Monolithic monolithic activated carbon adsorbent material and its use

Abstract

The application relates to the technical field of semiconductor manufacturing, and discloses a monolithic single-block activated carbon adsorption material which is used for adsorbing and desorbing special gases in a semiconductor wafer preparation process, and contains metal ions with a mass percentage of 0.005-10%; the metal ions are selected from one kind of metal ion or a plurality of mixed ions in the first main group, the second main group, the third main group, the IB auxiliary group and the IIB auxiliary group. The activated carbon adsorption material is used for improving the adsorption amount of the single-block activated carbon adsorption material on the special gases by introducing a certain content of metal ions into the single-block activated carbon adsorbent.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, specifically to an integral monolithic activated carbon adsorption material and its application, used for adsorbing and desorbing special gases during semiconductor wafer fabrication. Background Technology

[0002] In the manufacturing process of ultra-large-scale semiconductor integrated circuits, special gases with hazardous and toxic properties are often used. Special gases refer to chemical gases used in semiconductor manufacturing processes such as stretching, ion implantation, doping, washing, and masking film formation. These are electronic gases, such as high-purity SiH4, PH3, AsH3, B2H6, N2O, NH3, SF6, NF3, CF4, BCl3, BF3, HCl, and Cl2. These special gases play a crucial role in the performance, integration density, and yield of semiconductor integrated circuits.

[0003] In semiconductor manufacturing, these specialty gases are typically transported in high-density forms in specific containers, such as high-pressure gas cylinders, through methods like compression or liquefaction. If an accident occurs during transport, these hazardous and toxic specialty gases can leak, such as due to the accidental release of high-pressure gas or leakage from the cylinder itself. Accidental leaks of these toxic gases can cause serious injury or even death to nearby personnel. Therefore, safer storage and transportation methods are necessary for highly toxic or dangerous specialty gases.

[0004] Patent CN1132662 describes a negative pressure gas cylinder using a molecular sieve adsorbent, enabling safe and efficient operation involving highly toxic specialty gases. This negative pressure gas cylinder utilizes the unique, regular nanoporous structure of the molecular sieve to provide adsorption forces for gas molecules, thereby adsorbing highly toxic specialty gases and reducing the pressure inside the cylinder, thus minimizing the chance of accidental gas leakage. The release of the specialty gas adsorbed on the molecular sieve adsorbent can be achieved through a pressure difference, by providing a pressure outside the container lower than the internal pressure. Alternatively, the release of the adsorbed specialty gas can be achieved by heating the physical adsorbent medium, breaking the low-level bonds between the adsorbed gas and the physical adsorbent medium. Furthermore, the release of the adsorbed specialty gas can also be achieved by a carrier gas flowing through the inside of the cylinder, creating a concentration gradient over the adsorbed gas and causing a large amount of the adsorbed gas to flow into the carrier gas stream.

[0005] To improve the adsorption capacity of highly toxic specialty gases in negative pressure gas cylinders, activated carbon is used as a filler due to its higher surface area and abundant nanoscale pore structure compared to molecular sieves, thereby enhancing the adsorption of these gases. US Patent 5704965 describes a negative pressure gas cylinder using activated carbon microspheres as the adsorbent. Compared to CN1132662, which uses molecular sieves as the adsorbent, the negative pressure gas cylinder described in US Patent 5704965, utilizing activated carbon as the adsorbent, exhibits a higher adsorption capacity for highly toxic specialty gases than molecular sieve adsorbents.

[0006] Patent CN1723072 describes a method for increasing the adsorption capacity of highly toxic specialty gases by filling negative pressure gas cylinders with monolithic carbon physical adsorbents. The patent describes the characteristics of the monolithic carbon physical adsorbent, which is formed by the pyrolysis and activation of certain polymers, resulting in a pore structure with more than 20% micropores smaller than 2 nanometers and more than 30% pores with crack shapes of 0.3 to 0.7 nanometers. This monolithic carbon adsorbent material has an adsorption capacity of more than 50% for the specialty gas AsH3, calculated based on the cylinder volume.

