A laminated microfluidic pneumatic valve chip based on laser processing and a preparation method thereof

Abstract

The application provides a laminated micro-fluidic pneumatic valve chip based on laser processing and a preparation method, which comprises an inlet film layer, a fluid channel layer, an elastic film layer, a control channel layer and a bottom film layer, the control channel layer is arranged on the surface of the bottom film layer, the elastic film layer is arranged on the control channel layer, the fluid channel layer is arranged on the elastic film layer, and the inlet film layer is arranged on the fluid channel layer; the first liquid channel and the second liquid channel are formed in the fluid channel layer, the control channel is formed in the control channel layer, the main liquid channel water inlet and the main liquid channel water outlet are arranged on the first liquid channel, the secondary liquid channel water outlet is arranged on the second liquid channel, and the control channel air inlet and the control channel air outlet are arranged on the control channel. The application adopts the layered structure mode, the laser is used to micro-process the structure of each layer of micro-fluid channel on the film, each layer of film is sequentially laminated, and thus the laminated micro-fluidic pneumatic valve chip is prepared.

Description

Technical Field

[0001] This invention relates to the field of microfluidic chip technology, specifically to a stacked microfluidic pneumatic valve chip based on laser processing and a method for fabricating the chip. Background Technology

[0002] Microfluidic chips are chips that integrate microchannel meshes and other functional units onto a very small area using microfabrication techniques. Due to their high integration, they not only reduce reagent consumption and improve experimental efficiency but also enhance the safety of the experimental process. After nearly thirty years of rapid development, microfluidic technology has been widely applied in many fields, especially in chemistry, biology, and medicine, where it offers unique advantages.

[0003] Microvalves are among the most important functional units in microfluidic chips for achieving microfluidic manipulation, with their basic function being to open and close fluid channels. Among microvalves, the pneumatic microva, first proposed by the Quake research group in 2000, has become the most widely researched and applied microvalf technology in microfluidic chips due to its advantages such as simple structure, fast response speed, and ease of large-scale integration. This pneumatic valve chip uses PDMS as its material and mainly consists of two perpendicularly intersecting channels and an elastic film sandwiched between them. One channel is the fluid channel, used for fluid transport within the chip; the other channel is the control channel, typically connected to an external pressure source. By adjusting the pressure in the control channel, the elastic film deforms towards the fluid channel, thereby controlling the opening and closing of the fluid channel. These structural features make pneumatic valves particularly suitable for large-scale integration onto microfluidic chips, thus attracting increasing attention in the fields of biochemical reactions and analysis.

[0004] However, PDMS material is porous, which can easily lead to gas leakage or contamination, and it has poor resistance to organic solvents. PDMS chip fabrication requires steps such as photolithography and plasma-assisted bonding, resulting in a long production cycle, complex processes, expensive equipment, and a need for a clean processing environment, making widespread adoption difficult. Other existing microfluidic pneumatic valve chips either have poor diaphragm material properties or high chip processing costs, complex processes, and long production cycles. Summary of the Invention

[0005] This invention provides a laser-processed stacked microfluidic pneumatic valve chip and its method. The device and method mainly solve the problems of high processing cost, cumbersome process, long manufacturing cycle and poor material properties of existing chips. It adopts a layered structure method, uses laser to micro-process the structure of each microchannel on the thin film, and then laminates each thin film in sequence to make a stacked microfluidic pneumatic valve chip.

[0006] The present invention achieves the above objectives through the following technical solutions:

[0007] A stacked microfluidic pneumatic valve chip based on laser processing includes an inlet film layer, a fluid channel layer, an elastic film layer, a control channel layer, and a bottom film layer. The bottom film layer serves as a substrate. The control channel layer covers the surface of the bottom film layer. The elastic film layer covers the control channel layer. The fluid channel layer covers the elastic film layer. The inlet film layer covers the fluid channel layer.

[0008] The fluid channel layer contains a first liquid channel and a second liquid channel, the control channel layer contains a control channel, the first liquid channel has a main liquid channel inlet and a main liquid channel outlet, the second liquid channel has a secondary liquid channel outlet, and the control channel has a control channel air inlet and a control channel air outlet.

