Auxiliary tool for installing sealing ring and electrostatic chuck system

Abstract

The application provides a kind of auxiliary tool for installing sealing ring and electrostatic chuck system, including the main part matched with electrostatic chuck, N support parts arranged in the main part, and lifting part, N support parts are arranged in a ring shape, for supporting sealing ring from the inside, make the axial sealing ring between the two adjacent support parts and the radial chuck groove of electrostatic chuck perpendicular to each other, when pressing, make the upper edge and lower edge of the sealing ring between the two adjacent support parts enter the chuck groove at the same time;The lifting part is arranged in the main part, drives the main part to separate from the electrostatic chuck along the axial direction, so that the support part separates from the sealing ring;The application adjusts the relative position of sealing ring and chuck groove, so as to ensure that the upper edge and lower edge of sealing ring can enter the chuck groove at the same time when pressing and installing, and realize the smooth installation of sealing ring.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to an auxiliary tooling for installing sealing rings and an electrostatic chuck system. Background Technology

[0002] An electrostatic chuck, also known as an E-Chuck, generally consists of a ceramic plate that contacts the wafer at the top. The ceramic plate is connected to a base plate via epoxy resin, forming a groove between them. The base plate has several holes for helium gas to pass through, and the bottom of the base plate receives the power supply. In actual use, the wafer is placed on the upper surface of the E-Chuck, and then plasma gas is introduced to clean the wafer surface. During this process, the plasma gas moves to the sides of the E-Chuck, slowly etching the epoxy resin within the groove. To prevent the epoxy resin from being etched by the plasma gas, a sealing ring is placed inside the groove to isolate the epoxy resin from the plasma gas, thus preventing etching.

[0003] Existing sealing rings are installed into the slot by pressing. Because the sealing rings are made of elastic material, they are prone to twisting and deflection during operation. During installation, the position of the sealing ring relative to the slot is not fixed, and the lower or upper edge of the sealing ring may contact the slot first, forming a fulcrum. This causes the sealing ring to deflect, preventing the uncontacted edge from being properly installed into the slot. Therefore, there is an urgent need for an auxiliary tooling that allows both the upper and lower edges of the sealing ring to enter the slot simultaneously. Summary of the Invention

[0004] The purpose of this invention is to provide an auxiliary tooling and electrostatic chuck system for installing a sealing ring. By adjusting the relative position of the sealing ring and the chuck groove, it is ensured that the upper and lower edges of the sealing ring can enter the chuck groove simultaneously during pressing installation, thus achieving smooth installation of the sealing ring.

[0005] To achieve the above objectives, the present invention provides an auxiliary tooling for installing a sealing ring, comprising a main body portion matched with an electrostatic chuck, N support portions disposed on the main body portion, where N is a positive integer, and a lifting portion, wherein:

[0006] The N support portions are arranged in a ring to support the sealing ring from the inside, so that the axial direction of the sealing ring between two adjacent support portions is perpendicular to the radial direction of the slot of the electrostatic chuck, so that when pressed, the upper and lower edges of the sealing ring between two adjacent support portions simultaneously enter the slot.

[0007] The lifting part is located on the main body. After the sealing ring between two adjacent support parts enters the slot, it drives the main body to axially disengage from the electrostatic chuck, thereby disengaging the support parts from the sealing ring. The beneficial effects of this invention are as follows: N support parts are arranged in a ring shape to support the sealing ring from the inside, ensuring that the axial direction of the sealing ring between two adjacent support parts is perpendicular to the radial direction of the slot of the electrostatic chuck. This allows the upper and lower edges of the sealing ring between two adjacent support parts to simultaneously enter the slot during pressing. This ensures that the sealing ring can be smoothly installed into the slot while maintaining a vertical position, resulting in a better sealing effect. The lifting part is located on the main body, between two adjacent support parts... After the sealing ring enters the slot, the main body is driven to detach from the electrostatic chuck along the axial direction, thereby pulling the support part away from the sealing ring. This allows N support parts to detach from the sealing ring simultaneously. On the one hand, this increases the detachment rate between the support part and the sealing ring. On the other hand, the simultaneous detachment of N support parts from the sealing ring solves the problem that when N support parts detach sequentially, different segments of the sealing ring experience different supporting forces, resulting in different amounts of elastic deformation. This difference in deformation after installation in the slot can affect the sealing effect.

