A beam splitting integrated device and a laser beam splitting apparatus

Abstract

The embodiment of the present application provides a beam splitting integrated device and a laser beam splitting device. The beam splitting integrated device comprises at least one beam splitter, each beam splitter comprising: a half glass for changing the polarization direction of incident light, the incident light propagating along a first direction; a polarization beam splitter prism for splitting the incident light after the half glass into first polarized light and second polarized light, the first polarized light propagating along the first direction, and the second polarized light propagating along a second direction perpendicular to the first direction; and a first driving mechanism for driving the half glass to rotate around the first direction, so as to adjust the polarization direction of the incident light changed by the half glass, and further change the power of the first polarized light and the second polarized light respectively divided by the polarization beam splitter prism. The embodiment of the present application can emit multiple light beams and independently adjust the power of each light beam, realizes the purpose of processing multiple workpieces in parallel, greatly improves the processing efficiency, and at the same time can fully utilize the output power of the laser, and improves the energy utilization efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser processing, in particular to a beam splitting integrated device and a laser beam splitting equipment. BACKGROUND

[0002] Compound semiconductors are semiconductor materials composed of two or more elements, and the most commonly used materials are GaAs, GaN and SiC, etc. As the main representatives of the second and third generations of semiconductors, these compound materials eventually become devices after a series of processes such as MOCVD (metal-organic chemical vapor deposition) epitaxy, cleaning, PECVD (plasma enhanced chemical vapor deposition) long film, exposure and development, ICP (inductively coupled plasma) etching, strong acid corrosion, passivation, metal deposition, annealing, etc., and then form device patterns on the wafer surface. Among these processes, laser technology is used multiple times. For example, a laser is used as a light source, and the output laser beam is spatially modulated and finally acts on the surface of a workpiece such as a wafer. The moving platform carries the workpiece to move in translation, and the laser spot and the workpiece move relative to each other, leaving a scanning trace on the surface.

[0003] In the prior art, laser single-point scanning is generally used. Since there is only one laser, the efficiency needs to be improved by increasing the speed of the motion platform, so the processing efficiency is limited by the limit speed of the motion platform. The cost of a super-speed moving platform is high, and the acceleration is large in a super-speed motion state, and the edge region is prone to distortion due to large speed changes. In addition, since some lasers can only ensure stable power in a large current state, the power under a large current is much larger than the actual required power, so the laser beam must be attenuated before it can be used normally, which will cause energy waste for laser single-point scanning. SUMMARY

[0004] The embodiments of the present application provide a beam splitting integrated device and a laser beam splitting equipment, which can emit multiple light beams and independently adjust the power of each light beam, achieve the purpose of parallel processing of multiple workpieces, and meet different power requirements, thereby greatly improving the processing efficiency. Further, the output power of the laser can be fully utilized, and the energy utilization efficiency is improved.

[0005] Therefore, the embodiments of the present application adopt the following technical solutions:

[0006] In a first aspect, an embodiment of the present application provides a beam splitting integrated device, which comprises at least one beam splitter, each of which comprises: a half-plate for changing the polarization direction of incident light, the incident light propagating along a first direction; a polarization beam splitter prism for splitting the incident light after the half-plate into first polarized light and second polarized light, the first polarized light propagating along the first direction, and the second polarized light propagating along a second direction perpendicular to the first direction; and a first driving mechanism for driving the half-plate to rotate around the first direction, so as to adjust the polarization direction of the incident light changed by the half-plate, and further change the power of the first polarized light and the second polarized light respectively divided by the polarization beam splitter prism.

[0007] When the beam splitting integrated device comprises only one beam splitter, the beam splitting integrated device can emit at most two polarized lights; when the beam splitting device comprises more than two beam splitters, the beam splitting integrated device can emit more than two polarized lights, and for each beam splitter, the first driving mechanism can drive the half-plate to rotate around the first direction, so as to adjust the polarization direction of the incident light changed by the half-plate, and further change the power of the first polarized light and the second polarized light respectively divided by the polarization beam splitter prism. That is, the half-plate can change the polarization direction of the incident light, and when the half-plate is driven by the first driving mechanism to rotate, the polarization direction of the incident light is further adjusted, and at this time, the power of the first polarized light and the power of the second polarized light divided by the polarization beam splitter prism will change accordingly, that is, after the polarization direction of the incident light is changed, the components in the first direction and the second direction after passing through the polarization beam splitter prism will change accordingly. Therefore, the embodiment of the present application can emit multiple light beams, and can independently adjust the power of each light beam, so as to achieve the purpose of parallel processing of multiple workpieces to be processed, and can meet different power requirements, thereby greatly improving the processing efficiency. Further, since the first driving mechanism can drive the half-plate to continuously rotate around the first direction, the power can be steplessly adjusted, that is, the power can continuously change, so as to better meet the user's demand. In addition, the embodiment of the present application can split the high-power light beam into multiple small-power light beams, so that each small-power light beam meets the required power for work, so that the output power of the laser can be fully utilized, the energy waste is reduced, and the energy utilization efficiency is improved.

