Integrated chip, method for manufacturing integrated chip, and semiconductor random laser

By using a combination of a ring mirror structure and a directional coupler in a random laser, the problem of poor integration of the feedback structure is solved, high feedback intensity and large reflection bandwidth are achieved, and the integration and manufacturing efficiency of the laser are improved.

CN116487994BActive Publication Date: 2025-10-21WUXI INST OF INTERCONNECT TECH CO LTD
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Patent Information

Application Number
CN202310546996.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-05-16
Publication Date
2025-10-21
Estimated Expiration
2043-05-16

AI Technical Summary

Technical Problem

Existing random lasers have problems in feedback structure, such as poor integration and difficulty in balancing high feedback intensity and large reflection bandwidth. In particular, the feedback intensity of lasers based on Rayleigh scattering is weak, while the operating bandwidth of lasers based on random gratings is limited.

Method used

A loop mirror structure is used as the feedback structure. Multiple loop mirrors are connected in sequence, combined with a directional coupler and a connecting waveguide to form random feedback. The reflectivity of the loop mirror is ≤5%, and a laser gain zone is formed by a semiconductor optical amplifier and a reflection structure to achieve random reflection and gain of the laser.

Benefits of technology

It achieves high integration, high feedback intensity and large reflection bandwidth, reduces etching precision requirements, improves production efficiency, and enhances the reliability and practicality of the laser.

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Abstract

The application belongs to the technical field of semiconductor lasers, and discloses an integrated chip, a manufacturing method of the integrated chip and a semiconductor random laser. The integrated chip comprises ring mirrors, the ring mirror comprises a ring mirror waveguide and a directional coupler, the two ends of the ring mirror waveguide are connected with the ports on the corresponding sides of the directional coupler, the number of the ring mirrors is set to be multiple, the multiple ring mirrors are connected in sequence to provide random feedback, two adjacent ring mirrors are connected through a connecting waveguide, and the ring mirror located at one end is connected with a light output waveguide on the side away from the adjacent ring mirror. The semiconductor random laser comprises the integrated chip, and further comprises a semiconductor optical amplifier, the semiconductor optical amplifier is connected with the light output waveguide of the integrated chip, and the output end of the semiconductor optical amplifier is provided with a reflection structure corresponding to the light output waveguide. The integrated chip provided by the application is used as the feedback structure of the semiconductor random laser, has the advantages of simple structure, high integration, and greater reflection bandwidth and higher feedback strength.
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