A method and a device for controlling a production process in a reduction furnace

Abstract

The application discloses a control method and a control device for a reduction furnace production process. The control method comprises the following steps: obtaining an atomization cumulative value and a six-phase current value of the reduction furnace; obtaining a TCS real-time flow, a hydrogen real-time flow and a real-time current of the reduction furnace; judging whether the reduction furnace has an abnormal state according to the atomization cumulative value and the six-phase current value; and controlling the reduction furnace according to the judgment result of the abnormal state and the TCS real-time flow, the hydrogen real-time flow and the real-time current. The method can realize accurate control of the TCS flow, the hydrogen flow and the current in the production process of the reduction furnace, and can unify product standards and improve product quality by judging whether the reduction furnace has an abnormal state and timely correcting the TCS real-time flow, the hydrogen real-time flow and the real-time current according to the abnormal state.

Description

Technical Field

[0001] This invention specifically relates to a control method and control device for a reduction furnace production process. Background Technology

[0002] With the increasing maturity of new information technologies such as edge computing, big data, AIoT, and virtualization, the process industry is building high-level intelligent factories around the goals of "improving quality, reducing costs, increasing efficiency, and controlling risks." Currently, the following problems are commonly found in the production process control of complex process industries: control parameter setting relies on manual decision-making, and the control process cannot achieve full automation; the production mode is dominated by human experience, and a systematic intelligent control strategy has not been formed; existing control systems cannot meet the needs of quality management and process optimization; and the overall control effect is difficult to achieve.

[0003] As a core device in the polysilicon industry, the reduction furnace's production process is characterized by multiple variables, strong coupling, large time lag, high energy consumption, time-varying processes, and complex mechanisms. The inability to digitize some key reactions within the furnace in real time, and the inability to establish mathematical models using traditional modeling methods, has long been a persistent pain point in the industry, directly impacting the overall profitability of enterprises.

[0004] Currently, the industry still mainly relies on DCS control. Operators issue material parameters on a regular basis according to experience-based material lists, observe the original furnace conditions in real time, and adjust the proportion of materials fed into the furnace based on experience. This leads to problems such as inaccurate adjustment of parameters such as TCS (trichlorosilane) flow rate, hydrogen flow rate, and current magnitude in the reduction furnace, as well as inconsistent adjustment standards, resulting in inconsistent product quality. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to address the above-mentioned deficiencies in the prior art by providing a control method and control device for the production process of a reduction furnace, which can achieve precise control of TCS flow rate, hydrogen flow rate and current during the production process of the reduction furnace, thereby unifying product standards and improving product quality.

[0006] According to an embodiment of a first aspect of the present invention, a method for controlling a reduction furnace production process is provided, comprising:

[0007] S1: Obtain the cumulative atomization value and six-phase current value of the reduction furnace.

[0008] S2: Obtain the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace.

[0009] S3: Determine whether the reduction furnace is in an abnormal state based on the atomization cumulative value and the six-phase current value.

[0010] S4: Control the reduction furnace based on the abnormal state determination result, the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current.

[0011] Preferably, step S2 specifically includes: S21: acquiring the feed meter setting data and real-time voltage of the reduction furnace; S22: acquiring the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace based on the feed meter setting data and real-time voltage; wherein, the feed meter setting values ​​include the golden voltage curve, the current setting value, the TCS setting flow rate, and the hydrogen setting flow rate. Step S22 specifically includes: S221: obtaining the real-time TCS flow rate of the reduction furnace based on the TCS setting flow rate; S222: obtaining the real-time hydrogen flow rate of the reduction furnace based on the real-time voltage, the golden voltage curve, and the hydrogen setting flow rate; S223: obtaining the real-time current in the reduction furnace based on the current setting value, the hydrogen real-time flow rate, and the hydrogen setting flow rate.

[0012] Preferably, step S222: obtaining the real-time hydrogen flow rate of the reduction furnace based on the real-time voltage, the gold voltage curve, and the hydrogen set flow rate specifically includes: decomposing the gold voltage curve into multiple standard periods to obtain the voltage set value corresponding to each standard period; and obtaining the real-time hydrogen flow rate of the reduction furnace within each standard period based on the real-time voltage, the voltage set value, and the hydrogen set flow rate.

[0013] Preferably, obtaining the real-time hydrogen flow rate of the reduction furnace within each standard cycle based on the real-time voltage, the voltage setpoint, and the hydrogen set flow rate specifically includes: In the initial standard cycle, supplying hydrogen to the reduction furnace according to the hydrogen set flow rate to obtain the real-time hydrogen flow rate within the initial standard cycle; subsequently, in each standard cycle, acquiring the actual voltage in the reduction furnace within the current standard cycle and calculating the difference A between the actual voltage and the voltage setpoint; controlling the real-time hydrogen flow rate of the reduction furnace based on the difference A: if the difference between the actual voltage and the voltage setpoint... If the difference A > 0, the hydrogen flow rate in the reduction furnace is reduced until the actual voltage equals the voltage set value, thereby obtaining the real-time hydrogen flow rate in the current standard cycle; if the difference A between the actual voltage and the voltage set value is 0, the hydrogen flow rate in the reduction furnace is kept constant, thereby obtaining the real-time hydrogen flow rate in the current standard cycle; if the difference A between the actual voltage and the voltage set value is < 0, the hydrogen flow rate in the reduction furnace is increased until the actual voltage equals the voltage set value, thereby obtaining the real-time hydrogen flow rate in the current standard cycle; this cycle is repeated until the control process ends.

[0014] Preferably, step S223, obtaining the real-time current in the reduction furnace based on the current setpoint, the real-time hydrogen flow rate, and the set hydrogen flow rate, includes: providing current to the reduction furnace according to the current setpoint during the first three standard cycles to obtain the real-time current during the first three standard cycles; adjusting the current setpoint once every three standard cycles thereafter according to the real-time hydrogen flow rate and the set hydrogen flow rate to obtain the current real-time current; repeating this cycle until the control process ends.

[0015] Preferably, every three standard cycles thereafter, the current setting value is adjusted once based on the real-time hydrogen flow rate and the set hydrogen flow rate to obtain the current real-time current. Specifically, this includes: comparing the real-time hydrogen flow rate and the set hydrogen flow rate; if the real-time hydrogen flow rate is greater than the set hydrogen flow rate, then the current setting value is subtracted from the first current adjustment value to obtain the current real-time current; if the real-time hydrogen flow rate is less than or equal to the set hydrogen flow rate, then the difference between the real-time hydrogen flow rate and the set hydrogen flow rate is calculated, and a hydrogen difference threshold for the reduction furnace is obtained; if the value of the difference is less than or equal to the difference threshold, then the current setting value of the previous cycle is maintained to obtain the current real-time current; if the value of the difference is greater than the difference threshold, then the current setting value is increased by the second current adjustment value to obtain the current real-time current.

[0016] Preferably, step S3: determining whether the reduction furnace is in an abnormal state based on the cumulative atomization value and the six-phase current value, specifically includes the following steps: determining the atomization state in the reduction furnace based on the cumulative atomization value, wherein the atomization state includes clear atomization, stable atomization, light atomization, moderate atomization, and heavy atomization; determining whether there is a phase loss state in the reduction furnace based on the six-phase current value; determining whether the reduction furnace is in an abnormal state based on the atomization state and the phase loss state: if the reduction furnace is in a stable atomization state and there is no phase loss state, then it is determined that the reduction furnace is not in an abnormal state; otherwise, it is determined that the reduction furnace is in an abnormal state.

[0017] Preferably, determining the atomization state of the reduction furnace based on the cumulative atomization value specifically includes: obtaining a first atomization threshold, a second atomization threshold, a third atomization threshold, and a fourth atomization threshold of the reduction furnace, wherein the first atomization threshold, the second atomization threshold, the third atomization threshold, and the fourth atomization threshold increase sequentially; comparing the atomization threshold with the cumulative atomization value: if the cumulative atomization value is less than or equal to the first atomization threshold, the reduction furnace is determined to be in a clear atomization state; if the cumulative atomization value is greater than the first atomization threshold and less than the second atomization threshold, the reduction furnace is determined to be in a stable atomization state; if the cumulative atomization value is greater than or equal to the second atomization threshold and less than the third atomization threshold, the reduction furnace is determined to be in a light atomization state; if the cumulative atomization value is greater than or equal to the third atomization threshold and less than the fourth atomization threshold, the reduction furnace is determined to be in a moderate atomization state; if the cumulative atomization value is greater than or equal to the fourth atomization threshold, the reduction furnace is determined to be in a heavy atomization state.

[0018] Preferably, determining whether there is a phase loss state in the reduction furnace based on the six-phase current values ​​specifically includes: the six-phase current values ​​include the current values ​​of phases A1, B1, C1, A2, B2, and C2; if all six phase current values ​​are not 0, it is determined that there is no phase loss state in the reduction furnace; if the current of phases A2 and / or C2 is 0, it is determined that there is a phase loss state in the reduction furnace, and it is in a state of missing 4 pairs of rods; if the current of phases A1, B1, C1, and / or B2 is 0, it is determined that there is a phase loss state in the reduction furnace, and it is in a state of missing 8 pairs of rods.

[0019] Preferably, step S4: controlling the reduction furnace based on the abnormal state determination result and the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current, specifically includes: if it is determined that the reduction furnace does not have an abnormal state, then controlling the reduction furnace based on the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current; if it is determined that the reduction furnace has an abnormal state, then correcting the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current according to the type of abnormal state of the reduction furnace, to obtain corrected real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current; and controlling the reduction furnace based on the corrected real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current.

[0020] Preferably, the types of abnormal states include: atomization abnormal state and phase loss state; the step of correcting the real-time flow rate of TCS, real-time flow rate of hydrogen, and real-time current according to the type of abnormal state of the reduction furnace specifically includes the following steps: if the reduction furnace is in atomization abnormal state, then atomization correction is performed on the reduction furnace; if the reduction furnace is in phase loss state, then phase loss correction is performed on the reduction furnace.

