A visual inspection device for aluminum nitride ceramic substrates

Abstract

This invention belongs to the technical field of inspection equipment and discloses a visual inspection device for aluminum nitride ceramic substrates. The device includes a working platform, a control terminal fixedly connected to the outer side of the working platform, a fixed frame fixedly connected to the upper surface of the working platform, and an angle-adjustable imaging head disposed on the lower surface of the fixed frame. This invention utilizes the angle-adjustable imaging head, controlled by the control terminal, to rotate a servo motor, which in turn drives a rotating gear to rotate, which in turn drives a rack and pinion drive to press against a rotating structure, causing an angle change in the rotating structure. Furthermore, the rotation of a micro servo motor block drives the rotation of a rotating plate, causing the imaging head to also change angle, thus moving the imaging head to a position convenient for illuminating the side of the substrate. This allows for better side-side inspection of the substrate, significantly improving inspection accuracy and leading to better application prospects.

Description

Technical Field

[0001] This invention belongs to the field of inspection equipment technology, specifically a visual inspection device for aluminum nitride ceramic substrates. Background Technology

[0002] Aluminum nitride (ALN) is an inorganic compound composed of aluminum and nitrogen. Its properties include high thermal conductivity, resistivity, and corrosion resistance. Also known as aziridine, this material is produced through the carbothermic reduction of aluminum oxide. During manufacturing, sintering aids are added to the alloy to make the final product sufficiently dense to meet technical specifications. This material is used in many applications, from surface acoustic wave sensors to insulators. Aluminum nitride ceramic substrates are typically available in 1 mm thick, laser-cuttable substrates; however, thicker forms can be expensive to manufacture and may require custom materials and extensive machining. Smaller amounts of metal can be used for laser cutting or other manufacturing processes. More versatile products are semiconductors made from aluminum nitride ceramic substrates due to gallium nitride.

[0003] After the aluminum nitride ceramic substrate is processed, its appearance needs to be inspected to detect any damage. This is typically done using a visual inspection device. During inspection, the substrate is placed on a platform, and a camera illuminates its outer surface. This mechanical inspection helps detect any damage. However, typical visual inspection devices use fixed cameras that can only inspect one side of the substrate. Defects and cracks often exist on the sides of the substrate and are difficult to detect. The equipment is not comprehensive enough to inspect the sides of the substrate. Therefore, we propose a visual inspection device for aluminum nitride ceramic substrates. Summary of the Invention

[0004] To address the problems mentioned in the background section, this invention provides a visual inspection device for aluminum nitride ceramic substrates, which solves the problem of not being able to inspect the sides of the substrate.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a visual inspection device for aluminum nitride ceramic substrates, comprising a working platform, a control terminal fixedly connected to the outer side of the working platform, a fixing frame fixedly connected to the upper surface of the working platform, and an angle-adjustable camera head provided on the lower surface of the fixing frame.

[0006] Preferably, the angle-adjustable camera head includes a servo motor, which is fixedly connected to the mounting bracket. A rotating shaft is fixedly connected to the output shaft of the servo motor. A first connecting rod passes through the rotating shaft and is fixedly connected to the inner side of the mounting bracket. A rotating gear is fixedly connected to the end of the rotating shaft away from the servo motor, and a transmission rack is meshed with the outer wall of the rotating gear.

[0007] Preferably, a second connecting rod is fixedly connected to the inner side of the fixed frame, a connecting ball shaft is rotatably connected to the lower surface of the second connecting rod, a rotating structure is rotatably connected to the outer wall of the connecting ball shaft, a connecting block is fixedly connected to the outer side of the rotating structure, a rotating shaft is rotatably connected between the connecting blocks, a slot is provided on the transmission rack for the rotating shaft to rotate, the transmission rack rotates between the connecting blocks via the rotating shaft, a connecting slider is fixedly connected to the outer side of the transmission rack, the end of the connecting slider away from the transmission rack slides on the fixed frame, and a groove is provided on the fixed frame for the connecting slider to slide.