[0008] Optionally, it also includes a mounting part, which is disposed on the main body, wherein the support part is disposed within the mounting part, and the number of mounting parts is matched with the number of support parts.

[0009] Optionally, a telescopic part is also included, which is disposed within the mounting part. One end of the telescopic part is connected to the support part, and the other end of the telescopic part is connected to the mounting part. The beneficial effects of this embodiment are as follows: The telescopic part provides a pulling force to the support part along the radial direction of the main body, allowing the support part to move within the mounting part when it is not in contact with the electrostatic chuck. In this way, the telescopic part enables the N ring-shaped support parts to have a tendency to move towards the central axis of the main body. Under this movement tendency, the main body and the electrostatic chuck can achieve self-positioning, and the central axis of the main body and the electrostatic chuck can be automatically aligned, eliminating the need for manual positioning of the main body and the electrostatic chuck, reducing the difficulty of equipment operation, and improving installation efficiency.

[0010] Optionally, the telescopic part includes a telescopic rod, a telescopic cylinder, and a telescopic spring, wherein:

[0011] The telescopic rod is movably inserted into the telescopic cylinder, and the telescopic spring is wound around the outside of the telescopic rod, with both ends of the telescopic spring fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder, respectively.

[0012] Optionally, the lifting part includes a support tube provided in the main body, the inner wall of the support tube is provided with threads, as well as an adjusting screw and a rotating shaft;

[0013] The adjusting screw is threaded into the support tube;

[0014] The rotating shaft is located on one end of the adjusting screw near the electrostatic chuck.

[0015] Optionally, the system further includes a first pushing part and a second pushing part disposed on the lifting part. One end of the second pushing part is hinged to the first pushing part, and the other end of the second pushing part is hinged to the support part. Pressing down on the first pushing part pushes the support part radially away from the central axis of the main body. The beneficial effects of the present invention are as follows: The arrangement of the first and second pushing parts, by providing pressing force, enables the support part to overcome the tension of the telescopic part, causing the support part to move away from the central axis of the main body. This makes the diameter of the space surrounded by the N support parts larger than the diameter of the electrostatic chuck, thus allowing the N support parts to quickly engage with the electrostatic chuck, improving installation efficiency.

[0016] Optionally, the number of the second pushing parts is set to match the number of the supporting parts.

[0017] Optionally, a locking part is also provided on the second pushing part, so that when the second pushing part is reset, the main body and the electrostatic chuck are locked together by adsorption. The advantages of the present invention are as follows: the setting of the locking part can realize the relative fixation of the main body and the electrostatic chuck, thus preventing the main body from moving relative to the electrostatic chuck when the sealing ring is installed, thereby improving the accuracy of the sealing ring installation.

[0018] Optionally, the support portion includes a first segment and a third segment, and a second segment disposed between the first segment and the third segment and used for connecting the first segment and the third segment, wherein the second segment has an inclined surface on the side facing the electrostatic chuck.

[0019] To achieve the above objectives, the present invention also provides an electrostatic chuck system, including a sealing ring, a base plate, a ceramic plate bonded to the base plate, a groove between the base plate and the ceramic plate, and an auxiliary tooling for installing the sealing ring, wherein the auxiliary tooling for installing the sealing ring is used to assist the sealing ring in being installed into the groove. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the electrostatic chuck system of the present invention;

[0021] Figure 2 This is a top view of the main body of the present invention.

[0022] Figure 3 For the present invention Figure 2 Enlarged schematic diagram of structure A in the middle;

[0023] Figure 4 For the present invention Figure 1 A schematic diagram of the frontal cross-sectional structure;

[0024] Figure 5 This is a schematic diagram of the support portion in this invention;

[0025] Figure 6 This is a schematic diagram of the electrostatic chuck system of the present invention, which includes a first pushing part and a second pushing part;

[0026] Figure 7 For the present invention Figure 6 Enlarged schematic diagram of the B-structure;

[0027] Figure 8 This is a schematic diagram of the electrostatic chuck system of the present invention, which includes a locking part;

[0028] Figure 9 For the present invention Figure 8 Enlarged schematic diagram of the C-structure.