[0007] In gas storage and distribution systems based on molecular sieves or activated carbon physical adsorbents, the adsorption and desorption capacity of the adsorbent medium for highly toxic specialty gases is a major limiting factor in practical applications. While monolithic activated carbon adsorbents formed by the pyrolysis and activation of some polymers can be prepared using specific conditions, the improvement in their adsorption capacity for highly toxic specialty gases is mainly achieved through the selection of process parameters or different polymer preconditions, without significant improvement. This invention aims to enhance the adsorption capacity of monolithic activated carbon adsorbent materials for specialty gases by introducing a certain amount of metal heteroions into the adsorbent.

[0008] In gas storage and distribution systems based on molecular sieves or activated carbon physical adsorbents, the adsorption and desorption capacity of the adsorbent medium for highly toxic specialty gases is a major limiting factor in practical applications. Therefore, how to further improve the adsorption and desorption capacity of physical adsorbents is a research focus for those skilled in the art. Summary of the Invention

[0009] The purpose of this invention is to overcome the shortcomings of the prior art and provide an integral monolithic activated carbon adsorbent material that improves the adsorption capacity of the monolithic activated carbon adsorbent material for special gases by introducing metal ions.

[0010] To achieve the above objectives, the technical solution adopted by the present invention is: an integral monolithic activated carbon adsorption material for adsorbing and desorbing special gases during the semiconductor wafer fabrication process, wherein the activated carbon adsorption material contains 0.005-10% by mass of metal ions, wherein the metal ions are selected from one or more mixed metal ions from Group I, Group II, Group III, Group IB, and Group IIB.

[0011] In one specific implementation, the activated carbon adsorbent material is prepared from polymers, polysaccharide compounds, or cellulose through extrusion molding, pyrolysis, and activation processes.

[0012] The polymers mentioned include biopolymers, copolymers, conductive polymers, natural polymers, or synthetic polymers. The polymers include at least one or a mixture of polyethylene, polypropylene, polyvinyl chloride, polystyrene, polytetrafluoroethylene, polyethylene terephthalate, polystyrene, polycarbonate, polyvinylidene fluoride, polyvinylidene chloride, phenolic resin, polyvinyl chloride resin, polyester resin, polyamide resin, BS resin, and epoxy resin.

[0013] The carbohydrate compounds mentioned include disaccharides and polysaccharides. These carbohydrate compounds include maltose, sucrose, lactose, cellobiose, melibiose, cellodextrin, fructooligosaccharides, galactooligosaccharides, isomaltose oligosaccharides, maltodextrin, mannan oligosaccharides, melitriose, agar, amylopectin, amylose, arabinoxylan, chitosan, chitosan, glucan, dextrin, fructan, galactomannan, glucan, glycogen, guar gum, hemicellulose, lentinan, lichen starch, mannan, natural gums, pectin, polysaccharide peptides, agarose, vetiver gum, xanthan gum, and xylan, etc.

[0014] The cellulose includes wood pulp, sawdust, newsprint, coconut shell, peridot, peach blossom stone, apricot kernel, viscose fiber, viscose rayon, cotton, cotton lint, macadamia nut shell, cellulose acetate, bacterial cellulose, lignin, blackthorn, walnut shell, jujube wood, rice husk, coffee parchment, coffee grounds, sugarcane bagasse, sorghum, bamboo, mango kernel, almond shell, corn cob, cherry stone, and grape seed.

[0015] In one specific embodiment, the activated carbon adsorbent is one or a mixture of polyvinylidene fluoride, polyvinylidene chloride, and phenolic resin. Preferably, the activated carbon adsorbent is polyvinylidene fluoride and / or polyvinylidene chloride. More preferably, the activated carbon adsorbent is polyvinylidene chloride.

