Angle adjustment assembly and coating device

By designing the angle adjustment component, the relative movement of the fixed part and the movable part is used to solve the problem of complex parallelism adjustment of the coating die head and the substrate platform, and efficient and convenient one-side high-precision parallelism adjustment is achieved, which improves the control accuracy of the coating thickness.

CN116637774BActive Publication Date: 2025-09-02JIANGSU HYDROGEN GUIDE INTELLIGENT EQUIP CO LTD +1
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Patent Information

Application Number
CN202310469849.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-04-27
Publication Date
2025-09-02
Estimated Expiration
2043-04-27

AI Technical Summary

Technical Problem

The parallelism adjustment between the existing coating die head and the substrate platform is complicated, and the locking screws need to be loosened on both sides of the equipment for micro-adjustment, resulting in inconvenient operation.

Method used

An angle adjustment component is designed, including a fixing part and a movable part. By moving the movable part relative to the fixing part, the high-precision parallelism adjustment of the coating module on the substrate platform is realized. The operator only needs to adjust it on one side of the equipment, and adjust the parallelism by means of assembly forms such as screws, worm gears, screw nuts, etc.

Benefits of technology

The adjustment process of the parallelism between the coating die head and the substrate platform is simplified, making the operation more convenient and efficient, achieving high-precision single-sided micro-adjustment, and improving the control accuracy of coating thickness.

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Abstract

The present application provides an angle adjustment component and a coating device. The angle adjustment component is used to adjust the installation parallelism of the coating module on the substrate platform. The coating device includes: a fixed part, fixed to the substrate platform, and the fixed part is arranged on either side of the coating module; a movable part, configured to be able to be movably assembled with the fixed part, and the movable part is connected to the coating module, and the movable part can drive the coating module to rotate relative to the substrate platform through the movement of the movable part relative to the fixed part. The angle adjustment component of the present application adjusts the installation parallelism of the coating module on the substrate platform through the fixed part and the movable part. The fixed part is arranged on either side of the coating module, and the overall structure is compact. During the parallelism adjustment process, the operator only needs to make adjustments on one side of the equipment, and only a single movable part needs to be adjusted during the adjustment process. The entire adjustment process is simple and convenient, which is convenient for the operator to perform parallelism adjustment work.
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Description

Technical Field

[0001] The present application relates to the technical field of tooling fixtures, and in particular to an angle adjustment component and a coating device. Background Art

[0002] Laboratory desktop coaters are used in fuel cell proton membrane catalyst or water electrolysis catalyst coating experiments. Their main function is to evenly coat the stirred and degassed slurry on the substrate film to ensure that the coating size (length, width, thickness) and weight are within the design specifications.

[0003] The parallelism between the coating die and the substrate platform has a direct impact on coating thickness deviation. First, the straightness and flatness accuracy of the coating die and substrate platform components must be ensured through machining. Second, the parallelism between the two must be adjusted on the equipment.

[0004] In the background technology section, the above information disclosed is only used to enhance the understanding of the background of the application and therefore it may contain information that does not constitute prior art information already known to a person of ordinary skill in the art. Summary of the Invention

[0005] At least one embodiment of the present application provides an angle adjustment component and a coating device.

[0006] In the first aspect, at least one embodiment of the present application provides an angle adjustment component for adjusting the installation parallelism of the coating module on the substrate platform, the angle adjustment component includes a fixed part and a movable part, the fixed part is fixed to the substrate platform, and the fixed part is arranged on either side of the coating module; the movable part is configured to be able to be movably assembled with the fixed part, and the movable part is connected to the coating module, and the coating module can be driven to rotate relative to the substrate platform through the movement of the movable part relative to the fixed part.

[0007] In a second aspect, at least one embodiment of the present application provides a coating device, which includes a substrate platform, a module shaft, a coating module, and an angle adjustment component of any embodiment of the first aspect of the present application.

[0008] Roll No.: 220835CI

[0009] The module shaft is arranged on the substrate platform; the coating module is mounted on the substrate platform via a mounting plate, the mounting plate having a shaft positioning hole, the module shaft is passed through the shaft positioning hole, and the mounting plate is relatively rotatable on the substrate platform via the module shaft;

[0010] For example, in some embodiments of the first aspect or the second aspect of the present application, the fixed part includes a threaded sleeve, and the movable part includes a screw; or the fixed part includes a worm gear, and the movable part includes a worm; or the fixed part includes a screw nut, and the movable part includes a screw.