[0021] Preferably, the atomization abnormality state is one of the following: clear atomization state, light atomization state, medium atomization state, and heavy atomization state of the reduction furnace. If the reduction furnace is in an atomization abnormality state, atomization correction is performed on the reduction furnace, specifically including: if the reduction furnace is in a clear atomization state: the real-time TCS flow rate remains unchanged to obtain the atomization-corrected real-time TCS flow rate; the current voltage setting value is reduced by a first voltage correction value to obtain the atomization-corrected voltage setting value; based on the real-time voltage, the atomization-corrected voltage setting value, and the hydrogen setting flow rate, step S222 is executed to obtain the atomization-corrected real-time hydrogen flow rate. Based on the current setting value, the atomization-corrected real-time hydrogen flow rate, and the hydrogen setting flow rate, execute step S223 to obtain the atomization-corrected real-time current; this atomization correction ends; if the reduction furnace is in a light atomization state: the TCS real-time flow rate remains unchanged, and the atomization-corrected TCS real-time flow rate is obtained; the current voltage setting value is increased by a second voltage correction value to obtain the atomization-corrected voltage setting value; based on the real-time voltage, the atomization-corrected voltage setting value, and the hydrogen setting flow rate, execute step S222 to obtain the atomization-corrected real-time hydrogen flow rate; based on the current setting value, the atomization-corrected hydrogen setting flow rate, and the hydrogen setting flow rate, execute step S222 to obtain the atomization-corrected real-time hydrogen flow rate; based on the current setting value, the atomization-corrected real-time hydrogen flow rate, and the hydrogen setting flow rate, execute step S223 to obtain the atomization-corrected real-time current; based on the current setting value, the atomization-corrected real-time current, and the hydrogen setting flow rate, execute step S222 to obtain the atomization-corrected real-time hydrogen flow rate; based on the current setting value, the atomization-corrected real-time current, and the hydrogen setting flow rate, execute step S223 to obtain the atomization-corrected real-time current ...2 to obtain the atomization-corrected real-time hydrogen flow rate; based on the current setting value, the atomization-corrected real-time current, and the hydrogen setting flow rate, execute step S223 to obtain the atomization-corrected real-time current; based on the current setting value, the atom Based on the real-time flow rate of the gas and the set hydrogen flow rate, execute step S223 to obtain the real-time current after atomization correction; this atomization correction ends; if the reduction furnace is in a medium atomization state: decrease the real-time TCS flow rate by a first flow correction value to obtain the atomization-corrected real-time TCS flow rate; increase the current voltage setting value by a third voltage correction value to obtain the atomization-corrected voltage setting value; based on the real-time voltage, the atomization-corrected voltage setting value, and the set hydrogen flow rate, execute step S222 to obtain the atomization-corrected real-time hydrogen flow rate; based on the current setting value, the atomization-corrected real-time hydrogen flow rate, and the set hydrogen flow rate... If the reduction furnace is in a state of heavy atomization: decrease the real-time TCS flow rate by a second flow rate correction value to obtain the atomized real-time TCS flow rate; increase the current voltage setting value by a fourth voltage correction value to obtain the atomized voltage setting value; according to the real-time voltage, the atomized voltage setting value, and the hydrogen setting flow rate, execute step S222 to obtain the atomized real-time hydrogen flow rate; stop executing step S223, and keep the real-time current unchanged to obtain the atomized real-time current; the atomization correction ends.

[0022] Preferably, the phase loss state is that the reduction furnace is in a state of missing 4 pairs of rods or missing 8 pairs of rods. If the reduction furnace is in a phase loss state, phase loss correction is performed on the reduction furnace, specifically including the following steps: If the phase loss state in the reduction furnace is determined to be missing 4 pairs of rods: reduce the real-time flow rate of the TCS by a third flow correction value to obtain the phase loss corrected real-time flow rate of the TCS; reduce the real-time flow rate of the hydrogen according to the third flow correction value to obtain the phase loss corrected real-time flow rate of the hydrogen; and increase the real-time current by a first regulating current value to obtain the phase loss corrected real-time current; the phase loss correction ends. If the phase loss state in the reduction furnace is determined to be missing 8 pairs of rods: reduce the real-time flow rate of the TCS by a fourth flow correction value to obtain the phase loss corrected real-time flow rate of the TCS; reduce the real-time flow rate of the hydrogen according to the fourth flow correction value to obtain the phase loss corrected real-time flow rate of the hydrogen; and increase the real-time current by a second regulating current value to obtain the phase loss corrected real-time current; the phase loss correction ends.

[0023] According to a second aspect of the present invention, a control device for a reduction furnace production process is provided, comprising a data acquisition module, a processing module, a judgment module, and a control module. The data acquisition module is used to acquire the cumulative atomization value and six-phase current value of the reduction furnace; the processing module is used to acquire the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace; the judgment module, connected to the data acquisition module, is used to determine whether the reduction furnace has an abnormal state based on the cumulative atomization value and the six-phase current value; the control module, connected to both the processing module and the judgment module, is used to control the reduction furnace based on the abnormal state determination result and the real-time TCS flow rate, the real-time hydrogen flow rate, and the real-time current.

[0024] Preferably, the processing module includes a first processor and a second processor; the first processor is used to acquire the feed meter setting data and real-time voltage of the reduction furnace; wherein the feed meter setting values ​​include the gold voltage curve, current setting value, TCS setting flow rate, and hydrogen setting flow rate; the second processor is connected to the first processor and is used to acquire the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace based on the feed meter setting data and real-time voltage of the reduction furnace; wherein the second processor includes a first calculation unit, a second calculation unit, and a third calculation unit; the first calculation unit is connected to the first processor and is used to derive the real-time TCS flow rate of the reduction furnace based on the TCS setting flow rate; the second calculation unit is connected to the first processor and is used to derive the real-time hydrogen flow rate of the reduction furnace based on the real-time voltage, the gold voltage curve, and the hydrogen setting flow rate; the third calculation unit is connected to the first processor and the second calculation unit and is used to derive the real-time current in the reduction furnace based on the current setting value, the real-time hydrogen flow rate, and the hydrogen setting flow rate.

[0025] Preferably, the judgment module includes a first judgment unit, a second judgment unit, and a third judgment unit; the first judgment unit, connected to the acquisition module, is used to judge the atomization state in the reduction furnace based on the atomization cumulative value, the atomization state including clear atomization state, stable atomization state, light atomization state, medium atomization state, and heavy atomization state; when the atomization state in the reduction furnace is determined to be a stable atomization state, a first state signal is issued; when the atomization state in the reduction furnace is determined to be one of the clear atomization state, light atomization state, medium atomization state, and heavy atomization state, a second state signal is issued; the second judgment unit, connected to the acquisition module, is used to judge the atomization state in the reduction furnace based on the atomization cumulative value, the atomization state including clear atomization state, light atomization state, medium atomization state, and heavy atomization state, the ... The six-phase current values ​​are used to determine whether a phase loss condition exists in the reduction furnace: when it is determined that there is no phase loss condition in the reduction furnace, a third state signal is issued; when it is determined that there is a phase loss condition in the reduction furnace, a fourth state signal is issued. The third judgment unit is connected to the first judgment unit and the second judgment unit, and is used to determine whether there is an abnormal state in the reduction furnace based on the atomization state and the phase loss state in the reduction furnace: when both the first state signal and the third state signal are received simultaneously, it is determined that there is no abnormal state in the reduction furnace, and an execution signal is issued; when either the second state signal or the fourth state signal is received, it is determined that there is an abnormal state in the reduction furnace, and a correction signal is issued.

[0026] Preferably, the control module includes a correction unit and an execution unit; the execution unit, connected to the third judgment unit, is used to receive the execution signal and, upon receiving the execution signal, control the reduction furnace according to the real-time TCS flow rate, the real-time hydrogen flow rate, and the real-time current; the correction unit, connected to both the third judgment unit and the execution unit, is used to receive the correction signal and, upon receiving the correction signal, correct the real-time TCS flow rate, the real-time hydrogen flow rate, and the real-time current according to the abnormal state type of the reduction furnace, obtaining the corrected real-time TCS flow rate, the real-time hydrogen flow rate, and the real-time current, and sends a feedback signal to the execution unit; the execution unit is also used to receive the feedback signal and control the reduction furnace according to the corrected real-time TCS flow rate, the real-time hydrogen flow rate, and the real-time current.

[0027] The control method for the reduction furnace production process in this invention determines whether the reduction furnace is in an abnormal state by collecting atomization cumulative values ​​and six-phase current values. Then, based on the abnormal state determination result and the acquired real-time TCS flow rate, hydrogen flow rate, and real-time current, the reduction furnace is controlled. Specifically, if an abnormal state is determined, the real-time TCS flow rate, hydrogen flow rate, and real-time current in the reduction furnace are corrected to obtain corrected real-time TCS flow rate, hydrogen flow rate, and real-time current. The production of the reduction furnace is then controlled based on these corrected values. Therefore, this method, by determining whether the reduction furnace is in an abnormal state and promptly correcting the real-time TCS flow rate, hydrogen flow rate, and real-time current based on the abnormal state, can achieve precise control of the TCS flow rate, hydrogen flow rate, and current during the reduction furnace production process, thereby unifying product standards and improving product quality. Attached Figure Description

[0028] Figure 1 This is a flowchart of a control method for a reduction furnace production process in some embodiments of the present invention;

[0029] Figure 2 This is a flowchart illustrating the specific steps of step S2 in the control method of the reduction furnace production process in some embodiments of the present invention;

[0030] Figure 3 This is a flowchart illustrating the specific steps of step S22 in the control method of the reduction furnace production process in some embodiments of the present invention;

[0031] Figure 4 This is a schematic diagram of the architecture of the control device for the reduction furnace production process in some embodiments of the present invention. Detailed Implementation

[0032] The technical solutions of the invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without creative effort are within the scope of the invention.

[0033] In the description of this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] In the description of this invention, each unit or module may correspond to only one entity structure, or may be composed of multiple entity structures, or multiple units or modules may be integrated into one entity structure; the units or modules may be implemented by software or by hardware, for example, the units or modules may be located in a processor.

[0035] In the description of this invention, unless otherwise specified, the functions and steps marked in the flowcharts and block diagrams of this invention may occur in a different order than that marked in the accompanying drawings.

[0036] Example 1

[0037] Please see Figure 1 This invention discloses a method for controlling the production process of a reduction furnace, comprising the following steps:

[0038] S1: Obtain the cumulative atomization value and six-phase current value of the reduction furnace.

[0039] S2: Obtain the real-time flow rate of the reduction furnace's TCS, the real-time flow rate of hydrogen, and the real-time current.

[0040] S3: Determine whether the reduction furnace is in an abnormal state based on the cumulative atomization value and the six-phase current value.

[0041] S4: Control the reduction furnace based on the abnormal state determination results and the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current.

[0042] It should be noted that TCS, or trichlorosilane, is the main raw material for polysilicon production in reduction furnaces. Additionally, during polysilicon production, it is necessary to control the hydrogen flow rate and current to improve the quality of the produced polysilicon.

