Radar scanning control method and device, laser radar system and readable storage medium

Abstract

The application provides a radar scanning control method and device, a laser radar system and a readable storage medium, and relates to the technical field of laser radars. Based on target fast-axis angle equivalent voltage information and target slow-axis angle equivalent voltage information of a MEMS scanner at a current moment, it is determined that a first sequence count value of a target fast-axis vibration period in which the current moment is located belongs to a preset effective line scanning stage. After it is determined that a second sequence count value of a target system clock period in which the current moment is located matches any fast-axis angle value in a plurality of equi-angle interval distributed fast-axis angle values in a target fast-axis vibration period, a laser is driven to emit laser light, so as to realize precise synchronization control effect of scanner fast-axis vibration control operation and laser emission action, and laser uniform dotting scanning effect in a fast-axis field of view angle range.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser radar, in particular to a radar scanning control method and device, a laser radar system and a readable storage medium. BACKGROUND

[0002] With the continuous development of science and technology, laser radar technology is widely used in automatic driving cars, robot cruise, security monitoring and other fields due to its advantages of high resolution, good directivity, strong anti-interference ability, high ranging accuracy, fast response speed and no influence of ground clutter. The laser radar system based on MEMS (Micro-Electro-Mechanical-System) mirror is an important research direction of current laser radar technology.

[0003] At present, the radar scanning control scheme of the laser radar system based on MEMS mirror is to control the MEMS mirror to do simple harmonic vibration in the fast axis direction and the slow axis direction, and when the MEMS mirror vibrates to a specified angle in the fast axis direction, the laser is controlled to emit laser outward through the MEMS mirror at a specific frequency (i.e. equal time interval), so that the emitted laser is projected onto the scanned object, thereby realizing the laser dot scanning effect on the scanned object.

[0004] However, it is worth noting that this radar scanning control scheme will cause the dot density of the laser emitted at a specific frequency to be much higher near the center of the fast axis field of view angle than near the two sides of the fast axis field of view angle due to the characteristics that the rotation speed of the MEMS mirror is fast when it rotates to the center position of the fast axis field of view angle, and the rotation speed of the MEMS mirror is slow when it rotates to the two side positions of the fast axis field of view angle, which cannot realize the uniform dot scanning effect of the laser in the fast axis field of view angle range. At the same time, the real-time harmonic vibration of the MEMS mirror and the laser emission timing of the laser are often not synchronized, which makes it difficult to realize the uniform dot scanning effect of the laser in the fast axis field of view angle range, and cannot effectively ensure that the corresponding laser radar system achieves the expected radar resolution and the expected scanning point cloud distribution effect. SUMMARY

[0005] Therefore, the purpose of the present application is to provide a radar scanning control method and device, a laser radar system and a readable storage medium, which can emit laser at a specific fast axis angle interval in each fast axis vibration period in the effective line scanning phase in a single slow axis motion period, to realize precise synchronization control effect between the mirror fast axis vibration control operation and the laser emission action, and to realize the uniform dot scanning effect of the laser in the fast axis field of view angle range, so as to ensure that the corresponding laser radar system can realize the expected radar resolution and the expected scanning point cloud effect.

[0006] In order to achieve the above object, the technical scheme adopted by the embodiment of the present application is as follows:

[0007] In a first aspect, the present application provides a radar scanning control method applied to a master control chip included in a laser radar system, wherein the laser radar system further includes a MEMS mirror and a laser, the master control chip is electrically connected with the MEMS mirror, and is used for driving the MEMS mirror to do simple harmonic vibration in a fast axis direction according to a sinusoidal driving signal, and driving the MEMS mirror to do linear reciprocating motion in a slow axis direction according to a sawtooth wave driving signal; the master control chip is electrically connected with the laser, and is used for driving the laser to emit laser through the MEMS mirror; and the method comprises the following steps:

[0008] obtaining target slow axis angle equivalent voltage information and target fast axis angle equivalent voltage information fed back by the MEMS mirror at a current moment;

[0009] determining a first order count value of a target fast axis vibration period in which the current moment is located within a current slow axis motion period according to the target fast axis angle equivalent voltage information and the target slow axis angle equivalent voltage information;

[0010] detecting whether the first order count value belongs to a preset effective line scanning stage of the current slow axis motion period;

[0011] in a case where it is detected that the first order count value belongs to the preset effective line scanning stage of the current slow axis vibration period, determining a second order count value of a target system clock period in which the current moment is located within the target fast axis vibration period;

[0012] judging whether the second order count value matches any system clock period order count value recorded in a preset fast axis scanning table corresponding to the target fast axis vibration period, and driving the laser to emit laser through the MEMS mirror when it is judged that the second order count value successfully matches any system clock period order count value, wherein the preset fast axis scanning table records system clock period order count values corresponding to a plurality of fast axis angle values distributed at equal angles within a corresponding fast axis vibration period.

[0013] In a second aspect, the present application provides a radar scanning control device applied to a master control chip included in a laser radar system, wherein the laser radar system further includes a MEMS mirror and a laser, the master control chip is electrically connected with the MEMS mirror, and is used for driving the MEMS mirror to do simple harmonic vibration in a fast axis direction according to a sinusoidal driving signal, and driving the MEMS mirror to do linear reciprocating motion in a slow axis direction according to a sawtooth wave driving signal; the master control chip is electrically connected with the laser, and is used for driving the laser to emit laser through the MEMS mirror; and the device comprises the following steps:

[0014] oscillator voltage acquisition module configured to acquire target slow-axis angle equivalent voltage information and target fast-axis angle equivalent voltage information fed back by the MEMS galvanometer at a current time point;

[0015] a fast-axis count determination module configured to determine, according to the target fast-axis angle equivalent voltage information and the target slow-axis angle equivalent voltage information, a first-order count value of a target fast-axis vibration period in a current slow-axis motion period at the current time point;

[0016] an effective scanning detection module configured to detect whether the first-order count value belongs to a preset effective line scanning stage of the current slow-axis motion period;

[0017] a clock count determination module configured to, in a case where it is detected that the first-order count value belongs to a preset effective line scanning stage of the current slow-axis vibration period, determine a second-order count value of a target system clock period in the target fast-axis vibration period at the current time point;

[0018] a laser emission control module configured to judge whether the second-order count value matches any system clock period order count value recorded in a preset fast-axis scanning table corresponding to the target fast-axis vibration period, and drive the laser to emit laser light through the MEMS galvanometer in a case where it is determined that the second-order count value successfully matches any system clock period order count value, wherein the preset fast-axis scanning table records system clock period order count values corresponding to a plurality of fast-axis angle values at equal-angle intervals in a corresponding fast-axis vibration period.

[0019] In a third aspect, the present application provides a laser radar system, which comprises a master control chip, a MEMS galvanometer and a laser;

[0020] The master control chip is electrically connected with the MEMS galvanometer, and is configured to drive the MEMS galvanometer to do simple harmonic vibration in a fast-axis direction according to a sinusoidal driving signal, and drive the MEMS galvanometer to do linear reciprocating motion in a slow-axis direction according to a sawtooth wave driving signal;

[0021] The master control chip is electrically connected with the laser, and is configured to drive the laser to emit laser light through the MEMS galvanometer;

[0022] The master control chip stores a computer program, and can realize the radar scanning control method of any one of the preceding embodiments by executing the computer program.

[0023] In an optional embodiment, the system further comprises an analog-to-digital conversion chip and a digital-to-analog conversion chip;

[0024] The digital-to-analog conversion chip is arranged between the master control chip and the MEMS galvanometer, and is configured to perform digital-to-analog conversion processing on the sinusoidal wave driving signal and the sawtooth wave driving signal output by the master control chip to the MEMS galvanometer, and transmit the sinusoidal wave driving signal and the sawtooth wave driving signal after the digital-to-analog conversion processing to the MEMS galvanometer.

[0025] The analog-to-digital conversion chip is arranged between the master control chip and the MEMS galvanometer, and is configured to perform analog-to-digital conversion processing on the slow-axis angle equivalent voltage information and the fast-axis angle equivalent voltage information fed back by the MEMS galvanometer, and transmit the slow-axis angle equivalent voltage information and the fast-axis angle equivalent voltage information after the analog-to-digital conversion processing to the master control chip.

[0026] In a fourth aspect, the present application provides a readable storage medium having a computer program stored thereon, and the computer program is executed by a master control chip included in a laser radar system to implement the radar scanning control method in any one of the preceding embodiments, wherein the laser radar system further includes a MEMS galvanometer and a laser.

[0027] The master control chip is electrically connected with the MEMS galvanometer, and is configured to drive the MEMS galvanometer to perform simple harmonic vibration in the fast-axis direction according to the sinusoidal wave driving signal, and drive the MEMS galvanometer to perform linear reciprocating motion in the slow-axis direction according to the sawtooth wave driving signal.

[0028] The master control chip is electrically connected with the laser, and is configured to drive the laser to emit laser light through the MEMS galvanometer.