[0008] In a possible implementation, each beam splitter further comprises a base; the first driving mechanism comprises: a first ring-shaped wheel body arranged on the base; a second ring-shaped wheel body rotatably connected with the first ring-shaped wheel body, and a hollow portion of the second ring-shaped wheel body corresponds to a hollow portion of the first ring-shaped wheel body, the half wafer is arranged at the hollow portion of the second ring-shaped wheel body away from the first ring-shaped wheel body, and the incident light is incident from a side of the first ring-shaped wheel body away from the second ring-shaped wheel body; and a driving component for driving the second ring-shaped wheel body and the half wafer to rotate relative to the first ring-shaped wheel body in the first direction. That is, in this implementation, the half wafer can be arranged at the hollow portion of the second ring-shaped wheel body, and in order to avoid that the first ring-shaped wheel body blocks the incident light incident to the half wafer, the hollow portion of the second ring-shaped wheel body can be arranged corresponding to the hollow portion of the first ring-shaped wheel body. In addition, the second ring-shaped wheel body is rotatably arranged on the first ring-shaped wheel body, for example, through a bearing, so that the position of the second ring-shaped wheel body can be maintained, and the second ring-shaped wheel body can drive the half wafer to rotate under the driving of the driving component, so as to adjust the polarization direction of the incident light changed by the half wafer, and further change the respective powers of the first polarized light and the second polarized light divided by the polarizing beam splitter.

[0009] In a possible implementation, the driving component comprises: a driving wheel arranged in a spaced manner with the second ring-shaped wheel body; a belt arranged outside the driving wheel and the second ring-shaped wheel body; and a motor for driving the driving wheel to rotate and driving the second ring-shaped wheel body and the half wafer to rotate under the action of the belt. That is, in this implementation, the second ring-shaped wheel body can be regarded as a large belt wheel, and the driving wheel can be regarded as a small belt wheel. The large and small belt wheels and the synchronous belt, i.e., the belt, are driven by the motor, so that the large belt wheel, i.e., the second ring-shaped wheel body, drives the half wafer to rotate, so as to change the polarization direction of the incident light.

[0010] In a possible implementation, each beam splitter further comprises: a heat sink, which is arranged along the second direction and on a base of the beam splitting integrated device; and a second driving mechanism, configured to drive the polarization beam splitter to rotate around a third direction to switch the polarization beam splitter between the first state and the second state, the third direction being perpendicular to the first direction and the second direction, wherein: in the first state, the second polarized light propagates away from the heat sink; and in the second state, the second polarized light propagates toward the heat sink, and the heat sink is capable of absorbing energy of the second polarized light. That is, in this implementation, each beam splitter can be switched between two states, in the first state, the beam splitter can emit two light beams, i.e., the first polarized light propagating along the first direction and the second polarized light propagating away from the heat sink along the second direction; and in the second state, the beam splitter can actually emit one light beam, i.e., the first polarized light propagating along the first direction, and the second polarized light propagating toward the heat sink along the second direction, and the energy of the second polarized light is absorbed by the heat sink and is not output. In addition, no matter whether the heat sink is in the first state or the second state, the first driving mechanism can drive the half-wave plate to rotate to adjust the polarization direction of the incident light of the half-wave plate, and thus change the respective powers of the first polarized light and the second polarized light divided by the polarization beam splitter, i.e., the power of each light beam can be independently adjusted by the beam splitter in the two states.

[0011] In a possible implementation, the beam splitting integrated device comprises a plurality of the beam splitters, and the plurality of the beam splitters comprises a first group of beam splitters, the beam splitters in the first group of beam splitters are in the first state or the second state and are arranged along the first direction, and a downstream beam splitter can receive the first polarized light emitted by an upstream beam splitter. That is, in this implementation, a plurality of beam splitters can be arranged along the first direction, and the plurality of beam splitters can be in the first state or the second state respectively. By controlling the plurality of beam splitters to be in different states, the number of polarized lights emitted by the beam splitting integrated device can be controlled, and the power of each polarized light can also be controlled. In addition, the number of beam splitters arranged along the first direction can be set as needed to achieve arbitrary expansion of the output light beam, and meet the working needs in different situations.

[0012] In a possible implementation, the beam splitting integrated device further comprises a first reflecting component located downstream of the first set of beam splitters, and the first reflecting component is capable of reflecting the first polarized light emitted by the first set of beam splitters and propagating along the first direction into propagating along the second direction. That is, in this implementation, in order to make the propagation directions of the polarized lights emitted by the beam splitting integrated device consistent, the first reflecting component is used to reflect the first polarized light emitted by the last beam splitter of the first set of beam splitters and propagating along the first direction into propagating along the second direction, so as to make the propagation direction of the first polarized light consistent with the propagation direction of the second polarized light emitted by the beam splitter of the first set of beam splitters and propagating along the second direction.

[0013] In a possible implementation, the beam splitting integrated device further comprises a first moving mechanism, and the first moving mechanism is capable of moving at least one of the plurality of beam splitters of the first set of beam splitters and / or moving the first reflecting component along the first direction. That is, in this implementation, the first moving mechanism is used to move at least one of the plurality of beam splitters along the first direction, and the first moving mechanism is also used to move the first reflecting component along the first direction, so as to achieve the purpose of adjusting the interval of the adjacent light beams along the first direction.

[0014] In a possible implementation, the beam splitting integrated device further comprises a plurality of second reflecting components, and the number of the plurality of second reflecting components is equal to the number of the beam splitters of the first set of beam splitters and is arranged correspondingly, and each second reflecting component is capable of reflecting the second polarized light emitted by the corresponding beam splitter of the first set of beam splitters and propagating along the second direction into propagating along the first direction. That is, in this implementation, the second reflecting component is used to reflect the second polarized light emitted by each beam splitter of the first set of beam splitters and propagating along the second direction into propagating along the first direction, so as to make the propagation direction of the first polarized light emitted by the last beam splitter of the first set of beam splitters and propagating along the first direction consistent with the propagation direction of the second polarized light, and thus make the propagation directions of the polarized lights emitted by the beam splitting integrated device consistent.