[0011] For example, in some embodiments of the first aspect or the second aspect of the present application, the coating module is mounted on the substrate platform via a mounting plate, and the fixing portion is disposed on either side of the mounting plate.

[0012] For example, in some embodiments of the first aspect or the second aspect of the present application, the angle adjustment assembly further includes: a pressure plate; a pressure plate gasket, the pressure plate abuts against the mounting plate through the pressure plate gasket; a spring portion abuts between the fixed portion and the pressure plate; a buffer portion, the buffer portion is arranged at the connection between the spring portion and the fixed portion, and / or the buffer portion is arranged at the connection between the spring portion and the pressure plate.

[0013] For example, in some embodiments of the first aspect or the second aspect of the present application, the angle adjustment assembly further includes: a driving portion, the movable portion is connected to the driving portion, and the driving portion can drive the movable portion to move.

[0014] For example, in some embodiments of the first aspect or the second aspect of the present application, the angle adjustment assembly further includes: an adjustment portion, which is arranged on the movable portion, and the movable portion can be driven to move relative to the fixed portion by adjusting the adjustment portion.

[0015] For example, in some embodiments of the first aspect or the second aspect of the present application, the adjusting part includes a screw ball head and an adjusting knob, the movable part includes a screw, the screw is connected between the adjusting knob and the screw ball head, the screw ball head abuts against the mounting plate, and the movable part can be driven to move relative to the fixed part by rotating the adjusting knob.

[0016] For example, in some embodiments of the second aspect of the present application, the substrate platform includes a plurality of positioning pins, the mounting plate has a plurality of adjustment holes, and the plurality of positioning pins can fix the mounting plate on the substrate platform through the plurality of adjustment holes.

[0017] The plurality of adjustment holes include: a first adjustment hole located on one side of the module rotation axis; and a second adjustment hole, which is arranged symmetrically with the first adjustment hole relative to the module rotation axis.

[0018] Roll No.: 220835CI

[0019] The angle adjustment assembly of this application adjusts the parallelism of the coating module on the substrate platform through a fixed portion and a movable portion. The fixed portion is located on either side of the coating module, resulting in a compact overall structure. During parallelism adjustment, the operator only needs to make adjustments on one side of the device, and only needs to adjust a single movable portion during the adjustment process. The entire adjustment process is simple and convenient, making it easy for the operator to perform parallelism adjustments.

[0020] It should be understood that the foregoing general description and the following detailed description are merely illustrative and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0022] Figure 1 A schematic structural diagram of an angle adjustment assembly in the prior art is shown.

[0023] Figure 2 A schematic structural diagram of an angle adjustment assembly according to an exemplary embodiment of the present application is shown.

[0024] Figure 3 A schematic structural diagram of an angle adjustment assembly according to some embodiments of the present application is shown.

[0025] Figure 4 A cross-sectional view illustrating an angle adjustment assembly according to some embodiments of the present application.

[0026] Figure 5 A schematic structural diagram of an angle adjustment assembly according to another embodiment of the present application is shown.

[0027] Figure 6 Schematic diagram showing the structure of a coating device according to an exemplary embodiment of the present application.

[0028] Figure 7 A schematic structural diagram of the coating device according to an embodiment of the present application when adjusting parallelism counterclockwise is shown.

[0029] Figure 8 A schematic structural diagram of the coating device according to an embodiment of the present application when adjusting parallelism clockwise is shown. DETAILED DESCRIPTION

[0030] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concepts of the example embodiments to those skilled in the art. Like reference numerals in the drawings represent like or similar parts, and thus repetitive description thereof will be omitted.

[0031] Roll No.: 220835CI

[0032] Described feature, structure or characteristic can be combined in one or more embodiments in any suitable manner.In the following description, many specific details are provided so as to provide a full understanding of the embodiments of the present application. However, it will be appreciated by those skilled in the art that the technical scheme of the present application can be put into practice without one or more of these specific details, or other modes, components, materials, devices or the like can be adopted. In these cases, known structures, methods, devices, realizations, materials or operations will not be shown or described in detail.

