An etching jig and etching mechanism for C-type porous structure silicon products

Abstract

The present invention relates to the technical field of silicon product jigs, and in particular to an etching jig for C-type porous structure silicon products, comprising two oppositely arranged turntables, four fixed rods provided between the two turntables, wherein the four fixed rods are arranged opposite to each other in pairs, and the line between two fixed rods on opposite sides of one group intersects with the line between two fixed rods on opposite sides of another group; a card slot for inserting a product is provided on the inner side wall of each of the fixed rods, wherein the four card slots are distributed on the same inclined surface, wherein the inclined surface is inclined at an angle α1 relative to the vertical surface, and the α1 is 30°-60°; after the etching is completed, as long as the jig continues to rotate, the outer side wall and the inner side wall of the product can be alternately tilted downward, so that when the outer side wall is rotated to the tilted downward position, the acid liquid accumulated inside the product can flow out from the holes on the outer side wall, thereby avoiding the problem of excessive internal etching caused by excessive accumulation of acid liquid inside the product.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon product jigs, and in particular to an etching jig and an etching mechanism for C-type porous structure silicon products. Background Art

[0002] C-type porous structure silicon products (hereinafter referred to as products), such as Figure 1 As shown, its main structure is annular, and specifically includes an inner wall M2 and an outer wall M1 on opposite sides, and a peripheral wall M3 arranged between the inner wall and the outer wall, wherein the inner wall, the outer wall and the peripheral wall together form a C-shaped groove structure with a C-shaped cross-section, and a number of holes M11 are evenly opened on the outer wall along the circumference; a circumferential edge M4 is formed at the junction of the inner wall, the outer wall and the peripheral wall.

[0003] In the processing of this product, it is often necessary to use an acid etching process to etch its surface. The traditional practice is to place the product in an etching tank so that it can be etched by the acid in the etching tank. Specifically, a jig is used to place the product, and then the jig and the product are placed in the etching tank for etching. This jig is similar to a jig for chemical cleaning of silicon electrodes disclosed in the patent document with publication number CN217474376U.

[0004] Although this fixture can place the product, it still has some shortcomings when used: for this C-type silicon product, during the etching process, acid will enter the C-shaped groove. After the etching is completed, a large amount of acid will still remain in the C-shaped groove. Therefore, it is necessary to pour out the acid in the C-shaped groove again later. Otherwise, the inside of the product will be excessively corroded by the acid accumulated in the C-shaped groove. Therefore, the existing fixture still needs to be improved. Summary of the Invention

[0005] In order to solve at least one of the technical problems mentioned in the background technology, the purpose of the present invention is to provide an etching tool for C-type porous structure silicon products.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] An etching jig for C-type porous silicon products comprises two opposing turntables with four fixed rods disposed between them. The four fixed rods are disposed in pairs, with the line connecting two fixed rods on opposite sides of one group intersecting with the line connecting two fixed rods on opposite sides of another group. The inner sidewall of each fixed rod is provided with a slot for inserting the product, with the four slots being distributed on the same inclined surface, wherein the inclined surface is inclined at an angle α1 relative to the vertical surface, and the α1 is 30°-60°.

[0008] Compared with the existing technology, the advantages of adopting this solution are:

[0009] This solution achieves product loading through the slots on the four fixed rods. Since the four slots are distributed on an inclined surface with an angle α1 relative to the vertical plane, after the product is loaded onto the jig, the product is placed in an inclined state along the inclined surface. After the jig is installed on the driving mechanism that drives the jig to rotate, the jig can be rotated circumferentially, and the product will also rotate circumferentially with the jig, so that the product can be continuously rotated in the acid solution to contact with the acid solution for etching.

[0010] Moreover, after the etching is completed, the jig is pulled out of the etching tank. As long as the jig continues to rotate, the outer wall (with holes on the outer wall) and the inner wall of the product can be alternately tilted downward. In this way, when the outer wall rotates to the tilted downward position, the acid accumulated inside the product can flow out from the holes on the outer wall. Such a cycle of rotation can discharge most of the acid inside the product, thereby avoiding the problem of excessive internal etching caused by excessive accumulation of acid inside the product.

