An optical lens measuring device and method

By constructing an optical lens measurement device with reflection and transmission measurement paths and a detachable beam blocking module, the problem of low single-measurement efficiency in the prior art is solved, and automated measurement and efficient detection of multiple parameters are realized.

CN116818281BActive Publication Date: 2026-03-17SHANGHAI ASPIRING SEMICON EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-06-25
Publication Date
2026-03-17

AI Technical Summary

Technical Problem

Existing optical lens measurement devices can only measure one parameter among transmittance, reflectance at a certain angle, or chirp in a single measurement, and require a cumbersome calibration process, which affects measurement efficiency and automation.

Method used

A reflection measurement path and a transmission measurement path are constructed, and a detachable beam blocking module is set on the reflector. Combined with the rotation module, multi-parameter measurements of transmittance, reflectance and chirp are realized without recalibration. The angle of the lens and the reflector can be adjusted by rotating the module to adapt to the measurement of different optical parameters.

Benefits of technology

It enables automated measurement of multiple parameters, reduces calibration time, improves detection efficiency, reduces manpower and material costs, and expands the diversity and applicable scenarios of detection.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application provides an optical lens measuring device and method, which comprises a light source, a half-wave plate, a polarization beam splitter, a 1 / 4 wave plate, a first mirror, a second mirror, a first beam splitter, a rotating module, a transmittance and reflectance detection module and a chirp detection module, the transmittance, reflectance and chirp are measured by constructing a reflection measurement path and a transmission measurement path and setting a detachable light beam shielding module on the mirror, without the need for recalibration and debugging, a large amount of time is saved, and the detection efficiency is improved. In addition, the rotating module is used to rotate the to-be-measured lens and the corresponding mirror lens, so that different optical parameters can be measured according to different optical lenses and different angles, the detection diversity is increased, the detection complexity is simplified, the cost of manpower and material resources is reduced, and the sustainable development of enterprises is beneficial.
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Description

Technical Field

[0001] This invention relates to the field of optical lens testing technology, and particularly to an optical lens measuring device; furthermore, this invention also relates to an optical lens measuring method. Background Technology

[0002] Transmittance, reflectance, and chirp are all important parameters reflecting the performance of optical lenses. These parameters need to be measured after production or before use to ensure accuracy. Existing optical lens measurement devices, such as spectrophotometers, typically only measure one of these parameters—transmittance, reflectance at a specific angle, or chirp—in a single measurement. Such devices require calibration before each measurement and involve numerous measurements, significantly impacting measurement efficiency.

[0003] On the one hand, the calibration process is cumbersome and requires high precision, which is one of the bottlenecks to improving measurement efficiency and a significant obstacle to achieving efficient measurement. On the other hand, both calibration and measurement require manual operation, which is not conducive to scaling up measurements, necessitating the search for an automated mechanical method to replace manual operation.

[0004] Therefore, there is an urgent need for an optical lens measuring device that can measure multiple optical parameters in a single measurement without requiring manual recalibration and adjustment. Summary of the Invention

[0005] To address the problems existing in the prior art, at least one embodiment of the present invention provides an optical lens measurement device. By constructing a reflection measurement path and a transmission measurement path, and by setting a detachable beam blocking module on the reflector, it achieves measurements of transmittance, reflectance, and chirp without requiring recalibration and adjustment, saving significant time and improving detection efficiency. Furthermore, a rotation module allows the lens under test and its corresponding reflector to rotate, enabling the measurement of different optical parameters based on different optical lenses and angles. This increases detection diversity, simplifies detection complexity, reduces manpower and material costs, and is beneficial to the sustainable development of enterprises. Therefore, at least one embodiment of the present invention also provides an optical lens measurement method.

[0006] In a first aspect, embodiments of the present invention provide an optical lens measuring device comprising a light source, a half-wave plate, a polarizing beam splitter, a quarter-wave plate, a first reflecting mirror, a second reflecting mirror, and a transmittance and reflectance detection module. The lens to be tested is disposed between the quarter-wave plate and the first reflecting mirror, and the second reflecting mirror is disposed on the reflection path of the lens to be tested. The light source, half-wave plate, polarizing beam splitter, and quarter-wave plate are arranged sequentially to form a light source incident path. The transmittance and reflectance detection module is disposed on the reflection path of the polarizing beam splitter. The second reflecting mirror, the lens to be tested, the quarter-wave plate, and the polarizing beam splitter form a reflection measurement path, and the first reflecting mirror, the lens to be tested, the quarter-wave plate, and the polarizing beam splitter form a transmission measurement path.

[0007] In some embodiments, the optical lens measuring device provided by the present invention further includes a third reflecting mirror, a spot position sensor, and a second beam splitter. The third reflecting mirror is disposed on the reflection path of the polarizing beam splitter, the second beam splitter is disposed on the reflection path of the third reflecting mirror, the spot position sensor is disposed on the reflection path of the second beam splitter, and the transmittance and reflectance detection module is disposed on the transmission path of the second beam splitter. The spot position sensor is respectively connected to the electronic control systems of the first reflecting mirror and the third reflecting mirror, and the electronic control system is used to adjust the reflection angle of the first reflecting mirror and the third reflecting mirror individually.

[0008] In some embodiments, the optical lens measuring device provided by the present invention further includes a first beam splitter and a chirp detection module. The first beam splitter is disposed on the reflection path of the third reflector, and the transmittance and reflectance detection module and the chirp detection module are respectively disposed on the beam splitting path of the first beam splitter.

[0009] In some embodiments, the optical lens measuring device provided by the present invention has a first beam splitter that is a non-polarizing beam splitter.

[0010] In some embodiments, the optical lens measuring device provided by the present invention includes a first reflecting mirror and a third reflecting mirror, both of which are ultrafast reflecting mirrors.

