Electrical discharge machining device

Abstract

The present invention relates to an electrical discharge machining device, comprising at least a carrier, an electrical discharge machining unit and a modifying device. The carrier is used to carry at least one workpiece. The electrical discharge machining unit comprises at least one electrode and a power supply unit, which is used to perform an electrical discharge machining process on a target area of the workpiece by the electrode along a machining direction. When the electrode has a region to be modified, the modifying device performs a modifying process on the electrode, so as to achieve the effect of stable discharge and prevent short circuit problem during the electrical discharge machining process.

Description

Technical Field

[0001] This invention relates to a processing apparatus, and more particularly to an electrical discharge machining apparatus. Background Technology

[0002] With the booming development of the semiconductor industry, electrical discharge machining (EDM) technology is commonly used to process ingots or wafers. EDM is a manufacturing process that uses electrical discharge to generate sparks, shaping the workpiece into a desired form. Two electrodes are separated by a dielectric material and a voltage is applied, generating a periodically changing, rapidly varying current discharge to process the workpiece. EDM uses two electrodes: one called the tool electrode or discharge electrode, and the other called the workpiece electrode, which is connected to the workpiece. During EDM, there is no actual contact between the discharge electrode and the workpiece electrode.

[0003] When the potential difference between two electrodes increases, the electric field between them also increases until the electric field strength exceeds the dielectric strength. At this point, dielectric collapse occurs, current flows through the electrodes, and some material is removed. When the current stops, new dielectric material flows into the electric field between the electrodes, removing the previously removed material and restoring the dielectric insulating effect. After the current flows again, the potential difference between the two electrodes returns to its state before dielectric collapse, thus allowing for a new cycle of dielectric collapse.

[0004] However, existing electrical discharge machining (EDM) technologies suffer from drawbacks such as poor surface roughness and numerous surface cracks that can extend along non-cutting directions, leading to unexpected breakage. Furthermore, existing EDM techniques, for example, ingot cutting, use a fixture to hold the ingot's periphery, i.e., radially, to prevent rolling or displacement. However, since the cutting surface is also radial, conventional techniques can only cut the ingot exposed outside the fixture, failing to cut the area where the fixture and ingot overlap. Therefore, conventional techniques require stopping the machine and readjusting the position before cutting can resume. Additionally, existing EDM technologies can only cut or thin one wafer at a time, resulting in a very slow process. Moreover, existing EDM technologies use only a single cutting wire, and since current EDM equipment lacks a quick-release design, if the cutting wire breaks unexpectedly, it requires a significant downtime for replacement. Summary of the Invention

[0005] In view of this, one or more objectives of the present invention is to provide an electrical discharge machining apparatus to solve the many problems of the prior art.

[0006] To achieve the aforementioned objectives, the present invention provides an electrical discharge machining (EDM) apparatus, comprising at least: a stage for supporting at least one workpiece; an EDM unit comprising at least one electrode and a power supply unit for performing an EDM process on a processing target area of ​​the workpiece on the stage along a processing travel direction using the electrode, wherein the electrode is suspended in a discharge section, and the power supply unit provides a first power source to the electrode and the workpiece during the EDM process to apply a discharge energy to the processing target area of ​​the workpiece via the electrode located in the discharge section; and a correction device for performing a correction process on a correction area of ​​the appearance of one electrode to correct the appearance of the electrode.

[0007] The correction device performs a correction procedure on the electrode simultaneously with the electrical discharge machining process performed on the target area.

[0008] The correction device performs the correction procedure on the electrode before or after the electrode performs the electrical discharge machining procedure on the target area.

[0009] The correction device corrects the appearance of the electrode by adjusting the wear rate of one of the electrodes and the feed rate of one of the electrical discharge machining processes.

[0010] The correction device corrects the appearance of the electrode in a dynamic adjustment manner based on the real-time state of one of the electrodes.

[0011] The correction device includes a trimming assembly that generates a relative displacement between the trimming assembly and the electrode during the correction process to correct the appearance of the electrode.

[0012] The correction device includes a lifting mechanism and / or a translation mechanism for setting the cutting tool assembly, so that the cutting tool assembly moves to generate the relative displacement with respect to the electrode.

[0013] The tool repair component can be a laser source, a cutting tool, or a grinding element.

[0014] The correction device also includes a chip removal component, which removes chips generated during the correction process of the electrode.

[0015] The correction device includes a rolling mechanism for rolling the electrode during the correction process, so that the area of ​​the electrode to be corrected avoids the processing target area of ​​the workpiece, thereby correcting the appearance of the electrode.

[0016] The correction device also includes a slitting assembly for dividing the electrode in the discharge section into a plurality of parallel electrode strips.

[0017] The electrical discharge machining unit further includes a clamping assembly for clamping at least one side of the discharge segment of the electrode during the electrical discharge machining process and for releasing the at least one side of the discharge segment of the electrode during the correction process of the correction device.

[0018] The electrical discharge machining apparatus further includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides at least one external force to remove the residue generated when the electrode applies the discharge energy to the workpiece.

[0019] The slag removal unit adjusts the direction or position of the applied external force according to the shape of the workpiece to remove the residue.

[0020] The electrical discharge machining unit further includes a fixture, which is composed of at least two supporting members and at least two holding members respectively connected together. The two holding members are disposed on two bases, which are moving or rotating mechanisms, so that when the electrical discharge machining unit performs the electrical discharge machining process along the machining travel direction, the discharge section of the electrode and the machining target area of ​​the workpiece move reciprocally or cyclically relative to each other.

[0021] The electrode is arranged in a ring-shaped manner against the two supporting members, or the two sides of the electrode are respectively against the two supporting members, so that the electrode is in a suspended state in the discharge section.

[0022] The correction device further includes an orientation correction component, which adjusts the relative orientation of the electrode and the workpiece to correct the processing direction based on a deviation in the processing direction of the electrode.

[0023] The correction device moves the electrode that appears as the area to be corrected on the surface, so that the area to be corrected avoids the processing target area of ​​the workpiece. The area to be corrected is a fracture phenomenon or a fracture indication.

[0024] The number of electrodes is multiple, and the multiple electrodes are arranged parallel to each other in the discharge section along a first direction and / or a third direction, wherein the third direction is perpendicular to the first direction.

[0025] The correction device also includes a blade assembly that separates the plurality of electrodes so that the plurality of electrodes remain parallel to each other in the discharge section.

[0026] The electrical discharge machining unit further includes a partition column, and the plurality of electrodes abut against the partition column so that the plurality of electrodes are parallel to each other in the discharge section.

[0027] It also includes a stabilizing member having a plurality of guide grooves that movably accommodate the plurality of electrodes, for stabilizing and guiding the plurality of electrodes so that the plurality of electrodes perform the electrical discharge machining process along the machining travel direction.

[0028] The correction device moves at least one of the plurality of electrodes that has the area to be corrected on its appearance, so that the area to be corrected avoids the processing target area of ​​the workpiece. The area to be corrected is a fracture phenomenon or a fracture indication.

[0029] As described above, the electrical discharge machining apparatus of the present invention has one or more advantages or technical effects:

[0030] (1) The correction device can correct the appearance of the electrode by means of the relative displacement between the tool dressing assembly and the electrode, so as to prevent short circuit problems in the electrical discharge machining process.

[0031] (2) The correction device can avoid the processing target area of ​​the workpiece by rolling or moving the electrode to prevent short circuit problems in the electrical discharge machining process.

[0032] (3) The chip removal assembly can remove residual chips and other materials on the cutting assembly and / or electrode by means of the relative displacement between the cutting assembly and the electrode. The slag removal unit can provide external force to one or more machining target areas to help remove the residue generated by the electrical discharge machining process or correction process.

