Micromechanical gyroscope and electronic product

Abstract

The application provides a micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises a first mass block, a plurality of second mass blocks, a plurality of driving members, a plurality of first flexible beams and a plurality of second flexible beams. The first mass block is provided with a mounting area. The plurality of second mass blocks are distributed along a first direction. The plurality of driving members are distributed along the first direction, and the plurality of second mass blocks are respectively provided with the driving members on opposite sides along the first direction. The plurality of driving members and the plurality of second mass blocks are located in the mounting area, and the first mass block is located outside the plurality of driving members and the plurality of second mass blocks. Each driving member is connected with the first mass block through a first flexible beam, and each second mass block and the driving member adjacent to the second mass block are connected through a second flexible beam. The micromechanical gyroscope and the electronic product can improve the Coriolis conversion rate of the first mass block, and thus can maximize the utilization of the chip area.

Description

[Technical Field]

[0001] This invention relates to the field of gyroscope technology, and more particularly to a micromechanical gyroscope and electronic product. [Background Technology]

[0002] A micromechanical gyroscope is a miniature angular velocity sensor fabricated using micromachining and microelectronics techniques. The driving mode of a micromechanical gyroscope oscillates around the axis of a vertical mass block. A micromechanical gyroscope includes X / Y and Z mass blocks. When an angular velocity is applied, due to the Coriolis effect, the gyroscope transfers energy to the detection mode, causing the X / Y mass block to oscillate out-of-plane under relative drive, or causing the Z mass block to move in-plane under relative drive. The magnitude of the angular velocity can be obtained by detecting the out-of-plane or in-plane displacement.

[0003] In existing micromechanical gyroscopes, the Z mass block and driving components are arranged outside the X / Y mass block, resulting in low Coriolis force conversion efficiency of the X / Y mass block and low chip area utilization.

[0004] Therefore, it is necessary to provide a new micromechanical gyroscope to solve the above problems. [Summary of the Invention]

[0005] The purpose of this invention is to provide a micromechanical gyroscope and electronic product that can improve the Coriolis conversion efficiency of the first mass block, thereby maximizing the utilization of the chip area.

[0006] The technical solution of the present invention is as follows:

[0007] The first aspect of the present invention provides a micromechanical gyroscope, comprising a first mass block, a plurality of second mass blocks, a plurality of driving members, a plurality of first flexible beams, and a plurality of second flexible beams. The first mass block is provided with an installation area; the plurality of second mass blocks are distributed along a first direction; the plurality of driving members are distributed along the first direction, and driving members are respectively provided on opposite sides of the plurality of second mass blocks along the first direction; the plurality of driving members and the plurality of second mass blocks are all located within the installation area, and the first mass block surrounds the outer side of the plurality of driving members and the plurality of second mass blocks; each driving member is connected to the first mass block through a first flexible beam, and each second mass block is connected to the driving member adjacent to it through a second flexible beam.

[0008] In one possible design, the projection of the first mass block is a centrally symmetrical figure along the direction perpendicular to the front of the first mass block; multiple driving components are symmetrical to each other along the first direction, and multiple second mass blocks are symmetrical to each other along the first direction.

[0009] In one possible design, the first mass block includes multiple first moving parts, which are evenly distributed on the outside of multiple driving members and multiple second mass blocks; the driving members include multiple driving parts, which are symmetrical to each other along a second direction perpendicular to the first direction; the second mass block includes multiple second moving parts, which are symmetrical to each other along the second direction; each first moving part and its adjacent second moving part are provided with a driving part, and the driving part is connected to the first moving part through a first flexible beam, and the driving part is connected to the second moving part through a second flexible beam.

[0010] In one possible design, the micromechanical gyroscope further includes a first anchor point, multiple second anchor points, multiple third anchor points, multiple third flexible beams, and multiple fourth flexible beams. The first anchor point, multiple second anchor points, and multiple third anchor points are all located within the mounting area. The first anchor point and multiple second anchor points are located between multiple second mass blocks and along a second direction perpendicular to the first direction. The multiple second anchor points are respectively located on opposite sides of the first anchor point. Each drive component has a third anchor point on the side away from the second mass block, and the multiple third anchor points are arranged opposite each other along the first direction. Each second mass block is connected to the first anchor point through a third flexible beam, and the first mass block and each second anchor point are respectively connected to each third anchor point through a fourth flexible beam.

