Temperature measuring device

Through the combined structure of the base, joint bearing and mounting bracket, the problem of unfixed deflection center when the angle of the thermometer is adjusted is solved, and efficient adjustment of the thermometer is achieved to ensure that the infrared rays smoothly pass through the slender tube for temperature detection.

CN117268553BActive Publication Date: 2025-07-25TJ INNOVATIVE SEMICON SUBSTRATE TECH CO LTD
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Patent Information

Application Number
CN202310049380.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-02-01
Publication Date
2025-07-25
Estimated Expiration
2043-02-01

AI Technical Summary

Technical Problem

In the prior art, when adjusting the angle of the thermometer, the deflection center is not fixed, resulting in low adjustment efficiency.

Method used

The combined structure of the base, joint bearing, mounting bracket and first adjustment screw is adopted to ensure that the deflection center of the mounting bracket is fixed, and the relative position of the mounting bracket and the adjustment ring is adjusted through the adjustment screw to achieve flexible adjustment of the thermometer angle.

Benefits of technology

While adjusting the angle of the thermometer, keeping the deflection center unchanged, improving the adjustment efficiency of the thermometer, making infrared rays easier to pass through the slender tube and achieving convenient temperature detection.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the technical field of crystal temperature measurement, and specifically discloses a temperature measurement device. The temperature measurement device includes a base, a spherical plain bearing, a mounting bracket, a first adjusting screw, and a thermometer. Wherein, one end of the base is provided with an adjusting ring, and a plurality of adjusting holes are provided in the circumferential direction of the adjusting ring; the spherical plain bearing is arranged at the other end of the base; one end of the mounting bracket passes through the inner ring of the spherical plain bearing, and the other end of the mounting bracket passes through the adjusting ring and there is a gap between the mounting bracket and the adjusting ring; the number of the first adjusting screws is the same as that of the adjusting holes and they correspond one by one. The first adjusting screw passes through the adjusting hole and can abut against the mounting bracket; the thermometer is fixed on the mounting bracket, and the infrared rays tested can pass through the inner ring. The above setting enables the deflection center of the thermometer to remain unchanged while adjusting the deflection angle of the thermometer, making the adjustment more convenient, making it easier for the infrared rays to smoothly pass through the slender tube, and improving the adjustment efficiency of the thermometer.
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Description

Technical Field

[0001] The present invention relates to the technical field of crystal temperature measurement, and particularly relates to a temperature measurement device. Background Art

[0002] Crystal growth equipment needs to monitor the temperature of the seed crystal surface. Since the temperature of the seed crystal surface is relatively high, non-contact crystal temperature detection means are often used.

[0003] In existing equipment, the infrared rays of the thermometer for monitoring the temperature of the seed crystal need to pass through a slender pipe, and the temperature of the seed crystal is detected at the outlet of the pipe. Because the pipe is slender, if the adjustment is not careful, the detection light will irradiate on the pipe wall, and thus the back of the seed crystal cannot be detected.

[0004] A temperature detection and adjustment mechanism for a silicon carbide single crystal growth furnace with the application number 201920537696.X adjusts the positions of three nuts on the fixed base plate to adjust the height and angle of the thermometer at the same time. Although the above mechanism can adjust the height and angle of the thermometer, the position of the outlet of the thermometer will change, that is, the deflection center of the thermometer is not fixed, which brings difficulties to fine adjustment and reduces the adjustment efficiency.

[0005] Therefore, it is urgent to study a temperature measurement device to solve the problem of how to ensure that while adjusting the angle of the thermometer, the deflection center can be kept fixed to improve the adjustment efficiency. Summary of the Invention

[0006] The purpose of the present invention is to provide a temperature measurement device to solve the problem of how to ensure that while adjusting the angle of the thermometer, the deflection center can be kept fixed to improve the adjustment efficiency.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] The present invention provides a temperature measurement device, which includes:

[0009] A base, one end of the base is provided with an adjusting ring, and a plurality of adjusting holes are provided in the circumferential direction of the adjusting ring;

[0010] A spherical plain bearing, the spherical plain bearing is arranged at the other end of the base;

[0011] An installation bracket, one end of the installation bracket passes through the inner ring of the spherical plain bearing, and the other end of the installation bracket passes through the adjusting ring and has a gap with the adjusting ring;

[0012] First adjusting screws, the number of the first adjusting screws is the same as and corresponds to the number of the adjusting holes one by one, and the first adjusting screws pass through the adjusting holes and can abut against the installation bracket;

[0013] A thermometer, which is fixed to the mounting bracket, and the infrared rays for measurement can pass through the inner ring.

