High-precision bionic pressure sensor based on behavior of scorpion's slit sensillar array

Abstract

The application discloses a high-precision bionic pressure sensor based on the behavior of scorpion slit group receptor array, which comprises a circuit intelligent modulation baseplate, a bionic structure carrier, a sensing sink hole type slit group, a homogeneous temperature calibration module and a first signal connection terminal. The circuit intelligent modulation baseplate is used for adjusting the range detection interval of the bionic pressure sensor. The bionic structure carrier is arranged on the circuit intelligent modulation baseplate. The sensing sink hole type slit group is arranged on the bionic structure carrier. The homogeneous temperature calibration module is arranged on the bionic structure carrier. The first signal connection terminal is arranged on the bionic structure carrier and electrically connected with the sensing sink hole type slit group. The bionic pressure sensor can have high resolution and sensing accuracy for different range pressure sensing ranges through the control of the circuit intelligent modulation baseplate, and the defects of common sensing of multiple pressure sensors are abandoned, and the single pressure sensor can be used for the consideration of the range and sensing accuracy.

Description

Technical Field

[0001] This invention relates to the field of pressure sensor technology, and in particular to a high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array. Background Technology

[0002] With the development of aerospace technology, accurately measuring the pressure distribution across the surface, control surfaces, and air intake environment of a flight model has become an urgent requirement for flight development and is also one of the testing technologies that conventional supersonic large wind tunnels urgently need to address. In existing technologies, under large range conditions, silicon-based pressure sensors generally require a small aspect ratio for their stress-sensing films to withstand greater applied stress. However, a small aspect ratio makes it difficult to sense minute pressure loads, making it difficult to distinguish and assess minute pressure values ​​in noisy environments. Under small range conditions, silicon-based pressure sensors generally require a large aspect ratio for their stress-sensing films to sense minute pressure values. However, a large aspect ratio makes the film highly susceptible to damage. Furthermore, a large aspect ratio can cause stress dissipation due to the film's tendency to flex, leading to a rapid decrease in the linearity of the pressure sensor and compromising its sensing accuracy.

[0003] Therefore, under the complex airflow of wind tunnels and the interference noise of mechanical equipment, existing silicon-based pressure sensors cannot coordinate the issues of range and sensing accuracy, and their conventional sensing thin film working mechanism cannot guarantee the high accuracy requirements under different ranges.

[0004] Therefore, existing technologies still need to be improved and developed. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this invention is to provide a high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array, which aims to solve the problem that existing silicon-based pressure sensors cannot balance measurement range and sensing accuracy, and cannot guarantee high accuracy requirements under different measurement ranges.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0007] A high-precision biomimetic pressure sensor based on the behavior of a scorpion suture group receptor array, comprising:

[0008] A circuit intelligent modulation substrate is used to adjust the range detection interval of the bionic pressure sensor;

[0009] A biomimetic structural support is mounted on the intelligent modulation substrate of the circuit.

[0010] A sensing countersunk hole type slot assembly is disposed on the biomimetic structural support;

[0011] A homogeneous temperature calibration module is mounted on the biomimetic structural support.

[0012] The first signal terminal is disposed on the biomimetic structural support and is electrically connected to the sensing countersunk hole type slot assembly.

[0013] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit array sensor group, wherein the sensing countersinking slit group is composed of a transverse sensing countersinking slit group and a longitudinal sensing countersinking slit group; wherein the transverse sensing countersinking slit group includes several transverse sensing countersinking slit units, and the longitudinal sensing countersinking slit group includes several longitudinal sensing countersinking slit units.

[0014] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit array sensor is described above, wherein the sensing countersunk slit array comprises several sensing countersunk slit units.

[0015] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit sensor array includes a single sensing unit with a countersunk hole, comprising a transverse countersunk hole sensing structure, a longitudinal countersunk hole sensing structure, an electromechanical signal conversion unit disposed around the transverse and longitudinal countersunk hole sensing structures, an electronic transition region disposed between the electromechanical signal conversion unit and the transverse and longitudinal countersunk hole sensing structures, and a gold lead wire disposed on the electromechanical signal conversion unit.

[0016] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array, wherein the electromechanical signal conversion unit is a boron-doped piezoresistor.

[0017] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit array sensor is described above. The biomimetic structural support body consists of at least three support layers. The sensing countersunk slit array, the homogeneous temperature calibration module, and the first signal terminal are all disposed on the support layer away from the intelligent modulation substrate of the circuit.