[0011] Preferably, a line connecting two fixing rods on opposite sides of one group is perpendicularly intersected with a line connecting two fixing rods on opposite sides of another group.

[0012] Preferably, when the product is installed in the slots on the four fixing rods, the product is loaded by the groove walls of the slots abutting against the edges of the product.

[0013] Preferably, the four fixing rods are two first fixing rods arranged opposite to each other in the vertical direction, and two second fixing rods arranged opposite to each other in the horizontal direction; the slot on the first fixing rod constitutes a first slot, and the slot on the second fixing rod constitutes a second slot; the first slot includes a first slot front wall and a first slot rear wall on opposite sides for the edge of the product to abut against, wherein the first slot front wall is inclined at an angle α2 relative to the inclined plane, wherein the angle α2 is 5°-10°; and / or, the second slot extends along the inclined plane, and the cross-section formed by the second slot in the direction perpendicular to the inclined plane is a trapezoidal structure that gradually expands from inward to outward, wherein the second slot includes two second slot side walls on opposite sides for the edge of the product to abut against.

[0014] Preferably, the four card slots together constitute a card slot group for loading products. When the product is loaded into the card slot group, the product is loosely fitted in the card slot group.

[0015] Preferably, the four fixing rods are all capable of moving radially along the turntable to achieve position adjustment, and at least one fixing rod is detachably mounted on the turntable.

[0016] Preferably, among the four fixing rods, one of the fixing rods is detachably mounted on the turntable to form a clamping fixing rod, and the other three fixing rods form movable fixing rods; both ends of the movable fixing rod are provided with a first connecting assembly, the first connecting assembly includes a block fixed to the end of the fixing rod, a screw provided at the end of the block, and a first nut engaged with the screw thread; the edge of the turntable is provided with a sliding groove for the block to slide into and extending radially along the turntable, and in the assembled state, the block is located in the sliding groove, and the first nut is engaged with the screw thread on the outer side of the turntable and is tightly pressed against the turntable.

[0017] An etching jig for C-type porous structure silicon products, characterized in that the first connecting component also includes a gasket with a first latching tooth on the inner wall, and a second latching tooth is provided on the outer wall of the turntable. In the assembled state, the gasket is passed through the screw on the outer side of the turntable, and the gasket is pressed against the outer wall of the turntable by the first nut, and the first latching tooth and the second latching tooth are engaged.

[0018] Preferably, both ends of the clamping and fixing rod are mounted on the turntable through a second connecting assembly, and the second connecting assembly includes a bolt and a second nut; a notch is provided on the edge of the turntable, and two oppositely arranged protrusions are provided on the outer side of the notch, and the protrusions are provided with first through holes arranged in sequence along the radial direction of the turntable, and a second through hole is provided at the end of the clamping and fixing rod. In the assembled state, the bolt passes through the first through hole and the second through hole and is threadedly connected to the second nut.

[0019] The present invention also provides an etching mechanism, including a driving component and the above-mentioned etching jig for C-type porous structure silicon products, the driving component including a rotating shaft and a driving member driving the rotating shaft to rotate, and the jig is installed on the rotating shaft.

[0020] Other advantages and effects of this solution are explained in detail in the detailed implementation section. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the structure of a C-type porous structure silicon product;

[0022] Figure 2 Schematic diagram of the structure of the fixture in Example 1;

[0023] Figure 3 is a cross-sectional view of the fixture in Example 1;

[0024] Figure 4 This is a structural diagram of the product in Example 1 loaded on the fixture;

[0025] Figure 5 This is a cross-sectional schematic diagram of the product in Example 1 when loaded on a jig;

[0026] Figure 6 This is a schematic structural diagram of the first fixing rod constituting the clamping fixing rod in Example 1;

[0027] Figure 7 Schematic diagram of the structure of the second fixing rod in Example 1;

[0028] Figure 8 A schematic cross-sectional view of the second engaging groove of the second fixing rod in Example 1, taken along a direction perpendicular to the inclined plane;

