Heat exchange medium recovery device and recovery method

Abstract

The application provides a heat exchange medium recycling device and method, belongs to the field of semiconductor wafer processing equipment and refrigeration technology, and the inlet end of a shunt unit is connected with the outlet end of a temperature control device provided with heat exchange medium to be recycled, the outlet end of the shunt unit is connected with a condensing unit and a gas circulation unit respectively, the outlet end of the condensing unit is connected with a recycling unit, the recycling unit carries out gas-liquid separation on a gas-liquid mixture, obtains liquid heat exchange medium, and outputs the separated gas into the gas circulation unit; a heating unit is connected with a compressor and the temperature control device respectively, the outlet end of the gas circulation unit is connected with the inlet end of the heating unit, and the heating unit is used for outputting the gas cooled by the heating unit into the temperature control device. The application forms a circulating path among the shunt unit, the recycling unit, the gas circulation unit and the temperature control device to be recycled, carries out recycling treatment on the heat exchange medium in the temperature control device based on the condensing method, and improves the liquid recovery rate.

Description

Heat exchange medium recovery device and recovery method Technical Field

[0001] This invention relates to the fields of semiconductor wafer processing equipment and refrigeration technology, and particularly to a heat exchange medium recovery device and recovery method. Background Technology

[0002] In semiconductor wafer fabrication equipment, a dedicated temperature control device is required to maintain a constant temperature within the wafer processing cavity. A heat exchange medium is installed between the temperature control device and the processing cavity. The temperature control device is charged with the heat exchange medium at the factory for equipment commissioning. After commissioning, the heat exchange medium inside the equipment needs to be drained and reused for subsequent equipment commissioning. Because the heat exchange medium is relatively expensive, the amount of heat exchange medium lost after each commissioning is an important indicator for calculating equipment commissioning costs.

[0003] Currently, the temperature control device mainly relies on gravity to discharge the heat exchange medium from the pipeline. Secondly, based on gravity drainage, positive pressure air is continuously introduced into the device's pipeline to blow out a portion of the liquid. However, because the internal pipelines of the temperature control device use stainless steel corrugated pipes with numerous S-shaped folds on the pipe walls, and contain complex internal media flow channels such as water pumps and plate heat exchangers, the gravity drainage and positive pressure gas purging methods cannot achieve complete recycling. Only a portion of the liquid within the temperature control device can be recovered, resulting in a low liquid recovery rate. Summary of the Invention

[0004] This invention provides a heat exchange medium recovery device and recovery method to solve the defects of existing technologies, such as gravity drainage and positive pressure gas purging, which cannot achieve recycling and can only recover a portion of the liquid in the temperature control device, resulting in a low liquid recovery rate.

[0005] This invention provides a heat exchange medium recovery device, comprising a diversion unit, a compressor, a condensation unit, a gas circulation unit, a heating unit, and a recovery unit;

[0006] The inlet end of the diversion unit is connected to the outlet end of the temperature control device, and the outlet end of the diversion unit is connected to the condensation unit and the gas circulation unit respectively, so that the gas output by the temperature control device is transmitted to the condensation unit and the gas circulation unit respectively. The temperature control device contains heat exchange medium to be recovered.

[0007] The outlet of the condensation unit is connected to the recovery unit and is used to condense the gas input from the diversion unit to obtain a gas-liquid mixture. The gas-liquid mixture is then output to the recovery unit, where it performs gas-liquid separation to obtain the liquid heat exchange medium. The separated gas is then output to the gas circulation unit.

[0008] The compressor is connected to the condensing unit; the heating unit is connected to both the compressor and the temperature control device; the outlet of the gas circulation unit is connected to the inlet of the heating unit, for outputting the gas heated by the heating unit to the temperature control device.

[0009] According to the present invention, a heat exchange medium recovery device further includes a control unit, which is used to acquire first temperature information at the inlet of the diversion unit and control the gas circulation unit according to the first temperature information and a first preset temperature, wherein the first preset temperature is determined based on the heat exchange medium.

[0010] According to a heat exchange medium recovery device provided by the present invention, the condensation unit includes a condenser and an evaporator. The inlet end of the condenser is connected to the heating unit, and the outlet end is connected to the evaporator. The evaporator is also connected to the compressor. The heat release side pipeline of the evaporator performs condensation treatment on the gas input from the diversion unit based on the heat exchange principle.