[0015] In a possible implementation, the plurality of beam splitters includes a second group of beam splitters, the beam splitters in the second group of beam splitters are in the second state and arranged along the second direction, the second group of beam splitters includes a first beam splitter and at least one second beam splitter; the first beam splitter is capable of receiving the first polarized light emitted by the first group of beam splitters; the number of the second beam splitters is equal to and corresponds to the number of the plurality of second reflecting components, and each second beam splitter is capable of receiving the second polarized light emitted by the corresponding beam splitter in the first group of beam splitters through the corresponding second reflecting component. That is, in this implementation, in order to further adjust the power of the polarized light emitted by each beam splitter in the first group of beam splitters, the second group of beam splitters can be provided, the first beam splitter in the second group of beam splitters is located downstream of the beam splitter in the first group of beam splitters that receives the incident light last, and the power of the first polarized light emitted by the beam splitter in the first group of beam splitters that receives the incident light last and propagating along the first direction can be adjusted. Specifically, the first driving mechanism in the first beam splitter can be driven to rotate the half glass, so as to change the polarization direction of the incident light, and then the input light with the changed polarization direction passes through the polarizing beam splitter in the first beam splitter, and the components in the first direction and the second direction change accordingly, so that the power of the output first polarized light changes, while the second polarized light is absorbed by the heat sink and is no longer output; the second polarized light emitted by the beam splitter in the first group of beam splitters and propagating along the second direction is reflected by the second reflecting component to propagate towards the second beam splitter in the second group of beam splitters, and the power thereof can be adjusted through the second beam splitter. Specifically, the first driving mechanism in the second beam splitter can be driven to rotate the half glass, so as to change the polarization direction of the incident light, and then the input light with the changed polarization direction passes through the polarizing beam splitter in the second beam splitter, and the components in the first direction and the second direction change accordingly, so that the power of the output first polarized light changes, while the second polarized light is absorbed by the heat sink and is no longer output.

[0016] In a possible implementation, the beam splitting integrated device further includes a second moving mechanism, the second moving mechanism is capable of moving the second beam splitters and the second reflecting components corresponding to the second beam splitters together along the second direction. That is, in this implementation, in order to adjust the interval of the adjacent light beams along the second direction, the second moving mechanism can be used to move the second beam splitters and the second reflecting components corresponding to the second beam splitters together along the second direction.

[0017] In a possible implementation, the beam splitting integrated device further comprises a control mechanism, the at least one beam splitter comprises two or more beam splitters, and the control mechanism is capable of separately controlling the rotation angles of the first driving mechanism and the second driving mechanism of each of the two or more beam splitters. That is, in this implementation, the first driving mechanism in each beam splitter can be controlled by the control mechanism to achieve more accurate power adjustment, and the rotation angle of the second driving mechanism can also be controlled by the control mechanism to achieve switching of the beam splitter between the first state and the second state.

[0018] In a second aspect, the embodiments of the present application provide a laser beam splitting device, comprising: a laser for emitting incident light; the beam splitting integrated device provided in the first aspect, for splitting the incident light into at least two polarized lights; and a plurality of motion platforms, each of which is used for placing a workpiece to be processed, and the workpiece to be processed is capable of receiving at least one polarized light.

[0019] In a possible implementation, the laser beam splitting device further comprises: a third reflecting component and a focusing component arranged corresponding to each motion platform, the third reflecting component is used for making one of the at least two polarized lights emitted by the beam splitting integrated device propagate towards the motion platform, and the focusing component is used for converging the light reflected by the third reflecting component; and / or a spatial modulation component located between the laser and the beam splitting integrated device, the spatial modulation component is used for spatially shaping the incident light emitted by the laser and sending the shaped incident light to the beam splitting integrated device.

[0020] Other features and advantages of the present application will be described in detail in the following specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0021] The drawings required for use in the embodiments or prior art description are briefly introduced as follows.

[0022] Figure 1 FIG. 1 is a structural schematic diagram of a laser beam splitting device;

[0023] Figure 2 FIG. 1 is a structural schematic diagram of a laser beam splitting device;

[0024] Figure 3 FIG. 1 is a structural schematic diagram of a laser beam splitting device;

[0025] Figure 4 FIG. 1 is a structural schematic diagram of a laser beam splitting device;

[0026] Figure 5A structure schematic diagram of a beam splitting integrated device provided for a second embodiment of the present application is shown in the figure.

[0027] Figure 6 A structure schematic diagram of a beam splitting integrated device provided for a third embodiment of the present application is shown in the figure.

[0028] Figure 7 A structure schematic diagram of a beam splitting integrated device provided for a fourth embodiment of the present application is shown in the figure. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

[0030] In the description of the present application, the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0031] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or can be in contact connection or integral connection; for those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] In the description of the present application, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0033] Figure 1 A structure schematic diagram of a laser beam splitting device is shown in the figure. Figure 1 As shown in the figure, the laser beam splitting device includes a laser 10', a moving platform 30', a reflecting mirror 40', a focusing mirror 50' and a spatial modulation component 60'. The laser 10' serves as a light source, and the output laser beam is subjected to a series of spatial modulations by the spatial modulation component 60', reflected by the reflecting mirror 40' and converged by the focusing mirror 50', and finally acts on the surface of a workpiece W to be processed. The workpiece W to be processed is subjected to translational movement by the moving platform 30', and the laser spot and the workpiece W to be processed are subjected to relative displacement, leaving a scanning trace on the surface of the workpiece W to be processed.

[0034] In the above laser beam splitting device, the output beam of the laser 10' only acts on a single station, and cannot be used for multi-station parallel processing, so it is not easy to ensure that the power conditions are consistent when different batches are processed. Moreover, the laser beam splitting device does not have a power adjustment function and cannot adapt to different power requirements when different batches are processed. In addition, the single-point scanning processing method has low efficiency, which is mainly limited by the speed of the motion platform. In order to improve the efficiency, a high-speed motion platform is selected, which not only has a high cost, but also has a non-uniform speed during acceleration and deceleration of the high-speed motion platform, which can easily cause distortion of the spot morphology during the process.

