Mask support device and mask handling device
By designing a sliding mechanism and a three-axis motion mechanism for the mask support device, the problem of large-size masks sagging during transportation was solved, ensuring that the mask is flattened, improving overlay accuracy, and enhancing pattern quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIHUA LAB
- Filing Date
- 2023-09-12
- Publication Date
- 2026-05-12
AI Technical Summary
Large-size photomasks are prone to sagging during handling, which reduces the accuracy of pattern overlay. Furthermore, the flattening degree of photomasks of different sizes is inconsistent, affecting the pattern quality.
Design a mask support device, including a left sliding mechanism and a right sliding mechanism, which drive the left support component and the right support component to move in the left and right directions respectively, supporting the left and right bottom surfaces of the mask. The position of the support component is adjusted by the sliding mechanism to ensure that the mask is flattened. Combined with a three-axis motion mechanism, the suction cup is driven to adsorb the middle part of the mask.
It effectively reduces the relative movement at the connection between the mask and the support component, ensures the mask is flat, improves overlay accuracy, and avoids pattern defects.
Smart Images
Figure CN117262711B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of material handling, and in particular to a mask support device and a mask handling device. Background Technology
[0002] The photomask is moved by using a suction cup to pick up and lift the mask from the center of its top surface, then transporting it to the desired location. However, current photomasks are becoming increasingly larger to meet user demands, such as the need for larger monitor screens.
[0003] When handling large photomasks, the center of the photomask is adsorbed by a suction cup and moved to the designated position. Then, a vertically adsorbable vacuum adsorption device is added to the position where the photomask needs to be placed to adsorb the photomask and prevent it from shifting when it is put down.
[0004] However, under the influence of gravity, the ends of the photomask are prone to sag, and the degree of sag varies for photomasks of different sizes. After the photomask is adsorbed, it may fail to flatten, and the degree of flattening also varies for photomasks of different sizes. This causes a difference in the gap between the pattern side of the photomask M and the exposure side of the substrate P, resulting in pattern defects and reduced overlay accuracy. Summary of the Invention
[0005] The technical problem to be solved by the present invention is to solve at least one of the technical problems mentioned above.
[0006] The solution to the technical problem of this invention is:
[0007] A photomask support device includes a bracket, a left sliding mechanism, a right sliding mechanism, a left support assembly, and a right support assembly. The left support assembly is disposed on the left sliding mechanism, and the right support assembly is disposed on the right sliding mechanism. The left sliding mechanism drives the left sliding assembly to reciprocate in a left-right direction, and the right sliding mechanism drives the right sliding assembly to reciprocate in a left-right direction. The left support assembly is used to support the left bottom surface of the photomask, and the right sliding assembly is used to support the right bottom surface of the photomask.
[0008] As a further improvement to the above technical solution, the bracket includes a rectangular frame and a support plate, the rectangular frame is fixed on the support plate, and a light-transmitting hole is provided in the middle of the support plate.
[0009] As a further improvement to the above technical solution, the left sliding mechanism includes a left electric push rod and a left slider. The left electric push rod is fixed on the bracket, and the left electric push rod drives the left slider to reciprocate in the left-right direction. The left support assembly is disposed on the left slider.
[0010] As a further improvement to the above technical solution, the left sliding mechanism also includes a left slide rail, which is fixed on the bracket.
[0011] As a further improvement to the above technical solution, the left support assembly includes a support block, a guide rail, a connecting shaft, a swing arm, and a sliding member. The guide rail is mounted on the bracket, and the sliding member is slidably connected to the guide rail. The left slider has a shaft hole along the front-to-back direction, and the connecting shaft passes through the shaft hole. The connecting shaft and the shaft hole can rotate relative to each other. The support block is fixed on the connecting shaft, and the sliding member is fixedly connected to the connecting shaft through the swing arm. The guide rail extends obliquely upward from left to right.