[0009] According to the present invention, a stacked microfluidic pneumatic valve chip based on laser processing is provided, wherein a first flow channel inlet, a first main flow channel outlet, a second main flow channel outlet, a first air inlet, and a first air outlet are respectively provided on the inlet film layer, and a main liquid channel inlet, a main liquid channel outlet, a secondary liquid channel outlet, a second air inlet, and a second air outlet are respectively provided on the fluid channel layer. The first flow channel inlet, the first main flow channel outlet, the second main flow channel outlet, the first air inlet, and the first air outlet of the inlet film layer correspond one-to-one with the main liquid channel inlet, the main liquid channel outlet, the secondary liquid channel outlet, the second air inlet, and the second air outlet of the fluid channel layer.

[0010] The main liquid channel inlet and outlet are located on the first liquid channel, and the secondary liquid channel outlet is located on the second liquid channel. The main liquid channel inlet, outlet, and outlet are connected to the outside.

[0011] According to the present invention, a stacked microfluidic pneumatic valve chip based on laser processing is provided, wherein a third air inlet and a third air outlet are provided on the elastic thin film layer, and a control channel air inlet and a control channel air outlet are provided on the control channel layer. The control channel air inlet of the control channel layer covers the first air inlet of the inlet thin film layer, the second air inlet of the fluid channel layer, and the third air inlet of the elastic thin film layer. The control channel air outlet of the control channel layer covers the first air outlet of the inlet thin film layer, the second air outlet of the fluid channel layer, and the third air outlet of the elastic thin film layer.

[0012] The air inlet and outlet of the control channel are connected to the outside.

[0013] According to the present invention, a stacked microfluidic pneumatic valve chip based on laser processing is provided, wherein the width of the first liquid channel is 0.8-1.2 mm and the width of the second liquid channel is 0.3-0.9 mm.

[0014] According to the present invention, a stacked microfluidic pneumatic valve chip based on laser processing is provided, wherein the first liquid channel and the control channel are intersecting in a plane.

[0015] According to the present invention, a laser-processed stacked microfluidic pneumatic valve chip is provided, wherein the elastic film in the elastic film layer is made of PDMS and has a thickness of 50 μm.

[0016] A method for fabricating a laser-processed stacked microfluidic pneumatic valve chip, applied to the aforementioned laser-processed stacked microfluidic pneumatic valve chip, includes:

[0017] Establish a microfluidic chip model;

[0018] The microfluidic chip model is divided into layers: inlet thin film layer, fluid channel layer, elastic thin film layer, control channel layer, and bottom thin film layer, and the channel pattern of each layer is obtained.

[0019] According to the channel pattern after the layering is completed, laser processing technology is used to process each thin film layer in sequence. According to the channel pattern, the thin film layer is broken through along its trajectory to remove the broken part inside the channel, thereby obtaining the channel structure of each layer.

[0020] After processing, peel off the adhesive layer seal of each film layer, and attach them in the order of inlet film layer, fluid channel layer, elastic film layer, control channel layer and bottom film layer from top to bottom using the adhesive layer. At the same time, use positioning pins to position them by passing through the positioning holes on each film layer, and you can get the stacked microfluidic pneumatic valve chip.

[0021] According to the method for fabricating a stacked microfluidic pneumatic valve chip based on laser processing provided by the present invention, the air inlet of the control channel is connected to a high-pressure gas cylinder and a gas control valve, and compressed gas is introduced into the control channel to control the deformation of the elastic film and isolate the liquid channel.

[0022] According to the method for fabricating a stacked microfluidic pneumatic valve chip based on laser processing provided by the present invention, when the control channel is not connected to compressed gas, the first liquid channel is in a conductive state, and liquid enters from the main liquid channel inlet of the first liquid channel and flows out from the main liquid channel outlet of the first liquid channel; when the control channel is connected to compressed gas, the first liquid channel is in a disconnected state, and liquid enters from the main liquid channel inlet of the first liquid channel and flows out from the secondary liquid channel outlet of the second liquid channel.

[0023] According to the present invention, a method for fabricating a stacked microfluidic pneumatic valve chip based on laser processing is provided. The laser processing technology uses a femtosecond laser to penetrate the thin film along the channel pattern of each layer, remove the penetrated part, and obtain a thin film with a microchannel structure.

