Angular velocity sensor, inertial sensor and electronic device

Abstract

Embodiments of the present application provide a kind of angular velocity sensor, inertial sensor, electronic equipment.Angular velocity sensor includes first mass and second mass, by driving first mass reciprocating movement along X axis, and by the displacement of first mass along Z axis, it can be judged that the angular velocity of first mass around Y axis;By driving second mass reciprocating movement along Y axis, and by the displacement of second mass along X axis / Z axis, it can be judged that the angular velocity of first mass around Z axis / X axis.First mass is symmetrical relative to symmetry axis x, and second mass is symmetrical relative to symmetry axis y.Angular velocity sensor further includes first anchor area for supporting first mass, and second anchor area for supporting second mass, first anchor area, second anchor area and first mass are symmetrical relative to the same symmetry axis x.First anchor area can also be symmetrical with second mass relative to the same symmetry axis y.

Description

Technical Field

[0001] This application relates to the fields of inertial sensing and electronic devices, and more specifically, to inertial sensors and electronic devices. Background Technology

[0002] Electronic devices can use angular velocity sensors to detect the angle or angular velocity of their own rotation around multiple axes. Angular velocity sensors play an important role in applications such as image stabilization, navigation, game orientation, screen rotation, and autonomous driving.

[0003] An angular velocity sensor may include multiple mass blocks for detection. When a mass block deflects, the capacitance between the mass block and the detection electrode changes, allowing the angular velocity sensor to output a signal related to angle or angular velocity. The mass blocks are typically mounted on a substrate of the angular velocity sensor. When one of the mass blocks moves, it can pull on the substrate, potentially causing substrate deformation. This substrate deformation may displace other mass blocks on the angular velocity sensor, thereby reducing the sensor's detection accuracy. Therefore, a solution is needed to reduce substrate deformation. Summary of the Invention

[0004] This application provides an angular velocity sensor, an inertial sensor, and an electronic device. The aim is to reduce substrate deformation.

[0005] In a first aspect, an angular velocity sensor is provided, comprising:

[0006] A first mass block and a second mass block, the first mass block and the second mass block being driven to have a displacement component in a first direction, the first mass block and the second mass block being used to detect angular velocities about a second direction and / or a third direction, the first direction, the second direction and the third direction being orthogonal to each other, the first mass block and the second mass block being symmetrical about a first axis of symmetry, the first mass block and the second mass block being symmetrical about a second axis of symmetry, the first axis of symmetry being parallel to the first direction, and the second axis of symmetry being parallel to the second direction;

[0007] A third mass block and a fourth mass block, the third mass block and the fourth mass block being driven to have a displacement component in the second direction, the third mass block and the fourth mass block being used to detect angular velocity about the first direction, the third mass block and the fourth mass block being symmetrical about the second axis of symmetry, the third mass block and the fourth mass block being symmetrical about the first axis of symmetry;

[0008] A first anchorage and a second anchorage, wherein the first mass block is connected to the first anchorage and the second anchorage, and the second mass block is connected to the first anchorage and the second anchorage, and the first anchorage and the second anchorage are symmetrical with respect to the first axis of symmetry;

[0009] The third anchor area is connected to the third mass block and the fourth mass block;

[0010] The first anchorage, the second anchorage, and the third anchorage are arranged on the second axis of symmetry, and the third anchorage covers the intersection of the first axis of symmetry and the second axis of symmetry.

[0011] In this application, by placing the anchor region connected to the mover on the same axis of symmetry of the angular velocity sensor, the force borne by the anchor region can generally be symmetrical with respect to the axis of symmetry, thus the force borne by the anchor region can be at least partially canceled out, and the deformation of the anchor region can be relatively small. Based on the differential characteristics, this helps to reduce the impact of substrate deformation and other factors on the measurement accuracy of the angular velocity sensor, thereby improving the measurement accuracy of the angular velocity sensor. The same mass block can be used to detect angular velocities around multiple directions, which helps to improve the integration of the inertial sensor and reduce the space occupied by the inertial sensor.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the first anchorage itself, the second anchorage itself, and the third anchorage itself are all symmetrical with respect to the second axis of symmetry, and the third anchorage itself is symmetrical with respect to the first axis of symmetry.

[0013] In this application, the angular velocity sensor is symmetrical in order to suppress the influence of factors such as material strain and processing deviations. The symmetry of the angular velocity sensor is beneficial for applying the differential principle to remove common-mode noise caused by material strain, processing deviations, etc., and is beneficial for improving the angular velocity sensor's performance in areas such as temperature drift and zero drift.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0015] A driving component, the driving component being used to reciprocate along the first direction, the driving component being connected to the first mass block;

[0016] A transmission beam assembly is symmetrical about a first axis of symmetry. The transmission beam assembly includes a first end, a second end, and a third end. The first end is connected to the driving member, the second end is connected to the third mass block, and the third end is connected to the fourth mass block. When the first end has a displacement component along the first direction, both the second end and the third end have displacement components parallel to the second direction. The displacement components of the second end and the third end are in opposite directions.

[0017] In this application, the displacement component in the Y direction can be converted into the displacement component in the X direction through the transmission beam assembly, so that the first mass block and the second mass block are driven by the same driving component. This helps to reduce the number of devices in the angular velocity sensor and improve the coupling between the first mass block and the second mass block.

[0018] In conjunction with the first aspect, in some implementations of the first aspect, the transmission beam assembly includes a first transmission beam, a second transmission beam, and a third transmission beam connected to each other. The first transmission beam is disposed near the driving member, the second transmission beam is disposed near the third mass block, and the third transmission beam is disposed near the fourth mass block. The first transmission beam is disposed parallel to the first direction, and both the second transmission beam and the third transmission beam include portions disposed inclined or perpendicular to the first direction.

[0019] In this application, when the first drive beam has a displacement component along its extension direction, since the second drive beam includes a portion with an extension direction different from that of the first drive beam, the second drive beam can be pulled by the first drive beam, and the end of the second drive beam away from the first drive beam can have a displacement component perpendicular to the extension direction of the first drive beam. Similarly, the end of the third drive beam away from the first drive beam can have a displacement component perpendicular to the extension direction of the first drive beam. Therefore, the drive beam assembly can have a steering drive function.

[0020] In conjunction with the first aspect, in some implementations of the first aspect, the second transmission beam includes a first transmission segment, a second transmission segment, and a third transmission segment. The first transmission segment and the second transmission segment are arranged parallel to the second direction, and the third transmission segment is connected between the first transmission segment and the second transmission segment. The third transmission segment is arranged parallel to or inclined to the first direction.

[0021] In this application, the second transmission beam includes multiple transmission segments perpendicular to the Y direction and connected by transmission segments parallel to the Y direction. This is beneficial for distributing the displacement component in the X direction converted by the transmission beam assembly across multiple transmission segments, and for reducing detection errors caused by excessive deformation of the transmission segments.

[0022] In conjunction with the first aspect, in some implementations of the first aspect, when the third mass block and the fourth mass block have angular velocity components about the first direction, the second transmission beam and the third transmission beam rotate about the first transmission beam.

[0023] In other words, when the third and fourth mass blocks have angular velocity components about the Y direction, the second transmission beam can have a rotation angle about the Y direction.

[0024] In this application, a portion of the first transmission beam is relatively fixed in position, and the deformability of the first transmission beam is relatively small. When the third and fourth mass blocks have angular velocity components about the Y direction, the second and third transmission beams rotate relative to the first transmission beam, allowing them to absorb the rotational tendency from the third and fourth mass blocks. This helps reduce the degree to which the first mass block is pulled by the third and fourth mass blocks, and consequently, helps reduce the displacement of the third and fourth mass blocks in the X and Z directions under the pull of the first mass block.

[0025] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the first transmission beam in the second direction is less than the stiffness of the first transmission beam in the third direction.

[0026] In this application, the first transmission beam is elastic in the X direction, which helps to reduce the displacement of the third and fourth mass blocks in the X direction under the traction of the first mass block.

[0027] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the second transmission beam in the second direction is less than the stiffness of the second transmission beam in the third direction.

[0028] In this application, the second transmission beam can be elastic in the X direction, which is beneficial to reduce the displacement of the first mass block in the X direction under the traction of the third and fourth mass blocks.

[0029] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the second transmission beam in the first direction is less than the stiffness of the second transmission beam in the third direction.

[0030] In this application, the second transmission beam can be elastic in the Y direction, which is beneficial to reduce the displacement of the third and fourth mass blocks in the Y direction under the traction of the first mass block.

[0031] In this application, by setting the transmission beam assembly with the above-described structure, the displacement components of the third and fourth mass blocks in the X direction have a smaller impact on the first mass block; the displacement components of the first mass block in the X and Y directions have a smaller impact on the third and fourth mass blocks. Therefore, by rationally designing the steering structure, the steering structure can not only be used to transmit and convert driving force, but also improve the decoupling between multiple mass blocks with different detection directions, thereby improving the measurement accuracy of the inertial sensor.

[0032] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0033] A support member is connected to the third anchor area and between the third mass block and the fourth mass block, and the support member is symmetrical with respect to the first axis of symmetry and the second axis of symmetry.

[0034] In this application, by providing support members between the third anchor region and the third mass block, and between the third anchor region and the fourth mass block, the third mass block and the fourth mass block can be suspended on the substrate layer of the angular velocity sensor.

[0035] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0036] A first torsion beam is connected between the support member and the third anchor area. The first torsion beam extends along the first direction. When the third mass block and the fourth mass block have angular velocity components about the first direction, the support member rotates about the first torsion beam.

[0037] In this application, the first torsion beam can provide torsional stiffness for the support member. When the third and fourth mass blocks rotate about the Y direction under the action of external force, the support member can be driven by the third and fourth mass blocks and torsion relative to the first torsion beam; when the support member is not subjected to external force, due to the torsional stiffness of the first torsion beam, the support member can return to its initial state.

[0038] In conjunction with the first aspect, in some implementations of the first aspect, the third mass block includes a first mass block notch, the first mass block notch being symmetrical with respect to the second axis of symmetry; the angular velocity sensor further includes:

[0039] A first elastic connector spans the notch in the first mass block and connects between the support and the third mass block.

[0040] In this application, an elastic connector is provided between the support member and the third mass block. The elastic connector can reduce the deformation of the support member and the third anchor area caused by the traction of the third mass block.

[0041] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the first elastic connector in the second direction is less than the stiffness of the first elastic connector in the third direction.

[0042] In this application, the first elastic connector can be elastic in the X direction, which helps to reduce the deformation of the support in the X direction under the traction of the third mass block.

[0043] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0044] A fourth transmission beam is connected to the first anchor area and is located between the first mass block and the second mass block. The fourth transmission beam extends along the first direction and is symmetrical about the second axis of symmetry.

[0045] In this application, by setting a fourth transmission beam between the first anchor area and the first mass block, the first mass block can be suspended on the substrate layer of the angular velocity sensor.

[0046] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the fourth transmission beam in the second direction is less than the stiffness of the fourth transmission beam in the third direction.

[0047] In this application, the fourth transmission beam can be elastic in the X direction, which helps to reduce the deformation of the first anchor area in the X direction under the traction of the first mass block.

[0048] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0049] A second torsion beam is connected between the first anchor area and the fourth transmission beam. The second torsion beam extends along the second direction. When the first mass block and the second mass block have angular velocity components about the second direction, the fourth transmission beam rotates about the second torsion beam.

[0050] In conjunction with the first aspect, in some implementations of the first aspect, the second torsion beam itself is symmetrical with respect to the second axis of symmetry.

[0051] In this application, the second torsion beam is symmetrical, which helps to reduce the error generated when the fourth transmission beam is in motion.

[0052] In this application, the second torsion beam can provide torsional stiffness for the fourth transmission beam. When the first mass block rotates around the X or Z direction under the action of an external force, the fourth transmission beam can be driven by the first mass block and torsion relative to the second torsion beam; when the fourth transmission beam is not subjected to an external force, due to the torsional stiffness of the second torsion beam, the fourth transmission beam can return to its initial state.

[0053] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0054] A second elastic connector is connected between the fourth transmission beam and the first mass block, and the second elastic connector extends along the second direction.

[0055] In this application, an elastic connector is provided between the fourth transmission beam and the first mass block. The elastic connector can reduce the amount of deformation of the fourth transmission beam and the first anchor area caused by the traction of the first mass block.

[0056] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the second elastic connector in the first direction is less than the stiffness of the second elastic connector in the third direction.

[0057] In this application, the second elastic connector can be elastic in the Y direction, which helps to reduce the deformation of the fourth transmission beam in the Y direction under the traction of the first mass block.

[0058] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0059] The fourth anchor region is connected between the first mass block and the second mass block, and the fourth anchor region itself is symmetrical with respect to the second axis of symmetry;

[0060] The position on the first mass block that connects to the first anchor area is the first position, the position on the first mass block that connects to the second anchor area is the second position, and the position on the first mass block that connects to the fourth anchor area is the third position. The first position, the second position, and the third position are not collinear.

[0061] In this application, the first mass block can be supported by a first anchor region, a second anchor region, and a fourth anchor region. The three positions of the first mass block connected to the first anchor region, the second anchor region, and the fourth anchor region are not collinear, so that the first mass block can be suspended on the substrate of the angular velocity sensor.

