Oven air nozzle structure, oven and drying method

Abstract

The present invention belongs to the technical field of oven equipment, and discloses an oven nozzle structure, an oven, and a drying method, comprising an upper air chamber provided with an air inlet at one end, a lower air chamber provided with a flow equalizing assembly, the flow equalizing assembly provided with a ventilation channel and a flow equalizing plate, the ventilation channel connecting the upper air chamber and the flow equalizing cavity formed by the flow equalizing plate and the lower air chamber; an air outlet assembly, the air outlet assembly provided with an air outlet portion, the air outlet assembly connected with the flow equalizing cavity. The drying airflow entering the nozzle enters the upper air chamber from the air inlet, undergoes preliminary mixing in the upper air chamber, and then undergoes flow equalization on the flow equalizing plate before being mixed again in the flow equalizing cavity formed by the flow equalizing plate and the lower air chamber. The mixed gas is uniformly output through the air outlet assembly. The airflow thus input can be output to dry the substrate after being mixed in the air nozzle, thereby reducing the working cycle and improving the working efficiency. Since the mixing of the drying airflow can be completed without the need for a separate static pressure chamber, the production cost and installation cost are further saved.

Description

Technical Field

[0001] The invention belongs to the technical field of oven equipment, and in particular relates to an oven nozzle structure, an oven and a drying method. Background Art

[0002] In lithium-ion battery coating equipment, the drying oven is a key component of the coating machine for drying lithium battery pole pieces. The coating process for lithium-ion battery pole pieces primarily involves evenly applying a qualified slurry to the current collector using the coater, drying the substrate using the coating machine's drying device, and then rewinding the coating. The oven's nozzle structure significantly impacts the drying efficiency and effectiveness of the pole piece. With the rapid development of the lithium battery industry, coating speeds are constantly increasing, and so are the requirements for production equipment. Consequently, there is a need to improve the production efficiency and reduce the manufacturing cost of drying equipment.

[0003] Existing drying equipment generally has a static pressure chamber, where the hot air must be mixed before being discharged through the nozzle. It cannot enter the nozzle directly, which increases the working cycle of the hot air entering the nozzle, reducing work efficiency. Furthermore, the mixed gas in the static pressure chamber is unevenly mixed, resulting in poor temperature distribution of the gas discharged through the nozzle. Furthermore, the installation of a static pressure chamber increases production costs, tooling costs, and installation space, all of which are detrimental to industrial production. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides an oven air nozzle structure with high working efficiency, good output gas uniformity, low production cost, convenient installation and space-saving installation.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] A drying oven air nozzle structure comprises an upper air chamber, one end of which is provided with an air inlet; a lower air chamber, wherein the lower air chamber is provided with: a flow equalizing component, the flow equalizing component is provided with a ventilation channel and a flow equalizing plate, the ventilation channel connects the upper air chamber and a flow equalizing cavity formed by the flow equalizing plate and the lower air chamber; an air outlet component, the air outlet component is located below the flow equalizing component and is provided with an air outlet portion, the air outlet component is connected with the flow equalizing cavity; the air flow enters the flow equalizing cavity from the upper air chamber through the ventilation channel, is mixed and equalized in the flow equalizing cavity, and is evenly output by the air outlet component.

[0007] Furthermore, there are multiple flow equalizing plates, and each of the multiple flow equalizing plates is provided with an air filtering structure, the air filtering structure includes multiple air filtering holes, and the air filtering holes opened near the air inlet of two adjacent flow equalizing plates of the multiple flow equalizing plates are staggered up and down.

[0008] Furthermore, the flow balancing component includes: a first flow balancing plate, a second flow balancing plate and a third flow balancing plate, a first flow balancing cavity is formed between the first flow balancing plate and the second flow balancing plate, a second flow balancing cavity is formed between the second flow balancing plate and the third flow balancing plate, the first flow balancing cavity and the second flow balancing cavity are connected to each other at the end away from the air inlet, and are separated from each other at the end close to the air inlet.