[0043] Currently, the TCS flow rate, hydrogen flow rate, and real-time current are mainly determined by operators who periodically issue material parameters according to experience-based material lists, monitor the furnace conditions in real time, and adjust the proportion of materials fed into the furnace based on experience. Relying on experience to adjust the feed ratio inevitably leads to inconsistent standards, resulting in inconsistent product quality and low production efficiency.

[0044] In this embodiment, the presence of an abnormal state in the reduction furnace is determined by collecting the cumulative atomization value and the six-phase current value. If no abnormal state is found, the reduction furnace is directly controlled based on the obtained real-time TCS flow rate, real-time hydrogen flow rate, and real-time current. If an abnormal state is found in the reduction furnace, the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current in the reduction furnace are corrected to obtain the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current. The production of the reduction furnace is then controlled based on the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current.

[0045] Therefore, this method uses the cumulative atomization value and the six-phase current value to determine whether there is an abnormal state in the reduction furnace, which can achieve the standardization of judgment. Moreover, by timely correcting the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current, it can achieve precise control of the TCS flow rate, hydrogen flow rate, and current during the production process of the reduction furnace, thereby unifying product standards and improving product quality.

[0046] Please see Figure 2 In this embodiment, step S2 specifically includes:

[0047] S21: Obtain the material meter setting data and real-time voltage of the reduction furnace.

[0048] S22: Obtain the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current of the reduction furnace based on the feed meter settings and real-time voltage of the reduction furnace.

[0049] The material settings include the gold voltage curve, current setting, TCS flow rate setting, and hydrogen flow rate setting.

[0050] Further, please refer to Figure 3 Step S22 specifically includes:

[0051] S221: Based on the TCS set flow rate, the real-time TCS flow rate of the reduction furnace is obtained;

[0052] S222: The real-time hydrogen flow rate of the reduction furnace is obtained based on the real-time voltage, the golden voltage curve, and the set hydrogen flow rate.

[0053] S223: The real-time current in the reduction furnace is obtained based on the current set value, the real-time hydrogen flow rate, and the hydrogen set flow rate.

[0054] It should be noted that in the initial stage, TCS (trichlorosilane) is initially supplied to the reduction furnace according to the TCS set flow rate. At this time, the real-time TCS flow rate in the reduction furnace is the TCS set flow rate. Similarly, in the initial stage, the real-time hydrogen flow rate in the reduction furnace is the hydrogen set flow rate; the real-time current is the current set value of the reduction furnace. After a period of time, the real-time hydrogen feed flow rate needs to be controlled based on the real-time voltage, real-time hydrogen flow rate, and hydrogen set flow rate. It should be noted that when the hydrogen flow rate in the reduction furnace changes, the real-time voltage in the reduction furnace will change accordingly. The golden voltage curve represents the correspondence between the optimal furnace cycle time and voltage. The real-time voltage in the reduction furnace needs to closely match the golden voltage curve, which requires real-time adjustment of the hydrogen real-time flow rate to make the real-time voltage close to the golden voltage curve. Furthermore, due to the change in the hydrogen real-time flow rate, the real-time current in the reduction furnace also needs to be adjusted accordingly. At this time, the real-time current in the reduction furnace is controlled based on the current set value, the hydrogen real-time flow rate, and the hydrogen set flow rate.

[0055] It should be noted that this control method can achieve automated control by using a programmable control device, thereby realizing automated judgment and automated feeding of the reduction furnace. For example, the control device can be the CH20X intelligent machine from Zhongke Times, whose main configuration includes: Hygon C863331E processor, BGA1515DM1, 16GB memory, and 256GB CF disk; the main interfaces are: 2x100 / 1000BASE-T(X), VGA, 4xUSB3.0, 1xRS232 / 422 / 485, 1xCAN, and 1xCFas.

[0056] Of course, it is understandable that the control device needs to be initialized before executing the operation steps of this control method. The control device includes a manual DCS intervention mode and a software automatic control mode. In the manual DCS intervention mode, the operator issues feeding commands directly to the reduction furnace through the DCS system based on experience; while in the software automatic control mode, the software in the control device automatically controls and adjusts the feeding flow rate and current.

[0057] Furthermore, during the actual production process of the reduction furnace, the first 3 hours are a period prone to fluctuations and require manual supervision to ensure timely response to any dangerous alarms. Dangerous alarms include: canceling the automatic feed program, and manually increasing or decreasing the flow rate of trichlorosilane (TCS), hydrogen flow rate, and the magnitude of the six-phase current.

[0058] If no abnormalities occur within the first 3 hours, the system will seamlessly switch to automatic software control mode. However, if manual intervention is required within the first 3 hours, the timer will reset until the system switches back to automatic software control after 3 hours.

[0059] In this embodiment, the control device determines the switching mode as follows:

[0060] Obtain the type of manual intervention flag, furnace operating time, and real-time hydrogen flow rate for this switching operation;

[0061] The judgment is based on the type of manual intervention flag used in this handover:

[0062] If it is determined that this switching is an automatic switch from the three-hour system to software control, then it can be inferred that the program is running normally and all values ​​are calculated according to the set values.

[0063] If it is determined that the switching was from manual DCS intervention to software control, then the program is assumed to be restarting, and all settings need to be recalculated by adding three hours based on the current real-time hydrogen flow rate and the current working time of the reduction furnace.

[0064] In this embodiment, the control device can obtain the feed meter setting data of the reduction furnace from the NRT (non-real-time system), and can also obtain preset current upper and lower limits, TCS upper and lower limits, hydrogen flow upper and lower limits, and other data from the NRT. Additionally, the control device can obtain real-time voltage values ​​and real-time TCS flow values ​​in the reduction furnace from the DCS system. The specific process is as follows:

[0065] Based on the data set in the material list, obtain the current setting value, the increase value, and the upper and lower limits;

[0066] Based on the data set in the bill of materials, obtain the TCS set flow rate and upper and lower limits;

[0067] Based on the feed meter settings, TCS flow rate settings, and real-time TCS flow rate values, obtain the hydrogen feed meter flow rate settings and upper and lower limits.

[0068] Furthermore, the control device can calculate the ratio between the TCS and hydrogen flow rates in the feed meter based on the TCS set flow rate and the hydrogen set flow rate: (H2 flow rate / 2.02) / (TCS flow rate / 135.5).

[0069] In this embodiment, step S221: The real-time TCS flow rate of the reduction furnace is obtained based on the TCS set flow rate. Specifically, under normal circumstances, i.e., when the reduction furnace is in a stable atomization state and there is no phase loss, the execution unit provides TCS to the reduction furnace according to the TCS set flow rate, thereby obtaining the real-time TCS flow rate of the reduction furnace. At this time, the real-time TCS flow rate is the TCS set flow rate. When an abnormal situation occurs in the reduction furnace, the TCS set flow rate needs to be corrected. At this time, the real-time TCS flow rate in the reduction furnace is the corrected TCS set flow rate.

[0070] Furthermore, the upper and lower limits of TCS flow rate are ±15%-25% of the TCS set flow rate.

[0071] In this embodiment, step S222: Based on the real-time voltage, the gold voltage curve, and the set hydrogen flow rate, the real-time hydrogen flow rate of the reduction furnace is obtained, specifically including:

[0072] The gold voltage curve is decomposed into multiple standard periods to obtain the voltage setting value corresponding to each standard period.

[0073] Based on the real-time voltage, voltage setpoint, and hydrogen setpoint flow rate, the real-time hydrogen flow rate of the reduction furnace within each standard cycle is obtained.

[0074] It should be noted that the golden voltage curve represents the relationship between the optimal furnace cycle time and voltage in the reduction furnace; that is, the golden voltage curve is the optimal voltage of the reduction furnace on the time axis, given in advance. The golden voltage curve serves as a setpoint for adjusting the hydrogen flow rate. When the real-time hydrogen flow rate in the reduction furnace increases, the voltage rises significantly. However, there is no clear correlation between hydrogen output and voltage increase, nor are there specific parameters to indicate this relationship. The measured hydrogen flow rate fluctuates considerably, requiring filtering; the average of 10 measurements is taken as the real-time hydrogen flow rate. Therefore, hydrogen control is primarily based on the golden voltage curve, with the aim of bringing the real-time total voltage close to the golden voltage curve.

[0075] Specifically, the gold voltage curve is decomposed into multiple standard periods to obtain the voltage setpoint within each standard period, including the following steps:

[0076] First, the gold voltage curve is decomposed into voltage data with a 1-hour cycle. Then, the set operating time of the reduction furnace is acquired via a DCS device, with the set operating time in minutes. Based on the set operating time, multiple standard cycles are divided, and the voltage setpoint corresponding to each standard cycle is obtained. The voltage value corresponding to the gold voltage curve in each standard cycle is the voltage setpoint. The duration of each standard cycle is 3 minutes.

[0077] Furthermore, based on the real-time voltage, voltage setpoint, and hydrogen set flow rate, the real-time hydrogen flow rate within each standard cycle of the reduction furnace is obtained, specifically including:

[0078] Within the initial standard cycle, hydrogen is supplied to the reduction furnace according to the set hydrogen flow rate, thereby obtaining the real-time hydrogen flow rate within the initial standard cycle.

[0079] In each subsequent standard cycle, the actual voltage in the reduction furnace within the current standard cycle is acquired once, and the difference A between the actual voltage and the voltage set value is calculated.

[0080] The real-time hydrogen flow rate in the reduction furnace is controlled based on the difference A:

[0081] If the difference A between the actual voltage and the voltage set value is greater than 0, the hydrogen flow rate in the reduction furnace is reduced until the actual voltage equals the voltage set value, thereby obtaining the real-time hydrogen flow rate in the current standard cycle.

[0082] If the difference between the actual voltage and the voltage set value is A = 0, then the hydrogen flow rate in the reduction furnace is kept constant, thereby obtaining the real-time hydrogen flow rate in the current standard cycle.

[0083] If the difference A between the actual voltage and the voltage setting value is less than 0, the hydrogen flow rate in the reduction furnace is increased until the actual voltage equals the voltage setting value, thereby obtaining the real-time hydrogen flow rate in the current standard cycle.

[0084] This cycle continues until the control process ends.

[0085] It should be noted that the real-time hydrogen flow rate during the initial standard cycle is the set hydrogen flow rate. In each subsequent cycle, the real-time hydrogen flow rate is adjusted based on the difference between the actual voltage and the set voltage value, using the previous cycle's real-time hydrogen flow rate as a reference, to obtain the current cycle's real-time hydrogen flow rate. In other words, the difference between the actual voltage and the baseline voltage is calculated. If the difference is negative, the hydrogen flow rate is increased based on the previous moment's flow rate (i.e., 3 minutes ago). If the difference is positive, the hydrogen flow rate is decreased. The hydrogen flow rate at each moment is based on the previous cycle's flow rate (3 minutes ago). If the difference is zero, the previous moment's flow rate remains unchanged.

