Method and system for electrochemical machining

Abstract

Methods and systems of electrochemically machining a workpiece are provided. The method can include applying two or more electric potentials to a tool electrode comprising an array of two or more individual electrodes to generate two or more electric fields between the tool electrode and a workpiece opposite the tool electrode, wherein each of the two or more electric fields is generated by one of the array of two or more individual electrodes.

Description

Technical Field

[0001] The field of this disclosure generally relates to electrochemical processing, and more specifically, to methods and systems for performing electrochemical processing. Background Technology

[0002] Electrochemical machining (ECM) is a process that removes conductive materials (such as metallic materials) through electrochemical processes. It is commonly used to machine (process / finish) workpieces composed of conductive materials. ECM is particularly suitable for metals and alloys with high hardness, making them difficult to machine using conventional methods. For example, nickel-based alloys can be machined using ECM to manufacture a variety of workpieces.

[0003] During the ECM process, an applied potential is used to oxidize a conductive material from the workpiece, allowing current to flow at a controlled rate. The workpiece serves as the anode and is separated from a tool electrode, which serves as the cathode, by a gap. An electrolyte (typically a brine solution) flows through the gap, washing away the oxidized material on the workpiece. As the tool electrode moves toward the workpiece to maintain the controlled gap, the workpiece is machined into a shape complementary to the tool electrode. Attached Figure Description

[0004] The specification with reference to the accompanying drawings sets forth a complete and feasible disclosure for those skilled in the art, including its best mode, wherein:

[0005] Figure 1 A front view schematic diagram of an exemplary electrochemical processing system is shown, including a tool electrode comprising an array of two or more individual electrodes not in operation.

[0006] Figure 2 A front view schematic diagram of an exemplary electrochemical processing system is shown, including a tool electrode comprising an array of two or more individual electrodes in operation;

[0007] Figure 3 It shows Figure 1 and Figure 2 A three-dimensional view of the bottom of the tool electrode;

[0008] Figure 4 A schematic diagram of a computing system including computing devices is shown, wherein one of the computing devices may have the same or similar function as the controller of this disclosure;

[0009] Figures 5A-5D A schematic diagram illustrating an exemplary embodiment of a tool electrode traveling in a non-linear direction into a workpiece is shown; and

[0010] Figure 6 A flowchart of an electrochemical processing method according to this disclosure is shown.

[0011] Reference characters are used repeatedly in this specification and drawings to indicate the same or similar features or elements of this disclosure. Detailed Implementation

[0012] Reference will now be made in detail to preferred embodiments, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of explaining the invention and not by way of limiting it. In fact, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the scope of the invention. For example, a feature shown or described as part of one embodiment may be used with another embodiment to produce yet another embodiment. Therefore, this disclosure is intended to cover such modifications and variations that fall within the scope of the appended claims and their equivalents.

[0013] The term "exemplary" as used herein means "serving as an example, instance, or illustration." Any implementation described herein as "exemplary" is not necessarily to be construed as superior to or advantageous to other implementations. Furthermore, unless specifically stated otherwise, all embodiments described herein should be considered exemplary.

[0014] Unless otherwise expressly stated herein, the terms “connection,” “fixed,” “attached to,” etc., refer to direct connection, fixation, or attachment, as well as indirect connection, fixation, or attachment via one or more intermediate components or features.

[0015] As used herein, the terms “first,” “second,” and “third” are used interchangeably to distinguish one component from another and are not intended to indicate the location or importance of the individual components.

[0016] In the following description and claims, unless the context clearly specifies otherwise, the singular forms “a,” “an,” and “the” include plural references. As used herein, unless the context clearly specifies otherwise, the term “or” is not intended to be exclusive and refers to the presence of at least one of the referred components and includes the possibility of combinations of the referred components.

[0017] As used herein, “minimum size” refers to the degree of precision that an electrochemical machine can produce on a workpiece. In the prior art, tool electrodes positioned close to the workpiece are typically able to replicate surfaces with a minimum size of 2.54 µm or larger on the workpiece.

