Liquid ejecting head and liquid ejecting apparatus

Abstract

A liquid ejection head includes: an array of ejection ports; pressure chambers respectively corresponding to and communicating with the ejection ports; individual supply channels and individual collection channels communicating with the pressure chambers; a common supply channel communicating with surfaces of the individual supply channels opposite the surfaces of the individual supply channels communicating with the pressure chambers; a common collection channel communicating with surfaces of the individual collection channels opposite the surfaces of the individual collection channels communicating with the pressure chambers; and a damper member forming a wall of a portion of the passage in the common collection channel. A wall of a portion of the passage in the common supply channel is not formed by the damper member. The common supply channel and the common collection channel are formed to extend in a first direction along the array of ejection ports, and are disposed side by side in a second direction crossing the array of ejection ports.

Description

Technical Field

[0001] This disclosure relates to a liquid jet head and a liquid jetting device. Background Technology

[0002] In liquid jet heads that spray liquid, a phenomenon known as crosstalk occurs, where pressure fluctuations arise in response to liquid ejection and propagate through the liquid channel to other pressure chambers, affecting jet characteristics. Crosstalk causes fluctuations in jet velocity or jet volume and can adversely affect image quality.

[0003] As a means of suppressing this crosstalk, a configuration is known in which the liquid channel is equipped with a damper to absorb pressure. To achieve sufficient crosstalk suppression, the damper area needs to be wide enough. Incidentally, in recent years, to obtain high image quality, the injection ports in the liquid jet head need to be densely packed. The denser the injection ports are arranged, the greater the impact of crosstalk becomes, and the wider the required damper area becomes.

[0004] Japanese Patent Publication No. 2019-155909 (hereinafter referred to as Document 1) discloses a liquid injection head in which injection ports are arranged along the longitudinal direction of a substrate to form an injection port array. Furthermore, a rectangular pressure chamber is provided for each injection port. For each pressure chamber, a separate supply channel and a separate collection channel are provided. The separate supply channel and the separate collection channel communicate with a common supply channel and a common collection channel of branches. In Document 1, the common supply channel and the common collection channel of branches extend along the transverse direction of the substrate. Furthermore, the common supply channel and the common collection channel of branches are alternately arranged along the longitudinal direction of the substrate, and the injection port array extends along said longitudinal direction. In Document 1, a portion of the wall of these branch channels acts as a damper and absorbs pressure from the pressure chamber, thereby suppressing crosstalk.

[0005] In the configuration disclosed in Reference 1, the length of the dampers is limited because they extend along the lateral direction of the substrate. This leads to a problem that sufficient damping effect cannot be obtained, resulting in low crosstalk suppression. Suppose that the common channel of each branch in Reference 1 is manufactured to be longer, thus making the substrate longer in the lateral direction to achieve a damping effect. In this case, the pressure loss in the common channel of each branch may be too large, preventing proper ink supply. Furthermore, in Reference 1, the dampers are located at both the common supply channel and the common collection channel of the branches. Therefore, the width of the dampers is very narrow, making it impossible to achieve a sufficient damping effect. Summary of the Invention

[0006] A liquid jet head according to one aspect of the present disclosure includes: a jet port configured to jet a liquid; a jet port array, the jet port array being an array of a plurality of jet ports; a plurality of pressure chambers, each pressure chamber corresponding to and communicating with the plurality of jet ports; a plurality of separate supply channels, each separate supply channel corresponding to and communicating with the plurality of pressure chambers; a plurality of separate collection channels, each separate collection channel corresponding to and communicating with the plurality of pressure chambers; a common supply channel communicating with the plurality of separate supply channels, the common supply channel communicating with a surface of the separate supply channels, the surface of the separate supply channels being opposite to a surface of the separate supply channels communicating with the pressure chambers; a common collection channel communicating with the plurality of separate collection channels, the common collection channel communicating with a surface of the separate collection channels, the surface of the separate collection channels being opposite to a surface of the separate collection channels communicating with the pressure chambers; and a damper member forming a wall of a portion of a channel in the common collection channel. A portion of the wall of the common supply channel is not formed by a damper member. The common supply channel and the common collection channel are formed to extend in a first direction along the injection port array, and the common supply channel and the common collection channel are arranged side by side in a second direction intersecting the injection port array.

[0007] Other features of the invention will become apparent from the following description of exemplary embodiments, with reference to the accompanying drawings. Attached Figure Description

[0008] Figure 1 This is a schematic view of the printing equipment;

[0009] Figures 2A to 2C This is a view illustrating the liquid injection head;

[0010] Figure 3A and Figure 3B This is a view illustrating the liquid jetting substrate;

[0011] Figure 4A and Figure 4B This is a plan view illustrating the channel portion in the liquid jetting substrate;

[0012] Figure 5A and Figure 5B This is a view showing the cross-section around the injection port;

[0013] Figure 6 This is a view showing the cross-section around the injection port;

[0014] Figure 7 This is a view showing the cross-section around the injection port;

[0015] Figure 8 It is a view showing the cross-section around the injection port; and

[0016] Figure 9 This is a view showing the cross-section around the injection port. Detailed Implementation

[0017] Preferred embodiments of this disclosure will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of this disclosure, and not all combinations of features described in the following embodiments are necessary for the solutions provided by this disclosure.

