A cleaning method of a vacuum coating cavity and a vacuum coating device
By setting a cleaning channel on the partition of the vacuum coating chamber, the gaps are cleaned using cleaning agents and gas flow, which solves the problem of gap cleaning and improves the convenience of production quality and sealing test.
Patent Information
- Application Number
- CN202310863926.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-07-13
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2043-07-13
AI Technical Summary
In vacuum coating chambers, it is difficult to thoroughly clean the gaps, which affects production quality and sealing performance testing.
By setting up cleaning channels inside the partition, cleaning agents and gases are used to clean the gaps. The cleaning inlet and outlet are designed on different surfaces of the partition, and the cleaning of the gaps is achieved by using pressure and gas flow.
It effectively cleans oil stains from crevices, improving the ease of production quality and sealing inspection.
Smart Images
Figure CN116871269B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of coating equipment, in particular to a cleaning method of a vacuum coating cavity and a vacuum coating equipment. BACKGROUND
[0002] Due to the narrow gap, it is difficult to operate, and the cleaning of the gap has always been a difficult problem for workers in the cleaning field. In the vacuum coating industry, a partition plate with an air isolation function is arranged in the coating cavity. The partition plate divides the coating cavity into multiple sub-chambers. In order to facilitate the discovery of whether the partition plate leaks and the location of the partition plate leakage, the partition plate is usually sealed on one side and not sealed on the other side. Since one side is not sealed, a gap is formed between the contact end face of the partition plate and the coating cavity. The gap may have stains that cannot be cleaned, thereby affecting the production quality. SUMMARY
[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a cleaning method of a vacuum coating cavity, which introduces cleaning liquid into the gap through the cleaning channel inside the partition plate, thereby cleaning the oil stains in the gap. The method is easy to operate and has good cleaning effect on the oil stains in the gap.
[0004] The present application also provides a vacuum coating equipment.
[0005] The cleaning method of the vacuum coating cavity according to the first aspect of the present application is used for cleaning a vacuum coating equipment, wherein the vacuum coating equipment comprises a box body and a partition plate connected to each other, the box body has a coating cavity inside, the partition plate is arranged in the coating cavity and divides the coating cavity into two sub-chambers, the outer surface of the partition plate comprises a first face and a second face arranged opposite to each other, the first face and the second face respectively face different sub-chambers, the edge of the first face is sealed to the bottom wall of the coating cavity, the gap is arranged between the bottom end edge of the second face and the bottom wall of the coating cavity, and the partition plate further comprises a plurality of cleaning channels, the cleaning channels comprise a cleaning inlet and a cleaning outlet, the cleaning inlet is arranged on the second face of the partition plate, and the cleaning outlet is located on the end face of the partition plate and communicates with the gap; the cleaning method comprises the following steps: spraying a cleaning agent from the cleaning inlet into the cleaning channel, and spraying the cleaning agent from the gap.
[0006] The cleaning method of the vacuum coating cavity according to the first aspect of the present application has at least the following beneficial effects: the present application sets the cleaning outlet on the section of the partition plate, and cleans the gap formed by the end face of the partition plate and the inner wall of the coating cavity through the cleaning inlet, so that the oil stains are more convenient to clean and more easily cleaned.
[0007] For example, in the process of manufacturing the coating chamber, the oil stains will be attached to the gap between the end face of the partition plate and the inner wall of the coating chamber during the cutting and polishing process. The oil stains cannot be cleaned from the outside. The cleaning agent is injected into the cleaning inlet through the cleaning channel, and the oil stains are discharged from the gap between the end face of the partition plate and the inner wall of the coating chamber together with the cleaning agent, so that the gap between the end face of the partition plate and the inner wall of the coating chamber is cleaned.
[0008] Compared with the prior art, the gap between the end face of the partition plate and the inner wall of the coating chamber is relatively small, so that a larger pressure is required when the cleaning agent is injected into the cleaning inlet to the cleaning outlet, and the greater the pressure, the greater the impact force on the oil stains, so that the oil stains are more easily and conveniently washed.
[0009] According to some embodiments of the present application, the cleaning agent is driven by gas into the cleaning channel.
[0010] According to some embodiments of the present application, the cleaning agent is an organic solvent.
[0011] According to some embodiments of the present application, the cleaning agent includes at least one of alcohol, acetone, kerosene, gasoline, and hydrocarbon solvent.
