotor 400 to rotate in one of the directions of the coordinate system spanned by the stator unit 300, corresponding torques Mx, My, and Mz are required to act on the center Z of the rotor. These torques are also derived from the sum of the magnetic forces acting on the four magnet units 407.

[0132]

[0133] The equations shown exemplarily illustrate the relationship between the total forces Fx, Fy, Fz or torques Mx, My, Mz acting on the center of the rotor and the magnetic forces Fy1, Fy2, Fx3, Fx4, Fz1, Fz2, Fz3, Fz4 acting on each magnet unit 407. The actual relationship between the magnetic forces Fy1, Fy2, Fx3, Fx4, Fz1, Fz2, Fz3, Fz4 acting on each magnet unit 407 and the resulting resultant forces Fx, Fy, Fz and torques Mx, My, Mz acting on the center of the rotor 400 may depend on the actual design of the rotor 400, such as its shape, size, and weight, as well as the design of the magnet units 407.

[0134] The individual magnetic forces acting on different magnet units 407 are directly related to the energized coil group 321. Figure 6 In the embodiment shown, where the rotor moves diagonally along the XY direction, coil groups X11, Y21, X32, Y31, X42, and Y42 are energized accordingly to generate a magnetic force acting on the magnet unit 407. This can be shown according to the following equation based on the relationship between the energization of the respective coil group 321 and the magnetic force acting on one of these magnet units 407.

[0135]

[0136] In this case, the energization of each coil group is represented by the dq current, which is common in three-phase systems. In this case, the current supply value I... qX,Y and I dX,Y The q and d components of the excitation current for the corresponding energized X and Y coil groups are elucidated. In the equations shown, k represents a relational matrix indicating the relationship between energizing the coil group 321 and the resulting magnetic force acting on the magnet units 407 covering the coil group 321. The actual relationship is directly related to the corresponding design schemes of the coil group 321 and the magnet units 407, and may be directly related to the orientation of the coil group and the magnet units relative to each other, which will not be described in detail below.

[0137] The relationship shown in the above equation can be applied to the translational and rotational motions of rotor 400.

[0138] Figure 7 For the stator unit 300, rotational orientation is adopted. Figure 5 A schematic diagram of rotor 400 is shown.

[0139] Figure 7 Show Figure 6The diagram shows the rotor and stator units of magnet assembly 401. As long as... Figure 7 Since the characteristics of the magnet assembly 401 or the stator unit 300 remain unchanged, they will not be described in detail here.

[0140] exist Figure 7 In the rotating position RP, the rotor 400 has moved to the rotating position RP. In the rotating position RP, for each orientation of the rotor 400 relative to the stator unit 300 and for each magnet unit 407, there is a coil group 321 of the stator unit 300, which is covered by only one magnet unit 407 of the rotor 400.

[0141] exist Figure 7 In the illustrated embodiment, the rotational position RP is given by the contact point between the first to fourth stator segments S1, S2, S3, and S4, at which the four stator segments 308 are adjacent to each other. This can be the four stator segments 308 of a single stator module 301. In a stator unit 300 composed of multiple stator modules 301, the individual stator segments 308 can also be arranged in different stator modules that are adjacent to each other, wherein in this case, the intersection of the stator segments 308 of the adjacent stator modules 301 of the stator unit 300 forms the rotational position RP.

[0142] Furthermore, in the illustrated embodiment, the rotor 400 is rotated by 45° about a rotation axis parallel to the Z-axis of the coordinate system spanned by the stator unit 300. With this rotor orientation, each magnet unit 407 has a 45° angle relative to the X or Y coil groups 321, 325 of each stator segment 308 and at least partially covers the coil groups of at least two adjacent stator segments 308. Furthermore, the rotor 400 is positioned in the rotational position RP such that the coil groups 321 individually covered by each magnet unit 407 are arranged in different stator segments 308 of the stator unit 300, each coil group being covered by only one magnet unit 407. In this respect, the fact that a coil group 321 is covered by a magnet assembly 407 of the rotor 400 indicates that, in the corresponding orientation of the rotor 400, the corresponding magnet assembly 407 is at least partially arranged above the corresponding coil group 321.

[0143] Therefore, in the shown orientation of rotor 400, the second X coil group X22 of the second stator segment S2 is covered only by the first X magnet unit 411. As shown, in the shown orientation, only the first X magnet unit 411 is at least partially arranged above the second coil group X22 of the second stator segment S2. The second Y coil group Y32 of the third stator segment S3 is covered only by the first Y magnet unit 415, because only the first Y magnet unit 415 is at least partially arranged above the second Y coil group Y32 of the third stator segment S3. The second X coil group X42 of the fourth stator segment S4 is covered only by the second X magnet unit 413, and only this second X magnet unit is at least partially located above the second X coil group X42 of the fourth stator segment S4. The second Y coil group Y12 of the first stator segment S1 is covered only by the second Y magnet unit 417, and only this second Y magnet unit is at least partially located above the second Y coil group Y12 of the first stator segment S1.

