Spectroscopic detection system and beam pointing detection and stabilization system
By detecting the properties of the beam and adjusting its direction using a spectrophotometer, the problem of poor beam stability in multi-beam lithography was solved, and the stability of the beam was improved during long-distance propagation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHEJIANG LAB
- Filing Date
- 2023-04-18
- Publication Date
- 2026-07-28
AI Technical Summary
When using multiple optical paths to achieve multi-beam lithography, the beam stability is poor, and jitter and pointing errors are easily generated.
A beam splitting detection system is adopted, which detects the properties of the beam through beam splitting detection components and controller, and adjusts the beam pointing control component to modulate the beam emitted by the light source, thereby reducing the beam offset and pointing error during long-distance propagation.
It improves the stability of the beam and reduces beam deflection during long-distance propagation and pointing errors introduced by optical devices.
Smart Images
Figure CN116754066B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of laser lithography technology, and in particular to a beam splitting detection system and a beam pointing detection and stabilization system. Background Technology
[0002] With the development of laser lithography technology, in order to improve the processing efficiency of laser direct writing lithography, the number of laser beams can be increased, and multiple beams can be used for lithography in parallel.
[0003] However, using multiple optical paths to achieve multi-beam lithography may result in beam jitter and poor beam stability. Summary of the Invention
[0004] This application provides a spectroscopic detection system and a beam pointing detection and stabilization system, which can improve the stability of the beam.
[0005] One aspect of this application provides a beam splitting detection system for detecting the properties of a beam emitted from a beam pointing control component, the beam splitting detection system comprising:
[0006] A beam splitting and detection assembly includes a beam splitting component and a detection component. The beam splitting component is used to reflect and transmit the light beam, and the detection component is used to receive the reflected light beam formed by the reflection of the light beam and detect the properties of the reflected light beam.
[0007] A controller is connected between the detection component and the beam pointing control component. The controller is used to determine the beam adjustment amount according to the properties of the reflected beam and control the beam pointing control component to modulate the beam emitted by the light source according to the beam adjustment amount.
[0008] The spectroscopic detection system provided in this application controls the beam direction of the light source emitted by the modulation light source of the control component based on the beam properties detected by the detection component, thereby reducing the beam deflection during long-distance propagation and the pointing error introduced by optical devices, and improving the stability of the beam.
[0009] Furthermore, the beam splitting assembly includes a first beam splitting device, a second beam splitting device, and a third beam splitting device; the detection assembly includes a first detection device, a second detection device, and a third detection device; and the controller is connected to the first detection device, the second detection device, and the third detection device.
[0010] The first beam splitter is used to reflect and transmit the beam emitted from the beam pointing control component, forming a first transmitted beam and a first reflected beam;
[0011] The second beam splitter is used to reflect and transmit the first transmitted beam to form a second transmitted beam and a second reflected beam. The first detection device is used to receive the second reflected beam and detect the position and angle of the second reflected beam.
[0012] The third beam splitter is used to reflect and transmit the second transmitted beam to form a third transmitted beam and a third reflected beam. The second detection device is used to receive the third reflected beam and detect the included angle between each two adjacent third reflected beams.
[0013] The third detection device is used to receive the third transmitted beam and detect the beam quality of the third transmitted beam.
[0014] Furthermore, the first detection device includes multiple sensors, and the beam splitting detection component further includes a convergence angle conversion component. The convergence angle conversion component is located between the second beam splitting device and the first detection device. The convergence angle conversion component is used to convert the angle between each pair of adjacent second reflected beams to be equal to the angle between the multiple sensors if the angle between each pair of adjacent second reflected beams is not equal to the angle between the multiple sensors.
[0015] Furthermore, the convergence angle conversion component includes a first scanning lens and a second scanning lens facing each other, the first scanning lens, the second scanning lens and the first detection device being coaxially arranged; the focal plane of the first scanning lens and the focal plane of the second scanning lens coincide, the scanning point of the first scanning lens coincides with the convergence point of the second reflected beam, and the scanning point of the second scanning lens is located on the detection surface of the first detection device.
[0016] Furthermore, it also includes a third scanning lens, located between the third beam splitter and the second detection device, the third scanning lens and the second detection device being coaxially arranged; the focal plane of the third scanning lens is located on the detection surface of the second detection device, and the scanning point of the third scanning lens coincides with the convergence point of the third reflected beam.
[0017] Another aspect of this application provides a beam pointing detection and stabilization system, comprising:
[0018] A light source control system, comprising a light source and a beam pointing control component corresponding to the light source, wherein the beam pointing control component is used to modulate the beam emitted by the light source;
[0019] An imaging converging system is used to converge the light beam emitted from the beam pointing control component; and
[0020] In any of the above-described spectroscopic detection systems, the beam pointing control component is connected to the controller.
