An automatic target changer

Abstract

The application provides an automatic target replacing device, which comprises a support mechanism, a vacuum cavity arranged on the support mechanism and a target replacing mechanism, the vacuum cavity comprises at least two vacuum chamber bodies which are movably connected, and a target holder for mounting a target is arranged in the vacuum cavity; the target replacing mechanism comprises a target cabin for placing the target and a target pushing mechanism, the target pushing mechanism is movably connected to the target cabin; when the vacuum chamber bodies are far away from each other, the target pushing mechanism is used for pushing the target in the target cabin to the target holder; the transfer mechanism comprises a transfer assembly and a shielding tank for loading an old target, and the shielding tank is movably connected to the transfer assembly. The automatic target replacing device has the characteristics of simplification due to the design of the vacuum cavity with an open-close structure, the target replacing mechanism is simple in structure, automatic target replacing is realized, the safety of the staff is ensured, and the production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of isotope production technology, and in particular to an automatic target replacement device. Background Technology

[0002] In accelerator-based target devices for producing isotopes for medical, scientific, and industrial applications, a beam of a certain power, accelerated by the accelerator, acts on targets of different elements or isotopes, triggering a series of nuclear reactions within the target. This allows for the production and utilization of various target isotope products. For example, in nuclear physics experiments, the beam provided by the accelerator and different target materials exhibit different nuclear reaction mechanisms. Therefore, when the research target changes, the target material needs to be frequently replaced. Most irradiation experiments require a vacuum environment, and the high beam power density results in high temperatures for the target material and its containment material, necessitating forced cooling and heat exchange using external cooling media. Consequently, the waiting time for the target to cool down before manual target replacement is lengthy. Furthermore, the target material irradiated by the beam produces a series of radioactive nuclides that spontaneously emit alpha, beta, and gamma rays. Target replacement and transport require shielding measures. Therefore, existing target devices require a considerable waiting time for target removal and replacement to reduce the target's activity to a level that is maneuverable before manual or manual replacement using simple tools. Therefore, traditional isotope accelerators increase time costs and expose researchers to radiation, potentially affecting their health. Furthermore, to meet the requirements for beam shielding against neutrons and photons, accelerator irradiation terminals are often located in enclosed shielded spaces, making it impossible to handle radioactive materials within the same plane or space of the irradiated area.

[0003] In addition, some isotope production equipment currently uses mechanical grippers to disassemble and install targets inside an integrated vacuum chamber. However, the mechanical grippers of such isotope production equipment are usually quite complex in structure in order to adapt to the integrated vacuum chamber, and the overall volume of the isotope production equipment is relatively large.

[0004] In summary, it is necessary to provide an isotope production apparatus that takes into account target loading, target replacement, and target transportation to improve production safety and reliability. Summary of the Invention

[0005] To address the aforementioned problems in the existing technology, the present invention provides an automatic target replacement device. The automatic target replacement device includes a vacuum chamber with an openable structure and a target replacement mechanism for disassembling and assembling target components in the vacuum chamber. The openable vacuum chamber design of the automatic target replacement device makes the overall structure streamlined, and the target replacement mechanism is simple in construction and can realize automated target replacement, ensuring the safety of workers and improving production efficiency.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] An automatic target replacement device includes a support mechanism, a vacuum cavity disposed on the support mechanism, and a target replacement mechanism.

[0008] The vacuum cavity includes at least two movably connected vacuum chamber bodies, and a target holder for mounting the target is provided inside the vacuum cavity;

[0009] The target replacement mechanism includes a target chamber for placing the target and a target pushing mechanism, wherein the target pushing mechanism is movably connected to the target chamber; when the vacuum chamber body moves away from the target, the target pushing mechanism is used to push the target in the target chamber to the target holder;

[0010] The transfer mechanism includes a transfer component and a shielding container for loading old target parts, the shielding container being movably connected to the transfer component.

[0011] Preferably, the target replacement mechanism further includes a target chamber moving mechanism, which is connected to the target chamber and drives the target chamber to move inside and outside the vacuum cavity.

