Flexible high-efficiency complex operation robot

Abstract

The present application relates to the technical field of complex operation robot, and particularly relates to a flexible and efficient complex operation robot, which comprises a mobile chassis and an operation machine group, the mobile chassis comprises an operation mounting table, a mobile support, universal wheels and a rudder wheel suspension mechanism, the rudder wheel suspension mechanism has a rudder wheel body and a rotation driving assembly for driving the rudder wheel body to rotate, the rudder wheel body is a driving wheel provided with a hub motor, the rudder wheel suspension mechanism and the universal wheels are installed at the bottom of the mobile support and cooperate with each other, the rotation driving assembly is used for driving the rudder wheel body to rotate, the in-place rotation of the rudder wheel suspension mechanism is realized, the rudder wheel body of the rudder wheel suspension mechanism is a driving wheel provided with a hub motor, the forward movement / back movement of the rudder wheel suspension mechanism is realized, compared with the traditional mobile chassis, the mobile chassis is more exquisite in structure design, is more conducive to saving space volume, can better adapt to narrow space, meets the requirement that the anti-shock rate is lower than 0.5G of the SEMI standard, and is suitable for the semiconductor industry.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of collaborative robots, in particular to a flexible and efficient collaborative robot. BACKGROUND

[0002] The so-called omnidirectional AGV robot is capable of omnidirectional operation, such as 90° turning, 180° U-turn, 360° rotation, lateral movement and the like, and can be used in some complex environments.

[0003] Firstly, the omnidirectional AGV robot adopts rudder wheel driving, which has high adaptability compared with the differential control mode of the traditional AGV trolley, and can quickly deploy the AGV mobile robot in cooperation with the step driver or servo driver. Moreover, the rudder wheel driving can realize more accurate omnidirectional movement, and does not need complicated algorithms and continuous path control.

[0004] The semiconductor industry manufacturing process has very high requirements for cleanliness and environment, and it is usually difficult to maintain the required clean room conditions by manual operation. By replacing manual operation with mobile collaborative robots to transport wafer frame boxes between various devices, not only the production efficiency of the factory can be improved, but also digital production can be completely realized to monitor the production process of each wafer and ensure the quality of the product. The mobile collaborative robot is also called collaborative robot, and the anti-shock rate of the collaborative robot for the semiconductor industry is required to be lower than the SEMI standard 0.5G. However, the existing collaborative robot is restricted by the technology of the mobile chassis, and the anti-shock rate is much higher than the SEMI standard 0.5G. The suspension running stability is poor, and the space volume is large, which is more unfavorable for narrow space use, and it is difficult to adapt to the semiconductor industry. SUMMARY

[0005] In order to overcome the shortcomings and deficiencies in the prior art, the purpose of the present application is to provide a flexible and efficient collaborative robot.

[0006] The purpose of the present application is achieved by the following technical scheme: a flexible and efficient collaborative robot, comprising a mobile chassis and a work machine group connected to the top of the mobile chassis, the mobile chassis comprising a work installation table connected with the work machine group, a mobile support connected with the work installation table, a universal wheel installed at the bottom of the mobile support, and a rudder wheel suspension mechanism installed at the bottom of the mobile support, the rudder wheel suspension mechanism having a rudder wheel body and a rotation driving assembly for driving the rudder wheel body to rotate, the rudder wheel body being a driving wheel with a hub motor.

[0007] Preferably, the rudder suspension mechanism further comprises a rotating driving assembly arranged in the mobile bracket, a hollow suspension table fixedly connected to the bottom of the mobile bracket, a hollow rotating table fixedly connected to the hollow suspension table and in transmission connection with the output end of the rotating driving assembly, a rotating seat connected to the rotating disc of the hollow rotating table, a rudder mounting seat arranged on both sides of the rotating seat in a lifting manner, and an adjusting and damping assembly connecting the rotating seat and the rudder mounting seat, and the rudder body is arranged in the rudder mounting seat in a rotating manner.

[0008] Preferably, the adjusting and damping assembly comprises a bolt, an adjusting nut, and a compression spring clamped between the rotating seat and the rudder mounting seat, the rotating seat is provided with a first through hole, the rudder mounting seat is provided with a second through hole, the bolt passes through the first through hole, the compression spring and the second through hole in sequence and is in threaded connection with the adjusting nut.

[0009] Preferably, the rudder suspension mechanism further comprises a linear guide rail vertically connected to the outer side wall of the rotating seat, and a sliding block slidingly connected to the linear guide rail and fixedly connected with the rudder mounting seat.