[0033] (4) The slitting assembly can cut the discharge section of the electrode into several electrode strips by means of the relative displacement between the cutting assembly and the electrode, thereby avoiding the problem of uneven wear of plate electrodes.

[0034] (5) The orientation correction component can correct the machining direction of the electrode and the workpiece, thereby avoiding deviation of the machining direction.

[0035] (6) The clamping assembly can clamp the electrode to prevent the electrode from changing the processing direction due to being pulled.

[0036] (7) The cutting tool assembly can keep multiple electrodes parallel, which can avoid unevenness such as skewing on the surface of the workpiece after electrical discharge machining.

[0037] (8) The stabilizing component can reduce electrode jitter, provide guidance as a separator, and can be used as an electrical contact.

[0038] To enable you to have a better understanding of the technical features and effects of this invention, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0039] Figure 1This is a front view schematic diagram of the electrical discharge machining apparatus of the present invention, wherein... Figure 1 (A) and (B) are schematic diagrams of different implementation examples.

[0040] Figure 2 This is a top view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention. Figure 2 (A) has a plurality of electrodes and is a ring-shaped design. Figure 2 (B) has a single electrode and is designed in a ring shape. Figure 2 (C) has a single electrode and is a bridging design.

[0041] Figure 3 This is a schematic diagram of the fixture of the present invention, in which multiple supporting members are used to arrange the electrodes in parallel. Figure 3 (A) and Figure 3 (B) represents different implementation examples. Figure 3 (A) is a process in which multiple electrodes are parallel to each other in the machining travel direction F to sequentially perform electrical discharge machining on a single machining target area. Figure 3 (B) is a process in which multiple electrodes are parallel to each other in the first direction X to simultaneously perform electrical discharge machining on multiple target areas.

[0042] Figure 4 This is a schematic diagram illustrating the phenomenon of inconsistent electrode wear during electrical discharge machining (EDM). Figure 4 (A) and (B) are schematic diagrams obtained from different perspectives.

[0043] Figure 5 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention, which includes a tool dressing assembly. Figure 5 (A) and (B) are schematic diagrams obtained from different perspectives.

[0044] Figure 6 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention, which includes a lifting mechanism. Figure 6 (A), (B) and (C) are schematic diagrams of different implementation examples.

[0045] Figure 7 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention, which includes a chip removal component. Figure 7 (A) and (B) are schematic diagrams obtained from different perspectives.

[0046] Figure 8 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention, which includes a rolling mechanism. Figure 8 (A) and (B) are schematic diagrams obtained from different perspectives.

[0047] Figure 9This is a schematic diagram of the process by which the correction device of the electrical discharge machining apparatus of the present invention corrects the electrode by means of displacement. Figure 9 (A), (B) and (C) are schematic diagrams of the process steps.

[0048] Figure 10 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention performing a slitting process using a slitting assembly, wherein... Figure 10 (A) and (B) are schematic diagrams obtained from different perspectives.

[0049] Figure 11 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention performing an electrical discharge machining process using a slitting assembly, wherein... Figure 11 (A) and (B) are schematic diagrams obtained from different perspectives.

[0050] Figure 12 This is a schematic diagram of the correction device of the electrical discharge machining apparatus of the present invention, which includes a tool-aligning assembly. Figure 12 (A) and (B) are schematic diagrams obtained from different perspectives.

[0051] Figure 13 This is a schematic diagram of the alignment correction device of the electrical discharge machining apparatus of the present invention, wherein... Figure 13 (A) and (B) are schematic diagrams obtained from different perspectives.

[0052] Figure 14 This is a schematic diagram of the jig rotating the electrode in the electrical discharge machining apparatus of the present invention.

[0053] Figure 15 This is a schematic diagram of the electrical discharge machining apparatus of the present invention, which includes a tension control module.

[0054] Figure 16 This is a schematic diagram of the electrical discharge machining apparatus of the present invention having a slag removal unit, wherein... Figure 16 (A) and (B) are schematic diagrams of different implementation examples.

[0055] Explanation of reference numerals in the attached figures:

[0056] 10: Electrical Discharge Machining Equipment

[0057] 20: Platform

[0058] 21: Support plate

[0059] 22: Stabilizing components

[0060] 28: Contact surface

[0061] 30: Electrical Discharge Machining Unit

[0062] 31: Electrical contacts

[0063] 32: Electrode

[0064] 32': Electrode strip

[0065] 34: Power Supply Unit

[0066] 36: Jig

[0067] 40: Load-bearing components

[0068] 41: Shaft hole

[0069] 42: Limiting groove

[0070] 43: Through slot

[0071] 44a: First sheet

[0072] 44b: Second sheet

[0073] 47: Chamfer

[0074] 50: Holding member

[0075] 51: Bump

[0076] 52: base body

[0077] 53: Bump

[0078] 55: Coupling

[0079] 58: Motor

[0080] 60: Tension Measurement Unit

[0081] 62: Vibration Measurement Unit

[0082] 64: Slag Discharge Unit

[0083] 65: Sprayer Head

[0084] 66: Tension Control Module

[0085] 68: Controller

[0086] 80: Correction device

[0087] 82: Knife Repair Components

[0088] 83: Chip Removal Components

[0089] 84: Scrolling mechanism

[0090] 85: Strip Component

[0091] 86: Clamping components

[0092] 87: Whole blade assembly

[0093] 88: Orientation Correction Component

[0094] 89: Detection Components

[0095] 90: Lifting mechanism

[0096] 91: Track

[0097] 92: Translation mechanism

[0098] 93: Slide

[0099] 95: Track

[0100] 96: Support frame

[0101] 97: Slide

[0102] 100: Work to be processed

[0103] 110: Processing target area

[0104] 281: Guide groove

[0105] A: Both sides

[0106] B: Discharge section

[0107] C: Region

[0108] D: Spacing

[0109] X: First direction

[0110] Y: Second direction

[0111] Z: Third-party direction

[0112] F: Processing direction

[0113] P1: First power supply Detailed Implementation

[0114] To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with reference to accompanying drawings and embodiments. The drawings used are for illustrative purposes only and do not necessarily represent the actual scale and precise configuration of the invention. Therefore, the scale and configuration of the accompanying drawings should not be used to interpret or limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

[0115] Furthermore, unless otherwise specified, the terms used throughout this specification and claims generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

[0116] The use of terms such as "first," "second," and "third" in this document does not specifically refer to any order or sequence, nor is it intended to limit the invention. Rather, it is merely used to distinguish components or operations described using the same technical terms.

[0117] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0118] Figure 1 This is a front view schematic diagram of the electrical discharge machining apparatus of the present invention, wherein Figure (A) and Figure (B) are schematic diagrams of different embodiments. Figure 2 This is a top view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention. Figure 2 (A) has a plurality of electrodes and is a ring-shaped design. Figure 2 (B) has a single electrode and is designed in a ring shape. Figure 2 (C) has a single electrode and is a bridging design. Figure 3 This is a schematic diagram of the fixture of the present invention, in which multiple supporting members are used to arrange the electrodes in parallel. Figure 3 (A) is a procedure for sequentially performing electrical discharge machining on a single target area using multiple electrodes. Figure 3 (B) is a process in which multiple electrodes simultaneously perform electrical discharge machining on multiple target areas.

