A vacuum coating system and vacuum coating method

Abstract

This invention relates to the field of vacuum coating technology, and discloses a vacuum coating system and a vacuum coating method. The vacuum coating system includes a coating chamber, a transport chamber, a conveying device, and a cooling device. The coating chamber is used for coating, the transport chamber is used to hold a film material carrier with multiple bearing positions, and the coating chamber contains coating positions. The conveying device transports the film material carrier from the transport chamber to the coating chamber and sequentially transports the bearing positions to the coating positions. The cooling device is located in the coating chamber and is used to cool the film material carrier placed therein. The conveying device of this invention sequentially transports each bearing position to the coating position for coating, and the cooling device within the coating chamber effectively prevents damage to the film material carrier and other components due to excessive temperature, improving safety. Furthermore, it ensures the stability of the coating process, thereby improving the coating effect.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to a vacuum coating system and a vacuum coating method. Background Technology

[0002] With the continuous expansion of the application fields of vacuum coating technology and the increasing market demands for coating efficiency and quality, the coating industry's need for coating automation technology is growing stronger. The automated supply of coating source materials is one of the important issues in coating automation technology.

[0003] In the field of vacuum coating technology, the coating process is generally carried out by methods such as electron beam evaporation, resistive evaporation, or sputtering. In these processes, excess heat is inevitably generated. If effective measures are not taken, the coating material carrier and other components may experience performance degradation or damage due to excessive temperature, posing serious safety hazards and affecting the coating effect. In coating equipment employing automated coating material supply technology, the equipment needs to perform continuous coating for extended periods, and the coating material carrier generally needs to meet automatic feeding requirements. Therefore, how to effectively reduce the excess heat generated during the coating process while ensuring automated coating material supply, and achieve stable and reliable automated continuous coating, is a problem that urgently needs to be solved.

[0004] Therefore, there is an urgent need for a vacuum coating system and vacuum coating method to solve the above problems. Summary of the Invention

[0005] Based on the above, the purpose of this invention is to provide a vacuum coating system and vacuum coating method that can hold more film material, improve safety, achieve better coating results, and increase efficiency.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A vacuum coating system, comprising:

[0008] The coating chamber is used for coating, and the transport chamber is used to hold the film material carrier. The film material carrier is provided with multiple bearing positions, and the coating chamber is provided with coating positions.

[0009] The conveying device is capable of conveying the film material carrier in the transport cavity to the coating cavity, and sequentially conveying the carrier position to the coating position;

[0010] A cooling device is provided in the coating chamber for cooling the film carrier placed in the coating chamber.

[0011] As a preferred embodiment of a vacuum coating system, the conveying device includes a linear module disposed in the transport cavity, the linear module being provided with a pusher connected to the film carrier, and the linear module being capable of driving the pusher to move.

[0012] As a preferred embodiment of a vacuum coating system, the linear module includes a linear drive, a linear guide rail, and a slider disposed on the linear guide rail. The linear drive can drive the slider to move on the linear guide rail, and the pusher is disposed on the slider.

[0013] As a preferred embodiment of a vacuum coating system, the conveying device further includes a support rail, the support rail extending in the same direction as the linear guide rail, and the film carrier slidably disposed on the support rail.

[0014] As a preferred embodiment of a vacuum coating system, the support rail is provided with an adjusting guide wheel, which is used to adjust the levelness of the film material carrier.

[0015] As a preferred embodiment of a vacuum coating system, the film carrier is provided with a positioning hole, and the pusher is provided with a pin, which can be placed in the positioning hole.

[0016] As a preferred embodiment of a vacuum coating system, the cooling device includes a coating position cooling mechanism and a non-coating position cooling mechanism. The coating position cooling mechanism is used to cool the bearing position placed at the coating position, and the non-coating position cooling mechanism is used to cool the bearing position passing through the coating position.

[0017] As a preferred embodiment of a vacuum coating system, the cooling device is vertically adjustable and is used to cool the film carrier when it comes into contact with the film carrier.

[0018] As a preferred embodiment of a vacuum coating system, a vacuum valve and a bypass valve are provided between the coating chamber and the transport chamber. The bypass valve is used to connect the coating chamber and the transport chamber. The film carrier can pass through the vacuum valve, and the vacuum valve is used to disconnect the connection between the coating chamber and the transport chamber.

[0019] A vacuum coating method, employing the vacuum coating system described in any of the above embodiments, the vacuum coating method comprising:

[0020] The coating material is injected into the film carrier within the transport cavity;

[0021] The film material carrier is conveyed so that the carrier position is sequentially located at the coating position for coating;

[0022] The film carrier is cooled during the coating process.

