Process node management method and device, electronic equipment and storage medium

Abstract

Embodiments of the present application provide a process node management method, device, equipment and medium. The method comprises: obtaining running information of each Czochralski single crystal equipment and preset information of the process node; determining the current process node, the subsequent process node and the predicted start time of the corresponding Czochralski single crystal equipment according to the running information and the preset information; and managing and controlling the process node of each Czochralski single crystal equipment according to the current process node, the subsequent process node and the predicted start time of the subsequent process node of each Czochralski single crystal equipment, so that for the Czochralski single crystal process, the current process node is automatically determined, and the start time of the subsequent process node is predicted, so as to manage and control the process node of the Czochralski single crystal according to the above, and the digital, networked and intelligent management and control in line with the characteristics of the Czochralski single crystal process are realized, and problems such as serious waste of personnel, long statistical cycle, backward information flow, and unguaranteed accuracy are avoided.

Description

Technical Field

[0001] This invention relates to the field of crystal preparation technology, and in particular to a process node control method, a process node control device, an electronic device, and a storage medium. Background Technology

[0002] The main process for preparing monocrystalline silicon materials is the Czochralski process (CZ), which uses the Czochralski method to refine polycrystalline silicon raw materials into monocrystalline silicon. The process of generating rod-shaped monocrystalline silicon crystals in the Czochralski process includes steps such as loading, heating the molten material, temperature control, crystal pulling, shoulder formation, shoulder rotation, equal diameter shaping, and finishing.

[0003] First, a quartz crucible is placed on top of the main crucible, and then polycrystalline silicon material is added to the quartz crucible. After loading, the furnace is closed, and a vacuum is drawn. Once the required vacuum is achieved, argon gas is introduced, and the heater is turned on under slight negative pressure to begin heating. The temperature is then gradually increased according to the process requirements of the molten material, reaching the required melting temperature to melt the solid polycrystalline silicon material into a liquid state. After the polycrystalline silicon material has melted, crystal pulling cannot begin immediately because the temperature is higher than the crystal pulling temperature. Cooling must be performed to adjust the temperature to the crystal pulling temperature. Crystal pulling involves bringing a seed crystal (i.e., a single crystal processed into a certain shape) pre-attached to the end of a steel wire rope into contact with the liquid surface. At the crystal pulling temperature, silicon molecules will grow along the lattice direction of the seed crystal, thus forming a single crystal. Shoulder formation involves gradually growing the crystal diameter to the required diameter. During shoulder formation, a section of crystal is pulled out, gradually increasing in length and diameter to approximately the required diameter, to eliminate crystal dislocations. Once the crystal has grown to the required diameter during shoulder formation, the shoulder turning process begins. Shoulder turning is the process of controlling the crystal diameter to the required production diameter. After shoulder turning, the constant diameter control step begins. In this step, through automatic control of the pulling speed and temperature, the crystal grows to the set diameter. Constant diameter control is a step in single crystal production that can be converted into yield, and it is the core step in the entire crystal pulling process. After the crystal completes constant diameter growth, it enters the finishing process, which is also to eliminate dislocations. After finishing, the crystal growth is basically complete, and the crystal is left in the silicon single crystal furnace for a certain period of time to complete the crystal annealing.

[0004] In the monocrystalline silicon manufacturing industry, the traditional time management model involves operators meticulously recording the operational steps of each furnace, estimating the time required to reach the constant diameter stage, and then predicting the daily output or the output at a specific moment based on the time and length of the constant diameter stage, before reporting to superiors. This traditional production model suffers from significant personnel waste, long statistical cycles, lagging information flow, and unreliable accuracy. Summary of the Invention

[0005] In view of the above problems, embodiments of the present invention are proposed to provide a process node control method that overcomes or at least partially solves the above problems, so as to solve the problems of serious personnel waste, long statistical cycle, lagging information flow and inability to guarantee accuracy in the working time statistics mode.

[0006] Accordingly, embodiments of the present invention also provide a process node control device, an electronic device, and a storage medium to ensure the implementation and application of the above methods.

[0007] To address the above problems, this invention discloses a process node control method, comprising:

[0008] Obtain the operating information of each Czochralski single crystal device, as well as the preset information of the process nodes;

[0009] Based on the operating information and preset information, determine the current process node of the Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes;

[0010] Based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes, the process nodes of each Czochralski single crystal device are controlled.

[0011] Optionally, the process nodes include a furnace closure tracking node, an initial equal-diameter node, a charging equal-diameter node, and a no-charging equal-diameter node. The furnace closure tracking node corresponds to the process from the start of furnace shutdown to the start of evacuation. The initial equal-diameter node corresponds to the process from the start of evacuation to the start of the first equal-diameter operation. The charging equal-diameter node corresponds to the process from the start of charging to the start of equal-diameter operation. The no-charging equal-diameter node corresponds to the process from the start of the no-charging task to the start of equal-diameter operation.

[0012] Optionally, the furnace tracking node includes multiple process sub-nodes, the initial equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node;

[0013] The step of determining the current process node of the Czochralski single crystal equipment based on the operating information and preset information, and the subsequent process nodes and their expected start times, includes:

[0014] Based on the operational information and preset information, the current process node and process sub-node of the corresponding Czochralski single crystal equipment are determined;

[0015] Based on the operational information, preset information, and the current process node and process sub-node, determine the subsequent process nodes and process sub-nodes of the corresponding Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process sub-nodes.

[0016] Optionally, the process sub-nodes corresponding to the furnace closure tracking node include furnace shutdown start, furnace dismantling start, furnace loading completion, furnace closure hygiene confirmation, material feeding completion, and evacuation start; the process sub-nodes corresponding to the first equal diameter node include evacuation start, melting start, material feeding completion, material feeding start, material feeding end, crucible rotation, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the material feeding equal diameter node include material calling start, material feeding completion, rod removal completion, material feeding start, material feeding end, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the no-material feeding equal diameter node include no-material feeding task start, crystal pulling start, shoulder formation start, and equal diameter start.

[0017] Optionally, the operation information includes the process nodes and process sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operation information of at least one operation task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

[0018] Optionally, the step of controlling the process nodes of each Czochralski single crystal device based on the current process node of each device, subsequent process nodes, and the expected start time of the subsequent process nodes includes:

[0019] Based on the current process node of each of the Czochralski single crystal devices, the subsequent process nodes, and the expected start time of the subsequent process nodes, the display shows the Czochralski single crystal devices with process nodes entering the same diameter and / or the Czochralski single crystal devices entering the furnace during the target time period.

[0020] Based on the current process node of each Czochralski single crystal equipment, the completion and non-completion status of different workers are displayed for Czochralski single crystal equipment with equal diameter entering the process node and / or Czochralski single crystal equipment entering the furnace.

[0021] Based on the completion and non-completion status of different staff members, the process nodes of each Czochralski single crystal equipment are controlled.