[0119] Please see Figures 1 to 3 The electrical discharge machining (EDM) apparatus 10 of the present invention includes at least a stage 20 and an electrical discharge machining unit 30. The stage 20 is used to support at least one workpiece 100. The two ends of the electrodes 32 of the electrical discharge machining unit 30 are respectively connected across (e.g., Figure 2 (as shown in (C)) or around (as shown in) Figure 1 (A) Figure 1 (B) Figure 2 (A) and Figure 2 (As shown in (B)) On the two fixtures 36, the electrode 32 is suspended in the discharge section B. The electrode 32 of the electrical discharge machining unit 30 extends along the second direction Y, such that the electrode 32 in the discharge section B is parallel to the second direction Y, wherein the second direction Y is perpendicular to the first direction X and the machining travel direction F, respectively. The electrode 32 located in the discharge section B (i.e., the discharge section B of the electrode 32) moves reciprocally or cyclically relative to the machining target area 110 of the workpiece 100 (e.g., along the discharge section B). Figure 1The hollow double or single arrow shown generates relative displacement in the direction (second direction Y) to perform electrical discharge machining (EDM) on the target area 110 of the workpiece 100 on the stage 20 along the machining travel direction F using electrode 32. For example, sequentially or simultaneously performing cutting and / or electric discharge grinding (EDG) on the target area 110 of the workpiece 100. The power supply unit 34 of the EDM unit 30 provides a first power supply P1 to the electrode 32 and the workpiece 100 during the EDM process, applying discharge energy to the target area 110 of the workpiece 100 via the electrode 32 located in the discharge section B. Figures 1 to 3 In the illustrated embodiment, the axis of the fixture 36 is perpendicular to the processing direction F. However, the invention is not limited to this; in other feasible embodiments, the axis of the fixture 36 may be parallel to the processing direction F. The workpiece 100 can be any conductor or semiconductor structure, such as an ingot or wafer. The stage 20 of the invention can be a fixed stage or a movable or rotatable stage. The invention is illustrated by the stage 20 as a working platform with a support plate 21, but the invention is not limited to this. The stage 20 of the invention may selectively omit the support plate 21 or replace the support plate 21 with an adhesive layer (such as conductive adhesive). To avoid the vibration phenomenon of the electrode 32 during the electrical discharge machining process, the electrical discharge machining apparatus 10 of the invention selectively has a stabilizing member 22. The stabilizing member 22 is provided on the stage 20 and, for example, supported between the two sides A of the electrode 32. The form of the stabilizing member 22 is not particularly limited, as long as it can reduce the vibration of the electrode 32, it can be applied to the invention. For example, the contact surface 28 where the stabilizing member 22 contacts the electrode 32 can be, for example, a plane (e.g., ...). Figure 1 (A) As shown, vibration can be reduced by, for example, supporting the electrode 32 in a suspended state, or the contact surface 28 where the stabilizing member 22 contacts the electrode 32 can selectively have a guide groove 281 (e.g. Figure 1 (As shown in (B)), the guide groove 281 not only supports the electrode 32 in a suspended state, but also stabilizes the electrode 32 and provides a guiding effect when the electrode 32 moves reciprocally relative to the workpiece 100. In addition, the stabilizing member 22 can also be optionally designed with a highly telescopic structure, thereby changing the height of the contact surface 28 between the stabilizing member 22 and the electrode 32.

[0120] like Figures 1 to 3 As shown, the electrical discharge machining unit 30 includes at least one electrode 32, a power supply unit 34, and a fixture 36. The number of electrodes 32 may be, for example, one (e.g., ...). Figure 2 (B) and Figure 2(as shown in (C)) or a plurality of processing target areas 110 defined on the workpiece 100 (e.g., ...). Figure 2 (A) and Figure 3 (B) shows the electrical discharge machining procedure. Figure 3 These are schematic diagrams illustrating two embodiments of the present invention in which electrodes are arranged in parallel using multiple supporting members. Figure 3 (A) A plurality of electrodes 32 are arranged parallel to each other along the machining travel direction F, thereby allowing the multiple electrodes 32 to sequentially perform electrical discharge machining on a single machining target area 110. Figure 3 (B) In this case, a plurality of electrodes 32 are arranged parallel to each other along the first direction X, thereby allowing multiple electrodes 32 to simultaneously perform electrical discharge machining on a plurality of processing target areas 110. Taking a plurality of electrodes 32 having a discharge segment B extending along the second direction Y as an example, these plurality of electrodes 32 are, for example, arranged in the first direction X (e.g., ...). Figure 3 (as shown in (B)) and / or the processing direction F (as shown in...) Figure 3 (A) shows a series of parallel linear or plate-like conductive structures, such as conductive wires or foils, where the processing direction F is parallel to a third direction Z and perpendicular to a first direction X. The number of electrodes 32 is selectively determined according to actual needs. The distance between these electrodes 32 corresponds to the cutting or thinning thickness of the workpiece 100. The transverse cross-sections of these electrodes 32 can be any shape, either the same or different, such as linear or plate-like (or sheet-like), or any symmetrical (e.g., circular, square, rectangular) or asymmetrical shape. The power supply unit 34 is electrically connected to the electrodes 32 and the workpiece 100 via electrical contacts 31. The power supply unit 34 can be a single power output or multiple power outputs to supply a first power supply P1. The power supply unit 34 can also be connected to the electrodes 32 in series or in parallel, as long as discharge energy can be applied to the processing target area 110 of the workpiece 100 via the electrodes 32, it is applicable to this invention.

[0121] The material of electrode 32 can be selected from, for example, a group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, and zinc. The thickness of discharge electrode 32 is approximately less than 300 μm, preferably ranging from approximately 30 μm to approximately 300 μm. However, it should be noted that although the present invention is illustrated by way of an example with a plurality of electrodes 32, it is not limited thereto; a single electrode, such as... Figure 2As shown in (C), this also falls within the scope of protection claimed by this invention. Since those skilled in the art should understand how to apply the technical means of this invention to a single electrode or multiple electrodes based on the disclosure of this invention and existing technology, further details are omitted here. When multiple electrodes 32 are arranged parallel to each other in the processing direction F, as the multiple electrodes 32 sequentially cut or polish the processing target area 110 of the workpiece 100 along the processing direction F, the electrode 32 located at the rear will repeatedly pass through the positions already passed by the electrode 32 located at the front. In other words, taking the processing direction F from top to bottom as an example, even if the electrode 32 located at the front (e.g., the lower electrode) experiences a breakage, the electrode 32 located at the rear (e.g., the upper electrode) can still substitute for the front electrode 32 in applying discharge energy to the processing target area 110 of the workpiece 100. Therefore, this invention, through the electrode substitution function, can avoid adverse effects such as process interruption caused by electrode 32 breakage.

[0122] Please see Figures 1 to 2The fixture 36 is selectively, for example, composed of at least two supporting members 40 and at least two retaining members 50 respectively connected in a corresponding manner. The two sides A of the electrode 32 are movably or fixedly abutted against the two supporting members 40, so that the discharge section B of the electrode 32 is suspended, wherein the two supporting members 40 are spaced apart by a distance. The dimensions of the two supporting members 40 and the height of the electrode 32 they support are not particularly limited to be the same or different, as long as the discharge section B of the electrode 32 can be suspended, it is suitable for this invention. The retaining members 50 are selectively detachable or fixedly and securely connected to the supporting members 40. The retaining members 50 are disposed on a base 52, wherein the base 52 can be a structure that fixes the position of the retaining members 50, or the base 52 can be a motion mechanism that allows the retaining members 50 to move or rotate, thereby correspondingly driving the supporting members 40 to move or rotate, so that the discharge section B of the electrode 32 can move left and right reciprocally. This invention is not limited to the stage 20 moving the workpiece 100 toward the electrode 32 of the electrical discharge machining unit 30, or the seat 52 driving the electrode 32 toward the workpiece 100. As long as the electrical discharge machining (EDM) unit 30 and the workpiece 100 on the stage 20 can move relative to each other along the aforementioned processing direction F, this invention is applicable. Taking the seat 52 as an example of a motion mechanism, the motion mechanism can be, for example, any moving mechanism capable of reciprocating left and right, such as a sliding mechanism, or, for example, any rotating mechanism capable of reciprocating or cyclic rotation, such as a motor, to correspondingly drive the holding member 50 to move or rotate. In this way, the supporting member 40 and the holding member 50 can selectively reciprocate or cyclically move with the electrode 32, so that the electrode 32 applies discharge energy to the workpiece 100 in the discharge section B. To ensure better adhesion of the electrode 32 to the supporting member 40, the edge of the supporting member 40 selectively has a chamfer 47, such as... Figure 2 As shown.

