A method for docking a charging machine with a single crystal furnace and a charging system

Abstract

The application discloses a method for docking a charging machine and a single crystal furnace. The method comprises the following steps: obtaining parallelism between a charging port of the charging machine and a feeding port of the single crystal furnace; determining whether the parallelism is less than a preset value; if the parallelism is greater than the preset value, adjusting the parallelism of the charging machine, and continuing to perform the step of obtaining the parallelism between the charging port of the charging machine and the feeding port of the single crystal furnace; if the parallelism is less than the preset value, moving the charging machine in a vertical plane, so that a central axis of the charging port of the charging machine overlaps a central axis of the feeding port of the single crystal furnace; and pushing the charging machine towards the feeding port of the single crystal furnace along the central axis of the charging port of the charging machine, so as to complete the docking of the charging machine and the single crystal furnace. Compared with manual operation, the docking time can be greatly shortened, and the docking precision of the charging machine and the single crystal furnace can be improved.

Description

Technical Field

[0001] This application belongs to the field of single crystal furnace feeding, specifically, it relates to a feeding machine and a single crystal furnace docking method and feeding system. Background Technology

[0002] Currently, when the feeder docks with the single crystal furnace, the position of the single crystal furnace is adjusted manually, which takes a long time. In addition, the feeder is also very heavy, and it is difficult to manually adjust the angle to dock the two. Summary of the Invention

[0003] To address the problems of time-consuming and difficult manual docking between the feeder and the single crystal furnace, this application proposes a method and feeding system for docking the feeder and the single crystal furnace.

[0004] In a first aspect, this application proposes a method for connecting a feeder to a single crystal furnace, the method comprising:

[0005] Obtain the parallelism between the feed port of the feeder and the feed port of the single crystal furnace;

[0006] Determine if the parallelism is less than the preset value;

[0007] If the parallelism is greater than the preset value, the parallelism of the feeder is adjusted, and the step of obtaining the parallelism between the feeder's feed port and the single crystal furnace's feed port is continued.

[0008] If the parallelism is less than the preset value, the feeder is moved in the vertical plane so that the central axis of the feeder's feed port overlaps with the central axis of the single crystal furnace's feed port.

[0009] Along the central axis of the feeder's feed port, push the feeder toward the feed port of the single crystal furnace to complete the docking of the feeder and the single crystal furnace.

[0010] When manually connecting a single crystal furnace and a feeder, the operator must visually determine the positional relationship between the feeder's inlet and the furnace's inlet. Multiple adjustments to the feeder's position are made based on experience, a time-consuming process requiring highly experienced operators, and the final connection accuracy is often unsatisfactory. The feeder-furnace connection method proposed in this application first determines the parallelism between the feeder's inlet and the furnace's inlet before connection. If the parallelism is less than a preset value, the feeder is moved vertically to complete the connection. Compared to manual methods, this connection method significantly reduces connection time and improves the accuracy of the connection between the feeder and the furnace.

[0011] Optionally, moving the feeder in the vertical plane includes:

[0012] The feeder is moved along a first direction in the vertical plane, so that the central axis of the feeder's feed port gradually approaches the central axis of the single crystal furnace's feed port along the first direction; and / or,

[0013] The feeder is moved along the second direction in the vertical plane so that the central axis of the feeder's feed port gradually approaches the central axis of the single crystal furnace's feed port along the second direction.

[0014] When moving the feeder in the vertical plane, the feeder can be selectively moved along either the first or second direction based on the real-time positional relationship between the feeder's inlet and the single crystal furnace's inlet. This ensures that the central axis of the feeder's inlet is collinear with the central axis of the single crystal furnace's inlet. Maintaining adjustment of the feeder within the vertical plane allows the vertical plane to serve as a reference surface, preventing disruption of the parallelism between the feeder's inlet and the single crystal furnace's inlet, avoiding redundant adjustments, and ensuring precise alignment.

[0015] Optionally, a first reference plate is provided at the feed inlet of the single crystal furnace, and the reference surface of the first reference plate is parallel to the end face of the feed inlet of the single crystal furnace; a first distance sensor and a second distance sensor located in the same horizontal plane are respectively provided on both sides of the feed inlet of the feeder, and the mounting planes of the first distance sensor and the second distance sensor are parallel to the feed inlet of the single crystal furnace.

[0016] Obtain the parallelism between the feed port of the feeder and the feed port of the single crystal furnace, including:

[0017] Obtain the first distance between the first distance sensor and the first reference plate;

[0018] Obtain the second distance between the second distance sensor and the first reference plate;

[0019] Calculate the difference between the first distance and the second distance, and use the absolute value of the difference as the parallelism.

[0020] In the method of obtaining parallelism, a distance sensor and a reference plate are used in combination to accurately obtain the parallelism between the feed port of the feeder and the feed port of the single crystal furnace.

[0021] Optionally, the parallelism of the feeder can be adjusted, including:

[0022] Adjust the feeder in a clockwise or counterclockwise direction in the horizontal direction.

[0023] The feeder is adjusted in a clockwise or counterclockwise direction in the horizontal direction to ensure that the parallelism between the feeder's inlet and the single crystal furnace's inlet meets the docking requirements.

[0024] Optionally, a vertical second reference plate is provided on the side of the feed inlet of the single crystal furnace, and the reference surface of the second reference plate is perpendicular to the end face of the feed inlet of the single crystal furnace; a first proximity switch is provided on the side of the feed port of the feeder; adjusting the feeder along the first direction includes:

[0025] Move the feeder toward the second reference plate until the first proximity switch senses the second reference plate;

[0026] Move the feeder a preset distance L along the first direction;

[0027] Where L = L1 - L2 - m, L1 is the distance between the second reference plate and the center axis of the feed port of the single crystal furnace, L2 is the distance between the first proximity switch and the center axis of the feed port of the feeder, and m is the set sensing distance of the first proximity switch.