[0011] According to a heat exchange medium recovery device provided by the present invention, the heat absorption side of the condenser is further provided with a regulating valve, which is used to adjust the opening degree according to the second temperature information of the compressor exhaust side.

[0012] According to a heat exchange medium recovery device provided by the present invention, the condensation unit further includes a throttling device disposed between the condenser and the evaporator.

[0013] According to a heat exchange medium recovery device provided by the present invention, the gas circulation unit includes a fan, and the outlet end of the fan is connected to the heating unit.

[0014] According to a heat exchange medium recovery device provided by the present invention, the gas circulation unit further includes a three-way regulating valve, which is used to adjust the gas flow rate of the diversion unit and the recovery unit into the fan according to the third temperature information at the inlet end of the recovery unit.

[0015] According to a heat exchange medium recovery device provided by the present invention, the recovery unit includes a gas-liquid separator, the inlet end of which is connected to the condensation unit and the outlet end of which is connected to the gas circulation unit, for recovering the heat exchange medium from the gas-liquid mixture.

[0016] According to the present invention, a heat exchange medium recovery device is provided, wherein the flow splitting unit is a three-way pipeline.

[0017] The present invention also provides a method for recovering heat exchange medium, implemented based on the aforementioned heat exchange medium recovery device, comprising:

[0018] A flow splitting unit is provided at the outlet end of the temperature control device. The flow splitting unit transmits the gas output by the temperature control device to the condensation unit and the gas circulation unit respectively. The temperature control device contains heat exchange medium to be recovered.

[0019] The gas input from the diversion unit is condensed by the condensation unit to obtain a gas-liquid mixture, which is then output to the recovery unit. The condensation unit is connected to the compressor for cooling.

[0020] The gas-liquid mixture is separated by the recovery unit to obtain the liquid heat exchange medium, and the separated gas is output to the gas circulation unit.

[0021] The gas cooled by the heating unit is fed into the temperature control device for recycling by the gas circulation unit.

[0022] The heat exchange medium recovery device and recovery method provided by the present invention include a diversion unit, a compressor, a condensation unit, a gas circulation unit, a heating unit, and a recovery unit. A circulation path is formed between the diversion unit, the recovery unit, the gas circulation unit, and the temperature control device to be recovered. The heat exchange medium in the temperature control device is recycled and recovered based on the condensation method, thereby improving the liquid recovery rate. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 is a schematic block diagram of the heat exchange medium recovery device provided by the present invention;

[0025] Figure 2 is a schematic diagram of the heat exchange medium recovery device provided by the present invention;

[0026] Figure 3 is a schematic diagram of the relationship between the evaporation pressure and temperature of the heat exchange medium provided by the present invention;

[0027] Figure 4 is a schematic block diagram of the control unit provided by the present invention;

[0028] Figure 5 is a schematic flowchart of the control gas circulation unit provided by the present invention;

[0029] Figure 6 is a schematic diagram of the control process of the three-way regulating valve provided by the present invention;

[0030] Figure 7 is a schematic flowchart of the heat exchange medium recovery method provided by the present invention.

[0031] Figure label:

[0032] 1-Diverter unit, 2-Compressor, 3-Condensing unit, 301-Condenser, 302-Throttling device, 303-Evaporator, 304-Regulating valve, 4-Gas circulation unit, 401-Fan, 402-Three-way regulating valve, 5-Heating unit, 6-Recovery unit, 7-Control unit, 701-First temperature sensor, 702-Second temperature sensor, 703-Third temperature sensor, 704-Processor, 8-Temperature control device. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0034] In the description of the embodiments of this application, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0035] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0036] In the embodiments of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0037] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the embodiments of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0038] Figure 1 is a principle block diagram of the heat exchange medium recovery device provided by the present invention, and Figure 2 is a structural schematic diagram of the heat exchange medium recovery device provided by the present invention. As shown in Figures 1 and 2, the present invention provides a heat exchange medium recovery device, including a diversion unit 1, a compressor 2, a condensation unit 3, a gas circulation unit 4, a heating unit 5, and a recovery unit 6.

[0039] The inlet end of the diversion unit 1 is connected to the outlet end of the temperature control device 8. The outlet end of the diversion unit 1 is connected to the condensation unit 3 and the gas circulation unit 4 respectively, so that the gas output by the temperature control device 8 is transmitted to the condensation unit 3 and the gas circulation unit 4 respectively. The temperature control device contains heat exchange medium to be recovered.