[0018] During the ECM process, an applied potential is used to oxidize a conductive material from the workpiece, allowing current to flow at a controlled rate. The workpiece serves as the anode and is separated from a tool electrode, which serves as the cathode, by a gap. An electrolyte (typically a brine solution) flows through the gap, washing away the oxidized material on the workpiece. As the tool electrode moves toward the workpiece to maintain the controlled gap, the workpiece is machined into a shape complementary to the tool electrode.

[0019] ECM typically provides the required shape control and smooth surface finish for manufacturing workpieces, including, for example, bladed disks and gas turbines, jet engines, and generators. ECM, which removes material using an oxidation reaction, is typically accomplished with a solid metal cathode that is an approximate inverted image of the desired final shape. While ECM is used in many high-volume applications, it does have limitations, including a lack of general capability to form workpieces with precise geometric fidelity. For example, tool electrodes operating on workpieces positioned close to the tool electrode are typically able to replicate surfaces with a minimum size of 2.54 micrometers (µm). However, due to the widespread adoption of additive manufacturing to produce workpieces with closely spaced features and complex geometries, there is a need for general improvements to ECM applications to allow the production of workpieces with minimum dimensions and repeatable surface patterns with tolerances exceeding those of contemporary ECM.

[0020] This disclosure describes an electrode configuration that incorporates individual electrode arrays rather than a monolithic tool electrode. Furthermore, this disclosure describes an electrode configuration with a merged structure that allows electrolyte flushing to modulate the mass transport of ionic substances and to utilize a specific applied potential to each individual electrode.

[0021] Specifically, this disclosure provides an ECM process for electrochemically machining a workpiece in an electrochemical machining system using a tool electrode comprising an array of two or more individual electrodes, which can provide high fidelity and / or submicron features on the workpiece. The ECM process typically involves using a tool electrode comprising an array of two or more individual electrodes, wherein two or more potentials are individually applied to each of the two or more individual electrodes, resulting in two or more electric fields. In this respect, unique potentials can be applied to each of the two or more individual electrodes, allowing for individualized control of the oxidation rate of the workpiece at strategic locations on the workpiece via the tool electrodes, and allowing the workpiece to be machined with high fidelity or submicron features (i.e., a minimum size of 2.54 µm or smaller, for example, by means of a non-limiting example of 1 µm to 2.50 µm or by means of a further non-limiting example of 1.25 µm to 2.25 µm).

[0022] Now refer to the attached diagram, Figure 1 A front view schematic diagram of an exemplary electrochemical processing system 100 is shown, including a tool electrode 120 comprising an array of two or more individual electrodes 140 not in operation. Figure 2A front view schematic diagram of an exemplary electrochemical machining system 100 is shown, including a tool electrode 120 comprising an array of two or more individual electrodes 140 in operation. A workpiece 130 is separated from the tool electrode 120 by an electrode gap 180, wherein an electrolyte solution 190 is disposed between the tool electrode 120 and the workpiece 130. Although the array shown includes a first electrode 143 and a second electrode 144, the array of two or more individual electrodes 140 is not limited to two electrodes. At least one spacer 160 is positioned between the first electrode 143 and the second electrode 144 of the array of two or more individual electrodes 140. The at least one spacer 160 includes at least one electrolyte flushing channel 141 and at least one electrolyte flushing port 146. The exemplary electrochemical machining system 100 also includes an electrolyte supply source 145 containing an electrolyte solution and in fluid communication with at least one electrolyte flushing channel 141 of the at least one spacer 160. The electrochemical machining system 100 also includes a controller 112, a power supply 170, and an actuator 113.

[0023] Typically, at least one of the workpiece 130 and the array of two or more individual electrodes 140 comprises a metallic material suitable for the ECM. Furthermore, in one embodiment, the workpiece 130 and the array of two or more individual electrodes may each comprise a unique metallic material. Alternatively, the workpiece 130 and the array of two or more individual electrodes may each comprise the same metallic material. Additionally, in one embodiment, the first electrode 143 and the second electrode 144 may each comprise a unique metallic material. Alternatively, the first electrode 143 and the second electrode 144 may each comprise the same metallic material.