[0035] Therefore, the embodiments of the present application provide a beam splitting integrated device and a laser beam splitting device, which can emit multiple light beams and independently adjust the power of each light beam, thereby achieving the purpose of parallel processing of multiple workpieces, thereby greatly improving the processing efficiency. Compared with multi-source multi-point parallel processing, it does not require multiple lasers, which greatly reduces the processing cost. Compared with single-source single-point processing, the processing efficiency can be improved several times with a small amount of additional cost. Further, each beam splitter has a power adjustment function that is independent of and does not interfere with each other, which can meet different power requirements and is beneficial to expand the use range. In addition, since the power of some lasers can only be stabilized under a large current, the power under a large current is much larger than the actual required power, so the laser beam must be attenuated before it can be used normally. This will cause energy waste for laser single-point scanning. The embodiments of the present application can split the high-power light beam into multiple small-power light beams, so that each small-power light beam meets the required power for work, thereby fully utilizing the output power of the laser and reducing energy waste and improving energy utilization efficiency.

[0036] Figure 2 A structural schematic diagram of a laser beam splitting device provided by the embodiments of the present application is shown in FIG. 1. Figure 2 As shown in FIG. 1, the laser beam splitting device includes a laser 10, a beam splitting integrated device 20, and multiple motion platforms 30. The laser 10 is used to emit incident light. The wavelength of the laser light source can be long-wave and short-wave. The pulse width of the laser can be femtosecond, picosecond, and nanosecond.

[0037] The beam splitting integrated device 20 is used to divide the incident light into at least two polarized lights. Each motion platform 30 is used to place a workpiece W, and the workpiece W can receive at least one polarized light. Figure 2 In the embodiment, the beam splitting integrated device 20 divides the incident light into three polarized lights, and three motion platforms 30 can be provided, each of which can receive one polarized light. The motion platform 30 moves with the workpiece W, and the laser spot moves relative to the workpiece W, leaving a scanning trace on the surface of the workpiece W.

[0038] Additionally, the laser beam splitting device may also include a spatial modulation component 60 and a third reflection component 40 and a focusing component 50 corresponding to each motion platform 30. The spatial modulation component 60 is located between the laser 10 and the beam splitting integration device 20. The spatial modulation component 60 is used to spatially shape the incident light emitted from the laser 10 and send the shaped incident light to the beam splitting integration device 20. Here, "spatial shaping" can refer to processing incident light with multiple polarization directions into input light with a single polarization direction. The third reflection component 40 can be a reflector, and the focusing component 50 can be a focusing lens. The third reflection component 40 is used to propagate one of the at least two polarized beams emitted from the beam splitting integration device 20 toward the motion platform 30, and the focusing component 50 is used to converge the light reflected by the third reflection component 40.

[0039] Specifically, after the laser beam output from the laser 10 is spatially modulated by the spatial modulation component 60, it is split by the beam splitting integration device 20. The power of the split beams can be adjusted to meet the needs of different workstations. After the power of each split beam has been adjusted, it reaches the surface of the workpiece W through the action of the third reflecting component 40 (such as a reflector) and the focusing component 50 (such as a focusing lens). The motion platform 30 moves together with the workpiece W to achieve scanning of different areas of the workpiece W.

[0040] The following is combined with Figures 3-7 The specific structure of the beam splitting and integration device 20 according to the embodiments of this application will be described.

[0041] Figure 3 This is a schematic diagram of the beam splitting and integration device provided in the first embodiment of this application. Figure 3 As shown, the beam splitting integration device includes at least one beam splitter 1. Each beam splitter 1 includes a half-glass plate 11, a polarizing beam splitter (PBS) 12, and a first driving mechanism 13. The half-glass plate 11 is used to change the polarization direction of the incident light, which propagates along a first direction X. The polarizing beam splitter 12 is used to split the incident light after passing through the half-glass plate 11 into first polarized light and second polarized light. The first polarized light propagates along the first direction X, and the second polarized light propagates along a second direction Y perpendicular to the first direction X. The first driving mechanism 13 is used to drive the half-glass plate 11 to rotate around the first direction X, thereby adjusting the polarization direction of the incident light changed by the half-glass plate 11, and thus changing the power of the first polarized light and the second polarized light split by the polarizing beam splitter 12. The polarization directions of the first polarized light and the second polarized light are perpendicular. In one example, as shown... Figure 3 As shown, the first polarization can be vertically polarized light, and the second polarization can be horizontally polarized light.

[0042] When the beam-splitting integrated device only includes one beam splitter 1, the beam-splitting integrated device can emit at most two polarized light beams; when the beam-splitting device includes more than two beam splitters 1, the beam-splitting integrated device can emit more than two polarized light beams, and each beam splitter has the function of independently adjusting the power without interference. Specifically, for each beam splitter 1, the first driving mechanism 13 can drive the half glass 11 to rotate around the first direction X to adjust the polarization direction of the incident light of the half glass 11, thereby changing the power of the first polarized light and the second polarized light divided by the polarizing beam splitter prism 12. That is, after the polarization direction of the incident light changes, the components in the first direction X and the second direction Y after passing through the polarizing beam splitter prism 12 will change accordingly. Therefore, the embodiment of the present application can emit multiple light beams, and the power of each light beam can be independently adjusted, achieving the purpose of parallel processing of multiple workpieces, while meeting different power requirements, thereby greatly improving the processing efficiency. Further, since the first driving mechanism 13 can drive the half glass 11 to continuously rotate around the first direction X, the power can be steplessly adjusted, that is, the power can continuously change, not in segments, thereby better meeting the needs of users. In addition, the beam-splitting integrated device can split the received high-power incident light into multiple small-power light beams, so that each small-power light beam meets the required power for work, thereby fully utilizing the output power of the laser, reducing energy waste, and improving the utilization efficiency of energy.