[0010] Preferably, a threading hole is arranged in the middle part of the rotating seat, and the middle part of the hollow rotating table, the middle part of the hollow suspension table and the threading hole are sequentially communicated to form a channel for passing a wire to the hub motor.

[0011] Preferably, the rotating driving assembly comprises a first servo motor arranged in the mobile bracket, and the output end of the first servo motor is in transmission connection with the hollow rotating table.

[0012] Preferably, the mobile chassis further comprises a first laser ranging sensor and a second laser ranging sensor, and the first laser ranging sensor and the second laser ranging sensor are respectively connected to the opposite corners of the mobile bracket.

[0013] Preferably, the mobile chassis further comprises an outer shell arranged around the mobile bracket, the first laser ranging sensor and the second laser ranging sensor both pass through the outer shell, the outer shell is provided with a first L-shaped accommodation slot near the two side surfaces of the first laser ranging sensor for expanding the range of the divergent laser of the first laser ranging sensor, and the outer shell is provided with a second L-shaped accommodation slot near the two side surfaces of the second laser ranging sensor for expanding the range of the divergent laser of the second laser ranging sensor.

[0014] Preferably, the mobile chassis further comprises a base connected to the bottom of the mobile bracket, and the middle part of the base is provided with a battery accommodating groove.

[0015] Preferably, the work machine set comprises an electric control box connected with the work mounting table, a mechanical hand support plate connected with the electric control box, an industrial collaborative mechanical hand connected with the top of the mechanical hand support plate, a material taking and placing mechanism connected with the output end of the industrial collaborative mechanical hand, and a material rack connected with the electric control box, the material taking and placing mechanism being used for taking and placing a carrier carrying a processing material.

[0016] The flexible and efficient composite work robot has the following advantages: the mobile chassis adopts a mobile support and a work mounting table to carry a work machine set, the rudder wheel suspension mechanism and the universal wheel are installed at the bottom of the mobile support and cooperate with each other, the rudder wheel body is driven to rotate by using a rotating driving assembly, the in-place rotation of the rudder wheel suspension mechanism is realized, the rudder wheel body of the rudder wheel suspension mechanism is a driving wheel provided with a hub motor, the advancing / retracting of the rudder wheel suspension mechanism is realized, the hub motor is more exquisite than a traditional external motor driving rudder wheel structure, has a smaller turning radius and is more flexible, compared with a traditional mobile chassis, the mobile chassis structure is more exquisite, is more conducive to saving space volume, is more suitable for narrow space, and can meet the requirement that the anti-shock rate is lower than 0.5G of the SEMI standard, and is suitable for processing, production and manufacturing of the semiconductor industry. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is a structural schematic view of the present application;

[0018] Figure 2 is an exploded schematic view of the mobile chassis of the present application;

[0019] Figure 3 is an exploded schematic view of the rudder wheel suspension mechanism of the present application;

[0020] Figure 4 is a structural schematic view of the work machine set of the present application;

[0021] Figure 5 is a structural schematic view of the material taking and placing mechanism of the present application;

[0022] The reference signs are as follows:

[0023] 1. Mobile chassis; 11. Work mounting platform; 12. Mobile bracket; 13. Universal wheel; 14. Steering wheel suspension mechanism; 141. Steering wheel body; 142. Hollow suspension platform; 143. Hollow rotating platform; 144. Rotating seat; 145. Steering wheel mounting seat; 146. Adjustable shock absorber assembly; 1461. Bolt; 1462. Adjusting nut; 1463. Compression spring; 147. Linear guide; 148. Slider; 149. Rotation drive assembly; 15. First laser ranging Sensor; 16. Second laser ranging sensor; 17. Outer shell; 18. Base; 2. Operating unit; 21. Electric control box; 22. Robot support plate; 23. Industrial collaborative robot; 24. Material picking and unloading mechanism; 241. Clamping plate; 242. Retractable pressure head; 25. Material rack; 3. First through hole; 4. Threading hole; 5. First L-shaped clearance groove; 6. Second L-shaped clearance groove; 7. Battery storage tank; 8. Carrier; 81. Clamping plate; 9. Storage tank; 10. Card slot. DETAILED DESCRIPTION

[0024] In order to facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and drawings. The contents mentioned in the embodiments are not intended to limit the present invention.