[0024] Furthermore, in one embodiment, the metallic material disclosed herein may include pure metals or metal alloys. Pure metals may include titanium, niobium, nickel, zirconium, palladium, platinum, or aluminum. In one embodiment, the alloys disclosed herein may include titanium-based alloys, niobium-based alloys, nickel-based alloys, zirconium-based alloys, palladium-based alloys, platinum-based alloys, aluminum-based alloys, or combinations thereof. However, other metallic materials or alloys, including titanium-aluminum alloys, may be used.

[0025] The workpiece 130 and two or more individual electrodes of the electrochemical machining system 100 can be electrically connected in at least one circuit. In an exemplary embodiment, as shown... Figure 1 and Figure 2 As shown, workpiece 130 and two or more individual electrodes are electrically connected in one circuit. However, in another embodiment, workpiece 130 and two or more individual electrodes may be electrically connected in two or more circuits. Furthermore, in one embodiment, as... Figure 1 and Figure 2 As shown, the first electrode 143 and the second electrode 144 can be electrically connected in parallel with the workpiece 130.

[0026] The electrolyte solution 190 between the tool electrode 120 and the workpiece 130 may include any suitable electrolyte, such as a base, acid, or ionic liquid. In some embodiments, the electrolyte solution 190 includes ionic salts, dibasic acids, organic acids, eutectic compounds, molten salts, or combinations thereof. The electrolyte solution may be an aqueous electrolyte, such as an aqueous salt electrolyte containing water and at least one salt. In one embodiment, the electrolyte solution 190 includes an aqueous salt electrolyte comprising sodium nitrate, sodium chloride, sodium bromide, or combinations thereof. In some embodiments, the electrolyte solution 190 may consist of 10% to 30% (by weight) of aqueous salt. For example, an electrolyte solution 190 comprising 20% ​​(by weight) sodium nitrate may be used for electrochemically machining nickel-based alloys, such as chromium-nickel-iron alloy 718. Furthermore, the pH of the electrolyte is typically adjusted according to the material being electrochemically machined. For example, the pH of the electrolyte may be adjusted to have a pH of 5 to 10. However, it should be understood that other aqueous electrolytes may be used in conjunction with the techniques of this disclosure.

[0027] like Figure 1 and Figure 2 As shown, the exemplary electrochemical machining system 100 includes at least one spacer 160. The at least one spacer 160 can be positioned between a first electrode 143 and a second electrode 144. The at least one spacer 160 comprises a non-conductive material that electrically isolates the first electrode 143 and the second electrode 144 from each other, such that when the electrochemical machining system 100 is operated, two or more electric fields 200 can be generated between the tool electrode 120 and the workpiece 130, as... Figure 2 As shown. For example, at least one spacer 160 may comprise a glass fiber reinforced non-conductive material, such as a fluoropolymer.

[0028] In one embodiment, the thickness of at least one spacer 160 may be from 100 micrometers to 2500 micrometers, for example from 350 micrometers to 2000 micrometers, or for example from 500 micrometers to 1500 micrometers. In one embodiment, the thickness of at least one spacer 160 may be from 750 micrometers to 2000 micrometers.

[0029] In one embodiment, the electrochemical processing system 100 further includes an electrolyte supply source 145 configured to deliver a charged or uncharged electrolyte solution 142 to at least one electrolyte flushing port 146. The electrolyte supply source 145 may contain the electrolyte solution and be in fluid communication with at least one electrolyte flushing port 146 of at least one spacer 160. The electrolyte supply source 145 may supply the electrolyte solution to at least one spacer 160 using any suitable method known in the art. For example, a conventional pump (not shown) may be used to move the electrolyte solution from the electrolyte supply source 145 to at least one spacer 160.