[0029] Figure 9 for Figure 3 Enlarged view of part A in the middle;

[0030] Figure 10 This is a schematic structural diagram of Example 2. DETAILED DESCRIPTION

[0031] The following is an explanation and description of the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. However, the following embodiments are only preferred embodiments of the present invention and are not exhaustive. Based on the embodiments in the implementation manner, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0032] In the following description, terms such as "inside", "outside", "up", "down", "left", "right", etc. that indicate directions or positional relationships are only used to facilitate the description of the embodiments and simplify the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0033] Example 1

[0034] See also Figure 1-9 As shown, this embodiment provides an etching jig for C-type porous structure silicon products, wherein the jig is mainly used to be installed on a driving mechanism and driven by the driving mechanism to rotate circumferentially.

[0035] For ease of understanding, this embodiment first briefly describes the structure of the C-type porous silicon product (hereinafter referred to as the product):

[0036] like Figure 1 As shown, the product has a circular ring structure, which specifically includes an inner wall M2 and an outer wall M1 on opposite sides, and a peripheral wall M3 arranged between the inner wall M2 and the outer wall M1, wherein the inner wall, the outer wall and the peripheral wall together form a C-shaped groove structure with a C-shaped cross-section, and a number of holes M11 are evenly opened on the outer wall along the circumferential direction; a circumferential edge M4 is formed at the junction of the inner wall, the outer wall and the peripheral wall, that is, the product has two edges M4.

[0037] like Figure 2 As shown, the fixture includes two turntables 1 arranged opposite to each other, and four fixed rods are provided between the two turntables 1. The four fixed rods are arranged opposite to each other in pairs, and the line between the two fixed rods on the opposite sides of one group is cross-arranged with the line between the two fixed rods on the opposite sides of another group.

[0038] The preferred distribution of the four fixing rods in this embodiment is that the line between two fixing rods on opposite sides of one group is perpendicular to the line between two fixing rods on opposite sides of another group, and the intersection point is located on the central axis of the turntable 1.

[0039] In other words, of the four fixing rods in this solution, two are located directly above and directly below the central axis of the turntable 1 , and the other two are located directly to the left and directly to the right of the central axis of the turntable 1 .

[0040] like Figure 3 As shown, each of the fixing rods is provided with a slot for inserting the product on the inner side wall, wherein four of the slots are distributed on the same inclined plane L1, wherein the inclined plane L1 is inclined at an angle α1 relative to the vertical plane L2, wherein α1 is 30°-60°, preferably 45°, wherein the central axis of the turntable is perpendicular to the vertical plane L2.

[0041] The product is loaded through the slots on the four fixed rods. Since the four slots are distributed on the inclined surface L1 with an angle α1 relative to the vertical surface L2, after the product is loaded on the jig, the product is tilted along the inclined surface L1. After the jig is installed on the driving mechanism that drives the jig to rotate, the jig can be rotated circumferentially, and the product will also rotate circumferentially with the jig, so that the product can be continuously rotated in the acid solution to contact with the acid solution for etching.

[0042] After etching is completed, the jig is pulled out of the etching tank. As long as the jig continues to rotate, the outer wall (with holes on it) and the inner wall of the product can be alternately tilted downward. When the outer wall rotates to the tilted downward position, the acid accumulated inside the product can flow out through the holes on the outer wall. This cyclic rotation can drain most of the acid inside the product (i.e., the C-shaped tank), thereby avoiding the problem of excessive internal etching caused by excessive acid accumulation. Over-etching here can be understood as the degree of etching inside the product being greater than the degree of etching on the outside of the product.

[0043] For a better understanding, this embodiment specifically describes the above process:

[0044] When the product is installed on the fixture, the outer wall M1 of the product (i.e. the side wall with the hole) faces the upper left as the initial state, that is, Figure 4 and Figure 5As shown in the state; when the fixture rotates 180° around its own central axis, the product will also rotate 180° with the fixture. At this time, the outer wall of the product will face the lower left, so that the acid accumulated inside the product can flow out from the holes on the outer wall of the product. In addition, during the rotation process, some acid can also flow out from the notch position of the C-shaped groove of the product; thus, the purpose of acid discharge is achieved.