[0011] In one possible design, the second mass block has a clearance space on the side facing the drive component, and the third anchor point is located in the clearance space.

[0012] In one possible design, the micromechanical gyroscope also includes multiple coupling components located between multiple second mass blocks. Along a second direction, the multiple coupling components are respectively disposed on opposite sides of the first anchor point. The second mass blocks are connected to one end of the coupling components via a third flexible beam, and the other end of the coupling components is connected to the first anchor point.

[0013] In one possible design, the coupling component includes a coupling block and a coupling beam, with a second mass block connected to one end of the coupling block via a third flexible beam, and the other end of the coupling block connected to a first anchor point via the coupling beam.

[0014] In one possible design, the micromechanical gyroscope also includes multiple fourth anchor points and multiple guide beams. The multiple fourth anchor points are all located in the mounting area and are distributed circumferentially along the mounting area. Each drive unit is provided with a fourth anchor point between itself and the first mass block, and the drive unit and the fourth anchor point are connected by the guide beams.

[0015] In one possible design, the micromechanical gyroscope also includes multiple in-plane driving transducers, multiple out-of-plane detection transducers, and multiple in-plane detection transducers. An in-plane driving transducer is disposed above each driving element, an in-plane detection transducer is disposed above each second mass block, and multiple out-of-plane detection transducers are disposed above the first mass block.

[0016] A second aspect of the present invention also provides an electronic product, the electronic product comprising:

[0017] ontology;

[0018] The micromechanical gyroscope described above is mounted on the main body.

[0019] The beneficial effects of this invention are as follows:

[0020] The micromechanical gyroscope and electronic product provided by this invention have multiple driving components and multiple second mass blocks located within the mounting area where the first mass block is set. The first mass block surrounds the outside of the multiple driving components and multiple second mass blocks. That is, the second mass blocks and driving components are arranged in the area where the Coriolis conversion efficiency of the first mass block is low, thereby improving the Coriolis conversion efficiency of the first mass block. This maximizes the utilization of chip area, reduces chip size and cost while maintaining the same performance. [Attached Image Description]

[0021] Figure 1 A front view of the micromechanical gyroscope provided by the present invention in a specific embodiment;

[0022] Figure 2 for Figure 1 Enlarged view of point I in the middle;

[0023] Figure 3 for Figure 1 Enlarged view at point II;

[0024] Figure 4 for Figure 1 Enlarged view of section III;

[0025] Figure 5 for Figure 1 A front view after adding an out-of-plane drive transducer, an out-of-plane detection transducer, and an in-plane detection transducer;

[0026] Figure 6 for Figure 5 Side view;

[0027] Figure 7 This is a schematic diagram of the micromechanical gyroscope provided by the present invention in the driving mode;

[0028] Figure 8This is a schematic diagram of the micromechanical gyroscope provided by the present invention in the first detection mode;

[0029] Figure 9 This is a schematic diagram of the micromechanical gyroscope provided by the present invention in the second detection mode;

[0030] Figure 10 This is a schematic diagram of the micromechanical gyroscope provided by the present invention in the third detection mode.

[0031] Figure label:

[0032] 1-First mass block; 11-First kinematic part;

[0033] 2-Second mass block; 21-Second moving part; 22-Giveaway space;

[0034] 3-Drive component; 31-Drive unit;

[0035] 41 - First anchor point; 42 - Second anchor point; 43 - Third anchor point; 44 - Fourth anchor point;

[0036] 51-First flexible beam; 52-Second flexible beam; 53-Third flexible beam; 54-Fourth flexible beam;

[0037] 6-Coupled component; 61-Coupled block; 62-Coupled beam;

[0038] 7-Guide beam;

[0039] 81 - In-plane driving transducer; 82 - Out-of-plane detection transducer; 83 - In-plane detection transducer.

