A repair device for ceramic heating plates and its processing method

Abstract

This invention discloses a rework device and processing method for ceramic heating plates, comprising: a chuck, the chuck including a chuck body, the chuck body having jaws and a jaw driving mechanism for driving the jaws to move along the radial direction of the chuck; a base, the base having a clearance hole communicating with the inner wall of the chuck, the chuck being mounted on the base; a fine-tuning mechanism, the fine-tuning mechanism including an adjusting screw for raising one side of the ceramic heating plate, the adjusting screw being mounted on the jaws or the base; and a machining wheel, the machining wheel being rotatably mounted above the chuck, the machining wheel moving relative to the chuck along the radial direction of the chuck. This solution solves the problem that ceramic heating plates cannot be clamped for rework using a chuck alone. By fine-tuning the tilt of the ceramic heating plate through the fine-tuning mechanism, the machining accuracy of the grooves in the ceramic heating plate is improved, the rework quality is improved, the utilization rate of the ceramic heating plate is improved, and the equipment operating cost is reduced.

Description

Technical Field

[0001] This invention relates to the field of precision ceramic processing technology, and in particular to a rework device for ceramic heating plates and its processing method. Background Technology

[0002] Chips are widely used in industries such as mobile phones, automobiles, and medical devices, and their superior performance determines the effectiveness of the devices they are used in. Chip manufacturing includes materials and equipment, chip design, chip manufacturing, and chip packaging and testing. Deposition, as a core part of chip manufacturing, is crucial. Deposition (PECVD) involves depositing thin films of conductors, insulators, or semiconductor materials onto wafers according to structural requirements. PECVD equipment consists of a vacuum and pressure control system, a deposition system, gas and flow control, a system safety protection system, and computer control. The deposition system comprises an RF power supply, a water cooling system, and a substrate heating device. The primary function of the ceramic heating plate in the substrate heating device is to support and heat the wafer and maintain a uniform temperature across the entire wafer. Aluminum nitride ceramic has excellent comprehensive performance, possessing superior thermal, electrical, and mechanical properties, high thermal conductivity, a low coefficient of thermal expansion that matches silicon, good insulation and dielectric properties, high strength at high temperatures, environmental friendliness, non-toxicity, and good chemical stability. It is one of the preferred choices for ceramic heating plates. Therefore, based on the wafer manufacturing requirements, higher precision is required for the structure and parameters of the ceramic heating plate. Existing aluminum nitride ceramic heating plates suffer from wear on the wafer surface during long-term use, causing the precision of the ceramic heating plate to fail to meet the requirements of the deposition equipment. This necessitates periodic replacement of the ceramic heating plate, resulting in excessively high equipment operating costs.

[0003] For example, Chinese Patent Publication No. CN116113084A, published on May 12, 2023, entitled "A Ceramic Heating Plate", includes a heating layer comprising an aluminum nitride ceramic substrate and a heating wire. The top of the aluminum nitride ceramic substrate has N sets of concentric annular first waist-shaped grooves composed of several first waist-shaped grooves along the radial direction, and the bottom of the aluminum nitride ceramic substrate has N sets of concentric annular second waist-shaped grooves composed of several second waist-shaped grooves along the radial direction. Each first waist-shaped groove has a first circular perforation and a second circular perforation at both ends. One end of any second waist-shaped groove is located at the first circular perforation of a first waist-shaped groove, and the other end of the second waist-shaped groove is located at the second circular perforation of another first waist-shaped groove. The heating wire passes through the first circular perforation and the second circular perforation of several first waist-shaped grooves and is embedded in several first waist-shaped grooves and second waist-shaped grooves.

