Electrode parts and pressure sensors

Abstract

The present invention provides an electrode component and a pressure sensor, which are used to form a capacitor with a moving film in the cavity of the pressure sensor. The electrode component includes an insulating body, the insulating body has a first surface and a second surface arranged opposite to each other, and the first surface and the second surface are respectively provided with conductive layers electrically connected to each other; the insulating body is formed with a notch structure on the first surface, and the orthographic projection of the notch structure on the first surface partially overlaps with the orthographic projection of the gasket on the first surface. This solution can avoid contact and friction between tweezers and the electrode component when the operator replaces the gasket, or reduce the shear stress generated during contact, thereby reducing or even avoiding the shedding of particles.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to an electrode component and a pressure sensor. Background Art

[0002] At present, the pressure sensor (such as a vacuum gauge) includes an upper support, a movable membrane and a lower support connected in sequence from top to bottom, a lower space is formed between the movable membrane and the lower support, and an upper space is formed between the movable mold and the upper support, wherein an electrode member is arranged in the upper space, and the electrode member is arranged opposite to the movable membrane to form a flat plate capacitor. In addition, a spring is arranged between the electrode member and the top cover, and the spring is in a compressed state, which is used to apply pressure to the electrode member to fix the electrode member. The above pressure needs to be greater than the pressure in the lower space, but it cannot be too large, otherwise it will cause the electrode member to crack due to excessive local normal stress or shear stress, resulting in product failure. In order to control the pressure, a gasket can be set between the spring and the electrode member, and the compression deformation degree of the spring can be adjusted by adjusting the thickness of the gasket, so that the pressure can be adjusted.

[0003] The above-mentioned process of adjusting the pressure is a process that requires repeated replacement of gaskets of different thicknesses. For example, a 1mm thick gasket can be placed first. After installing other components, if it is found that the pressure to fix the electrode part is too small after pressing the top cover down to the specified position, replace it with a 2mm thick gasket and try again. Repeat this process until a gasket of suitable thickness is found.

[0004] When replacing the gasket, the operator will use tweezers to pick up the gasket placed on the electrode part first. During the operation, since the gasket is relatively thin, it is inevitable that contact and friction will occur between the tweezers and the electrode part. Since the shear stress between the two is too large, tiny particles on the surface of both will fall off. These small particles will remain in the upper space and may enter between the moving membrane and the electrode part, causing the capacitance value to change, and then causing the output signal of the product to change. In severe cases, the two poles of the capacitor will be short-circuited, causing the product to fail. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes an electrode component and a pressure sensor, which can avoid contact and friction between tweezers and the electrode component when the operator replaces the gasket, or reduce the shear stress generated during contact, thereby reducing or even avoiding particle shedding.

[0006] To achieve the purpose of the present invention, an electrode member is provided, which is used in a cavity of a pressure sensor to form a capacitor with a moving membrane in the cavity, wherein the electrode member comprises an insulating body, wherein the insulating body has a first surface and a second surface arranged opposite to each other, wherein the first surface and the second surface are respectively provided with conductive layers electrically connected to each other;

[0007] A notch structure is formed on the first surface of the insulating body, and an orthographic projection of the notch structure on the first surface partially overlaps with an orthographic projection of the gasket on the first surface.

[0008] Optionally, the notch structure includes at least one recess, at least a portion of the projection of the outermost edge of the recess away from the center of the first surface on the first surface falls into the projection of the gasket on the first surface, and at least a portion of the projection of the innermost edge of the recess close to the center of the first surface on the first surface is located outside the inner peripheral edge of the projection of the gasket on the first surface.

[0009] Optionally, the recess comprises an annular recess, and the annular recess is arranged around the center of the first surface.

[0010] Optionally, the recess comprises a blind hole; or comprises a through groove with one end extending to the edge of the first surface.

[0011] Optionally, the opening size of the through groove in the circumferential direction of the first surface decreases from the top to the bottom of the through groove in the depth direction of the through groove.

[0012] Optionally, the depth of the through groove increases gradually from one end away from the edge of the first surface to the other end located at the edge of the first surface.

[0013] Optionally, the notch structure includes at least one notch surface formed at an edge of the first surface and recessed relative to the first surface in a direction away from the first surface.

[0014] Optionally, the notch surface includes at least one of a stepped surface, a sloped surface and a curved surface.

[0015] Optionally, the notch surface is an annular surface surrounding the first surface in a circumferential direction, and an inner diameter of the annular surface is larger than an inner diameter of the gasket and smaller than an outer diameter of the gasket.

[0016] Optionally, at least a portion of the orthographic projection of the innermost edge of the notch surface close to the center of the first surface on the first surface is located between the orthographic projections of the inner peripheral edge and the outer peripheral edge of the gasket on the first surface.

[0017] As another technical solution, the present invention further provides an electrode member, which is used in a cavity of a pressure sensor to form a capacitor with a moving membrane in the cavity, wherein the electrode member includes an insulating body, wherein the insulating body has a first surface and a second surface arranged opposite to each other, wherein the first surface and the second surface are respectively provided with conductive layers electrically connected to each other;

[0018] The insulating body has a notch structure formed on the first surface, the notch structure including at least one recess, an innermost edge of the recess close to the center of the first surface having a preset distance from the center of the first surface in the radial direction of the first surface, and the preset distance is set so that at least a portion of the innermost edge of the notch structure close to the center of the first surface can be exposed in the cavity.

[0019] Optionally, a ratio of the preset distance to the radius of the first surface is greater than or equal to 0.5 and less than or equal to 0.9; or

[0020] The preset distance is greater than or equal to 5 mm and less than or equal to 35 mm.

[0021] Optionally, the recess comprises an annular recess, and the annular recess is arranged around the center of the first surface.

[0022] Optionally, the recess comprises a blind hole; or comprises a through groove with one end extending to the edge of the first surface.

[0023] Optionally, the opening size of the through groove in the circumferential direction of the first surface decreases from the top to the bottom of the through groove in the depth direction of the through groove.