[0029] Figure Labels

[0030] 1. Main body;

[0031] 2. Installation Department;

[0032] 3. Support section; 31. First section; 32. Second section; 321. Inclined surface; 33. Third section;

[0033] 4. Base plate;

[0034] 5. Card slot;

[0035] 6. Sealing ring;

[0036] 7. Lifting section; 71. Support tube; 72. Adjusting screw; 73. Rotating shaft;

[0037] 8. Telescopic part; 81. Telescopic rod; 82. Telescopic cylinder; 83. Telescopic spring;

[0038] 9. First pushing part; 91. Pressing ring; 92. Reset part; 93. Moving hole; 94. Moving rod;

[0039] 10. Second Propulsion Department;

[0040] 11. Locking part; 111. Sealing box; 112. Moving piston; 113. Support spring; 114. Push-pull rod;

[0041] 115. Air duct; 116. Suction cup;

[0042] 12. Ceramic slab. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0044] To address the problems existing in the prior art, embodiments of the present invention provide an auxiliary tooling for installing a sealing ring. This auxiliary tooling adjusts the relative position of the sealing ring 6 and the groove 5, ensuring that the axial direction (vertical direction) of the sealing ring 6 is perpendicular to the radial direction (horizontal direction) of the groove 5. This ensures that the upper and lower edges of the sealing ring 6 can simultaneously enter the groove 5 during pressing installation, achieving smooth installation of the sealing ring 6. Simultaneously, this auxiliary tooling allows the sealing ring 6 to be installed vertically into the groove 5, ensuring that the sealing ring 6 installed in the groove 5 is in a vertical state, preventing twisting or deflection. This ensures that the upper and lower surfaces of the sealing ring 6 are tightly fitted to the top and bottom walls of the groove 5, respectively, ensuring the sealing performance of the sealing ring 6. It should be understood that this auxiliary tooling is not limited to the installation of the sealing ring 6.

[0045] In one embodiment, such as Figure 1 and Figure 2As shown, the auxiliary tooling for installing the sealing ring includes a main body 1 (which can be understood as a disc, but is not limited to a disc; the diameter of the main body 1 is larger than the diameter of the upper surface of the electrostatic chuck), N support parts 3 provided on the main body 1, where N is a positive integer, and a lifting part 7, wherein: the N support parts 3 are arranged in a ring shape to support the sealing ring 6 from the inside, so that the axial direction of the sealing ring 6 between two adjacent support parts 3 is perpendicular to the radial direction of the groove 5 of the electrostatic chuck, so that when pressed, the upper and lower edges of the sealing ring 6 between two adjacent support parts 3 simultaneously enter the groove 5; the N support parts 3 are preferably arranged in a ring shape at equal intervals, so that the portion of the sealing ring 6 supported by the support parts 3 has the same elastic deformation, and at the same time, the portion that undergoes elastic deformation is evenly distributed on the sealing ring 6.

[0046] The lifting part 7 is disposed on the main body 1. After the sealing ring 6 between two adjacent support parts 3 enters the slot 5, it drives the main body 1 to detach from the electrostatic chuck axially, so that N support parts 3 simultaneously detach from the sealing ring 6. Preferably, the lifting part 7 is disposed in the middle of the main body 1. This arrangement ensures that the main body 1 remains horizontally upward when it is lifted relative to the electrostatic chuck, preventing the main body 1 from tilting.

[0047] In one embodiment, the number of the support portions 3 may be three or more, and when the number of the support portions 3 is three or more, they are preferably arranged in an equidistant ring.