[0021] Furthermore, the light source control system also includes a beam pre-stabilization component for receiving the light beam emitted by the light source and detecting the position and angle of the light beam; the beam pre-stabilization component is connected to the controller, and the controller is used to control the beam pre-stabilization component to adjust the position and angle of the light beam according to the position and angle of the light beam, so that the position and angle of the light beam are consistent with a predetermined position and angle.
[0022] Furthermore, the light source control system also includes a beam modulation component, which is used to modulate the beam emitted by the beam pre-stage stabilization component.
[0023] Furthermore, the beam pointing control component includes a spatial light modulator connected to the controller, the spatial light modulator being used to receive the beam emitted by the beam modulation component and modulate at least one of the position, angle, wavefront, and phase of the beam according to the beam adjustment amount.
[0024] Furthermore, the beam pointing control component also includes a light blocking switch connected to the controller, the controller being used to control whether the light blocking switch blocks the beam emitted by the beam modulation component.
[0025] Furthermore, the beam pointing control component also includes a first reflector, which is used to reflect the beam emitted from the beam modulation component to the spatial light modulator and the light blocking switch.
[0026] Furthermore, the imaging converging system includes a reflective component, which includes a second reflector. The second reflector is used to adjust the optical path of the beam emitted from the beam pointing control component, so that the optical paths of the beams emitted from the beam pointing control component are equal.
[0027] Furthermore, the imaging convergence system also includes a 4F imaging component for imaging a light spot on the surface of the beam pointing towards the control component. The 4F imaging component includes a first lens and a second lens arranged coaxially, with the focal lengths of the first lens and the second lens being equal. Attached Figure Description
[0028] The accompanying drawings, which are incorporated in and form a part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure.
[0029] Figure 1 The figure shown is a system block diagram of an embodiment of the beam pointing detection and stabilization system of this application;
[0030] Figure 2 As shown Figure 1 A schematic diagram of the structure of a beam pointing detection and stabilization system according to an embodiment of the beam splitting detection component;
[0031] Figure 3 As shown Figure 2 A schematic diagram of the first detection device and the convergence angle conversion component of the spectrophotometer detection assembly shown;
[0032] Figure 4 As shown Figure 2 A schematic diagram of the structure of the second detection device and the third scanning lens of the spectrophotometer detection assembly shown;
[0033] Figure 5 As shown Figure 1 A schematic diagram of the beam pointing control component of the beam pointing detection and stabilization system shown.
[0034] Figure 6 As shown Figure 1 The diagram shows the structure of the imaging convergence system of the beam pointing detection and stabilization system. Detailed Implementation
[0035] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.
[0036] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to limit the application. Unless otherwise defined, the technical or scientific terms used in this application should be understood in their ordinary sense by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "a" or "one," etc., do not indicate a quantity limitation, but rather indicate the presence of at least one. "A plurality" or "several" indicates at least two. Unless otherwise indicated, the terms "front," "rear," "lower," and / or "upper," etc., are for ease of description only and are not limited to a location or spatial orientation. The terms "comprising" or "including," etc., mean that the elements or objects preceding "comprising" or "including" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. The terms "connected," "linked," etc., are not limited to physical or mechanical connections and can include electrical connections, whether direct or indirect.
[0037] The singular forms “a,” “the,” and “the” used in this application specification and appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.
[0038] The beam splitting detection system of this application embodiment is used to detect the properties of the light beam emitted by the beam pointing control component. The beam splitting detection system includes a beam splitting detection component and a controller. The beam splitting detection component includes a beam splitting component and a detection component. The beam splitting component is used to reflect and transmit the light beam, and the detection component is used to receive the reflected light beam formed by the reflection of the light beam and detect the properties of the reflected light beam. The controller is connected between the detection component and the beam pointing control component. The controller is used to determine the beam adjustment amount according to the properties of the reflected light beam and control the beam pointing control component to modulate the light beam emitted by the light source according to the beam adjustment amount.
[0039] The beam splitting detection system of this application embodiment controls the beam direction of the light emitted by the modulated light source of the control component according to the beam properties detected by the detection component, thereby reducing the beam deflection during long-distance propagation and the pointing error introduced by the optical device, and improving the stability of the beam.
[0040] The beam pointing detection and stabilization system of this application includes a light source control system, an imaging convergence system, and a beam splitting detection system. The light source control system includes a light source and a beam pointing control component corresponding to the light source, the beam pointing control component being used to modulate the beam emitted by the light source. The imaging convergence system is used to converge the beam emitted by the beam pointing control component. The beam pointing control component of the beam splitting detection system is connected to a controller.