[0024] Optionally, the depth of the through groove increases gradually from one end away from the edge of the first surface to the other end located at the edge of the first surface.

[0025] As another technical solution, the present invention further provides an electrode member, which is used in a cavity of a pressure sensor to form a capacitor with a moving membrane in the cavity, wherein the electrode member includes an insulating body, wherein the insulating body has a first surface and a second surface arranged opposite to each other, wherein the first surface and the second surface are respectively provided with conductive layers electrically connected to each other;

[0026] The insulating body has a notch structure formed on the first surface. The notch structure includes at least one notch surface formed at an edge of the first surface and recessed relative to the first surface toward a direction away from the first surface.

[0027] Optionally, the notch surface includes at least one of a stepped surface, a sloped surface and a curved surface.

[0028] Optionally, the notch surface is an annular surface surrounding the first surface in a circumferential direction, and an inner diameter of the annular surface is larger than an inner diameter of the gasket and smaller than an outer diameter of the gasket.

[0029] Optionally, at least a portion of an orthographic projection of an innermost edge of the notch surface close to the center of the first surface on the first surface has a preset distance from the center of the first surface in the radial direction of the first surface.

[0030] Optionally, a ratio of the preset distance to the radius of the first surface is greater than or equal to 0.6 and less than or equal to 1; or

[0031] The preset distance is greater than or equal to 7 mm and less than or equal to 40 mm.

[0032] As another technical solution, the present invention further provides a pressure sensor, comprising a cavity, wherein an electrode member, a moving film and a gasket are arranged in the cavity, wherein the electrode member is supported by a supporting portion arranged in the cavity, and the electrode member and the moving film form a capacitor; the electrode member adopts the above-mentioned electrode member provided by the present invention;

[0033] The gasket is disposed on the first surface of the insulating body in the electrode member.

[0034] Optionally, an elastic member is further included, the elastic member is disposed between the gasket and the top wall of the cavity, and is used to press the insulating body against the supporting portion through the gasket; the elastic member includes a wave spring, the wave spring has n wave crests and n wave troughs, and n is an integer greater than 1;

[0035] The notch structure includes at least one recessed portion, and a maximum dimension of the recessed portion in a circumferential direction along the first surface is less than or equal to 1 / n of a circumference of a circle where the maximum dimension is located.

[0036] Optionally, an elastic member is further included, the elastic member is disposed between the gasket and the top wall of the cavity, and is used to press the insulating body against the supporting portion through the gasket; the elastic member includes a wave spring, the wave spring has n wave crests and n wave troughs, and n is an integer greater than 1;

[0037] The notch structure includes a notch surface formed at an edge of the first surface;

[0038] The maximum dimension of the notch surface in the circumferential direction along the first surface is less than or equal to 1 / n of the circumference of the circle where the maximum dimension is located.

[0039] Optionally, the cavity comprises an upper support, a lower support and a top cover, wherein the upper support and the lower support are respectively located on both sides of the upper surface and the lower surface of the dynamic membrane, and are both sealed and connected to the dynamic membrane;

[0040] A recessed portion is formed on the upper surface of the lower support, and a lower space is formed between the lower surface of the moving membrane and the recessed portion;

[0041] The top cover is located on one side of the upper surface of the upper support and is sealed and connected to the upper support, serving as the top wall of the cavity; an upper space is formed between the lower surface of the top cover, the upper surface of the moving membrane and the inner circumferential surface of the upper support; the insulating body is located in the upper space and is supported by the support portion arranged on the upper support.

[0042] The present invention has the following beneficial effects:

[0043] The present invention provides an electrode component, which has a notch structure formed on the insulating body of the electrode component on the first surface facing away from the moving membrane, and the orthographic projection of the notch structure on the first surface partially overlaps with the orthographic projection of a gasket on the first surface. This partial overlap means that on the one hand, a part of the notch structure is exposed in the cavity, while the other part is covered by the gasket. When replacing the gasket, the operator can extend tweezers into the part of the notch structure exposed in the cavity to pick up the gasket placed on the electrode component without generating contact and friction with the electrode component, or reducing the shear stress generated during contact, thereby reducing or even avoiding particle shedding. Alternatively, the above-mentioned partial overlap refers to, on the other hand, providing a gap between the notch structure and a portion of the washer below the washer, while the other portion of the washer contacts the first surface of the electrode member, so that the electrode member can still support the washer, and at the same time, by setting a gap between the notch structure and a portion of the washer, the operator can use tweezers to press the portion of the washer corresponding to the gap to lift the washer and then pick up the washer. This not only does not affect the stiffness of the electrode member, but also prevents any contact and friction between the tweezers and the electrode member, thereby avoiding particle shedding.

[0044] The present invention also provides an electrode component, which has a notch structure formed on the insulating body of the electrode component on the first surface facing away from the moving membrane, the notch structure including at least one recess, the innermost edge of the recess close to the center of the first surface having a preset distance from the center of the first surface in the radial direction of the first surface, the preset distance being set so that at least a portion of the innermost edge of the notch structure close to the center of the first surface can be exposed to the cavity, by exposing a portion of the notch structure to the cavity while the other portion is covered by the gasket, when replacing the gasket, the operator can extend tweezers into the portion of the notch structure exposed to the cavity and pick up the gasket placed on the electrode component without generating contact and friction with the electrode component, or reducing the shear stress generated during contact, thereby reducing or even avoiding particle shedding.

[0045] The present invention also provides an electrode component, wherein a notch structure is formed on the insulating body of the electrode component on the first surface facing away from the moving membrane, and the notch structure includes at least one notch surface formed at the edge of the first surface and recessed relative to the first surface in a direction away from the first surface. By making the notch surface recessed relative to the first surface in a direction away from the first surface, a gap can be provided between the notch structure and a part of the gasket below the gasket, while another part of the gasket contacts the first surface of the insulating body. In this way, the insulating body can still support the gasket. At the same time, by setting a gap between the notch structure and a part of the gasket, an operator can use tweezers to press the part of the gasket corresponding to the gap to lift the gasket and then pick up the gasket. This notch ...