[0048] In one embodiment, such as Figure 4As shown, the lifting part 7 includes a support tube 71 disposed on the main body 1. The inner wall of the support tube 71 is threaded, and there is an adjusting screw 72 and a rotating shaft 73. The adjusting screw 72 is threaded into the support tube 71. The rotating shaft 73 is disposed on the end of the adjusting screw 72 near the electrostatic chuck. The rotating shaft 73 prevents the adjusting screw 72 from contacting the upper surface of the electrostatic chuck when it rotates, thus protecting the electrostatic chuck. The lifting part 7 is used to control the main body 1 to move vertically upwards and detach from the electrostatic chuck. During the detachment process, N support parts 3 will simultaneously detach from the sealing ring 6. In use, the main body 1 is manually fixed so that only... The device can move vertically upward relative to the electrostatic chuck. By turning the adjusting screw 72, since the lower end of the rotating shaft 73 abuts against the upper end face of the electrostatic chuck, and the adjusting screw 72 is threaded into the support tube 71, the rotation of the adjusting screw 72 will cause the support tube 71 to move upward with the main body 1. The upward movement of the main body 1 will cause N support parts 3 to move upward relative to the sealing ring 6. At the moment when the support part 3 disengages from the sealing ring 6, the elastic deformation force of the sealing ring 6 will cause the sealing ring 6 to contract and enter the slot 5 or partially enter the slot 5 (the elastic deformation of different models of sealing ring 6 is different). At this time, the part that has not entered can be manually pressed into the slot 5.

[0049] To reduce the footprint of the auxiliary tooling, in one embodiment, such as Figure 1 or Figure 2 As shown, the auxiliary tooling for installing the sealing ring further includes a mounting part 2, which is disposed on the main body 1. The support part 3 is disposed within the mounting part 2, and the number of mounting parts 2 matches the number of support parts 3. In one example, the mounting part 2 is a mounting hole or a mounting groove; however, in other examples, it is not limited to a mounting hole or a mounting groove.

[0050] To ensure that the axial direction of the sealing ring 6 between two adjacent support parts 3 is perpendicular to the radial direction of the slot 5 of the electrostatic chuck, at least two support parts 3 are required. These support parts 3 are separate from the main body 1, and there is no connection between the N support parts 3. This results in cumbersome sequential operation of different support parts 3 when detaching from the sealing ring 6, leading to low operational efficiency. Furthermore, the different support parts 3 being detached sequentially cause varying elastic deformations in different segments of the sealing ring 6 due to different supporting forces. This difference in deformation after installation into the slot 5 affects the sealing effect. To address these issues, in one embodiment, such as... Figure 2 and Figure 3 As shown, the auxiliary tooling for installing the sealing ring also includes a telescopic part 8, which is disposed within the mounting part 2. One end of the telescopic part 8 is connected to the support part 3, and the other end is connected to the mounting part 2. The telescopic part 8 serves two purposes: firstly, it connects the N support parts 3 to the main body 1 as a single unit; secondly, it provides a pulling force to the support parts 3 along the radial direction of the main body 1, allowing the support parts 3 to move within the mounting part 2 when not in contact with the electrostatic chuck. Thus, the telescopic part 8 enables the N ring-shaped support parts 3 to tend to move towards the central axis of the main body 1. Under this tendency, the main body 1 and the electrostatic chuck can achieve self-positioning, automatically aligning their central axes. This eliminates the need for manual positioning of the main body 1 and the electrostatic chuck, reducing operational difficulty and improving installation efficiency.

[0051] It should be noted that, due to the presence of the telescopic part 8, the position of the support part 3 within the mounting part 2 can be changed, thus making the auxiliary tooling applicable to electrostatic chucks of different diameters, and of course not limited to electrostatic chucks.

[0052] In one embodiment, such as Figure 3 As shown, the telescopic part 8 includes a telescopic rod 81, a telescopic cylinder 82, and a telescopic spring 83. The telescopic rod 81 is movably inserted into the telescopic cylinder 82, and the telescopic spring 83 is wound around the telescopic rod 81, with both ends of the spring fixedly connected to the side wall of the telescopic rod 81 and the outer side wall of the telescopic cylinder 82, respectively. This combination of the telescopic rod 81, telescopic cylinder 82, and telescopic spring 83 provides both tension and guidance, allowing the support part 3 to move only radially within the main body 1. Of course, in other examples, the telescopic part 8 is not limited to the combination of the telescopic rod 81, telescopic cylinder 82, and telescopic spring 83; it may also consist solely of the telescopic spring.