[0062] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0063] A third elastic connector is connected between the fourth anchor zone and the first mass block.

[0064] In this application, an elastic connector is provided between the fourth anchor zone and the first mass block. The elastic connector can reduce the amount of deformation of the fourth anchor zone caused by the traction of the first mass block.

[0065] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the third elastic connector in the first direction is less than the stiffness of the third elastic connector in the third direction.

[0066] In this application, by providing a third elastic connector between the fourth anchor region and the first mass block, the first mass block can be suspended on the substrate of the angular velocity sensor. The third elastic connector can also be elastic in the Y direction, which helps to reduce the deformation of the fourth anchor region in the Y direction under the traction of the first mass block.

[0067] In conjunction with the first aspect, in some implementations of the first aspect, the stiffness of the third elastic connector in the second direction is less than the stiffness of the third elastic connector in the third direction.

[0068] In this application, the third elastic connector can be elastic in the X direction, which helps to reduce the deformation of the fourth anchor area in the X direction under the traction of the first mass block.

[0069] In conjunction with the first aspect, in some implementations of the first aspect, the first mass block rotates about the third elastic connector when the first mass block has an angular velocity component about the second direction.

[0070] In this application, the third elastic connector can provide torsional stiffness for the first mass block. When the first mass block rotates about the X direction under the action of an external force, the first mass block can torsion relative to the third elastic connector; when the first mass block is not subjected to an external force, due to the torsional stiffness of the third elastic connector, the first mass block can return to its initial state.

[0071] In conjunction with the first aspect, in some implementations of the first aspect, the first mass block rotates about the third elastic connector when the first mass block has an angular velocity component about the third direction.

[0072] In this application, the third elastic connector can provide torsional stiffness for the first mass block. When the first mass block rotates about the Z direction under the action of an external force, the first mass block can torsion relative to the third elastic connector; when the first mass block is not subjected to an external force, due to the torsional stiffness of the third elastic connector, the first mass block can return to its initial state.

[0073] In conjunction with the first aspect, in some implementations of the first aspect, the first mass block has a second mass block notch, and the third mass block and the fourth mass block are disposed within the second mass block notch.

[0074] In this application, the notches of the first mass block and the second mass block are arranged facing each other to accommodate the third and fourth mass blocks, which helps to reduce the overall size of the inertial sensor and increase the effective detection area of ​​the mass blocks.

[0075] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0076] A first detection electrode, a first mass block movable relative to the first detection electrode, the first mass block and the first detection electrode arranged along the third direction to form a first capacitor, when the first mass block has an angular velocity component about the second direction, the first mass block has a displacement component along the third direction, and the displacement component of the first mass block along the third direction corresponds to the change in capacitance of the first capacitor.

[0077] The first readout circuit is used to output the angular velocity component in the second direction based on the change in the capacitance of the first capacitor.

[0078] In this application, by setting detection electrodes, the displacement component of the first mass block in the Z-axis direction can be captured, thereby inferring the Coriolis force of the first mass block in the Z-axis direction, and thus determining the angular velocity of the first mass block around the X-axis.

[0079] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0080] The second detection electrode, the third mass block is movable relative to the second detection electrode, the third mass block and the second detection electrode are arranged along the third direction to form a second capacitor, when the third mass block has an angular velocity component about the first direction, the third mass block has a displacement component along the third direction, and the displacement component of the third mass block along the third direction corresponds to the capacitance change of the second capacitor;

[0081] The second readout circuit is used to output the angular velocity component in the first direction based on the change in the capacitance of the second capacitor.

[0082] In this application, by setting detection electrodes, the displacement component of the second mass block in the Z-axis direction can be captured, thereby inferring the Coriolis force of the second mass block in the Z-axis direction, and thus determining the angular velocity of the second mass block around the Y-axis.

[0083] In conjunction with the first aspect, in some implementations of the first aspect, the angular velocity sensor further includes:

[0084] The third detection electrode, the first mass block is movable relative to the third detection electrode, the first mass block and the third detection electrode are arranged along the second direction to form a third capacitor, when the first mass block has an angular velocity component about the third direction, the first mass block has a displacement component along the second direction, and the displacement component of the third mass block along the second direction corresponds to the capacitance change of the third capacitor.

[0085] The third readout circuit is used to output the angular velocity component in the third direction based on the change in the capacitance of the third capacitor.

[0086] In this application, by setting detection electrodes, the displacement component of the first mass block in the X-axis direction can be captured, thereby inferring the Coriolis force of the first mass block in the X-axis direction, and thus determining the angular velocity of the first mass block around the Z-axis.

[0087] In a second aspect, an inertial sensor is provided, including an angular velocity sensor as described in any of the implementations of the first aspect above.

[0088] Thirdly, an electronic device is provided, including an inertial sensor as described in any of the implementations of the second aspect above. Attached Figure Description

[0089] Figure 1 This is a schematic structural diagram of an electronic device provided in an embodiment of this application.

[0090] Figure 2 This is a schematic structural diagram of an inertial sensor provided in an embodiment of this application.

[0091] Figure 3 This is a schematic structural diagram of a mechanical structure layer provided in an embodiment of this application.

[0092] Figure 4 This is a schematic perspective view of a mechanical structure layer provided in an embodiment of this application.

[0093] Figure 5 This is a schematic diagram of the movement of a mechanical structure layer provided in an embodiment of this application.

[0094] Figure 6 This is a schematic structural diagram and motion diagram of a transmission beam assembly provided in an embodiment of this application.

[0095] Figure 7 This is a schematic diagram of the arrangement of detection electrodes on a substrate provided in an embodiment of this application.

[0096] Figure 8 This is a schematic diagram of a mechanical structure layer for detecting angular velocity around the X-axis, provided in an embodiment of this application.

[0097] Figure 9 This is a schematic diagram of an inertial sensor for detecting angular velocity around the X-axis, provided in an embodiment of this application.

[0098] Figure 10 This is a schematic diagram of a mechanical structure layer for detecting angular velocity around the Y-axis, provided in an embodiment of this application.

[0099] Figure 11 This is a schematic diagram of an inertial sensor for detecting angular velocity around the Y-axis, provided in an embodiment of this application.

[0100] Figure 12 This is a schematic diagram of an inertial sensor for detecting angular velocity around the Z-axis, provided in an embodiment of this application. Detailed Implementation

[0101] The technical solutions in the embodiments of this application will now be described with reference to the accompanying drawings.

[0102] Figure 1 This is a schematic structural diagram of an electronic device 100 provided in an embodiment of this application. The electronic device 100 can be, for example, a terminal consumer product or a 3C electronic product (computer, communication, consumer electronic product), such as a mobile phone, laptop, tablet computer, e-reader, laptop computer, digital camera, wearable device, headphones, watch, stylus, etc. The electronic device 100 can also be a vehicle, or a control device, vehicle infotainment system, or in-vehicle equipment applied to a vehicle. Figure 1 The illustrated embodiment uses a mobile phone as an example of an electronic device 100.

[0103] Electronic device 100 may include a housing 11, a display screen 12, and a circuit board assembly 13. Specifically, the housing 11 may include a bezel and a back cover. The bezel may be located between the display screen 12 and the back cover. The bezel may surround the outer periphery of the display screen 12 and the outer periphery of the back cover. The cavity formed between the display screen 12, the bezel, and the back cover may be used to house the circuit board assembly 13. The circuit board assembly 13 may include a circuit board and an inertial sensor 20 disposed on the circuit board. The circuit board may be, for example, a motherboard, a small board, etc.

[0104] Figure 2 Two embodiments of the inertial sensor (also known as an inertial measurement unit, IMU) 20 are shown. Figure 2 In the illustrated embodiment, the inertial sensor 20 can be an angular velocity sensor (also known as a gyroscope), or it can integrate an accelerometer and an angular velocity sensor. That is, the inertial sensor 20 can include only an angular velocity sensor (in this case, the inertial sensor 20 can be equivalent to an angular velocity sensor), or the inertial sensor 20 can include both an angular velocity sensor and an accelerometer. The angular velocity sensor can be a type of inertial sensor, or a part of an inertial sensor. In embodiments where the inertial sensor 20 integrates an accelerometer and an angular velocity sensor, the inertial sensor 20 can be a sensor capable of performing both the functions of an accelerometer and an angular velocity sensor.

[0105] An angular velocity sensor can be used to determine the motion attitude of an electronic device 100. In some embodiments, the angular velocity of the electronic device 100 about three axes (i.e., the X-axis, Y-axis, and Z-axis) can be determined by the angular velocity sensor.

[0106] In one possible scenario, an angular velocity sensor can be used for image stabilization. For example, when the shutter is pressed, the angular velocity sensor detects the angle of vibration of the electronic device 100, calculates the distance that the lens module needs to compensate based on the angle, and allows the lens to counteract the vibration of the electronic device 100 by moving in the opposite direction, thus achieving image stabilization.

[0107] In another possible scenario, the angular velocity sensor can also be used in navigation, autonomous driving, and other similar applications. For example, when the electronic device 100 deflects during movement, the angular velocity sensor can detect the angle or angular velocity of the deflection. Combined with the moving speed of the electronic device 100, the device can determine its approximate location on a map, its driving status, and so on.

[0108] In yet another possible scenario, angular velocity sensors can also be used in many other types of scenarios, such as motion-sensing games.

[0109] An accelerometer can detect the magnitude of acceleration of an electronic device 100 in various directions (typically three axes). When the electronic device 100 is stationary, it can detect the magnitude and direction of gravity. It can also be used for applications such as identifying the posture of the electronic device 100 and pedometers.

[0110] like Figure 2 As shown, the inertial sensor 20 may include a chip 21 and one or more detection components 22. The chip 21 may include, or alternatively be, readout circuitry. Part or all of the detection component 22 may be referred to as a microelectromechanical system (MEMS). The chip 21 may be electrically connected to the detection component 22. Figure 2 In the illustrated embodiment, the inertial sensor 20 may include a single detection element 22. The chip 21 can acquire signals related to angular velocity through this detection element 22. In one embodiment, the chip 21 can acquire signals related to acceleration through this detection element 22. In another embodiment, the inertial sensor 20 may include two detection elements 22. The chip 21 can acquire signals related to acceleration through one detection element 22 and signals related to angular velocity through the other detection element 22.

[0111] The following is combined with Figure 1 , Figure 2This paper explains the principle of acquiring the motion state of electronic device 100 through inertial sensor 20.

[0112] The detection component 22 may include a substrate layer, a mechanical structure layer, and a capping layer. The mechanical structure layer may be hermetically connected between the mechanical structure layer and the capping layer. The mechanical structure layer may also be referred to as a MEMS layer. The mechanical structure layer may be a key component of the detection component 22 for realizing angular velocity detection.

[0113] The mechanical structure layer may include a mover and a stator. The stator may be fixed within the inertial sensor 20. The stator may, for example, be fixed to a substrate layer. A gap exists between the stator and the mover, allowing them to form a capacitor. The capacitor formed by the stator and the mover can be used to drive the mover to move relative to the stator. The mover may, for example, levitate on the substrate layer and be able to move relative to it. In one embodiment, the mover and stator may, for example, include a comb-like structure. The comb-like mover may have movable comb teeth. The comb-like stator may have fixed comb teeth.

[0114] The stator can be, for example, an anchor region. In this application, the stator can have grooves. The grooves can be fabricated using MEMS processes or processes such as local substrate growth. Since the mechanical structure layer is connected between the substrate layer and the capping layer, the stator can be connected between the substrate layer and the capping layer. The stator can be connected to the substrate layer or the capping layer by bonding. The grooves on the stator help increase the bonding area between the mechanical structure layer and the substrate layer or between the mechanical structure layer and the capping layer, thereby improving the mechanical stability of the inertial sensor 20. The anchor region of the mechanical structure layer 300 can also be obtained by surface silicon growth, bonding, or other methods.

[0115] The inertial sensor 20 may also include detection electrodes. The detection electrodes may be fixed within the inertial sensor 20. A capacitance may be formed between the mover and the detection electrodes. The capacitance formed by the mover and the detection electrodes can be used to detect the motion state of the electronic device 100. Figure 2 In the illustrated embodiment, the detection electrode may, for example, be fixed on the substrate layer.

[0116] Now combined Figure 2 Taking the Y-axis direction detection embodiment as an example, the working principle of the inertial sensor 20 is explained. The chip 21 can send an AC signal to the detection component 22 to drive the mover of the detection component 22 to reciprocate relative to the stator along the X-axis direction at a preset frequency in a translational manner. This movement does not substantially change the distance between the detection electrode and the mover in the Z-axis direction. The distance between the detection electrode and the mover along the Z-axis direction corresponds to the capacitance value formed by the detection electrode and the mover; therefore, the capacitance value formed by the detection electrode and the mover can remain essentially unchanged.

[0117] When the electronic device 100 does not undergo any movement (including translation, rotation, etc.), the capacitance value of the capacitor formed by the detection electrode and the mover can remain essentially unchanged.