[0024] Therefore, compared with existing microfluidic pneumatic valve chips, this invention can fabricate multi-channel stacked microfluidic pneumatic valve chips with multiple thin film bonding. The fabricated stacked microfluidic pneumatic valve chip uses double-sided adhesive and elastic film as materials, with low inner surface roughness and high visibility. It also has the advantages of simple fabrication, low implementation difficulty, low material cost, flexible and convenient processing, and no need for chip bonding equipment. It can be widely used in biomedical detection and other fields.

[0025] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of an embodiment of a stacked microfluidic pneumatic valve chip based on laser processing according to the present invention.

[0027] Figure 2 This is a schematic diagram of the inlet thin film layer in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention.

[0028] Figure 3 This is a schematic diagram of the fluid channel layer in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention.

[0029] Figure 4 This is a schematic diagram of the elastic thin film layer in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention.

[0030] Figure 5 This is a schematic diagram of the control channel layer in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention.

[0031] Figure 6 This is a schematic diagram of the bottom thin film layer in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention.

[0032] Figure 7 This is a first structural schematic diagram of the cross-section of the intersection of the liquid channel and the control channel of the chip in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention.

[0033] Figure 8This is a second structural schematic diagram of the cross-section of the intersection of the liquid channel and the control channel of the chip in an embodiment of a laser-processed stacked microfluidic pneumatic valve chip of the present invention. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0035] An embodiment of a laser-processed stacked microfluidic pneumatic valve chip

[0036] See Figures 1 to 8 The present invention relates to a laser-processed stacked microfluidic pneumatic valve chip, comprising: an inlet thin film layer 12, a fluid channel layer 13, an elastic thin film layer 14, a control channel layer 15, and a bottom thin film layer 16. The bottom thin film layer 16 serves as a substrate, the control channel layer 15 is disposed on the surface of the bottom thin film layer 16, the elastic thin film layer 14 is disposed on the control channel layer 15, the fluid channel layer 13 is disposed on the elastic thin film layer 14, and the inlet thin film layer 12 is disposed on the fluid channel layer 13.

[0037] In this embodiment, a first liquid channel 6 and a second liquid channel 7 are formed in the fluid channel layer 13, and a control channel 17 is formed in the control channel layer 15. A main liquid channel inlet 1 and a main liquid channel outlet 2 are provided on the first liquid channel 6, a secondary liquid channel outlet 3 is provided on the second liquid channel 7, and a control channel air inlet 4 and a control channel air outlet 5 are provided on the control channel 17.

[0038] The inlet membrane layer 12 is provided with a first flow channel inlet, a first main flow channel outlet, a second main flow channel outlet, a first air inlet, and a first air outlet. The fluid channel layer 13 is provided with a main liquid channel inlet 1, a main liquid channel outlet 2, a secondary liquid channel outlet 3, a second air inlet, and a second air outlet. The first flow channel inlet, the first main flow channel outlet, the second main flow channel outlet, the first air inlet, and the first air outlet of the inlet membrane layer 12 correspond to and cover the main liquid channel inlet 1, the main liquid channel outlet 2, the secondary liquid channel outlet 3, the second air inlet, and the second air outlet of the fluid channel layer 13.

[0039] The main liquid channel inlet 1 and the main liquid channel outlet 2 are located on the first liquid channel 6, and the secondary liquid channel outlet 3 is located on the second liquid channel 7. The main liquid channel inlet 1, the main liquid channel outlet 2, and the secondary liquid channel outlet 3 are connected to the outside.

[0040] As can be seen, there are processed liquid channels in the fluid channel layer 13. The inlet and outlet of the liquid channel cover each other with the inlet and outlet of the inlet membrane layer 12. The inlet and outlet of the liquid channel are connected to the outside.

[0041] In this embodiment, a third air inlet and a third air outlet are provided on the elastic film layer 14, and a control channel air inlet 4 and a control channel air outlet 5 are provided on the control channel layer 15. The control channel air inlet 4 of the control channel layer 15 covers the first air inlet of the inlet film layer 12, the second air inlet of the fluid channel layer 13, and the third air inlet of the elastic film layer 14. The control channel air outlet 5 of the control channel layer 15 covers the first air outlet of the inlet film layer 12, the second air outlet of the fluid channel layer 13, and the third air outlet of the elastic film layer 14.

[0042] Among them, the air inlet 4 and the air outlet 5 of the control channel are connected to the outside.