[0123] In other feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, drive the discharge sections B of multiple electrodes 32 to move reciprocally or cyclically by reciprocating or cyclically rotating two or more support members 40. Two implementation examples of the connection configuration between the support members 40 and the electrodes 32 can be as follows: Figure 3 As shown in (A) and (B), each electrode 32 surrounds four supporting members 40, wherein... Figure 3 (A) and Figure 3 (B) represents different implementation examples. Figure 3 (A) The electrodes 32 are arranged parallel to each other along the machining travel direction F, so that multiple electrodes 32 can sequentially perform electrical discharge machining on a single machining target area 110. Figure 3(B) In this case, the electrodes 32 are arranged parallel to each other along the first direction X, thereby allowing multiple electrodes 32 to simultaneously perform electrical discharge machining on a plurality of machining target areas 110. These electrodes 32 share two of the four support members 40, so the two sides A of these electrodes 32 are in contact with each other to form a stacked state and move together against the two shared support members 40. The remaining support members 40 are arranged in pairs at different vertical heights or horizontal positions, such that the electrodes 32 are spaced apart from the machining travel direction F (e.g., ...). Figure 3 (A) shown) or in the first direction X (as shown in) Figure 3 (B) As shown, these electrodes 32 are arranged in parallel to each other. Thus, when the support member 40 rotates reciprocatingly or cyclically, the discharge sections B of these electrodes 32 also shift relative to the workpiece 100 in the second direction Y. The shared support member 40, for example, rotates synchronously in a reciprocating or cyclic manner.

[0124] In short, this invention employs various methods to cause the discharge section B of electrode 32 and the processing target area 110 of workpiece 100 to move relative to each other along the processing direction F. The first method involves the workpiece 100 moving along the processing direction F while the electrode 32 remains stationary in the processing direction F. The second method involves the electrode 32 moving along the processing direction F while the workpiece 100 remains stationary in the processing direction F. The third method involves the electrode 32 and the workpiece 100 moving in opposite directions along the processing direction F.

[0125] Similarly, the present invention can also employ various methods to move the discharge section B of electrode 32 relative to the processing target area 110 of workpiece 100 along the second direction Y. The first method is that the workpiece 100 moves along the second direction Y while the electrode 32 remains stationary in the second direction Y. The second method is that the electrode 32 moves along the second direction Y while the workpiece 100 remains stationary in the second direction Y. The third method is that the electrode 32 and the workpiece 100 move in opposite directions along the second direction Y. In the second method, where the discharge section B and the processing target area 110 move relative to each other along the second direction Y, the present invention can also, for example, use a jig 36 to reciprocate or cyclically rotate the electrode 32, causing the electrode 32 to move left and right (reciprocating) or continuously (cyclically), or the electrode 32 can be fixed on the jig 36, but the electrode 32 can be indirectly moved by moving the jig 36 left and right (reciprocating) along the second direction Y as shown in the figures using the base 52.

[0126] It should be noted, however, that while the present invention lists various movement methods for performing electrical discharge machining (EDM) processes, this is not intended to limit the invention. For example, the scope of protection claimed by the present invention may also cover situations where the workpiece 100 moves along the machining travel direction F while the electrode 32 remains stationary in both the machining travel direction F and the second direction Y, or where the electrode 32 moves along the machining travel direction F while the workpiece 100 remains stationary in both the machining travel direction F and the second direction Y. That is, any movement method that allows for EDM processes falls within the scope of protection claimed by the present invention.

[0127] like Figure 4 As shown in (A) and (B), during the electrical discharge machining (EDM) process, the appearance of electrode 32 (e.g., the bottom surface) is prone to inconsistent wear levels (i.e., the area to be corrected as defined in this invention), which can lead to short circuits in the EDM process. Although many factors (e.g., external and internal) can cause inconsistent wear levels in electrode 32, in order to more thoroughly resolve the short circuit problem caused by these inconsistent wear levels, therefore, as... Figure 5 As shown in (A) and (B), a feature of the electrical discharge machining (EDM) apparatus 10 of the present invention is a correction device 80 for correcting an electrode 32 with an area to be corrected in its appearance. The correction device 80 performs a correction procedure on the electrode 32, for example, correcting the appearance of the electrode 32 while the electrode 32 is being processed on the target area 110. However, the present invention is not limited thereto; the correction device 80 may also perform the correction procedure on the electrode 32, for example, before or after the electrode 32 is being processed on the target area 110. That is, regardless of when the correction device 80 performs the correction procedure on the electrode 32, as long as the appearance of the electrode 32 is corrected so that the discharge can be stable, it falls within the scope of protection claimed in this invention. Figure 4 Although diagrams (A) and (B) are schematic diagrams obtained from different perspectives, they are presented in a simplified manner. Figure 4 (A) Only partial structures of each component are shown, and Figure 4 (B) Only the components that are to be specifically described are shown, and Figure 5 The other similar diagrams are presented in roughly the same way, so they will not be described again here. Furthermore, in Figures 4 to 16 In the embodiment shown, the axis of fixture 36 is parallel to the machining travel direction F.

[0128] For example, such as Figure 5As shown in (A) and (B), the correction device 80 of the present invention may, for example, include a tool trimming assembly 82, used to correct the appearance of the electrode 32 during the correction process by means of the relative displacement between the tool trimming assembly 82 and the electrode 32. The tool trimming assembly 82 of the present invention may be, for example, a laser source, a cutting tool, or a grinding piece, and may be, for example, fixedly or movablely mounted on the stage 20 or the base 52, or independently mounted in the electrical discharge machining apparatus 10 (e.g., ...). Figure 6 (As shown in (A) to (C)), however, the present invention is not limited thereto. Any technical means that can change the appearance of electrode 32 is within the scope of protection of the present invention. Moreover, as long as the trimming assembly 82 of the trimming device 80 can trim the appearance of the discharge section B of electrode 32, such as making its wear level uniform or obtaining the desired appearance of electrode 32, then regardless of whether the trimming device 80 of the present invention performs the trimming procedure on the appearance of electrode 32 in real time, at fixed time, at random time, periodically or non-periodically, it is within the scope of protection of the present invention.

[0129] The correction device 80 of the present invention can selectively correct the appearance of the electrode 32 in a quantitative adjustment manner based on the wear rate of the electrode 32 (e.g., theoretical or measured wear rate) and the feed rate of the electrical discharge machining process. The correction device 80 can, for example, correct the appearance of the electrode 32 in a quantitative adjustment manner along the machining travel direction F (e.g., moving the cutting tool assembly 82 relative to the workpiece 100 at a predetermined rate along the machining travel direction F) or in a quantitative adjustment manner along the second direction Y (e.g., moving the electrode 32 relative to the workpiece 100 at a predetermined rate along the second direction Y). Alternatively, the correction device 80 can selectively correct the appearance of the electrode 32 in a dynamic adjustment manner based on the real-time state of the electrode 32. For example, the present invention can also selectively determine the real-time state of the electrode 32, such as the real-time wear level, by means of the detection component 89. Among them, the detection component 89 is, for example, a discharge change detection component or a photoelectric detection component or an image detection component with a light emitter and a light receiver, used to know the degree of wear of the discharge section B of the electrode 32 by means of light interruption or light intensity change.