[0118] When the electronic device 100 moves, for example, when the electronic device has an angular velocity component rotating around the Y-axis under the action of an external force—that is, when the rotation direction of the electronic device is in the Y-axis direction—the mover will also tend to rotate around the Y-axis and will be subjected to an additional force. This force can be called the Coriolis force. The direction of this force (e.g., the Z-axis direction) can be orthogonal to both the rotation direction (e.g., the Y-axis direction) and the movement direction (e.g., the X-axis direction) of the mover. Under the action of this force, the mover can move along the Z-axis direction. Therefore, this force can change the distance between the detection electrode and the mover, thereby changing the capacitance value formed by the detection electrode and the mover. Figure 1 The illustrated electronic device 100 can obtain the angular velocity ω of its rotation about the Y-axis by acquiring the change in capacitance of the capacitor formed by the detection electrode and the mover. In one embodiment, the readout circuit can acquire the change in capacitance and output the angular velocity based on the change in capacitance.

[0119] The change in capacitance ΔC can be used to determine the change in distance y between the detection electrode and the mover. The changes in capacitance ΔC and distance y can satisfy, for example, the following formula:

[0120]

[0121] The Coriolis force F borne by the mover can be determined based on the mover's stiffness k and the pitch change y. The Coriolis force F, stiffness k, and pitch change y can satisfy, for example, the following formula:

[0122] F = k·y.

[0123] The angular velocity ω of the mover can be determined from the Coriolis force F, the mover mass m, and the reciprocating speed v of the mover. The Coriolis force F, the mover mass m, the reciprocating speed v, and the angular velocity ω can satisfy, for example, the following formula:

[0124]

[0125] When the electronic device 100 is actually moving, it can rotate around three axes: the X-axis, Y-axis, and Z-axis. The inertial sensor can acquire the angular velocities around the X-axis, Y-axis, and Z-axis respectively, based on the principles described above. In the embodiments provided in this application, besides detecting the movement of the mover through capacitance, other methods can also be used to detect the movement of the mover, such as time-of-flight methods. This application is not limited to the angular velocity detection methods provided in the embodiments.

[0126] Because the mover is located on the substrate layer, its movement may cause deformation of the substrate. Substrate deformation can lead to improper movement of the mover, thus affecting the measurement accuracy of the angular velocity sensor. This application addresses these problems by providing a series of technical solutions to reduce the impact of substrate deformation on the measurement accuracy of the angular velocity sensor, enabling the angular velocity sensor or inertial sensor to meet various requirements and improve its performance in electronic devices. For example, the angular velocity sensor or inertial sensor provided in this application can have characteristics such as small size, multi-axis detection, and excellent detection accuracy.

[0127] Figure 3 and Figure 4 This is a schematic internal structural diagram of a mechanical structure layer 300 provided in an embodiment of this application, wherein... Figure 3 This is a planar structural diagram. Figure 4 This is a 3D structural diagram. Figure 5 Is Figure 3 and Figure 4 The diagram shows the motion of the moving part of the mechanical structure layer 300 when it is not rotating. The mechanical structure layer 300 can be a component of the angular velocity sensor or inertial sensor provided in this application. The following description uses an inertial sensor as an example. Embodiments of the angular velocity sensor can be found in embodiments related to inertial sensors.

[0128] For ease of description, such as Figures 3 to 5 As shown, assume the existence of an XYZ coordinate system. The XY plane is parallel to... Figure 3 , Figure 5 The paper surface, with the Z-axis direction perpendicular to Figure 3 , Figure 5 The paper surface. The X-axis, Y-axis, and Z-axis are orthogonal to each other. The mechanical structure layer 300 can be set parallel to the XY plane.

[0129] The mechanical structure layer 300 may include mass blocks 311 and 312. Figure 3 In the illustrated embodiment, mass block 311 is used to detect angular velocities about the X-axis and Z-axis. Mass block 312 is used to detect angular velocities about the Y-axis. In other possible embodiments, mass block 311 may be used only to detect angular velocities about the X-axis or Z-axis. The working principle of mass block 311 detecting angular velocities about the X-axis and Z-axis is described below. For embodiments where mass block 311 detects only angular velocities about the X-axis and only angular velocities about the Z-axis, please refer to... Figure 3 The example shown.

[0130] In some embodiments, the mechanical structure layer 300 may be symmetrical in order to suppress the effects of factors such as material strain and processing deviations. The symmetry of the mechanical structure layer 300 is beneficial for applying the differential principle to remove common-mode noise caused by material strain, processing deviations, etc., and is beneficial for improving the mechanical structure layer 300's performance in areas such as temperature drift and zero drift.

[0131] The mechanical structure layer 300 can be symmetrical with respect to the axis of symmetry x, and the axis of symmetry x can be parallel to the X-axis direction and the Y-axis direction. In this application, the movement directions of two components or structures that are symmetrical with respect to the axis of symmetry x or the axis of symmetry y can be symmetrical, so that the motion modes of the two components or structures can meet the requirements of differential motion at the same frequency.

[0132] In one embodiment, mass block 311 is symmetrical about the symmetry axis y. Mass block 312 may be symmetrical about the symmetry axis x. The symmetry of mass blocks 311 and 312 is advantageous for improving the measurement accuracy of inertial sensors by applying the differential principle.

[0133] To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include mass blocks 313 and 314. Mass blocks 313 and 311 may be symmetrical with respect to the torsion beam x. Mass blocks 314 and 312 may be symmetrical with respect to the torsion beam y. Mass blocks 313 and 311 may satisfy differential decoupling conditions. Mass blocks 314 and 312 may satisfy differential decoupling conditions. Specific embodiments of mass block 313 can be found in the embodiments related to mass block 311. Specific embodiments of mass block 314 can be found in the embodiments related to mass block 312.

[0134] exist Figure 3 In the illustrated embodiment, a mass block notch 3115 may be provided on the side of mass block 311 near mass blocks 312 and 314, and a mass block notch 3135 may be provided on the side of mass block 313 near mass blocks 312 and 314. The mass block notches 3115 and 3135 may be symmetrical about the axis of symmetry x. Mass blocks 312 and 314 can be accommodated within the mass block notches 3115 and 3135, which helps to increase the usable detection area of ​​mass blocks 311 and 313 and helps to reduce the overall size of the angular velocity sensor.

[0135] In this application, differential decoupling can refer to the fact that component A and component B are symmetrical, and the motion modes of component A and component B are differential motions. The differential motion of the symmetrical structure can help eliminate common-mode effects, thereby reducing the influence between component A and component B.

[0136] The mechanical structure layer 300 may further include an anchor region 321 and an elastic connector 331. In this application, the anchor region 321 may belong to the stator of the mechanical structure layer 300. The anchor region 321 may be located on the axis of symmetry x. Figure 3 In the illustrated embodiment, the anchor region 321 itself can be symmetrical with respect to the axis of symmetry x. An elastic connector 331 can be connected between the anchor region 321 and the mass block 311. In this application, the anchor region can, for example, be fixed to... Figure 2 On the substrate layer shown.

[0137] In this application, "connection" can include direct connection and indirect connection. A direct connection between component a and component b means that the connection from component a to component b does not include other components. An indirect connection between component a and component b means that the connection from component a to component b may include one or more other components, such as component c. That is, component a and component b can be connected through one or more components (which may include component c).

[0138] The elastic connector 331 can be used to support the mass block 311 so that the mass block 311 is suspended in the air. Figure 2 The substrate layer and the capping layer are shown. That is, the elastic connector 331 can be used to provide levitation support for the mass block 311 along the Z-axis direction. In some embodiments, the stiffness of the elastic connector 331 in the Z-axis direction can be relatively large.

[0139] The elastic connector 331 can also be used to provide buffer space in the X-axis and Y-axis directions between the mass block 311 and the anchor area 321. That is, the stiffness of the elastic connector 331 in the X-axis and Y-axis directions can be relatively small, or the elastic connector 331 can be elastic in the X-axis and Y-axis directions. The stiffness of the elastic connector 331 in the Z-axis direction can be greater than the stiffness of the elastic connector 331 in the X-axis direction or the stiffness in the Y-axis direction.

[0140] In some embodiments provided in this application, the elastic connector 331 may include connecting beams 3311 and 3312. Since the mass block 311 is used to detect angular velocities in the X-axis and Z-axis directions, it can have a displacement component in the Y-axis direction when not subjected to external force. That is, the driving direction of the mass block 311 can be the Y-axis direction, and the detection direction of the mass block 311 can be the X-axis and Z-axis directions. Therefore, one of the connecting beams 3311 and 3312 can be perpendicular to the driving direction of the mass block 311, and the other of the connecting beams 3311 and 3312 can be perpendicular to the detection direction of the mass block 311.

[0141] exist Figure 3In one embodiment shown, the connecting beam 3311 can be arranged parallel to the Y-axis direction so that the connecting beam 3311 can be arranged perpendicular to the detection direction of the mass block 311; the connecting beam 3312 can be arranged parallel to the X-axis direction so that the connecting beam 3311 can be arranged perpendicular to the driving direction of the mass block 311.

[0142] The stiffness of the connecting beam 3311 in the Y-axis and Z-axis directions can be relatively large. The stiffness of the connecting beam 3311 in the X-axis direction can be relatively small, or the connecting beam 3311 can be elastic in the X-axis direction so that the elastic connector 331 can provide a buffer space in the X-axis direction through the connecting beam 3311.

[0143] The stiffness of the connecting beam 3312 in the X-axis and Z-axis directions can be relatively large. The stiffness of the connecting beam 3312 in the Y-axis direction can be relatively small, or the connecting beam 3312 can be elastic in the Y-axis direction so that the elastic connector 331 can provide a buffer space in the Y-axis direction through the connecting beam 3312.

[0144] Based on the symmetry of the mechanical structure layer 300, the mechanical structure layer 300 may further include elastic connectors 332. Elastic connectors 331 and 332 may be symmetrical about the axis of symmetry x. Elastic connectors 331 and 332 may be located at opposite ends of the anchor region 321. Elastic connector 332 may connect the mass block 313 and the anchor region 321. Elastic connector 332 may be used to support the mass block 313, allowing the mass block 313 to suspend. Figure 2 The substrate layer and the cover layer are shown. That is, the elastic connector 332 can be used to provide levitation support for the mass block 313 along the Z-axis.

[0145] The elastic connector 332 can be used to support the mass block 313 so that the mass block 313 is suspended in the air. Figure 2 The substrate layer and the capping layer are shown. That is, the elastic connector 332 can be used to provide levitation support for the mass block 313 along the Z-axis direction. In some embodiments, the stiffness of the elastic connector 332 in the Z-axis direction can be relatively large.

[0146] The elastic connector 332 can also be used to provide buffer space in the X-axis and Y-axis directions between the mass block 313 and the anchor area 321. That is, the elastic connector 332 can have relatively low stiffness in the X-axis and Y-axis directions, or the elastic connector 332 can be elastic in the X-axis and Y-axis directions.

[0147] Since mass blocks 311 and 313 can be symmetrical with respect to the axis of symmetry x, specific embodiments of the elastic connector 332 can be referred to with respect to embodiments of the elastic connector 331.

[0148] To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an anchor zone 322, an elastic connector 333, and an elastic connector 334. Anchor zones 321 and 322 may be symmetrical with respect to the torsion beam y. Elastic connectors 333 and 331 may be symmetrical with respect to the torsion beam y. Elastic connectors 334 and 332 may be symmetrical with respect to the torsion beam y. Specific embodiments of the anchor zone 322 can be found in the embodiments relating to the anchor zone 321. Specific embodiments of the elastic connector 333 can be found in the embodiments relating to the elastic connector 331. Specific embodiments of the elastic connector 334 can be found in the embodiments relating to the elastic connector 332.

[0149] The mechanical structure layer 300 may further include an anchor zone 323, a torsion beam 341, and a transmission beam 351. The anchor zone 323 may be located on the axis of symmetry x. Figure 3 In the illustrated embodiment, the anchor region 323 may be symmetrical with respect to the axis of symmetry x. The torsion beam 341 may be connected to the anchor region 323. The torsion beam 341 may be symmetrical with respect to the axis of symmetry x. The end of the torsion beam 341 furthest from the anchor region 323 may be connected to the transmission beam 351. The transmission beam 351 may be symmetrical with respect to the axis of symmetry x. The position where the transmission beam 351 connects to the torsion beam 341 may correspond to the central region of the transmission beam 351.

[0150] The torsion beam 341 and transmission beam 351 can be used to provide suspension support for the mass block 311 along the Z-axis. As described above, one end of the mass block 311 can be supported by the anchor area 321 and the elastic connector 331, while the other end can be supported by the anchor area 323, the torsion beam 341, and the transmission beam 351. The stiffness of the torsion beam 341 and transmission beam 351 in the Z-axis direction can be relatively large.

[0151] The drive beam 351 can be used to torsion about the torsion beam 341, thereby providing a buffer space along the Z-axis for the mass blocks 311 and 313. In one embodiment, the torsion beam 341 can provide torsional stiffness to the drive beam 351 along the torsion beam 341 or along the X-axis.

[0152] To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an anchor region 324, a torsion beam 342, and a transmission beam 352. Anchor regions 323 and 324 may be symmetrical about the axis of symmetry y. Torsion beams 342 and 341 may be symmetrical about the axis of symmetry y. Transmission beams 352 and 351 may be symmetrical about the axis of symmetry y. Specific embodiments of anchor region 324 can be found in embodiments relating to anchor region 323. Specific embodiments of torsion beam 342 can be found in embodiments relating to torsion beam 341. Specific embodiments of transmission beam 352 can be found in embodiments relating to transmission beam 351. In some embodiments, anchor region 323 may be integrally formed with anchor region 321. Similarly, anchor region 324 may be integrally formed with anchor region 322.