[0012] Preferably, the support mechanism includes a target replacement support, and the target replacement support is provided with a moving track;

[0013] The target chamber moving mechanism includes a target chamber cylinder and a piston rod disposed on the moving track;

[0014] The target compartment is also connected to a target compartment plate, and the target compartment is movably connected to the piston rod through the target compartment plate.

[0015] Preferably, at least one of the vacuum chamber bodies is fixedly connected to the support mechanism, and the other vacuum chamber body is movably connected to the support mechanism.

[0016] Preferably, the vacuum chamber body comprises a polytetrafluoroethylene layer and a lead layer.

[0017] Preferably, it further includes a transfer mechanism, which includes a transfer component and a shielding container for loading old target parts. The transfer component includes a transfer track, and the shielding container is movably connected to the transfer track.

[0018] Preferably, it further includes a lifting device for transporting the shielding container in a vertical direction, the lifting device being perpendicularly connected to the transfer track.

[0019] Preferably, the transfer mechanism further includes an opening and closing lid mechanism for controlling the switch of the shielded can, the opening and closing lid mechanism being disposed on the transfer track.

[0020] Preferably, the opening and closing mechanism includes an opening and closing plate, the opening and closing plate having an opening end, the opening end being a apex corner structure; the shielding can includes a can body and a cover movably connected to the can body, the cover moving away from the can body as the shielding can approaches the opening end.

[0021] Preferably, it further includes an intermediate component for transferring the target to the shielding container, the intermediate component being disposed below the vacuum cavity.

[0022] Based on the above technical solution, the technical effects achieved by the present invention are as follows:

[0023] (1) Simplified structure, improved operational stability, and convenient target assembly and disassembly. This invention provides an automatic target replacement device, wherein the vacuum chamber includes a movably connected vacuum chamber body, and a target holder is provided inside the vacuum chamber. When the vacuum chamber body moves away from the target body, the target holder inside the vacuum chamber is exposed, facilitating the removal and replacement of the old target on the target holder by the target replacement mechanism. The combination of this openable vacuum chamber structure and the target replacement mechanism reduces the design difficulty of the target replacement mechanism compared to isotope production equipment with an integrated vacuum chamber, greatly reduces the floor space, makes the overall structure more streamlined, and improves operational stability and reliability.

[0024] (2) Automatic target replacement function ensures worker safety. The target replacement mechanism in the automatic target replacement device provided by this invention can automatically replace targets when the vacuum chamber is opened, disassemble old targets and install new targets, so that the target replacement process does not require manual operation, thus ensuring worker safety. Furthermore, a transfer mechanism is provided to transport the disassembled old targets, further reducing harm to worker health. The transfer mechanism is also easy to remotely control and operates safely and stably.

[0025] (3) Improve production efficiency. The target holder in the automatic target replacement device provided by the present invention is also provided with a microchannel structure for heat dissipation of the target, so as to avoid damage to the target material under high temperature. At the same time, combined with the automatic target replacement mechanism, it reduces the time for cooling and disassembling the target, effectively improving the isotope production efficiency. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the automatic target replacement device of the present invention.

[0027] Figure 2 This is a cross-sectional view of the automatic target replacement device of the present invention.

[0028] Figure 3 This is a schematic diagram of the target replacement mechanism of the present invention.

[0029] Figure 4 This is a schematic diagram of the transfer mechanism of the present invention.

[0030] Figure 5 This is a schematic diagram of the shielding can in the closed state of the present invention.

[0031] Figure 6 This is a schematic diagram of the shielding can of the present invention in the open state.

[0032] Figure label:

[0033] 100 Support mechanism, 11 Target replacement support, 111 Moving track, 12 Fixed support,

[0034] 200 vacuum chamber,

[0035] 300 target replacement mechanism

[0036] 20 Vacuum chamber body, 201 Polytetrafluoroethylene layer, 202 Lead shielding layer, 21 Target support, 22 Beam interface, 23 Fixing plate, 24 Vacuum chamber drive mechanism, 25 Guide rail.