[0016] In another specific embodiment, the activated carbon adsorbent material is prepared by directly extruding activated carbon particles or by mixing them with a binder and then extruding, pyrolyzing, and activating them. In this activated carbon adsorbent material, the binder content is 0-99% by mass. The activated carbon particles are prepared from at least one of wood-based activated carbon, fruit shell activated carbon, coconut shell activated carbon, biomass activated carbon, and pitch-based microsphere activated carbon. The activated carbon particles have a specific surface area of ​​at least 100 m². 2 / g, preferably greater than 500m 2 / g, more preferably greater than 800m 2 / g, more preferably greater than 1000m 2 / g, more preferably greater than 1500m 2 / g. The activated carbon particles have a pore volume greater than 0.05cm³. 3 / g, preferably greater than 0.1cm 3 / g, more preferably greater than 0.3cm 3 / g, more preferably greater than 0.5cm 3 / g, more preferably greater than 0.8cm 3 / g. More preferably greater than 1.0cm 3 / g. The activated carbon particles have a pore diameter of less than 20 nanometers, preferably less than 15 nanometers, more preferably less than 10 nanometers, more preferably less than 8 nanometers, more preferably less than 5 nanometers, and more preferably less than 3 nanometers.

[0017] The binder accounts for 0-99% of the total mass of the adsorbent in a single piece of activated carbon material. In some embodiments, the binder accounts for at least 1% of the total mass, preferably at least 10%, more preferably at least 30%, and more preferably at least 60%. In some embodiments, the binder is added to the adsorbent of the monolithic activated carbon material at a mass of 0-99%, 1-99%, 10-99%, 20-99%, 30-99%, 40-99%, 50-99%, 60-99%, 70-99%, 80-99%, 0-90%, 1-90%, 10-90%, 20-90%, 30-90%, 40-90%, 50-90%, 60-90%, 70-90%, 80-90%, 0-80%, 1-80%, 10-80%, 20-80%, 30-80%, 40-80%, 50-80%, 60-80%, 70-80%, 0-70%, 1-70%, 10-70%, 20-70%, 30-70%, 40-70%, 50-70%, 60-70%. Preferred values ​​are 5-99%, 50-99%, 70-99%, 80-99%, 5-90%, 50-90%, 50-90%, 70-90%, and 80-90%.

[0018] In one specific embodiment, the adhesive is added at least 1% by mass, and the adhesive is a high molecular weight polymer, a polysaccharide saccharide compound, or cellulose. Preferably, the adhesive is polyvinylidene fluoride and / or polyvinylidene chloride. Polyvinylidene fluoride and / or polyvinylidene chloride are preferred adhesives. Polyvinylidene chloride is more preferably used as the adhesive.

[0019] In another specific embodiment, the activated carbon adsorbent may further comprise certain inorganic porous materials, including but not limited to various types of molecular sieves, porous silica materials, metal-organic frameworks (MOFs), or certain inorganic binders, including but not limited to hydrous kaolin, attapulgite, alumina, boehmite, silica, travertine, palygorskite, sepiolite, etc. In some embodiments, the dosage of the inorganic porous material or binder is at least 1% by mass.

[0020] In another specific embodiment, the activated carbon adsorbent material does not contain any inorganic porous materials or inorganic binders.

[0021] The metal ions are selected from metal ions or mixtures thereof from Group I, Group II, Group III, Group IB, and Group IIB. Preferably, metal ions from Group I and Group II are preferred, and more preferably, lithium ions, sodium ions, potassium ions, rubidium ions, cesium ions, beryllium ions, magnesium ions, calcium ions, strontium ions, barium ions, aluminum ions, and gallium ions.

[0022] More preferably, magnesium ions, calcium ions, strontium ions, and barium ions, especially one or a mixture of magnesium ions and calcium ions. Calcium ions are even more preferred.

[0023] In some embodiments, the metal ions may not contain metal ions of Group IB and Group IIB or a mixture thereof, or the concentration of the metal ions of Group IB and Group IIB or a mixture thereof contained therein may not exceed 1000 ppm, preferably not more than 500 ppm or not more than 100 ppm, in some embodiments not more than 50 ppm, and in some embodiments not more than 10 ppm.

