Multi-chambered disc piezoelectric pump

Abstract

The application discloses a multi-cavity disc type piezoelectric gas pump which is combined by a multi-cavity disc type piezoelectric gas pump assembly, wherein the assembly comprises a partition plate, an upper pump body, a piezoelectric vibrator, a lower pump body and a one-way valve sheet; the upper pump body is the same as or opposite to the lower pump body; the piezoelectric vibrator divides the upper and lower pump bodies into two cavities; each cavity is provided with an outlet vent and an inlet vent; the quadrant holes of the pump body are communicated through the vent flow channels; after assembly, the quadrant holes of the pump body form a gas inlet and outlet channel; the first and second vent flow channels are arranged at an angle of 90 degrees and are communicated with two adjacent quadrant holes respectively; during assembly, the angle of the upper and lower pump bodies is adjusted, the partition plate is used to open and close the gas channel formed by the quadrant holes of the pump body, and various multi-cavity disc type piezoelectric gas pumps in series connection, parallel connection or series-parallel connection are assembled; the gas outlet and the gas inlet can be converted with each other; the vent is provided with a skirt structure which can isolate and separate the high-pressure area and the low-pressure area, thereby improving the flow of the product.

Description

Technical Field

[0001] This invention belongs to the field of piezoelectric pump technology, specifically relating to a multi-chamber disc-type piezoelectric pump assembly utilizing the standing wave principle and various multi-chamber disc-type piezoelectric pumps assembled therefrom. Background Technology

[0002] Piezoelectric pumps operate by utilizing the piezoelectric effect unique to piezoelectric materials. When an alternating excitation is applied to the piezoelectric ceramic on the piezoelectric oscillator, the piezoelectric effect causes deformation inside the piezoelectric ceramic, which manifests as macroscopic vibration and forces a change in the volume of the pump chamber, thereby causing a change in the pressure inside the chamber and thus realizing the transfer of fluid.

[0003] Piezoelectric pumps have advantages such as small size, low noise, light weight, and long service life. Furthermore, piezoelectric pump technology has gradually matured and is penetrating various fields. However, piezoelectric pumps still have many problems to date:

[0004] Currently, it is difficult for pneumatic pumps to simultaneously output large flow rates and high pressures of fluid.

[0005] Currently, there is a lack of multi-stage assembly processes for pneumatic electric pumps. Pneumatic electric pumps with multiple inlets and outlets have complex structures, and the manufacturing and assembly processes are cumbersome, resulting in high production costs and difficulty in further reducing scrap rates, leading to resource waste.

[0006] Currently, the internal cavity design of pneumatic pumps is not conducive to gas movement. Summary of the Invention

[0007] The purpose of this invention is to solve the above-mentioned problems and to provide a multi-chamber disc-type pneumatic pump assembly, which is a multi-chamber disc-type pneumatic pump with multiple chambers connected in series, in parallel, or in a series-parallel combination after being laminated and packaged.

[0008] A multi-chamber disc-type piezoelectric pump assembly, comprising: a partition, an upper pump body 8, a piezoelectric vibrator 7, a lower pump body 9, and a one-way valve plate;

[0009] The partition includes a single-hole partition with a through hole at one quadrant point, and a double-hole partition with through holes at two quadrant points.

[0010] The upper pump body 8 is provided with an upper pump body chamber 809, an upper pump body second vent 810, an upper pump body first vent 812, two adjacent quadrant holes (upper pump body first quadrant hole 801, upper pump body second quadrant hole 802, upper pump body third quadrant hole 803, upper pump body fourth quadrant hole 804), an upper pump body first vent flow channel 805, and an upper pump body second vent flow channel 806;

[0011] The quadrant hole is a through hole located at the quadrant points around the upper pump body 8, penetrating the upper pump body 8;

[0012] The first vent channel 805 of the upper pump body and the second vent channel 806 of the upper pump body are at 90° to each other and are respectively connected to two adjacent quadrant holes;

[0013] The structure of the gas passage of the lower pump body 9 is the same as or symmetrical to that of the upper pump body 8, and they are installed on the upper and lower sides of the piezoelectric vibrator 7 respectively.

[0014] After assembly, the quadrant holes corresponding to the positions of each component are connected, forming a gas passage.