[0009] Furthermore, the air filtering structure of the first flow equalizing plate includes a plurality of groups of air filtering holes spaced apart near one end of the air inlet and a group of air filtering holes continuously arranged at one end away from the air inlet.

[0010] Furthermore, the air filtering structure of the second flow equalizing plate includes a partition plate and an air filtering groove, the partition plate is arranged near one end of the air inlet, and the air filtering groove is arranged on the center line of the second flow equalizing plate and extends in the longitudinal direction away from the air inlet.

[0011] Furthermore, first square holes are provided at both ends of the third current balancing plate, and a plurality of second square holes are provided in the middle of the third current balancing plate, wherein the area of the first square holes is greater than the area of the second square holes.

[0012] Furthermore, the flow balancing component further includes a turbulent component, and the turbulent component is composed of turbulent plates arranged opposite to each other, and there is a turbulent channel between the oppositely arranged turbulent plates for allowing air flow to pass through and generate turbulence.

[0013] Furthermore, the turbulence plate includes a lower baffle and an upper baffle, wherein the upper baffle and the lower baffle are connected by a connecting plate, the lower baffle is connected to the inner wall of the lower air chamber, the width of the upper baffle is greater than that of the lower baffle, and the height of the connecting plate is less than the height between the third flow equalizing plate and the lower baffle, and the two connecting plates cooperate with each other to form a turbulent channel.

[0014] Furthermore, the air outlet assembly includes a first air outlet plate and a second air outlet plate, the first air outlet plate is provided with a first air outlet unit and a second air outlet unit, the first air outlet unit and the second air outlet unit are arranged alternately, and the air outlet holes of the second air outlet plate are evenly arranged.

[0015] Furthermore, the second air outlet plate includes a bottom air outlet plate and side air outlet plates on both sides, the bottom air outlet plate is connected to the bottom end of the lower air chamber through the side air outlet plates, and the side air outlet plates are provided with evenly arranged air outlet holes.

[0016] Furthermore, the air inlet is provided with a guide plate, and the height of the upper air chamber decreases in the direction away from the air inlet, so that the height of the upper air chamber at the air inlet is higher than the height at one end away from the air inlet.

[0017] Furthermore, wing plates are arranged opposite to each other on both sides of the upper portion of the lower air chamber to prevent the substrate from splashing.

[0018] Furthermore, the present invention also relates to an oven using the air nozzle structure of the present invention.

[0019] Furthermore, the invention also relates to a drying method using the oven of the invention.

[0020] The beneficial effects of the present invention are as follows: the drying nozzle includes an upper air chamber and a lower air chamber. Since the drying airflow entering the nozzle enters the upper air chamber from the air inlet, it undergoes preliminary mixing in the upper air chamber, then enters the flow equalization component, is equalized by the flow equalization plate, and then is mixed again in the flow equalization chamber formed by the flow equalization plate and the lower air chamber. The mixed gas is evenly output through the air outlet component. Therefore, the input drying airflow is mixed in the nozzle and then output to dry the substrate, which reduces the working cycle and improves work efficiency. In addition, the mixing of the drying airflow can be completed without the need for a separate static pressure chamber, further saving the production and installation costs of a separate static pressure chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention will be further described below with reference to the accompanying drawings and examples.

[0022] Figure 1 It is a perspective view of the present invention;

[0023] Figure 2 It is a right side view of the present invention;

[0024] Figure 3 yes Figure 2 Cross-sectional view in BB direction;

[0025] Figure 4 It is a structural schematic diagram of the air outlet assembly of the present invention;

[0026] Figure 5 It is a structural schematic diagram of the current balancing component of the present invention;

[0027] Figure 6 is a structural cross-sectional view of the turbulence plate of the present invention;

[0028] Figure 7 It is a front view of the present invention;

[0029] Figure 8 yes Figure 7 Cross-sectional view in the AA direction.