[0045] In this embodiment, the product is supported by the four slots on the four fixing rods. In this way, the product will have a contact area with the slot. Since the contact area is blocked by the slot wall, it is difficult to fully contact with the acid solution to achieve good etching. Therefore, the larger the contact area, the more parts of the product are blocked, and the worse the etching effect.

[0046] Therefore, in order to reduce the contact area between the product and the fixing rod (or the slot) in this embodiment, it is preferred that when the product is installed in the slot on the four fixing rods, the slot wall abuts against the edge of the product to achieve loading of the product.

[0047] That is, after the product is loaded into the fixture, it only contacts the slot wall by relying on the edges. At this time, the contact between the product and the slot is equivalent to line-surface contact, and the blocked part is only part of the edge area, which can reduce the contact area of ​​the product and is conducive to improving the etching effect of the product. Specifically:

[0048] For the convenience of description, the following description of the four fixing rods is based on the initial state in which one of the fixing rods is located directly above the rotation axis of the turntable 1.

[0049] In the initial state, if Figure 2 As shown, the four fixing rods are two first fixing rods 21 arranged vertically opposite each other, and two second fixing rods 22 arranged horizontally opposite each other. That is, the two first fixing rods 21 are respectively located directly above and directly below the rotation axis of the turntable 1, and the two second fixing rods 22 are respectively located directly to the left and directly to the right of the rotation axis of the turntable 1.

[0050] In order to distinguish the slots on the first fixing rod 21 and the second fixing rod 22: Figure 2 As shown, the card slot located on the first fixing rod 21 is marked as a first card slot 211 , and the card slot located on the second fixing rod 22 is marked as a second card slot 221 .

[0051] The first slots 211 on the two first fixing rods 21 have substantially the same structure, but are oriented in different directions to accommodate tilted loading of the product. Therefore, in this embodiment, the first slot 211 on the lower first fixing rod 21 is used as an example for detailed description.

[0052] Combine Figure 3 and Figure 6 As shown, the first slot 211 includes a first slot front wall 2111 and a first slot rear wall 2112 on opposite sides for the edges of the product to abut against, wherein the first slot front wall 2111 is inclined at an angle α2 relative to the inclined plane L1, wherein the angle α2 is 5°-10°, preferably 7°. This is equivalent to the front wall of the first slot 211 being non-parallel to the aforementioned inclined plane L1. In this way, after the product is placed in the first slot 211, the outer wall or inner wall of the product will not be in contact with the first slot front wall 2111 to form a surface contact, but will rely on the bottom edge of the product to contact the first slot front wall 2111 to form a line surface contact, which can be referred to. Figure 5 Status shown.

[0053] The rear wall 2112 of the first slot can be designed as a vertical plane parallel to the vertical plane L2, so that another edge of the product can also abut against the rear wall 2112 of the first slot to form line-surface contact.

[0054] like Figure 3 and Figure 7 As shown; the second slot 221 extends along the inclined surface L1 to ensure that the product can be tilted into the second slot 221; as Figure 8 As shown, the cross section formed by cutting the second clamping groove 221 in a direction perpendicular to the inclined plane L1 is a trapezoidal structure that gradually expands from the inside to the outside, preferably an isosceles trapezoidal structure.

[0055] The second card slot 221 includes two second card slot side walls 2211 on opposite sides for the edges of the product to abut against. In this way, after the product is placed in the second card slot 221, the two edges of the product can respectively abut against the two second card slot side walls 2211 of the second card slot 221 to form line-surface contact.

[0056] In this embodiment, the four card slots together constitute a card slot group for loading products. When the product is loaded into the card slot group, the product and the card slot group are loosely matched, that is, in the loaded state, the four fixing rods will not crush the product. It is necessary to ensure that there is space for the product to move between the product and each card slot to ensure that the product can be offset or moved relative to the jig. It can also be understood that after the product is loaded onto the jig, the product is in a loose state relative to the jig.