[0008] Preferably, the rotating structure includes a third connecting rod, a fixing plate is fixedly connected to the outer side of the third connecting rod, a miniature servo motor block is fixedly connected to the inner side of the fixing plate, a plurality of illumination lamps are fixedly connected to the inner side of the fixing plate, a rotating plate is fixedly connected to the output shaft of the miniature servo motor block, the rotating plate is rotatably connected inside the third connecting rod, a camera head is fixedly connected to the outer side of the rotating plate, a connecting line is fixedly connected inside the third connecting rod, and the camera head and illumination lamps are electrically connected to the connecting line.

[0009] Preferably, the first connecting rod has a slot that matches the size of the rotating shaft. A rotating bearing is fixedly connected inside the slot, and the rotating shaft passes through the rotating bearing. When the rotating shaft rotates, it is driven to rotate by the rotating bearing.

[0010] Preferably, the control terminal is used to control the equipment, the angle-adjustable camera head is located directly above the work platform, and the mounting bracket is L-shaped.

[0011] Preferably, one end of the transmission rack is fixedly connected to a fixing block, and the fixing block on the transmission rack is used to prevent the transmission rack from disengaging from the rotating gear.

[0012] Preferably, the transmission rack is inclined.

[0013] Preferably, the bottom of the third connecting rod is provided with a slot for the rotating plate to rotate, and the rotating plate rotates within the slot.

[0014] Preferably, the illumination lamp is a fluorescent lamp.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0016] This invention, by setting an angle-adjustable camera head, can adjust the angle and position of the camera head to better capture and inspect the side of the substrate, greatly improving the accuracy of the inspection and bringing better application prospects.

[0017] The present invention, through the design of the illumination lamp, can effectively provide light to the imaging head when it is illuminated, ensuring brightness during illumination and enabling better detection. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention;

[0019] Figure 2 This is a bottom view of the angle-adjustable camera head structure of the present invention;

[0020] Figure 3 This is a schematic diagram of the angle-adjustable camera head structure of the present invention;

[0021] Figure 4 This is a schematic diagram of the rotating structure of the present invention;

[0022] Figure 5 This is a schematic diagram of the first connecting rod structure of the present invention.

[0023] In the diagram: 1. Fixture; 2. Angle-adjustable camera head; 3. Working platform; 4. Control terminal; 21. Rotating gear; 22. Transmission rack; 23. First connecting rod; 24. Rotating shaft; 25. Second connecting rod; 26. Connecting slider; 27. Servo motor; 28. Connecting ball shaft; 29. ​​Rotating structure; 210. Connecting block; 291. Third connecting rod; 292. Rotating plate; 293. Camera head; 294. Fixing plate; 295. Miniature servo motor block; 296. Illumination lamp; 231. Rotating bearing. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] like Figures 1 to 5As shown, the present invention provides a visual inspection device for aluminum nitride ceramic substrates, including a working platform 3. A control terminal 4 is fixedly connected to the outer side of the working platform 3. A fixing frame 1 is fixedly connected to the upper surface of the working platform 3. An angle-adjustable camera head 2 is provided on the lower surface of the fixing frame 1. By setting the angle-adjustable camera head 2, the angle position of the camera head 293 can be adjusted to better inspect the side of the substrate, greatly improving the accuracy of the inspection and bringing better application prospects.

[0026] like Figure 2 and Figure 3 As shown, the angle-adjustable camera head 2 includes a servo motor 27, which is fixedly connected to the mounting bracket 1. A rotating shaft 24 is fixedly connected to the output shaft of the servo motor 27. A first connecting rod 23 passes through the rotating shaft 24 and is fixedly connected to the inner side of the mounting bracket 1. A rotating gear 21 is fixedly connected to the end of the rotating shaft 24 away from the servo motor 27. A transmission rack 22 is meshed with the outer wall of the rotating gear 21. A second connecting rod 25 is fixedly connected to the inner side of the mounting bracket 1. The lower surface of the second connecting rod 25 rotates. A connecting ball shaft 28 is connected, and a rotating structure 29 is rotatably connected to the outer wall of the connecting ball shaft 28. A connecting block 210 is fixedly connected to the outer side of the rotating structure 29. A rotating shaft is rotatably connected between the connecting blocks 210. A slot is provided on the transmission rack 22 for the rotating shaft to rotate. The transmission rack 22 rotates between the connecting blocks 210 through the rotating shaft. A connecting slider 26 is fixedly connected to the outer side of the transmission rack 22. The end of the connecting slider 26 away from the transmission rack 22 slides on the fixed frame 1. A groove is provided on the fixed frame 1 for the connecting slider 26 to slide.