[0015] Quadrant holes are provided at each of the four quadrant points of the upper pump body 8 and the lower pump body 9.

[0016] The partition also includes a three-hole partition 4 with through holes at three quadrant points.

[0017] The second vent 810 of the upper pump body is located in the center of the upper pump body; inside the upper pump body chamber 809, the upper pump body skirt 811 is provided around the second vent 810 of the upper pump body.

[0018] It also includes a bottom diagonal guide plate 5 and a bottom edge guide plate 6; the guide plates are used to guide the gas from the quadrant orifice to the exhaust orifice;

[0019] The first vent of the upper pump body and the second vent of the lower pump body serve as air outlets, and the functions of the first vent and the second vent of the pump body can be interchanged.

[0020] Both the first and second vent valve plates are designed as arrayed staggered holes; both the first and second vent valve plates contain four components; the overall thickness of the two valve plates after assembly should be within the range of 0.25mm - 0.4mm.

[0021] The bottom surface of the pump body chamber is either arc-shaped or flat.

[0022] The piezoelectric vibrator (7) includes: a metal matching layer, a flexible substrate, and piezoelectric ceramic.

[0023] This invention provides a multi-chamber disc-type piezoelectric pump, which is composed of a multi-chamber disc-type piezoelectric pump assembly. The assembly includes: a partition plate, an upper pump body 8, a piezoelectric vibrator 7, a lower pump body 9, and a one-way valve. The upper pump body 8 and the lower pump body 9 are identical or symmetrical. The piezoelectric vibrator 7 divides the upper and lower pump bodies into two chambers. Each chamber has an outlet and an inlet at its bottom, connected to the quadrant holes of the pump body via the outlet channels. After assembly, the quadrant holes forming the gas inlet and outlet channels are arranged at 90° and communicate with adjacent quadrant holes. During assembly, by adjusting the angle of the upper and lower pump bodies, the gas channels formed by the quadrant holes of the pump body are opened and closed using the quadrant holes of the partition plate, allowing for the arbitrary assembly of various multi-chamber disc-type piezoelectric pumps in series, parallel, or a combination of series and parallel configurations. The outlet and inlet can be interchanged. A vent is located in the center of the pump body. The vent has a skirt structure, which can isolate and separate the high-pressure area and the low-pressure area, thereby improving the flow rate of the product.

[0024] By adopting the above technical solution, the present invention has the following beneficial effects:

[0025] 1. The piezoelectric micropump has an air outlet and an air inlet on both the upper and lower pump bodies, which can make full use of the deformation of the piezoelectric vibrator to achieve a larger flow rate and pressure.

[0026] 2. The overall design features fewer parts, less thickness, and simpler assembly. Each part is manufactured separately, making it easy to process and shape. During assembly, a bonding and encapsulation method can be used, which facilitates process control. Simultaneously, it reduces the number of steps in mass production, contributing to the miniaturization and thinning of piezoelectric micropumps.

[0027] 3. During the deformation of the piezoelectric vibrator, the chamber of the piezoelectric pump can simultaneously complete air discharge and suction. The skirt structure at the center of the pump body can isolate and separate the high-pressure zone and the low-pressure zone, thereby improving the product flow rate.

[0028] 4. Pneumatic pumps have various stacking and assembly methods, which can simultaneously meet large output flow and output pressure requirements. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of a parallel structure of a single pump body according to the present invention;

[0030] Figure 2 This is a schematic diagram of the single-hole partition of the present invention;

[0031] Figure 3 This is a schematic diagram of the double-hole edge partition of the present invention;

[0032] Figure 4 This is a schematic diagram of the double-hole diagonal partition of the present invention;

[0033] Figure 5 This is a schematic diagram of the three-hole partition of the present invention;

[0034] Figure 6 This is a top view of the bottom diagonal guide plate of the present invention;

[0035] Figure 7 This is a projected view of the bottom diagonal guide plate of the present invention;

[0036] Figure 8 This is a top view of the bottom edge guide plate of the present invention;

[0037] Figure 9 This is a projection view of the bottom edge guide plate of the present invention;

[0038] Figure 10 This is an exploded view of the piezoelectric vibrator of the present invention;

[0039] Figure 11 This is a schematic diagram of the upper pump body of the present invention;

[0040] Figure 12 This is a schematic diagram of the pump body of the present invention;