[0057] For example, along the direction of the inclined surface L1, the distance between the two first card slots 211 must ensure that after the product is inserted into the two first card slots 211, the product can move along its own radial direction within a certain range; similarly, the spacing between the two second card slots 221 must also ensure that after the product is inserted into the two second card slots 221, the product can also move along its own radial direction within a certain range.

[0058] In this way, when the fixture rotates circumferentially with the product, as the product rotates to different angles, the product will shift relative to the four fixed rods under the action of its own gravity, thereby changing the contact position between the edge of the product and the four fixed rods, thereby ensuring that the edge can also fully contact the acid; in other words, if the product is crushed between the four fixed rods, the product will not be able to shift relative to the four fixed rods, so that the contact position between the edge of the product and the four fixed rods will never change, making it difficult for the contact position to fully contact the acid, thus making it difficult for the contact position to have a good etching effect.

[0059] In order to adapt to products of different diameters, in this embodiment, the four fixing rods are improved as follows:

[0060] The four fixing rods are all capable of moving radially along the turntable 1 to achieve position adjustment, and at least one fixing rod is detachably mounted on the turntable 1 .

[0061] In this way, the distance between the two fixing rods on opposite sides can be adjusted according to the diameter of the product, so as to adapt to the diameter of the product.

[0062] In this embodiment, one of the four fixing rods is detachably mounted on the turntable 1 to form a clamping fixing rod. Figure 2 As shown, the first fixing rod 21 at the top is used as the clamping fixing rod; in this way, when clamping the product, the clamping fixing rod is first removed, and then the product can be installed from the position of the clamping fixing rod into the slots of the other three fixing rods, and finally the clamping fixing rod is installed.

[0063] In addition to the above-mentioned clamping fixing rods, the other three fixing rods are used as movable fixing rods, such as Figure 2 As shown, the two second fixing rods 22 on the left and right sides and the first fixing rod 21 on the lower side serve as movable fixing rods.

[0064] In order to achieve the adjustable position of the movable fixing rod, in this embodiment:

[0065] Both ends of each movable fixing rod are provided with a first connecting component 3. Since the structures of the first connecting components 3 are the same, this embodiment takes the first connecting component 3 at one end of the lower movable fixing rod (i.e., the lower first fixing rod 21) as an example for specific description:

[0066] Combine Figure 4 and Figure 9As shown, the first connecting component 3 includes a block 31 fixed to the end of the movable fixed rod, a screw 32 provided at the end of the block 31, and a first nut 33 threadedly engaged with the screw 32; the edge of the turntable 1 is provided with a slide groove 11 for the block 31 to slide into and extending radially along the turntable 1. It is worth noting that the block 31 cannot rotate relative to the slide groove 11 in the circumferential direction due to the restriction of the slide groove 11. For example, in this embodiment, the block 31 is a rectangular structure; this is to prevent the movable fixed rod from rotating circumferentially relative to the turntable 1.

[0067] In the assembled state, the clamping block 31 is located in the sliding groove 11 , and the first nut 33 is threadedly engaged with the screw rod 32 on the outer side of the turntable 1 and is tightly pressed against the turntable 1 .

[0068] In order to prevent the block 31 from continuing to slide in the slide groove 11 in the assembled state, in this embodiment, the first connecting component 3 further includes a gasket 34 with a first latching tooth 341 on the inner wall, and a second latching tooth 12 is provided on the outer wall of the turntable 1. Figure 9 In the state shown, the gasket 34 is passed through the screw 32 on the outside of the turntable 1, and the gasket 34 is pressed against the outer wall of the turntable 1 by the first nut 33, and the first latch tooth 341 and the second latch tooth 12 are engaged; that is, after the first nut 33 is tightened, the gasket 34 will be pressed against the outer wall of the turntable 1 under the pressure of the first nut 33, so that the first latch tooth 341 on the inner side of the gasket 34 and the second latch tooth 12 on the outer side of the turntable 1 are engaged. In this way, under the meshing action of the first latch tooth 341 and the second latch tooth 12, the gasket 34 is difficult to slide on the surface of the turntable 1, thereby limiting the sliding of the block 31.