[0023] The beneficial effects of this invention are as follows:

[0024] This invention features a coating chamber for vacuum coating, a transport chamber for holding the film material carrier, and a conveying device for conveying and replenishing the film material carrier into the coating chamber. Specifically, the film material carrier has multiple bearing positions to hold more film material, and the conveying device sequentially transports each bearing position to the coating position for coating, increasing the coating amount and efficiency in a single transport. Furthermore, a cooling device is installed within the coating chamber to cool the film material carrier placed within it. This effectively prevents damage to the film material carrier and other components due to excessive temperature, improving safety; it also ensures the stability of the coating process, thereby improving the coating effect. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0026] Figure 1 This is a front view of the vacuum coating system provided in a specific embodiment of the present invention;

[0027] Figure 2 This is a top view of the vacuum coating system provided in a specific embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the conveying device inside the transport cavity of the vacuum coating system provided in a specific embodiment of the present invention;

[0029] Figure 4 This is a cross-sectional view of the non-coating position of the conveying device in the coating chamber of the vacuum coating system provided in a specific embodiment of the present invention.

[0030] Figure 5 This is a cross-sectional view of the coating position of the conveying device in the coating chamber of the vacuum coating system provided in a specific embodiment of the present invention;

[0031] Figure 6 This is a schematic diagram of the vacuum coating system provided in a specific embodiment of the present invention.

[0032] In the picture:

[0033] 100. Coating cavity; 110. Coating position; 120. Support column;

[0034] 200. Transport chamber; 210. Door opening and closing;

[0035] 300. Vacuum valve;

[0036] 1. Film material carrier; 11. Carrier position; 111. Cooling groove; 112. Flanged edge; 12. Carrier strip; 121. Positioning hole;

[0037] 2. Conveying device; 21. Linear module; 211. Linear drive component; 212. Linear guide rail; 213. Slider; 22. Pushing component; 221. Pin; 23. Support guide rail; 231. Adjusting guide wheel;

[0038] 3. Cooling device; 31. Coating position cooling mechanism; 311. Coolant column; 312. Coating cooling drive component; 32. Non-coating position cooling mechanism; 321. Upper cooling assembly for non-coating position; 3211. Liquid cooling platform; 3212. First cooling drive component for non-coating position; 322. Lower cooling assembly for non-coating position; 3221. Liquid cooling plate; 3213. Connecting plate; 3214. Coolant pipe; 3215. Drive component mounting flange; 3222. Second cooling drive component for non-coating position. Detailed Implementation

[0039] Embodiments of the present invention are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0040] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0041] Unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0042] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0043] like Figures 1-6 As shown, this embodiment provides a vacuum coating system, which includes a coating chamber 100, a transport chamber 200, a conveying device 2, and a cooling device 3. The coating chamber 100 is used for coating, the transport chamber 200 is used to hold the film material carrier 1, the film material carrier 1 is provided with a plurality of bearing positions 11, and the coating chamber 100 is provided with coating positions 110. The conveying device 2 can transport the film material carrier 1 from the transport chamber 200 to the coating chamber 100, and transport the bearing positions 11 to the coating positions 110 in sequence. The cooling device 3 is provided in the coating chamber 100 and is used to cool the film material carrier 1 placed in the coating chamber 100.

[0044] A coating chamber 100 is provided for vacuum coating; a transport chamber 200 is provided for holding the film material carrier 1; and a conveying device 2 is provided for conveying and replenishing the film material carrier 1 to the coating chamber 100. Specifically, the film material carrier 1 is provided with multiple bearing positions 11 to hold more film material, and the conveying device 2 sequentially conveys each bearing position 11 to the coating position 110 for coating, thereby increasing the coating amount and coating efficiency in one conveying. In addition, a cooling device 3 is provided in the coating chamber 100 to cool the film material carrier 1 placed in the coating chamber 100. On the one hand, this effectively avoids performance degradation or damage to the film material carrier 1 and other components due to excessive temperature, improving safety; on the other hand, it also ensures the stability of the coating process, thereby improving the coating effect.

[0045] Specifically, a vacuum valve 300 and a bypass valve are provided between the coating chamber 100 and the transport chamber 200. The film carrier 1 can pass through the vacuum valve 300. The vacuum valve 300 is used to disconnect the connection between the coating chamber 100 and the transport chamber 200. When the vacuum valve 300 disconnects the coating chamber 100 and the transport chamber 200, the vacuum in the transport chamber 200 can be broken separately, and film can be added to the film carrier 1 placed in the transport chamber 200, or the film carrier 1 can be replaced, without affecting the coating in the coating chamber 100. On the one hand, the coating efficiency is improved, and on the other hand, the area of ​​vacuum breaking is reduced, thus reducing the coating cost.

[0046] Preferably, the transport cavity 200 is also provided with a switch door 210. When the switch door 210 is open, it can be used to add film material to the film material carrier 1 or replace the film material carrier 1. When the switch door 210 is closed, it can be used to evacuate the transport cavity 200.

[0047] Furthermore, after the film material carrier 1 in the transport cavity 200 has been filled with film material or replaced, the transport cavity 200 is first evacuated. When the vacuum level in the transport cavity 200 is close to that in the coating cavity 100, the bypass valve can be opened. The bypass valve is used to connect the coating cavity 100 and the transport cavity 200, so that the vacuum level in the transport cavity 200 is the same as that in the coating cavity 100. At this time, the vacuum valve 300 is opened, and the film material carrier 1 is transported to the coating cavity 100 for coating through the conveying device 2.