[0011] In some embodiments, the optical lens measuring device provided by the present invention further includes:

[0012] The first rotating module is used to rotate the lens under test;

[0013] The second rotation module is used to rotate the second reflector according to the rotation angle of the lens under test. When rotating, the light beam incident on the second reflector is perpendicular to the second reflector, the distance between the second reflector and the lens under test remains unchanged, and the rotation angle of the second reflector is twice the rotation angle of the lens under test.

[0014] In some embodiments, the optical lens measuring device provided by the present invention has the rotation axes of the first rotation module and the second rotation module positioned on the vertical axis where the incident point of the laser on the lens to be measured is located.

[0015] In some embodiments, the optical lens measuring device provided by the present invention uses a first rotating module and a second rotating module, respectively, with a separate control device or a combined transmission control device.

[0016] In some embodiments, the optical lens measuring device provided by the present invention has a beam blocking module detachably mounted on the first reflector and the second reflector, respectively.

[0017] Secondly, embodiments of the present invention also provide an optical lens measurement method, using the aforementioned optical lens measurement device, the method comprising:

[0018] The incident path of the light source is constructed by sequentially arranging the light source, half-wave plate, polarizing beam splitter and quarter-wave plate; the transmission measurement path is constructed by the first reflecting mirror, the lens under test, quarter-wave plate and polarizing beam splitter; and the reflection measurement path is constructed by the second reflecting mirror, the lens under test, quarter-wave plate and polarizing beam splitter.

[0019] The lens under test is positioned between the quarter-wave plate and the first reflector, the second reflector is positioned on the reflection path of the lens under test, and the transmittance and reflectance detection module is positioned on the reflection path of the polarizing beam splitter.

[0020] The light source is incident on the lens under test through the incident path. The transmittance parameter of the lens under test is measured through the transmission measurement path, and the reflectance parameter of the lens under test is measured through the reflection measurement path.

[0021] In some embodiments, the optical lens measurement method provided by the present invention further includes:

[0022] During testing, the lens under test is rotated by the first rotation module, and the second reflector is rotated by the second rotation module according to the rotation angle of the lens under test. The beam incident on the second reflector is controlled to be perpendicular to the second reflector. The distance between the second reflector and the lens under test remains unchanged. The rotation angle of the second reflector is twice the rotation angle of the lens under test. The rotation axes of the first and second rotation modules are located on the vertical axis where the laser incident point on the lens under test is located.

[0023] In some embodiments, the optical lens measurement method provided by the present invention further includes:

[0024] After measuring the reflectivity of the lens under test at the initial incident angle, the lens under test is rotated by a preset angle to measure its reflectivity at different incident angles. The second reflector rotates synchronously or sequentially by twice the preset angle according to the rotation angle of the lens under test.

[0025] In some embodiments, the optical lens measurement method provided by the present invention further includes:

[0026] A third reflector and a second beam splitter are set on the reflection path of the polarizing beam splitter. A spot position sensor is set on the reflection path of the second beam splitter. The spot position sensor is connected to the electronic control system of the first reflector and the third reflector respectively. The electronic control system adjusts the optical path of the first reflector and the third reflector according to the signal of the spot position sensor.

[0027] In some embodiments, the optical lens measurement method provided by the present invention further includes:

[0028] A first beam splitter is set on the reflection path of the third reflector, and a chirp detection module and a transmittance / reflectance detection module are set on the beam splitting path of the first beam splitter.

[0029] In some embodiments, the optical lens measurement method provided by the present invention further includes:

[0030] Before loading the lens to be tested, the chirp values ​​of the transmission measurement path and the reflection measurement path are measured and recorded respectively. The chirp values ​​are then corrected according to the system chirp values ​​to obtain the chirp output values.

[0031] As can be seen, the optical lens measurement device and method of this invention, by constructing reflection and transmission measurement paths and setting a detachable beam-blocking module on the reflector, achieves measurements of transmittance, reflectance, and chirp without requiring recalibration and adjustment, saving significant time and improving detection efficiency. Furthermore, the rotation module allows the lens under test and its corresponding reflector to rotate, enabling the measurement of different optical parameters based on different optical lenses and angles. This increases detection diversity, simplifies detection complexity, reduces manpower and material costs, and is beneficial to the sustainable development of enterprises. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 The diagram shown is a structural schematic of an optical lens measuring device according to Embodiment 1 of the present invention.

[0034] Figure 2 This is a schematic diagram illustrating the function of the quarter-wave plate in Embodiment 1 of the present invention.

[0035] Figure 3 The diagram shows a scenario in Embodiment 1 of the present invention where the beam blocking module is closed in front of the first reflector to prevent the laser from passing through, and the beam blocking module is opened in front of the second reflector to allow the laser to pass through.

[0036] Figure 4 The diagram shows a scenario in Embodiment 1 of the present invention where the beam blocking module is opened in front of the first reflector to allow the laser to pass through, and the beam blocking module is closed in front of the second reflector to prevent the laser from passing through.

[0037] Figure 5 The diagram shows a rotation of the lens under test and the second reflecting mirror in Embodiment 1 of the present invention.

[0038] Figure 6 The flowchart shown is a method for measuring optical lenses according to Embodiment 4 of the present invention.