[0041] The beam splitting detection system and beam pointing detection and stabilization system of this application will be described in detail below with reference to the accompanying drawings. Unless otherwise specified, the features of the following embodiments and implementation methods can be combined with each other.
[0042] Figure 1 The diagram shown is a system block diagram of an embodiment of the beam pointing detection and stabilization system 1 of this application. The beam pointing detection and stabilization system 1 of this application includes a light source control system 20, an imaging converging system 30, and a beam splitting detection system 10. Specifically, the light source control system 20 includes a light source 300 and a beam pointing control component 400 corresponding to the light source 300, the beam pointing control component 400 being used to modulate the beam emitted by the light source. The imaging converging system 30 is used to converge the beam emitted by the beam pointing control component 400. The beam splitting detection system 10 is connected to the beam pointing control component 400. In some embodiments, the beam pointing control component 400 is connected to the controller 200 of the beam splitting detection system 10.
[0043] It should be noted that the number of beams includes one, two, or more. In some embodiments, the beam pointing detection and stabilization system 1 is a ten-channel beam pointing detection and stabilization system, and the number of light source control systems 20 is ten, outputting ten beams. Figure 1 As shown, in some embodiments, the beam pointing detection and stabilization system 1 is a six-channel beam pointing detection and stabilization system, and the number of light source control systems 20 is six, outputting six beams. Of course, the number of beams can also be other, and this application is not limited. When the number of beams is two or more, the imaging converging system 30 can reflect and image the beams of each channel, ultimately converging them at a point, and the included angle α between each pair of adjacent beams is the same, with each beam evenly distributed on both sides of the axis of symmetry with the convergence point as the central axis. In some embodiments, the included angle α between each pair of adjacent beams is 1.43°.
[0044] The beam splitting detection system 10 of this embodiment is used to detect the properties of the light beam emitted from the beam pointing control component 400. The beam splitting detection system 10 includes a beam splitting detection component 100 and a controller 200. The beam splitting detection component 100 includes a beam splitting component 110 and a detection component 120. The beam splitting component 110 is used to reflect and transmit the light beam, and the detection component 120 is used to receive the reflected light beam and detect the properties of the reflected light beam. The controller 200 is connected between the detection component 120 and the beam pointing control component 400. The controller 200 is used to determine a beam adjustment amount based on the properties of the reflected light beam and control the beam pointing control component 400 to modulate the light beam emitted by the light source according to the beam adjustment amount. The beam splitting detection system 10 of this embodiment reduces beam deflection during long-distance propagation and pointing errors introduced by optical devices by setting the controller 200 to control the beam pointing control component 400 to modulate the light beam emitted by the light source based on the light beam properties detected by the detection component 120, thereby improving the stability of the light beam. It should be noted that the properties of the reflected beam are the same as those of the beam emitted by the beam pointing control component 400. The detection component 120 can obtain the properties of the beam emitted by the beam pointing control component 400 by detecting the properties of the reflected beam. In some embodiments, the properties of the beam include the position, angle, beam quality, and the included angle α between each pair of adjacent beams of the multiple beams.
[0045] In some embodiments, the beam pointing detection and stabilization system 1 includes a monitor connected to the controller 200. The monitor is used to display the nature of the beam detected by the detection component and the amount of beam adjustment, which facilitates debugging by researchers.
[0046] Figure 2 As shown Figure 1 The diagram illustrates a structural schematic of an embodiment of the beam pointing detection and stabilization system 110, specifically the beam splitting detection component 100. In some embodiments, the beam splitting component 110 includes a first beam splitter 111, a second beam splitter 112, and a third beam splitter 113; the detection component 120 includes a first detection device 121, a second detection device 122, and a third detection device 123; and a controller 200 is connected to the first detection device 121, the second detection device 122, and the third detection device 123. In some embodiments, the beam splitting ratios of the first beam splitter 111, the second beam splitter 112, and the third beam splitter 113 may be different. In other embodiments, the beam splitting ratios of the first beam splitter 111, the second beam splitter 112, and the third beam splitter 113 may be the same. The first beam splitter 111, the second beam splitter 112, and the third beam splitter 113 may include beam splitters.