[0033] The flowcharts shown in the accompanying drawings are for illustrative purposes only and do not necessarily include all contents and operations / steps, nor must they be executed in the order described. For example, some operations / steps may be decomposed, while others may be combined or partially combined. Therefore, the actual execution order may vary depending on the actual situation.

[0034] The terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish between different objects, not to describe a particular order. Furthermore, the terms "including," "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to the process, method, product, or apparatus.

[0035] Laboratory desktop coating machines are used in fuel cell proton membrane catalyst or water electrolysis catalyst coating experiments. Their primary purpose is to evenly apply a stirred and degassed slurry onto a thin substrate, ensuring that the coating dimensions (length, width, thickness) and weight are within design specifications. The parallelism between the coating die and the substrate platform directly affects coating thickness deviation. This requires machining to ensure the straightness and flatness accuracy of the coating die and substrate platform components, and then adjusting their parallelism on the equipment.

[0036] The existing coating die angle adjustment is achieved by using mechanisms at the left and right ends of the die mounting plate (such as Figure 1(as shown), it is very inconvenient for the operator to adjust, as they need to loosen the locking screws and make fine adjustments on both sides of the equipment. Therefore, a mechanism is needed that allows the operator to achieve high-precision fine adjustment of the angle between the coating die head and the substrate platform on one side of the equipment without loosening the locking screws.

[0037] The angle adjustment assembly according to the embodiment of the present application will be described in detail below with reference to the accompanying drawings.

[0038] Figure 2 A schematic structural diagram of an angle adjustment assembly according to an exemplary embodiment of the present application is shown.

[0039] See also Figure 2 , the angle adjustment assembly 100 of the exemplary embodiment is used to adjust the coating module 300. Volume No.: 220835CI

[0040] The installation parallelism and angle adjustment assembly 100 on the substrate platform 200 includes a fixed portion 110 and a movable portion 120 .

[0041] The fixed portion 110 is fixed to the substrate platform 200 and is disposed on either side of the coating module 300. The movable portion 120 is configured to be movable with the fixed portion 110 and connected to the coating module 300. The movable portion 120 can be moved relative to the fixed portion 110 to drive the coating module 300 to rotate relative to the substrate platform 200.

[0042] In the process of adjusting the installation parallelism of the coating module 300 on the substrate platform 200, the fixed part 110 always remains fixed on the substrate platform 200, and the movable part 120 is movably assembled with the fixed part 110. During the adjustment process, it is necessary to adjust the assembly state between the movable part 120 and the fixed part 110 to achieve the relative displacement between the movable part 120 and the fixed part 110. At this time, since the movable part 120 is connected to the coating module 300, the relative displacement between the coating module 300 and the fixed part 110 can be achieved under the drive of the movable part 120. The fixed part 110 is arranged on either side of the coating module 300, and the coating module 300 and the substrate platform 200 are also connected by a rotating shaft. By adjusting the unilateral displacement drive generated by the angle adjustment component 100, the coating module 300 can be rotated as a whole relative to the substrate platform 200, thereby achieving the adjustment of the installation parallelism of the coating module 300 on the substrate platform 200.

[0043] According to the assembly requirements, the setting form of the fixed part 110 and the movable part 120 can be flexibly adjusted. Optionally, the fixed part 110 includes a screw sleeve, and the corresponding movable part 120 includes a screw. During the adjustment process, the position state of the movable part 120 relative to the fixed part 110 is adjusted by rotating the screw. Optionally, in the specific selection process, the fixed part 110 and the movable part 120 can also be configured to include assembly forms such as worm gears, screw nuts and screws, and this application does not make specific restrictions here.

[0044] According to an embodiment of the present application, coating module 300 includes a mounting plate 310 and a slurry discharge assembly 320. Coating module 300 is mounted on substrate platform 200 via mounting plate 310, with fixing portions 110 positioned on either side of mounting plate 310. Slurry generated by coating module 300 flows from slurry discharge assembly 320 and is applied to the object to be coated.

[0045] Figure 3 A schematic structural diagram of an angle adjustment assembly according to some embodiments of the present application is shown. Figure 4 A cross-sectional view illustrating an angle adjustment assembly according to some embodiments of the present application.

[0046] See also Figure 3 and Figure 4 In some embodiments, the angle adjustment assembly 100 is used to adjust the installation parallelism of the coating module 300 on the substrate platform 200.