[0130] Furthermore, the trimmer assembly 82 can optionally be a lifting design, thereby adjusting its height according to the wear rate of the electrode 32 and the feed speed of the electrical discharge machining (EDM) process, ensuring consistent wear across the discharge section B of the electrode 32. For example, assuming the stage 20's moving speed (EDM feed speed) is d lengths per minute, and the theoretical wear rate of the electrode 32 is 0.1d lengths per minute, if the trimmer assembly 82 is mounted on the stage 20, during the EDM process, the trimmer assembly 82 can be attached to the bottom surface of the electrode 32 and, through its lifting design, extend 0.1d lengths per minute towards the electrode 32, ensuring that the discharge section B of the electrode 32 reaches the predetermined wear level throughout the entire EDM process. Similarly, the trimmer assembly 82 can also dynamically adjust its height to the required level based on the real-time wear level and other real-time conditions of the electrode 32, thereby correcting the appearance of the electrode 32 in real time. For example, the knife-refining assembly 82 of the present invention may be designed as a telescopic type to adjust its height, or the knife-refining assembly 82 of the present invention may also be disposed, for example, in the lifting mechanism 90. Figure 6 As shown in (A) to (C), the height can be raised or lowered as needed for the correction procedure, and the feed speed of the tool trimming assembly 82 can be controlled. The lifting mechanism 90 can be, for example, as shown in... Figure 6 (B) and Figure 6 The sliding lifting stage shown in (C) has a slide 93 that can be raised and lowered along the track 91, and the tool trimming assembly 82 is mounted on the slide 93, for example, via a wafer-carrying stage or via a support frame 96. Alternatively, the lifting mechanism 90 may be, for example, as shown in (C). Figure 6 (A) shows a spring-loaded (or telescopic) lifting platform. Furthermore, the lifting mechanism 90 of this invention is not limited to manual or automatic designs; any mechanism capable of lifting the tool trimming assembly 82 falls within the scope of this invention. Additionally, the tool trimming assembly 82 can, for example, be mounted on the lifting mechanism 90 via a translation mechanism 92, such as... Figure 6 (C) refers to a slide 97 that can be translated along the track 95, thereby selectively using the translation mechanism 92 to move the trimmer assembly 82 below the electrode 32 along the track 95 during the correction process, and then moving it out after the correction process is completed. Although the present invention is based on... Figure 6 The structure shown is for illustrative purposes only, but the present invention is not limited thereto. Any design that allows the cutting tool assembly 82 to move relative to the electrode 32 or the electrode 32 to move relative to the cutting tool assembly 82 is within the scope of protection claimed in this invention.

[0131] Taking the trimmer assembly 82 as a laser source or a cutting tool as an example, it can be located, for example, on the bottom or side of the electrode 32. When a relative displacement occurs between the trimmer assembly 82 and the electrode 32, the laser light from the laser source or the cutting edge of the cutting tool can be used to remove part of the thickness at the bottom of the electrode 32, making the appearance of the electrode 32, which originally had inconsistent wear levels, smooth out. Taking the trimmer assembly 82 as a grinding part as an example, it can be located, for example, on the bottom side of the electrode 32. When a relative displacement occurs between the trimmer assembly 82 and the electrode 32, the grinding components of the grinding part can grind away part of the thickness at the bottom of the electrode 32, smoothing out the appearance of the electrode 32, which originally had inconsistent wear levels. Figure 5 (B) and Figure 6 As shown in (A) to (C).

[0132] Furthermore, during the correction process, the correction device 80 may leave residues such as cutting debris on the tool dressing assembly 82 or the electrode 32. Therefore, if... Figure 7 As shown in (A) and (B), the correction device 80 of the present invention selectively includes a chip removal component 83, which may be, for example, a cleaning tool such as a sponge or scraper, or an ultrasonic component, and is disposed, for example, on the stage 20, the base 52, or other components, to abut against the bottom of the electrode 32 and / or the top of the trimming assembly 82. Thus, when the correction device 80 corrects the appearance of the electrode 32 by means of the relative displacement between the trimming assembly 82 and the electrode 32, the chip removal component 83 can simultaneously remove residual chips and other substances on the trimming assembly 82 and / or the electrode 32. The chip removal component 83 is not limited to a fixed or movable design; as long as it can achieve cleaning and removal of residual chips and other substances, it falls within the scope of protection claimed by the present invention. Furthermore, the chip removal component 83 of the present invention may also selectively be an ultrasonic component, and is disposed, for example, on the stage 20, the base 52, or other components. Figure 6 The cutting tool assembly 82, lifting mechanism 90 or translation mechanism 92 shown can improve the cutting tool speed and provide a chip removal effect to reduce the chipping of sandpaper or the adhesion of abrasive chips to the electrode 32.

[0133] In addition, the correction device 80 of the present invention can, for example, move away the region C of the electrode 32 with inconsistent wear levels by displacement, so as to prevent it from being used as the discharge section B. Figure 8 (A) and Figure 8As shown in (B), the correction device 80 of the present invention may optionally include, for example, a rolling mechanism 84. When an area to be corrected appears on the surface of the electrode 32 in the discharge zone B, such as uneven wear or even breakage, the rolling mechanism 84 of the correction device 80 can, for example, roll the electrode 32 with the area to be corrected on its surface clockwise or counterclockwise, or move the electrode 32 with the area to be corrected (region C) to avoid (or offset) the processing target area 110 of the workpiece 100. For example, rolling a broken electrode 32 to the outside of the stabilizing member 22, thereby allowing other normal areas of the electrode 32 to be used as the discharge zone B and blocking interference generated by the broken electrode 32. The present invention may, for example, use a fixture 36 with a holding member 50 and a supporting member 40 having a rolling design as the rolling mechanism 84. The rolling mechanism 84 of the present invention is not limited to manual or automatic design, and the structural design is not limited to the examples mentioned above. As long as it can remove the area of ​​inconsistent wear of the electrode 32 to avoid it from becoming the discharge section B, it falls within the scope of protection claimed by the present invention.

[0134] For example, such as Figure 9 (A) to Figure 9 As shown in (C), during the electrical discharge machining process (i.e., before the completion of the electrical discharge machining process), if the appearance of the lowest electrode 32 in the discharge section B appears as shown in (C), Figure 9 When the fracture phenomenon of (A) occurs, the present invention can selectively move the workpiece 100 to be processed by means of displacement (e.g., move it to the left, such as...). Figure 9 (B) As shown, the broken electrode 32 on the right side is detached (avoids) from the workpiece 100. Next, for example, move to the right to detach (avoid) the broken electrode 32 on the left side from the workpiece 100. At this time, the broken electrode 32 can be selectively attracted or adhered, or even cut off, or simply detached from the workpiece 100. Then, as... Figure 9 As shown in (C), the workpiece 100 is moved to the previous electrical discharge machining (EDM) position, and the remaining unbroken electrodes 32 continue the previously incomplete EDM process on the workpiece 100 until the entire EDM process is completed. Therefore, this invention avoids the need for a complete interruption of the entire EDM apparatus and process in conventional processes, requiring manual adjustment of the electrodes 32 before continuing the incomplete EDM process. Similarly, this invention can also, for example, use the jig 36 (or the rolling mechanism 84 of the correction device 80) to roll the broken electrode 32 to the left and / or right to the outside of the stabilizing member 22, such as... Figure 9 As shown in (C), the workpiece 100 is then subjected to the previously incomplete electrical discharge machining (EDM) process using other unbroken electrodes 32 until the entire EDM process is completed. Figure 9 (A) to Figure 9 In the embodiment shown in (C), the present invention takes the stabilizing member 22 as being located on the stage 20 and, for example, on both sides of the workpiece 100. Therefore, once the electrode 32 is discharged to the outside of the stabilizing member 22, it cannot re-enter the inside of the stabilizing member 22, thus easily removing any broken electrodes 32. Similarly, the present invention is not limited to this; the stabilizing member 22 can also be selectively located on the base 52, or the stabilizing member 22 can be located on both the stage 20 and the base 52, achieving the same effect of removing broken electrodes 32 by displacement.