[0014] Optionally, the mounting bracket includes an upper temperature-measuring tube, a lower mounting plate, an upper mounting plate, and a plurality of connecting rods. The plurality of connecting rods are all arranged between the lower mounting plate and the upper mounting plate. The lower mounting plate is provided with a through hole. The upper temperature-measuring tube is arranged on the lower mounting plate and can pass through the inner ring. The upper mounting plate is inserted into the adjusting ring, and the through hole and the inner ring are coaxially arranged.

[0015] Optionally, the outer side of the upper temperature-measuring tube is provided with threads. The mounting bracket includes a lower temperature-measuring nut. The upper temperature-measuring tube passes through the inner ring and is screwed to the lower temperature-measuring nut.

[0016] Optionally, one end of the upper temperature-measuring tube is provided with a flange. The flange is provided with a connection hole. A temperature-measuring screw passes through the connection hole and is screwed into a lower mounting screw hole on the lower mounting plate.

[0017] Optionally, the thermometer is provided with a stopper and its outer surface is provided with threads. The upper mounting plate is provided with a temperature-measuring hole. The thermometer passes through the temperature-measuring hole and is screwed to an upper temperature-measuring nut. The upper mounting plate is clamped between the stopper and the upper temperature-measuring nut.

[0018] Optionally, the base includes at least two columns. The two columns are arranged on both sides of the adjusting ring. The spherical plain bearing is arranged on at least one of the columns.

[0019] Optionally, the temperature measuring device includes a connection assembly. One end of the connection assembly is rotatably connected to the column. The connection assembly can rotate around the axis of the column. The other end of the connection assembly is connected to the spherical plain bearing.

[0020] Optionally, the connection assembly includes a connecting piece and a connecting nut. One end of the connecting piece is provided with a rotating hole. The column is provided with a fixing part and part of it is provided with threads. The column passes through the rotating hole. The column and the connecting nut are screwed together. The connecting piece can be clamped between the connecting nut and the fixing part.

[0021] Optionally, the other end of the connecting piece is provided with a connecting screw hole. An outer ring of the spherical plain bearing is fixedly connected with a spherical plain bearing screw. The spherical plain bearing screw is screwed into the connecting screw hole.

[0022] Optionally, the connection assembly includes a lock nut. The lock nut is screwed to the spherical plain bearing screw and can abut against the other end of the connecting piece.

[0023] The beneficial effects of the present invention are as follows:

[0024] The present invention provides a temperature measuring device. By setting a base and a spherical plain bearing on the base, one end of the mounting bracket is connected to the inner ring of the spherical plain bearing, which can ensure that the deflection center of the mounting bracket remains fixed. Additionally, by adjusting the relative position between the mounting bracket and the adjusting ring with the first adjusting screw, the angle of the mounting bracket can be adjusted. Since the thermometer is mounted on the mounting bracket, with the above settings, while adjusting the deflection angle of the thermometer, it can be ensured that the deflection center of the thermometer remains unchanged, making the adjustment more convenient and improving the adjustment efficiency of the thermometer. Description of the Drawings

[0025] Figure 1 is a schematic structural view of the temperature measuring device from the first perspective in an embodiment of the present invention;

[0026] Figure 2 is a schematic structural view of the temperature measuring device from the second perspective in an embodiment of the present invention;

[0027] Figure 3 is a schematic cross-sectional structural view of the temperature measuring device in an embodiment of the present invention.