[0018] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array includes a carrier layer near the intelligent modulation substrate of the circuit, which comprises several claw-shaped structure receiving cavities. Each claw-shaped structure receiving cavity contains several claw-shaped structures corresponding to the electromechanical signal conversion unit. The claw-shaped structures are arc-shaped structures with different curvatures.

[0019] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array further includes a packaging shell disposed on the intelligent modulation substrate of the circuit.

[0020] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array, wherein the encapsulation shell is made of metal or hard plastic.

[0021] The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array includes a smart modulation substrate comprising a second signal terminal and a multi-range detection scheme switching switch.

[0022] Beneficial Effects: This invention discloses a high-precision biomimetic pressure sensor based on the behavior of a scorpion slit array of receptors. Compared to traditional piezoresistive pressure sensors based on SOI silicon wafer design and Wheatstone bridge output mechanism, this invention's biomimetic pressure sensor, through intelligent modulation of the substrate, achieves high resolution and sensing accuracy across different pressure ranges. It overcomes the shortcomings of multiple pressure sensors sensing simultaneously, achieving a balance between range and sensing accuracy for a single pressure sensor. Furthermore, this invention utilizes an adaptive combination method of slit biomimetic structures with stress distributed at different thresholds, ensuring sufficient slit biomimetic structures work together within a small pressure range, thereby improving pressure detection sensitivity in this range. Simultaneously, this invention ensures that the slit biomimetic structures function independently within a larger pressure range, thus improving sensing accuracy at high pressure values. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array provided by the present invention.

[0024] Figure 2 This is a top view of the high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array provided by the present invention.

[0025] Figure 3 This is a magnified view of a portion of the slit-type pressure sensor, which is based on the behavior of a scorpion slit sensor array, and is used to sense the countersunk slit.

[0026] Figure 4 This is a schematic diagram of the structure of the sensing countersunk hole type slotted unit according to an embodiment of the present invention.

[0027] Figure 5 This is a schematic diagram of the biomimetic structural support body according to an embodiment of the present invention.

[0028] Figure 6 This is a magnified view of a homogeneous temperature calibration module of a high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array, provided by the present invention.

[0029] Figure 7 This is a diagram illustrating the composition strategy of the Wheatstone bridge provided in an embodiment of the present invention.

[0030] Figure 8 This is a diagram illustrating the composition strategy of the Wheatstone bridge provided in Embodiment 1 of the present invention.

[0031] Figure 9 This is a diagram illustrating the composition strategy of the Wheatstone bridge provided in Embodiment 2 of the present invention.

[0032] Figure 10 This is a diagram illustrating the composition strategy of the Wheatstone bridge provided in Embodiment 3 of the present invention.

[0033] Reference numerals: 10 for intelligent modulation of circuits, 20 for biomimetic structure carrier, 21 for claw-shaped structure accommodating cavity, 22 for claw-shaped structure, 30 for sensing countersunk hole type slot assembly, 31 for lateral sensing countersunk hole type slot assembly, 310 for lateral sensing countersunk hole type slot unit, 311 for lateral countersunk hole type slot sensing structure, 32 for longitudinal sensing countersunk hole type slot assembly, 320 for longitudinal sensing countersunk hole type slot unit, 321 for longitudinal countersunk hole type slot sensing structure, 330 for electromechanical signal conversion unit, 340 for Au lead wire, 350 for electronic transition region, 40 for homogeneous temperature calibration module, 41 for boron-doped varistor, 50 for first signal terminal, 60 for second signal terminal, and 70 for encapsulation shell. Detailed Implementation

[0034] This invention provides a high-precision biomimetic pressure sensor based on the behavior of a scorpion slit receptor array. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0035] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0036] Scorpion slit receptors, as hypersensitive biomechanical sensors, have been recognized by researchers in recent years. The latest patents and research progress mainly focus on their hypersensitive sensing characteristics. However, the wide threshold and high-precision stress sensing characteristics brought about by their special array arrangement behavior have not been disclosed to the public in terms of biological mechanisms and biomimetic manufacturing. This invention mainly reveals and designs and manufactures a high-precision pressure sensor based on the amazing behavior of the slit receptor array. The sensing strategy specifically exhibited in the sensing prototype is to achieve adaptive adjustment of the sensing threshold based on parallel and vertical biomimetic slit sensing structures, so as to realize accurate pressure measurement in large wind tunnels.