[0028] By coordinating the first proximity switch and the second reference plate, when adjusting the feeder in the first direction, the feeder is first moved towards the second reference plate in the first direction. When the first proximity switch senses the second reference plate, the feeder has essentially moved to its zero position in the first direction. Then, it is only necessary to calculate the difference between the distance between the second reference plate and the inlet of the single crystal furnace, the sensing distance of the first proximity switch, and the distance between the first proximity switch and the central axis of the feeder's feed port. Moving the feeder along the first direction by this difference, i.e., the preset distance L, will bring the central axis of the feeder's feed port close to the central axis of the single crystal furnace's feed port in the first direction. This method of adjusting the feeder's position is simple in principle and can accurately determine the distance that the feeder needs to be adjusted without extensive calculations.

[0029] Optionally, a third horizontal reference plate is provided below the feed inlet of the single crystal furnace, the reference surface of the third reference plate being perpendicular to the end face of the feed inlet of the single crystal furnace; a second proximity switch is provided below the feed inlet of the feeder; adjusting the feeder along the second direction includes:

[0030] Move the feeder toward the third reference plate until the second proximity switch senses the third reference plate;

[0031] Move the feeder to a preset height H along the second direction;

[0032] Where H = H1 - H2 - n, H1 is the distance between the third reference plate and the center axis of the feed port of the single crystal furnace, H2 is the distance between the second proximity switch and the center axis of the feed port of the feeder, and n is the set sensing distance of the second proximity switch.

[0033] By coordinating the second proximity switch and the third reference plate, when adjusting the feeder in the second direction, the feeder is first moved towards the third reference plate in the second direction. When the second proximity switch senses the third reference plate, the feeder has essentially moved to its zero position in the second direction. Then, it is only necessary to calculate the difference between the distance between the third reference plate and the inlet of the single crystal furnace, the sensing distance of the second proximity switch, and the distance between the second proximity switch and the center axis of the feeder's inlet. Moving the feeder along the second direction by this difference, i.e., the preset distance H, will bring the center axis of the feeder's inlet close to the center axis of the single crystal furnace's inlet in the second direction. This method of adjusting the feeder's position is simple in principle and can accurately determine the distance that the feeder needs to be adjusted without extensive calculations.

[0034] Optionally, a vertical second reference plate is provided on the side of the feed inlet of the single crystal furnace, and the reference surface of the second reference plate is perpendicular to the end face of the feed inlet of the single crystal furnace; a third distance sensor is provided on the side of the feed inlet of the feeder, opposite to the reference surface of the second reference plate; adjusting the feeder along the first direction includes:

[0035] Move the feeder along the first direction;

[0036] Real-time acquisition of the third distance between the third distance sensor and the second reference plate;

[0037] When the third distance equals the preset distance M, stop moving the feeder.

[0038] By cooperating with the second reference plate, the third distance sensor measures the distance between the feeder and the second reference plate in real time as the feeder moves in the first direction. This movement method is simple and convenient, and the third distance sensor can accurately measure the distance to precisely control the feeder to stop moving, further improving the docking accuracy between the feeder and the single crystal furnace.

[0039] Optionally, a third horizontal reference plate is provided below the feed inlet of the single crystal furnace, the reference surface of the third reference plate being perpendicular to the end face of the feed inlet of the single crystal furnace; a fourth distance sensor is provided below the feed inlet of the feeder, opposite to the reference surface of the third reference plate; adjusting the feeder along the second direction includes:

[0040] Move the feeder along the second direction;

[0041] Real-time acquisition of the fourth distance between the third reference plate and the fourth distance sensor;

[0042] When the fourth distance equals the preset distance N, the feeder stops moving.

[0043] By cooperating with the third reference plate, the fourth distance sensor measures the distance between the feeder and the third reference plate in real time as the feeder moves in the second direction. The movement method is simple and convenient, and the fourth distance sensor can accurately measure this distance to precisely control the feeder to stop moving, further improving the docking accuracy between the feeder and the single crystal furnace.

[0044] Optionally, the feeder is advanced toward the feed inlet of the single crystal furnace, including:

[0045] Push the feeder toward the inlet of the single crystal furnace until it contacts the inlet of the single crystal furnace;

[0046] Continue to advance the feeder a predetermined distance.

[0047] After the feeder contacts the inlet of the single crystal furnace, continuing to push the feeder forward a predetermined distance can improve the sealing between the feeder's inlet and the single crystal furnace's inlet.

[0048] Optionally, before obtaining the parallelism between the feeder's inlet and the single crystal furnace's inlet, the method for docking the feeder with the single crystal furnace further includes:

[0049] An AGV (Automated Guided Vehicle) is used to transport the feeder to a predetermined position, which is a predetermined safe distance from the single crystal furnace.

[0050] Using AGV carts to transport the feeder to the predetermined position, the AGV carts can be moved to the required location as needed, and the transportation process is simple and flexible; a predetermined safe distance is maintained between the predetermined position and the single crystal furnace to avoid interference between the feeder and the single crystal furnace and avoid unnecessary danger.

[0051] Optionally, the feeder is fixedly mounted on an adjusting bracket, which includes a height-adjustable support column;

[0052] After the AGV trolley transports the feeder to the designated position, the method for docking the feeder with the single crystal furnace also includes:

[0053] The support column of the adjustment bracket is extended and adjusted so that the support surface of the adjustment bracket is separated from the AGV trolley, and the AGV trolley is controlled to leave the adjustment bracket.

