A high-stability piezoelectric scanning-translation stage compatible with extremely low temperatures

Abstract

The present invention discloses a high-stability piezoelectric scanning-displacement stage compatible with extremely low temperatures, comprising a sliding platform and a base; a moving part is provided in a movable chamber of the base, the moving part is movably connected to the movable chamber of the base via an elastic part, and a plurality of guide balls are fixedly provided on the moving part; a plurality of slide grooves at the bottom of the sliding platform are in sliding cooperation with a plurality of guide balls on the moving part in a one-to-one correspondence, and the sliding platform is elastically pressed against the plurality of guide balls of the moving part via an elastic pressing component; a driving assembly is also provided in the movable chamber of the base, the driving assembly comprising at least one piezoelectric ceramic actuator, the two ends of the piezoelectric ceramic actuator being connected to the moving part and the base respectively via flexible hinges, and by controlling the difference in the magnitude of the voltage applied to the piezoelectric ceramic actuator, the sliding platform and the moving part are made to be relatively stationary or intermittently move relative to each other, thereby completing a scanning action or a stepping displacement action. The advantages of the present invention are that the scanning stage and the displacement stage are combined into one.

Description

Technical Field

[0001] The present invention relates to the technical field of precision positioning and scanning devices, and in particular to a high-stability piezoelectric scanning-displacement stage compatible with extremely low temperatures. Background Art

[0002] Scanning probe microscopy (SPM) is a general term for a range of microscopes that utilize various interactions between different probes and samples to probe the physical properties of various points on a sample and generate scanning images. These microscopes include scanning tunneling microscopes, atomic force microscopes, and magnetic force microscopes. SPMs can be used to construct quantum devices with atomic-level precision, such as single-electron transistors, nanowires, and electron waveguides. Ultra-low-temperature SPMs can scan and image the quantum properties of quantum materials and the quantum states of quantum devices.

[0003] Scanning probe microscopes require both a translation stage with millimeter-scale travel and nanometer-scale positioning resolution for precise sample positioning, and a scanning stage with a scanning range of tens to hundreds of microns and sub-nanometer positioning accuracy. In existing scanning probe microscopes, the translation stage and scanning stage are separate components. The translation stage enables long-distance displacements exceeding millimeters, while the scanning stage enables scanning motion within a scanning range of tens to hundreds of microns. These two stages are the core motion control components of scanning probe microscopes.

[0004] A common type of scanning stage utilizes an amplifying mechanism to amplify a piezoelectric actuator for wide-range scanning. While these piezoelectric scanning stages can achieve precise control within a scanning range of tens to hundreds of microns, their output force is relatively low, preventing them from achieving the same long-range stepping motion as a translation stage. Consequently, it's often impossible to combine the scanning function of a piezoelectric scanning stage with the displacement function of a translation stage within a single structural design component, requiring two separate components to perform each function.

[0005] A scanning probe microscope generally places a scanning stage on a translation stage. This combination requires more components, resulting in a loose overall structure and poor stability, which reduces the resonance frequency of the entire scanning probe microscope, affects the scanning results, and is costly.

[0006] Currently, a common method for achieving ultra-low temperature environments is to use a liquid helium-free dry refrigerator for refrigeration. Compared to wet refrigerators, dry refrigerators are becoming an increasingly mainstream refrigeration method due to their advantages such as no liquid helium consumption and more automated operation. However, dry refrigerators require the use of pulse tube cryocoolers or Gifford-McMahon cryocoolers for pre-cooling. The huge mechanical vibrations of pulse tube cryocoolers or Gifford-McMahon cryocoolers seriously affect the scanning imaging of ultra-low temperature scanning probe microscopes. Therefore, in ultra-low temperature scanning probe microscopes with high vibration environmental factors, the low system resonance frequency is easily coupled with mechanical vibrations, making it impossible for the microscope to simultaneously meet the requirements of large range, high precision, high stability, and low heat dissipation. This has become one of the main factors currently limiting the development of ultra-low temperature scanning probe microscope technology. Summary of the Invention

[0007] The purpose of the present invention is to overcome the shortcomings of the existing technology and provide a high-stability piezoelectric scanning-translation stage that is compatible with extremely low temperatures. It combines the scanning stage and translation stage required in a scanning probe microscope into one, and can be used as a scanning stage.

