Substrate container

Abstract

This invention discloses a substrate container, comprising: at least one support member for a substrate, the support member having a plurality of ribs spaced apart from each other, the plurality of ribs being used to form a plurality of grooves on the substrate and a bearing surface. Each of the plurality of ribs has a front end and a rear end. The rear ends of two adjacent ribs are connected by a closing portion, thereby closing the grooves defined by the two adjacent ribs at the rear end. The closing portion has a concave surface. The concave surface and the bearing surface define a clamping position for restricting the substrate. The substrate container of this invention can significantly reduce particles generated when the substrate and the substrate container collide with each other, reducing the risk of contamination of large-size substrate containers, while also greatly improving the support stability of the substrate container, making it more robust.

Description

Technical Field

[0001] This invention relates to the field of semiconductor substrate containers, and more particularly to a substrate container having a support and a tray. Background Technology

[0002] As the size of semiconductor substrates (such as wafers) increases, the density of circuits formed on the substrate also increases, and such circuits are more susceptible to defects due to particles and other contaminants. Furthermore, with the increase in substrate size, both substrate weight and substrate container size increase relatively. Therefore, the probability of particle generation due to collisions between the substrate and container increases. As substrate size and weight increase, the support stability of the substrate container must also be correspondingly strengthened. To reduce the contamination risk of large-size substrate containers, it is necessary to improve the substrate container design.

[0003] Furthermore, the excessive friction area between the existing substrate container and the carrier interface of the stage equipment results in excessive adhesion between the substrate container and the carrier interface, which affects the smoothness of loading and unloading the substrate container. Therefore, if the existing stage equipment design cannot be modified, it is necessary to improve the substrate container. Summary of the Invention

[0004] The purpose of this invention is to provide a substrate container. The improved substrate container can significantly reduce the particles generated when the substrate and the container collide with each other, reduce the risk of contamination of large-size substrate containers, and at the same time greatly improve the support stability of the substrate container, making it more stable.

[0005] The present invention provides a substrate container, comprising: a housing having a side wall; and at least one support member connected to the side wall of the housing. The support member has a plurality of ribs spaced apart from each other, the plurality of ribs defining a plurality of grooves for receiving a substrate and a bearing surface. Each of the plurality of ribs has a front end and a rear end. The rear ends of two adjacent ribs are connected to a closure portion, which allows the grooves formed by the two adjacent ribs to be closed at the rear end. The closure portion has a concave surface, and the concave surface and the bearing surface define a clamping position for restricting the substrate.

[0006] In one embodiment, the clamping position causes the concave surface to restrict at least one upper edge of the substrate, and the bearing surface supports the bottom of the substrate for fixed support.

[0007] In one specific embodiment, the clamping position causes the concave surface to limit the upper and lower surfaces of the substrate, and the bearing surface supports the bottom of the substrate to fix and support the substrate.

[0008] In one specific embodiment, the concave surface is formed by connecting a first inclined surface and a second inclined surface, and the first inclined surface and the second inclined surface define a concave angle.

[0009] In one specific embodiment, the two adjacent ribs are an upper rib and a lower rib, and the bottom of the upper rib, the top of the lower rib, and the concave surface constitute the groove.

[0010] In one specific embodiment, the bottom of the upper convex rib has a guide slope, which connects to the first slope of the concave surface of the closure portion.

[0011] The present invention also provides a substrate container, comprising: a housing; and a tray detachably connected to the bottom of the housing, allowing the housing to be placed on a support interface of a stage device via the tray. The tray has a top, a bottom, and a guide opening. A guide surface is provided on the top of the tray, adjacent to the guide opening, for receiving a restraining mechanism from the support interface. The guide surface is formed with a textured structure to reduce friction between the guide surface and the restraining mechanism.

[0012] In one specific embodiment, the guide opening is a rectangular guide opening that extends through the top and bottom of the tray, and the top of the tray has a flange extending along the four sides of the guide opening, the flange including the guide surface.

[0013] In one specific embodiment, the guide mask has a bevel that is disposed adjacent to one edge of the guide opening.

[0014] In one specific embodiment, the tray also has three positioning slots, which are symmetrically arranged on the bottom of the tray, and the guide opening is located between two of the symmetrical positioning slots.

[0015] Compared with the prior art, the technical solution of the present invention has the following characteristics and advantages:

[0016] The improved substrate container significantly reduces particles generated during collisions between the substrate and the container, lowering the risk of contamination for large-size substrate containers. Simultaneously, the support stability of the substrate container is greatly improved, making it more robust. Furthermore, improvements to the guide surface of the substrate container reduce friction between the substrate container and the load-bearing interface, enhancing the smoothness of loading and unloading the substrate container. Attached Figure Description

[0017] Figure 1 This is a perspective view of an embodiment of the substrate container of the present invention.