[0043] As can be seen, there is a processed control channel 17 in the control channel layer 15. The air inlet and outlet of the control channel 17 cover each other with the air inlet and outlet of the inlet film layer 12, the fluid channel layer 13, and the elastic film layer 14. The air inlet and outlet of the control channel 17 are connected to the outside.

[0044] In this embodiment, the width of the first liquid channel 6 is 0.8-1.2 mm, and the width of the second liquid channel 7 is 0.3-0.9 mm. It can be seen that this embodiment has two liquid channels. The first liquid channel 6 is the main liquid channel, and its width is preferably 1 mm in this embodiment. The second liquid channel 7 is the secondary liquid channel, and its width is preferably 0.6 mm in this embodiment. When the solution is introduced into the liquid channel, because the flow resistance of the main liquid channel is smaller than that of the secondary liquid channel, the liquid will first flow out from the outlet of the main liquid channel.

[0045] In this embodiment, the first liquid channel 6 and the control channel 17 are intersecting in a plane.

[0046] In this embodiment, the elastic film in the elastic film layer 14 is made of PDMS and has a thickness of 50 μm.

[0047] Figure 2-6This is a schematic diagram of the structure of each layer of a microfluidic pneumatic valve chip according to an embodiment of the present invention, including: positioning hole 8, positioning hole 9, positioning hole 10, positioning hole 11, inlet film layer 12, fluid channel layer 13, elastic film layer 14, control channel layer 15, bottom film layer 16, first liquid channel 6, second liquid channel 7, control channel 17, main liquid channel inlet 1, main liquid channel outlet 2, control channel air inlet 4, control channel air outlet 5, etc.

[0048] Figure 7 and 8 The diagram shows a cross-sectional structure of a microfluidic pneumatic valve chip according to an embodiment of the present invention, including: a first liquid channel 6, an inlet thin film layer 12, a fluid channel layer 13, an elastic thin film layer 14, a control channel layer 15, a bottom thin film layer 16, and a control channel 17.

[0049] An example of a method for fabricating a stacked microfluidic pneumatic valve chip based on laser processing:

[0050] A method for fabricating a laser-processed stacked microfluidic pneumatic valve chip, applied to the aforementioned laser-processed stacked microfluidic pneumatic valve chip, includes:

[0051] Step S1: Establish a microfluidic chip model; in this embodiment, SOLIDWORKS software is used to establish the microfluidic chip model.

[0052] Step S2: The microfluidic chip model is divided into five layers from top to bottom according to its function: inlet film layer 12, fluid channel layer 13, elastic film layer 14, control channel layer 15, and bottom film layer 16, and the channel pattern of each layer is obtained.

[0053] Step S3: According to the channel pattern after the layering is completed, laser processing technology is used to process each thin film layer in sequence. According to the channel pattern, the thin film layer is pierced along its trajectory to remove the pierced part inside the channel, thereby obtaining the channel structure of each layer.

[0054] Step S4: Peel off the adhesive layer seal of each processed film and attach them in the order of inlet film layer 12, fluid channel layer 13, elastic film layer 14, control channel layer 15, and bottom film layer 16 from top to bottom using the adhesive layer. At the same time, use positioning pins to position them by passing through the positioning holes on each film layer. This will give you the stacked microfluidic pneumatic valve chip.

[0055] In this embodiment, the air inlet of the control channel 17 can be connected to a high-pressure gas cylinder and a gas control valve to introduce compressed gas into the control channel 17, thereby controlling the deformation of the elastic membrane and blocking the liquid channel.

[0056] In this embodiment, when the control channel 17 is not connected to compressed gas, the first liquid channel 6 is in a conducting state, and liquid enters from the main liquid channel inlet 1 of the first liquid channel 6 and flows out from the main liquid channel outlet 2 of the first liquid channel 6; when the control channel 17 is connected to compressed gas, the first liquid channel 6 is in a disconnected state, and liquid enters from the main liquid channel inlet 1 of the first liquid channel 6 and flows out from the secondary liquid channel outlet 3 of the second liquid channel 7.

[0057] In this embodiment, the laser processing technology uses a femtosecond laser to penetrate the thin film along the channel pattern of each layer, remove the penetrated part, and obtain a thin film with a microchannel structure.

