Wind speed measuring device
By installing fixtures and anemometer modules within the wafer housing, the problem of measuring the air velocity at the air curtain outlet was solved, enabling efficient and accurate air velocity measurement and improving the success rate of wafer fabrication.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- FOXSEMICON INTEGRATED TECHNOLOGY (SHANGHAI) INC
- Filing Date
- 2022-05-19
- Publication Date
- 2026-05-19
AI Technical Summary
Existing technologies make it difficult to efficiently and accurately measure the air velocity at the air outlet of the air curtain device, which affects the success rate of wafer fabrication processes.
Design a wind speed measurement device, including a fixture and an anemometer module. The fixture is set inside a wafer box. The anemometer module includes a sensor that extends from the wafer box to below the air curtain device for measuring the wind speed at the air outlet of the air curtain device. It is also equipped with a control unit, a storage unit, and a wireless transmission unit to realize data processing and transmission.
This technology enables effective, accurate, convenient, and efficient measurement of the air velocity at the air outlet of the air curtain device, thereby improving the success rate of wafer fabrication processes.
Smart Images
Figure CN117129707B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing processes, and more particularly to a wind speed measuring device. Background Technology
[0002] Currently, front-opening unified pods (FOUPs) are commonly used to store and transport wafers. The FOUP needs to form a closed space to prevent dust, moisture, and oxygen from the surrounding environment from entering and reacting with the wafers inside, causing defects (such as broken wires or short circuits), thus improving wafer manufacturing yield. However, in actual production, the FOUP needs to be open to facilitate the transfer of wafers to the wafer processing equipment. Therefore, an air curtain is required between the FOUP and the wafer processing equipment to block gas convection, preventing the FOUP's interior from being affected by the external environment. The airflow velocity and uniformity of the air curtain directly affect the success rate of the wafer fabrication process. However, it is currently difficult to efficiently and accurately measure the airflow velocity at the air curtain. Summary of the Invention
[0003] In view of this, it is necessary to provide a wind speed measuring device that can measure the wind speed at the air outlet of the air curtain device.
[0004] This application provides a wind speed measuring device for measuring the wind speed at the outlet of an air curtain device, wherein the air curtain device is located at the opening of a wafer cassette, and the wafer cassette is provided with a plurality of receiving slots for accommodating wafers. The wind speed measuring device includes:
[0005] A fixing element is disposed within at least one of the receiving slots within the wafer cassette; and
[0006] An anemometer module is mounted on the fixture. The anemometer module includes a sensor that extends out of the wafer housing and is located below the air curtain device, for measuring the wind speed at the air outlet of the air curtain device.
[0007] Optionally, the anemometer module further includes: a main body disposed on the fixing member; and a probe, one end of which is connected to the main body and the other end of which is connected to the sensor.
[0008] Optionally, there are multiple probes, one end of each probe is rotatably connected to the main body, and the other end is connected to a corresponding sensor. The multiple sensors are spaced apart below the air curtain device.
[0009] Optionally, the wind speed measuring device further includes a sliding module, which is disposed on the fixing member and connected to the anemometer module. The sliding module is used to drive the sensor of the anemometer module to move in a direction away from or towards the wafer cell.
[0010] Optionally, a plurality of the receiving slots are arranged vertically within the wafer cassette and at different heights within the wafer cassette; the number of the fixing members is a plurality, and the plurality of the fixing members are respectively arranged in the corresponding receiving slots, wherein the number of the fixing members is less than the number of the receiving slots.
[0011] Optionally, the shape and size of the fixing member are the same as those of the wafer.
[0012] Optionally, the wind speed measuring device further includes: a control unit; the control unit is used to send a control signal to the sensor, and the sensor is used to detect the wind speed after receiving the control signal.
[0013] Optionally, the wind speed measuring device further includes a switching unit electrically connected to the control unit, which is used to control the sensor to operate when the switching unit is triggered.
[0014] Optionally, the wind speed measuring device further includes: a storage unit and a wireless transmission unit electrically connected to the control unit; the storage unit is used to store the data measured by the sensor; and the wireless transmission unit is used to transmit the stored data to an external electronic device.
[0015] Optionally, the control unit, the storage unit, and the wireless transmission unit are all located within the anemometer module.
