Methods, apparatus and systems for processing frequency domain data of probe response of probe microscopy equipment

Abstract

This invention discloses a method, apparatus, and system for processing probe response frequency domain data. The method includes: acquiring driving signal data, wherein the driving signal data includes multiple discrete swept frequency signal data, and the frequencies of the multiple discrete swept frequency signal data are different; acquiring probe response signal data generated by the probe microscopy device under the excitation of the driving signal data; representing the driving signal data and the probe response signal data at multiple frequencies in matrix form to obtain a driving signal matrix and a probe response signal matrix respectively; and determining the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete swept frequency signal data based on the driving signal matrix and the probe response signal matrix and performing matrix operations. This invention extracts more important frequency domain data through matrix operations, significantly improving the efficiency of high-throughput atomic force microscopy characterization technology.

Description

Technical Field

[0001] This invention relates to the field of probe microscopy equipment technology, and in particular to a probe response frequency domain data processing method, a probe response frequency domain data processing device, and a probe response frequency domain data processing system for probe microscopy equipment. Background Technology

[0002] In the field of materials science, atomic force microscopy (AFM), represented by scanning transmission electron microscopy (STEM) and scanning probe microscopy (SPM), has effectively promoted the development of materials measurement techniques in order to obtain information on the microstructure and even atomic structure of materials. In high-throughput AFM characterization techniques, a customized driving signal is applied to the probe of the probe microscope, causing the probe to generate response data under the excitation of the driving signal. The measurement results are then obtained by analyzing the response data. During the measurement process, all vibration data is usually collected and analyzed. However, the large volume of vibration data makes it difficult to store and process. Furthermore, the time available for data processing when the AFM is not generating data is very short, making it difficult for traditional digital phase-locked loop (DLL) algorithms to extract the frequency domain response within such a short time. Summary of the Invention

[0003] Therefore, in view of at least some of the deficiencies and defects in the prior art, the present invention proposes a probe response frequency domain data processing method, a probe response frequency domain data processing device, and a probe response frequency domain data processing system for a probe microscopy device.

[0004] On one hand, an embodiment of the present invention proposes a probe response frequency domain data processing method, comprising: acquiring driving signal data, wherein the driving signal data includes multiple discrete frequency sweep signal data, and the multiple frequencies of the multiple discrete frequency sweep signal data are different; acquiring probe response signal data generated by the probe microscopy device under the excitation of the driving signal data; representing the driving signal data and the probe response signal data at multiple frequencies in matrix form to obtain a driving signal matrix and a probe response signal matrix respectively; and determining the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete frequency sweep signal data based on the driving signal matrix and the probe response signal matrix and performing matrix operations.

[0005] In one embodiment of the present invention, determining the probe response frequency domain data of the probe microscopy device under the excitation of the plurality of discrete frequency sweep signal data by performing matrix operations based on the driving signal matrix and the probe response signal matrix includes: determining the number of sampling points corresponding to a preset period based on the highest frequency, the lowest frequency among the plurality of driving frequencies of the plurality of discrete frequency sweep signal data, and the sampling rate of the probe response signal data; determining a plurality of sampling phases corresponding to the plurality of driving frequencies based on the number of sampling points, the sampling rate, and the plurality of driving frequencies; and determining the probe response frequency domain data based on the driving signal matrix, the probe response signal matrix, the plurality of sampling phases, and the plurality of driving frequencies.

[0006] In one embodiment of the present invention, the number of sampling points n s satisfy:

[0007]

[0008] The multiple sampling phases θ j satisfy:

[0009]

[0010] Among them, f s The sampling rate of the signal acquisition device is [ ], where [ ] represents the rounding operation, ω1 is the lowest frequency among the multiple driving frequencies, and ω n ω is the highest frequency among the plurality of driving frequencies. j It is the j-th driving frequency among the plurality of driving frequencies.