[0046] The present invention also provides a pressure sensor, which, by adopting the above-mentioned electrode member provided by the present invention, can avoid contact and friction between tweezers and the electrode member when the operator replaces the gasket, or reduce the shear stress generated during contact, thereby reducing or even avoiding particle shedding. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 A cross-sectional view of a pressure sensor provided in accordance with a first embodiment of the present invention;

[0048] Figure 2 for Figure 1 The structural diagram of the electrode components;

[0049] Figure 3 A cross-sectional view of another pressure sensor provided in accordance with the first embodiment of the present invention;

[0050] Figure 4 A structural diagram of another electrode member provided in the first embodiment of the present invention;

[0051] Figure 5 A cross-sectional view of another pressure sensor provided in accordance with the first embodiment of the present invention;

[0052] Figure 6 for Figure 5 The structural diagram of the electrode components;

[0053] Figure 7 A cross-sectional view of a pressure sensor provided in accordance with a second embodiment of the present invention;

[0054] Figure 8 for Figure 7 The structural diagram of the electrode components;

[0055] Fig. 9 A cross-sectional view of another pressure sensor provided for the second embodiment of the present invention;

[0056] Fig.10 for Fig. 9 The structural diagram of the electrode components;

[0057] Fig.11 This is a structural diagram of the wave spring used in the present invention. DETAILED DESCRIPTION

[0058] In order to enable those skilled in the art to better understand the technical solution of the present invention, the electrode component and the pressure sensor provided by the present invention are described in detail below with reference to the accompanying drawings.

[0059] The electrode member provided in the embodiment of the present invention is used in the cavity of the pressure sensor to form a capacitor with the moving membrane in the cavity. In one embodiment of the present invention, please refer to Figure 1 The cavity 1 includes an upper support 11, a lower support 12 and a top cover 13, wherein the upper support 11 and the lower support 12 are respectively located on both sides of the upper surface and the lower surface of the moving membrane 2, and are both sealed and connected to the moving membrane 2, for example, by welding; the top cover 13 is sealed and connected to the upper support 11, for example, by welding. In addition, a recessed portion is formed on the upper surface of the lower support 12, and a lower space A1 is formed between the lower surface of the moving membrane 2 and the recessed portion; the top cover 13 is located on one side of the upper surface of the upper support 11, and is sealed and connected to the upper support 11, serving as the top wall of the cavity 1; the lower surface of the top cover 13, the upper surface of the moving membrane 2 and the inner peripheral surface of the upper support 11 form an upper space A2; the electrode member 3 is located in the upper space A2, and is supported by a support portion 111 provided on the upper support 11, and the support portion 111 is, for example, an annular boss formed on the inner peripheral wall of the upper support 11.

[0060] The pressure of the upper space A2 is known, which is called the reference chamber. It is usually in a high vacuum state, and its pressure value is set to Pr. The lower space A1 is connected to the measured space through a pipeline, which is called the test chamber, and its pressure value is set to Px. When Px increases, the dynamic membrane 2 will bulge upward due to the increase in the upward force. In this way, the capacitance C of the flat capacitor formed by the electrode member 3 and the dynamic membrane 2 and the distance d between the upper surface of the dynamic membrane 2 and the lower surface of the electrode member 3 have the following relationship:

[0061] C=εS / d

[0062] Where S is the area between the upper surface of the moving film 2 and the lower surface of the electrode member 3; ε is the dielectric constant of the material between the upper surface of the moving film 2 and the lower surface of the electrode member 3. When Px changes, the shape of the moving film 2 changes, the distance d changes accordingly, and the capacitance value C also changes accordingly. Specifically, Figure 2As shown, the electrode member 3 may include an insulating body having a first surface and a second surface arranged opposite to each other, wherein the first surface faces away from the moving film 2; the second surface faces the moving film 2, for example, the first surface and the second surface are respectively Figure 2 The upper and lower surfaces of the insulating body are provided with two conductive layers 32 electrically connected to each other on the first surface and the second surface respectively. The two conductive layers 32 are electrically connected in such a way that, for example, a through hole 34 is provided in the insulating body and passes through the insulating body in a vertical direction. A conductive connection layer 35 is provided in the through hole 34. The two conductive layers 32 are electrically connected to each other through the conductive connection layer 35. A flat plate capacitor is formed between the conductive layer 32 on the lower surface (i.e., the second surface) of the insulating body and the moving film 2. Figure 1 As shown, the conductive layer 32 on the upper surface (i.e., the first surface) of the insulating body extends to the outside through the lead pin or wire 4 through the top cover 13 and is connected to an external circuit board (not shown in the figure) to detect the change of the capacitance value C and then calculate the size of Px.

[0063] An elastic member 5 is provided between the electrode member 3 and the top cover 13. The elastic member 5 is in a compressed state and is used to apply pressure to the electrode member 3 to fix the electrode member 3. The above pressure needs to be greater than the pressure of the lower space A1 to ensure that the electrode member 3 can be fixed on the above support portion 111, but it cannot be too large, otherwise the electrode member 3 will be cracked due to excessive local normal stress or shear stress, resulting in product failure. In order to control the pressure, a gasket 6 can be provided between the elastic member 5 and the electrode member 3, and the compression deformation degree of the elastic member 5 can be adjusted by adjusting the thickness of the gasket 6, so that the pressure can be adjusted. Optionally, an upper ring 7 is also provided between the gasket 6 and the elastic member 5 to support the elastic member 5 to improve the connection stability. The above elastic member 5 is, for example, a wave spring (i.e., a wave spring).

[0064] First embodiment

[0065] The electrode component 3 provided in the embodiment of the present invention has an insulating body with a notch structure formed on the first surface 31 facing away from the moving membrane 2 , and the orthographic projection of the notch structure on the first surface 31 partially overlaps with the orthographic projection of the gasket 6 on the first surface 31 .