[0040] The outlet end of the condensing unit 3 is connected to the recovery unit 6, and is used to condense the gas input from the diversion unit 1 to obtain a gas-liquid mixture. The gas-liquid mixture is then output to the recovery unit 6, where the recovery unit 6 separates the gas-liquid mixture to obtain the liquid heat exchange medium, and outputs the separated gas to the gas circulation unit 4.

[0041] The compressor 2 is connected to the condensing unit 3 to reduce the temperature of the condensing unit 3; the heating unit 5 is connected to the compressor 2 and the temperature control device 8 respectively to cool the refrigerant gas discharged by the compressor 2; the outlet end of the gas circulation unit 4 is connected to the inlet end of the heating unit 5 to output the gas heated by the heating unit 5 to the temperature control device 8.

[0042] Optionally, the diversion unit 1 is a three-way pipe.

[0043] Figure 3 is a schematic diagram of the relationship between the evaporation pressure and temperature of the heat exchange medium provided by the present invention. The horizontal axis represents temperature, and the vertical axis represents evaporation pressure. The present invention uses electronic fluorinated liquid as an example for illustration. As shown in Figure 3, the evaporation pressure of the electronic fluorinated liquid shows a significant decreasing trend between 60°C and 0°C. Therefore, the electronic fluorinated liquid can be heated to 60°C first, causing a large amount of liquid to evaporate into the pipeline gas. Then, the gas is cooled to 0°C, resulting in a large amount of fluorinated liquid condensing and precipitating out. Collecting the condensed liquid completes the recovery of the fluorinated liquid.

[0044] This invention utilizes the high-temperature refrigerant exhaust from compressor 2 to heat the mixture of fluorinated liquid and air blown out by gas circulation unit 4. The heated high-temperature gas is then blown into temperature control device 8, raising the temperature of the liquid inside the temperature control device to above 60°C. At this point, a large amount of electronic fluorinated liquid evaporates into a gaseous state. After the saturated vapor in the pipe in this state is discharged from the temperature control device, it is cooled to about 0°C in condensation unit 3. As the temperature decreases, a large amount of electronic fluorinated liquid condenses into liquid. The gas-liquid mixture in condensation unit 3 enters recovery unit 6 with the airflow. In recovery unit 6, the gas re-enters gas circulation unit 4 and circulates. The condensed liquid remains at the bottom of the container in recovery unit 6 for subsequent collection and reuse.

[0045] It is understood that the present invention sets up a diversion unit 1, a compressor 2, a condensation unit 3, a gas circulation unit 4, a heating unit 5, and a recovery unit 6. A circulation path is formed between the diversion unit 1, the recovery unit 6, the gas circulation unit 4, and the temperature control device 8 to be recovered. The heat exchange medium in the temperature control device 8 is recycled and recovered based on the condensation method, which improves the low liquid recovery rate.

[0046] Based on the above embodiments, as an optional embodiment, a control unit 7 is further included. The control unit 7 is used to acquire first temperature information at the inlet of the diversion unit 1, and control the gas circulation unit 4 according to the first temperature information and a first preset temperature. The first preset temperature is determined based on the heat exchange medium. The first preset temperature is the temperature range within which the heat exchange medium is converted from liquid to gas. For example, in this embodiment, if the heat exchange medium is an electronic fluorinated liquid, the first preset temperature can be 60°C.

[0047] Figure 4 is a schematic block diagram of the control unit 7 provided by the present invention. As shown in Figure 4, optionally, the control unit 7 includes a first temperature sensor 701, a second temperature sensor 702, a third temperature sensor 703 and a processor 704. The first temperature sensor 701 is located at the inlet end of the diversion unit 1, the second temperature sensor 702 is located at the outlet end of the compressor 2, and the third temperature sensor 703 is located at the inlet end of the recovery unit 6.

[0048] Optionally, the gas circulation unit 4 includes a fan 401, the outlet of which is connected to the heating unit 5. Specifically, the fan 401 may be a centrifugal fan.

[0049] Figure 5 is a flowchart illustrating the control gas circulation unit 4 provided by the present invention. As shown in Figure 5, the control unit 7 acquires the first temperature information at the inlet of the diversion unit 1, and controls the gas circulation unit 4 according to the first temperature information and the first preset temperature, specifically including:

[0050] S510, collects the first temperature information measured by the first temperature sensor 701;

[0051] S520, calculate the difference between the first temperature information and the first preset temperature;

[0052] S530, use the difference as the input of the first PID algorithm, and calculate the output value of the first PID algorithm;

[0053] S540, the speed of the fan 401 is controlled according to the output value of the first PID algorithm, wherein the upper and lower limits of the output value of the first PID algorithm correspond to the maximum and minimum speed of the fan 401.