[0043] With continued reference to Figure 3 Each beam splitter 1 can further include a base 14. The first driving mechanism 13 includes a first annular wheel body 131, a second annular wheel body 132, and a driving component 133. The first annular wheel body 131 is arranged on the base 14. The second annular wheel body 132 is rotatably connected with the first annular wheel body 131, for example, the second annular wheel body 132 is connected with the first annular wheel body 131 through a bearing Z, the first annular wheel body 131 can be used to keep the position of the second annular wheel body 132 without affecting the rotation of the second annular wheel body 132. Moreover, in order to avoid the first ring wheel body 131 blocking the propagation of the incident light to the half glass 11, the hollow part of the second annular wheel body 132 corresponds to the hollow part of the first ring wheel body 131, the half glass 11 is arranged at the hollow part of the second annular wheel body 132 away from the first annular wheel body 131, and the incident light is incident from the side of the first annular wheel body 131 away from the second annular wheel body 132. The driving component 133 is used to drive the second annular wheel body 132 and the half glass 11 to rotate around the first direction X relative to the first annular wheel body 131.

[0044] Specifically, the incident light received by the beam splitting integrated device is light with a single polarization direction. After passing through the hollow part of the first ring-shaped wheel body 131, the polarization direction of the light changes when it reaches the half-wave plate 11 at the middle part of the second ring-shaped wheel body 132. Then, the light can be decomposed into first polarized light propagating along the first direction X and second polarized light propagating along the second direction Y by the polarizing beam splitter prism 12.

[0045] Further, in order to avoid the driving component 133 from blocking the half-wave plate 11 when driving the second ring-shaped wheel body 132 to rotate, the driving component 133 can include a driving wheel 1331, a belt 1332 and a motor 1333. The driving wheel 1331 is arranged apart from the second ring-shaped wheel body 132. The belt 1332 is sleeved on the outside of the driving wheel 1331 and the second ring-shaped wheel body 132. The motor 1333 is used to drive the driving wheel 1331 to rotate, and drives the second ring-shaped wheel body 132 and the half-wave plate 11 to rotate under the action of the belt 1332. The motor 1333 can be a stepper motor.

[0046] The driving component 133 drives the second ring-shaped wheel body 132 and the half-wave plate 11 to rotate relative to the first ring-shaped wheel body 131 around the first direction X, which can adjust the polarization direction and change the power of the first polarized light and the second polarized light divided by the polarizing beam splitter prism 12. Specifically, the second ring-shaped wheel body 132 can be regarded as a large pulley, and the driving wheel 1331 can be regarded as a small pulley. The large and small pulleys and the synchronous belt, i.e. the belt 1332, are driven by the motor 1333. The large pulley, i.e. the second ring-shaped wheel body 132, drives the half-wave plate 11 to rotate. The half-wave plate 11 can change the direction of the incident polarized light, and the polarization direction of the incident light after passing through the half-wave plate 11 determines the power of the first polarized light and the second polarized light.

[0047] In addition, as shown in FIG. 1, the beam splitting integrated device can further include a first polarized light path 14 and a second polarized light path 15. Figure 3As shown, each beam splitter 1 can further comprise a heat sink 15 and a second driving mechanism 16. The second driving mechanism 16 can be a stepper motor. The heat sink 15 is arranged along the second direction Y and on the base 14 of the beam splitting integrated device, i.e. the position of the heat sink 15 is fixed. The second driving mechanism 16 is used to drive the polarization beam splitter 12 to rotate around the third direction Z, so as to switch the polarization beam splitter 12 between the first state and the second state, and the third direction Z is perpendicular to the first direction X and the second direction Y. That is, the polarization beam splitter 12 rotates around the third direction Z, which can change the angle of the reflecting surface of the polarization beam splitter 12, and then can change the direction of the second polarized light, so as to switch the beam splitter 1 between different states. Specifically, the polarization beam splitter 12 / PBS is rotated 90° around the third direction Z by the second driving mechanism 16, so as to switch the beam splitter 1 from the first state to the second state, or from the second state to the first state. The PBS receives the polarized light deflected by the half-wave plate 11, and can separate the first polarized light such as vertical polarized light and the second polarized light such as horizontal polarized light.

[0048] In addition, the beam splitting integrated device can further comprise a control mechanism (not shown in the figure), which can separately control the rotation angles of the first driving mechanism 13 and the second driving mechanism 16 of each beam splitter 1.

[0049] Figure 4 The top view of the beam splitter in the beam splitting integrated device of the embodiment of the present application in the two states. As shown in the left view of FIG. 1A, Figure 4 In the first state, the second polarized light along the second direction Y propagates away from the heat sink 15, at this time, the beam splitter 1 can emit two beams of polarized light, i.e. the first polarized light propagating along the first direction X and the second polarized light propagating along the second direction Y. As shown in the right view of FIG. 1A, Figure 4 In the second state, the second polarized light along the second direction Y propagates towards the heat sink 15, i.e. at this time, the second polarized light will irradiate on the heat sink 15 and no longer output, and the heat sink 15 can absorb the energy of the second polarized light, while the first polarized light propagating along the first direction X is not affected and can continue to output, and the beam splitter 1 can only emit one beam of polarized light, i.e. the first polarized light. In addition, no matter whether the heat sink 15 is in the first state or in the second state, since the first driving mechanism 13 can drive the half-wave plate 11 to rotate to change the polarization direction of the incident light, and then the first polarized light and the second polarized light divided when the incident light with the changed polarization direction passes through the polarization beam splitter 12 each change in power, therefore, in the two states, the beam splitter 1 can independently adjust the power of each light beam without interfering with the output of other light paths.