[0144] The coil group 321 mentioned here, which is covered by only a single magnet unit 407, is only for the rotor 400. Figure 7 An example of the orientation shown. For other orientations of the rotor 400, the other coil groups 321 could be individually covered by the magnet unit 407 because, during the rotation of the rotor 400 about a rotation axis parallel to the Z direction, the magnet unit 407 is arranged above the other coil groups 321. However, for each orientation of the rotor 400 in the rotational position RP, for each magnet unit 407 there is one coil group 321, and only one magnet unit 407 is arranged at least partially above this coil group; therefore, this coil group is only covered by that magnet unit.

[0145] In the embodiment where the rotational position RP is formed by the contact points of four stator segments S1, S2, S3, and S4, coil groups 321, each individually covered by four magnet units 407, are arranged in these four stator segments, wherein exactly one coil group 321 is arranged in each stator segment, each individually covered by a magnet unit 407, and is not covered by any other magnet unit 407.

[0146] By orienting the rotor 400, not only do each magnet unit 407 have an angle relative to the X or Y coil groups 323, 325, but the X or Y components of the rotor magnetic fields 4Bx, 4By of the corresponding magnet unit 407 are no longer arranged parallel or perpendicular to the X or Y components of the stator magnetic fields 3Bx, 3By of each coil group 321, but also have an angle of 45° relative to these components of the stator magnetic field. Therefore, the stator magnetic fields of the X coil group 323 and Y coil group 325 of each stator segment 308 can act on each magnet unit 407 and can all contribute to the corresponding magnetic force acting on the corresponding magnet unit 407.

[0147] To further rotate the rotor 400 around the rotation axis, the coil groups 321 covered by each magnet unit 407 can be energized, so that the magnetic force acting on the respective magnet unit 407 generally causes a torque MZ around a rotation axis oriented parallel to the Z-axis. Therefore, in the illustrated embodiment, the coil groups 321 are energized, each acting on a magnet unit 407 and applying a corresponding magnetic force to it. This process will be explained below using four coil groups 321 as an example.

[0148] In the illustrated embodiment, for example, the first Y-coil group Y21 of the second stator segment S2 is energized, thereby generating a stator magnetic field having a Z component 3Bz and an X component 3Bx. This generated stator magnetic field, through the energization of the second Y-coil group Y21, generates a magnetic force acting on the first X-magnet unit 411 having a Z component FZ1 and an X component Fx1. Furthermore, the third X-coil group X33 of the third stator segment S3 is energized, generating a corresponding stator magnetic field having a Z component 3Bz and a Y component 3By. This causes a magnetic force having a Z component FZ3 and a Y component Fy3 to act on the first Y-magnet unit 415. Furthermore, the third Y-coil group Y43 of the fourth stator segment S4 is energized, thereby generating a stator magnetic field having a Z component 3Bz and an X component 3Bx. This causes a magnetic force having a Z component Fz2 and an X component Fx2 to act on the second X-magnet unit 413. Similarly, the first X coil group X11 of the first stator segment S1 is energized, generating a corresponding stator magnetic field with Z component 3Bz and Y component 3BY. This, in turn, applies a magnetic force with Z component Fz4 and Y component Fy4 to the second Y magnet unit 417.

[0149] To achieve the desired rotation of rotor 400, in the illustrated embodiment, the rotor rotates clockwise. The X or Y components of the four stator magnetic fields of the four energized coil groups 321 point in opposite directions. Therefore, the X components of the magnetic forces Fx1 and Fx2 acting on X magnet units 411 and 413, and the Y components of the magnetic forces Fy3 and Fy4 acting on Y magnet units 415 and 417, point in opposite directions. Consequently, the sum of the four magnetic forces acting on each magnet unit 407 causes a torque MZ about a rotation axis arranged parallel to the Z-axis. This enables the rotor to rotate about the rotation axis according to the rotation angle α.

[0150] exist Figure 7 In this context, the rotation angle α is defined as the solid angle between the preferred direction 419 of the rotor 400 and the Y direction of the coordinate system of the stator unit 300.

[0151] In the illustrated embodiment, only four coil groups X11, Y21, X33, and Y43 are energized. However, as an alternative, multiple coil groups 321 can be energized to rotate the rotor; these coil groups are covered by the rotor's magnet units 407, thus acting on the respective magnet units 407. In the illustrated orientation, for example, the first and second X coil groups X11, X22 and the second and third Y coil groups Y12, Y13 of the first stator segment S1, the first and second X coil groups X21, X22 and the first and second Y coil groups Y21, Y22 of the second stator segment S2, the second and third Y coil groups X32, X33 and the first and second Y coil groups Y31, Y32 of the third stator segment S3, and the second and third X coil groups X42, X43 and the second and third Y coil groups Y42, Y43 of the fourth stator segment S4 can be energized. Each coil group 321 is individually energized so that the sum of the magnetic forces acting on the four magnet units 407 causes the required torque MZ, which enables the rotor to rotate at the desired rotation angle α.