[0022] Optionally, the step of controlling the process nodes of each Czochralski single crystal device based on the current process node of each device, subsequent process nodes, and the expected start time of the subsequent process nodes includes:

[0023] For each of the aforementioned Czochralski single crystal devices, the completion status of all process nodes is displayed;

[0024] Based on the completion status of all process nodes, the process nodes of each Czochralski single crystal device are controlled.

[0025] This invention also discloses a process node control device, comprising:

[0026] The information acquisition module is used to acquire the operating information of each Czochralski single crystal device, as well as the preset information of the process nodes;

[0027] The node determination module is used to determine the current process node of the Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes based on the operation information and preset information.

[0028] The node management module is used to manage the process nodes of each Czochralski single crystal device based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes.

[0029] Optionally, the process nodes include a furnace closure tracking node, an initial equal-diameter node, a charging equal-diameter node, and a no-charging equal-diameter node. The furnace closure tracking node corresponds to the process from the start of furnace shutdown to the start of evacuation. The initial equal-diameter node corresponds to the process from the start of evacuation to the start of the first equal-diameter operation. The charging equal-diameter node corresponds to the process from the start of charging to the start of equal-diameter operation. The no-charging equal-diameter node corresponds to the process from the start of the no-charging task to the start of equal-diameter operation.

[0030] Optionally, the furnace tracking node includes multiple process sub-nodes, the initial equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node;

[0031] The node determination module includes:

[0032] The first node determination submodule is used to determine the current process node and process sub-node of the Czochralski single crystal equipment based on the operation information and preset information.

[0033] The second node determination submodule is used to determine the subsequent process nodes and process subnodes of the Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process subnodes, based on the operation information, preset information, and the current process node and process subnode.

[0034] Optionally, the process sub-nodes corresponding to the furnace closure tracking node include furnace shutdown start, furnace dismantling start, furnace loading completion, furnace closure hygiene confirmation, material feeding completion, and evacuation start; the process sub-nodes corresponding to the first equal diameter node include evacuation start, melting start, material feeding completion, material feeding start, material feeding end, crucible rotation, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the material feeding equal diameter node include material calling start, material feeding completion, rod removal completion, material feeding start, material feeding end, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the no-material feeding equal diameter node include no-material feeding task start, crystal pulling start, shoulder formation start, and equal diameter start.

[0035] Optionally, the operation information includes the process nodes and process sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operation information of at least one operation task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

[0036] Optionally, the node management module includes:

[0037] The equipment display submodule is used to display, based on the current process node of each Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes, the Czochralski single crystal equipment entering the same diameter process node and / or the Czochralski single crystal equipment entering the furnace during the target time period.

[0038] The first status display submodule is used to display the completion and non-completion status of different workers based on the current process node of each Czochralski single crystal equipment, for Czochralski single crystal equipment with equal diameter entering the process node and / or Czochralski single crystal equipment entering the furnace.

[0039] The first node control submodule is used to control the process nodes of each Czochralski single crystal device based on the completion and non-completion status of different staff members.

[0040] Optionally, the node management module includes:

[0041] The second status display submodule is used to display the completion status of all process nodes for each of the aforementioned Czochralski single crystal devices;

[0042] The second node control submodule is used to control the process nodes of each of the Czochralski single crystal devices based on the completion status of all process nodes.

[0043] This invention also discloses an electronic device, characterized in that it includes a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus;

[0044] Memory, used to store computer programs;

[0045] When a processor executes a program stored in memory, it implements the method steps described above.

[0046] This invention also discloses a readable storage medium, which, when the instructions in the storage medium are executed by the processor of an electronic device, enables the electronic device to execute one or more of the process node control methods described in this invention.

[0047] The embodiments of the present invention have the following advantages:

[0048] According to embodiments of the present invention, by acquiring the operating information of each Czochralski single crystal device and the preset information of process nodes; based on the operating information and the preset information, the current process node of the corresponding Czochralski single crystal device, the subsequent process nodes, and the estimated start time of the subsequent process nodes are determined; based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the estimated start time of the subsequent process nodes, the process nodes of each Czochralski single crystal device are controlled, so that for the Czochralski single crystal process, the current process node is automatically determined and the start time of the subsequent process nodes is predicted, so as to control the process nodes of the Czochralski single crystal process accordingly. This achieves digital, networked, and intelligent control that conforms to the characteristics of the Czochralski single crystal process, avoiding problems such as serious waste of personnel, long statistical cycles, lagging information flow, and inability to guarantee accuracy. Attached Figure Description

[0049] Figure 1 This is a flowchart illustrating the steps of an embodiment of the process node control method of the present invention;

[0050] Figure 2 This is a schematic diagram of the process nodes;

[0051] Figure 3 This is a flowchart illustrating the steps of an embodiment of the process node control method of the present invention;

[0052] Figure 4 This is a schematic diagram of the process node control system;

[0053] Figure 5 This is a schematic diagram of process nodes and process sub-nodes;

[0054] Figure 6 This is a flowchart illustrating process nodes and process sub-nodes.

[0055] Figure 7 This is a diagram illustrating the completion and incomplete status;

[0056] Figure 8 It is a diagram showing the detailed status of completion and incompleteness;

[0057] Figure 9 This is a schematic diagram showing the completion status of all process nodes in the Czochralski single crystal equipment;

[0058] Figure 10 This is a structural block diagram of an embodiment of the process node control device of the present invention;

[0059] Figure 11 This is a structural block diagram of a computing device for process node control, according to an exemplary embodiment. Detailed Implementation

[0060] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0061] Reference Figure 1 The diagram illustrates a flowchart of an embodiment of a process node control method according to the present invention, which may specifically include the following steps:

[0062] Step 101: Obtain the operating information of each Czochralski single crystal device and the preset information of the process nodes.

[0063] In this embodiment of the invention, the Czochralski process is the process of refining raw materials into single crystals using the Czochralski method, such as the process of Czochralski growing single-crystal silicon. The Czochralski equipment is used to produce single crystals. The operating information of the Czochralski equipment includes various information related to its operation, such as the equipment's status, power, remaining material, and ingot length. Specifically, it can include any applicable information, and this embodiment of the invention does not limit this. For example, data from multiple dimensions can be obtained from the central control system of the Czochralski equipment.

[0064] In this embodiment of the invention, based on the characteristics of the Czochralski single crystal process, the production process is divided into multiple process nodes. For example, the period from the shutdown of the previous furnace in the Czochralski single crystal equipment to the start of evacuation of the current furnace is considered as one process node, denoted as the furnace closure tracking node. Specifically, any applicable process node may be included, and this embodiment of the invention does not impose any limitations on this.

[0065] In this embodiment of the invention, the preset information of the process node is the standard information of the process node that is set in advance, such as the standard power of the Czochralski single crystal equipment of a certain process node, the standard length of the crystal rod, the standard working time of the process node, or any other applicable information. This embodiment of the invention does not limit this.