[0054] The feeder is fixed on the adjusting bracket. After the AGV trolley delivers the feeder to the predetermined position, the AGV trolley is controlled to leave the adjusting bracket by adjusting the bracket. The adjusting bracket completes the adjustment of the feeder's position, which can reduce the number of AGV trolleys required for docking.

[0055] Optionally, before obtaining the parallelism between the feeder's inlet and the single crystal furnace's inlet, the docking method between the feeder and the single crystal furnace further includes:

[0056] Obtain the inclination angle of the material tunnel inside the feed port of the feeder. The inclination angle is the angle between the material tunnel and the horizontal plane.

[0057] Determine if the tilt angle is less than the predetermined tilt angle;

[0058] If the tilt angle is less than the predetermined tilt angle, then the step of obtaining the parallelism between the feed port of the feeder and the feed port of the single crystal furnace is performed;

[0059] If the tilt angle is greater than the predetermined tilt angle, adjust the angle between the feed port of the feeder and the horizontal plane until the tilt angle is less than the predetermined tilt angle.

[0060] Before obtaining the parallelism between the feed port of the feeder and the feed port of the single crystal furnace, the tilt angle of the material tunnel inside the feed port should be determined first, and the tilt angle of the material tunnel should be adjusted and corrected in time to ensure the accuracy of the docking between the feed port of the feeder and the feed port of the single crystal furnace.

[0061] Secondly, this application proposes a feeding system, which includes a feeder, a single crystal furnace, a first distance sensor, a second distance sensor, a third distance sensor, a fourth distance sensor, a first reference plate, a second reference plate, and a third reference plate. The first distance sensor and the second distance sensor are respectively installed on both sides of the feed port of the feeder, and the first distance sensor and the second distance sensor are located in the same horizontal plane. The first reference plate is installed at the feed port of the single crystal furnace, and the reference surface of the first reference plate is parallel to the end face of the feed port of the single crystal furnace. The mounting planes of the first distance sensor and the second distance sensor are parallel to the feed port of the single crystal furnace.

[0062] A third distance sensor is installed on the side of the feed port of the feeder, and a vertical second reference plate is installed on the side of the feed port of the single crystal furnace. The reference surface of the second reference plate is perpendicular to the end face of the feed port of the single crystal furnace.

[0063] A fourth distance sensor is installed below the feeding port of the feeder, and a third horizontal reference plate is installed below the feeding port of the single crystal furnace. The reference surface of the third reference plate is perpendicular to the end face of the feeding port of the single crystal furnace.

[0064] In the feeding system proposed in this application, a reference plate is set around the feed inlet of the single crystal furnace and a distance sensor is set around the feed inlet of the feeder to obtain the distance relationship between the feeder's feed inlet and the feed inlet of the single crystal furnace. This allows for adjustments such as rotation and movement of the feeder, so that no manual adjustment is required when the feeder is docked with the single crystal furnace, thus achieving automated docking. Attached Figure Description

[0065] Figure 1A This is a schematic diagram illustrating one implementation of the method for connecting the feeder to the single crystal furnace according to this application;

[0066] Figure 1B This is a schematic diagram illustrating another implementation of the method for connecting the feeder to the single crystal furnace according to this application;

[0067] Figure 2 This is a schematic diagram of the feeding system of this application;

[0068] Figure 3 This is a schematic diagram for parallelism adjustment;

[0069] Figure 4A A top view showing that the center axis of the feeder's feed port deviates from the center axis of the single crystal furnace's feed port in the first direction;

[0070] Figure 4B This is a top view of the feed port of the feeder and the feed port of the single crystal furnace;

[0071] Figure 5A A side view showing that the center axis of the feeder's feed port deviates from the center axis of the single crystal furnace's feed port in a second direction;

[0072] Figure 5B This is a side view of the feed port of the feeder and the feed port of the single crystal furnace.

[0073] In the diagram: feeder 100; feed port 110; first distance sensor 120; second distance sensor 130; first proximity switch 140; second proximity switch 150; single crystal furnace 200; feed port 210; first reference plate 220; second reference plate 230; third reference plate 240; AGV trolley 300; adjustment bracket 400. Detailed Implementation

[0074] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this application. The described embodiments are only some, not all, of the embodiments of this application. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application.

[0075] The present application will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present application can be combined with each other.

[0076] When manually connecting the single crystal furnace 200 and the feeder 100, it is usually necessary to visually determine the positional relationship between the feed port 110 of the feeder 100 and the feed inlet 210 of the single crystal furnace 200. Multiple adjustments to the position of the feeder 100 are made based on experience, a process that is not only time-consuming but also requires highly experienced operators, and the final alignment accuracy is often unsatisfactory. To address the shortcomings of current methods for connecting the single crystal furnace 200 and the feeder 100, this application provides a method and feeding system for connecting the feeder 100 and the single crystal furnace 200.

[0077] The following is combined with Figure 1A The method for docking the feeder 100 with the single crystal furnace 200 proposed in this application is described, and the method includes:

[0078] Obtain the parallelism between the feeding port 110 of the feeder 100 and the feeding port 210 of the single crystal furnace 200;

[0079] Determine if the parallelism is less than the preset value;

[0080] If the parallelism is greater than the preset value, the parallelism of the feeder 100 is adjusted, and the step of obtaining the parallelism between the feed port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200 is continued.

[0081] If the parallelism is less than the preset value, the feeder 100 is moved in the vertical plane so that the central axis of the feed port 110 of the feeder 100 overlaps with the central axis of the feed port 210 of the single crystal furnace 200.