[0029] In this case, the beneficial effects of the embodiments of the present application can include the following:

[0030] The application determines the first order count value of the target fast axis vibration period in the current slow axis motion period according to the target fast axis angle equivalent voltage information and the target slow axis angle equivalent voltage information of the MEMS scanner at the current moment, and determines the second order count value of the target system clock period in the target fast axis vibration period when the first order count value belongs to the preset effective line scanning stage of the current slow axis vibration period. Then, when the second order count value corresponds to any system clock period order count value recorded in the preset fast axis scanning table of the target fast axis vibration period, the laser is driven to emit laser through the MEMS scanner, so that the laser is emitted at a specific fast axis angle interval in each fast axis vibration period involving the effective line scanning stage in a single slow axis motion period, to realize the precise synchronization control effect between the scanner fast axis vibration control operation and the laser emission action, and realize the laser uniform dot scanning effect in the fast axis field of view angle range, to ensure that the corresponding laser radar system can realize the expected radar resolution and the expected scanning point cloud effect.

[0031] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0033] Figure 1 One of the composition schematic diagram of the laser radar system provided by the embodiments of the present application;

[0034] Figure 2 The composition schematic diagram of the laser radar system provided by the embodiments of the present application;

[0035] Figure 3 The flowchart of the radar scanning control method provided by the embodiments of the present application;

[0036] Figure 4 The flowchart of one of the sub-steps included in step S220 in Figure 3

[0037] Figure 5 The comparison schematic diagram of the first over-angle extreme value square wave signal and the sine wave driving signal;

[0038] Figure 6 The​Figure 3 Fig. 2 is a flowchart of the sub-steps included in step S220 in Fig. 1;

[0039] Figure 7 Fig. 3 is a flowchart of the sub-steps included in step S220 in Fig. 1; Figure 3 Fig. 4 is a flowchart of the sub-steps included in step S220 in Fig. 1;

[0040] Figure 8 Fig. 5 is a comparison diagram of the rising edge synchronization control signal of the first and second over-angled extreme value square wave signals;

[0041] Figure 9 Fig. 6 is a flowchart of the sub-steps included in step S240 in Fig. 1; Figure 3 Fig. 7 is a flowchart of the sub-steps included in step S240 in Fig. 1;

[0042] Figure 10 Fig. 8 is a comparison diagram of the rising edge synchronization control signal of the first over-angled extreme value square wave signal and the change of the system clock sequential count value;

[0043] Figure 11 Fig. 9 is a working diagram of the laser radar system provided by the embodiment of the present application;

[0044] Figure 12 Fig. 10 is a working diagram of the laser radar system provided by the embodiment of the present application;

[0045] Figure 13 Fig. 11 is a composition diagram of the radar scanning control device provided by the embodiment of the present application.

[0046] Fig. 12 is a composition diagram of the radar scanning control device provided by the embodiment of the present application. DETAILED DESCRIPTION

[0047] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below in connection with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application, but merely represent selected embodiments of the application. Based upon this description of embodiments of the application, all other embodiments obtained by those of ordinary skill in the art having benefit of the description of the application are within the scope of the application.

[0049] It should be noted that similar reference numerals and letters refer to similar items throughout the various figures, and once an item is defined in one figure, that item does not need to be further defined and explained in subsequent figures.

[0050] In the description of the application, it is to be understood that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly understood by those skilled in the art, and is merely for the convenience of describing the application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the application.

[0051] In the description of the application, it is to be understood that, unless otherwise explicitly specified and limited, the terms "set", "mount", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0052] In addition, in the description of the application, it can be understood that the relational terms such as "first" and "second" and the like are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or device. Without more limitations, the element defined by the statement "including a" does not exclude the presence of additional identical elements in the process, method, article or device including the element. For those of ordinary skill in the art, the specific meaning of the above terms in the application can be understood according to the specific circumstances.

[0053] Some embodiments of the present application will be described in detail with reference to the drawings. The following embodiments and features of the embodiments can be combined with each other without conflict.

[0054] Please refer to Figure 1 , Figure 1 is one of the composition schematic diagrams of the laser radar system 10 provided by the embodiments of the present application. In the embodiments of the present application, the laser radar system 10 can include a master chip 11, a MEMS mirror 12 and a laser 13, wherein the master chip 11 can be, but is not limited to, at least one of a central processing unit (CPU), a graphics processing unit (GPU) and a network processor (NP), a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, a discrete gate or transistor logic device, a discrete hardware component.

[0055] In the embodiments, the master chip 11 is electrically connected with the MEMS mirror 12, for driving the MEMS mirror 12 to do simple harmonic vibration in the fast axis direction according to a sinusoidal driving signal, and driving the MEMS mirror 12 to do linear reciprocating motion in the slow axis direction according to a sawtooth wave driving signal.

[0056] The fast axis direction of the MEMS mirror 12 corresponds to the horizontal scanning direction of the laser radar system 10, and the simple harmonic vibration of the fast axis of the MEMS mirror 12 is used to ensure that the laser radar system 10 realizes reciprocating line scanning function in the horizontal direction, and the sinusoidal driving signal is used to express the corresponding relationship between the fast axis angle value (i.e. the rotation angle value of the MEMS mirror 12 in the fast axis direction) and time in the form of a sinusoidal wave.

[0057] The slow axis direction of the MEMS mirror 12 corresponds to the vertical scanning direction of the laser radar system 10, and the slow axis motion of the MEMS mirror 12 is used to ensure that the laser radar system 10 realizes reciprocating frame scanning function in the vertical direction, and the sawtooth wave driving signal is used to express the corresponding relationship between the slow axis angle value (i.e. the rotation angle value of the MEMS mirror 12 in the slow axis direction) and time in the form of a sawtooth wave. The period length of one slow axis motion cycle corresponding to the sawtooth wave driving signal is much longer than the period length of one fast axis vibration cycle of the sinusoidal driving signal.

[0058] In the embodiment, the master control chip 11 can also obtain the slow-axis angle equivalent voltage information and the fast-axis angle equivalent voltage information corresponding to each motion moment from the MEMS scanner 12. The slow-axis angle equivalent voltage information is an actual voltage value substantially equivalent to the real-time slow-axis angle value of the MEMS scanner 12 at the corresponding motion moment, and the master control chip 11 can preliminarily understand the size of the real-time slow-axis angle value of the corresponding MEMS scanner 12 based on the obtained slow-axis angle equivalent voltage information; the fast-axis angle equivalent voltage information is an actual voltage value substantially equivalent to the real-time fast-axis angle value of the MEMS scanner 12 at the corresponding motion moment, and the master control chip 11 can preliminarily understand the size of the real-time fast-axis angle value of the corresponding MEMS scanner 12 based on the obtained fast-axis angle equivalent voltage information.

[0059] In the embodiment, the master control chip 11 is electrically connected with the laser 13, and is configured to drive the laser 13 to emit laser light through the MEMS scanner 12. The master control chip 11 can send a pulse control signal to the laser 13, so that the laser 13 emits a laser pulse according to the pulse control signal. At this time, the laser pulse emitted by the laser 13 can be projected onto the object to be scanned under the action of the MEMS scanner 12 for laser dot scanning.

[0060] In the embodiment, the master control chip 11 can include a radar scanning control device 100, which includes at least one software function module capable of being stored in the master control chip 11 in the form of software or firmware. The master control chip 11 can execute the software function modules and computer programs included in the radar scanning control device 100, so as to ensure that the laser radar system 10 can emit laser light at specific fast-axis angle intervals in each fast-axis vibration period of the effective line scanning stage in a single slow-axis motion period, thereby realizing precise synchronization control effect between the mirror fast-axis vibration control operation and the laser emission action, and realizing the effect of uniform dot scanning of laser light in the fast-axis field of view angle range, and ensuring that the corresponding laser radar system 10 can realize the expected radar resolution and the expected scanning point cloud effect.

[0061] Optionally, please refer to Figure 2 , Figure 2 is a second constituent schematic diagram of the laser radar system 10 provided in the embodiment. In the embodiment, the laser radar system 10 can further include an analog-to-digital conversion chip 15 and a digital-to-analog conversion chip 14.

[0062] In the embodiment, the digital-to-analog conversion chip 14 is arranged between the master control chip 11 and the MEMS galvanometer 12, and the master control chip 11 is electrically connected with the MEMS galvanometer 12 through the digital-to-analog conversion chip 14. The digital-to-analog conversion chip 14 is configured to perform digital-to-analog conversion on the digital driving signal (including the sine wave driving signal and the sawtooth wave driving signal expressed in the form of a digital signal) output to the MEMS galvanometer 12 when the master control chip 11 generates the galvanometer driving signal based on the DDS (Direct Digital Synthesizer, direct digital frequency synthesis) mode, and transmit the analog voltage driving signal (including the sine wave driving signal and the sawtooth wave driving signal expressed in the form of an analog signal) obtained through the digital-to-analog conversion to the MEMS galvanometer 12 to drive the MEMS galvanometer 12 to vibrate in the fast axis direction and the slow axis direction, respectively.

[0063] In the embodiment, the analog-to-digital conversion chip 15 is arranged between the master control chip 11 and the MEMS galvanometer 12, and the MEMS galvanometer 12 is electrically connected with the master control chip 11 through the analog-to-digital conversion chip 15. The analog-to-digital conversion chip 15 is configured to perform analog-to-digital conversion on the slow axis angle equivalent voltage information and the fast axis angle equivalent voltage information expressed in the form of an analog signal fed back by the MEMS galvanometer 12, and transmit the slow axis angle equivalent voltage information and the fast axis angle equivalent voltage information expressed in the form of a digital signal obtained through the analog-to-digital conversion to the master control chip 11.