[0008] The present invention is achieved through the following technical solutions:

[0009] An extremely low-temperature compatible high-stability piezoelectric scanning-translation stage, comprising a sliding platform and a base distributed above and below;

[0010] The base is provided with a movable chamber, a moving part is arranged in the movable chamber of the base, the outer end of the moving part is movably connected to the side wall of the movable chamber of the base through a plurality of elastic parts, and a plurality of guide balls are fixedly arranged on the moving part;

[0011] The bottom of the sliding platform is provided with a plurality of sliding grooves arranged in sequence along the front-to-back direction, and each sliding groove extends along the left-to-right direction. The plurality of sliding grooves at the bottom of the sliding platform are in sliding engagement with the plurality of guide balls on the moving part in a one-to-one correspondence, and the plurality of sliding grooves of the sliding platform are elastically pressed against the plurality of guide balls on the moving part by an elastic pressing component;

[0012] The movable chamber of the base is also provided with a driving assembly for driving the moving part to move left and right. The driving assembly includes at least one piezoelectric ceramic actuator. The two ends of the piezoelectric ceramic actuator are respectively connected to the moving part and the side wall of the movable chamber of the base through flexible hinges.

[0013] By controlling the voltage applied to the piezoelectric ceramic actuator, the piezoelectric ceramic actuator is controlled to produce different deformations. The different deformations of the piezoelectric ceramic actuator are amplified by the lever amplification structure, resulting in different displacements of the moving part in the left and right directions, thereby causing the sliding platform and the moving part to be relatively stationary or intermittently move relative to each other:

[0014] When the sliding platform and the moving part are relatively stationary, the displacement of the sliding platform and the moving part are consistent, completing the scanning action;

[0015] When the sliding platform and the moving part move relative to each other intermittently, the stepping displacement action is completed.

[0016] As a preferred embodiment of the above-mentioned piezoelectric scanning-translation stage, the drive assembly includes two first piezoelectric ceramic actuators symmetrically arranged front to back. The two first piezoelectric ceramic actuators are respectively located on the front and rear sides of the moving part. The deformation direction of each first piezoelectric ceramic actuator is along the extension direction of the long side of the first piezoelectric ceramic actuator. When no voltage is applied to the two first piezoelectric ceramic actuators, the long side of each first piezoelectric ceramic actuator forms an inclined angle with the front-to-back direction of the base. The two inclined first piezoelectric ceramic actuators form a top-to-top drive structure for the moving part, and the top-to-top drive structure forms the lever amplification structure.

[0017] As a preferred embodiment of the above-mentioned piezoelectric scanning-displacement stage, the portion of the base located outside the movable chamber is the base outer frame. The base outer frame, each first elastic member, the moving member and each flexible hinge are integrally formed using a material with a specific modulus of not less than GPa / (g / cm). The first elastic member and the flexible hinge are both slender strip structures. When no voltage is applied to the first piezoelectric ceramic actuator, the first elastic member extends in the front-to-back direction, and the extension direction of the flexible hinge is parallel to the deformation direction of the first piezoelectric ceramic actuator.

[0018] As a preferred embodiment of the above-mentioned piezoelectric scanning-displacement stage, the moving part is formed into a T-shaped structure by a main rod and a sub-rod perpendicular to each other, the main rod extending in the left-right direction, the sub-rod being arranged at one end of the main rod and extending in the front-to-back direction, the main rod of the moving part being connected as a whole with the front and rear side walls of the movable chamber of the base through four first elastic members, the front end of the main rod being connected to the front side wall of the movable chamber of the base through two first elastic members, the rear end of the main rod being connected to the rear side wall of the movable chamber of the base through two first elastic members, the two first elastic members on the front side and the two first elastic members on the rear side being symmetrically distributed front to back, and the first piezoelectric ceramic actuator being located between the two first elastic members on the corresponding sides.

[0019] As a preferred embodiment of the piezoelectric scanning-translation stage, the base frame, each first elastic member, the moving member, and each flexible hinge are made of any one of ultraviolet fused quartz, beryllium copper, titanium, beryllium, magnesium-lithium alloy, magnesium-beryllium alloy, aluminum-beryllium alloy, and titanium-beryllium alloy.

[0020] As a preferred solution of the above-mentioned piezoelectric scanning-translation stage, when the base frame is fixed, the overall resonance frequency of the base frame, each first elastic member, the moving member, each flexible hinge and the first piezoelectric ceramic actuator is greater than kHz.

[0021] As a preferred embodiment of the above-mentioned piezoelectric scanning-translation stage, the drive assembly includes two second piezoelectric ceramic actuators arranged side by side in the front-to-back direction, the two second piezoelectric ceramic actuators are both located on the same side of the moving part in the left-right direction, the deformation direction of each second piezoelectric ceramic actuator is along the extension direction of the long side of the second piezoelectric ceramic actuator, and when no voltage is applied to the two second piezoelectric ceramic actuators, the long side of each second piezoelectric ceramic actuator forms an inclined angle with the front-to-back direction of the base. The two second piezoelectric ceramic actuators are arranged in parallel, and the two parallel second piezoelectric ceramic actuators form a unilateral drive structure for the moving part, and the unilateral drive structure forms the lever amplification structure.