[0012] According to some embodiments of the present application, the method further comprises the following steps: before the cleaning agent is sprayed into the cleaning channel from the cleaning inlet, a hose is inserted into the cleaning inlet; and the cleaning agent enters the cleaning channel through the hose.
[0013] According to some embodiments of the present application, the method further comprises the following steps: stopping the injection of the cleaning agent into the cleaning channel, and then injecting gas into the cleaning channel from the cleaning inlet, so that the gas sprays the remaining cleaning agent out of the gap.
[0014] The vacuum coating device according to the second aspect of the embodiments of the present application comprises: a box body having a coating chamber inside; a partition plate connected with the box body, the partition plate being arranged in the coating chamber and dividing the coating chamber into two sub-chambers, the partition plate comprising a first face and a second face arranged opposite to each other, the first face and the second face respectively facing different sub-chambers, an edge of the first face being in sealing connection with a bottom wall of the coating chamber, a bottom end edge of the second face being provided with a gap with the bottom wall of the coating chamber, and the partition plate further comprising a plurality of cleaning channels for the flow of a cleaning agent, the cleaning channels comprising a cleaning inlet and a cleaning outlet, the cleaning inlet being arranged on the second face of the partition plate, and the cleaning outlet being located on the end face of the partition plate and being in communication with the gap.
[0015] According to some embodiments of the present application, the interval between two adjacent cleaning outlets is not greater than 1000mm and not less than 300mm.
[0016] According to some embodiments of the present application, the first face is welded with the box body and forms a first weld, and the first weld covers the bottom end edge of the first face.
[0017] The second face is welded with the bottom wall and forms a plurality of second welds arranged at intervals, and the portion of the bottom end edge of the second face not covered by the second welds forms the gap with the bottom wall.
[0018] According to some embodiments of the present application, the length of the cleaning outlet is 500mm, and a groove is formed on the cleaning outlet.
[0019] The vacuum coating device according to the second aspect of the embodiments of the present application has at least the following beneficial effects: the cleaning channel facilitates cleaning of the dirt in the gap.
[0020] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be understood through practice of the present application. BRIEF DESCRIPTION OF DRAWINGS
[0021] The present application will be further described below in conjunction with the drawings and embodiments, wherein:
[0022] Figure 1 It is a schematic diagram of the internal connection of the cavity of the vacuum coating device in one embodiment of the present application;
[0023] Figure 2 It is a schematic diagram of the bottom of the partition plate in Figure 1
[0024] Figure 3 It is a schematic diagram of the connection relationship between the partition plate and the box body in one embodiment of the present application;
[0025] Figure 4 It is a schematic diagram of the end face of the partition plate in another embodiment of the present application;
[0026] Figure 5 It is a schematic diagram of the relative position between the partition plate and the first weld and the second weld in some embodiments of the present application;
[0027] Figure 6 It is a schematic diagram of the cross section of the partition plate and the bottom plate shown in Figure 1
[0028] Reference signs:
[0029] 1, box; 11, first cavity; 12, second cavity; 13, bottom wall; 2, partition; 21, end face; 22, second face; 23, first face; 3, cleaning channel; 31, cleaning inlet; 32, cleaning outlet; 33, groove; 41, first weld; 42, second weld; 5, gap; 6, gap. DETAILED DESCRIPTION
[0030] Embodiments of the present application are described in detail below with reference to examples illustrated in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements throughout. The embodiments described below by reference to the drawings are exemplary only, and are for the purpose of explanation of the present application, and are not to be understood as a limitation of the present application.
[0031] In the description of the present application, it is to be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and is not to indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.
[0032] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, within, etc. are understood as including the number. If it is described as first, second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of technical features indicated.
[0033] In the description of the present application, unless otherwise explicitly limited, the words such as setting, mounting, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.
[0034] When processing in a vacuum coating cavity, some cutting fluid, lubricating oil and other oil substances will be used. Such oil stains are not easy to clean, especially in the gap 5 of the weld, the residual oil substances volatilize slowly in the vacuum coating, which seriously affects the purity of the vacuum degree, and has a great influence on the coating quality and pumping efficiency.