[0082] Along the central axis of the feeding port 110 of the feeder 100, the feeder 100 is pushed toward the feeding port 210 of the single crystal furnace 200 to complete the docking of the feeder 100 and the single crystal furnace 200.

[0083] The docking method for the feeder 100 and the single crystal furnace 200 proposed in this application involves determining the parallelism between the feed port 110 of the feeder 100 and the feed inlet 210 of the single crystal furnace 200 before docking. If the parallelism is less than a preset value, the feeder 100 is moved in the vertical plane to complete the docking. Compared with manual docking, the docking time can be greatly shortened and the docking accuracy of the feeder 100 and the single crystal furnace 200 can be improved by following the docking method of this application.

[0084] The specific methods for moving the feeder 100 in the vertical plane include:

[0085] Optionally, such as Figure 4AAs shown, when the central axis of the feed port 110 of the feeder 100 is only deviated from the central axis of the feed port 210 of the single crystal furnace 200 in the first direction in the vertical plane, it is only necessary to adjust the deviation in the first direction in the vertical plane. That is, the feeder 100 is moved along the first direction in the vertical plane so that the central axis of the feed port 110 of the feeder 100 gradually approaches the central axis of the feed port 210 of the single crystal furnace 200 along the first direction.

[0086] Optionally, such as Figure 5A As shown, when the central axis of the feed port 110 of the feeder 100 is only deviated from the central axis of the feed port 210 of the single crystal furnace 200 in the second direction in the vertical plane, it is only necessary to adjust the deviation in the second direction in the vertical plane. That is, the feeder 100 is moved along the second direction in the vertical plane so that the central axis of the feed port 110 of the feeder 100 gradually approaches the central axis of the feed port 210 of the single crystal furnace 200 along the second direction.

[0087] Optionally, such as Figure 4A and 5A As shown, when there is a deviation between the central axis of the feeding port 110 of the feeder 100 and the central axis of the feed inlet 210 of the single crystal furnace 200 in both the first and second directions in the vertical plane, adjustments need to be made in the vertical plane to address the deviations in the first and second directions. The order of adjustment in the two directions is not restricted; the first direction can be adjusted first, the second direction first, or a small adjustment can be made in the first direction followed by a small adjustment in the second direction, alternating between these adjustments. In short, when adjustments are needed in both directions, the adjustment method can be flexibly selected based on the site conditions. Specifically, the feeder 100 is moved along the first direction in the vertical plane, gradually bringing the central axis of the feeding port 110 of the feeder 100 closer to the central axis of the feed inlet 210 of the single crystal furnace 200; the feeder 100 is also moved along the second direction in the vertical plane, gradually bringing the central axis of the feeding port 110 of the feeder 100 closer to the central axis of the feed inlet 210 of the single crystal furnace 200.

[0088] When moving the feeder 100 in the vertical plane, based on the real-time positional relationship between the feed port 110 of the feeder 100 and the inlet 210 of the single crystal furnace 200, the feeder 100 can be selectively moved along either the first or second direction in the vertical plane. This ensures that the central axis of the feed port 110 of the feeder 100 is collinear with the central axis of the inlet 210 of the single crystal furnace 200. Maintaining adjustment of the feeder 100 within the vertical plane allows the vertical plane to serve as a reference surface, preventing disruption of the parallelism between the feed port 110 of the feeder 100 and the inlet 210 of the single crystal furnace 200, avoiding redundant adjustments, and ensuring the accuracy of the alignment.

[0089] In order to obtain the parallelism, in one embodiment of this application, such as Figure 3 , Figure 4A , Figure 4B As shown, a first reference plate 220 is provided at the feed inlet 210 of the single crystal furnace 200, and the reference surface of the first reference plate 220 is parallel to the end face of the feed inlet 210 of the single crystal furnace 200; a first distance sensor 120 and a second distance sensor 130 located in the same horizontal plane are respectively provided on both sides of the feed inlet 110 of the feeder 100, and the mounting planes of the first distance sensor 120 and the second distance sensor 130 are parallel to the feed inlet 210 of the single crystal furnace 200.

[0090] Obtaining the parallelism between the feed port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200 includes:

[0091] Obtain the first distance between the first distance sensor 120 and the first reference plate 220;

[0092] Acquire the second distance between the second distance sensor 130 and the first reference plate 220;

[0093] Calculate the difference between the first distance and the second distance, and use the absolute value of the difference as the parallelism.

[0094] The first distance sensor 120 can obtain the first distance from one side of the feed port 110 of the feeder 100 to the same first reference plate 220. The second distance sensor 130 can obtain the second distance from one side of the feed port 110 of the feeder 100 to the same first reference plate 220. The parallelism is obtained by calculating the difference between the first distance and the second distance. This calculation method is simple and has high accuracy.

[0095] In obtaining the parallelism, a distance sensor and a reference plate are used in combination, instead of directly obtaining the distance between the distance sensor and the feed port 210 of the single crystal furnace 200. The first reference plate 220, which is parallel to the end face of the feed port 210 of the single crystal furnace 200, is used as the reference surface. The size and flatness of the first reference plate 220 can be selected according to the docking requirements and are not limited by the size and flatness of the feed port 210. This allows for a more accurate acquisition of the parallelism between the feed port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200.

[0096] Optionally, the parallelism of the feeder 100 is adjusted, including:

[0097] Adjust the feeder 100 in the horizontal direction in either clockwise or counterclockwise.

[0098] like Figure 3As shown, when the first distance X1 is greater than the second distance X2 and the parallelism is greater than the preset value, the parallelism does not meet the requirements. At this time, the position of the feeder 100 needs to be adjusted clockwise in the horizontal direction, that is, the feeder 100 is rotated clockwise in the horizontal direction.