[0066] In this embodiment of the invention, some operational information only needs to be collected once, while other operational information needs to be collected every certain period of time as time goes by.

[0067] In an optional embodiment of the present invention, the process nodes include a furnace closure tracking node, an initial equal-diameter node, a charging equal-diameter node, and a no-charging equal-diameter node. The furnace closure tracking node corresponds to the process from furnace shutdown to evacuation; the initial equal-diameter node corresponds to the process from evacuation to the first equal-diameter start; the charging equal-diameter node corresponds to the process from charging to equal-diameter start; and the no-charging equal-diameter node corresponds to the process from no-charging task to equal-diameter start.

[0068] like Figure 2 A schematic diagram of the process nodes shown.

[0069] According to the monocrystalline production process, the furnace tracking node starts from the shutdown of the previous furnace of the Czochralski monocrystalline equipment to the start of the evacuation of this furnace. There is no production output during this part. It is used to prepare for the equipment shutdown maintenance and the start of the furnace unloading process to meet the standards. It is a process node for easy management.

[0070] The first equal diameter node is the first equal diameter process of the Czochralski single crystal equipment in this furnace. The silicon material in the crucible is the material in the quartz crucible and the material in the barrel. After all the material is melted, it can be used for crystal pulling. The process of entering the equal diameter process for the first time is relatively difficult. Therefore, it is a separate process node.

[0071] The feeding equal-diameter node is the cycle segment following the initial equal-diameter feeding. From the start of feeding to the start of the next equal-diameter feeding, the amount of material fed in each cycle is essentially the same. This process is generally stable and easy to manage; therefore, it is considered a separate process node. "Material request" refers to the task of requesting material from the raw material supply node on the production line when there is insufficient raw material in the Czochralski single crystal pulling equipment—specifically, when the remaining raw material is insufficient for the next crystal pulling stage.

[0072] The no-feed equal-diameter node is the no-feed task in the cycle segment until the start of the next equal-diameter cycle. The no-feed task refers to the task generated due to reasons such as the equal-diameter line breakage and the remaining material in the crucible not meeting the conditions for feeding. It is mainly an abnormal situation in the single crystal production process and requires special attention. Therefore, the process corresponding to the no-feed task is a separate process node.

[0073] Step 102: Based on the operating information and preset information, determine the current process node of the corresponding Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes.

[0074] In this embodiment of the invention, for a Czochralski single crystal pulling device, the current process node is first determined based on operating information and preset information. For example, when one or more operating information of the Czochralski single crystal pulling device matches the preset information of the furnace tracking node, the current process node is determined to be the furnace tracking node.

[0075] In this embodiment of the invention, after determining the current process node, subsequent process nodes can be determined based on the operating information and preset information. For example, if the current process node is the first equal-diameter node, and the operating information matches the preset information of the feeding equal-diameter node, then the next process node is determined to be the feeding equal-diameter node. If the equal-diameter line breaks and the remaining material in the crucible does not meet the requirements for feeding, then the next process node is determined to be the non-feeding equal-diameter node.

[0076] In this embodiment of the invention, in addition to determining subsequent process nodes, the estimated start time of subsequent process nodes can also be determined. Based on operational information and preset information, the estimated start time of the next process node is calculated. The method for calculating the estimated start time can differ for different process nodes. For example, based on parameters such as power, remaining material, ingot length, and standard data of the process node, the time required to complete the current process node is calculated, thereby obtaining the estimated start time of the next process node. The preset information includes the standard man-hours of each process node. By adding the standard man-hours of the next process node, the estimated start time of the next process node after that can be calculated, and so on, to obtain the estimated start time of subsequent process nodes.

[0077] Step 103: Based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes, control the process nodes of each Czochralski single crystal device.

[0078] In this embodiment of the invention, by obtaining the current process node of each Czochralski single crystal device, the subsequent process nodes, and the estimated start time of the subsequent process nodes, the working status of all Czochralski single crystal devices can be displayed in real time and accurately. Based on this, the process nodes of each Czochralski single crystal device can be managed and controlled. The management and control of process nodes can include multiple aspects such as the management and control of work progress and workload, so that the work progress can be completed on schedule and the workload can be arranged more reasonably.

[0079] In this embodiment of the invention, the methods for controlling the process nodes of each of the Czochralski crystal pulling devices can include various approaches. For example, a reporting system can be used to display the various operating conditions of the process nodes entering the equal-diameter Czochralski crystal pulling device and / or the process nodes entering the furnace, so that managers can make timely and effective management and control decisions. Another example is to display the various operating conditions of each Czochralski crystal pulling device separately, so as to promptly identify problems occurring in individual Czochralski crystal pulling devices, allowing managers to intervene and correct the problems in a timely manner.

[0080] According to embodiments of the present invention, by acquiring the operating information of each Czochralski single crystal device and the preset information of process nodes; based on the operating information and the preset information, the current process node of the corresponding Czochralski single crystal device, the subsequent process nodes, and the estimated start time of the subsequent process nodes are determined; based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the estimated start time of the subsequent process nodes, the process nodes of each Czochralski single crystal device are controlled, so that for the Czochralski single crystal process, the current process node is automatically determined and the start time of the subsequent process nodes is predicted, so as to control the process nodes of the Czochralski single crystal process accordingly. This achieves digital, networked, and intelligent control that conforms to the characteristics of the Czochralski single crystal process, avoiding problems such as serious waste of personnel, long statistical cycles, lagging information flow, and inability to guarantee accuracy.

[0081] Reference Figure 3 The diagram illustrates a flowchart of an embodiment of a process node control method according to the present invention, which may specifically include the following steps:

[0082] Step 201: Obtain the operating information of each Czochralski single crystal device and the preset information of the process node.

[0083] Step 202: Based on the operating information, determine the current process node and process sub-node of the corresponding Czochralski single crystal equipment.

[0084] In this embodiment of the invention, the furnace tracking node includes multiple process sub-nodes, the initial equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node.

[0085] The furnace closure tracking node includes multiple process sub-nodes from the start of furnace shutdown to the start of evacuation. For example, since the start of furnace dismantling is a key step between the end of the previous furnace and the start of the next furnace, furnace dismantling and hot zone cleaning are required. These are manual steps that take a long time, so a process sub-node is set up.

[0086] The first equal diameter node includes multiple process sub-nodes from the start of evacuation of the furnace to the first equal diameter of the furnace, such as heating, melting, feeding, and crucible rotation.

[0087] The equal-diameter feeding node includes multiple process sub-nodes from the start of the automatic material calling task in the central control system to the entry into the equal-diameter feeding stage. It can track intermediate process sub-nodes such as feeding, bar retrieval, feeding start, and feeding end. For process sub-nodes that have not yet started, the estimated start time of subsequent process nodes and process sub-nodes can be predicted based on the standard time of each process sub-node. Completed nodes can be identified in a timely manner to identify wasted time. For future nodes, the estimated start time can be predicted, and node tracking can be performed.