[0086] Furthermore, after the control device determines that the reduction furnace switching has switched to automatic software control, i.e., after 3 hours, a disturbance-free switching is achieved. The total voltage curve from 3 to 6 hours in the gold voltage curve is replaced with a new gold voltage curve, which is obtained by connecting the actual voltage curve at 3 hours and the voltage at 6 hours in the gold voltage curve as a straight line. Then, the hydrogen flow rate is adjusted according to the new gold voltage curve.

[0087] In this embodiment, the upper limit of the hydrogen flow rate is 1-1.5 times the feed rate according to the time axis. The lower limit of the hydrogen flow rate is the molar ratio of the hydrogen set flow rate according to the time axis * 0.8, that is, (0.8 * hydrogen flow rate set value * TCS real-time value) / TCS feed rate value.

[0088] If the hydrogen flow rate is determined to have reached the upper limit, the system will operate at the lower limit, and the golden voltage baseline (i.e., the voltage setting value for the current cycle) will decrease by 0.1%-0.5%. If the hydrogen flow rate is determined to have reached the lower limit, the system will operate at the lower limit, and the golden voltage baseline (i.e., the voltage setting value for the current cycle) will increase by 0.1%-0.5%.

[0089] Furthermore, before 12 hours, the molar ratio between TCS and hydrogen must not be less than 1.3-1.8. If the molar ratio is less than 1.3-1.8, the amount of hydrogen needs to be adjusted, while the TCS should still be operated according to the flow rate of the feed meter.

[0090] Specifically, the real-time flow rate regulation of hydrogen can be achieved using a PID controller. The proportional coefficient in the PID controller has an adjustment range of 3-12, 12-30, and 30-100, with the larger value at the beginning and the smaller value at the end, while the derivative coefficient has the smaller value at the beginning and the larger value at the end.

[0091] In this embodiment, step S223: Calculating the real-time current in the reduction furnace based on the current setpoint, the real-time hydrogen flow rate, and the set hydrogen flow rate includes the following steps:

[0092] During the first three standard cycles, current is supplied to the reduction furnace according to the current set value, thereby obtaining the real-time current during the first three standard cycles.

[0093] Every three standard cycles thereafter, the current setting value is adjusted once based on the real-time hydrogen flow rate and the set hydrogen flow rate to obtain the current real-time current.

[0094] This cycle continues until the control process ends.

[0095] Specifically, every three standard cycles thereafter, the current setpoint is adjusted based on the real-time hydrogen flow rate and the set hydrogen flow rate to obtain the current real-time current, which includes:

[0096] Compare the real-time hydrogen flow rate with the set hydrogen flow rate:

[0097] If the real-time hydrogen flow rate is greater than the set hydrogen flow rate, the current set value is subtracted from the first current adjustment value to obtain the current real-time current.

[0098] If the real-time hydrogen flow rate is less than or equal to the set hydrogen flow rate, calculate the difference between the real-time hydrogen flow rate and the set hydrogen flow rate, and obtain the hydrogen difference threshold for the reduction furnace:

[0099] If the difference is less than or equal to the difference threshold, the current setting value of the previous cycle is maintained to obtain the current real-time current.

[0100] If the difference value is greater than the difference threshold, the current setting value is increased by the second current adjustment value to obtain the current real-time current.

[0101] Specifically, the first current adjustment value is 0.55A-1.5A, and the second current adjustment value is 0.5A-1.5A. Preferably, the first current adjustment value is 0.55A, and the second current adjustment value is 0.5A.

[0102] For example, during the reduction furnace production process, when no abnormalities occur, the current operates according to the current setting value. After a period of time, the current adjustment is determined by detecting the hydrogen flow rate. If the real-time hydrogen flow rate is greater than the feed rate (i.e., the set hydrogen flow rate), all six phase currents decrease, and adjustments are made once every three standard cycles, with each cycle lasting 3 minutes, which is equivalent to a judgment and adjustment every 9 minutes. Specifically, for every 1 kg increase in hydrogen flow rate, the six-phase current decreases by 0.55 A. If the real-time hydrogen flow rate is less than the set hydrogen flow rate, and the difference between the two is greater than the difference threshold, all six phase currents increase, and adjustments are made once every three cycles, with each cycle lasting 3 minutes, which is equivalent to a judgment and adjustment every 9 minutes. The difference threshold is 5 kg-17 kg, preferably 10 kg. When the difference between the set hydrogen flow rate and the real-time hydrogen flow rate exceeds the difference threshold by 1 kg, the six-phase current increases by 0.5 A. If the real-time hydrogen flow rate is less than the set hydrogen flow rate, and the difference between the two is less than or equal to the difference threshold, the six-phase current remains unchanged.

[0103] Furthermore, the atomization control current has higher priority than the hydrogen overfeed control. The upper and lower limits of the adjustment current are ±5%-15% of the feed meter current.

[0104] In addition, after a period of production, the reduction furnace will inevitably produce some atomization deviations and phase loss faults. At this time, it is necessary to determine whether the reduction furnace is abnormal and adjust the real-time flow rate of TCS, real-time hydrogen flow rate and real-time current according to the type of abnormal state.

[0105] In this embodiment, the determination of whether the reduction furnace is in an abnormal state based on the cumulative atomization value and the six-phase current value includes the following steps:

[0106] Based on the cumulative atomization value, the atomization state in the reduction furnace is determined. The atomization state includes clear atomization, stable atomization, light atomization, moderate atomization, and heavy atomization.

[0107] Based on the six-phase current values, determine whether there is a phase loss in the reduction furnace;

[0108] Based on the atomization and phase loss states in the reduction furnace, determine whether the reduction furnace is in an abnormal state:

[0109] If the reduction furnace is in a stable atomization state and there is no phase loss state, then the reduction furnace is determined to be in no abnormal state.

[0110] Otherwise, the reduction furnace is determined to be in an abnormal state.

[0111] The aforementioned method of determining the atomization state of the reduction furnace based on the cumulative atomization value specifically includes:

[0112] The first atomization threshold, the second atomization threshold, the third atomization threshold, and the fourth atomization threshold of the reduction furnace are obtained, wherein the first atomization threshold, the second atomization threshold, the third atomization threshold, and the fourth atomization threshold increase sequentially;

[0113] Compare the atomization threshold with the cumulative atomization value:

[0114] If the cumulative atomization value is less than or equal to the first atomization threshold, the reduction furnace is determined to be in a clear atomization state.

[0115] If the cumulative atomization value is greater than the first atomization threshold and less than the second atomization threshold, then the reduction furnace is determined to be in a stable atomization state.

[0116] If the cumulative atomization value is greater than or equal to the second atomization threshold and less than the third atomization threshold, then the reduction furnace is judged to be in a light atomization state.

[0117] If the cumulative atomization value is greater than or equal to the third atomization threshold and less than the fourth atomization threshold, then the reduction furnace is judged to be in a medium atomization state.

[0118] If the cumulative atomization value is greater than or equal to the fourth atomization threshold, the reduction furnace is judged to be in a state of heavy atomization.

[0119] Specifically, the atomization deviation value is collected every 3 minutes. If the collected atomization deviation value exceeds 5, it is treated as 5. It should be noted that the atomization deviation value refers to the difference between the real-time atomization value in the reduction furnace and the atomization standard value. In this embodiment, the cumulative atomization value refers to the sum of 10 collected atomization deviation values, which is used as the standard for judging the atomization state. The goal of atomization control is to maintain the atomization state in the reduction furnace at a stable atomization level.

[0120] Further, the first atomization threshold is 3-7, the second atomization threshold is 7-9, the third atomization threshold is 13-17, and the fourth atomization threshold is 23-27. For example, the first atomization threshold can be selected as 4, the second atomization threshold can be selected as 8, the third atomization threshold can be selected as 15, and the fourth atomization threshold can be selected as 25. When the cumulative atomization value is less than or equal to 4, the reduction furnace can be determined to be in a clear atomization state; when the cumulative atomization value is greater than 4 and less than 8, the reduction furnace is in a stable atomization state, and maintaining the reduction furnace in a stable atomization state is the goal of atomization control; when the cumulative atomization value is greater than 8 and less than 15, the reduction furnace is in a light atomization state; when the cumulative atomization value is greater than 15 and less than 25, the reduction furnace is in a moderate atomization state; and when the cumulative atomization value is greater than 25, the reduction furnace is in a heavy atomization state.

[0121] Based on the six-phase current values, determine whether there is a phase loss in the reduction furnace, specifically including:

[0122] The six-phase current values ​​include the current values ​​of phases A1, B1, C1, A2, B2, and C2.

[0123] If all six phase current values ​​are not 0, it is determined that the reduction furnace does not have a phase loss state;

[0124] If the current of phases A2 and / or C2 is 0, it is determined that the reduction furnace is in a phase loss state, and is in a state of missing 4 pairs of rods.

[0125] If the current of phases A1, B1, C1 and / or B2 is 0, it is determined that there is a phase loss state in the reduction furnace, and that there is a phase loss of 8 pairs of rods.

[0126] In this embodiment, step S4: Based on the abnormal state determination result and the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current, the reduction furnace is controlled, specifically including:

[0127] If it is determined that there is no abnormal state in the reduction furnace, the reduction furnace is controlled according to the real-time flow of TCS, the real-time flow of hydrogen, and the real-time current.

[0128] If an abnormal state is detected in the reduction furnace, the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current are corrected according to the type of abnormal state of the reduction furnace to obtain the corrected real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current.

[0129] The reduction furnace is controlled based on the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current.

[0130] Furthermore, the types of abnormal states include: atomization abnormal state and phase loss state;

[0131] Based on the type of abnormal state of the reduction furnace, the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current are corrected, specifically including the following steps:

[0132] If the reduction furnace is in an abnormal atomization state, then the atomization of the reduction furnace should be corrected.

[0133] If the reduction furnace is in a phase loss state, then the phase loss correction of the reduction furnace shall be performed.

[0134] Among them, the atomization abnormal state is one of the following: the reduction furnace is in a clear atomization state, a light atomization state, a moderate atomization state, and a heavy atomization state;

[0135] The above steps: If the reduction furnace is in an abnormal atomization state, then perform atomization correction on the reduction furnace, specifically including:

[0136] If the reduction furnace is in a clear atomization state:

[0137] The real-time TCS flow rate remains unchanged, and the atomization-corrected real-time TCS flow rate is obtained.