[0053] In one embodiment, such as Figure 5As shown, the support portion 3 includes a first segment 31 and a third segment 33, and a second segment 32 disposed between the first segment 31 and the third segment 33 for connecting the first segment 31 and the third segment 33. The second segment 32 has an inclined surface 321 on the side facing the electrostatic chuck. In one example, the cross-sections of the first segment 31 and the third segment 33 are both rectangular, and the horizontal length of the first segment 31 is greater than the horizontal width of the third segment 33. The cross-section of the second segment 32 is trapezoidal, and the inclined side of the trapezoidal structure forms the inclined surface 321 in the three-dimensional structure. The inclined surface 321 provides a buffer during the upward movement of the support portion 3, from the first segment 31 to the third segment 33 contacting the electrostatic chuck, preventing the third segment 33 from detaching from the sealing ring 6 during a sudden change, thus avoiding wrinkles in the sealing ring 6 upon re-contact. The combination of the first segment 31, the second segment 32 and the third segment 33 ensures that the support part 3 and the sealing ring 6 remain in contact during the upward movement of the support part 3 relative to the sealing ring 6.

[0054] When the auxiliary tooling is not fastened to the electrostatic chuck, the diameter of the space enclosed by the N support parts 3 is smaller than the diameter of the upper surface of the electrostatic chuck. Therefore, when fastened to the outside of the electrostatic chuck, the N support parts 3 can simultaneously maintain contact with the side wall of the electrostatic chuck under the pulling of the telescopic part 8. Since the diameter of the space enclosed by the N support parts 3 is smaller than the diameter of the upper surface of the electrostatic chuck when not in contact, and the N support parts 3 are not connected to each other, it is necessary to push each support part 3 one by one away from the central axis of the main body 1 during operation, making the operation extremely inconvenient. To solve the above problem, in one embodiment, such as... Figure 6 and Figure 7 As shown, the auxiliary tooling for installing the sealing ring also includes a first pushing part 9 and a second pushing part 10 disposed on the lifting part 7. One end of the second pushing part 10 is hinged to the first pushing part 9, and the other end of the second pushing part 10 is hinged to the support part 3. Pressing down on the first pushing part 9 pushes the support part 3 radially away from the central axis of the main body part 1. In one example, the number of second pushing parts 10 matches the number of support parts 3, which can be understood as the number of second pushing parts 10 being the same as the number of support parts 3. The cooperation of the first pushing part 9 and the second pushing part 10 can control N support parts 3 to simultaneously move radially away from the central axis of the main body part 1. This synchronous control reduces the difficulty of operation and improves the efficiency of operation. Preferably, the second pushing part 10 is inclined downward from right to left.

[0055] In one embodiment, the second pushing part 10 is a pushing plate, but is not limited to the pushing plate; the first pushing part 9 includes a pressing ring 91 movably sleeved outside the adjusting screw 72, one end of a reset member 92 is connected to the lower end face of the pressing ring 91, and the other end of the reset member 92 is fixedly connected to the upper end face of the support tube 71. A plurality of moving holes 93 are opened through the support tube 71 in the vertical direction. The number of moving holes 93 is the same as the number of support parts 3. A moving rod 94 is movably provided in each of the plurality of moving holes 93. The upper end of the moving rod 94 is fixedly connected to the lower end face of the pressing ring 91, and the lower end of the moving rod 94 extends outside the moving hole 93. The lower end sidewall of the moving rod 94 is hinged to one end of the second pushing part 10.

[0056] In use, pressing the pressing ring 91 downward relative to the support tube 71 causes the moving rod 94 to move downward within the moving hole 93. The downward movement of the moving rod 94 pushes the support part 3 away from the central axis of the main body 1 via the second pushing part 10. After the diameter of the space surrounded by the N support parts 3 increases to be greater than the upper surface diameter of the electrostatic chuck, the auxiliary tooling is fastened to the outside of the electrostatic chuck. Then, the pressing ring 91 is released. Under the action of the reset member 92, the pressing ring 91 resets upward, simultaneously resetting the moving rod 94 and the second pushing part 10, causing the support part 3 to lose its resistance. At this time, the support part 3 is pulled by the telescopic part 8, automatically completing the positioning of the main body 1 and the electrostatic chuck.