[0018] Figure 2 This is an exploded view of an embodiment of the substrate container of the present invention.

[0019] Figure 3A This is a front view of the support member of the substrate container of the present invention.

[0020] Figure 3B This is a rear view of the support member of the substrate container of the present invention.

[0021] Figure 4A This is a top view of the support member of the substrate container of the present invention.

[0022] Figure 4B This is a left-side view of the support member of the substrate container of the present invention.

[0023] Figure 4C This is a right-side view of the support member of the substrate container of the present invention.

[0024] Figure 5A This is a partially enlarged view of the support member of the substrate container of the present invention.

[0025] Figure 5B This is a cross-sectional view of the support member of the substrate container of the present invention.

[0026] Figure 5C This is another partially enlarged view of the support member of the substrate container of the present invention.

[0027] Figure 5D This is another cross-sectional view of the support member of the substrate container of the present invention.

[0028] Figure 6 This is a perspective view of another embodiment of the substrate container of the present invention.

[0029] Figure 7 This is an exploded view of another embodiment of the substrate container of the present invention.

[0030] Figure 8 This is a perspective view of the tray of the substrate container of the present invention.

[0031] Figure 9A This is a top view of the tray of the substrate container of the present invention.

[0032] Figure 9B This is a bottom view of the tray of the substrate container of the present invention.

[0033] Figure 10A This is a cross-sectional view of the substrate container according to line AA of the present invention.

[0034] Figure 10B This is a partial enlarged view of the substrate container according to the AA line of the present invention.

[0035] Figure 11A This is a first embodiment of the textured structure of the substrate container of the present invention.

[0036] Figure 11B This is a second embodiment of the textured structure of the substrate container of the present invention.

[0037] Figure 12A This is a pattern representing an embodiment of the texture structure of the substrate container of the present invention.

[0038] Figure 12B This is a pattern representing another embodiment of the textured structure of the substrate container of the present invention.

[0039] Explanation of icon numbers:

[0040] 1. Substrate container; 11. Shell;

[0041] 12. Opening;

[0042] 13. Support component; 131. Continuous wall; 132. Recess; 1321. Enclosed part; 133. Protruding rib; 1331. Guide ramp; 1332. Descending ramp; 1333. Plane; 1334. Protrusion; 135. Top; 136. Bottom; 137. Positioning component;

[0043] 14. Pallet;

[0044] 5. Groove; 50. Concave surface; 51. First inclined surface; 52. Second inclined surface; 53. Concave peak; 54. Low-lying area; 55. Valley peak;

[0045] 81. Round hole; 82. Round hole; 83. Positioning groove; 84. Guide port; 85. Guide surface; 851. Inclined surface; 85A. Guide surface; 85B. Guide surface;

[0046] 9. Restricted institutions;

[0047] 100A, narrow and elongated pattern; 100B, circular pattern;

[0048] θ1, concave angle; θ2, low-lying angle. Detailed Implementation

[0049] The invention will now be described more fully with reference to the accompanying drawings, and specific embodiments of particular examples will be shown by way of illustration. However, the inventive claims can be embodied in many different forms, and therefore the structure covered or claimed in this application is not limited to any specific embodiment of the examples disclosed in this specification; the specific embodiments shown are merely illustrative. Similarly, the invention aims to provide a reasonably broad scope for the inventive claims or coverage. In addition, methods, apparatus, or systems, for example, can be embodied in the inventive claims.

[0050] The term "one embodiment" as used in this specification does not necessarily refer to the same specific embodiment, and the term "other (some / certain) embodiments" as used in this specification does not necessarily refer to different specific embodiments. The purpose is that, for example, the claimed invention includes a combination of all or some of the specific embodiments of the examples.

[0051] As described in the background section, as the substrate size increases, so does the substrate weight. The stability of the substrate container needs to be enhanced to accommodate these substrates.

[0052] Figure 1 A perspective view showing an embodiment of the substrate container 1 of the present invention. Figure 2 An exploded view of an embodiment of the substrate container 1 of the present invention is shown.

[0053] like Figures 1 to 2 As shown, the substrate container 1 includes a housing 11 and a door (not shown) that can be attached to the housing 11. The housing 11 is essentially composed of a ceiling, a bottom, a pair of side walls, and a rear wall, forming an internal receiving space for loading multiple internal components and multiple substrates. The ceiling, bottom, and side walls of the housing 11 define an opening 12 at the front end, which allows a robotic arm to enter and exit the receiving space from the front end for accessing substrates. The substrate container 1 includes a pair of supports 13 detachably connected to the inner side of the side walls for providing multiple slots for loading multiple substrates.