[0022] As a preferred solution of the above-mentioned piezoelectric scanning-translation stage, the moving part is connected to the left and right side walls of the movable chamber of the base through a plurality of second elastic parts.

[0023] Compared with the prior art, the present invention has the following advantages:

[0024] The present invention provides a high-stability piezoelectric scanning-displacement stage compatible with extremely low temperatures, which includes a base and a sliding platform that slide together. The sliding platform is installed on a moving part in a movable compartment of the base. The deformation of the voltage-controlled piezoelectric ceramic actuator is amplified by a lever amplification structure to cause displacement of the moving part. By controlling different voltage modes, the sliding platform and the moving part can be kept relatively still or intermittently move relative to each other, thereby selectively realizing the scanning stage function or the displacement stage function, combining the scanning stage and the displacement stage into one, and reducing costs; large-range displacement can be achieved at lower driving voltage and driving frequency, effectively reducing heat dissipation; the small number of components makes the overall structural layout of the scanning probe microscope compact, saves space, and significantly improves the resonance frequency of the microscope system. It is suitable for harsh environments with high vibration and extremely low temperatures, so that the scanning probe microscope simultaneously meets the requirements of large range, high precision, high stability, and low heat dissipation. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a three-dimensional diagram from the first viewing angle of the first embodiment.

[0026] Figure 2 It is a stereoscopic diagram from a second viewing angle of the first embodiment.

[0027] Figure 3 It is a three-dimensional diagram of the first embodiment from a third viewing angle.

[0028] Figure 4 It is a three-dimensional exploded view of the first embodiment.

[0029] Figure 5 It is a three-dimensional diagram of the base of the first embodiment.

[0030] Figure 6 It is a three-dimensional diagram of the sliding platform of the first embodiment.

[0031] Figure 7 It is a plan view of the base of the first embodiment.

[0032] Figure 8 is a waveform diagram of a first voltage applied to the first piezoelectric ceramic actuator in the first embodiment.

[0033] Figure 9 is a second voltage waveform diagram applied to the first piezoelectric ceramic actuator in the first embodiment.

[0034] Figure 10 This is a scatter plot of the resonance frequency and room temperature scanning range simulated when the base is processed using different materials (taking beryllium copper, titanium, and ultraviolet fused quartz as examples) in the first embodiment.

[0035] Figure 11 It is a three-dimensional diagram of the base of the second embodiment.

[0036] Numbers in the figure: 1 sliding platform, 2 base, 3 movable bin, 4 moving part, 5 first elastic part, 6 guide ball, 7 slide groove, 8 spring pressure plate, 9 pressure ball, 10 screw sleeve, 11 pressure bolt, 12 first friction plate, 13 second friction plate, 14 first piezoelectric ceramic actuator, 15 flexible hinge, 16 base frame, 17 main rod, 18 auxiliary rod, 19 base mounting hole, 20 threaded hole; 21 second piezoelectric ceramic actuator; 22 second elastic part. DETAILED DESCRIPTION

[0037] The following is a detailed description of an embodiment of the present invention. This embodiment is implemented based on the technical solution of the present invention, and provides a detailed implementation method and specific operation process. However, the protection scope of the present invention is not limited to the following embodiment.

[0038] Example 1

[0039] See also Figures 1 to 10 This embodiment discloses a high-stability piezoelectric scanning-translation stage compatible with extremely low temperatures, including a sliding platform 1 and a base 2 distributed up and down.

[0040] A movable chamber 3 is provided on the base 2 , and a moving part 4 is provided in the movable chamber 3 of the base 2 . The outer end of the moving part 4 is movably connected to the side wall of the movable chamber 3 of the base 2 through a plurality of elastic parts 5 , and a plurality of guide balls 6 are fixedly provided on the moving part 4 .

[0041] The bottom of the sliding platform 1 is provided with a plurality of slide grooves 7 arranged in sequence along the front-to-back direction, and each slide groove 7 extends along the left-to-right direction. The plurality of slide grooves 7 at the bottom of the sliding platform 1 slide in cooperation with the plurality of guide balls 6 on the moving part 4 in a one-to-one corresponding manner, and the plurality of slide grooves 7 of the sliding platform 1 are elastically pressed onto the plurality of guide balls 6 of the moving part 4 through an elastic pressing component.

[0042] The elastic clamping component includes a spring clamping piece 8 and two clamping balls 9. The spring clamping piece 8 extends in the left-right direction. The two clamping balls 9 are respectively fixed at the left and right ends of the bottom of the spring clamping piece 8. A screw sleeve 10 is provided in the center of the moving part 4. The center of the spring clamping piece 8 and the center of the sliding platform 1 are respectively provided with perforations. The clamping bolt 11 passes through the perforations of the spring clamping piece 8 and the sliding platform 1 from top to bottom in sequence and is then tightened in the screw sleeve 10 of the moving part 4, so that the two clamping balls 9 at the bottom of the spring clamping piece 8 press the sliding platform 1 downward. A first friction plate 12 is provided on the top of the sliding platform 1 on the left and right sides of the perforation. The sliding platform 1 is in contact with the two clamping balls 9 respectively through the two first friction plates 12.