[0047] Continue to refer to Figure 2The first beam splitter 111 is used to reflect and transmit the beam emitted from the beam pointing control assembly 400, forming a first transmitted beam and a first reflected beam. In some embodiments, the first beam splitter 111 includes a flat beam splitter with a small transmittance ratio. After the beam passes through the first beam splitter 111, most of the energy is reflected, and a small portion is transmitted. The reflected beam converges at a first converging point. The first reflected beam reaching the first converging point has most of the energy of the optical system, enabling the optical system to perform its main functions. In some embodiments, when the first reflected beam is used for laser marking, the first converging point is located on the surface of the scanning device and at the scanning point of the scanning lens. The beam can then enter the subsequent tube lens and objective lens for laser marking. In some embodiments, the diameter of the first beam splitter 111 is 75 mm, and the transmittance-to-reflection ratio is 2:98. Thus, the first converging point has 98% of the total beam energy, which can be used for actual laser marking. It is understood that the diameter and transmittance-to-reflection ratio of the first beam splitter 111 are not limited to these values; the transmittance-to-reflection ratio can be other values, as long as most of the total beam energy is reflected and laser marking or other functions are achieved.
[0048] Figure 3 As shown Figure 2 The diagram shows the structure of the first detection device 121 and the convergence angle conversion component 130 of the beam splitting detection assembly 100. The second beam splitter 112 reflects and transmits the first transmitted beam to form a second transmitted beam and a second reflected beam. The first detection device 121 receives the second reflected beam and detects its position and angle. Specifically, when the transmittance ratio of the first beam splitter 111 is small, the energy of the first transmitted beam is small. The first transmitted beam passes through the second beam splitter 112, and the second reflected beam formed by the reflection of the second beam splitter 112 converges at a second convergence point. The second reflected beam at the second convergence point enters the first detection device 121 for position and angle detection. It is understood that the transmittance ratio of the second beam splitter 112 can be any value. In some embodiments, the diameter of the second beam splitter 112 is 50 mm, and the beam splitting ratio is 50:50. Thus, the second beam splitter 112 reflects 50% of the energy of the first transmitted beam to the second convergence point and transmits 50% of the energy of the first transmitted beam to the first detection device 121.
[0049] In some embodiments, the first detection device 121 includes a beam pointing detector capable of detecting the position and angular offset of each beam in a multi-channel beam. Based on the above embodiments, the first detection device 121 includes multiple sensors. Specifically, the first detection device 121 has multiple sets of closely arranged sensor assemblies inside. The number of sensor assemblies can be customized as needed, and this application does not impose any limitations. In some embodiments, each set of sensor assemblies may include two sensors, each used for detecting the position and angular offset of a single beam. It is understood that because the angle between the line connecting each set of sensor assemblies inside the first detection device 121 and the entrance, and the angle α between each pair of adjacent beams may be inconsistent, the first detection device 121 may fail to detect each beam. The beam splitting detection system 10 of this application embodiment converts the angle α between each pair of adjacent beams by setting a convergence angle conversion component. In some embodiments, the convergence angle conversion component 130 is located between the second beam splitter 112 and the first detection device 121. The convergence angle conversion component 130 is used to convert the angle α between each pair of adjacent second reflected beams to be equal to the angle between the multiple sensors if the included angle α between each pair of adjacent second reflected beams is not equal to the included angle between the multiple sensors. In some embodiments, the number of sensors may be ten, and the included angle between each sensor is 2°.
[0050] like Figure 3 As shown, in some embodiments, the convergence angle conversion assembly 130 includes a first scanning lens 131 and a second scanning lens 132 facing each other. The first scanning lens 131 or the second scanning lens 132 includes, but is not limited to, scanning lenses, field lenses, and objective lenses. It is understood that, based on the characteristics of the scanning lenses, when the angle α between the second reflected beams at the second convergence point is determined, the angle of the beam emitted after the beam passes through the second scanning lens 132 and the first scanning lens 131 is determined. When the front and rear focal lengths of the second scanning lens 132 and the first scanning lens 131 are equal, the beam angles at both ends of the second scanning lens 132 and the first scanning lens 131 are also equal. When it is necessary to change the convergence angle of the emitted beam, by selecting different second scanning lenses 132 and first scanning lenses 131, making them have different front and rear focal lengths, working distances, and scanning distances, the angle between the various beams emitted after the beam passes through this scanning lens group can be changed, realizing the conversion of the convergence angle to adapt to the beam angle of the focused beam pointing to the detector.
[0051] In some embodiments, the second scanning lens 132 includes a custom-made scanning lens with a focal length of 70mm. In some embodiments, the first scanning lens 131 includes a Thorlabs SL50-CLS2 scanning lens with a focal length of 50mm. It is understood that the exit convergence angle between each second reflected beam emitted after passing through the first scanning lens 131 and the second scanning lens 132 increases. The second convergence point is located at the scanning point of the second scanning lens 132, and the distance between the second convergence point and the entrance of the second scanning lens 132 is the scanning distance L of the second scanning lens 132. SB In some embodiments, the scanning distance L of the second scanning lens 132 SB The diameter is 44mm. After the second reflected beam exits through the second scanning lens 132, it is at a working distance L from the second scanning lens 132. WB Focusing on the plane. In some embodiments, the working distance L of the second scanning lens 132 WB It is 20mm.