[0054] When the gas temperature flowing out of the temperature control device 8 is below 60℃, the circulating air volume is increased to increase the flow rate of circulating gas into the heating unit 5, thereby increasing the heat exchange within the heating unit. This allows more high-temperature circulating gas to enter the internal pipes of the temperature control device 8 and transfer heat to the electronic fluorinated liquid stored in the internal pipes, causing the electronic fluorinated liquid to evaporate, heat up, and reach 60℃ before being discharged from the temperature control device 8. Conversely, when the temperature measured by the first temperature sensor 701 is above 60℃, the speed of the fan 401 is reduced.

[0055] It is understood that the present invention controls the gas circulation volume of the gas circulation unit 4 by controlling the first temperature information at the inlet of the diversion unit 1, thereby improving the liquid recovery rate.

[0056] Based on the above embodiments, as an optional embodiment, the condensing unit 3 includes a condenser 301 and an evaporator 303. The inlet end of the condenser 301 is connected to the heating unit 5, and the outlet end is connected to the evaporator 303. The evaporator 303 is also connected to the compressor 2. The heat release side pipeline of the evaporator 303 performs condensation treatment on the gas input from the diversion unit 1 based on the heat exchange principle.

[0057] Optionally, the condensing unit 3 further includes a throttling device 302, which is disposed between the condenser 301 and the evaporator 303.

[0058] Optionally, the heat absorption side of the condenser 301 is further provided with a regulating valve 304, which is used to adjust the opening degree according to the second temperature information of the exhaust side of the compressor 2.

[0059] The regulating valve 304 is connected to the control unit 7, and the control unit 7 controls the opening degree according to the second temperature information.

[0060] The regulating valve 304 can be used to control the cooling water flow on the heat absorption side of the condenser 301, keeping the compressor 2's discharge temperature between 90°C and 110°C. When the measured value of the second temperature sensor 702 is below 90°C, the control unit 7 decreases the opening of the regulating valve 304 at regular intervals; when the measured value of the second temperature sensor 702 is above 110°C, the opening of the regulating valve 304 increases at regular intervals; when the temperature is between 90°C and 110°C, the opening of the regulating valve 304 remains unchanged. Specifically, the control unit 7 can adjust the regulating valve 304 every few seconds.

[0061] It is understood that the present invention heats the gas blown out by the fan 401 by utilizing the high-temperature exhaust of the compressor 2, eliminating the need for a heater and saving costs.

[0062] Based on the above embodiments, as an optional embodiment, the recovery unit 6 includes a gas-liquid separator, the inlet end of which is connected to the condensation unit 3 and the outlet end of which is connected to the gas circulation unit 4, for recovering the heat exchange medium from the gas-liquid mixture.

[0063] Figure 6 is a schematic diagram of the control three-way regulating valve 402 provided by the present invention. As shown in Figure 6, based on the above embodiment, as an optional embodiment, the gas circulation unit 4 further includes a three-way regulating valve 402. The three-way regulating valve 402 is used to adjust the gas flow rate of the diversion unit 1 and the recovery unit 6 into the fan 401 according to the third temperature information at the inlet end of the recovery unit 6.

[0064] Specifically, the three-way regulating valve 402 is connected to the control unit 7, and the control unit 7 adjusts the opening degree according to the third temperature information.

[0065] The specific control process of the three-way regulating valve 402 includes:

[0066] S610, collects the measurement value of the third temperature sensor 703;

[0067] S620, calculate the difference between the measured value and the second preset temperature; the second preset temperature is determined based on the characteristics of the heat exchange medium and is the temperature range in which the gaseous heat exchange medium is converted into a liquefied heat exchange medium.

[0068] S630, use the difference as the input value of the second PID algorithm to obtain the output value of the second PID algorithm;

[0069] S640, determine the opening degree of the three-way regulating valve 402 based on the output value of the second PID algorithm.