[0043] The cross section of the chute 7 at the bottom of the sliding platform 1 is inverted V-shaped. Second friction plates 13 are fixed to the two side walls of the chute 7 at the bottom of the sliding platform 1 respectively. The chute 7 contacts the corresponding guide ball 6 through the two second friction plates 13.

[0044] A driving assembly for driving the moving part 4 to move left and right is also provided in the movable compartment 3 of the base 2. The driving assembly includes at least one piezoelectric ceramic actuator. The two ends of the piezoelectric ceramic actuator are connected to the moving part 4 and the side wall of the movable compartment 3 of the base 2 through flexible hinges 15 respectively.

[0045] By controlling the voltage applied to the piezoelectric ceramic actuator, the piezoelectric ceramic actuator is controlled to produce different deformations. The different deformations of the piezoelectric ceramic actuator are amplified by the lever amplification structure, resulting in different displacements of the moving part 4 in the left and right directions, thereby causing the sliding platform 1 and the moving part 4 to be relatively stationary or to intermittently move relative to each other:

[0046] When the sliding platform 1 and the moving part 4 are relatively stationary, the displacements of the sliding platform 1 and the moving part 4 are consistent, completing the scanning action;

[0047] When the sliding platform 1 and the moving part 4 intermittently move relative to each other, the stepping displacement action is completed.

[0048] The driving assembly includes two first piezoelectric ceramic actuators 14 symmetrically arranged front to back. The two first piezoelectric ceramic actuators 14 are respectively located on the front and rear sides of the moving part 4. The deformation direction of each first piezoelectric ceramic actuator 14 is along the extension direction of the long side of the first piezoelectric ceramic actuator 14. When no voltage is passed through the two first piezoelectric ceramic actuators 14, the long side of each first piezoelectric ceramic actuator 14 forms an inclined angle with the front and rear direction of the base 2. The two inclined first piezoelectric ceramic actuators 14 form a top-to-top driving structure for the moving part 4, and the top-to-top driving structure forms a lever amplification structure.

[0049] The portion of the base 2 located outside the movable chamber 3 is the base outer frame 16. The base outer frame 16, each first elastic member 5, the moving member 4 and each flexible hinge 15 adopt a specific modulus of not less than 10 GPa / (g / cm 3 ) material is integrally formed, the first elastic member 5 and the flexible hinge 15 are both slender strip structures. When no voltage is applied to the first piezoelectric ceramic actuator 14, the first elastic member 5 extends in the front-to-back direction, and the extension direction of the flexible hinge 15 is parallel to the deformation direction of the first piezoelectric ceramic actuator 14.

[0050] The moving member 4 is formed into a T-shaped structure by a perpendicular main rod 17 and a secondary rod 18. The main rod 17 extends in the left-right direction, and the secondary rod 18 is arranged at one end of the main rod 17 and extends in the front-to-back direction. The main rod 17 of the moving member 4 is integrally connected to the front and rear side walls of the movable chamber 3 of the base 2 via four first elastic members 5. The front end of the main rod 17 is connected to the front side wall of the movable chamber 3 of the base 2 via two first elastic members 5, and the rear end of the main rod 17 is connected to the rear side wall of the movable chamber 3 of the base 2 via two first elastic members 5. The two first elastic members on the front side and the two first elastic members on the rear side are symmetrically distributed front to back. The first piezoelectric ceramic actuator 14 is located between the two first elastic members 5 on the corresponding side. The four first elastic members 5 are used to provide preload force for the first piezoelectric ceramic actuator 14.

[0051] Guide balls 6 are fixedly provided above the three ends of the moving part 4. Correspondingly, three sliding grooves 7 arranged in sequence along the front-to-back direction are provided at the bottom of the sliding platform 1.

[0052] The first and second friction plates 12, 13 can be made of sapphire. The guide balls 6 and pressure balls 9 can be smooth ceramic balls. The first friction plate 12 and the top of the sliding platform 1, the second friction plate 13 and the sidewalls of the sliding groove 7 of the sliding platform 1, the guide balls 6 and the moving part 4, the pressure balls 9 and the spring pressure plate 8, and the ends of the first piezoelectric ceramic actuator 14 and the flexible hinge 15 are fixedly connected using epoxy resin glue.

[0053] When the base outer frame 16 is fixed, the overall resonance frequency of the base outer frame 16, each first elastic member 5, the moving member 4, each flexible hinge 15 and the first piezoelectric ceramic actuator 14 is greater than 1kHz, so that the stroke of the first piezoelectric ceramic actuator 14 can be amplified to achieve scanning, and there is sufficient thrust to achieve a large range of displacement.