[0030] Figure 3 It shows Figure 1 and Figure 2 A bottom perspective view of the tool electrode 120. As shown, at least one spacer 160 is preferably positioned opposite the workpiece 130, such that the charged or uncharged electrolyte solution 142 ( Figure 2 Electrolyte can be supplied to the electrochemical processing system 100 through at least one electrolyte flushing port 146. Figure 1 and Figure 2 The electrode gap is 180 ( Figure 1 and Figure 2 In this regard, improvements can be made from workpiece 130 ( Figure 1 and Figure 2 ) The rinsing of any material processed by electrochemical methods, especially in traditional flow box applications.

[0031] like Figure 1-3 As shown, at least one electrolyte flushing port 146 is a hollow cavity in at least one spacer 160, which is generally cylindrical in shape. Furthermore, as... Figure 3 As shown, at least one electrolyte flushing port 146 is generally located at the center of at least one spacer 160. However, the three-dimensional geometry of the electrolyte flushing port 146 may be other shapes and may be located at other locations within at least one spacer 160, provided that the charged or uncharged electrolyte solution 142 can adequately "flush" any material electrochemically processed from the workpiece 130.

[0032] As used herein, the phrase "operably connected" should be understood to mean that the components can be directly connected (e.g., mechanically or electrically) or connected via other components. In one embodiment, the electrochemical machining system 100 may further include a controller 112, a power supply 170, and an actuator 113. The controller 112 may be operably connected to the power supply 170 for adjusting the voltage of two or more potentials as needed. The controller 112 may also be operably connected to the actuator 113 for adjusting the position of the tool electrode 120 and / or the workpiece 130 during the ECM process. Although in Figure 1-2 The components are shown as separate units, but the controller 112 and the power supply 170 may be combined units. Furthermore, the controller 112 may include a single controller 112 configured to regulate two or more potentials applied to the electrochemical processing system 100, such as... Figure 1-2 As shown. Alternatively, controller 112 may include two or more controllers 112, each of which is configured to adjust one of two or more potentials applied to the electrochemical processing system 100. Furthermore, in some embodiments, controller 112 may be configured to... Figure 4 The computing system 400 and the computing device 402 are configured and operated in the same or similar manner.

[0033] Figure 4 An example computing system 400 according to an example embodiment of this subject is provided. The controller 112 described herein may include various components and perform various functions of at least one computing device 402 of the computing system 400 described herein.

[0034] like Figure 4 As shown, the computing system 400 may include at least one computing device 402. The computing device 402 may include at least one processor 404 and at least one memory device 406. The at least one processor 404 may include any suitable processing device, such as a microprocessor, microcontroller 112, integrated circuit, logic device, and / or other suitable processing device. The at least one memory device 406 may include at least one computer-readable medium, including but not limited to non-transitory computer-readable media, RAM, ROM, hard disk drive, flash drive, and / or other memory devices.

[0035] At least one memory device 406 may store information accessible by at least one processor 404, including computer-readable instructions 408 executable by at least one processor 404. The computer-readable instructions 408 may be any set of instructions that, when executed by at least one processor 404, cause at least one processor 404 to perform any operations such as those described herein. For example, the methods provided herein may be implemented wholly or partially by computing system 400. The computer-readable instructions 408 may be software written in any suitable programming language or may be implemented in hardware. Additionally and / or alternatively, the computer-readable instructions 408 may be executed in logically and / or virtually separate threads on processor 404. Memory device 406 may also store data 410 accessible by processor 404. For example, data 410 may include models, databases, etc.

[0036] The computing device 402 may also include a network interface 412 for communicating, for example, with other components of the electrochemical processing system 100 (e.g., via a network). The network interface 412 may include any suitable components for interfacing with at least one network, including, for example, a transmitter, receiver, port, antenna, and / or other suitable components.

[0037] In one embodiment, the electrochemical processing system 100 is used in a conventional flow box application, such as Figure 1-2 As generally shown. Alternatively, the electrochemical processing system 100 of this disclosure can be operated in an open manner to perform processing operations without an electrolyte container, such as... Figures 5A-5D As generally shown. According to the system and method of this disclosure, this configuration similarly enables the control of oxidation of workpiece 130 at strategic locations on the surface 131 of workpiece 130.