[0018] First Embodiment

[0019] The liquid ejector head and liquid ejection apparatus according to a first embodiment will be described below with reference to the accompanying drawings. In this embodiment, a liquid ejector head and inkjet printing apparatus for ejecting ink will be described as examples, but this embodiment is not limited to this example. The liquid ejector head and liquid ejection apparatus according to this disclosure can be applied to devices such as printers, copiers, fax machines with communication systems, and word processors with printer units, as well as industrial printing equipment combining various processing devices. For example, the liquid ejector head and liquid ejection apparatus according to this disclosure can be used in applications such as manufacturing biochips and printed electronic circuits. Furthermore, the liquid to be ejected is not limited to ink.

[0020] Overview of Printing Equipment

[0021] Figure 1 This is a schematic view of a printing device 101 representing an example of a liquid jetting device in this embodiment. Figure 1 The printing device 101 has a single-pass liquid ejector head module 1 (hereinafter referred to as "liquid ejector head 1") that prints an image on the printing medium 111 while moving the printing medium 111 once. Ejection ports (also referred to as "nozzles") are arranged along the sides of the liquid ejector head 1 across the entire width of the printing medium 111. In this embodiment, the liquid ejector head 1 supports four colors: cyan (C), magenta (M), yellow (Y), and black (K). More specifically, the liquid ejector head 1 includes liquid ejector heads 1Ca and 1Cb for cyan (C) ink and liquid ejector heads 1Ma and 1Mb for magenta (M) ink. The liquid ejector head 1 also includes liquid ejector heads 1Ya and 1Yb for yellow (Y) ink and liquid ejector heads 1Ka and 1Kb for black (K) ink. The printing medium 111 is conveyed by the transport unit 110 in the direction of arrow A, and printing is performed on the printing medium by the liquid ejector head 1. Note that... Figure 1The printing device 101 shown is merely an example and can be configured such that one or more liquid jet heads 1 of any type can be mounted thereon. For example, the printing device 101 may have only one type of liquid jet head or multiple types of liquid jet heads in addition to the four types.

[0022] Configuration of Liquid Jet Heads

[0023] Figures 2A to 2C This is a view illustrating the liquid injection head 1 in this embodiment. Figure 2A It is used for Figure 1 A perspective view of a liquid jetting head 1 of any color shown. The liquid jetting head 1 has a head body 4. Multiple liquid jetting substrates 2 are disposed within the head body 4. Figure 2A Four liquid jetting substrates 2 are provided. Each liquid jetting substrate 2 includes multiple jetting ports 3. Ink to be jetted from the liquid jetting head 1 is supplied from an ink tank (not shown) through a common supply port (not shown) in the head body 4 to the liquid jetting substrate 2. The liquid jetting substrates 2 are arranged such that the ends of the array of jetting ports 3 extending in the X direction overlap each other when viewed in the Y direction. This arrangement of the liquid jetting substrates 2 enables printing with a long array of jetting ports.

[0024] Figure 2B This is a view of the liquid jetting substrate 2 as seen from the jetting port 3 side. Figure 2C This is a view of the liquid jetting substrate 2 as seen from the side opposite to the jetting port 3. The liquid jetting substrate 2 is composed of multiple substrates. (Example...) Figure 2B As shown, the liquid jetting substrate 2 includes a jetting port forming substrate 201. Jetting ports 3 are formed in the jetting port forming substrate 201. The jetting ports 3 are disposed along the longitudinal direction (X direction, first direction) of the liquid jetting substrate 2 (jetting port forming substrate 201), and form a jetting port array. In the jetting port forming substrate 201, a plurality of such jetting port arrays extending along the longitudinal direction of the substrate are arranged side-by-side in a direction intersecting the direction along which the jetting port arrays are located (i.e., the transverse direction of the substrate (Y direction, second direction)). Figure 2CAs shown, a channel forming substrate 204 is disposed on the side of the liquid jetting substrate 2 opposite to the side that forms the jetting port 3. A plurality of connecting channels 15 are formed in the channel forming substrate 204. In this embodiment, each liquid jetting head 1 is configured to circulate ink therein. Ink is supplied to and collected from the liquid jetting substrate 2 through the connecting channels 15 formed in the channel forming substrate 204. The ink supplied to the liquid jetting substrate 2 passes through channels inside the substrate and is ejected from the jetting port 3, and applied to the printing medium 111. In the head body 4, an electrical substrate (not shown) is provided for supplying the power and signals required for ejection from the jetting port 3. This electrical substrate is connected to terminals 10 on each liquid jetting substrate 2 via wiring (not shown). Note that... Figures 2A to 2C The examples described herein are merely examples of this embodiment, and the liquid injection head 1 can be configured in any form.