[0030] In the picture:

[0031] 1. Upper air chamber; 10 air inlet; 11 guide plate;

[0032] 2. Lower air chamber; 211. Flow balancing assembly; 2111. First flow balancing plate; 2112. Second flow balancing plate; 2112a. Partition plate; 2112b. Air filter slot; 2113. Third flow balancing plate; 2113a. First square hole; 2113b. Second square hole; 221. Turbulence plate; 2211. Upper baffle; 2212. Connecting plate; 2213. Lower baffle; 222. Turbulence channel; 23. Air outlet assembly; 231. First air outlet plate; 2311. First air outlet unit; 2312. Second air outlet unit; 232. Second air outlet plate; 2321. Bottom air outlet plate; 2322. Side air outlet plate;

[0033] 3. Wing plate. DETAILED DESCRIPTION

[0034] The following will clearly and completely describe the concept, specific structure and technical effects of the present invention in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the invention, other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention. In addition, all the connection / connection relationships involved in the patent do not refer to the direct connection of components, but refer to the fact that a better connection structure can be formed by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the invention can be combined interactively without conflicting with each other.

[0035] The technical problem to be solved by the present invention is to provide an oven air nozzle structure with high working efficiency, good output gas uniformity, low production cost, convenient installation and space-saving installation.

[0036] Reference Figure 1-Figure 3, an oven air nozzle structure includes an upper air chamber 1 and a lower air chamber 2. An air inlet 10 is provided at one end of the upper air chamber 1. Specifically, the oven air nozzle mechanism is in the shape of an elongated strip. The air inlet 10 is provided at one end of the upper air chamber 1. The drying airflow enters from the air inlet 10 and then reaches the other end of the upper air chamber 1 and fills the entire upper air chamber 1. The lower air chamber 2 is provided with a flow equalizing component 211 and an air outlet component 23. The upper air chamber 1 is connected to the lower air chamber 2. The drying airflow entering the air nozzle enters the upper air chamber 1 from the air inlet 10, completes preliminary mixing in the upper air chamber 1, and then enters the flow equalizing component 211. After the airflow is equalized by the flow equalizing plate, it is mixed again in the flow equalizing cavity formed by the flow equalizing plate and the lower air chamber 2. The mixed gas is evenly output through the air outlet component 23. Compared with traditional drying equipment that requires a static pressure chamber, the oven nozzle structure provided by the present invention does not require a separate static pressure chamber. The drying air flow can be output to dry the substrate after mixing in the nozzle, which reduces the working cycle, improves work efficiency, and further saves the production cost and installation cost of setting up a separate static pressure chamber.

[0037] Further, refer to Figure 3 As shown, the lower air chamber 2 includes a flow equalizing component 211 and an air outlet component 23. The flow equalizing component 211 is provided with a ventilation channel and a flow equalizing plate, and the ventilation channel connects the upper air chamber 1 and the flow equalizing cavity formed by the flow equalizing plate and the lower air chamber 2; the dry airflow from the upper air chamber 1 to the lower air chamber 2 first passes through the flow equalizing channel on the flow equalizing plate, and then enters the flow equalizing cavity formed by the flow equalizing plate and the lower air chamber 2 through the flow equalizing channel to complete the flow equalization and mixing. Specifically, there are multiple flow equalizing plates, and each flow equalizing plate is provided with a flow equalizing channel, wherein the flow equalizing channel can be any structure that allows gas to pass through, such as a circular hole, a square hole, a strip hole, etc., which is not specifically limited here. The air filter holes opened near the air inlet 10 of adjacent flow equalizing plates in the multiple flow equalizing components are staggered up and down. The dry airflow enters from the air inlet 10 of the upper air chamber 1, and the airflow flows from one end of the upper air chamber 1 to the other end, wherein the airflow velocity at the air inlet 10 is high, the flow rate is large and the temperature is high. Therefore, the air filter holes opened at the air inlet 10 of adjacent flow equalizing plates are staggered up and down, that is, the air filter holes of adjacent flow equalizing plates are staggered near the air inlet 10. When the airflow at the air inlet 10 enters the flow equalizing plates of the next layer through the air filter holes of the upper layer, this part of the airflow can be intercepted to divert the airflow to enter the next layer through the air filter holes at other positions, thereby making the wind speed and air volume of the airflow more uniform.