[0039] The reference numerals in the accompanying drawings are as follows:

[0040] Light source 1, half-wave plate 2, polarizing beam splitter 3, third reflector 4, second beam splitter 5, quarter-wave plate 6, lens under test 7, second reflector 8, first reflector 9, first beam splitter 10, transmittance and reflectance detection module 11, chirp detection module 12, spot position sensor 13. Detailed Implementation Plan

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. In this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0043]

Example 1

[0044] The inventors of this invention discovered that in existing devices for testing optical lenses, typically only one of three parameters—transmittance, reflectance at a specific angle, and chirp—can be measured in a single measurement. Such measuring devices require calibration for each measurement in practical use, significantly impacting testing efficiency. Furthermore, the calibration process is cumbersome and requires high precision, posing a significant obstacle to automated testing. Embodiment 1 of this invention provides the following solution:

[0045] like Figure 1 As shown, this embodiment provides an optical lens measuring device, including a light source 1, a half-wave plate 2, a polarizing beam splitter 3, a quarter-wave plate 6, a first reflecting mirror 9, a second reflecting mirror 8, a first beam splitter 10, and a transmittance and reflectance detection module 11.

[0046] Beam blocking modules are detachably mounted on the first reflector 9 and the second reflector 8, respectively. The lens under test 7 is positioned between the quarter-wave plate 6 and the first reflector 9, the second reflector 8 is positioned on the reflection path of the lens under test 7, and the transmittance and reflectance detection module 11 is positioned on the reflection path of the polarizing beam splitter 3.

[0047] Furthermore, the optical lens measuring device also includes a third reflecting mirror 4, a spot position sensor 13, and a second beam splitter 5. The third reflecting mirror 4 is disposed on the reflection path of the polarizing beam splitter 3, and the second beam splitter 5 is disposed on the reflection path of the third reflecting mirror 4, located between the third reflecting mirror 4 and the first beam splitter 10. The spot position sensor 13 is disposed on the reflection path of the second beam splitter 5, and the transmittance and reflectance detection module 11 is disposed on the transmission path of the second beam splitter 5. The spot position sensor 13 is connected to the electronic control systems of the first reflecting mirror 9 and the third reflecting mirror 4, respectively. The electronic control systems are used to adjust the reflection angles of the first reflecting mirror 9 and the third reflecting mirror 4 individually.

[0048] It should be noted that the second beam splitter 5 is a type of beam splitter capable of splitting less than 0.5%, less than 5%, or less than 50% of the light. The type of beam splitter can be selected according to needs. The second beam splitter 5 is mainly used to separate a portion of the light for optical path collimation adjustment without excessive energy loss. The beam position sensor 13 is mainly used to monitor the beam position and direction and is located above the second beam splitter 5. The third reflecting mirror 4 works in conjunction with the beam position sensor 13 and the second beam splitter 5 for optical path calibration, thereby improving measurement accuracy.

[0049] The optical lens measuring device also includes a first beam splitter 10 and a chirp detection module 12. The first beam splitter 10 is disposed on the reflection path of the third reflector 4, and the transmittance and reflectance detection module 11 and the chirp detection module 12 are respectively disposed on the beam splitting path of the first beam splitter 10.

[0050] It should be noted that light source 1 is a laser source, mainly used to provide a laser beam for testing. It can be a picosecond laser source or a femtosecond laser source, used to provide a stable laser beam with a power greater than 1mW. The pulse width can be in the femtosecond or picosecond range, and the wavelength can be a fixed wavelength or an adjustable wavelength.

[0051] It should be noted that the half-wave plate 2 is mainly used to change the linear polarization direction of the laser beam, and is positioned close to the light source 1, located after the light source 1. Various types of half-wave plates can be used, including polymer true zero-order half-wave plates, quartz zero-order half-wave plates, and quartz true zero-order half-wave plates, all of which can achieve the effect of changing the polarization direction of the laser beam.

[0052] It should be noted that the polarizing beam splitter 3 is mainly used to separate laser beams with different polarization directions and is positioned after the half-wave plate. The quarter-wave plate 6 is positioned after the polarizing beam splitter 3 to reduce the influence of reflected light, ensure the accuracy of lens detection, and eliminate the need for recalibration after one calibration, thus improving detection efficiency. Figure 2 As shown, the laser beam becomes P-polarized light after passing through the half-wave plate 2 and the polarizing beam splitter 3. This P-polarized light then becomes circularly polarized light (left-handed or right-handed) after passing through the quarter-wave plate 6. The reflected circularly polarized light then passes through the quarter-wave plate 6 again and becomes S-polarized light with a horizontal polarization direction. This S-polarized light can be completely reflected in the other direction by the polarizing beam splitter 3 without energy loss. Specifically, the quarter-wave plate 6 can be a polymer true zero-order quarter-wave plate, a quartz zero-order quarter-wave plate, or a quartz true zero-order quarter-wave plate, etc.

[0053] It should be noted that the third reflecting mirror 4 is an ultrafast reflecting mirror, mainly used for reflecting light beams. The number of mirrors can be set according to the actual needs of the scenario. Generally, to save costs, one third reflecting mirror 4 is used here. Its frame is a piezoelectric reflecting mirror frame, and the lens is an ultrafast reflecting mirror with selectable wavelength determined by the wavelength of the light source. Alternatively, a dielectric film reflecting mirror can be used, but its reflectivity is lower than that of ultrafast reflecting mirrors, resulting in higher power loss. Therefore, the third reflecting mirror 4 is preferably an ultrafast reflecting mirror, as ultrafast reflecting mirrors introduce less chirp, have higher reflectivity, and consume less power.

[0054] It should be noted that the first reflecting mirror 9 is an ultrafast reflecting mirror, mainly used to reflect the light beam transmitted through the lens under test 7 back to the lens under test 7 along the original path, so as to measure the transmittance parameters of the lens under test 7. Its frame is a piezoelectric reflecting mirror frame, and the lens is an ultrafast reflecting mirror. Alternatively, a dielectric film reflecting mirror can also be used, but the reflectivity is lower than that of an ultrafast reflecting mirror, and the power loss is greater. Therefore, in this embodiment, the first reflecting mirror 9 is preferably an ultrafast reflecting mirror, which introduces less system chirp, higher reflectivity, and less power loss.