[0024] In one specific implementation, the metal ions are selected from Group 1 and / or Group 2.

[0025] In one specific implementation, the metal ion used is magnesium ion and / or calcium ion, preferably calcium ion.

[0026] In one specific implementation, the metal ions are added to the activated carbon adsorbent material in the form of metal ion salts, oxides, hydroxides, or mixtures of metal ions.

[0027] Preferably, the metal ions are metal ion salts, which are added to the activated carbon adsorbent material in the form of an aqueous solution.

[0028] The metal ions can be added before or after the activated carbon is formed. Alternatively, the activated carbon can be prepared using a specific material with the aforementioned metal ion content, thus inherently containing the specified metal ion concentration.

[0029] The metal ions are added in the following ways: 1) directly mixing with activated carbon or activated carbon preparation raw materials in the form of ionic metal salts; 2) ion exchange between metal ions and activated carbon preparation raw materials; 3) directly immersing the activated carbon preparation raw materials in a metal ion salt solution. Preferably, the activated carbon preparation raw materials are directly immersed in a metal ion salt solution.

[0030] In one specific embodiment, the introduced metal ions do not require direct activation before use. In another specific embodiment, the metal ions are activated by heating at a specific temperature and in a specific atmosphere. The heating temperature includes 50-500℃, preferably 50-400℃, 50-300℃, 50-200℃, 50-150℃, 50-100℃, 100-500℃, 100-400℃, 100-300℃, 100-200℃, more preferably 100-200℃. The atmosphere includes inert gases such as nitrogen, argon, and helium, and reactive gases such as air, oxygen, hydrogen, carbon dioxide, and carbon monoxide, or a mixture of two or more of these gases. Nitrogen is preferred.

[0031] In one specific embodiment, the content of metal ions in the activated carbon adsorption material is 0.001%-10%, 0.01%-10%, or 0.05%-10%, preferably 0.01%-5%, 0.01%-2%, or 0.01%-1%, and more preferably 0.05%-2%.

[0032] The activated carbon activation method includes chemical activation and gas activation or a combination of both.

[0033] The chemical activation method involves uniformly mixing various carbon-containing raw materials with chemical activation reagents, and then preparing activated carbon through processes such as carbonization, activation, chemical recovery, rinsing, and drying at a certain temperature. Phosphoric acid, zinc chloride, potassium hydroxide, sodium hydroxide, sulfuric acid, potassium carbonate, polyphosphoric acid, and phosphate esters can all be used as activation reagents. The gas activation method involves contacting the carbonized raw materials with activation gases such as water vapor, CO2, N2, CO, or air at a high temperature of 800-1000℃ to carry out an activation reaction.

[0034] The heating temperatures here include 150-1500℃, preferably 200-1000℃, 200-800℃, 200-600℃, 300-1000℃, 300-800℃, 300-600℃, 400-1000℃, 400-800℃, 400-600℃, and more preferably 400-800℃. The atmosphere includes inert gases such as nitrogen, argon, and helium, and reactive gases such as air, oxygen, hydrogen, carbon dioxide, carbon monoxide, or a mixture of two or more of these gases. Nitrogen is preferred.

[0035] The activated carbon extrusion molding process can ultimately produce monolithic molecular sieve materials, such as cylindrical, square, polygonal, spherical, or multi-faceted shapes. Cylindrical and square shapes are preferred, with cylindrical shapes being more preferred.

[0036] Another object of the present invention is to provide an application of the above-mentioned monolithic activated carbon adsorbent material, wherein the adsorbent is used in a special gas storage and distribution system in a negative pressure gas cylinder. The adsorbed gases include, but are not limited to: silane, diborane, arsine, phosphine, chlorine, boron trichloride, boron trifluoride, trimethylantimony, tungsten hexafluoride, hydrogen fluoride, hydrogen chloride, hydrogen bromide, hydrogen iodide, germanane, ammonia, hydrogen antimony, hydrogen sulfide, and nitrogen trifluoride.