[0025] Configuration of Liquid Jetting Substrate

[0026] Figure 3A and Figure 3B This is a view illustrating the liquid jetting substrate 2 in this embodiment. Figure 3A It shows along Figure 2B A cross-sectional view of the IIIA-IIIA line in the diagram. Figure 3B yes Figure 3A A magnified view of some of the injection ports and their surroundings.

[0027] like Figure 3A As shown, each liquid jetting substrate 2 in this embodiment is formed as a laminated structure of multiple substrates. Specifically, the liquid jetting substrate 2 has five substrates—a jetting port forming substrate 201, a vibration substrate 202, a liquid supply substrate 203, a channel forming substrate 204, and a damper substrate 302. The liquid jetting substrate 2 is formed by fixing the damper substrate 302, which has a damper member 300, between the channel forming substrate 204 and the liquid supply substrate 203.

[0028] Will use Figure 3B A more detailed description is provided. A pressure chamber 5 communicating with the ejection port 3 is formed in the liquid ejection substrate 2. A pressure chamber 5 is formed for each ejection port 3. Furthermore, a piezoelectric element 6 is disposed on the deformable wall of each pressure chamber 5 formed by the vibrating substrate 202. By deforming the vibrating substrate 202, the piezoelectric element 6 can pressurize the liquid in the pressure chamber 5 and eject ink from the ejection port 3.

[0029] In the liquid supply substrate 203, separate supply channels 7 and separate collection channels 8 are formed for and communicate with the pressure chamber 5. Ink is supplied to the pressure chamber 5 from the separate supply channels 7 and ejected from the ejection port 3. Some ink can flow from the pressure chamber 5 to the separate collection channels 8. Multiple separate supply channels 7 are all connected to a first common supply channel 17 formed in the damper substrate 302. Multiple separate collection channels 8 are all connected to a first common collection channel 18 formed in the damper substrate 302. The wall of the first common collection channel 18 facing the separate collection channels 8 is formed by a damper member 300. A damper region 301 is provided opposite to the separate collection channels 8. The damper region 301 is the region near the wall (where the damper member 300 is formed) and is the region where a recessed space is formed in the channel forming substrate 204. In the event of pressure fluctuations, the damper member 300 can absorb pressure by using the recessed space provided in the channel forming substrate 204. The first common supply channel 17 and the first common collection channel 18 extend along the longitudinal direction of the liquid jetting substrate 2. In addition, a plurality of first common supply channels 17 and a plurality of first common collection channels 18 are alternately formed along the transverse direction of the liquid jetting substrate 2.

[0030] The first common supply channels 17 are all connected to the second common supply channels 27 formed in the channel forming substrate 204. Multiple connecting channels 15 are formed in the second common supply channels 27. Ink is supplied from the outside of the liquid jetting substrate 2 through these connecting channels 15. The first common collection channels 18 are all connected to the second common collection channels 28 formed in the channel forming substrate 204. Multiple connecting channels 15 are formed in the second common collection channels 28. Ink is collected to the outside of the liquid jetting substrate 2 through these connecting channels 15. The second common supply channels 27 and the second common collection channels 28 extend along the longitudinal direction of the liquid jetting substrate 2. Furthermore, the multiple second common supply channels 27 and the multiple second common collection channels 28 are alternately formed along the transverse direction of the liquid jetting substrate 2. Figure 3A and Figure 3B As shown, each first public supply channel 17 and its corresponding second public supply channel 27 together form a public supply channel. Similarly, each first public collection channel 18 and its corresponding second public collection channel 28 together form a public collection channel.

[0031] The injection port forming substrate 201, vibration substrate 202, liquid supply substrate 203, channel forming substrate 204, and damper substrate 302 can all be silicon substrates or the like. Furthermore, while an example of a discrete substrate has been described in this embodiment, the substrate is not limited to discrete substrates. The damper member 300 is made of an elastic material. For example, resin materials such as polyimide and polyamide can be used. Methods for forming openings in the damper member 300 include dry etching. In the case where the damper member is a photosensitive resin, patterning utilizing exposure can be employed.