[0153] In some embodiments, the mechanical structure layer 300 may further include an elastic connector 335. The elastic connector 335 may connect the transmission beam 351 and the mass block 311. The elastic connector 335 may be used to provide suspension support for the mass block 311 along the Z-axis direction. The stiffness of the elastic connector 335 in the Z-axis direction may be relatively large.

[0154] At least one of the transmission beam 351 and the elastic connector 335 may have relatively low stiffness or be elastic in the X-axis direction, thereby providing a buffer space for mass blocks 311 and 313 in the X-axis direction. In one embodiment provided in this application, the transmission beam 351 may have relatively low stiffness or be elastic in the X-axis direction. In one possible case, the torsion beam 341 may provide torsional stiffness of the transmission beam 351 in the Z-axis direction. In one embodiment, the elastic connectors 335 and 336 may have relatively high stiffness in the X-axis direction.

[0155] At least one of the transmission beam 351 and the elastic connector 335 may have relatively low stiffness or be elastic in the Y-axis direction, thereby providing a buffer space for the mass blocks 311 and 313 along the Y-axis direction. In one embodiment provided in this application, the elastic connector 335 may have relatively low stiffness or be elastic in the Y-axis direction. In one possible case, the stiffness of the transmission beam 351 in the Y-axis direction may be greater than the stiffness of the elastic connector 335 in the Y-axis direction, thereby the transmission beam 351 can provide the elastic connector 335 with torsional stiffness along the Y-axis direction or the transmission beam 351.

[0156] In some embodiments provided in this application, the overall stiffness of the elastic connector 335 may be less than the overall stiffness of the transmission beam 351, and the overall stiffness of the transmission beam 351 may be less than the overall stiffness of the torsion beam 341.

[0157] Based on the symmetry of the mechanical structure layer 300, the mechanical structure layer 300 may further include an elastic connector 336. Elastic connectors 335 and 336 can be connected to both ends of the transmission beam 351, respectively. That is, the transmission beam 351 can be connected between elastic connectors 335 and 336. The end of the elastic connector 336 furthest from the transmission beam 351 can be connected to the mass block 313. Elastic connectors 335 and 336 can be symmetrical with respect to the axis of symmetry x. Since the mass blocks 311 and 313 can be symmetrical with respect to the axis of symmetry x, specific embodiments of the elastic connector 336 can refer to embodiments of the elastic connector 335.

[0158] To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include elastic connectors 337 and 338. Elastic connectors 337 and 335 may be symmetrical about the axis of symmetry y. Elastic connectors 338 and 336 may also be symmetrical about the axis of symmetry y. Specific embodiments of elastic connector 337 can be found in embodiments relating to elastic connector 335. Specific embodiments of elastic connector 338 can be found in embodiments relating to elastic connector 336.

[0159] exist Figure 3 In the illustrated embodiment, to improve the stability of the mass block 311 suspended on the substrate, positions 1 on the mass block 311 connected to anchor region 321, positions 2 on the mass block 311 connected to anchor region 322, and positions 3 on the mass block 311 connected to anchor region 323 are not collinear; or, positions 1 on the mass block 311 connected to anchor region 321, positions 3 on the mass block 311 connected to anchor region 323, and positions 4 on the mass block 311 connected to anchor region 324 are not collinear.

[0160] like Figure 3 As shown, mass block 311 and anchor area 321 are connected by elastic connector 331. Position 1 on mass block 311, where it connects to anchor area 321, is the portion where elastic connector 331 and mass block 311 are connected. Mass block 311 and anchor area 322 are connected by elastic connector 333. Position 2 on mass block 311, where it connects to anchor area 322, is the portion where elastic connector 333 and mass block 311 are connected. Mass block 311 and anchor area 323 are connected by elastic connector 335. Position 3 on mass block 311, where it connects to anchor area 323, is the portion where elastic connector 335 and mass block 311 are connected. Therefore, positions 1, 2, and 3 can be non-collinear.

[0161] like Figure 3As shown, mass block 311 and anchor area 321 are connected by elastic connector 331. Position 1 on mass block 311, where it connects to anchor area 321, is the portion where elastic connector 331 and mass block 311 are connected. Mass block 311 and anchor area 323 are connected by elastic connector 335. Position 3 on mass block 311, where it connects to anchor area 323, is the portion where elastic connector 335 and mass block 311 are connected. Mass block 311 and anchor area 324 are connected by elastic connector 337. Position 4 on mass block 311, where it connects to anchor area 324, is the portion where elastic connector 337 and mass block 311 are connected. Therefore, positions 1, 3, and 4 can be non-collinear.

[0162] The mechanical structure layer 300 may further include anchorage 325, torsion beam 343, and torsion beam 344. Anchorage 325 is located on both the x-axis and y-axis of symmetry. That is, anchorage 325 can cover the intersection of the x-axis and y-axis of symmetry. Anchorage 325 can be located at the intersection of the x-axis and y-axis of symmetry. Figure 3 In the illustrated embodiment, the anchor region 325 may be symmetrical with respect to the axes of symmetry x and y. Torsion beams 343 and 344 may be connected to the two ends of the anchor region 325, respectively. Torsion beams 343 and 344 may be symmetrical with respect to the axis of symmetry y. Torsion beams 343 and 344 may be symmetrical with respect to the axis of symmetry x.

[0163] The mechanical structure layer 300 may further include a support member 360. The support member 360 may be symmetrical with respect to the axes of symmetry x and y. The support member 360 may have a support member opening 361. The support member opening 361 may surround the outer periphery of the anchor region 325. The support member opening 361 may be symmetrical with respect to the axes of symmetry x and y. That is, the support member opening 361 may be located in the central region of the support member 360. The inner wall of the support member opening 361 may be connected to torsion beams 343 and 344. That is, the end of torsion beam 343 away from the anchor region 325 may be connected to a first position on the inner wall of the support member opening 361. The end of torsion beam 344 away from the anchor region 325 may be connected to a second position on the inner wall of the support member opening 361. The first and second positions may be symmetrical with respect to the axis of symmetry x. The first and second positions are located on the axis of symmetry y.

[0164] The support member 360 may include a support end 362, which may be disposed close to and connected to the mass block 312. The support member 360, torsion beam 343, and torsion beam 344 can be used to support the mass block 312, allowing the mass blocks 312 and 314 to suspend themselves. Figure 2The substrate layer and the cover layer are shown. That is, the support 360, torsion beam 343, and torsion beam 344 can be used to provide suspension support for the mass blocks 312 and 314 along the Z-axis direction. In some embodiments, the stiffness of the support 360, torsion beam 343, and torsion beam 344 in the Z-axis direction can be relatively large.

[0165] The stiffness of the support member 360, torsion beam 343, and torsion beam 344 in the Y-axis direction can be relatively large, so that the support member 360, torsion beam 343, and torsion beam 344 can provide support force along the Y-axis direction for the mass block 312 to reduce the displacement component of the mass block 312 in the Y-axis direction.

[0166] Support member 360 can rotate about torsion beams 343 and 344. Support member 360 can be used to absorb displacement components in the Z-axis direction to reduce the amount of deformation of anchor region 325 under the traction of mass block 312. In some embodiments, torsion beams 343 and 344 can provide torsional stiffness of support member 360 in the Y-axis direction or along torsion beams 343 and 344.

[0167] Based on the symmetry of the mechanical structure layer 300, the support member 360 may further include a support end 363. The support ends 362 and 363 may be symmetrical with respect to the axis of symmetry y. The support end 363 may be positioned close to and connected to the mass block 314. The support member 360, torsion beam 343, and torsion beam 344 may also be used to support the mass block 314, allowing the mass block 314 to suspend. Figure 2 The substrate layer and the capping layer are shown. Support 360, torsion beam 343, and torsion beam 344 can also be used to provide support force along the Y-axis for mass 314 to reduce the displacement component of mass 314 in the Y-axis direction. Since mass 312 and mass 314 can be symmetrical about the symmetry axis y, specific embodiments of support end 363 can be referred to with respect to embodiments of support end 361.

[0168] In some embodiments provided in this application, the mechanical structure layer 300 may further include an elastic connector 339. The elastic connector 339 may be symmetrical about the axis of symmetry x. The elastic connector 339 may be connected between the support end 362 of the support member 360 and the mass block 312. That is, the support member 360 and the mass block 312 may be connected by the elastic connector 339.

[0169] exist Figure 3In the illustrated embodiment, the mass block 312 may include a mass block notch 3121. The mass block notch 3121 itself may be symmetrical with respect to the axis of symmetry x. The elastic connector 339 may span the mass block notch 3121, that is, one end of the elastic connector 339 may be connected to position a of the mass block notch 3121, and the other end of the elastic connector 339 may be connected to position b of the mass block notch 3121, wherein positions a and b may be arranged relative to each other, and positions a and b may be symmetrical with respect to the axis of symmetry x.

[0170] The elastic connector 339 can be used to support the mass block 312 so that the mass block 312 can be suspended in the air. Figure 2 The substrate layer and the capping layer are shown. That is, the elastic connector 339 can be used to provide levitation support for the mass block 312 along the Z-axis direction. In some embodiments, the stiffness of the elastic connector 339 in the Z-axis direction can be relatively large.

[0171] The elastic connector 339 can also be used to provide a buffer space for the mass block 312 in the X-axis direction. That is, the stiffness of the elastic connector 339 in the X-axis direction can be relatively small, or the elastic connector 339 can be elastic in the X-axis direction. In one embodiment, the stiffness of the elastic connector 339 in the X-axis direction can be less than the stiffness of the support member 360 in the X-axis direction.

[0172] In some embodiments, the stiffness of the elastic connector 339 in the Y-axis direction can be relatively large, which is beneficial to improving the support effect of the anchor area 325 on the mass blocks 312 and 314 in the Y-axis direction, reducing the displacement of the mass blocks 312 and 314 in the Y-axis direction, and reducing the influence of the angular velocity component of the mass blocks 312 and 314 about the X-axis direction.

[0173] Based on the symmetry of the mechanical structure layer 300, the mechanical structure layer 300 may further include an elastic connector 3310. The elastic connector 3310 itself may be symmetrical about the axis of symmetry x. The elastic connectors 339 and 3310 may be symmetrical about the axis of symmetry y. The elastic connector 3310 may be connected between the support end 363 of the support member 360 and the mass block 314. That is, the support member 360 and the mass block 314 can be connected via the elastic connector 3310.

[0174] exist Figure 3 In the illustrated embodiment, mass block 314 may include mass block notch 3141. Mass block notch 3141 itself may be symmetrical with respect to the axis of symmetry x. Mass block notch 3121 and mass block notch 3141 may be symmetrical with respect to the axis of symmetry y. Resilient connector 3310 may span mass block notch 3141 and be connected to mass block 314.

[0175] Since mass blocks 312 and 314 are symmetrical about the axis of symmetry y, specific embodiments of the elastic connector 3310 can be referred to with respect to embodiments of the elastic connector 339.

[0176] The mechanical structure layer 300 may further include an anchor region 326 and a driving element 371. The anchor region 326 may be symmetrical about the symmetry axis y. The driving element 371 may also be symmetrical about the symmetry axis y. The driving element 371 may be a mover within the mechanical structure layer 300. The driving element 371 is capable of moving relative to the anchor region 326 along the Y-axis direction; that is, the driving element 371 may have a displacement component along the Y-axis direction relative to the anchor region 326. A driving electrode may be provided on the anchor region 326, and the driving electrode may form a capacitor with the driving element 371, enabling the driving element 371 to move relative to the anchor region 326 along the Y-axis direction.

[0177] In this application, a component may have a displacement component in at least one of the X-axis, Y-axis, and Z-axis directions. The displacement component along the X-axis can be the projection of the component's displacement onto the X-axis. The displacement component along the Y-axis can be the projection of the component's displacement onto the Y-axis. The displacement component along the Z-axis can be the projection of the component's displacement onto the Z-axis. The displacement of the component can be the vector sum of its displacement components in the X-axis, Y-axis, and Z-axis directions. When the component has a displacement component only in the X-axis direction, the component can move along the X-axis. When the component has a displacement component only in the Y-axis direction, the component can move along the Y-axis. When the component has a displacement component only in the Z-axis direction, the component can move along the Z-axis.

[0178] In one embodiment, the mechanical structure layer 300 may further include fixed comb teeth 3261 and movable comb teeth 3711. The fixed comb teeth 3261 may be fixed to the anchor area 326. The movable comb teeth 3711 may be fixed to the drive member 371. The fixed comb teeth 3261 and the movable comb teeth 3711 may be arranged at alternating intervals.

[0179] In this application, the fixed comb teeth can belong to the stator of the mechanical structure layer 300, and the movable comb teeth can belong to the mover of the mechanical structure layer 300. The fixed comb teeth can include multiple fixed teeth, and the movable comb teeth can include multiple movable teeth. The staggered arrangement of the fixed and movable comb teeth can mean that there is a movable tooth between two adjacent fixed teeth, a fixed tooth between two adjacent movable teeth, and the adjacent fixed teeth and movable teeth are spaced apart.

