An adjustable parameter ion pump test fixture

Abstract

This invention relates to a testing fixture for ion pumps in the field of ultra-high vacuum, specifically an adjustable parameter ion pump testing fixture, comprising a main welded component, a cover plate, a pumping unit, a cathode titanium plate, a magnetic yoke welded component, and a frame assembly. The main welded component includes a bellows welded component and an electrode connector; the bellows welded component includes a bellows joint and a bellows; the pumping unit includes a lead wire support rod and an anode cylinder; the magnetic yoke welded component includes a magnetic yoke plate, a magnetic yoke cylinder, and a magnet; and the frame assembly includes a support plate and a frame. The bellows of this invention allows for convenient and rapid adjustment of the distance between the cathode titanium plate and the anode cylinder, while the distance between the magnetic yoke and the cathode titanium plate is also adjustable. This invention provides research tools for structural optimization and performance research of ion pumps by changing structural parameters such as the anode cylinder size, cathode titanium plate size, the distance between the anode cylinder and the cathode titanium plate, and the distance between the magnet and the cathode titanium plate.

Description

Technical Field

[0001] This invention relates to a testing fixture for ion pumps in the field of ultra-high vacuum, specifically a testing fixture for ion pumps with adjustable parameters. Background Technology

[0002] Sputtering ion pumps, as one of the important means to obtain ultra-high vacuum, have been widely developed and applied. Theoretical research on ion pumps has always been a hot topic in the field of vacuum research, and the optimized design of structural parameters is the foundation for ion pump performance research. For example, the distance between the anode cylinder and the cathode titanium plate, the size of the anode cylinder, the size of the cathode plate, and the magnetic field distribution are all important parameters affecting the performance of ion pumps. Summary of the Invention

[0003] The purpose of this invention is to provide an adjustable parameter ion pump testing fixture, which can be used for structural optimization and performance research of ion pumps by changing single or multiple structural parameters such as the size of the anode cylinder, the size of the cathode titanium plate, the distance between the anode cylinder and the cathode titanium plate, and the distance between the magnet and the cathode titanium plate.

[0004] The objective of this invention is achieved through the following technical solution:

[0005] This invention includes a main weldment, a cover plate, a vacuum unit, a cathode titanium plate, a magnetic yoke weldment, and a vehicle frame assembly. The main weldment includes a bellows weldment, an electrode connector, and a pump housing. The pump housing is mounted on the vehicle frame assembly. One end of the electrode connector is fixed to the pump housing, and the other end is connected to an electrode. A vacuum unit is located inside the pump housing at a position corresponding to the electrode connector. The vacuum unit includes a lead wire support rod and an anode cylinder. The anode cylinder is installed inside the pump housing. One end of the lead wire support rod is connected to the anode cylinder, and the other end is connected to the electrode connected to the electrode connector. The left and right sides of the electrode connector have identical structures, each side having a bellows weldment, a cover plate, a cathode titanium plate, and a magnetic yoke weldment. The bellows weldment includes a bellows and a bellows connector, and the magnetic yoke weldment includes a magnetic yoke. The system comprises a plate, a magnetic yoke cylinder, and a magnet. One end of the bellows is connected to the pump housing, and the other end is connected to a bellows connector. One end of the cover plate is fixed to the bellows connector, and the other end of the cover plate is connected to a cathode titanium plate opposite to the anode cylinder after passing through the bellows. A fully threaded bolt is provided between the bellows connector and the pump housing. The fully threaded bolt passes through the pump housing and is threadedly connected to the bellows connector. By tightening the fully threaded bolt, the bellows can be extended or retracted, thereby adjusting the distance between the cathode titanium plate and the anode cylinder. One end of the magnetic yoke cylinder extends into the cover plate and is connected to a magnet. The other end of the magnetic yoke cylinder is connected to the magnetic yoke plate. The magnetic yoke plate is movably mounted on the frame assembly, and the distance between the magnet and the cathode titanium plate is adjusted by moving the magnetic yoke plate.

[0006] Wherein: each end of the pump casing has a plurality of smooth holes evenly opened along the circumferential direction, and each side of the corrugated pipe joint has a plurality of threaded holes evenly opened along the circumferential direction. The number of threaded holes is the same as the number of smooth holes and corresponds one-to-one. Each set of corresponding threaded holes and smooth holes is connected by a fully threaded bolt. One end of the fully threaded bolt is located on one side of the pump casing end and abuts against the pump casing. The other side of the pump casing end abuts against the nut threaded onto the fully threaded bolt. The other end of the fully threaded bolt passes through the smooth hole and is threadedly connected to the threaded hole.