[0052] In some embodiments, the first scanning lens 131, the second scanning lens 132, and the first detection device 121 are coaxially arranged. In this case, the focal plane of the first scanning lens 131 coincides with the focal plane of the second scanning lens 132, the scanning point of the first scanning lens 131 coincides with the convergence point of the second reflected beam, and the scanning point of the second scanning lens is located on the detection surface of the first detection device 121, enabling the matching of angles between multiple beams and the second detection device 122. Specifically, the second reflected beam enters from the exit of the first scanning lens 131. At this time, the other end of the first scanning lens 131 converges the parallel second reflected beams exiting the first scanning lens 131 onto the scanning point of the first scanning lens 131. It should be noted that the distance from the scanning point of the first scanning lens 131 to the entrance of the first scanning lens 131 is the scanning distance L of the first scanning lens 131. SA In some embodiments, the scanning distance L of the first scanning lens 131 SA The working distance L of the first scanning lens 131 is 37.8 mm. In some embodiments, the working distance L of the first scanning lens 131 is... WA It is 26.4mm.
[0053] It is understandable that a parallel beam of light passing through the scanning point of the scanning lens, entering the scanning lens at any angle with the axis, will be focused on the focal plane of the scanning lens. The focal plane is a plane, and the axis of the outgoing focused beam is parallel to the axis of the scanning lens. The larger the angle between the incident beam and the axis of the scanning lens, the farther the distance between the outgoing focused beam and the axis of the scanning lens.
[0054] Figure 4 As shown Figure 2The diagram shows the structure of the second detection device 122 and the third scanning lens 140 of the beam splitting detection assembly 100. The third beam splitter 113 is used to reflect and transmit the second transmitted beam to form a third transmitted beam and a third reflected beam. The second detection device 122 is used to receive the third reflected beam and detect the angle between each pair of adjacent third reflected beams. In some embodiments, the splitting ratio of the third beam splitter 113 is 50:50. Specifically, the third reflected beam is converged to a third convergence point by the third beam splitter 113. In some embodiments, the third scanning lens 140 includes a Thorlabs SL50-CLS2 scanning lens with a focal length of 50mm. The third convergence point is set at the scanning point of the third scanning lens 140. At this time, a series of focused light spots will be formed on the focal plane of the third scanning lens 140. The detection surface of the second detection device 122 is set on the focal plane of the third scanning lens 140, and the distribution of each focused light spot is measured by the second detection device 122. In some embodiments, the scanning distance L of the third scanning lens 140 is... SC The working distance L of the third scanning lens is 37.8mm. WC The image size is 26.4 mm. In some embodiments, the second detection device 122 includes a camera; the camera may include a CCD camera. Based on the above embodiments, the parameters of the second detection device 122 can be determined according to the parameters of the third scanning lens 140. In some embodiments, the length of the light spot array formed on the detection surface of the second detection device 122 is not more than 10 mm, indicating that the second detection device 122 includes a Hikvision CE200 camera with a 1-inch image plane size.
[0055] like Figure 4As shown, in some embodiments, the beam splitting detection system 10 includes a third scanning lens 140 located between the third beam splitter 113 and the second detection device 122, and the third scanning lens 140 and the second detection device 122 are coaxially arranged. In some embodiments, the focal plane of the third scanning lens 140 is located on the detection surface of the second detection device 122, and the scanning point of the third scanning lens 140 coincides with the convergence point of the third reflected beam. The third scanning lens 140 includes, but is not limited to, a scanning lens, a field lens, and an objective lens. When a series of focused light spots are formed on the focal plane of the third scanning lens 140, the detection surface of the second detection device 122 is set on the focal plane of the third scanning lens 140, and the distribution of each focused light spot is measured by the second detection device 122. Understandably, based on the characteristics of the scanning lens, the angle between the converging beams entering the scanning lens will directly affect the distribution of the focused spot on the focal plane of the scanning lens. Based on the distribution of the focused spot detected by the second detection device 122, the angle between the converging beams can be obtained according to the parameters of the scanning lens. When the camera detects that each focused spot is equally spaced and the spacing meets the requirements, that is, the third reflected beam has a compliant angle distribution. At the same time, the distribution of the focused spot can be used to determine whether the third reflected beam is on the same plane.