[0035] To facilitate the introduction of the cleaning method of the present application, the vacuum coating equipment suitable for the cleaning method will be introduced first. The embodiments of the cleaning method of the present application are as follows Figure 1 、 Figure 3 and Figure 4As shown, the vacuum coating device comprises a box 1 and a partition 2 connected with each other, the box 1 has a coating chamber in the interior thereof, the coating chamber is used for carrying out vacuum coating, the partition 2 is arranged in the coating chamber and separates the coating chamber into two sub-chambers. The two sub-chambers are a first chamber and a second chamber, the two sub-chambers are independent chambers respectively, the outer surface of the partition 2 comprises a first surface 23 and a second surface 22 arranged opposite to each other, the first surface 23 and the second surface 22 respectively face different sub-chambers, the first surface 23 faces the first chamber 11, and the second surface 22 faces the second chamber 12. The edge of the first surface 23 is sealingly connected with the bottom wall 13 of the coating chamber, the sealing connection is formed by a first weld 41, and a gap 5 is formed between the end surface 21 of the partition 2 in contact with the box 1, so that a gap 6 is arranged between the bottom end edge of the second surface 22 and the bottom wall 13 of the coating chamber, the gap 6 is formed by the gap 5 at the discontinuous position of the discontinuous second weld 42, so that the gap 6 can communicate the gap 5 and the second chamber 12, and a plurality of cleaning channels 3 are further arranged in the interior of the partition 2, the cleaning channels 3 comprise a cleaning inlet 31 and a cleaning outlet 32, the cleaning inlet 31 is arranged on the second surface 22 of the partition 2, and the cleaning outlet 32 is located on the end surface 21 of the partition 2 and communicates with the gap 6.
[0036] The cleaning method of the present application comprises the following steps: spraying the cleaning agent from the cleaning inlet 31 into the cleaning channel 3, and spraying the cleaning agent from the gap 6. The flow path of the cleaning agent can be referred to Figure 6 where the flow path is marked.
[0037] The partition plate 2 is arranged to seal two chambers in the coating chamber, and the partition plate 2 is sealed on one side and not sealed on the other side, so that the air in the gap 5 between the partition plate 2 and the box 1 can affect the detection of the sealing performance. For example, when the chamber is vacuumized, the air in the gap 5 can slowly penetrate into the chamber and cause false leakage, and it is difficult to detect the leakage point when the other side of the gap is sealed. Therefore, the partition plate 2 is sealed on one side and the other side is connected with a gap 6. The air in the gap can be directly extracted to avoid leakage when vacuumizing, and the other chamber can be easily pressurized when leakage occurs on one side, so that the leakage point can be easily found. The gap 5 is formed between the partition plate and the bottom wall, and one side of the gap is sealed and the other side has a channel connected to the gap and the chamber. Therefore, various oil stains are generated in the gap 5 between the box 1 and the partition plate 2 through the gap 6. In order to clean the oil stains in the gap 5, a cleaning channel 3 is arranged on the partition plate 2. The cleaning inlet 31 of the cleaning channel 3 is arranged on the second surface 22, and the cleaning outlet 32 of the cleaning channel 3 is arranged on the end surface 21 of the partition plate 2 in contact with the box 1 and can be connected to the gap 6 through the gap 5. Therefore, by injecting a cleaning agent into the cleaning channel 3, the cleaning agent enters the gap 5 between the partition plate 2 and the box 1 through the cleaning channel 3, and flows into the second chamber 12 from the gap 6 connected to the gap 5. The cleaning agent can flush the oil stains in the gap 5 during the flow process.
[0038] According to some embodiments of the present application, as shown in Figure 2 、 Figure 5 and Figure 6 , the partition plate 2 is provided with a groove 33, and the groove 33 is part of the cleaning channel 3, and the bottom opening of the groove 33 is the cleaning outlet 32. By arranging the groove 33 on the partition plate 2, a cavity can be formed in the gap 5 between the partition plate 2 and the box 1. Since the gap 5 between the partition plate 2 and the box 1 is small, the resistance to the cleaning agent flowing into the gap 5 is larger, and the cavity formed by the groove 33 can form a larger pressure in the gap 5. At the same time, the channel for the cleaning agent to enter the gap 5 is increased, that is, the cleaning agent can enter the gap 5 around the groove 33, and the larger the groove 33, the larger the channel for the cleaning agent to enter the gap 5. Moreover, by arranging the groove 33, the depth of the gap 5 can be reduced, so that the oil stains in the gap 5 can be more easily cleaned.