[0064] It can be understood that, Figure 1 and Figure 2 The block diagrams shown in Figure 1 or Figure 2 may include more or fewer components than shown in Figure 1 or Figure 2 may have different configurations than shown in Figure 1 or Figure 2 The components shown in

[0065] In the present application, in order to ensure that the master control chip 11 in the laser radar system 10 can achieve precise synchronization control effect between the galvanometer fast axis vibration control operation and the laser emission action, and the laser uniform dot scanning effect in the fast axis field of view angle range, so as to ensure that the laser radar system 10 can achieve the expected radar resolution and the expected scanning point cloud effect, the present application embodiment provides a radar scanning control method applied to the above-mentioned master control chip 11 to achieve the above-mentioned purpose. The radar scanning control method provided by the present application will be described in detail below.

[0066] Please refer to Figure 3 , Figure 3is a flowchart of a radar scanning control method provided by an embodiment of the present application. In the embodiment of the present application, the radar scanning control method can include steps S210-S250.

[0067] In step S210, target slow-axis angle equivalent voltage information and target fast-axis angle equivalent voltage information fed back by the MEMS scanner at the current time are acquired.

[0068] In the embodiment, the MEMS scanner 12 can feed back slow-axis angle equivalent voltage information and fast-axis angle equivalent voltage information of itself at different motion times to the master control chip 11 in real time. The target slow-axis angle equivalent voltage information is an actual voltage value substantially equivalent to an actual slow-axis angle value of the MEMS scanner 12 at the current time, and the target fast-axis angle equivalent voltage information is an actual voltage value substantially equivalent to an actual fast-axis angle value of the MEMS scanner 12 at the current time.

[0069] In step S220, a first-order count value of a target fast-axis vibration period in which the current time is located within a current slow-axis motion period is determined according to the target fast-axis angle equivalent voltage information and the target slow-axis angle equivalent voltage information.

[0070] In the embodiment, the first-order count value is used to describe a specific occurrence order number of the target fast-axis vibration period within the current slow-axis motion period. The target fast-axis vibration period is a fast-axis vibration period including the current time.

[0071] The step of determining, by the master control chip 11, the first-order count value of the target fast-axis vibration period in which the current time is located within the current slow-axis motion period according to the target fast-axis angle equivalent voltage information and the target slow-axis angle equivalent voltage information can include:

[0072] constructing a first over-angle extreme value square wave signal of the MEMS scanner at the current time which has the same frequency and the same phase as the sinusoidal wave driving signal according to the target fast-axis angle equivalent voltage information, and constructing a second over-angle extreme value square wave signal of the MEMS scanner at the current time which has the same frequency and the same phase as the sawtooth wave driving signal according to the target slow-axis angle equivalent voltage information;

[0073] determining the first-order count value of the target fast-axis vibration period in which the current time is located within the current slow-axis motion period according to the first over-angle extreme value square wave signal and the second over-angle extreme value square wave signal.

[0074] In the process, the signal frequency of the first over-angle extreme square wave signal is consistent with the signal frequency of the sine wave driving signal, the actual phase value of the first over-angle extreme square wave signal is consistent with the actual phase value of the sine wave driving signal, the motion moment corresponding to the signal rising edge of the first over-angle extreme square wave signal is the motion moment corresponding to the fast-axis angle minimum value of the sine wave driving signal, the motion moment corresponding to the signal falling edge of the first over-angle extreme square wave signal is the motion moment corresponding to the fast-axis angle maximum value of the sine wave driving signal, and the square wave period between adjacent two signal rising edges in the first over-angle extreme square wave signal is a fast-axis vibration period of the sine wave driving signal.

[0075] The signal frequency of the second over-angle extreme square wave signal is consistent with the signal frequency of the sawtooth wave driving signal, the actual phase value of the second over-angle extreme square wave signal is consistent with the actual phase value of the sawtooth wave driving signal, the motion moment corresponding to the signal rising edge of the second over-angle extreme square wave signal is the motion moment corresponding to the slow-axis angle minimum value of the sawtooth wave driving signal, the motion moment corresponding to the signal falling edge of the second over-angle extreme square wave signal is the motion moment corresponding to the slow-axis angle maximum value of the sawtooth wave driving signal, and the square wave period between adjacent two signal rising edges in the second over-angle extreme square wave signal is a slow-axis motion period of the sawtooth wave driving signal.

[0076] The master control chip 11 can construct a corresponding first over-angle extreme square wave signal based on the target fast-axis angle equivalent voltage information, so as to roughly describe the vibration trend and vibration starting time of the MEMS scanner 12 in the fast-axis direction in a time period from the start to the current time. The high level of the first over-angle extreme square wave signal is used to represent the vibration trend of the maximum positive field angle vibration in the fast-axis field angle range (i.e., the actual fast-axis angle value at the corresponding moment changes from the fast-axis angle minimum value to the fast-axis angle maximum value), the low level of the first over-angle extreme square wave signal is used to represent the vibration trend of the minimum negative field angle vibration in the fast-axis field angle range (i.e., the actual fast-axis angle value at the corresponding moment changes from the fast-axis angle maximum value to the fast-axis angle minimum value), and the motion moment corresponding to one signal rising edge of the first over-angle extreme square wave signal is the vibration starting moment of one fast-axis vibration period of the MEMS scanner 12.

[0077] The master chip 11 can construct a corresponding second over-angle extreme square wave signal based on the target slow-axis angle equivalent voltage information, so as to roughly describe the motion trend and motion starting time of the MEMS scanner 12 in the slow-axis direction in the time period from the start to the current time. The high level of the second over-angle extreme square wave signal is used to represent the motion trend of turning to the maximum positive field angle in the slow-axis field angle range (i.e., the actual slow-axis angle value at the corresponding time changes from the slow-axis angle minimum value to the slow-axis angle maximum value), and the low level of the second over-angle extreme square wave signal is used to represent the motion trend of turning to the minimum negative field angle in the slow-axis field angle range (i.e., the actual slow-axis angle value at the corresponding time changes from the slow-axis angle maximum value to the slow-axis angle minimum value). The motion time corresponding to a signal rising edge of the second over-angle extreme square wave signal is the motion starting time of a slow-axis motion period of the MEMS scanner 12.

[0078] Optionally, please refer to Figure 4 , Figure 4 is Figure 3 The flowchart of one of the sub-steps included in step S220 is shown in FIG. 6. In the embodiment of the present application, the step “constructing the first over-angle extreme square wave signal of the MEMS scanner at the current time with the same frequency and phase as the sinusoidal wave driving signal according to the target fast-axis angle equivalent voltage information” in step S220 can include sub-steps S221-S223, so as to ensure that the first over-angle extreme square wave signal constructed can effectively describe the vibration trend and vibration starting time of the MEMS scanner 12 in the fast-axis direction in the time period from the start to the current time.

[0079] In sub-step S221, the target fast-axis angle equivalent voltage information and the historical fast-axis angle equivalent voltage information corresponding to each historical time are compared with the first reference voltage threshold when the fast-axis angle is zero degree, respectively, and a corresponding first over-angle zero-value square wave signal is constructed according to the voltage comparison result.

[0080] In the embodiment, when the fast-axis angle equivalent voltage information at a certain motion time is greater than the first reference voltage threshold, the fast-axis angle equivalent voltage information at the motion time corresponds to a high level value in the first over-angle zero-value square wave signal; when the fast-axis angle equivalent voltage information at a certain motion time is less than the first reference voltage threshold, the fast-axis angle equivalent voltage information at the motion time corresponds to a low level value in the first over-angle zero-value square wave signal.

[0081] At this time, as Figure 5The time corresponding effect between the first over-angle zero-value square wave signal and the sine wave driving signal and the fast-axis angle value-level value corresponding relationship are shown. The motion time corresponding to the signal falling edge and the signal rising edge of the first over-angle zero-value square wave signal respectively is the motion time when the MEMS scanner 12 moves to the zero-degree slow-axis angle. The high level of the first over-angle zero-value square wave signal corresponds to the positive field angle range (i.e. the positive fast-axis angle range) of the sine wave driving signal. The low level of the first over-angle zero-value square wave signal corresponds to the negative field angle range (i.e. the negative fast-axis angle range) of the sine wave driving signal.

[0082] In the sub-step S222, the extreme value occurrence time corresponding to each of the fast-axis angle maximum value and the fast-axis angle minimum value in the sine wave driving signal is determined.

[0083] In the present embodiment, the main control chip 11 can directly determine the specific motion time (i.e. the extreme value occurrence time) of each of the fast-axis angle maximum value (i.e. the maximum positive fast-axis angle value) and the fast-axis angle minimum value (i.e. the minimum negative fast-axis angle value) in the sine wave driving signal based on the vibration frequency of the sine wave driving signal. Figure 5 The extreme value occurrence time of each of the fast-axis angle maximum value and the extreme value occurrence time of each of the fast-axis angle minimum value in the sine wave driving signal in the present embodiment.

[0084] In the sub-step S223, the level jump adjustment processing is performed on the first over-angle zero-value square wave signal based on the extreme value occurrence time of each of the fast-axis angle maximum value and the fast-axis angle minimum value to obtain the first over-angle extreme-value square wave signal.