[0088] The "no-material equal diameter node" is an anomaly that occurs during crystal pulling, encompassing multiple process sub-nodes. For example, it might involve manual intervention during shoulder formation, wire breakage, or re-intervention of process sub-nodes such as temperature adjustment, crystal pulling, and shoulder formation. This allows production staff to promptly understand and analyze the reasons for failing to reach the equal diameter stage, determining whether the cause is human error or a system parameter setting issue.

[0089] In this embodiment of the invention, for a Czochralski single crystal device, the current process node and process sub-node are first determined based on operating information and preset information. For example, when one or more operating information of the Czochralski single crystal device matches the preset information of a certain process sub-node under the furnace tracking node, the current process node is determined to be the furnace tracking node, and the process sub-node is determined to be that process sub-node.

[0090] In an optional embodiment of the present invention, the operation information includes the process nodes and process sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operation information of at least one operation task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

[0091] The real-time data includes power, remaining material, etc., collected from the Czochralski single crystal equipment, or any other applicable data; this embodiment of the invention does not limit this. Hardware information includes hot zone dimensions, full crucible material, crucible loading, etc., or any other applicable information; this embodiment of the invention does not limit this.

[0092] Within a process sub-node, workers need to complete one or more operational tasks. Only after completing each operational task in a process sub-node can a worker proceed to the next. The real-time status of the operational tasks describes the current state of each task. The operational information includes information submitted by the worker upon completion of the task, or any other applicable information; this embodiment of the invention does not impose any limitations on this.

[0093] The standard data for a process node includes data based on the standard requirements set for that process node, or any other applicable data; this embodiment of the invention does not impose any limitations on this. The standard man-hours for a process node are the man-hours required by the standard requirements set for that process node.

[0094] For example, such as Figure 4 The diagram illustrates the process node control system. Data sources include a real-time database (ScadaDB), a task database (TaskDB), and a task center (TaskCenter). The real-time database primarily stores real-time data collected from each Czochralski crystal pulling device and performs different analyses on this data as needed. The task database stores hardware information of the Czochralski crystal pulling device and operational information for different tasks generated by the central control unit. The task center primarily stores the real-time status of operational tasks for parsing real-time tasks. Data preparation involves obtaining different data from different data sources. From the front dataset (FrontData), the previous state of the Czochralski crystal pulling device, the previous process node, and process sub-nodes are obtained. From the raw dataset (IngotData), parameters such as power, remaining material, and length—i.e., real-time data—are obtained to predict upcoming process nodes. From the analysis dataset (AnalysisData), parsed data—i.e., standard data—is obtained, also used to predict upcoming process nodes. From the parameter dataset (PramaData), the standard man-hours for each process node are obtained. The system retrieves furnace hardware information, such as hot zone dimensions, crucible fullness, and crucible loading, from the furnace basic information set (PullerInfoData) to estimate shutdown time. It also retrieves information about on-site responses to operation tasks, such as furnace closure tasks. When the furnace closure action is completed on-site, a button is clicked to confirm completion, allowing the next operation task to proceed. Finally, it retrieves the real-time status of each operation task from the trigger data set (TriggerData) and filters out tasks that meet certain criteria, such as shutdown preparation tasks. When a shutdown preparation task is triggered, a process sub-node—shutdown start—is generated in the furnace closure tracking node.

[0095] In one optional embodiment of the present invention, such as Figure 5 The diagram shows the process nodes and sub-nodes. The process sub-nodes corresponding to the furnace closure tracking node include: furnace shutdown start, furnace dismantling start, furnace loading completion, furnace closure hygiene confirmation, material feeding completion, and evacuation start. The process sub-nodes corresponding to the first equal-diameter node include: evacuation start, melting start, material feeding completion, material feeding start, material feeding end, crucible rotation, crystal pulling start, shoulder formation start, and equal-diameter start. The process sub-nodes corresponding to the material feeding equal-diameter node include: material calling start, material feeding completion, rod removal completion, material feeding start, material feeding end, crystal pulling start, shoulder formation start, and equal-diameter start. The process sub-nodes corresponding to the no-material-feed equal-diameter node include: no-material-feed task start, crystal pulling start, shoulder formation start, and equal-diameter start.

[0096] Based on the characteristics of the Czochralski single crystal process and the requirements for process node control, this invention proposes to divide the Czochralski single crystal process into the aforementioned process nodes and process sub-nodes.

[0097] Step 203: Based on the operating information, preset information, and the current process node and process sub-node, determine the subsequent process nodes and process sub-nodes of the corresponding Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process sub-nodes.

[0098] In this embodiment of the invention, after determining the current process node and process sub-node, subsequent process nodes and process sub-nodes can be determined based on the operation information and preset information. For example, if the current process sub-node is the start of melting at the first equal-diameter node, then the next process sub-node is the completion of feeding.

[0099] In this embodiment of the invention, in addition to determining subsequent process nodes and process sub-nodes, the estimated start time of subsequent process nodes and process sub-nodes can also be determined. Based on operational information and preset information, the estimated start time of the next process sub-node is calculated. The method for calculating the estimated start time can differ for different process sub-nodes. For example, based on parameters such as power, remaining material, and ingot length, as well as standard data for the process sub-node, the time required to complete the current process sub-node is calculated, thereby obtaining the estimated start time of the next process sub-node. The preset information includes the standard working hours of each process sub-node. By adding the standard working hours of the next process sub-node, the estimated start time of the next-next process sub-node can be calculated, and so on, to obtain the estimated start time of subsequent process sub-nodes.

[0100] For example, such as Figure 4 As shown, the data calculation section is divided into three modules: the stateroute module, the operationcenter module, and the savemethod module. The stateroute module generates the current process node and its sub-nodes, such as the initial equal-diameter step and its sub-nodes: evacuation start, feeding start, and melting completion. The operationcenter module predicts subsequent process nodes and sub-nodes. For example, for the initial equal-diameter step, if the current sub-node is melting completion, the operationcenter predicts subsequent sub-nodes such as feeding start, feeding end, crucible rotation, and crystal pulling start, along with their estimated start times, based on standard timeframes. The savemethod module reads configuration files, reads SQL, writes logs, and writes to the cache. The data storage section stores the calculated results from each module into ScadaDB and logs for later querying and tracing. The front-end access section develops time management and node prediction reports in the reporting system for user querying and management.

[0101] For example, such as Figure 6The diagram shows the process nodes and sub-nodes. In the diagram, "State" represents various states on the Czochralski single crystal equipment, such as temperature adjustment, crystal pulling, shoulder formation, and equal diameter, i.e., real-time data. ZK013 is the melting and feeding task; ZK035, ZK038, and ZK040 are the wire break feeding, finishing feeding, and early feeding tasks; ZK003 is the furnace assembly / disassembly / cleaning task; ZK005 is the suction and feeding task; these are all real-time states. "Stepno" represents the custom step state, derived from parsed data, which is also real-time data.

