Optical proximity correction method and system, mask, apparatus, and storage medium

Abstract

An optical proximity correction method and system, a mask, a device and a storage medium, the correction method comprising: providing a plurality of design patterns, the design patterns comprising adjacent to-be-tested patterns and reference patterns, the reference patterns comprising reference edges, the reference patterns and / or the to-be-tested patterns comprising to-be-selected edges meeting a distance threshold condition with the reference edges, the distance threshold condition having a preset distance threshold; taking the reference edges as a reference, finding points on the to-be-selected edges equal to the preset distance threshold from end points of the reference edges as segmentation points; segmenting the to-be-selected edges into a plurality of line segments according to the segmentation points, and selecting line segments meeting the distance threshold condition as to-be-processed edges; and performing correction processing on the to-be-processed edges to realize pattern correction on the design patterns. The present application is beneficial to improving the correction accuracy of the optical proximity correction method.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and more particularly to an optical proximity correction method and system, a photomask, an apparatus, and a storage medium. Background Technology

[0002] To transfer a pattern from a photomask to the surface of a silicon wafer, the process typically involves an exposure step, a development step following the exposure step, and an etching step following the development step. In the exposure step, light passes through the light-transmitting areas of the photomask and shines onto the silicon wafer coated with photoresist, causing a chemical reaction in the photoresist. In the development step, the different solubility of the developer in the photoresist and the unphotoresisted photoresist creates a photolithographic pattern, transferring the pattern from the photomask to the photoresist. In the etching step, the silicon wafer is etched based on the photolithographic pattern formed by the photoresist layer, further transferring the pattern from the photomask onto the silicon wafer.

[0003] However, as device dimensions shrink, the difference between the pattern on the chip surface and the original photomask pattern increases after photolithography. To avoid inconsistencies between the pattern on the chip and the mask pattern caused by optical proximity effect, the current solution is usually to perform optical proximity correction (OPC) on the mask pattern, and then perform pattern transfer based on the corrected mask pattern.

[0004] However, the accuracy of optical proximity correction still needs to be improved. Summary of the Invention

[0005] The problem solved by the embodiments of the present invention is to provide an optical proximity correction method and system, mask, device and storage medium to improve the correction accuracy of optical proximity correction.

[0006] To address the aforementioned problems, this invention provides an optical proximity correction method, comprising: providing multiple design patterns, each design pattern including adjacent test patterns and reference patterns, each reference pattern including a reference edge, and the reference pattern and / or the test pattern including candidate edges that satisfy a distance threshold condition with respect to the reference edge, the distance threshold condition having a preset distance threshold; using the reference edge as a reference, finding points on the candidate edges whose distance to the endpoint of the reference edge is equal to the preset distance threshold, and using these points as dividing points; dividing the candidate edges into multiple line segments according to the dividing points, and selecting line segments that satisfy the distance threshold condition as edges to be processed; and performing correction processing on the edges to be processed to achieve graphic correction of the design patterns.

[0007] Accordingly, embodiments of the present invention also provide an optical proximity correction system, comprising: a graphic providing module for providing multiple design graphics, the design graphics including adjacent test graphics and reference graphics, the reference graphics including reference edges, and the reference graphics and / or test graphics including candidate edges that satisfy a distance threshold condition with respect to the reference edges, the distance threshold condition having a preset distance threshold; a point selection module for finding points on the candidate edges whose distance to the endpoints of the reference edges is equal to the preset distance threshold, using the reference edges as a reference, as dividing points; a candidate edge acquisition module for dividing the candidate edges into multiple line segments according to the dividing points, and selecting line segments that satisfy the distance threshold condition as candidate edges; and a correction module for correcting the candidate edges to achieve graphic correction of the design graphics.

[0008] Accordingly, embodiments of the present invention also provide a photomask, including a pattern obtained using the optical proximity correction method provided in embodiments of the present invention.

[0009] Accordingly, embodiments of the present invention also provide an apparatus including at least one memory and at least one processor, wherein the memory stores one or more computer instructions, and the one or more computer instructions are executed by the processor to implement the optical proximity correction method provided in the embodiments of the present invention.

[0010] Accordingly, embodiments of the present invention also provide a storage medium storing one or more computer instructions, which are used to implement the optical proximity correction method provided in the embodiments of the present invention.

[0011] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages:

[0012] In the optical proximity correction method provided in this embodiment of the invention, a reference edge is used as a benchmark. Points on the candidate edge whose distance to the reference edge is equal to a preset distance threshold are found and used as segmentation points. The candidate edge is then segmented based on these segmentation points to obtain line segments that satisfy the distance threshold condition as edges to be processed. Compared to the previous method of first segmenting the candidate edge into multiple line segments and then selecting those segments to obtain the edges to be processed, this embodiment of the invention uses a reference edge as a benchmark, finds points whose distance to the reference edge is equal to a preset distance threshold as segmentation points, and then segments the candidate edge based on these segmentation points to obtain line segments that satisfy the distance threshold condition as edges to be processed. The edge selection method is advantageous because it allows for the selection of all edges that meet the distance threshold condition as edges to be processed, while excluding those that do not. This reduces the probability of mistakenly selecting line segments that do not meet the distance threshold condition or excluding line segments that do meet the distance threshold condition due to the randomness of segmentation. Furthermore, it helps to avoid the step of making multiple segmentation attempts in order to find a more accurate segmentation point, simplifying the correction process and improving the edge selection accuracy. This, in turn, facilitates more accurate edge selection operations in the optical proximity correction method, thereby improving the correction accuracy of the optical proximity correction method. Attached Figure Description

[0013] Figure 1 This is a flowchart of an embodiment of the optical proximity correction method of the present invention;

[0014] Figures 2 to 5 This is a schematic diagram of each step in one embodiment of the optical proximity correction method of the present invention;

[0015] Figure 6 This is a functional block diagram of an embodiment of the optical proximity correction system of the present invention;

[0016] Figure 7 This is a hardware structure diagram of an embodiment of the device provided by the present invention. Detailed Implementation

[0017] The accuracy of optical proximity correction needs to be improved.

[0018] In existing technologies, during the optical proximity correction process, the edges to be selected in the design graphic are first divided into multiple line segments, and then line segments that meet the distance threshold condition are selected as edges to be processed. Due to the randomness of the division, it is easy to mistakenly select some line segments that do not meet the distance threshold condition, or mistakenly exclude some line segments that meet the distance threshold condition. Moreover, in order to find a more accurate division point, multiple divisions are required, which is cumbersome. Furthermore, it is difficult to accurately perform edge selection operations in the optical proximity correction method, thus making it difficult to improve the correction accuracy of the optical proximity correction method.

[0019] To address the technical problem, embodiments of the present invention provide an optical proximity correction method. (Reference) Figure 1 The flowchart of an embodiment of the optical proximity correction method of the present invention is shown.

[0020] In this embodiment, the optical proximity correction method includes the following basic steps:

[0021] Step S1: Provide multiple design graphics, which include adjacent test graphics and reference graphics. The reference graphics include reference edges. The reference graphics and / or test graphics include candidate edges that satisfy the distance threshold condition with the reference edges. The distance threshold condition has a preset distance threshold.

[0022] Step S2: Using the reference edge as a reference, find points on the candidate edge whose distance from the endpoint of the reference edge is equal to a preset distance threshold, and use them as split points;

[0023] Step S3: Divide the edge to be selected into multiple line segments according to the dividing point, and select the line segments that meet the distance threshold condition as the edge to be processed;

[0024] Step S4: Correct the edges to be processed to achieve graphic correction of the design.

[0025] Compared to the approach of first dividing the candidate edge into multiple line segments and then selecting the segments that meet the distance threshold condition to obtain the edge to be processed, this embodiment of the invention uses a reference edge as a benchmark, finds a point whose distance from the reference edge is equal to a preset distance threshold as a dividing point, and then divides the candidate edge according to the dividing point to obtain the line segments that meet the distance threshold condition as the edge to be processed. This approach is beneficial in selecting all parts of the candidate edge that meet the distance threshold condition as the edge to be processed and excluding all parts that do not meet the distance threshold condition. This helps reduce the probability of mistakenly selecting line segments that do not meet the distance threshold condition or mistakenly excluding line segments that meet the distance threshold condition due to the randomness of the segmentation. Moreover, it also helps to avoid the step of performing multiple segmentation attempts in order to find a more accurate dividing point, simplifying the correction process and improving the edge selection accuracy. This is beneficial for performing more accurate edge selection operations in the optical proximity correction method, thereby improving the correction accuracy of the optical proximity correction method.

[0026] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0027] Figures 2 to 5 This is a schematic diagram of each step in one embodiment of the optical proximity correction method of the present invention.

[0028] refer to Figure 2Step S1: Provide multiple design graphics 100, each design graphic 100 including adjacent test graphics 120 and reference graphics 110, each reference graphics 110 including a reference edge 111, and each reference graphics 110 and / or test graphics 120 including a candidate edge 112 that satisfies a distance threshold condition with the reference edge 111, the distance threshold condition having a preset distance threshold.

[0029] Design pattern 100 is used to form the target pattern to be transferred onto the wafer.