[0180] By inputting alternating current to the drive member 371 and the anchor area 326, the interaction force between the movable comb teeth 3711 and the fixed comb teeth 3261 can drive the movable comb teeth 3711 to move relative to the fixed comb teeth 3261 along the Y-axis, thereby allowing the drive member 371 to have a displacement component along the Y-axis relative to the anchor area 326. The drive member 371 can be connected to the mass block 311 in the anchor area 326, so that the mass block 311 can have a displacement component along the Y-axis under the drive of the drive member 371. When the mass block 311 is not subjected to external force, the mass block 311 can move along the Y-axis.

[0181] To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include an anchor region 327 and a driving member 372. Anchor regions 327 and 326 may be symmetrical with respect to the axis of symmetry x. Driving members 372 and 371 may be symmetrical with respect to the axis of symmetry x. Driving member 372 may move relative to the anchor region 327 along the Y-axis. The direction of movement of driving member 372 and driving member 371 may be symmetrical. Driving member 372 may be connected between the anchor region 327 and the mass block 313, so that the mass block 313 may have a displacement component along the Y-axis under the drive of driving member 372. Driving members 371 and 372 may satisfy differential decoupling conditions, therefore, when not subjected to external force, the direction of movement of mass block 313 and the direction of movement of mass block 311 may be symmetrical. Specific embodiments of driving member 372 can be found in embodiments relating to driving member 371. Specific embodiments of anchor region 327 can be found in embodiments relating to anchor region 326.

[0182] Figure 5 A schematic structural diagram showing the movement of mass blocks 311 and 313 along the Y-axis is shown. Figure 5 The dashed line indicates the positions of mass blocks 311 and 313 before they were moved. Figure 5 The solid line in the middle shows the positions of mass blocks 311 and 313 after they have been moved.

[0183] exist Figure 3 In the illustrated embodiment, the mass block 311 may include a mass block window 3111. The mass block window 3111 may surround the outer periphery of the anchor region 326. The inner wall of the mass block window 3111 may be connected to the drive member 371. That is, the anchor region 326 and the drive member 371 are located within the mass block window 3111. The mass block window 3111 itself may be symmetrical with respect to the axis of symmetry y.

[0184] exist Figure 3In the illustrated embodiment, mass block 313 may include a mass block window 3131. The mass block window 3131 may surround the outer periphery of anchor region 327. The inner wall of the mass block window 3131 may be connected to drive member 372. That is, anchor region 327 and drive member 372 are located within mass block window 3131. Mass block window 3131 itself may be symmetrical with respect to axis of symmetry y. Mass block window 3131 and mass block window 3111 may be symmetrical with respect to axis of symmetry x.

[0185] exist Figure 3 In the illustrated embodiment, mass block 311 can be a separate component. Mass block 311 can have a receiving area (which can be a mass block notch 3115). The receiving area can be located on the side of mass block 311 away from the drive member 372. Mass blocks 312 and 314 can be disposed within the receiving area. Providing a receiving area on the side of mass block 311 away from the drive member 372 facilitates the deflection of mass block 311 relative to the side of mass block 311 near the drive member 372 about the X-axis. The displacement component of mass block 311 in the Z-axis direction on the side near the drive member 372 is relatively small, while the displacement component of mass block 311 in the Z-axis direction on the side away from the drive member 372 is relatively large. Therefore, it is beneficial to reduce the displacement components of mass blocks 312 and 314 in the Z-axis direction under the traction of mass block 311.

[0186] In other possible embodiments, the mass block 311 may also be assembled from multiple components. For example, the mass block 311 may include separately arranged mass component a and mass component b, which may be symmetrical about the axis of symmetry y. Mass component a and mass component b may be connected to opposite sides of the drive component 371, respectively.

[0187] When mass block 311 is a single component, its integrity is relatively high, and its in-frequency differential performance can be better. When mass block 311 is assembled from multiple components, its overall mass can be slightly reduced, which is beneficial for increasing the motion amplitude of mass block 311 and improving the detection sensitivity of the inertial sensor. However, since multiple components need to meet the in-frequency differential requirements, the machining accuracy of mass block 311 is required to be high.

[0188] Based on the above, the first end of the mass block 311 can be supported by the anchor area 321 and the elastic connector 331; the second end of the mass block 311 can be supported by the anchor area 322 and the elastic connector 333; the third end of the mass block 311 can be supported by the anchor area 323 and the elastic connector 335; and the fourth end of the mass block 311 can be supported by the anchor area 324 and the elastic connector 337. When the mass block 311 has a displacement component along the Y-axis, the elastic connectors 331, 333, 335, and 337 can be used to provide a buffer space for the mass block 311 in the Y-axis direction to reduce the deformation of the anchor areas 321, 322, 323, and 324.

[0189] Based on the above, the first end of the mass block 313 can be supported by the anchor area 321 and the elastic connector 332; the second end of the mass block 313 can be supported by the anchor area 322 and the elastic connector 334; the third end of the mass block 313 can be supported by the anchor area 323 and the elastic connector 336; and the fourth end of the mass block 313 can be supported by the anchor area 324 and the elastic connector 337. When the mass block 313 has a displacement component along the Y-axis, the elastic connectors 332, 334, 336, and 337 can be used to provide a buffer space for the mass block 313 in the Y-axis direction to reduce the deformation of the anchor areas 321, 322, 323, and 324.

[0190] Since the elastic connectors 331 and 332 are symmetrical with respect to the axis of symmetry x, the elastic component force along the Y-axis on the elastic connector 331 and the elastic component force along the Y-axis on the elastic connector 332 can cancel each other out, which helps to reduce the deformation of the anchor area 321 in the Y-axis direction.

[0191] Since the elastic connectors 333 and 334 are symmetrical with respect to the axis of symmetry x, the elastic component force along the Y-axis of the elastic connector 333 and the elastic component force along the Y-axis of the elastic connector 334 can cancel each other out, which helps to reduce the deformation of the anchor area 322 in the Y-axis direction.

[0192] Since the elastic connectors 335 and 336 are symmetrical with respect to the axis of symmetry x, the elastic component force along the Y-axis on the elastic connector 335 and the elastic component force along the Y-axis on the elastic connector 336 can cancel each other out, which helps to reduce the deformation of the anchor zone 323 and the torsion beam 341 in the Y-axis direction.

[0193] Since the elastic connectors 337 and 338 are symmetrical with respect to the axis of symmetry x, the elastic component force along the Y-axis on the elastic connector 337 and the elastic component force along the Y-axis on the elastic connector 338 can cancel each other out, which helps to reduce the deformation of the anchor zone 324 and the torsion beam 342 in the Y-axis direction.

[0194] The mechanical structure layer 300 may further include a transmission beam assembly 381. The transmission beam assembly 381 may be symmetrical about the axis of symmetry y. The transmission beam assembly 381 may include connecting ends 3811, 3812, and 3813. Connecting ends 3812 and 3813 may be symmetrical about the axis of symmetry y.

[0195] The connector 3811 can be connected to the driver 371. Figure 3 In the illustrated embodiment, connection end 3811 can be connected to drive member 371 via mass block 311. Connection end 3812 can be connected to mass block 312. Connection end 3813 can be connected to mass block 314. The transmission beam assembly 381 can transmit translational driving force between drive member 371 and mass block 312, and between drive member 371 and mass block 314, so that mass blocks 312 and 314 reciprocate under the drive of drive member 371. Figure 3 In the embodiment shown, since the mass block 311 is connected between the drive member 371 and the transmission beam assembly 381, the transmission beam assembly 381 can transmit translational driving force between the mass blocks 311 and 312, and between the mass blocks 311 and 314, so that the mass blocks 312 and 314 reciprocate under the drive of the mass block 311.

[0196] The transmission beam assembly 381 is also used to convert the translational driving force from the drive member 371 along the Y-axis direction into a translational driving force along the X-axis direction. Figure 6 The transmission beam assembly 381 can also be used to convert the displacement component of the connecting end 3811 along the Y-axis direction into the displacement components of the connecting ends 3812 and 3813 along the X-axis direction. That is, when the connecting end 3811 of the transmission beam assembly 381 moves along the Y-axis direction, the connecting ends 3812 and 3813 of the transmission beam assembly 381 can have displacement components along the X-axis direction, and the displacement components of the connecting ends 3812 and 3813 of the transmission beam assembly 381 can be symmetrical with respect to the axis of symmetry y. Through the transmission beam assembly 381 and transmission beam assembly 382, ​​it is beneficial to improve the decoupling degree of the mass block 311 and the mass block 312.

[0197] In some embodiments, such as Figure 6As shown, when the connecting end 3811 of the transmission beam assembly 381 moves along the Y+ direction, the connecting end 3812 of the transmission beam assembly 381 can have a displacement component along the X+ direction, and the connecting end 3813 of the transmission beam assembly 381 can have a displacement component along the X- direction, and the connecting ends 3812 and 3813 of the transmission beam assembly 381 can have the same displacement amplitude. When the connecting end 3811 of the transmission beam assembly 381 moves along the Y- direction, the connecting end 3812 of the transmission beam assembly 381 can have a displacement component along the X- direction, and the connecting end 3813 of the transmission beam assembly 381 can have a displacement component along the X+ direction, and the connecting ends 3812 and 3813 of the transmission beam assembly 381 can have the same displacement amplitude.

[0198] Mass blocks 312 and 314 can have a displacement component in the X-axis direction under the traction of the transmission beam assembly 381. That is, when the inertial sensor is not subjected to external force, mass blocks 312 and 314 can reciprocate along the X-axis direction. Figure 5 In the illustrated embodiment, when the driving member 371 has a positive displacement component along the Y-axis, the mass block 312 can have a positive displacement component along the X-axis, and the mass block 314 can have a negative displacement component along the X-axis; conversely, when the driving member 371 has a negative displacement component along the Y-axis, the mass block 312 can have a negative displacement component along the X-axis, and the mass block 314 can have a positive displacement component along the X-axis. Therefore, the movement direction of the mass block 314 and the movement direction of the mass block 312 can be symmetrical.

[0199] Combination Figure 3 and Figure 6 In the embodiment shown, the transmission beam assembly 381 may include transmission beams 381a, 381b, and 381c.

[0200] The transmission beam 381a can be symmetrical about the axis of symmetry y. In one embodiment, such as Figure 6As shown, the transmission beam 381a can be a straight beam. The transmission beam 381a can also have other shapes, such as a trapezoidal beam. One end of the transmission beam 381a can be connected to the driving member 371 or the mass block 311, and the other end of the transmission beam 381a can be connected to transmission beams 381b and 381c. That is, transmission beams 381b and 381c can converge at the end of the transmission beam 381a away from the driving member 371 or the mass block 311. In one embodiment, the end of the transmission beam 381a connected to the driving member 371 or the mass block 311 can correspond to the connecting end 3811 of the transmission beam assembly 381, the end of the transmission beam 381b away from the transmission beam 381a can correspond to the connecting end 3812 of the transmission beam assembly 381, and the end of the transmission beam 381c away from the transmission beam 381a can correspond to the connecting end 3813 of the transmission beam assembly 381.

[0201] Transmission beams 381b and 381c can be symmetrical about the axis of symmetry y. Transmission beam 381b may include one or more transmission segments 3811b that are inclined or perpendicular to transmission beam 381a. Transmission beam 381c may include one or more transmission segments 3811c that are inclined or perpendicular to transmission beam 381a. One or more transmission segments 3811b can be symmetrical with respect to the axis of symmetry y, such that transmission beams 381b and 381c are symmetrical about the axis of symmetry as a whole. That is, one or more transmission segments 3811b can correspond one-to-one with one or more transmission segments 3811c, and the corresponding transmission segments 3811b and 3811c can be symmetrical about the axis of symmetry y.

[0202] In some embodiments, the transmission beam 381b may further include one or more connecting segments 3812b. The connecting segments 3812b may be arranged parallel to the transmission beam 381a and connected between two adjacent transmission segments 3811b. The transmission beam 381c may further include connecting segments 3812c, which may be arranged parallel to the transmission beam 381a and connected between two adjacent transmission segments 3811c. One or more connecting segments 3812b may be symmetrical with respect to the axis of symmetry y, such that the transmission beam 381b and the transmission beam 381c are symmetrical about the axis of symmetry y as a whole. That is, one or more connecting segments 3812b may correspond one-to-one with one or more connecting segments 3812c, and the corresponding connecting segments 3812b and 3812c may be symmetrical about the axis of symmetry y.

[0203] exist Figure 6In the illustrated embodiment, the transmission beam 381b may include transmission segments 3811b1, 3811b2, and a connecting segment 3812b. Transmission segments 3811b1 and 3811b2 may be arranged perpendicularly to the transmission beam 381a, and the connecting segment 3812b connects between transmission segments 3811b1 and 3811b2. The transmission beam 381c may include transmission segments 3811c1, 3811c2, and a connecting segment 3812c. Transmission segments 3811c1 and 3811c2 may be arranged perpendicularly to the transmission beam 381a, and the connecting segment 3812c connects between transmission segments 3811c1 and 3811c2. Among them, transmission segment 3811b1 can be symmetrical with transmission segment 3811c1 about the axis of symmetry y; transmission segment 3811b2 can be symmetrical with transmission segment 3811c2 about the axis of symmetry y; and connecting segment 3812b can be symmetrical with connecting segment 3812c about the axis of symmetry y.