[0054] Apart from Figure 1 and Figure 2 In addition to the components shown, the substrate container 1 also includes other components. For example, a coupling structure for use with an overhead crane (OHT) system can be provided at the top, a gas diffusion tower for supplying gas to the containment space can be assembled at the bottom, and an evacuation channel can be provided near the opening 12 for evacuation. One or more air intake and evacuation modules can be installed at the bottom, respectively connecting the gas diffusion tower and the evacuation channel. Furthermore, the door may have a locking mechanism for engaging with a hole near the opening 12 to attach the door to the housing 11.

[0055] Figure 3A and Figure 3B These are the front and rear views of the support member 13, specifically referring to... Figure 2 Support member 13 on the left side. Figure 4A , Figure 4B and Figure 4C The figures shown are a top view, a left side view, and a right side view of the support member 13. The support member 13 essentially comprises a continuous wall 131, which is substantially shaped according to the shape of the sidewalls of the housing 11, and the slightly curved continuous wall, such as... Figure 3AAs shown, the outer surface of the continuous wall 131 can fit as closely as possible to the side wall of the housing 11. The continuous wall 131 has a height extending between the top and bottom of the housing 11 and a length extending between the rear side and the opening 12. The continuous wall 131 has a top 135 and a bottom 136 as the upper and lower boundaries of the support member 13. A plurality of ribs 133 are a continuous structure and extend horizontally between the top and bottom of the continuous wall 131. The plurality of ribs 133 are separated at a predetermined interval and are provided on the inner surface of the continuous wall 131. In addition, the support member 13 is further provided with a plurality of positioning members 137 at the top 135 and the bottom 136 respectively, for restricting and fixing the support member 13 to the side wall of the housing 11. The support member 13 can be integrally formed or assembled from multiple parts.

[0056] Figures 5A to 5D These are enlarged views of a portion of the support member 13, specifically referring to... Figure 2 The support member 13 is located on the right side. One end of each of these protruding ribs 133 is connected to each other and closed, while the other end is unconnected and open. A groove 5 and a bearing surface are defined between two adjacent protruding ribs 133 for correspondingly mounting a single substrate. Adjacent protruding ribs 133 are spaced appropriately so that the substrate can enter and exit the groove 5 from the open ends of the adjacent protruding ribs 133. The bearing surface refers to the top structure of the lower protruding rib 133 among the two adjacent protruding ribs 133, which supports the bottom of the substrate.

[0057] Figure 5B The display shows continuous closures 1321, each closure 1321 connecting the ends of two adjacent protruding ribs 133, thereby closing the end of the groove 5. The edge of the substrate placed in the groove 5 is confined between the closure 1321 and the two adjacent protruding ribs 133. (See attached image) Figure 5C As shown, the closed portion 1321 has a concave surface 50, which is composed of a first inclined surface 51 and a second inclined surface 52, wherein the first inclined surface 51 is connected to a guide inclined surface 1331 at the bottom of the upper convex rib 133, and the second inclined surface 52 is connected to a descending inclined surface 1332 at the top of the lower convex rib 133.

[0058] like Figure 5CAs shown, the concave surface 50 formed by the first inclined surface 51 and the second inclined surface 52 has a concave peak 53, which is approximately the bearing surface of the top of the upper convex rib 133 and the lower convex rib 133, i.e., a bump 1334 formed on a plane 1333, and is of equal height (as shown by the dashed line). This bump allows the side edges (including the edges and upper and lower surfaces) of the substrate to abut against the concave peak 53 of the concave surface 50 and be restricted and clamped by the first inclined surface 51 and the second inclined surface 52. At the same time, the bump 1334 on the bearing surface supports the bottom of the substrate. In other embodiments, the position of the concave peak 53 is slightly lower than the position of the plane 1333 or the bump 1334, so that when the edge of the substrate abuts against the concave surface 50, the upper edge of the substrate is restricted by the first inclined surface 51, and the bump 1334 on the bearing surface supports the bottom of the substrate, so that the substrate is in a state of being fixed and supported by the interaction of the first inclined surface 51 and the bump 1334 on the plane 1333. In some embodiments, the bump 1334 may be omitted. The advantage of having the concave peak 53 at the same height as the plane 1333 or the bump 1334 is that the edge of the substrate can be kept as horizontal as possible while being clamped by the first inclined surface 51 and the second inclined surface 52; otherwise, the bottom of the substrate may be suspended in the air because it is not in contact with the plane 1333.