[0030] In the semiconductor field, the edges of the design pattern 100 are typically processed according to the different environments in which the design pattern 100 is located. In this embodiment, during the optical proximity correction process, in order to transfer the design pattern 100 from the mask to the wafer surface, it is usually necessary to go through an exposure step, a development step after the exposure step, and an etching step after the development step. After the photolithography and etching processes, the critical dimensions of the pattern formed on the wafer deviate from the critical dimensions of the design pattern 100. Therefore, each design pattern 100 needs to be detected according to the layout of the surrounding design patterns 100 to determine whether corresponding processing is required. For this reason, in this embodiment, the design pattern 100 includes candidate edges 112 to be processed.

[0031] It should be noted that, in this embodiment, Figure 2 Only two design graphics 100 are shown. Depending on different process requirements, the number of design graphics 100 is not limited to two.

[0032] Reference edge 111 is used as a reference for selecting candidate edge 112, which is the edge that needs to be selected and processed in subsequent determinations.

[0033] It should be noted that the distance threshold condition is the condition that the distance to the reference edge 111 is less than or equal to the preset distance threshold. Based on whether the distance between the reference edge 111 and the candidate edge 112 meets the distance threshold condition, the surrounding environment of the candidate edge 112 is detected.

[0034] It should also be noted that the reference graphic 110 or the graphic to be tested 120 includes a candidate edge 112 that satisfies the distance threshold condition with the reference edge 111. That is, the candidate edge 112 can be located on the graphic to be tested 120 or on the reference graphic 110. In this embodiment, the candidate edge 112 is located on the graphic to be tested 120 as an example.

[0035] It should also be noted that each edge in the graphic to be tested 120 needs to be detected. In this embodiment, the detection of one edge is used as an example for detailed description, so only one edge to be selected 112 is shown.

[0036] In this embodiment, a preliminary screening process is performed based on the reference edge 111 and the distance threshold condition to obtain candidate edges 112 that satisfy the distance threshold condition with the reference edge 111.

[0037] The initial screening process includes: forming a square search box 200 based on the reference edge 111. The search box 200 has a first side that overlaps with the reference edge 111 and a second side that is parallel to the first side. The distance d2 between the second side and the first side is a preset distance threshold. The distance d1 between the remaining two sides of the square search box 200 and the endpoints on the same side of the reference edge 111 is a preset distance threshold. Any side selected by the search box 200 is taken as the candidate side 112.

[0038] First, a preliminary screening process is performed to select candidate edges 112 that meet the distance threshold condition. Edges that do not meet the distance threshold condition are excluded before subsequent point selection operations are performed. This helps to avoid wasting computation by performing point selection operations on every edge, improves the efficiency of point selection operations, and thus improves the efficiency of optical proximity correction.

[0039] In practice, specific software is usually required for initial screening. When the software only supports setting a square search box, it improves the operational compatibility of the initial screening process. Moreover, since the search box 200 is square, it can be formed by defining the positions of its four sides, making the process of forming the search box 200 relatively simple and easy to operate.

[0040] In this embodiment, since the search box 200 is square, it contains points whose distance from the reference edge 111 is greater than a preset distance threshold. Therefore, in order to reduce the probability of mistakenly selecting an edge whose distance from the reference edge 111 is greater than the preset distance threshold, and to more accurately select line segments that meet the distance threshold condition as edges to be processed, after the initial screening, it is necessary to perform point selection operations on the selected edges 112.

[0041] In this embodiment, in the direction perpendicular to the reference edge 111, one side of the reference edge 111 is designated as the spacing side 111b, and the other side is designated as the width side 111a.

[0042] Specifically, as an example, the direction criterion of the design graphic 100 is set as a clockwise direction criterion, that is, it moves clockwise around the edge of the design graphic 100, with the left side as the spacing side 111b and the right side as the width side 111a.

[0043] The candidate edge 112 located on the spacing side 111b and the candidate edge 112 located on the width side 111a each have corresponding correction processing methods. Therefore, the spacing side 111b and the width side 111a are determined first so that the correction processing method related to the relative position relationship between the candidate edge 112 and the reference edge 111 can be selected later.

[0044] In this embodiment, when the edge to be selected 112 falls into the width side 111a, the edge to be processed is subsequently subjected to a width-related fourth correction process, and when the edge to be selected 112 falls into the spacing side 111b, the edge to be processed is subsequently subjected to a spacing-related third correction process.

[0045] refer to Figure 3 Before finding a point on the candidate edge 112 that is at a distance equal to the endpoint of the reference edge 111 based on the reference edge 111, the process further includes: determining the positional relationship between the projection of the candidate edge 112 onto the baseline 10 where the reference edge 111 is located and the reference edge 111.

[0046] In this process, using reference edge 111 as a reference, a point on the candidate edge 112 that is at a distance equal to a preset distance threshold from the endpoint of reference edge 111 is selected as the point selection operation.

[0047] Determine the positional relationship between the projection of the candidate edge 112 onto the baseline 10 where the reference edge 111 is located and the reference edge 111, in order to determine whether to perform a point selection operation on the candidate edge 112.

[0048] In this embodiment, when the projection is located within the reference edge 111, the candidate edge 112 is taken as the edge to be processed.

[0049] When the projection is within the reference edge 111, it means that all the candidate edges 112 meet the distance threshold condition with the reference edge 111. Therefore, the candidate edges 112 do not need to be selected. Instead, all the candidate edges 112 are selected as the edges to be processed for subsequent processing.

[0050] In this embodiment, when the projection partially coincides with or does not coincide with the reference edge 111, the distance between the reference edge 111 and the endpoint on the same side of the candidate edge 112 is compared with a preset distance threshold. Figure 3 As shown, the distance between the endpoints on the same side of the reference edge 111 and the candidate edge 112 is the distance between point O and point A, and the distance between point P and point B.

[0051] In this embodiment, when all distances are less than or equal to a preset distance threshold, edge 112 is selected as the edge to be processed.

[0052] When all distances are less than or equal to the preset distance threshold, it means that all candidate edges 112 meet the distance threshold condition with reference edges 111. Therefore, candidate edges 112 do not need to be selected. All candidate edges 112 are selected as edges to be processed for subsequent processing.

[0053] In this embodiment, when the distance is greater than a preset distance threshold, the edge to be selected 112 is selected, and a point selection operation is performed on the edge to be selected 112.

[0054] When the distance is greater than the preset distance threshold, it means that there are some line segments on the edge to be selected 112 that do not meet the distance threshold condition with the reference edge 111. Therefore, it is necessary to perform point selection operation on the edge to be selected 112.

[0055] In this embodiment, determining the positional relationship between the projection of the candidate edge 112 onto the baseline 10 where the reference edge 111 is located and the positional relationship between the reference edge 111 and the reference edge 111 includes: determining the positional relationship between the projections of the two endpoints of the candidate edge 112 onto the baseline 10 where the reference edge 111 is located and the positional relationship between the reference edge 111 and the reference edge 111. Here, the baseline 10 where the reference edge 111 is located refers to the reference edge 111 and its extension line.

[0056] By determining the projection positions of the two endpoints of the candidate edge 112 onto the baseline 10 where the reference edge 111 is located, the positional relationship between the projection of the candidate edge 112 onto the baseline 10 where the reference edge 111 is located and the reference edge 11 can be determined. The projection position of the edge is determined by the projection position of the point, which simplifies the judgment steps and has high operational feasibility.

[0057] In this embodiment, when the projection positions of both ends of the candidate edge 112 are both located on the reference edge 111, it is determined that the projection of the candidate edge 112 on the baseline 10 where the reference edge 111 is located is inside the reference edge 111; when either of the projection positions of the two ends of the candidate edge 112 is located outside the reference edge 111, or when the projection positions of both ends of the candidate edge 112 are both located outside the reference edge 111 and on both sides of the reference edge 111, it is determined that the projection of the candidate edge 112 on the baseline 10 where the reference edge 111 is located partially coincides with the reference edge 111; when the projection positions of both ends of the candidate edge 112 are both located outside the reference edge 111 and on the same side of the reference edge 111, it is determined that the projection of the candidate edge 112 on the reference edge 111 does not coincide with the reference edge 111.

[0058] In this embodiment, before determining the positional relationship between the projection positions of the two endpoints of the candidate edge 112 on the baseline 10 where the reference edge 111 is located and the position of the reference edge 111, the method further includes: setting vectors, taking any endpoint of the reference edge 111 as the origin O, taking the direction from the origin O to the other endpoint P of the reference edge 111 as the first vector 121, taking the endpoint of the candidate edge 112 on the same side as the origin O as the first point A, taking the direction from the origin O to the first point A as the second vector 122, taking the other endpoint of the candidate edge 112 as the second point B, and taking the direction from the origin O to the second point B as the third vector 123.

[0059] Configure the vectors to prepare for calculating the projection values ​​using the vector formula.

[0060] Specifically, in this embodiment, determining the positional relationship between the projection positions of the two endpoints of the candidate edge 112 on the baseline 10 where the reference edge 111 is located and the positional relationship of the reference edge 111 includes: determining the position of the two endpoints of the candidate edge 112 respectively.

[0061] The positions of the two endpoints of the selected edge 112 are determined separately, thereby determining the relationship between the projection positions of the two endpoints of the selected edge 112 on the baseline 10 where the reference edge 111 is located and the position of the reference edge 111.

[0062] In this embodiment, the position determination includes: taking the endpoint to be determined in the candidate edge 112 as the endpoint to be evaluated, calculating the projection value of the second vector 122 or the third vector 123 corresponding to the endpoint to be evaluated on the first vector 121 according to the dot product formula of vectors, and using the ratio of the projection value to the magnitude of the first vector 121 as an auxiliary value.