[0050] Figure 5 The structural schematic diagram of the beam splitting integrated device provided by the second embodiment of the present application. As shown in FIG. 2A, Figure 5As shown, the beam splitting integrated device can include a plurality of beam splitters 1, the plurality of beam splitters 1 including a first group of beam splitters a, the beam splitters 1 in the first group of beam splitters a being in the first state or the second state and arranged in the first direction X, the beam splitters 1 downstream being capable of receiving the first polarized light emitted by the beam splitters 1 upstream.

[0051] Since the beam splitters 1 in the first state can emit two routes of polarized light, the beam splitters 1 in the second state can emit one route of polarized light, and the beam splitters 1 in the first group of beam splitters a can be in the first state or the second state, and the rotation angles of the first driving mechanism 13 and the second driving mechanism 16 in each beam splitter 1 are independently controlled, therefore, the first group of beam splitters a can not only control the number of branch light beams emitted, but also independently adjust the power of the branch light beams.

[0052] Continuing to refer to Figure 5 , the beam splitting integrated device can further include a first reflecting component F1 located downstream of the first group of beam splitters a, the first reflecting component F1 being capable of reflecting the first polarized light emitted by the first group of beam splitters a and propagating in the first direction X to propagate in the second direction Y. Wherein, the first reflecting component F1 can be a full reflection mirror, and can form a 45° angle with the incident direction of the branch light beams emitted by the first group of beam splitters a and propagating in the first direction X, i.e., the first polarized light. That is, in the first group of beam splitters a, the last beam splitter 1 receiving the incident light can emit two routes of polarized light, one route propagating in the first direction X and the other route propagating in the second direction Y, and the first polarized light emitted by the beam splitters 1 upstream can be incident light of the beam splitters 1 downstream, therefore, in fact, only the polarized light propagating in the second direction Y in the light beams emitted by the other beam splitters 1 can be working laser. By reflecting the first polarized light emitted by the last beam splitter 1 receiving the incident light and propagating in the first direction X to propagate in the second direction Y through the first reflecting component F1, all the light beams emitted by the beam splitting integrated device can propagate in the second direction Y, which is convenient for unified distribution to process different workpieces to be processed.

[0053] Further, the beam splitting integrated device can further include a first moving mechanism (not shown in the figure). The first moving mechanism is capable of moving at least one of the plurality of beam splitters 1 of the first group of beam splitters a and / or moving the first reflecting component F1 in the first direction X, i.e., at least one of the plurality of beam splitters 1 can be moved in the first direction X through the first moving mechanism; the first reflecting component F1 can also be moved in the first direction X through the first moving mechanism, thereby achieving adjustment of the spacing between adjacent light beams in the first direction X.

[0054] Figure 6 The structural schematic diagram of the beam splitting integrated device provided by the third embodiment of the present application. Different from the beam splitting integrated device shown in Figure 5 , the beam splitting integrated device provided by the third embodiment of the present application further includes a first reflecting component F1 located downstream of the first group of beam splitters a, the first reflecting component F1 being capable of reflecting the first polarized light emitted by the first group of beam splitters a and propagating in the first direction X to propagate in the second direction Y. Figure 6In this beam splitting integration device, the first reflecting component F1 is not provided. However, the beam splitting integration device also includes multiple second reflecting components F2. The number of the multiple second reflecting components F2 is equal to the number of beam splitters 1 in the first beam splitter a and they are correspondingly arranged. Each second reflecting component F2 can reflect the second polarized light emitted by the corresponding beam splitter 1 in the first beam splitter a, which propagates along the second direction Y, into light that propagates along the first direction X. The second reflecting component F2 can be a total reflection mirror, and can form a 45° angle with the incident direction of the branch beam (i.e., the second polarized light) propagating along the second direction Y emitted by the corresponding beam splitter 1 in the first beam splitter a.

[0055] In other words, the beam splitter 1 in the second state can decompose the input light into two directions, pointing to the next beam splitter 1 and the corresponding second reflecting component F2, respectively. By setting multiple second reflecting components F2, the second polarized light emitted by all beam splitters 1 in the first group beam splitter a (including the last beam splitter to receive the incident light) propagating along the second direction Y can be reflected into light propagating along the first direction X, so as to keep consistent with the propagation direction of the first polarized light emitted by the last beam splitter 1 to receive the incident light (i.e., propagating along the first direction X), thereby facilitating unified allocation for processing different workpieces.

[0056] Furthermore, in Figure 6 In this assembly, a first moving mechanism (not shown in the figure) can simultaneously move at least one of the plurality of beam splitters 1 in the first beam splitter a and its corresponding second reflecting component F2 along the first direction X, so as to adjust the spacing between adjacent beams along the first direction X. Additionally, the beam splitting integration device may also include a second moving mechanism (not shown in the figure). The second moving mechanism can move at least one of the plurality of second reflecting components F2 along the second direction Y, so as to adjust the spacing between adjacent beams along the second direction Y. By adjusting the distance between the output beams through the first and second moving mechanisms, different positional requirements can be accommodated, making the operation more flexible.

[0057] Figure 7 This is a schematic diagram of the beam-splitting integration device provided in the fourth embodiment of this application. Figure 6 The difference in the beam splitting integration device shown is that, Figure 7In this configuration, the multiple beamsplitters 1 may further include a second beamsplitter b. The beamsplitters 1 in the second beamsplitter b are in a second state and arranged along a second direction Y. The second beamsplitter b includes a first beamsplitter b1 and at least one second beamsplitter b2. The first beamsplitter b1 is capable of receiving first polarized light emitted by the first beamsplitter a. The number of second beamsplitters b2 is equal to the number of multiple second reflecting components F2 and they are correspondingly arranged. Each second beamsplitter b2 can receive second polarized light emitted by a corresponding beamsplitter 1 in the first beamsplitter a through its corresponding second reflecting component F2. That is, the second beamsplitter b may be located downstream of the first beamsplitter a. Each second reflecting component F2 is arranged corresponding to one beamsplitter 1 in the first beamsplitter a and one second beamsplitter b2 in the second beamsplitter b. The second reflecting component F2 can reflect the second polarized light received from one beamsplitter 1 in the first beamsplitter a toward one second beamsplitter b2 in the second beamsplitter b, as the incident light of the second beamsplitter b2.