[0056] The third detection device 123 is used to receive the third transmitted beam and detect its beam quality. In some embodiments, the convergence point of the third transmitted beam is located on the detection surface of the third detection device 123. Optionally, the third detection device 123 may include a beam quality analyzer and a camera to monitor the convergence of the third transmitted beam and, in conjunction with the switching of the light blocking switch 420 in the beam pointing control component 400, perform beam quality analysis on each beam. When the light blocking switch 420 in the beam pointing control component 400 does not block any beams, it can be determined whether each beam converges to the same point by monitoring the light spot at the convergence point; when the light blocking switch 420 blocks part of the beam, that is, only one beam is allowed to reach this point, the beam quality of that beam can be detected separately and fed back to the spatial light modulator 410 for wavefront and phase modulation correction.
[0057] Understandably, based on the beam splitting propagation relationship of the beam splitting detection system 10, the first, second, third, and fourth converging points in the system are all conjugates. Apart from the difference in energy of the reflected beams resulting from the different transmittance ratios of the various beam splitters, the relative positions, angles, inter-beam angles, wavefronts, and phases of the beams at the four converging points are identical. Therefore, the properties of the beams obtained from beam detection at the second, third, and fourth converging points can represent the properties of the beam at the first converging point.
[0058] refer to Figure 1In some embodiments, the light source control system 20 further includes a beam pre-stabilization component 500 for receiving the light beam emitted by the light source and detecting the position and angle of the beam. Specifically, the beam pre-stabilization component 500 stabilizes the direction of the light beam emitted by the light source, eliminating beam position jitter and angle jitter, ensuring good direction stability of the beam before it enters the beam modulation optical path, avoiding modulation performance degradation caused by beam jitter in the subsequent optical path, and preventing larger spot drift at the far end of the system. The beam pre-stabilization component 500 can include common beam stabilization components. In some embodiments, the beam pre-stabilization component 500 includes the German TEM beam stabilization component. Specifically, the TEM beam stabilization component includes a pair of stepper motors, a piezoelectric ceramic driven adjustable reflector frame as a beam pointing control device, and two beam detectors. The two beam detectors are used to detect the beam position and pointing offset and feed them back to the controller 200 for beam pointing control. Its position stabilization accuracy can reach 1µm, and its angle stabilization accuracy can reach 1µm. In some embodiments, the beam preamplifier 500 is connected to the controller 200. The controller 200 controls the beam preamplifier 500 to adjust the position and angle of the beam according to the position and angle of the beam, so that the position and angle of the beam are consistent with a predetermined position and angle. Specifically, the beam preamplifier 500 has the ability to detect the position and angle of the beam and feeds back the position and angle of the beam to the controller 200, so that the controller 200 can control the beam deflection to achieve position and angle pointing control.
[0059] In some embodiments, the light source control system 20 includes a beam modulation component 600, which modulates the beam emitted from the beam pre-stabilization component 500. The beam modulation component 600 may include an optoelectronic device with beam modulation function and can control the normally open and normally closed states of the beam channel.
[0060] Figure 5 As shown Figure 1The diagram shows a schematic of the beam pointing control component 400 in the beam pointing detection and stabilization system 1. In some embodiments, the beam pointing control component 400 includes a spatial light modulator 410 connected to the controller 200. Specifically, the spatial light modulator 410 receives the beam emitted from the beam modulation component 600 and modulates at least one of the beam's position, angle, wavefront, and phase according to the beam adjustment amount. The spatial light modulator 410 (SLM) modulates the beam by loading a hologram in real time, enabling modulation of the beam's wavefront and phase, as well as fine-tuning of the beam's position and angle. Optionally, the spatial light modulator 410 may include a Hamamatsu spatial light modulator. Specifically, the beam detection information of the beam pointing control component 400 comes from the subsequent beam splitting detection component 100. The beam splitting detection component 100 detects the actual positional and angular offsets of each beam after convergence, as well as the angles between the beams, and transmits this beam detection information to the controller 200. The controller 200 calculates the beam adjustment amount and feeds it back to the beam pointing control component 400. Based on the beam adjustment amount, the controller 200 determines the holographic pattern that the spatial light modulator 410 needs to load, thereby adjusting the position and angle of the beam. The spatial light modulator 410 can also continue to superimpose holographic patterns to adjust the beam phase and wavefront.