[0063] Specifically, using the dot product formula of vectors Calculate the projection value Auxiliary value in, Let the first vector be 121. Let θ be either the second vector 122 or the third vector 123, and θ be a vector. and The included angle.

[0064] In this embodiment, the projection position of the endpoint to be evaluated on the baseline 10 where the reference edge 111 is located is determined based on the auxiliary value. When the auxiliary value is less than 0, it is determined that the projection position of the endpoint to be evaluated is located on the reference edge 111 near the origin O. When the auxiliary value is greater than or equal to 0 and less than or equal to 1, it is determined that the projection position of the endpoint to be evaluated is on the reference edge 111. When the auxiliary value is greater than 1, it is determined that the projection position of the endpoint to be evaluated is located on the reference edge 111 far from the origin O.

[0065] That is That is, the projection length of the second vector 122 or the third vector 123 onto the first vector 121. When the auxiliary value is less than 0, it indicates that the vector... and If the included angle is obtuse, the projection position of the endpoint to be evaluated is located on the outside of the reference edge 111 near the origin O; when the auxiliary value is greater than or equal to 0 and less than or equal to 1, it means that the second vector 122 or the third vector 123 is projected into the first vector 121, and the projection position of the endpoint to be evaluated is located on the reference edge 111; when the auxiliary value is greater than 1, it means that the second vector 122 or the third vector 123 is projected outside the first vector 121, and the projection position of the endpoint to be evaluated is located on the outside of the reference edge 111 away from the origin O.

[0066] In this embodiment, before performing the point selection operation on the edge 112 to be selected, the method further includes: obtaining the projection length of the edge 112 to be selected on the reference edge 111.

[0067] The projection length of the candidate edge 112 onto the reference edge 111 is obtained and used as a criterion for determining whether the subsequent candidate edge should undergo the first or second correction process.

[0068] In this embodiment, the projection length is compared with a preset length threshold. When the projection length is less than or equal to the preset length threshold, the candidate edge 112 is selected as the first candidate edge. When the projection length is greater than the preset length threshold, the candidate edge 112 is selected as the second candidate edge.

[0069] The projection length represents the length of the portion of the candidate edge 112 and the reference edge 111 that are directly opposite each other. Depending on the different situations of the directly opposite portions, the first candidate edge and the second candidate edge are subsequently subjected to the first correction process and the second correction process, respectively.

[0070] In this embodiment, the projection length of the candidate edge 112 onto the reference edge 111 is obtained by using the vector settings described above.

[0071] In this embodiment, obtaining the projection length of the candidate edge 112 on the reference edge 111 includes: determining the positional relationship between the projection positions of the two endpoints of the candidate edge 112 on the baseline 10 where the reference edge 111 is located and the position of the reference edge 111; and calculating the projection value of the second vector 122 or the third vector 123 on the first vector 121 according to the dot product formula of vectors.

[0072] Specifically, in this embodiment, the dot product formula of the aforementioned vectors is used. Calculate the projection value in, Let the first vector be 121. Let θ be either the second vector 122 or the third vector 123, and θ be a vector. and The included angle.

[0073] The projection value is the projection length of the second vector 122 or the third vector 123 onto the first vector 121 with a direction, so that the projection length can be calculated by the projection values ​​of the second vector 122 and the third vector 123 onto the first vector 121.

[0074] In this embodiment, when the projection positions of both ends of the candidate edge 112 are located on the reference edge 111, the absolute value of the difference between the projection values ​​of the second vector 122 and the third vector 123 is used as the projection length.

[0075] When the projection positions of both ends of the candidate edge 112 are located on the reference edge 111, the projection of the candidate edge 112 on the reference edge 111 is located within the reference edge 111, and the absolute value of the difference between the projection values ​​of the second vector 122 and the third vector 123 is used as the projection length.

[0076] In this embodiment, when the projection position of the first point A is located outside the reference edge 111 and the projection position of the second point B is located on the reference edge 111, the projection value of the third vector 123 is used as the projection length; when the projection position of the second point B is located outside the reference edge 111 and the projection position of the first point A is located on the reference edge 111, the difference between the magnitude of the first vector 121 and the projection value of the second vector 122 is used as the projection length.

[0077] When the projection position of the first point A is outside the reference edge 111, the projection position of the second point B is on the reference edge 111. Then the projection value of the third vector 123 is used as the projection length. When the projection position of the second point B is outside the reference edge 111, the projection position of the first point A is on the reference edge 111. Then the difference between the magnitude of the first vector 121 and the projection value of the second vector 122 is used as the projection length.

[0078] In this embodiment, when the projection positions of both ends of the candidate edge 112 are located outside the reference edge 111 and on both sides of the reference edge 111, the projection length is the modulus of the first vector 121.

[0079] When the projection positions of both ends of the candidate edge 112 are located outside the reference edge 111 and on both sides of the reference edge 111, the projection of the candidate edge 112 on the reference edge 111 completely covers the reference edge 111, and the projection length is the magnitude of the first vector 121.

[0080] In this embodiment, when the projection positions of both ends of the candidate edge 112 are located outside the reference edge 111 and on the same side of the reference edge 111, the projection length is 0.

[0081] When the projection positions of both ends of the candidate edge 112 are located outside the reference edge 111 and on the same side of the reference edge 111, the projection of the candidate edge 112 on the reference edge 111 does not coincide with the reference edge 111 at all, and the projection length is 0.

[0082] In this embodiment, before performing the selection operation on the edge 112 to be selected, the method further includes: determining the first positional relationship between the edge 112 to be selected and the reference edge 111, which is used to determine whether the edge 112 to be selected is located on the spacing side 111b or the width side 111a of the reference edge 111.

[0083] Determine whether the selected edge 112 is located on the spacing side 111b or the width side 111a of the reference edge 111. This is used to determine whether the subsequently selected edge to be processed will undergo the third or fourth correction process.

[0084] In this embodiment, the step of determining the first positional relationship between the candidate edge 112 and the reference edge 111 includes: taking the reference edge 111 as a reference, performing a first position determination operation on the two endpoints of the candidate edge 112 respectively to determine the relative positional relationship between each endpoint of the candidate edge 112 and the reference edge 111; when both endpoints of the candidate edge 112 are located on the spacing side 111b of the reference edge 111, it is determined that the candidate edge is located on the spacing side 111b of the reference edge 111; when both endpoints of the candidate edge 112 are located on the width side 111a of the reference edge 111, it is determined that the candidate edge 112 is located on the width side 111a of the reference edge 111.

[0085] The first position determination operation is performed on the two endpoints of the edge to be selected 112 to determine the relative positional relationship between the edge to be selected 112 and the reference edge 111. The positional relationship of the edge is determined by the positional relationship of the points, which simplifies the determination steps and makes the operation highly feasible.

[0086] In this embodiment, the first position determination operation includes: taking any endpoint of the reference edge 111 as the origin O, taking the other endpoint P of the reference edge 111 pointed to by the origin O as the first vector 121, taking any endpoint of the candidate edge 112 as the first point A, and taking the first point A pointed to by the origin O as the second vector 122.

[0087] Because the aforementioned steps involved setting up vectors, the cross product formula of vectors can be used to determine the first positional relationship.

[0088] In this embodiment, the positional relationship between the first point A and the reference edge 111 is determined according to the product formula of the first vector 121 and the second vector 122. When the value of the product formula is greater than 0, the first point A is determined to be located on the width side 111a of the reference edge 111. When the value of the product formula is less than 0, the first point A is determined to be located on the spacing side 111b of the reference edge 111.

[0089] As an example, the direction criterion of the design graphic 100 is set as a clockwise direction criterion. That is, when moving clockwise around the edge of the design graphic 100, the left side during the movement is the spacing side 111b, and the right side during the movement is the width side 111a. When the value of the difference product formula is greater than 0, the first point A is located on the right side when moving along the edge of the design graphic 100, that is, on the width side 111a of the reference edge 111. When the value of the difference product formula is less than 0, the first point A is located on the left side when moving along the edge of the design graphic 100, that is, on the spacing side 111b of the reference edge 111.

[0090] Specifically, the product-difference formula of the first vector 121 and the second vector 122 is used. Calculate the value of the product formula, where, Let the first vector be 121. Let θ be the second vector 122, and θ be a vector. Turn clockwise The included angle.

[0091] It should be noted that when any endpoint of the candidate edge 112 is taken as the first point B, the difference product formula is also used to determine whether the first point B is located on the width side 111a or the spacing side 111b of the reference edge 111.

[0092] In this embodiment, before performing the point selection operation on the edge to be selected 112 with reference edge 111 as the reference, the method further includes: determining the second positional relationship between the edge to be selected 112 and the reference edge 111, which is used to determine whether the edge to be selected 112 and the reference edge 111 are perpendicular.

[0093] Determine whether the edge to be selected 112 is perpendicular to the reference edge 111. This is used to determine whether the subsequently selected edge to be processed will undergo the fifth or sixth correction process.

[0094] In this embodiment, the step of determining the second positional relationship between the candidate edge 112 and the reference edge 111 includes: taking any endpoint of the reference edge 111 as the origin O, taking the origin Q pointing to the other endpoint P of the reference edge 111 as the first vector 121, taking any endpoint of the candidate edge 112 as the first point A, and taking the first point A pointing to the other endpoint B of the candidate edge 112 as the second vector 122.