[0016] Compared with the prior art, this application has at least the following advantages:
[0017] This application forms a wind speed measuring device by combining a fixing component with an anemometer module, placing the wind speed measuring device inside a wafer box, and extending the sensor out of the wafer box to the bottom of the air curtain device, so as to measure the wind speed at the air outlet of the air curtain device. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of a wind speed measuring device and an air curtain device provided in one embodiment of this application.
[0019] Figure 2 for Figure 1 The diagram shows a module schematic of the wind speed measuring device.
[0020] Figure 3 for Figure 1 A schematic diagram of the wind speed measuring device shown from another angle.
[0021] Figure 4 for Figure 1 Another schematic diagram of the wind speed measuring device shown.
[0022] Figure 5 A schematic diagram showing the wind speed directly below the air curtain device measured by the anemometer module.
[0023] Figure 6 A schematic diagram showing the wind speed measured by the anemometer module below and to the side of the air curtain device.
[0024] Explanation of main component symbols
[0025] Wind speed measuring devices 100, 100a, 100b
[0026] Air curtain device 200
[0027] Wafer Box 10
[0028] Opening 11
[0029] Receiving slot 12
[0030] Air intake 13
[0031] Exhaust port 14
[0032] Fastener 20
[0033] Anemometer modules 30, 30a, 30b
[0034] Main body 31
[0035] Probes 32, 32a, 32b
[0036] Sensors 33, 33a, 33b
[0037] 33c, 33d, 33e
[0038] Sliding module 40
[0039] Power supply 50
[0040] Control Unit 60
[0041] Storage unit 70
[0042] Wireless transmission unit 80
[0043] Switching unit 90
[0044] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation
[0045] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. Many specific details are set forth in the following description to provide a thorough understanding of this application; the described embodiments are merely some, not all, of the embodiments described in this application.
[0046] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The term "and / or" as used herein includes all and any combination of one or more of the associated listed items.
[0047] In the various embodiments of this application, for ease of description and not limitation, the term "connection" used in the patent application specification and claims is not limited to physical or mechanical connections, whether direct or indirect. Terms such as "upper," "lower," "above," "below," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship also changes accordingly.
[0048] Currently, front-opening unified pods (FOUPs) are commonly used to store and transport wafers. The FOUP needs to form a closed space to prevent dust, moisture, and oxygen from the surrounding environment from entering and reacting with the wafers inside, causing defects (such as broken wires or short circuits), thus improving wafer manufacturing yield. However, in actual production, the FOUP needs to be open to facilitate the transfer of wafers to the wafer processing equipment. Therefore, an air curtain is required between the FOUP and the wafer processing equipment to block gas convection, preventing the FOUP's interior from being affected by the external environment. The airflow velocity and uniformity of the air curtain directly affect the success rate of the wafer fabrication process. However, it is currently difficult to efficiently and accurately measure the airflow velocity at the air curtain.
[0049] Therefore, this application provides a wind speed measuring device that can effectively measure the wind speed at the outlet of the air curtain device between the wafer cassette and the wafer processing equipment (not shown).
[0050] Example 1:
[0051] Please see Figure 1 This is a schematic diagram of a wind speed measuring device 100 provided in an embodiment of this application. Figure 1 As shown, the wind speed measuring device 100 includes a fixing component 20 and an anemometer module 30.
[0052] The fixture 20 is disposed within the wafer cassette 10. The wafer cassette 10 is used to carry wafers or to house the fixture 20. An opening 11 is provided on one side of the wafer cassette 10, and a movable door (not shown) is provided at the opening 11. The movable door can be opened by relevant equipment or personnel. Thus, the wafer (or fixture 20) disposed in the wafer cassette 10 can be removed through the opening 11, or the wafer (or fixture 20) can be placed in the wafer cassette 10.
[0053] The wafer cassette 10 also has several receiving slots 12. These receiving slots 12 can be used to accommodate wafers or fixtures 20. In one possible implementation, the receiving slots 12 can be stacked in the wafer cassette 10. For example, the wafer cassette 10 in this embodiment has multiple receiving slots 12 (e.g., 25). The multiple receiving slots 12 are arranged vertically along the wafer cassette 10 and are located at different heights within the wafer cassette 10.