[0037] 30 Target compartment, 301 First compartment, 302 Second compartment, 303 Opening, 304 Target compartment plate, 31 Target component pushing mechanism, 311 Target pushing block, 312 Target pushing cylinder, 32 Target compartment moving mechanism, 321 Target compartment cylinder, 322 Piston rod.

[0038] 400 Transfer mechanism, 41 Transfer component, 411 Transfer track, 412 Transfer trolley, 413 Transfer drive component, 42 Shielded tank, 421 Tank body, 422 Cover, 423 Bearing, 424 Handle mechanism, 43 Opening and closing cover mechanism, 431 Opening and closing plate, 432 Opening and closing cover bracket, 433 Opening end, 44 Intermediate component, 45 Lifting device, 451 Vertical track. Detailed Implementation

[0039] To facilitate understanding of the present invention, a more comprehensive description will be given below in conjunction with the accompanying drawings and specific embodiments. The drawings illustrate preferred embodiments of the invention. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of the invention.

[0040] It should be noted that when a component is said to be "fixed to" another component, it can be directly attached to the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component.

[0041] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0042] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0044] Example 1

[0045] Figure 1 A schematic diagram of an automatic target replacement device in this embodiment is provided. Figure 1 As shown, this embodiment provides an automatic target replacement device, which includes a support mechanism 100, a vacuum chamber 200 disposed on the support mechanism 100, and a target replacement mechanism 300. The vacuum chamber 200 has an openable / closable structure. When the vacuum chamber 200 is opened, the target replacement mechanism 300 disassembles and replaces the target component located on the target holder 21 inside the vacuum chamber 200, thus realizing the function of automatic target replacement.

[0046] Specifically, Figure 2 A cross-sectional view of an automatic target replacement device according to this embodiment is given below. Figure 1 and Figure 2 In this embodiment, the vacuum chamber 200 is cylindrical and horizontally connected to the support mechanism 100. Inside the vacuum chamber 200, a target holder 21 is provided for mounting the target. A beam interface 22 is provided on the side of the vacuum chamber 200 along its central axis. The beam interface 22 is welded with a bellows and a flange for connection to a beamline conduit. Therefore, the beam direction acting on the target coincides with the central axis of the vacuum chamber 200. The target holder 21 faces the beam interface 22, facilitating the beam's application to the target for isotope production.

[0047] Specifically, in this embodiment, the vacuum chamber 200 includes two movably connected vacuum chamber bodies 20. The vacuum chamber bodies 20 are tightly connected to each other to form the vacuum chamber 200, and a vacuum chamber is formed inside it under the action of a vacuum pumping system, providing the environment required for isotope production. One vacuum chamber body 20 is fixed to the support mechanism 100, and the other vacuum chamber body 20 is movably connected to the support mechanism 100.

[0048] like Figure 2 As shown, a fixing plate 23 is provided on the left side of the support mechanism 100, and one of the vacuum chamber bodies 20 is connected to the fixing plate 23; a vacuum chamber drive mechanism 24 is provided on the right side of the support mechanism 100 and is connected to another vacuum chamber body 20. The vacuum chamber drive mechanism 24 includes a cylinder, a cylinder fixing bracket and a piston rod 322, and the cylinder is connected to the other vacuum chamber body 20 through the piston rod 322.

[0049] Furthermore, such as Figure 1 As shown, the support mechanism 100 is equipped with guide rails 25, which are located on the front and rear sides of the vacuum chamber 200. Another vacuum chamber body 20 is movably connected to the guide rails 25. Under the driving action of the vacuum chamber drive mechanism 24, the other vacuum chamber body 20 moves left and right along the guide rails 25, forming an openable structure with one of the vacuum chamber bodies 20. Compared with an integrated vacuum chamber, the openable vacuum chamber 200 reduces the design difficulty of the corresponding target replacement mechanism 300, improves operational stability, and facilitates the installation and removal of the target.