[0095] Because the aforementioned steps involved setting up vectors, the dot product formula of vectors can be used to determine the second positional relationship.

[0096] In this embodiment, the cosine value of the angle between the first vector 121 and the second vector 122 is obtained according to the dot product formula of the first vector 121 and the second vector 122; when the cosine value is equal to 0, the reference side 111 is perpendicular to the candidate side 112; when the cosine value is not equal to 0, the reference side 111 is not perpendicular to the candidate side 112.

[0097] Specifically, the dot product formula of the first vector 121 and the second vector 122 is used. Calculate the cosine of the angle between the first vector 121 and the second vector 122. in, Let the first vector be 121. The second vector is 122.

[0098] Reference Figure 4 and Figure 5 , Figure 5 for Figure 4 In the enlarged view of the local area, step S2 is executed: using reference edge 111 as a reference, a point on the candidate edge 112 that is at a distance from the endpoint of reference edge 111 equal to a preset distance threshold is found and used as the segmentation point Q.

[0099] The split point Q is used for subsequent splitting of the candidate edge 112.

[0100] In this embodiment, with reference edge 111 as the reference, a point on the candidate edge 112 that is at a distance equal to a preset distance threshold from the endpoint of reference edge 111 is found and used as the point selection operation.

[0101] In this embodiment, the point selection operation includes: taking any endpoint of the candidate edge 112 whose projection position is outside the reference edge 111 as the first point A, taking the endpoint of the reference edge 111 on the same side as the first point A as the origin O, taking the origin O pointing to the first point A as the second vector 122, taking the other endpoint of the candidate edge 112 as the second point B, taking the first point A pointing to the second point B as the fourth vector 124, selecting the third point A' on the candidate edge 112, taking the first point A pointing to the third point A' as the fifth vector 125, and taking the origin O pointing to the third point A' as the sixth vector 126, wherein the modulus d of the sixth vector 126 is a preset distance threshold.

[0102] Specifically, assume that the dividing point on the edge to be selected 112 is the third point A'.

[0103] Because the aforementioned steps involved setting up vectors, the dot product formula and the cosine theorem formula can be used to select the split point.

[0104] In this embodiment, the ratio of the magnitude of the fifth vector 125 to the magnitude of the fourth vector 124 is calculated based on the cosine theorem formula formed by the second vector 122, the fifth vector 125 and the sixth vector 126, and the dot product formula of the second vector 122 and the fourth vector 124.

[0105] Specifically, the cosine theorem formula is formed using the second vector 122, the fifth vector 125, and the sixth vector 126. And the formula for the dot product of the second vector 122 and the fourth vector 124. By simultaneously solving the two equations, we can obtain the ratio of the magnitude of the fifth vector 125 to the magnitude of the fourth vector 124. in, For the second vector 122, The fifth vector is 125. The sixth vector is 126. The fourth vector is 124.

[0106] In this embodiment, when the ratio has no solution, the candidate edge 112 is determined to have no dividing point; when the ratio has one solution, the third point A' is determined to be the dividing point; when the ratio has multiple solutions, the third point A' closest to the first point A is determined to be the dividing point.

[0107] It should be noted that when the projected positions of the two endpoints of the candidate edge 112 are both located outside the reference edge 111, the two endpoints of the candidate edge 112 are used as the reference, and a point selection operation is performed once to obtain the corresponding dividing point of each endpoint.

[0108] Execute step S3, divide the candidate edge 112 into multiple line segments according to the dividing point Q, and select the line segments that meet the distance threshold condition as the candidate edge 300.

[0109] Compared to the approach of first dividing the candidate edge into multiple line segments and then selecting the line segments that meet the distance threshold condition to obtain the edge to be processed, this embodiment uses the reference edge 111 as a reference, finds a point whose distance from the reference edge 111 is equal to a preset distance threshold as a dividing point Q, and then divides the candidate edge 112 according to the dividing point Q to obtain the line segments that meet the distance threshold condition as the edge to be processed 300. This is beneficial for selecting all parts of the candidate edge 112 that meet the distance threshold condition as the edge to be processed 300, and for excluding all parts that do not meet the distance threshold condition. This helps reduce the probability of mistakenly selecting line segments that do not meet the distance threshold condition or mistakenly excluding line segments that meet the distance threshold condition due to the randomness of the division. Moreover, it also helps to avoid the step of performing multiple divisions in order to find a more accurate dividing point, simplifying the correction process and improving the edge selection accuracy. This is beneficial for performing more accurate edge selection operations in the optical proximity correction method, thereby improving the correction accuracy of the optical proximity correction method.

[0110] Specifically, when the candidate edge 112 has two dividing points Q, the line segment between the two dividing points Q is taken as the candidate edge 300. When the candidate edge 112 has one dividing point Q, the candidate edge is divided by the dividing point Q, and the line segment of the candidate edge 112 that is close to the reference edge 111 is selected as the candidate edge 300.

[0111] Step S4 is executed to correct the edge 300 to be processed, so as to correct the graphic of the design graphic 100.

[0112] Specifically, in this embodiment, when the candidate edge 112 is the first candidate edge, the edge to be processed 300 is subjected to a first correction process to achieve graphic correction of the design graphic 100; when the candidate edge 112 is the second candidate edge, the edge to be processed 300 is subjected to a second correction process to achieve graphic correction of the design graphic 100.

[0113] In this embodiment, when the edge to be selected 112 is located on the spacing side 111b of the reference edge 111, the edge to be processed 300 is subjected to a third correction process to achieve graphic correction of the design graphic 100; when the edge to be selected 112 is located on the width side 111a of the reference edge 111, the edge to be processed 300 is subjected to a fourth correction process to achieve graphic correction of the design graphic 100.

[0114] In this embodiment, when the edge to be selected 112 is perpendicular to the reference edge 111, the edge to be processed 300 is subjected to a fifth correction process to achieve graphic correction of the design graphic 100; when the edge to be selected 112 is not perpendicular to the reference edge 111, the edge to be processed 300 is subjected to a sixth correction process to achieve graphic correction of the design graphic 100.

[0115] In this embodiment, pattern correction includes etching deviation compensation processing.

[0116] When the edge to be processed 300 meets the distance threshold condition, after the photolithography and etching processes, the critical dimensions of the pattern formed on the wafer deviate from the critical dimensions of the design pattern 100. By performing etching deviation compensation processing on the edge to be processed 300, the deviations that may be generated by the photolithography and etching processes are pre-compensated into the design pattern 100, thereby improving the matching degree between the pattern formed on the wafer and the design pattern 100 after the photolithography and etching processes.

[0117] In this embodiment, the etching deviation compensation process includes: moving the edge to be processed by a preset distance along a direction perpendicular to the edge to be processed, thereby compensating for the etching offset.

[0118] In this embodiment, the etching offset can be obtained from experimental data, and the preset distance corresponds to the etching offset.

[0119] Accordingly, the present invention also provides an optical proximity correction system. Figure 6 This is a functional block diagram of an embodiment of the optical proximity correction system of the present invention.

[0120] In this embodiment, the optical proximity correction system 50 includes: a graphic providing module 501, used to provide multiple design graphics, the design graphics including adjacent test graphics and reference graphics, the reference graphics including reference edges, and the reference graphics and / or test graphics including candidate edges that satisfy a distance threshold condition with respect to the reference edges, the distance threshold condition having a preset distance threshold; a point selection module 502, used to find points on the candidate edges whose distance to the endpoints of the reference edges is equal to the preset distance threshold, based on the reference edges, as dividing points; a candidate edge acquisition module 503, used to divide the candidate edges into multiple line segments according to the dividing points, and select line segments that satisfy the distance threshold condition as candidate edges; and a correction module 504, used to perform correction processing on the candidate edges to achieve graphic correction of the design graphics.

[0121] Design patterns are used to form the target patterns that are transferred onto the wafer.

[0122] In the semiconductor field, the edges of a design pattern typically require corresponding processing depending on the environment in which it is located. In this embodiment, during the optical proximity correction process, to transfer the design pattern from the mask to the wafer surface, it usually requires an exposure step, a development step after the exposure step, and an etching step after the development step. After the photolithography and etching processes, the critical dimensions of the pattern formed on the wafer deviate from the critical dimensions of the design pattern. Therefore, each design pattern needs to be detected based on the layout of the surrounding design patterns to determine whether corresponding processing is required. For this reason, in this embodiment, the design pattern includes candidate edges to be processed.

[0123] The reference edge is used as a reference benchmark for selecting the edge to be selected. The edge to be selected is the edge that needs to be selected and processed in subsequent determinations.

[0124] It should be noted that the distance threshold condition is the condition that the distance to the reference edge is less than or equal to the preset distance threshold. The surrounding environment of the candidate edge is detected based on whether the distance between the reference edge and the candidate edge meets the distance threshold condition.

[0125] It should also be noted that the reference graphic or the graphic to be tested includes candidate edges that meet the distance threshold condition with the reference edge. That is, the candidate edge can be located on the graphic to be tested or on the reference graphic. This embodiment takes the candidate edge being located on the graphic to be tested as an example.

[0126] It should also be noted that each edge in the graphic to be tested needs to be detected. In this embodiment, the detection of one edge is used as an example for detailed description, so only one edge to be selected is shown.