[0138] The current voltage setting is reduced by the first voltage correction value to obtain the voltage setting value after atomization correction.

[0139] Based on the real-time voltage, the voltage setting value after atomization correction, and the hydrogen setting flow rate, step S222 is executed to obtain the real-time hydrogen flow rate after atomization correction.

[0140] Based on the current setting value, the real-time hydrogen flow rate after atomization correction, and the hydrogen setting flow rate, execute step S223 to obtain the real-time current after atomization correction.

[0141] This atomization correction is now complete;

[0142] If the reduction furnace is in a slightly atomized state:

[0143] The real-time TCS flow rate remains unchanged, and the atomization-corrected real-time TCS flow rate is obtained.

[0144] Increase the current voltage setting value by the second voltage correction value to obtain the voltage setting value after atomization correction;

[0145] Based on the real-time voltage, the voltage setting value after atomization correction, and the hydrogen setting flow rate, step S222 is executed to obtain the real-time hydrogen flow rate after atomization correction.

[0146] Based on the current setting value, the real-time hydrogen flow rate after atomization correction, and the hydrogen setting flow rate, execute step S223 to obtain the real-time current after atomization correction.

[0147] This atomization correction is now complete;

[0148] If the reduction furnace is in a moderate atomization state:

[0149] The real-time TCS flow rate is reduced by the first flow rate correction value to obtain the atomized real-time TCS flow rate.

[0150] Increase the current voltage setting value by the third voltage correction value to obtain the voltage setting value after atomization correction;

[0151] Based on the real-time voltage, the voltage setting value after atomization correction, and the hydrogen setting flow rate, step S222 is executed to obtain the real-time hydrogen flow rate after atomization correction.

[0152] Based on the current setting value, the real-time hydrogen flow rate after atomization correction, and the hydrogen setting flow rate, execute step S223 to obtain the real-time current after atomization correction.

[0153] This atomization correction is now complete;

[0154] If the reduction furnace is in a heavily atomized state:

[0155] The real-time TCS flow rate is reduced by the second flow rate correction value to obtain the atomized real-time TCS flow rate.

[0156] Increase the current voltage setting by the fourth voltage correction value to obtain the voltage setting after atomization correction;

[0157] Based on the real-time voltage, the voltage setting value after atomization correction, and the hydrogen setting flow rate, step S222 is executed to obtain the real-time hydrogen flow rate after atomization correction.

[0158] Stop executing step S223. The real-time current remains unchanged, and the real-time current after atomization correction is obtained.

[0159] This atomization correction is now complete.

[0160] The voltage setting value refers to the voltage setting value corresponding to each standard cycle obtained from the decomposition of the gold voltage curve in step S222.

[0161] It should be noted that, to ensure the effectiveness of atomization correction measures, a period of time is required after each measure is implemented. The next atomization correction measure must then be determined based on the atomization status of the following cycle. In other words, while implementing a current atomization measure, it is necessary to wait until the current measure is completed, i.e., the current execution cycle ends, before determining the next anti-atomization measure based on the atomization status of the next cycle.

[0162] For example: The reduction furnace is currently in a light atomization state and the hydrogen flow rate is being increased. The execution cycle is 1 hour. Even if the atomization state of the reduction furnace changes to heavy atomization within the 1-hour execution cycle, the light atomization measures for 1 hour still need to be completed before the atomization state is determined, and then the atomization measures for the next execution cycle are executed according to the atomization state.

[0163] It should also be noted that the execution cycle length needs to be determined based on the atomization state of the reduction furnace and the currently implemented atomization measures. Specifically, when the reduction furnace is in a clear atomization state, the execution cycle is 2 hours; when the reduction furnace is in a light atomization state, a medium atomization state, or a heavy atomization state, the execution cycle is 1 hour.

[0164] For example, when the reduction furnace is in a state of slight atomization, the atomization measures are as follows: the real-time TCS flow rate remains unchanged, that is, equal to the initial TCS set flow rate; the total voltage set value is increased, and then step S222 is executed according to the voltage set value to increase the real-time hydrogen flow rate; and step S223 is executed according to the real-time hydrogen current to obtain the atomization-corrected real-time current. The execution cycle is 1 hour, that is, a new anti-atomization measure is executed again after 1 hour.

[0165] Specifically, the first flow rate correction value is 30 kg / h-150 kg / h, and the second flow rate correction value is 30 kg / h-200 kg / h. The first voltage correction value is 0.1%-1.0% of the voltage setting value at the current time point; the second voltage correction value is 0.1%-1.2% of the voltage setting value at the current time point; the third voltage correction value is 0.1%-1.4% of the voltage setting value at the current time point; and the fourth voltage correction value is 0.1%-1.6% of the voltage setting value at the current time point.

[0166] For example, the general principle for atomization control in the reduction furnace is to increase hydrogen, reduce feed, and stop increasing the current. Further, if the reduction furnace is determined to be in a clear state, the total voltage setpoint is reduced by 0.1%-1.0%, starting from 40 hours and executed every 2 hours. If the reduction furnace is determined to be in a light atomization state, the total voltage setpoint is increased by 0.1%-1.2%, executed every 1 hour. If the reduction furnace is determined to be in a moderate atomization state, the total voltage setpoint is increased by 0.1%-1.4%, and the TCS is reduced by 30 kg / h-150 kg / h, executed every 1 hour. If the reduction furnace is determined to be in a heavy atomization state, the total voltage setpoint is increased by 0.1%-1.6%, and the TCS is reduced by 30 kg / h-200 kg / h, executed every 1 hour, and the current is stopped: that is, the current remains constant throughout this hour.

[0167] Of course, it is understandable that when the reduction furnace is in a stable atomization state, the real-time hydrogen flow rate, TCS real-time flow rate, and real-time current remain unchanged.

[0168] In addition, the phase loss state is when the reduction furnace is in a state of missing 4 pairs of rods or missing 8 pairs of rods.

[0169] The above steps: If the reduction furnace is in a phase loss state, then the phase loss correction of the reduction furnace shall be performed, specifically including the following steps:

[0170] If the phase loss state in the reduction furnace is determined to be a loss of 4 pairs of rods:

[0171] The real-time TCS flow rate is reduced by the third flow rate correction value to obtain the real-time TCS flow rate after phase loss correction.

[0172] Based on the third flow correction value, the real-time hydrogen flow rate is reduced proportionally to obtain the phase-loss corrected real-time hydrogen flow rate; and...

[0173] The real-time current is increased by the first regulating current value to obtain the real-time current after phase loss correction.

[0174] This phase loss correction is now complete;

[0175] If the phase loss state in the reduction furnace is determined to be a loss of 8 pairs of rods:

[0176] The TCS real-time traffic is reduced by the fourth traffic correction value to obtain the TCS real-time traffic after phase loss correction.

[0177] Based on the fourth flow correction value, the real-time hydrogen flow rate is reduced proportionally to obtain the phase-loss corrected real-time hydrogen flow rate; and...

[0178] The real-time current is increased by the second regulating current value to obtain the real-time current after phase loss correction.

[0179] This phase loss correction is now complete.

[0180] Specifically, the third flow correction value is 250kg-500kg, and the fourth flow correction value is 300kg-800kg. The first regulating current value is 3A-12A, and the second regulating current value is 6A-20A. Preferably, the third flow correction value is 300kg, the fourth flow correction value is 500kg, the first regulating current value is 8A, and the second regulating current value is 12A.

[0181] For example, if it is determined that 4 pairs of rods are missing, the TCS flow rate is reduced by 300 kg, the current is increased by 8 A, the DCS system detects that the current in the missing pair is 0, and the hydrogen flow rate decreases according to the original ratio after 1 hour. That is, the hydrogen flow rate must be reduced by the same proportion as the TCS flow rate. Specifically, the molar ratio between the TCS flow rate and the hydrogen flow rate is (H2 / 2.02) / (TCS / 135.5).

[0182] If it is determined that 8 pairs of rods are missing, then the TCS flow rate should be reduced by 300-800 kg, the current increased by 6A-20A, and the hydrogen flow rate reduced according to the original ratio after 1 hour. That is, the hydrogen flow rate should be reduced by the same proportion as the TCS flow rate reduction.

[0183] Furthermore, in this embodiment, if it is determined that two or more phases of current are missing, the software automatic control mode is exited, and the AI ​​system provides an exit signal, which the DCS then uses to switch to DCS control. Alternatively, if it is determined that the real-time total voltage is 0.9 or more below the baseline voltage, this control mode must also be exited, and the AI ​​system provides an exit signal, which the DCS then uses to switch to DCS control. In this embodiment, the ratio in the bill of materials, i.e., the molar ratio, is (H2 / 2.02) / (TCS / 135.5); the current, hydrogen, and TCS values ​​in the bill of materials are all given in units of 1H, and 1H needs to be divided into 60 portions for distribution.

[0184] In this embodiment, the data update rate is: a value is written to the DCS every 3 minutes.

[0185] Please see Figure 3 In this embodiment, the method further includes a step of data exchange between the DCS and NRT during the reduction furnace production process, the specific steps of which are as follows:

[0186] Update data to DCS;

[0187] Update the data to NRT.

[0188] Furthermore, the above steps, including updating the data to the DCS, specifically include:

[0189] The data obtained after various calculations are sent to the DCS, including the flow rate of trichlorosilane, the flow rate of hydrogen, and the magnitude of the six-phase current;

[0190] Obtain the material list setting data and the upper and lower limits of various adjustment values;

[0191] If it is determined that the hydrogen regulation flow rate has reached the upper / lower limit, then issue an upper / lower limit execution order;

[0192] If the hydrogen flow rate adjustment value meets the conditions, the adjustment value will be issued and executed directly.

[0193] If severe atomization occurs, stop adjusting the current and set all six-phase current adjustment values ​​to 0.

[0194] If the six-phase current reaches the upper / lower limit of the adjustment value, the upper / lower limit value will be issued for execution;

[0195] If the six-phase current adjustment values ​​meet the conditions, the adjustment values ​​will be issued and executed directly.

[0196] If a phase current is lost, the current regulation value for that phase is 0.

[0197] If it is determined that the flow rate of trichlorosilane has reached the upper / lower limit, then the upper / lower limit execution is issued;

[0198] If the trichlorosilane flow rate adjustment value meets the conditions, the adjustment value will be issued and executed directly.

[0199] If the phase is missing, the hydrogen flow rate will no longer be adjusted based on the golden voltage curve, but will be adjusted according to the phase-missing hydrogen flow rate in the feed table.