[0099] When the first distance X1 is less than the second distance X2 and the parallelism is greater than the preset value, the parallelism does not meet the requirements. At this time, the position of the feeder 100 needs to be adjusted clockwise in the horizontal direction, that is, the feeder 100 needs to be rotated counterclockwise in the horizontal direction.

[0100] It should be noted that, after a lot of experiments, it was found that when the feeder 100 docks with the single crystal furnace 200, setting the preset value of parallelism to 0.3mm can achieve docking of the feeder 100 and the single crystal furnace 200 with relatively high accuracy.

[0101] By adjusting the feeder 100 in a clockwise or counterclockwise direction in the horizontal direction, the parallelism between the feed port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200 meets the docking requirements.

[0102] In order to achieve adjustment of the feeder 100 along a first direction within a first plane, in one embodiment of this application, such as... Figure 4A As shown, a vertical second reference plate 230 is provided on the side of the feed inlet 210 of the single crystal furnace 200, and the reference surface of the second reference plate 230 is perpendicular to the end face of the feed inlet 210 of the single crystal furnace 200; a first proximity switch 140 is provided on the side of the feed port 110 of the feeder 100; adjusting the feeder 100 along the first direction includes:

[0103] The feeder 100 is moved toward the second reference plate 230 until the first proximity switch 140 senses the second reference plate 230;

[0104] The feeder 100 is moved a preset distance L along the first direction;

[0105] Where L = L1 - L2 - m, L1 is the distance between the second reference plate 230 and the central axis of the feed port 210 of the single crystal furnace 200, L2 is the distance between the first proximity switch 140 and the central axis of the feed port 110 of the feeder 100, and m is the set sensing distance of the first proximity switch 140.

[0106] When the feeder 100 is adjusted to the correct position in the first direction, such as Figure 4B As shown, in the first direction, the central axis of the feed port 110 of the feeder 100 coincides with the central axis of the feed port 210 of the single crystal furnace 200.

[0107] By coordinating the first proximity switch 140 and the second reference plate 230, when adjusting the feeder 100 in the first direction, the feeder 100 is first moved towards the second reference plate 230 in the first direction. When the first proximity switch 140 senses the second reference plate 230, the feeder 100 is essentially moved to a zero position in the first direction. Then, it is only necessary to calculate the difference between the distance between the second reference plate 230 and the feed inlet 210 of the single crystal furnace 200, the sensing distance of the first proximity switch 140, and the distance between the first proximity switch 140 and the central axis of the feeder 100's feed port 110. The feeder 100 is then moved along the first direction by this difference, i.e., the preset distance L, so that the central axis of the feeder 100's feed port 110 approaches the central axis of the single crystal furnace 200's feed port 110 in the first direction. This method of adjusting the position of the feeder 100 is simple in principle and can accurately determine the distance that the feeder 100 needs to be adjusted without extensive calculations.

[0108] Optionally, such as Figure 5A As shown, a horizontal third reference plate 240 is provided below the feed inlet 210 of the single crystal furnace 200, and the reference surface of the third reference plate 240 is perpendicular to the end face of the feed inlet 210 of the single crystal furnace 200; a second proximity switch 150 is provided below the feed inlet 110 of the feeder 100; adjusting the feeder 100 along the second direction includes:

[0109] The feeder 100 is moved toward the third reference plate 240 until the second proximity switch 150 senses the third reference plate 240;

[0110] Move the feeder 100 to a preset height H along the second direction;

[0111] Where H = H1 - H2 - n, H1 is the distance between the third reference plate 240 and the central axis of the feed port 210 of the single crystal furnace 200, H2 is the distance between the second proximity switch 150 and the central axis of the feed port 110 of the feeder 100, and n is the set sensing distance of the second proximity switch 150.

[0112] When the feeder 100 is adjusted to the correct position in the first direction, such as Figure 5B As shown, in the second direction, the central axis of the feed port 110 of the feeder 100 coincides with the central axis of the feed port 210 of the single crystal furnace 200.

[0113] By coordinating the second proximity switch 150 and the third reference plate 240, when adjusting the feeder 100 in the second direction, the feeder 100 is first moved towards the third reference plate 240 in the second direction. When the second proximity switch 150 senses the third reference plate 240, the feeder 100 is essentially moved to a zero position in the second direction. Then, it is only necessary to calculate the difference between the distance between the third reference plate 240 and the feed inlet 210 of the single crystal furnace 200, the sensing distance of the second proximity switch 150, and the distance between the second proximity switch 150 and the central axis of the feeder 100's feed port 110. The feeder 100 is then moved along the second direction by this difference, i.e., the preset distance H, so that the central axis of the feeder 100's feed port 110 approaches the central axis of the single crystal furnace 200's feed port 110 in the second direction. This method of adjusting the position of the feeder 100 is simple in principle and can accurately determine the distance that the feeder 100 needs to be adjusted without extensive calculations.

[0114] Optionally, when adjusting the feeder along the first direction in the vertical plane, such as Figure 4A As shown, a vertical second reference plate 230 is provided on the side of the feed inlet 210 of the single crystal furnace 200, and the reference surface of the second reference plate 230 is perpendicular to the end face of the feed inlet 210 of the single crystal furnace 200; a third distance sensor is provided on the side of the feed inlet 110 of the feeder 100, which is opposite to the reference surface of the second reference plate 230 (the setting position of the third distance sensor is...). Figure 4A Position 140 of the first proximity switch; adjusting the feeder along the first direction, including:

[0115] Move the feeder 100 along the first direction;

[0116] The third distance between the third distance sensor and the second reference plate 230 is acquired in real time.

