Liquid discharge head and liquid discharge apparatus

Abstract

The liquid discharge head includes: a nozzle member having a nozzle; a valve configured to open and close the nozzle; an actuator configured to actuate the valve; a diaphragm located between the valve and the actuator; and a housing. The diaphragm is configured to vibrate in response to actuation by the actuator. The housing holds the nozzle member, the valve, the actuator, and the diaphragm. The diaphragm has a thin film portion that is not held by the housing, and the thin film portion is thinner than the portion of the diaphragm held by the housing.

Description

Technical Field

[0001] Various aspects of this disclosure relate to liquid discharge heads and liquid discharge devices. Background Technology

[0002] Patent document 1 discloses an inkjet nozzle including a solenoid and a needle valve. By appropriately controlling the excitation of the solenoid to drive the movable iron core, the needle valve opens and closes the nozzle orifice.

[0003] Patent document 2 discloses a liquid discharge head that pressurizes discharged liquid from a nozzle and supplies the discharged liquid to a cavity communicating with the nozzle. The liquid discharge head includes a pin that closes the nozzle, an actuator that contacts and separates the pin from the nozzle, and a controller that controls the actuator. The discharged liquid is discharged from the nozzle as droplets only when the pin is separated from the nozzle.

[0004] Citation List

[0005] Patent documents

[0006] [PTL 1] Japanese Unexamined Patent Application Publication No. 2004-142382

[0007] [PTL 2] Japanese Unexamined Patent Application Publication No. 2010-241003 Summary of the Invention

[0008] Technical issues

[0009] One object of the present invention is to provide a liquid discharge head that enables the liquid to travel a long distance while preventing damage to the actuator caused by the liquid adhering to the actuator.

[0010] Solution to the problem

[0011] The liquid discharge head of the present invention includes: a nozzle member having a nozzle; a valve configured to open and close the nozzle; an actuator configured to drive the valve; a diaphragm located between the valve and the actuator; and a housing. The diaphragm is configured to vibrate in response to actuation by the actuator. The housing holds the nozzle member, the valve, the actuator, and the diaphragm. The diaphragm has a thin film portion that is not held by the housing, and the thin film portion is thinner than the portion of the diaphragm held by the housing.

[0012] Effects of the present invention

[0013] According to the present invention, a liquid discharge head can be provided that enables the liquid to travel a long distance while preventing damage to the actuator caused by the liquid adhering to the actuator. Attached Figure Description

[0014] A more complete understanding of the embodiments and their many incidental advantages and features can be readily obtained and understood from the following detailed description with reference to the accompanying drawings.

[0015] [ Figure 1 ]

[0016] Figure 1 This is a perspective view showing the appearance of a liquid discharge head according to an embodiment of the present disclosure.

[0017] [ Figure 2 ]

[0018] Figure 2 This is a cross-sectional view showing the interior of the liquid discharge head according to an embodiment of the present disclosure.

[0019] [ Figure 3A and Figure 3B ]

[0020] Figure 3A and Figure 3B This is a cross-sectional view of the liquid discharge module of the liquid discharge head.

[0021] [ Figure 4 ]

[0022] Figure 4 This is a cross-sectional view of the diaphragm and its surroundings of the liquid discharge head according to a first embodiment of the present disclosure.

[0023] [ Figure 5 ]

[0024] Figure 5 It is a cross-sectional view showing a portion of the diaphragm and its periphery in the first embodiment, enlarged.

[0025] [ Figure 6 ]

[0026] Figure 6 This is a cross-sectional view of the diaphragm and its surroundings of the liquid discharge head according to a second embodiment of the present disclosure.

[0027] [ Figure 7 ]

[0028] Figure 7 This is a cross-sectional view showing an enlarged view of a portion of the diaphragm and its periphery in the second embodiment.

[0029] [ Figure 8 ]

[0030] Figure 8 This is a cross-sectional view showing an enlarged view of a portion of the diaphragm and its periphery in the third embodiment.

[0031] [ Figure 9 ]

[0032] Figure 9 This is a cross-sectional view of the diaphragm and its surroundings of the liquid discharge head according to the fourth embodiment of this disclosure.

[0033] [ Figure 10 ]

[0034] Figure 10 This is a cross-sectional view of the diaphragm and its surroundings of the liquid discharge head according to the fifth embodiment of this disclosure.

[0035] [ Figure 11A and Figure 11B ]

[0036] Figure 11A and Figure 11B This is a cross-sectional view of a modified liquid discharge head according to this disclosure.

[0037] [ Figure 12 ]

[0038] Figure 12 This is a schematic perspective view of a liquid discharge device according to an embodiment of the present disclosure.

[0039] [ Figure 13 ]

[0040] Figure 13 This is a schematic perspective view of the carriage of a liquid discharge device according to an embodiment of the present disclosure.

[0041] The accompanying drawings are intended to illustrate exemplary embodiments of the invention and should not be construed as limiting its scope. Unless otherwise expressly stated, the drawings should not be considered to be drawn to scale. Furthermore, in several views, the same or similar reference numerals denote the same or similar parts. Specific Implementation

[0042] In describing the embodiments shown in the accompanying drawings, specific terms have been used for clarity. However, the disclosure of this specification is not intended to be limited to the selected specific terms, and it should be understood that each specific element includes all technical equivalents that have similar functions, operate in a similar manner, and achieve similar results.

[0043] The terms used herein are for illustrative purposes only and are not intended to limit the invention. As used herein, the singular forms “a,” “an,” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0044] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0045] Figure 1 This is a perspective view showing the appearance of a liquid discharge head 300 according to an embodiment of the present disclosure.

[0046] The liquid discharge head 300 (hereinafter simply referred to as "head 300") includes a housing 310, a connector 350, etc. The housing 310 includes a first housing 310a and a second housing 310b that engages with the first housing 310a. The second housing 310b includes housing portion 310b-1 and housing portion 310b-2. The housing 310 is made of a material such as metal or resin.

[0047] The second housing 310b retains the diaphragm 340 such that housing portions 310b-1 and 310b-2 of the second housing 310b sandwich the diaphragm 340. The connector 350 is a terminal for transmitting control signals from the head 300. Figure 1 It is located in the upper part of the housing 310.

[0048] The housing 310 is an example of the housing of the head 300, the first housing 310a is an example of the first housing, and the second housing 310b is an example of the second housing.

[0049] Figure 2 This is a cross-sectional view showing the interior of the head 300 according to this embodiment. The cross-sectional view is from... Figure 1 Observe in the direction indicated by the arrow Figure 1 Cross-sectional view of line AA.