[0055] It should be noted that the second reflecting mirror 8 is an ultrafast reflecting mirror, mainly used to return the light beam reflected by the lens under test 7 back to the lens under test 7 along the original path, so as to measure the reflectivity parameters of the lens under test 7. Its frame is a piezoelectric reflecting mirror frame, and the lens is an ultrafast reflecting mirror, which is the same as the first reflecting mirror 9, and will not be described again here.

[0056] It should be noted that the second reflecting mirror 8 is an ultrafast reflecting mirror, mainly used to reflect the light beam, measure the reflectivity parameters of the lens under test 7, and return the light beam reflected by the lens under test 7 back to the lens under test 7 along the original path. The second reflecting mirror 8 is positioned below the lens under test 7. Its frame is a piezoelectric reflecting mirror frame, and the mirror is an ultrafast reflecting mirror. Alternatively, a dielectric film reflecting mirror can be used, but its reflectivity is lower than that of ultrafast reflecting mirrors, resulting in higher power loss. Therefore, the second reflecting mirror 8 is preferably an ultrafast reflecting mirror, as ultrafast reflecting mirrors introduce less chirp, have higher reflectivity, and consume less power.

[0057] It should be noted that the first beam splitter 10 is a non-polarizing beam splitter, the applicable wavelength of which can be determined by the light source. It is used to split a beam into two beams for performance measurement. It can be a flat plate or a cubic beam splitter. The non-polarizing flat plate beam splitter has a larger aperture and is easier to adjust. Specifically, a 50-50 beam splitter is used in this embodiment. In other embodiments of the present invention, a 30-70 beam splitter, a 70-30 beam splitter, or other common ratio beam splitters can also be used to achieve the beam splitting function. Those skilled in the art can flexibly select the model or type of beam splitter according to the measurement needs. Furthermore, this embodiment uses a 50-50 beam splitter, so that extreme phenomena will not occur when adjusting the power, such as the chirp measurement device being unable to measure due to insufficient power, or the accuracy of the power measurement module decreasing due to insufficient power.

[0058] It should be noted that the transmittance and reflectance detection module 11 is a power measurement device used to measure beam power to calculate transmittance and reflectance, and is located behind the first beam splitter 10. Specifically, the transmittance and reflectance detection module 11 can be a power meter or a photodetector. Furthermore, the power meter can be a photoelectric power meter or a thermoelectric power meter. Photoelectric power meters are highly efficient but have a limited spectral measurement range, while thermoelectric power meters are less efficient but have a wider spectral measurement range. Those skilled in the art can flexibly choose the appropriate device based on measurement needs and light source parameters.

[0059] It should be noted that the chirp detection module 12 is a device for measuring chirp, used to measure the chirp parameters of the lens 7 under test. Specifically, the chirp detection module 12 can be a chirp measuring instrument.

[0060] Light source 1, half-wave plate 2, polarizing beam splitter 3, and quarter-wave plate 6 are arranged in sequence to form the incident path of the light source. It can be understood that the laser emitted from light source 1 passes through half-wave plate 2 and polarizing beam splitter 3 in sequence to obtain single-polarized light, and then passes through quarter-wave plate 6 to be incident on the lens under test 7 for optical parameter testing.

[0061] The second reflecting mirror 8, the lens under test 7, the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10 form the reflection measurement path. That is, when the lens under test 7 is a reflecting mirror, its reflectivity parameters are measured. It can be understood that the incident light, after passing through the lens under test 7, is reflected to the second reflecting mirror 8, which then reflects the light beam back to the lens under test 7. The reflected light beam passes sequentially through the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10. Finally, the first beam splitter 10 splits the beam into two beams for performance measurement. Specifically, the two beams enter the transmittance and reflectance detection module 11 and the chirp detection module 12, respectively, for reflectance and chirp detection.

[0062] The first reflecting mirror 9, the lens under test 7, the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10 form a transmission measurement path. That is, when the lens under test 7 is a transmission mirror, its transmission parameters are tested. It can be understood that the incident light passes through the lens under test 7 and is transmitted to the first reflecting mirror 9. The first reflecting mirror 9 reflects the light back to the lens under test 7 along the original path. The reflected light then passes sequentially through the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10. Finally, the first beam splitter 10 splits the beam into two beams for performance measurement. That is, the two beams enter the transmittance and reflectance detection module 11 and the chirp detection module 12 respectively for transmittance and chirp detection.

[0063] It should be noted that the lens under test 7 can be a reflector, a lens, or a beam splitter. When the lens under test is a reflector or a lens, only one of the first reflector 9 and the second reflector 8 is always in working condition, so there is no need to use a beam blocking module for control. When the lens under test 7 is a beam splitter, in order to better test its performance parameters, beam blocking modules are detachably installed on the first reflector 9 and the second reflector 8 respectively. In this embodiment, the beam blocking module is mounted on a bracket, and the beam blocking module can be controlled to open or close on the bracket. The bracket with the beam blocking module is installed in front of the first reflector 9 and the second reflector 8 respectively. Opening the beam blocking module allows the laser to pass through, and closing the beam blocking module prevents the laser from passing through.

[0064] It should be noted that the beam blocking modules can also be installed in front of the first reflector 9 and the second reflector 8 respectively to prevent the laser from passing through; when the laser needs to pass through, the beam blocking modules in front of the first reflector 9 and the second reflector 8 can be removed respectively to allow the laser to pass through.

[0065] Furthermore, the beam blocking module can employ devices that block high-power lasers without being burned by laser energy or reflecting the laser. Specifically, it can use a light-shielding plate, a zero-aperture aperture, or an optical shutter. The beam blocking module is a device that can completely block the laser beam, prevent laser reflection, and is itself unaffected by the laser. It is mainly used to ensure that the transmitted and reflected light paths do not interfere with each other when measuring beam splitters.