[0050] Of course, it is understood that this is not a specific limitation on the structure of the vacuum chamber 200. In some embodiments, it may not be limited to two vacuum chamber bodies 20, and both vacuum chamber bodies 20 may be movably connected to the support mechanism 100. The specific structure can be modified accordingly by those skilled in the art.

[0051] Figure 3 A schematic diagram of the target-changing mechanism 300 in this embodiment is provided. Figure 3As shown, the target replacement mechanism 300 includes a target chamber 30 and a target pushing mechanism 31. The target chamber 30 includes a first chamber 301 and a second chamber 302. In this embodiment, the first chamber 301 is vertically arranged, and the second chamber 302 is horizontally arranged. The first chamber 301 is vertically connected to the middle of the second chamber 302, and both the first chamber 301 and the second chamber 302 are provided with openings 303. In use, a new target is placed into the second chamber 302 through the opening 303 above the first chamber 301. The new target can be temporarily stored in the second chamber 302 under the action of the target pressing cylinder, or it can fall into the second chamber 302 under the action of gravity. When it is necessary to install a target, the new target moves under the drive of the target pushing mechanism 31 until it is pushed out of the target chamber 30 and installed on the target holder 21. The target pushing mechanism 31 includes a target pushing cylinder 312 and a target pushing block 311 connected to the target pushing cylinder 312. (Refer to reference) Figure 1 and Figure 3 In this embodiment, the vacuum chamber 200 is located on the left side of the second chamber 302, and the target pusher 311 is located on the right side of the second chamber 302. The target pusher 311 moves to the left under the action of the target pusher cylinder 312, pushes the target temporarily stored in the second chamber 302, and installs the target onto the target holder 21.

[0052] Furthermore, to facilitate accurate installation of the target onto the target holder 21, the target replacement mechanism 300 also includes a target compartment moving mechanism 32, which drives the target compartment 30 to move. For details, please refer to [link to details]. Figure 1 and Figure 3 The support mechanism 100 also includes a target replacement support 11, which is horizontally positioned across the front and rear sides of the vacuum chamber 200 and above it. The extension direction of the target replacement support 11 is perpendicular to the direction of movement of the vacuum chamber body 20. A moving track 111 is provided on the target replacement support 11. (See also...) Figure 3 The target chamber moving mechanism 32 includes a target chamber cylinder 321 and a piston rod 322. The target chamber cylinder 321 is connected to the target chamber 30 through the piston rod 322 and drives the target chamber 30 to move.

[0053] Furthermore, the target replacement mechanism 300 also includes a target chamber plate 304, on which the target chamber 30 is mounted. A slider is connected to the target chamber plate 304 on the other side where the target chamber 30 is located. The target chamber plate 304 is mounted on the moving track 111 via the slider, forming a sliding pair with the moving track 111. At the same time, the target chamber plate 304 is connected to the piston rod 322. Under the driving action of the target chamber moving mechanism 32, the target chamber 30 and the target pushing mechanism 31 move along the moving track 111 inside and outside the vacuum chamber 200.

[0054] In use, the height and position of the target replacement bracket 11 are adjusted so that the opening 303 of the second chamber 302 for outputting the new target corresponds to the position of the target holder 21 inside the vacuum chamber 200. When the vacuum chamber body 20 moves away from the target holder 21 inside the vacuum chamber 200, the target pushing mechanism 31 pushes the new target temporarily stored in the second chamber 302 onto the target holder 21, thus installing the new target. If the target holder 21 has an old target, the new target in the target chamber 30 will push the old target on the target holder 21 as it moves to the target holder 21, causing the old target to detach from the target holder 21, thus simultaneously removing the old target and replacing it with the new target. Furthermore, the automatic target replacement device in this embodiment also includes a transfer mechanism 400, through which the removed old target can be transported.