[0057] In one embodiment, the reset member 92 can be a reset spring or an elastic telescopic member. The structure of the elastic telescopic member is consistent with the structure of the telescopic part 8, and will not be described again here. Of course, in other examples, the reset member 92 is not limited to the reset spring and the elastic telescopic member. To ensure better support for the pressing ring 91, the number of reset members 92 can be set to several, and these reset members 92 are preferably arranged in an equidistant ring.

[0058] There is no locking device between the main body 1 and the electrostatic chuck. Although there are N support parts 3 for clamping, when there is an external force misoperation, the main body 1 will move horizontally relative to the electrostatic chuck. If this horizontal movement occurs during the installation of the sealing ring 6 into the slot 5, it can easily reduce the installation accuracy of the sealing ring 6, or even lead to the failure of the installation process. To solve the above problem, in one embodiment, such as Figure 8 and Figure 9As shown, the auxiliary tooling for installing the sealing ring also includes a locking part 11 disposed on the second pushing part 10, so as to achieve mutual locking between the main body part 1 and the electrostatic chuck through adsorption when the second pushing part 10 is reset. The locking part 11, on the one hand, through adsorption, assists the clamping of the N supporting parts 3 to fix the main body part 1 and the electrostatic chuck more firmly, thus preventing relative movement between the main body part 1 and the electrostatic chuck during the installation of the sealing ring 6, thereby improving installation accuracy; on the other hand, the locking part 11 has a reasonable structural design, and can achieve automatic fixing during the reset of the second pushing part 10, thereby reducing the difficulty of equipment operation and improving equipment installation efficiency.

[0059] In one embodiment, such as Figure 9 As shown, the locking part 11 includes a sealing box 111 movably disposed on the lower end face of the main body 1. A movable piston 112 is movably disposed inside the sealing box 111. One end of a support spring 113 is fixedly connected to the upper end face of the movable piston 112, and the other end of the support spring 113 is fixedly connected to the inner top wall of the sealing box 111. One end of a push-pull rod 114 is hinged to the lower end face of the movable piston 112, and the push-pull rod 114 is movably inserted into the bottom plate of the sealing box 111. The other end of the push-pull rod 114 is hinged to the upper end face of the second pushing part 10. A suction cup 116 is connected to the lower end face of the second pushing part 10. The lower end of the suction cup 116 can abut against the ceramic plate 12. One end of the air guide pipe 115 is provided on the sealing box 111, and the other end of the air guide pipe 115 is provided on the suction cup 116. The air guide pipe 115 is used to connect the sealing box 111 and the suction cup 116. Preferably, the air guide pipe 115 is located below the moving piston 112. It should be noted that the adsorption between the suction cup 116 and the ceramic plate 12 can be removed by external force. For example, by turning the adjusting screw 72, the suction cup 116 can be separated from the ceramic plate 12 during the upward movement of the main body 1 relative to the electrostatic chuck.

[0060] Because the second pushing part 10 is inclined downwards, when the pressing ring 91 is pressed down, the moving rod 94 causes the center of the second pushing part 10 to move downwards. This downward movement of the center of the second pushing part 10 pulls the moving piston 112 downwards via the push-pull rod 114, thereby expelling the air below the moving piston 112 into the environment through the air guide pipe 115 and the suction cup 116. When the auxiliary tooling is fastened to the electrostatic chuck, the lower end of the suction cup 116 is pressed against the upper surface of the ceramic plate 12 (the degree of compression is sufficient to ensure that when the center of the second pushing part 10 moves upwards...). As the pressing ring 91 is released and reset, the second pushing part 10 also resets, and the center of the second pushing part 10 moves upward. At this time, the moving piston 112 moves upward by the pushing of the push-pull rod 114 and the pulling of the support spring 113. At this time, the gas in the suction cup 116 is drawn into the sealing box 111 through the air guide tube 115 to reduce the air pressure in the suction cup 116. Thus, by the pressure of the external air pressure, the suction cup 116 is firmly pressed against the upper surface of the ceramic plate 12, thereby achieving the relative fixation of the ceramic plate 12 and the main body 1.

[0061] In one embodiment, a sliding groove is provided on the lower end surface of the main body 1. The sliding groove is arranged radially along the main body 1, and a sliding block is provided in the sliding groove. The sliding block is connected to the sealing box 111. The combination structure of the sliding block and the sliding groove is used for filling gaps, so that the sealing box 111 can move radially along the main body 1 to prevent the device from being stuck.