[0135] In short, the correction device 80 of the present invention can, for example, make the wear level of the discharge segment B of the electrode 32 uniform by removal, thereby providing a stable discharge effect. Alternatively, the correction device 80 of the present invention can, for example, move away the region C of the electrode 32 with inconsistent wear level by displacement, so as to prevent it from becoming the discharge segment B. However, the present invention is not limited to these. The correction device 80 of the present invention can also, for example, combine the above two methods or adopt any feasible method to achieve the effect of correcting the appearance of the electrode 32. In other words, no matter what technical means the correction device 80 uses to correct the electrode 32, as long as it can solve the short circuit problem caused by inconsistent wear level, it falls within the scope of protection claimed by the present invention.

[0136] The corrective device 80 of the present invention may optionally further include at least one clamping component 86 (such as...). Figures 4 to 9 As shown), the clamping assembly 86 is fixedly mounted on the base 52 or other components of the electrical discharge machining apparatus 10 to selectively clamp at least one side, such as both sides, of the discharge section B of the electrode 32. An embodiment of the clamping assembly 86 may be, for example, a vise structure, but is not limited thereto. For example, when the present invention moves the base 52 left and right (along the second direction Y) to synchronously displace the electrode 32 relative to the workpiece 100 via the fixture 36, the clamping assembly 86 can selectively clamp the electrode 32 (e.g., ...). Figure 8 (As shown in (B)) so that the electrode 32 can be used for the electrical discharge machining (EDM) process. The clamping assembly 86 can not only selectively fix the position of the electrode 32, but also prevent the electrode 32 from becoming loose due to being pulled during the EDM process, which would reduce the tension of the electrode 32 and thus adversely affect the EDM process. Similarly, when the fixture 36 needs to roll the electrode 32 (e.g., to perform a correction process or to move the electrode 32 to perform the EDM process), the clamping assembly 86 can release the electrode 32.

[0137] like Figures 5 to 9As shown, in the electrical discharge machining process, the discharge section B of electrode 32 moves along the machining travel direction F to apply discharge energy to the machining target area 110 of the workpiece 100. Moreover, the discharge section B of electrode 32 and the machining target area 110 of workpiece 100 move relative to each other along the second direction Y. Therefore, in order to avoid the vibration phenomenon generated by electrode 32 during the electrical discharge machining process, the electrical discharge machining apparatus 10 of the present invention selectively has a stabilizing member 22 disposed on the base 52 or on other components of the electrical discharge machining apparatus 10, such as the stage 20. The stabilizing member 22 is disposed, for example, on at least one side or the outside of the discharge section B of electrode 32. The type of stabilizing member 22 is not particularly limited. As long as it can reduce the vibration of electrode 32, it can be applied to the present invention. For example, the stabilizing member 22 may have guide grooves 281, the dimensions of which, such as depth or width, are sufficient to movably accommodate the electrode 32. The number of guide grooves 281 corresponds to the number of electrodes 32, thereby maintaining the distance between the electrodes 32, reducing swaying along the first direction X, effectively stabilizing the electrodes 32 and providing a guiding effect. In addition, the stabilizing member 22 may also be optionally designed with a highly telescopic structure, thereby changing the height of the guide grooves 281 in contact with the electrode 32 according to the depth of the processing grooves in the processing target area 110 of the workpiece 100. The strip-like structure between two adjacent guide grooves 281 of the stabilizing member 22 can be used as a separator to separate multiple electrodes 32 and make them parallel to each other. The electrode 32 abuts against the separator, for example, the electrode 32 movably abuts against the separator. The position of the separator is fixed, but it can be a fixed or rolling design, and it has a limiting groove to serve as a guide post. The separator can also be selectively made of a conductive material, through which the electrode 32 can be electrically connected to the power supply unit 34, that is, the separator can also be selectively used as... Figure 1 The electrical contact 31 is used. Furthermore, the separator can also be made of insulating material to prevent electrical connection between the electrodes 32. The two supporting members 40 rotate synchronously or cyclically at the same speed, so the electrodes 32 will also move at the same speed along the second direction Y.

[0138] like Figure 10 (A) Figure 10 (B) Figure 11 (A) and Figure 11As shown in (B), the correction device 80 of the present invention may optionally further include at least one slitting assembly 85, for example, disposed on the base 52 or at any position in the electrical discharge machining apparatus. By means of the relative movement between the slitting assembly 85 and the plate-shaped electrode 32, the electrode 32 (e.g., plate-shaped) can be cut into a plurality of parallel electrode strips 32' (e.g., strip-shaped). The slitting assembly 85 is, for example, a vise clamp with multiple cutting edges, but is not limited thereto. For example, if the cutting edges of the vise clamp the plate-shaped electrode 32, then when relative movement occurs between the slitting assembly 85 and the plate-shaped electrode 32 along the second direction Y (e.g., the position of the slitting assembly 85 is fixed, and the electrode 32 is moved horizontally relative to the slitting assembly 85 in the second direction Y by means of the jig 36), the wider plate-shaped electrode 32 will be cut into a plurality of narrower electrode strips 32'. Since the distance between adjacent cutting edges is equal to the width of the electrode strip 32'. Therefore, the present invention can also change the distance or number of the multiple blades of the vise clamping blade to adjust the width or number of electrode strips 32'. Furthermore, if the present invention uses a method of rolling the electrode 32 to enable the slitting assembly 85 to perform a slitting process on the electrode 32, since the fixture 36 requires rolling the electrode 32, the clamping assembly 86 of the present invention can selectively and temporarily release the electrode 32 during the slitting process of the slitting assembly 85. Similarly, if the present invention uses a method of moving the slitting assembly 85 to perform a slitting process on the electrode 32 in a fixed position, then the clamping assembly 86 of the present invention can selectively clamp the electrode 32 during the slitting process of the slitting assembly 85 to prevent the electrode 32 from rolling.

[0139] like Figure 12As shown in (A) and 12(B), the correction device 80 of the present invention may selectively include at least one straightening assembly 87, for example, disposed on the base 52 or at any position of the electrical discharge machining apparatus 10. The straightening assembly 87 contacts the electrode 32. By means of the relative movement between the straightening assembly 87 and the electrode 32, the discharge section B of the strip-shaped or plate-shaped electrode 32 can be straightened into a straight or vertical shape. If there are multiple electrodes 32, the straightening assembly 87 can straighten the electrodes 32 into a state of parallelism. The straightening assembly 87 may, for example, have multiple comb teeth, and two adjacent comb teeth respectively abut against both sides of each electrode 32. The straightening assembly 87 may, for example, be a movable design, for example, moving from one side of the discharge section B to the other side (along the second direction Y), but is not limited thereto. Furthermore, if the present invention performs a cutting process on the fixed electrode 32 by moving the cutting assembly 87, the clamping assembly 86 of the present invention can selectively clamp the electrode 32 during the cutting process to prevent the electrode 32 from becoming loose. Similarly, if the present invention uses a rolling electrode 32 to perform a cutting process on the electrode 32 by the cutting assembly 87, since the fixture 36 requires rolling the electrode 32, the clamping assembly 86 of the present invention can selectively temporarily release the electrode 32 during the cutting process. The comb teeth of the cutting assembly 87 can be used as separators to separate multiple electrodes 32 and make them parallel to each other.