[0054] The base frame 16, each first elastic member 5, the moving member 4 and each flexible hinge 15 are made of any one of UV fused quartz, beryllium copper, titanium, beryllium, magnesium-lithium alloy, magnesium-beryllium alloy, aluminum-beryllium alloy and titanium-beryllium alloy. UV fused quartz is preferably used. The high specific modulus of UV fused quartz can be used to obtain a higher resonance frequency under the same scanning range. Figure 10 At the same time, the extremely low thermal expansion coefficient of UV fused quartz ensures that the piezoelectric scanning-displacement stage will not experience severe drift due to thermal expansion and contraction during the process of cooling from room temperature to extremely low temperatures, nor will it seriously reduce the scanning range due to structural deformation. In addition, UV fused quartz has a lower thermal conductivity than ordinary metal materials, which can effectively isolate the heat dissipation of the piezoelectric ceramic actuator during operation and will not directly affect the temperature of the sample placed on the piezoelectric scanning-displacement stage.

[0055] The base 2 has a specific modulus of not less than 10 GPa / (g / cm 3) is integrally formed with a material having a higher modulus than a material having the characteristics of being lightweight and having high rigidity, so that the base 2 made thereby has a light overall mass and high rigidity, thereby enabling the base 2 to obtain a higher resonance frequency; and the shape of the moving part 4 is designed to be a T-shaped structure, which further reduces the overall mass of the moving part 4, so that the moving part 4 has the characteristics of being light in mass and having high rigidity. The T-shaped moving member 4 is elastically connected to the base frame 16 via four slender first elastic members 5, facilitating left-right movement of the moving member 4. This provides the preload required by the piezoelectric ceramic brake 14 and increases the resonant frequency of the base. Symmetrical first piezoelectric ceramic actuators 14 are positioned on both sides of the moving member 4. The deformation direction of the first piezoelectric ceramic actuators 14 is designed to tilt forward and backward. These two tilted first piezoelectric ceramic actuators 14 form a top-to-top drive structure for the moving member 4. This top-to-top drive structure creates a lever-amplifying mechanism. The two tilted first piezoelectric ceramic actuators 14 simultaneously produce telescopic deformation, thereby driving the moving member 4 in the left-right direction. Even slight deformation of the first piezoelectric ceramic actuators 14 can drive significant left-right displacement of the moving member 4, achieving displacement amplification. This top-to-top lever-amplifying structure also provides the piezoelectric scanning and translation stage with a greater output force, resulting in a higher resonant frequency, and minimizes the effect of increased load on the stage on the resonant frequency. The base 2 is lightweight and highly rigid, and, in conjunction with the amplification function of the lever-amplifying structure, the micro-displacement of the first piezoelectric ceramic actuator 14 is amplified by the lever-amplifying structure, driving intermittent movement of the moving element 4, which in turn drives the sliding platform 1 for long-distance stepping. The moving element 4 moves left and right, driving the sliding platform 1 above it to move together or intermittently slide relative to it, thereby achieving scanning or stepping functions.

[0056] The lever amplification structure is used to amplify the deformation of the first piezoelectric ceramic actuator 14. Compared with direct driving with piezoelectric ceramics, the translation stage function can be achieved at a lower voltage and lower driving frequency, so the heat dissipation is lower.

[0057] See also Figure 7 The amplification factor of the lever amplification structure and the resonant frequency of the base 2 are related to the length l of the flexible hinge 15, the width w of the flexible hinge 15, the tilt angle θ of the flexible hinge 15, the length L of the first elastic member 5, and the width W of the first elastic member 5. The length l and the width w of the flexible hinge 15 can both be selected within the range of 0.3 mm to 0.8 mm. In this example, the length L of the first elastic member 5 can be approximately 10 mm, and the width W of the first elastic member 5 can be selected within the range of 0.3 mm to 0.8 mm. The tilt angle θ of the flexible hinge 15 can be selected within the range of 4° to 7°.

[0058] By selecting voltages of different waveforms applied to the first piezoelectric ceramic actuator 14 , the piezoelectric scanning-translation stage can be operated in different operating modes.

[0059] See also Figure 8 , when using Figure 8 When the voltage waveform shown drives the first piezoelectric ceramic actuator 14, the voltage in each cycle rises and falls slowly with the passage of time. The driving voltage frequency applied to the first piezoelectric ceramic actuator 14 is relatively low, generally below one hundred hertz. The telescopic deformation of the two first piezoelectric ceramic actuators 14 is amplified by the lever amplification structure, driving the moving part 4 to move in the left and right directions. At this time, the force applied by the first piezoelectric ceramic actuator 14 to the moving part 4 is less than the friction between the guide ball 6 and the second friction plate 13 of the bottom groove 7 of the sliding platform 1, and the friction between the clamping ball 9 and the first friction plate 12 at the top of the sliding platform 1. Then, the guide ball 6 and the second friction plate 13 of the bottom groove 7 of the sliding platform 1, and the clamping ball 9 and the first friction plate 12 at the top of the sliding platform 1 are relatively stationary, and the sliding platform 1 moves with the movement of the moving part 4. At this time, the piezoelectric scanning-displacement stage works in the scanning stage mode.