[0025] like Figures 1-5 As shown, a flexible and efficient composite working robot includes a mobile chassis 1 and an operating unit 2 connected to the top of the mobile chassis 1, the mobile chassis 1 includes an operating mounting platform 11 connected to the operating unit 2, a mobile bracket 12 connected to the operating mounting platform 11, a universal wheel 13 installed at the bottom of the mobile bracket 12, and a steering wheel suspension mechanism 14 installed at the bottom of the mobile bracket 12, the steering wheel suspension mechanism 14 has a steering wheel body 141 and a rotation drive assembly 149 for driving the steering wheel body 141 to rotate, and the steering wheel body 141 is a driving wheel equipped with a hub motor.

[0026] The flexible and efficient composite operation robot has a mobile chassis 1 that adopts a mobile bracket 12 and an operation mounting platform 11 to carry the operation unit 2. A steering wheel suspension mechanism 14 and a universal wheel 13 are installed at the bottom of the mobile bracket 12 to cooperate with each other. The steering wheel body 141 is driven to rotate by a rotation drive component 149 to realize the in-situ rotation of the steering wheel suspension mechanism 14. The steering wheel body 141 of the steering wheel suspension mechanism 14 is a driving wheel equipped with a hub motor, which realizes the forward / backward movement of the steering wheel suspension mechanism 14. The hub motor is more sophisticated, has a smaller turning radius, and is more flexible than the traditional external motor-driven steering wheel structure. Compared with the traditional mobile chassis 1, the mobile chassis 1 of the present invention has a more sophisticated structural design, is more conducive to saving space volume, is more adaptable to narrow spaces, and can meet the requirements of a seismic resistance rate lower than the SEMI standard 0.5G, and is suitable for processing and manufacturing in the semiconductor industry.

[0027] Further, the rudder wheel suspension mechanism 14 further comprises a rotating driving assembly 149 arranged in the moving bracket 12, a hollow suspension table 142 fixedly connected to the bottom of the moving bracket 12, a hollow rotating table 143 fixedly connected to the hollow suspension table 142 and in transmission connection with the output end of the rotating driving assembly 149, a rotating seat 144 connected with the rotating disc of the hollow rotating table 143, rudder wheel mounting seats 145 arranged on both sides of the rotating seat 144 in a lifting manner, and an adjusting damping assembly 146 connecting the rotating seat 144 and the rudder wheel mounting seats 145, and the rudder wheel body 141 is arranged in the rudder wheel mounting seats 145 in a rotating manner. The rotating driving assembly 149 drives the hollow rotating table 143 to rotate, drives the rotating seat 144 and the rudder wheel mounting seats 145 to rotate, and then drives the rudder wheel body 141 to rotate in place. In addition, the adjusting damping assembly 146 is connected between the rotating seat 144 and the rudder wheel mounting seats 145, and the compression degree of the adjusting damping assembly 146 is adjusted to promote the mobile chassis 1 to meet the requirement of the anti-shock rate being lower than 0.5G of the SEMI standard.

[0028] Specifically, the adjusting damping assembly 146 comprises a bolt 1461, an adjusting nut 1462, and a compression spring 1463 arranged between the rotating seat 144 and the rudder wheel mounting seats 145, the rotating seat 144 is provided with a first through hole 3, the rudder wheel mounting seats 145 are provided with a second through hole, and the bolt 1461 penetrates the first through hole 3, the compression spring 1463 and the second through hole in sequence and is in threaded connection with the adjusting nut 1462. The adjusting nut 1462 is screwed to make the rudder wheel mounting seats 145 rise / lower, so as to adjust the compression degree of the compression spring 1463, and then promote the mobile chassis 1 to meet the requirement of the anti-shock rate being lower than 0.5G of the SEMI standard.

[0029] Further, the rudder wheel suspension mechanism 14 further comprises a linear guide rail 147 vertically connected to the outer side wall of the rotating seat 144, and a sliding block 148 slidingly connected to the linear guide rail 147 and fixedly connected with the rudder wheel mounting seats 145. Compared with the traditional guide column and guide sleeve cooperation, the sliding block 148 and the linear guide rail 147 are used in a sliding cooperation, which has better stability, is more conducive to promoting the mobile chassis 1 to meet the requirement of the anti-shock rate being lower than 0.5G of the SEMI standard, has lower wear rate, longer service life, reduces maintenance cost and maintenance time.

[0030] Further, a through hole 4 is formed in the middle of the rotating seat, and the middle of the hollow rotating table 143, the middle of the hollow suspension table 142 and the through hole 4 are sequentially communicated to form a channel for the line to pass to the hub motor. The channel formed by the sequential communication of the middle of the hollow rotating table 143, the middle of the hollow suspension table 142 and the through hole 4 is conducive to saving space and avoiding damage caused by excessive winding of the line.