[0039] According to some embodiments of the present application, the cleaning agent is an organic solvent, which can better dissolve and clean the oil stains, and has a certain volatility to be volatilized after cleaning the oil stains, so that the cleaning agent does not continue to pollute the gap 5 after cleaning the oil stains. The air is sprayed at the same time as the cleaning agent or after the cleaning agent, which can first form a pressure in the cleaning channel 3 or the groove 33, so that the cleaning agent is easier to enter the gap 5 to clean the oil stains, and the air can also blow out or help the cleaning agent to volatilize after cleaning. At the same time, the ratio of the gas and the cleaning agent is adjusted during the cleaning process to better achieve the cleaning effect.
[0040] According to some embodiments of the present application, the cleaning agent includes at least one of alcohol, acetone, kerosene, gasoline, and hydrocarbon solvent. Such cleaning agents have good flowability and are easier to enter the gap 5, can easily obtain a larger flow rate, and thus can quickly dissolve and clean the oil stains. The hydrocarbon solvent not only has this advantage but also is not flammable and is more secure.
[0041] According to some embodiments of the present application, the method further includes the following steps: inserting a hose into the cleaning inlet 31 before spraying the cleaning agent from the cleaning inlet 31 into the cleaning channel 3; and the cleaning agent enters the cleaning channel 3 through the hose. When cleaning, the cleaning agent enters the cleaning channel 3 and the gap 5, and a large pressure needs to be applied to the cleaning agent. If the cleaning inlet 31 is directly pressurized, liquid leakage is easy to occur, so that only a small amount of cleaning agent can enter the gap 5 through the cleaning channel 3 to clean the oil stains. After the hose is inserted into the cleaning inlet 31, the hose can be pressurized more conveniently through the connection of the hose, so that more cleaning agent under pressure enters the gap 5 through the cleaning channel 3 to clean the oil stains.
[0042] According to some embodiments of the present application, the method further includes the following steps: spraying a gas from the cleaning inlet 31 into the cleaning channel 3, so that the gas sprays the residual cleaning agent from the gap 6. After the cleaning agent cleans the oil stains, the gas is continuously sprayed into the channel to quickly clean the residual cleaning agent. The gas is preferably an inert gas, which can protect the baffle 2 from being oxidized and damaged.
[0043] The first cavity 11 is formed by the sealing connection of the partition plate 2 and the first face 23 of the box 1, and the second cavity 12 is formed by the sealing connection of the partition plate 2 and the first face 23 of the box 1, and the cleaning outlet 32 and the cleaning inlet 31 are arranged in the second cavity 12, and the sealing between the first cavity 11 and the second cavity 12 is not affected. The sealing connection between the edge of the first face 23 and the bottom wall 13 of the coating chamber is preferably sealing welding. The gap 6 between the bottom edge of the second face 22 and the bottom wall 13 of the coating chamber is preferably formed by intermittent welding, and the gap 6 is formed at the intermittent welding position.
[0044] According to some embodiments of the present application, as shown in Figure 5 As shown in the figure, the cleaning outlet 32 is provided with a groove 33, and the interval L1 between two adjacent grooves 33 is not greater than 1000 mm and not less than 300 mm. By arranging the groove 33, a cavity is formed at the end face 21, so that the cleaning agent is pressurized in the cavity; at the same time, the channel of the cleaning agent entering the gap 5 through the cleaning outlet 32 is expanded, so that the flow of the cleaning agent is increased; and the contact area between the end face 21 and the bottom wall 13 is reduced by arranging the groove 33, so that the depth of the gap 5 is reduced. The interval of the grooves 33 should not be too large or too small. When the interval of the grooves 33 is too small, the structural strength of the partition plate 2 may be affected, which may cause the structural strength to fail. When the interval of the grooves 33 is too large, the depth of the gap 5 between the grooves 33 is too deep, which increases the difficulty of cleaning.
[0045] According to some embodiments of the present application, the first face 23 is welded with the box 1 to form a first welding seam 41 covering the bottom edge of the first face 23; and the second face 22 is welded with the bottom wall 13 to form a plurality of second welding seams 42 arranged at intervals, and the part of the bottom edge of the second face 22 not covered by the second welding seam 42 is arranged with the gap 6 between the bottom wall 13. The welding of the first welding seam 41 ensures the sealing of the first cavity 11 and the second cavity 12, and the welding of the second welding seam 42 not only enhances the structural strength, but also arranges the gap 6 formed at the intermittent position of the welding seam at the interval of the grooves 33, which can further control the flow direction of the cleaning agent, so that the cleaning agent cannot flow out from one side of the groove 33, and the oil stains in the deeper part of the gap 5 cannot be cleaned.