[0117] When the third distance equals the preset distance M, stop moving the feeder.

[0118] By cooperating with the second reference plate 230, the third distance sensor measures the distance between the feeder and the second reference plate in real time as the feeder moves in the first direction. Compared with using the first proximity switch, the movement method is simpler and more convenient. The third distance sensor can accurately measure the third distance to precisely control the feeder to stop moving, further improving the docking accuracy between the feeder and the single crystal furnace.

[0119] Optionally, when adjusting the feeder along the second direction in the vertical plane, such as Figure 5AAs shown, a horizontal third reference plate 240 is provided below the feed inlet 210 of the single crystal furnace 200, and the reference surface of the third reference plate 240 is perpendicular to the end face of the feed inlet 210 of the single crystal furnace 200; a fourth distance sensor is provided below the feed inlet 110 of the feeder 100, which is opposite to the reference surface of the third reference plate 240 (the location of the fourth distance sensor is...). Figure 5A The second proximity switch is at position 150; adjusting the feeder in the second direction includes:

[0120] Move the feeder 100 along the second direction;

[0121] The fourth distance between the fourth distance sensor and the third reference plate 240 is acquired in real time.

[0122] When the fourth distance equals the preset distance N, the feeder stops moving.

[0123] By cooperating with the third reference plate 240, the fourth distance sensor measures the distance between the feeder and the third reference plate 240 in real time when the feeder moves in the second direction. Compared with the movement method using the second proximity switch, this is simpler and more convenient. The fourth distance sensor can accurately measure the fourth distance to precisely control the feeder to stop moving, further improving the docking accuracy between the feeder 100 and the single crystal furnace 200.

[0124] Optionally, the feeder 100 is advanced toward the feed inlet 210 of the single crystal furnace 200, including:

[0125] Push the feeder 100 toward the feed inlet 210 of the single crystal furnace 200 until it contacts the feed inlet 210 of the single crystal furnace 200;

[0126] Continue to advance the feeder 100 a predetermined distance.

[0127] After the feeder 100 contacts the inlet 210 of the single crystal furnace 200, pushing the feeder forward a predetermined distance improves the sealing performance between the feeder inlet 110 and the inlet 210 of the single crystal furnace 200. Specifically, during the docking process, a portion of the feeder's inlet end face may initially contact the furnace's inlet, while another portion may not. To ensure a tight seal during docking, the feeder needs to be pushed forward until all end faces of the feeder's inlet are in contact with the furnace's inlet end face. Extensive testing has shown that maintaining a predetermined distance of 2–8 mm during this forward movement achieves optimal sealing performance.

[0128] Optionally, before obtaining the parallelism between the feed port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200, the docking method between the feeder 100 and the single crystal furnace 200 further includes:

[0129] An AGV (Automated Guided Vehicle) is used to transport the feeder 100 to a predetermined position, which is a predetermined safe distance from the single crystal furnace 200.

[0130] The AGV (Automated Guided Vehicle) is used to move the feeder 100 to the predetermined position. The AGV can be moved to the required position as needed, and the transportation process is simple and flexible. A predetermined safe distance is maintained between the predetermined position and the single crystal furnace 200 to avoid interference between the feeder 100 and the single crystal furnace 200 and avoid unnecessary danger.

[0131] Optionally, the feeder 100 is fixedly mounted on the adjusting bracket 400, which includes a support column that can be raised and lowered.

[0132] After the AGV trolley transports the feeder 100 to the predetermined position, the method for docking the feeder 100 with the single crystal furnace 200 also includes:

[0133] The support column of the adjustment bracket 400 is extended and adjusted so that the support surface of the adjustment bracket 400 is separated from the AGV trolley, and the AGV trolley is controlled to leave the adjustment bracket 400.

[0134] The feeder 100 is fixed on the adjusting bracket 400. After the AGV trolley delivers the feeder 100 to the predetermined position, the AGV trolley is controlled to leave the adjusting bracket 400 by the adjusting bracket 400. The adjusting bracket 400 completes the adjustment of the position of the feeder 100, which can reduce the number of AGV trolleys required for docking.

[0135] In the feeder 100, a retractable material tunnel is provided inside the feed port 110. During production, it has been found that the material tunnel inside the feeder 100 may exhibit a tilting or tilting phenomenon; that is, the end of the material tunnel extending out of the feed port 110 may tilt downwards or upwards compared to the other end. This can negatively impact the connection between the feeder 100 and the single crystal furnace 200. To overcome this problem, in one embodiment of this application, such as... Figure 2 As shown, before obtaining the parallelism between the feeding port 110 of the feeder 100 and the inlet 210 of the single crystal furnace 200, the docking method between the feeder 100 and the single crystal furnace 200 further includes:

[0136] Obtain the inclination angle of the material tunnel inside the feed port 110 of the feeder 100, where the inclination angle is the angle between the material tunnel and the horizontal plane;

[0137] Determine if the tilt angle is less than the predetermined tilt angle;

[0138] If the tilt angle is less than the predetermined tilt angle, then the step of obtaining the parallelism between the feed port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200 is performed.

[0139] If the tilt angle is greater than the predetermined tilt angle, adjust the angle between the feed port 110 of the feeder 100 and the horizontal plane until the tilt angle is less than the predetermined tilt angle.

[0140] Before obtaining the parallelism between the feeding port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200, the tilt angle of the material tunnel inside the feeding port 110 is determined first, and the tilt angle of the material tunnel is adjusted and corrected in time to ensure the accuracy of the docking between the feeding port 110 of the feeder 100 and the feed port 210 of the single crystal furnace 200.