Detailed Implementation Methods

[0040] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0041] This invention provides a micromechanical gyroscope, such as Figure 1 As shown, this type of micromechanical gyroscope includes a first mass block 1, multiple second mass blocks 2, multiple driving elements 3, multiple first flexible beams 51, and multiple second flexible beams 52. The first mass block 1 is provided with an installation area, and the multiple second mass blocks 2 are distributed along a first direction X. The multiple driving elements 3 are distributed along the first direction X, and the multiple second mass blocks 2 are respectively provided with driving elements 3 on opposite sides along the first direction X. The multiple driving elements 3 and the multiple second mass blocks 2 are all located within the installation area, and the first mass block 1 surrounds the outside of the multiple driving elements 3 and the multiple second mass blocks 2. Each driving element 3 is connected to the first mass block 1 through a first flexible beam 51, and each second mass block 2 and its adjacent driving element 3 are connected through a second flexible beam 52.

[0042] Micromechanical gyroscopes have four operating modes: driving mode, first detection mode, second detection mode, and third detection mode. For example... Figure 1 As shown, there is one first mass block 1, two second mass blocks 2, and two driving components 3. The first direction X is defined as the direction of the X-axis, the second direction Y is defined as the direction of the Y-axis, and the Z-axis is perpendicular to both the X-axis and the Y-axis. The plane containing the X-axis and the Y-axis is defined as the reference plane. An example is given below:

[0043] When detecting angular velocity, the micromechanical gyroscope first enters the driving mode. In driving mode, one of the two driving components 3 moves along the second direction Y, and the other moves in the opposite direction to the second direction Y (the directions of motion of the two driving components 3 are, for example...). Figure 7 (As shown by the black arrow in the middle), at this time, the two driving components 3 will respectively drive the two adjacent second mass blocks 2 to move in two opposite directions along the Y-axis, and the two driving components 3 will drive the first mass block 1 to rotate (the directions of movement of the first mass block 1 and the second mass block 2 are, for example, Figure 7 (As indicated by the white arrow in the middle).

[0044] When the micromechanical gyroscope is subjected to an angular velocity in the X-axis direction, the first mass block 1 is subjected to a Coriolis force in the Z-axis direction. Figure 8 (As shown by the white arrow in the middle), the first detection mode is excited, causing the opposite sides of the first mass block 1 along the X-axis to generate out-of-plane vibration displacement along the Z-axis (i.e. vibration displacement toward the reference plane). By detecting the out-of-plane vibration displacement of the opposite sides of the first mass block 1 along the X-axis in the Z-axis direction, the angular velocity of the micromechanical gyroscope around the X-axis can be obtained.

[0045] When the micromechanical gyroscope is subjected to an angular velocity in the Y-axis direction, the first mass block 1 is subjected to a Coriolis force in the Z-axis direction. Figure 9 (As shown by the white arrow in the middle), the second detection mode is excited, causing the opposite sides of the first mass block 1 along the Y-axis to generate out-of-plane vibration displacement along the Z-axis (i.e. vibration displacement toward the reference plane). By detecting the out-of-plane vibration displacement of the opposite sides of the first mass block 1 along the Y-axis in the Z-axis direction, the angular velocity of the micromechanical gyroscope around the Y-axis can be obtained.

[0046] When the micromechanical gyroscope is subjected to an angular velocity in the Z-axis direction, the second mass block 2 will be subjected to a Coriolis force in the X-axis direction. Figure 10 (As shown by the white arrow in the middle), the third detection mode is excited, causing the second mass block 2 to generate an in-plane vibration displacement along the X-axis direction (i.e., vibration displacement in the reference plane). By detecting the in-plane vibration displacement of the second mass block 2 along the X-axis direction, the angular velocity of the micromechanical gyroscope around the Z-axis can be obtained.

[0047] In the micromechanical gyroscope provided in this embodiment, multiple driving elements 3 and multiple second mass blocks 2 are all located within the mounting area where the first mass block 1 is set. The first mass block 1 surrounds the outside of the multiple driving elements 3 and multiple second mass blocks 2. That is, the second mass blocks 2 and driving elements 3 are arranged where the Coriolis conversion rate of the first mass block 1 is low, which improves the Coriolis conversion rate of the first mass block 1. This maximizes the utilization of chip area, reduces chip size and cost while maintaining the same performance.