[0060] See also Figure 9 , when using Figure 9When the voltage waveform shown drives the first piezoelectric ceramic actuator 14, the voltage gradually increases and then drops to zero in each cycle. During this process, first, as the voltage slowly increases, the two first piezoelectric ceramic actuators 14 extend, and the inner ends of the two first piezoelectric ceramic actuators 14 press against the moving part 4, causing the moving part 4 to move to the right. Under the action of static friction, no relative sliding occurs between the guide ball 6 and the second friction plate 13 of the slide groove 7 at the bottom of the sliding platform 1, and between the pressing ball 9 and the first friction plate 12 at the top of the sliding platform 1. The sliding platform 1 moves slowly to the right following the moving part 4. When the voltage reaches its peak and then drops to zero rapidly, the two first piezoelectric ceramic actuators 14 retract rapidly, and the two first piezoelectric ceramic actuators 14 retract rapidly. Ceramic actuator 14 drives moving part 4 back to the left. During this process, due to the inertia of sliding platform 1, the inertial force acting on it is greater than the static friction. This causes relative sliding between guide ball 6 and the second friction plate 13 of the bottom groove 7 of sliding platform 1, and between hold-down ball 9 and the first friction plate 12 at the top of sliding platform 1. Due to inertia, sliding platform 1 remains in place, while guide ball 6 and hold-down ball 9 follow moving part 4 back to the left. Then, due to sliding friction, moving part 4 and first piezoelectric ceramic actuator 14 return to their initial positions. After completing this cycle, the relative position between sliding platform 1 and base frame 16 shifts rightward by a small unit displacement. Repeating this process for a specific number of steps gradually accumulates multiple small unit displacements, resulting in a long-distance displacement of sliding platform 1 relative to base frame 16. This long-distance stepping is achieved using the stick-slip mechanism. The piezoelectric scanning-translation stage is now operating in stage mode.

[0061] By changing Figure 9 The rising slope of the voltage waveform or the maximum value of the voltage change shown can change the displacement step size in the translation stage mode, thereby achieving nanometer-level positioning resolution of the relative position between the sliding platform 1 and the base frame 16.

[0062] By adjusting the clamping bolt 11, the degree of deformation of the spring clamping plate 8 can be changed, thereby changing the static friction and sliding friction between the sliding platform 1 and the guide ball 6 on the base 2. The displacement step size in the translation stage mode can also be changed, thereby achieving nanometer-level positioning resolution of the relative position between the sliding platform 1 and the base 2, but it is necessary to ensure that the static friction is less than the inertial force.

[0063] The piezoelectric scanning and translation stage provided in this embodiment, in scanning stage mode, achieves a scanning range exceeding 60 μm when driven in the 0V to 120V voltage range at room temperature, and exceeding 25 μm when driven in the -215V to 215V voltage range at millikelvin temperatures, with sub-nanometer positioning accuracy and a resonant frequency exceeding 3 kΩ when unloaded. In translation stage mode, the high resonant frequency characteristics of the base 2 of the piezoelectric scanning and translation stage enable it to utilize a stick-slip mechanism to drive the sliding platform 1, achieving millimeter-level travel and nanometer-level positioning resolution. This effectively combines the scanning and translation stages required in a scanning probe microscope into a single unit.

[0064] The piezoelectric scanning-translation stage provided in this embodiment can be expanded to form a two-dimensional piezoelectric scanning-translation stage assembly and a three-dimensional piezoelectric scanning-translation stage assembly.

[0065] Four base mounting holes 19 are provided on the base outer frame 16 to facilitate the fixed installation of the base 2. Four threaded holes 20 can be provided on the sliding platform 1, and the four threaded holes 20 correspond to the positions of the four mounting holes on the base 2, which is convenient for expansion installation. The three piezoelectric scanning-displacement stages of the three-dimensional piezoelectric scanning-displacement stage assembly are respectively defined as the first piezoelectric scanning-displacement stage, the second piezoelectric scanning-displacement stage and the third piezoelectric scanning-displacement stage. The base 2 of the second piezoelectric scanning-displacement stage is installed on the sliding platform 1 of the first piezoelectric scanning-displacement stage, and the second piezoelectric scanning-displacement stage is placed orthogonally to the first piezoelectric scanning-displacement stage to form a two-dimensional piezoelectric scanning-displacement stage assembly. Then, a vertical third piezoelectric scanning-displacement stage is placed on the second piezoelectric scanning-displacement stage of the two-dimensional piezoelectric scanning-displacement stage assembly to form a three-dimensional piezoelectric scanning-displacement stage assembly. It can be expanded and used according to specific needs.