[0037] Due to the application of the above technical solutions, the present invention has the following advantages compared with the prior art: The integral single-piece activated carbon adsorbent material of the present invention introduces a certain amount of metal heteroions into the single-piece activated carbon adsorbent to improve the adsorption capacity of the single-piece activated carbon adsorbent material for special gases. Detailed Implementation

[0038] The technical solution of the present invention will be further described below with reference to specific embodiments.

[0039] In some embodiments, the preparation steps of the monolithic activated carbon adsorbent are as follows: the adsorbent is prepared by extruding polymers, polysaccharide sugar compounds or cellulose through extrusion molding, pyrolysis and activation processes.

[0040] In other embodiments, the preparation steps of the monolithic activated carbon adsorbent involve mixing activated carbon particles with a polymer, polysaccharide saccharide, or cellulose as a binder in a certain proportion, followed by pressing and molding under a certain pressure, such as 8 MPa. The molded monolithic adsorbent precursor is then pyrolyzed and activated to become the monolithic activated carbon adsorbent. Here, the binder is selected from polymers, polysaccharide saccharide, or organic polymers of cellulose. The binder uses polyvinylidene fluoride and / or polyvinylidene chloride. Preferably, the binder is polyvinylidene fluoride and / or polyvinylidene chloride. More preferably, the binder is polyvinylidene chloride.

[0041] Test method:

[0042] 1) The specific surface area of ​​a single piece of activated carbon adsorbent was determined by weight using a Jin'ai Spectrometer V-Sorb 2800 specific surface area and pore size analyzer;

[0043] 2) Density is determined by measuring dimensions and mass;

[0044] 3) The adsorption capacities of ammonia, phosphine, and phosphorus trifluoride were determined using a self-made adsorption apparatus:

[0045] A certain amount of single activated carbon is placed in an adsorption container, and a vacuum is applied at 0.1 MPa for at least 6 hours. Then, the corresponding adsorption gas is added until adsorption equilibrium is reached. The amount of gas adsorbed is estimated by the weight change of the single activated carbon. Then, a vacuum is applied again at 0.1 MPa for at least 6 hours, and the amount of gas desorbed is estimated by the weight change of the single activated carbon.

[0046] I. Effect of preparation conditions on the performance of single activated carbon adsorbents

[0047] Table 1 shows the effects of preparation conditions on the performance of single activated carbon adsorbents, including the specific surface area and other properties of the activated carbon.

[0048] In some of the following embodiments, phenolic resin, polyvinylidene chloride (PVDC), and polyvinylidene fluoride (PVDF) are respectively processed through extrusion molding, pyrolysis, and activation to prepare monolithic activated carbon adsorbents. In other embodiments, PVDC and PVDF are used as binders, mixed with coconut shell activated carbon particles in a certain proportion, and then processed through extrusion molding, pyrolysis, and activation to prepare monolithic activated carbon adsorbents. The coconut shell activated carbon particles have a specific surface area greater than 1000 m². 2 / g, pore volume greater than 0.30cm³ 2 / g and activated carbon particles with pore size greater than 4 nanometers.

[0049] Monolithic porous inorganic material adsorbents are mixed together according to the proportions of their components and molded under certain extrusion and activation conditions. In the examples, the monolithic porous inorganic material adsorbents are cylindrical. Monolithic cylindrical adsorbents of different volumes are prepared according to different experimental conditions, with diameters ranging from 10 mm to 100 mm and heights from 5 mm to 200 mm.

[0050] Table 1 Preparation of single-piece activated carbon adsorbent

[0051]

[0052] In Table 1, samples 1, 2, and 5 were directly extruded from phenolic resin, polyvinylidene fluoride (PVDF), or PVDF as raw materials to form monolithic activated carbon adsorbent materials. Furthermore, the results of samples 3, 4, 6, 7, and 8 indicate that combining PVDF or PVDF with activated carbon particles exhibited good bonding effects and influenced the sintering density and specific surface area.