[0012] As a further improvement to the above technical solution, the guide rail includes a horizontal section and an arc section. The horizontal section is located to the left of the arc section, and the horizontal section and the arc section are interconnected. The arc-shaped opening of the arc section faces upward to the left.
[0013] As a further improvement to the above technical solution, the top surface of the support block is provided with a groove, and the inner wall of the groove is provided with an air extraction hole.
[0014] As a further improvement to the above technical solution, two left support components and two left sliding mechanisms are provided, and the two left sliding mechanisms drive the left support components to slide left and right respectively.
[0015] As a further improvement to the above technical solution, the right sliding mechanism and the right support assembly are respectively mirror images of the left sliding mechanism and the left support assembly.
[0016] The present invention also provides a mask transport device, including a suction cup and a three-axis motion mechanism, as well as a mask support device in any of the above technical solutions. The suction cup is disposed on the three-axis motion mechanism, and the three-axis motion mechanism drives the suction cup to move in the up-down, left-right, and front-back directions. The suction cup is used to adsorb the middle part of the mask, and the length of the suction cup extends in the front-back direction.
[0017] The beneficial effects of this invention are as follows: The left and right sliding mechanisms are used to drive the left and right support components to move in the left-rear direction, causing them to move towards or away from each other. When it is necessary to support the adsorbed mask, the mask will bend under its own weight. The left and right sliding mechanisms drive the left and right support components to move between the left and right sides of the mask, respectively, so that the left and right support components support the left and right bottom surfaces of the mask. During the lowering of the mask, the left and right sliding mechanisms drive the left and right support components to move away from each other accordingly, keeping the position of the mask supported by the left and right support components unchanged as much as possible, thus providing sufficient support for the mask and effectively reducing the amount of relative movement between the mask and the left and right support components. At the same time, it ensures that the mask can be flattened, ensuring the overlay accuracy. Attached Figure Description
[0018] Figure 1 This is an isometric view of the support device of the present invention, showing the mask plate in a bent state;
[0019] Figure 2 This is an exploded view of the support device of the present invention, showing the mask plate in a bent state;
[0020] Figure 3 This is an isometric view of the support device of the present invention, showing the mask plate in a flattened state;
[0021] Figure 4 This is the invention Figure 2 Enlarged view of point A in the image.
[0022] In the attached diagram: 1-Bracket, 11-Rectangular frame, 12-Support plate, 2-Left sliding mechanism, 21-Left electric push rod, 22-Left slider, 23-Left slide rail, 3-Right sliding mechanism, 4-Left support assembly, 41-Support block, 410-Groove, 411-Evacuation hole, 42-Guide rail, 421-Horizontal section, 422-Arc section, 43-Connecting shaft, 44-Swing arm, 45-Sliding component, 5-Right support assembly, 6-Suction cup, 9-Mask plate. Detailed Implementation
[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments have been briefly explained above. Obviously, the described drawings are only a part of the embodiments of the present invention, and not all of them. Those skilled in the art can obtain other design schemes and drawings based on these drawings without creative effort.
[0024] The following will clearly and completely describe the concept, specific structure, and technical effects of the present invention in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are all within the scope of protection of the present invention. Furthermore, all connections / linkages mentioned herein do not simply refer to direct connection of components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. The various technical features in the present invention can be combined interactively without contradicting each other.
[0025] Reference Figures 1-4 A photomask support device includes a bracket 1, a left sliding mechanism 2, a right sliding mechanism 3, a left support assembly 4, and a right support assembly 5. The left support assembly 4 is disposed on the left sliding mechanism 2, and the right support assembly 5 is disposed on the right sliding mechanism 3. The left sliding mechanism 2 drives the left sliding assembly to reciprocate in the left-right direction, and the right sliding mechanism 3 drives the right sliding assembly to reciprocate in the left-right direction. The left support assembly 4 is used to support the left bottom surface of the photomask 9, and the right sliding assembly is used to support the right bottom surface of the photomask 9.