[0050] As described above, the housing 310 of the head 300 includes a first housing 310a and a second housing 310b engaged with the first housing 310a, and the second housing 310b includes housing portion 310b-1 and housing portion 310b-2. The first housing 310a holds a nozzle plate 301 defining a liquid chamber 312 as described later. The nozzle plate 301 is a plate-shaped member having a nozzle 302 for discharging liquid (see reference). Figure 3A and Figure 3B The first housing 310a has a liquid chamber 312, which also serves as a flow path that delivers liquid from the liquid supply port 311 to the liquid recovery port 313 via the nozzle plate 301.

[0051] The second housing 310b includes a liquid supply port 311 and a liquid recovery port 313 communicating with the liquid chamber 312 of the first housing 310a. Between the liquid supply port 311 and the liquid recovery port 313, a liquid discharge module 330 is disposed for discharging liquid from the liquid chamber 312 through a nozzle 302. The number of liquid discharge modules 330 corresponds to the number of nozzles 302 provided in the first housing 310a; in this embodiment, it indicates that eight liquid discharge modules 330 are provided, corresponding to eight nozzles 302 arranged in a row.

[0052] In the liquid supply port 311 and the liquid recovery port 313, a seal 315, for example made of rubber, is installed at the joint of the first housing 310a and the second housing 310b. Thus, the seal 315 prevents liquid leakage from the joint of the first housing 310a and the second housing 310b.

[0053] Using the above structure, pressurized liquid is drawn from the outside of head 300 into liquid supply port 311, and flows along... Figure 2 The liquid is supplied in the direction indicated by the middle arrow d1 to the liquid chamber 312. The liquid supplied from the liquid supply port 311 flows along the nozzle plate 301 towards... Figure 2 The liquid is supplied to the liquid chamber 312 in the direction indicated by the middle arrow d2. Then, the liquid not discharged from the nozzles 302 arranged along the liquid chamber 312 passes through the liquid recovery port 313. Figure 2 Recover in the direction indicated by the middle arrow d3.

[0054] The liquid discharge module 330 includes a needle valve 331 for opening and closing the nozzle 302, and a piezoelectric element 332 for actuating the needle valve 331. The second housing 310b is located in... Figure 2 A limiter 314 is provided at the upper end facing the piezoelectric element 332. The limiter 314 contacts the upper end of the piezoelectric element 332, forming a fixed point for the piezoelectric element 332, that is, the base point when the piezoelectric element 332 shifts (elongates and contracts). A predetermined voltage is applied to the piezoelectric element 332 by a power source disposed inside or outside the liquid discharge module 330. The piezoelectric element 332 elongates and contracts at predetermined cycles due to repeated application and cessation of the predetermined voltage. Therefore, the needle valve 331 opens or closes the nozzle 302 at predetermined cycles, and droplets are discharged from the nozzle 302 at predetermined cycles. As the piezoelectric element 332, a material that elongates or contracts when a voltage is applied can be used.

[0055] A diaphragm 340 is located between housing portions 310b-1 and 310b-2 of the second housing 310b. The diaphragm 340 is positioned between the needle valve 331 and the piezoelectric element 332, effectively isolating them. The ends of the needle valve 331 and the piezoelectric element 332 facing the diaphragm 340 are fixed to the diaphragm 340 using adhesive or the like. The diaphragm 340 is formed to a thickness such that it can vibrate with the drive of the piezoelectric element 332 without hindering its movement, and can transmit the movement of the piezoelectric element 332 to the needle valve 331 (details will be described later).

[0056] In the above structure, when the piezoelectric element 332 is driven to move the needle valve 331 upward, the closed nozzle 302 becomes open due to the needle valve 331, and liquid can be discharged from the nozzle 302. Furthermore, when the piezoelectric element 332 is driven to move the needle valve 331 downward, the tip of the needle valve 331 contacts the nozzle 302, and the nozzle 302 becomes closed, preventing liquid from being discharged from the nozzle 302.

[0057] exist Figure 2 The description is based on a head 300 having eight nozzles 302 and eight liquid discharge modules 330, but the number of nozzles 302 and liquid discharge modules 330 is not limited to the above eight. For example, there may be nine or more nozzles 302 and liquid discharge modules 330, or there may be only one. Furthermore, the nozzles 302 and liquid discharge modules 330 may be arranged in multiple rows instead of a single row.

[0058] As described above, in this embodiment, the nozzle plate 301 includes a plurality of nozzles 302, and a plurality of needle valves 331 and a plurality of piezoelectric elements 332 are provided relative to each nozzle 302. Therefore, liquid can be applied to the object at high speed.

[0059] Nozzle plate 301 is an example of a nozzle component, needle valve 331 is an example of a valve, and piezoelectric element 332 is an example of an actuator.

[0060] Figure 3A and Figure 3B This is a cross-sectional view of the liquid discharge module 330 of the head 300. Figure 3A and Figure 3B This indicates a single liquid discharge module 330. Figure 3A This is a magnified view of a portion of the liquid discharge module 330. Figure 3B yes Figure 3A Detailed diagram of part A.

[0061] The liquid discharge module 330 includes a needle valve 331 and a piezoelectric element 332. When the piezoelectric element 332 moves in the direction indicated by arrow a1, it pulls the diaphragm 340, which is fixed at its lower end, in the direction indicated by arrow a1. The upper end of the needle valve 331 is fixed to the opposite side of the diaphragm 340; therefore, as the diaphragm 340 moves in the direction indicated by arrow a1, the needle valve 331 moves in the direction indicated by arrow a2. Figure 3B The displacement G1. As a result, a suitable gap is formed between the nozzle plate 301 and the top end 331a of the needle valve 331, and the liquid discharge module 330 discharges the liquid in the liquid chamber 312 from the nozzle 302.

[0062] When the piezoelectric element 332 operates in the direction indicated by arrow b1, the operation reverses, and the diaphragm 340 fixed at its lower end descends in the direction indicated by arrow b1. Furthermore, as the diaphragm 340 moves in the direction indicated by arrow b1, the needle valve 331 moves in the direction indicated by arrow b2. As a result, the tip 331a of the needle valve 331 comes into contact with the nozzle 302, closing the nozzle 302 and preventing the liquid discharge module 330 from discharging liquid. The tip 331a of the needle valve 331 is formed of an elastomer such as fluororesin, and the nozzle 302 is closed due to the pushing force from the piezoelectric element 332 in the direction of arrow b1.

[0063] As described above, the displacement G1 in the liquid discharge module 330 is a very small gap of a few micrometers. Furthermore, the force generated by the piezoelectric element 332 is also small. When controlling such a small gap, if a large load is applied to the needle valve 331 or the piezoelectric element 332, a suitable gap cannot be formed between the nozzle 302 and the needle valve 331, and the gap may become narrower. Therefore, fluid resistance increases, and the desired discharge state cannot be maintained. Specifically, because the liquid discharge rate slows down, the desired discharge droplet volume and flight distance may not be achieved.