[0127] In this embodiment, a preliminary screening process is performed based on the reference edge and the distance threshold condition to obtain candidate edges that satisfy the distance threshold condition with the reference edge.

[0128] The initial screening process includes: forming a square search box based on the reference edge, the search box having a first side overlapping the reference edge and a second side parallel to the first side, the distance d2 between the second side and the first side being a preset distance threshold, the distance d1 between the remaining two sides of the square search box and the endpoints on the same side of the reference edge being a preset distance threshold; and selecting any side of the search box as a candidate side.

[0129] First, a preliminary screening process is performed to select candidate edges that meet the distance threshold condition and exclude edges that do not meet the distance threshold condition before proceeding with subsequent point selection operations. This helps to avoid wasting computation by performing point selection operations on every edge, improves the efficiency of point selection operations, and thus improves the efficiency of optical proximity correction.

[0130] In practice, specific software is usually required for initial screening. When the software only supports setting a square search box, it improves the operational compatibility of the initial screening process. Moreover, since the search box is square, it can be formed by defining the positions of its four sides, making the process of forming the search box relatively simple and easy to operate.

[0131] In this embodiment, since the search box is square, it contains points whose distance from the reference edge is greater than a preset distance threshold. Therefore, in order to reduce the probability of mistakenly selecting an edge whose distance from the reference edge is greater than the preset distance threshold, it is beneficial to more accurately select line segments that meet the distance threshold condition as edges to be processed. After the initial screening, the selected edges to be processed still need to be selected by point selection.

[0132] In this embodiment, in the direction perpendicular to the reference edge, one side of the reference edge is set as the spacing side and the other side as the width side.

[0133] Specifically, as an example, the direction criterion for the design graphic is set as a clockwise direction criterion. That is, the design graphic moves clockwise around the edge, with the left side as the spacing side and the right side as the width side.

[0134] The candidate edges located on the spacing side and the candidate edges located on the width side each have corresponding correction processing methods. Therefore, the spacing side and the width side are determined first so that the correction processing method related to the relative positional relationship between the candidate edge and the reference edge can be selected later.

[0135] In this embodiment, when the edge to be selected falls on the width side, the edge to be processed is subsequently subjected to a fourth correction process related to width; when the edge to be selected falls on the spacing side, the edge to be processed is subsequently subjected to a third correction process related to spacing.

[0136] Before finding a point on the candidate edge that is at a distance equal to a preset distance threshold from the endpoint of the reference edge, the process includes: determining the positional relationship between the projection of the candidate edge onto the reference edge's baseline and the reference edge.

[0137] In this process, the point on the candidate edge is selected based on the reference edge, and the distance between the point and the endpoint of the reference edge is equal to a preset distance threshold.

[0138] Determine the positional relationship between the projection of the edge to be selected onto the baseline of the reference edge and the reference edge, in order to determine whether to perform point selection operations on the edge to be selected in the future.

[0139] In this embodiment, when the projection is located inside the reference edge, the edge to be selected is taken as the edge to be processed.

[0140] When the projection is inside the reference edge, it means that all the edges to be selected meet the distance threshold condition with the reference edge. Therefore, the edges to be selected do not need to be selected. Instead, all the edges to be selected are selected as edges to be processed for subsequent processing.

[0141] In this embodiment, when the projection partially coincides with or does not coincide with the reference edge, the distance between the reference edge and the endpoint on the same side of the candidate edge is compared with a preset distance threshold.

[0142] In this embodiment, when all distances are less than or equal to a preset distance threshold, the edge to be selected is taken as the edge to be processed.

[0143] When all distances are less than or equal to the preset distance threshold, it means that all the edges to be selected meet the distance threshold condition with the reference edge. Therefore, the edges to be selected do not need to be selected. Instead, all the edges to be selected are selected as edges to be processed for subsequent processing.

[0144] In this embodiment, when the distance is greater than a preset distance threshold, the edge to be selected is selected, and a point selection operation is performed on the edge to be selected.

[0145] When the distance is greater than the preset distance threshold, it means that there are line segments on the edge to be selected that do not meet the distance threshold condition with the reference edge. Therefore, it is necessary to perform point selection operation on the edge to be selected.

[0146] In this embodiment, determining the positional relationship between the projection of the candidate edge onto the reference edge's baseline and the reference edge includes: determining the positional relationship between the projections of the candidate edge's two endpoints onto the reference edge's baseline and the reference edge's positional relationship. Here, the reference edge's baseline is the reference edge and its extension line.

[0147] By determining the projection positions of the two endpoints of the candidate edge onto the baseline of the reference edge, the positional relationship between the projection of the candidate edge onto the baseline of the reference edge and the reference edge can be determined. The projection position of the edge can be determined by the projection position of the points, simplifying the judgment steps and making the operation highly feasible.

[0148] In this embodiment, when the projection positions of both ends of the candidate edge are both located on the reference edge, it is determined that the projection of the candidate edge on the reference line is located inside the reference edge; when either of the projection positions of the two ends of the candidate edge is located outside the reference edge, or when both projection positions of the two ends of the candidate edge are located outside the reference edge and on both sides of the reference edge, it is determined that the projection of the candidate edge on the reference line is partially coincident with the reference edge; when both projection positions of the two ends of the candidate edge are located outside the reference edge and on the same side of the reference edge, it is determined that the projection of the candidate edge on the reference edge is not coincident with the reference edge.

[0149] In this embodiment, before determining the relationship between the projection positions of the two endpoints of the candidate edge on the baseline of the reference edge and the position of the reference edge, the method further includes: setting vectors with either endpoint of the reference edge as the origin, the first vector pointing from the origin to the other endpoint of the reference edge, the first point with the endpoint of the candidate edge on the same side as the origin, the second vector pointing from the origin to the first point, the second point with the other endpoint of the candidate edge as the second point, and the third vector pointing from the origin to the second point.

[0150] Configure the vectors to prepare for calculating the projection values ​​using the vector formula.

[0151] Specifically, in this embodiment, determining the relationship between the projection positions of the two endpoints of the candidate edge on the baseline where the reference edge is located and the position of the reference edge includes: determining the position of each endpoint of the candidate edge.

[0152] The positions of the two endpoints of the edge to be selected are determined separately, thereby determining the relationship between the projection positions of the two endpoints of the edge to be selected on the baseline of the reference edge and the position of the reference edge.

[0153] In this embodiment, the position determination includes: taking the endpoint to be determined in the candidate edge as the endpoint to be evaluated, calculating the projection value of the second vector or the third vector corresponding to the endpoint to be evaluated on the first vector according to the dot product formula of vectors, and using the ratio of the projection value to the magnitude of the first vector as an auxiliary value.

[0154] Specifically, using the dot product formula of vectors Calculate the projection value Auxiliary value in, Let be the first vector. Let θ be the second or third vector, and θ be a vector. and The included angle.

[0155] In this embodiment, the projection position of the endpoint to be evaluated on the reference edge is determined based on the auxiliary value. When the auxiliary value is less than 0, the projection position of the endpoint to be evaluated is determined to be located on the outside of the reference edge near the origin. When the auxiliary value is greater than or equal to 0 and less than or equal to 1, the projection position of the endpoint to be evaluated is determined to be located on the reference edge. When the auxiliary value is greater than 1, the projection position of the endpoint to be evaluated is determined to be located on the outside of the reference edge away from the origin.

[0156] That is That is, the projection length of the second or third vector onto the first vector with a direction. When the auxiliary value is less than 0, it indicates that the vector... and If the included angle is obtuse, the projection position of the endpoint to be evaluated is located on the outside of the reference edge near the origin; when the auxiliary value is greater than or equal to 0 and less than or equal to 1, it means that the second or third vector is projected into the first vector, and the projection position of the endpoint to be evaluated is located on the reference edge; when the auxiliary value is greater than 1, it means that the second or third vector is projected outside the first vector, and the projection position of the endpoint to be evaluated is located on the outside of the reference edge away from the origin.

[0157] In this embodiment, before performing the point selection operation on the edge to be selected, the method further includes: obtaining the projection length of the edge to be selected on the reference edge.

[0158] The projection length of the candidate edge onto the reference edge is obtained and used as a criterion for determining whether to perform the first or second correction processing on the subsequent candidate edge.

[0159] In this embodiment, the projection length is compared with a preset length threshold. When the projection length is less than or equal to the preset length threshold, the candidate edge is selected as the first candidate edge. When the projection length is greater than the preset length threshold, the candidate edge is selected as the second candidate edge.

[0160] The projection length represents the length of the portion of the candidate edge and the reference edge that are directly opposite each other. Depending on the different situations of the directly opposite portions, the first candidate edge and the second candidate edge are subsequently subjected to the first correction process and the second correction process, respectively.

[0161] In this embodiment, the projection length of the candidate edge onto the reference edge is obtained by using the aforementioned vector settings.

[0162] In this embodiment, obtaining the projection length of the candidate edge on the reference edge includes: determining the relationship between the projection positions of the two endpoints of the candidate edge on the baseline where the reference edge is located and the position of the reference edge; and calculating the projection value of the second vector or the third vector on the first vector according to the dot product formula of vectors.

[0163] Specifically, in this embodiment, the dot product formula of the aforementioned vectors is used. Calculate the projection value in, Let be the first vector. Let θ be the second or third vector, and θ be a vector. and The included angle.

