A directional far-infrared heating element for PEVCD tube furnace

Abstract

The present invention provides a directional far-infrared heating element for a PEVCD tube furnace, relating to the field of solar photovoltaic cell manufacturing technology. The element comprises a quartz glass tube, one end of which is fixedly mounted with a plug. The interior of the quartz glass tube is provided with a plurality of short-section brackets connected in series. The outer surface of the short-section bracket is provided with a heating strip groove parallel to the central axis, and a 120-degree angle is left ungrooved. A support bar is fixedly mounted on the surface of the short-section bracket, and a heating strip body is mounted on the inner wall of the heating strip groove. The heating strip body has a flat structure. In the present invention, the quartz glass tube is an infrared radiation heat transfer carrier, and the effective heating area (not uniform heating on all sides) concentrates heat energy toward the center of the tube furnace. In addition, the alloy resistance heating material is prepared into a flat vertical shape, which increases the high-temperature strength of the alloy resistance wire, providing a PEVCD tube furnace with a higher thermal efficiency and longer life infrared heating element.

Description

Technical Field

[0001] The invention relates to the technical field of solar photovoltaic cell manufacturing, in particular to a directional far-infrared heating element for a PEVCD tube furnace. Background Art

[0002] Currently, the PEVCD tube furnace heating elements on the market are mainly divided into the following two categories:

[0003] 1. The far-infrared quartz heating tube is a quartz glass tube with a 360-degree surrounding alloy resistance heating wire. As long as the alloy resistance wire is energized, the heat generated will radiate from the center to the surrounding rings. Because the PECVD tube furnace is a vacuum furnace chamber, there is almost no convection and conduction in the heat transfer. Part of the heat will be absorbed by the tube furnace chamber that does not need to be heated, resulting in waste. In order to meet the heating process requirements, the electric power must be increased, thereby reducing the service life.

[0004] 2. Insert a high-temperature heating rod into the far-infrared quartz glass tube. This high-temperature heating rod is equipped with a heating wire in a metal shell that meets high-temperature conditions, and dense insulating thermal conductive material is filled between the two. Since this insulating thermal conductive material has good insulation at normal temperature or low temperature (below 35°C), the requirements for this high-temperature heating rod are quite high when the temperature exceeds this. Because the higher the temperature, the electrical performance of this material will immediately decrease, and the so-called burnout (fusing) phenomenon will occur after a short period of use. In addition, the heating rod of this structure is similar to the previous one in terms of heat conduction, and the heat is absorbed by the tubular furnace cavity. Summary of the Invention

[0005] The purpose of the present invention is to solve the technical problems raised in the above background technology.

[0006] The present invention adopts the following technical solution: a directional far-infrared heating element for a PEVCD tube furnace, comprising a quartz glass tube, a plug fixedly installed at one end of the quartz glass tube, a plurality of short section brackets connected in series are arranged inside the quartz glass tube, a heating strip groove is provided on the outer surface of the short section bracket in a direction parallel to the central axis, and an angle of 120 degrees is left ungrooved, a support strip is fixedly installed on the surface of the short section bracket, a heating strip body is installed on the inner wall of the heating strip groove, and the heating strip body is a flat structure.

[0007] Preferably, the ends are connected in a quartz glass tube.

[0008] Preferably, the plug and the quartz glass tube are an integrated structure.

[0009] Preferably, the quartz glass tube is sealed at one end and has a hemispherical seal, and the other end is provided with a frosted surface.

[0010] Preferably, the short section bracket is made of a lightweight thermal insulation material, thereby increasing the service life.

[0011] Preferably, the heating strip body is a flat long strip heating element, which is formed by molding a round heating wire into a flat long strip shape. Here, the heating effect can be improved.

[0012] Preferably, both ends of the heating strip body are connected to heating electrodes.

[0013] Compared with the prior art, the advantages and positive effects of the present invention are:

[0014] In the present invention, the quartz glass tube is an infrared radiation heat transfer carrier, and the effective heating area (not uniform heating on all sides) concentrates the heat energy to radiate toward the center of the tube furnace; in addition, the alloy resistance heating material is prepared into a flat vertical shape, which increases the high-temperature strength of the alloy resistance wire, providing a PEVCD tube furnace with a higher thermal efficiency and longer life infrared heating element. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of a directional far-infrared heating element for a PEVCD tube furnace is provided for the present invention;

[0016] Figure 2 A side view of a directional far-infrared heating element for a PEVCD tube furnace is provided for the present invention;

[0017] Figure 3 The present invention provides a schematic diagram of a heating strip body used in a directional far-infrared heating element for a PEVCD tube furnace;

[0018] Figure 4 The present invention provides a cross-sectional view of a heating strip body used in a directional far-infrared heating element for a PEVCD tube furnace.