[0102] Central control tasks refer to the operational tasks issued from the central control unit. Operational tasks are the process flow of the entire single crystal manufacturing process that is organized into several operational tasks, such as furnace shutdown for material preparation and material feeding tasks.

[0103] In the furnace closure tracking node, when ZK003 = parameter 1 for a Czochralski single crystal device, the Czochralski single crystal device enters the process sub-node of furnace shutdown start; when ZK003 = parameter 2, the Czochralski single crystal device enters the process sub-node of furnace dismantling start; if ZK003 = parameter 3, the Czochralski single crystal device enters the process sub-node of furnace loading completion; when ZK005 = parameter 4, the Czochralski single crystal device enters the process sub-node of furnace closure cleaning; when ZK005 = parameter 5, the Czochralski single crystal device enters the process sub-node of material feeding completion; when State = parameter 6, the Czochralski single crystal device enters the process sub-node of evacuation start, and this process node ends.

[0104] In the initial equal-diameter node, when State = parameter 7, the Czochralski crystal pulling equipment enters the process sub-node of starting evacuation; when State = parameter 8, the Czochralski crystal pulling equipment enters the process sub-node of starting melting; when ZK013 = parameter 9 for one Czochralski crystal pulling equipment, the Czochralski crystal pulling equipment enters the process sub-node of completing feeding; when Stepno = parameter 10, the Czochralski crystal pulling equipment enters the process sub-node of starting feeding; if Stepno = parameter 11, the Czochralski crystal pulling equipment enters the process sub-node of ending feeding; when crucible rotation > parameter 12... When the state of the Czochralski single crystal equipment enters the process sub-node of crucible rotation, and when state = parameter 13, the Czochralski single crystal equipment enters the process sub-node of crystal pulling; when state = parameter 14, the Czochralski single crystal equipment enters the process sub-node of shoulder formation; when state ≠ parameter 14, the Czochralski single crystal equipment enters the process sub-node of manual cutting; when state ≠ parameter 15, the Czochralski single crystal equipment enters the process sub-node of breakage; when state = parameter 14, the Czochralski single crystal equipment enters the process sub-node of equal diameter formation; this process node ends.

[0105] In the equal-diameter feeding node, when ZK035 / ZK038 / ZK040 = feeding, the Czochralski crystal pulling equipment enters the process sub-node of task number 35 / 38 / 40; when crystal weight < parameter 16, the Czochralski crystal pulling equipment enters the process sub-node of starting rod removal; when ZK035 / ZK038 / ZK040 of one Czochralski crystal pulling equipment = parameter 1, the Czochralski crystal pulling equipment enters the process sub-node of feeding completion; when Stepno = parameter 18, the Czochralski crystal pulling equipment enters the process sub-node of starting feeding; if Stepno = parameter 19, the Czochralski crystal pulling equipment enters the process sub-node of ending feeding. Process sub-nodes: When crucible rotation > parameter 20, the Czochralski single crystal equipment enters the process sub-node of crucible rotation; when State = parameter 21, the Czochralski single crystal equipment enters the process sub-node of crystal pulling; when State = parameter 22, the Czochralski single crystal equipment enters the process sub-node of shoulder formation; when State ≠ parameter 22, the Czochralski single crystal equipment enters the process sub-node of manual cutting; when State ≠ parameter 23, the Czochralski single crystal equipment enters the process sub-node of breakage; when State = parameter 23, the Czochralski single crystal equipment enters the process sub-node of equal diameter formation; this process node ends.

[0106] In the non-feeding constant diameter node, when ZK035 / ZK038 / ZK040 = no feeding and State = 20, the Czochralski single crystal equipment enters the process sub-node of starting pull-out / remelting; when State = parameter 24, the Czochralski single crystal equipment enters the process sub-node of starting crystal pulling; when State = parameter 25, the Czochralski single crystal equipment enters the process sub-node of starting shoulder formation; when State ≠ parameter 25, the Czochralski single crystal equipment enters the process sub-node of manual cutting; when State ≠ parameter 26, the Czochralski single crystal equipment enters the process sub-node of breaking off; when State = parameter 26, the Czochralski single crystal equipment enters the process sub-node of starting constant diameter; this process node ends.

[0107] Step 204: Control the process nodes of each Czochralski single crystal device according to the current process node, the subsequent process nodes, and the expected start time of the subsequent process nodes.

[0108] In this embodiment of the invention, in addition to managing process nodes, process sub-nodes can also be managed. For specific implementation methods, please refer to the methods for managing process nodes, which will not be repeated here.

[0109] In an optional embodiment of the present invention, a specific implementation of controlling the process nodes of each Czochralski crystal pulling device based on the current process node of each Czochralski crystal pulling device, subsequent process nodes, and the expected start time of the subsequent process nodes includes: displaying, based on the current process node of each Czochralski crystal pulling device, subsequent process nodes, and the expected start time of the subsequent process nodes, the process nodes entering the equal-diameter Czochralski crystal pulling device and / or the process nodes entering the furnace-combining Czochralski crystal pulling device within a target time period; displaying, based on the current process node of each Czochralski crystal pulling device, the completion status and non-completion status of different personnel for the process nodes entering the equal-diameter Czochralski crystal pulling device and / or the process nodes entering the furnace-combining Czochralski crystal pulling device; and controlling the process nodes of each Czochralski crystal pulling device based on the completion status and non-completion status of different personnel.

[0110] Based on the completion and non-completion status of different staff members, the work progress can be managed and controlled to ensure the timely completion of the target. Furthermore, the workload of different staff members can be managed and controlled to rationally allocate their workload.

[0111] like Figure 7 The diagram shows the completion and incomplete statuses. Enter the target time and query time range to obtain the target time period. You can then query the number of Czochralski (CZ) single-crystal pulling machines used for the process node and the number of CZ single-crystal pulling machines used for the process node in the furnace fusion within this target time period. Click... Figure 7 The path equalization target in the image displays the completion and non-completion status of each worker's assessment. Click to view the target. Figure 7 The system displays the completion and non-completion status of each worker's work on the furnace closure target. This allows for the estimation of whether today's equal diameter / furnace closure target can be achieved, and for forecasting today's output based on the equal diameter status. This enables the management of worker progress and the rational allocation of workload. Clicking on the corresponding numbers for target, completion, and non-completion reveals more detailed information, such as the current process node and abnormal working hours affected by historical process nodes. Figure 8 A diagram showing the detailed completion and non-completion statuses.

[0112] In an optional embodiment of the present invention, a specific implementation of controlling the process nodes of each Czochralski single crystal device based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes includes: displaying the completion status of all process nodes for each Czochralski single crystal device; and controlling the process nodes of each Czochralski single crystal device based on the completion status of all process nodes.

[0113] like Figure 9 The diagram shows the completion status of all process nodes for the Czochralski single crystal equipment. Click to jump to the details to view the completion status of all process nodes for each Czochralski single crystal equipment, so as to identify problems in a timely manner.