[0141] Specifically, the tilt angle can be reduced to less than the maximum tilt angle by adjusting one end of the feed port 110 of the feeder 100 downwards or upwards. For example, when the material tunnel tilts upwards and the tilt angle is greater than the predetermined tilt angle, the tilt angle can be reduced by slightly lifting one end of the feeder 100 relative to the feed port 110 (the lifting method can be achieved by using some mechanical devices, pads, etc.). Similarly, when the material tunnel tilts downwards and the tilt angle is greater than the predetermined tilt angle, the tilt angle can be reduced by slightly lifting one end of the feed port 110 of the feeder 100 (the lifting method can be achieved by using some mechanical devices, pads, etc.).

[0142] Extensive docking experiments have shown that when the predetermined tilt angle is controlled at 0.4°, the docking accuracy between the feeder 100 and the single crystal furnace 200 can be guaranteed to the maximum extent.

[0143] It should be noted that, in various embodiments of the docking method between the feeder 100 and the single crystal furnace 200 proposed in this application, the adjustment of the feeder 100 in the horizontal direction (clockwise or counterclockwise), in the vertical plane along the first and second directions, and in the material tunnel (raising or lowering) can be performed using specific mechanical devices or directly by the AGV trolley. In this application, regardless of the device used, as long as the required adjustments of the feeder 100 in this application can be completed, it is acceptable.

[0144] Secondly, this application proposes a feeding system, such as Figure 3As shown, the feeding system includes a feeder 100, a single crystal furnace 200, a first distance sensor 120, a second distance sensor 130, a third distance sensor, a fourth distance sensor, a first reference plate 220, a second reference plate 230, and a third reference plate 240. The first distance sensor 120 and the second distance sensor 130 are respectively installed on both sides of the feeding port 110 of the feeder 100, and the first distance sensor 120 and the second distance sensor 130 are located in the same horizontal plane. The first reference plate 220 is installed at the feeding port 210 of the single crystal furnace 200, and the reference surface of the first reference plate 220 is parallel to the end face of the feeding port 210 of the single crystal furnace 200. The mounting planes of the first distance sensor 120 and the second distance sensor 130 are parallel to the feeding port 210 of the single crystal furnace 200.

[0145] A third distance sensor is provided on the side of the feeding port 110 of the feeder 100, and a vertical second reference plate 230 is provided on the side of the feeding port 210 of the single crystal furnace 200. The reference surface of the second reference plate 230 is perpendicular to the end face of the feeding port 210 of the single crystal furnace 200.

[0146] A fourth distance sensor is installed below the feeding port 110 of the feeder 100, and a horizontal third reference plate 240 is installed below the feeding port 210 of the single crystal furnace 200. The reference surface of the third reference plate 240 is perpendicular to the end face of the feeding port 210 of the single crystal furnace 200.

[0147] It should be noted that proximity switches are also a type of distance sensor. In the feeding system proposed in this application, the third distance sensor and / or the fourth distance sensor can also be replaced with proximity switches. The docking of the feeder and the single crystal furnace is completed by using proximity switches to adjust the feeder in the vertical plane in one embodiment of this application.

[0148] In the feeding system proposed in this application, a reference plate is set around the feed inlet 210 of the single crystal furnace 200 and a distance sensor is set around the feed inlet 110 of the feeder 100 to obtain the distance relationship between the feed inlet 110 of the feeder 100 and the feed inlet 210 of the single crystal furnace 200. The feeder 100 is then rotated, moved, or adjusted so that when the feeder 100 docks with the single crystal furnace 200, no manual adjustment is required, and automated docking can be achieved.

[0149] The foregoing illustrative description of the invention and its embodiments is not restrictive, and the accompanying drawings are only one embodiment of the invention; the actual structure is not limited to this. Therefore, if a person skilled in the art, inspired by this description, designs a similar structure and embodiment without departing from the spirit of the invention, such design should fall within the scope of protection of this patent.

Claims

1. A method for docking a feeder with a single crystal furnace, characterized in that, A first reference plate is provided at the feed inlet of the single crystal furnace, and the reference surface of the first reference plate is parallel to the end face of the feed inlet of the single crystal furnace; a first distance sensor and a second distance sensor located on the same horizontal plane are respectively provided on both sides of the feed inlet of the feeder, and the mounting planes of the first distance sensor and the second distance sensor are parallel to the feed inlet of the single crystal furnace; the docking method between the feeder and the single crystal furnace includes: Obtain the inclination angle of the material tunnel inside the feed port of the feeder, wherein the inclination angle is the angle between the material tunnel and the horizontal plane, and determine whether the inclination angle is less than a predetermined inclination angle; If the tilt angle is less than a predetermined tilt angle, the parallelism between the feed port of the feeder and the feed port of the single crystal furnace is obtained, including: obtaining the first distance between the first distance sensor and the first reference plate, obtaining the second distance between the second distance sensor and the first reference plate, calculating the difference between the first distance and the second distance, taking the absolute value of the difference as the parallelism, and determining whether the parallelism is less than a preset value. If the parallelism is greater than the preset value, then the parallelism of the feeder is adjusted, and the step of obtaining the parallelism between the feeder's feed port and the single crystal furnace's feed port is continued. If the parallelism is less than the preset value, the feeder is moved in the vertical plane so that the central axis of the feeder's feed port overlaps with the central axis of the single crystal furnace's feed port; along the central axis of the feeder's feed port, the feeder is pushed toward the feed port of the single crystal furnace to complete the docking of the feeder with the single crystal furnace. If the tilt angle is greater than the predetermined tilt angle, the angle between the feed port of the feeder and the horizontal plane is adjusted until the tilt angle is less than the predetermined tilt angle.