[0152] Energizing the above coil group 321 results in the following relationship:

[0153]

[0154] In the relationship shown, it is similar to that between... Figure 6 The description illustrates the relationship between the individual energization of the 16 energized coil groups 321 and the magnetic forces Fx1, Fx2, Fy3, Fy4, Fz1, Fz2, Fz3, and Fz4 acting on the magnet unit 407 covering the coil groups 321. When manipulating the 16 coil groups 321, where two X coil groups 323 and two Y coil groups 325 are manipulated for each stator segment, 32 current values ​​are generated in the dq diagram. These current values, according to the indicated relationships, induce magnetic forces acting on the magnet unit 407.

[0155] The 32 current values ​​required to generate the magnetic force acting on each magnet unit 407 can be calculated or created using corresponding simulations. These magnetic forces, in turn, will cause the torque MZ required for rotation.

[0156] Simulation can, for example, generate, directly or indirectly, the corresponding current values ​​of the individual coil groups 321 covered by the magnet unit 407 for different rotation angles α and the torque MZ required for them. The measured values ​​can, for example, be stored in a corresponding database or lookup table so that the value of the rotation angle α used to control the rotor 400, and in particular to make the rotor 400 rotate the desired angle accordingly, can be read from the database or lookup table.

[0157] Figure 8 This is a flowchart of a method 100 for a control plane drive system 200 according to one embodiment.

[0158] The method 100 for controlling a plane drive system 200 according to the present invention can be applied to [the following]: Figures 1 to 7 The planar drive system 200 described in the embodiment includes a stator unit 300 having a plurality of coil groups 321 for generating one or more stator magnetic fields and a rotor 400 having a plurality of magnet units 407 for generating rotor magnetic fields. Through magnetic coupling between the stator magnetic field and the rotor magnetic field, the rotor 400 can be driven to perform translational or rotational motion on the stator unit 300. As shown in the above embodiment, the plurality of coil groups 321 may include a rectangular X-coil group 323 and a rectangular Y-coil group 325, wherein the X-coil group 323 is oriented along the X direction of the stator unit 300, and the Y-coil group 325 is oriented along the Y direction of the stator unit 300. The magnet units 407 of the rotor 400 may also include rectangular X-magnet units 411, 413 and rectangular Y-magnet units 415, 417, which are oriented along the X or Y direction of the rotor 400, respectively.

[0159] To control the rotor 400 on the stator unit 300, the rotor 400 is first moved to a rotational position RP on the stator unit 300 in the moving step 101. In this case, the rotational position RP is characterized in that, in each orientation of the rotor 400 relative to the stator unit 300, at least one coil group 321 of the stator unit 300 is covered by each magnet unit 407 of the rotor 400, and this coil group is not covered by any other magnet unit 407 of the rotor 400.

[0160] In order to move the rotor 400 according to the moving step 101, it can be based on the target Figure 6 The description states that the coil group 321 covered by the magnet unit 407 is manipulated and energized accordingly. The stator magnetic field generated by the energized coil group 321 causes magnetic forces acting on the magnet units 407 respectively covering the coil group 321. The sum of the magnetic forces acting on the multiple magnet units 407 causes a total force Fx, Fy, Fz acting on the center Z of the rotor 400. This total force causes the rotor 400 to move or shift accordingly.

[0161] In order to move rotor 400, according to Figure 6 The rotor 400 is preferably arranged on the stator unit 300 in order to achieve the parallel orientation of the X magnet units 411, 413 and the X coil group 323, and the parallel orientation of the Y magnet units 415, 417 and the Y coil group 325.

[0162] According to the Figure 6As explained, the rotor 400 is moved by correspondingly manipulating the X or Y coil groups 323, 325 covered by the X or Y magnet units 411, 413, 415, 417 of the rotor 400, wherein, with respect to the described parallel orientation of the magnet unit 407 relative to the corresponding coil group 321, the manipulated X coil group 323 acts on the corresponding X magnet unit 411, 413, and the manipulated Y coil group 325 acts on the corresponding Y magnet unit 415, 417.

[0163] according to Figure 6 In the example shown, the rotor 400 can be moved to the rotational position RP by diagonal movement along the XY direction. Alternatively, the rotor can be moved to the rotational position RP according to an appropriate sequence of translational movements along the X or Y direction of the stator unit 300.