[0041] Figure 13 This is an exploded view of the second vent valve plate of the present invention;

[0042] Figure 14 This is an exploded view of the first vent valve plate of the present invention;

[0043] Figure 15 This is a schematic diagram of the pressure distribution inside the cavity when the piezoelectric vibrator of the present invention is in motion;

[0044] Figure 16 This is a schematic diagram of the arc-shaped bottom surface and flat bottom surface of the upper pump body and lower pump body of the present invention;

[0045] Figure 17 This is a schematic diagram of a single pump body connected in series according to the present invention;

[0046] Figure 18 This is a schematic diagram of two pump bodies assembled in parallel according to the present invention;

[0047] Figure 19 This is a schematic diagram of two pump bodies assembled in parallel according to the present invention connected in series;

[0048] Figure 20 This is a schematic diagram of two pump bodies assembled in series connected in parallel according to the present invention;

[0049] Figure 21 This is a schematic diagram of two pump bodies assembled in series according to the present invention;

[0050] Figure 22 This is a schematic diagram of the first type of four-pump assembly according to the present invention;

[0051] Figure 23This is a schematic diagram of the second type of four-pump assembly according to the present invention;

[0052] The above image is labeled as follows:

[0053] 1. Single-hole partition;

[0054] 2. Double-hole edge partition;

[0055] 3. Double-hole diagonal partition;

[0056] 4. Three-hole partition;

[0057] 5. Bottom diagonal air deflectors;

[0058] 6. Bottom edge deflector;

[0059] 7. Piezoelectric vibrator;

[0060] 8. Upper pump body;

[0061] 9. Lower pump body;

[0062] 10. First vent valve plate;

[0063] 11. Second vent valve plate;

[0064] 101. Single-hole partition, first quadrant hole;

[0065] 201. First quadrant hole of double-hole edge partition; 202. Second quadrant hole of double-hole edge partition;

[0066] 301. Double-hole diagonal partition first quadrant hole; 302. Double-hole diagonal partition second quadrant hole;

[0067] 401. Hole in the first quadrant of the three-hole partition; 402. Hole in the second quadrant of the three-hole partition;

[0068] 403. Three-hole partition, third quadrant hole;

[0069] 501. Bottom diagonal guide vane, first quadrant hole;

[0070] 502. Bottom diagonal guide vane, third quadrant hole;

[0071] 503. Bottom diagonal air intake vents;

[0072] 601. Bottom edge guide plate, first quadrant hole;

[0073] 602. Bottom edge guide plate, second quadrant hole

[0074] 603. Bottom edge guide plate exhaust hole;

[0075] 701, piezoelectric ceramics; 702, flexible substrates;

[0076] 703, Metal Matching Layer;

[0077] 801. First quadrant hole of upper pump body; 802. Second quadrant hole of upper pump body;

[0078] 803. Third quadrant hole of upper pump body; 804. Fourth quadrant hole of upper pump body;

[0079] 805. First vent channel of the upper pump body; 806. Second vent channel of the upper pump body;

[0080] 807. Upper pump body lead wire groove; 808. Upper pump body annular recess;

[0081] 809. Upper pump body chamber; 810. Second vent port of the upper pump body;

[0082] 811. Upper pump body skirt; 812. Upper pump body first vent.

[0083] 901. Lower pump body first quadrant hole; 902. Lower pump body second quadrant hole;

[0084] 903. Lower pump body third quadrant hole; 904. Lower pump body fourth quadrant hole;

[0085] 905. First vent channel of the lower pump body; 906. Second vent channel of the lower pump body;

[0086] 907. Lower pump body chamber; 908. Annular protrusion of the lower pump body;

[0087] 909. Lower pump body skirt; 910. Second vent of the lower pump body;

[0088] 911. First vent in the lower pump body;

[0089] 1001, First vent valve assembly one; 1002, First vent valve assembly two; 1003, First vent valve assembly three; 1004, First vent valve assembly four; 1101, Second vent valve assembly one; 1102, Second vent valve assembly two; 1103, Second vent valve assembly three; 1104, Second vent valve assembly four. Detailed Implementation

[0090] Example 1: Multi-chamber disc-type pneumatic-electric pump assembly

[0091] Please see Figure 1-14 1. A multi-chamber disc-type piezoelectric pump assembly, characterized in that: a partition plate, an upper pump body 8, a piezoelectric vibrator 7, a lower pump body 9, a first vent valve plate 10, a second vent valve plate 11, a bottom diagonal guide plate 5, and a bottom edge guide plate 6.