[0164] The projection value is the projection length of the second or third vector onto the first vector with a direction, thus the projection length can be calculated using the projection values ​​of the second and third vectors onto the first vector.

[0165] In this embodiment, when the projection positions of both endpoints of the candidate edge are located on the reference edge, the absolute value of the difference between the projection values ​​of the second vector and the third vector is used as the projection length.

[0166] When the projection positions of both endpoints of the candidate edge are located on the reference edge, the projection of the candidate edge onto the reference edge is located inside the reference edge, and the absolute value of the difference between the projection values ​​of the second vector and the third vector is used as the projection length.

[0167] In this embodiment, when the projection position of the first point is located outside the reference edge and the projection position of the second point is located on the reference edge, the projection value of the third vector is used as the projection length; when the projection position of the second point is located outside the reference edge and the projection position of the first point is located on the reference edge, the difference between the magnitude of the first vector and the projection value of the second vector is used as the projection length.

[0168] When the projection position of the first point is outside the reference edge, and the projection position of the second point is on the reference edge, the projection value of the third vector is used as the projection length. When the projection position of the second point is outside the reference edge, and the projection position of the first point is on the reference edge, the difference between the magnitude of the first vector and the projection value of the second vector is used as the projection length.

[0169] In this embodiment, when the projection positions of both ends of the candidate edge are located outside the reference edge and on both sides of the reference edge, the projection length is the magnitude of the first vector.

[0170] When the projection positions of both endpoints of the candidate edge are located outside the reference edge and on both sides of the reference edge, the projection of the candidate edge onto the reference edge completely covers the reference edge, and the projection length is the magnitude of the first vector.

[0171] In this embodiment, when the projection positions of both ends of the candidate edge are located outside the reference edge and on the same side of the reference edge, the projection length is 0.

[0172] When the projection positions of both endpoints of the candidate edge are located outside the reference edge and on the same side of the reference edge, the projection of the candidate edge onto the reference edge does not coincide with the reference edge at all, and the projection length is 0.

[0173] In this embodiment, before performing the selection operation on the edge to be selected, the method further includes: determining the first positional relationship between the edge to be selected and the reference edge, which is used to determine whether the edge to be selected is located on the spacing side or the width side of the reference edge.

[0174] Determining whether the edge to be selected is located on the spacing side or the width side of the reference edge is used to determine whether the subsequently selected edge to be processed will undergo the third or fourth correction process.

[0175] In this embodiment, the step of determining the first positional relationship between the candidate edge and the reference edge includes: taking the reference edge as a reference, performing a first position determination operation on the two endpoints of the candidate edge to determine the relative positional relationship between each endpoint of the candidate edge and the reference edge; when both endpoints of the candidate edge are located on the spacing side of the reference edge, it is determined that the candidate edge is located on the spacing side of the reference edge; when both endpoints of the candidate edge are located on the width side of the reference edge, it is determined that the candidate edge is located on the width side of the reference edge.

[0176] The first position determination operation is performed on the two endpoints of the edge to be selected to determine the relative positional relationship between the edge to be selected and the reference edge. The positional relationship of the edge is determined by the positional relationship of the points, which simplifies the determination steps and makes the operation highly feasible.

[0177] In this embodiment, the first position determination operation includes: taking any endpoint of the reference edge as the origin, taking the direction from the origin to the other endpoint of the reference edge as the first vector, taking any endpoint of the candidate edge as the first point, and taking the direction from the origin to the first point as the second vector.

[0178] Because the aforementioned steps involved setting up vectors, the cross product formula of vectors can be used to determine the first positional relationship.

[0179] In this embodiment, the positional relationship between the first point and the reference edge is determined according to the product formula of the first vector and the second vector; when the value of the product formula is greater than 0, it is determined that the first point is located on the width side of the reference edge; when the value of the product formula is less than 0, it is determined that the first point is located on the spacing side of the reference edge.

[0180] As an example, the direction criterion for the design graphic is set to a clockwise direction criterion. That is, when moving clockwise around the edge of the design graphic, the left side is the spacing side and the right side is the width side. When the value of the difference product formula is greater than 0, the first point is located on the right side when moving along the edge of the design graphic, that is, on the width side of the reference edge. When the value of the difference product formula is less than 0, the first point is located on the left side when moving along the edge of the design graphic, that is, on the spacing side of the reference edge.

[0181] Specifically, using the product-difference formula of the first vector and the second vector. Calculate the value of the product formula, where, Let be the first vector. Let θ be the second vector. Turn clockwise The included angle.

[0182] It should be noted that when any endpoint of the edge to be selected is taken as the first point, the difference product formula is also used to determine whether the first point is located on the width side or the spacing side of the reference edge.

[0183] In this embodiment, before performing point selection operations on the edge to be selected, with the reference edge as the reference, the method further includes: determining the second positional relationship between the edge to be selected and the reference edge, which is used to determine whether the edge to be selected and the reference edge are perpendicular.

[0184] Determining whether the edge to be selected is perpendicular to the reference edge is used to determine whether the subsequently selected edge to be processed will undergo the fifth or sixth correction process.

[0185] In this embodiment, the step of determining the second positional relationship between the candidate edge and the reference edge includes: taking any endpoint of the reference edge as the origin, taking the origin Q pointing to the other endpoint of the reference edge as the first vector, taking any endpoint of the candidate edge as the first point, and taking the first point pointing to the other endpoint of the candidate edge as the second vector.

[0186] Because the aforementioned steps involved setting up vectors, the dot product formula of vectors can be used to determine the second positional relationship.

[0187] In this embodiment, the cosine value of the angle between the first vector and the second vector is obtained according to the dot product formula of the first vector and the second vector; when the cosine value is equal to 0, the reference side is perpendicular to the side to be selected; when the cosine value is not equal to 0, the reference side is not perpendicular to the side to be selected.

[0188] Specifically, using the dot product formula of the first vector and the second vector. Calculate the cosine of the angle between the first vector and the second vector. in, Let be the first vector. This is the second vector.

[0189] The point selection module 502 is used to find points on the edge to be selected that are at a distance equal to a preset distance threshold from the endpoint of the reference edge, based on the reference edge, and use them as dividing points.

[0190] The split point is used for subsequent splitting of the selected edges.

[0191] In this embodiment, a point is selected on the candidate edge that is at a distance from the endpoint of the reference edge equal to a preset distance threshold, using the reference edge as a reference.

[0192] In this embodiment, the point selection operation includes: taking any endpoint of the candidate edge whose projection position is outside the reference edge as the first point, taking the endpoint of the reference edge on the same side as the first point as the origin, taking the origin pointing to the first point as the second vector, taking the other endpoint of the candidate edge as the second point, taking the first point pointing to the second point as the fourth vector, selecting a third point on the candidate edge, taking the first point pointing to the third point as the fifth vector, and taking the origin pointing to the third point as the sixth vector, wherein the modulus d of the sixth vector is a preset distance threshold.

[0193] Specifically, let's assume that the dividing point on the edge to be selected is the third point.

[0194] Because the aforementioned steps involved setting up vectors, the dot product formula and the cosine theorem formula can be used to select the split point.

[0195] In this embodiment, the ratio of the magnitude of the fifth vector to the magnitude of the fourth vector is calculated based on the cosine theorem formula formed by the second, fifth, and sixth vectors, and the dot product formula of the second and fourth vectors.

[0196] Specifically, the cosine theorem formula is used by combining the second, fifth, and sixth vectors. And the dot product formula of the second and fourth vectors The ratio of the magnitude of the fifth vector to the magnitude of the fourth vector can be obtained by simultaneously solving the two equations. in, For the second vector, The fifth vector, The sixth vector, It is the fourth vector.

[0197] In this embodiment, when the ratio has no solution, the candidate edge is determined to have no dividing point; when the ratio has one solution, the third point' is determined to be the dividing point; when the ratio has multiple solutions, the third point' closest to the first point is determined to be the dividing point.

[0198] It should be noted that when the projected positions of the two endpoints of the edge to be selected are both located outside the reference edge, the two endpoints of the edge to be selected are used as the reference, and a point selection operation is performed once for each endpoint to obtain the corresponding dividing point.

[0199] The edge acquisition module 503 is used to divide the edge to be processed into multiple line segments according to the dividing point, and select the line segments that meet the distance threshold condition as the edge to be processed.

[0200] Compared to the approach of first dividing the candidate edge into multiple line segments and then selecting the segments that meet the distance threshold condition to obtain the edge to be processed, this embodiment uses a reference edge as a benchmark, finds a point whose distance from the reference edge is equal to a preset distance threshold as a dividing point, and then divides the candidate edge according to the dividing point to obtain the line segments that meet the distance threshold condition as the edge to be processed. This approach is beneficial in selecting all parts of the candidate edge that meet the distance threshold condition as the edge to be processed and excluding all parts that do not meet the distance threshold condition. This helps reduce the probability of mistakenly selecting line segments that do not meet the distance threshold condition or mistakenly excluding line segments that meet the distance threshold condition due to the randomness of the segmentation. Moreover, it also helps to avoid the step of performing multiple segmentation steps in order to find a more accurate dividing point, simplifying the correction process and improving the edge selection accuracy. This is conducive to performing more accurate edge selection operations in the optical proximity correction method, thereby improving the correction accuracy of the optical proximity correction method.