[0038] In one embodiment, two or more potentials may be selectively applied to the tool electrode 120, causing the tool electrode 120 to travel into the workpiece 130 in a non-linear direction, such as... Figures 5A-5D As shown. For clarity, from Figures 5A-5D Various components, including power supply 170, controller 112, and actuator 113, are omitted in the electrochemical processing system 100. Figure 1 and Figure 2 ) components, and should be interpreted as Figures 5A-5D The electrochemical processing system 100 may include Figure 1-2 Some or all of the characteristics of the electrochemical machining system 100. Generally, such as... Figures 5A-5D As shown, each of two or more individual electrodes 140 can be applied with a unique potential having a precisely controlled voltage, generating two or more electric fields 200 that are unique to each other and oxidizing the workpiece 130 at different rates. Therefore, it is possible to produce workpieces with complex geometries, as well as workpieces with reworked internal cavities 133.

[0039] For example, such as Figure 5A As shown, the electrochemical machine is positioned at the first opening 132 of the workpiece 130, where a re-machined internal cavity 133 needs to be formed. Figure 5D Then, an electrochemical machining method can be performed as described herein, wherein two or more potentials can be applied to a tool electrode 120 comprising an array of two or more individual electrodes 140 to generate two or more electric fields 200 between the tool electrode 120 and the workpiece 130 opposite to the tool electrode 120. Figure 5B and 5CAs shown, performing the electrochemical machining method as described in this disclosure allows the tool electrode 120 to travel in a non-linear direction through the workpiece 130 from the first opening 132 to the second opening 135. Therefore, the workpiece 130, having a re-machined internal cavity 133, as... Figure 5D As shown, this can be achieved. Furthermore, the methods and systems described above regarding nonlinear electrochemical processing can be combined with other features described throughout this disclosure, such as the delivery of charged or uncharged electrolyte solutions 142 through at least one electrolyte flushing port 146.

[0040] In another embodiment, a method 700 for electrochemically processing a workpiece is generally provided, such as... Figure 6 As shown. The method includes 710 applying two or more potentials to a tool electrode comprising an array of two or more individual electrodes to generate two or more electric fields between the tool electrode and a workpiece opposite the tool electrode, wherein each of the two or more electric fields is generated by one of the array of two or more individual electrodes.

[0041] Two or more potentials can be applied to the tool electrodes using a power supply. A configuration that supplies power to an array of two or more individual electrodes allows at least two of the potentials to have voltages different from each other. Therefore, in one embodiment, the two or more potentials may include a first potential and a second potential. In this respect, unique potentials can be applied to each of the two or more individual electrodes of the electrochemical machining system, allowing for individualized control of the oxidation rate of the workpiece at strategic locations on the workpiece, thereby allowing the workpiece to be machined with high fidelity or submicron features. Although in Figure 1 The diagram shows a single power source, but a power source may include two or more separate power sources.

[0042] During operation, the workpiece can be used as the anode of an array of two or more individual electrodes, including a first electrode and a second electrode, which can each be used individually as a cathode to generate two or more electric fields, in which an electrochemical reaction occurs between the workpiece and the tool electrode.

[0043] The first and second potentials can be unique pulsed potentials, or alternatively, unique DC potentials. In one embodiment, at least one of the first and second potentials is a DC potential in the range of 2 volts to 50 volts. In a further embodiment, at least one of the first and second potentials is a DC potential in the range of 12 volts to 35 volts.

[0044] In another embodiment, at least one of the first and second potentials is a pulsed potential. Specifically, the power supply can be configured to apply a pulsed potential to at least one of the first and second electrodes. Furthermore, the controller can be configured to adjust the pulse duration, frequency, and voltage of the pulsed potential supplied to the tool electrode and the workpiece. In a further embodiment, the pulsed potential can be a bipolar pulsed potential.