[0064] Therefore, the diaphragm 340 according to this embodiment has a structure that prevents liquid in the liquid chamber 312 from entering the piezoelectric element 332 from the needle valve 331 side and adhering to the piezoelectric element 332. Thus, damage to the piezoelectric element 332 can be prevented. Furthermore, the structure of the diaphragm 340 does not impede the displacement of the needle valve 331 and the piezoelectric element 332 to obtain the desired amount of discharged droplets and flight distance. The structure of the diaphragm 340 will be described in detail below.

[0065] Figure 4 This is a cross-sectional view of the diaphragm 340 and its surroundings of the head 300 according to a first embodiment of the present disclosure. The same reference numerals are given for the same components as used in the above description, and redundant descriptions are omitted.

[0066] According to the first embodiment, the diaphragm 340 is as follows: Figure 4 The cross-section shown includes a thick-walled portion and a thin-film portion. The contact surfaces of the diaphragm 340 with the housing portions 310b-1 and 310b-2, i.e., the portion where the second housing 310b is held, constitute the thick-walled portion. Furthermore, the contact surfaces of the diaphragm 340 with the needle valve 331 and the piezoelectric element 332, i.e., the portion where the second housing 310b is not held, constitute the thin-film portion. Detailed descriptions are provided in the following figures.

[0067] Figure 5 This is an enlarged cross-sectional view of the diaphragm 340 and its surroundings according to the first embodiment.

[0068] The housing 310 includes a first housing 310a, a housing portion 310b-1 constituting a second housing 310b, and a housing portion 310b-2 constituting the second housing 310b. The first housing 310a has a first storage space S1. The first storage space S1 houses a needle valve 331, a bearing 333 that supports the needle valve 331 so that it can move in the directions indicated by arrows a2 and b2, and an O-ring 334 as a sealing element. In addition, at the location where the liquid chamber 312 is formed, the first housing 310a holds a nozzle plate 301, which is composed of a plate-shaped member, and is provided with a nozzle 302 for discharging liquid.

[0069] The housing portion 310b-1 is connected to the end of the first housing 310a opposite to the nozzle plate 301. The housing portion 310b-1 has a second receiving space S2, which receives a portion of the needle valve 331. Figure 4 upper part or Figure 5 (The right part of the text). Here, the first storage space S1 and the second storage space S2 are examples of "valve storage spaces". In the following description, the first storage space S1 and the second storage space S2 will be collectively referred to as valve storage spaces.

[0070] The housing portion 310b-2 is connected to the end of the housing portion 310a-1 opposite to the side of the first housing portion 310a via a diaphragm 340. The housing portion 310b-2 has a third storage space S3 for housing the piezoelectric element 332. The third storage space S3 has a width W1, which is configured not to obstruct the movement of the piezoelectric element 332 in the directions indicated by arrows a1 and b1. The third storage space S3 is an example of a "driver storage space," and will also be referred to as the driver storage space in the following description.

[0071] The diaphragm 340 has a thin film portion T2 that contacts the piezoelectric element 332 and is opposite to the third storage space S3. The thin film portion T2 has a width W1 that is approximately the same as the third storage space S3. The portion other than the thin film portion T2 (i.e., the portion held by the housing portion 310b-1 and the housing portion 310b-2) is a thick-walled portion T1.

[0072] The thin film portion T2 of the diaphragm 340 is formed to be approximately 3 to 20 μm thick by semi-etching. Semi-etching is effective when a predetermined shape is formed by intentionally controlling the etching balance dissolution (corrosion) process on each surface, or when etching only one side of the material to the middle of its thickness.

[0073] According to the above structure, the diaphragm 340 completely isolates the needle valve 331 side and the piezoelectric element 332 side.

[0074] That is, the isolation valve housing space and the actuator housing space. This structure can prevent liquid from the liquid chamber 312 from entering the piezoelectric element 332 side from the needle valve 331 side. That is, it can prevent liquid in the valve housing space communicating with the liquid chamber 312 from entering the actuator housing space. Furthermore, in the first housing space S1, which is the valve housing space, the needle valve 331 is provided with an O-ring 334 as a sealing element on the nozzle plate 301 side of the diaphragm 340. The O-ring 334 can also seal the intrusion of liquid from the liquid chamber 312, and thus, in Figure 4 In the middle, on its upper side (in Figure 5 A diaphragm 340 is provided on the right side. Therefore, the O-ring 334 and the diaphragm 340 can doubly prevent liquid from entering the piezoelectric element 332. In addition, the contact surface between the diaphragm 340 and the needle valve 331 and the piezoelectric element 332 is designed as a thin film structure, thus reducing the displacement resistance of the diaphragm 340 and increasing the flight distance of the liquid.

[0075] exist Figure 4 In the middle, the thin film section T2 is located on the lower side of the diaphragm 340 (nose valve 331 side), in Figure 5 The thick-walled portion T1 protrudes upwards (towards the piezoelectric element 332) from the left side. In another embodiment, the diaphragm 340 can be placed upside down. That is, the thick-walled portion T1 can also protrude relative to the thin-film portion T2 of the diaphragm 340. Figure 4 The lower side (needle valve 331 side) protrudes.

[0076] As described above, the head 300 according to this embodiment includes a nozzle plate 301 having a nozzle 302, a needle valve 331 for opening and closing the nozzle 302, a piezoelectric element 332 for driving the needle valve 331, a diaphragm 340 located between the needle valve 331 and the piezoelectric element 332 and vibrating with the driving of the piezoelectric element 332, and a housing 310 for holding the nozzle plate 301, the needle valve 331, the piezoelectric element 332, and the diaphragm 340. The diaphragm 340 has a thin film portion T2 in the portion not held by the housing 310 (i.e., the portion with width W1), which has a thickness thinner than the portion held by the housing 310 (the portion other than width W1).

[0077] Thus, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from entering towards the piezoelectric element 332. As a result, a liquid discharge head can be provided that allows the liquid to travel a long distance while preventing damage to the piezoelectric element 332 due to liquid adhesion.

[0078] Furthermore, as described above, the thin film portion T2 is provided on the contact surface between the diaphragm 340 and the piezoelectric element 332.

[0079] Therefore, the desired amount of discharged droplets and flight distance can be obtained without reducing the displacement efficiency of the piezoelectric element 332.

[0080] As described above, the thin film portion T2 is a semi-etched portion formed by semi-etching.

[0081] Thus, the thin film portion T2 can be formed in a desired shape relative to one side of the diaphragm 340.

[0082] As described above, the nozzle plate 301 is a plate-shaped component. Therefore, the nozzle 302 can be easily formed and processed by the nozzle plate 301.

[0083] Figure 6 This is a cross-sectional view of the diaphragm 340 and its surroundings of the head 300 according to a second embodiment of the present disclosure. The same reference numerals are given for the same components as used in the above description, and redundant descriptions are omitted.