[0164] The rotor 400 can be positioned in the rotational position RP by positioning the center Z of the rotor 400 in the corresponding rotational position RP.

[0165] To position the rotor 400 in the rotating position RP, at least the coil group 321 is manipulated in manipulation step 103. In the rotating position RP, these coil groups are covered by the magnet unit 407 of the rotor 400. According to the... Figure 6 The explanation is that by manipulating these coil groups, a corresponding stator magnetic field with corresponding X or Y components 3Bx, 3By and Z component 3Bz is generated.

[0166] In rotation step 105, by generating the corresponding stator magnetic field of the manipulated coil group 321 and the magnetic force acting on the magnet unit 407 based on the coupling between the stator magnetic field of the manipulated coil group 321 and the rotor magnetic field of the corresponding magnet unit 407, the rotor 400 is rotated by a predetermined rotation angle α around a rotation axis perpendicular to the stator surface 303 of the stator unit 300. According to the... Figure 7 The described example allows manipulation of the coil group 321 covered by the magnet unit 407 of the rotor 400.

[0167] According to one embodiment, the stator unit 300 may include a plurality of stator segments 308, all of which are rectangular and arranged side-by-side along the X or Y direction. In this case, each stator segment 308 may respectively include a plurality of X coil groups 323 and Y coil groups 325, wherein the coil groups 321 of different stator segments 308 can be manipulated independently of each other. In this case, the rotational position RP can be formed by the adjacent positions of the four stator segments 308 on the stator unit 300. The described embodiment can be, for example, based on... Figure 7 The example in the document will be used for implementation.

[0168] Similar to Figure 6 and Figure 7 In the implementation of this method, the X coil group 323 can be used to generate a stator magnetic field with Y and Z components, while the Y coil group 325 can be used to generate a stator magnetic field with X and Z components. The X magnet units 411 and 413 can be used to generate a rotor magnetic field with Y and Z components, while the Y magnet units 415 and 417 can be used to generate a rotor magnetic field with X and Z components.

[0169] The rotor 400 can rotate at any rotation angle α between 0 and 360° in the rotation position RP. It can also rotate multiple times at rotation angle α. In addition, the direction of rotation can be arbitrarily selected.

[0170] After the rotor 400 has completed its rotation in the rotating position RP, it can be moved from RP to another position on the stator unit 300 by means of another translational motion. For this purpose, the rotor 400 can be oriented parallel to the coil group 321 again in the rotating position RP, wherein the magnet unit 407 of the rotor 400 is arranged parallel to the X coil group 323 or the Y coil group 325, respectively.

[0171] Figure 9 This is another flowchart of a method 100 for a control plane drive system 200 according to another embodiment.

[0172] Method 100 Figure 9 The implementation shown is based on Figure 8 The illustrated embodiments include Figure 8 All method steps described herein. These method steps will not be repeated hereafter, provided they remain unchanged in the illustrated embodiments.

[0173] In the illustrated embodiment, the moving step 101 includes an energizing step 127. In order to move the rotor 400 to the rotating position RP, multiple coil groups 321 are energized in energizing step 127 with a shared theoretical current supply. When multiple coil groups 321 are energized together with a shared theoretical current supply, the same excitation current is supplied to the respective coil groups. Therefore, although each coil group 321 can be operated individually, it obtains the same current value for operation, thereby providing a shared theoretical current supply.

[0174] exist Figure 6In the illustrated embodiment, for example, the first X-coil group X11 of the first stator segment S1, the second X-coil group X32 of the third stator segment S3, and the second X-coil group X42 of the fourth stator segment S4 can be energized with the same theoretical current to achieve a shared theoretical current supply. The first and second X-magnet units 411 and 413 are controlled by the aforementioned X-coil groups X11, X32, and X42, generating magnetic forces along the Y and Z directions. Alternatively or supplementarily, the first Y-coil group Y21 of the second stator segment S2, the first Y-coil group Y31 of the third stator segment S3, and the second Y-coil group Y42 of the fourth stator segment S4 can also be energized using the shared theoretical current supply. The first and second Y-magnet units 415 and 417 are controlled by the aforementioned Y-coil groups Y21, Y31, and Y42, thereby causing the X-motion of the rotor 400. Therefore, for the linear translational motion described by the rotor 400, the X coil units used to control the corresponding X magnet units 411 and 413 can be energized with the same theoretical current supply, while the corresponding Y coil units used to control the Y magnet units 415 and 417 can be energized with the same shared theoretical current supply, i.e., energized with the same excitation current.