[0037] Based on this, the present invention provides a high-precision biomimetic pressure sensor based on the behavior of a scorpion suture group receptor array, see [link to relevant documentation]. Figure 1 It includes:

[0038] The intelligent modulation substrate 10 is used to adjust the range detection range of the bionic pressure sensor.

[0039] A biomimetic structural support 20 is disposed on the intelligent modulation substrate 10 of the circuit;

[0040] A sensing countersunk hole type slot assembly 30 is disposed on the biomimetic structural support 20;

[0041] A homogeneous temperature calibration module 40 is disposed on the biomimetic structural support 20;

[0042] The first signal terminal 50 is disposed on the biomimetic structure carrier 20 and is electrically connected to the sensing countersunk hole type slot assembly 30.

[0043] Specifically, compared to traditional piezoresistive pressure sensors based on SOI silicon wafer design and Wheatstone bridge output mechanism, the biomimetic pressure sensor of this invention, through intelligent modulation of the substrate, achieves high resolution and sensing accuracy across different pressure ranges. It overcomes the shortcomings of multiple pressure sensors working together, achieving a balance between range and sensing accuracy with a single pressure sensor. This invention utilizes an adaptive combination method of slit biomimetic structures with stress distributed at different thresholds, ensuring sufficient slit biomimetic structures work together within a small pressure range, thereby improving pressure detection sensitivity. Simultaneously, the pressure sensor ensures that the slit biomimetic structures function independently within a larger pressure range, thus improving sensing accuracy at high pressures. In other words, the sensing strategy of this biomimetic pressure sensor prioritizes improving sensitivity within a small pressure range and accuracy within a large pressure range, thus addressing the specific operating requirements across different pressure ranges.

[0044] Optionally, the sensing countersunk hole type slit assembly 30 is used to disperse and redistribute the sensed stress in the plane by drawing on the sensing strategy of biomimetic slit structures, concentrating most of the stress in the electromechanical signal conversion range, see [link to relevant documentation]. Figure 2 and Figure 3It consists of a transverse sensing countersunk hole type slot assembly 31 and a longitudinal sensing countersunk hole type slot assembly 32; wherein, the transverse sensing countersunk hole type slot assembly 31 includes a plurality of transverse sensing countersunk hole type slot units 310, and the longitudinal sensing countersunk hole type slot assembly 32 includes a plurality of longitudinal sensing countersunk hole type slot units 320; preferably, there are 8 units of each of the transverse sensing countersunk hole type slot units 310 and the longitudinal sensing countersunk hole type slot units 320.

[0045] In some embodiments, the sensing countersunk slot assembly 30 includes a plurality of sensing countersunk slot units; preferably, there are 16 sensing countersunk slot units, including 8 transverse sensing countersunk slot units 310 and 8 longitudinal sensing countersunk slot units 320.

[0046] In some implementations, see Figure 4 The sensing unit for countersunk hole type slots includes a transverse countersunk hole type slot sensing structure 311, a longitudinal countersunk hole type slot sensing structure 321, an electromechanical signal conversion unit 330 disposed around the transverse countersunk hole type slot sensing structure 311 and the longitudinal countersunk hole type slot sensing structure 321, an electronic transition region 350 disposed between the electromechanical signal conversion unit 330 and the transverse countersunk hole type slot sensing structure 311 and between the electromechanical signal conversion unit 330 and the longitudinal countersunk hole type slot sensing structure 321, and an Au (gold) lead 340 disposed on the electromechanical signal conversion unit 330.

[0047] Optionally, the electromechanical signal conversion unit 330 is a boron-doped varistor used to convert mechanical signals (such as stress) into electrical signals; the electron transition region 350 is the same as the varistor element doped in the electromechanical signal conversion unit 330, which is also boron, and its doping concentration is more than twice that of the signal conversion unit.

[0048] Specifically, the transverse countersunk hole type slot sensing structure 311 is located on both sides of the electromechanical signal conversion unit 330 and is parallel to the electromechanical signal conversion unit 330. Different transverse sensing countersunk hole type slot groups 31 have the same length of transverse countersunk hole type slot sensing structure 311, but different widths, in order to balance or combine different slot group types. The longitudinal countersunk hole type slot sensing structure 321 is distributed in the opposite direction to the transverse countersunk hole type slot sensing structure 311, and is alternately distributed between the electromechanical signal conversion units 330. Different longitudinal sensing countersunk hole type slot groups 32 have different lengths and widths of longitudinal countersunk hole type slot sensing structure 321, in order to balance or combine different slot group types. The slot group types formed by the transverse countersunk hole type slot sensing structure 311 and the longitudinal countersunk hole type slot sensing structure 321 with the help of the length and width of the countersunk hole type slot sensing structure are each no less than 6 groups, and the final formed slot group types need to exceed 12 groups to ensure that they can adapt to the sensing of different threshold pressure ranges.