[0070] Specifically, the circulating gas output from the temperature control device 8 is divided into two branches after passing through the first temperature sensor 701. The gas in the first branch directly passes through the three-way regulating valve 402 and then re-enters the centrifugal fan for continued circulation. The gas in the second branch passes sequentially through the heat release side pipe of the evaporator 303, the third temperature sensor 703, and the gas-liquid separator before entering the three-way regulating valve 402 and mixing with the first part of the gas before entering the centrifugal fan for re-circulation. The gas entering the evaporator 303 exchanges heat with the refrigerant, causing its temperature to decrease. Due to the decrease in saturated vapor pressure, some of the electronic fluorinated liquid condenses from a gaseous state to a liquid state and flows into the gas-liquid separator along with the remaining uncondensed gas. In the gas-liquid separator, the liquid electronic fluorinated liquid remains at the bottom of the separator, while the gas flows out of the gas-liquid separator and enters the three-way regulating valve 402 for continued circulation.

[0071] The output value of the second PID algorithm corresponds to the minimum and maximum opening of the three-way regulating valve 402. When the measured value of the third temperature sensor 703 is below 0℃, the second PID algorithm adjusts the opening of the three-way regulating valve 402, reducing the proportion of gas flow in the first branch and increasing the proportion of gas flow in the second branch, allowing more circulating gas to enter the evaporator 303 for heat exchange and cooling. Conversely, when the measured value of the third temperature sensor 703 is above 0℃, the second PID algorithm adjusts the opening of the three-way regulating valve 402, increasing the proportion of gas flow in the first branch and decreasing the proportion of gas flow in the second branch, ensuring that the gas entering the heat release side of the evaporator 303 can be sufficiently cooled.

[0072] Optionally, the present invention first controls the electric regulating valve based on the measured value of the second temperature sensor 702. When the measured temperature is below 90°C, the opening of the electric regulating valve is reduced; when the measured temperature is above 120°C, the opening of the electric regulating valve is increased. The speed of the centrifugal fan is adjusted to maintain the measured value of the first temperature sensor 701 at 60°C. The opening of the electric three-way regulating valve 402 is adjusted to maintain the measured value of the third temperature sensor 703 at 0°C.

[0073] Understandably, this invention can quickly and effectively drain the electronic fluorinated liquid from the internal piping of the temperature control device 8 and collect it in liquid form for reuse. This recovery device reduces the loss of electronic fluorinated liquid during the commissioning process, thereby lowering commissioning costs.

[0074] The heat exchange medium recovery method provided by the present invention is described below. The heat exchange medium recovery method described below can be referred to in correspondence with the heat exchange medium recovery device described above.

[0075] Figure 7 is a schematic flowchart of the heat exchange medium recovery method provided by the present invention. As shown in Figure 7, the present invention also provides a heat exchange medium recovery method based on the aforementioned heat exchange medium recovery device, comprising:

[0076] S710, a diversion unit is provided at the outlet end of the temperature control device, the diversion unit transmits the gas output by the temperature control device to the condensation unit and the gas circulation unit respectively, wherein the temperature control device contains heat exchange medium to be recovered;

[0077] S720, based on the condensation unit, condenses the gas input from the diversion unit to obtain a gas-liquid mixture, and outputs the gas-liquid mixture to the recovery unit; wherein, the condensation unit is connected to the compressor, and cooling is performed based on the compressor;

[0078] S730, the gas-liquid mixture is separated into liquid and liquid states based on the recovery unit to obtain the heat exchange medium in liquid state, and the separated gas is output to the gas circulation unit;

[0079] S740, the gas heated by the heating unit is input into the temperature control device for recycling based on the gas circulation unit.

[0080] As an example, the first temperature information at the inlet of the diversion unit is obtained, and the gas circulation unit is controlled according to the first temperature information and a first preset temperature, wherein the first preset temperature is determined based on the heat exchange medium.

[0081] As one embodiment, the condensation unit includes a condenser and an evaporator. The inlet end of the condenser is connected to the heating unit, and the outlet end is connected to the evaporator. The evaporator is also connected to the compressor. The heat release side pipeline of the evaporator performs condensation treatment on the gas input from the diversion unit based on the heat exchange principle.

[0082] As an example, the heat absorption side of the condenser is also provided with a regulating valve, which is used to adjust the opening degree according to the second temperature information of the compressor discharge side.

[0083] As one embodiment, the condensing unit further includes a throttling device disposed between the condenser and the evaporator.

[0084] As one embodiment, the gas circulation unit includes a fan, the outlet of which is connected to the heating unit.