[0066] In this embodiment, the above-mentioned partial overlap means that a part of the notch structure is exposed in the cavity 1, while the other part is covered by the gasket 6. In this way, when the operator replaces the gasket 6, he can extend the tweezers into the part of the notch structure exposed in the cavity 1 to pick up the gasket 6 placed on the electrode member 3 without generating contact and friction with the electrode member 3, or reducing the shear stress generated during contact, thereby reducing or even avoiding the falling of particles.

[0067] In one embodiment of the present invention, the above-mentioned notch structure includes at least one recess, such as Figure 1 A concave portion is shown, at least a portion of the orthographic projection of the outermost edge of the concave portion away from the center of the first surface 31 on the first surface 31 falls into the orthographic projection of the gasket 6 on the first surface 31, and at least a portion of the orthographic projection of the innermost edge of the concave portion close to the center of the first surface 31 on the first surface 31 is located outside the inner peripheral edge of the orthographic projection of the gasket 6 on the first surface 31. In this way, at least a portion of the outer portion of the concave portion away from the center of the first surface 31 is covered by the gasket 6, while at least a portion of the inner portion close to the center of the first surface 31 is exposed in the cavity 1, that is, not covered by the gasket 6. In this way, when replacing the gasket 6, the operator can extend the tweezers into the above-mentioned inner portion of the concave portion to pick up the gasket 6 placed on the electrode member 3 without contacting and rubbing with the electrode member 3, or reducing the shear stress generated during contact, thereby reducing or even avoiding the falling of particles.

[0068] The above-mentioned recess can have various structures, for example, Figure 2 As shown, the recessed portion of the notch structure includes a blind hole 33, and a distance is left between the outermost edge of the blind hole 33 away from the center of the first surface 31 and the edge of the first surface 31. In addition, the outer portion of the blind hole 33 away from the center of the first surface 31 is covered by the gasket 6, while the inner portion close to the center of the first surface 31 is exposed in the cavity 1, that is, not covered by the gasket 6. When replacing the gasket 6, the operator can extend the tweezers into the inner portion of the blind hole 33 to pick up the gasket 6 placed on the electrode member 3. The opening of the blind hole 33 is relative to Figure 3 The opening of the annular recess 331 (described in detail below) shown is relatively small, which helps to avoid the electrode member 3 from having too low a rigidity, thereby preventing the electrode member 3 from breaking due to too low a rigidity when the pressure in the upper space A2 is too high. Moreover, the blind hole 33 is processed in a simple manner, thereby reducing the processing cost. In practical applications, the depth and opening area of ​​the blind hole 33 should not be too small, otherwise the operator may easily contact the electrode member 3 when replacing the gasket 6; the depth and opening area of ​​the blind hole 33 should not be too large, otherwise the rigidity of the electrode member 3 may be reduced.

[0069] For example, Figure 3 As shown, the above-mentioned recess includes an annular recess 331, which is arranged around the center of the first surface 31. In this way, at least part of the outer portion of the annular recess 331 away from the center of the first surface 31 is covered by the gasket 6, and the outer portion can play a supporting role for the gasket 6 to prevent the gasket 6 from being suspended in the air, while at least part of the inner portion of the annular recess 331 close to the center of the first surface 31 is exposed in the cavity 1, that is, not covered by the gasket 6.

[0070] Or, if Figure 4As shown, the recess may further include a through groove 332 whose one end extends to the edge of the first surface 31, that is, the outermost edge of the through groove 332 away from the center of the first surface 31 is located at the edge of the first surface 31. The outer portion of the through groove 332 away from the center of the first surface 31 is covered by the gasket 6, while the inner portion close to the center of the first surface 31 is exposed in the cavity 1, that is, not covered by the gasket 6. When replacing the gasket 6, the operator can extend the tweezers into the inner portion of the through groove 332 to pick up the gasket 6 placed on the electrode member 3. Since one end of the through groove 332 extends to the edge of the first surface 31, the through groove 332 has no outer side wall. When the operator extends the tweezers into the through groove 332, it can avoid contacting the electrode member 3 due to the tweezers extending too long. The opening of the through groove 332 is smaller than the opening of the annular recess 331, which is conducive to avoiding the low rigidity of the electrode member 3, thereby avoiding the electrode member 3 from being broken due to the low rigidity when the pressure in the upper space A2 is too high. Moreover, the processing method of the through groove 332 is simple, so the processing cost can be reduced. In practical applications, the depth and opening area of ​​the through groove 332 should not be too small, otherwise the operator is easy to contact the electrode member 3 when replacing the gasket 6; the depth and opening area of ​​the through groove 332 should not be too large, otherwise the rigidity of the electrode member 3 may be reduced.

[0071] In one embodiment of the present invention, the opening size of the through groove 332 in the circumferential direction of the first surface 31 decreases from the top to the bottom in the depth direction of the through groove 332. In this way, the cross-sectional shape of the through groove 332 perpendicular to its extension direction is similar to a "V" shape, which is similar to the outer surface contour shape of the tweezers used to pick up the gasket 6. In this way, even if the tweezers touch the inner surface of the through groove 332, due to the similar shape, the contact area between the tweezers and the through groove 332 is large, and the shear stress between the contact surfaces of the two is small, thereby reducing the shedding of tiny particles caused by excessive shear stress.

[0072] In one embodiment of the present invention, the depth of the through groove 332 increases from one end of the edge away from the first surface 31 to the other end of the edge located at the first surface 31. Since the operator generally extends into the through groove 332 from one end of the edge of the through groove 332 away from the first surface 31 to the other end, in this case, by increasing the depth of the through groove 332 from one end of the edge away from the first surface 31 to the other end of the edge located at the first surface 31, the space of the outer part of the through groove 332 can be increased to avoid the tweezers from contacting the inner surface of the through groove 332 due to excessive extension. Even if the tweezers contact the inner surface of the through groove 332, since the bottom surface of the through groove 332 is inclined, the contact area between the tweezers and the through groove 332 is large, and the shear stress between the contact surfaces is small, thereby reducing the shedding of tiny particles caused by excessive shear stress. Specifically, the bottom surface of the through groove 332 can be a slope (plane) or an inclined arc-shaped convex surface. It should be noted that in this embodiment, if Figure 4 As shown, the opening size of the through groove 332 in the circumferential direction of the first surface 31 can decrease from the top to the bottom of the through groove 332 in the depth direction of the through groove 332, and the depth of the through groove 332 increases from one end away from the edge of the first surface 31 to the other end located at the edge of the first surface 31.