[0032] As described above, each liquid jetting substrate 2 has: a first substrate (jet port forming substrate 201) in which a jetting port 3 is formed; a second substrate (vibration substrate 202) in which a pressure chamber 5 is formed; and a third substrate (liquid supply substrate 203) in which a separate supply channel 7 and a separate collection channel 8 are formed. The liquid jetting substrate 2 also has: a fourth substrate (damping substrate 302) which includes a damper member 300 and in which a first common supply channel 17 and a first common collection channel 18 are formed; and a fifth substrate (channel forming substrate 204) in which a second common supply channel 27 and a second common collection channel 28 are formed. Furthermore, the first substrate (jet port forming substrate 201), the second substrate (vibration substrate 202), the third substrate (liquid supply substrate 203), the fourth substrate (damper substrate 302), and the fifth substrate (channel forming substrate 204) are laminated in this order.

[0033] The channel forming substrate 204 has a first surface to be laminated to the damper substrate 302 and a second surface opposite to the first surface. Furthermore, the channel forming substrate 204 has through-holes (parts connecting the channels 15) penetrating the first and second surfaces. Additionally, a recess serving as the damper region 301 is formed in the first surface of the channel forming substrate 204. The through-holes and recesses are alternately arranged along the transverse direction (Y direction) of the liquid jet substrate 2.

[0034] Arrangement of Injection Ports and Dampers

[0035] Figure 4A and Figure 4B This is a plan view illustrating the channel portion in the liquid jet substrate 2. Figure 4A This is a plan view showing a comparative example. Figure 4B This is a plan view showing this embodiment. Figure 4A and Figure 4B A portion of the liquid jetting substrate 2 is shown. The longitudinal direction of the liquid jetting substrate 2 is the left-right direction (X direction) in the plane of the paper. The transverse direction of the liquid jetting substrate 2 is the up-down direction (Y direction) in the plane of the paper. Figure 4A and Figure 4BAs shown, multiple jet ports 3 are arranged along the longitudinal direction (X direction) of the liquid jetting substrate 2, forming a jet port array. The multiple jet port array thus formed is arranged along the transverse direction (Y direction) of the liquid jetting substrate 2.

[0036] Figure 5A and Figure 5B This is a view showing the cross-section around the injection port 3 in this embodiment. Figure 5A This is a cross-sectional view showing a comparative example. Figure 5B This is a cross-sectional view illustrating this embodiment. Specifically, Figure 5A It shows the result of Figure 4A The VA-VA line in the view indicates the cross section. Figure 5B It shows the result of Figure 4B The VB-VB line in the diagram indicates the view of the cross-section. For example... Figure 5A and Figure 5B As shown, a channel partition 16 formed by the damper substrate 302 is disposed between the first common supply channel 17 and the first common collection channel 18 in the damper substrate 302. The channel partition 16 of the damper substrate 302 is fixed to the liquid supply substrate 203 by an adhesive layer 19.

[0037] like Figure 3A , Figure 3B As shown in Figure 4, the second common supply channel 27 and the second common collection channel 28 are formed to extend along the direction of the jet port array (i.e., the longitudinal direction of the liquid jet substrate 2). Individual supply channels 7 communicating with the pressure chamber 5 are all connected to their respective second common supply channels 27 via corresponding first common supply channels 17. Individual collection channels 8 communicating with the pressure chamber 5 are all connected to their respective second common collection channels 28 via corresponding first common collection channels 18. The second common supply channel 27 and the second common collection channel 28 are formed to extend along the direction of the jet port array. This allows the pressure chambers 5 corresponding to each jet port 3 to form a jet port array adjacent to each other in their lateral directions. Therefore, the jet ports 3 are densely arranged in each liquid jet substrate 2 in this embodiment.

[0038] For example, in Figure 4A and Figure 4B In the middle, pressure chamber 5 is located in its transverse direction ( Figure 4A and Figure 4B The length in the X direction is 110 μm, and the pressure chamber 5 and the injection port 3 are arranged in the form of an injection port array at intervals of 150 dpi. Four such injection port arrays are arranged along the longitudinal direction of the pressure chamber 5. Figure 4A and Figure 4B The Y-direction of the pressure chamber 5 is offset from each other and is also offset along the transverse direction of the pressure chamber 5. Figure 4A and Figure 4BThe nozzles (in the X direction) are offset from each other. This arrangement enables a high jet port density of 600 dpi on the printing medium. In this embodiment, four jet port arrays are configured to achieve 600 dpi. Alternatively, this configuration could be an eight jet port array to achieve 1200 dpi.

[0039] With such a dense arrangement of injection ports 3, crosstalk may occur, in which pressure fluctuations in each pressure chamber 5 propagate to other pressure chambers 5 and affect injection characteristics. To address this issue, in this embodiment, a damper is disposed on a wall extending along the direction of the injection port array (which is the X direction). Specifically, a damper region 301 is disposed on the wall of the first common collection channel 18 extending in the longitudinal direction of the liquid injection substrate 2. Thus, the damper region 301 is larger than if the damper region were disposed in the transverse direction of the substrate, and therefore effectively absorbs pressure. Furthermore, the damper region 301 is disposed on the wall of the first common collection channel 18, and no damper region is disposed on the first common supply channel 17. Therefore, the dampers are arranged in a direction where the injection port array is arranged side by side ( Figure 4A and Figure 4B It has sufficient width in the Y direction.