[0204] When the transmission beam 381a has a displacement component along its extension direction, since the transmission beams 381b and 381c include portions with extension directions different from those of the transmission beam 381a, the transmission beams 381b and 381c can be pulled by the transmission beam 381a. The end of the transmission beam 381b away from the transmission beam 381a, and the end of the transmission beam 381c away from the transmission beam 381a, can have displacement components along a direction perpendicular to the extension direction of the transmission beam 381a. Therefore, the transmission beam assembly 381 can have a steering function.

[0205] To improve the detection accuracy of the mechanical structure layer 300, the mechanical structure layer 300 may further include a transmission beam assembly 382. The transmission beam assembly 382 may be symmetrical to the transmission beam assembly 381 with respect to the axis of symmetry x. The transmission beam assembly 382 may include connecting ends 3821, 3822, and 3823. Connecting ends 3822 and 3823 may be symmetrical with respect to the axis of symmetry y. Connecting ends 3821 and 3811 may be symmetrical with respect to the axis of symmetry x. Connecting ends 3822 and 3812 may be symmetrical with respect to the axis of symmetry x. Connecting ends 3823 and 3813 may be symmetrical with respect to the axis of symmetry x.

[0206] The connector 3821 can be connected to the driver 372. Figure 3In the illustrated embodiment, connection end 3821 can be connected to drive member 372 via mass block 313. Connection end 3822 can be connected to mass block 312. Connection end 3823 can be connected to mass block 314. The transmission beam assembly 382 can transmit translational driving force between drive member 372 and mass block 312, and between drive member 372 and mass block 314, so that mass blocks 312 and 314 reciprocate along the X-axis direction under the drive of drive member 372. Specific embodiments of transmission beam assembly 382 can be found in embodiments relating to transmission beam assembly 381.

[0207] Figure 5 A schematic structural diagram showing the movement of mass blocks 312 and 314 along the X-axis is shown. Figure 5 The dashed line indicates the positions of mass blocks 312 and 314 before they were moved. Figure 5 The solid lines indicate the positions of mass blocks 312 and 314 after they have been moved. Figure 5 As shown, through the transmission beam assembly 381, mass blocks 312 and 314 can have displacement components along the X-axis direction under the traction of the driving member 371. Through the transmission beam assembly 382, ​​mass blocks 312 and 314 can have displacement components along the X-axis direction under the traction of the driving member 372.

[0208] In conjunction with the above, the first end of mass block 312 can be supported by mass block 311 and transmission beam assembly 381; the second end of mass block 312 can be supported by mass block 313 and transmission beam assembly 382; and the third end of mass block 312 can be supported by anchor area 325, torsion beam 343, torsion beam 344, and support member 360 (in one possible embodiment, also including elastic connector 339). Figure 5 As shown, when the mass block 312 has a displacement component along the X-axis, the elastic connector 339 can be used to provide a buffer space for the mass block 312 in the X-axis direction to reduce the deformation of the anchor area 325.

[0209] In conjunction with the above, the first end of mass block 314 can be supported by mass block 311 and transmission beam assembly 381; the second end of mass block 314 can be supported by mass block 313 and transmission beam assembly 382; and the third end of mass block 314 can be supported by anchor area 325, torsion beam 343, torsion beam 344, and support member 360 (in one possible embodiment, also including elastic connector 3310). Figure 5 As shown, when the mass block 314 has a displacement component along the X-axis, the elastic connector 3310 can be used to provide a buffer space for the mass block 314 in the X-axis direction to reduce the deformation of the anchor area 325.

[0210] Since the transmission beam assembly 381 and the transmission beam assembly 382 are symmetrical with respect to the axis of symmetry x, the elastic component force along the Y-axis of the transmission beam assembly 381 and the elastic component force along the Y-axis of the transmission beam assembly 382 can cancel each other out, which helps to reduce the deformation of the mass block 312, mass block 314, anchor area 322, support member 360, torsion beam 343, and torsion beam 344 in the Y-axis direction.

[0211] Since the elastic connectors 339 and 3310 are symmetrical with respect to the axis of symmetry y, the elastic component force along the X-axis on the elastic connector 339 and the elastic component force along the X-axis on the elastic connector 3310 can cancel each other out, which helps to reduce the deformation of the anchor area 325 in the X-axis direction.

[0212] In one possible embodiment, the displacement components of the drive element 371 in the X-axis and Z-axis directions can be relatively small or even negligible. For example, the drive element 371 can be carried or supported by a substrate or anchor region 32 and is limited to movement along the Y-axis. Since the displacement component of the mass block 311 in the Z-axis direction does not affect the drive element 371, the drive element 371 and the mass block 311 can satisfy the principle decoupling condition. Principle decoupling means that components A and B are not independently arranged; component A detects capacitance changes in the axis a, while component B does not move on axis a, or the amount of movement of component B on axis a is negligible. That is, the resonance of component B will not affect the detection of component A. The principle structure avoids or reduces the influence between the two components from the perspective of the detection principle.

[0213] In another possible embodiment, during the rotation of the mechanical structure layer 300, the drive member 371 may have displacement components in the X-axis and / or Z-axis directions. For example, under the traction of the mass block 311, the drive member 371 may have displacement components along the X-axis and / or Z-axis directions; or, the drive member 371 may also traction the mass block 311, causing the mass block 311 to have displacement components along the X-axis and / or Z-axis directions. Since the mechanical structure layer 300 includes mass blocks 313 and 311 that satisfy differential decoupling conditions, the detection accuracy of the inertial sensor can be relatively high even if the drive member 371 has displacement components in the X-axis and / or Z-axis directions.

[0214] When the driving component 371 has a displacement component along the X-axis, the transmission beam assembly 381 may, under the traction of the driving component 371, have a partial or overall displacement component along the X-axis, thereby tractioning the mass blocks 312 and 314 to have displacement components along the X-axis. Since the detection direction of the mass blocks 312 and 314 is the Z-axis direction, the driving component 371 and the mass block 312 (or mass block 314) can satisfy the principle decoupling condition.

[0215] When the driving component 371 has a displacement component along the Z-axis, the transmission beam assembly 381 may, under the traction of the driving component 371, have a partial or overall displacement component along the Z-axis, thereby tractioning the mass blocks 312 and 314 to have displacement components along the Z-axis. Since the mass blocks 312 and 314 are symmetrical about the y-axis, and the mass blocks 312 and 314 themselves can be symmetrical about the x-axis, by combining the differential decoupling principle, even if the driving component 371 has a displacement component in the Z-axis direction, the detection accuracy of the inertial sensor can still be relatively high.

[0216] Figure 7 The distribution of the detection electrodes on the substrate is shown. A capacitor is formed between the detection electrodes and the mass block to capture the displacement component of the mass block.

[0217] The mechanical structure layer 300 may further include an anchor region 328. A detection electrode assembly 391 is disposed on the anchor region 328. The detection electrode assembly 391 may be disposed opposite to the mass block 311, so that the detection electrode assembly 391 and the mass block 311 can form a capacitor group 1. The detection electrode assembly 391 and the mass block 311 may be arranged along the X-axis direction.

[0218] exist Figure 7 In the illustrated embodiment, a fixed comb tooth may be fixed to the anchor area 328. Combined with Figure 3 In the illustrated embodiment, movable comb teeth can be fixed on the mass block 311. Fixed and movable comb teeth are arranged at alternating intervals. The fixed and movable comb teeth can be arranged along the X-axis direction. Each fixed tooth of the fixed comb tooth is provided with a detection electrode, and all the detection electrodes on the fixed comb tooth can constitute a detection electrode group 391. Each movable tooth of the movable comb tooth can form a capacitor with the facing detection electrode, and the entire capacitor formed by the movable comb tooth and the detection electrode group 391 can constitute a capacitor group 1. By detecting the change in capacitance of the capacitor group 1, the angular velocity component of the mass block 311 around the Z-axis can be determined. The inertial sensor may include a readout circuit 1, which can be used to acquire the change in capacitance of the capacitor group 1 and output an angular velocity signal that indicates the angular velocity component of the mass block 311 around the X-axis.

[0219] In one embodiment, such as Figure 7 As shown, the mass block 311 may include a mass block window 3113, which may surround the anchor area 328 and the outer periphery of the fixed comb teeth. The movable comb teeth 3114 may be connected to the inner wall of the mass block window 3113 and extend into the gap formed by the fixed comb teeth through the inner wall of the mass block window 3113.

[0220] The mechanical structure layer 300 may further include an anchor region 329. A detection electrode assembly 392 is disposed on the anchor region 329. The detection electrode assembly 392 may be disposed opposite to the mass block 313, so that the detection electrode assembly 392 and the mass block 313 can form a capacitor group 2. The detection electrode assembly 392 and the mass block 313 may be arranged along the X-axis direction.

[0221] exist Figure 7 In the illustrated embodiment, a fixed comb tooth can be fixed to the anchor area 329. Combined with Figure 3 In the illustrated embodiment, movable comb teeth can be fixed on the mass block 313. Fixed and movable comb teeth are arranged at intervals. The fixed and movable comb teeth can be arranged along the X-axis. Each fixed tooth of the fixed comb tooth is provided with a detection electrode, and all the detection electrodes on the fixed comb tooth can constitute a detection electrode group 392. Each movable tooth of the movable comb tooth can form a capacitor with the facing detection electrode, and all the capacitors formed by the movable comb tooth and the detection electrode group 392 can constitute a capacitor group 2. By detecting the change in capacitance of the capacitor group 2, the angular velocity component of the mass block 313 around the Z-axis can be determined. The inertial sensor may include a readout circuit 2, which can be used to acquire the change in capacitance of the capacitor group 2 and output an angular velocity signal that indicates the angular velocity component of the mass block 313 around the Z-axis.

[0222] In one embodiment, such as Figure 7 As shown, the mass block 313 may include a mass block window 3133, which may surround the anchor area 329 and the outer periphery of the fixed comb teeth. The movable comb teeth may be connected to the inner wall of the mass block window 3133 and extend into the gap formed by the fixed comb teeth through the inner wall of the mass block window 3133.

[0223] To improve the detection accuracy of the mechanical structure layer 300, the inertial sensor 20 may further include an anchor region 3210, an anchor region 3211, a detection electrode group 393, and a detection electrode group 394. The detection electrode group 393 may be disposed on the anchor region 3210, and the detection electrode group 393 can form a capacitor group 3 with the mass block 311. The inertial sensor may include a readout circuit 3, which can be used to acquire the capacitance change of the capacitor group 3 and output an angular velocity signal, which can indicate the angular velocity component of the mass block 311 around the Z-axis. The detection electrode group 394 may be disposed on the anchor region 3211, and the detection electrode group 394 can form a capacitor group 4 with the mass block 313. The inertial sensor may include a readout circuit 4, which can be used to acquire the capacitance change of the capacitor group 4 and output an angular velocity signal, which can indicate the angular velocity component of the mass block 314 around the Z-axis. The anchor region 3210 and the anchor region 328 may be symmetrically arranged with respect to the axis of symmetry y. Anchor region 3211 can be symmetrically arranged with respect to anchor region 329 about the axis of symmetry y. Detection electrode group 393 can be symmetrically arranged with respect to detection electrode group 391 about the axis of symmetry y. Detection electrode group 394 can be symmetrically arranged with respect to detection electrode group 392 about the axis of symmetry y. Specific embodiments of anchor region 3210 can refer to embodiments of anchor region 328, specific embodiments of anchor region 3211 can refer to embodiments of anchor region 329, specific embodiments of detection electrode group 393 can refer to embodiments of detection electrode group 391, and specific embodiments of detection electrode group 394 can refer to embodiments of detection electrode group 392.

[0224] The inertial sensor 20 may also include a detection electrode assembly 395. The detection electrode assembly 395 may, for example, be located in... Figure 2 On the substrate layer shown. The detection electrode assembly 395 can be disposed opposite to the mass block 311. The detection electrode assembly 395 and the mass block 311 can be arranged along the Z-axis. The detection electrode assembly 395 itself can be symmetrical about the y-axis. Figure 7 In the illustrated embodiment, the detection electrode assembly 395 may include detection electrode 395a and detection electrode 395b. Detection electrode 395a and detection electrode 395b may be symmetrical about the axis of symmetry y.

[0225] The detection electrode assembly 395 and the mass block 311 can be arranged parallel to the XY plane, thereby forming a capacitor group 5. The capacitor group 5 may include one or more capacitors. Figure 7In the illustrated embodiment, detection electrode 395a and mass block 311 can be capacitor 5a, and detection electrode 395b and mass block 311 can be capacitor 5b. Capacitors 5a and 5b can be two capacitors in capacitor group 5. The inertial sensor may include readout circuit 5, which can be used to acquire the capacitance change of capacitor group 5 and output an angular velocity signal, which can indicate the angular velocity component of mass block 311 about the X-axis.