[0073] However, the present invention is not limited to this. In practical applications, Figure 5 and Figure 6 As shown, the recess may include a through groove 333 whose one end extends to the edge of the first surface 31, and the opening size of the through groove 333 in the circumferential direction of the first surface 31 is the same everywhere in the depth direction of the through groove 333, and the depth of the through groove 333 increases from one end away from the edge of the first surface 31 to the other end located at the edge of the first surface 31. Alternatively, the depth of the through groove 333 may also be the same everywhere from one end away from the edge of the first surface 31 to the other end located at the edge of the first surface 31.

[0074] Second embodiment

[0075] Compared with the first embodiment, the electrode member 3 provided in the embodiment of the present invention also has a notch structure formed on the first surface 31 of the insulating body facing away from the moving membrane 2, and the orthographic projection of the notch structure on the first surface 31 partially overlaps with the orthographic projection of the gasket 6 on the first surface 31. The only difference between this embodiment and the first embodiment is that Figure 7 and Figure 8 As shown, the notch structure includes at least one notch surface 334 formed at an edge of the first surface 31 and recessed relative to the first surface 31 toward a direction away from the first surface 31 .

[0076] In this case, the partial overlap means that there is a gap between the notch structure and a part of the washer 6 below the washer 6, while the other part of the washer 6 is in contact with the first surface 31 of the insulating body, so that the insulating body can still support the washer 6. At the same time, by setting a gap between the notch structure and the washer 6, the operator can use tweezers to press the part of the washer 6 corresponding to the gap to lift the washer 6 and then pick up the washer 6. This not only has less effect on the rigidity of the electrode member 3, but also does not generate any contact and friction between the tweezers and the electrode member 3, thereby avoiding particle shedding.

[0077] In one embodiment of the present invention, the notch surface 334 includes at least one of a stepped surface, an inclined surface, and a curved surface, for example Figure 8 The notch surface 334 shown in FIG. 3 is an inclined surface (plane), and the distance between the inclined surface and the first surface 31 in the vertical direction is larger the farther away from the center of the first surface 31. In this way, it can be ensured that the gasket 6 will not be deformed due to excessive warping.

[0078] Further optional, such as Figure 7 As shown, at least a part of the orthographic projection of the innermost edge of the notch surface 334 close to the center of the first surface 31 on the first surface 31 is located between the orthographic projection of the inner peripheral edge and the outer peripheral edge of the gasket 6 on the first surface 31. In this way, the orthographic projection of the notch surface 334 on the first surface 31 can be overlapped with the orthographic projection of the gasket 6 on the first surface 31, that is, the notch surface 334 is only opposite to a part of the gasket 6 (a part of the outer ring part), and the other part of the gasket 6 (including the inner ring part) is superimposed on the first surface 31, so that the gasket 6 can be supported to prevent the gasket 6 from being suspended in the air. At the same time, there is a gap between the notch surface 334 and a part of the outer ring part of the gasket 6, so that the operator can use tweezers to press the part of the gasket 6 corresponding to the gap (that is, a part of the outer ring part) to lift the gasket 6 and then pick up the gasket 6, so that the tweezers will not contact and rub with the electrode member 3, thereby preventing particles from falling off.

[0079] In another embodiment of the present invention, Fig. 9 and Fig.10As shown, the notch structure includes at least one notch surface 335 formed at the edge of the first surface 31 and recessed relative to the first surface 31 in a direction away from the first surface 31. The notch surface 335 is, for example, an annular surface surrounding the circumference of the first surface 31, and the inner diameter of the annular surface is larger than the inner diameter of the gasket 6 and smaller than the outer diameter of the gasket 6. In this way, the inner peripheral edge of the annular surface is located between the inner peripheral edge and the outer peripheral edge of the gasket 6, so that the orthographic projection of the annular surface on the first surface 31 can overlap with the orthographic projection of the gasket 6 on the first surface 31, that is, the annular surface is only opposite to the outer ring part of the gasket 6, and the inner ring part of the gasket 6 is superimposed on the first surface 31, so that it can play a supporting role for the gasket 6 and prevent the gasket 6 from being suspended in the air. At the same time, there is a gap between the annular surface and the outer ring part of the gasket 6, so that the operator can use tweezers to press the part of the gasket 6 corresponding to the gap (that is, the outer ring part) to lift the gasket 6 and then pick up the gasket 6. In this way, the tweezers will not contact and rub against the electrode member 3, thereby avoiding causing particles to fall off.

[0080] Optionally, the annular surface includes at least one of a stepped surface, an inclined surface and a curved surface, for example Fig.10 The annular surface shown in FIG. 1 is an inclined surface (plane), and the distance between the inclined surface and the first surface 31 in the vertical direction increases the farther away from the center of the first surface 31. In this way, it can be ensured that the gasket 6 will not be deformed due to excessive warping.

[0081] As another technical solution, see Figure 1 and Figure 2 The embodiment of the present invention further provides an electrode member 3, which is used to form a capacitor with the moving membrane 2 in the cavity 1 of the pressure sensor. The electrode member 3 includes an insulating body, which has a first surface and a second surface arranged opposite to each other, and the first surface and the second surface are respectively provided with conductive layers electrically connected to each other; for example, the first surface and the second surface are respectively Figure 2 The upper surface and the lower surface of the insulating body are provided with two conductive layers 32 electrically connected to each other on the first surface and the second surface respectively. Since the two conductive layers 32 have been described in detail in the above embodiment, they will not be described again here.

[0082] Moreover, the above-mentioned insulating body is formed with a notch structure on the first surface 31 facing away from the dynamic membrane 2, and the notch structure includes at least one recess, and the innermost edge of the recess close to the center of the first surface 31 has a preset distance D1 with the center of the first surface 31 in the radial direction of the first surface 31, and the preset distance D1 is set to enable at least a portion of the innermost edge of the recess close to the center of the first surface 31 to be exposed in the cavity 1.