[0040] The reason for installing the damper area only on one side of the channel

[0041] Next, we will use Figure 4A and Figure 5A The comparative examples shown and Figure 4B and Figure 5B The example shown in this embodiment illustrates why the damper region 301 is provided only on one side of the common channel in this embodiment. A comparative example shows an example where both the first common supply channel 17 and the first common collection channel 18 have damper regions 301. The example in this embodiment shows an example where the damper region 301 is provided only on the first common supply channel 17 or the first common collection channel 18 (e.g., the first common collection channel 18).

[0042] like Figure 4A As shown in the comparative example, with damper regions 301 disposed on both the first common supply channel 17 and the first common collection channel 18, it is assumed that the spacing between the injection port arrays is 1000 μm. If each damper region 301 is arranged side-by-side in the direction of the injection port arrays ( Figure 4A The width in the Y direction is approximately 500 μm, and the width of the second common supply channel 27 and the second common collection channel 28 is approximately 300 μm, so the width of the partition 16 between the channels can be 100 μm.

[0043] On the other hand, assuming similar Figure 4A In the example shown in this embodiment, the damper region 301 is only disposed on the first common collection channel 18, and the spacing between the injection port arrays is 1000 μm, as... Figure 4A As shown. The width of the first common collection channel 18 is 1200 μm, the width of the damper region 301 in the direction where the injection port array is arranged side by side is approximately 800 μm, the width of the second common collection channel 28 is approximately 300 μm, and the widths of the first common supply channel 17 and the second common supply channel 27 are 500 μm. Thus, the width of the partition between the channels can be 100 μm, such as... Figure 4A As shown.

[0044] A wider damper results in lower compliance and greater flexibility. Therefore, providing a larger damping width, as in this embodiment, allows for the formation of a reliable damper membrane (damper region 301) with high damping performance and high damper membrane stiffness. Furthermore, a larger channel width results in lower pressure loss and a more stable ink supply to the pressure chamber 5. In particular, pressure loss has a significant impact when the flow rate of the ink to be circulated is high. Preferably, the channel width of the second common supply channel 27 is as large as possible, as this allows for a stable ink supply to the pressure chamber 5. The width of the damper region 301 and the width of the common channel can be increased by providing the damper region 301 only in the common collection channel or the common supply channel, as described above. Specifically, by making the channel width of the common supply channel greater than the width of the common collection channel, ink can be stably supplied to the pressure chamber 5.

[0045] Note that simply increasing the damper width and channel width is not preferable, as this leads to problems such as increased substrate size. Furthermore, when forming damper regions 301 by fixing the damper member 300 to the damping substrate 302, for each damper region 301, edges are needed to fix the damper substrate 302 and the channel forming substrate 204. That is, the larger the number of damper regions 301, the larger the area used for fixing the edges. This may result in insufficient damper width and sufficient channel width. In this embodiment, damper regions 301 are only provided on a common channel on one side. This reduces the number of damper regions 301 and also makes it possible to provide sufficient damper width and sufficient channel width.

[0046] In this embodiment, an example of damper region 301 being disposed on the first common collection channel 18 has been described. Alternatively, the configuration may be such that damper region 301 is disposed on the first common supply channel 17. Figure 8This is a view showing an example in which the damper region 301 is disposed on the first common supply channel 17. (See image) Figure 8 As shown, even with damper region 301 only located on the common supply channel side, sufficient damper width can still be provided, thus suppressing crosstalk. In any case, by providing damper region 301 only on one side of the common channel, sufficient damper width and sufficient channel width can be provided.

[0047] In this embodiment, the widths of the first common supply channel 17 and the first common collection channel 18, which are connected to separate channels, make the first common collection channel 18 wider. Therefore, the damper region 301 is only provided on the first common collection channel 18, which has a wider channel width. In this embodiment, an example in which the width of the second common supply channel 27 is greater than the width of the second common collection channel 28 has been described, such as... Figure 4B and Figure 5B The example is illustrated. However, this embodiment is not limited to this example. The width of the second public supply channel 27 may be equal to or less than the width of the second public collection channel 28.

[0048] like Figure 8 In the variant shown, the widths of the first common supply channel 17 and the first common collection channel 18, which are connected to separate channels, can be such that the first common supply channel 17 is wider. In this case, the damper region 301 can be provided only on the first common supply channel 17, which has a larger channel width. In this case, the width of the second common supply channel 27 can also be greater than, equal to, or less than the width of the second common collection channel 28.