[0069] In addition, in order to realize the detachable connection of the clamping fixing rod and to enable radial adjustment along the turntable 1, in this embodiment:

[0070] like Figure 4 As shown, both ends of the clamping and fixing rod are mounted on the turntable 1 through a second connecting assembly 4, which includes a bolt and a second nut; a cutout 13 is provided on the edge of the turntable 1 for the end side of the clamping and fixing rod to be inserted.

[0071] Two opposed and spaced-apart protrusions 41 are provided on the outer side of the cutout 13, and the protrusions 41 are fixed to the outer wall of the turntable 1. Both protrusions 41 are provided with first through holes 411 spaced apart in the radial direction of the turntable 1, such that each first through hole 411 corresponds to a radial mounting position for a clamping rod.

[0072] Combine Figure 6As shown, a second through hole 212 is provided at the end of the clamping and fixing rod. In the assembled state, the clamping and fixing rod is inserted into the two protrusions 41, and then the radial position of the clamping and fixing rod relative to the turntable 1 is adjusted as needed so that the second through hole 212 is aligned with the first through hole 411 at the desired position, and then the bolt is passed through the first through hole 411 and the second through hole 212; then the second nut is screwed onto the end of the bolt and the second nut is tightened. In this way, under the restriction of the bolt, the clamping and fixing rod is kept fixed to the position of the turntable 1.

[0073] Example 2

[0074] Combine Figure 10 As shown, this embodiment further provides an etching mechanism based on Example 1, including a driving component and an etching jig for C-type porous structure silicon products as described in Example 1, wherein the driving component includes a rotating shaft 5 and a driving member for driving the rotating shaft 5 to rotate, and the jig is installed on the rotating shaft 5.

[0075] Specifically, this embodiment includes a base 6, a lifting component 61, and a fixed frame 62. The lifting component 61 is mounted on the base 6, and the fixed frame 62 is mounted on the lifting component 61, with the lifting component 61 driving the vertical displacement. The rotating shaft 5 is rotatably mounted on the fixed frame 62 and passes through the two rotating disks 1 along the central axis of the rotating disk 1 to be fixed to the two rotating disks 1. The driving member can be a motor, which is mounted on the base 6 and transmits power to the rotating shaft 5 through a gear set 51 or a belt to drive the rotating shaft 5 to rotate. The lifting component 61 can be a hydraulic cylinder, a suspension rope structure, etc., which is not specifically limited here.

[0076] During use, the lifting component 61 drives the fixing frame 62 to descend, so that the jig is placed in the etching groove. Then the driving component drives the rotating shaft 5 to rotate, and the rotating shaft 5 drives the jig to rotate. The jig drives the product loaded on itself to rotate in the etching groove to realize the etching action.

[0077] After etching is completed, the driving part continues to keep the jig in a rotating state, and the lifting part 61 begins to lift the fixing frame 62 upward, thereby extracting the jig upward from the etching tank. The jig and the product are still rotating, so that the acid stored in the product can be discharged during the rotation of the product.

[0078] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations that come within the meaning and range of equivalents of the claims be embraced therein.