[0031] Further, the rotating drive assembly 149 comprises a first servo motor arranged in the mobile support 12, an output end of the first servo motor is in transmission connection with the hollow rotating table 143, and the first servo motor and the hollow rotating table 143 cooperate to more accurately control the rotating angle.

[0032] Further, the mobile chassis 1 further comprises a first laser ranging sensor 15 and a second laser ranging sensor 16, the first laser ranging sensor 15 and the second laser ranging sensor 16 are respectively connected to opposite corners of the mobile support 12, realize 360° omnidirectional scanning, can be assisted by laser SLAM navigation technology, uses the first laser ranging sensor 15 and the second laser ranging sensor 16 to collect laser beams reflected by the natural environment, to locate the current position and direction, autonomously perceive the environment, autonomously construct the environment contour map and the path, to realize the accurate navigation and guidance of the mobile chassis 1.

[0033] Further, the mobile chassis 1 further comprises an outer shell 17 arranged around the mobile support 12, the first laser ranging sensor 15 and the second laser ranging sensor 16 all penetrate the outer shell 17, the outer shell 17 is provided with a first L-shaped accommodation slot 5 for expanding the divergent laser range of the first laser ranging sensor 15 on the two side surfaces close to the first laser ranging sensor 15, and the outer shell 17 is provided with a second L-shaped accommodation slot 6 for expanding the divergent laser range of the second laser ranging sensor 16 on the two side surfaces close to the second laser ranging sensor 16. The outer shell 17 is provided with the first L-shaped accommodation slot 5 and the second L-shaped accommodation slot 6, which avoids the first laser ranging sensor 15 and the second laser ranging sensor 16 from being blocked by the outer shell 17 and failing to realize 360° omnidirectional scanning, and the structure is more exquisite.

[0034] Further, the mobile chassis 1 further comprises a base 18 connected to the bottom of the mobile support 12, and a battery accommodating groove 9 is arranged in the middle of the base 18, the storage battery can be accommodated in the battery accommodating groove 9, the space at the bottom of the mobile support 12 is reasonably utilized, and the space utilization rate is improved.

[0035] Further, the working machine group 2 comprises an electric control box 21 connected with the working installation table 11, a mechanical hand supporting plate 22 connected with the electric control box 21, an industrial collaborative mechanical hand 23 connected to the top of the mechanical hand supporting plate 22, a material taking and placing mechanism 24 connected with the output end of the industrial collaborative mechanical hand 23, and a material rack 25 connected with the electric control box 21, and the material taking and placing mechanism 24 is used for taking and placing the carrier 8 carrying the processing materials.

[0036] In use, the mobile chassis 1 moves and approaches a product processing device, and the industrial collaborative manipulator 23 drives the material taking and placing mechanism 24 to take the carrier 8 on the rack 25 and transfer it to the processing device, or drives the material taking and placing mechanism 24 to take the carrier 8 in the processing device and transfer it to the rack 25, greatly saving manpower.

[0037] Further, the rack 25 has at least two layers of structure, and each layer can place at least one carrier 8.

[0038] Further, the carrier 8 is a wafer frame box, the top of the carrier 8 protrudes a clamping plate 81 for being taken by the material taking and placing mechanism 24, and the middle of the clamping plate 81 is provided with a clearance hole; the material taking and placing mechanism 24 includes a clamping disc 241 connected to the output end of the industrial collaborative manipulator 23, and a telescopic pressure head 242 provided with a compression spring 1463, the bottom of the clamping disc 241 is provided with a receiving groove 9, the middle of the clamping disc 241 is provided with a receiving space for the end of the telescopic pressure head 242 to move up and down, the end of the telescopic pressure head 242 penetrates through the compression spring 1463 and is accommodated in the receiving space, and the side wall of the receiving groove 9 is provided with a clamping groove 10 for clamping the corner end of the clamping plate 81, and the telescopic pressure head 242 is used for penetrating through the clearance hole and pressing the carrier 8. In use, the industrial collaborative manipulator 23 drives the clamping disc 241 to cover the clamping plate 81, the telescopic pressure head 242 penetrates through the clearance hole and presses the carrier 8, and then the industrial collaborative manipulator 23 drives the clamping disc 241 to rotate by a certain angle, so that the clamping groove 10 clamps the corner end of the clamping plate 81, and the industrial collaborative manipulator 23 can drive the material taking and placing mechanism 24 to take the carrier 8, and the telescopic pressure head 242 provided with the compression spring 1463 always presses the carrier 8 during taking the carrier 8, which is more conducive to avoiding the shaking of the carrier 8.