[0049] As previously described, each liquid injection head 1 in this embodiment is provided with multiple first common supply channels 17 and multiple first common collection channels 18. As mentioned above, in this embodiment, an example has been discussed where one of the common channels (preferably, the first common supply channel 17) does not have a damper region 301. Optionally, some of the first common supply channels 17 may have a damper region 301. Specifically, among the multiple first common supply channels 17, at least one first common supply channel 17 may not have a damper region 301, and some of the first common supply channels 17 may have a damper region 301.

[0050] Reasons for preferentially installing damper areas in public collection channels

[0051] Next, the reasons for preferably providing the damper region 301 on the first common collection channel 18 will be described. There is a possibility of crosstalk, in which the pressure generated in each pressure chamber 5 reaches the first common supply channel 17 and the first common collection channel 18 through the separate supply channel 7 and the separate collection channel 8, and then propagates to the other pressure chambers 5. In each liquid ejector head 1 of this embodiment, where ink circulates from the first common supply channel 17 to the first common collection channel 18 through the pressure chamber 5, the pressure in the first common collection channel 18 is set to be lower than the pressure in the first common supply channel 17. Therefore, the pressure from the pressure chamber 5 propagates more easily to the lower-pressure collection channel side. Furthermore, the higher the flow rate of the ink to be circulated, the greater the pressure difference between the supply channel and the collection channel, and the easier it becomes for the pressure to propagate to the collection channel. Therefore, providing the damper region 301 on the wall of the first common collection channel 18 at a position opposite to the separate collection channels 8 is more effective in suppressing crosstalk. Nevertheless, by providing the damper region 301 only on the common collection channel, crosstalk can still be sufficiently suppressed.

[0052] As described above, according to this embodiment, crosstalk can be suppressed while achieving a proper balance between damping performance and liquid flow rate.

[0053] Second Embodiment

[0054] In the first embodiment, an example has been described that includes a damper substrate 302, and a first common supply channel 17 and a first common collection channel 18 are formed in the damper substrate 302. In the second embodiment, an example in which the first common supply channel 17 and the first common collection channel 18 are formed in a liquid supply substrate 203 will be described.

[0055] Figure 6 This is a view showing the cross-section around the injection port 3 in this embodiment. Similar to... Figure 5B , Figure 6 This is a view showing the cross-section indicated by the VB-VB line in Figure 4. (As shown) Figure 6 As shown, in this embodiment, the individual supply channel 7 is connected to the first common supply channel 17 formed in the liquid supply substrate 203. The individual collection channel 8 is connected to the first common collection channel 18 formed in the liquid supply substrate 203.

[0056] Furthermore, in this embodiment, the damper member 300 is formed on the channel forming substrate 204. Additionally, the damper member 300 forms a wall of the first common collection channel 18 formed in the liquid supply substrate 203, the wall facing the individual collection channel 8. In this embodiment, by providing the damper member 300 on the channel forming substrate 204, the damper substrate 302 described in the first embodiment is omitted.

[0057] As described above, each liquid jetting substrate 2 in this embodiment has a first substrate (jet port forming substrate 201) in which a jetting port 3 is formed and a second substrate (vibration substrate 202) in which a pressure chamber 5 is formed. The liquid jetting substrate 2 also has a third substrate (liquid supply substrate 203) in which a separate supply channel 7, a separate collection channel 8, a first common supply channel 17, and a first common collection channel 18 are formed. The liquid jetting substrate 2 also has a fourth substrate (channel forming substrate 204) in which a second common supply channel 27 and a second common collection channel 28 are formed. Furthermore, the first substrate (jet port forming substrate 201), the second substrate (vibration substrate 202), the third substrate (liquid supply substrate 203), and the fourth substrate (channel forming substrate 204) are laminated in this order.

[0058] The liquid jetting substrate 2 is formed by fixing a substrate having a damper member 300. In the first embodiment, the damper substrate 302 having the damper member 300 is fixed to the liquid supply substrate 203 by an adhesive layer 19. On the other hand, in this embodiment, the channel forming substrate 204 having the damper member 300 is fixed to the liquid supply substrate 203. According to this embodiment, costs can be reduced and design flexibility can be increased. A description will be given below while comparing it with an example of the first embodiment.

[0059] exist Figure 5B In the example of the first embodiment shown, distance D represents the distance between the opening of the individual supply channel 7 and the adhesive layer 19. Distance D needs to be long enough that if the adhesive layer 19 extends, it will not close the opening of the individual supply channel 7. Therefore, the first common supply channel 17 and the first common collection channel 18 need to be designed taking into account the adhesive layer 19 and its adhesion area. On the other hand, as in... Figure 6 In the illustrated embodiment, forming the first common supply channel 17 and the first common collection channel 18 in the liquid supply substrate 203 eliminates the possibility of the adhesive layer 19 closing the openings of the individual supply channel 7 and the individual collection channel 8. This allows each individual channel and each common channel to be formed in the desired design. Furthermore, since the damper substrate 302 is omitted, the number of substrates to be bonded when forming the liquid jet substrate 2 is reduced. Reducing the number of substrates lowers costs, reduces the bonding costs required to bond the substrates, and, as previously mentioned, increases design freedom.