[0175] As an alternative, the first X coil group X11 of the first stator segment S1, the second X coil group X32 of the third stator segment S3, and the second X coil group X42 of the fourth stator segment S4 can be energized individually. This also applies to the first Y coil group Y21 of the second stator segment S2, the first Y coil group Y31 of the third stator segment S3, and the second Y coil group Y42 of the fourth stator segment S4. However, coil groups stacked on top of each other in different stator layers can be energized together. For example, as shown... Figure 4 The first X coil group X11 of the first stator segment S1 of the first stator layer 313 and the third stator layer 317 is energized. This also applies to the second X coil group X32 of the third stator segment S3 and the second X coil group X42 of the fourth stator segment S4, and, if necessary, to the aforementioned Y coil groups, which are also collectively energized by the corresponding coil groups of the third stator layer 317. Alternatively, the stacked coil groups 321 of two or more stacked stator layers can be energized by a shared theoretical current supply.

[0176] Furthermore, in the illustrated embodiment, the moving step 101 also includes a coil determination step 119, in which the coil group 321 covered by the magnet assembly 407 of the rotor 400 is determined.

[0177] In step 119 of the coil determination, for the purposes of... Figure 6 The linear movement of rotor 400 shown in the example and for the following... Figure 7The rotation of the rotor 400 in the example shown is selected by energizing the coil group 321 to control the rotor 400.

[0178] In order to determine the coil group 321 covered by these magnet units, the rotor magnetic field of each magnet unit 407 of the rotor 400 is detected by the magnetic field sensor 501 of the stator unit 300 in detection step 121.

[0179] Based on the above detection, in step 123, a coverage area 329 is defined for the magnet unit 407 of the rotor 400. These coverage areas indicate the areas of the stator unit 300 where the rotor magnetic field of the corresponding magnet unit is detected by the corresponding magnetic field sensor 501.

[0180] Based on the defined coverage area 329, in measurement step 125, the coil group 321 is determined to be covered by the corresponding magnet units 407 of the rotor 400, which are at least partially arranged in the previously defined coverage area 329.

[0181] Coverage area 329 can be based on Figure 6 The coverage area is constructed as shown. For clarity, only the coverage area 329 for X magnet units 411, 413 is shown. Figure 6 The difference is that, according to the present invention, a corresponding coverage area 329 can be defined for all magnet units 407.

[0182] Therefore, for the rotor 400 located at a specific position on the stator unit 300, the rotor magnetic field of each magnet unit 407 can be detected by the corresponding magnetic field sensor 501 of the sensor module 500 of the stator unit 300. By measuring the different orientations of the rotor magnetic fields of the X magnet units 411, 413 and the Y magnet units 415, 417, these rotor magnetic fields can be distributed to each magnet unit 407. The position of each magnet assembly 407 relative to the stator unit 300 can be determined by the measurement of the magnetic field sensor 501. Based on this, a coverage area 329 can be defined for each detected magnet assembly 407, wherein a spatial region of the stator unit 300 is defined for this purpose, and the position of the corresponding magnet assembly 407 is arranged in this spatial region. In this case, the shape and size of each coverage area 329 can also be customized according to... Figure 6 The rectangular shape shown is designed in a way that deviates from the intended shape.

[0183] The coil groups 321, which are at least partially arranged in the previously defined spatial region 329, can be identified below as being covered by the corresponding magnet units 407, and these coil groups can be manipulated and energized accordingly to control the rotor 400 if necessary.

[0184] Furthermore, in the illustrated embodiment, the control step 103 further includes a first energizing step 107. In the first energizing step 107, the coil groups 321 covered by the magnet unit 407 of the rotor 400 in the rotating position RP are energized respectively. In this case, the individual energizing of the coil groups 321 covered by the magnet unit 407 means that the energizing of each coil group 321 is different from each other at least in one value. For example, in... Figure 7 As described in the illustrated embodiment, the coil group 321 covered by the magnet unit 407 is manipulated and energized, so that the magnetic force acting on the respective magnet unit 407 generally causes a torque MZ, which causes the rotor 400 to rotate as desired.

[0185] As mentioned in the above description, Figure 7 The implementation described herein is an example for illustrative purposes only. In this example, only a minimum number of coil groups 321 are energized compared to actual operation. Alternatively, for example, four coil groups 321 can be energized for each stator segment 308, i.e., two X coil groups and two Y coil groups are energized respectively, resulting in a total of 16 coil groups being energized to rotate the rotor 400, such that the sum of the magnetic forces acting on the four magnet units 407 causes a torque MZ in the rotor 400. Furthermore, in this case, the energization of each coil group is determined by the actual orientation of the rotor 400 and the desired rotation angle α of the rotor 400.

[0186] To determine the required energization of each coil group 321 for the desired rotation angle α of the rotor 400, the control step 103 further includes a force determination step 109. In the force determination step 109, the magnetic force acting on the corresponding magnet unit 407 through the stator magnetic field of the coil group 321 covered by the corresponding magnet unit 407 is measured for each magnet unit 407.