[0007] Multiple anode cylinders are connected in sequence and installed inside the pump housing. A lead wire support plate is welded to the uppermost anode cylinder, and a lead wire stud is welded to the lead wire support plate. One end of the lead wire support rod is threaded to the lead wire stud, and the other end of the lead wire support rod extends into the electrode connector.

[0008] The lower end of the magnetic yoke plate is fixedly connected to a magnetic yoke support. A strip hole is opened on the frame assembly along the extension and retraction direction of the corrugated tube. The magnetic yoke support moves back and forth in the strip hole and remains fixed to the frame assembly after being adjusted to the correct position.

[0009] A stiffening plate is added between the magnetic yoke plate and the magnetic yoke support.

[0010] The frame assembly includes a frame and a support plate fixed to the top of the frame, and the strip hole is formed in the support plate.

[0011] The pump housing is fixed to the vehicle frame assembly by bracket legs.

[0012] The pump casing is connected to a vacuum connector for connecting to a test hood, and the end of the vacuum connector is provided with an inner welded flange.

[0013] The advantages and positive effects of this invention are as follows:

[0014] This invention enables the modification of single or multiple variables of the structural parameters of the ion pump (anode cylinder size, cathode titanium plate size, distance between the anode cylinder and the cathode titanium plate, and distance between the magnet and the cathode titanium plate), providing an important research tool for the structural optimization and performance study of the ion pump. Attached Figure Description

[0015] Figure 1 This is a cross-sectional view of the structure of the present invention;

[0016] Figure 2 for Figure 1 Top view of the structure;

[0017] Wherein: 1 is electrode connector, 2 is pump housing, 3 is bellows, 4 is bellows joint, 5 is cover plate, 6 is screw, 7 is lead wire support rod, 8 is anode cylinder, 9 is cathode titanium plate, 10 is magnet, 11 is magnetic yoke plate, 12 is magnetic yoke cylinder, 13 is stiffening plate, 14 is magnetic yoke support, 15 is support plate, 16 is frame, 17 is support leg, 18 is lead wire support plate, 19 is lead wire stud, 20 is inner welded flange, 21 is vacuum connector, 22 is fully threaded bolt, 23 is nut, and 24 is strip hole. Detailed Implementation

[0018] The invention will now be described in further detail with reference to the accompanying drawings.

[0019] like Figure 1 , Figure 2 As shown, the present invention includes a main weldment, a cover plate 5, an extraction unit, a cathode titanium plate 9, a magnetic yoke weldment, and a frame assembly. The main weldment includes a bellows weldment, an electrode connector 1, and a pump housing 2. The pump housing 2 is mounted on the frame assembly. One end of the electrode connector 1 is welded to the pump housing 2, and the other end is connected to an electrode. An extraction unit is provided inside the pump housing 2 at a position corresponding to the electrode connector 1. The extraction unit includes a lead wire support rod 7 and an anode cylinder 8. The anode cylinder 8 is installed inside the pump housing 2. One end of the lead wire support rod 7 is connected to the anode cylinder 8, and the other end of the lead wire support rod 7 is connected to the electrode connected to the electrode connector 1. The left and right sides of the electrode connector 1 have the same structure. Each side is provided with a bellows weldment, a cover plate 5, a cathode titanium plate 9, and a magnetic yoke weldment. The bellows weldment includes a bellows 3 and a bellows connector 4. The magnetic yoke weldment includes a magnetic yoke plate 11 and a magnetic yoke cylinder 1. 2 and magnet 10, one end of bellows 3 is connected to pump housing 2, the other end of bellows 3 is connected to bellows joint 4, one end of cover plate 5 is fixed to bellows joint 4, the other end of cover plate 5 is connected to cathode titanium plate 9 opposite to anode cylinder 8 after passing through bellows 3, a fully threaded bolt 22 is provided between bellows joint 4 and pump housing 2, the fully threaded bolt 22 passes through pump housing 2 and is threaded to bellows joint 4, bellows 3 is extended and retracted by turning fully threaded bolt 22, thereby adjusting the distance between cathode titanium plate 9 and anode cylinder 8; one end of magnetic yoke cylinder 12 extends into cover plate 5 and is connected to magnet 10, the other end of magnetic yoke cylinder 12 is connected to magnetic yoke plate 11, magnetic yoke plate 11 can be relatively movable and installed on frame assembly, the distance between magnet 10 and cathode titanium plate 9 is adjusted by moving magnetic yoke plate 11.