[0083] By allowing at least a portion of the innermost edge of the recess close to the center of the first surface 31 to be exposed in the cavity 1, after the gasket 6 is installed, the above-mentioned preset distance of the recess can allow a portion of it to be exposed in the cavity 1, while the other portion is covered by the gasket 6. When replacing the gasket 6, the operator can extend tweezers into the portion of the recess exposed in the cavity 1 to pick up the gasket 6 placed on the electrode member 3 without generating contact and friction with the electrode member 3, or reducing the shear stress generated during contact, thereby reducing or even avoiding particle shedding.

[0084] In one embodiment of the present invention, the ratio of the preset distance D1 to the radius of the first surface 31 is greater than or equal to 0.5 and less than or equal to 0.9. By setting the ratio within this numerical range, the preset distance D1 of the recess on the electrode member 3 with various different radii can enable at least a portion of the innermost edge of the notch structure close to the center of the first surface 31 to be exposed in the cavity 1. Optionally, the preset distance is greater than or equal to 5 mm and less than or equal to 35 mm.

[0085] In one embodiment of the present invention, the above-mentioned recessed portion includes, for example, Figure 2 The same structure as the blind hole 33 shown; or Figure 3 The same structure as the annular recess 331 shown; or Figure 4 The same structures as the through slot 332 or the through slot 333 are not described in detail here because these structures have been described in detail in the previous text.

[0086] As another technical solution, please also refer to Figure 7 and Figure 8 The embodiment of the present invention further provides an electrode member 3, which is used to form a capacitor with the moving membrane 2 in the cavity 1 of the pressure sensor. The electrode member 3 includes an insulating body, which has a first surface and a second surface arranged opposite to each other, and the first surface and the second surface are respectively provided with conductive layers electrically connected to each other; for example, the first surface and the second surface are respectively Figure 2 The upper surface and the lower surface of the insulating body are provided with two conductive layers 32 electrically connected to each other on the first surface and the second surface respectively. Since the two conductive layers 32 have been described in detail in the above embodiment, they will not be described again here.

[0087] Moreover, the insulating body has a notch structure formed on the first surface 31 away from the moving membrane 2 , and the notch structure includes at least one notch surface 334 formed at the edge of the first surface 31 and recessed relative to the first surface 31 in a direction away from the first surface 31 .

[0088] The notch surface 334 has a gap below the gasket 6 and a portion of the gasket 6, while the other portion of the gasket 6 contacts the first surface 31 of the insulating body, so that the insulating body can still support the gasket 6. At the same time, by setting a gap between the notch surface 334 and the gasket 6, the operator can use tweezers to press the portion of the gasket 6 corresponding to the gap to lift the gasket 6 and then pick up the gasket 6. This not only has less impact on the rigidity of the electrode member 3, but also does not generate any contact and friction between the tweezers and the electrode member 3, thereby avoiding particle shedding.

[0089] In one embodiment of the present invention, the notch surface 334 includes at least one of a stepped surface, an inclined surface, and a curved surface, for example Figure 8 It is shown that the notch surface 3 is an inclined surface (plane), and the distance between the inclined surface and the first surface 31 in the vertical direction increases the farther away from the center of the first surface 31. In this way, it can be ensured that the gasket 6 will not be deformed due to excessive warping.

[0090] Further optionally, at least a portion of the orthographic projection of the innermost edge of the notch surface 334 close to the center of the first surface 31 on the first surface 31 has a preset distance D2 from the center of the first surface 31 in the radial direction of the first surface 31. The preset distance D2 satisfies: there is a gap between the notch surface below the gasket 6 and a portion of the gasket 6, while the other portion of the gasket 6 is in contact with the first surface 31 of the insulating body, so that the insulating body can still support the gasket 6, and at the same time, by setting a gap between the notch surface and the gasket 6, the operator can use tweezers to press the portion of the gasket 6 corresponding to the gap, so as to lift the gasket 6 and then pick up the gasket 6, which not only has a small effect on the rigidity of the electrode member 3, but also does not generate any contact and friction between the tweezers and the electrode member 3, thereby avoiding the falling of particles.

[0091] In one embodiment of the present invention, the ratio of the preset distance D2 to the radius of the first surface 31 is greater than or equal to 0.6 and less than or equal to 1. By setting the ratio within this numerical range, the notch surface on the electrode member 3 with various different radii can have a gap between the gasket 6 and a part of the gasket 6, while the other part of the gasket 6 is in contact with the first surface 31 of the insulating body. Optionally, the preset distance D2 is greater than or equal to 7 mm and less than or equal to 40 mm.

[0092] Further optional, such as Figure 7 and Figure 8As shown, at least a part of the orthographic projection of the innermost edge of the notch surface 334 close to the center of the first surface 31 on the first surface 31 is located between the orthographic projection of the inner peripheral edge and the outer peripheral edge of the gasket 6 on the first surface 31. In this way, the orthographic projection of the notch surface 334 on the first surface 31 can be overlapped with the orthographic projection of the gasket 6 on the first surface 31, that is, the notch surface 334 is only opposite to a part of the gasket 6 (a part of the outer ring part), and the other part of the gasket 6 (including the inner ring part) is superimposed on the first surface 31, so that the gasket 6 can be supported to prevent the gasket 6 from being suspended in the air. At the same time, there is a gap between the notch surface 334 and a part of the outer ring part of the gasket 6, so that the operator can use tweezers to press the part of the gasket 6 corresponding to the gap (that is, a part of the outer ring part) to lift the gasket 6 and then pick up the gasket 6, so that the tweezers will not contact and rub with the electrode member 3, thereby preventing particles from falling off.