[0200] In addition, the above steps, updating data to NRT, specifically include:

[0201] Obtain the data that has been calculated and then sent to NRT;

[0202] Based on the calculated data, update the data to NRT, including real-time atomization value, real-time exhaust gas temperature value, real-time trichlorosilane flow rate and adjustment value, real-time hydrogen flow rate and adjustment value, real-time six-phase current value and adjustment value, real-time six-phase voltage value, atomization status, reduction furnace running time, control status, etc.

[0203] Furthermore, this method also includes the following steps:

[0204] The real-time status of the reduction furnace and the calculated material values ​​are obtained from the DCS via the OPCUA protocol.

[0205] Historical material information from the NRT and real-time status of the reduction furnace are obtained via the OPCUA protocol.

[0206] The execution process of this method will be explained in detail below:

[0207] First, during operation, if no abnormalities occur, the TCS flow rate in the reduction furnace is provided according to the TCS set flow rate. The hydrogen flow rate is provided according to the golden voltage curve, specifically by adjusting the hydrogen flow rate to make the real-time voltage in the reduction furnace closer to the golden voltage curve. Then, the real-time current is adjusted according to the hydrogen flow rate; specifically, when the real-time hydrogen flow rate is greater than / less than the set hydrogen flow rate, the real-time current is decreased / increased.

[0208] When the reduction furnace exhibits abnormal phenomena, specifically atomization and phase loss, it is necessary to perform atomization correction and phase loss correction separately to obtain the corrected real-time current. Atomization correction is performed once per execution cycle, while phase loss correction is only executed when a phase loss occurs in the reduction furnace. The goal of atomization correction is to maintain the atomization state in the reduction furnace at a stable level. When two or more phases of current are lost in the reduction furnace, it is necessary to exit the automatic software control mode and switch to manual DCS intervention mode.

[0209] In summary, this method has the following beneficial effects:

[0210] 1. This method integrates multiple tasks such as on-site working condition perception, intelligent optimization of reduction furnace, real-time control, and production management, which can improve the autonomous intelligent decision-making capability of industrial control system and ensure system safety and controllability.

[0211] 2. This method effectively controls and standardizes the reduction furnace production process, resulting in reduced furnace power consumption ≤42kWh / kgSi, deposition rate ≥110kg / h, and dense material ratio ≥55% compared to traditional control methods. This helps enterprises improve quality, reduce costs, increase efficiency, and control risks.

[0212] 3. This method can control the amount of material and current in the reduction furnace production process with high efficiency, effectively ensuring that the material adjustment is not untimely or inaccurate due to insufficient human experience, thereby improving the accuracy of adjustment and reducing the probability of misjudgment.

[0213] Example 2

[0214] Please see Figure 4 The present invention also discloses a control device for the production process of a reduction furnace, comprising a data acquisition module, a processing module, a judgment module and a control module.

[0215] The system comprises several modules: a data acquisition module for obtaining the cumulative atomization value and six-phase current value of the reduction furnace; a processing module for obtaining the real-time TCS flow rate, hydrogen flow rate, and current of the reduction furnace; a judgment module connected to the data acquisition module for determining whether the reduction furnace is in an abnormal state based on the cumulative atomization value and the six-phase current value; and a control module connected to both the processing and judgment modules for controlling the reduction furnace based on the abnormal state determination results and the real-time TCS flow rate, hydrogen flow rate, and current.

[0216] Specifically, the acquisition module can be an input module of a computer device. Connected to the DCS, the acquisition module collects the cumulative atomization value and six-phase current value of the reduction furnace from the DCS system and uploads them to the acquisition module. A judgment module determines whether the reduction furnace is in an abnormal state: if no abnormal state is found, the control module directly controls the reduction furnace based on the acquired real-time TCS flow rate, hydrogen flow rate, and real-time current; if an abnormal state is detected, the control module needs to correct the real-time TCS flow rate, hydrogen flow rate, and real-time current in the reduction furnace to obtain corrected real-time TCS flow rate, hydrogen flow rate, and real-time current, and then control the production of the reduction furnace based on the corrected real-time TCS flow rate, hydrogen flow rate, and real-time current.

[0217] This device can automate the feeding process in the reduction furnace and adjust the real-time flow rate of TCS, hydrogen, and current during production, thereby unifying product standards and improving product quality.

[0218] In this embodiment, the processing module includes a first processor and a second processor. The first processor is used to acquire the feed meter setting data and real-time voltage of the reduction furnace; wherein, the feed meter setting values ​​include the gold voltage curve, current setting value, TCS set flow rate, and hydrogen set flow rate. The second processor is connected to the first processor and is used to acquire the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace based on the feed meter setting data and real-time voltage of the reduction furnace.

[0219] Specifically, the first processor is connected to the NRT (non-real-time system) and obtains material setting data such as the gold voltage curve, current setting value, TCS setting flow rate and hydrogen setting flow rate through the NRT system; the first processor is also connected to the DCS system and obtains the real-time voltage, real-time current, real-time hydrogen flow rate and TCS real-time flow rate in the reduction furnace through the DCS system.

[0220] Furthermore, the second processor includes a first computing unit, a second computing unit, and a third computing unit. The first computing unit is connected to the first processor and is used to determine the real-time TCS flow rate of the reduction furnace based on the TCS set flow rate. The second computing unit is connected to the first processor and is used to determine the real-time hydrogen flow rate of the reduction furnace based on the real-time voltage, the golden voltage curve, and the hydrogen set flow rate. The third computing unit is connected to the first processor and the second computing unit and is used to determine the real-time current in the reduction furnace based on the current set value, the real-time hydrogen flow rate, and the hydrogen set flow rate.

[0221] Among them, the first computing unit, the second computing unit, and the third computing unit can all be control software built on an industrial control computer.

[0222] The calculation process of the second calculation unit is as follows: Using the hydrogen flow rate at the previous moment (i.e., 3 minutes ago) as a reference, calculate the difference between the actual voltage and the baseline voltage. If the difference is negative, increase the hydrogen flow rate. If the difference is positive, decrease the hydrogen flow rate. If the difference is 0, the hydrogen flow rate remains unchanged.

[0223] During the calculations in the second calculation unit, the hydrogen flow rate at each moment is based on the hydrogen flow rate of the previous cycle (3 minutes prior). It should be noted that due to the significant instantaneous error in the hydrogen flow rate within the reduction furnace, the real-time hydrogen flow rate needs to be filtered. Specifically, if the reduction furnace is currently in the first nine cycles of startup, the filtered value of the real-time hydrogen flow rate is equal to the current real-time hydrogen flow rate directly obtained from the DCS. If it is in the tenth cycle or later, the filtered value of the real-time hydrogen flow rate is equal to the average of the current cycle and the previous nine cycles.

[0224] Therefore, before calculating the real-time hydrogen flow rate, the real-time hydrogen flow rate is first filtered by the DCS system: the hydrogen flow rate in 10 standard cycles during the 3H non-disruptive switching is obtained, the average value is calculated, and the filtered real-time hydrogen flow rate is obtained. The filtered value of the real-time hydrogen flow rate is used as the reference value for adjusting the hydrogen flow rate. Subsequent reference values ​​are all the real-time hydrogen flow rates filtered in the previous 10 standard cycles.

[0225] Then, the gold voltage curve needs to be adjusted based on the real-time hydrogen flow rate in the reduction furnace, the set hydrogen flow rate, and the upper and lower limits of the hydrogen flow rate.

[0226] If the hydrogen flow rate is determined to have reached the upper limit, the system will operate at the lower limit, and the golden voltage baseline (i.e., the voltage setting value in the current cycle) will decrease by 0.1%-0.5%. If the hydrogen flow rate is determined to have reached the lower limit, the system will operate at the lower limit, and the golden voltage baseline (i.e., the voltage setting value in the current cycle) will increase by 0.1%-0.5%.

[0227] Finally, the second calculation unit performs judgments and calculations based on the real-time total voltage and the golden voltage curve value:

[0228] If the real-time total voltage is determined to be lower than the golden voltage baseline (i.e., the voltage setting value in the current cycle), then increase the hydrogen flow rate;

[0229] If the real-time total voltage is determined to be higher than the golden voltage baseline (i.e., the voltage setting value in the current cycle), then the hydrogen flow rate is reduced.

[0230] In this embodiment, the execution process of the third computing unit is as follows:

[0231] The first processor obtains the real-time hydrogen flow rate from the DCS system and calculates the filtered value of the real-time hydrogen flow rate over 10 cycles.

[0232] The first processor obtains the hydrogen flow rate setpoint from the NRT system and calculates the real-time hydrogen flow rate at different times.

[0233] Then, based on the setpoint for hydrogen flow rate and the filtered value of real-time hydrogen flow rate, the magnitude of the real-time current is controlled: if it is determined that the hydrogen flow rate is greater than the meter flow rate, all six phase currents decrease; if it is determined that the hydrogen flow rate is less than the meter flow rate by 7 kg / h-20 kg / h or more, all six phase currents decrease; if atomization occurs during the current adjustment process, the current adjustment is stopped.

[0234] In this embodiment, the judgment module includes a first judgment unit, a second judgment unit, and a third judgment unit. The first judgment unit is connected to the acquisition module and is used to judge the atomization state in the reduction furnace based on the cumulative atomization value. The atomization state includes clear atomization, stable atomization, light atomization, moderate atomization, and heavy atomization. When the atomization state in the reduction furnace is determined to be stable atomization, a first state signal is issued; when the atomization state in the reduction furnace is determined to be one of clear atomization, light atomization, moderate atomization, or heavy atomization, a second state signal is issued.

[0235] The second judgment unit is connected to the acquisition module and is used to determine whether there is a phase loss state in the reduction furnace based on the six-phase current value: when it is determined that there is no phase loss state in the reduction furnace, a third state signal is issued; when it is determined that there is a phase loss state in the reduction furnace, a fourth state signal is issued.

[0236] The third judgment unit is connected to the first judgment unit and the second judgment unit, and is used to determine whether there is an abnormal state in the reduction furnace based on the atomization state and the phase loss state in the reduction furnace: when the first state signal and the third state signal are received at the same time, it is determined that there is no abnormal state in the reduction furnace and an execution signal is issued; when one of the second state signal and the fourth state signal is received, it is determined that there is an abnormal state in the reduction furnace and a correction signal is issued.