[0038] Further, refer to Figure 3As shown, the number of flow equalizing components 211 is 3, specifically including a first flow equalizing plate 2111, a second flow equalizing plate 2112 and a third flow equalizing plate 2113. Among them, a first flow equalizing cavity is formed between the first flow equalizing plate 2111 and the second flow equalizing plate 2112, and a second flow equalizing cavity is formed between the second flow equalizing plate 2112 and the third flow equalizing plate 2113. Specifically, the first flow equalizing plate 2111 is the upper end face of the lower air chamber 2, and also serves as the lower end face of the upper air chamber 1. The airflow in the upper air chamber 1 first enters the lower air chamber 2 through the first flow equalizing plate 2111, and after mixing in the first flow equalizing cavity, enters the third flow equalizing cavity through the second flow equalizing plate 2112 for mixing, and enters the air outlet component 23 through the third flow equalizing plate 2113; the first flow equalizing cavity and the The second equalizing chambers are interconnected at the end away from the air inlet 10 and separated from each other at the end near the air inlet 10. The airflow rate and velocity at the air inlet 10 in the upper air chamber 1 are large, so the first equalizing chamber and the second equalizing chamber are separated at the air inlet 10. That is to say, the second equalizing plate 2112 is not provided with an air filter hole near the air inlet 10, which can slow down the speed of the airflow at the air inlet. Similarly, at a point away from the air inlet, the gas flow rate is relatively slow. The second equalizing chambers are interconnected at the end away from the air inlet 10, which can balance the wind speed and air volume of the airflow at the air inlet end and the far air inlet end, making the air outlet more uniform. In addition, more specifically, the second equalizing plate 2112 near the air inlet end can also isolate a portion of the high temperature of the air inlet, thereby balancing the temperature of the airflow entering the lower air chamber 2.

[0039] Further, if Figure 5 As shown, the air filtering structure of the first flow equalizing plate 2111 includes a plurality of groups of air filter holes spaced apart near one end of the air inlet 10 and a plurality of groups of air filter holes continuously arranged at one end away from the air inlet 10. That is, the density of the air filter holes at the end of the first flow equalizing plate 2111 near the air inlet 10 is less than the density of the air filter holes at the end away from the air inlet 10. The wind speed and flow rate at the air inlet 10 are fast and the flow rate is large, while the wind speed and flow rate at the end away from the air inlet 10 are slow and the flow rate is small. The structure of the first flow equalizing plate 2111 can balance the airflow entering the first flow equalizing cavity from the upper air chamber 1. Specifically, a plurality of air filter holes are evenly arranged in a group to form an air filter matrix. At the position of the first flow equalizing plate 2111 near one end of the air inlet 10, the air filter matrix is arranged at equal intervals. In some embodiments, the air filter matrix is arranged with shortened intervals in the direction away from the air inlet. At the far end of the air inlet 10, the air filter matrix is continuously arranged. The specific arrangement method is selected according to the type and width of the cooling substrate and the temperature and flow rate of the incoming drying airflow, so as to achieve the purpose of better balanced drying airflow.