[0020] The frame assembly of this embodiment includes a frame 16 and a support plate 15 fixed to the top of the frame 16. A bracket leg 17 is provided below the pump housing 2, and the pump housing 2 is fixed to the support plate 15 of the frame assembly through the bracket leg 17.

[0021] In this embodiment, the cover plate 5 is cylindrical, with one edge extending radially outward and fixed to the corrugated pipe joint 4 by screws 6. The cathode titanium plate 9 is a circular plate. During assembly, the other end of the cover plate 5 passes through the corrugated pipe 3 and is connected to the cathode titanium plate 9 by screws.

[0022] In this embodiment, multiple smooth holes are evenly distributed along the circumference at each end of the pump housing 2 on both the left and right sides. Multiple threaded holes are evenly distributed along the circumference on each side of the bellows joint 4. The number of threaded holes corresponds to the number of smooth holes, and each set of threaded holes and smooth holes is connected by a fully threaded bolt 22. One end of the fully threaded bolt 22 is located on one side of the pump housing 2 end and abuts against the pump housing 2. The other side of the pump housing 2 end abuts against the nut 23 tightened on the fully threaded bolt 22, preventing the bellows 3 from being compressed and changing its spacing during vacuuming. The other end of the fully threaded bolt 22 passes through the smooth hole and is threadedly connected to the threaded hole. The fully threaded bolt 22 and the smooth hole on the pump housing 2 have a clearance fit.

[0023] In this embodiment, the pump housing 2 is connected to a vacuum connector 21 for connecting to a test shroud. The end of the vacuum connector 21 is provided with an inner welded flange 20. The pump housing 2 in this embodiment includes a CF (knife-edge flange) 40 interface (i.e., vacuum connector 21) and a CF16 interface (i.e., electrode connector 1). The CF40 interface is connected to the test shroud via an adapter, and the CF16 interface is connected to the electrode.

[0024] There are multiple anode cylinders 8 (19 in this embodiment), which are connected in sequence and installed in the pump housing 2. A lead wire support plate 18 is welded on the uppermost anode cylinder 8, and a lead wire stud 19 is welded on the lead wire support plate 18. One end of the lead wire support rod 7 is threadedly connected to the lead wire stud 19, and the other end of the lead wire support rod 7 extends into the electrode connector 1 and is connected to the electrode.

[0025] In this embodiment, a magnetic yoke support 14 is fixedly connected to the lower end of the magnetic yoke plate 11. A strip hole 24 is provided on the support plate 15 of the frame assembly along the extension and retraction direction of the corrugated pipe. The magnetic yoke support 14 reciprocates within the strip hole 24 and remains fixed to the frame assembly after adjustment, thereby realizing the adjustment of the distance between the magnet 10 and the cathode titanium plate 9. In this embodiment, a stiffening rib 13 is added between the magnetic yoke plate 11 and the magnetic yoke support 14.

[0026] In this embodiment, the main welded parts, cover plate 5, vacuum pipe 21, inner welded flange 20, support leg 17, air extraction unit, lead wire support plate 18, and lead wire stud 19 are all made of AISI304, the cathode titanium plate 9 is made of titanium, the magnetic yoke welded parts are made of DT4, and the frame 16 is made of aluminum alloy profiles.

[0027] The distance between the cathode titanium plate 9 and the anode cylinder 8 can be easily and quickly adjusted by changing the screwing depth of the fully threaded bolt 22 and the bellows connector 4, with an adjustment range of 4–15 mm. The distance between the magnet 10 and the cathode titanium plate 9 can be adjusted by moving the magnetic yoke support 14 within the strip hole 24, with an adjustment range of 2–20 mm.