[0084] The diaphragm 340 according to the second embodiment, like that of the first embodiment, has a thick-walled portion and a thin-film portion in its cross-section. The diaphragm 340 according to the second embodiment increases the number of thick-walled portions compared to the first embodiment. That is, in addition to the portions held by the housing portions 310b-1 and 310b-2, the diaphragm 340 according to the second embodiment also has thick-walled portions at the contact surfaces with the needle valve 331 and the piezoelectric element 332. Furthermore, the thin-film portion is only provided around the thick-walled portions existing between the needle valve 331 and the piezoelectric element 332. Detailed description is provided in the following figures.

[0085] Figure 7 This is an enlarged cross-sectional view showing the diaphragm 340 and a portion of its surrounding area according to the second embodiment.

[0086] As described above, the difference between the second embodiment and the first embodiment lies in the construction of the thick-walled portion T1 in the second embodiment. In addition to the portion held by the housing portion 310b-1 and the housing portion 310b-2, the portion between the needle valve 331 and the piezoelectric element 332 is also designed as a thick-walled portion T1.

[0087] The thick-walled portion T1 located between the needle valve 331 and the piezoelectric element 332 has a width W2, which is approximately the same as the width of the contact surface of the piezoelectric element 332. A thin-film portion T2 of width W3 is provided around the thick-walled portion T1 with width W2, thereby forming an island-like projection of the thick-walled portion T1 with width W2 protruding to the center of the third receiving space S3 with width W1 (hereinafter, this configuration will also be referred to as the island structure). In the second embodiment, the thin-film portion T2 of the diaphragm 340 can also be formed by a semi-etching process.

[0088] According to the above structure, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from the liquid chamber 312 from entering the piezoelectric element 332 from the needle valve 331 side. Additionally, an O-ring 334 is installed at the top of the needle valve 331, sealing the first receiving space S1 to prevent liquid from entering from the liquid chamber 312. The diaphragm 340 is positioned... Figure 6 Above the O-ring 334 (in Figure 7 (Right side of the image). Therefore, the O-ring 334 and the diaphragm 340 provide dual protection against liquid intrusion into the piezoelectric element 332.

[0089] The island-shaped structure allows for easy visual confirmation of the piezoelectric element 332's assembly position onto the diaphragm 340, thereby reducing axial misalignment during assembly. The axis of the needle valve 331 is positioned by the bearing 333. Therefore, when the needle valve 331 is assembled onto the diaphragm 340, the diaphragm 340 and the needle valve 331 can be connected by... Figure 6 The locating pin 335 shown is aligned.

[0090] As a result, even the top 300 include, for example Figure 6 The eight needle valves 331 shown above, the structure described above can also reduce the variation in the discharged droplets of each needle valve 331. Furthermore, the thin film portion T2 surrounding the thick-walled portion T1 with a width of W2 can reduce the displacement resistance of the diaphragm 340, thereby increasing the liquid's flight distance.

[0091] exist Figure 6 In the middle, the thin film section T2 is located on the lower side of the diaphragm 340 (nose valve 331 side), in Figure 7 The left side of the needle valve 331 is in the center, with the thick-walled portion T1 protruding upwards (towards the piezoelectric element 332). In another embodiment, the diaphragm 340 can be disposed upside down. That is, in Figure 6 In the middle, the thick-walled portion T1 can protrude downward relative to the thin-film portion T2 of the diaphragm 340 (needle valve 331 side).

[0092] As described above, the head 300 according to this embodiment includes a nozzle plate 301 having a nozzle 302, a needle valve 331 for opening and closing the nozzle 302, a piezoelectric element 332 for driving the needle valve 331, a diaphragm 340 located between the needle valve 331 and the piezoelectric element 332 and vibrating with the driving of the piezoelectric element 332, and a housing 310 for holding the nozzle plate 301, the needle valve 331, the piezoelectric element 332, and the diaphragm 340. The diaphragm 340 has a thin film portion T2 in the portion not held by the housing 310 (i.e., the portion with width W1), which has a thickness thinner than the portion held by the housing 310 (the portion other than width W1).

[0093] Thus, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from entering towards the piezoelectric element 332. As a result, a liquid discharge head can be provided that allows the liquid to travel a long distance while preventing damage to the piezoelectric element 332 due to liquid adhesion.

[0094] Furthermore, as described above, the thin film portion T2 is disposed around the contact surface of the diaphragm 340 with the piezoelectric element 332.

[0095] Therefore, the desired amount of discharged droplets and flight distance can be obtained without reducing the displacement efficiency of the piezoelectric element 332.

[0096] As described above, the thin film portion T2 is a semi-etched portion formed by semi-etching.

[0097] Thus, the thin film portion T2 can be formed in a desired shape relative to one side of the diaphragm 340.

[0098] Figure 8 This is an enlarged cross-sectional view showing the diaphragm 340 and its surrounding portion according to the third embodiment. The same reference numerals are used for the same parts as described above, and redundant descriptions are omitted.

[0099] Similar to the first and second embodiments, the diaphragm 340 according to the third embodiment also has a thick-walled portion and a thin-film portion in cross-section. In the diaphragm 340 according to the third embodiment, the number of thin-film portions is increased compared to the second embodiment. That is, in the diaphragm 340 according to the third embodiment, in addition to the area around the contact surface with the piezoelectric element 332, a portion of the contact surface with the piezoelectric element 332 is also designated as a thin-film portion T2.

[0100] In other words, according to the third embodiment, the diaphragm 340, in addition to the area around the contact surface with the piezoelectric element 332, also forms a thin film portion T2 with a width W4 (W4 < W2) in a width W2 that is substantially the same as the width of the contact surface with the piezoelectric element 332. The diaphragm 340 is bonded to the piezoelectric element 332 in the area of ​​width W2 by an adhesive.

[0101] As described above, the head 300 according to this embodiment includes a nozzle plate 301 having a nozzle 302, a needle valve 331 for opening and closing the nozzle 302, a piezoelectric element 332 for driving the needle valve 331, a diaphragm 340 located between the needle valve 331 and the piezoelectric element 332 and vibrating with the driving of the piezoelectric element 332, and a housing 310 for holding the nozzle plate 301, the needle valve 331, the piezoelectric element 332, and the diaphragm 340. The diaphragm 340 has a thin film portion T2 in the portion not held by the housing 310 (i.e., the portion with width W1), which has a thickness thinner than the portion held by the housing 310 (the portion other than width W1).

[0102] Thus, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from entering towards the piezoelectric element 332. As a result, a liquid discharge head can be provided that allows the liquid to travel a long distance while preventing damage to the piezoelectric element 332 due to liquid adhesion.

[0103] In the third embodiment, the thin film portion T2 is disposed around the contact surface of the diaphragm 340 with the piezoelectric element 332. Therefore, the desired amount of discharged droplets and flight distance can be obtained without reducing the displacement efficiency of the piezoelectric element 332.