[0004] The drawback of the existing patent is that the existing aluminum nitride ceramic heating plate suffers from wear on the wafer surface during long-term use, which makes the various precision requirements of the ceramic heating plate not meet the requirements of the deposition equipment. The ceramic heating plate needs to be replaced regularly, resulting in excessively high equipment operating costs. Summary of the Invention

[0005] The purpose of this invention is to solve the problem that the existing aluminum nitride ceramic heating plates suffer from wear on the wafer surface during long-term use, which causes the precision of the ceramic heating plate to fail to meet the requirements of the deposition equipment, requiring regular replacement of the ceramic heating plate and resulting in excessive equipment operating costs. The invention provides a ceramic heating plate rework device and its processing method that improves the utilization rate of the ceramic heating plate and reduces the operating cost of the equipment.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A rework device for ceramic heating plates includes: a chuck, comprising a chuck body with jaws and a jaw drive mechanism for driving the jaws to move radially along the chuck; a base with a clearance hole penetrating the inner wall of the chuck, the chuck being mounted on the base; a fine-tuning mechanism including an adjusting screw for raising one side of the ceramic heating plate, the adjusting screw being mounted on the jaws or the base; and a machining wheel rotatably mounted above the chuck, the machining wheel moving relative to the chuck radially. This rework device for ceramic heating plates is used for reworking aluminum nitride ceramic heating plates used in PECVD equipment. The chuck clamps the ceramic heating plate, and because the height of the ceramic heating plate is greater than the height of the chuck, the lower end of the ceramic heating plate extends into the clearance hole of the base. The base is able to support the weight of both the ceramic heating plate and the chuck, conforming to the design principles of convenience, speed, material saving, and environmental friendliness, and solving the problem that ceramic heating plates cannot be clamped and reworked using a chuck alone. The fine-tuning mechanism adjusts the tilt of the ceramic heating plate. A machining wheel is used to process the surface and grooves of the ceramic heating plate, solving the problem of wear on the wafer surface that occurs in existing aluminum nitride ceramic heating plates during long-term use. When the ceramic heating plate is placed horizontally, the height from the center of the groove to the edge of the groove is 0.005mm, and the radius of the groove is 100mm. Therefore, the rework accuracy of the ceramic heating plate grooves requires extremely high precision. This also includes dial indicator calibration, using a dial indicator, and fine-tuning the tilt of the ceramic heating plate through the fine-tuning mechanism to improve the machining accuracy of the grooves, improve rework quality, increase the utilization rate of the ceramic heating plate, and reduce equipment operating costs.

[0008] Preferably, the machining wheels include a surface machining wheel for machining the surface of the ceramic heating plate and a groove machining wheel for machining the grooves of the ceramic heating plate, with the axis of rotation of the machining wheels horizontally positioned. During machining, the machining wheels move horizontally, changing the tilt of the ceramic heating plate, improving machining accuracy, and making operation more intuitive. The surface machining wheel is used to machine the surface of the ceramic heating plate; when the surface of the ceramic heating plate is horizontally clamped, the surface machining wheel moves relative to the radial direction of the ceramic heating plate. The groove machining wheel is used to machine the grooves of the ceramic heating plate. The ceramic heating plate is slightly tilted so that the center of the ceramic heating plate is flush with the lowest point of the edge of the groove. The groove machining wheel moves horizontally relative to the groove, machining one side of the inner wall of the groove back and forth.

[0009] Preferably, the jaws and jaw drive mechanism are connected by bolts, and the base and chuck body are connected by bolts. Installation is convenient.