[0114] According to an embodiment of the present invention, by acquiring the operating information of each Czochralski single crystal device and the preset time of each process node; wherein, the process node includes a furnace closing tracking node, an initial equal diameter node, a charging equal diameter node, and a no-charging equal diameter node, the furnace closing tracking node includes multiple process sub-nodes from the start of furnace shutdown to the start of evacuation, the initial equal diameter node includes multiple process sub-nodes from the start of evacuation to the start of the first equal diameter, the charging equal diameter node includes multiple process sub-nodes from the start of charging to the start of equal diameter, and the no-charging equal diameter node includes multiple process sub-nodes from the start of the no-charging task to the start of equal diameter, based on the operating information, the corresponding current process node and process sub-node of the Czochralski single crystal device are determined, and based on the operating information and preset time, the process node and process sub-node of the Czochralski single crystal device are determined. Based on the information and the current process node and sub-node, the system determines the subsequent process nodes and sub-nodes of the Czochralski crystal pulling equipment, as well as their estimated start times. It then manages the process nodes of each Czochralski crystal pulling equipment according to their current process node and the estimated start times of subsequent process nodes. This allows for the automatic determination of the current process node and prediction of the start times of subsequent process nodes, enabling the management of the Czochralski crystal pulling process nodes. This achieves digital, networked, and intelligent management that conforms to the characteristics of the Czochralski crystal pulling process, avoiding problems such as significant personnel waste, long statistical cycles, lagging information flow, and inaccurate data.

[0115] It should be noted that, for the sake of simplicity, the method embodiments are all described as a series of actions. However, those skilled in the art should understand that the embodiments of the present invention are not limited to the described order of actions, because according to the embodiments of the present invention, some steps can be performed in other orders or simultaneously. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions involved are not necessarily essential to the embodiments of the present invention.

[0116] Reference Figure 10 The diagram shows a structural block diagram of an embodiment of a process node control device according to the present invention, which may specifically include the following modules:

[0117] The information acquisition module 301 is used to acquire the operating information of each Czochralski single crystal device and the preset information of the process node;

[0118] The node determination module 302 is used to determine the current process node of the Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes based on the operation information and preset information.

[0119] The node control module 303 is used to control the process nodes of each Czochralski single crystal device based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes.

[0120] Optionally, the process nodes include a furnace closure tracking node, an initial equal-diameter node, a charging equal-diameter node, and a no-charging equal-diameter node. The furnace closure tracking node corresponds to the process from the start of furnace shutdown to the start of evacuation. The initial equal-diameter node corresponds to the process from the start of evacuation to the start of the first equal-diameter operation. The charging equal-diameter node corresponds to the process from the start of charging to the start of equal-diameter operation. The no-charging equal-diameter node corresponds to the process from the start of the no-charging task to the start of equal-diameter operation.

[0121] Optionally, the furnace tracking node includes multiple process sub-nodes, the initial equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node;

[0122] The node determination module includes:

[0123] The first node determination submodule is used to determine the current process node and process sub-node of the Czochralski single crystal equipment based on the operation information and preset information.

[0124] The second node determination submodule is used to determine the subsequent process nodes and process subnodes of the Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process subnodes, based on the operation information, preset information, and the current process node and process subnode.

[0125] Optionally, the process sub-nodes corresponding to the furnace closure tracking node include furnace shutdown start, furnace dismantling start, furnace loading completion, furnace closure hygiene confirmation, material feeding completion, and evacuation start; the process sub-nodes corresponding to the first equal diameter node include evacuation start, melting start, material feeding completion, material feeding start, material feeding end, crucible rotation, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the material feeding equal diameter node include material calling start, material feeding completion, rod removal completion, material feeding start, material feeding end, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the no-material feeding equal diameter node include no-material feeding task start, crystal pulling start, shoulder formation start, and equal diameter start.

[0126] Optionally, the operation information includes the process nodes and process sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operation information of at least one operation task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

[0127] Optionally, the node management module includes:

[0128] The equipment display submodule is used to display, based on the current process node of each Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes, the Czochralski single crystal equipment entering the same diameter process node and / or the Czochralski single crystal equipment entering the furnace during the target time period.

[0129] The first status display submodule is used to display the completion and non-completion status of different workers based on the current process node of each Czochralski single crystal equipment, for Czochralski single crystal equipment with equal diameter entering the process node and / or Czochralski single crystal equipment entering the furnace.

[0130] The first node control submodule is used to control the process nodes of each Czochralski single crystal device based on the completion and non-completion status of different staff members.

[0131] Optionally, the node management module includes:

[0132] The second status display submodule is used to display the completion status of all process nodes for each of the aforementioned Czochralski single crystal devices;

[0133] The second node control submodule is used to control the process nodes of each of the Czochralski single crystal devices based on the completion status of all process nodes.

[0134] According to an embodiment of the present invention, by acquiring the operating information of each Czochralski single crystal pulling device and the preset time of each process node; wherein, the process node includes a furnace closing tracking node, an initial equal diameter node, a charging equal diameter node, and a no-charging equal diameter node, the furnace closing tracking node includes multiple process sub-nodes from the start of furnace shutdown to the start of evacuation, the initial equal diameter node includes multiple process sub-nodes from the start of evacuation to the start of the first equal diameter, the charging equal diameter node includes multiple process sub-nodes from the start of charging to the start of equal diameter, and the no-charging equal diameter node includes multiple process sub-nodes from the start of the no-charging task to the start of equal diameter, and based on the operating information and preset time, the following is determined: The corresponding Czochralski single crystal equipment is currently at a specific process node, and the expected start time of subsequent process nodes is determined. Based on this information, the process nodes of each Czochralski single crystal equipment are managed and controlled. This allows for the automatic determination of the current process node and prediction of the start time of subsequent process nodes for the Czochralski single crystal process. This enables the management and control of the Czochralski single crystal process in a digital, networked, and intelligent manner that conforms to the characteristics of the Czochralski single crystal process, avoiding problems such as serious personnel waste, long statistical cycles, lagging information flow, and inability to guarantee accuracy.

[0135] As the device embodiment is basically similar to the method embodiment, the description is relatively simple, and relevant parts can be found in the description of the method embodiment.

[0136] Figure 11 This is a structural block diagram illustrating an electronic device 400 for shoulder-turn activation according to an exemplary embodiment. For example, the electronic device 400 may be a mobile phone, computer, digital broadcasting terminal, messaging device, game console, tablet device, medical device, fitness equipment, personal digital assistant, etc.

[0137] Reference Figure 11 The electronic device 400 may include one or more of the following components: processing component 402, memory 404, power supply component 406, multimedia component 408, audio component 410, input / output (I / O) interface 412, sensor component 414, and communication component 416.