[0104] Furthermore, as described above, multiple thin film portions T2 with a width W4 (W4 < W2) are also formed on the contact surface between the diaphragm 340 and the piezoelectric element 332. Therefore, when the adhesive bonding the diaphragm 340 and the piezoelectric element 332 overflows from the bonding surface, the adhesive enters the groove-shaped width W4, thus preventing the adhesive from being squeezed out to the surrounding area.

[0105] Next, the connection of the nozzle plate 301, the first housing 310a, the second housing 310b, and the diaphragm 340 will be explained.

[0106] The components can be joined together by adhesives (i.e., chemical bonding or adhesive bonding), but in a structure where pressurized liquid is supplied to the liquid chamber 312 as in the head 300 according to this embodiment, or in the case where the liquid used is a solvent, it is preferable to join the components without adhesives (adhesive-free structure).

[0107] This is because the adhesive-free structure enhances the bond strength, allowing the liquid to be pressurized at higher pressures. As a result, droplets can be ejected further. Because no leakage of liquid from the adhesive bonding point occurs in the adhesive-free structure due to the chemical change between the solvent and the adhesive, leakage from the adhesive bonding point does not occur.

[0108] Therefore, in this embodiment, the joining of the first housing 310a and the nozzle plate 301, the joining of the second housing 310b and the diaphragm 340, and the joining of the first housing 310a and the second housing 310b are achieved by material bonding (in other words, metallurgical bonding or welding). Specifically, bonding is performed by diffusion bonding without the use of adhesives. In diffusion bonding, the substrates are brought into close contact with each other and pressurized at a pressure that does not cause plastic deformation of the substrates and at a temperature equal to or below the melting point of the substrates, so as to bond the substrates by utilizing the diffusion of atoms between the bonding surfaces of the substrates.

[0109] Examples of diffusion bonding in the construction according to the first to third embodiments are described below.

[0110] First, the first housing 310a and the nozzle plate 301 are stacked on top of each other and heated under vacuum, thereby forming an integral structure by diffusion bonding of the first housing 310a and the nozzle plate 301.

[0111] Next, the housing portion 310b-1, the diaphragm 340, and the housing portion 310b-2 are stacked one on top of the other and heated under vacuum, thereby forming an integral structure by diffusion bonding of the second housing 310b and the diaphragm 340.

[0112] Next, the first housing 310a and the second housing 310b are diffusely joined to obtain housing 310.

[0113] As described above, in this embodiment, the housing 310 and the nozzle plate 301 are joined by material bonding.

[0114] In addition, as described above, the housing 310 and the diaphragm 340 are joined by material bonding.

[0115] Furthermore, as described above, the housing 310 includes a first housing 310a and a second housing 310b, the nozzle plate 301 is connected to the first housing 310a by material bonding, and the diaphragm 340 is connected to the second housing 310b by material bonding.

[0116] In addition, as described above, the first housing 310a and the second housing 310b are joined by material bonding.

[0117] Furthermore, as mentioned above, the material bonding is diffusion bonding.

[0118] Therefore, the bonding strength between components is improved, allowing for higher pressure to be applied to the liquid. As a result, a liquid discharge head can be provided that discharges droplets over a greater distance. Furthermore, the adhesive-free structure solves the problem of liquid leakage through the joints due to chemical changes between the solvent and the adhesive.

[0119] Figure 9 This is a cross-sectional view around the diaphragm 340 of the head 300 according to the fourth embodiment of the present invention. The same reference numerals are given to the same parts as used in the above description, and repeated descriptions are omitted.

[0120] In the portion of the diaphragm 340 held by the housing portion 310b-1 and housing portion 310b-2 according to the fourth embodiment, only the two ends are thick-walled portions, and all other portions are thin-film portions.

[0121] In this structure, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from entering the piezoelectric element 332 from the needle valve 331 side. Furthermore, the contact surface between the diaphragm 340 and the needle valve 331 and the piezoelectric element 332 is a thin film structure, which reduces the displacement resistance of the diaphragm 340, resulting in an increased liquid flight distance.

[0122] Figure 10 This is a cross-sectional view around the diaphragm 340 of the head 300 according to the fifth embodiment of the present invention. The same reference numerals are given to the same parts as used in the above description, and repeated descriptions are omitted.

[0123] According to the fifth embodiment, the portion of the diaphragm 340 held by the housing portion 310b-1 and the portion not held by the housing portion 310b-2 has the same thickness. Specifically, the portion of the diaphragm 340 held by the second housing 310b and the portion not held by the second housing 310b are thin films with a uniform thickness of 3 to 20 μm.

[0124] For example, when a thin film is not formed by semi-etching, as in the fifth embodiment, a thin plate with a uniform thickness can be used as the diaphragm 340 disposed between the needle valve 331 and the piezoelectric element 332.

[0125] In this structure, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from entering the piezoelectric element 332 from the needle valve 331 side. Furthermore, the contact surface between the diaphragm 340 and the needle valve 331 and the piezoelectric element 332 is a thin film portion with a thickness of 3–20 μm, thereby reducing the displacement resistance of the diaphragm 340. As a result, the flight distance of the liquid can be increased.

[0126] In this embodiment, the diaphragm 340 is not necessarily uniform along its surface, and may be locally non-uniform within a thickness range of 3 to 20 μm.

[0127] As described above, the head 300 according to this embodiment includes a nozzle plate 301 having a nozzle 302, a needle valve 331 for opening and closing the nozzle 302, a piezoelectric element 332 for driving the needle valve 331, a diaphragm 340 located between the needle valve 331 and the piezoelectric element 332 and vibrating with the driving of the piezoelectric element 332, and a housing 310 for holding the nozzle plate 301, the needle valve 331, the piezoelectric element 332 and the diaphragm 340. The diaphragm 340 is a thin film having a thickness of 3 to 20 μm.

[0128] Therefore, the diaphragm 340 completely isolates the needle valve 331 and the piezoelectric element 332, thereby preventing liquid from entering the piezoelectric element 332 side. As a result, a liquid discharge head can be provided that allows the liquid to travel a long distance while preventing damage to the piezoelectric element 332 caused by liquid adhesion.

[0129] As an example of a nozzle component, the nozzle plate 301 is a plate-shaped component. In the first to fifth embodiments, the nozzle plate 301 is a flat plate with a uniform thickness. However, the configuration of the nozzle plate 301 is not limited to this. The nozzle plate with the nozzle can have any shape. For example, the nozzle plate can be a component comprising a flat plate and walls erected on the periphery of the flat plate. The nozzle plate can be a plate-shaped component with locally different thicknesses. The nozzle plate can be integrated with another component. The nozzle component is not necessarily a plate-shaped component; for example, it can also be a cylindrical component.