[0026] As can be seen from the above, the left sliding mechanism 2 and the right sliding mechanism 3 are used to drive the left support assembly 4 and the right support assembly 5 to move in the left rear direction, so that the left support assembly 4 and the right support assembly 5 move toward or away from each other. When the adsorbed mask 9 needs to be supported, the mask 9 will bend under its own weight. The left sliding mechanism 2 and the right sliding mechanism 3 respectively drive the left support component 4 and the right support component 5 to move between the left and right sides of the mask 9. The left support component 4 and the right support component 5 support the left and right bottom surfaces of the mask 9. During the lowering of the mask 9, the left sliding mechanism 2 and the right sliding mechanism 3 respectively drive the left support component 4 and the right support component 5 to move away from each other, so as to keep the position of the mask 9 supported by the left support component 4 and the right support component 5 unchanged, so as to provide sufficient support for the mask 9, effectively reduce the amount of relative movement between the mask 9 and the connection between the left and right support components and the right support component 5, and ensure that the mask 9 can be flattened to ensure the accuracy of the overlay.
[0027] The support 1 is used to support the photomask 9. In some embodiments, the support 1 includes a rectangular frame 11 and a support plate 12. The rectangular frame 11 is fixed to the support plate 12, and a light-transmitting hole is provided in the middle of the support plate 12. In use, the rectangular frame 11 and the support plate 12 can be used as a base. In addition, the rectangular frame 11 can also be used for preliminary coarse positioning of the photomask 9. Of course, in actual use, components for fine positioning of the photomask 9 can also be added. For example, components for fine positioning of the photomask 9 can be installed on the left sliding assembly and the right sliding assembly. The light-transmitting hole in the middle of the support plate 12 is used to allow light to pass through the photomask 9 and then through the light-transmitting hole.
[0028] The left sliding mechanism 2 is used to drive the left support assembly 4 to reciprocate in the left-right direction. In some embodiments, the left sliding mechanism 2 includes a left electric push rod 21 and a left slider 22. The left electric push rod 21 is fixed on the bracket 1, and the left electric push rod 21 drives the left slider 22 to reciprocate in the left-right direction. The left support assembly 4 is disposed on the left slider 22. In use, the left electric push rod 21 drives the left slider 22 to move in the left-rear direction, thereby driving the left support assembly 4 to move in the left-right direction.
[0029] Of course, the left sliding mechanism 2 can also be implemented in other ways. For example, it can be a lead screw and nut kinematic pair or a servo electric cylinder, etc.
[0030] To ensure that the left slider 22 moves in the left-right direction, in some embodiments, the left sliding mechanism 2 further includes a left slide rail 23, which is fixed to the bracket 1. The left slide rail 23 guides the left slider 22, ensuring that the left slider 22 does not deviate from its direction.
[0031] The left support assembly 4 is used to support the left bottom surface of the mask plate 9. In some embodiments, the left support assembly 4 includes a support block 41, a guide rail 42, a connecting shaft 43, a swing arm 44, and a sliding member 45. The guide rail 42 is disposed on the bracket 1, and the sliding member 45 is slidably connected to the guide rail 42. The left slider 22 has a shaft hole in the front-back direction, and the connecting shaft 43 is inserted into the shaft hole. The connecting shaft 43 and the shaft hole can rotate relative to each other. The support block 41 is fixed on the connecting shaft 43. The sliding member 45 is fixedly connected to the connecting shaft 43 through the swing arm 44. The guide rail 42 extends obliquely upward from left to right. The guide rail 42 extends upward at an angle from left to right. As the left slider 22 moves from left to right, the sliding member 45 moves upward at an angle from left to right. The sliding member 45 is connected to the connecting shaft 43 via the swing arm 44, causing the connecting shaft 43 to rotate. This adjusts the top surface of the support block 41 to face upward to the left, adapting to the bending angle of the mask 9. This makes the angle of inclination of the top surface of the support block 41 approximately the same as the angle after the mask 9 bends under its own weight, so that the area of the top surface of the support block 41 supporting the bottom surface of the mask 9 is larger.