[0085] In the present embodiment, the main control chip 11 can determine the actual level value of each of the extreme value occurrence time (i.e. the actual level value corresponding to the fast-axis angle maximum value is the high level value, and the actual level value corresponding to the fast-axis angle minimum value is the low level value) in the first over-angle zero-value square wave signal based on the extreme value occurrence time of each of the fast-axis angle maximum value and the fast-axis angle minimum value, and then determine whether each motion time in the first over-angle zero-value square wave signal is between two adjacent extreme value occurrence times, and assign the actual level value corresponding to the latter one of the two adjacent extreme value occurrence times to the motion time when it is determined that the motion time is between the two adjacent extreme value occurrence times (i.e. each motion time in the time period from the fast-axis angle maximum value to the fast-axis angle minimum value is assigned the low level value, and each motion time in the time period from the fast-axis angle minimum value to the fast-axis angle maximum value is assigned the high level value), so as to complete the level jump adjustment operation on the first over-angle zero-value square wave signal, and obtain the first over-angle extreme-value square wave signal which effectively describes the vibration trend and the vibration starting time of the MEMS scanner 12 in the fast-axis direction in the time period from the start to the current time. Figure 5The time corresponding effect between the illustrated first over-angle extreme square wave signal and the sine wave driving signal and the fast axis angle value-level value corresponding relationship.

[0086] Therefore, the first over-angle extreme square wave signal constructed by the above-mentioned sub-steps S221-S223 can effectively describe the vibration trend and vibration starting time of the MEMS scanner 12 in the fast axis direction within the time period from the start to the current time.

[0087] Alternatively, please refer to Figure 6 , Figure 6 is Figure 3 The flowchart of the sub-steps included in step S220 in FIG. 8 is shown in FIG. 9. In the embodiment of the present application, the step "constructing a second over-angle extreme square wave signal of the MEMS scanner at the current time with the same frequency and phase as the sawtooth wave driving signal according to the target slow axis angle equivalent voltage information" in step S220 can include sub-steps S225-S227 to ensure that the second over-angle extreme square wave signal constructed can effectively describe the movement trend and movement starting time of the MEMS scanner 12 in the slow axis direction within the time period from the start to the current time.

[0088] In sub-step S225, the target slow axis angle equivalent voltage information and the historical slow axis angle equivalent voltage information corresponding to each historical time are compared with the second reference voltage threshold value when the slow axis angle is zero degrees, and a corresponding second over-angle zero value square wave signal is constructed according to the voltage comparison result.

[0089] In the embodiment, when the slow axis angle equivalent voltage information of a certain movement time is greater than the second reference voltage threshold value, the slow axis angle equivalent voltage information of the movement time corresponds to a high level value in the second over-angle zero value square wave signal; when the slow axis angle equivalent voltage information of a certain movement time is less than the second reference voltage threshold value, the slow axis angle equivalent voltage information of the movement time corresponds to a low level value in the second over-angle zero value square wave signal.

[0090] At this time, the movement time corresponding to the signal falling edge and the signal rising edge of the second over-angle zero value square wave signal respectively is the movement time when the MEMS scanner 12 moves to the zero degree slow axis angle, the high level of the second over-angle zero value square wave signal corresponds to the positive field angle range (i.e. the positive slow axis angle range) of the sawtooth wave driving signal, and the low level of the second over-angle zero value square wave signal corresponds to the negative field angle range (i.e. the negative slow axis angle range) of the sawtooth wave driving signal.

[0091] In sub-step S226, the extreme value occurrence time corresponding to the maximum and minimum slow axis angle in the sawtooth wave driving signal is determined.

[0092] In the embodiment, the main control chip 11 can directly determine the specific motion time (i.e., the extreme value occurrence time) of the maximum slow axis angle value (i.e., the maximum positive slow axis angle value) and the minimum slow axis angle value (i.e., the minimum negative slow axis angle value) in the sawtooth wave driving signal based on the vibration frequency of the sawtooth wave driving signal.

[0093] In the embodiment, the main control chip 11 can directly determine the specific motion time (i.e., the extreme value occurrence time) of the maximum slow axis angle value (i.e., the maximum positive slow axis angle value) and the minimum slow axis angle value (i.e., the minimum negative slow axis angle value) in the sawtooth wave driving signal based on the vibration frequency of the sawtooth wave driving signal.

[0094] In the embodiment, the main control chip 11 can directly determine the specific motion time (i.e., the extreme value occurrence time) of the maximum slow axis angle value (i.e., the maximum positive slow axis angle value) and the minimum slow axis angle value (i.e., the minimum negative slow axis angle value) in the sawtooth wave driving signal based on the vibration frequency of the sawtooth wave driving signal.

[0095] In the embodiment, the main control chip 11 can directly determine the specific motion time (i.e., the extreme value occurrence time) of the maximum slow axis angle value (i.e., the maximum positive slow axis angle value) and the minimum slow axis angle value (i.e., the minimum negative slow axis angle value) in the sawtooth wave driving signal based on the vibration frequency of the sawtooth wave driving signal.

[0096] Optionally, please refer to Figure 7 , Figure 7 is Figure 3 the flowchart of the substeps included in step S220 in FIG. 8. In the embodiment, the step “determining the first order count value of the target fast axis vibration period in the current slow axis motion period in which the current time is located” in step S220 can include substeps S228-S2211 to determine the first order count value of the target fast axis vibration period in the current slow axis motion period in which the current time is located.

[0097] Sub-step S228, detecting whether the current time corresponds to a signal rising edge in the second over-angle extreme square wave signal.

[0098] In the embodiment, the main control chip 11 determines that a certain motion time corresponds to a signal rising edge in the second over-angle extreme square wave signal, that is, the main control chip 11 needs to enter a new slow-axis motion period from a slow-axis motion period at the motion time, at which time the order counting processing needs to be performed for the sequentially appearing fast-axis vibration periods in the new slow-axis motion period, and the main control chip 11 also generates a second rising edge synchronization control signal at the motion time to represent a slow-axis motion period by a time period between adjacent two second rising edge synchronization control signals corresponding to the second over-angle extreme square wave signal, as shown in the signal generation time distribution of the second rising edge synchronization control signal. Figure 8 The order counting value of the fast-axis vibration period closest to the motion time in the slow-axis motion period after the motion time corresponding to the second second rising edge synchronization control signal is re-counted from 000.

[0099] The main control chip 11 determines that a certain motion time does not correspond to any signal rising edge in the second over-angle extreme square wave signal, that is, the motion time is still in a slow-axis motion period, at which time the order counting processing needs to be continuously performed for the subsequently sequentially appearing fast-axis vibration periods in the slow-axis motion period, as shown in the order counting values of the continuously distributed multiple fast-axis vibration periods in a single slow-axis motion period. Figure 8 The order counting values of the fast-axis vibration periods sequentially change from 000 to 033.

[0100] Therefore, the main control chip 11 can judge whether the current time belongs to the motion starting time of a new slow-axis motion period by detecting whether the current time corresponds to a signal rising edge in the second over-angle extreme square wave signal.

[0101] Sub-step S229, in the case of detecting that the current time corresponds to a signal rising edge in the second over-angle extreme square wave signal, clearing the current recorded fast-axis period order counting value, and taking the cleared fast-axis period order counting value as the first order counting value.

[0102] In the embodiment, the fast-axis period order count value is used to represent the occurrence order of the fast-axis vibration period corresponding to the signal rising edge of the first over-angle extreme square wave signal in the history closest to the current time in the corresponding slow-axis movement period. When it is detected that the current time corresponds to a signal rising edge in the second over-angle extreme square wave signal, it indicates that the current time belongs to the movement starting time of a new slow-axis movement period in essence, at this time, the main control chip 11 needs to clear the fast-axis period order count value recorded at present, and then sequentially count the order of each fast-axis vibration period in the new slow-axis movement period, at this time, the first order count value is zero.

[0103] In the embodiment, when it is detected that the current time does not correspond to a signal rising edge in the second over-angle extreme square wave signal, it indicates that the current time is still in the original slow-axis movement period in essence, at this time, it is needed to detect whether the current time corresponds to a signal rising edge in the first over-angle extreme square wave signal to determine whether the current time belongs to the vibration starting time of a new fast-axis vibration period in the original slow-axis movement period.

[0104] In the embodiment, when it is detected that the current time does not correspond to a signal rising edge in the second over-angle extreme square wave signal, it indicates that the current time is still in the original slow-axis movement period in essence, at this time, it is needed to detect whether the current time corresponds to a signal rising edge in the first over-angle extreme square wave signal to determine whether the current time belongs to the vibration starting time of a new fast-axis vibration period in the original slow-axis movement period.

[0105] In the embodiment, when it is detected that the current time does not correspond to a signal rising edge in the second over-angle extreme square wave signal, it indicates that the current time is still in the original slow-axis movement period in essence, at this time, it is needed to detect whether the current time corresponds to a signal rising edge in the first over-angle extreme square wave signal to determine whether the current time belongs to the vibration starting time of a new fast-axis vibration period in the original slow-axis movement period. Figure 8 As shown in the signal generation time distribution of the first rising edge synchronization control signal.

[0106] In the embodiment, when it is detected that the current time does not correspond to a signal rising edge in the second over-angle extreme square wave signal, it indicates that the current time is still in the original slow-axis movement period in essence, at this time, it is needed to detect whether the current time corresponds to a signal rising edge in the first over-angle extreme square wave signal to determine whether the current time belongs to the vibration starting time of a new fast-axis vibration period in the original slow-axis movement period.