[0187] Therefore, in torque calculation step 113, the torque MZ acting on the center Z of the rotor 400 required to achieve the desired rotation angle α of the rotor 400 is first calculated. This torque is suitable for causing the rotor 400 to rotate accordingly. The above calculation can be performed based on a single characteristic of the rotor 400, such as the weight, size, or load of the rotor 400.

[0188] Then, in force calculation step 115, multiple magnetic forces acting on each magnet unit 407 of the rotor 400 are calculated, and these magnetic forces collectively cause the torque MZ of the rotor 400. The calculation of the magnetic forces acting on the magnet unit 407 can also be based on the characteristics of the rotor 400 and the characteristics of the rotor magnetic field of each magnet unit 407.

[0189] After determining the magnetic force required to act on each magnet unit 407 for the desired rotation angle α of the rotor 400 in the force determination step 109, the energization determination step 111 determines the energization of each coil assembly 321 covered by the magnet unit 407, so as to energize the covered coil assembly 321 so that the required magnetic force acts on the corresponding magnet unit 407, and these magnetic forces cause the torque MZ required for the desired rotation.

[0190] Therefore, in the current supply calculation step 117, the current value required to generate magnetic force for the coil group 321 to be energized is calculated.

[0191] For example, the control unit 201 of the planar drive system 200 can calculate the current supply to each coil group 321 to be energized during the control of the rotor 400 and further during the rotation of the rotor 400. In this case, for the calculation, the aforementioned relationship between the current supply value of each coil group 321 and the magnetic force generated acting on the different magnet units 407 can be taken into account.

[0192] As an alternative or supplementary solution, a simulation can be performed to calculate the individual current supply to coil group 321 required to generate the calculated magnetic force in current supply calculation step 117. For example, the values ​​generated by the simulation can be stored in a corresponding database or lookup table. Therefore, in order to control rotor 400, and in particular to make rotor 400 rotate at a desired rotation angle α, the corresponding value can be read from the database or lookup table by control unit 201.

[0193] Based on the current value calculated as described above, the coil group 321 selected in the coil determination step 119 can be energized accordingly in the first energizing step 107.

[0194] In the rotational position RP, the four stator segments 308 that are adjacent to each other can be the four stator segments of a single stator module 301. Alternatively, the four stator segments 308 can be distributed in pairs on two adjacent stator modules 301. Alternatively, the four stator segments 308 can be stator segments 308 of four different adjacent stator modules 301.