[0093] In another embodiment of the present invention, Fig. 9 and Fig.10 As shown, the notch structure includes a notch surface 335 formed at the edge of the first surface 31 and recessed relative to the first surface 31 in a direction away from the first surface 31. The notch surface 335 is, for example, an annular surface surrounding the circumference of the first surface 31, and the inner diameter of the annular surface is larger than the inner diameter of the gasket 6 and smaller than the outer diameter of the gasket 6. In this way, the inner peripheral edge of the annular surface is located between the inner peripheral edge and the outer peripheral edge of the gasket 6, so that the orthographic projection of the annular surface on the first surface 31 can overlap with the orthographic projection of the gasket 6 on the first surface 31, that is, the annular surface is only opposite to the outer ring part of the gasket 6, and the inner ring part of the gasket 6 is superimposed on the first surface 31, so that it can play a supporting role for the gasket 6 and prevent the gasket 6 from being suspended in the air. At the same time, there is a gap between the annular surface and the outer ring part of the gasket 6, so that the operator can use tweezers to press the part of the gasket 6 corresponding to the gap (that is, the outer ring part) to lift the gasket 6 and then pick up the gasket 6. In this way, the tweezers will not contact and rub against the electrode member 3, thereby avoiding causing particles to fall off.

[0094] Optionally, the annular surface includes at least one of a stepped surface, an inclined surface and a curved surface, for example Figure 8 The annular surface is shown to be an inclined surface (plane), and the distance between the inclined surface and the first surface 31 in the vertical direction increases as it is farther away from the center of the first surface 31. In this way, it can be ensured that the gasket 6 will not be deformed due to excessive warping.

[0095] As another technical solution, an embodiment of the present invention further provides a pressure sensor. Figure 1Taking the pressure sensor shown as an example, it includes a cavity 1, in which an electrode component 3, a moving membrane 2 and a gasket 6 are arranged, wherein the electrode component 3 is supported by a supporting portion 111 arranged in the cavity 1, and the electrode component 3 and the moving membrane 2 form a capacitor; the gasket 6 is arranged on a first surface 31 of the insulating body in the electrode component 3 that is away from the moving membrane 2; the electrode component 3 adopts the electrode component 3 provided by the above-mentioned embodiments of the present invention.

[0096] In one embodiment of the present invention, the above-mentioned cavity 1 includes an upper support 11, a lower support 12 and a top cover 13, wherein the upper support 11 and the lower support 12 are respectively located on both sides of the upper surface and the lower surface of the movable membrane 2, and are both sealed and connected to the movable membrane 2; for example, by welding; a recess is formed on the upper surface of the lower support 12, and a lower space A1 is formed between the lower surface of the movable membrane 2 and the recess; the top cover 13 is located on one side of the upper surface of the upper support 11, and is sealed and connected to the upper support 11, and serves as the top wall of the cavity 1, and the sealing connection between the top cover 13 and the upper support 11 is, for example, by welding; an upper space A2 is formed between the lower surface of the top cover 13, the upper surface of the movable membrane 2 and the inner circumferential surface of the upper support 11; the electrode member 3 is located in the upper space A2, and is supported by a support portion 111 arranged on the upper support 11, and the support portion 111 is, for example, an annular boss formed on the inner circumferential wall of the upper support 11.

[0097] In one embodiment of the present invention, Fig.11 As shown, the pressure sensor further includes an elastic member 5, which is disposed between the gasket 6 and the top wall of the cavity 1, and is used to press the electrode member 3 against the support portion 111 through the gasket 6; the elastic member 5 includes, for example, a wave spring (wave spring), which has n wave crests 51 and n wave troughs 52, where n is an integer greater than 1, for example Fig.11 Where n=3. When the above-mentioned notch structure includes at least one recess (such as a blind hole 33 or a through groove 332), the maximum dimension of the recess along the circumferential direction of the first surface 31 is less than or equal to 1 / n of the circumference of the circle where the maximum dimension is located. In this way, the maximum dimension of the recess along the circumferential direction of the first surface 31 will not be too large to cause the pressure point of the wave spring to be suspended, thereby causing uneven force on the electrode member 3.

[0098] In the case where the above-mentioned notch structure includes at least one notch surface 334 formed at the edge of the first surface 31 and recessed relative to the first surface 31 in a direction away from the first surface 31, the maximum dimension of the notch surface 334 in the circumferential direction of the first surface 31 is less than or equal to 1 / n of the circumference of the circle where the maximum dimension is located. In this way, the maximum dimension of the notch surface 334 in the circumferential direction of the first surface 31 will not be too large to cause the pressure point of the wave spring to be suspended, thereby causing uneven force on the electrode member 3.

[0099] An embodiment of the present invention also provides a pressure sensor, which, by adopting the above-mentioned electrode component 3 provided by the present invention, can avoid contact and friction between the tweezers and the electrode component 3 when the operator replaces the gasket 6, or reduce the shear stress generated during contact, thereby reducing or even avoiding particle shedding.

[0100] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An electrode member, used in a cavity of a pressure sensor to form a capacitor with a moving membrane in the cavity, characterized in that: The electrode member comprises an insulating body, the insulating body having a first surface and a second surface arranged opposite to each other, the first surface and the second surface are respectively provided with conductive layers electrically connected to each other; A notch structure is formed on the first surface of the insulating body, and an orthographic projection of the notch structure on the first surface partially overlaps with an orthographic projection of the gasket on the first surface.

2. The electrode member according to claim 1, characterized in that: The notch structure includes at least one recess, at least a portion of the orthographic projection of the outermost edge of the recess away from the center of the first surface on the first surface falls into the orthographic projection of the gasket on the first surface, and at least a portion of the orthographic projection of the innermost edge of the recess close to the center of the first surface on the first surface is located outside the inner peripheral edge of the orthographic projection of the gasket on the first surface.

3. The electrode member according to claim 2, characterized in that: The recess includes an annular recess that is circumferentially disposed around a center of the first surface.

4. The electrode member according to claim 2, characterized in that: The recessed portion may include a blind hole; or a through groove with one end extending to the edge of the first surface.

5. The electrode member according to claim 4, characterized in that: An opening size of the through groove in the circumferential direction of the first surface decreases from the top to the bottom of the through groove in the depth direction of the through groove.