[0048] Moreover, the high mass ratio of the drive and detection effectively improves the conversion of Coriolis force and enhances the sensitivity of the micromechanical gyroscope. This type of micromechanical gyroscope has a simple structure and is easy to integrate into a small size under limited process conditions, thus reducing costs.

[0049] The driving mode of this micromechanical gyroscope is differential driving, which can effectively improve the stability and shock resistance of the micromechanical gyroscope drive.

[0050] Moreover, the three detection modes of the micromechanical gyroscope can all achieve anti-phase vibration, which can effectively resist the effects of acceleration shock and orthogonal error.

[0051] Specifically, along the direction perpendicular to the front of the first mass block 1, the projection of the first mass block 1 is a centrally symmetrical shape; multiple driving components 3 are symmetrical to each other along the first direction X, and multiple second mass blocks 2 are symmetrical to each other along the first direction X. This arrangement facilitates differential detection of the micromechanical gyroscope.

[0052] in, Figure 1 This is a front view of the micromechanical gyroscope, perpendicular to the front of the first mass block 1. Figure 1 The Z-axis direction; the projection of the first mass block 1 is a centrally symmetric figure, that is, for example... Figure 1 As shown, the projection of the first mass block 1 is symmetrical about both the X-axis and the Y-axis.

[0053] Furthermore, the first mass block 1 includes multiple first motion parts 11, which are evenly distributed on the outer sides of multiple driving members 3 and multiple second mass blocks 2; the driving members 3 include multiple driving parts 31, which are symmetrically arranged along a second direction Y perpendicular to the first direction X; the second mass blocks 2 include multiple second motion parts 21, which are symmetrically arranged along the second direction Y; each first motion part 11 and its adjacent second motion part 21 are provided with a driving part 31, and the driving part 31 is connected to the first motion part 11 through a first flexible beam 51, and to the second motion part 21 through a second flexible beam 52. This arrangement is more conducive to realizing differential detection of the micromechanical gyroscope.

[0054] For example Figure 1As shown, the first mass block 1 includes four first motion parts 11, the two upper first motion parts 11 are symmetrical about the Y-axis, the two lower first motion parts 11 are symmetrical about the Y-axis, and the two upper and two lower first motion parts 11 are symmetrical about the X-axis; the second mass block 2 includes two second motion parts 21, which are symmetrical about the X-axis; the drive unit 3 includes two drive parts 31, which are symmetrical about the X-axis.

[0055] In one specific embodiment, such as Figure 5-6 As shown, the micromechanical gyroscope also includes multiple in-plane driving transducers 81 (also called in-plane driving electrodes), multiple out-of-plane detection transducers 82 (also called out-of-plane detection electrodes), and multiple in-plane detection transducers 83 (also called in-plane detection electrodes). Each driving element 3 is provided with an in-plane driving transducer 81 above it, each second mass block 2 is provided with an in-plane detection transducer 83 above it, and the first mass block 1 is provided with multiple out-of-plane detection transducers 82 above it.

[0056] When the micromechanical gyroscope is subjected to an angular velocity in the X-axis direction, the first mass block 1 is subjected to a Coriolis force in the Z-axis direction, which excites the first detection mode. The first mass block 1 generates a vibration displacement along the Z-axis. At this time, the out-of-plane detection transducers 82 arranged above the opposite sides of the first mass block 1 in the X-axis direction detect the vibration displacement generated by the opposite sides of the first mass block 1 in the Z-axis direction, thereby obtaining the angular velocity of the micromechanical gyroscope around the X-axis.

[0057] When the micromechanical gyroscope is subjected to an angular velocity in the Y-axis direction, the first mass block 1 is subjected to a Coriolis force in the Z-axis direction, which excites the second detection mode. The first mass block 1 generates a vibration displacement along the Z-axis. At this time, the out-of-plane detection transducers 82 arranged above the opposite sides of the first mass block 1 in the Y-axis direction detect the vibration displacement generated by the opposite sides of the first mass block 1 in the Z-axis direction, thereby obtaining the angular velocity of the micromechanical gyroscope around the Y-axis.