[0027] The device is controlled by the control terminal 4 for inspection. The camera head 293 irradiates the substrate to inspect the upper surface of the substrate and detect defects. When inspecting the side of the substrate, the control terminal 4 controls the servo motor 27 to rotate, which drives the rotating gear 21 to rotate, which in turn drives the transmission rack 22 to press against the rotating structure 29, causing the rotating structure 29 to change angle. The rotation of the micro servo motor block 295 drives the rotating plate 292 to rotate, causing the camera head 293 to change angle as well, moving the camera head 293 to a position that is convenient for irradiating the side of the substrate for inspection. After the inspection is completed, the camera head 293 is returned to its original position by rotating the servo motor 27 and the micro servo motor block 295 in opposite directions.

[0028] like Figure 4 and Figure 5As shown, the rotating structure 29 includes a third connecting rod 291. A fixing plate 294 is fixedly connected to the outer side of the third connecting rod 291. A micro servo motor block 295 is fixedly connected to the inner side of the fixing plate 294. Several illumination lamps 296 are fixedly connected to the inner side of the fixing plate 294. A rotating plate 292 is fixedly connected to the output shaft of the micro servo motor block 295. The rotating plate 292 is rotatably connected inside the third connecting rod 291. A camera head 293 is fixedly connected to the outer side of the rotating plate 292. A connecting line is fixedly connected inside the third connecting rod 291. The camera head 293 and the illumination lamps 296 are electrically connected to the connecting line.

[0029] like Figures 1 to 5 As shown, the first connecting rod 23 has a slot that matches the size of the rotating shaft 24. A rotating bearing 231 is fixedly connected inside the slot. The rotating shaft 24 passes through the rotating bearing 231. When the rotating shaft 24 rotates, it is driven to rotate by the rotating bearing 231. The control end 4 is used to control the equipment. The angle-adjustable shooting head 2 is located directly above the working platform 3. The fixed frame 1 is "L" shaped. One end of the transmission rack 22 is fixedly connected to a fixed block. The fixed block on the transmission rack 22 is used to prevent the transmission rack 22 from disengaging from the rotating gear 21. The transmission rack 22 is inclined. The bottom of the third connecting rod 291 has a slot for the rotating plate 292 to rotate. The rotating plate 292 rotates in the slot. The illumination lamp 296 is a fluorescent lamp.

[0030] The principle of connecting ball shaft 28 is similar to the base structure of a KTV standing microphone. It can rotate freely under the action of external force and will not come off. Rotating plate 292 is rotatably connected to the bottom of third connecting rod 291. A rotatable shaft is provided in the bottom of the third connecting rod 291. A slot is opened in the rotating plate 292 for the shaft to pass through. By inserting the rotating plate 292 into the bottom of the third connecting rod 291 and passing the shaft through the slot, it can be rotated.

[0031] Working principle and usage process of this invention:

[0032] In this invention, during inspection, the substrate is placed on the work platform 3 beforehand. The inspection device is controlled by the control terminal 4. The imaging head 293 illuminates the substrate to inspect its upper surface and detect defects. When inspecting the side of the substrate, the control terminal 4 controls the servo motor 27 to rotate, which drives the rotating gear 21 to rotate, which in turn drives the transmission rack 22 to press against the rotating structure 29, causing the rotating structure 29 to change angle. The rotation of the micro servo motor block 295 drives the rotating plate 292 to rotate, which in turn causes the imaging head 293 to change angle, thus pressing against the rotating structure 29. The camera head 293 is moved to a position that facilitates illumination of the side of the substrate for inspection. After inspection, the camera head 293 is returned to its original position by the reverse rotation of the servo motor 27 and the micro servo motor block 295. This invention, by setting an angle adjustment camera head 2, can adjust the angle position of the camera head 293 to better inspect the side of the substrate, greatly improving the accuracy of the inspection and bringing better application prospects. The illumination lamp 296 can provide good light for the camera head 293 when it is illuminating, ensuring the brightness during illumination and better inspection.