[0011] In one embodiment of the present invention, determining the probe response frequency domain data based on the driving signal matrix, the probe response signal matrix, the plurality of sampling phases, and the plurality of driving frequencies includes: determining a plurality of first components and a plurality of second components of the probe response signal data based on the driving signal matrix, the probe response signal matrix, the duration of the plurality of discrete sweep frequency signal data, the plurality of sampling phases, and the plurality of driving frequencies; and calculating a plurality of probe response amplitudes and a plurality of probe response phases of the probe response frequency domain data based on the plurality of first components, the plurality of second components, and the plurality of sampling phases.

[0012] In one embodiment of the present invention, the probe response frequency domain data processing method of the probe microscopy device further includes: the plurality of first components and the plurality of second components respectively satisfying:

[0013]

[0014]

[0015] The amplitude and phase of the multiple probe responses respectively satisfy:

[0016]

[0017]

[0018] Where, ω j Let be the j-th driving frequency among the plurality of driving frequencies, and Δt be the duration of the plurality of discrete sweep frequency signal data, D j and R j ω j The corresponding driving signal matrix and probe response signal matrix, θ j For the driving frequency ω j The phase corresponding to the number of downsampling points, A(ω) j The frequency domain data of the probe response at the driving frequency ω is... j The amplitude, φ(ω) j The frequency domain data of the probe response at the driving frequency ω is... j The phase below, X j and Y j The probe response signal data are respectively in ω j The first and second components at the frequency.

[0019] In one embodiment of the present invention, the probe response frequency domain data processing method further includes: sending discrete sweep frequency signal parameters to a signal generating device, so that the signal generating device generates the driving signal data according to the discrete sweep frequency signal and sends the driving signal data to the probe microscopy device.

[0020] On the other hand, an embodiment of the present invention provides a probe response frequency domain data processing device comprising: a drive signal acquisition module for acquiring drive signal data, wherein the drive signal data includes multiple discrete sweep frequency signal data, and the multiple drive frequencies of the multiple discrete sweep frequency signal data are different; a response signal acquisition module for acquiring probe response signal data generated by the probe microscopy device under the excitation of the drive signal data; a matrix characterization module for characterizing the drive signal data and the probe response signal data in matrix form to obtain a drive signal matrix and a probe response signal matrix respectively; and a frequency domain data acquisition module for determining the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete sweep frequency signal data based on the drive signal matrix and the probe response signal matrix.

[0021] In one embodiment of the present invention, the frequency domain data acquisition module includes: a sampling point number determination unit, configured to determine the number of sampling points corresponding to a preset period based on the highest frequency, the lowest frequency among the multiple driving frequencies of the multiple discrete sweep frequency signal data, and the sampling rate of the probe response signal data; a sampling phase determination unit, configured to determine multiple sampling phases corresponding to the multiple driving frequencies based on the number of sampling points, the sampling rate, and the multiple driving frequencies; and a frequency domain data determination unit, configured to determine the probe response frequency domain data based on the driving signal matrix, the probe response signal matrix, the multiple sampling phases, and the multiple driving frequencies.

[0022] In one embodiment of the present invention, the frequency domain data determination unit includes: a component determination subunit, configured to determine a plurality of first components and a plurality of second components of the probe response signal data based on the driving signal matrix, the probe response signal matrix, the duration of the plurality of discrete sweep signals, the plurality of sampling phases, and the plurality of driving frequencies; and an amplitude and phase determination subunit, configured to calculate a plurality of probe response amplitudes and a plurality of probe response phases of the probe response frequency domain data based on the plurality of first components, the plurality of second components, and the plurality of sampling phases.

[0023] In another aspect, an embodiment of the present invention proposes a probe response frequency domain data processing system, comprising: a data processing device; a signal generating device connected to the data processing device; a probe microscopy device connected to the signal generating device; and a signal acquisition device connected between the probe microscopy device and the data processing device; wherein, the data processing device is used to send discrete sweep frequency signal parameters to the signal generating device; the signal generating device is used to generate driving signal data according to the discrete sweep frequency signal parameters and send the driving signal data to the probe microscopy device and the data processing device, the driving signal data including multiple discrete sweep frequency signal data, the multiple driving frequencies of the multiple discrete sweep frequency signal data being different; the probe microscopy device is used to generate a probe response signal under the excitation of the multiple discrete sweep frequency signals; the signal acquisition device is used to acquire the probe response signal to obtain probe response signal data; the digital processing device is further used to acquire the driving signal data, acquire the probe response signal data generated by the probe microscopy device under the excitation of the driving signal data, and determine the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete sweep frequency signal data according to the driving signal data and the probe response signal data.