[0066] It should be noted that, in this embodiment, the lens under test 7 is a beam splitter. For example... Figure 3 As shown, when it is necessary to detect the reflectivity parameters of the lens under test 7, the beam blocking module in front of the first reflecting mirror 9 is closed to prevent the laser from passing through, and the beam blocking module in front of the second reflecting mirror 8 is opened to allow the laser to pass through. The reflectivity parameters are measured through the reflection measurement path formed by the second reflecting mirror 8, the lens under test 7, the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10. Figure 4As shown, when it is necessary to detect the transmittance parameters of the lens under test 7, the beam blocking module in front of the first reflector 9 is opened to allow the laser to pass through, and the beam blocking module in front of the second reflector 8 is closed to prevent the laser from passing through. The transmittance parameters are measured through the transmission measurement path formed by the first reflector 9, the lens under test 7, the quarter-wave plate 6, the polarizing beam splitter 3 and the first beam splitter 10.

[0067] Furthermore, for the measurement of reflectivity parameters, the optical lens measuring device also includes a first rotation module and a second rotation module. The first rotation module rotates the lens under test 7, and the second rotation module rotates the second reflecting mirror 8 according to the rotation angle of the lens under test 7. The rotation axes of both the first and second rotation modules are located on the vertical axis where the laser incident point on the lens under test 7 is located. Through the above structure and positional relationship, the optical lens measuring device can measure the optical parameters of the lens under test 7 at different angles, especially the reflectivity at different angles, thus expanding the applicable scenarios of the optical lens measuring device. The first and second rotation modules can be controlled separately by individual control devices, or simultaneously by a combined transmission control device. It should be noted that the individual control device can be a geared motor, which can control the rotation of the first and second rotation modules separately. The combined transmission control device requires the addition of a transmission device at the motor output end to achieve simultaneous control of the first and second rotation modules.

[0068] In this embodiment, separate control devices are used to control the first and second rotation modules respectively. Specifically, the output shaft of the first geared motor is directly connected to the lens under test 7, and the output shaft of the second geared motor is driven to the second reflector 8. After the first and second geared motors rotate, they respectively drive the lens under test 7 and the second reflector 8 to rotate around the same rotation axis. The position of this rotation axis is the vertical axis where the laser incident point on the lens under test 7 is located.

[0069] Specifically, when the lens under test 7 rotates around the rotation axis, the light beam reflected by the lens under test 7, that is, the light beam incident on the second reflecting mirror 8, will rotate accordingly. At this time, the second reflecting mirror 8 should also rotate around the rotation axis. Furthermore, when the second reflecting mirror 8 rotates, the light beam incident on the second reflecting mirror 8 should always be perpendicular to the second reflecting mirror 8, and the distance between the second reflecting mirror 8 and the lens under test 7 should remain unchanged.

[0070] It should be noted that, in order to meet the above conditions and achieve measurement, the rotation angle of the second reflecting mirror 8 should be twice the rotation angle of the lens under test 7. Specifically, the second reflecting mirror 8 not only needs to rotate in the same direction as the lens under test 7, but also needs to rotate in the direction of the lens under test 7 with the incident point of the laser beam on the second reflecting mirror 8 as the center. For ease of understanding, those skilled in the art can refer to the concepts of planetary rotation and revolution. The advantage of the above implementation is that the lens under test 7 and the second reflecting mirror 8 are controlled by two separate geared motors, and their rotation processes do not affect each other. They can rotate simultaneously or sequentially, and the two geared motors drive the rotation process more precisely.

[0071] Specifically, such as Figure 5 As shown, Figure 5 In this diagram, α represents the rotation angle of the lens under test 7; β represents the rotation angle of the second reflecting mirror 8 itself. α' is the angle between the normals of the lens under test 7 and the normal, which is equal to the change in the incident angle of the light beam; β' is the angle between the normals of the second reflecting mirror 8 and the normal, which is equal to the change in the incident angle plus the reflection angle. Since the incident angle equals the reflection angle, we know that α = α' and β = β', therefore β = 2α. This ensures that when the lens under test 7 rotates by an angle α, the second reflecting mirror 8 as a whole can rotate β° in the same direction with a radius of d, centered on the point of incidence of the laser beam onto the lens under test 7, and the second reflecting mirror 8 itself also rotates β° in the same direction.

[0072] In this embodiment, the initial state of the optical lens measuring device is set to... Figure 1 The initial state of the test lens 7 and the second reflecting mirror 8 is an incident angle of 45°. In subsequent measurements, the test lens 7 and the second reflecting mirror 8 can be rotated to the same side to reach a position range of 45°±30° to measure reflectivity parameters at other angles.

[0073] In other embodiments of the present invention, the optical lens measuring device can employ a combined transmission device to control the rotation of the lens under test 7 and the second reflector 8. For example, the combined transmission device includes a geared motor, a first transmission mechanism, and a second transmission mechanism. The lens under test 7 is driven to the output end of the geared motor via the first transmission mechanism, while the second reflector 8 is also driven to the output end of the geared motor via the second transmission mechanism. The advantage of the above embodiments is that the lens under test 7 and the second reflector 8 are driven by the same geared motor, ensuring that their rotation processes are synchronized, thus reducing control complexity.

[0074] The transmission mechanism in the aforementioned combined transmission device can also be a planetary gear system with a certain transmission ratio, so that the rotation angle of the lens under test 7 and the second reflecting mirror 8 can meet the detection requirements. Those skilled in the art can learn about the specific structure of this planetary gear system from textbooks or reference books and design corresponding structures, which will not be elaborated here.