[0226] The inertial sensor 20 may also include a detection electrode assembly 396. The detection electrode assembly 396 may, for example, be located in... Figure 2 On the substrate layer shown. The detection electrode assembly 396 can be disposed opposite to the mass block 312. The detection electrode assembly 396 and the mass block 312 can be arranged along the Z-axis. The detection electrode assembly 396 itself can be symmetrical with respect to the symmetry axis x. Figure 7 In the illustrated embodiment, the detection electrode group 396 may include detection electrodes 396a and 396b. Detection electrodes 396a and 396b may be symmetrical about the axis of symmetry x. The inertial sensor may include a readout circuit 6, which can be used to acquire the capacitance change of the capacitor group 6 and output an angular velocity signal that indicates the angular velocity component of the mass block 312 about the Y-axis.

[0227] The detection electrode assembly 396 and the mass block 312 can be arranged parallel to the XY plane, thereby forming a capacitor group 6. The capacitor group 6 may include one or more capacitors. Figure 7 In the embodiment shown, the detection electrode 396a and the mass block 312 can be capacitor 6a, the detection electrode 396b and the mass block 312 can be capacitor 6b, and capacitor 6a and capacitor 6b can be two capacitors in capacitor group 6.

[0228] The inertial sensor 20 may also include a detection electrode assembly 397 (in Figure 7 In the illustrated embodiment, the detection electrode group 397 may include detection electrodes 397a and 397b. The detection electrode group 397 may be disposed opposite to the mass block 313, and the detection electrode group 397 and the mass block 313 may be arranged along the Z-axis direction to form a capacitor group 7. By detecting the change in capacitance of the capacitor group 7, the angular velocity component of the mass block 313 about the X-axis direction can be determined. The detection electrode group 397 may be symmetrically disposed with respect to the symmetry axis x with respect to the detection electrode group 395. Specific embodiments of the detection electrode group 397 can be found in embodiments related to the detection electrode group 395. The inertial sensor may include a readout circuit 3, which can be used to acquire the change in capacitance of the capacitor group 7 and output an angular velocity signal that indicates the angular velocity component of the mass block 313 about the X-axis direction.

[0229] The inertial sensor 20 may also include a detection electrode assembly 398 (in Figure 7 In the illustrated embodiment, the detection electrode group 398 may include detection electrodes 398a and 398b. The detection electrode group 398 may be disposed opposite to the mass block 314, and the detection electrode group 398 and the mass block 314 may be arranged along the Z-axis direction to form a capacitor group 8. By detecting the change in capacitance of the capacitor group 8, the angular velocity component of the mass block 314 about the Y-axis direction can be determined. The detection electrode group 398 may be symmetrically disposed with respect to the symmetry axis y with respect to the detection electrode group 396. Specific embodiments of the detection electrode group 398 can be found in embodiments relating to the detection electrode group 396. The inertial sensor may include a readout circuit 8, which can be used to acquire the change in capacitance of the capacitor group 8 and output an angular velocity signal indicating the angular velocity component of the mass block 314 about the Y-axis direction.

[0230] The aforementioned readout circuits 1 to 8 can be the same readout circuit or different readout circuits.

[0231] Figure 8 A schematic structural diagram is shown of an inertial sensor 20 detecting angular velocity about the X-axis. Viewed along the X+ direction. Figure 8 The inertial sensor 20 shown can obtain Figure 9 The schematic structural diagram is shown below. (Followed by...) Figure 8 , Figure 9 This paper explains the principle of detecting the angular velocity around the X-axis using mass blocks 311 and 313.

[0232] In this application, the inertial sensor 20 rotates under the action of an external force. The inertial sensor 20 can have angular velocity components around the X-axis, Y-axis, and Z-axis. The projection of the angular velocity direction of the inertial sensor 20 onto the X-axis can be the angular velocity component of the inertial sensor 20 around the X-axis. The projection of the angular velocity direction of the inertial sensor 20 onto the Y-axis can be the angular velocity component of the inertial sensor 20 around the Y-axis. The projection of the angular velocity direction of the inertial sensor 20 onto the Z-axis can be the angular velocity component of the inertial sensor 20 around the Z-axis. The vector sum of the angular velocity components of the inertial sensor 20 around the X-axis, Y-axis, and Z-axis can be the angular velocity direction of the inertial sensor 20.

[0233] Mass blocks 311 and 313 can have displacement components along the Y-axis. When the inertial sensor 20 as a whole has an angular velocity component rotating about the X-axis under the action of an external force, mass blocks 311 and 313 can be subjected to Coriolis force along the Z-axis. Mass blocks 311 and 313 can also have displacement components along the Z-axis. Therefore, the distance between mass block 311 and the detection electrode group 395 can vary, and the capacitance value of the capacitor group 5 formed by mass blocks 311 and the detection electrode group 395 can vary; the distance between mass block 313 and the detection electrode group 397 can vary, and the capacitance value of the capacitor group 7 formed by mass blocks 313 and the detection electrode group 397 can vary. The amount of change in the capacitance value of the capacitor group 5 formed by mass blocks 311 and the detection electrode group 395 can correspond to the displacement component of mass block 311 in the Z-axis direction. The amount of change in the capacitance value of the capacitor group 7 formed by mass blocks 313 and the detection electrode group 397 can correspond to the displacement component of mass block 313 in the Z-axis direction.

[0234] Combination Figure 8 , Figure 9 Assuming the driving direction of mass block 311 is Y+ and the driving direction of mass block 313 is Y-, under the action of external force, mass block 311 can have an angular velocity component rotating about the X-axis around elastic connectors 331 and 333, and mass block 313 can have an angular velocity component rotating about the X-axis around elastic connectors 332 and 334. Therefore, mass block 311 can have a displacement component along the Z+ direction, and mass block 313 can have a displacement component along the Z- direction. Mass block 311 tends to move away from the detection electrode group 395, and mass block 313 tends to move closer to the detection electrode group 397.

[0235] Since the detection results of both the detection electrode group 395 and the detection electrode group 397 include common-mode noise, combining the detection results output by the detection electrode group 395 and the detection electrode group 397 can relatively effectively remove common-mode noise, which is beneficial to improving the performance of the inertial sensor 20, such as temperature drift performance and zero drift performance.

[0236] like Figure 8 As shown, a transmission beam 351 is connected between the elastic connector 335 and the elastic connector 336. (This is in conjunction with...) Figure 9The transmission beam 351 can be connected between mass blocks 311 and 313. Since the displacement components of mass blocks 311 and 313 in the Z-axis direction are opposite, the transmission beam 351 can be used to rotate about the axis of symmetry x relative to the anchor area 323. Because the elastic connectors 335 and 336 have a buffering effect, the inclination of the transmission beam 351 can be relatively small; for example, the inclination angle of the transmission beam 351 relative to the torsion beam 341 can be smaller than the inclination angle of the elastic connector 335 relative to the torsion beam 341. The transmission beam 351 also helps to provide balancing forces for mass blocks 311 and 313 in the Z-axis direction, which helps to make the displacement components of mass blocks 311 and 313 symmetrical in the Z-axis direction.

[0237] Figure 10 A schematic structural diagram is shown of an inertial sensor 20 detecting angular velocity about the Y-axis. Viewed along the Y+ direction. Figure 10 The inertial sensor 20 shown can obtain Figure 11 The schematic structural diagram is shown below. (Followed by...) Figure 10 , Figure 11 This paper explains the principle of detecting the angular velocity around the Y-axis using mass blocks 312 and 314.

[0238] Mass blocks 312 and 314 can have displacement components along the X-axis. When the inertial sensor 20 as a whole has an angular velocity component rotating about the Y-axis under the action of an external force, mass blocks 312 and 314 can be subjected to a Coriolis force along the Z-axis. Mass blocks 312 and 314 can also have displacement components along the Z-axis. Therefore, the distance between mass block 312 and the detection electrode group 396 can vary, and the capacitance value of the capacitor group 6 formed by mass blocks 312 and the detection electrode group 396 can vary; the distance between mass block 314 and the detection electrode group 398 can vary, and the capacitance value of the capacitor group 8 formed by mass blocks 314 and the detection electrode group 398 can vary. The amount of change in the capacitance value of the capacitor group 6 formed by mass blocks 312 and the detection electrode group 396 can correspond to the displacement component of mass block 312 in the Z-axis direction. The amount of change in the capacitance value of the capacitor group 8 formed by mass blocks 314 and the detection electrode group 398 can correspond to the displacement component of mass block 314 in the Z-axis direction.

[0239] Combination Figure 10 , Figure 11Assuming the driving direction of mass block 312 is X+ and the driving direction of mass block 314 is X-, under the action of external force, mass block 312 can have an angular velocity component rotating about the Y-axis around anchor area 325, torsion beam 343, or torsion beam 344, and mass block 314 can also have an angular velocity component rotating about the Y-axis around anchor area 325, torsion beam 343, or torsion beam 344. Therefore, mass block 312 can have a displacement component along the Z+ direction, and mass block 314 can have a displacement component along the Z- direction. Mass block 312 tends to move away from detection electrode group 396, and mass block 314 tends to move closer to detection electrode group 398.

[0240] Since the detection results of both the detection electrode group 396 and the detection electrode group 398 include common-mode noise, combining the detection results output by the detection electrode group 396 and the detection electrode group 398 can relatively effectively remove common-mode noise, which is beneficial to improving the inertial sensor 20's performance such as temperature drift and zero drift.

[0241] like Figure 10 As shown, a support member 360 is connected between the elastic connector 339 and the elastic connector 3310. The support member 360 can twist around the torsion beam 343 and the torsion beam 344. Figure 10 and Figure 11 The elastic connector 339 can be connected to the mass block 312, and the elastic connector 3310 can be connected to the mass block 314. Since the displacement components of the mass blocks 312 and 314 are in opposite directions in the Z-axis direction, the support 360 can be used to twist about the axis of symmetry y relative to the anchor zone 325.

[0242] Because the elastic connectors 339, 3310, and 360 have relatively high stiffness in the Z-axis direction, the degree of torsion of the elastic connectors 339, 312, and 360 relative to the anchor area 325, torsion beam 343, or torsion beam 344 can be approximately the same. Similarly, the degree of torsion of the elastic connectors 3310, 314, and 360 relative to the anchor area 325, torsion beam 343, or torsion beam 344 can also be approximately the same. Therefore, this is beneficial for improving the symmetry of the displacement components of the mass blocks 312 and 314 in the Z-axis direction, improving the differential motion performance of the mass blocks 312 and 314 at the same frequency, and consequently improving the detection accuracy of the inertial sensor 20.

[0243] like Figure 10As shown, mass blocks 312 and 311 are connected by a transmission beam assembly 381, and mass blocks 314 and 313 are connected by a transmission beam assembly 382. Since the displacement components of mass blocks 312 and 314 in the Z-axis direction are opposite, transmission beam assemblies 381 and 382 can withstand torsional forces about the axis of symmetry y, reducing the likelihood of mass blocks 311 and 313 being pulled by the torsion of mass blocks 312 and 314. The fact that transmission beam assemblies 381 and 382, ​​and mass blocks 311 and 313 themselves are symmetrical about the same axis of symmetry also helps to reduce the likelihood of mass blocks 311 and 313 being pulled by the torsion of mass blocks 312 and 314. Mass blocks 311 and 313 can be supported by elastic connectors 331, 332, 333, and 334. The elastic connectors 331, 332, 333, and 334 have high stiffness in the Z-axis direction, which also helps to reduce the possibility of mass blocks 311 and 313 being pulled by the torsion of mass blocks 312 and 314.

[0244] Figure 12 A schematic structural diagram of an inertial sensor 20 detecting angular velocity about the Z-axis is shown. Figure 12 The dashed line indicates the positions of mass blocks 311 and 313 before they rotate around the Z-axis. Figure 12 The solid line shows the positions of mass blocks 311 and 313 after rotation around the Z-axis. The following section will combine... Figure 12 This paper explains the principle of detecting the angular velocity around the Z-axis using mass blocks 311 and 313.

[0245] Mass blocks 311 and 313 can have displacement components along the Y-axis. When the inertial sensor 20 as a whole has an angular velocity component rotating about the Z-axis under the action of an external force, mass blocks 311 and 313 can be subjected to Coriolis forces along the X-axis. Mass blocks 311 and 313 can also have displacement components along the X-axis.

[0246] The distance between the mass block 311 and the detection electrode group 391 can be varied, and the capacitance value of the capacitor group 1 formed by the mass block 311 and the detection electrode group 391 can be varied; similarly, the capacitance value of the capacitor group 3 formed by the mass block 311 and the detection electrode group 393 can be varied. The amount of change in the capacitance value of the capacitor group 1 formed by the mass block 311 and the detection electrode group 391, and the amount of change in the capacitance value of the capacitor group 3 formed by the mass block 311 and the detection electrode group 393, can correspond to the displacement component of the mass block 311 in the X-axis direction.

[0247] The distance between the mass block 313 and the detection electrode group 392 can be varied, and the capacitance value of the capacitor group 2 formed by the mass block 313 and the detection electrode group 392 can be varied; similarly, the capacitance value of the capacitor group 4 formed by the mass block 313 and the detection electrode group 392 can be varied. The amount of change in the capacitance value of the capacitor group 2 formed by the mass block 313 and the detection electrode group 392, and the amount of change in the capacitance value of the capacitor group 4 formed by the mass block 313 and the detection electrode group 394, can correspond to the displacement component of the mass block 313 in the X-axis direction.