[0237] The first judgment module can be a software module built on computer equipment. The first judgment module is used to judge the atomization state in the reduction furnace, and its judgment criteria are as follows: First, real-time atomization values ​​are obtained from the acquisition module. The cumulative atomization value is calculated based on the data to judge the atomization state. If the cumulative atomization value is greater than or equal to the heavy atomization threshold (i.e., the fourth atomization threshold in Example 1), it is judged that the atomization state is heavy. If the cumulative atomization value is greater than or equal to the moderate atomization threshold (i.e., the third atomization threshold in Example 1), it is judged that the atomization state is moderate. If the cumulative atomization value is greater than or equal to the light atomization threshold (i.e., the second atomization threshold in Example 1), it is judged that the atomization state is light. If the cumulative atomization value is less than or equal to the clear atomization threshold (i.e., the first atomization threshold in Example 1), it is judged that the atomization state is clear. Otherwise, it is judged that the atomization state is stable.

[0238] Furthermore, the second judgment unit can be a software module built on computer equipment. The second judgment unit is used to judge the phase loss status in the reduction furnace, and its judgment criteria are as follows: obtain the real-time value of the six-phase current from the DCS and judge whether there is a phase loss: if it is judged that two or more phases have a current of 0, a warning is issued; if it is judged that the current of phase A2 or C2 is 0, it means that 4 pairs of rods are missing; if it is judged that the current of other phases is 0, it means that 8 pairs of rods are missing.

[0239] Furthermore, the third judgment unit can be a software module built on computer equipment. This third judgment unit is used to determine whether the reduction furnace is in an abnormal state based on the atomization state and the phase loss device. The judgment criteria are as follows: when the reduction furnace is in a stable atomization state and there is no phase loss, it is determined that the reduction furnace is not in an abnormal state; when the reduction furnace is in one of the following states—clear atomization, light atomization, medium atomization, or heavy atomization—or when the reduction furnace is in a phase loss state, it is determined that the reduction furnace is in an abnormal state. Therefore, it can be seen that the abnormal states of the reduction furnace mainly include atomization abnormalities and phase loss states.

[0240] In this embodiment, the control module includes a correction unit and an execution unit. The execution unit is connected to the third judgment unit and is used to receive execution signals. Upon receiving an execution signal, it controls the reduction furnace based on the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current. The correction unit is connected to both the third judgment unit and the execution unit. It receives correction signals and, upon receiving correction signals, corrects the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current based on the abnormal state type of the reduction furnace, obtaining the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current, and sends a feedback signal to the execution unit. The execution unit is also used to receive the feedback signal and control the reduction furnace based on the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current.

[0241] Specifically, the correction process of the correction unit is as follows: if the reduction furnace is in an abnormal atomization state, then the reduction furnace is corrected for atomization; if the reduction furnace is in a phase loss state, then the reduction furnace is corrected for phase loss.

[0242] More specifically, the atomization correction process is as follows: If the reduction furnace is determined to be in a clear atomization state, the voltage setting is reduced by 0.1%-1.0%, starting from 40 hours and executed every 2 hours. If the reduction furnace is determined to be in a light atomization state, the voltage setting is increased by 0.1%-1.2%, executed every hour. If the reduction furnace is determined to be in a moderate atomization state, the total voltage setting is increased by 0.1%-1.4%, and the TCS flow rate is reduced by 30 kg / h-150 kg / h, executed every hour. If the reduction furnace is determined to be in a heavy atomization state, the total voltage setting is increased by 0.1%-1.6%, and the TCS flow rate is reduced by 30 kg / h-200 kg / h, executed every hour, and a current increase / decrease operation is performed, meaning the current remains constant throughout this hour.

[0243] The phase loss correction process is as follows: The second correction module can be a control module built on computer equipment, used to correct phase loss in the reduction furnace. Its execution process is as follows: If it is determined that 4 pairs of rods are missing, the TCS flow rate is reduced by 250-500 kg, the current of the remaining five phases is increased by 3A-12A, and the hydrogen flow rate decreases according to the original ratio after 1 hour. That is, the hydrogen flow rate must decrease by the same proportion as the TCS flow rate reduction. If it is determined that 8 pairs of rods are missing, the TCS flow rate is reduced by 300-800 kg, the current of the remaining five phases is increased by 6A-20A, and the hydrogen flow rate decreases according to the original ratio after 1 hour. That is, the hydrogen flow rate must decrease by the same proportion as the TCS flow rate reduction. Specifically, the molar ratio between the TCS flow rate and the hydrogen flow rate is (H2 / 2.02) / (TCS / 135.5).

[0244] In this embodiment, the device also includes a switching module, which is connected to the DCS control system and the aforementioned control modules and correction module, respectively. The switching module is used to exit the automatic control mode and switch the reduction furnace to manual intervention mode when a phase loss occurs in the reduction furnace.

[0245] Specifically, the switching module executes as follows: it acquires the phase loss status; it acquires the real-time total voltage and the baseline voltage; if it determines that two or more phases are missing, it issues a phase loss alarm, exits the control mode, and switches to DCS control; if it determines that the real-time total voltage is lower than 0.85-0.95 times the baseline voltage, it issues a voltage alarm, exits the control mode, and switches to DCS control, i.e., manual intervention mode.

[0246] In this embodiment, a data exchange module is also included. Specifically, the data exchange module is connected to both the NRT and DCS systems and is used to exchange data between the NRT and DCS systems during the production process of the reduction furnace.

[0247] Specifically, in this embodiment, the switch is the SICOM3024P switch from Dongtu Technology, which supports DT-Ring and DRP protocols, with a self-healing time of <50ms. It also supports RSTP / MSTP, is compatible with STP and other redundant networking mechanisms, has EMC level 3, and has an IP40 protection rating.

[0248] In this embodiment, the power supply used by this control device is a Zhejiang Zhongkong PW733 model, with the following main specifications: Input AC200-240V, Output DC24V / 20A. The fuse terminal is a Weidmüller SAKSI4LD, 24VAC / DC with indicator light. DIN standard DIN rails and Cat5e engineering network cables are used.

[0249] In summary, this control device integrates multiple tasks such as on-site condition perception, intelligent optimization of the reduction furnace, real-time control, and production management into an innovative industrial system with autonomous intelligent decision-making capabilities, ensuring system safety and controllability.

[0250] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A method for controlling the production process of a reduction furnace, characterized in that, include: S1: Obtain the cumulative atomization value and six-phase current value of the reduction furnace; S2: Obtain the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace; S3: Based on the atomization cumulative value and the six-phase current value, determine whether the reduction furnace is in an abnormal state; S4: Control the reduction furnace according to the abnormal state determination result, the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current; S3 specifically includes: determining the atomization state in the reduction furnace based on the accumulated atomization value; when the accumulated atomization value is greater than a first atomization threshold and less than a second atomization threshold, determining that the reduction furnace is in a stable atomization state. Based on the six-phase current values, determine whether there is a phase loss in the reduction furnace. Based on the atomization state and phase loss state in the reduction furnace, it is determined whether the reduction furnace is in an abnormal state: if the reduction furnace is in a stable atomization state and there is no phase loss state, it is determined that the reduction furnace is not in an abnormal state; otherwise, it is determined that the reduction furnace is in an abnormal state.

2. The method according to claim 1, characterized in that, Step S2 specifically includes: S21: Obtain the material meter setting data and real-time voltage of the reduction furnace; S22: Obtain the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace based on the feed table settings and real-time voltage of the reduction furnace. The material setting data includes the gold voltage curve, current setting value, TCS setting flow rate, and hydrogen setting flow rate. Step S22 specifically includes: S221: Based on the TCS set flow rate, the real-time flow rate of the reduction furnace is obtained; S222: Based on the real-time voltage, the gold voltage curve, and the hydrogen set flow rate, the real-time hydrogen flow rate of the reduction furnace is obtained; S223: The real-time current in the reduction furnace is obtained based on the current setting value, the real-time hydrogen flow rate, and the hydrogen setting flow rate.

3. The method according to claim 2, characterized in that, Step S222: Obtaining the real-time hydrogen flow rate of the reduction furnace based on the real-time voltage, the gold voltage curve, and the set hydrogen flow rate, specifically includes: The gold voltage curve is decomposed into multiple standard periods to obtain the voltage setting value corresponding to each standard period. The real-time hydrogen flow rate of the reduction furnace in each standard cycle is obtained based on the real-time voltage, the voltage set value, and the hydrogen set flow rate.

4. The method according to claim 3, characterized in that, The step of obtaining the real-time hydrogen flow rate of the reduction furnace within each standard cycle based on the real-time voltage, the voltage setpoint, and the hydrogen set flow rate specifically includes: Within the initial standard cycle, hydrogen is supplied to the reduction furnace according to the set hydrogen flow rate, thereby obtaining the real-time hydrogen flow rate within the initial standard cycle. In each subsequent standard cycle, the actual voltage in the reduction furnace within the current standard cycle is acquired once, and the difference A between the actual voltage and the voltage set value is calculated. The real-time hydrogen flow rate in the reduction furnace is controlled based on the difference A. If the difference A between the actual voltage and the voltage set value is greater than 0, then the hydrogen flow rate in the reduction furnace is reduced until the actual voltage is equal to the voltage set value, thereby obtaining the real-time hydrogen flow rate in the current standard cycle. If the difference A between the actual voltage and the voltage set value is 0, then the hydrogen flow rate in the reduction furnace is kept constant, thereby obtaining the real-time hydrogen flow rate in the current standard cycle. If the difference A between the actual voltage and the voltage set value is less than 0, then the hydrogen flow rate in the reduction furnace is increased until the actual voltage is equal to the voltage set value, thereby obtaining the real-time hydrogen flow rate in the current standard cycle. This cycle continues until the control process ends.

5. The method according to claim 4, characterized in that, Step S223: Obtaining the real-time current in the reduction furnace based on the current set value, the real-time hydrogen flow rate, and the hydrogen set flow rate, including: During the first three standard cycles, current is supplied to the reduction furnace according to the current setting value, thereby obtaining the real-time current during the first three standard cycles. Every three standard cycles thereafter, the current setting value is adjusted once based on the real-time hydrogen flow rate and the set hydrogen flow rate to obtain the current real-time current. This cycle continues until the control process ends.

6. The method according to claim 5, characterized in that, Every three standard cycles thereafter, the current setting value is adjusted once based on the real-time hydrogen flow rate and the set hydrogen flow rate to obtain the current real-time current, specifically including: Compare the real-time hydrogen flow rate with the set hydrogen flow rate: If the real-time hydrogen flow rate is greater than the set hydrogen flow rate, then the current set value is subtracted from the first current adjustment value to obtain the current real-time current. If the real-time hydrogen flow rate is less than or equal to the set hydrogen flow rate, then the difference between the real-time hydrogen flow rate and the set hydrogen flow rate is calculated, and the hydrogen difference threshold for the reduction furnace is obtained: If the value of the difference is less than or equal to the difference threshold, the current setting value of the previous cycle is maintained to obtain the current real-time current. If the difference value is greater than the difference threshold, the current setting value is increased by a second current adjustment value to obtain the current real-time current.

