Wet process processing apparatus and spin carrier therefor
By setting sensors and controllers on the rotating carrier to adjust the fluid pressure of the injection device, the problem of inconsistent rotation speed of the rotating carrier is solved, achieving precise control of the rotation speed and uniform distribution of the liquid, thus improving the processing effect of the wet process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- AMPOC FAR EAST CO LTD
- Filing Date
- 2022-06-24
- Publication Date
- 2026-04-24
AI Technical Summary
In wet processing, existing rotary carriers suffer from inconsistent rotation speeds due to design or assembly tolerances, which affects the action time of the chemical solution and causes uneven distribution or residue problems.
By installing sensors on the rotating vehicle, the sensor components and controller calculate the speed difference, adjust the fluid pressure of the injection device to control the speed to the set value, and ensure the speed consistency of each rotating vehicle.
It achieves precise control of the rotation speed of the rotating carrier, avoids uneven action time of the liquid, and improves the processing quality and efficiency of the wet process.
Smart Images

Figure CN117320278B_ABST
Abstract
Citation Information
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