[0028] In the figure:

[0029] 100, elongated tube;

[0030] 1, base; 11, adjusting ring; 12, column; 121, fixing part; 122, lifting adjustment screw hole;

[0031] 2, spherical plain bearing; 21, inner ring; 22, outer ring; 23, spherical plain bearing screw;

[0032] 3, mounting bracket; 31, upper temperature measuring tube; 311, flange; 32, lower mounting plate; 321, through hole; 33, upper mounting plate; 34, connecting rod; 35, lower temperature measuring nut; 36, upper temperature measuring nut;

[0033] 4, first adjusting screw;

[0034] 5, thermometer; 51, stop member;

[0035] 6, connection assembly; 61, connecting member; 62, connection nut; 63, locking nut. Detailed Embodiments

[0036] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0037] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0038] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "mounted", "connected" and "coupled" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0040] As Figures 1-3 shown, this embodiment provides a temperature measuring device disposed above the slender tube 100. The temperature measuring device includes a base 1, a spherical plain bearing 2, a mounting bracket 3, a first adjusting screw 4, and a thermometer 5. One end of the base 1 is provided with an adjusting ring 11, and a plurality of adjusting holes are provided in the circumferential direction of the adjusting ring 11; the adjusting holes are threaded holes, and the spherical plain bearing 2 is disposed at the other end of the base 1; one end of the mounting bracket 3 passes through the inner ring 21 of the spherical plain bearing 2, and the other end of the mounting bracket 3 passes through the adjusting ring 11 and has a gap with the adjusting ring 11; the number of the first adjusting screws 4 is the same as that of the adjusting holes and they correspond one by one. The first adjusting screw 4 passes through the adjusting hole and can abut against the mounting bracket 3; the thermometer 5 is fixed to the mounting bracket 3, and the infrared rays tested can pass through the inner ring 21.

[0041] In the above setting, one end of the mounting bracket 3 is connected to the inner ring 21 of the spherical plain bearing 2, which can ensure that the deflection center of the mounting bracket 3 remains fixed, that is, the deflection center of the mounting bracket 3 coincides with the deflection center of the inner ring 21. In addition, by adjusting the relative position between the mounting bracket 3 and the adjusting ring 11 with the first adjusting screw 4, the angle of the mounting bracket 3 can be adjusted. Since the thermometer 5 is mounted on the mounting bracket 3, when adjusting the deflection angle of the thermometer 5, the deflection center of the thermometer 5 remains unchanged, making the adjustment more convenient, enabling the infrared rays to more easily pass through the slender tube 100 smoothly, and improving the adjustment efficiency of the thermometer 5.

[0042] Among them, the spherical plain bearing 2 includes an inner ring 21 with an outer spherical surface and an outer ring 22 with an inner spherical surface, and the inner ring 21 can rotate within the outer ring 22.

[0043] Regarding the structure of the mounting bracket 3, in this embodiment, the mounting bracket 3 includes a temperature-measuring upper tube 31, a lower mounting plate 32, an upper mounting plate 33, and a plurality of connecting rods 34. The plurality of connecting rods 34 are all arranged between the lower mounting plate 32 and the upper mounting plate 33. The lower mounting plate 32 is provided with a through hole 321. The temperature-measuring upper tube 31 is arranged on the lower mounting plate 32 and can pass through the inner ring 21. The upper mounting plate 33 passes through the adjusting ring 11, and the through hole 321 and the inner ring 21 are coaxially arranged. This setting enables the test infrared rays of the thermometer 5 mounted on the mounting bracket 3 to pass through the through hole 321 and through the internal pipeline of the temperature-measuring upper tube 31. After the thermometer 5 is mounted on the mounting bracket 3, the relative position between the two is fixed, facilitating later debugging. Among them, there are three connecting rods 34, and the included angle between any two of the three connecting rods 34 is 120°.

[0044] The outer side of the temperature-measuring upper tube 31 is provided with a thread, and the mounting bracket 3 includes a temperature-measuring lower nut 35. The temperature-measuring upper tube 31 passes through the inner ring 21 and is screwed to the temperature-measuring lower nut 35. After passing the temperature-measuring upper tube 31 through the inner ring 21 and screwing it to the temperature-measuring lower nut 35, the fixation of the temperature-measuring upper tube 31 and the inner ring 21 is realized, thereby ensuring the relative fixation of the mounting bracket 3 and the inner ring 21. When adjusting the position of the upper mounting plate 33 of the mounting bracket 3, the deflection center of the mounting bracket 3 and the rotation center of the inner ring 21 relative to the outer ring 22 remain consistent, which is conducive to ensuring the position adjustment of the infrared rays. As long as it is ensured that the center of the inner ring 21 is located on the axis of the slender tube 100 after installation.