[0092] The partition includes a single-hole partition 1 with a through hole at one quadrant point, and a double-hole adjacent partition 2 and a double-hole diagonal partition 3 with quadrant holes at two quadrant points.

[0093] The upper pump body 8 is provided with an upper pump body chamber 809, an upper pump body second vent 810, an upper pump body first vent 812, an upper pump body first quadrant hole 801, an upper pump body second quadrant hole 802, an upper pump body third quadrant hole 803, an upper pump body fourth quadrant hole 804, an upper pump body first vent flow channel 805, and an upper pump body second vent flow channel 806;

[0094] The upper pump body chamber 809 is a circular stepped recess; the upper pump body annular recess 808

[0095] The quadrant hole is a through hole located at the quadrant points around the upper pump body 8, penetrating the upper pump body 8;

[0096] The first vent channel 805 of the upper pump body and the second vent channel 806 of the upper pump body are at 90° to each other and are respectively connected to two adjacent quadrant holes;

[0097] There is a lead wire groove 807 on the outside of the upper pump body, through which the piezoelectric vibrator lead wire passes.

[0098] The second vent 810 of the upper pump body is located in the center of the upper pump body. Inside the upper pump body chamber 809, the upper pump body skirt 811 is provided around the second vent 810 of the upper pump body to separate the low-pressure area and the high-pressure area, so that the piezoelectric vibrator can vibrate freely and maintain the normal working state of simultaneous air intake and exhaust.

[0099] The lower pump body 9 is provided with a first quadrant hole 901 and a second quadrant hole 902.

[0100] Lower pump body third quadrant hole 903, lower pump body fourth quadrant hole 904, lower pump body first vent flow channel 905, lower pump body second vent flow channel 906, lower pump body chamber 907, lower pump body annular protrusion 908, lower pump body skirt 909, lower pump body second vent 910, lower pump body first vent 911;

[0101] The annular protrusion 908 of the lower pump body engages with the annular concave part 808 of the upper pump body to support and fix the piezoelectric vibrator 7; the other structures of the lower pump body 9 are the same as those of the upper pump body 8.

[0102] The first vent valve plate 11 consists of four parts: a first vent valve plate assembly 1101, a first vent valve plate assembly 2 1102, a first vent valve plate assembly 3 1103, and a first vent valve plate assembly 4 1104, each with a semi-circular hole. The misalignment of these holes enables the first vent valve plate to function as a one-way valve. The misalignment of the holes in the first vent valve plate assemblies 1101 and 1102, and the hole in the first vent valve plate assembly 4 1104, along with the isolation cavity formed by the first vent valve plate assembly 3 1103, enables the first vent valve 11 to perform a one-way stop function.

[0103] The second vent valve plate 10 is composed of a second vent valve plate assembly 1001, a second vent valve plate assembly 1002, and a second vent valve plate assembly 1004. By utilizing the misalignment of the circular holes, the second vent valve plate can realize the one-way valve function.

[0104] The piezoelectric vibrator is composed of a piezoelectric ceramic 701, a flexible substrate 702 and a metal matching layer 703. The flexible substrate 702 has a circular protrusion of metal matching layer 703 in the middle of one side, and the piezoelectric ceramic 701 is bonded to the disk in the middle of the other side of the substrate.

[0105] Example 2: Dual-chamber parallel assembly of a single pump body

[0106] The following describes several stacked assembly forms of pneumatic pumps.

[0107] Reference Figure 1 , 11 12, the single pump body is assembled in parallel with two chambers. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are aligned with the second quadrant hole 802 and the first quadrant hole 801 of the upper pump body 8, respectively. The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body are aligned with the third quadrant hole 903 and the second quadrant hole 902 of the lower pump body 9, respectively. The fourth quadrant hole 904 and the first quadrant hole 901 of the lower pump body 9 correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2), respectively. The output flow rate of the single piezoelectric pump assembled in parallel is significantly increased.