[0010] Preferably, the fine-tuning mechanism includes an adjustment hole provided on the chuck or the base, an adjustment screw passing through the adjustment hole, the adjustment screw being threadedly connected to the adjustment hole via an external thread, the adjustment screw having a through hole, one end of the through hole having a limiting step, and the other end having a wrench limiting groove, the shank of the bolt passing through the adjustment screw, and the head of the bolt being limited within the through hole by the limiting step. The fine-tuning mechanism includes the following two implementation methods: Implementation Method 1: The fine-tuning mechanism includes an adjustment hole on the chuck, an adjustment screw passing through the adjustment hole, and the adjustment screw being threadedly connected to the adjustment hole via an external thread. The adjustment screw has a through hole, one end of which has a limiting step, and the other end has a wrench limiting groove. The bolt consists of a shank and a head. The shank of the bolt passes through the adjustment screw and is tightened onto the chuck drive mechanism. The head of the bolt is limited within the through hole by the limiting step. When fine-tuning is required, the adjustment screw is slightly loosened, and a wrench is inserted into the wrench limiting groove of the adjustment screw to slightly rotate the adjustment screw, causing the chuck to move upward. The chuck causes one end of the ceramic heating plate to rise, resulting in a tilt of the ceramic heating plate. Since the height of the groove center of the ceramic heating plate from the groove edge is required to be 0.005mm, slight rotation of the adjustment screw achieves the corresponding accuracy. After achieving the tilt accuracy using a dial indicator, the bolt is tightened to fix the chuck. The groove rework process is performed. Implementation Method Two: The fine-tuning mechanism includes an adjustment hole on the base. An adjustment screw passes through the adjustment hole and is threaded to it via an external thread. The adjustment screw has a through hole, with a limiting step at one end and a wrench-compatible limiting groove at the other end. The bolt consists of a shank and a head. The shank passes through the adjustment screw and is tightened onto the lower end face of the chuck body. The head of the bolt is limited within the through hole by the limiting step. When fine-tuning is required, the adjustment screw is slightly loosened, and a wrench is inserted into the wrench-compatible limiting groove of the adjustment screw to slightly rotate it. This causes one side of the chuck body to tilt upwards, causing the chuck to tilt the ceramic heating plate. Since the height of the groove center of the ceramic heating plate from the groove edge is required to be 0.005mm, slight rotation of the adjustment screw achieves the corresponding accuracy. After achieving the tilt accuracy using a dial indicator, the bolt is tightened to fix the chuck and base for groove rework.

[0011] In Implementation Method 1, the chuck is a three-jaw chuck, and the fine-tuning mechanism is located on any one of the jaws; in Implementation Method 2, there are three bolts on the base, and the fine-tuning screw is fitted on any one of the bolts.

[0012] Preferably, the adjusting screw abuts against the upper end of the jaw drive mechanism or the lower end of the chuck body. When the fine-tuning mechanism is mounted on the jaw, the lower end of the adjusting screw abuts against the upper end of the jaw drive mechanism; when the fine-tuning mechanism is mounted on the base, the upper end of the adjusting screw abuts against the lower end of the jaw chuck.

[0013] Preferably, the base includes a base body and mounting portions disposed at the upper and lower ends of the base body. The clearance hole is located in the middle of the base body, and the mounting portion located at the upper end of the base body is connected to the chuck by bolts. The mounting portions facilitate the installation and disassembly of the base, and facilitate the fine-tuning operation of the fine-tuning mechanism wrench in Embodiment 2.

[0014] Preferably, the clearance hole of the base is coaxially arranged with the chuck. The ceramic heating plate is coaxially clamped on the chuck, and the clearance hole does not affect the lower end of the ceramic heating plate, thus solving the problem that the ceramic heating plate cannot be clamped and repaired when using a chuck alone.

[0015] The processing method of the ceramic heating plate rework device according to any one of the above-mentioned methods further includes a lathe, and includes the following steps in sequence:

[0016] Step 1: Set the chuck and base on the lathe, place the ceramic heating plate on the chuck and clamp it with the jaws. The lower end of the ceramic heating plate extends into the clearance hole of the base. Use a dial indicator to ensure that the flatness is less than or equal to 0.005 mm and the roundness is less than or equal to 0.01 mm.

[0017] Step 2: The surface finishing grinding wheel is located above the ceramic heating plate. The ceramic heating plate on the fixed chuck is driven by the lathe to move back and forth along the rotation direction of the grinding wheel, so as to realize the rework of the surface of the ceramic heating plate.