[0055] Specifically, see reference. Figure 1 and Figure 3 In this embodiment, the support mechanism 100 is further provided with a fixed support 12, which is distributed on the front and rear sides of the other vacuum chamber body 20 and connected to the target replacement support 11. The target replacement mechanism 300 is fixed above the vacuum chamber body 200. The fixed support 12 moves with the movement of the other vacuum chamber body 20. This ensures that the adjusted target replacement support 11 and the target replacement mechanism 300 fixed on the target replacement support 11 correspond to the target holder 21, ensuring accurate disassembly and installation of the target.

[0056] In summary, this embodiment provides an automatic target replacement device that can automatically disassemble and install target components. Furthermore, the vacuum chamber 200 of this automatic target replacement device adopts a segmented opening and closing structure, and the target replacement mechanism 300 comprises a target chamber 30 and a target component pushing mechanism 31. While achieving automated target disassembly, it features a simplified structure, stable operation, and improved operational reliability.

[0057] It should be noted that this embodiment does not limit the shape of the vacuum cavity 200. In some embodiments, the shape of the vacuum cavity 200 may be changed accordingly.

[0058] Example 2

[0059] See Figures 1-3 The automatic target replacement device in this embodiment is generally the same as the automatic target replacement device in Embodiment 1, and is further supplemented based on Embodiment 1. For the similarities between this embodiment and Embodiment 1, please refer to Embodiment 1. The improvements are further explained below.

[0060] Please see Figure 1In order to further optimize the process of automatically disassembling and assembling target components, an automatic target replacement device in this embodiment also includes a transfer mechanism 400. The transfer mechanism 400 includes a transfer component 41 and a shielding tank 42. The transfer component 41 includes a transfer track 411, and the shielding tank 42 can move along the transfer track 411.

[0061] Specifically, Figure 4 A structural schematic diagram of the transfer mechanism 400 is provided. Please refer to [link / reference]. Figure 1 and Figure 4 The transfer assembly 41 is located below the vacuum chamber 200 and includes a transfer track 411. A transfer trolley 412 for loading the shielding container 42 is mounted on the transfer track 411. The transfer trolley 412 is also connected to a transfer drive assembly 413. Under the action of the transfer drive assembly 413, the transfer trolley 412 can move along the transfer track 411. Figure 4 As shown, in this embodiment, the transfer drive component 413 is located at the rightmost end of the transfer track 411.

[0062] The transfer trolley 412 includes wheels, a fixed seat, and a positioning block for limiting the shielding tank 42. The wheels are connected to the transfer track 411, and the fixed seat is connected to the transfer drive assembly 413. The transfer drive assembly 413 typically includes a transfer cylinder and a piston rod, with the piston rod connected to the fixed seat.

[0063] Furthermore, to facilitate the loading of the disassembled target components into the shielding container 42, the transfer mechanism 400 also includes an opening and closing cover mechanism 43, which is mounted on the transfer track 411. The opening and closing cover mechanism 43 includes an opening and closing cover bracket 432 connected to the transfer track 411. The opening and closing cover bracket 432 is located on both sides of the transfer track 411, and each bracket has an opening and closing plate 431. The opening and closing plate 431 has an opening end 433, located at the end furthest from the transfer drive assembly 413, and close to the transfer trolley 412 and the shielding container 42. In this embodiment, the opening end 433 has a apex angle structure, meaning the opening and closing plate 431 has an inclined surface at the opening end 433, forming an angle. The overall structure of the opening and closing plate 431 is approximately trapezoidal, facilitating the application of force to the shielding container 42 for opening.

[0064] Figure 5 and Figure 6 Schematic diagrams of the shielded container 42 in both closed and open states are provided. Please refer to [link / reference]. Figure 5 and Figure 6 The shielding container 42 includes a container body 421 and a cover 422 movably connected to the container body 421. The cover 422 and the container body 421 are connected by a bearing 423. In addition, the shielding container 42 in this embodiment is also provided with a handle structure 424 that connects the cover 422 and the container body 421. The bearing 423 and the handle structure 424 can allow the cover 422 to open and close at a certain angle.