[0201] Specifically, when the edge to be selected has two dividing points, the line segment between the two dividing points is taken as the edge to be processed. When the edge to be selected has one dividing point, the edge to be selected is divided by the dividing point, and the line segment of the edge to be selected that is closer to the reference edge is taken as the edge to be processed.

[0202] The correction module 504 is used to correct the edges to be processed, so as to realize the graphic correction of the design graphic.

[0203] Specifically, in this embodiment, when the candidate edge is the first candidate edge, the edge to be processed is subjected to a first correction process to achieve graphic correction of the design graphic; when the candidate edge is the second candidate edge, the edge to be processed is subjected to a second correction process to achieve graphic correction of the design graphic.

[0204] In this embodiment, when the edge to be selected is located on the spacing side of the reference edge, a third correction process is performed on the edge to be processed to achieve graphic correction of the design graphic; when the edge to be selected is located on the width side of the reference edge, a fourth correction process is performed on the edge to be processed to achieve graphic correction of the design graphic.

[0205] In this embodiment, when the edge to be selected is perpendicular to the reference edge, the edge to be processed is subjected to the fifth correction process to achieve graphic correction of the design graphic; when the edge to be selected is not perpendicular to the reference edge, the edge to be processed is subjected to the sixth correction process to achieve graphic correction of the design graphic.

[0206] In this embodiment, pattern correction includes etching deviation compensation processing.

[0207] When the edge to be processed meets the distance threshold condition, after photolithography and etching processes, the critical dimensions of the pattern formed on the wafer deviate from the critical dimensions of the design pattern. By performing etching deviation compensation processing on the edge to be processed, the deviations that may be generated by the photolithography and etching processes can be pre-compensated into the design pattern, thereby improving the matching degree between the pattern formed on the wafer and the design pattern after photolithography and etching processes.

[0208] In this embodiment, the etching deviation compensation process includes: moving the edge to be processed by a preset distance along a direction perpendicular to the edge to be processed, thereby compensating for the etching offset.

[0209] In this embodiment, the etching offset can be obtained from experimental data, and the preset distance corresponds to the etching offset.

[0210] Accordingly, the present invention also provides a photomask, comprising: a pattern obtained using the optical proximity correction method provided in the embodiments of the present invention.

[0211] As can be seen from the foregoing embodiments, compared to the approach of first dividing the candidate edge into multiple line segments and then selecting line segments that meet the distance threshold condition to obtain the edge to be processed, this embodiment uses a reference edge as a benchmark, finds a point whose distance from the reference edge is equal to a preset distance threshold as a dividing point, and then divides the candidate edge according to the dividing point to obtain line segments that meet the distance threshold condition as the edge to be processed. This approach is beneficial in selecting all parts of the candidate edge that meet the distance threshold condition as the edge to be processed and excluding all parts that do not meet the distance threshold condition. This helps reduce the probability of mistakenly selecting line segments that do not meet the distance threshold condition or mistakenly excluding line segments that meet the distance threshold condition due to the randomness of the division. Moreover, it also helps to avoid the step of making multiple division attempts in order to find a more accurate dividing point, simplifying the correction process and improving the edge selection accuracy. This is beneficial for performing more accurate edge selection operations in the optical proximity correction method, thereby improving the correction accuracy of the optical proximity correction method. Correspondingly, after forming a mask pattern on the wafer using a mask, the matching degree between the mask pattern formed on the wafer and the target pattern is improved.

[0212] This invention also provides a device that can implement the optical proximity correction method provided in this invention by loading a program, as described above. An optional hardware structure of the terminal device provided in this invention can be as follows: Figure 7 As shown, it includes: at least one processor 01, at least one communication interface 02, at least one memory 03, and at least one communication bus 04.

[0213] In this embodiment, the number of processor 01, communication interface 02, memory 03, and communication bus 04 is at least one, and the processor 01, communication interface 02, and memory 03 communicate with each other through communication bus 04. Communication interface 02 can be an interface of a communication module for network communication, such as the interface of a GSM module. Processor 01 may be a central processing unit (CPU), an application-specific integrated circuit (ASIC), or one or more integrated circuits configured to implement embodiments of the present invention. Memory 03 may include high-speed RAM and may also include non-volatile memory (NVM), such as at least one disk storage device. Memory 03 stores one or more computer instructions, which are executed by processor 01 to implement the optical proximity correction method provided in this embodiment of the present invention.

[0214] It should be noted that the aforementioned terminal device may also include other devices (not shown) that may not be essential to understanding the content disclosed in the embodiments of the present invention; given that these other devices may not be essential for understanding the content disclosed in the embodiments of the present invention, the embodiments of the present invention will not describe them one by one.

[0215] This invention also provides a storage medium storing one or more computer instructions for implementing the optical proximity correction method provided in this invention.

[0216] In the optical proximity correction method provided in this embodiment of the invention, a reference edge is used as a reference to perform a point selection operation on the edge to be selected. This is used to find points on the edge to be selected whose distance from the reference edge is equal to a preset distance threshold, which serve as dividing points. When the edge to be selected has dividing points, the edge to be selected is divided according to the dividing points to obtain line segments that meet the distance threshold condition as edges to be processed. Compared to the scheme of first dividing the edge to be selected into multiple line segments and then selecting line segments that meet the distance threshold condition to obtain the edge to be processed, this embodiment of the invention uses a reference edge as a reference to find points whose distance from the reference edge is equal to a preset distance threshold, which serve as dividing points, and then divides the edge to be selected according to the dividing points to obtain line segments that meet the distance threshold condition. Using line segments with threshold conditions as edges to be processed helps to select all parts of the edge that meet the distance threshold condition as edges to be processed, and exclude all parts that do not meet the distance threshold condition. This reduces the probability of mistakenly selecting line segments that do not meet the distance threshold condition or mistakenly excluding line segments that meet the distance threshold condition due to the randomness of segmentation. Moreover, it helps to avoid the step of making multiple segmentation attempts in order to find a more accurate segmentation point, simplifying the correction process and improving the edge selection accuracy. This is conducive to more accurate edge selection operations in the optical proximity correction method, thereby improving the correction accuracy of the optical proximity correction method.

[0217] The embodiments of the present invention described above are combinations of elements and features of the present invention. Unless otherwise stated, elements or features may be considered optional. Individual elements or features may be practiced without combination with other elements or features. Furthermore, embodiments of the present invention may be constructed by combining some elements and / or features. The order of operations described in the embodiments of the present invention may be rearranged. Some constructions of any embodiment may be included in another embodiment and may be replaced by corresponding constructions of another embodiment. It will be apparent to those skilled in the art that claims in the appended claims that are not expressly referenced in each other may be combined to form embodiments of the present invention, or may be included as new claims in amendments made after the filing of this application.

[0218] Embodiments of the present invention can be implemented by various means, such as hardware, firmware, software, or combinations thereof. In a hardware configuration, the method according to an exemplary embodiment of the present invention can be implemented by one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, etc. In a firmware or software configuration, embodiments of the present invention can be implemented in the form of modules, processes, functions, etc. Software code can be stored in memory units and executed by a processor. The memory units are located inside or outside the processor and can send data to and receive data from the processor via various known means.

[0219] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is accorded the widest scope consistent with the principles and novel features disclosed herein.

[0220] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. An optical proximity correction method, characterized in that, include: Multiple design graphics are provided, the design graphics include adjacent test graphics and reference graphics, the reference graphics include reference edges, the reference graphics and / or the test graphics include candidate edges that satisfy a distance threshold condition with the reference edges, the distance threshold condition having a preset distance threshold; Using the reference edge as a reference, find a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, and use it as a dividing point; The edge to be selected is divided into multiple line segments according to the dividing point, and the line segments that meet the distance threshold condition are selected as the edge to be processed. The edges to be processed are corrected to achieve graphic correction of the design graphic.

2. The optical proximity correction method as described in claim 1, characterized in that, The method further includes: forming a square search box based on the reference edge, the square search box having a first side overlapping the reference edge and a second side parallel to the first side, the distance between the second side and the first side being the preset distance threshold, the distance between the remaining two sides of the square search box and the endpoints on the same side of the reference edge being the preset distance threshold; and selecting any side of the search box as a candidate side that satisfies the distance threshold condition.

3. The optical proximity correction method as described in claim 1, characterized in that, The step of finding a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, based on the reference edge, includes: determining the positional relationship between the projection of the candidate edge onto the reference edge on the reference edge and the reference edge. When the projection is located within the reference edge, the edge to be selected is taken as the edge to be processed; When the projection partially coincides with or does not coincide with the reference edge, the distance between the reference edge and the endpoint on the same side of the candidate edge is compared with the preset distance threshold. When all the distances are less than or equal to the preset distance threshold, the candidate edge is taken as the edge to be processed. When the distance is greater than the preset distance threshold, find a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold.

4. The optical proximity correction method as described in claim 3, characterized in that, Determining the positional relationship between the projection of the candidate edge onto the reference edge on the reference edge and the reference edge includes: determining the positional relationship between the projections of the two endpoints of the candidate edge onto the reference edge on the reference edge and the positional relationship between the reference edge and the reference edge. When the projection positions of both ends of the candidate edge are located on the reference edge, it is determined that the projection of the candidate edge on the baseline where the reference edge is located is located inside the reference edge; When either of the projection positions of the two endpoints of the candidate edge is located outside the reference edge, or when both projection positions of the two endpoints of the candidate edge are located outside the reference edge and on both sides of the reference edge, it is determined that the projection of the candidate edge on the baseline where the reference edge is located partially coincides with the reference edge. When the projection positions of both endpoints of the candidate edge are located outside the reference edge and on the same side of the reference edge, it is determined that the projection of the candidate edge onto the reference edge does not coincide with the reference edge.