[0047] The angle adjustment assembly 100 includes a fixed portion 110, a movable portion 120, a pressure plate 130, and a spring portion.

[0048] 140 , a buffer portion 150 , a pressure plate gasket 160 and an adjustment portion 170 .

[0049] The fixed portion 110 is fixed to the substrate platform 200 and is disposed on either side of the coating module 300. The movable portion 120 is configured to be movable with the fixed portion 110 and connected to the coating module 300. The movable portion 120 can be moved relative to the fixed portion 110 to drive the coating module 300 to rotate relative to the substrate platform 200.

[0050] The fixing portion 110 includes a fixing seat 111 and a screw sleeve 112. The fixing seat 111 and the screw sleeve 112 are interference-fitted with each other, and the fixing seat 111 is fixed to the substrate platform 200. The corresponding movable portion 120 includes a screw.

[0051] The pressing plate 130 is in contact with the mounting plate 310 . The rod of the movable portion 120 is passed through the tapered cavity 131 in the pressing plate 130 and then in contact with the mounting plate 310 .

[0052] The spring portion 140 and the buffer portion 150 are sleeved on the rod portion of the movable portion 120. The spring portion 140 abuts between the fixed portion 110 and the pressure plate 130. The pre-tightening force provided by the spring portion 140 can prevent the thread of the movable portion 120 from loosening due to vibration of the equipment. The buffer portion 150 is provided at the connection between the spring portion 140 and the fixed portion 110, and / or the buffer portion 150 is provided at the connection between the spring portion 140 and the pressure plate 130. Optionally, the buffer portion 150 is provided in the form of a washer. The buffer portion 150 is used to prevent the spring portion 140 from directly contacting the fixed portion 110 or the pressure plate 130, thereby extending the service life of the angle adjustment assembly of the present application.

[0053] The pressure plate gasket 160 is disposed between the pressure plate 130 and the mounting plate 310. The pressure plate 130 is fixed and abutted against the mounting plate 310 by the pressure plate gasket 160. During the process of adjusting the parallelism of the coating module 300 on the substrate platform 200, the pressure plate gasket 160 can eliminate any gap that may form between the pressure plate 130 and the mounting plate 310, ensuring that the pressure plate 130 always closely abuts against the mounting plate 310 during the parallelism adjustment process.

[0054] The adjustment portion 170 is disposed on the movable portion 120. By adjusting the adjustment portion 170, the operator can move the movable portion 120 relative to the fixed portion 110. The type of adjustment portion 170 can be flexibly adjusted based on the type of movable portion 120. Optionally, when the movable portion 120 includes a screw 121, the adjustment portion 170 can be configured to include a screw ball head 171 and an adjustment knob 172.

[0055] The screw 121 is connected between the screw ball head 171 and the adjustment knob 172. The screw ball head 171 abuts against the mounting plate 310. By turning the adjustment knob 172, the screw ball head 171 and the screw 121 can be driven to rotate, thereby adjusting the position of the movable part 120 relative to the fixed part 110. The provision of the adjustment part 170 allows the operator to more conveniently adjust the coating module 300 on the substrate.

[0056] Installation parallelism on platform 200.

[0057] By adjusting the threaded connection between the movable portion 120 and the fixed portion 110, the ball head at the front of the screw presses against the die head mounting plate, enabling unidirectional rotation. The ball head fits seamlessly within the conical cavity secured to the mounting plate. Reverse rotation of the screw causes the mounting plate 310 to rotate in the opposite direction, enabling high-precision, bidirectional angular micro-adjustments on a single side of the device.

[0058] By measuring the distance from the ball fulcrum of the adjustment unit 170 to the center of the rotation axis (module axis 400) between the coating module 300 and the substrate platform 200, the rotation angle of the coating module 300 relative to the substrate platform 200 corresponding to the extended (retracted) length of the movable unit 120 (screw) can be calculated. The rotation angle of the coating module 300 corresponding to the screw's rotation angle can then be calculated based on the pitch of the movable unit 120 (screw). This setup allows the operator to adjust the parallelism of the coating module 300 on the substrate platform 200 by rotating the movable unit 120 (screw) forward and backward from one side of the device.

[0059] Figure 5 A schematic structural diagram of an angle adjustment assembly according to another embodiment of the present application is shown.