[0065] Reference Figures 1 to 6 When a target needs to be disassembled and a new target installed, the vacuum chamber body 20 moves away from the target, the vacuum cavity 200 opens, the transfer cylinder actuates, and the transfer trolley 412 is pulled by the piston rod, causing the transfer trolley 412 to move towards the opening and closing mechanism 43. As the shielding container 42 contacts the opening end 433 of the opening and closing mechanism 43, the bearing 423 moves upward along the inclined surface under the action of the apex angle of the opening end 433, causing the cover 422 to move relative to the container 421 until the opening angle between the cover 422 and the container 421 reaches its maximum. When the old target moves away from the target holder 21 under the action of the target pushing mechanism 31, it can fall into the opened shielding container 42. When the vacuum chamber body 20 approaches and the vacuum cavity 200 closes, the transfer drive assembly 413 drives the transfer trolley 412 away from the closing mechanism 43, the bearing 423 moves downward along the inclined surface, and at the same time, the cover 422 closes with the container 421 under its own weight. The opening and closing mechanism 43 can realize the automatic opening and closing of the shielding tank 42. It has a simple structure and a reliable opening and closing process.

[0066] Furthermore, such as Figure 2 As shown, to optimize the process of the old target entering the shielding container 42, in this embodiment, an intermediate component 44, which is a funnel, is also provided below the vacuum chamber 200. After the old target detaches from the target holder 21, it falls freely into the funnel and, guided by the funnel, falls into the shielding container 42, ensuring the accuracy of loading the old target holder 21. Of course, the structure of the intermediate component 44 is not limited to a funnel; it can also be other mechanisms with guiding or conveying functions. In addition, the opening and closing plate 431 can also be connected to a positioning component, which is used to position the opening and closing position of the shielding container 42.

[0067] It should be noted that since the target material after beam radiation will produce a series of radioactive nuclides, certain shielding measures are required. In this embodiment, the shielding container 42 includes a lead layer and a stainless steel layer, with the stainless steel layer outside the lead layer.

[0068] Furthermore, returning to Figure 4The transfer mechanism 400 also includes a lifting device 45 connected to the transfer assembly 41. The lifting device 45 includes a vertical rail 451, which is vertically connected to the transfer rail 411. The transfer rail 411 is horizontally positioned, and the vertical rail 451 can be fixed to a wall, extending vertically as a whole. The vertical rail 451 is located on the side of the transfer rail 411 away from the transfer drive assembly 413. A winch motor is mounted at the top of the vertical rail 451 as the lifting power structure. The vertical rail 451 is also equipped with a wire rope for connecting the motor and the transfer trolley 412, enabling the transfer trolley 412 to move vertically. In use, the transfer trolley 412 and the shielding container 42 can be transported to the transfer rail 411 by a hoist. Similarly, the shielding container 42 can be transported away from the vacuum chamber by a hoist. The transport of the shielding container 42 is remotely controlled by the lifting device 45, completing the transfer of the shielding container 42 and the target inside the shielding container between the production area and the safe location. Meanwhile, the transfer process operated smoothly and was structurally reliable.

[0069] In summary, this embodiment improves upon Embodiment 1 by adding a transfer mechanism 400. The transfer mechanism 400 moves the shielding container 42, automates the storage and shielding of the old target components, and automates the storage process after disassembling the old target components. This automatic target replacement device integrates target replacement, shielding storage, transportation, and automation into a compact structure, while ensuring the safety of personnel.

[0070] Example 3

[0071] This embodiment is a further explanation based on Embodiment 1.

[0072] like Figure 2 As shown, to further ensure the safety of personnel, the vacuum chamber 200 adopts a sandwich water jacket type. The vacuum chamber 200 is equipped with a polytetrafluoroethylene layer 201 and a lead shielding layer 202. The polytetrafluoroethylene layer 201 surrounds the lead shielding layer 202, and the target holder 21 is located in the vacuum chamber formed within the lead shielding layer 202. This reduces the neutron and photon dose generated in the external environment of the vacuum chamber 200 due to the production of isotopes, and better protects peripheral equipment and terminal components.