2. The method for docking the feeder with the single crystal furnace according to claim 1, characterized in that, Moving the feeder in the vertical plane includes: The feeder is moved along a first direction in the vertical plane, such that the central axis of the feeder's feed port gradually approaches the central axis of the single crystal furnace's feed port along the first direction; and / or, The feeder is moved along the second direction in the vertical plane so that the central axis of the feed port of the feeder gradually approaches the central axis of the feed port of the single crystal furnace along the second direction.

3. The method for docking the feeder with the single crystal furnace according to claim 1, characterized in that, The parallelism adjustment of the feeder includes: The feeder can be adjusted in a clockwise or counterclockwise direction in the horizontal direction.

4. The method for docking the feeder with the single crystal furnace according to claim 2, characterized in that, A vertical second reference plate is provided on the side of the feed inlet of the single crystal furnace, and the reference surface of the second reference plate is perpendicular to the end face of the feed inlet of the single crystal furnace; a first proximity switch is provided on the side of the feed inlet of the feeder. The adjustment of the feeder along the first direction includes: The feeder is moved toward the second reference plate until the first proximity switch senses the second reference plate; The feeder is moved a preset distance L along the first direction; Where L = L1 - L2 - m, L1 is the distance between the second reference plate and the central axis of the feed port of the single crystal furnace, L2 is the distance between the first proximity switch and the central axis of the feed port of the feeder, and m is the set sensing distance of the first proximity switch.

5. The method for docking the feeder with the single crystal furnace according to claim 2, characterized in that, A horizontal third reference plate is provided below the feed inlet of the single crystal furnace, and the reference surface of the third reference plate is perpendicular to the end face of the feed inlet of the single crystal furnace; a second proximity switch is provided below the feed inlet of the feeder. The adjustment of the feeder along the second direction includes: The feeder is moved toward the third reference plate until the second proximity switch senses the third reference plate; The feeder is moved a preset height H along the second direction; Where H = H1 - H2 - n, H1 is the distance between the third reference plate and the center axis of the feed port of the single crystal furnace, H2 is the distance between the second proximity switch and the center axis of the feed port of the feeder, and n is the set sensing distance of the second proximity switch.

6. The method for docking the feeder with the single crystal furnace according to claim 2, characterized in that, A vertical second reference plate is provided on the side of the feed inlet of the single crystal furnace, and the reference surface of the second reference plate is perpendicular to the end face of the feed inlet of the single crystal furnace; a third distance sensor is provided on the side of the feed inlet of the feeder, which is opposite to the reference surface of the second reference plate. The adjustment of the feeder along the first direction includes: The feeder is moved along the first direction; The third distance between the third distance sensor and the second reference plate is acquired in real time. When the third distance equals the preset distance M, the feeder stops moving.

7. The method for docking the feeder with the single crystal furnace according to claim 2, characterized in that, A horizontal third reference plate is provided below the feed inlet of the single crystal furnace, and the reference surface of the third reference plate is perpendicular to the end face of the feed inlet of the single crystal furnace; a fourth distance sensor is provided below the feed inlet of the feeder, which is opposite to the reference surface of the third reference plate. The adjustment of the feeder along the second direction includes: The feeder is moved along the second direction; The fourth distance between the fourth distance sensor and the third reference plate is acquired in real time. When the fourth distance equals the preset distance N, the feeder stops moving.

8. The method for docking the feeder with the single crystal furnace according to claim 1, characterized in that, The step of advancing the feeder toward the inlet of the single crystal furnace includes: The feeder is advanced toward the feed inlet of the single crystal furnace until it contacts the feed inlet of the single crystal furnace; Continue to advance the feeder a predetermined distance.

9. The method for docking the feeder with the single crystal furnace according to claim 1, characterized in that, Before obtaining the parallelism between the feed port of the feeder and the feed port of the single crystal furnace, the method for docking the feeder with the single crystal furnace further includes: An AGV (Automated Guided Vehicle) is used to transport the feeder to a predetermined position, which is a predetermined safe distance from the single crystal furnace.

10. The method for docking the feeder with the single crystal furnace according to claim 9, characterized in that, The feeder is fixedly mounted on the adjusting bracket, which includes a support column that can be raised and lowered. After the AGV trolley transports the feeder to the predetermined position, the method for docking the feeder with the single crystal furnace further includes: The support column of the adjustment bracket is extended and adjusted so that the support surface of the adjustment bracket is detached from the AGV trolley, and the AGV trolley is controlled to leave the adjustment bracket.

11. A feeding system, characterized in that, The feeding system uses the feeding machine docking method with the single crystal furnace as described in any one of claims 1-10; the feeding system includes a feeding machine, a single crystal furnace, a first distance sensor, a second distance sensor, a third distance sensor, a fourth distance sensor, a first reference plate, a second reference plate, and a third reference plate; the first distance sensor and the second distance sensor are respectively installed on both sides of the feeding port of the feeding machine, and the first distance sensor and the second distance sensor are located in the same horizontal plane; the first reference plate is installed at the feeding port of the single crystal furnace, and the reference surface of the first reference plate is parallel to the end face of the feeding port of the single crystal furnace; the mounting planes of the first distance sensor and the second distance sensor are parallel to the feeding port of the single crystal furnace. A third distance sensor is provided on the side of the feeding port of the feeder, and a vertical second reference plate is provided on the side of the feeding port of the single crystal furnace. The reference surface of the second reference plate is perpendicular to the end face of the feeding port of the single crystal furnace. A fourth distance sensor is installed below the feeding port of the feeder, and a third horizontal reference plate is installed below the feeding port of the single crystal furnace. The reference surface of the third reference plate is perpendicular to the end face of the feeding port of the single crystal furnace.

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