[0060] See also Figure 3-5 In another embodiment, the angle adjustment assembly 100 further includes a driving portion 180 , the movable portion 120 is connected to the driving portion 180 , and the driving portion 180 can drive the movable portion 120 to move.

[0061] In the actual configuration and selection process, the driving portion 180 and the adjusting portion 170 in the previous embodiment can be configured simultaneously. During the adjustment of the movable portion 120, the driving portion 180 can be connected to the adjusting portion 170 and drive the adjusting portion 170 for adjustment, and then the adjusting portion 170 drives the movable portion 120 to move relative to the fixed portion 110.

[0062] The driving part 180 can also be configured separately. During the adjustment of the movable part 120, the movable part 120 can be connected only through the driving part 180, and then driven by the driving part 180, so that the movable part 120 generates movement relative to the fixed part 110.

[0063] Optionally, the driving unit 180 can be configured as any device capable of providing a stable reciprocating driving force, such as a cylinder or a motor. Providing the driving unit 180 makes it easier for the operator to adjust the parallelism of the coating module 300 on the substrate platform 200 .

[0064] Figure 6 Schematic diagram showing the structure of a coating device according to an exemplary embodiment of the present application. Figure 7 A schematic structural diagram of the coating device according to an embodiment of the present application when adjusting parallelism counterclockwise is shown.

[0065] Figure 8 A schematic structural diagram of the coating device according to an embodiment of the present application when adjusting parallelism clockwise is shown.

[0066] See also Figure 2-8The coating device of the exemplary embodiment includes an angle adjustment component 100, a substrate flat roll number: 220835CI

[0067] The platform 200, the coating module 300 and the module shaft 400.

[0068] The substrate platform 200 includes multiple positioning pins 210. A module shaft 400 is mounted on the substrate platform 200. The coating module 300 includes a mounting plate 310 and a slurry discharge assembly 320. The mounting plate 310 has a shaft positioning hole 311 and multiple adjustment holes 312. The module shaft 400 extends through the shaft positioning hole 311, and the coating module 300 is rotatably mounted on the substrate platform 200 via the module shaft 400. The multiple positioning pins 210 are aligned with the multiple adjustment holes 312, and the multiple positioning pins 210 can secure the mounting plate 310 to the substrate platform 200 through the multiple adjustment holes 312.

[0069] Taking the angle adjustment assembly 100 as an example, when the angle adjustment assembly 100 is used to adjust the angle, when the pressure exerted by the rotating movable portion 120 on the mounting plate 310 is greater than the elastic force exerted by the preload of the spring portion 140, the movable portion 120 can move toward the mounting plate 310. In this process, the movable portion 120 can push the mounting plate 310 to rotate counterclockwise around the axis (e.g., Figure 6 After the thrust generated by the movable portion 120 on the mounting plate 310 is relaxed, the mounting plate 310 will rotate clockwise around the axis (as shown) under the action of the rebound force of the spring portion 140. Figure 7 By providing the angle adjustment component 100, the operator can easily adjust the installation parallelism of the coating module 300 on the substrate platform 200 by adjusting the angle adjustment component 100 on only one side of the coating device.

[0070] According to an embodiment of the present application, the plurality of adjustment holes 312 include a first adjustment hole 3121 and a second adjustment hole 3122. The first adjustment hole 3121 is located on one side of the module shaft 400, and the second adjustment hole 3122 is located on the other side of the module shaft 400 opposite the first adjustment hole 3121. The first adjustment hole 3121 and the second adjustment hole 3122 are arranged symmetrically with respect to the module shaft 400.

[0071] Optionally, the first adjustment hole 3121 and the second adjustment hole 3122 are both crescent-shaped, with the center of the crescent being the center of the module shaft 400 , and the first adjustment hole 3121 and the second adjustment hole 3122 are both adjustment hole arrays consisting of a plurality of adjustment holes.

[0072] Taking the angle adjustment assembly 100 as an example, when adjusting the parallelism of the coating module 300 on the substrate platform 200, the angle adjustment assembly 100 drives the entire mounting plate 310 of the coating module 300 to rotate. At this point, the position of the left-side positioning pin 210 in the first adjustment hole 3121 and the position of the right-side positioning pin 210 in the second adjustment hole 3122 are both changed.

[0073] During the counterclockwise rotation of the mounting plate 310 , the crescent top of the first adjustment hole 3121 gradually slides toward the left positioning pin 210 along the outer contour trajectory of the first adjustment hole 3121 .