[0058] When the micromechanical gyroscope is subjected to an angular velocity in the Z-axis direction, the second mass block 2 is subjected to a Coriolis force in the X-axis direction, which excites the third detection mode. The second mass block 2 generates a vibration displacement along the X-axis. At this time, the in-plane detection transducer 83 arranged above the second mass block 2 detects the vibration displacement generated by the second mass block 2 along the X-axis, thereby obtaining the angular velocity of the micromechanical gyroscope around the Z-axis.

[0059] In one specific embodiment, such as Figure 5As shown, the first mass block 1 has two out-of-plane detection transducers 82 respectively in the X-axis and Y-axis directions. The two out-of-plane detection transducers 82 in the X-axis direction are symmetrical to each other, and the two out-of-plane detection transducers 82 in the Y-axis direction are symmetrical to each other. The driving member 3 has an in-plane driving transducer 81 respectively above the two driving parts 31 in the Y-axis direction. The two in-plane driving transducers 81 in the Y-axis direction are symmetrical to each other, and the in-plane driving transducer 81 above one driving member 3 in the X-axis direction is symmetrical to the in-plane driving transducer 81 above the other driving member 3. The second mass block 2 has an in-plane detection transducer 83 respectively above the two second moving parts 21 in the Y-axis direction. The two in-plane detection transducers 83 in the Y-axis direction are symmetrical to each other, and the in-plane detection transducer 83 above one second mass block 2 in the X-axis direction is symmetrical to the in-plane detection transducer 83 above the other second mass block 2.

[0060] Furthermore, since the projection of the first mass block 1 is a centrally symmetrical shape along the direction perpendicular to the front of the first mass block 1, the multiple driving elements 3 are symmetrical to each other along the first direction X, and the multiple second mass blocks 2 are symmetrical to each other along the first direction X. That is, in the micromechanical gyroscope provided in this embodiment, the first mass block 1, the second mass block 2, the driving elements 3, the in-plane driving transducer 81, the in-plane detection transducer 83, and the out-of-plane detection transducer 82 are all arranged symmetrically, which facilitates the differential detection of the micromechanical gyroscope.

[0061] In one specific embodiment, please refer to Figure 1-3 The micromechanical gyroscope also includes a first anchor point 41, multiple second anchor points 42, multiple third anchor points 43, multiple third flexible beams 53, and multiple fourth flexible beams 54. The first anchor point 41, multiple second anchor points 42, and multiple third anchor points 43 are all located within the installation area. The first anchor point 41 and multiple second anchor points 42 are located between multiple second mass blocks 2 and along a second direction Y perpendicular to the first direction X. The multiple second anchor points 42 are respectively set on opposite sides of the first anchor point 41. Each drive member 3 has a third anchor point 43 on the side away from the second mass block 2, and the multiple third anchor points 43 are arranged opposite each other along the first direction X. Each second mass block 2 is connected to the first anchor point 41 through the third flexible beam 53, and the first mass block 1 and each second anchor point 42 are connected to each third anchor point 43 through the fourth flexible beam 54.

[0062] For example Figure 1As shown, the first anchor point 41 is located at the center of the installation area, the two second anchor points 42 are located on opposite sides of the first anchor point 41 along the Y-axis, and the two third anchor points 43 are located on opposite sides of the first anchor point 41 along the X-axis. The two second mass blocks 2 located on both sides of the Y-axis are connected to the first anchor point 41, the opposite sides of the first mass block 1 on the X-axis are connected to the two second anchor points 42, and the opposite sides of the first mass block 1 on the Y-axis are connected to the two third anchor points 43.

[0063] Specifically, such as Figure 1 , Figure 3 As shown, a clearance space 22 is provided on the side of the second mass block 2 facing the driving component 3, and the third anchor point 43 is located in the clearance space 22. This arrangement helps to make the micromechanical gyroscope structure compact.

[0064] In addition, such as Figure 2 As shown, the micromechanical gyroscope also includes multiple coupling components 6, which are located between multiple second mass blocks 2 along the second direction Y. The multiple coupling components 6 are respectively arranged on opposite sides of the first anchor point 41. The second mass blocks 2 are connected to one end of the coupling component 6 through a third flexible beam 53, and the other end of the coupling component 6 is connected to the first anchor point 41.