[0130] Next, refer to Figure 11A and Figure 11B A variation of this embodiment will be described. Figure 11A and Figure 11B This is a cross-sectional view of a liquid discharge head 500 (hereinafter referred to as "head 500") according to a modified example of this embodiment. Figure 11A This is a cross-sectional view of the head 500 when nozzle 502 is closed. Figure 11B This is a cross-sectional view of head 500 when nozzle 502 is open.

[0131] right Figure 11A and Figure 11B The components shown are designated with reference numerals starting with 500. Components having substantially the same function as those in the first to fifth embodiments are designated with the same last two digits of the reference numerals. This variation differs from the first to fifth embodiments in that it includes a reverse spring mechanism 536.

[0132] like Figure 11A and Figure 11B As shown, the housing 510 of the head 500 includes a first housing 510a, a housing portion 510b-1 constituting a second housing 510b, and a housing portion 510b-2 constituting a second housing 510b.

[0133] The first housing 510a has a first receiving space (part of the valve receiving space). The first receiving space receives a needle valve 531, such as a valve, and an O-ring 534, such as a seal. In addition, at the part of the liquid chamber 512 formed, the first housing 510a holds a nozzle plate 501 made of a plate-shaped member, which is provided with a nozzle 502 for discharging liquid.

[0134] The housing portion 510b-1 is connected to the end of the first housing 510a opposite to the nozzle plate 501. The housing portion 510b-1 has a portion for housing the needle valve 531. Figure 11A and Figure 11B The second storage space (part of the valve storage space) is located on the right side of the first storage space. The first and second storage spaces together constitute the valve storage space.

[0135] The housing portion 510b-2 is connected to the end of the housing portion 510b-1 opposite to the side of the first housing portion 510a via a diaphragm 540. The housing portion 510b-2 has a third storage space (actuator storage space) for accommodating the reverse spring mechanism 536 and the piezoelectric element 532.

[0136] The reverse spring mechanism 536 is an elastic component formed from appropriately deformable rubber, soft resin, or thin metal sheet. The reverse spring mechanism 536 includes a deformable part 536a, a fixed part 536b, a guide part 536c, and a bent edge 536d.

[0137] The deformable portion 536a has a generally trapezoidal cross-section. The deformable portion 536a and the base end side of the needle valve 531 ( Figure 11A The right end of the piezoelectric element 532 is formed by abutment. The fixing part 536b is fixed to the deformable part 536a and the inner wall surface of the housing 510. The guide part 536c connects the fixing part 536b and the end face of the piezoelectric element 532, and the bent edge 536d connects the long side (corresponding to the lower base of the trapezoid) of the trapezoidal deformable part 536a and the fixing part 536b.

[0138] The reverse spring mechanism 536 has the above-described structure. When a predetermined voltage is applied to the piezoelectric element 532, the piezoelectric element 532 extends. Due to the extension of the piezoelectric element 532, the guide portion 536c moves towards the nozzle 502, thereby... Figure 11B The direction indicated by the middle arrow a pushes against the vicinity of the center portion of the curved edge 536d of the deformable portion 536a. Therefore, the deformable portion 536a deforms, causing the peripheral edge of the curved edge 536d to... Figure 11B Pull towards the piezoelectric element 532 in the direction indicated by the middle arrow b.

[0139] As a result, the top of the deformed portion 536a connected to the needle valve 531 (corresponding to the upper base of the trapezoid) moves toward the piezoelectric element 532 (see reference). Figure 11B Therefore, needle valve 531 is pulled towards piezoelectric element 532, for Figure 11B At the distance d shown, nozzle 502 opens.

[0140] For example, when no voltage is applied to the piezoelectric element 532, the deformable portion 536a of the reverse spring mechanism 536 is in an expanded state (normal state), and the needle valve 531 is pushed towards the nozzle 502 by the elastic force of the deformable portion 536a. Figure 11A As shown, nozzle 502 is closed due to the end face of needle valve 531. Therefore, ink D2 is not discharged from nozzle 502.

[0141] When a voltage is applied to the piezoelectric element 532, the piezoelectric element 532 behaves as follows: Figure 11B As shown, along the axial direction, the front end (in) Figure 11BThe guide portion 536c extends towards the nozzle 502 (axially) as the left end of the deformed portion 536a moves. Simultaneously, the area near the center of the curved edge 536d of the deformed portion 536a is pushed towards the nozzle 502 side. Figure 11B (in the direction indicated by the middle arrow a), and at the same time, the periphery of the curved edge 536d near the inner wall side of the housing 510 faces the piezoelectric element 532 side ( Figure 11B (In the direction indicated by arrow b) it retracts, the deformable part 536a is in a compressed state, the length of the connecting surface between the bent edge 536d of the deformable part 536a and the needle valve 531 is shortened, and the needle valve 531 is pulled towards the piezoelectric element 532 side, as... Figure 11B The distance d shown.

[0142] As a result, the front end face of the needle valve 531 and the nozzle 502 are as follows: Figure 11B As shown, a gap is created, and nozzle 502 opens. Therefore, liquid chamber 512 and nozzle 502 are connected to each other, and ink D2 is discharged from nozzle 502.

[0143] Even in the first 500 of this modified example, a thin film portion T2, similar to that in the first to fifth embodiments, is provided at or around the contact surface between the diaphragm 540 and the deformed portion 536a. Therefore, the same effects as in the first to fifth embodiments can be obtained.

[0144] Figure 12 This is a schematic perspective view of a printing device 1000, which is an example of a liquid discharging device according to an embodiment of the present disclosure.

[0145] The printing device 1000 is mounted to face the object 100, which is an example of an object. The printing device 1000 includes an X-axis guide rail 101, a Y-axis guide rail 102 intersecting the X-axis guide rail 101, and a Z-axis guide rail 103 intersecting the X-axis guide rail 101 and the Y-axis guide rail 102.

[0146] Y-axis guide rail 102 holds X-axis guide rail 101, allowing X-axis guide rail 101 to move in the Y direction (positive and negative directions). X-axis guide rail 101 holds Z-axis guide rail 103, allowing Z-axis guide rail 103 to move in the X direction (positive and negative directions). Z-axis guide rail 103 holds carriage 1, allowing carriage 1 to move in the Z direction (positive and negative directions).

[0147] The printing apparatus 1000 includes a first Z-direction driver 92 and an X-direction driver 72. The first Z-direction driver 92 causes the carriage 1 to move in the Z direction along the Z-axis guide rail 103, and the X-direction driver 72 causes the Z-axis guide rail 103 to move in the X direction along the X-axis guide rail 101. The printing apparatus 1000 further includes a Y-direction driver 82, which causes the X-axis guide rail 101 to move in the Y direction along the Y-axis guide rail 102. The X-direction driver 72, the Y-direction driver 82, and the Z-direction driver 92 are collectively referred to as carriage drivers for moving the carriage 1. The printing apparatus 1000 further includes a second Z-direction driver 93, which causes the head holder 70 to move in the Z direction relative to the carriage 1.