[0074] Roll No.: 220835CI

[0075] At the same time, along the outer contour trajectory of the second adjustment hole 3122 , the crescent bottom of the second adjustment hole 3122 gradually slides toward the positioning pin 210 on the right side.

[0076] Similarly, as the mounting plate 310 rotates clockwise, the bottom of the crescent of the first adjustment hole 3121 gradually slides toward the left positioning pin 210 along the outer contour of the first adjustment hole 3121. Simultaneously, the top of the crescent of the second adjustment hole 3122 gradually slides toward the right positioning pin 210 along the outer contour of the second adjustment hole 3122.

[0077] By providing the first adjustment hole 3121 and the second adjustment hole 3122, the parallelism adjustment of the coating module 300 on the substrate platform 200 can be effectively limited, making the entire adjustment process more consistent and stable. In addition, the first adjustment hole 3121 and the second adjustment hole 3122 can also prevent equipment jitter that may be caused by excessive parallelism adjustment.

[0078] While the exemplary embodiments of the present application have been specifically illustrated and described above, it should be understood that the present application is not limited to the detailed structures, configurations, or implementations described herein; rather, the present application is intended to encompass various modifications and equivalent configurations within the spirit and scope of the appended claims.

Claims

1. An angle adjustment component for adjusting the parallelism of the coating module on the substrate platform, characterized in that: The coating module is mounted on the substrate platform via a mounting plate, and the angle adjustment assembly includes: A fixing portion, fixed to the substrate platform, and the fixing portion is arranged on either side of the coating module; The movable portion is configured to be movable and assembled with the fixed portion, and the movable portion is connected to the coating module. The movable portion can drive the coating module to rotate relative to the substrate platform by moving relative to the fixed portion. A pressing plate, wherein the rod portion of the movable portion passes through the tapered cavity in the pressing plate and is able to abut against the mounting plate; A pressure plate gasket is provided between the pressure plate and the mounting plate, and the pressure plate abuts against the mounting plate through the pressure plate gasket; a spring portion abutting between the fixing portion and the pressure plate; A buffer portion is provided at a connection between the spring portion and the fixing portion, and / or the buffer portion is provided at a connection between the spring portion and the pressing plate.

2. The angle adjustment assembly according to claim 1, characterized in that: The fixing portion is arranged on either side of the mounting plate.

3. The angle adjustment assembly according to claim 1, characterized in that: The fixed portion includes a threaded sleeve, and the movable portion includes a screw; or The fixed portion includes a worm gear, and the movable portion includes a worm; or The fixed portion includes a screw nut, and the movable portion includes a screw.

4. The angle adjustment assembly according to claim 1, characterized in that: Also includes: The movable part is connected to the driving part, and the driving part can drive the movable part to move.

5. The angle adjustment assembly according to claim 2, characterized in that: Also includes: The adjusting portion is provided on the movable portion, and the movable portion can be driven to move relative to the fixed portion by adjusting the adjusting portion.

6. The angle adjustment assembly according to claim 5, characterized in that: The adjusting part includes a screw ball head and an adjusting knob, and the movable part includes a screw, which is connected between the adjusting knob and the screw ball head. The screw ball head abuts against the mounting plate, and the movable part can be driven to move relative to the fixed part by rotating the adjusting knob.

7. A coating device, characterized in that: include: substrate platform; A module shaft is provided on the substrate platform; The coating module is mounted on the substrate platform via a mounting plate, wherein the mounting plate has a shaft positioning hole, the module shaft is passed through the shaft positioning hole, and the mounting plate is rotatably mounted on the substrate platform via the module shaft; The angle adjustment assembly according to any one of claims 1 to 6 can drive the coating module to rotate relative to the substrate platform through the movement of the movable part relative to the fixed part.

8. The coating device according to claim 7, characterized in that The substrate platform includes a plurality of positioning pins, and the mounting plate has a plurality of adjustment holes. The plurality of positioning pins can fix the mounting plate on the substrate platform through the plurality of adjustment holes.

9. The coating device according to claim 8, characterized in that The plurality of adjustment holes include: A first adjustment hole is located on one side of the module shaft; The second adjustment hole is arranged symmetrically with the first adjustment hole relative to the module rotation axis.

Citation Information

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