[0024] As can be seen from the above, the technical features of the present invention can have one or more of the following beneficial effects: The probe response frequency domain data processing method, apparatus, and system of this embodiment of a probe microscopy device applies a driving signal including multiple discrete sweep frequency signals to the probe microscopy device and collects the probe response signal data generated by the probe microscopy device under the excitation of the driving signal, enabling batch processing of the probe response frequency domain data. Furthermore, by employing matrix operations to determine the probe response frequency domain data of the probe microscopy device based on the driving signal data and the probe response signal data, only the probe response frequency domain data is retained while a large amount of original data is discarded, significantly accelerating the computation speed, improving the efficiency of high-throughput atomic force microscopy characterization technology, and reducing costs. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a flowchart illustrating a probe response frequency domain data processing method provided in the first embodiment of the present invention.

[0027] Figure 2 This is a flowchart illustrating another probe response frequency domain data processing method provided in the first embodiment of the present invention.

[0028] Figure 3 for Figure 1 The detailed flowchart of step S15 is shown in the figure.

[0029] Figure 4 for Figure 3 The detailed flowchart of step S153 shown in the figure is as follows.

[0030] Figure 5 This is a schematic diagram of the structure of a probe response frequency domain data processing system according to the first embodiment of the present invention.

[0031] Figure 6 for Figure 5 The diagram shows the waveform of the discrete sweep frequency signal generated by the signal generating device.

[0032] Figure 7 This is a schematic diagram of the probe response frequency domain data processing device according to the second embodiment of the present invention.

[0033] Figure 8 for Figure 7 The diagram shows the structure of the frequency domain data acquisition module.

[0034] Figure 9 for Figure 8 The diagram shows the structure of the frequency domain data determination unit.

[0035] Figure 10 This is a schematic diagram of the probe response frequency domain data processing system according to the third embodiment of the present invention.

[0036] Figure 11 This is a schematic diagram of the structure of a computer-readable storage medium according to the fourth embodiment of the present invention. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. The specific structural and functional details disclosed herein are merely representative and are intended to describe exemplary embodiments of the present invention. However, the present invention can be implemented in many alternative forms and should not be construed as being limited to the embodiments set forth herein. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0038] [First Embodiment]

[0039] like Figure 1 As shown, the first embodiment of the present invention provides a method for processing frequency domain data of probe response of a probe microscopy device, which includes, for example, the following steps:

[0040] S11: Acquire drive signal data;

[0041] S13: Acquire probe response signal data generated by the probe microscopy device under the excitation of the driving signal data;

[0042] S14: Represent the driving signal data and the probe response signal data at multiple frequencies in matrix form to obtain the driving signal matrix and the probe response signal matrix, respectively;

[0043] S15: Determine the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete sweep frequency signal data based on the driving signal matrix and the probe response signal matrix.

[0044] like Figure 2 As shown, the probe response frequency domain data processing method of this embodiment further includes, for example:

[0045] S10: Send discrete sweep frequency signal parameters to the signal generating device, so that the signal generating device can generate the driving signal data according to the discrete sweep frequency signal parameters and send the driving signal data to the probe microscopy device.

[0046] Furthermore, such as Figure 3 As shown, step S15 specifically includes, for example:

[0047] S151: Determine the number of sampling points corresponding to the preset period based on the highest frequency, lowest frequency among the multiple driving frequencies of the multiple discrete sweep frequency signal data, and the sampling rate of the probe response signal data.

[0048] S152: Determine multiple sampling phases corresponding to the multiple driving frequencies based on the number of sampling points, the sampling rate, and the multiple driving frequencies;

[0049] S153: Determine the probe response frequency domain data based on the driving signal matrix, the probe response signal matrix, the plurality of sampling phases, and the plurality of driving frequencies.