[0058] Specifically, in step S1, a model is created using SOLIDWORKS software. Figure 1 The microfluidic pneumatic valve chip model in step S2; the model is layered to obtain... Figure 2-6 Channel graphics in the image.

[0059] In the fabrication method of the microfluidic pneumatic valve chip, the thin film material is an adhesive film with a layer of PET material on top and a layer of double-sided adhesive material on the bottom, and the bottom thin film layer is a single layer of PET material; the thickness of the PET material and the double-sided adhesive material is 100μm.

[0060] In the fabrication method of microfluidic pneumatic valve chip, the film bonding is performed by bonding the double-sided adhesive layer in the upper film to the PET material in the lower film after positioning with positioning pins, forming an adhesive structure of PET-double-sided adhesive-PET-...-PET, without relying on other bonds, means or equipment, and finally forming a microfluidic pneumatic valve chip structure of "inlet film layer 12-fluid channel layer 13-elastic film layer 14-control channel layer 15-bottom film layer 16".

[0061] In practical applications, firstly, a model of the microfluidic pneumatic valve chip is built using SOLIDWORKS software, such as... Figure 1 As shown, the chip as a whole includes: main liquid channel inlet 1, main liquid channel outlet 2, secondary liquid channel outlet 3, control channel air inlet 4, control channel air outlet 5, first liquid channel 6, and second liquid channel 7.

[0062] The entire microchannel was divided into five layers according to function: inlet film layer 12, fluid channel layer 13, elastic film layer 14, control channel layer 15, and bottom film layer 16. Using the transfer function of SOLIDWORKS software, the flow channel pattern of each layer was transferred to DXF format and imported into the femtosecond laser. During processing, the PET material was facing upwards and the double-sided adhesive material was facing downwards. The laser, according to the channel pattern, processed and penetrated the film along the trajectory to obtain the channel structure of each layer, forming a microchannel structure as shown in the image. Figure 2-6 The diagram shows the structure. The structure includes positioning holes 8, 9, 10, and 11, as well as flow channels in each layer. Positioning holes 8, 9, 10, and 11 are symmetrically arranged around the perimeter.

[0063] After obtaining the flow channel structure for each layer, the double-sided adhesive sealant film under the film is peeled off. Positioning is then performed according to the positioning holes on the finished film, and the layers are sequentially bonded to obtain the microfluidic chip. A schematic diagram of the cross-sectional structure at the intersection of the chip's liquid channel and control channel 17 is shown below. Figure 7 and 8 As shown, from top to bottom, there are inlet film layer 12, fluid channel layer 13, elastic film layer 14, control channel layer 15, and bottom film layer 16, which includes the first liquid channel 6 (main liquid channel) and control channel 17.

[0064] When control channel 17 is not connected to compressed gas, such as Figure 7 As shown, the first liquid channel 6 is in the open state, and liquid enters from the inlet 1 of the first liquid channel 6 and flows out from the outlet 2 of the first liquid channel 6.

[0065] When compressed gas is connected to control channel 17, such as Figure 8 As shown, the first liquid channel 6 is in an isolated state, and the liquid enters from the inlet 1 of the first liquid channel 6 and flows out from the outlet 3 of the second liquid channel 7.

[0066] In summary, this invention provides a method for fabricating a layered microfluidic pneumatic valve chip based on laser processing. It employs a layered structure, using lasers to microfabricate the structure of each microchannel on a thin film, and then sequentially bonding each film layer to create the microfluidic pneumatic valve chip. Compared to existing microfluidic pneumatic valve chips, this invention can fabricate a multi-channel layered microfluidic pneumatic valve chip with multiple layers of laminated films. The fabricated layered microfluidic pneumatic valve chip uses double-sided adhesive and elastic film as materials, exhibiting low internal surface roughness and high visibility. It also boasts advantages such as simple fabrication, low implementation difficulty, low material cost, flexible and convenient processing, and the elimination of chip bonding equipment, making it widely applicable in fields such as biomedical detection.