[0046] According to some embodiments of the present application, as shown in Figure 5As shown, the length of the groove 33 is 500 mm. The length L2 of the groove 33 should not be too long or too short. If the length of the groove 33 is too long, the strength of the structure of the partition plate 2 will be affected, which may result in failure of the structural strength. If the length of the groove 33 is too short, the depth of the gap 5 between the grooves 33 will be too deep, which increases the difficulty of cleaning. Meanwhile, the wall thickness L3 of the groove 33 is preferably one third of the thickness of the partition plate 2, so as to ensure the connecting strength between the partition plate 2 and the box 1 while reducing the depth of the gap 5.
[0047] In the description of the application, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
Claims
1. A vacuum coating apparatus, characterized by, The utility model relates to a vacuum coating equipment, comprising: a box body having a coating chamber inside; a partition plate connected with the box body, the partition plate is arranged in the coating chamber and divides the coating chamber into two sub-chambers, the partition plate comprises a first face and a second face arranged opposite to each other, the first face and the second face are respectively directed to different sub-chambers, the edge of the first face is sealingly connected with the bottom wall of the coating chamber, a gap is arranged between the bottom end edge of the second face and the bottom wall of the coating chamber, a gap is formed between the partition plate and the bottom wall, a plurality of cleaning channels for the flow of cleaning agent are further arranged in the partition plate, the cleaning channels comprise a cleaning inlet and a cleaning outlet, the cleaning inlet is arranged on the second face of the partition plate, the cleaning outlet is located on the end face of the partition plate and communicates with the gap, the partition plate is provided with a groove, the groove serves as part of the cleaning channel, the bottom opening of the groove is the cleaning outlet, and the cleaning outlet communicates with the gap through the gap.
2. The vacuum coating apparatus according to claim 1, wherein The interval between two adjacent cleaning outlets is not greater than 1000mm and not less than 300mm.
3. The vacuum coating apparatus according to claim 1, wherein The first face is welded with the box body and forms a first weld, and the first weld covers the bottom end edge of the first face; The second face is welded with the bottom wall and forms a plurality of second welds arranged at intervals, and the gap is formed between the part of the bottom end edge of the second face which is not covered by the second welds and the bottom wall.
4. The vacuum coating apparatus according to claim 3, wherein The length of the cleaning outlet is 500mm.
5. A method of cleaning a vacuum coating chamber, characterized in that A cleaning method for the vacuum coating equipment according to any one of claims 1 to 4, the cleaning method comprising the following steps: spraying a cleaning agent from the cleaning inlet into the cleaning channel, and spraying the cleaning agent out of the gap.
6. The method of claim 5, wherein the cleaning gas is introduced into the vacuum chamber through a plurality of gas injection ports. The cleaning agent is carried into the cleaning channel by gas.
7. The method of claim 5, wherein the cleaning gas is introduced into the vacuum chamber through a plurality of gas injection holes formed in a gas injection plate. The cleaning agent is an organic solvent.
8. The method of claim 7, wherein the cleaning gas is introduced into the vacuum chamber through a plurality of gas injection ports. The cleaning agent comprises at least one of alcohol, acetone, kerosene and gasoline.
9. The method of claim 7, wherein the cleaning gas is introduced into the vacuum chamber through a plurality of gas injection holes formed in a gas injection plate. The cleaning agent is a hydrocarbon solvent.
10. The method of claim 5, wherein the cleaning is performed by a vacuum coating chamber. Further comprising the following steps: Before spraying the cleaning agent from the cleaning inlet into the cleaning channel, a hose is inserted on the cleaning inlet; The cleaning agent enters the cleaning channel through the hose.
11. The method of claim 5 to 10, wherein, Further comprising the following steps: After stopping spraying the cleaning agent into the cleaning channel, gas is sprayed from the cleaning inlet into the cleaning channel, so that the gas sprays the residual cleaning agent out of the gap.
Citation Information
Patent Citations
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