Claims

1. An etching jig for C-type porous structure silicon products, characterized in that: The product has a circular ring structure, which includes an inner wall and an outer wall on opposite sides, and a peripheral wall arranged between the inner wall and the outer wall, wherein the inner wall, the outer wall and the peripheral wall together form a C-shaped groove structure with a C-shaped cross section, and a plurality of holes are uniformly opened on the outer wall along the circumference; the inner wall, the outer wall and the peripheral wall form a circumferential edge at the junction; The fixture includes two opposing turntables with four fixed rods disposed between them. The four fixed rods are arranged in pairs, with the line connecting two fixed rods on opposite sides of one group intersecting with the line connecting two fixed rods on opposite sides of another group. Each of the fixed rods has a slot on its inner sidewall for receiving a product, with the four slots being located on the same inclined surface, wherein the inclined surface is inclined at an angle α1 relative to the vertical surface, and the angle α1 is 30°-60°. After etching is completed, the jig is pulled out of the etching tank and the jig is kept rotating so that the outer and inner walls of the product are alternately tilted downward. When the outer wall rotates to the tilted downward position, the acid accumulated inside the product can flow out from the holes on the outer wall. The four fixing rods are two first fixing rods arranged vertically opposite to each other, and two second fixing rods arranged horizontally opposite to each other; the slots on the first fixing rods constitute the first slots, and the slots on the second fixing rods constitute the second slots; When the product is installed in the slots on the four fixing rods, the slot walls abut against the edges of the product to achieve product loading; The four card slots together constitute a card slot group for loading products. When the product is loaded into the card slot group, the product and the card slot group are clearance-matched. Along the inclined direction, the distance between the two first card slots must ensure that after the product is inserted into the two first card slots, the product can move along its own radial direction within a certain range; the spacing between the two second card slots must also ensure that after the product is inserted into the two second card slots, the product can also move along its own radial direction within a certain range.

2. The etching jig for C-type porous structure silicon products according to claim 1, characterized in that: A line connecting two fixing rods on opposite sides of one group is perpendicularly intersected with a line connecting two fixing rods on opposite sides of another group.

3. The etching jig for C-type porous structure silicon products according to claim 1, characterized in that: The first card slot includes a first card slot front slot wall and a first card slot rear slot wall on opposite sides for the edge of the product to abut against, wherein the first card slot front slot wall is inclined at an angle α2 relative to the inclined surface, wherein the angle α2 is 5°-10°; and / or, the second card slot extends along the inclined surface, and the cross-section formed by the second card slot in the direction perpendicular to the inclined surface is a trapezoidal structure that gradually expands from inward to outward, wherein the second card slot includes two second card slot side slot walls on opposite sides for the edge of the product to abut against.

4. The etching jig for C-type porous structure silicon products according to claim 2, characterized in that: The four fixing rods are all capable of moving radially along the turntable to achieve position adjustment, and at least one fixing rod is detachably mounted on the turntable.

5. The etching jig for C-type porous structure silicon products according to claim 4, characterized in that: Among the four fixing rods, one of the fixing rods is detachably mounted on the turntable to form a clamping fixing rod, and the other three fixing rods form movable fixing rods; both ends of the movable fixing rod are provided with a first connecting assembly, and the first connecting assembly includes a block fixed to the end of the movable fixing rod, a screw provided at the end of the block, and a first nut engaged with the screw thread; the edge of the turntable is provided with a sliding groove for the block to slide into and extending radially along the turntable. In the assembled state, the block is located in the sliding groove, and the first nut is engaged with the screw thread on the outer side of the turntable and is tightly pressed against the turntable.

6. The etching jig for C-type porous structure silicon products according to claim 5, characterized in that: The first connecting component also includes a gasket with a first latching tooth on the inner wall, and a second latching tooth is provided on the outer wall of the turntable. In the assembled state, the gasket is passed through the screw on the outer side of the turntable, and the gasket is pressed against the outer wall of the turntable by the first nut, and the first latching tooth and the second latching tooth are engaged.

7. The etching jig for C-type porous structure silicon products according to claim 5, characterized in that: The two ends of the clamping and fixing rod are installed on the turntable through a second connecting assembly, and the second connecting assembly includes a bolt and a second nut; a notch is opened on the edge of the turntable, and two oppositely arranged protrusions are provided on the outer side of the notch, and the protrusions are provided with first through holes arranged in sequence along the radial direction of the turntable, and a second through hole is provided at the end of the clamping and fixing rod. In the assembled state, the bolt passes through the first through hole and the second through hole and is threadedly connected to the second nut.

8. An etching mechanism, characterized in that: It comprises a driving assembly and an etching jig for C-type porous structure silicon products as described in any one of claims 1 to 7, wherein the driving assembly comprises a rotating shaft and a driving member for driving the rotating shaft to rotate, and the jig is installed on the rotating shaft.

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