[0085] As an example, the gas circulation unit further includes a three-way regulating valve, which is used to adjust the gas flow rate of the diversion unit and the recovery unit into the fan according to the third temperature information at the inlet of the recovery unit.

[0086] As one embodiment, the recovery unit includes a gas-liquid separator, the inlet end of which is connected to the condensation unit and the outlet end of which is connected to the gas circulation unit, for recovering the heat exchange medium from the gas-liquid mixture.

[0087] As one embodiment, the diversion unit is a three-way pipe.

[0088] The heat exchange medium recovery device and recovery method provided by the present invention include a diversion unit, a compressor, a condensation unit, a gas circulation unit, a heating unit, and a recovery unit. A circulation path is formed between the diversion unit, the recovery unit, the gas circulation unit, and the temperature control device to be recovered. The heat exchange medium in the temperature control device is recycled and recovered based on the condensation method, which improves the low liquid recovery rate.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A heat exchange medium recovery device, characterized in that, The system includes a flow distribution unit, a compressor, a condensing unit, a gas circulation unit, a heating unit, and a recovery unit. The inlet of the flow distribution unit is connected to the outlet of a temperature control device, and the outlet of the flow distribution unit is connected to both the condensing unit and the gas circulation unit, respectively, to transfer the gas output from the temperature control device to the condensing unit and the gas circulation unit. The temperature control device contains a heat exchange medium to be recovered. The outlet of the condensing unit is connected to the recovery unit, which condenses the gas input to the flow distribution unit to obtain a gas-liquid mixture. This gas-liquid mixture is then output to the recovery unit, where it performs gas-liquid separation to obtain the liquid heat exchange medium. The gas discharged from the gas circulation unit is output to the gas circulation unit; the compressor is connected to the condensing unit; the heating unit is connected to the compressor and the temperature control device respectively, and is used to heat the gas discharged from the gas circulation unit. The outlet end of the gas circulation unit is connected to the inlet end of the heating unit, and is used to output the heated gas to the temperature control device; the condensing unit includes a condenser and an evaporator. The inlet end of the condenser is connected to the heating unit, and the outlet end is connected to the evaporator. The evaporator is connected to the compressor, and the outlet end of the heat release side pipe of the evaporator is connected to the recovery unit, and the gas input from the diversion unit is condensed based on the heat exchange principle.

2. The heat exchange medium recovery device according to claim 1, characterized in that, It also includes a control unit, which is used to acquire first temperature information at the inlet of the diversion unit and control the gas circulation unit according to the first temperature information and a first preset temperature, wherein the first preset temperature is determined based on the heat exchange medium.

3. The heat exchange medium recovery device according to claim 1, characterized in that, The heat absorption side of the condenser is also provided with a regulating valve, which is used to adjust the opening degree according to the second temperature information of the compressor discharge side.

4. The heat exchange medium recovery device according to claim 1, characterized in that, The condensation unit also includes a throttling device, which is disposed between the condenser and the evaporator.

5. The heat exchange medium recovery device according to claim 1, characterized in that, The gas circulation unit includes a fan, and the outlet end of the fan is connected to the heating unit.

6. The heat exchange medium recovery device according to claim 5, characterized in that, The gas circulation unit also includes a three-way regulating valve, which is used to adjust the gas flow rate of the diversion unit and the recovery unit into the fan according to the third temperature information at the inlet of the recovery unit.

7. The heat exchange medium recovery device according to claim 1, characterized in that, The recovery unit includes a gas-liquid separator, the inlet of which is connected to the condensation unit and the outlet of which is connected to the gas circulation unit, for recovering the liquid heat exchange medium from the gas-liquid mixture.

8. The heat exchange medium recovery device according to claim 1, characterized in that, The diversion unit is a three-way pipe.

9. A method for recovering a heat exchange medium, implemented based on the heat exchange medium recovery device according to any one of claims 1-8, characterized in that, include: A diversion unit is installed at the outlet of the temperature control device. The diversion unit transmits the gas output from the temperature control device to the condensation unit and the gas circulation unit respectively. The temperature control device contains a heat exchange medium to be recovered. The condensation unit condenses the gas input to the diversion unit to obtain a gas-liquid mixture, which is then output to the recovery unit. The condensation unit is connected to a compressor for cooling. The recovery unit separates the gas-liquid mixture to obtain the liquid heat exchange medium, and the separated gas is output to the gas circulation unit. The gas heated by the heating unit is input into the temperature control device for recycling through the gas circulation unit.

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