[0049] Furthermore, the aforementioned no fewer than six transverse countersunk seam sensing structures 311 and no fewer than six longitudinal countersunk seam sensing structures 321 primarily differentiate between groups by adjusting the length and width of the countersunk seam sensing structures. The aforementioned length and width primarily function as follows: wider seam groups exhibit greater sensitivity to external stress in the transverse countersunk seam sensing structure 311, but exhibit lower linearity; wider or longer seam groups exhibit greater sensitivity to external stress in the longitudinal countersunk seam sensing structure 321, but also exhibit lower linearity. Selectively paralleling each seam group reduces its signal sensing sensitivity but improves linearity; conversely, selectively serially connecting each seam group improves linearity. While increasing the sensitivity of the signal increases linearity, it also reduces linearity. When dealing with a large external pressure range, parallel slit groups are often chosen because higher sensitivity is not required to detect or distinguish external pressure signals. However, linearity is usually difficult to guarantee over a large range, so improving linearity is necessary. Conversely, when dealing with a small external pressure range, series slit groups are often chosen because higher sensitivity is required to detect or distinguish external pressure signals, while linearity is usually better over a small range, so improving sensitivity is the primary goal. The series and parallel connection of these slit groups also facilitates the implementation of segmented linearization, mainly because different slit groups can segmentally detect pressure in different pressure ranges, further improving pressure sensing accuracy.

[0050] Optionally, see Figure 5 The biomimetic structural support 20 is composed of at least three support layers, wherein the sensing countersunk hole type slot assembly 30, the homogeneous temperature calibration module 40 and the first signal terminal 50 are all disposed on the support layer away from the intelligent modulation substrate 10; preferably, the biomimetic structural support 20 is composed of three support layers, wherein the elastic modulus of the middle layer is less than that of the upper and lower layers, so as to provide a gentle strain process during deformation and also provide stress buffer for the slot assembly structure.

[0051] In some embodiments, the carrier layer near the intelligent modulation substrate 10 includes several claw-shaped cavities 21. Each claw-shaped cavity 21 contains several claw-shaped structures 22 corresponding to the electromechanical signal conversion unit 330. The claw-shaped structures 22 are arc-shaped structures with different curvatures r, and their function is to optimize the stress distribution at the electromechanical signal conversion unit 330. A larger curvature r results in a more uniform stress distribution within a small area at the electromechanical signal conversion unit 330, improving the stress input quality. A smaller curvature r, compared to a larger curvature r, expands the area of ​​the uniform stress distribution region at the electromechanical signal conversion unit 330, but the uniformity is less than that of a larger curvature r. The distribution of arc-shaped structures with different curvatures r can be arbitrarily combined with different slit groups, further increasing the diversity of combinations. Furthermore, by utilizing the claw-shaped structures 22 at the bottom of the sensing film, the quality of the stress distribution (referring to the uniformity of the distributed stress) can be further optimized, and the contradiction between the sensing threshold and sensing accuracy can be further reconciled.

[0052] Optionally, the high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group sensor array further includes an encapsulation housing 70 disposed on the line intelligent modulation substrate 10.

[0053] In some embodiments, the packaging shell 70 is made of metal or hard plastic, and the bottom of the packaging shell 70 is sealed and glued to the circuit intelligent modulation substrate 10. It is provided with an air tube connected to a plastic air tube to introduce pressure signals to the sensor chip. Preferably, the packaging shell 70 is provided with an external packaging air inlet valve to quickly switch the air channel, which is used to package the sensor chip and switch the detection state of the sensor chip for different air channels.

[0054] In some implementations, see Figure 6 The homogeneous temperature calibration module 40 converts external temperature signals into voltage signals. Its material is the same as that of the electromechanical signal conversion unit 330, namely a boron-doped varistor 41. Its depth and width are the same as those of the electromechanical signal conversion unit 330, and its length is a multiple of that of the electromechanical signal conversion unit 330. Furthermore, the homogeneous temperature calibration module 40 is equipped with Au leads 340 and has the same electron transition region 350 as the electromechanical signal conversion unit 330. By utilizing the same material and environment as the electromechanical signal conversion unit 330, the homogeneous temperature calibration module 40 provides a precise multiple reference for subsequent temperature compensation, ensuring accurate compensation for temperature fluctuations. In addition, the homogeneous temperature calibration module 40 is not limited to temperature; it also provides calibration references for external humidity, magnetic fields, and environmental vibrations.