6. The electrode member according to claim 4 or 5, characterized in that: The depth of the through groove increases gradually from one end away from the edge of the first surface to the other end located at the edge of the first surface.

7. The electrode member according to claim 1, characterized in that: The notch structure includes at least one notch surface formed at an edge of the first surface and recessed relative to the first surface in a direction away from the first surface.

8. The electrode member according to claim 7, characterized in that: The notch surface includes at least one of a stepped surface, an inclined surface and a curved surface.

9. The electrode member according to claim 7 or 8, characterized in that: The notch surface is an annular surface surrounding the first surface in a circumferential direction, and the inner diameter of the annular surface is larger than the inner diameter of the gasket and smaller than the outer diameter of the gasket.

10. The electrode member according to claim 7 or 8, characterized in that: At least a portion of an orthographic projection of an innermost edge of the notch surface close to the center of the first surface on the first surface is located between orthographic projections of an inner peripheral edge and an outer peripheral edge of the gasket on the first surface.

11. An electrode member, used in a cavity of a pressure sensor to form a capacitor with a moving membrane in the cavity, characterized in that: The electrode member comprises an insulating body, the insulating body having a first surface and a second surface arranged opposite to each other, the first surface and the second surface are respectively provided with conductive layers electrically connected to each other; The insulating body has a notch structure formed on the first surface, the notch structure including at least one recess, an innermost edge of the recess close to the center of the first surface having a preset distance from the center of the first surface in the radial direction of the first surface, and the preset distance is set so that at least a portion of the innermost edge of the notch structure close to the center of the first surface can be exposed in the cavity.

12. The electrode member according to claim 11, characterized in that: The ratio of the preset distance to the radius of the first surface is greater than or equal to 0.5 and less than or equal to 0.9; or The preset distance is greater than or equal to 5 mm and less than or equal to 35 mm.

13. The electrode member according to claim 11, characterized in that: The recess includes an annular recess that is circumferentially disposed around a center of the first surface.

14. The electrode member according to claim 11, characterized in that: The recessed portion may include a blind hole; or a through groove with one end extending to the edge of the first surface.

15. The electrode member according to claim 14, characterized in that: An opening size of the through groove in the circumferential direction of the first surface decreases from the top to the bottom of the through groove in the depth direction of the through groove.

16. The electrode member according to claim 14 or 15, characterized in that: The depth of the through groove increases gradually from one end away from the edge of the first surface to the other end located at the edge of the first surface.

17. An electrode member, used in a cavity of a pressure sensor to form a capacitor with a moving membrane in the cavity, characterized in that: The electrode member comprises an insulating body, the insulating body having a first surface and a second surface arranged opposite to each other, the first surface and the second surface are respectively provided with conductive layers electrically connected to each other; The insulating body has a notch structure formed on the first surface. The notch structure includes at least one notch surface formed at an edge of the first surface and recessed relative to the first surface toward a direction away from the first surface.

18. The electrode member according to claim 17, characterized in that: The notch surface includes at least one of a stepped surface, an inclined surface and a curved surface.

19. The electrode member according to claim 17 or 18, characterized in that: The notch surface is an annular surface surrounding the first surface in a circumferential direction, and the inner diameter of the annular surface is larger than the inner diameter of the gasket and smaller than the outer diameter of the gasket.

20. The electrode member according to claim 17 or 18, characterized in that: At least a portion of the orthographic projection of the innermost edge of the notch surface close to the center of the first surface on the first surface is at a preset distance from the center of the first surface in the radial direction of the first surface; The preset distance is set to enable a gap between the notch surface below the gasket and a portion of the gasket, and another portion of the gasket contacts the first surface of the insulating body.

21. The electrode member according to claim 20, characterized in that: The ratio of the preset distance to the radius of the first surface is greater than or equal to 0.6 and less than or equal to 1; or The preset distance is greater than or equal to 7 mm and less than or equal to 40 mm.

22. A pressure sensor, comprising a cavity, characterized in that: An electrode member, a moving film and a gasket are arranged in the cavity, wherein the electrode member is supported by a supporting portion arranged in the cavity, and the electrode member and the moving film form a capacitor; the electrode member is an electrode member according to any one of claims 1 to 10; or, an electrode member according to any one of claims 11 to 16; or, an electrode member according to any one of claims 17 to 21; The gasket is disposed on the first surface of the insulating body in the electrode member.

23. The pressure sensor according to claim 22, characterized in that It also includes an elastic member, which is disposed between the gasket and the top wall of the cavity, and is used to press the insulating body against the support portion through the gasket; the elastic member includes a wave spring, and the wave spring has n wave crests and n wave troughs, where n is an integer greater than 1; The notch structure includes at least one recessed portion, and a maximum dimension of the recessed portion in a circumferential direction along the first surface is less than or equal to 1 / n of a circumference of a circle where the maximum dimension is located.

24. The pressure sensor according to claim 22, characterized in that It also includes an elastic member, which is disposed between the gasket and the top wall of the cavity, and is used to press the insulating body against the support portion through the gasket; the elastic member includes a wave spring, and the wave spring has n wave crests and n wave troughs, where n is an integer greater than 1; The notch structure includes a notch surface formed at an edge of the first surface; The maximum dimension of the notch surface in the circumferential direction along the first surface is less than or equal to 1 / n of the circumference of the circle where the maximum dimension is located.

25. The pressure sensor according to claim 22, characterized in that The cavity comprises an upper support, a lower support and a top cover, wherein the upper support and the lower support are respectively located on both sides of the upper surface and the lower surface of the moving membrane, and are both sealed and connected to the moving membrane; A recessed portion is formed on the upper surface of the lower support, and a lower space is formed between the lower surface of the moving membrane and the recessed portion; The top cover is located on one side of the upper surface of the upper support and is sealed and connected to the upper support, serving as the top wall of the cavity; an upper space is formed between the lower surface of the top cover, the upper surface of the moving membrane and the inner circumferential surface of the upper support; the insulating body is located in the upper space and is supported by the support portion arranged on the upper support.

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