[0053] II. The Influence of Calcium Ion Support on the Performance of Monolithic Activated Carbon Adsorbents

[0054] This study investigated the effect of calcium ion loading on the performance of a single activated carbon adsorbent, as detailed in Table 2.

[0055] Table 2

[0056]

[0057] In Table 2, Sample 9 was prepared as a monolithic activated carbon adsorbent by extrusion molding, pyrolysis, and activation of polyvinylidene chloride (PVDC) as a binder and activated carbon particles. Sample 10 was prepared by immersing Sample 9 in a 0.5M calcium nitrate aqueous solution at room temperature for at least 10 minutes, then purging excess solution with nitrogen and calcining at 120°C for 3 hours. The introduced calcium ions accounted for 0.48% of the net weight of the monolithic activated carbon adsorbent. The calcium ion loading significantly reduced the specific surface area of ​​the monolithic molecular sieve by 21%.

[0058] III. Effects of calcium ion-supported monolithic activated carbon adsorbents on the adsorption of ethanol and water

[0059] This study mainly investigated the effect of calcium ion-supported monolithic activated carbon adsorbent on the adsorption of ethanol and water, as shown in Table 3.

[0060] Table 3

[0061]

[0062] In Table 3, samples 9 and 10 were immersed in pure water and pure ethanol, respectively, and then excess liquid was removed by nitrogen gas before weight determination. The adsorption capacities of ethanol and water obtained were converted to adsorption capacities calculated per 100 g or 1 liter of sample 9 and sample 10. Clearly, after calcium ion loading, the adsorption capacities of a single activated carbon adsorbent for water and ethanol did not change significantly.

[0063] IV. Adsorption of PH3 by calcium ion-supported monolithic activated carbon adsorbent

[0064] This study investigated the effect of calcium ion-supported monolithic activated carbon adsorbent on the adsorption of PH3. The specific results are shown in Table 4.

[0065] Table 4

[0066]

[0067] In Table 4, certain amounts of samples 9 and 10 were placed in gas cylinders and evacuated. Phosphine gas was gradually introduced into the cylinders under vacuum conditions at room temperature until equilibrium was reached. The weight gain from phosphine adsorption on a single piece of activated carbon was then measured. The resulting phosphine adsorption capacity was converted to the adsorption capacity calculated per 100 grams or 1 liter of sample 9 and sample 10. Table 4 shows that both sample 9 and sample 10 exhibited significant phosphine adsorption. Although Table 2 indicates that the specific surface area of ​​sample 10 is lower than that of sample 9, Table 4 shows that the phosphine adsorption capacity of sample 10 increased significantly. Calculated per 100 grams of activated carbon adsorbent, the phosphine adsorption capacity of sample 10 increased by 20.9%, and calculated per liter of activated carbon adsorbent, the phosphine adsorption capacity of sample 10 increased by approximately 24.8%. Considering the phosphine adsorption capacity per unit specific surface area, compared to sample 9, the phosphine adsorption capacity of sample 10 was significantly increased, increasing by 56%.

[0068] V. Effect of activation conditions of single activated carbon adsorbent on the adsorption capacity of ammonia molecules

[0069] This study primarily investigated the adsorption performance of ammonia by a single activated carbon adsorbent. Sample 11 was prepared by extruding polyvinylidene chloride (PVDC) and activated carbon particles, followed by pyrolysis and activation. The calcium ion content was 0.1%. The sample was placed in a self-made gas adsorption and desorption apparatus under vacuum. Ammonia was gradually introduced into Sample 11 at room temperature under vacuum until equilibrium was reached. The adsorption weight gain of the single activated carbon adsorbent for ammonia was then measured. The adsorption results are listed in Table 5.

[0070] Table 5

[0071] sample calcium ion concentration Density (g / ml) <![CDATA[Specific surface area / (m 2 / g]]> Adsorption rate (g / 100g) Adsorption rate (g / L) 11 0.1％ 1.18 670 9.83 116.3

[0072] As can be seen from Table 5, the single activated carbon adsorbent prepared with polyvinylidene chloride containing 0.1% calcium ions has an adsorption capacity of 9.83g of ammonia molecules per 100g of activated carbon adsorbent and 116.3g of ammonia molecules per 1L of activated carbon adsorbent.