[0075] Those skilled in the art should understand that the specific embodiments described above, which employ individual control devices or combined transmission devices, are merely simple examples to illustrate their feasibility, and should not be construed as limiting the scope of protection of the present invention solely based on the above embodiments.

[0076]

Example 2

[0077] This embodiment provides an optical lens measuring device, whose overall structure is roughly the same as that in Embodiment 1. The difference is that the lens to be tested 7 is actually a reflector. In this case, only the second reflector 8 is used to form a reflected light path to measure the reflectivity of the lens to be tested 7.

[0078] It should be noted that the reflection performance of the lens 7 under test at different angles can still be measured using a method similar to that in Example 1, and the principle remains unchanged, so it will not be repeated here. Furthermore, no light will enter the first reflecting mirror 9 at this time, and therefore it will not participate in the measurement of the reflection performance of the lens under test.

[0079]

Example 3

[0080] This embodiment provides an optical lens measuring device, whose overall structure is roughly the same as that in Embodiment 1. The difference is that the lens to be tested 7 is actually a lens. In this case, only the first reflecting mirror 9 is used to form a transmission light path to measure the transmission performance of the lens to be tested 7.

[0081] It should be noted that no light will enter the second reflecting mirror 8 at this time, and therefore it will not participate in the measurement of the reflectivity of the lens under test. Furthermore, the lens under test 7 does not need to be rotated when measuring its transmission performance.

[0082]

Example 4

[0083] like Figure 6 As shown, this embodiment also provides an optical lens measurement method, which is applicable to the optical lens measurement device provided in Embodiments 1-3, and the method includes the following steps:

[0084] The incident path of the light source is constructed by sequentially arranging the light source 1, half-wave plate 2, polarizing beam splitter 3 and quarter-wave plate 6. The transmission measurement path is constructed by the first reflecting mirror 9, the lens under test 7, the quarter-wave plate 6 and polarizing beam splitter 3. The reflection measurement path is constructed by the second reflecting mirror 8, the lens under test 7, the quarter-wave plate 6 and polarizing beam splitter 3.

[0085] The lens under test 7 is positioned between the quarter-wave plate 6 and the first reflecting mirror 9, the second reflecting mirror 8 is positioned on the reflection path of the lens under test 7, and the transmittance and reflectance detection module 11 is positioned on the reflection path of the polarizing beam splitter 3.

[0086] Light source 1 is incident on the lens under test 7 through the light source incident path. The transmittance parameter of the lens under test 7 is measured through the transmission measurement path, and the reflectance parameter of the lens under test 7 is measured through the reflection measurement path. The first reflector 9 and the second reflector 8 are respectively detachably installed with beam blocking modules. The beam splitting parameter of the lens under test 7 is measured by installing and removing the beam blocking modules.

[0087] Furthermore, the optical lens measurement method also includes setting a third reflecting mirror 4 and a second beam splitter 5 on the reflection path of the polarizing beam splitter 3, setting a third reflecting mirror 4 on the reflection path of the polarizing beam splitter 3, and setting a spot position sensor 13 on the reflection path of the second beam splitter 5. The spot position sensor 13 is connected to the electronic control system of the first reflecting mirror 9 and the third reflecting mirror 4 respectively. The electronic control system adjusts the optical path of the first reflecting mirror 9 and the third reflecting mirror 4 according to the signal of the spot position sensor 13.

[0088] Specifically, when measuring the lens 7 to be measured, the light beam passing through the measurement path passes through the third reflecting mirror 4, and then a portion of the light is split off by the second beam splitter 5 and reflected to the spot position sensor 13. At this time, the electronic control system of the first reflecting mirror 9 and the third reflecting mirror 4 can adjust the optical path of the first reflecting mirror 9 and the third reflecting mirror 4 in real time according to the signal of the spot position sensor 13, thereby obtaining the optical path collimation calibration effect and improving the measurement accuracy.

[0089] Furthermore, the optical lens measurement method also includes setting a first beam splitter 10 on the reflection path of the third reflecting mirror 4, and setting a chirp detection module 12 and a transmittance / reflectance detection module 11 on the beam splitting path of the first beam splitter 10, respectively. Before loading the lens 7 to be tested, the chirp measurement values ​​of the transmission measurement path and the reflection measurement path are measured and recorded respectively. The chirp measurement values ​​are corrected according to the system chirp value to obtain the chirp output value.

[0090] It should be noted that before loading the lens 7 to be tested, when it is necessary to measure the chirp value of the reflection measurement path in the system, the first reflector 9 can be removed and the second reflector 8 can be installed in the position of the first reflector 9, so as to measure the chirp value of the reflection measurement path in the system.

[0091] Specifically, before the lens under test 7 is loaded, the chirp values ​​of the transmission measurement path and the reflection measurement path in the system are measured respectively. Then, the chirp detection results of the transmission measurement path and the reflection measurement path after the lens under test 7 is loaded are corrected according to the chirp value originally set in the system, thereby further improving the measurement accuracy.

[0092] Furthermore, during the test, the first rotating module rotates the lens 7 under test, and the second rotating module rotates the second reflecting mirror 8 according to the rotation angle of the lens 7 under test. This controls the light beam incident on the second reflecting mirror 8 to be perpendicular to the second reflecting mirror 8. The distance between the second reflecting mirror 8 and the lens 7 under test remains unchanged. The rotation angle of the second reflecting mirror 8 is twice the rotation angle of the lens 7 under test. The rotation axes of the first rotating module and the second rotating module are located on the vertical axis where the incident point of the laser on the lens 7 under test is located.

[0093] It should be noted that when the test lens 7 and the second reflector 8 are rotated according to the above-mentioned state and positional relationship, the second reflector 8 does not need to be adjusted in any further way. It will automatically rotate to the reflection position according to the rotation angle of the test lens 7.