[0138] Processing component 402 typically controls the overall operation of electronic device 400, such as operations associated with display, telephone calls, data communication, camera operation, and recording operations. Processing component 402 may include one or more processors 420 to execute instructions to complete all or part of the steps of the aforementioned process node control method. Furthermore, processing component 402 may include one or more modules to facilitate interaction between processing component 402 and other components. For example, processing component 402 may include a multimedia module to facilitate interaction between multimedia component 408 and processing component 402.

[0139] Memory 404 is configured to store various types of data to support the operation of device 400. Examples of this data include instructions for any application or method operating on electronic device 400, contact data, phonebook data, messages, pictures, videos, etc. Memory 404 can be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic storage, flash memory, magnetic disk, or optical disk.

[0140] Power component 404 provides power to various components of electronic device 400. Power component 404 may include a power management system, one or more power supplies, and other components associated with generating, managing, and distributing power to electronic device 400.

[0141] Multimedia component 408 includes a screen that provides an output interface between the electronic device 400 and the user. In some embodiments, the screen may include a liquid crystal display (LCD) and a touch panel (TP). If the screen includes a touch panel, the screen may be implemented as a touchscreen to receive input signals from the user. The touch panel includes one or more touch sensors to sense touches, swipes, and gestures on the touch panel. The touch sensors may sense not only the boundaries of the touch or swipe action but also the duration and pressure associated with the touch or swipe operation. In some embodiments, multimedia component 408 includes a front-facing camera and / or a rear-facing camera. When the electronic device 400 is in an operating mode, such as a shooting mode or a video mode, the front-facing camera and / or the rear-facing camera may receive external multimedia data. Each front-facing camera and rear-facing camera may be a fixed optical lens system or have focal length and optical zoom capabilities.

[0142] Audio component 410 is configured to output and / or input audio signals. For example, audio component 410 includes a microphone (MIC) configured to receive external audio signals when electronic device 400 is in an operating mode, such as call mode, recording mode, and voice recognition mode. The received audio signals may be further stored in memory 404 or transmitted via communication component 416. In some embodiments, audio component 410 also includes a speaker for outputting audio signals.

[0143] I / O interface 412 provides an interface between processing component 402 and peripheral interface modules, such as keyboards, click wheels, buttons, etc. These buttons may include, but are not limited to, home buttons, volume buttons, power buttons, and lock buttons.

[0144] Sensor assembly 414 includes one or more sensors for providing state assessments of various aspects of electronic device 400. For example, sensor assembly 414 may detect the on / off state of device 400, the relative positioning of components such as the display and keypad of electronic device 400, changes in position of electronic device 400 or a component of electronic device 400, the presence or absence of user contact with electronic device 400, orientation or acceleration / deceleration of electronic device 400, and temperature changes of electronic device 400. Sensor assembly 414 may include a proximity sensor configured to detect the presence of nearby objects without any physical contact. Sensor assembly 414 may also include a light sensor, such as a CMOS or CCD image sensor, for use in imaging applications. In some embodiments, sensor assembly 414 may also include an accelerometer, gyroscope, magnetometer, pressure sensor, or temperature sensor.

[0145] Communication component 416 is configured to facilitate wired or wireless communication between electronic device 400 and other devices. Electronic device 400 can access wireless networks based on communication standards, such as WiFi, 2G, or 3G, or combinations thereof. In one exemplary embodiment, communication component 414 receives broadcast signals or broadcast-related information from an external broadcast management system via a broadcast channel. In one exemplary embodiment, communication component 414 also includes a near-field communication (NFC) module to facilitate short-range communication. For example, the NFC module may be implemented based on radio frequency identification (RFID) technology, Infrared Data Association (IrDA) technology, ultra-wideband (UWB) technology, Bluetooth (BT) technology, and other technologies.

[0146] In an exemplary embodiment, the electronic device 400 may be implemented by one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), controllers, microcontrollers, microprocessors, or other electronic components to perform the above-described process node control method.

[0147] In an exemplary embodiment, a non-transitory computer-readable storage medium including instructions is also provided, such as a memory 404 including instructions, which can be executed by a processor 420 of an electronic device 400 to complete the aforementioned process node control method. For example, the non-transitory computer-readable storage medium may be a ROM, random access memory (RAM), CD-ROM, magnetic tape, floppy disk, and optical data storage device, etc.

[0148] A non-transitory computer-readable storage medium, when instructions in the storage medium are executed by a terminal's processor, enables the terminal to execute a process node management method, the method comprising:

[0149] Obtain the operating information of each Czochralski single crystal device, as well as the preset information of the process nodes;

[0150] Based on the operating information and preset information, determine the current process node of the Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes;

[0151] Based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes, the process nodes of each Czochralski single crystal device are controlled.

[0152] Optionally, the process nodes include a furnace closure tracking node, an initial equal-diameter node, a charging equal-diameter node, and a no-charging equal-diameter node. The furnace closure tracking node corresponds to the process from the start of furnace shutdown to the start of evacuation. The initial equal-diameter node corresponds to the process from the start of evacuation to the start of the first equal-diameter operation. The charging equal-diameter node corresponds to the process from the start of charging to the start of equal-diameter operation. The no-charging equal-diameter node corresponds to the process from the start of the no-charging task to the start of equal-diameter operation.

[0153] Optionally, the furnace tracking node includes multiple process sub-nodes, the initial equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node;

[0154] The step of determining the current process node of the Czochralski single crystal equipment based on the operating information and preset information, and the subsequent process nodes and their expected start times, includes:

[0155] Based on the operational information and preset information, the current process node and process sub-node of the corresponding Czochralski single crystal equipment are determined;

[0156] Based on the operational information, preset information, and the current process node and process sub-node, determine the subsequent process nodes and process sub-nodes of the corresponding Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process sub-nodes.

[0157] Optionally, the process sub-nodes corresponding to the furnace closure tracking node include furnace shutdown start, furnace dismantling start, furnace loading completion, furnace closure hygiene confirmation, material feeding completion, and evacuation start; the process sub-nodes corresponding to the first equal diameter node include evacuation start, melting start, material feeding completion, material feeding start, material feeding end, crucible rotation, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the material feeding equal diameter node include material calling start, material feeding completion, rod removal completion, material feeding start, material feeding end, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the no-material feeding equal diameter node include no-material feeding task start, crystal pulling start, shoulder formation start, and equal diameter start.

[0158] Optionally, the operation information includes the process nodes and process sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operation information of at least one operation task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

[0159] Optionally, the step of controlling the process nodes of each Czochralski single crystal device based on the current process node of each device, subsequent process nodes, and the expected start time of the subsequent process nodes includes:

[0160] Based on the current process node of each of the Czochralski single crystal devices, the subsequent process nodes, and the expected start time of the subsequent process nodes, the display shows the Czochralski single crystal devices with process nodes entering the same diameter and / or the Czochralski single crystal devices entering the furnace during the target time period.