[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0034] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A visual inspection device for aluminum nitride ceramic substrates, comprising a working platform (3), characterized in that: A control terminal (4) is fixedly connected to the outer side of the working platform (3). A fixed frame (1) is fixedly connected to the upper surface of the working platform (3). An angle-adjustable camera head (2) is provided on the lower surface of the fixed frame (1). The angle-adjustable camera head (2) includes a servo motor (27). The servo motor (27) is fixedly connected to the fixed frame (1). A rotating shaft (24) is fixedly connected to the output shaft of the servo motor (27). A first connecting rod (23) passes through the rotating shaft (24). The first connecting rod (23) is fixedly connected to the inner side of the fixed frame (1). A rotating gear (21) is fixedly connected to the end of the rotating shaft (24) away from the servo motor (27). A transmission rack (22) is meshed with the outer wall of the rotating gear (21). A second connecting rod (25) is fixedly connected to the inner side of the fixed frame (1). A connecting ball shaft (28) is rotatably connected to the lower surface of the second connecting rod (25). A rotating structure (29) is rotatably connected to the outer wall of the connecting ball shaft (28). A connecting block (210) is fixedly connected to the outer side of the rotating structure (29). A rotating shaft is rotatably connected between the connecting blocks (210). The moving rack (22) has a slot for the rotating shaft to rotate. The transmission rack (22) rotates between the connecting blocks (210) via the rotating shaft. A connecting slider (26) is fixedly connected to the outer side of the transmission rack (22). The end of the connecting slider (26) away from the transmission rack (22) slides on the fixed frame (1). The fixed frame (1) has a groove for the connecting slider (26) to slide. The rotating structure (29) includes a third connecting rod (291). A fixed plate (294) is fixedly connected to the outer side of the third connecting rod (291). The fixed plate (294) A miniature servo motor block (295) is fixedly connected to the inner side of the fixed plate (294). Several illumination lamps (296) are fixedly connected to the inner side of the fixed plate (294). A rotating plate (292) is fixedly connected to the output shaft of the miniature servo motor block (295). The rotating plate (292) is rotatably connected to the inside of the third connecting rod (291). A camera head (293) is fixedly connected to the outer side of the rotating plate (292). A connecting line is fixedly connected inside the third connecting rod (291). The camera head (293) and the illumination lamps (296) are electrically connected to the connecting line. The first connecting rod (23) has a slot that matches the size of the rotating shaft (24). A rotating bearing (231) is fixedly connected inside the slot. The rotating shaft (24) passes through the rotating bearing (231). When the rotating shaft (24) rotates, it is driven to rotate by the rotating bearing (231). The control terminal (4) is used to control the equipment. The angle-adjustable shooting head (2) is located directly above the working platform (3). The fixing frame (1) is "L" shaped. One end of the transmission rack (22) is fixedly connected to a fixing block, and the fixing block on the transmission rack (22) is used to prevent the transmission rack (22) from disengaging from the rotating gear (21).

2. The visual inspection device for aluminum nitride ceramic substrates according to claim 1, characterized in that: The transmission rack (22) is inclined.

3. The visual inspection device for aluminum nitride ceramic substrates according to claim 1, characterized in that: The bottom of the third connecting rod (291) is provided with a slot for the rotating plate (292) to rotate, and the rotating plate (292) rotates in the slot.

4. The visual inspection device for aluminum nitride ceramic substrates according to claim 1, characterized in that: The illumination lamp (296) is a daylight lamp.

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