[0065] Specifically, the coupling component 6 includes a coupling block 61 and a coupling beam 62. The second mass block 2 is connected to one end of the coupling block 61 through a third flexible beam 53, and the other end of the coupling block 61 is connected to the first anchor point 41 through the coupling beam 62.

[0066] For example Figure 1 As shown, along the Y-axis, two coupling components 6 are respectively arranged opposite each other on the opposite sides of the first anchor point 41 along the X-axis. The upper second motion part 21 of the same second mass block 2 is connected to one end of a coupling block 61 adjacent to the second motion part 21 through a third flexible beam 53. The other end of the coupling block 61 is connected to the first anchor point 41 through a coupling beam 62. The lower second motion part 21 is connected to one end of another coupling block 61 adjacent to the second motion part 21 through another third flexible beam 53. The other end of the coupling block 61 is connected to the first anchor point 41 through another coupling beam 62.

[0067] In one specific embodiment, please refer to Figure 1 and Figure 4 The micromechanical gyroscope also includes multiple fourth anchor points 44 and multiple guide beams 7. The multiple fourth anchor points 44 are all located in the installation area and are distributed along the circumference of the installation area. Each drive unit 3 is provided with a fourth anchor point 44 between itself and the first mass block 1, and the drive unit 3 and the fourth anchor point 44 are connected by the guide beams 7.

[0068] For example Figure 1As shown, four fourth anchor points 44 are respectively set at the four corners of the installation area. The four corners are connected in pairs to form a rectangle. Each fourth anchor point 44 and its adjacent drive component 3 are connected by a guide beam 7.

[0069] This invention also provides an electronic product, which includes a body and a micromechanical gyroscope as described in any of the above embodiments, wherein the micromechanical gyroscope is mounted on the body.

[0070] During the operation of electronic products, micro-mechanical gyroscopes can calculate the angular velocity of the electronic products to facilitate control. This micro-mechanical gyroscope improves the Coriolis conversion efficiency of the first mass block 1, thereby maximizing the utilization of chip area, reducing chip size and cost while maintaining the same performance.

[0071] The above description is merely an embodiment of the present invention. It should be noted that those skilled in the art can make improvements without departing from the inventive concept of the present invention, but these improvements all fall within the protection scope of the present invention.

Claims

1. A micromechanical gyroscope, characterized in that, The micromechanical gyroscope includes: The first mass block has an installation area. Two second mass blocks are distributed along the first direction; Two driving components are distributed along the first direction, and the two second mass blocks are respectively provided with the driving components on opposite sides along the first direction; Both of the driving elements and the two second mass blocks are located within the mounting area, with the first mass block surrounding the outside of the two driving elements and the two second mass blocks; The micromechanical gyroscope includes multiple first flexible beams and multiple second flexible beams. Each driving element is connected to the first mass block via the first flexible beam, and each second mass block is connected to the adjacent driving element via the second flexible beam. The micromechanical gyroscope further includes multiple in-plane driving transducers, multiple out-of-plane detection transducers, and multiple in-plane detection transducers. Each driving element has an in-plane driving transducer positioned above it, each second mass block has an in-plane detection transducer positioned above it, and the first mass block has multiple out-of-plane detection transducers positioned above it. The micromechanical gyroscope has four operating modes: driving mode, first detection mode, second detection mode, and third detection mode; the first direction is defined as the direction of the X-axis, and the second direction is defined as the direction of the Y-axis. In the driving mode, one of the two driving components moves along the Y-axis, and the other moves in the opposite direction to the Y-axis. The two driving components will drive the two adjacent second mass blocks to move in opposite directions along the Y-axis. The two driving components will drive the first mass block to rotate around the Z-axis. The X-axis, Y-axis and Z-axis are perpendicular to each other. When the micromechanical gyroscope is subjected to an angular velocity in the X-axis direction, the first mass block is subjected to a Coriolis force in the Z-axis direction, which excites the first detection mode. The first mass block generates a vibration displacement along the Z-axis. The out-of-plane detection transducers arranged above the opposite sides of the first mass block in the X-axis direction detect the vibration displacement generated by the opposite sides of the first mass block in the Z-axis direction, thereby obtaining the angular velocity of the micromechanical gyroscope around the X-axis. When the micromechanical gyroscope is subjected to an angular velocity in the Y-axis direction, the first mass block is subjected to a Coriolis force in the Z-axis direction, which excites the second detection mode. The first mass block generates a vibration displacement along the Z-axis. The out-of-plane detection transducers arranged above the opposite sides of the first mass block in the Y-axis direction detect the vibration displacement generated by the opposite sides of the first mass block in the Z-axis direction in the Y-axis direction, thereby obtaining the angular velocity of the micromechanical gyroscope around the Y-axis. When the micromechanical gyroscope is subjected to an angular velocity in the Z-axis direction, the second mass block is subjected to a Coriolis force in the X-axis direction, which excites the third detection mode. The second mass block generates a vibration displacement along the X-axis. The in-plane detection transducer arranged above the second mass block detects the vibration displacement generated by the second mass block along the X-axis, thereby obtaining the angular velocity of the micromechanical gyroscope around the Z-axis.