[0140] like Figure 13 As shown in (A) and 13(B), the correction device 80 of the present invention may optionally further include an orientation correction component 88, used to adjust the relative orientation of the electrode 32 and the workpiece 100 according to the deviation phenomenon when the machining travel direction F of the electrode 32 is skewed or otherwise deviated, so as to correct the machining travel direction F of the electrode 32 and the workpiece 100. For example, the orientation correction component 88 may be a telescopic push rod (e.g., a manual or electric telescopic push rod), which can achieve the effect of adjusting the relative orientation of the electrode 32 and the workpiece 100, for example, along the first direction X, by pushing the stage 20, the electrode 32, or other components in the electrical discharge machining apparatus that can change the relative orientation of the electrode 32 or the workpiece 100. For example, the present invention can determine whether the machining travel direction F of the electrode 32 has deviated by means of a detection component 89. Among them, the detection component 89 is, for example, a discharge change detection component or a photoelectric detection component or an image detection component with a light emitter and a light receiver, used to know whether the processing direction F of the electrode 32 has shifted by means of light interruption or light intensity change.

[0141] In addition, in this invention, the technical means by which the jig 36 reciprocates or cyclically rolls the electrode 32 can be adopted as follows: Figure 14 and Figure 15As shown, the electrode 32 may, for example, surround (cross over both sides) the two fixtures 36 or cross over the two fixtures 36 on only one side. The two fixtures 36 are rotatably mounted on the base 52, and the two fixtures 36 are connected to two motors 58, for example, via two couplings 55, so that the two fixtures 36 can rotate correspondingly by the operation of the two motors 58, and the electrode 32 can reciprocate or circulate along the second direction Y. Since the discharge section B of the electrode 32 is suspended, the present invention selectively includes a tension control module 66 (e.g., Figure 15 As shown, it includes, for example, a tension measuring unit 60 and a controller 68. The tension measuring unit 60 is used to measure the tension value of the electrode 32. The controller 68 is electrically connected to two motors 58, thereby controlling the two motors 58 according to the tension value of the electrode 32, so that the two motors 58 rotate at the same speed, thereby adjusting the tension value of the electrode 32, so that the electrode 32 maintains a specified tension value when moving along the second direction Y. In addition, the present invention can also calculate, for example, the time for the two motors 58 to exchange their rotation directions based on the length and moving speed of the electrode 32, thereby achieving the effect of reciprocating movement of the electrode 32.

[0142] It should be noted that although the present invention lists multiple components to perform one or more functions, the present invention is not limited thereto. The present invention can selectively cause a single component to perform multiple functions, for example, by integrating the stabilizing component 22 and the tool-aligning assembly 87 into a single component, or by integrating one or more of the stabilizing component 22, the tool-aligning assembly 87, the clamping assembly 86, the chip removal assembly 83, and other components of the electrical discharge machining apparatus 10 into a single component. Similarly, the present invention is not limited to selecting all of the above-mentioned components; the electrical discharge machining apparatus of the present invention can also select only some of the above-mentioned components to perform the electrical discharge machining process.

[0143] In the above embodiments, the electrical discharge machining unit 30 of the present invention may optionally include a slag removal unit. For example, such as Figure 16In the embodiments shown in (A) and (B), the electrical discharge machining unit 30 of the present invention may optionally include a slag removal unit 64. When the electrical discharge machining unit 30 performs an electrical discharge machining process on the workpiece 100, the slag removal unit 64 provides one or more external forces to remove the residue generated by the electrode 32 applying discharge energy to the workpiece 100. The direction or position of the external force generated by the slag removal unit 64 corresponds to the discharge section B of the electrode 32. The slag removal unit 64 may be, for example, an airflow generator, a waterflow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating component. The external force may be, for example, airflow, waterflow, ultrasonic oscillation, piezoelectric oscillation, attraction, or magnetism. The slag removal unit 64 is not limited to being disposed on the stage 20, but may even be disposed around the discharge section B of the electrode 32. Taking the slag removal unit 64 as an ultrasonic generator or piezoelectric oscillator as an example, the slag removal unit 64 can be, for example, mounted on the fixture 36 or the stage 20. By directly generating external force that acts directly on the fixture 36 or the stage 20, the external force generated by the slag removal unit 64 can also, for example, cause the fixture 36, the workpiece 100, or the electrode 32 to vibrate, and, for example, vibrate simultaneously, thus providing an auxiliary effect in removing residue. Furthermore, as... Figure 16 As shown in (B), the slag removal unit 64 of the present invention can also selectively adjust the direction and / or position of the applied external force according to the shape of the workpiece 100 to remove the residue generated by the discharge energy applied to the workpiece 100 by the electrode 32. For example, taking the slag removal unit 64 as a water flow generator that can spray water to remove residue as an example, the slag removal unit 64 is, for example, a nozzle 65 with multiple movable positions, and the direction of water spray can be adjusted according to the shape of the workpiece 100. For example, if the workpiece 100 is a crystal ingot, the multiple nozzles 65 of the slag removal unit 64 are distributed on the arc surface of the crystal ingot, and are selectively distributed on both sides of the arc surface of the crystal ingot. Furthermore, the multiple nozzles 65 of the slag removal unit 64 can also, for example, selectively adjust the shape of the arc or the position of the nozzle according to the real-time depth position of the discharge machining, thereby achieving the effect of dynamically adjusting the water spray according to the shape of the workpiece 100. Similarly, this slag removal unit 64 can also be used as the aforementioned chip removal component. Although the above description only uses the slag removal unit 64 as a water flow generator as an example, those skilled in the art should understand how to modify any feasible slag removal unit 64 to achieve the effect of dynamically adjusting the water spray design of this invention or to achieve the effect of dynamically spraying water according to the shape of the workpiece 100. Therefore, it will not be elaborated further here. Among them, in Figure 16In the embodiments shown in (A) and (B), the support member 40 includes a first sheet 44a and a second sheet 44b, respectively, and the electrode 32 is clamped between the first sheet 44a and the second sheet 44b, thereby allowing the plurality of electrodes 32 to be parallel to each other in the processing travel direction F so as to perform an electrical discharge machining process on the workpiece 100. For example, the support member 40 may optionally have a slot 43, which allows the support member 40 to be fitted onto the protrusion 53 of the holding member 50. Since the electrode 32 is clamped on the fixture 36, the present invention achieves the effect of quickly replacing the electrode 32 by means of the quick-release design of the fixture 36.