[0055] In some embodiments, the intelligent modulation substrate 10 includes: a second signal terminal block 60 and a multi-range detection scheme switching switch; the multi-range detection scheme switching switch can realize the switching of modulation strategies for pressure signal detection under small, medium, and large ranges, such as... Figure 7 As shown, the specific modulation strategy is to selectively pick out the transverse sensing countersunk hole type slit unit 310 and the longitudinal sensing countersunk hole type slit unit 320 and form a Wheatstone bridge. The change in the resistance of the electromechanical conversion unit is converted into a change in voltage and then output.

[0056] In summary, the working process of the high-precision biomimetic pressure sensor based on the behavior of a scorpion slit array receptor is as follows: the pressure signal from the surface of the object to be measured is introduced into a plastic tube, and then into a tube on the encapsulation shell. The plastic tube and the tube on the encapsulation shell are tightly fitted together. The gas pressure acts on the upper surface of the film, causing the film to flex downwards. At this time, stress changes occur inside the film, and the biomimetic structures at the bottom and top of the film optimize the redistribution of stress, so that the stress is uniformly and with high quality concentrated near the pressure-sensitive resistor (while ensuring linearity and sensitivity). Finally, the external gas pressure mechanical signal is converted into an electrical signal through the pressure-sensitive resistor, and the electrical signal is processed at the higher level to achieve overall pressure detection.

[0057] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of the present invention, not all embodiments, and are intended only to illustrate the present invention and not to limit it. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0058] Example 1

[0059] A high-precision biomimetic pressure sensor based on the behavior of a scorpion suture receptor array includes:

[0060] A circuit intelligent modulation substrate is used to adjust the range detection interval of the bionic pressure sensor;

[0061] A biomimetic structural support is mounted on the intelligent modulation substrate of the circuit.

[0062] The sensing countersunk hole type slot group is set on the biomimetic structure carrier, including the transverse sensing countersunk hole type slot group A1-A4 and C1-C4 composed of 8 transverse sensing countersunk hole type slot individual units and the longitudinal sensing countersunk hole type slot group B1-B4 and D1-D4 composed of 8 longitudinal sensing countersunk hole type slot individual units.

[0063] A homogeneous temperature calibration module is mounted on the biomimetic structural support.

[0064] The first signal terminal is disposed on the biomimetic structural support and is electrically connected to the sensing countersunk hole type slot assembly.

[0065] The Wheatstone bridge composition strategy for the high-precision biomimetic pressure sensor based on the behavior of scorpion suture receptor arrays to detect pressure signals in a small range (0-5 kPa) is as follows (e.g.) Figure 8 ):R A =R1=(A1+A2+C3+C4); R B =R2=(B2+B3+D1+D4); R C =R3=(A3+A4+C1+C2); R D =R4=(B1+B4+D2+D3).

[0066] Example 2

[0067] The Wheatstone bridge composition strategy for pressure signal detection in a medium range (5-500 kPa) based on the high-precision biomimetic pressure sensor based on the behavior of the scorpion suture sensor array in Example 1 is as follows (e.g.) Figure 9 ):R A =(R3+R7) / (R3×R7)=(A1+A2+C3+C4) / ((A1+A2)×(C3+C4)); R B =(R4+R8) / (R4×R6)=(B2+B3+D1+D4) / ((B2+B3)×(D1+D4)); R C =(R1+R5) / (R1×R5)=(A3+A4+C1+C2) / ((A3+A4)×(C1+C2)); R D =(R2+R6) / (R2×R6)=(B1+B4+D2+D3) / ((B1+B4)×(D2+D3)).