[0107] In the embodiment, when the host chip 11 detects that the current time in the original slow-axis motion period corresponds to a signal rising edge in the first over-angle extreme value square wave signal, it indicates that the current time is essentially the vibration starting time of a new fast-axis vibration period in the original slow-axis motion period. At this time, the fast-axis period order count value recorded for the original slow-axis motion period can be directly incremented by one to obtain the actual order count value of the new fast-axis vibration period (i.e., the target fast-axis vibration period) (i.e., the first order count value of the target fast-axis vibration period in the current slow-axis motion period).

[0108] When the host chip 11 detects that the current time in the original slow-axis motion period does not correspond to a signal rising edge in the first over-angle extreme value square wave signal, it indicates that the current time is essentially in a fast-axis vibration period that has already appeared in the original slow-axis motion period. At this time, the currently recorded fast-axis period order count value can be directly used as the first order count value.

[0109] Thus, the application can determine the first order count value of the target fast-axis vibration period including the current time in the current slow-axis motion period by executing the above-mentioned sub-step S228 to sub-step S2211.

[0110] Step S230: Detect whether the first order count value belongs to a preset effective line scanning phase of the current slow-axis motion period.

[0111] In the embodiment, the preset effective line scanning phase of a single slow-axis motion period is used to describe the specific time phase range in which the laser radar system 10 actually performs the effective line scanning operation in a single slow-axis motion period. The host chip 11 can construct a line effective scanning signal based on the expected field blanking requirement of the laser radar system 10, so as to represent the effective line scanning phase by the high level phase of the line effective scanning signal in a slow-axis motion period, and represent the field blanking phase (i.e., the invalid line scanning phase) by the low level phase of the line effective scanning signal in a slow-axis motion period. At this time, the preset effective line scanning phase of a single slow-axis motion period can be conveniently constrained to a plurality of effective line scanning fast-axis vibration periods (i.e., fast-axis vibration periods in which laser emission can be performed) each having a preset order count value in the same slow-axis motion period, so as to facilitate the host chip 11 to identify whether the target fast-axis vibration period corresponding to the current time can currently emit laser, as shown in the following table. Figure 8 The effective line scanning phase of the line effective scanning signal in a single slow-axis motion period is composed of a plurality of fast-axis vibration periods corresponding to order count values from 001 to 032. At this time, step S230 can include:

[0112] Matching the first order count value with a plurality of preset order count values included in the preset effective line scanning phase;

[0113] If the first sequence count value successfully matches any preset sequence count value, it is determined that the first sequence count value belongs to the preset effective line scanning stage of the current slow-axis motion period.

[0114] If the first sequence count value does not successfully match any preset sequence count value, it is determined that the first sequence count value does not belong to the preset effective line scanning stage of the current slow-axis motion period.

[0115] Therefore, the application can effectively determine whether the laser radar system 10 can emit laser within the target fast-axis vibration period corresponding to the current time by executing the specific step flow of step S230, thereby facilitating the precise synchronization control effect between the galvanometer fast-axis vibration control operation and the laser emission action.

[0116] Step S240, in the case where it is detected that the first sequence count value belongs to the preset effective line scanning stage of the current slow-axis vibration period, determining a second sequence count value of the target system clock period in the target fast-axis vibration period at the current time.

[0117] In the embodiment, when the host chip 11 detects that the first sequence count value of the target fast-axis vibration period in the current slow-axis motion period belongs to the preset effective line scanning stage of the current slow-axis motion period, it indicates that the laser radar system 10 can achieve effective line scanning effect by emitting laser within the target fast-axis vibration period corresponding to the current time, at this time, the host chip 11 can determine the second sequence count value of the target system clock period in the target fast-axis vibration period at the current time according to the first over-angle extreme square wave signal and the system clock signal. The second sequence count value is used to describe the specific sequence number of the system clock period in the target fast-axis vibration period, and the target system clock period is the system clock period with the current time as the clock period starting time.

[0118] Optionally, please refer to Figure 9 , Figure 9 is Figure 3 the flowchart of the sub-steps included in step S240. In the embodiment of the application, step S240 can include sub-step S241 to sub-step S244 to determine the second sequence count value of the target system clock period in the current target fast-axis vibration period with the current time as the clock period starting time.

[0119] Sub-step S241, detecting whether the current time corresponds to a signal rising edge in the first over-angle extreme square wave signal.

[0120] In this embodiment, the main control chip 11 determines a motion moment corresponding to the rising edge of the first extreme square wave signal, indicating that the main control chip 11 needs to enter a new fast axis oscillation cycle from one fast axis oscillation cycle at this motion moment. At this time, it needs to perform sequential counting processing on each system clock cycle that appears sequentially within this new fast axis oscillation cycle. Simultaneously, the main control chip 11 also generates a first rising edge synchronization control signal at this motion moment, so that the time interval between two adjacent first rising edge synchronization control signals corresponding to the first extreme square wave signal represents a fast axis oscillation cycle. Figure 10 The signal generation timing distribution of the first rising edge synchronization control signal is shown, and the sequence count value of the system clock cycle closest to the motion moment in one fast axis vibration cycle before the motion moment corresponding to the second first rising edge synchronization control signal is significantly greater than 299. However, the sequence count value of the system clock cycle closest to the motion moment in the fast axis vibration cycle after the motion moment corresponding to the second first rising edge synchronization control signal is restarted from 000.

[0121] The main control chip 11 determines from the first extreme square wave signal that a certain motion moment does not correspond to any rising edge of the signal, indicating that the motion moment is still within a fast axis oscillation cycle. At this point, it is necessary to continue sequentially counting each subsequent system clock cycle within that fast axis oscillation cycle. Figure 10 The sequential count values ​​of multiple system clock cycles distributed continuously within a single fast shaft vibration cycle, as shown, change sequentially from 000 to a value much greater than 299.

[0122] Therefore, the main control chip 11 can determine whether the current moment belongs to the vibration start moment of a new fast axis vibration cycle by detecting whether the current moment corresponds to the rising edge of the square wave signal at the first extreme angle.

[0123] Sub-step S242: When the rising edge of the corresponding signal in the first extreme square wave signal at the current time is detected, the currently recorded system clock sequence count value is cleared to zero, and the cleared system clock sequence count value is used as the second sequence count value.

[0124] In this embodiment, the system clock sequence count value is used to characterize the order in which the most recent historical system clock cycle appears within the corresponding fast axis oscillation cycle. When a rising edge of a signal is detected in the first extreme square wave signal at the current time, it indicates that the current time actually belongs to the oscillation start time of a new fast axis oscillation cycle. At this time, the main control chip 11 needs to clear the currently recorded system clock sequence count value to zero, and then perform sequence counting processing on each system clock cycle that appears sequentially within the new fast axis oscillation cycle. At this time, the second sequence count value is zero.

[0125] Sub-step S243, in the case of detecting that the current time does not have a corresponding signal rising edge in the first over-angle extreme square wave signal, detecting whether the current time has a corresponding signal rising edge in the system clock signal.

[0126] In the embodiment, when it is detected that the current time does not have a corresponding signal rising edge in the first over-angle extreme square wave signal, it indicates that the current time is still in the original fast-axis vibration period. At this time, whether the current time is a clock cycle start time of a new system clock cycle in the original fast-axis vibration period is determined by detecting whether the current time has a corresponding signal rising edge in the system clock signal.

[0127] Sub-step S244, in the case of detecting that the current time has a corresponding signal rising edge in the system clock signal, performing plus one processing on the current recorded system clock order count value, and taking the plus one processed system clock order count value as the second order count value.

[0128] In the embodiment, when the main control chip 11 detects that the current time in the original fast-axis vibration period has a corresponding signal rising edge in the system clock signal, it indicates that the current time is a clock cycle start time of a new system clock cycle in the original fast-axis vibration period. At this time, plus one processing can be directly performed on the system clock order count value recorded for the original fast-axis vibration period to obtain the actual order count value of the new system clock cycle (i.e. the second order count value of the target system clock cycle in the target fast-axis vibration period).

[0129] Therefore, by executing the above sub-steps S241-S244, the second order count value of the target system clock cycle taking the current time as the clock cycle start time in the current target fast-axis vibration period can be determined.

[0130] Step S250, determining whether the second order count value matches any system clock cycle order count value recorded in the preset fast-axis scanning table corresponding to the target fast-axis vibration period, and driving the laser to emit laser through the MEMS mirror when it is determined that the second order count value successfully matches any system clock cycle order count value.

[0131] In the embodiment, each fast-axis vibration period corresponding to a preset effective row scanning stage corresponds to a preset fast-axis scanning table, and each preset fast-axis scanning table records a plurality of fast-axis angle values at equal angle intervals in the corresponding fast-axis vibration period. Each preset fast-axis scanning table can be substantially divided into a first half-period scanning table corresponding to the first half period of the corresponding fast-axis vibration period and a second half-period scanning table corresponding to the second half period of the corresponding fast-axis vibration period. The fast-axis scanning starting angle value of the second half-period scanning table corresponding to the same fast-axis vibration period and the fast-axis scanning ending angle value of the first half-period scanning table can have a certain angle interval according to the horizontal angle resolution value of the laser radar system 10, and the angle interval value between the fast-axis angle values corresponding to the adjacent two system clock period order count values in the same half-period scanning table is fixed.