[0144] In this invention, the surface selectivity of the bearing member 40 is, for example, having a plurality of limiting grooves 42 (e.g. Figure 2 As shown, electrodes 32 are confined within limiting grooves 42. Electrodes 32 in different limiting grooves 42 can be electrically independent or sequentially connected and electrically interconnected. The number of electrodes 32 in different limiting grooves 42 is not limited to being the same; that is, the number of electrodes 32 in different limiting grooves 42 can also be different. The limiting grooves 42 are arranged parallel to each other along the first direction X with the aforementioned spacing D, thereby ensuring that the electrodes 32 are arranged parallel to each other along the first direction X. The width of the limiting groove 42 corresponds to the width of the electrode 32; for example, the width of the limiting groove 42 is slightly larger than the width of the electrode 32, thereby ensuring that the electrode 32 is confined within the limiting groove 42. The retaining member 50 can be selectively detachably or fixedly and securely connected to the bearing member 40. The connection configuration between the bearing member 40 and the retaining member 50 is not particularly limited, as long as it allows the bearing member 40 to be connected to the retaining member 50, or allows the bearing member 40 to selectively move or rotate via the movement or rotation of the retaining member 50, it is suitable for use in this invention. The bearing member 40 is, for example, a cylindrical shape with a shaft hole 41 (e.g.,...). Figure 2 (As shown) or other shaped sleeves, the support member 40 can be fitted onto the protrusion 51 of the retaining member 50 via the shaft hole 41. Furthermore, to reduce the time required to replace the electrode 32 in case of accidental breakage, the present invention can, for example, first fit the shaft hole 41 of the support member 40 onto a dummy support member also having protrusions. This allows the user to quickly remove the support member 40, which surrounds the electrode 32, from the dummy support member, and fit the shaft hole 41 of the support member 40 onto the protrusion 51 of the retaining member 50, or insert the protrusion 51 of the retaining member 50 into the shaft hole 41 of the support member 40, thus quickly completing the assembly of the jig 36. However, the jig 36 of the present invention is not limited to this; any structural design of the jig 36 that can support the electrode 32 so that the electrode 32 can be subjected to electrical discharge machining is within the scope of protection claimed in this invention.

[0145] In summary, the electrical discharge machining apparatus of the present invention has one or more advantages or technical effects:

[0146] (1) The correction device can correct the appearance of the electrode by means of the relative displacement between the tool dressing assembly and the electrode, so as to prevent short circuit problems in the electrical discharge machining process.

[0147] (2) The correction device can avoid the processing target area of ​​the workpiece by rolling or moving the electrode to prevent short circuit problems in the electrical discharge machining process.

[0148] (3) The chip removal assembly can remove residual chips and other materials on the cutting assembly and / or electrode by means of the relative displacement between the cutting assembly and the electrode. The slag removal unit can provide external force to one or more machining target areas to help remove the residue generated by the electrical discharge machining process or correction process.

[0149] (4) The slitting assembly can cut the discharge section of the electrode into several electrode strips by means of the relative displacement between the cutting assembly and the electrode, thereby avoiding the problem of uneven wear of plate electrodes.

[0150] (5) The orientation correction component can correct the machining direction of the electrode and the workpiece, thereby avoiding deviation of the machining direction.

[0151] (6) The clamping assembly can clamp the electrode to prevent the electrode from changing the processing direction due to being pulled.

[0152] (7) The cutting tool assembly can keep multiple electrodes parallel, which can avoid unevenness such as skewing on the surface of the workpiece after electrical discharge machining.

[0153] (8) The stabilizing component can reduce electrode jitter, provide guidance as a separator, and can be used as an electrical contact.

[0154] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this invention should be included in the appended claims.

Claims

1. An electrical discharge machining apparatus, characterized in that, At least include: A platform for holding at least one workpiece to be processed; A discharge machining unit includes at least one electrode and a power supply unit for performing a discharge machining process on at least one processing target area of ​​a workpiece on a platform along a machining travel direction using the electrode, wherein the electrode is suspended in a discharge section, and the power supply unit provides a first power supply to the electrode and the workpiece during the discharge machining process to apply a discharge energy to the processing target area of ​​the workpiece via the electrode located in the discharge section. as well as A correction device for performing a correction procedure on an area of ​​an electrode to be corrected to correct the appearance of the electrode, wherein the correction device includes a cutting tool assembly that generates a relative displacement between the cutting tool assembly and the electrode in the correction procedure to correct the appearance of the electrode, wherein the cutting tool assembly is a laser source, a cutting tool or a grinding element.

2. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device performs a correction procedure on the electrode while the electrode is performing the electrical discharge machining procedure on the target area.

3. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device performs the correction procedure on the electrode before or after the electrode performs the electrical discharge machining procedure on the target area.

4. The electrical discharge machining apparatus as described in claim 1, 2, or 3, characterized in that, The correction device adjusts the appearance of the electrode by a certain amount based on the wear rate of one of the electrodes and the feed rate of one of the electrical discharge machining processes.

5. The electrical discharge machining apparatus as described in claim 1, 2, or 3, characterized in that, The correction device corrects the appearance of the electrode in a dynamic adjustment manner based on the real-time state of one of the electrodes.

6. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device includes a lifting mechanism and / or a translation mechanism for setting the cutting tool assembly, so that the cutting tool assembly moves to a position and generates the relative displacement with the electrode.

7. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device also includes a chip removal component, used to remove chips generated during the correction process of the electrode.

8. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device includes a rolling mechanism for rolling the electrode during the correction process, so that the area of ​​the electrode to be corrected avoids the processing target area of ​​the workpiece, thereby correcting the appearance of the electrode.

9. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device also includes a slitting assembly for dividing the electrode in the discharge section into a plurality of parallel electrode strips.

10. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit further includes a clamping component for clamping at least one side of the discharge segment of the electrode when the electrode is subjected to the electrical discharge machining process, and for releasing at least one side of the discharge segment of the electrode when the correction device is subjected to the correction process.

11. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides at least one external force to remove the residue generated when the electrode applies the discharge energy to the workpiece.

12. The electrical discharge machining apparatus as described in claim 11, characterized in that, The slag removal unit adjusts the direction or position of the applied external force according to the shape of the workpiece to remove the residue.

13. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit also includes: A fixture is provided, which is composed of at least two bearing members and at least two holding members respectively connected in a corresponding manner. The two holding members are provided on two bases, which are moving or rotating mechanisms, so that when the electrical discharge machining unit performs the electrical discharge machining procedure along the machining travel direction, the discharge section of the electrode and the machining target area of ​​the workpiece move reciprocally or cyclically relative to each other.

14. The electrical discharge machining apparatus as described in claim 13, characterized in that, The electrode is arranged in a ring-shaped manner against the two supporting members, or the two sides of the electrode are respectively against the two supporting members, so that the electrode is in a suspended state in the discharge section.

15. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device also includes an orientation correction component, which adjusts the relative orientation of the electrode and the workpiece to correct the processing direction based on a deviation in the processing direction of the electrode.

16. The electrical discharge machining apparatus as described in claim 1, characterized in that, The correction device moves the electrode that appears as the area to be corrected on the surface, so that the area to be corrected avoids the processing target area of ​​the workpiece. The area to be corrected is a fracture phenomenon or a fracture indication.

17. The electrical discharge machining apparatus according to any one of claims 1-3 and 6-15, characterized in that, The number of electrodes is multiple, and the multiple electrodes are arranged parallel to each other in the discharge section along a first direction and / or a third direction, wherein the third direction is perpendicular to the first direction.

18. The electrical discharge machining apparatus as described in claim 17, characterized in that, The correction device also includes a blade assembly that separates the plurality of electrodes so that the plurality of electrodes remain parallel to each other in the discharge section.

19. The electrical discharge machining apparatus as described in claim 17, characterized in that, The electrical discharge machining unit also includes a partition column, and the plurality of electrodes abut against the partition column so that the plurality of electrodes are parallel to each other in the discharge section.

20. The electrical discharge machining apparatus as described in claim 17, characterized in that, It also includes a stabilizing member having a plurality of guide grooves that movably accommodate the plurality of electrodes for stabilizing and guiding the plurality of electrodes so that the plurality of electrodes perform the electrical discharge machining process along the machining travel direction.

21. The electrical discharge machining apparatus as described in claim 17, characterized in that, The correction device moves at least one of the plurality of electrodes that has the area to be corrected on its appearance, so that the area to be corrected avoids the processing target area of ​​the workpiece. The area to be corrected is a fracture phenomenon or a fracture indication.

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