[0040] Further, if Figure 5The air filtering structure of the second flow equalizing plate 2112 includes a partition plate 2112a and an air filtering groove 2112b. The partition plate 2112a is arranged near one end of the air inlet 10, and the air filtering groove 2112b is arranged on the center line of the second flow equalizing plate 2112 and extends in the longitudinal direction away from the air inlet. The partition plate 2112a separates the first flow equalizing chamber and the second flow equalizing chamber at one end of the air inlet 10 to prevent the airflow flowing out of the first flow equalizing chamber at one end of the air inlet 10 from directly entering the second flow equalizing chamber. The gas in the first flow equalizing chamber will form a horizontal airflow moving along the far air inlet 10 end through the obstruction of the partition plate 2112a. This part of the horizontal airflow will meet the airflow flowing from the upper air chamber 1 to the first flow equalizing chamber at the far air inlet 10 end, so that the wind speed of the airflow entering the first flow equalizing chamber is reduced and the temperature is more balanced. Specifically, partition plate 2112a is constructed of a heat-insulating material, effectively alleviating the problem of excessively high airflow temperatures near the air inlet 10. The second equalizing plate 2112 is provided with an air filter slot 2112b, which is positioned along the centerline of the second equalizing plate 2112 and extends longitudinally away from the air inlet. Airflow from the upper plenum 1, passing through the first equalizing plate and entering the first equalizing chamber, partially passes through air filter slot 2112b and enters the second equalizing chamber, while partially is blocked by the edge of air filter slot 2112b, resulting in more balanced mixing of the airflow within the first equalizing chamber.

[0041] Furthermore, the third equalizing plate 2113 is provided with first square holes 2113a at both ends, and multiple second square holes 2113b are provided in the middle of the third equalizing plate 2113, wherein the area of the first square holes 2113a is larger than the area of the second square holes 2113b. The airflow in the first equalizing chamber enters the second equalizing chamber through the second equalizing plate 2112. A portion of the airflow exits through the second square holes 2113b in the middle of the third equalizing plate 2113, and a portion of the airflow returns to the first square holes 2113a near the air inlet end of the third equalizing plate 2113. This makes the airflow speed and air volume through the third equalizing plate 2113 more uniform.

[0042] Furthermore, if Figure 3 、 Figure 6As shown, the flow balancing component 211 also includes a turbulence component, which is arranged below the third flow balancing plate 2113. The turbulence component is composed of turbulence plates 221 arranged opposite to each other, and there is a turbulence channel 222 between the turbulence plates 221 arranged opposite to each other, which allows the air flow to pass through and generates turbulence. The generated turbulence will further balance the gas flowing out of the second flow balancing chamber. Specifically, the turbulence plate 221 includes a lower baffle 2213 and an upper baffle, wherein the upper baffle and the lower baffle 2213 are connected by a connecting plate 2212, and the lower baffle 2213 is connected to the inner wall of the lower air chamber 2. The width of the upper baffle is greater than that of the lower baffle 2213, and the height of the connecting plate 2212 is less than the height between the third flow balancing plate 2113 and the lower baffle 2213. The two connecting plates 2212 cooperate with each other to form a turbulence channel 222. The gas in the second flow equalizing chamber enters through the third flow equalizing plate 2113, and the incoming airflow is separated by the upper baffle 2211, so that the airflow moves along both sides of the turbulent channel 222 and enters the space formed by the upper baffle 2211, the lower baffle 2213 and the inner wall of the lower air chamber 2. Such a structure can make the inflowing gas generate turbulence. As a result, the gas in the space on both sides of the turbulent channel 222 will be further mixed due to the turbulence, thereby achieving temperature balance, and more uniform wind speed and air volume.

[0043] Furthermore, if Figure 3 、 Figure 4 As shown, an air outlet assembly 23 is provided below the flow balancing assembly 211. The air outlet assembly 23 is connected to the flow balancing chamber. After the dry air flow is evenly distributed in the flow balancing chamber, the air outlet assembly 23 evenly outputs the dry air flow to dry the substrate. Specifically, the air outlet assembly 23 includes a first air outlet plate 231 and a second air outlet plate 232. Figure 4 As shown, the first air outlet plate 231 includes a first air outlet unit 2311 and a second air outlet unit 2312. The first air outlet units 2311 and the second air outlet units 2312 are arranged alternately, and the air outlet holes of the second air outlet plate 232 are evenly arranged. The air outlet hole density of the first air outlet unit 2311 is greater than the air outlet hole density of the second air outlet unit 2312. Due to the different air outlet hole densities of the first air outlet unit 2311 and the second air outlet unit 2312, the dry airflow encounters different resistance when passing through. As a result, the dry airflow changes its trajectory when passing through the first air outlet plate 231, and the dry airflow in the interval area is mixed again, thereby improving the uniformity of the airflow.