[0108] Based on the above structure, the working process of the single pump body parallel structure of the disc-type multi-chamber disc-type pneumatic pump in this embodiment is as follows:

[0109] Connect the piezoelectric vibrator's wires to the positive and negative terminals of the power supply through the upper pump body lead groove 807, and the piezoelectric vibrator 7 will start vibrating and operate normally. Gas enters from the second quadrant hole 202 of the double-hole edge cover plate 2 (1), passes through the fourth quadrant hole 804 of the upper pump body 8, and enters the second vent hole 812 through the second vent valve plate 10 (1). Part of the gas in the gas chamber of the upper pump body 8 is subjected to the elastic deformation of the piezoelectric vibrator 7 and is discharged from the first vent hole through the first vent valve plate 11 (1). Gas enters the first quadrant hole 801 of the upper pump body through the upper pump body outlet channel 806. The first vent hole 801 of the upper pump body is aligned with the third quadrant hole 903 of the lower pump body.

[0110] Gas enters the lower pump body through the first quadrant hole 901, passes through the second vent valve 10 (2) and enters the second vent hole 911. A portion of the gas in the lower pump body 9's gas chamber is elastically deformed by the piezoelectric vibrator 7 and exits through the first vent valve 11 (2) and the first vent hole. Gas enters the lower pump body's third quadrant hole 903 through the lower pump body's outlet channel 906. The gases discharged from the upper and lower pump bodies merge and exit together through the second quadrant hole 202 of the double-hole edge cover 2 (2). (In subsequent assembly schemes, the vibrator and valve installation methods are the same as...) Figure 1 (No difference, for the sake of showing the overall assembly structure, therefore not shown).

[0111] Example 3: Dual-chamber series assembly of a single pump body

[0112] Reference Figure 17 , 11 12. The single pump body is assembled in series with two chambers. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8, respectively. The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body (2) are aligned with the first quadrant hole 901 and the fourth quadrant hole 904 of the lower pump body 9, respectively. The second quadrant hole 902 and the third quadrant hole 903 of the lower pump body 9 correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2), respectively. The output pressure of the single piezoelectric pump assembled in series is significantly increased.

[0113] Example 4: A piezoelectric pump consisting of two pump bodies assembled in parallel.

[0114] Reference Figure 18The piezoelectric pump is composed of two pump bodies assembled in parallel. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are respectively aligned with the first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (1). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (1) are respectively aligned with the third quadrant hole 903 and the fourth quadrant hole 904 of the lower pump body 9 (1). The fourth quadrant hole 904 and the first quadrant hole 901 of the lower pump body 9 (1) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the partition 1 (2).

[0115] The piezoelectric pump is configured with two pump bodies stacked together, each pump body having two piezoelectric chambers. Through this structure, the piezoelectric pump has four piezoelectric chambers, which greatly improves the flow rate and output pressure of the output fluid and makes the piezoelectric pump more widely applicable.

[0116] Example 5: A piezoelectric pump consisting of two pump bodies assembled in parallel and connected in series.

[0117] Reference Figure 19 The piezoelectric pump is composed of two pump bodies assembled in parallel and connected in series. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are respectively aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (1). The fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (1) are respectively aligned with the fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9 (1). The second quadrant hole 902 and the third quadrant hole 903 of the lower pump body 9 (1) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the partition 1 (2). The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2) are respectively aligned with the first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (2). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8(2) are respectively aligned with the third quadrant hole 903 and the fourth quadrant hole 904 of the lower pump body 9(2). The second quadrant hole 902 and the third quadrant hole 903 of the lower pump body 9(2) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2(3). The piezoelectric pump is provided with two pump bodies in a stacked form, each pump body having two piezoelectric chambers. Through the above structure, this piezoelectric pump has four piezoelectric chambers, which greatly improves the flow rate and output pressure of the output fluid and makes the piezoelectric pump more widely applicable.

[0118] Example 6: A piezoelectric pump consisting of two pump bodies assembled in parallel.