[0018] Step 3: Replace with a groove-machining grinding wheel. Adjust one side of the ceramic heating plate using a fine-tuning mechanism, causing the ceramic heating plate to tilt so that its center is level with the lowest point of the groove's edge. The lathe drives the ceramic heating plate, fixed to the chuck, to move back and forth along the rotation direction of the grinding wheel. The movement position of the groove-machining grinding wheel is controlled between the center of the ceramic heating plate and the lowest point of the groove's edge, enabling the rework of the groove. The grinding wheel uses an air-polishing method, machining the surface and grooves without changing the height of the aluminum nitride heating plate, achieving product precision requirements and preventing tool marks after machining. This addresses the problem of wear on the wafer-bearing surface of existing aluminum nitride ceramic heating plates during long-term use, which causes the precision of the ceramic heating plate to fail to meet the requirements of the deposition equipment, necessitating periodic replacement and resulting in excessive equipment operating costs. A method for machining grooves with a depth of 0.005mm is provided.

[0019] Preferably, when raising one side of the ceramic heating plate in step three, the height of the adjusting screw is used to raise one side of the chuck or jaws. The rework process is intuitive, efficient, and offers high machining accuracy.

[0020] Preferably, the grinding wheel is dressed before machining, and the flatness of the grinding wheel is less than or equal to 0.005 mm. The ceramic heating plate requires high precision in its surface and grooves. The design of the grinding wheel for machining the aluminum nitride ceramic grooves places extremely high demands on the flatness of the grinding wheel, playing a crucial role in controlling the high precision requirements of the ceramic heating plate.

[0021] Therefore, the present invention has the following beneficial effects:

[0022] The lower end of the ceramic heating plate extends into the clearance hole of the base. The base is able to support the weight of the ceramic heating plate and the chuck, which conforms to the design concept of convenience, speed, material saving and environmental protection, and solves the problem that the ceramic heating plate cannot be clamped and repaired when using a chuck alone.

[0023] The design of the aluminum nitride ceramic groove machining wheel has extremely high requirements for the flatness of the machining wheel, thereby improving the machining accuracy of the ceramic heating plate;

[0024] The grinding wheel is used for air polishing. Without changing the height of the aluminum nitride heating plate, its surface and grooves are processed to meet the product precision requirements and prevent tool marks from being left after the product is processed.

[0025] By fine-tuning the tilt of the ceramic heating plate through a fine-tuning mechanism, the machining accuracy of the grooves in the ceramic heating plate can be improved, the quality of rework can be improved, the utilization rate of the ceramic heating plate can be increased, and the equipment operating cost can be reduced. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of a structure according to Embodiment 1 of the present invention.

[0027] Figure 2 This is a schematic diagram of one structure of the base in this invention.

[0028] Figure 3 This is a cross-sectional view of the base in this invention.

[0029] Figure 4 This is a schematic diagram of the structure of the ceramic heating plate in this invention.

[0030] Figure 5 This is a schematic diagram of a structure for surface repair of the ceramic heating plate in this invention.

[0031] Figure 6 This is a schematic diagram of a structure for repairing the groove of the ceramic heating plate in this invention.

[0032] Figure 7This is a schematic diagram of a structure in Embodiment 4 of the present invention.

[0033] Figure 8 yes Figure 7 A magnified view of a portion of point A in the middle.

[0034] Figure 9 This is a schematic diagram of a structure in Embodiment 3 of the present invention.

[0035] Figure 10 This is a partial cross-sectional view of the fine-tuning mechanism in Embodiment 3 of the present invention.

[0036] As shown in the picture:

[0037] 1. Chuck, 1.1. Chuck body, 1.2. Chuck jaws, 1.3. Chuck jaw drive mechanism

[0038] 2. Base, 2.1 Clearance hole, 2.2 Base body, 2.3 Mounting part

[0039] Adjusting screw 3, through hole 3.1, limit step 3.2, wrench limit groove 3.3,

[0040] 4. Surface finishing grinding wheel; 5. Groove finishing grinding wheel; 6. Bolt; 7. Adjustment hole.