[0032] The guide rail 42 guides the sliding member 45 in the direction of sliding and, under the action of the swing arm 44, adjusts the rotation angle of the connecting shaft 43. In some embodiments, the guide rail 42 includes a horizontal section 421 and an arc-shaped section 422. The horizontal section 421 is located to the left of the arc-shaped section 422, and the horizontal section 421 and the arc-shaped section 422 are interconnected. The arc-shaped opening of the arc-shaped section 422 faces upward to the left. This structure is simple and easy to set up. With this structure, the rotation angle of the connecting shaft 43 can be adjusted during sliding without the need for additional drive devices such as motors to drive the connecting shaft 43 to rotate.
[0033] In practical use, the bracket 1 is provided with a sliding groove, which forms the guide rail 42. Of course, a track can also be used for guidance.
[0034] Most photomasks are made of quartz, with a density of approximately 2.2 g / cm³. 3 The thickness of mask 9 is t, the length of mask 9 in the left-right direction is l, and the elastic modulus of mask 9 is E. When mask 9 is attracted to the middle and lifted, the uniform load of mask 9's own weight is q, and the adsorption force attracting the middle of mask 9 is F. Then, the inclination angle of the curved section is... Where D is the bending strength. μ is Poisson's ratio. The length of horizontal segment 421 is greater than the elongation Δs of mask 9.
[0035] The support block 41 is used to support the bottom surface of the photomask 9. In some embodiments, the top surface of the support block 41 is provided with a groove 410, and the inner wall of the groove 410 is provided with an air extraction hole 411. In use, air can be extracted using the air extraction hole 411, so that after the photomask 9 comes into contact with the top surface of the support plate 12, a suction force is generated at the groove 410, making the photomask 9 and the support block 41 tightly connected.
[0036] In addition, the support block 41 includes a support block 41 body and a locking clamp, the locking clamp being Ω-shaped, with both ends of the locking clamp locked to the connecting shaft 43 by screws, so as to facilitate the installation of the support block 41.
[0037] To ensure a more uniform support position for the photomask 9, in some embodiments, two left support components 4 and two left sliding mechanisms 2 are provided. The two left sliding mechanisms 2 respectively drive the left support components 4 to slide left and right in a one-to-one correspondence. In use, the two left support components 4 are respectively positioned on the front and rear sides of the photomask 9.
[0038] To facilitate production, in some embodiments, the right sliding mechanism 3 and the right support assembly 5 are mirror images of the left sliding mechanism 2 and the left support assembly 4. This structure is simple and easy to set up. In other embodiments, the suction force generated by the air extraction hole 411 causes the mask 9 to be adsorbed onto the support block 41, effectively increasing the maximum static friction between the support block 41 and the mask 9. When the mask 9 is supported by the left support assembly 4 on the left sliding mechanism 2 and the right support assembly 5 on the right sliding mechanism 3, if the length of the mask 9 is large, the middle part of the mask 9 may sag. Since the degree of sag may vary at different positions of the mask 9, optical compensation may be difficult. Therefore, it is necessary to ensure that the mask 9 is fully flattened. The suction force generated by the air extraction hole 411 can firmly adsorb the bottom surfaces of the left and right ends of the mask plate 9. Then, the left sliding mechanism 2 and the right sliding mechanism 3 move away from each other and pull the mask plate 9 to straighten it, so as to ensure that the mask plate 9 is fully flattened.
[0039] This invention also provides a mask 9 transport device, including a suction cup 6 and a three-axis motion mechanism, as well as the mask support device in any of the above embodiments. The suction cup 6 is disposed on the three-axis motion mechanism, which drives the suction cup 6 to move in the up-down, left-right, and front-back directions. The suction cup 6 is used to adsorb the middle part of the mask 9, and the length of the suction cup 6 extends in the front-back direction. In use, the three-axis motion mechanism drives the suction cup 6 to perform three-axis motion, thereby driving the mask 9 to perform up-down, left-right, and front-back three-axis motions. The length of the suction cup 6 extends in the front-back direction to adsorb the middle part of the mask 9.