[0132] Therefore, when the master chip 11 determines the second order count value of the target system clock period in which the current time point is located in the target fast-axis vibration period, the second order count value and each system clock period order count value recorded in the preset fast-axis scanning table corresponding to the target fast-axis vibration period are matched, and when the second order count value and a certain system clock period order count value in the preset fast-axis scanning table are successfully matched, it is indicated that the MEMS mirror 12 is currently substantially vibrated to a specific fast-axis angle value in the corresponding preset fast-axis scanning table in the target fast-axis vibration period. At this time, the laser 13 can be controlled to emit laser to the MEMS mirror 12, so that the laser processed by the MEMS mirror 12 can realize the laser uniform dot scanning effect in the fast-axis field of view angle range when projected onto the object to be scanned, cooperate with the adjacent laser point cloud belonging to the same scanning row, and realize the precise synchronization control effect between the mirror fast-axis vibration control operation and the laser emission action.

[0133] Optionally, in one embodiment of this invention, the sequence count values ​​of each system clock cycle recorded by a single preset fast axis scanning table can be arranged sequentially based on the rotation order of the MEMS galvanometer 12 in the fast axis direction. This allows the main control chip 11 to read the sequence count values ​​of each system clock cycle recorded by the preset fast axis scanning table corresponding to the target fast axis vibration cycle one by one. When the main control chip 11 reads a system clock cycle sequence count value, it determines whether the second sequence count value of the target system clock cycle at the current moment matches the currently read system clock cycle sequence count value. If the second sequence count value matches the currently read system clock cycle sequence count value, the main control chip 11 controls the laser 13 to emit laser light through the MEMS galvanometer 12 before continuing to read the next system clock cycle sequence count value. This achieves a precise synchronous control effect between the galvanometer fast axis vibration control operation and the laser emission action, and achieves a uniform laser dot scanning effect within the fast axis field of view.

[0134] Optionally, in one embodiment of this application, there are multiple effective line scanning cycles in the preset effective line scanning phase of a single slow axis motion cycle. Each effective line scanning cycle corresponds to a half-cycle time period of a fast axis vibration cycle. Then, the fast axis angle interval value between two adjacent fast axis angle values ​​belonging to the same half-cycle time period in the preset fast axis scanning table corresponding to a single fast axis vibration cycle is consistent with the horizontal angular resolution value of the lidar system 10. That is, the fast axis angle interval value corresponding to the first half-cycle scanning table and the second half-cycle scanning table corresponding to a single fast axis vibration cycle is a horizontal angular resolution value. The fast axis scanning start angle value of the second half-cycle scanning table belonging to the same fast axis vibration cycle and the fast axis scanning end angle value of the first half-cycle scanning table must be consistent.

[0135] by Figure 11 The following is an example of the operation diagram of the lidar system 10: If the fast-axis field of view range of the lidar system 10 is -10° to 10°, that is, the total degree of the fast-axis field of view of the lidar system 10 is 20°, and the horizontal angular resolution of the lidar system 10 is 0.1°, then if the lidar system 10 uses half a cycle of a fast-axis vibration period as an effective line scanning cycle, then the lidar system 10 needs to scan 200 fast-axis angle values ​​(i.e., θ1 = -9.9°, θ2 = -9.8°, θ3 = -9.7°, ..., θ4) distributed at 0.1° intervals from -10° to 10° within the first half cycle of a single fast-axis vibration period. n＝200Laser points are applied at 10° intervals to achieve an effective line scan. During the latter half of the fast axis oscillation cycle, 200 fast axis angle values ​​(θ1 = 9.9°, θ2 = 9.8°, θ3 = 9.7°, ..., θ4) are distributed at 0.1° intervals from 10° to -10°. n＝200 =-10°) Laser dotting is performed separately to achieve another effective line scanning effect, where the fast axis scanning termination angle value θ in the first half of the cycle is... n＝200 The starting angle value θ1 of the fast axis scanning in the second half of the cycle time differs from the horizontal angular resolution value 0.1°. At this time, it is necessary to perform an arcsine function transformation on the sine wave drive signal to obtain the system clock cycle sequence count value corresponding to each of the 400 fast axis angle values ​​in the same fast axis vibration cycle. This forms the first half-cycle scan table and the second half-cycle scan table corresponding to the first and second half of the fast axis vibration cycle time, respectively. This allows the main control chip 11 to control the laser 13 to emit laser when the second sequence count value of the system clock cycle corresponding to the current moment hits a certain system clock cycle sequence count value in the first and second half of the cycle time. This ensures that the lidar system 10 can achieve the desired radar resolution and the desired scanning point cloud effect.

[0136] Optionally, in another embodiment of this application, the preset effective line scanning phase of a single slow axis motion cycle has multiple effective line scanning sub-phases. Each effective line scanning sub-phase consists of the first half-cycle time period and the second half-cycle time period of each of multiple consecutive fast axis vibration cycles. Then, the preset fast axis scanning tables of each of the multiple fast axis vibration cycles involving the same effective line scanning sub-phase essentially include a first half-cycle scanning table corresponding to the first half-cycle time period and a second half-cycle scanning table corresponding to the second half-cycle time period. The fast axis scanning start angle value of the second half-cycle scanning table belonging to the same fast axis vibration cycle is spaced apart from the fast axis scanning end angle value of the first half-cycle scanning table by a horizontal angular resolution value. The fast axis angle interval value between two adjacent fast axis angle values ​​in the same half-cycle scanning table is a target multiple of the horizontal angular resolution value relative to the total number of half-cycle time periods of a single effective line scanning sub-phase. Furthermore, in any two adjacent fast axis vibration cycles, the fast axis scanning start angle value in the first half-cycle scanning table of the later fast axis vibration cycle is spaced apart from the fast axis scanning end angle value in the second half-cycle scanning table of the previous fast axis vibration cycle by a horizontal angular resolution value.

[0137] by Figure 12The working schematic diagram of the laser radar system 10 is shown as an example for illustration: if the fast-axis field of view angle range of the laser radar system 10 is -10°-10°, that is, the total degree number of the fast-axis field of view angle of the laser radar system 10 is 20°, and the horizontal angle resolution value of the laser radar system 10 is 0.1°, then if the laser radar system 10 adopts 2 continuous fast-axis vibration periods each consisting of a front half period time period and a rear half period time period to form a line scanning sub-stage (that is, the total number of half period time periods of the line scanning sub-stage is 4), then the laser radar system 10 needs to be aimed at 50 fast-axis angle values (for example, the fast-axis angle values in the front half period time period of the first fast-axis vibration period are in equal angle interval and are θ1=-9.9°, θ2=-9.5°, θ3=-9.1°, …, θ n＝50 =9.7° in sequence) distributed at intervals of 4*0.1°=0.4° from -10° to 10° in the front half period time period of the first fast-axis vibration period, and aimed at 50 fast-axis angle values (for example, the fast-axis angle values in the rear half period time period of the first fast-axis vibration period are in equal angle interval and are θ’ n＝50 =9.8°, θ’ n-1＝49 =9.4°, …, θ’2=-9.4°, θ’1=-9.8° in sequence) distributed at intervals of 4*0.1°=0.4° from 10° to -10° in the rear half period time period of the first fast-axis vibration period, and then aimed at 50 fast-axis angle values (for example, the fast-axis angle values in the front half period time period of the second fast-axis vibration period are in equal angle interval and are θ1=-9.7°, θ2=-9.3°, θ3=-8.9°, …, θ n＝50 =9.9° in sequence) distributed at intervals of 4*0.1°=0.4° from -10° to 10° in the front half period time period of the second fast-axis vibration period, and aimed at 50 fast-axis angle values (for example, the fast-axis angle values in the rear half period time period of the second fast-axis vibration period are in equal angle interval and are θ’ n＝50 =10°, θ’ n-1＝49 =9.6°, …, θ’2=-9.2°, θ’1=-9.6° in sequence) distributed at intervals of 4*0.1°=0.4° from 10° to -10° in the rear half period time period of the second fast-axis vibration period, wherein the fast-axis scanning end angle value θ n＝50 of the front half period time period of the first fast-axis vibration period is θ1=-10°, and the fast-axis scanning start angle value θ’ n＝50The difference between the starting angle θ1 of the fast axis scan in the first half of the second fast axis vibration cycle and the ending angle θ'1 of the fast axis scan in the second half of the first fast axis vibration cycle is 0.1°, a horizontal angular resolution value. n＝50 The starting angle value θ' of the fast axis scan during the second half of the cycle. n＝50 The difference of 0.1° in horizontal angular resolution ensures that the total number of laser points between the four consecutive half-cycle time periods reaches 200, satisfying the desired radar resolution. At this point, by performing an arcsine function transformation on the sine wave drive signal, the system clock cycle sequence count values ​​corresponding to each of the 200 fast axis angle values ​​within its respective fast axis vibration cycle can be obtained. This forms the first half-cycle scan table corresponding to the first half-cycle time period of each of the two fast axis vibration cycles, and the second half-cycle scan table corresponding to the second half-cycle time period of each of the two fast axis vibration cycles. This allows the main control chip 11 to control the laser 13 to emit laser when the second sequence count value of the system clock cycle corresponding to the current moment within the current fast axis vibration cycle hits a certain system clock cycle sequence count value, thereby ensuring that the lidar system 10 can achieve the desired radar resolution and the desired scanning point cloud effect.