[0050] Furthermore, such as Figure 4 As shown, step S153 specifically includes, for example:

[0051] S153a: Based on the driving signal matrix, the probe response signal matrix, the duration of the plurality of discrete sweep frequency signal data, the plurality of sampling phases, and the plurality of driving frequencies, determine a plurality of first components and a plurality of second components of the probe response signal data;

[0052] S153b: Based on the plurality of first components, the plurality of second components, and the plurality of sampling phases, calculate the plurality of probe response amplitudes and the plurality of probe response phases of the probe response frequency domain data.

[0053] To facilitate a clearer understanding of the probe response frequency domain data processing method in this embodiment, the following will combine... Figure 5 and Figure 6 Provide detailed examples.

[0054] Specifically, the probe response frequency domain data processing method of this embodiment is mainly applied to the probe response frequency domain data processing system 40, which is executed, for example, by a data processing device 41 equipped with probe response frequency domain data processing software, and can process the probe response frequency domain data of the probe microscopy device 43. (Refer to...) Figure 5 As shown, the probe response frequency domain data processing system 40 includes, for example, a data processing device 41, a signal generating device 42, a probe microscopy device 43, and a signal acquisition device 44. The data processing device 41 is connected between the signal generating device 42 and the signal acquisition device 44, the probe microscopy device 43 is connected to the signal generating device 42, and the signal acquisition device 44 is connected to the probe microscopy device 43.

[0055] The implementation process of the probe response frequency domain data processing method provided in the embodiments of the present invention will be described in detail below.

[0056] First, the data processing device 41, for example, responds to a user operation by sending discrete frequency sweep signal parameters to the signal generating device 42. The data processing device 41 is, for example, a host computer, such as a PC, or other electronic device with data processing capabilities. The discrete frequency sweep signal parameters include, for example, the minimum frequency, maximum frequency, voltage magnitude, and duration of each frequency. The data processing device 41 can acquire user-defined settings for the drive signal parameters and output this parameter data used to generate the discrete frequency sweep signal to the signal generating device 42 via a communication interface, such as a USB port.

[0057] Furthermore, the signal generating device 42 is connected to the data processing device 42 via a communication interface, such as a USB port. The signal generating device 42 is, for example, a signal generator, such as an electronic device that can provide signals of various frequencies, waveforms, and levels. It can generate corresponding drive signals based on the discrete sweep frequency signal parameters and use them as a drive signal source or excitation source. After receiving the discrete sweep frequency signal parameters transmitted by the data processing device 42, the signal generating device 42 generates drive signal data based on the discrete sweep frequency signal parameters and sends the drive signal data to the probe microscopy device 43. Specifically, the drive signal data includes multiple discrete sweep frequency signal data, and the multiple drive frequencies of the multiple discrete sweep frequency signal data are different. Figure 6 As shown, multiple discrete frequency sweep signals are composed, for example, of sine wave signals with different frequencies sequentially spliced ​​together. Each of the multiple discrete frequency sweep signals has the same duration. The signal generating device 42 is connected to the probe microscope device 43, for example, via a BNC (Bayonet Nut Connector) interface, and outputs the drive signal data to the probe microscope device 43 through the BNC interface.

[0058] Subsequently, under the excitation of the plurality of discrete frequency sweep signals, the probe of the probe microscopy device 43 will respond, that is, it will emit a probe response signal. In this embodiment, the probe microscopy device 43 is, for example, a scanning probe microscope (SPM). The SPM is a surface analysis instrument that has been developed internationally in recent years. The microscopic imaging system of the SPM is used to measure, for example, electronic material samples within a microscope area and to image the surface morphology or measure surface characteristic information of the samples, and outputs the probe response signal through, for example, a BNC interface. An example of a scanning probe microscope is an atomic force microscope.