[0054] The bottom of the wafer cassette 10 is also provided with an air inlet 13 and an air outlet 14, which are used in conjunction with an inflation device and an air extraction device (not shown) to replace the gas inside the wafer cassette 10. For example, the inflation device fills the wafer cassette 10 with gas through the air inlet 13. The air extraction device exhausts the gas inside the wafer cassette 10 through the air outlet 14. In this way, the inflation device and the air extraction device can replace the gas inside the wafer cassette 10, thereby removing moisture and oxygen from the wafer cassette 10, allowing the wafers inside the wafer cassette 10 to be stored for a longer period of time.
[0055] In this embodiment, the fixing member 20 is disposed within the receiving slot 12 inside the wafer cassette 10. It can be understood that the shape and size of the fixing member 20 are the same as or similar to the wafer stored in the wafer cassette 10. In this way, the fixing member 20 is more securely held in the receiving slot 12 inside the wafer cassette 10, which is originally used to load the wafer.
[0056] An anemometer module 30 is mounted on the fixture 20 and positioned near the opening 11. The anemometer module 30 includes a main body 31, a probe 32, and a sensor 33. The main body 31 is mounted on the fixture 20. One end of the probe 32 is connected to the main body 31. The other end of the probe 32, the end furthest from the main body 31, is positioned towards the outside of the wafer cassette 10 and extends out of the opening 11. The sensor 33 is positioned at the end of the probe 32 furthest from the main body 31 and is positioned corresponding to the air curtain device 200, for example, below the air curtain device 200, for measuring the wind speed blown from the air curtain device 200 to the opening 11.
[0057] It is understood that several anemometer modules 30 can be set in the same wafer box 10. For example, several anemometer modules 30 can be set at intervals in multiple receiving slots 12 at different heights to measure the wind speed at different heights below the air curtain device 200.
[0058] In some embodiments, the main body 31 is not only provided with the probe 32, but the interior of the main body 31 is also provided with a hollow structure, which can be used to accommodate other components.
[0059] It is understood that by setting the fastener 20 together with the anemometer module 30 to form the wind speed measuring device 100, the wind speed measuring device 100 can be fixed inside the wafer box 10, and the sensor 33 can be extended from the wafer box 10 to the bottom of the air curtain device 200 by the probe 32. In this way, the wind speed at the air outlet of the air curtain device 200 can be measured.
[0060] Please refer to the following: Figure 2 In this embodiment, the wind speed measuring device 100 also includes a power supply 50, a control unit 60, a storage unit 70, a wireless transmission unit 80, and a switching unit 90. The power supply 50, control unit 60, storage unit 70, wireless transmission unit 80, and switching unit 90 can be integrated into the anemometer module 30 (e.g., located inside or on the surface of the anemometer module 30).
[0061] The power supply 50 supplies power to components such as the sensor 33, control unit 60, storage unit 70, wireless transmission unit 80, and switching unit 90. The power supply 50 may include a battery and a power control board. The power control board is used to control battery charging, discharging, and power consumption management.
[0062] Storage unit 70 is used to store software programs and various data, such as signals measured by sensor 33. Storage unit 70 may primarily include a program storage area and a data storage area. The program storage area may store operating system programs, control programs, application programs (such as text editors), etc.; the data storage area may store data generated during the use of the wind speed measuring device 100. Storage unit 70 may include high-speed random access memory, and may also include non-volatile memory, such as disk storage, flash memory, or other volatile solid-state memory.
[0063] The control unit 60 is the control center of the wind speed measuring device 100. The control unit 60 is electrically connected to all components of the wind speed measuring device 100. The control unit 60 is used to send a first control signal to the sensor 33. The sensor 33 starts working when it receives the first control signal, detects the wind speed, and stores the detected data in the storage unit 70.
[0064] The wireless transmission unit 80 is used to transmit data stored in the storage unit 70 to an external electronic device. The electronic device can be a personal computer, tablet computer, smartphone, personal digital assistant (PDA), etc., but is not limited to these.
[0065] The switching unit 90 is used to control the opening and closing of the sensor 33. Specifically, when the switching unit 90 is triggered, the control unit 60 controls the sensor 33 to operate in order to measure the wind speed; when the switching unit 90 is closed, the control unit 60 controls the sensor 33 to stop operating. In this way, the switching unit 90 can turn on the sensor 33 in advance when a physical quantity measurement is needed, and turn the sensor 33 off when the measurement is completed.