[0138] Therefore, by executing the above steps S210 to S250, this application can control the lidar system 10 to achieve a precise synchronous control effect between the fast axis vibration control operation of the galvanometer and the laser emission action, as well as a uniform laser dot scanning effect within the fast axis field of view, so as to ensure that the lidar system 10 can achieve the desired radar resolution and the desired scanning point cloud effect.

[0139] In this application, to ensure that the main control chip 11 can execute the aforementioned radar scanning control method through the radar scanning control device 100, this application implements the aforementioned functions by dividing the radar scanning control device 100 into functional modules. The specific composition of the radar scanning control device 100 provided in this application will be described below.

[0140] Please refer to Figure 13 , Figure 13 This is a schematic diagram of the composition of the radar scanning control device 100 provided in the embodiments of this application. In the embodiments of this application, the radar scanning control device 100 may include a galvanometer voltage acquisition module 110, a fast axis counting determination module 120, an effective scan detection module 130, a clock counting determination module 140, and a laser emission control module 150.

[0141] The galvanometer voltage acquisition module 110 is configured to acquire target slow-axis angle equivalent voltage information and target fast-axis angle equivalent voltage information fed back by the MEMS galvanometer at the current time.

[0142] The fast-axis count determination module 120 is configured to determine, according to the target fast-axis angle equivalent voltage information and the target slow-axis angle equivalent voltage information, a first-order count value of a target fast-axis vibration period in which the current time is located within a current slow-axis motion period.

[0143] The effective scan detection module 130 is configured to detect whether the first-order count value belongs to a preset effective line scan stage of the current slow-axis motion period.

[0144] The clock count determination module 140 is configured to, in a case where it is detected that the first-order count value belongs to the preset effective line scan stage of the current slow-axis vibration period, determine a second-order count value of a target system clock period in which the current time is located within the target fast-axis vibration period.

[0145] The laser emission control module 150 is configured to judge whether the second-order count value matches any system clock period order count value recorded in a preset fast-axis scan table corresponding to the target fast-axis vibration period, and drive the laser to emit laser light through the MEMS galvanometer when it is determined that the second-order count value successfully matches any system clock period order count value, wherein the preset fast-axis scan table records system clock period order count values corresponding to a plurality of fast-axis angle values distributed at equal angles in the fast-axis vibration period.

[0146] It should be noted that the radar scanning control device 100 provided by the embodiments of the present application has the same basic principles and technical effects as the radar scanning control method described above. For brevity, the part not mentioned in the present embodiment can be referred to the description of the radar scanning control method described above.

[0147] In the embodiments of the present application, it should be understood that the disclosed apparatus and method can also be implemented in other manners. The embodiments described above are merely schematic. For example, the flowcharts and block diagrams in the accompanying drawings show the possible implementation architectures, functions and operation of the apparatus, method and computer program product according to the embodiments of the present application. In this regard, each block in the flowcharts and block diagrams can represent a module, a program segment or a part of code, which contains one or more executable instructions for implementing the specified logic function. It should also be noted that, in some alternative implementations, the functions noted in the blocks can occur in a different order from that noted in the accompanying drawings. For example, two consecutive blocks can actually be executed substantially in parallel, and sometimes they can be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and the combination of blocks in the block diagrams and / or flowcharts, can be implemented by a dedicated hardware-based system for executing the specified functions or actions, or can be implemented by a combination of dedicated hardware and computer instructions.

[0148] In addition, the functional modules in the various embodiments of the present application can be integrated together to form a separate part, or each module can exist independently, or two or more modules can be integrated to form a separate part. If the functions are realized in the form of software functional modules and sold or used as independent products, they can be stored in a readable storage medium. Based on this understanding, the technical solutions of the present application can be embodied in the form of a software product, and the computer software product is stored in a readable storage medium, including a number of instructions for causing the master chip in the laser radar system to execute all or part of the steps of the various embodiments of the present application. The aforementioned readable storage medium includes: a U disk, a mobile hard disk, a read-only memory (ROM, Read-Only Memory), a random access memory (RAM, Random Access Memory), a magnetic disk or an optical disk, and various media that can store program codes.

[0149] In summary, in the radar scanning control method and device, the laser radar system and the readable storage medium provided by the embodiments of the present application, the first-order count value of the target fast-axis vibration period in the current slow-axis motion period is determined based on the target fast-axis angle equivalent voltage information and the target slow-axis angle equivalent voltage information of the MEMS mirror at the current moment, and the second-order count value of the target system clock period in the target fast-axis vibration period is determined when the first-order count value belongs to the preset effective line scanning stage of the current slow-axis vibration period. When the second-order count value corresponds to any system clock period order count value recorded in the preset fast-axis scanning table of the target fast-axis vibration period, the laser is driven to emit laser through the MEMS mirror. In each fast-axis vibration period in a single slow-axis motion period involving an effective line scanning stage, the laser is emitted at a specific fast-axis angle interval, so as to achieve precise synchronization control effect between the mirror fast-axis vibration control operation and the laser emission action, and to achieve the laser uniform dot scanning effect in the fast-axis field of view angle range, so as to ensure that the corresponding laser radar system can achieve the expected radar resolution and the expected scanning point cloud effect.

[0150] The above is only various embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A radar scanning control method, characterized in that, The main control chip is applied to a lidar system, which also includes a MEMS mirror and a laser. The main control chip is electrically connected to the MEMS mirror and is used to drive the MEMS mirror to perform simple harmonic motion in the fast axis direction according to a sine wave drive signal, and to drive the MEMS mirror to perform linear reciprocating motion in the slow axis direction according to a sawtooth wave drive signal. The main control chip is electrically connected to the laser and is used to drive the laser to emit laser light through the MEMS galvanometer; the method includes: Obtain the target slow axis angle equivalent voltage information and the target fast axis angle equivalent voltage information fed back by the MEMS galvanometer at the current moment; Based on the equivalent voltage information of the target fast axis angle and the equivalent voltage information of the target slow axis angle, determine the first sequence count value of the target fast axis vibration period at the current moment within the current slow axis motion period; Detect whether the first sequence count value belongs to the preset valid row scan phase of the current slow axis motion cycle; If the first sequence count value is detected to belong to the preset valid row scan phase of the current slow axis vibration cycle, the second sequence count value of the target system clock cycle at the current time within the target fast axis vibration cycle is determined; It is determined whether the second sequence count value matches any system clock cycle sequence count value recorded in the preset fast axis scan table corresponding to the target fast axis vibration period. When it is determined that the second sequence count value successfully matches any system clock cycle sequence count value, the laser is driven to emit laser light through the MEMS galvanometer. The preset fast axis scan table records the system clock cycle sequence count values ​​corresponding to multiple fast axis angle values ​​that are equally spaced within the corresponding fast axis vibration period.

2. The method according to claim 1, characterized in that, The step of determining the first sequence count value of the target fast axis vibration period within the current slow axis motion period based on the target fast axis angle equivalent voltage information and the target slow axis angle equivalent voltage information includes: Construct a first extreme square wave signal with the same frequency and phase as the sinusoidal drive signal of the MEMS galvanometer at the current moment, and construct a second extreme square wave signal with the same frequency and phase as the sawtooth wave drive signal of the MEMS galvanometer at the current moment based on the equivalent voltage information of the target slow axis angle. The first sequence count value of the target fast axis vibration period at the current moment within the current slow axis motion period is determined based on the first extreme square wave signal and the second extreme square wave signal.

3. The method according to claim 2, characterized in that, The step of constructing the first extremum square wave signal of the MEMS galvanometer at the current moment, which has the same frequency and phase as the sinusoidal drive signal, based on the equivalent voltage information of the target fast axis angle, includes: The target fast axis angle equivalent voltage information and the historical fast axis angle equivalent voltage information corresponding to each historical moment are compared with the first reference voltage threshold when the fast axis angle is zero degrees. Based on the voltage comparison results, a corresponding first zero-value square wave signal is constructed. The high level of the first zero-value square wave signal is used to indicate that the fast axis angle equivalent voltage at the corresponding moment is greater than the first reference voltage threshold, and the low level of the first zero-value square wave signal is used to indicate that the fast axis angle equivalent voltage at the corresponding moment is less than the first reference voltage threshold. Determine the times when the extreme values ​​of the fast axis angle maximum and minimum values ​​in the sinusoidal drive signal occur; Based on the determined times of occurrence of the maximum and minimum values ​​of the fast axis angle, the first zero-value square wave signal is subjected to level transition adjustment processing to obtain the first extreme value square wave signal. The high level of the first extreme value square wave signal indicates that the actual fast axis angle value at the corresponding time changes from the minimum to the maximum value, and the low level of the first extreme value square wave signal indicates that the actual fast axis angle value at the corresponding time changes from the maximum to the minimum value.