[0059] Furthermore, the signal acquisition device 44 is used to acquire the probe response signal to obtain probe response signal data. The signal acquisition device 44 is, for example, an analog-to-digital converter (A / D converter, abbreviated as ADC), which can convert the probe response signal (analog signal) generated on the probe of the probe microscopy device 43 into a digital signal. The signal acquisition device 44 can be a common signal acquisition device in the prior art, and its specific structure will not be described in detail here. After acquiring the probe response signal transmitted by the probe microscopy device 43, the signal acquisition device 44 performs A / D conversion processing on the probe response signal to obtain probe response signal data, and finally transmits the probe response signal data to the data processing device 41, for example, via a USB interface. It is worth mentioning that the drive signal data and the probe response signal data can be acquired and recorded at the same sampling rate.

[0060] Finally, the data processing device 41 acquires the driving signal data, acquires the probe response signal data generated by the probe microscopy device 43 under the excitation of the driving signal data from the signal acquisition device 44, and determines the probe response frequency domain of the probe microscopy device 43 under the excitation of the plurality of discrete sweep frequency signal data based on the driving signal data and the probe response signal data. It is worth mentioning that the data processing device 41 acquires the driving signal data, for example, by generating the driving signal data based on the discrete sweep frequency signal parameters. Of course, in other embodiments of the present invention, it can also be acquired from the signal generating device 42, that is, the signal generating device 42 can, for example, transmit the generated driving signal data to the data processing device 41 via a signal cable. This invention is not limited to this.

[0061] Optionally, in response to a user instruction, the data processing device 41 may simulate the drive signal data based on the discrete sweep frequency signal parameters and calculate the drive signal matrix. In other embodiments of this example, the signal generating device 42 may transmit the drive signal data to the data processing device 41, so that the data processing device 41 executes steps S11, S13, S14, S15, etc., based on the received data.

[0062] Specifically, the data processing device 41 represents the drive signal data and the probe response signal data in matrix form, obtaining the drive signal matrix and the probe response signal matrix respectively, which can be denoted, for example, as D. ij and R ij Assume both matrices are m rows and n columns, where each column corresponds to a driving frequency, and the j-th column corresponds to the driving frequency ω. jEach driving frequency lasts for a duration of Δt. Furthermore, after the data processing device 41 stores the driving signal data and the probe response signal data, the first and last few rows of the two matrices can be deleted, thereby eliminating the influence of the transient response generated by the probe microscopy device 43 when the driving frequency changes.

[0063] Subsequently, the data processing device 41 determines the number of sampling points corresponding to a preset period based on the highest and lowest frequencies among the multiple driving frequencies of the multiple discrete sweep frequency signal data, and the sampling rate of the probe response signal data. First, the data processing device 41 determines the average value of the lowest and highest frequencies, and calculates the number of sampling points corresponding to its preset period, for example, 1 / 4 period (i.e., the number of points included in a single data transmission to the PC). This number of sampling points is denoted as n. s As shown in formula (1):

[0064]

[0065] Wherein, the f s The sampling rate of signal acquisition device 44 is [ ], where [ ] is the rounding sign, ω1 is the lowest frequency among the plurality of driving frequencies, and ω n ω is the highest frequency among the plurality of driving frequencies. j It is the j-th driving frequency among the plurality of driving frequencies.

[0066] Next, the data processing device 41 determines multiple sampling phases corresponding to the multiple driving frequencies based on the number of sampling points, the sampling rate, and the multiple driving frequencies. The data processing device 41 calculates n at each driving frequency. s The sampling phase corresponding to each sampling point is denoted as θ j The multiple sampling phases θ j As shown in formula (2):

[0067]

[0068] Furthermore, the data processing device 41 determines multiple first components and multiple second components of the probe response signal data based on the driving signal matrix, the probe response signal matrix, the duration of the multiple discrete sweep frequency signal data, the multiple sampling phases, and the multiple driving frequencies. The first components and the second components are shown in formula (3):

[0069]

[0070]