[0058] like Figure 7 As shown, in the first beam splitter a, when beam splitter 1 is in the first state, it can split the incident light into two: one beam, i.e., the first polarized light, is output to the next beam splitter 1, and the other beam, i.e., the second polarized light, is output to the second reflecting component F2 corresponding to that beam splitter 1. When beam splitter 1 is in the second state, one beam, i.e., the first polarized light, is output to the next beam splitter 1, and the other beam, i.e., the second polarized light, is absorbed by the heat sink 15 of that beam splitter and is no longer output. Therefore, the first beam splitter a has the function of controlling the number of beams emitted by the beam splitting integration device. In addition, beam splitter 1 has the function of controlling the beam splitting magnitude / power regardless of whether it is in the first state or the second state. Furthermore, since the first driving mechanism 13 can drive the half-glass plate 11 to rotate continuously around the first direction X, stepless power adjustment / continuous power variation can be achieved, which can better meet user needs.

[0059] In the second beam splitter b, beam splitter 1 is in the second state, thus emitting only first polarized light propagating along the first direction X. Furthermore, the rotation angle of the first drive mechanism in each beam splitter 1 is independently controlled. Therefore, although beam splitters 1 in the second beam splitter b cannot change the number of emitted beams, they can independently adjust the power of the branch beams. In other words, beam splitters 1 in the second beam splitter b in the second state can play an auxiliary role in power adjustment, and this adjustment is independent and will not interfere with the output of other beams.

[0060] Therefore, by adjusting the state of beam splitter 1 in the first beam splitter a, the number of beams can be adjusted, allowing the beam splitting integration device to operate in different modes. Furthermore, the position and number of beams emitted in each operating mode can be different, and the power of each beam can be adjusted as needed.

[0061] The following describes several possible working modes of the beam splitting integrated device, taking the first group of beam splitters a including three beam splitters 1 and the second group of beam splitters b including four beam splitters 1 as an example. For details, please refer to Table 1 below.

[0062]

[0063] Table 1

[0064] As shown in Table 1, the beam splitting integrated device can emit one light beam through any one of the beam splitters 1 in the second group of beam splitters b; can emit two light beams through any two of the beam splitters 1 in the second group of beam splitters b; can emit three light beams through any three of the beam splitters 1 in the second group of beam splitters b; and can emit four light beams through all the four beam splitters 1 in the second group of beam splitters b. It can be understood that, when necessary, the first group of beam splitters a can include more beam splitters 1, and the second group of beam splitters b can also include more beam splitters 1, so that the number of light beams emitted by the beam splitting integrated device is expanded to more. In addition, it should be noted that the working modes of the beam splitting integrated device can be, but are not limited to, the several working modes shown in Table 1. For example, in other working modes, the beam splitters 1 in the first group of beam splitters a can also be 1 / 5, etc.

[0065] Further, in the Figure 7 first direction X, the first moving mechanism (not shown in the figure) can simultaneously move at least one of the plurality of beam splitters 1 in the first group of beam splitters a and the corresponding second reflecting component F2 along the first direction X, so as to adjust the interval between adjacent light beams along the first direction X; the second moving mechanism (not shown in the figure) can move the second beam splitter b2 and the corresponding second reflecting component F2 along the second direction Y together, so as to adjust the interval between adjacent light beams along the second direction Y. Wherein, the first beam splitter b1 can be fixed. By adjusting the distance between the output light beams through the first moving mechanism and the second moving mechanism, different position requirements can be adapted, making the operation more flexible.

[0066] In the beam splitting integrated device of the embodiment of the present application, the number of laser beams can be adjusted by adjusting the states of the plurality of beam splitters 1 in the first group of beam splitters a, the beam splitters 1 in the first group of beam splitters a, the second reflecting component F2 and the second beam splitter b2 in the second group of beam splitters b can be expanded in number to achieve arbitrary expansion of the output of the light beams. The plurality of beam splitters 1 in the first group of beam splitters a can independently adjust the power of each light beam, and the first beam splitter b1 and the second beam splitter b2 in the second group of beam splitters b can again adjust the power of each branch light beam received from the plurality of beam splitters 1 in the first group of beam splitters a through the second reflecting component F2. In addition, the second reflecting component F2 can change the direction of the branch light beams, so that the output light beams remain in the same direction. The first beam splitter b1 can be a fixed unit, and the second reflecting component F2 and the second beam splitter b2 form a movable unit that can translate relative to the fixed unit to achieve adjustable spacing between the light beams.

[0067] In summary, the power-adjustable laser beam splitting device and the beam splitting integrated device provided by the embodiment of the present application can realize single-source multi-point parallel processing and independently adjust the power of each light beam. Each beam splitter has the function of independent power adjustment without interference, can meet different power requirements, and is conducive to expanding the range of use. Compared with multi-source multi-point parallel processing, multiple lasers are not required, which greatly reduces the processing cost. Compared with single-source single-point processing, the processing efficiency can be increased several times with a small increase in cost. In addition, the spacing of the multiple light beams of the embodiment of the present application is flexible and adjustable, and the number of light beams is flexible and selectable, which is suitable for scenarios that require frequent changes of light beams.