[0062] The present invention also provides an electrostatic chuck system, such as Figure 1 and combined Figure 4 As shown, the electrostatic chuck system includes a sealing ring 6, a base plate 4, a ceramic plate 12 bonded to the base plate 4, a slot 5 between the base plate 4 and the ceramic plate 12, and an auxiliary tooling for installing the sealing ring, wherein the auxiliary tooling for installing the sealing ring is used to assist the sealing ring 6 in being installed into the slot 5.

[0063] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An auxiliary tooling for installing a sealing ring, characterized in that, The utility model provides a kind of electrostatic chuck lifting device, including the main part matched with electrostatic chuck, N support parts arranged on the main part, N is positive integer, and lifting part, wherein: N The support part is annularly arranged, for from inside to the sealing ring support effect, the sealing ring between adjacent two support parts is axially and the radial slot of electrostatic chuck is perpendicular to each other, to when pressing, the upper edge and lower edge of the sealing ring between adjacent two support parts simultaneously enter into the slot; Further comprising mounting portion, the mounting portion is arranged on the main part, wherein the support part is arranged in the mounting portion, and the number of mounting portion is matched with the number of support part arrangement; Further comprising telescopic portion, the telescopic portion is arranged in the mounting portion, one end of the telescopic portion is connected with the support part, the other end of the telescopic portion is connected on the mounting portion; The lifting part is arranged on the main part, after the sealing ring between adjacent two support parts enters into the slot, drive the main part along the axial direction and separate from the electrostatic chuck, to separate from the sealing ring with the support part; The lifting part includes support tube arranged on the main part, the inner tube wall of the support tube is provided with screw thread, and adjusting screw rod and rotating shaft; The adjusting screw rod is screwed in the support tube; The rotating shaft is arranged on the end of the adjusting screw rod close to the electrostatic chuck; Further comprising first pushing portion arranged on the lifting part, and second pushing portion, one end of the second pushing portion is hinged with the first pushing portion, the other end of the second pushing portion is hinged with the support part, press down the first pushing portion, the support part is pushed along the radial direction away from the central axis of the main part by the second pushing portion;Further comprising locking portion arranged on the second pushing portion, to when the second pushing portion resets, the mutual locking of the main part and the electrostatic chuck is realized by adsorption effect; The locking portion includes sealing box movably arranged on the lower end surface of the main part, the moving piston is movably arranged in the sealing box, one end of the support spring is fixedly connected to the upper end surface of the moving piston, the other end of the support spring is fixedly connected to the inner top wall of the sealing box, one end of the push-pull rod is hinged to the lower end surface of the moving piston, the push-pull rod is movably inserted into the bottom plate of the sealing box, the other end of the push-pull rod is hinged to the upper end surface of the second pushing portion, the suction disc is connected to the lower end surface of the second pushing portion, the lower end of the suction disc can abut against the ceramic plate, one end of the air guide pipe is arranged on the sealing box, the other end of the air guide pipe is arranged on the suction disc, the air guide pipe is used for connecting the sealing box and the suction disc;The air guide pipe is arranged below the moving piston.

2. The auxiliary tool according to claim 1, wherein The telescopic portion includes telescopic rod, telescopic cylinder and telescopic spring, wherein: The telescopic rod is movably inserted into the telescopic cylinder, the telescopic spring is wound outside the telescopic rod, and the two ends of the telescopic spring are fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder respectively.

3. The auxiliary tool of claim 1, wherein The number of the second pushing portion is matched with the number of the support part.

4. The auxiliary tool of claim 1, wherein The support part comprises a first section and a third section, and a second section arranged between the first section and the third section and used for connecting the first section and the third section, wherein: An inclined surface is arranged on one side of the second section facing the electrostatic chuck.

5. An electrostatic chuck system, characterized by, The auxiliary tool for installing the sealing ring comprises a sealing ring, a bottom plate, a ceramic plate cemented with the bottom plate, and a clamping groove between the bottom plate and the ceramic plate, and the auxiliary tool for installing the sealing ring is used for assisting the sealing ring to be installed into the clamping groove.

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