[0060] Figure 7 This is a view showing the modifications of this embodiment. Figure 7 This is a view showing the cross-section around injection port 3, and it is also a view showing the cross-section of the area around injection port 3. Figure 4B The VB-VB line in the diagram indicates the view of the cross-section. For example... Figure 7 As shown, a pattern of micropores can be formed in the region of the damper component 300 located between the second common supply channel 27 and the first common supply channel 17. In this way, the patterned region of the damper component 300 acts as a filter. Figure 7 In the example, a pattern with micropores is also provided in the region of the damper component 300 located between the second common collection channel 28 and the first common collection channel 18. For example... Figure 7 As shown in the example, the filter can be formed only on both the supply side and the collection side. Alternatively, the filter formed by the damper member 300 can be formed only between the first common supply channel 17 and the second common supply channel 27 on the supply side. Figure 7 The modifications shown are not limited to the second embodiment. These modifications also apply to the case where the damper region 301 is formed using a damper substrate 302 as described in the first embodiment. Specifically, in Figure 5A and Figure 5B In the configuration shown, a pattern can be formed on the portion of the damper member 300 located between the second common supply channel 27 and the first common supply channel 17 to impart a filtering function. Similarly, in Figure 5A and Figure 5B In the configuration shown, a pattern can be formed on the portion of the damper member 300 located between the second common collection channel 28 and the first common collection channel 18 to provide a filtering function.

[0061] In this embodiment, as described in the first embodiment, the configuration allows the first common supply channel 17 to be provided with a damper region 301. Figure 9 This is a view illustrating an example of this embodiment, wherein the first common supply channel 17 is provided with a damper region 301. (As shown...) Figure 9 As shown, even with damper region 301 only located on the public supply channel side, sufficient damper width can still be provided, and thus crosstalk can be suppressed.

[0062] Other embodiments

[0063] In the above embodiments, the piezoelectric element has been exemplarily described as a pressure generating element that generates pressure in a pressure chamber. Any element can be used as a pressure generating element. For example, a heating element that generates pressure by heating to produce bubbles can be used.

[0064] While the invention has been described with reference to exemplary embodiments, it will be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the appended claims is to be given the broadest interpretation in order to cover all such modifications and equivalent structures and functions.

Claims

1. A liquid injection head, comprising: A jet port configured to jet liquid; An injection port array, wherein the injection port array is an array of multiple injection ports; Multiple pressure chambers, each pressure chamber corresponding to and connected to the multiple injection ports; Multiple separate supply channels, each corresponding to and connected to one of the multiple pressure chambers; Multiple individual collection channels, each corresponding to and connected to one of the multiple pressure chambers; A common supply channel communicates with the plurality of individual supply channels, the common supply channel communicating with the surface of the individual supply channels, the surface of the individual supply channels being opposite to the surface of the individual supply channels communicating with the pressure chamber; A common collection channel communicates with the plurality of individual collection channels, the common collection channel communicating with the surface of the individual collection channels, the surface of the individual collection channels being opposite to the surface of the individual collection channels communicating with the pressure chamber; as well as A damper component, the damper component forming a wall of a portion of the channel in the common collection channel, wherein A portion of the wall of the channel in the public supply channel is not formed by the damper component. The common supply channel and the common collection channel are formed to extend in a first direction along the injection port array, and The common supply channel and the common collection channel are arranged side by side along a second direction intersecting the injection port array, and The separate supply channel and the separate collection channel are formed to extend along directions intersecting the first direction and the second direction.

2. The liquid jet head according to claim 1, wherein the width of the common collection channel in the second direction is greater than the width of the common supply channel in the second direction.

3. The liquid injection head according to claim 1 or 2, wherein Multiple injection port arrays are formed side by side along the second direction, and Multiple public supply channels and multiple public collection channels are provided, and the multiple public supply channels and multiple public collection channels are arranged alternately along the second direction, and A portion of the wall of at least one of the plurality of public supply channels is not formed by the damper component.

4. The liquid injection head according to claim 1 or 2, wherein in the first direction, the length of the injection port array is smaller than the length of the damper member.

5. The liquid injection head according to claim 1 or 2, further comprising: A first substrate, wherein the jetting port is formed in the first substrate; A second substrate, wherein the pressure chamber is formed in the second substrate; A third substrate, wherein the separate supply channel and the separate collection channel are formed; A fourth substrate, wherein the damper member is included at a portion of the channel in the common collection channel, and the common supply channel and the common collection channel are formed in the fourth substrate; as well as A fifth substrate, wherein a second common supply channel and a second common collection channel are formed, the second common supply channel being connected to the common supply channel and the second common collection channel being connected to the common collection channel, wherein... The first substrate, the second substrate, the third substrate, the fourth substrate, and the fifth substrate are laminated in this listed order.