[0195] Appendix Label Table

[0196] Methods for controlling planar drive systems

[0197] 101 Moving Steps

[0198] 103 Operation Steps

[0199] 105 Rotation Steps

[0200] 107 First power-on step

[0201] 109. Force Determination Steps

[0202] 111 Power-on confirmation steps

[0203] 113 Torque Calculation Steps

[0204] 115 Force Calculation Steps

[0205] 117 Current Supply Calculation Steps

[0206] 119 Coil Determination Steps

[0207] 121 Testing Steps

[0208] 123 Define the steps

[0209] 125 Measurement Procedure

[0210] 127 Second power-on step

[0211] 200 Planar Drive System

[0212] 201 Control Unit

[0213] 203 Data Link

[0214] 300 stator units

[0215] 301 Stator Module

[0216] 303 stator surface

[0217] 305 Stator Module Housing

[0218] 307 connecting cable

[0219] 308 stator segment

[0220] 309 Stator Conductor

[0221] 311 Contact Structure

[0222] 313 First Stator Layer

[0223] 315 Second Stator Layer

[0224] 317 Third Stator Layer

[0225] 319 Fourth Stator Layer

[0226] 321 coil group

[0227] 323 X coil group

[0228] 325 Y coil group

[0229] 327 Contact Structure

[0230] 329 Coverage Area

[0231] 400 rotor

[0232] 401 Magnet Assembly

[0233] 402 working face

[0234] 403 Free Side

[0235] 405 Fixed Structure

[0236] 407 Magnet Unit

[0237] 409 Magnetic Components

[0238] 411 First X Magnet Unit

[0239] 413 Second X Magnet Unit

[0240] 415 First Y Magnet Unit

[0241] 417 Second Y Magnet Unit

[0242] 419 Preferred Rotor Direction

[0243] S1 first stator segment

[0244] S2 Second Stator Segment

[0245] S3 Third Stator Section

[0246] S1 Fourth Stator Segment

[0247] The first X coil group of the first stator segment of X11

[0248] The second X coil group of the first stator section of X12

[0249] The third X coil group of the first stator section of X13

[0250] The first X coil group of the second stator section of X21

[0251] The second X coil group of the second stator section of X22

[0252] The third X coil group of the second stator section of X23

[0253] The first X coil group of the third stator section of X31

[0254] The second X coil group of the third stator section of X32

[0255] The third X coil group of the third stator section of X33

[0256] The first X coil group of the fourth stator section of X41

[0257] The second X coil group of the fourth stator section of X42

[0258] The third X coil group of the fourth stator section of X43

[0259] The first Y-coil group of the first stator segment of Y11

[0260] The second Y-coil group of the first stator section of Y12

[0261] The third Y-coil group of the first stator section of Y13

[0262] The first Y-coil group of the second stator section of Y21

[0263] The second Y-coil group of the second stator section of Y22

[0264] The third Y-coil group of the second stator section of Y23

[0265] The first Y-coil group of the third stator section of Y31

[0266] The second Y-coil group of the third stator section of Y32

[0267] The third Y-coil group of the third stator section of Y33

[0268] The first Y-coil group of the fourth stator section of Y41

[0269] The second Y-coil group of the fourth stator section of Y42

[0270] The third Y-coil group of the fourth stator section of Y43

[0271] x-component of the magnetic field of the 3Bx coil group

[0272] The y-component of the magnetic field of the 3By coil group

[0273] z-component of the magnetic field of the 3Bz coil group

[0274] x-component of the magnetic field of the 4Bx magnet unit

[0275] The x-component of the magnetic field of the 4By magnet unit

[0276] x-component of the magnetic field of a 4Bz magnet unit

[0277] The x-component of the magnetic force Fx exerts on the rotor

[0278] The y-component of the magnetic force Fy acts on the rotor

[0279] The z-component of the magnetic force Fz acts on the rotor

[0280] The x-component of the magnetic force exerted by Fx1 on the magnet unit

[0281] The y-component of the magnetic force Fy1 acting on the magnet unit

[0282] The z-component of the magnetic force Fz1 acting on the magnet unit

[0283] The x-component of the magnetic force exerted by Fx2 on the magnet unit

[0284] The y-component of the magnetic force exerted by Fy2 on the magnet unit

[0285] The z-component of the magnetic force Fz2 acting on the magnet unit

[0286] The x-component of the magnetic force exerted by Fx3 on the magnet unit

[0287] The y-component of the magnetic force exerted by Fy3 on the magnet unit

[0288] The z-component of the magnetic force exerted by Fz3 on the magnet unit

[0289] The x-component of the magnetic force exerted by Fx4 on the magnet unit

[0290] The y-component of the magnetic force exerted by Fy4 on the magnet unit

[0291] The z-component of the magnetic force exerted by Fz4 on the magnet unit

[0292] z-component of the torque of the Mz rotor

[0293] α rotation angle

[0294] RP rotation position

[0295] The center of the Z rotor

[0296] 500 sensor module

[0297] 501 Magnetic Field Sensor

Claims

1. A method (100) for controlling a planar drive system (200), wherein the planar drive system (200) includes a stator unit (300) having a plurality of coil groups (321) for generating a stator magnetic field and a rotor (400) having a plurality of magnet units (407) for generating a rotor magnetic field, wherein the rotor (400) can be driven on the stator unit (300) by magnetic coupling between the stator magnetic field and the rotor magnetic field, wherein the plurality of coil groups (321) includes a rectangular X coil group (323) and a rectangular Y coil group (325), wherein the X coil group (323) extends along the X direction of the stator unit (300), and the Y coil group (325) extends along the Y direction of the stator unit (300) perpendicular to the X direction, wherein, The X coil group (323) and the Y coil group (325) are arranged along the X direction and the Y direction of the stator unit (300), wherein each coil group (321) includes a plurality of stator conductors (309) extending along the X or Y direction, wherein the plurality of magnet units (407) of the rotor (400) include rectangular X magnet units (411, 413) and rectangular Y magnet units (415, 417), wherein the X magnet units (411, 413) extend along the X direction of the rotor (400), and wherein the Y magnet units (415, 417) extend along the Y direction of the rotor (400) perpendicular to the X direction, characterized in that the method (100) includes: In the moving step (101), the rotor (400) is moved to a rotational position (RP) of the rotor (400) on the stator unit (300), wherein in the rotational position (RP), in each orientation of the rotor (400) relative to the stator unit (300), each magnet unit (407) of the rotor (400) covers a coil group (321) of the stator unit (300), the coil group not being covered by any other magnet unit (407) of the rotor (400); In the manipulation step (103), coil groups (321) covered by the magnet units (407) of the rotor (400) in the rotated position (RP) are manipulated, and a stator magnetic field is generated through each manipulated coil group (321); and In the rotation step (105), the rotor (400) is rotated by a predetermined rotation angle (α) around a rotation axis oriented perpendicular to the stator surface (303) of the stator unit (300) by the stator magnetic field of the manipulated coil group (321) covered by the magnet unit (407) of the rotor (400).