[0068] Example 3

[0069] The Wheatstone bridge composition strategy for pressure signal detection over a large range (>500KPa) based on the high-precision biomimetic pressure sensor based on the behavior of the scorpion suture sensor array in Example 1 is as follows (e.g. Figure 10 ):R A = (R1+R3+R 11 +R 15 ) / (R1×R3×R 11 ×R 15 )=(A1+A2+A3+R4) / (A1×A2×A3×R4); R B=(R6+R8+R2+R4) / (R6×R8×R2×R4)=(B2+B3+D1+D4) / (B2×B3×D1×D4); R C =(R9+R 11 +R 13 +R 15 ) / (R9×R 11 ×R 13 ×R 15 )=(A3+A4+C1+C2) / ((A3×A4×C1×C2)); R D =(R 10 +R 14 +R 12 +R 16 ) / (R 10 ×R 12 ×R 14 ×R 16 )=(B1+B4+D2+D3) / (B1×B4×D2×D3).

[0070] In summary, this invention discloses a high-precision biomimetic pressure sensor based on the behavior of a scorpion slit array sensor, comprising: a circuit intelligent modulation substrate for adjusting the range detection interval of the biomimetic pressure sensor; a biomimetic structural support body disposed on the circuit intelligent modulation substrate; a sensing countersunk slit array disposed on the biomimetic structural support body; a homogeneous temperature calibration module disposed on the biomimetic structural support body; a first signal terminal disposed on the biomimetic structural support body and electrically connected to the sensing countersunk slit array; and a second signal terminal disposed on the circuit intelligent modulation substrate and electrically connected to the circuit intelligent modulation substrate. Compared to traditional piezoresistive pressure sensors based on SOI silicon wafer design and Wheatstone bridge output mechanism, the biomimetic pressure sensor of this invention, through intelligent modulation of the substrate, achieves high resolution and sensing accuracy across different pressure ranges. It overcomes the shortcomings of multiple pressure sensors working together, achieving a balance between range and sensing accuracy with a single pressure sensor. Furthermore, by utilizing the adaptive combination of slit biomimetic structures with stress distributed at different thresholds, this invention ensures that a sufficient number of slit biomimetic structures work together within a small pressure range, thereby improving pressure detection sensitivity. Simultaneously, within a larger pressure range, the pressure sensor ensures that the slit biomimetic structures function independently, thus improving sensing accuracy at high pressure values.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-precision biomimetic pressure sensor based on the behavior of a scorpion suture group receptor array, characterized in that, include: A circuit intelligent modulation substrate is used to adjust the range detection interval of the bionic pressure sensor; A biomimetic structural support is disposed on the intelligent modulation substrate of the circuit. A sensing countersunk hole type slot assembly is disposed on the biomimetic structural support; A homogeneous temperature calibration module is mounted on the biomimetic structural support. The first signal terminal is disposed on the biomimetic structure carrier and is electrically connected to the sensing countersunk hole type slot assembly; The sensing countersunk hole type slot assembly includes several sensing countersunk hole type slot units. Each sensing countersunk hole type slot unit includes a transverse countersunk hole type slot sensing structure, a longitudinal countersunk hole type slot sensing structure, an electromechanical signal conversion unit disposed around the transverse and longitudinal countersunk hole type slot sensing structures, an electronic transition region disposed between the electromechanical signal conversion unit and the transverse and longitudinal countersunk hole type slot sensing structures, and a gold lead wire disposed on the electromechanical signal conversion unit.

2. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 1, characterized in that, The sensing countersunk hole type slot group consists of a transverse sensing countersunk hole type slot group and a longitudinal sensing countersunk hole type slot group; wherein, the transverse sensing countersunk hole type slot group includes several transverse sensing countersunk hole type slot units, and the longitudinal sensing countersunk hole type slot group includes several longitudinal sensing countersunk hole type slot units.

3. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 1, characterized in that, The electromechanical signal conversion unit is a boron-doped varistor.

4. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 1, characterized in that, The biomimetic structural support body consists of at least three support layers, wherein the sensing countersunk hole type slit group, the homogeneous temperature calibration module and the first signal wiring terminal are all disposed on the support layer opposite to the intelligent modulation substrate of the circuit.

5. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 4, characterized in that, The carrier layer near the intelligent modulation substrate of the line includes several claw-shaped cavities. Several claw-shaped structures corresponding to the electromechanical signal conversion unit are arranged in the claw-shaped cavities. The claw-shaped structures are arc-shaped structures with different curvatures.

6. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 1, characterized in that, It also includes a packaging shell disposed on the line intelligent modulation substrate.

7. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 6, characterized in that, The packaging shell is made of metal or hard plastic.

8. The high-precision biomimetic pressure sensor based on the behavior of a scorpion slit group receptor array according to claim 1, characterized in that, The intelligent modulation substrate for the line includes a second signal terminal block and a multi-range detection scheme switching switch.

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