5. The optical proximity correction method as described in claim 4, characterized in that, Before determining the positional relationship between the projection positions of the two endpoints of the candidate edge on the baseline where the reference edge is located and the position of the reference edge, the method further includes: taking any endpoint of the reference edge as the origin and the direction from the origin to the other endpoint of the reference edge as a first vector; taking the endpoint of the candidate edge on the same side as the origin as a first point and the direction from the origin to the first point as a second vector; taking the other endpoint of the candidate edge as a second point and the direction from the origin to the second point as a third vector; Determining the relationship between the projection positions of the endpoints of the candidate edge on the reference edge and the position of the reference edge includes: taking the endpoint to be evaluated among the candidate edges as the endpoint to be evaluated, calculating the projection value of the second or third vector corresponding to the endpoint to be evaluated on the first vector according to the dot product formula of vectors, and using the ratio of the projection value to the magnitude of the first vector as an auxiliary value; determining the projection position of the endpoint to be evaluated on the reference edge based on the auxiliary value; when the auxiliary value is less than 0, determining that the projection position of the endpoint to be evaluated is located on the outside of the reference edge near the origin; when the auxiliary value is greater than or equal to 0 and less than or equal to 1, determining that the projection position of the endpoint to be evaluated is located on the reference edge; when the auxiliary value is greater than 1, determining that the projection position of the endpoint to be evaluated is located on the outside of the reference edge away from the origin.

6. The optical proximity correction method as described in claim 4, characterized in that, The step of finding a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, based on the reference edge, and using it as a dividing point includes: The first point is defined as any endpoint of the candidate edge whose projection position is outside the reference edge; the origin is defined as the endpoint of the reference edge on the same side as the first point; and the second vector is defined as the vector pointing from the origin to the first point. Let the other endpoint of the edge to be selected be the second point, and the vector pointing from the first point to the second point be the fourth vector; Select a third point on the candidate edge; The first point pointing to the third point is the fifth vector, and the origin pointing to the third point is the sixth vector, wherein the magnitude of the sixth vector is the preset distance threshold; Calculate the ratio of the magnitude of the fifth vector to the magnitude of the fourth vector using the cosine theorem formula formed by the second, fifth, and sixth vectors, and the dot product formula of the second and fourth vectors. When the ratio has no solution, it is determined that the candidate edge has no dividing point. When the ratio has a solution, the third point is determined as the dividing point; When the ratio has multiple solutions, the third point closest to the first point is determined as the dividing point.

7. The optical proximity correction method as described in claim 1, characterized in that, Before finding a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, the method further includes: obtaining the projection length of the candidate edge on the reference edge; The projection length is compared with a preset length threshold. When the projection length is less than or equal to the preset length threshold, the candidate edge is selected as the first candidate edge. When the projection length is greater than the preset length threshold, the candidate edge is selected as the second candidate edge. The step of correcting the edge to be processed to achieve graphic correction of the design graphic includes: when the edge to be processed is a first edge to be selected, performing a first correction process on the edge to be processed to achieve graphic correction of the design graphic; and when the edge to be processed is a second edge to be selected, performing a second correction process on the edge to be processed to achieve graphic correction of the design graphic.

8. The optical proximity correction method as described in claim 7, characterized in that, Before obtaining the projection length of the candidate edge on the reference edge, the method further includes: taking any endpoint of the reference edge as the origin, taking the direction from the origin to the other endpoint of the reference edge as a first vector, taking the endpoint of the candidate edge on the same side as the origin as a first point, taking the direction from the origin to the first point as a second vector, and taking the other endpoint of the candidate edge as a second point, taking the direction from the origin to the second point as a third vector. The step of obtaining the projection length of the candidate edge on the reference edge includes: determining the relationship between the projection positions of the two endpoints of the candidate edge on the baseline where the reference edge is located and the position of the reference edge; Calculate the projection value of the second or third vector onto the first vector using the dot product formula for vectors; When the projection positions of both endpoints of the candidate edge are located on the reference edge, the absolute value of the difference between the projection values ​​of the second vector and the third vector is used as the projection length. When the projection position of the first point is located outside the reference edge and the projection position of the second point is located on the reference edge, the projection value of the third vector is used as the projection length. When the projection position of the second point is located outside the reference edge and the projection position of the first point is located on the reference edge, the difference between the magnitude of the first vector and the projection value of the second vector is used as the projection length. When the projection positions of both endpoints of the candidate edge are located outside the reference edge and on both sides of the reference edge, the projection length is the magnitude of the first vector. When the projected positions of both endpoints of the candidate edge are located outside the reference edge and on the same side of the reference edge, the projection length is 0.

9. The optical proximity correction method as described in claim 5 or 8, characterized in that, Using the dot product formula of the vectors Calculate the projection value in, For the first vector, It is either the second vector or the third vector.

10. The optical proximity correction method as described in claim 1, characterized in that, In the step of providing multiple design graphics, one side of the reference edge is designated as the spacing side, and the other side as the width side; Before finding a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, the method further includes: determining a first positional relationship between the candidate edge and the reference edge, used to determine whether the candidate edge is located on the spacing side or the width side of the reference edge. The step of correcting the edge to be processed to achieve graphic correction of the design graphic includes: performing a third correction process on the edge to be processed to achieve graphic correction of the design graphic; and performing a fourth correction process on the edge to be processed to achieve graphic correction of the design graphic.

11. The optical proximity correction method as described in claim 10, characterized in that, Determining whether the candidate edge is located on the spacing side or the width side of the reference edge includes: using the reference edge as a reference, performing a first position determination operation on each of the two endpoints of the candidate edge to determine the relative positional relationship between each endpoint of the candidate edge and the reference edge; when both endpoints of the candidate edge are located on the spacing side of the reference edge, determining that the candidate edge is located on the spacing side of the reference edge; when both endpoints of the candidate edge are located on the width side of the reference edge, determining that the candidate edge is located on the width side of the reference edge.

12. The optical proximity correction method as described in claim 11, characterized in that, The step of performing a first position determination operation on the two endpoints of the candidate edge based on the reference edge includes: taking either endpoint of the reference edge as the origin and the direction from the origin to the other endpoint of the reference edge as a first vector; taking either endpoint of the candidate edge as a first point and the direction from the origin to the first point as a second vector; determining the positional relationship between the first point and the reference edge according to the difference product formula of the first vector and the second vector; when the value of the difference product formula is greater than 0, determining that the first point is located on the width side of the reference edge; when the value of the difference product formula is less than 0, determining that the first point is located on the spacing side of the reference edge.

13. The optical proximity correction method as described in claim 1, characterized in that, Before finding a point on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, the method further includes: determining a second positional relationship between the candidate edge and the reference edge, used to determine whether the candidate edge and the reference edge are perpendicular; The step of correcting the edge to be processed to achieve graphic correction of the design graphic includes: when the edge to be processed is perpendicular to the reference edge, a fifth correction process is performed on the edge to be processed to achieve graphic correction of the design graphic; when the edge to be processed is not perpendicular to the reference edge, a sixth correction process is performed on the edge to be processed to achieve graphic correction of the design graphic.

14. The optical proximity correction method as described in claim 13, characterized in that, The step of determining the second positional relationship between the candidate edge and the reference edge includes: taking any endpoint of the reference edge as the origin and the direction from the origin to the other endpoint of the reference edge as a first vector; taking any endpoint of the candidate edge as a first point and the direction from the first point to the other endpoint of the candidate edge as a second vector; obtaining the cosine value of the angle between the first vector and the second vector according to the dot product formula of the first vector and the second vector; when the cosine value is equal to 0, the reference edge is perpendicular to the candidate edge; when the cosine value is not equal to 0, the reference edge is not perpendicular to the candidate edge.

15. The optical proximity correction method as described in claim 7, 10, or 13, characterized in that, The pattern correction includes etching deviation compensation processing.

16. An optical proximity correction system, characterized in that, include: A graphic providing module is used to provide multiple design graphics, wherein the design graphics include adjacent test graphics and reference graphics, the reference graphics include reference edges, and the reference graphics and / or the test graphics include candidate edges that satisfy a distance threshold condition with the reference edges, wherein the distance threshold condition has a preset distance threshold. The point selection module is used to find points on the candidate edge whose distance from the endpoint of the reference edge is equal to the preset distance threshold, based on the reference edge, and to serve as the dividing points; The edge to be processed module is used to divide the edge to be selected into multiple line segments according to the dividing point, and select the line segments that meet the distance threshold condition as the edge to be processed. The correction module is used to correct the edge to be processed, so as to realize the graphic correction of the design graphic.

17. A photomask, characterized in that, include: The image obtained using the optical proximity correction method as described in any one of claims 1-15.

18. A device, characterized in that, It includes at least one memory and at least one processor, the memory storing one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the optical proximity correction method as described in any one of claims 1-15.

19. A storage medium, characterized in that, The storage medium stores one or more computer instructions for implementing the optical proximity correction method as described in any one of claims 1-15.

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