2. The method (100) according to claim 1, wherein the stator unit (300) comprises a plurality of stator segments (308), wherein the stator segments (308) are rectangular and arranged in pairs along the X or Y direction, wherein each stator segment (308) comprises an X coil group (323) and a Y coil group (325) respectively, which are separate from the X coil groups (323) and Y coil groups (325) of the other stator segments (308), and wherein the rotational position (RP) is the position where the four stator segments (308) on the stator unit (300) are adjacent to each other.

3. The method (100) according to any one of the preceding claims, wherein the control step (103) comprises: In the first energizing step (107), each of the coil groups (321) covered by the magnet unit (407) is individually energized.

4. The method (100) according to claim 3, wherein the manipulation step (103) comprises: In the force determination step (109), the magnetic force exerted by the stator magnetic field of the coil group (321) on the magnet unit (407) covering the coil group (321) is determined; In the energization determination step (111), for each of the coil groups (321) covered by the magnet unit (407), individual energization is determined such that the sum of the magnetic forces of the stator magnetic field acting on the magnet unit (407) according to the individual energization of the coil group (321) generates a torque of the rotor (400) about the axis of rotation, which is capable of causing the rotor to rotate by the rotation angle (α).

5. The method (100) according to claim 4, wherein the force determination step (109) comprises: In the torque calculation step (113), the torque required to rotate the predetermined rotation angle (α) is calculated; In the force calculation step (115), the magnetic force required to generate the torque and acting on each magnet unit (407) of the rotor (400) is calculated; and wherein the energization determination step (111) includes: In the current supply calculation step (117), the single current supply to the coil group (321) required to generate the calculated magnetic force is calculated.

6. The method (100) according to claim 5, wherein the torque and the force are calculated in the force determination step (109), and the current supply is calculated by the control unit (201) of the planar drive system (200) during the control of the rotor (400) in the power-on determination step (111).

7. The method (100) according to claim 5 or 6, wherein calculating the torque and / or the force in the force determination step (109) and / or calculating the current supply in the energization determination step (111) includes simulation, wherein the simulation is based on a model description of the relationship between the current supply to the coil group (321) and the magnetic force acting on the magnet unit (407) and / or a model description of the relationship between the current supply to the coil group (321) and the torque acting on the rotor (400).

8. The method (100) according to any one of the preceding claims, wherein the moving step (101) comprises: In the coil determination step (119), the coil group (321) of the stator unit (300) covered by the magnet unit (407) of the rotor (400) is determined.

9. The method (100) according to claim 8, wherein the coil determining step (119) comprises: In the detection step (121), the rotor magnetic field of each magnet unit (407) of the rotor (400) is detected by the magnetic field sensor (501) of the stator unit (300); In the definition step (123), a coverage area (329) is defined for each magnet unit (407), wherein the coverage area (329) marks the area of ​​the stator unit (300) including the magnetic field sensor (501) for detecting the rotor magnetic field of the corresponding magnet unit (407); as well as In the measurement step (125), the coil group (321) arranged at least partially in the coverage area (329) is measured.

10. The method (100) according to any one of the preceding claims, wherein the moving step (101) comprises: In the second energizing step (127), multiple coil groups (321) are energized with a shared theoretical current supply.

11. The method (100) according to any one of claims 2 to 10, wherein the rotor (400) comprises two X magnet units (411, 413) and two Y magnet units (415, 417), wherein the X magnet units (411, 413) are arranged along the Y direction on opposite sides of the rotor (400), and the Y magnet units (415, 417) are arranged along the X direction on opposite sides of the rotor (400), and wherein in the rotational position (RP), at least four coil groups (321) are covered by the magnet units (407), and wherein each of the four coil groups (321) is arranged in a stator segment (308).

12. The method (100) according to any one of the preceding claims, wherein the rotation angle (α) can be selected from any value between 0° and 360°.

13. The method (100) according to any one of the preceding claims, wherein the X coil group (323) is capable of generating a stator magnetic field having a Y component and a Z component, wherein the Y coil group (325) is capable of generating a stator magnetic field having an X component and a Z component, wherein the X component is oriented along the X direction of the stator unit (300), the Y component is oriented along the Y direction of the stator unit, and the Z component is oriented along the Z direction of the stator unit, which is perpendicular to the X and Y directions.

14. The method (100) according to any one of the preceding claims, wherein the X magnet unit (411, 413) is capable of generating a rotor magnetic field having a Y component and a Z component, wherein the Y magnet unit (415, 417) is capable of generating a rotor magnetic field having an X component and a Z component, wherein the X component is oriented along the X direction of the rotor (400), the Y component is oriented along the Y direction of the rotor, and the Z component is oriented along the Z direction of the rotor, which is perpendicular to the X and Y directions.

Images