[0041] 8. Ceramic heating plate. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0043] Example 1, as Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 A rework device for a ceramic heating plate is shown, comprising: a chuck 1, the chuck 1 including a chuck body 1.1, the chuck body 1.1 having jaws 1.2 and a jaw drive mechanism 1.3 for driving the jaws 1.2 to move along the radial direction of the chuck 1; a base 2, the base 2 having a clearance hole 2.1 communicating with the inner wall of the chuck 1, the chuck 1 being mounted on the base 2; a fine-tuning mechanism, the fine-tuning mechanism including an adjusting screw 3 for raising one side of the ceramic heating plate 8, the adjusting screw 3 being mounted on the jaws 1.2 or the base 2; and a machining wheel, the machining wheel being rotatably mounted above the chuck 1, the machining wheel moving relative to the chuck 1 along the radial direction of the chuck 1.

[0044] The above embodiment describes a rework device for a ceramic heating plate used in PECVD equipment to rework an aluminum nitride ceramic heating plate 8. A chuck 1 clamps the ceramic heating plate 8. Since the height of the ceramic heating plate 8 is greater than the height of the chuck 1, the lower end of the ceramic heating plate 8 extends into the clearance hole 2.1 of the base 2. The base 2 is designed to support the weight of both the ceramic heating plate 8 and the chuck 1, conforming to a convenient, fast, material-saving, and environmentally friendly design concept. This solves the problem that the ceramic heating plate 8 cannot be clamped for rework using only the chuck 1. A fine-tuning mechanism adjusts the tilt of the ceramic heating plate 8. A machining wheel is used to machine the surface and grooves of the ceramic heating plate 8, solving the problem of wear on the wafer surface caused by existing aluminum nitride ceramic heating plates 8 during long-term use. When the surface of the ceramic heating plate 8 is placed horizontally, the height from the center of the groove to the edge of the groove is 0.005mm, and the radius of the groove is 100mm. Therefore, the rework accuracy of the groove of the ceramic heating plate 8 is extremely high. It also includes dial indicator calibration, which uses dial indicator to finely adjust the tilt of the ceramic heating plate 8 through a fine-tuning mechanism to improve the processing accuracy of the groove of the ceramic heating plate 8, improve the rework quality, improve the utilization rate of the ceramic heating plate 8, and reduce the equipment operating cost.

[0045] In this embodiment, as Figure 5 , Figure 6 As shown, the machining wheels include a surface machining wheel 4 for machining the surface of the ceramic heating plate 8 and a groove machining wheel 5 for machining the grooves of the ceramic heating plate 8. The axis of rotation of the machining wheels is horizontally set. During machining, the machining wheels move horizontally, changing the tilt of the ceramic heating plate 8, improving machining accuracy and making operation more intuitive. The surface machining wheel 4 is used to machine the surface of the ceramic heating plate 8. When the surface of the ceramic heating plate 8 is horizontally clamped, the surface machining wheel 4 moves relative to the radial direction of the ceramic heating plate 8. The groove machining wheel 5 is used to machine the grooves of the ceramic heating plate 8. The ceramic heating plate 8 is slightly tilted so that the center of the ceramic heating plate 8 is flush with the lowest point of the edge of the groove. The groove machining wheel 5 moves horizontally relative to the groove, machining one side of the inner wall of the groove back and forth.

[0046] Specifically, the chuck 1.2 is connected to the chuck drive mechanism 1.3 by bolt 6, and the base 2 is connected to the chuck body 1.1 by bolt 6. Installation is convenient.

[0047] Specifically, such as Figure 2 , Figure 3 As shown, the base 2 includes a base body 2.2 and mounting portions 2.3 disposed at the upper and lower ends of the base body 2.2. A clearance hole 2.1 is located in the middle of the base body 2.2. The mounting portion 2.3 located at the upper end of the base body 2.2 is connected to the chuck 1 by bolts 6. The mounting portion 2.3 facilitates the installation and disassembly of the base 2, and facilitates the fine-tuning operation of the fine-tuning mechanism wrench in Embodiment 2.