[0148] The printing device 1000 moves the carriage 1 in the X, Y, and Z directions while discharging ink, for example a liquid, from a liquid discharge head provided in the head holder 70 to draw an image on the object 100. The Z-direction movement of the carriage 1 and the head holder 70 is not necessarily parallel to the Z-direction; it can also be an inclined movement that includes at least a Z-direction component.

[0149] Although object 100 is Figure 12 The surface shape is set to a plane, but the surface shape of the object 100 can also be an almost vertical surface, a curved surface with a large radius of curvature, or a surface with slight unevenness, such as the body of a car, a truck, or the main body of an airplane.

[0150] Figure 13 yes Figure 12 The overall perspective view of the carriage 1 of the printing device 1000 shown is viewed from the object 100.

[0151] The carriage 1 includes a head retainer 70. Furthermore, the carriage 1 is connected via... Figure 12 The power of the first Z-direction driver 92 shown can move along the Z-axis guide rail 103 in the Z direction (positive and negative directions).

[0152] Head retainer 70 via from Figure 12 The second Z-direction actuator 93 shown is powered to move relative to the carriage 1 along the Z-direction (positive and negative directions). The head retainer 70 includes a head fixing plate 70a for mounting the head 300 to the head retainer 70.

[0153] In this embodiment, reference will be made to Figures 1 to 10 The six heads 300 are mounted on the head fixing plate 70a, and the six heads 300a to 300f are arranged in a stacked manner.

[0154] Heads 300a to 300f each include multiple nozzles 302. There are no particular restrictions on the type and quantity of ink colors used in heads 300a to 300f; they can be different colors or all the same color. For example, when the printing device 1000 uses a single-color coating apparatus, the ink used in heads 300a to 300f is the same color. The number of heads constituting head 300 is not limited to six; it can be more than six or less than six.

[0155] Head 300 is fixed to head fixing plate 70a, such as Figure 13 As shown, the nozzle arrays of each head intersect the horizontal plane (i.e., the XZ plane), and the arrangement direction of the plurality of nozzles 302 is tilted relative to the X-axis. In this state, the nozzles 302 discharge ink in a direction intersecting the direction of gravity (the positive Z-direction in this embodiment).

[0156] In this invention, examples of liquids include solutions, suspensions, or emulsions containing, for example, solvents (e.g., water or organic solvents), colorants (e.g., dyes or pigments), functionalizing materials (e.g., polymeric compounds, resins, or surfactants), biocompatible materials (e.g., DNA, amino acids, proteins, or calcium), or edible materials (e.g., natural colorants).

[0157] These liquids can be used, for example, as inkjet inks, coatings, surface treatment liquids, liquids for forming resist patterns on components or electronic circuits of electronic components or light-emitting elements, or material solutions for three-dimensional manufacturing.

[0158] The liquid discharge device according to this embodiment is not limited to the printing device 1000 described above. For example, the liquid discharge head according to the above embodiment of this disclosure can be installed at the end of the robotic arm of a multi-joint robot, which can move freely through multiple joints like a human arm.

[0159] In addition, the liquid discharge head according to the above embodiment can be installed on unmanned aerial vehicles such as drones or wall-climbing robots to form a sprayable unmanned aerial vehicle or a sprayable wall-climbing robot.

[0160] The above embodiments are examples, and as described below, the first to fourteenth forms of the present invention can provide the following advantages.

[0161] Form 1

[0162] According to form 1, a liquid discharge head (e.g., head 300 or 500) includes:

[0163] A nozzle component (e.g., nozzle plate 301 or 501) having a nozzle (e.g., nozzle 302 or 502);

[0164] A valve (e.g., needle valve 331 or 531) is configured to open and close the nozzle;

[0165] An actuator (e.g., piezoelectric element 332 or 532) is configured to drive the valve;

[0166] A diaphragm (e.g., diaphragm 340 or 540) is located between the valve and the actuator; and

[0167] Housing (e.g., housing 310 or 510).

[0168] The diaphragm is configured to vibrate in response to the actuation of the actuator. The housing holds the nozzle component, the valve, the actuator, and the diaphragm. The diaphragm has a thin film portion (e.g., thin film portion T2) that is not held by the housing, and the thin film portion is thinner than the portion of the diaphragm held by the housing.

[0169] According to form 1, a liquid discharge head can be provided that enables the liquid to travel a long distance while preventing damage to the actuator caused by the liquid adhering to the actuator.

[0170] Form 2

[0171] According to embodiment 2, in embodiment 1, the thin film portion (e.g., thin film portion T2) is in contact with the actuator (e.g., piezoelectric element 332 or 532).

[0172] Form 3

[0173] According to embodiment 3, in embodiment 1, the thin film portion (e.g., thin film portion T2) is disposed around the portion of the diaphragm (e.g., diaphragm 340 or 540) that contacts the actuator (e.g., piezoelectric element 332 or 532).

[0174] Depending on configuration 2 or 3, the target amount and flight distance of the discharged droplets can be obtained without reducing the discharge efficiency of the actuator.

[0175] Form 4

[0176] According to configuration 4, in any of configurations 1 to 3, the thin film portion (e.g., thin film portion T2) is a semi-etched portion.

[0177] According to configuration 4, the thin film portion T2 can be formed in a desired shape on one surface of the diaphragm.

[0178] Form 5

[0179] According to embodiment 5, in any of embodiments 1 to 4, the housing (e.g., housing 310 or 510) has a valve housing space (e.g., a housing space defined by the first housing 310a or 510a and housing portion 310b-1 or 510b-1) for housing the valve (e.g., needle valve 331 or 531), an actuator housing space (e.g., a housing space defined by housing portion 310b-2 or 510b-2) for housing the actuator (e.g., piezoelectric element 332 or 532), and a liquid chamber (e.g., liquid chamber 312 or 512) for housing the liquid. The valve is configured to move within the valve housing space while the top portion of the valve is located in the liquid chamber when the actuator moves within the actuator housing space. The diaphragm (e.g., diaphragm 340 or 540) separates the valve housing space from the actuator housing space.

[0180] Form 6

[0181] According to embodiment 6, in any of embodiments 1 to 5, the valve (e.g., needle valve 331 or 531) includes a seal (e.g., O-ring 334 or 534) between the diaphragm (e.g., diaphragm 340 or 540) and the nozzle member (e.g., nozzle plate 301 or 501).

[0182] According to configuration 5 or configuration 6, a liquid discharge head can be provided that enables the liquid to travel a long distance while preventing damage to the actuator caused by the liquid adhering to the actuator.