2. The micromechanical gyroscope according to claim 1, characterized in that: Along the direction perpendicular to the front of the first mass block, the projection of the first mass block is a centrally symmetrical figure. The plurality of driving components are symmetrical to each other along the first direction, and the plurality of second mass blocks are symmetrical to each other along the first direction.

3. The micromechanical gyroscope according to claim 2, characterized in that: The first mass block includes a plurality of first moving parts, which are evenly distributed on the outer sides of the plurality of driving members and the plurality of second mass blocks; The driving component includes a plurality of driving parts, which are symmetrical to each other along a second direction perpendicular to the first direction; the second mass block includes a plurality of second moving parts, which are symmetrical to each other along the second direction. A drive unit is provided between each of the first moving parts and the adjacent second moving parts, and the drive unit is connected to the first moving part through the first flexible beam and to the second moving part through the second flexible beam.

4. The micromechanical gyroscope according to claim 1, characterized in that: The micromechanical gyroscope further includes a first anchor point, multiple second anchor points, multiple third anchor points, multiple third flexible beams, and multiple fourth flexible beams. The first anchor point, multiple second anchor points, and multiple third anchor points are all located within the installation area. The first anchor point and multiple second anchor points are located between multiple second mass blocks and along a second direction perpendicular to the first direction. The multiple second anchor points are respectively disposed on opposite sides of the first anchor point. Each drive component has a third anchor point on the side away from the second mass block, and the multiple third anchor points are disposed opposite each other along the first direction. Each of the second mass blocks is connected to the first anchor point via the third flexible beam, and the first mass block and each of the second anchor points are respectively connected to each of the third anchor points via the fourth flexible beam.

5. The micromechanical gyroscope according to claim 4, characterized in that: The second mass block has a clearance space on the side facing the drive member, and the third anchor point is located in the clearance space.

6. The micromechanical gyroscope according to claim 4, characterized in that: The micromechanical gyroscope also includes multiple coupling components, which are located between multiple second mass blocks. Along the second direction, the multiple coupling components are respectively disposed on opposite sides of the first anchor point. The second mass blocks are connected to one end of the coupling components through the third flexible beam, and the other end of the coupling components is connected to the first anchor point.

7. The micromechanical gyroscope according to claim 6, characterized in that: The coupling component includes a coupling block and a coupling beam. The second mass block is connected to one end of the coupling block through the third flexible beam, and the other end of the coupling block is connected to the first anchor point through the coupling beam.

8. The micromechanical gyroscope according to any one of claims 1-7, characterized in that: The micromechanical gyroscope further includes multiple fourth anchor points and multiple guide beams. The multiple fourth anchor points are all located in the installation area and are distributed circumferentially along the installation area. Each driving component is provided with a fourth anchor point between itself and the first mass block, and the driving component and the fourth anchor point are connected through the guide beams.

9. An electronic product, characterized in that, The electronic products include: ontology; The micromechanical gyroscope according to any one of claims 1-8, wherein the micromechanical gyroscope is mounted on the body.

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