[0048] Furthermore, the clearance hole 2.1 of the base 2 is coaxially arranged with the chuck 1. The ceramic heating plate 8 is coaxially clamped on the chuck 1, and the clearance hole 2.1 does not affect the lower end of the ceramic heating plate 8, thus solving the problem that the ceramic heating plate 8 cannot be clamped and repaired when using the chuck 1 alone.

[0049] Example 2, based on Example 1, further optimizes the fine-tuning mechanism. The fine-tuning mechanism includes an adjustment hole 7 on the chuck 1.2, an adjustment screw 3 passing through the adjustment hole 7, and the adjustment screw 3 being threadedly connected to the adjustment hole 7 via an external thread. The adjustment screw 3 has a through hole 3.1, one end of which has a limiting step 3.2, and the other end has a wrench-type limiting groove 3.3. The bolt 6 consists of a rod and a head. The rod of the bolt 6 passes through the adjustment screw 3 and is tightened onto the chuck drive mechanism 1.3. The head of the bolt 6 is limited by the limiting step 3.2 in the through hole 7. When fine-tuning is required within hole 3.1, slightly loosen the adjusting screw 3, insert a wrench into the wrench limit groove 3.3, and slightly rotate the adjusting screw 3 to move the jaw 1.2 upwards. The jaw 1.2 causes one end of the ceramic heating plate 8 to rise, resulting in a tilt of the ceramic heating plate 8. Since the height of the groove center of the ceramic heating plate 8 from the groove edge is required to be 0.005mm, slightly rotating the adjusting screw 3 is sufficient to achieve the corresponding accuracy. After achieving the tilt accuracy using a dial indicator, tighten the bolt 6 to fix the jaw 1.2 for groove rework. The chuck 1 is a three-jaw chuck 1, with the fine-tuning mechanism located on any one of the jaws 1.2. When the fine-tuning mechanism is set on the jaw 1.2, the lower end face of the adjusting screw 3 abuts against the upper end of the jaw drive mechanism 1.3.

[0050] In Example 3, based on Example 2, the chuck 1.2 and chuck drive mechanism 1.3 are further optimized, such as... Figure 9 , Figure 10 As shown, the outer end of the chuck 1.2 is rotatably mounted on the chuck drive mechanism 1.3. When the fine-tuning mechanism performs fine-tuning on the chuck 1.2, it prevents the chuck 1.2 from shifting and further improves the fine-tuning accuracy of the chuck 1.2.

[0051] Example 4 further optimizes the fine-tuning mechanism based on Example 1, such as... Figure 7 , Figure 8The fine-tuning mechanism includes an adjustment hole 7 on the base 2, an adjustment screw 3 passing through the adjustment hole 7, and the adjustment screw 3 being threaded into the adjustment hole 7 via an external thread. The adjustment screw 3 has a through hole 3.1, with a limiting step 3.2 at one end and a wrench-compatible limiting groove 3.3 at the other end. The bolt 6 consists of a shank and a head. The shank of the bolt 6 passes through the adjustment screw 3 and is tightened onto the lower end face of the chuck body 1.1. The head of the bolt 6 is limited within the through hole 3.1 by the limiting step 3.2, requiring fine-tuning. When adjusting, slightly loosen the adjusting screw 3, insert a wrench into the wrench limit groove 3.3 of the adjusting screw 3, and slightly rotate the adjusting screw 3. This causes one side of the chuck body 1.1 to move upward and tilt. The chuck 1 then causes the ceramic heating plate 8 to tilt. Since the height of the groove center of the ceramic heating plate 8 from the groove edge is required to be 0.005mm, slightly rotating the adjusting screw 3 is sufficient to achieve the corresponding accuracy. After achieving the tilt accuracy using a dial indicator, tighten the bolts 6 to fix the chuck 1 and the base 2, and then the groove can be reworked. There are three bolts 6 on the base 2, and the fine-tuning screw is fitted onto any one of the bolts 6. When the fine-tuning mechanism is set on the base 2, the upper end of the adjusting screw 3 abuts against the lower end of the chuck 1 on the jaw 1.2.