Claims

1. A parameter-adjustable ion pump test tool, characterized by: The pump comprises a main welding part, a cover plate (5), a pumping unit, a cathode titanium plate (9), a magnetic yoke welding part and a frame assembly, wherein the main welding part comprises a bellows welding part, an electrode connecting pipe (1) and a pump shell (2), the pump shell (2) is installed on the frame assembly, one end of the electrode connecting pipe (1) is fixedly connected to the pump shell (2), the other end of the electrode connecting pipe (1) is connected with an electrode, the pumping unit is arranged in the pump shell (2) corresponding to the electrode connecting pipe (1), the pumping unit comprises a lead wire supporting rod (7) and an anode cylinder (8), the anode cylinder (8) is installed in the pump shell (2), one end of the lead wire supporting rod (7) is connected with the anode cylinder (8), the other end of the lead wire supporting rod (7) is connected with the electrode connected with the electrode connecting pipe (1); the structure of the electrode connecting pipe (1) on the left side is the same as that on the right side, and the bellows welding part, the cover plate (5), the cathode titanium plate (9) and the magnetic yoke welding part are arranged on each side, the bellows welding part comprises a bellows (3) and a bellows joint (4), the magnetic yoke welding part comprises a magnetic yoke plate (11), a magnetic yoke cylinder (12) and a magnet (10), one end of the bellows (3) is connected with the pump shell (2), the other end of the bellows (3) is connected with the bellows joint (4), one end of the cover plate (5) is fixedly connected with the bellows joint (4), the other end of the cover plate (5) is connected with the cathode titanium plate (9) opposite to the anode cylinder (8) after penetrating the bellows (3), a full thread bolt (22) is arranged between the bellows joint (4) and the pump shell (2), the full thread bolt (22) is threadedly connected with the bellows joint (4) after penetrating the pump shell (2), the bellows (3) is stretched or contracted by rotating the full thread bolt (22), so that the distance between the cathode titanium plate (9) and the anode cylinder (8) is adjusted, one end of the magnetic yoke cylinder (12) penetrates into the cover plate (5) and is connected with the magnet (10), the other end of the magnetic yoke cylinder (12) is connected with the magnetic yoke plate (11), the magnetic yoke plate (11) is movably installed on the frame assembly, and the distance between the magnet (10) and the cathode titanium plate (9) is adjusted by moving the magnetic yoke plate (11).

2. The ion pump test tool of claim 1, wherein: A plurality of light holes are uniformly arranged on each end of the pump shell (2) along the circumferential direction, a plurality of threaded holes are uniformly arranged on the bellows joint (4) on each side along the circumferential direction, the number of the threaded holes is the same as that of the light holes and corresponds to the light holes one by one, and each set of corresponding threaded holes and light holes are connected by a full thread bolt (22), one end of the full thread bolt (22) is located on one side of the end of the pump shell (2) and abuts against the pump shell (2), the other side of the end of the pump shell (2) abuts against a nut (23) threadedly connected on the full thread bolt (22), and the other end of the full thread bolt (22) is threadedly connected with the threaded hole after penetrating the light hole.

3. The ion pump test tool of claim 1, wherein: The anode cylinder (8) is multiple, sequentially connected and installed in the pump shell (2), the uppermost anode cylinder (8) is welded with a lead branch plate (18), the lead branch plate (18) is welded with a lead stud (19), one end of the lead support rod (7) is screwed with the lead stud (19), the other end of the lead support rod (7) extends into the electrode connecting pipe (1).

4. The ion pump test tool of claim 1, wherein: The lower end of the magnetic yoke plate (11) is fixed with a magnetic yoke support (14), a strip-shaped hole (24) is formed in the vehicle frame assembly along the corrugated pipe extension direction, the magnetic yoke support (14) reciprocates in the strip-shaped hole (24) and is fixed with the vehicle frame assembly after adjustment.

5. The ion pump test tool of claim 4, wherein: The magnetic yoke plate (11) and the magnetic yoke support (14) are additionally provided with a rib plate (13).

6. The ion pump test tool of claim 4, wherein: The vehicle frame assembly comprises a vehicle frame (16) and a support plate (15) fixed on the top of the vehicle frame (16), and the strip-shaped hole (24) is formed in the support plate (15).

7. The ion pump test tool of claim 1, wherein: The pump shell (2) is fixed on the vehicle frame assembly through a support leg (17).

8. The ion pump test tool of claim 1, wherein: The pump shell (2) is connected with a vacuum connecting pipe (21) for connecting with a test cover, and the end of the vacuum connecting pipe (21) is provided with an inner welding flange (20).

Images