[0045] For example, the pulse duration of the pulsed potential can range from 10 nanoseconds to 500 microseconds. Furthermore, in one embodiment, the pulsed potential can be applied at a voltage of 2 to 35 volts (e.g., 5 to 15 volts).

[0046] As used herein, the term "average potential" is the average of the off-time potential and the on-time potential of each pulse potential. In some embodiments, the average potential of the pulse potential may be in the range of 5 volts to 32 volts.

[0047] Refer again Figure 6 The method may further include 720 delivering a charged or uncharged electrolyte solution to the electrochemical machining process through at least one electrolyte rinsing port. Delivering an uncharged electrolyte solution provides the benefit of rinsing away oxidized material from the workpiece, improving the precision of electrochemical oxidation, while delivering a charged electrolyte provides the additional benefit of localized protection against two or more interfering electric fields. For example, the power source may include an auxiliary power source (not shown) electrically connected to at least one electrolyte rinsing port on the tool electrode. The auxiliary power source may supply at least one charging port potential to at least one electrolyte rinsing port. For example, the at least one charging port potential may have an applied voltage of 1 to 20 volts (positive) relative to the applied machining voltage (i.e., two or more potentials).

[0048] In one embodiment, the method of this disclosure further includes 730 electrochemically machining the workpiece to have a minimum dimension of less than 2µm. In a further embodiment, the method of this disclosure further includes electrochemically machining the workpiece to have a minimum dimension of less than 1µm.

[0049] In an exemplary embodiment, a charged or uncharged electrolyte solution is delivered to the electrochemical processing system from at least one of at least one electrolyte flushing port at a rate of 1 L / min to 50 L / min (e.g., 1 L / min to 25 L / min, e.g., 1 L / min to 10 L / min, e.g., 1 L / min to 5 L / min).

[0050] In some cases, combined with the delivery of charged or uncharged electrolytes, the electrolyte solution can be continuously forced through the electrode gap to flush the workpiece and tool electrode at a flow rate of 0.5 L / s to 20 L / s (e.g., from 3.75 L / s to 10 L / s). Alternatively, the electrolyte solution can be continuously forced through the electrode gap at pressures from 350,000 Pa to 3,500,000 Pa.

[0051] Furthermore, in some embodiments, the method includes controlling the distance between the tool electrode and the workpiece (i.e., the length of the electrode gap) to be greater than 0.05 mm, for example, greater than 0.1 mm. In some embodiments, the method includes controlling the distance between the tool electrode and the workpiece to be from 0.1 mm to 2 mm, for example, from 0.5 mm to 1.5 mm.

[0052] This disclosure relates to an electrode configuration that incorporates an electrode array rather than a solid monomer. Incorporating the electrode array provides precise, closed-loop control of the workpiece oxidation rate at strategic locations on the workpiece. Specifically, controlling the potential of each individual electrode in the electrode array, compared to a single potential applied to a solid monomer, offers numerous advantages, including the ability to produce workpieces with improved geometric fidelity using electrochemical machining methods, including those with complex textures and low-rigidity structures.

[0053] Therefore, the methods and systems described herein allow for the electrochemical machining of workpieces to achieve submicron features across a wide range of workpiece chemical compositions. Furthermore, the methods described herein offer the advantages of automation and real-time adjustability, as the potential applied to each individual electrode can be adjusted as needed during electrochemical machining. This disclosure further incorporates the ability to adjust electrolyte delivery and specific applied potentials to achieve high-quality surfaces and resulting workpieces with submicron dimensions. Active control of potential and fluid delivery also allows for the production of workpieces with nonlinear geometries or those containing easily oxidized high-temperature metal alloys. Moreover, at least one electrolyte flushing port in the tool electrode array of this disclosure eliminates the need for conventional flow boxes to control the location and manner of electrolyte flow between the tool electrodes and the workpiece.