7. The method according to claim 1, characterized in that, The step of determining the atomization state of the reduction furnace based on the cumulative atomization value specifically includes: The atomization threshold of the reduction furnace is obtained. The atomization threshold includes the first atomization threshold, the second atomization threshold, and also includes the third atomization threshold and the fourth atomization threshold, wherein the first atomization threshold, the second atomization threshold, the third atomization threshold and the fourth atomization threshold increase sequentially. Compare the atomization threshold with the cumulative atomization value: If the cumulative atomization value is less than or equal to the first atomization threshold, it is determined that the reduction furnace is currently in a clear atomization state; If the cumulative atomization value is greater than the first atomization threshold and less than the second atomization threshold, then the reduction furnace is determined to be in a stable atomization state. If the cumulative atomization value is greater than or equal to the second atomization threshold and less than the third atomization threshold, then the reduction furnace is determined to be in a light atomization state. If the cumulative atomization value is greater than or equal to the third atomization threshold and less than the fourth atomization threshold, then the reduction furnace is determined to be in a moderate atomization state. If the cumulative atomization value is greater than or equal to the fourth atomization threshold, then the reduction furnace is determined to be in a state of heavy atomization.

8. The method according to claim 1, characterized in that, The step of determining whether there is a phase loss in the reduction furnace based on the six-phase current values ​​specifically includes: The six-phase current values ​​include the current values ​​of phase A1, phase B1, phase C1, phase A2, phase B2, and phase C2. If all six phase current values ​​are not 0, it is determined that the reduction furnace does not have a phase loss state; If the current of phase A2 and / or phase C2 is 0, it is determined that the reduction furnace is in a phase loss state, and is in a state of missing 4 pairs of rods. If the current of phases A1, B1, C1 and / or B2 is 0, it is determined that there is a phase loss state in the reduction furnace, and that there is a phase loss of 8 pairs of rods.

9. The method according to claim 3, characterized in that, Step S4: Based on the abnormal state determination result and the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current, the reduction furnace is controlled, specifically including: If it is determined that the reduction furnace is not in an abnormal state, the reduction furnace is controlled according to the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current. If it is determined that the reduction furnace is in an abnormal state, the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current are corrected according to the type of abnormal state of the reduction furnace to obtain the corrected real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current. The reduction furnace is controlled based on the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current.

10. The method according to claim 9, characterized in that, The types of abnormal states include: atomization abnormal state and phase loss state; The step of correcting the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current based on the abnormal state type of the reduction furnace specifically includes the following steps: If the reduction furnace is in an abnormal atomization state, then the atomization of the reduction furnace shall be corrected. If the reduction furnace is in a phase loss state, then the phase loss correction of the reduction furnace shall be performed.

11. The method according to claim 10, characterized in that, The atomization abnormal state refers to the reduction furnace being in one of the following states: clear atomization, light atomization, moderate atomization, and heavy atomization. If the reduction furnace is in an abnormal atomization state, then the atomization of the reduction furnace is corrected, specifically including: If the reduction furnace is in a clear atomization state: The real-time TCS flow rate remains unchanged, and the atomization-corrected real-time TCS flow rate is obtained. The current voltage setting value is reduced by a first voltage correction value to obtain the atomization-corrected voltage setting value; Based on the real-time voltage, the atomization-corrected voltage setting value, and the hydrogen setting flow rate, step S222 is executed to obtain the atomization-corrected real-time hydrogen flow rate. Based on the current setting value, the atomization-corrected real-time hydrogen flow rate, and the hydrogen setting flow rate, step S223 is executed to obtain the atomization-corrected real-time current. This atomization correction is now complete; If the reduction furnace is in a slightly atomized state: The real-time TCS flow rate remains unchanged, and the atomization-corrected real-time TCS flow rate is obtained. Increase the current voltage setting value by a second voltage correction value to obtain the atomization-corrected voltage setting value; Based on the real-time voltage, the atomization-corrected voltage setting value, and the hydrogen setting flow rate, step S222 is executed to obtain the atomization-corrected real-time hydrogen flow rate. Based on the current setting value, the atomization-corrected real-time hydrogen flow rate, and the hydrogen setting flow rate, step S223 is executed to obtain the atomization-corrected real-time current. This atomization correction is now complete; If the reduction furnace is in a moderate atomization state: The real-time TCS flow rate is reduced by a first flow correction value to obtain the atomized real-time TCS flow rate. Increase the current voltage setting value by a third voltage correction value to obtain the atomization-corrected voltage setting value; Based on the real-time voltage, the atomization-corrected voltage setting value, and the hydrogen setting flow rate, step S222 is executed to obtain the atomization-corrected real-time hydrogen flow rate. Based on the current setting value, the atomization-corrected real-time hydrogen flow rate, and the hydrogen setting flow rate, step S223 is executed to obtain the atomization-corrected real-time current. This atomization correction is now complete; If the reduction furnace is in a heavily atomized state: The real-time TCS flow rate is reduced by a second flow correction value to obtain the atomized real-time TCS flow rate. Increase the current voltage setting value by a fourth voltage correction value to obtain the atomization-corrected voltage setting value; Based on the real-time voltage, the atomization-corrected voltage setting value, and the hydrogen setting flow rate, step S222 is executed to obtain the atomization-corrected real-time hydrogen flow rate. Stop executing step S223, and the real-time current remains unchanged to obtain the atomization-corrected real-time current; This atomization correction is now complete.

12. The method according to claim 10, characterized in that, The phase loss state refers to the reduction furnace being in a state of missing 4 pairs of rods or missing 8 pairs of rods. If the reduction furnace is in a phase loss state, the phase loss correction of the reduction furnace is performed, specifically including the following steps: If the phase loss state in the reduction furnace is determined to be a loss of 4 pairs of rods: The real-time TCS flow rate is reduced by the third flow rate correction value to obtain the phase loss corrected real-time TCS flow rate. Based on the third flow correction value, the real-time hydrogen flow rate is reduced proportionally to obtain the real-time hydrogen flow rate after phase loss correction. as well as, The real-time current is increased by the first regulating current value to obtain the real-time current after phase loss correction. This phase loss correction is now complete; If the phase loss state in the reduction furnace is determined to be a loss of 8 pairs of rods: The TCS real-time flow is reduced by the fourth flow correction value to obtain the TCS real-time flow after phase loss correction. Based on the fourth flow correction value, the real-time hydrogen flow rate is reduced by the specified ratio to obtain the real-time hydrogen flow rate after phase loss correction. as well as, The real-time current is increased by the second regulating current value to obtain the real-time current after phase loss correction. This phase loss correction is now complete.

13. A control device for a reduction furnace production process, characterized in that, It includes a data acquisition module, a processing module, a judgment module, and a control module; The acquisition module is used to obtain the cumulative atomization value and six-phase current value of the reduction furnace; The processing module is used to acquire the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace. The judgment module is connected to the acquisition module and is used to determine whether the reduction furnace has an abnormal state based on the atomization cumulative value and the six-phase current value. The control module is connected to the processing module and the judgment module respectively, and is used to control the reduction furnace according to the judgment result of the abnormal state, the real-time flow rate of TCS, the real-time flow rate of hydrogen, and the real-time current. The judgment module includes a first judgment unit, a second judgment unit, and a third judgment unit; The first judgment unit, connected to the acquisition module, is used to determine the atomization state in the reduction furnace based on the cumulative atomization value. When the cumulative atomization value is greater than a first atomization threshold and less than a second atomization threshold, the reduction furnace is determined to be in a stable atomization state. When the atomization state in the reduction furnace is determined to be a stable atomization state, a first state signal is issued; otherwise, a second state signal is issued. The second judgment unit, connected to the acquisition module, is used to determine whether there is a phase loss state in the reduction furnace based on the six-phase current values: when it is determined that there is no phase loss state in the reduction furnace, a third state signal is issued; otherwise, a fourth state signal is issued. The third judgment unit, connected to the first judgment unit and the second judgment unit, is used to determine whether there is an abnormal state in the reduction furnace based on the atomization state and phase loss state in the reduction furnace: When both the first status signal and the third status signal are received simultaneously, it is determined that the reduction furnace is not in an abnormal state and an execution signal is issued. When either the second state signal or the fourth state signal is received, it is determined that the reduction furnace is in an abnormal state, and a correction signal is issued.

14. The apparatus according to claim 13, characterized in that, The processing module includes a first processor and a second processor; The first processor is used to acquire the feed meter setting data and real-time voltage of the reduction furnace; wherein, the feed meter setting data includes the gold voltage curve, current setting value, TCS setting flow rate and hydrogen setting flow rate; The second processor, connected to the first processor, is used to obtain the real-time TCS flow rate, real-time hydrogen flow rate, and real-time current of the reduction furnace based on the feed table setting data and real-time voltage of the reduction furnace. The second processor includes a first computing unit, a second computing unit, and a third computing unit. The first computing unit, connected to the first processor, is used to obtain the real-time TCS flow rate of the reduction furnace based on the TCS set flow rate. The second calculation unit, connected to the first processor, is used to determine the real-time hydrogen flow rate of the reduction furnace based on the real-time voltage, the gold voltage curve, and the hydrogen set flow rate. The third computing unit is connected to the first processor and the second computing unit, and is used to calculate the real-time current in the reduction furnace based on the current setting value, the real-time hydrogen flow rate and the hydrogen setting flow rate.

15. The apparatus according to claim 14, characterized in that, The control module includes a correction unit and an execution unit; The execution unit is connected to the third judgment unit and is used to receive the execution signal and, upon receiving the execution signal, control the reduction furnace according to the real-time flow rate of the TCS, the real-time flow rate of hydrogen, and the real-time current. The correction unit is connected to the third judgment unit and the execution unit respectively. It is used to receive the correction signal and, upon receiving the correction signal, correct the real-time flow rate of TCS, the real-time flow rate of hydrogen and the real-time current according to the abnormal state type of the reduction furnace to obtain the corrected real-time flow rate of TCS, the real-time flow rate of hydrogen and the real-time current, and send a feedback signal to the execution unit. The execution unit is also used to receive the feedback signal and control the reduction furnace according to the corrected real-time TCS flow rate, real-time hydrogen flow rate, and real-time current.

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