[0039] The above embodiments are the preferred implementation of the present application, in addition to this, the present application can be implemented in other ways, without departing from the concept of the present application, any obvious replacement within the protection scope of the present application.

Claims

1. A flexible and efficient composite working robot, comprising a mobile chassis and an operating unit connected to the top of the mobile chassis, characterized in that: The mobile chassis includes an operation mounting platform connected to the operation unit, a mobile bracket connected to the operation mounting platform, a universal wheel installed at the bottom of the mobile bracket, and a steering wheel suspension mechanism installed at the bottom of the mobile bracket, wherein the steering wheel suspension mechanism has a steering wheel body and a rotation drive assembly for driving the steering wheel body to rotate, and the steering wheel body is a driving wheel equipped with a hub motor; The steering wheel suspension mechanism also includes a rotation drive assembly accommodated in the mobile bracket, a hollow suspension platform fixedly connected to the bottom of the mobile bracket, a hollow rotating platform fixedly connected to the hollow suspension platform and transmission-connected to the output end of the rotation drive assembly, a rotating seat connected to the turntable of the hollow rotating platform, a steering wheel mounting seat arranged to be lifted and lowered on both sides of the rotating seat, and an adjustment and shock-absorbing assembly connecting the rotating seat and the steering wheel mounting seat, wherein the steering wheel body is rotatably arranged on the steering wheel mounting seat; The adjustable shock-absorbing assembly includes a bolt, an adjusting nut, and a compression spring sandwiched between the rotating seat and the steering wheel mounting seat, the rotating seat is provided with a first through hole, the steering wheel mounting seat is provided with a second through hole, the bolt passes through the first through hole, the compression spring, and the second through hole in sequence and is threadedly engaged with the adjusting nut; the operating unit includes an electrical control box connected to the operating mounting platform, a manipulator support plate connected to the electrical control box, an industrial collaborative manipulator connected to the top of the manipulator support plate, a material picking and placing mechanism connected to the output end of the industrial collaborative manipulator, and a material rack connected to the electrical control box, the material picking and placing mechanism is used to pick up and place a carrier carrying processed materials; The carrier is a wafer frame box, and a clamping plate protrudes from the top of the carrier for extraction by the material taking and unloading mechanism, and a clearance hole is provided in the middle of the clamping plate; the material taking and unloading mechanism includes a clamping plate connected to the output end of the industrial collaborative robot, and a retractable pressure head with a compression spring, a receiving groove is provided at the bottom of the clamping plate, and a receiving space is provided in the middle of the clamping plate for the lifting and lowering activities of the end of the retractable pressure head, the end of the retractable pressure head passes through the compression spring and is accommodated in the receiving space, the side wall of the receiving groove is provided with a clamping groove for clamping with the corner end of the clamping plate, and the retractable pressure head is used to pass through the clearance hole and press the carrier.

2. A flexible and efficient composite working robot according to claim 1, characterized in that: The steering wheel suspension mechanism further includes a linear guide rail vertically connected to the outer side wall of the rotating seat, and a slider slidably connected to the linear guide rail and fixedly connected to the steering wheel mounting seat.

3. The flexible and efficient composite working robot according to claim 1, characterized in that: A threading hole is provided in the middle of the rotating seat, and the middle of the hollow rotating platform, the middle of the hollow suspension platform and the threading hole are connected in sequence to form a channel for passing the line to the hub motor.

4. The flexible and efficient composite working robot according to claim 1, characterized in that: The rotation drive assembly includes a first servo motor accommodated in the movable bracket, and the output end of the first servo motor is transmission-connected to the hollow rotating table.

5. The flexible and efficient composite working robot according to claim 1, characterized in that: The mobile chassis further includes a first laser ranging sensor and a second laser ranging sensor, and the first laser ranging sensor and the second laser ranging sensor are respectively connected to the diagonal positions of the mobile bracket.

6. The flexible and efficient composite working robot according to claim 5, characterized in that: The mobile chassis also includes an outer shell arranged around the mobile bracket, the first laser ranging sensor and the second laser ranging sensor both pass through the outer shell, and the outer shell is provided with a first L-shaped makeshift groove for expanding the divergent laser range of the first laser ranging sensor on both sides close to the first laser ranging sensor, and a second L-shaped makeshift groove for expanding the divergent laser range of the second laser ranging sensor on both sides close to the second laser ranging sensor.

7. The flexible and efficient composite working robot according to claim 1, characterized in that: The mobile chassis further comprises a base connected to the bottom of the mobile bracket, and a battery accommodating tank is provided in the middle of the base.

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