[0054] Furthermore, in electrochemical machining applications employing small electrode gaps, the relevant time constant for locally confining the reaction is 10 nanoseconds or less (e.g., 1 nanosecond to 10 nanoseconds). Therefore, electrochemical machining using an array of two or more individual electrodes offers an improvement over the signal attenuation and impedance problems encountered when operating monolithic tool electrodes at high frequencies. In this regard, the methods and systems of this disclosure can provide the ability to manage individualized portions of the entire electric field (i.e., combinations of two or more electric fields) without sacrificing overall process stability or cycle time.

[0055] This written description discloses the invention using exemplary embodiments, including the best mode, and also enables any person skilled in the art to practice the invention, including making and using any device or system and performing any combination of methods. The patentable scope of the invention is defined by the claims, but may include other examples that would occur to those skilled in the art. Such other examples are intended to fall within the scope of the claims if they include structural elements that are not indistinguishable from the literal language of the claims, or if they include equivalent structural elements that are not substantially different from the literal language of the claims.

Claims

1. A method for electrochemically machining a workpiece, characterized in that, The method includes: Two or more potentials are applied to a tool electrode comprising an array of two or more individual electrodes to generate two or more electric fields between the tool electrode and a workpiece opposite the tool electrode, wherein each of the two or more electric fields is generated by one of the array of two or more individual electrodes, wherein at least one spacer is positioned between a first electrode and a second electrode of the array of two or more individual electrodes, further comprising delivering a charged or uncharged electrolyte solution between the tool electrode and the workpiece through at least one electrolyte flushing port within the at least one spacer.

2. The method according to claim 1, characterized in that, The at least one spacer has a thickness of 100 micrometers to 2500 micrometers.

3. The method according to claim 1, characterized in that, The first electrode and the second electrode are electrically connected in parallel with the workpiece.

4. The method according to claim 1, characterized in that, The two or more potentials mentioned therein include a first potential and a second potential.

5. The method according to claim 4, characterized in that, At least one of the first potential and the second potential is a direct current potential in the range of 12 volts to 35 volts.

6. The method according to claim 4, characterized in that, At least one of the first potential and the second potential is a pulse potential.

7. The method according to claim 6, characterized in that, The pulse potential described therein has an average potential of 5 to 32 volts.

8. The method according to claim 1, characterized in that, The workpiece and at least one of the arrays of two or more individual electrodes comprise a metallic material, the metallic material comprising a metal alloy comprising titanium-based alloys, niobium-based alloys, nickel-based alloys, zirconium-based alloys, aluminum-based alloys, palladium-based alloys, platinum-based alloys, titanium-aluminum alloys, or combinations thereof.

9. The method according to claim 1, characterized in that, The workpiece mentioned above is an airfoil on a blade disk.

10. The method according to claim 1, characterized in that, The process further includes electrochemical machining of the workpiece to achieve a minimum size of less than 2 µm.

11. The method according to claim 1, characterized in that, The electrolyte solution between the tool electrode and the workpiece includes an aqueous salt electrolyte, which includes sodium nitrate, sodium chloride, sodium bromide, or a combination thereof.

12. The method according to claim 1, characterized in that, The tool electrode is selectively subjected to two or more potentials, causing it to travel into the workpiece in a nonlinear direction.

13. An electrochemical processing system, characterized in that, include: A tool electrode comprising an array of two or more individual electrodes, wherein when two or more potentials are applied to the array of two or more individual electrodes, two or more electric fields are generated between the tool electrode and the workpiece, and wherein each of the two or more electric fields is generated by one of the array of two or more individual electrodes, wherein at least one spacer is positioned between a first electrode and a second electrode of the array of two or more individual electrodes, further comprising delivering a charged or uncharged electrolyte solution between the tool electrode and the workpiece through at least one electrolyte flushing port within the at least one spacer.

14. The electrochemical processing system according to claim 13, characterized in that, The first electrode and the second electrode are electrically connected in parallel with the workpiece.

15. The electrochemical processing system according to claim 13, characterized in that, The two or more potentials mentioned therein include a first potential and a second potential.

16. The electrochemical processing system according to claim 15, characterized in that, It further includes a controller configured to control the first potential and the second potential separately.

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