[0119] Reference Figure 20The piezoelectric pump is composed of two pump bodies assembled in parallel. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are respectively aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (1). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (1) are respectively aligned with the fourth quadrant hole 904 and the first quadrant hole 901 of the lower pump body 9 (1). The first quadrant hole 901 and the second quadrant hole 902 of the lower pump body 9 (1) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the partition 1 (2). The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2) are respectively aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (2). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (2) are respectively aligned with the fourth quadrant hole 904 and the first quadrant hole 901 of the lower pump body 9 (2). The second quadrant hole 902 and the third quadrant hole 903 of the lower pump body 9 (2) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (3). The piezoelectric pump is provided with two pump bodies in a stacked form, each pump body having two piezoelectric chambers. Through the above structure, this piezoelectric pump has four piezoelectric chambers, which greatly improves the flow rate and output pressure of the output fluid and makes the piezoelectric pump more widely applicable.

[0120] Example 7: A piezoelectric pump consisting of two pump bodies assembled in parallel and connected in series.

[0121] Reference Figure 21 The piezoelectric pump is composed of two pump bodies assembled in parallel and connected in series. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are respectively aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (1). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (1) are respectively aligned with the fourth quadrant hole 904 and the first quadrant hole 901 of the lower pump body 9 (1). The first quadrant hole 901 and the second quadrant hole 902 of the lower pump body 9 (1) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the partition 1 (2). The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2) are respectively aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (2). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (2) are respectively aligned with the fourth quadrant hole 904 and the first quadrant hole 901 of the lower pump body 9 (2). The second quadrant hole 902 and the third quadrant hole 903 of the lower pump body 9 (2) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (3). The piezoelectric pump is provided with two pump bodies in a stacked form, each pump body having two piezoelectric chambers. Through the above structure, this piezoelectric pump has four piezoelectric chambers, which greatly improves the flow rate and output pressure of the output fluid and makes the piezoelectric pump more widely applicable.

[0122] Example 8: A piezoelectric pump consisting of four separate pump bodies

[0123] Reference Figure 22 The pneumatic pump consists of four separate pump bodies. The overall structure comprises two sets. Figure 10 The pump bodies are connected in parallel. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (1) are respectively aligned with the fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (1). The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body 8 (1) are respectively aligned with the fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9 (1). The third quadrant hole 903 and the first quadrant hole 901 of the lower pump body 9 (1) are respectively aligned with the first quadrant hole 301 and the third quadrant hole 302 of the diagonal partition 3 (1). The first quadrant hole 301 and the third quadrant hole 302 of the double-hole diagonal partition 1 (1) are respectively aligned with the fourth quadrant hole 804 and the second quadrant hole 802 of the upper pump body 8 (2). The first quadrant hole 801 and the fourth quadrant hole 804 of the upper pump body 8 (2) are respectively aligned with the third quadrant hole 903 and the fourth quadrant hole 904 of the lower pump body 9 (2). The third quadrant hole 903 and the second quadrant hole 902 of the lower pump body 9 (2) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2). The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2 (2) are respectively aligned with the third quadrant hole 803 and the fourth quadrant hole 804 of the upper pump body 8 (3). The fourth quadrant hole 804 and the third quadrant hole 803 of the upper pump body 8 (3) are respectively aligned with the fourth quadrant hole 904 and the fourth quadrant hole 903 of the lower pump body 9 (3). The fourth quadrant hole 904 and the second quadrant hole 902 of the lower pump body 9 (3) correspond to the first quadrant hole 301 and the third quadrant hole 302 of the diagonal baffle 1 (2). The first quadrant hole 301 and the third quadrant hole 302 of the double-hole diagonal baffle 3 (2) are aligned with the first quadrant hole 801 and the third quadrant hole 803 of the upper pump body 8 (4). The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body 8 (4) are aligned with the fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9 (4). The third quadrant hole 903 and the second quadrant hole 902 of the lower pump body 9 (4) correspond to the first quadrant hole 501 and the second quadrant hole 502 of the double-hole edge guide plate 5 (1).