[0071] Where, ω jLet be the j-th driving frequency among the plurality of driving frequencies, and Δt be the duration of the plurality of discrete sweep frequency signal data, D j and R j ω j The corresponding driving signal matrix and probe response signal matrix, θ j For the driving frequency ω j The phase corresponding to the number of downsampling points, A(ω) j The frequency domain data of the probe response at the driving frequency ω is... j The amplitude, φ(ω) j The frequency domain data of the probe response at the driving frequency ω is... j The phase below, X j and Y j The probe response signal data are respectively in ω j The first and second components at the frequency. Furthermore, the integral of the above formula (3) can be calculated using the trapezoidal rule, as shown in formula (4):

[0072]

[0073]

[0074] Finally, the data processing device 41 calculates multiple probe response amplitudes and multiple probe response phases of the probe response frequency domain data based on the multiple first components, the multiple second components, and the multiple sampling phases. The multiple probe response amplitudes and multiple probe response phases are respectively shown in formula (5):

[0075]

[0076]

[0077] Where, A(ω) j ) is the response at ω j Amplitude at frequency, φ(ω) j ) is the response at ω j Phase at frequency.

[0078] In summary, the embodiments of the present invention apply a driving signal comprising multiple discrete sweep frequency signals to a probe microscopy device and acquire probe response signal data generated by the probe microscopy device under the excitation of the driving signal, enabling batch processing of data at different frequencies in the probe response frequency domain data. Furthermore, by employing matrix operations to determine the probe response frequency domain data of the probe microscopy device based on the driving signal data and the probe response signal data, only the probe response frequency domain data is retained while discarding a large amount of original data, significantly accelerating the computation speed, improving the efficiency of high-throughput atomic force microscopy characterization technology, and reducing costs.

[0079] [Second Embodiment]

[0080] like Figure 7 As shown, the second embodiment of the present invention provides a probe response frequency domain data processing device 10, which includes, for example, a driving signal acquisition module 11, a response signal acquisition module 12, a frequency domain data acquisition module 13, and a matrix representation module 14.

[0081] The driving signal acquisition module 11 is used to acquire driving signal data, wherein the driving signal includes multiple discrete frequency sweep signal data, and the multiple driving frequencies of the multiple discrete frequency sweep signal data are different. The response signal acquisition module 12 is used to acquire probe response signal data generated by the probe microscopy device under the excitation of the driving signal data. The matrix representation module 14 is used to represent the driving signal data and the probe response signal data in matrix form, to obtain the driving signal matrix and the probe response signal matrix, respectively.

[0082] The frequency domain data acquisition module 13 is used to determine the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete frequency sweep signal data according to the driving signal matrix and the probe response signal matrix. Its specific functional details can be referred to the detailed description in the first embodiment above, and will not be repeated here.

[0083] The drive signal acquisition module 11, response signal acquisition module 12, frequency domain data acquisition module 13, and matrix representation module 14 can be software modules, stored in non-volatile memory, and executed by a processor to perform steps S11, S13, S14, and S15 in the first embodiment described above.

[0084] like Figure 8 As shown, in one specific embodiment, the frequency domain data acquisition module 13 of this embodiment further includes:

[0085] The sampling point number determination unit 131 is used to determine the number of sampling points corresponding to a preset period based on the highest frequency, the lowest frequency among the multiple driving frequencies of the multiple discrete sweep frequency signal data, and the sampling rate of the probe response signal data.

[0086] The sampling phase determination unit 132 is used to determine multiple sampling phases corresponding to the multiple driving frequencies based on the number of sampling points, the sampling rate, and the multiple driving frequencies.

[0087] The frequency domain data determination unit 133 is used to determine the probe response frequency domain data based on the driving signal data, the probe response signal data, the plurality of sampling phases, and the plurality of driving frequencies.

[0088] like Figure 9 As shown, in one specific embodiment, the frequency domain data determination unit 133 of this embodiment further includes:

[0089] The component determination subunit 133a is configured to determine multiple first components and multiple second components of the probe response signal data based on the driving signal matrix, the probe response signal matrix, the duration of the multiple discrete sweep signals, the multiple sampling phases, and the multiple driving frequencies; and

[0090] The amplitude and phase determination subunit 133b is used to calculate multiple probe response amplitudes and multiple probe response phases of the probe response frequency domain data based on the multiple first components, the multiple second components and the multiple sampling phases.