6. The liquid injection head according to claim 5, wherein... The fifth substrate has: A through-hole, the through-hole penetrating a first surface to be laminated to the fourth substrate and a second surface that is the opposite surface to the first surface, and A depression, the depression being formed in the first surface, and The through hole and the recess are arranged side by side along the second direction.

7. The liquid injection head according to claim 5 further includes an adhesive layer disposed between the third substrate and the fourth substrate.

8. The liquid injection head according to claim 7, wherein the adhesive layer is disposed between the third substrate and the partition, the partition separating the common supply channel and the common collection channel in the fourth substrate.

9. The liquid injection head according to claim 1 or 2, further comprising: A first substrate, wherein the jetting port is formed in the first substrate; A second substrate, wherein the pressure chamber is formed in the second substrate; A third substrate, wherein the separate supply channel, the separate collection channel, the common supply channel, and the common collection channel are formed; as well as A fourth substrate, wherein the fourth substrate includes the damper member at a portion of the channel in the common collection channel, and a second common supply channel and a second common collection channel are formed in the fourth substrate, the second common supply channel communicating with the common supply channel and the second common collection channel communicating with the common collection channel, wherein... The first substrate, the second substrate, the third substrate, and the fourth substrate are laminated in this listed order.

10. The liquid injection head according to claim 9, wherein The fourth substrate has: A through-hole, the through-hole penetrating a first surface to be laminated to the third substrate and a second surface opposite to the first surface, and A depression, the depression being formed in the first surface, and The through hole and the recess are arranged side by side along the second direction.

11. The liquid injection head of claim 10, wherein the fourth substrate includes the damper member on the first surface to be laminated to the third substrate.

12. The liquid injection head according to claim 9 further includes an adhesive layer disposed between the third substrate and the fourth substrate.

13. The liquid injection head of claim 12, wherein the adhesive layer is disposed between the fourth substrate and the partition, the partition separating the common supply channel and the common collection channel in the third substrate.

14. The liquid injection head according to claim 1 or 2, wherein the damper member includes a patterned area in which holes are formed.

15. The liquid jet head of claim 14, wherein the patterned area is formed at a location other than the wall of a portion of the passage in the common collection channel and the common supply channel.

16. A liquid injection head, comprising: A jet port configured to jet liquid; An injection port array, wherein the injection port array is an array of multiple injection ports; Multiple pressure chambers, each pressure chamber corresponding to and connected to the multiple injection ports; Multiple separate supply channels, each corresponding to and connected to one of the multiple pressure chambers; Multiple individual collection channels, each corresponding to and connected to one of the multiple pressure chambers; A common supply channel communicates with the plurality of individual supply channels, the common supply channel communicating with the surface of the individual supply channels, the surface of the individual supply channels being opposite to the surface of the individual supply channels communicating with the pressure chamber; as well as A common collection channel communicates with the plurality of individual collection channels, the common collection channel communicating with the surfaces of the individual collection channels, the surfaces of the individual collection channels being opposite to the surfaces of the individual collection channels communicating with the pressure chamber, wherein... The common supply channel and the common collection channel have different widths in a second direction that intersects with the first direction along the injection port array, and The wall of a portion of the public supply channel or the public collection channel that has a greater width in the second direction is formed by a damper member, and The separate supply channel and the separate collection channel are formed to extend along directions intersecting the first direction and the second direction.

17. A liquid jetting device configured such that a liquid jet head can be mounted on the liquid jetting device, the liquid jet head comprising: A jet port configured to jet liquid; An injection port array, wherein the injection port array is an array of multiple injection ports; Multiple pressure chambers, each pressure chamber corresponding to and connected to the multiple injection ports; Multiple separate supply channels, each corresponding to and connected to one of the multiple pressure chambers; Multiple individual collection channels, each corresponding to and connected to one of the multiple pressure chambers; A common supply channel communicates with the plurality of individual supply channels, the common supply channel communicating with the surface of the individual supply channels, the surface of the individual supply channels being opposite to the surface of the individual supply channels communicating with the pressure chamber; A common collection channel communicates with the plurality of individual collection channels, the common collection channel communicating with the surface of the individual collection channels, the surface of the individual collection channels being opposite to the surface of the individual collection channels communicating with the pressure chamber; as well as A damper component, the damper component forming a wall of a portion of the channel in the common collection channel, wherein A portion of the wall of the channel in the public supply channel is not formed by the damper component. The common supply channel and the common collection channel are formed to extend in a first direction along the injection port array, and The common supply channel and the common collection channel are arranged side by side along a second direction intersecting the injection port array, and The separate supply channel and the separate collection channel are formed to extend along directions intersecting the first direction and the second direction.

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