[0019] Legend:

[0020] 101. Quartz glass tube; 102. Plug; 103. Frosted surface; 201. Short section bracket; 202. Heating strip groove; 203. Support bar; 301. Heating strip body; 302. Heating electrode. DETAILED DESCRIPTION

[0021] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described below in conjunction with the accompanying drawings and embodiments. It should be noted that, in the absence of conflict, the embodiments of the present application and the features therein can be combined with each other.

[0022] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0023] Example 1

[0024] See also Figure 1-4 The present invention provides a technical solution: a directional far-infrared heating element for a PEVCD tube furnace, comprising a quartz glass tube 101, a plug 102 fixedly mounted at one end of the quartz glass tube 101, which is conducive to the pressure decomposition of the vacuum environment, the plug 102 and the quartz glass tube 101 are an integrated structure, a plurality of short section brackets 201 connected in series are arranged inside the quartz glass tube 101, the short section brackets 201 are made of lightweight thermal insulation material, and are connected head to tail inside the quartz glass tube 101, the quartz glass tube 101 is sealed at one end, and is a hemispherical seal, and a frosted surface 103 is provided on the surface of the other end, a heating strip groove 202 is opened on the outer surface of the short section bracket 201 along a direction parallel to the central axis, and an angle of one hundred and twenty degrees is left ungrooved, thereby forming the heating strip groove 202 for burying the heating strip body 301 required for directional heating.

[0025] See also Figure 1-4 A support bar 203 is fixedly installed on the surface of the short section bracket 201 to support the short section bracket 201. The purpose is to allow the heating strip body 301 to freely expand and contract in the heating strip groove 202 without being oppressed by external force. The heating strip body 301 is installed on the inner wall of the heating strip groove 202. The heating strip body 301 is a flat long strip heating element, which is molded into a flat long strip by a round heating wire. In this way, a larger cross-section electric heating element can be arranged in a narrow space groove. The two ends of the heating strip body 301 are connected to the heating electrodes 302.

[0026] Working principle: The quartz glass tube 101 is an infrared radiation heat transfer carrier. The effective heating area (not uniform heating on all sides) concentrates the heat energy to radiate toward the center of the tube furnace. In addition, the alloy resistance heating material is prepared into a flat vertical shape, which increases the high-temperature strength of the alloy resistance wire, providing a PEVCD tube furnace with a higher thermal efficiency and longer life infrared heating element.

[0027] The above description is merely a preferred embodiment of the present invention and does not constitute any other form of limitation to the present invention. Any person skilled in the art may use the above-disclosed technical contents to change or modify them into equivalent embodiments with equivalent changes for application in other fields. However, any simple modification, equivalent change and modification of the above embodiments made in accordance with the technical essence of the present invention without departing from the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A directional far-infrared heating element for a PEVCD tube furnace, comprising a quartz glass tube (101), characterized in that: A plug (102) is fixedly installed at one end of the quartz glass tube (101), and a plurality of short section brackets (201) connected in series are arranged inside the quartz glass tube (101). A heating strip groove (202) is provided on the outer surface of the short section bracket (201) in a direction parallel to the central axis, and an angle of 120 degrees is left without a groove. A support strip (203) is fixedly installed on the surface of the short section bracket (201), and a heating strip body (301) is installed on the inner wall of the heating strip groove (202). The heating strip body (301) is a flat structure and is connected head to tail inside the quartz glass tube (101). The plug (102) and the quartz glass tube (101) are an integrated structure. The quartz glass tube (101) is sealed at one end, and is a hemispherical seal, and a frosted surface (103) is provided on the other end surface.

2. The directional far-infrared heating element for a PEVCD tube furnace according to claim 1, characterized in that: The short section bracket (201) is made of lightweight thermal insulation material.

3. The directional far-infrared heating element for a PEVCD tube furnace according to claim 1, characterized in that: The heating strip body (301) is a flat long strip heating element, which is formed by molding a round heating wire into a flat long strip.

4. The directional far-infrared heating element for a PEVCD tube furnace according to claim 1, characterized in that: Both ends of the heating strip body (301) are connected to heating electrodes (302).

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