[0091] The specific functions and beneficial effects of the probe response frequency domain data processing device 10 in this embodiment of the invention can be referred to the description of the first embodiment above, and will not be repeated here.

[0092] [Third Embodiment]

[0093] like Figure 10 As shown, a probe response frequency domain data processing system 20 provided in the third embodiment of the present invention includes: a processor 21 and a memory 22 connected to the processor 21; wherein, the memory 22 stores instructions executed by the processor 21, and the instructions, for example, cause the processor 21 to perform an operation to perform the probe response frequency domain data processing method described in the first embodiment above.

[0094] The specific functions and beneficial effects of the probe response frequency domain data processing system 20 in this embodiment of the invention can be referred to the description of the first embodiment above, and will not be repeated here.

[0095] [Fourth Embodiment]

[0096] like Figure 11As shown, the fourth embodiment of the present invention provides a computer-readable storage medium 30, which is, for example, a non-volatile memory and stores program code. When the program code is executed by one or more processors, it causes the one or more processors to perform the probe response frequency domain data processing method described in the first embodiment above.

[0097] Furthermore, it is understood that the foregoing embodiments are merely illustrative examples of the present invention. Provided that there are no technical feature conflicts, structural contradictions, or deviations from the inventive purpose of the present invention, the technical solutions of the various embodiments can be arbitrarily combined and used.

[0098] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection between devices or units through some interfaces, and may be electrical, mechanical, or other forms.

[0099] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0100] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or in the form of hardware plus software functional units.

[0101] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for processing frequency domain data of probe response in a probe microscopy apparatus, characterized in that, include Acquire drive signal data, wherein the drive signal data includes multiple discrete sweep frequency signal data, and the multiple discrete sweep frequency signal data have multiple different frequencies; Acquire the probe response signal data generated by the probe microscopy device under the excitation of the driving signal data; The driving signal data and the probe response signal data at multiple frequencies are represented in matrix form to obtain the driving signal matrix and the probe response signal matrix, respectively. as well as The probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete swept frequency signal data are determined by performing matrix operations based on the driving signal matrix and the probe response signal matrix.

2. The probe response frequency domain data processing method according to claim 1, characterized in that, The step of determining the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete swept frequency signal data based on the driving signal matrix and the probe response signal matrix and performing matrix operations includes: The number of sampling points corresponding to the preset period is determined based on the highest and lowest frequencies among the multiple driving frequencies of the multiple discrete sweep frequency signal data, and the sampling rate of the probe response signal data. Multiple sampling phases corresponding to the multiple driving frequencies are determined based on the number of sampling points, the sampling rate, and the multiple driving frequencies. The probe response frequency domain data is determined based on the driving signal matrix, the probe response signal matrix, the plurality of sampling phases, and the plurality of driving frequencies.

3. The probe response frequency domain data processing method according to claim 2, characterized in that, The number of sampling points satisfy The multiple sampling phases satisfy: in, The sampling rate of the signal acquisition equipment For the integer operation, The lowest frequency among the plurality of driving frequencies. The highest frequency among the plurality of driving frequencies, and It is the j-th driving frequency among the plurality of driving frequencies.

4. The probe response frequency domain data processing method according to claim 2, characterized in that, The step of determining the probe response frequency domain data based on the driving signal matrix, the probe response signal matrix, the plurality of sampling phases, and the plurality of driving frequencies includes: Based on the driving signal matrix, the probe response signal matrix, the duration of the plurality of discrete sweep frequency signal data, the plurality of sampling phases, and the plurality of driving frequencies, a plurality of first components and a plurality of second components of the probe response signal data are determined. Based on the plurality of first components, the plurality of second components, and the plurality of sampling phases, the plurality of probe response amplitudes and the plurality of probe response phases of the probe response frequency domain data are calculated.