[0094] Furthermore, after measuring the reflectivity of the lens 7 under test at the initial incident angle, the lens 7 under test is rotated by a preset angle to measure its reflectivity at different incident angles. The second reflecting mirror 8 rotates synchronously or sequentially by twice the preset angle according to the rotation angle of the lens 7 under test.

[0095] Specifically, the initial incident angle of the lens under test 7 and the second reflecting mirror 8 is 45°. During subsequent measurements, when the lens under test 7 is rotated clockwise or counterclockwise, the second reflecting mirror 8 will automatically rotate to the reflection position according to the rotation angle of the lens under test 7, so that the lens under test 7 can reach a measurement position range of 45°±30° to measure reflectivity parameters at other angles.

[0096] In practice, when the lens under test is a reflector or lens, only one of the first reflector 9 and the second reflector 8 is always in working condition, so there is no need to use a beam blocking module for control. When the lens under test 7 is a beam splitter, beam blocking modules are detachably installed on the first reflector 9 and the second reflector 8 respectively in order to better test its performance parameters.

[0097] When the lens under test 7 is a reflector, the laser emitted from the light source 1 passes sequentially through the half-wave plate 2, the polarizing beam splitter 3, and the quarter-wave plate 6 before entering the lens under test 7. After passing through the lens under test 7, the incident light is reflected to the second reflector 8, which then reflects the beam back to the lens under test 7. The reflected beam then passes sequentially through the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10. Finally, the first beam splitter 10 splits the beam into two beams, which then enter the transmittance and reflectance detection module 11 and the chirp detection module 12, respectively, for reflectance and chirp detection. Furthermore, the angle of the lens under test 7 is adjusted to allow for the measurement of reflectivity parameters at other angles.

[0098] When the lens under test 7 is a transmissive mirror, the laser emitted from the light source 1 passes sequentially through the half-wave plate 2, the polarizing beam splitter 3, and the quarter-wave plate 6 before entering the lens under test 7. After passing through the lens under test 7, the incident light is transmitted to the first reflecting mirror 9, which reflects the beam back to the lens under test 7. The reflected beam then passes sequentially through the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10. Finally, the first beam splitter 10 splits the beam into two beams for performance measurement. The two beams then enter the transmittance and reflectance detection module 11 and the chirp detection module 12, respectively, for transmittance and chirp detection.

[0099] When the lens under test 7 is a beam splitter, the laser emitted from the light source 1 passes through the half-wave plate 2, the polarizing beam splitter 3 and the quarter-wave plate 6 in sequence before entering the lens under test 7.

[0100] When it is necessary to test its reflectivity parameters, the beam blocking module on the first reflector 9 is closed to prevent the laser from passing through, while the beam blocking module on the second reflector 8 is opened to allow the laser to pass through. The incident light, after passing through the lens under test 7, is reflected to the second reflector 8, which then reflects the beam back to the lens under test 7. The reflected beam passes sequentially through the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10. Finally, the first beam splitter 10 splits the beam into two beams, which then enter the transmittance and reflectance detection module 11 and the chirp detection module 12, respectively, for reflectivity and chirp detection. Furthermore, the angle of the lens under test 7 is adjusted to allow for reflectivity parameter measurements at other angles.

[0101] When it is necessary to test its transmittance parameters, the beam blocking module on the first reflector 9 is opened to allow the laser to pass through, and the beam blocking module on the second reflector 8 is closed to prevent the laser from passing through. The incident light passes through the lens under test 7 and is transmitted to the first reflector 9. The first reflector 9 reflects the beam back to the lens under test 7. The reflected beam passes through the quarter-wave plate 6, the polarizing beam splitter 3, and the first beam splitter 10 in sequence. Finally, the first beam splitter 10 splits the beam into two beams for performance measurement. That is, the two beams enter the transmittance and reflectance detection module 11 and the chirp detection module 12 respectively for transmittance and chirp detection.

[0102] In summary, embodiments 1-4 of the present invention provide an optical lens measurement device and method. By constructing reflection and transmission measurement paths and setting a detachable beam-blocking module on the reflector, three measurements—transmittance, reflectance, and chirp—are achieved without the need for recalibration and adjustment, saving significant time and improving detection efficiency. Furthermore, the rotating module allows the lens under test and its corresponding reflector to rotate, enabling the measurement of different optical parameters based on different optical lenses and angles. This increases detection diversity, simplifies detection complexity, reduces manpower and material costs, and is beneficial for the sustainable development of enterprises.

[0103] The above description is merely a specific embodiment of this application, and the scope of protection of this application is not limited thereto. Those skilled in the art can make changes or substitutions within the technical scope disclosed in this application, and all such changes or substitutions should be within the scope of protection of this application.

[0104] Those skilled in the art will understand that although some embodiments described herein include certain features included in other embodiments but not others, combinations of features from different embodiments are meant to be within the scope of the invention and form different embodiments.

[0105] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. An optical lens measuring device, characterized in that, The application relates to a lens testing device, which comprises a light source (1), a half-wave plate (2), a polarization beam splitter (3), a 1 / 4 wave plate (6), a first mirror (9), a second mirror (8) and a transmittance and reflectance detection module (11), wherein a lens to be tested (7) is arranged between the 1 / 4 wave plate (6) and the first mirror (9), the second mirror (8) is arranged on a reflection path of the lens to be tested (7), the light source (1), the half-wave plate (2), the polarization beam splitter (3) and the 1 / 4 wave plate (6) are sequentially arranged to form a light source incidence path, the transmittance and reflectance detection module (11) is arranged on a reflection path of the polarization beam splitter (3), the second mirror (8), the lens to be tested (7), the 1 / 4 wave plate (6) and the polarization beam splitter (3) form a reflection measurement path, and the first mirror (9), the lens to be tested (7), the 1 / 4 wave plate (6) and the polarization beam splitter (3) form a transmission measurement path.