[0044] Specifically, the second air outlet plate 232 includes a bottom air outlet plate 2321 and side air outlet plates 2322 on either side. The bottom air outlet plate 2321 is connected to the bottom end of the lower air chamber 2 via the side air outlet plates 2322. The side air outlet plates 2322 are provided with evenly spaced air outlet holes. The drying airflow is output through the bottom air outlet plate 2321 and the side air outlet plates 2322. The angle at which the side air outlet plates 2322 are connected to the bottom air outlet plate 2321 is obtuse. As a result, the drying airflow passing through the side air outlet plates forms an acute angle with the extension line of the bottom of the bottom air outlet plate 2321. In other words, the drying airflow passing through the side air outlet plates contacts the bottom substrate at a shallow angle, which is gentler than direct vertical contact with the substrate. In addition, this can obviously increase the contact area between the bottom air outlet and the substrate, thereby improving the drying quality and drying efficiency of the oven.

[0045] Further, if Figure 8 As shown, a deflector 11 is provided at the air inlet 10. Specifically, the deflector 11 is parallel to the ground of the upper air chamber 1. Dry gas enters from the air inlet 10, and the airflow temperature at the air inlet 10 is higher, while the airflow temperature at the end away from the air inlet 10 is lower. The deflector 11 is provided to guide the airflow, and the dry gas moves along the deflector 11 in a direction away from the air inlet 10. The high-temperature airflow at the air inlet 10 is distributed throughout the upper air chamber 1, thereby reducing the temperature difference between the upper air chamber 1 near the air inlet 10 and the air inlet 10 far away, and improving the temperature uniformity of the upper air chamber 1. Furthermore, the airflow velocity and flow rate at the air inlet 10 are high, while the flow rate and flow rate at the end away from the air inlet 10 are slow, resulting in a pressure difference within the upper air chamber 1, which is not conducive to the temperature output of the dry gas. Therefore, the height of the upper wind chamber 1 is lowered in the direction away from the air inlet 10, so that the height of the upper wind chamber 1 at the air inlet 10 is higher than the height at the end away from the air inlet 10. That is to say, by linearly lowering the height between the upper wall of the upper wind chamber 1 and the ground of the lower wind chamber 2, the volume near the air inlet 10 in the upper wind chamber 1 is larger than the volume far from the air inlet 10. According to Bernoulli's principle, the pressure and wind speed at the end far from the air inlet 10 will be enhanced, thereby balancing the pressure and wind speed at the air inlet 10 and the end far from the air inlet 10.

[0046] Furthermore, wing plates 3 are provided on both sides of the upper portion of the lower air chamber 2. The wing plates 3 are used to shield the white oil splashing on the surface of the base film during operation, so as to increase the service life of the oven nozzle.

[0047] The present invention also provides an oven including the aforementioned oven nozzle. The oven including this oven nozzle eliminates the need for a separate static pressure chamber, reducing the cost of installing the static pressure chamber itself, tooling costs, and space required to install the static pressure chamber. The oven nozzle of the present invention simultaneously performs the functions of a static pressure chamber and a nozzle, resulting in high production efficiency and low production costs for the oven including this oven nozzle.

[0048] The present invention also proposes a drying method, which uses the above-mentioned bellows to dry the substrate. The oven nozzle of the present invention has the functions of a static pressure chamber and a nozzle at the same time. The drying air flow can be output after being balanced through the oven nozzle, and the drying efficiency is high and the effect is good.