[0066] It is understood that in some embodiments, the power supply 50, control unit 60, storage unit 70, and wireless transmission unit 80 are all located inside the main body 31 of the anemometer module 30.
[0067] Example 2:
[0068] Please see Figure 3 This is another wind speed measuring device 100a provided in the embodiments of this application. Figure 3 As shown, the structure of the wind speed measuring device 100a is similar to that of the wind speed measuring device 100, except that the anemometer module 30a in the wind speed measuring device 100a includes several probes 32a. Each probe 32a has a sensor 33 at its end furthest from the main body 31. Several sensors 33 are spaced apart and positioned directly below the air curtain device 200, i.e. Figure 3 Region A is shown in the diagram.
[0069] Obviously, in embodiment 2, the wind speed measuring device 100a is equipped with an anemometer module 30a, which includes several probes 32a. In this way, the wind speed at different points in area A can be sensed by the sensor 33 set on the corresponding probe 32a, thereby determining whether the wind blown out of the air curtain device 200 to the opening 11 is uniform.
[0070] Understandable, such as Figure 3 As shown, when there are multiple probes 32a in the anemometer module 30a, at least some of the probes 32a are rotatably connected to the main body 31 at one end near the main body 31. For example, two probes 32a located on both sides of the main body 31 are rotatably connected to the main body 31, and the distance between them and the inner probe 32a is a first interval. The other probes 32a located between these two probes 32a are all fixedly connected to the main body 31 and are arranged at equal intervals, with the distance between adjacent probes 32a being a second interval, wherein the first interval is smaller than the second interval.
[0071] In these embodiments, since the length of the main body 31 of the wafer cassette 10 is less than the length of the air outlet area (i.e., area A) of the air curtain device 200, if all probes 32a are set perpendicular to the main body 31, the wind speed at the outermost point of area A cannot be measured. It is understood that by setting the two outermost probes 32a to be rotatably connected to the main body 31, the portion of the probes 32a extending out of the opening 11 can open at a certain angle on the horizontal plane (e.g., the plane where the fixing member 20 is located), allowing several sensors 33 to be set at equal intervals, for example, all at a second interval. Thus, the anemometer module 30a can measure the wind speed at the outermost point directly below the air curtain device 200, and the data obtained from the equally spaced measurements better reflects the uniformity of wind speed at multiple points on the same horizontal plane.
[0072] It is understood that in some other embodiments, the anemometer module 30a includes a plurality of probes 32a, and the end of each probe 32a near the main body 31 is rotatably connected to the main body 31.
[0073] Example 3:
[0074] Please see Figure 4 This is another wind speed measuring device 100b provided in the embodiments of this application. Figure 3 As shown, the structure of the wind speed measuring device 100b is similar to that of the wind speed measuring device 100. The difference is that the anemometer module 30b in the wind speed measuring device 100b can not only measure the wind speed directly below the air curtain device 200, but also measure the wind speed to the side below the air curtain device 200 (e.g., below the air curtain device 200). Figure 4 The wind speed in area B shown in the diagram refers to the wind speed below the side of the air curtain device 200 away from the wafer cassette 10.
[0075] exist Figure 4 In the illustrated embodiment, the wind speed measuring device 100b further includes a sliding module 40. An anemometer module 30b is mounted on the sliding module 40 and can move under the drive of the sliding module 40 to move the probe 32b and sensor 33 in a direction away from or towards the wafer cassette 10. It can be understood that by setting the sliding module 40, the anemometer module 30b can simultaneously measure the wind speed directly below the air curtain device 200 and the wind speed below the side of the air curtain device 200 away from the wafer cassette 10.
[0076] Please see Figure 5The diagram shows multiple wind speed measuring devices 100a / 100b placed simultaneously within a wafer cassette 10. Taking wind speed measuring device 100a as an example, the diagram shows wind speed curves measured by multiple wind speed measuring devices 100a located at different receiving slots 12 directly below the air curtain device 200. Curves S51, S52, S53, S54, and S55 represent the wind speeds measured by wind speed measuring devices 100a located in the receiving slots 12 of the first, fifth, tenth, fifteenth, and twentieth layers, respectively. The wind speed measuring device 100a includes, as shown in the diagram... Figure 3 Sensors 33a, 33b, 33c, 33d, and 33e are shown.