[0248] like Figure 12 As shown, assuming the driving direction of mass block 311 is Y+ and the driving direction of mass block 313 is Y-, under the action of external force, mass block 311 can rotate around anchor area 325 with an angular velocity component about the Z-axis, and mass block 313 can rotate around anchor area 325 with an angular velocity component about the Z-axis. Therefore, mass block 311 can have a displacement component along the X- direction, and mass block 313 can have a displacement component along the X+ direction. In one embodiment, mass block 311 tends to move closer to detection electrode group 391 and away from detection electrode group 393, and mass block 313 tends to move away from detection electrode group 392 and closer to detection electrode group 394.

[0249] Since the detection results of both detection electrode group 391 and detection electrode group 392 include common-mode noise, combining the detection results output by detection electrode group 391 and detection electrode group 392 can relatively effectively remove common-mode noise, which is beneficial to improving the performance of inertial sensor 20, such as temperature drift performance and zero drift performance.

[0250] like Figure 12 As shown, elastic connector 331, anchor zone 321, and elastic connector 332 can be connected between mass block 311 and mass block 313. Since the displacement components of mass block 311 and mass block 313 in the X-axis direction are opposite, elastic connectors 331 and 332 can rotate relative to anchor zone 321 about a direction parallel to the Z-axis. Because elastic connectors 331 and 332 have a buffering effect, the deformation of anchor zone 321 can be relatively small.

[0251] like Figure 12As shown, torsion beam 341 and transmission beam 351 can be connected between mass blocks 311 and 313. Since the displacement components of mass blocks 311 and 313 in the X-axis direction are opposite, transmission beam 351 can rotate relative to torsion beam 341 about a direction parallel to the Z-axis. Transmission beam 351 can provide balancing forces in the X-axis direction for mass blocks 311 and 313, which helps to make the displacement components of mass blocks 311 and 313 symmetrical in the X-axis direction. Torsion beam 341 can also provide torsional support for mass blocks 311 and 313 to rotate about the Z-axis. As can be seen from the above, through elastic connectors 335 and 336 and transmission beam 351, it is advantageous to provide elastic deformation of mass blocks 311 and 313 in at least two detection directions with a relatively simple structure, enabling mass blocks 311 and 313 to detect angular velocities in multiple directions.

[0252] like Figure 12 As shown, mass blocks 311 and 312 are connected by a transmission beam assembly 381, and mass blocks 313 and 314 are connected by a transmission beam assembly 382. Since the displacement components of mass blocks 311 and 313 in the X-axis direction are opposite in direction, the transmission beam assemblies 381 and 382 can absorb the displacement components along the X-axis direction, thereby reducing the possibility that mass blocks 312 and 314 will be pulled by mass blocks 311 and 313.

[0253] The angular velocity sensor and inertial sensor provided in this application embodiment, by placing the anchor region connected to the mover on the same axis of symmetry of the inertial sensor, help reduce the impact of substrate deformation and other factors on the measurement accuracy of the angular velocity sensor, enabling the inertial sensor to meet multiple requirements and improving its application performance in electronic devices. The angular velocity sensor and inertial sensor provided in this application embodiment, by designing a component connecting the anchor region and the mass block, allow the same mass block to be used to detect angular velocities in multiple directions, which helps improve the integration of the inertial sensor and reduce its space occupation. The angular velocity sensor, inertial sensor, and electronic device provided in this application embodiment, through a rationally designed steering structure, not only transmits and converts directions but also reduces the movement correlation between multiple mass blocks with different detection directions, thereby improving the decoupling between multiple mass blocks with different detection directions, and thus improving the measurement accuracy of the inertial sensor.

[0254] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An angular velocity sensor, characterized in that, include: A first mass block (311) and a second mass block (313) are driven to have a displacement component in a first direction (Y). The first mass block (311) and the second mass block (313) are used to detect angular velocities about a second direction (X) and / or a third direction (Z). The first direction (Y), the second direction (X), and the third direction (Z) are orthogonal to each other. The first mass block (311) and the second mass block (313) are both symmetrical about a first axis of symmetry (y) and about a second axis of symmetry (x). The first axis of symmetry (y) is parallel to the first direction (Y), and the second axis of symmetry (x) is parallel to the second direction (X). A third mass block (312) and a fourth mass block (314) are driven to have a displacement component in the second direction (X), the third mass block (312) and the fourth mass block (314) are used to detect angular velocity about the first direction (Y), the third mass block (312) and the fourth mass block (314) are both symmetrical about the second axis of symmetry (x), and the third mass block (312) and the fourth mass block (314) are symmetrical about the first axis of symmetry (y). First anchor area and second anchor area, the first mass block (311) is connected to the first anchor area and the second anchor area, the second mass block (313) is connected to the first anchor area and the second anchor area, and the first anchor area and the second anchor area are symmetrical with respect to the first axis of symmetry (y); The third anchor area (325) is connected to the third mass block (312) and the fourth mass block (314); The first anchor area, the second anchor area and the third anchor area (325) are arranged on the second axis of symmetry (x), and the third anchor area (325) covers the intersection of the first axis of symmetry (y) and the second axis of symmetry (x).

2. The angular velocity sensor according to claim 1, characterized in that, The first anchorage, the second anchorage, and the third anchorage (325) are all symmetrical with respect to the second axis of symmetry (x), and the third anchorage (325) is symmetrical with respect to the first axis of symmetry (y).

3. The angular velocity sensor according to claim 1, characterized in that, The angular velocity sensor also includes: A drive unit (371) is used to reciprocate along the first direction (Y), and the drive unit (371) is connected to the first mass block (311); A transmission beam assembly (381) is symmetrical about a first axis of symmetry (y). The transmission beam assembly (381) includes a first end (3811), a second end (3812), and a third end (3813). The first end (3811) is connected to the drive member (371), the second end (3812) is connected to the third mass block (312), and the third end (3813) is connected to the fourth mass block (314). When the first end (3811) has a displacement component along the first direction (Y), both the second end (3812) and the third end (3813) have displacement components parallel to the second direction (X). The displacement components of the second end (3812) and the third end (3813) are in opposite directions.

4. The angular velocity sensor according to claim 3, characterized in that, The transmission beam assembly (381) includes a first transmission beam (381a), a second transmission beam (381b), and a third transmission beam (381c) connected to each other. The first transmission beam (381a) is disposed near the drive member (371), the second transmission beam (381b) is disposed near the third mass block (312), and the third transmission beam (381c) is disposed near the fourth mass block (314). The first transmission beam (381a) is disposed parallel to the first direction (Y). Both the second transmission beam (381b) and the third transmission beam (381c) include portions that are inclined or perpendicular to the first direction (Y).

5. The angular velocity sensor according to claim 4, characterized in that, The second transmission beam (381b) includes a first transmission segment (3811b1), a second transmission segment (3811b2), and a third transmission segment (3812b). The first transmission segment (3811b1) and the second transmission segment (3811b2) are arranged parallel to the second direction (X). The third transmission segment (3812b) is connected between the first transmission segment (3811b1) and the second transmission segment (3811b2). The third transmission segment (3812b) is arranged parallel or inclined to the first direction (Y).

6. The angular velocity sensor according to claim 5, characterized in that, When the third mass block (312) and the fourth mass block (314) have angular velocity components about the first direction (Y), the second transmission beam (381b) and the third transmission beam (381c) rotate about the first transmission beam (381a).

7. The angular velocity sensor according to claim 6, characterized in that, The stiffness of the first transmission beam (381a) in the second direction (X) is less than the stiffness of the first transmission beam (381a) in the third direction (Z).

8. The angular velocity sensor according to claim 7, characterized in that, The stiffness of the second transmission beam (381b) in the second direction (X) is less than the stiffness of the second transmission beam (381b) in the third direction (Z).

9. The angular velocity sensor according to claim 8, characterized in that, The stiffness of the second transmission beam (381b) in the first direction (Y) is less than the stiffness of the second transmission beam (381b) in the third direction (Z).

10. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The angular velocity sensor also includes: A support member (360) is connected to the third anchor area (325) and between the third mass block (312) and the fourth mass block (314). The support member (360) is symmetrical with respect to the first axis of symmetry (y) and the second axis of symmetry (x).

11. The angular velocity sensor according to claim 10, characterized in that, The angular velocity sensor also includes: A first torsion beam (343) is connected between the support (360) and the third anchor area (325). The first torsion beam (343) extends along the first direction (Y). When the third mass block (312) and the fourth mass block (314) have angular velocity components about the first direction (Y), the support (360) rotates about the first torsion beam (343).

12. The angular velocity sensor according to claim 11, characterized in that, The third mass block (312) includes a first mass block notch (3121), the first mass block notch (3121) being symmetrical with respect to the second axis of symmetry (x); the angular velocity sensor further includes: A first elastic connector (339) spans the first mass block notch (3121) and connects between the support (360) and the third mass block (312).

13. The angular velocity sensor according to claim 12, characterized in that, The stiffness of the first elastic connector (339) in the second direction (X) is less than the stiffness of the first elastic connector (339) in the third direction (Z).

14. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The angular velocity sensor also includes: A fourth transmission beam (351) is connected to the first anchor area (323) and is connected between the first mass block (311) and the second mass block (313). The fourth transmission beam (351) extends along the first direction (Y) and is symmetrical about the second axis of symmetry (x).

15. The angular velocity sensor according to claim 14, characterized in that, The stiffness of the fourth transmission beam (351) in the second direction (X) is less than the stiffness of the fourth transmission beam (351) in the third direction (Z).

16. The angular velocity sensor according to claim 15, characterized in that, The angular velocity sensor also includes: The second torsion beam (341) is connected between the first anchor area (323) and the fourth transmission beam (351). The second torsion beam (341) extends along the second direction (X). When the first mass block (311) and the second mass block (313) have angular velocity components about the second direction (X), the fourth transmission beam (351) rotates about the second torsion beam (341). The second torsion beam (341) itself is symmetrical with respect to the second axis of symmetry (x).

17. The angular velocity sensor according to claim 15 or 16, characterized in that, The angular velocity sensor also includes: The second elastic connector (335) is connected between the fourth transmission beam (351) and the first mass block (311) and extends along the second direction (X).

18. The angular velocity sensor according to claim 17, characterized in that, The stiffness of the second elastic connector (335) in the first direction (Y) is less than the stiffness of the second elastic connector (335) in the third direction (Z).

19. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The angular velocity sensor also includes: A fourth anchor region (321) is connected between the first mass block (311) and the second mass block (313), and the fourth anchor region (321) is symmetrical about the second axis of symmetry (x). The position on the first mass block (311) that connects to the first anchor area (323) is the first position, the position on the first mass block (311) that connects to the second anchor area (324) is the second position, and the position on the first mass block (311) that connects to the fourth anchor area (321) is the third position. The first position, the second position, and the third position are not collinear.

20. The angular velocity sensor according to claim 19, characterized in that, The angular velocity sensor also includes: A third elastic connector (331) is connected between the fourth anchor zone (321) and the first mass block (311).

21. The angular velocity sensor according to claim 20, characterized in that, The stiffness of the third elastic connector (331) in the first direction (Y) is less than the stiffness of the third elastic connector (331) in the third direction (Z).

22. The angular velocity sensor according to claim 20 or 21, characterized in that, The stiffness of the third elastic connector (331) in the second direction (X) is less than the stiffness of the third elastic connector (331) in the third direction (Z).

23. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The first mass block (311) has a second mass block notch (3115), and the third mass block (312) and the fourth mass block (314) are disposed within the second mass block notch (3115).

24. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The angular velocity sensor also includes: The first detection electrode (395) and the first mass block (311) are movable relative to the first detection electrode (395). The first mass block (311) and the first detection electrode (395) are arranged along the third direction (Z) to form a first capacitor. When the first mass block (311) has an angular velocity component about the second direction (X), the first mass block (311) has a displacement component along the third direction (Z). The displacement component of the first mass block (311) along the third direction (Z) corresponds to the change in capacitance of the first capacitor. The first readout circuit is used to output the angular velocity component of the second direction (X) based on the change in the capacitance of the first capacitor.

25. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The angular velocity sensor also includes: The second detection electrode (396) and the third mass block (312) are movable relative to the second detection electrode (396). The third mass block (312) and the second detection electrode (396) are arranged along the third direction (Z) to form a second capacitor. When the third mass block (312) has an angular velocity component about the first direction (Y), the third mass block (312) has a displacement component along the third direction (Z). The displacement component of the third mass block (312) along the third direction (Z) corresponds to the capacitance change of the second capacitor. The second readout circuit is used to output the angular velocity component of the first direction (Y) based on the change in the capacitance of the second capacitor.

26. The angular velocity sensor according to any one of claims 1 to 9, characterized in that, The angular velocity sensor also includes: The third detection electrode (391, 393) is movable relative to the first mass block (311). The first mass block (311) and the third detection electrode (391, 393) are arranged along the second direction (X) to form a third capacitor. When the first mass block (311) has an angular velocity component about the third direction (Z), the first mass block (311) has a displacement component along the second direction (X). The displacement component of the third mass block (312) along the second direction (X) corresponds to the capacitance change of the third capacitor. The third readout circuit is used to output the angular velocity component of the third direction (Z) based on the change in the capacitance of the third capacitor.

27. An inertial sensor (20), characterized in that, Including the angular velocity sensor as described in any one of claims 1 to 26.

28. An electronic device, characterized in that, Including the inertial sensor (20) as described in claim 27.

Images