[0059] The guiding slope 1331 of the upper convex rib 133 guides the edge of the substrate toward the concave surface 50, while the descending slope 1332 of the lower convex rib 133 and the second slope 52 form a depression 54 to reduce the probability of the lower edge of the substrate being impacted during movement. (See also...) Figure 5C As shown, the depression 54 formed by the descending slope 1332 and the second slope 52 has a valley peak 55, which is lower than the concave peak 53 of the concave surface 50, that is, the valley peak 55 is lower than the top plane 1333 of the lower convex rib 133. In this embodiment, the first slope 51 and the second slope 52 form a concave angle θ1, while the second slope 52 and the descending slope 1332 form a depression angle θ2, and the depression angle θ2 is greater than the concave angle θ1. Of course, the present invention is not limited thereto. In other possible embodiments, the first slope 51, the second slope 52, the guiding slope 1331 and the descending slope 1332 may be curved surfaces, so that the values ​​of the concave angle θ1 and the depression angle θ2 cannot be clearly defined, but the valley peak 55 of the depression 54 should still be lower than the concave peak 53 of the concave surface 50 to avoid the generation of particles due to impact at the lower edge of the substrate.

[0060] A first inclined surface 51 connects to a guide inclined surface 1331 at the bottom of the upper convex rib 133, and a second inclined surface 52 connects to a descending inclined surface 1332 at the top of the lower convex rib 133, defining a clamping range. Figure 5DThe outer surface of the continuous wall 131 shown has a plurality of recesses 132, each recess 132 being positioned within a clamping range. The purpose of this structure is to ensure that the wall thickness of the continuous wall 131 is consistent, so as to maintain the original characteristic of multiple ribs 133 supporting the weight of the substrate.

[0061] Figure 6 A perspective view showing another embodiment of the substrate container 1 of the present invention is shown. Figure 7 An exploded view of another embodiment of the substrate container 1 of the present invention is shown.

[0062] The substrate container 1 includes a housing 11 and a door (not shown) that can be attached to the housing 11. The housing 11 is essentially composed of a top, a bottom, a pair of sidewalls, and a rear wall, forming an accommodating space for mounting multiple internal components and multiple substrates. The top, bottom, and sidewalls of the housing 11 form an opening 12 at the front end, which allows a robotic arm to enter and exit the accommodating space from the front end to access the substrates. The substrate container 1 also includes a tray 14, which is detachably attached to the outer side of the bottom as a base for the substrate container 1.

[0063] Figure 8 This is a three-dimensional view of tray 14. Figure 9A and Figure 9B These are top and bottom views of tray 14. Tray 14 is essentially a plate, with its top mainly consisting of a configuration for connecting to the bottom of substrate container 1, and its bottom mainly consisting of a configuration for connecting to a loading apparatus. For example, the rear end of tray 14 has two circular holes 81 for connecting to an air inlet module (not shown), and the front end has two circular holes 82 for connecting to an air extraction module (not shown). The gas supply nozzle and air extraction port on the loading apparatus can be connected to the air inlet module and air extraction module at the bottom of the substrate container through the circular holes 81 at the rear end and the circular holes 82 at the front end, respectively, to achieve gas operation.

[0064] like Figure 9B As shown, the bottom surface of the tray 14 includes three positioning grooves 83, symmetrically distributed on the bottom surface of the tray 14. One positioning groove 83 is close to the rear circular hole 81, and the other two positioning grooves 83 are close to the front circular hole 82. The loading interface of the equipment platform has multiple positioning pins, which cooperate with these positioning grooves 83 to position the substrate container 1 on the loading interface.

[0065] like Figure 9AAs shown, the top of the tray 14 includes a guide opening 84. This guide opening 84 is designed as a restraining mechanism (not shown) to cooperate with the support interface of the platform equipment, which will be described later. The restraining mechanism enters the tray 14 from the support interface through the guide opening 84 and secures the tray 14 by snapping, pressing, hooking, or attracting. The guide opening 84 is located between the front circular hole 82 or two symmetrical positioning slots 83, and the guide opening 84 is rectangular, but this is not a limitation of the invention and can be modified according to the design of the support interface. Figure 8 As shown, the edge of the guide port 84 is formed with a raised flange or boss, and the flange has a guide surface 85. The guide surface 85 is a long and narrow surface and a rectangular edge adjacent to the guide port 84, especially the rectangular edge near the center of the tray 14, but the invention is not limited thereto.