[0052] Example 5, as Figure 5 , Figure 6 The method for processing a rework device for a ceramic heating plate, as shown, further includes a lathe and comprises the following steps in sequence:

[0053] Step 1: Set the chuck 1 and base 2 on the lathe, place the ceramic heating plate 8 on the chuck 1 and clamp it with jaws 1.2. The lower end of the ceramic heating plate 8 extends into the clearance hole 2.1 of the base 2. Use a dial indicator to ensure that the flatness is less than or equal to 0.005mm and the roundness is less than or equal to 0.01mm.

[0054] Step 2: The surface processing grinding wheel 4 is located above the ceramic heating plate 8. The ceramic heating plate 8 on the fixed chuck 1 is driven by the lathe to move back and forth along the rotation direction of the grinding wheel, so as to realize the rework of the surface of the ceramic heating plate 8.

[0055] Step 3: Replace with a groove-processing grinding wheel 5. Adjust one side of the ceramic heating plate 8 using a fine-tuning mechanism, causing the ceramic heating plate 8 to tilt so that its center is level with the lowest point of the groove edge. The lathe drives the ceramic heating plate 8, fixed to the chuck 1, to move back and forth along the rotation direction of the grinding wheel. The movement position of the groove-processing grinding wheel 5 is controlled between the center of the ceramic heating plate 8 and the lowest point of the groove edge, enabling the rework of the groove in the ceramic heating plate 8. In the market embodiment, the grinding wheel uses an air-polishing method, processing the surface and grooves of the aluminum nitride heating plate without changing its height, achieving product precision requirements and preventing tool marks after processing. This addresses the problem of wear on the wafer-bearing surface of the existing aluminum nitride ceramic heating plate 8 during long-term use, which causes the precision of the ceramic heating plate 8 to fail to meet the requirements of the deposition equipment, necessitating periodic replacement and resulting in excessive equipment operating costs. A method for processing grooves with a depth of 0.005mm is provided.

[0056] In this embodiment, when raising one side of the ceramic heating plate 8 in step three, the height of the adjusting screw 3 is adjusted to raise one side of the chuck 1.2 or the chuck 1. The rework process is intuitive, efficient, and has high processing precision. Specific implementation methods are divided into the operation methods in Embodiments Two, Three, and Four.

[0057] In steps two and three, the grinding wheel is dressed before machining, and the flatness of the grinding wheel is less than or equal to 0.005 mm. The surface and groove of the ceramic heating plate 8 have high precision requirements. The design of the aluminum nitride ceramic groove machining wheel 5 has extremely high requirements for the flatness of the machining wheel, which plays a key role in controlling the high precision requirements of the ceramic heating plate 8.

[0058] The present invention has the following beneficial effects: the lower end of the ceramic heating plate 8 extends into the clearance hole 2.1 of the base 2, and the base 2 can bear the weight of the ceramic heating plate 8 and the chuck 1, which conforms to the design concept of convenience, speed, material saving and environmental protection, and solves the problem that the ceramic heating plate 8 cannot be clamped and reworked when using the chuck 1 alone; through the design of the aluminum nitride ceramic groove processing grinding wheel 5, the flatness of the processing grinding wheel is required to be extremely high, which improves the processing accuracy of the ceramic heating plate 8; the processing grinding wheel adopts the air polishing processing method, which processes its surface and groove without changing the height of the aluminum nitride heating plate, so as to achieve the product accuracy requirements and prevent tool marks left after product processing; the tilt of the ceramic heating plate 8 is finely adjusted by the fine adjustment mechanism, which improves the processing accuracy of the groove of the ceramic heating plate 8, improves the rework quality, improves the utilization rate of the ceramic heating plate 8, and reduces the equipment operating cost.