[0068] Further, since some lasers can only ensure stable power in a large current state, the power under a large current is much greater than the actual required power, and therefore the laser beam must be attenuated before being used normally. This will cause energy waste for laser single-point scanning. The embodiment of the present application can split a large-power light beam into multiple small-power light beams, so that each small-power light beam meets the required power for work, thereby fully utilizing the output power of the laser, greatly utilizing energy, reducing energy waste, and improving the utilization efficiency of energy.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not limiting. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A beam-splitting integration device, characterized in that, Includes at least one beam splitter, each beam splitter comprising: A half-glass slide is used to change the polarization direction of incident light, which propagates along a first direction; A polarizing beam splitter is used to split incident light after passing through the half glass plate into first polarized light and second polarized light. The first polarized light propagates along the first direction, and the second polarized light propagates along the second direction perpendicular to the first direction. A first driving mechanism is used to drive the half glass plate to rotate around the first direction in order to adjust the polarization direction of the incident light changed by the half glass plate, thereby changing the power of the first polarized light and the second polarized light separated by the polarizing beam splitter. Each beam splitter also includes: The heat sink is arranged at intervals with the polarizing beam splitter along the second direction and is disposed on the base of the beam splitting integration device; The second driving mechanism is used to drive the polarizing beam splitter to rotate about a third direction, so that the polarizing beam splitter switches between a first state and a second state, wherein the third direction is perpendicular to the first direction and the second direction, wherein: In the first state, the second polarized light propagates in a direction away from the heat sink; In the second state, the second polarized light propagates toward the heat sink, and the heat sink is able to absorb the energy of the second polarized light.

2. The beam splitting and integration device according to claim 1, characterized in that, Each beam splitter also includes a base; the first drive mechanism includes: A first annular wheel is mounted on the base; The second annular wheel is rotatably connected to the first annular wheel, and the hollow portion of the second annular wheel corresponds to the hollow portion of the first annular wheel. The half-glass slide is disposed on the side of the second annular wheel away from the first annular wheel in the hollow portion of the second annular wheel, and the incident light enters from the side of the first annular wheel away from the second annular wheel. A driving component is used to drive the second annular wheel and the half-glass plate to rotate relative to the first annular wheel about the first direction.

3. The beam splitting and integration device according to claim 2, characterized in that, The driving component includes: The drive wheel is spaced apart from the second annular wheel body; A belt is fitted over the drive wheel and the second annular wheel body; An electric motor is used to drive the drive wheel to rotate, and under the action of the belt, it drives the second annular wheel and the half glass plate to rotate.

4. The beam splitting and integration device according to claim 1, characterized in that, The beam splitting integration device includes a plurality of beam splitters, the plurality of beam splitters including a first group of beam splitters, the beam splitters in the first group of beam splitters being in the first state or the second state and arranged along the first direction, and the downstream beam splitter being able to receive the first polarized light emitted by the upstream beam splitter.

5. The beam splitting and integration device according to claim 4, characterized in that, The beam splitting integration device further includes a first reflecting component located downstream of the first beam splitter. The first reflecting component is capable of reflecting the first polarized light emitted by the first beam splitter that propagates along the first direction into light that propagates along the second direction.

6. The beam splitting and integration device according to claim 5, characterized in that, The beam splitting integration device further includes a first moving mechanism, which is capable of moving at least one of the plurality of beam splitters of the first beam splitter along the first direction and / or moving the first reflective component.

7. The beam splitting and integration device according to claim 4, characterized in that, The beam splitting integration device further includes a plurality of second reflective components. The number of the plurality of second reflective components is equal to the number of beam splitters in the first beam splitter and is arranged accordingly. Each second reflective component is capable of reflecting the second polarized light emitted by the corresponding beam splitter in the first beam splitter, which propagates along the second direction, into light that propagates along the first direction.

8. The beam splitting and integration device according to claim 7, characterized in that, The plurality of beam splitters includes a second beam splitter group, wherein the beam splitters in the second beam splitter group are in a second state and arranged along the second direction, and the second beam splitter group includes a first beam splitter and at least one second beam splitter; the first beam splitter is capable of receiving a first polarized light emitted by the first beam splitter group; the number of the second beam splitters is equal to the number of the plurality of second reflective components and is correspondingly arranged, and the second beam splitter is capable of receiving a second polarized light emitted by a corresponding beam splitter in the first beam splitter group through the corresponding second reflective component.

9. The beam splitting and integration device according to claim 8, characterized in that, The beam splitting integration device further includes a second moving mechanism, which is capable of moving at least one second beam splitter and a second reflective component corresponding to the at least one second beam splitter together along the second direction.

10. The beam splitting and integration device according to any one of claims 1-9, characterized in that, The beam splitting integration device further includes a control mechanism. The at least one beam splitter includes two or more beam splitters. The control mechanism is capable of independently controlling the rotation angle of the first drive mechanism and the second drive mechanism of each of the two or more beam splitters.

11. A laser beam splitting device, characterized in that, The laser beam splitter includes: A laser is used to emit incident light. The beam splitting integration device according to any one of claims 1-10 is used to divide the incident light into at least two polarized beams; Multiple motion platforms, each used to place a workpiece to be processed, the workpiece being able to receive at least one channel of polarized light.

12. The laser beam splitter according to claim 11, characterized in that, The laser beam splitter also includes: A third reflecting component and a focusing component are provided for each of the motion platforms. The third reflecting component is used to propagate one of the at least two polarized light beams emitted by the beam splitting and integrating device toward the motion platform. The focusing component is used to converge the light reflected by the third reflecting component; and / or, A spatial modulation component is located between the laser and the beam splitting integration device. The spatial modulation component is used to spatially shape the incident light emitted by the laser and send the shaped incident light to the beam splitting integration device.

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