2. The optical lens measuring device according to claim 1, characterized in that, The device further comprises a third mirror (4), a light spot position sensor (13) and a second beam splitter (5), the third mirror (4) is arranged on a reflection path of the polarization beam splitter (3), the second beam splitter (5) is arranged on a reflection path of the third mirror (4), the light spot position sensor (13) is arranged on a reflection path of the second beam splitter (5), the transmittance and reflectance detection module (11) is arranged on a transmission path of the second beam splitter (5), the light spot position sensor (13) is connected to an electric control system of the first mirror (9) and the third mirror (4) respectively, and the electric control system is used for separately adjusting reflection angles of the first mirror (9) and the third mirror (4).

3. The optical lens measuring device according to claim 2, characterized in that, The device further comprises a first beam splitter (10) and a chirp detection module (12), the first beam splitter (10) is arranged on a reflection path of the third mirror (4), and the transmittance and reflectance detection module (11) and the chirp detection module (12) are arranged on beam splitting paths of the first beam splitter (10) respectively.

4. The optical lens measuring device according to claim 3, characterized in that, The first beam splitter (10) is a non-polarization beam splitter.

5. The optical lens measuring device according to claim 2, characterized in that, The first mirror (9) and the third mirror (4) are both superfast mirrors.

6. The optical lens measuring device according to claim 1, characterized in that, The device further comprises: A first rotating module for rotating the lens to be tested (7); A second rotating module for rotating the second mirror (8) according to a rotating angle of the lens to be tested (7); when rotating, a light beam incident to the second mirror (8) is perpendicular to the second mirror (8), a distance between the second mirror (8) and the lens to be tested (7) remains unchanged, and a rotating angle of the second mirror (8) is twice a rotating angle of the lens to be tested (7).

7. The optical lens measuring device according to claim 6, characterized in that, Positions of rotating shafts of the first rotating module and the second rotating module are on a vertical direction axis of an incident point of the laser incident to the lens to be tested (7).

8. The optical lens measuring device according to claim 6, characterized in that, The first rotating module and the second rotating module separately adopt a single control device or a combined transmission control device.

9. The optical lens measuring device according to claim 1, characterized in that, Beam blocking modules can be detachably arranged on the first mirror (9) and the second mirror (8).

10. A method of measuring an optical lens using the device for measuring an optical lens according to any one of claims 1 to 9, characterized in that, The method comprises: The light source (1), the half-wave plate (2), the polarization beam splitter (3) and the 1 / 4 wave plate (6) arranged in sequence to build a light source incident path, the first mirror (9), the measured lens (7), the 1 / 4 wave plate (6) and the polarization beam splitter (3) to build a transmission measurement path, the second mirror (8), the measured lens (7), the 1 / 4 wave plate (6) and the polarization beam splitter (3) to build a reflection measurement path; The measured lens (7) is arranged between the 1 / 4 wave plate (6) and the first mirror (9), the second mirror (8) is arranged on the reflection path of the measured lens (7), and the transmittance and reflectivity detection module (11) is arranged on the reflection path of the polarization beam splitter (3). The light source (1) is incident on the measured lens (7) through the light source incident path, the transmittance of the measured lens (7) is measured through the transmission measurement path, and the reflectivity of the measured lens (7) is measured through the reflection measurement path.

11. The method of measuring an optical lens according to claim 10, characterized in that, The optical lens measurement method further comprises: During detection, the measured lens (7) is rotated by the first rotating module, and the second mirror (8) is rotated according to the angle of rotation of the measured lens (7) by the second rotating module, the light beam incident on the second mirror (8) is controlled to be perpendicular to the second mirror (8), the distance between the second mirror (8) and the measured lens (7) remains unchanged, the rotation angle of the second mirror (8) is twice the rotation angle of the measured lens (7), and the rotation axes of the first rotating module and the second rotating module are located on the vertical direction axis of the incident point of the laser incident on the measured lens (7).

12. The method of measuring an optical lens according to claim 11, characterized in that, The optical lens measurement method further comprises: After measuring the reflectivity of the measured lens (7) at the initial incident angle, the measured lens (7) is rotated by a preset angle to measure the reflectivity at different incident angles, and the second mirror (8) is synchronously or sequentially rotated by twice the preset angle according to the rotation angle of the measured lens (7).

13. The method of measuring an optical lens according to claim 10, characterized in that, The optical lens measurement method further comprises: A third mirror (4) and a second beam splitter (5) are arranged on the reflection path of the polarization beam splitter (3), the third mirror (4) is arranged on the reflection path of the polarization beam splitter (3), a spot position sensor (13) is arranged on the reflection path of the second beam splitter (5), the spot position sensor (13) is connected to the electric control system of the first mirror (9) and the third mirror (4) respectively, and the electric control system adjusts the optical path of the first mirror (9) and the third mirror (4) according to the signal of the spot position sensor (13).

14. The method of measuring an optical lens according to claim 13, characterized in that, The optical lens measurement method further comprises: A first beam splitter (10) is arranged on the reflection path of the third mirror (4), and a chirp detection module (12) and the transmittance and reflectivity detection module (11) are arranged on the beam splitting path of the first beam splitter (10) respectively.

15. The method of measuring an optical lens according to claim 14, characterized in that, The optical lens measurement method further comprises: Before loading the lens (7) to be measured, the chirp measurement values of the transmission measurement path and the reflection measurement path are measured and recorded respectively, and the chirp output values are obtained after the chirp measurement values are corrected according to the system chirp values respectively.

Citation Information

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