[0045] Regarding the connection between the temperature-measuring upper tube 31 and the lower mounting plate 32, in this embodiment, one end of the temperature-measuring upper tube 31 is provided with a flange 311, and the flange 311 is provided with connection holes. The temperature-measuring screws pass through the connection holes and are screwed into the lower mounting screw holes of the lower mounting plate 32. Among them, there are two connection holes, and the two temperature-measuring screws pass through the two connection holes respectively and are screwed into the two lower mounting screw holes.

[0046] The thermometer 5 is provided with a stop member 51 and has a threaded outer surface. The upper mounting plate 33 is provided with a temperature measurement hole. The thermometer 5 passes through the temperature measurement hole and is screwed to the upper temperature measurement nut 36. The upper mounting plate 33 is clamped between the stop member 51 and the upper temperature measurement nut 36. With the above arrangement, a firm connection between the thermometer 5 and the upper mounting plate 33 can be ensured.

[0047] The stop member 51 can be a nut which is screwed to the thermometer 5. This arrangement enables the relative position between the thermometer 5 and the upper mounting plate 33 to be adjustable.

[0048] The base 1 includes at least two columns 12. The two columns 12 are provided on both sides of the adjusting ring 11. The spherical plain bearing 2 is provided on the columns 12. The columns 12 are mounted on the crystal furnace. The above structure is simple and has a low production cost. Specifically, the column 12 is of a cylindrical structure.

[0049] To avoid errors in the manufacturing process, in this embodiment, the temperature measuring device includes a connecting component 6. One end of the connecting component 6 is rotatably connected to the column 12. The connecting component 6 can rotate around the axis of the column 12. The other end of the connecting component 6 is connected to the spherical plain bearing 2. This arrangement enables the spherical plain bearing 2 to rotate around the column 12, so that the position of the spherical plain bearing 2 can be adjusted to adapt to the position of the slender tube 100. The cylindrical column 12 enables the spherical plain bearing 2 to rotate around the column 12.

[0050] Further, the connecting component 6 includes a connecting piece 61 and a connecting nut 62. One end of the connecting piece 61 is provided with a rotating hole. The column 12 is provided with a fixing portion 121 and part of it is threaded. The column 12 passes through the rotating hole and is screwed to the connecting nut 62. The connecting piece 61 can be clamped between the connecting nut 62 and the fixing portion 121. Optionally, the fixing portion 121 is provided with a lifting adjustment screw hole 122. The second adjusting screw is in threaded cooperation with the lifting adjustment screw hole 122 and can abut against the side wall of the rotating hole of the connecting piece 61 after passing through the lifting adjustment screw hole 122. This arrangement enables the spherical plain bearing 2 to move along the axis of the column 12, further expanding the adjustment range of the spherical plain bearing 2.

[0051] One end of the connecting piece 61 is provided with a rotating portion. The rotating hole is provided in the rotating portion. The rotating portion is provided with a radial adjustment screw hole communicating with the rotating hole. The third adjusting screw abuts against the column 12 after passing through the radial adjustment screw hole. Among them, there are three radial adjustment screw holes, which are evenly distributed in the circumferential direction of the rotating portion.

[0052] Even further, the other end of the connecting piece 61 is provided with a connecting screw hole. An articulating screw 23 is fixedly connected to the outer ring 22 of the spherical plain bearing 2. The articulating screw 23 is screwed into the connecting screw hole. This arrangement enables the distance between the spherical plain bearing 2 and the column 12 to be adjustable, further expanding the adjustment range of the spherical plain bearing 2.

[0053] The connecting component 6 includes a locking nut 63, which is screwed onto the joint screw 23 and can abut against the other end of the connecting piece 61. With the above arrangement, the locking connection between the joint screw 23 and the connecting piece 61 can be completed, preventing looseness between the joint screw 23 and the connecting piece 61.