[0073] VI. Results of ammonia molecule adsorption and desorption by single activated carbon adsorbent

[0074] This study primarily investigated the adsorption and desorption of ammonia molecules by a single activated carbon adsorbent sample 11. The sample was placed in a self-made gas adsorption and desorption apparatus and evacuated. Ammonia gas was gradually introduced into the sample under vacuum conditions at room temperature until equilibrium was reached. The adsorption capacity was measured by determining the weight gain of ammonia adsorbed by the single activated carbon adsorbent. The sample was then evacuated again, and after equilibrium was reached, the amount of undesorbed ammonia in the sample, i.e., the residual amount, was measured. The results are shown in Table 6.

[0075] Table 6

[0076]

[0077] The results in Table 6 show that, in the adsorption and desorption cycle test of ammonia molecules in a single piece of activated carbon, the adsorption of ammonia is more than 85% reversible.

[0078] VII. Results of Boron Trifluoride Adsorption by Single Activated Carbon Adsorbent

[0079] The adsorption results of boron trifluoride in single activated carbon adsorbent sample 11 show that sample 11 has significant adsorption of boron trifluoride. Every 100 grams of this sample can adsorb 30 grams of boron trifluoride, which is equivalent to 355 grams of boron trifluoride in 1 liter of sample 11.

[0080] The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. The use of an integral monolithic activated carbon adsorbent material for the adsorption and desorption of special gases during semiconductor wafer fabrication, characterized in that, The monolithic single-piece activated carbon adsorption material contains 0.005%-10% by mass of metal ions, wherein the metal ions are calcium ions, and the metal ions are metal ion salts added to the activated carbon adsorption material in the form of an aqueous solution. The special gas is PH3 or BF3.

2. The use of the integral monolithic activated carbon adsorbent material according to claim 1 for the adsorption and desorption of special gases during semiconductor wafer fabrication, characterized in that, The monolithic single-piece activated carbon adsorbent material is prepared by extrusion molding, pyrolysis and activation processes of high molecular polymers or polysaccharide sugar compounds.

3. The use of the integral monolithic activated carbon adsorbent material according to claim 2 for the adsorption and desorption of special gases in the semiconductor wafer fabrication process, characterized in that, The monolithic single-piece activated carbon adsorbent material uses one or more of polyvinylidene fluoride, polyvinylidene chloride, and phenolic resin.

4. The use of the integral monolithic activated carbon adsorbent material according to claim 1 for the adsorption and desorption of special gases in the semiconductor wafer fabrication process, characterized in that, The monolithic single-piece activated carbon adsorbent material is prepared by directly extruding activated carbon particles or by mixing activated carbon particles and a binder and then extruding, pyrolyzing, and activating them. In the monolithic single-piece activated carbon adsorbent material, the mass of the binder added is 0-99%. The activated carbon particles are prepared from at least one of wood chip activated carbon, fruit shell activated carbon, coconut shell activated carbon, biomass activated carbon, and pitch-based microsphere activated carbon.

5. The use of the integral monolithic activated carbon adsorbent material according to claim 4 for the adsorption and desorption of special gases in the semiconductor wafer fabrication process, characterized in that, The adhesive is added at a mass of at least 1%, and the adhesive is a polymer or a polysaccharide saccharide compound.

6. The use of the integral monolithic activated carbon adsorbent material according to claim 1 for the adsorption and desorption of special gases in the semiconductor wafer fabrication process, characterized in that, The content of metal ions in the monolithic single-piece activated carbon adsorbent material is between 0.05% and 2%.

7. The use of the integral monolithic activated carbon adsorbent material according to claim 1 for the adsorption and desorption of special gases in the semiconductor wafer fabrication process, characterized in that, The monolithic single-piece activated carbon adsorbent material is used in special gas storage and distribution systems in negative pressure gas cylinders.

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