Laser processing machine and light concentration diameter correction method for laser processing machine

Abstract

A laser processing machine and a condensing diameter correction method thereof suppress a decrease in processing quality caused by attachment of a contaminant to a protective glass. The laser processing machine includes a focal position changing section that changes a relative position of a focal point of laser light oscillated from a laser oscillator and passed through a lens and a workpiece by changing a relative position of the lens and the workpiece; a protective glass disposed on a laser path between the lens and the workpiece; a storage section that stores a relationship between an offset amount of the focal point of the laser light when the contaminant is attached to the protective glass and a condensing diameter of a position at a prescribed distance from the focal point; an offset amount acquisition section that acquires a current offset amount of the focal point of the laser light; a condensing diameter estimation section that estimates a current condensing diameter of the position of the laser light using the current offset amount acquired by the offset amount acquisition section and the relationship stored in the storage section; and a correction execution section that corrects the current condensing diameter by controlling the focal position changing section using the current offset amount and the current condensing diameter.

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