[0161] Based on the current process node of each Czochralski single crystal equipment, the completion and non-completion status of different workers are displayed for Czochralski single crystal equipment with equal diameter entering the process node and / or Czochralski single crystal equipment entering the furnace.

[0162] Based on the completion and non-completion status of different staff members, the process nodes of each Czochralski single crystal equipment are controlled.

[0163] Optionally, the step of controlling the process nodes of each Czochralski single crystal device based on the current process node of each device, subsequent process nodes, and the expected start time of the subsequent process nodes includes:

[0164] For each of the aforementioned Czochralski single crystal devices, the completion status of all process nodes is displayed;

[0165] Based on the completion status of all process nodes, the process nodes of each Czochralski single crystal device are controlled.

[0166] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0167] Those skilled in the art will understand that embodiments of the present invention can be provided as methods, apparatus, or computer program products. Therefore, embodiments of the present invention can take the form of entirely hardware embodiments, entirely software embodiments, or embodiments combining software and hardware aspects. Furthermore, embodiments of the present invention can take the form of computer program products implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0168] This invention is described with reference to flowchart illustrations and / or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing terminal device to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal device, generate instructions for implementing the flowchart illustrations and / or block diagrams. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0169] These computer program instructions may also be stored in a computer-readable storage medium capable of directing a computer or other programmable data processing terminal device to operate in a predictive manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0170] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal equipment, causing a series of operational steps to be performed on the computer or other programmable terminal equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable terminal equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0171] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present invention.

[0172] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0173] The present invention has provided a detailed description of a process node control method and apparatus, an electronic device, and a readable storage medium. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A method for controlling process nodes, characterized in that, include: Obtain the operating information of each Czochralski single crystal device, as well as the preset information of the process nodes; Based on the operating information and preset information, determine the current process node of the Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes; Based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes, the process nodes of each Czochralski single crystal device are controlled. The process nodes include the furnace closure tracking node, the first equal diameter node, the charging equal diameter node, and the no-charging equal diameter node. The furnace closure tracking node corresponds to the process from the start of furnace shutdown to the start of evacuation. The first equal diameter node corresponds to the process from the start of evacuation to the start of the first equal diameter. The charging equal diameter node corresponds to the process from the start of charging to the start of equal diameter. The no-charging equal diameter node corresponds to the process from the start of the no-charging task to the start of equal diameter. The furnace closure tracking node includes multiple process sub-nodes, the first equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node; The step of determining the current process node of the Czochralski single crystal equipment based on the operating information and preset information, and the subsequent process nodes and their expected start times, includes: Based on the operational information and preset information, the current process node and process sub-node of the corresponding Czochralski single crystal equipment are determined; Based on the operating information, preset information, and the current process node and process sub-node, determine the subsequent process nodes and process sub-nodes of the corresponding Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process sub-nodes. The operational information includes the process nodes and sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operational information of at least one operational task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

2. The method according to claim 1, characterized in that, The process sub-nodes corresponding to the furnace closure tracking node include furnace shutdown start, furnace dismantling start, furnace loading completion, furnace closure hygiene confirmation, material feeding completion, and evacuation start; the process sub-nodes corresponding to the first equal diameter node include evacuation start, melting start, material feeding completion, material feeding start, material feeding end, crucible rotation, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the material feeding equal diameter node include material calling start, material feeding completion, rod removal completion, material feeding start, material feeding end, crystal pulling start, shoulder formation start, and equal diameter start; the process sub-nodes corresponding to the no-material feeding equal diameter node include no-material feeding task start, crystal pulling start, shoulder formation start, and equal diameter start.

3. The method according to claim 1, characterized in that, The process node control of each Czochralski single crystal device based on its current process node, subsequent process nodes, and the expected start time of those subsequent process nodes includes: Based on the current process node of each of the Czochralski single crystal devices, the subsequent process nodes, and the expected start time of the subsequent process nodes, the display shows the Czochralski single crystal devices with process nodes entering the same diameter and / or the Czochralski single crystal devices entering the furnace during the target time period. Based on the current process node of each Czochralski single crystal equipment, the completion and non-completion status of different workers are displayed for Czochralski single crystal equipment with equal diameter entering the process node and / or Czochralski single crystal equipment entering the furnace. Based on the completion and non-completion status of different staff members, the process nodes of each Czochralski single crystal equipment are controlled.

4. The method according to claim 1, characterized in that, The process node control of each Czochralski single crystal device based on its current process node, subsequent process nodes, and the expected start time of those subsequent process nodes includes: For each of the aforementioned Czochralski single crystal devices, the completion status of all process nodes is displayed; Based on the completion status of all process nodes, the process nodes of each Czochralski single crystal device are controlled.

5. A process node control device, characterized in that, include: The information acquisition module is used to acquire the operating information of each Czochralski single crystal device, as well as the preset information of the process nodes; The node determination module is used to determine the current process node of the Czochralski single crystal equipment, the subsequent process nodes, and the expected start time of the subsequent process nodes based on the operation information and preset information. The node control module is used to control the process nodes of each Czochralski single crystal device based on the current process node of each Czochralski single crystal device, the subsequent process nodes, and the expected start time of the subsequent process nodes. The process nodes include the furnace closure tracking node, the first equal diameter node, the charging equal diameter node, and the no-charging equal diameter node. The furnace closure tracking node corresponds to the process from the start of furnace shutdown to the start of evacuation. The first equal diameter node corresponds to the process from the start of evacuation to the start of the first equal diameter. The charging equal diameter node corresponds to the process from the start of charging to the start of equal diameter. The no-charging equal diameter node corresponds to the process from the start of the no-charging task to the start of equal diameter. The furnace closure tracking node includes multiple process sub-nodes, the initial equal diameter node includes multiple process sub-nodes, the charging equal diameter node includes multiple process sub-nodes, the non-charging equal diameter node includes multiple process sub-nodes, and the preset information includes the standard working hours of each process sub-node; The step of determining the current process node of the Czochralski single crystal equipment based on the operating information and preset information, and the subsequent process nodes and their expected start times, includes: Based on the operational information and preset information, the current process node and process sub-node of the corresponding Czochralski single crystal equipment are determined; Based on the operating information, preset information, and the current process node and process sub-node, determine the subsequent process nodes and process sub-nodes of the corresponding Czochralski single crystal equipment, as well as the expected start time of the subsequent process nodes and process sub-nodes. The operational information includes the process nodes and sub-nodes passed through, real-time data and hardware information collected from the Czochralski single crystal equipment, real-time status and operational information of at least one operational task to be completed in the process sub-node, and the preset information includes standard data and standard working hours for each process node.

6. An electronic device, characterized in that, It includes a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus; Memory, used to store computer programs; A processor, when executing a program stored in memory, implements the method described in any one of claims 1-4.

7. A readable storage medium, characterized in that, When the instructions in the storage medium are executed by the processor of the electronic device, the electronic device is able to perform the process node control method as described in any one of claims 1-4.

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