[0049] The above is a specific description of the preferred implementation of the present invention, but the invention is not limited to the embodiments. Those skilled in the art can make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. An oven air nozzle structure, characterized by: An upper air chamber, wherein one end of the upper air chamber is provided with an air inlet; Downwind chamber, wherein the downwind chamber is provided with: A flow balancing component, wherein the flow balancing component is provided with a ventilation channel and a flow balancing plate, wherein the ventilation channel communicates with the upper air chamber and the flow balancing cavity formed by the flow balancing plate and the lower air chamber; An air outlet assembly is provided with an air outlet portion, and the air outlet assembly is connected to the flow balancing chamber; air flows from the upper air chamber through the ventilation channel into the flow balancing chamber, and is mixed and evenly distributed in the flow balancing chamber before being uniformly output by the air outlet assembly; There are multiple equalizer plates, and any of the equalizer plates is provided with an air filter structure, wherein the air filter structure includes multiple air filter holes, and the air filter holes opened near the air inlet between two adjacent equalizer plates are staggered vertically; The flow balancing assembly includes: a first flow balancing plate, a second flow balancing plate, and a third flow balancing plate; a first flow balancing cavity is formed between the first flow balancing plate and the second flow balancing plate; a second flow balancing cavity is formed between the second flow balancing plate and the third flow balancing plate; the first flow balancing cavity and the second flow balancing cavity are connected to each other at an end away from the air inlet and separated from each other at an end close to the air inlet; The air filtering structure of the second flow balancing plate includes a partition plate and an air filtering groove. The partition plate is arranged near one end of the air inlet, and the air filtering groove is arranged on the center line of the second flow balancing plate and extends in the longitudinal direction away from the air inlet.

2. The oven air nozzle structure according to claim 1, characterized in that: The air filtering structure of the first flow equalizing plate includes a plurality of groups of air filtering holes spaced apart near one end of the air inlet and a group of air filtering holes continuously arranged at one end away from the air inlet.

3. The oven air nozzle structure according to claim 1, characterized in that: The third current balancing plate is provided with first square holes at both ends, and a plurality of second square holes are provided in the middle of the third current balancing plate, wherein the area of the first square holes is greater than the area of the second square holes.

4. The oven air nozzle structure according to claim 1, characterized in that: The flow balancing component further includes a turbulent component, which is composed of turbulent plates arranged opposite to each other. Turbulent channels are provided between the turbulent plates to allow airflow to pass through and generate turbulence.

5. The oven air nozzle structure according to claim 4, characterized in that: The turbulence plate includes a lower baffle and an upper baffle, wherein the upper baffle and the lower baffle are connected by a connecting plate, the lower baffle is connected to the inner wall of the lower air chamber, the width of the upper baffle is greater than that of the lower baffle, and the height of the connecting plate is less than the height between the third flow equalizing plate and the lower baffle, and the two connecting plates cooperate with each other to form a turbulent channel.

6. The oven air nozzle structure according to claim 1, characterized in that: The air outlet assembly includes a first air outlet plate and a second air outlet plate. The first air outlet plate is provided with a first air outlet unit and a second air outlet unit. The first air outlet unit and the second air outlet unit are alternately arranged. The air outlet holes of the second air outlet plate are evenly arranged.

7. The oven air nozzle structure according to claim 6, characterized in that: The second air outlet plate includes a bottom air outlet plate and side air outlet plates on both sides. The bottom air outlet plate is connected to the bottom end of the lower air chamber through the side air outlet plates. The side air outlet plates are provided with evenly arranged air outlet holes.

8. The oven air nozzle structure according to any one of claims 1 to 7, characterized in that: The air inlet is provided with a guide plate, and the height of the upper air chamber decreases in the direction away from the air inlet, so that the height of the upper air chamber at the air inlet is higher than the height of one end away from the air inlet.

9. The oven air nozzle structure according to claim 8, characterized in that: Wing plates for preventing the substrate from splashing are arranged oppositely on both sides of the upper part of the lower air chamber.

10. An oven, characterized in that: The invention comprises the oven air nozzle structure according to any one of claims 1 to 9.

11. A drying method, characterized in that: The substrate is dried using the oven as claimed in claim 10.

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