[0124] Example 9: A piezoelectric pump consisting of four separate pump bodies

[0125] Reference Figure 23 The pneumatic pump consists of four separate pump bodies, and the overall structure comprises two sets. Figure 10The pump bodies are connected in series. The double-hole diagonal partition 3 (1) is aligned with the first quadrant hole 301 and the third quadrant hole 302 of the upper pump body 8 (1) with the fourth quadrant hole 804 and the second quadrant hole 802 respectively. The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body 8 (1) are aligned with the fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9 (1). The fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9 (1) are aligned with the double-hole edge partition 2 (1) with the first quadrant hole 201 and the second quadrant hole 202 respectively. The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition (1) are aligned with the fourth quadrant hole 804 and the first quadrant hole 802 of the upper pump body 8 (2) respectively. The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body 8(2) are respectively aligned with the fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9(2). The third quadrant hole 903 and the second quadrant hole 902 of the lower pump body 9(2) correspond to the first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2(2). The first quadrant hole 201 and the second quadrant hole 202 of the double-hole edge partition 2(2) are respectively aligned with the third quadrant hole 803 and the fourth quadrant hole 804 of the upper pump body 8(3). The fourth quadrant hole 804 and the first quadrant hole 801 of the upper pump body 8(3) are respectively aligned with the first quadrant hole 901 and the fourth quadrant hole 904 of the lower pump body 9(3). The third quadrant hole 903 and the first quadrant hole 901 of the lower pump body 9 (3) correspond to the first quadrant hole 301 and the third quadrant hole 303 of the diagonal baffle 3 (2). The first quadrant hole 301 and the third quadrant hole 303 of the double-hole diagonal baffle 3 (2) are aligned with the first quadrant hole 801 and the third quadrant hole 803 of the upper pump body 8 (4). The fourth quadrant hole 804 of the upper pump body 8 (4) and the first quadrant hole 801 are aligned with the fourth quadrant hole 904 and the third quadrant hole 903 of the lower pump body 9 (4). The fourth quadrant hole 904 and the second quadrant hole 902 of the lower pump body 9 (4) correspond to the first quadrant hole 501 and the third quadrant hole 502 of the double-hole diagonal guide plate 5 (1).

[0126] The single pump body of this invention utilizes high-frequency acoustic standing wave and valve plate rectification technology, with a chamber formed between the upper and lower pump bodies. The upper pump body has a cable tray at its top, and both the upper and lower pump bodies have gas flow channels at their bottoms. The cross-sectional areas of the outlet and inlet flow channels of the upper and lower pump bodies of the piezoelectric pump are equal to the gas inlet and outlet areas, structurally ensuring smooth gas movement.

[0127] The outlet and inlet of the piezoelectric pump are designed based on the standing wave principle. During operation, the pump generates two waves with the same frequency but opposite transmission directions. Both the outlet and inlet are nodal-type. The outlet and inlet flow channels are at 90°, ensuring that each pump body occupies only two quadrants, facilitating the construction of series and parallel pump structures. Straight channels are provided on both the outlet and inlet sides of the upper and lower pump bodies, and valves are installed in both sections, allowing for interchangeable outlet and inlet ports. Two different types of one-way valves can be selected depending on the specific requirements.

[0128] The upper pump body has one circular through-hole, two DC-DC channels, and four circular holes on one side. The circular through-hole serves as the piezoelectric pump's vent, forming an air intake channel when combined with one DC-DC channel. One end of the other DC-DC channel has a circular through-hole, forming another air intake channel. The four circular holes are distributed diagonally along the upper pump body, with two of them serving as either air inlets or outlets. On the other side of the pump body, there is a circular stepped groove for fixing the piezoelectric vibrator. The groove has annular stepped protrusions inside, used to mount and support the piezoelectric vibrator, ensuring a pump air chamber is formed between the center of the groove and the vibrator, thus maintaining the vibrator's normal operating condition. A rectangular slot for laying metal wires is connected to one side of the circular groove. A skirt is installed at the outlet of the upper pump body. When the vibrator vibrates, it generates high-pressure and low-pressure zones. The skirt structure effectively separates these zones, increasing energy utilization efficiency and improving pump efficiency. The lower pump body has the same structure as the upper pump body.

[0129] The bottom surface of the pneumatic pump can be made into an arc surface to facilitate gas flow, and the bottom surface of the pump body can be made into a flat surface according to actual requirements.

[0130] The piezoelectric vibrator consists of a piezoelectric ceramic, a flexible substrate, and a metal matching layer, all bonded together with anaerobic adhesive. The flexible substrate has a wheel-spoke-shaped polyimide film around its perimeter, a metal matching layer in the center of one side of the substrate, and the piezoelectric ceramic bonded to the center of the other side. The piezoelectric vibrator has a simple structure and is thin, making it suitable for constructing miniature piezoelectric pumps. The flexible substrate serves two main purposes: first, it acts as the substrate, the main body of the piezoelectric vibrator, connecting the piezoelectric ceramic and the metal matching layer; second, it serves as an electrode, generating a piezoelectric effect together with the piezoelectric ceramic when connected to an AC circuit.