[0059] The specific embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the invention. All equivalent variations made in accordance with the shape and structure of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for processing a rework device for a ceramic heating plate, the rework device for the ceramic heating plate comprising: The chuck includes a chuck body, on which are provided chuck jaws and a chuck jaw drive mechanism that drives the chuck jaws to move along the radial direction of the chuck. The base is provided with a clearance hole that communicates with the inner wall of the chuck, and the chuck is placed on the base; The fine-tuning mechanism includes an adjusting screw that raises one side of the ceramic heating plate; the adjusting screw is located on a chuck or base. Machining grinding wheels; It also includes a lathe, characterized by comprising the following steps in sequence: Step 1: Place the chuck and base on the lathe, place the ceramic heating plate on the chuck and clamp it with the jaws. The lower end of the ceramic heating plate extends into the clearance hole of the base. Use a dial indicator to ensure that the flatness is less than or equal to 0.005mm and the roundness is less than or equal to 0.01mm. Step 2: The surface finishing grinding wheel is located above the ceramic heating plate. The lathe drives the ceramic heating plate on the fixed chuck to move back and forth along the direction of the tool rotation, so as to achieve the surface repair of the ceramic heating plate. Step 3: Replace with a groove machining wheel. Adjust one side of the ceramic heating plate with a fine-tuning mechanism to tilt the ceramic heating plate so that the center of the ceramic heating plate is level with the lowest point of the edge of the groove. The lathe drives the ceramic heating plate, which is fixed on the chuck, to move back and forth along the direction of the tool rotation. The movement position of the groove machining wheel is controlled between the center of the ceramic heating plate and the lowest point of the edge of the groove, thus realizing the rework of the groove of the ceramic heating plate.

2. The processing method of the rework device for a ceramic heating plate according to claim 1, characterized in that, The grinding wheel is rotatably mounted above the chuck, and moves relative to the chuck in the radial direction.

3. The processing method of the rework device for a ceramic heating plate according to claim 2, characterized in that, The grinding wheel includes a surface grinding wheel for machining the surface of the ceramic heating plate and a groove grinding wheel for machining the grooves of the ceramic heating plate, and the shaft of the grinding wheel is horizontally set.

4. The processing method of the rework device for a ceramic heating plate according to claim 3, characterized in that, The chuck and the chuck drive mechanism are connected by bolts, and the base and the chuck body are connected by bolts.

5. The processing method of the rework device for a ceramic heating plate according to claim 4, characterized in that, The fine-tuning mechanism includes an adjustment hole provided on the jaw or base. The adjustment screw passes through the adjustment hole and is threaded to the adjustment hole via an external thread. The adjustment screw has a through hole, one end of which has a limiting step and the other end has a wrench limiting groove. The shank of the bolt passes through the adjustment screw, and the head of the bolt is limited within the through hole by the limiting step.

6. The processing method of the rework device for a ceramic heating plate according to claim 5, characterized in that, The adjusting screw abuts against the upper end of the chuck drive mechanism or against the lower end of the chuck body.

7. A processing method for a rework device for a ceramic heating plate according to claim 4, 5, or 6, characterized in that, The base includes a base body and mounting portions disposed at the upper and lower ends of the base body. The clearance hole is located in the middle of the base body, and the mounting portion located at the upper end of the base body is connected to the chuck by bolts.

8. The processing method of the rework device for a ceramic heating plate according to claim 5, characterized in that, The clearance hole of the base is coaxially arranged with the chuck.

9. The processing method of the rework device for a ceramic heating plate according to claim 1, characterized in that, When raising one side of the ceramic heating plate in step three, adjust the height of the adjusting screw to raise one side of the chuck or the chuck.

10. The processing method of the rework device for a ceramic heating plate according to claim 1, characterized in that, The grinding wheel is dressed before machining, and the flatness of the grinding wheel is less than or equal to 0.005 mm.

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