[0183] Form 7

[0184] According to form 7, a liquid discharge head includes:

[0185] A nozzle component (e.g., nozzle plate 301 or 501) having a nozzle (e.g., nozzle 302 or 502);

[0186] A valve (e.g., needle valve 331 or 531) is configured to open and close the nozzle;

[0187] An actuator (e.g., piezoelectric element 332 or 532) is configured to drive the valve;

[0188] A diaphragm (e.g., diaphragm 340 or 540) is located between the valve and the actuator; and

[0189] Housing (e.g., housing 310 or 510).

[0190] The diaphragm is configured to vibrate in response to the actuator. The housing holds the nozzle component, the valve, the actuator, and the diaphragm. The diaphragm is a thin film having a thickness of 3–20 μm.

[0191] According to form 7, a liquid discharge head can be provided that enables the liquid to travel a long distance while preventing damage to the actuator caused by the liquid adhering to the actuator.

[0192] Form 8

[0193] According to embodiment 8, in any of embodiments 1 to 7, the housing (e.g., housing 310 or 510) and the nozzle component (e.g., nozzle plate 301 or 501) are joined by material bonding.

[0194] Form 9

[0195] According to configuration 9, in any of configurations 1 to 8, the housing (e.g., housing 310 or 510) and the diaphragm (e.g., diaphragm 340 or 540) are joined by material bonding.

[0196] Form 10

[0197] According to configuration 10, in any of configurations 1 to 9, the housing (e.g., housing 310 or 510) comprises a first housing (e.g., first housing 310a or 510a) and a second housing (e.g., second housing 310b or 510b). The nozzle member (e.g., nozzle plate 301 or 501) is joined to the first housing by material bonding, and the diaphragm (e.g., diaphragm 340 or 540) is joined to the second housing by material bonding.

[0198] Form 11

[0199] According to configuration 11, in configuration 10, the first housing (e.g., first housing 310a or 510a) and the second housing (e.g., second housing 310b or 510b) are joined by the material bonding.

[0200] Form 12

[0201] According to form 12, in any of forms 8 to 11, the material bonding is diffusion bonding.

[0202] Based on configurations 8 to 12, the bonding strength between components is improved to allow for pressurization of the liquid at higher pressures. As a result, a liquid discharge head can be provided that discharges droplets over a greater distance. Furthermore, the adhesive-free structure solves the problem of liquid leakage through the joints due to chemical changes between the solvent and the adhesive.

[0203] Form 13

[0204] According to configuration 13, in any of configurations 1 to 12, the nozzle (e.g., nozzle 302 or 502) includes a plurality of nozzles, the valve (e.g., needle valve 331 or 531) includes a plurality of valves corresponding to the plurality of nozzles respectively, and the actuator (e.g., piezoelectric element 332 or 532) includes a plurality of actuators corresponding to the plurality of nozzles respectively.

[0205] According to form 13, the liquid can be applied to the object at high speed.

[0206] Form 14

[0207] According to configuration 14, in any of configurations 1 to 13, the nozzle component (e.g., nozzle plate 301 or 501) is a plate-shaped part.

[0208] According to form 14, a nozzle can be easily formed on the nozzle component.

[0209] The above embodiments are illustrative and do not limit the invention. Therefore, many additional modifications and variations are possible based on the above teachings. For example, elements and / or features of different illustrative embodiments can be combined and / or substituted for each other within the scope of the invention.

[0210] This application is based on and claims priority to Japanese Patent Application No. 2021-095628 filed with the Japan Patent Office on June 8, 2021 and Japanese Patent Application No. 2022-066042 filed with the Japan Patent Office on April 13, 2022, the entire disclosure of which is incorporated herein by reference.

[0211] List of reference numerals

[0212] 300 and 500 heads (an example of liquid discharge heads)

[0213] 301 and 501 nozzle plates (an example of a nozzle component)

[0214] 302 and 502 nozzles

[0215] 310 and 510 housings

[0216] 310a, 510a first shell

[0217] 310b, 510b second housing

[0218] 331 and 531 needle valves (an example of valves)

[0219] 332 and 532 piezoelectric elements (an example of an actuator)

[0220] 340 and 540 diaphragms

[0221] T1 Thick Wall Section

[0222] T2 Thin Film Division

Claims

1. A liquid discharge head, comprising: Nozzle assembly with nozzle; A valve, configured to open and close the nozzle; A driver, configured to drive the valve; A diaphragm, located between the valve and the actuator, is configured to vibrate in response to actuation by the actuator; and The housing holds the nozzle assembly, the valve, the actuator, and the diaphragm. in, The diaphragm has a thin film portion that is not held by the housing, and the thin film portion is thinner than the portion of the diaphragm held by the housing. The diaphragm includes a plurality of island-shaped thick film portions in contact with the actuator and another thin film portion disposed between any two of the plurality of adjacent island-shaped thick film portions, and The thickness of the island-shaped thick film portion is greater than the thickness of both the thin film portion and the other thin film portion.

2. The liquid discharge head according to claim 1, in, The thin film portion is in contact with the actuator.

3. The liquid discharge head according to claim 1, in, The thin film portion is disposed around the portion of the diaphragm that contacts the actuator.

4. The liquid discharge head according to claim 1, in, The thin film portion is a semi-etched portion.

5. The liquid discharge head according to claim 1, in, The housing has a valve housing space for accommodating the valve, a actuator housing space for accommodating the actuator, and a liquid chamber for accommodating liquid. The valve is configured to move within the valve housing space while the top of the valve is located within the liquid chamber, when the actuator moves within the actuator housing space. The diaphragm separates the valve storage space from the actuator storage space.

6. The liquid discharge head according to claim 5, in, The valve includes a seal between the diaphragm and the nozzle component.

7. The liquid discharge head according to claim 1, wherein, The diaphragm is a thin film with a thickness of 3 to 20 μm.

8. The liquid discharge head according to any one of claims 1 to 7, in, The housing and the nozzle component are joined together by material bonding.

9. The liquid discharge head according to any one of claims 1 to 7, in, The housing and the diaphragm are joined together by material bonding.

10. The liquid discharge head according to any one of claims 1 to 7, in, The housing includes a first housing and a second housing. The nozzle component is joined to the first housing by material bonding, and the diaphragm is joined to the second housing by material bonding.

11. The liquid discharge head according to claim 10, in, The first housing and the second housing are joined together by means of the material.

12. The liquid discharge head according to claim 8, in, The material bonding is diffusion bonding.

13. The liquid discharge head according to any one of claims 1 to 7, in, The nozzle includes multiple nozzles. The valve includes multiple valves corresponding to the plurality of nozzles, and The actuator includes multiple actuators, each corresponding to one of the plurality of nozzles.

14. The liquid discharge head according to any one of claims 1 to 7, in, The nozzle component is a plate-shaped part.

15. A liquid discharge device, comprising: Liquid discharge head according to any one of claims 1 to 14; The carriage holds the liquid discharge head; and Carrier driver, configured to move the carriage.

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