[0073] In addition, due to the high beam power density, the target and surrounding components typically experience high temperatures, necessitating cooling and heat exchange. In this embodiment, the automatic target replacement device also includes a heat exchange mechanism. This mechanism comprises a microchannel structure located on the back of the target holder 21. The microchannel structure allows for the flow of cooling media, possesses a high heat transfer coefficient, and protects the target material from high-temperature damage. The heat exchange mechanism also includes a heat exchange circuit, which comprises a chiller unit, water pipes, valves, sensors, and other components. The heat exchange circuit connects the interior of the vacuum chamber 200 and the target holder 21, aiming to control the temperature inside the vacuum chamber 200 and the target holder 21, dissipating excess heat through the cooling medium to ensure normal operation of the device.

[0074] In addition, it is understandable that in order to create a vacuum environment inside the vacuum chamber 200, the vacuum pumping system may include structures such as an air compressor, a vacuum pump, and a pressure detector. At the same time, in order to optimize heat dissipation, the vacuum chamber 200 may also be equipped with structures such as a temperature sensor.

[0075] The above description is merely an example and illustration of the structure of this invention, and while the description is specific and detailed, it should not be construed as limiting the scope of this invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this invention, and these obvious substitutions all fall within the protection scope of this invention.

Claims

1. An automatic target replacement device, characterized in that, It includes a support mechanism and a vacuum cavity, a target replacement mechanism, and a transfer mechanism disposed on the support mechanism; The vacuum cavity has an openable structure and includes at least two movably connected vacuum chamber bodies. The vacuum cavity is provided with a target holder for mounting the target. The target replacement mechanism includes a target chamber for placing the target, a target pushing mechanism, and a target chamber moving mechanism. The target pushing mechanism is movably connected to the target chamber. The vacuum chamber body is located away from the target chamber. The target pushing mechanism is used to push the target in the target chamber to the target holder. The transfer mechanism includes a transfer component and a shielding container for loading old target parts, the shielding container being movably connected to the transfer component; The target chamber moving mechanism is connected to the target chamber and drives the target chamber to move inside and outside the vacuum cavity; the target chamber includes a first chamber and a second chamber that are perpendicularly connected to each other. When the vacuum chamber body moves away from each other, the target chamber moving mechanism drives the target chamber to approach the target holder, and the target component pushing mechanism pushes the new target component temporarily stored in the second chamber to the target holder, while simultaneously pushing the old target component off the target holder.

2. The automatic target replacement device according to claim 1, characterized in that, The support mechanism is provided with a target replacement support, and the target replacement support is provided with a moving track. The target chamber moving mechanism includes a target chamber cylinder and a piston rod disposed on the moving track; The target compartment is also connected to a target compartment plate, and the target compartment is movably connected to the piston rod through the target compartment plate.

3. The automatic target replacement device according to claim 1, characterized in that, At least one of the vacuum chamber bodies is fixedly connected to the support mechanism, and the other vacuum chamber body is movably connected to the support mechanism.

4. The automatic target replacement device according to claim 1, characterized in that, The vacuum chamber body comprises a polytetrafluoroethylene layer and a lead layer.

5. The automatic target replacement device according to any one of claims 1-4, characterized in that, The transfer assembly includes a transfer track, and the shielded tank is movably connected to the transfer track.

6. The automatic target replacement device according to claim 5, characterized in that, It also includes a lifting device for transporting the shielding container in the vertical direction, the lifting device being connected to the transfer track.

7. The automatic target replacement device according to claim 5, characterized in that, The transfer mechanism also includes an opening and closing mechanism for controlling the switch of the shielded can, which is located on the transfer track.

8. The automatic target replacement device according to claim 7, characterized in that, The opening and closing mechanism includes an opening and closing plate, which has an opening end with a apex corner structure; the shielding can includes a can body and a cover that is movably connected to the can body, and the cover moves away from the can body as the shielding can approaches the opening end.

9. The automatic target replacement device according to claim 5, characterized in that, It also includes an intermediate component for transferring the target to the shielding container, the intermediate component being located below the vacuum chamber.

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