4. The method according to claim 2, characterized in that, The step of constructing the second extreme square wave signal of the MEMS galvanometer at the current moment, which has the same frequency and phase as the sawtooth wave drive signal, based on the equivalent voltage information of the target slow axis angle, includes: The target slow axis angle equivalent voltage information and the historical slow axis angle equivalent voltage information corresponding to each historical moment are compared with the second reference voltage threshold when the slow axis angle is zero degrees. Based on the voltage comparison results, a corresponding second zero-value square wave signal is constructed. The high level of the second zero-value square wave signal is used to indicate that the slow axis angle equivalent voltage at the corresponding moment is greater than the second reference voltage threshold, and the low level of the second zero-value square wave signal is used to indicate that the slow axis angle equivalent voltage at the corresponding moment is less than the second reference voltage threshold. Determine the times when the extreme values ​​of the slow axis angle maximum and minimum values ​​in the sawtooth wave drive signal occur; Based on the determined extreme values ​​of the slow axis angle maximum and minimum, the second zero-value square wave signal is subjected to level transition adjustment processing to obtain the second extreme value square wave signal. The high level of the second extreme value square wave signal indicates that the actual slow axis angle value at the corresponding time changes from the slow axis angle minimum to the slow axis angle maximum, and the low level of the second extreme value square wave signal indicates that the actual slow axis angle value at the corresponding time changes from the slow axis angle maximum to the slow axis angle minimum.

5. The method according to any one of claims 2-4, characterized in that, The step of determining the first sequence count value of the target fast axis vibration period within the current slow axis motion period based on the first and second extreme square wave signals of the passing angle includes: Detect whether the current moment corresponds to the rising edge of the second angle extreme square wave signal; When a rising edge of the signal corresponding to the second extreme square wave signal at the current time is detected, the currently recorded fast axis period sequence count value is cleared to zero, and the cleared fast axis period sequence count value is used as the first sequence count value, wherein the fast axis period sequence count value is used to characterize the order of occurrence of the fast axis vibration period corresponding to the rising edge of the historical signal closest to the current time in the first extreme square wave signal within the corresponding slow axis motion period; If it is detected that there is no corresponding rising edge in the second cross-angle extreme square wave signal at the current time, it is detected whether there is a corresponding rising edge in the first cross-angle extreme square wave signal at the current time. If the rising edge of the corresponding signal in the first extreme square wave signal at the current time is detected, the current recorded fast axis period sequence count value is incremented by one, and the incremented fast axis period sequence count value is used as the first sequence count value; otherwise, the current recorded fast axis period sequence count value is directly used as the first sequence count value.

6. The method according to any one of claims 1-4, characterized in that, The preset effective line scan phase of a single slow axis motion cycle includes multiple consecutively distributed effective line scan fast axis vibration cycles, each with a preset order count value within its corresponding slow axis motion cycle. The step of detecting whether the first order count value belongs to the preset effective line scan phase of the current slow axis motion cycle includes: The first sequence count value is matched with multiple preset sequence count values ​​included in the preset valid row scanning stage; If the first sequence count value successfully matches any preset sequence count value, then the first sequence count value is determined to belong to the preset effective row scan stage of the current slow axis motion cycle; If the first sequence count value does not successfully match any preset sequence count value, it is determined that the first sequence count value does not belong to the preset valid row scan stage of the current slow axis motion cycle.

7. The method according to any one of claims 2-4, characterized in that, The step of determining the second sequence count value of the target system clock period within the target fast axis oscillation period at the current moment includes: Detect whether the current moment corresponds to the rising edge of the first angle extreme square wave signal; When the rising edge of the corresponding signal in the first extreme square wave signal is detected at the current time, the currently recorded system clock sequence count value is cleared to zero, and the cleared system clock sequence count value is used as the second sequence count value, wherein the system clock sequence count value is used to characterize the order of occurrence of the most recent historical system clock cycle within the corresponding fast axis oscillation cycle. If it is detected that there is no corresponding rising edge in the first extreme square wave signal at the current time, it is detected whether there is a corresponding rising edge in the system clock signal at the current time; When a rising edge of the corresponding signal in the system clock signal is detected at the current time, the currently recorded system clock sequence count value is incremented by one, and the incremented system clock sequence count value is used as the second sequence count value.

8. The method according to claim 1, characterized in that, There are multiple effective line scan cycles in the preset effective line scan phase of a single slow axis motion cycle. Each effective line scan cycle corresponds to half a cycle time of a single fast axis vibration cycle. Therefore, the fast axis angle interval between two adjacent fast axis angle values ​​belonging to the same half cycle time time in the preset fast axis scan table of a single fast axis vibration cycle is consistent with the horizontal angle resolution value of the lidar system.

9. The method according to claim 1, characterized in that, A single slow axis motion cycle has multiple effective line scanning sub-stages in its preset effective line scanning phase. Each effective line scanning sub-stage consists of the first half-cycle time period and the second half-cycle time period of each of multiple consecutive fast axis vibration cycles. Therefore, the preset fast axis scanning tables of multiple fast axis vibration cycles involving the same effective line scanning sub-stage each include a first half-cycle scanning table corresponding to the first half-cycle time period and a second half-cycle scanning table corresponding to the second half-cycle time period. The fast axis scanning start angle value of the second half-cycle scanning table belonging to the same fast axis vibration cycle is separated from the fast axis scanning end angle value of the first half-cycle scanning table by the horizontal angular resolution value of the lidar system. In any two adjacent fast axis vibration cycles, the interval between the fast axis scan start angle value in the first half-cycle scan table of the later fast axis vibration cycle and the fast axis scan end angle value in the second half-cycle scan table of the previous fast axis vibration cycle is the horizontal angle resolution value. The target multiple of the fast axis angle interval between two adjacent fast axis angle values ​​within the same half-cycle scan table relative to the horizontal angle resolution value is the total number of half-cycle time periods for a single effective row scan sub-stage.

10. A radar scanning control device, characterized in that, The main control chip is applied to a lidar system, which also includes a MEMS mirror and a laser. The main control chip is electrically connected to the MEMS mirror and is used to drive the MEMS mirror to perform simple harmonic motion in the fast axis direction according to a sine wave drive signal, and to drive the MEMS mirror to perform linear reciprocating motion in the slow axis direction according to a sawtooth wave drive signal. The main control chip is electrically connected to the laser and is used to drive the laser to emit laser light through the MEMS galvanometer; the device includes: The mirror voltage acquisition module is used to acquire the target slow axis angle equivalent voltage information and the target fast axis angle equivalent voltage information fed back by the MEMS mirror at the current moment; The fast axis counting determination module is used to determine the first sequence count value of the target fast axis vibration period within the current slow axis motion period based on the target fast axis angle equivalent voltage information and the target slow axis angle equivalent voltage information. The effective scan detection module is used to detect whether the first sequence count value belongs to the preset effective row scan stage of the current slow axis motion cycle; The clock counting determination module is used to determine the second sequential count value of the target system clock cycle within the target fast axis vibration cycle when the first sequential count value is detected to belong to a preset valid row scan phase of the current slow axis vibration cycle. The laser emission control module is used to determine whether the second sequence count value matches any system clock cycle sequence count value recorded in the preset fast axis scan table corresponding to the target fast axis vibration period, and when it is determined that the second sequence count value successfully matches any system clock cycle sequence count value, it drives the laser to emit laser light through the MEMS galvanometer, wherein the preset fast axis scan table records the system clock cycle sequence count values ​​corresponding to multiple fast axis angle values ​​distributed at equal angular intervals within the corresponding fast axis vibration period.

11. A lidar system, characterized in that, The system includes a main control chip, a MEMS galvanometer, and a laser; The main control chip is electrically connected to the MEMS galvanometer and is used to drive the MEMS galvanometer to perform simple harmonic motion in the fast axis direction according to the sine wave drive signal, and to drive the MEMS galvanometer to perform linear reciprocating motion in the slow axis direction according to the sawtooth wave drive signal. The main control chip is electrically connected to the laser and is used to drive the laser to emit laser light through the MEMS galvanometer. The main control chip stores a computer program, and can execute the computer program to implement the radar scanning control method according to any one of claims 1-9.

12. The system according to claim 11, characterized in that, The system also includes an analog-to-digital converter chip and a digital-to-analog converter chip; The digital-to-analog converter chip is disposed between the main control chip and the MEMS galvanometer, and is used to perform digital-to-analog conversion processing on the sine wave drive signal and sawtooth wave drive signal output by the main control chip to the MEMS galvanometer, and transmit the sine wave drive signal and sawtooth wave drive signal after digital-to-analog conversion processing to the MEMS galvanometer. The analog-to-digital converter chip is disposed between the main control chip and the MEMS galvanometer, and is used to perform analog-to-digital conversion on the slow-axis angle equivalent voltage information and fast-axis angle equivalent voltage information fed back by the MEMS galvanometer, and transmit the slow-axis angle equivalent voltage information and fast-axis angle equivalent voltage information after analog-to-digital conversion to the main control chip.

13. A readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the main control chip included in the lidar system, it implements the radar scanning control method according to any one of claims 1-9, wherein the lidar system further includes a MEMS galvanometer and a laser. The main control chip is electrically connected to the MEMS galvanometer and is used to drive the MEMS galvanometer to perform simple harmonic motion in the fast axis direction according to the sine wave drive signal, and to drive the MEMS galvanometer to perform linear reciprocating motion in the slow axis direction according to the sawtooth wave drive signal. The main control chip is electrically connected to the laser and is used to drive the laser to emit laser light through the MEMS galvanometer.

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