[0066] Example 2

[0067] In this embodiment, only the structure of the driving assembly is different from that of the first embodiment, and the rest of the structure is the same as that of the first embodiment. Figure 11 , the drive assembly of this embodiment adopts another structural form, the specific structural form is as follows:

[0068] The driving assembly includes two second piezoelectric ceramic actuators 21 arranged side by side in the front-to-back direction. The two second piezoelectric ceramic actuators 21 are located on the same side of the moving part 4 in the left-right direction. The deformation direction of each second piezoelectric ceramic actuator 21 is along the extension direction of the long side of the second piezoelectric ceramic actuator 21. When no voltage is applied to the two second piezoelectric ceramic actuators 21, the long side of each second piezoelectric ceramic actuator 21 forms an inclined angle with the front-to-back direction of the base 2. The two second piezoelectric ceramic actuators 21 are arranged in parallel. The two parallel second piezoelectric ceramic actuators 21 form a unilateral driving structure for the moving part 4, and the unilateral driving structure forms a lever amplification structure.

[0069] The moving member 4 is connected to the left and right side walls of the movable chamber 3 of the base 2 through a plurality of second elastic members 22 .

[0070] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A high-stability piezoelectric scanning-translation stage compatible with extremely low temperatures, characterized by: It includes a sliding platform (1) and a base (2) distributed up and down; The base (2) is provided with a movable chamber (3), a moving part (4) is provided in the movable chamber (3) of the base (2), an outer end of the moving part (4) is movably connected to a side wall of the movable chamber (3) of the base (2) via a plurality of elastic parts, and a plurality of guide balls (6) are fixedly provided on the moving part (4); The bottom of the sliding platform (1) is provided with a plurality of sliding grooves (7) arranged in sequence along the front-back direction, and each sliding groove (7) extends along the left-right direction. The plurality of sliding grooves (7) at the bottom of the sliding platform (1) are in sliding cooperation with the plurality of guide balls (6) on the moving part (4) in a one-to-one corresponding manner, and the plurality of sliding grooves (7) of the sliding platform (1) are elastically pressed onto the plurality of guide balls (6) of the moving part (4) by an elastic pressing component. A driving assembly for driving the moving part (4) to move left and right is also provided in the movable compartment (3) of the base (2), wherein the driving assembly includes at least one piezoelectric ceramic actuator, and two ends of the piezoelectric ceramic actuator are respectively connected to the moving part (4) and the side wall of the movable compartment (3) of the base (2) through flexible hinges (15); By controlling the voltage applied to the piezoelectric ceramic actuator, the piezoelectric ceramic actuator is controlled to produce different sizes of deformation. The different sizes of deformation of the piezoelectric ceramic actuator are amplified by the lever amplification structure to produce different sizes of displacement in the left and right directions on the moving part (4), thereby causing the sliding platform (1) and the moving part (4) to be relatively stationary or intermittently move relative to each other: When the sliding platform (1) and the moving part (4) are relatively stationary, the displacements of the sliding platform (1) and the moving part (4) are consistent, completing the scanning action; When the sliding platform (1) and the moving part (4) intermittently move relative to each other, a stepping displacement action is completed; The driving component includes two first piezoelectric ceramic actuators (14) symmetrically arranged front to back, the two first piezoelectric ceramic actuators (14) are respectively located on the front and back sides of the moving part (4), the deformation direction of each first piezoelectric ceramic actuator (14) is along the extension direction of the long side of the first piezoelectric ceramic actuator (14), and when no voltage is applied to the two first piezoelectric ceramic actuators (14), the long side of each first piezoelectric ceramic actuator (14) forms an inclined angle with the front and back direction of the base (2), and the two inclined first piezoelectric ceramic actuators (14) form a top-to-top driving structure for the moving part (4), and the top-to-top driving structure forms the lever amplification structure.

2. The extremely low-temperature compatible, high-stability piezoelectric scanning-translation stage according to claim 1, characterized in that: The portion of the base (2) located outside the movable chamber (3) is a base outer frame (16), and the base outer frame (16), each first elastic member (5), the moving member (4), and each flexible hinge (15) adopt a specific modulus of not less than 10 GPa / (g / cm 3 ) is integrally formed from a material of the first piezoelectric ceramic actuator (14), the first elastic member (5) and the flexible hinge (15) are both slender strip structures, and when no voltage is applied to the first piezoelectric ceramic actuator (14), the first elastic member (5) extends in the front-to-back direction, and the extension direction of the flexible hinge (15) is parallel to the deformation direction of the first piezoelectric ceramic actuator (14).