[0061] like Figure 5 As shown, in some embodiments, the beam pointing control component 400 includes a light blocking switch 420 connected to the controller 200. The controller 200 controls whether the light blocking switch 420 blocks the beam emitted from the beam modulation component 600. The light blocking switch 420 is used to temporarily block and shut down the beam of the group of optical paths, facilitating flexible switching of the opening and closing of each beam channel during subsequent debugging and use, so as to detect and debug single or multiple beams. The controller 200 can control each light blocking switch 420 to open or close as needed. When all beams need to be debugged, each light blocking switch 420 can be controlled to open, keeping all beam channels open; when some beams need to be debugged, the corresponding light blocking switches 420 can be controlled to open, while the remaining light blocking switches 420 are closed, keeping the corresponding partial beam channels open. It is understood that a partial beam can be a single beam, or two or more beams. In some embodiments, the light blocking switch 420 includes a mechanically and electrically controlled light blocking switch 420. In some embodiments, the light blocking switch 420 includes a light-blocking plate controlled by a servo motor for rotation.
[0062] In some embodiments, the beam pointing control assembly 400 further includes a first reflector 430, which reflects the beam emitted from the beam modulation assembly 600 to the spatial light modulator 410 and the light blocking switch 420. The number and position of the first reflectors 430 are determined according to the beam channel and are not limited thereto. The number of first reflectors 430 can be one, two, or more. (Reference) Figure 5 The number of first reflectors 430 is three, which are respectively used to reflect the beam emitted from the beam modulation component 600 to the spatial light modulator 410, reflect the beam emitted from the spatial light modulator 410 to the light blocking switch 420, and reflect the beam to the imaging converging system 30.
[0063] Figure 6 As shown Figure 1 The diagram shows a schematic of the imaging converging system 30 of the beam pointing detection and stabilization system 1. In some embodiments, the imaging converging system 30 includes a reflective component 700. The reflective component 700 includes a second reflector 710, which is used to adjust the optical path of the beam emitted from the beam pointing control component 400, so that the optical path lengths of the beams emitted from the multiple beam pointing control component 400 are equal, and the included angle α between each pair of adjacent beams is equal. It should be noted that the starting point of the optical path of each beam is the surface of the spatial light modulator 410 in the beam pointing control component 400, and the ending point of the optical path of each beam is the convergence point of each beam. It is understood that the number of reflective components 700 can be one, two, or more, corresponding to the number of light sources. In some embodiments, the number of light sources is 10, and correspondingly, the number of reflective components 700 is 10. The number and position of the second reflectors 710 are determined according to the optical path length of the beam, and are not limited in this application. Optionally, the number of second reflectors 710 can be 4, 5, or other numbers. The second reflector 710 can be mounted on an adjustable frame, which allows for two-axis or three-axis adjustment of the second reflector 710 to meet the requirements of beam refraction.
[0064] In some embodiments, the imaging convergence system 30 includes a 4F imaging component 800 for imaging a light spot on the surface of the beam pointing towards the control component 400. The 4F imaging component 800 can prevent beam quality degradation and beam divergence when the optical path length of the beam is long. It is understood that the number of 4F imaging components 800 can be one, two, or more, corresponding to the number of light sources. In some embodiments, the 4F imaging component 800 includes a first lens 810 and a second lens 820 coaxially arranged. In some embodiments, the focal length of the first lens 810 and the focal length of the second lens 820 are equal. It is understood that the first lens 810 and the second lens 820 image the light spot at the surface of the spatial light modulator 410 in the beam pointing control component 400 onto the convergence point. In the imaging convergence system 30, the optical path from the surface of the spatial light modulator 410 in the beam pointing control component 400 to the convergence point of each channel is four times the focal length of the first lens 810 and / or the focal length of the second lens 820, to achieve equal optical path imaging convergence of the beams. This avoids the degradation of writing performance caused by the optical path difference between each beam. In some embodiments, the focal length of the first lens 810 and the focal length of the second lens 820 are both 750 mm, the optical path of each beam is 3000 mm, and the first lens 810 is located at a distance of 2250 mm from the convergence point, and the second lens 820 is located at a distance of 750 mm from the convergence point. The focal length and position of the first lens 810 and the second lens 820 are not limited to the focal length and position of the above embodiments.
[0065] refer to Figure 6 In one embodiment of the imaging convergence system 30, there are six reflective components 700 and six 4F imaging components 800. Each reflective component 700 has four second reflective mirrors 710. One second reflective mirror 710 is disposed between the first lens 810 and the spatial light modulator 410, two second reflective mirrors 710 are disposed between the first lens 810 and the second lens 820, and two second reflective mirrors 710 are disposed between the second lens 820 and the convergence point.
[0066] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.