[0040] In practical use, the suction cup 6 can be a rectangular suction cup 6 or a circular suction cup 6. When a rectangular suction cup 6 is used, the rectangular suction cup 6 can be directly used to hold the middle part of the mask 9. When a circular suction cup 6 is used, multiple circular suction cups 6 are arranged in an array to form a suction cup group 6, which is used to adsorb the middle part of the mask 9.
[0041] Since the above description has already covered the mask support device, those skilled in the art should be able to understand it by referring to the accompanying drawings. Therefore, the mask support device will not be described in detail here.
[0042] The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the embodiments described. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalent modifications or substitutions are all included within the scope defined by the claims of this application.
Claims
1. A photomask support device, comprising a bracket (1), characterized in that, It also includes a left sliding mechanism (2), a right sliding mechanism (3), a left support assembly (4), and a right support assembly (5). The left support assembly (4) is disposed on the left sliding mechanism (2), and the right support assembly (5) is disposed on the right sliding mechanism (3). The left sliding mechanism (2) drives the left support assembly to reciprocate in the left-right direction, and the right sliding mechanism (3) drives the right support assembly to reciprocate in the left-right direction. The left support assembly (4) is used to support the left bottom surface of the mask plate (9), and the right sliding assembly is used to support the right bottom surface of the mask plate (9). The left sliding mechanism (2) includes a left slider (22). The left support assembly (4) includes a support block (41), a guide rail (42), a connecting shaft (43), a swing arm (44), and a sliding member (45). 2) The sliding member (45) is slidably connected to the guide rail (42) on the bracket (1). The left slider (22) has a shaft hole in the front-back direction. The connecting shaft (43) is inserted in the shaft hole. The connecting shaft (43) and the shaft hole can rotate relative to each other. The support block (41) is fixed on the connecting shaft (43). The sliding member (45) is fixedly connected to the connecting shaft (43) through the swing arm (44). The guide rail (42) extends obliquely upward from left to right. The guide rail (42) includes a horizontal section (421) and an arc section (422). The horizontal section (421) is located on the left side of the arc section (422). The horizontal section (421) and the arc section (422) are interconnected. The arc opening of the arc section (422) faces the upper left.
2. The mask support device according to claim 1, characterized in that, The bracket (1) includes a rectangular frame (11) and a support plate (12). The rectangular frame (11) is fixed on the support plate (12), and a light-transmitting hole is provided in the middle of the support plate (12).
3. The mask support device according to claim 1, characterized in that, The left sliding mechanism (2) also includes a left electric push rod (21), which is fixed on the bracket (1). The left electric push rod (21) drives the left slider (22) to reciprocate in the left and right directions. The left support assembly (4) is disposed on the left slider (22).
4. The mask support device according to claim 3, characterized in that, The left sliding mechanism (2) also includes a left slide rail (23), which is fixed on the bracket (1).
5. The mask plate (9) support device according to claim 1, characterized in that, The top surface of the support block (41) is provided with a groove (410), and the inner wall of the groove (410) is provided with an air extraction hole (411).
6. The mask support device according to claim 1, characterized in that, Two left support components (4) and two left sliding mechanisms (2) are provided. The two left sliding mechanisms (2) respectively drive the left support components (4) to slide left and right in a corresponding manner.
7. The mask support device according to any one of claims 1-6, characterized in that, The right sliding mechanism (3) and the right support component (5) are mirror images of the left sliding mechanism (2) and the left support component (4).
8. A mask transport device, comprising a suction cup (6) and a three-axis motion mechanism, characterized in that, It also includes a mask support device as described in any one of claims 1-7, wherein the suction cup (6) is disposed on the three-axis motion mechanism, the three-axis motion mechanism drives the suction cup (6) to move in the up-down, left-right and front-back directions, the suction cup (6) is used to adsorb the middle part of the mask (9), and the length of the suction cup (6) extends in the front-back direction.