[0077] Obviously, by Figure 5 It can be seen that the wind speed measured by the wind speed measuring device 100a in the receiving tank closer to the air curtain device 200 is higher. For example, the wind speed measured by the wind speed measuring device 100a in the receiving tank 12 on the twentieth floor is the highest at multiple sensors 33.
[0078] Please see Figure 6 The diagram shows wind speed curves measured by multiple wind speed measuring devices 100b placed simultaneously within a wafer cassette 10. These devices are located at different locations within receiving slots 12, measuring wind speeds at a point 50 mm below the air curtain device 200 and away from the wafer cassette 10. Curves S61, S62, S63, S64, and S65 represent wind speeds measured by the wind speed measuring devices 100b located in the receiving slots 12 of the first, fifth, tenth, fifteenth, and twentieth layers, respectively. The wind speed measuring devices 100b include, for example, [details omitted]. Figure 4 Sensors 33a, 33b, 33c, 33d, and 33e are shown.
[0079] Obviously, by Figure 6 It can be seen that the wind speed measured by the sensor 33 closer to the center of the same wind speed measuring device 100b is higher. In other words, on the side of the air curtain device 200 away from the wafer cassette 10, at the same height (i.e., the same distance from the air curtain device 200), the wind speed is higher closer to the center of the air curtain device 200. For example, the wind speed measured by the sensor 33c in the same wind speed measuring device 100b is higher.
[0080] This application sets the fixing member 20 together with the anemometer module 30 / 30a / 30b to form an anemometer device 100 / 100a / 100b, and sets the anemometer device 100 / 100a / 100b inside the wafer box 10. Then, the sensor 33 is extended from the wafer box 10 to the bottom of the air curtain device 200 by the probe 32 / 32a / 32b. In this way, the wind speed blown out of the air curtain device 200 to the opening 11 can be effectively, accurately, conveniently and efficiently measured.
[0081] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.
Claims
1. A wind speed measuring device for measuring the wind speed at the outlet of an air curtain device, wherein the air curtain device is located at the opening of a wafer cassette, and the wafer cassette is provided with a plurality of receiving slots for receiving wafers, characterized in that, The wind speed measuring device includes: A fixing member is disposed within at least one of the receiving slots within the wafer cassette; and An anemometer module is mounted on the fixing member. The anemometer module includes a sensor that extends out of the wafer cell and is located below the air curtain device for measuring the wind speed at the air outlet of the air curtain device. A main body is mounted on the fixing member. A probe is connected to the main body at one end and to the sensor at the other end. There are multiple probes, each of which is rotatably connected to the main body at one end and connected to the corresponding sensor at the other end. Multiple sensors are spaced apart below the air curtain device. A sliding module is disposed on the fixing member and connected to the anemometer module. The sliding module is used to drive the sensor of the anemometer module to move in a direction away from or towards the wafer cell.
2. The wind speed measuring device as described in claim 1, characterized in that, Several of the receiving slots are arranged vertically within the wafer cassette and are located at different heights within the wafer cassette; the number of the fixing members is several, and the several fixing members are respectively arranged in the corresponding receiving slots, wherein the number of the fixing members is less than the number of the receiving slots.
3. The wind speed measuring device as described in claim 1, characterized in that, The shape and size of the fixing component are the same as those of the wafer.
4. The wind speed measuring device as described in claim 1, characterized in that, The wind speed measuring device also includes: a control unit; The control unit is used to send a control signal to the sensor, and the sensor is used to detect the wind speed after receiving the control signal.
5. The wind speed measuring device as described in claim 4, characterized in that, The wind speed measuring device also includes a switching unit, which is electrically connected to the control unit. The control unit is used to control the sensor to work when the switching unit is triggered.
6. The wind speed measuring device as described in claim 4, characterized in that, The wind speed measuring device further includes: a storage unit and a wireless transmission unit electrically connected to the control unit; The storage unit is used to store the data measured by the sensor; The wireless transmission unit is used to transmit the stored data to an external electronic device.
7. The wind speed measuring device as described in claim 6, characterized in that, The control unit, the storage unit, and the wireless transmission unit are all located within the anemometer module.