Claims
1. A spectroscopic detection system, characterized by, The beam splitting detection system is used to detect the properties of the beam emitted from the beam pointing control component, and the beam splitting detection system includes: A beam splitting and detection assembly includes a beam splitting component and a detection component. The beam splitting component is used to reflect and transmit the light beam, and the detection component is used to receive the reflected light beam formed by the reflection of the light beam and detect the properties of the reflected light beam. A controller is connected between the detection component and the beam pointing control component. The controller is used to determine the beam adjustment amount according to the properties of the reflected beam and control the beam pointing control component to modulate the beam emitted by the light source according to the beam adjustment amount. The beam splitting assembly includes a first beam splitting device, a second beam splitting device, and a third beam splitting device; the detection assembly includes a first detection device, a second detection device, and a third detection device; and the controller is connected to the first detection device, the second detection device, and the third detection device. The first beam splitter is used to reflect and transmit the beam emitted from the beam pointing control component, forming a first transmitted beam and a first reflected beam; The second beam splitter is used to reflect and transmit the first transmitted beam to form a second transmitted beam and a second reflected beam. The first detection device is used to receive the second reflected beam and detect the position and angle of the second reflected beam. The third beam splitter is used to reflect and transmit the second transmitted beam to form a third transmitted beam and a third reflected beam. The second detection device is used to receive the third reflected beam and detect the included angle between each two adjacent third reflected beams. The third detection device is used to receive the third transmitted beam and detect the beam quality of the third transmitted beam.
2. The spectroscopic detection system of claim 1, wherein, The first detection device includes multiple sensors, and the beam splitting detection component further includes a convergence angle conversion component. The convergence angle conversion component is located between the second beam splitting device and the first detection device. The convergence angle conversion component is used to convert the angle between each pair of adjacent second reflected beams to be equal to the angle between the multiple sensors if the angle between each pair of adjacent second reflected beams is not equal to the angle between the multiple sensors.
3. The spectroscopic detection system of claim 2, wherein, The convergence angle conversion component includes a first scanning lens and a second scanning lens facing each other. The first scanning lens, the second scanning lens, and the first detection device are coaxially arranged. The focal plane of the first scanning lens and the focal plane of the second scanning lens coincide. The scanning point of the first scanning lens coincides with the convergence point of the second reflected beam. The scanning point of the second scanning lens is located on the detection surface of the first detection device.
4. The spectroscopic detection system of claim 1, wherein, It also includes a third scanning lens, located between the third beam splitter and the second detection device, the third scanning lens and the second detection device being coaxially arranged; the focal plane of the third scanning lens is located on the detection surface of the second detection device, and the scanning point of the third scanning lens coincides with the convergence point of the third reflected beam.
5. A beam pointing detection and stabilization system, characterized by, include: A light source control system, comprising a light source and a beam pointing control component corresponding to the light source, wherein the beam pointing control component is used to modulate the beam emitted by the light source; An imaging converging system is used to converge the light beam emitted from the beam pointing control component; and In the spectroscopic detection system as described in any one of claims 1-4, the beam pointing control component is connected to the controller.
6. The optical beam pointing detection and stabilization system of claim 5, wherein, The light source control system further includes a beam pre-stabilization component for receiving the light beam emitted by the light source and detecting the position and angle of the light beam; the beam pre-stabilization component is connected to the controller, and the controller is used to control the beam pre-stabilization component to adjust the position and angle of the light beam according to the position and angle of the light beam, so that the position and angle of the light beam are consistent with a predetermined position and angle.
7. The optical beam pointing detection and stabilization system of claim 6, wherein, The light source control system also includes a beam modulation component, which is used to modulate the beam emitted by the beam pre-stage stabilization component.
8. The optical beam pointing detection and stabilization system of claim 7, wherein, The beam pointing control component includes a spatial light modulator connected to the controller. The spatial light modulator is used to receive the beam emitted by the beam modulation component and modulate at least one of the position, angle, wavefront, and phase of the beam according to the beam adjustment amount.
9. The optical beam pointing detection and stabilization system of claim 8, wherein, The beam pointing control component also includes a light blocking switch connected to the controller, and the controller is used to control whether the light blocking switch blocks the beam emitted by the beam modulation component.
10. The optical beam pointing detection and stabilization system of claim 9, wherein, The beam pointing control component further includes a first reflector, which is used to reflect the beam emitted from the beam modulation component to the spatial light modulator and the light blocking switch.
11. The beam pointing detection and stabilization system according to claim 5, characterized in that, The imaging converging system includes a reflective component, which includes a second reflector. The second reflector is used to adjust the optical path of the beam emitted from the beam pointing control component, so that the optical paths of the beams emitted from the beam pointing control component are equal.
12. The beam pointing detection and stabilization system according to claim 11, characterized in that, The imaging convergence system further includes a 4F imaging component for imaging a light spot on the surface of the beam pointing towards the control component. The 4F imaging component includes a first lens and a second lens arranged coaxially, with the focal lengths of the first lens and the second lens being equal.