[0054] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A temperature measuring device, characterized in that, Comprising: A base (1), one end of the base (1) is provided with an adjusting ring (11), and a plurality of adjusting holes are circumferentially arranged on the adjusting ring (11); A spherical plain bearing (2), the spherical plain bearing (2) is arranged at the other end of the base (1); An installation bracket (3), one end of the installation bracket (3) passes through the inner ring (21) of the spherical plain bearing (2), the other end of the installation bracket (3) passes through the adjusting ring (11) and there is a gap between the installation bracket (3) and the adjusting ring (11); First adjusting screws (4), the number of the first adjusting screws (4) is the same as and corresponds to the number of the adjusting holes one by one, the first adjusting screws (4) pass through the adjusting holes and can abut against the installation bracket (3); A thermometer (5), the thermometer (5) is fixed to the installation bracket (3), and the infrared rays for measurement can pass through the inner ring (21).

2. The temperature measuring device according to claim 1, characterized in that, The installation bracket (3) includes a thermometer upper tube (31), a lower mounting plate (32), an upper mounting plate (33) and a plurality of connecting rods (34). The plurality of connecting rods (34) are all arranged between the lower mounting plate (32) and the upper mounting plate (33). The lower mounting plate (32) is provided with a through hole (321). The thermometer upper tube (31) is arranged on the lower mounting plate (32) and can pass through the inner ring (21). The upper mounting plate (33) is passed through the adjusting ring (11), and the through hole (321) and the inner ring (21) are coaxially arranged.

3. The temperature measuring device according to claim 2, wherein, The outer side of the thermometer upper tube (31) is provided with threads, and the installation bracket (3) includes a thermometer lower nut (35). The thermometer upper tube (31) passes through the inner ring (21) and is screwed with the thermometer lower nut (35).

4. The temperature measuring device according to claim 3, characterized in that, One end of the thermometer upper tube (31) is provided with a flange (311), and the flange (311) is provided with a connecting hole. A thermometer screw passes through the connecting hole and is screwed into a lower mounting screw hole of the lower mounting plate (32).

5. The temperature measuring device according to claim 2, wherein, The thermometer (5) is provided with a stop member (51) and has threads on the outer surface. The upper mounting plate (33) is provided with a thermometer hole. The thermometer (5) passes through the thermometer hole and is screwed with a thermometer upper nut (36). The upper mounting plate (33) is clamped between the stop member (51) and the thermometer upper nut (36).

6. The temperature measuring device according to any one of claims 1-5, characterized in that The base (1) includes at least two columns (12). The two columns (12) are arranged on both sides of the adjusting ring (11), and the spherical plain bearing (2) is arranged on at least one of the columns (12).

7. The temperature measuring device according to claim 6, characterized in that The temperature measuring device includes a connecting component (6). One end of the connecting component (6) is rotatably connected to the column (12). The connecting component (6) can rotate around the axis of the column (12), and the other end of the connecting component (6) is connected to the spherical plain bearing (2).

8. The temperature measuring device according to claim 7, characterized in that, The connecting component (6) includes a connecting piece (61) and a connecting nut (62). One end of the connecting piece (61) is provided with a rotating hole. The upright column (12) is provided with a fixing part (121) and is partially threaded. The upright column (12) passes through the rotating hole, and the upright column (12) is screwed with the connecting nut (62). The connecting piece (61) can be clamped between the connecting nut (62) and the fixing part (121).

9. The temperature measurement device according to claim 8, characterized in that, The other end of the connecting piece (61) is provided with a connecting screw hole. An articulating screw (23) is fixedly connected to the outer ring (22) of the spherical plain bearing (2). The articulating screw (23) is screwed into the connecting screw hole.

10. The temperature measuring device according to claim 9, characterized in that, The connecting component (6) includes a locking nut (63). The locking nut (63) is screwed with the articulating screw (23) and can abut against the other end of the connecting piece (61).

Citation Information

Patent Citations

  • Temperature detection and adjustment mechanism for silicon carbide single crystal growth furnace

    CN210151244U

  • Temperature measuring device

    CN218937579U