3. The extremely low-temperature compatible, high-stability piezoelectric scanning-translation stage according to claim 2, characterized in that: The moving part (4) is formed into a T-shaped structure by a main rod (17) and a sub-rod (18) which are perpendicular to each other. The main rod (17) extends in the left-right direction, and the sub-rod (18) is arranged at one end of the main rod (17) and extends in the front-back direction. The main rod (17) of the moving part (4) is connected to the front and back side walls of the movable chamber (3) of the base (2) through four first elastic members (5). The front end of the main rod (17) is connected to the front side wall of the movable chamber (3) of the base (2) through two first elastic members (5). The rear end of the main rod (17) is connected to the rear side wall of the movable chamber (3) of the base (2) through two first elastic members (5). The two first elastic members on the front side and the two first elastic members on the rear side are symmetrically distributed in the front and back directions. The first piezoelectric ceramic actuator (14) is located between the two first elastic members (5) on the corresponding side.

4. The extremely low-temperature compatible, high-stability piezoelectric scanning-translation stage according to claim 2, wherein: The base outer frame (16), each first elastic member (5), the moving member (4) and each flexible hinge (15) are made of any one of ultraviolet fused quartz, beryllium copper, titanium, beryllium, magnesium-lithium alloy, magnesium-beryllium alloy, aluminum-beryllium alloy and titanium-beryllium alloy.

5. The extremely low-temperature compatible, high-stability piezoelectric scanning-translation stage according to claim 2, characterized in that: When the base outer frame (16) is fixed, the overall resonance frequency of the base outer frame (16), each first elastic member (5), the moving member (4), each flexible hinge (15) and the first piezoelectric ceramic actuator (14) is greater than 1 kHz.

6. A high-stability piezoelectric scanning-translation stage compatible with extremely low temperatures, characterized by: It includes a sliding platform (1) and a base (2) distributed up and down; The base (2) is provided with a movable chamber (3), a moving part (4) is provided in the movable chamber (3) of the base (2), an outer end of the moving part (4) is movably connected to a side wall of the movable chamber (3) of the base (2) via a plurality of elastic parts, and a plurality of guide balls (6) are fixedly provided on the moving part (4); The bottom of the sliding platform (1) is provided with a plurality of sliding grooves (7) arranged in sequence along the front-back direction, and each sliding groove (7) extends along the left-right direction. The plurality of sliding grooves (7) at the bottom of the sliding platform (1) are in sliding cooperation with the plurality of guide balls (6) on the moving part (4) in a one-to-one corresponding manner, and the plurality of sliding grooves (7) of the sliding platform (1) are elastically pressed onto the plurality of guide balls (6) of the moving part (4) by an elastic pressing component. A driving assembly for driving the moving part (4) to move left and right is also provided in the movable compartment (3) of the base (2), wherein the driving assembly includes at least one piezoelectric ceramic actuator, and two ends of the piezoelectric ceramic actuator are respectively connected to the moving part (4) and the side wall of the movable compartment (3) of the base (2) through flexible hinges (15); By controlling the voltage applied to the piezoelectric ceramic actuator, the piezoelectric ceramic actuator is controlled to produce different sizes of deformation. The different sizes of deformation of the piezoelectric ceramic actuator are amplified by the lever amplification structure to produce different sizes of displacement in the left and right directions on the moving part (4), thereby causing the sliding platform (1) and the moving part (4) to be relatively stationary or intermittently move relative to each other: When the sliding platform (1) and the moving part (4) are relatively stationary, the displacements of the sliding platform (1) and the moving part (4) are consistent, completing the scanning action; When the sliding platform (1) and the moving part (4) intermittently move relative to each other, a stepping displacement action is completed; The driving component includes two second piezoelectric ceramic actuators (21) arranged side by side in the front-to-back direction, the two second piezoelectric ceramic actuators (21) are both located on the same side of the moving part (4) in the left-right direction, the deformation direction of each second piezoelectric ceramic actuator (21) is along the extension direction of the long side of the second piezoelectric ceramic actuator (21), and when no voltage is applied to the two second piezoelectric ceramic actuators (21), the long side of each second piezoelectric ceramic actuator (21) forms an inclined angle with the front-to-back direction of the base (2), the two second piezoelectric ceramic actuators (21) are arranged in parallel, and the two parallel second piezoelectric ceramic actuators (21) form a unilateral driving structure for the moving part (4), and the unilateral driving structure forms the lever amplification structure.

7. The extremely low-temperature compatible, high-stability piezoelectric scanning-translation stage according to claim 6, characterized in that: The moving part (4) is integrally connected to the left and right side walls of the movable chamber (3) of the base (2) via a plurality of second elastic parts (22).

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