[0067] The above embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of protection of the present invention. Any non-substantial changes and substitutions made by those skilled in the art based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A stacked microfluidic pneumatic valve chip based on laser processing, characterized in that, include: The system comprises an inlet film layer, a fluid channel layer, an elastic film layer, a control channel layer, and a bottom film layer. The bottom film layer serves as a base layer. The control channel layer covers the surface of the bottom film layer. The elastic film layer covers the control channel layer. The fluid channel layer covers the elastic film layer. The inlet film layer covers the fluid channel layer. The fluid channel layer contains a first liquid channel and a second liquid channel, the control channel layer contains a control channel, the first liquid channel contains a main liquid channel inlet and a main liquid channel outlet, the second liquid channel contains a secondary liquid channel outlet, and the control channel contains a control channel air inlet and a control channel air outlet. The inlet film layer is provided with a first flow channel inlet, a first main flow channel outlet, a second main flow channel outlet, a first air inlet, and a first air outlet. The fluid channel layer is provided with a main liquid channel inlet, a main liquid channel outlet, a secondary liquid channel outlet, a second air inlet, and a second air outlet. The first flow channel inlet, the first main flow channel outlet, the second main flow channel outlet, the first air inlet, and the first air outlet of the inlet film layer correspond one-to-one with the main liquid channel inlet, the main liquid channel outlet, the secondary liquid channel outlet, the second air inlet, and the second air outlet of the fluid channel layer. The main liquid channel inlet and outlet are located on the first liquid channel, and the secondary liquid channel outlet is located on the second liquid channel. The main liquid channel inlet, outlet, and outlet are connected to the outside. A third air inlet and a third air outlet are provided on the elastic film layer, and a control channel air inlet and a control channel air outlet are provided on the control channel layer. The control channel air inlet of the control channel layer covers the first air inlet of the inlet film layer, the second air inlet of the fluid channel layer, and the third air inlet of the elastic film layer. The control channel air outlet of the control channel layer covers the first air outlet of the inlet film layer, the second air outlet of the fluid channel layer, and the third air outlet of the elastic film layer. The air inlet and outlet of the control channel are connected to the outside.

2. The stacked microfluidic pneumatic valve chip according to claim 1, characterized in that: The width of the first liquid channel is 0.8-1.2 mm, and the width of the second liquid channel is 0.3-0.9 mm.

3. The stacked microfluidic pneumatic valve chip according to claim 1, characterized in that: The first liquid channel and the control channel are intersecting in a plane.

4. The stacked microfluidic pneumatic valve chip according to claim 1, characterized in that: The elastic film in the elastic film layer is made of PDMS and has a thickness of 50 μm.

5. A method for fabricating a stacked microfluidic pneumatic valve chip based on laser processing, characterized in that, This method is applied to a laser-processed stacked microfluidic pneumatic valve chip as described in any one of claims 1 to 4, comprising: Establish a microfluidic chip model; The microfluidic chip model is divided into layers: inlet thin film layer, fluid channel layer, elastic thin film layer, control channel layer, and bottom thin film layer, and the channel pattern of each layer is obtained. According to the channel pattern after the layering is completed, laser processing technology is used to process each thin film layer in sequence. According to the channel pattern, the thin film layer is broken through along its trajectory to remove the broken part inside the channel, thereby obtaining the channel structure of each layer. After processing, peel off the adhesive layer seal of each film layer, and attach them in the order of inlet film layer, fluid channel layer, elastic film layer, control channel layer and bottom film layer from top to bottom using the adhesive layer. At the same time, use positioning pins to position them by passing through the positioning holes on each film layer, and you can get the stacked microfluidic pneumatic valve chip.

6. The method according to claim 5, characterized in that: The control channel is connected to a high-pressure gas cylinder and a gas control valve through its air inlet. Compressed gas is then introduced into the control channel to control the deformation of the elastic diaphragm and isolate the liquid passage.

7. The method according to claim 6, characterized in that: When the control channel is not connected to compressed gas, the first liquid channel is in the conducting state, and liquid enters from the inlet of the main liquid channel of the first liquid channel and flows out from the outlet of the main liquid channel of the first liquid channel. When compressed gas is connected to the control channel, the first liquid channel is in an isolated state. Liquid enters from the main liquid channel inlet of the first liquid channel and flows out from the secondary liquid channel outlet of the second liquid channel.

8. The method according to claim 5 or 6, characterized in that: Laser processing technology uses a femtosecond laser to penetrate the thin film along the channel pattern of each layer, remove the penetrated part, and obtain a thin film with a microchannel structure.

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