[0066] The guide surface 85 is designed to work in conjunction with the limiting mechanism. Figure 10A and Figure 10B These are the cross-sectional view and its enlarged partial view based on line AA. For example... Figure 10B As shown, the guide surface 85 is located at the rear end of the guide port 84. The restraining mechanism 9 extends from the bearing interface of the platform device into the guide port 84 and abuts against the guide surface 85. The end of the restraining mechanism 9 includes a roller, which contacts the guide surface 85. Figure 10B As shown, the leading edge of the guide surface 85 has a ramp 851 near the guide opening 84, which reduces the obstruction to the roller climbing onto the guide surface 85. The limiting mechanism 9 can apply downward pressure to the guide surface 85, causing the tray 14 of the carrier housing to press firmly against the carrier interface of the platform equipment. The limiting mechanism 9 can move horizontally away from the guide surface 85 and retract from the guide opening 84 back to the carrier interface. Although the roller contacts the guide surface 85, if the downward pressure applied by the limiting mechanism 9 increases, the friction between the roller and the guide surface 85 will increase, causing the limiting mechanism 9 to move less smoothly.

[0067] This invention proposes a technical solution to reduce friction by decreasing the contact area. Specifically, the guide surface 85 is provided with a special texture structure. Figure 11A and Figure 11B These are different embodiments of the texture structure. Figure 11A The guide surface 85A is shown to be multiple protrusions formed on a plane, such as circular protrusions, elongated protrusions, or meandering protrusions. Figure 11BThe guide surface 85B is a recess or groove formed on a plane, such as a circular recess or a narrow groove. Thus, the contact area between the roller and guide surfaces 85A and 85B is relatively smaller than the contact area when the roller is against a flat surface, effectively reducing friction between the roller and guide surfaces 85A and 85B, and making the mechanical interaction between the limiting mechanism 9 and the tray 14 smoother. In other embodiments, the textured structure may be a rough surface with a specific roughness or a rough surface formed by coating a specific material. The textured structure may be a rough surface formed by laser surface treatment, mechanical surface treatment, or chemical treatment.

[0068] Figure 12A and Figure 12B These are different patterns in the texture structure. Figure 12A The textured structure is composed of multiple elongated patterns 100A arranged along the length of the guide surface 85. In different embodiments, the elongated patterns 100A may extend along the width of the guide surface or extend obliquely. The bulges or depressions in the textured structure can be formed according to the arrangement of the elongated patterns 100A. For example... Figure 12B The textured structure shown is composed of multiple circular patterns 100B arranged evenly on the guide surface 85. In different embodiments, the circular patterns 100B can be replaced with squares, triangles, or other polygons. The bulges or depressions of the textured structure can be formed according to the arrangement of the circular patterns 100B.

[0069] It should be understood that the various specific embodiments of the present invention are merely illustrative, and all modifications made without departing from the scope and spirit of the patent claims should be included within the scope of patent protection of the present invention. Therefore, the specific embodiments described in this specification are not intended to limit the present invention, and the true scope and spirit of the present invention are disclosed within the scope of protection of the claims.

Claims

1. A substrate container, characterized in that, include: A shell with one side wall; and At least one support member is connected to the side wall of the housing, the support member having a plurality of protruding ribs spaced apart from each other, the plurality of protruding ribs defining a plurality of grooves for receiving a substrate and a bearing surface; Each of the plurality of protruding ribs has a front end and a rear end. The rear ends of two adjacent protruding ribs are connected to a closing portion so that the groove formed by the two adjacent protruding ribs forms a closed state at the rear end. The closing portion has a concave surface, and the concave surface and the bearing surface include a clamping position for limiting the substrate. The clamping position allows the concave surface to restrict at least one upper edge of the substrate, and the bearing surface supports the bottom of the substrate for fixed support.

2. The substrate container as described in claim 1, characterized in that, The clamping position allows the concave surface to restrict the upper and lower surfaces of the substrate, and the bearing surface supports the bottom of the substrate to fix and support the substrate.

3. The substrate container as described in claim 1, characterized in that, The concave surface is formed by connecting a first inclined surface and a second inclined surface, and the first inclined surface and the second inclined surface define a concave angle.

4. The substrate container as described in claim 3, characterized in that, The two adjacent convex ribs are an upper convex rib and a lower convex rib, respectively. The bottom of the upper convex rib, the top of the lower convex rib, and the concave surface constitute the groove.

5. The substrate container as described in claim 4, characterized in that, The bottom of the upper convex rib has a guide slope, which connects to the first slope of the concave surface of the closure portion.

6. The substrate container as described in claim 4, characterized in that, The top of the lower convex rib has a descending slope, which connects to the second slope of the concave surface. The descending slope and the second slope form a depression, which is located on the bearing surface.

Images