[0131] The upper pump body has an annular groove at its top, and the lower pump body has an annular protrusion at its top. A piezoelectric vibrator is positioned at the annular meshing point of the upper and lower pump bodies. The entire pump body utilizes high-frequency acoustic standing wave and valve plate rectification technology, and a chamber is formed between the upper and lower pump bodies. This invention's piezoelectric pump features two or more pump bodies arranged in a stacked configuration, each pump body having two piezoelectric chambers, simultaneously increasing both the output flow rate and output pressure, thus enabling a wider range of applications for the piezoelectric pump.

[0132] The pump body has a gas inlet channel and a gas outlet channel at its bottom, which are connected by a connecting hole in a partition plate. A bottom guide groove is located on the outer side of the pump body at the end. One-way valves are respectively installed at the fluid inlet and fluid outlet.

[0133] The piezoelectric pump body is installed as a single pump body in series and parallel. There are multiple assembly methods for two pump bodies. Based on the assembly of individual pump bodies in series or parallel, two pump bodies can be assembled in series or parallel. A spacer plate is provided between the pump bodies, and a sealing and diversion plate is provided on the outer side of the pump body at the end.

[0134] Single, two, or more pump bodies are uniformly installed in a stacked configuration. Each pump body has two piezoelectric chambers. Through this structure, a multi-pump electro-piezoelectric pump has at least four piezoelectric chambers, significantly improving both the output flow rate and output pressure, thus broadening the application range of the piezoelectric pump.

Claims

1. A multi-chamber disc-type pneumatic pump assembly, characterized in that: Partition plate, upper pump body (8), piezoelectric vibrator (7), lower pump body (9), valve plate; The partition includes a single-hole partition with a through hole at one quadrant point, and a double-hole partition with through holes at two quadrant points. The upper pump body (8) is provided with an upper pump body chamber (809), an upper pump body second vent (810), an upper pump body first vent (812), two quadrant holes, an upper pump body first vent flow channel (805), and an upper pump body second vent flow channel (806); The quadrant hole is a through hole located at the quadrant points around the upper pump body (8), penetrating the upper pump body (8); The first vent channel (805) of the upper pump body and the second vent channel (806) of the upper pump body are at 90° and are respectively connected to two adjacent quadrant holes; The gas passage of the lower pump body (9) is the same as or symmetrical to that of the upper pump body (8), and is installed on the upper and lower sides of the piezoelectric vibrator (7); After assembly, the quadrant holes corresponding to the positions of each component are connected, forming a gas passage; The second vent of the upper and lower pump bodies is located in the center of the upper and lower pump bodies. In the upper and lower pump body chambers, the upper and lower pump body skirts are provided around the second vent of the upper and lower pump bodies. Both the first vent valve plate and the second vent valve plate are designed as an array of staggered holes. The bottom surface of the pump body chamber is an arc-shaped bottom surface.

2. The multi-chamber disc-type pneumatic pump assembly according to claim 1, characterized in that: Quadrant holes are provided on the four quadrant points of the upper pump body (8) and the lower pump body (9).

3. The multi-chamber disc-type pneumatic pump assembly according to claim 2, characterized in that: The partition also includes a three-hole partition (4) with through holes at three quadrant points.

4. The multi-chamber disc-type pneumatic pump assembly according to claim 3, characterized in that: It also includes a bottom diagonal guide plate (5) and a bottom edge guide plate (6).

5. The multi-chamber disc-type pneumatic pump assembly according to claim 4, characterized in that: The first vent of the upper pump body and the second vent of the lower pump body serve as air outlets, and the functions of the first vent and the second vent of the pump body can be interchanged.

6. The multi-chamber disc-type pneumatic pump assembly according to claim 5, characterized in that: Both the first vent valve and the second vent valve consist of four components; the overall thickness of the two valves after assembly should be within the range of 0.25mm - 0.4mm.

7. The multi-chamber disc-type pneumatic pump assembly according to claim 6, characterized in that: The piezoelectric vibrator (7) includes: a metal matching layer, a flexible substrate, and piezoelectric ceramic.

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