5. The probe response frequency domain data processing method according to claim 4, characterized in that, Also includes: The plurality of first components and the plurality of second components respectively satisfy: The amplitude and phase of the multiple probe responses respectively satisfy: in, Let j be the j-th driving frequency among the plurality of driving frequencies. The duration of the plurality of discrete frequency sweep signal data, and They are respectively The corresponding driving signal matrix and probe response signal matrix, For driving frequency The phase corresponding to the number of sampling points, The probe response frequency domain data at the driving frequency The amplitude below, The probe response frequency domain data at the driving frequency The lower phase, and The probe response signal data are respectively in The first and second components at the frequency.

6. The probe response frequency domain data processing method according to claim 1, characterized in that, Also includes: Discrete sweep frequency signal parameters are sent to a signal generating device, so that the signal generating device can generate the driving signal data according to the discrete sweep frequency signal parameters and send the driving signal data to the probe microscopy device.

7. A probe response frequency domain data processing device, characterized in that, include: A drive signal acquisition module is used to acquire drive signal data, wherein the drive signal data includes multiple discrete sweep frequency signal data, and the multiple drive frequencies of the multiple discrete sweep frequency signal data are different. The response signal acquisition module is used to acquire probe response signal data generated by the probe microscopy device under the excitation of the driving signal data; The matrix representation module is used to represent the driving signal data and the probe response signal data in matrix form, and to obtain the driving signal matrix and the probe response signal matrix, respectively. as well as The frequency domain data acquisition module is used to determine the probe response frequency domain data of the probe microscopy device under the excitation of the multiple discrete frequency sweep signal data based on the driving signal matrix and the probe response signal matrix.

8. The probe response frequency domain data processing device according to claim 7, characterized in that, The frequency domain data acquisition module includes: The sampling point number determination unit is used to determine the number of sampling points corresponding to a preset period based on the highest frequency, the lowest frequency among the multiple driving frequencies of the multiple discrete sweep frequency signal data, and the sampling rate of the probe response signal data. A sampling phase determination unit is used to determine multiple sampling phases corresponding to the multiple driving frequencies based on the number of sampling points, the sampling rate, and the multiple driving frequencies. A frequency domain data determination unit is used to determine the probe response frequency domain data based on the driving signal matrix, the probe response signal matrix, the plurality of sampling phases, and the plurality of driving frequencies.

9. The probe response frequency domain data processing device according to claim 8, characterized in that, The frequency domain data determination unit includes: The component determination subunit is used to determine multiple first components and multiple second components of the probe response signal data based on the driving signal matrix, the probe response signal matrix, the duration of the multiple discrete sweep signals, the multiple sampling phases, and the multiple driving frequencies. The amplitude and phase determination subunit is used to calculate multiple probe response amplitudes and multiple probe response phases of the probe response frequency domain data based on the multiple first components, the multiple second components, and the multiple sampling phases.

10. A probe response frequency domain data processing system, characterized in that, include: Data processing equipment; A signal generating device, connected to the data processing device; A probe microscope is connected to the signal generating device; A signal acquisition device is connected between the probe microscope and the data processing device; The data processing device is used to send discrete sweep frequency signal parameters to the signal generating device; The signal generating device is used to generate driving signal data according to the discrete sweep frequency signal parameters and send the driving signal data to the probe microscopy device and the data processing device. The driving signal data includes multiple discrete sweep frequency signal data, and the multiple driving frequencies of the multiple discrete sweep frequency signal data are different. The probe microscopy device is used to generate a probe response signal under the excitation of the plurality of discrete sweep frequency signals; The signal acquisition device is used to acquire the probe response signal to obtain probe response signal data; The data processing device is further configured to: acquire the driving signal data, acquire the probe response signal data generated by the probe microscopy device under the excitation of the driving signal data, characterize the driving signal data and the probe response signal data at multiple frequencies in matrix form, obtain the driving signal matrix and the probe response signal matrix respectively, and determine the probe response frequency domain data of the probe microscopy device under the excitation of multiple discrete frequency sweep signal data based on the driving signal matrix and the probe response signal matrix.

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