[0048] As an optional solution for the vacuum coating system, the conveying device 2 includes a linear module 21 disposed in the transport cavity 200. By placing the linear module 21 in the transport cavity 200, the impact of the coating process on the linear module 21 can be reduced. The linear module 21 is provided with a pusher 22 connected to the film carrier 1. The linear module 21 can drive the pusher 22 to move. By setting the pusher 22, the connection between the linear module 21 and the film carrier 1 can be realized. By setting the linear module 21, the conveying of the film carrier 1 and the sequential coating of each carrier position 11 can be realized.

[0049] In this embodiment, the linear module 21 includes a linear drive 211, a linear guide rail 212, and a slider 213 disposed on the linear guide rail 212. The slider 213 is slidably disposed on the linear guide rail 212. The linear drive 211 serves as a drive source, driving the slider 213 to move on the linear guide rail 212. A pusher 22 is disposed on the slider 213. When the linear drive 211 drives the slider 213 to slide, it causes the pusher 22 and the film material carrier 1 to move together.

[0050] Furthermore, to achieve the connection between the pusher 22 and the film material carrier 1, the film material carrier 1 is provided with a positioning hole 121, and the pusher 22 is provided with a pin 221, which can be placed in the positioning hole 121. Specifically, the film material carrier 1 includes a carrier strip 12, a plurality of carrier positions 11 are provided on the carrier strip 12, and the positioning hole 121 is provided at one end of the carrier strip 12.

[0051] For example, the support strip 12 can be a crucible platform, wherein the support position 11 is recessed in the support strip 12, and the shape of the support position 11 is not limited. A crucible adapted to its shape can be placed in the support position 11, and the coating material is placed in the crucible; or the coating material can be placed directly in the support position 11.

[0052] It is worth noting that the extension direction of the linear guide 212 is the direction in which the film carrier 1 of the conveying cavity 200 is transported to the coating cavity 100. For example, the linear drive 211 can be a drive motor, the linear guide 212 can be a lead screw, and the slider 213 can be threadedly connected to the lead screw; or the linear drive 211 can be a drive cylinder, and the slider 213 can be disposed at the drive end of the drive cylinder.

[0053] Optionally, to ensure stable conveying of the film material carrier 1, the conveying device 2 further includes a support guide rail 23. The support guide rail 23 extends in the same direction as the linear guide rail 212. The pusher 22 can push the film material carrier 1 to slide along the support guide rail 23 under the drive of the linear drive 211. For example, the support guide rail 23 is provided with rollers, making the sliding of the film material carrier 1 smoother.

[0054] Preferably, the support guide rail 23 is provided with an adjusting guide wheel 231, which can abut against the film material carrier 1 to adjust the levelness of the film material carrier 1, so as to avoid the spillage of film material inside the film material carrier 1 and to ensure reliable cooperation between the cooling device 3 and the film material carrier 1. Exemplarily, the adjusting guide wheels 231 are arranged in pairs, respectively located on both sides of the film material carrier 1, and multiple pairs of adjusting guide wheels 231 can be arranged along the length direction of the film material carrier 1 to increase the adjustment range and reliability.

[0055] As an optional solution for the vacuum coating system, the cooling device 3 includes a coating-position cooling mechanism 31 and a non-coating-position cooling mechanism 32. The coating-position cooling mechanism 31 is used to cool the bearing position 11 placed at the coating position 110, and the non-coating-position cooling mechanism 32 is used to cool the bearing position 11 that passes through the coating position 110. This makes the cooling of the film carrier 1 more targeted, improves the cooling effect, ensures the coating effect, and also increases the safety factor.

[0056] Specifically, the coating position cooling mechanism 31 includes a coolant column 311, which cools the coating position 110 by abutting against the bearing position 11. The coolant column 311 is disposed at the driving end of the coating cooling drive 312, which can drive the coolant column 311 to abut against the bearing position 11 of the coating position 110.

[0057] In this embodiment, the coolant column 311 is positioned below the film carrier 1 to reduce the impact of the upper coating on the coolant column 311. The coating cooling drive 312 drives the coolant column 311 to move vertically. When the coolant column 311 rises to contact the film carrier 1, it cools the film carrier 1. When the coolant column 311 descends, the film carrier 1 can be transported without interference from the coating cooling mechanism 31. Exemplarily, the coating cooling drive 312 can be a drive cylinder or a drive motor.

[0058] Preferably, a cooling groove 111 is provided below the bearing position 11. The shape of the cooling groove 111 is adapted to the end of the coolant column 311 away from the coating cooling drive member 312. The coating cooling drive member 312 can drive the coolant column 311 to selectively place it in the cooling groove 111, effectively improving the cooling effect. It is worth noting that by placing the end of the coolant column 311 in the cooling groove 111, the coolant column 311 can also play a certain detection role, firstly detecting whether the coating position 110 has a bearing position 11, and secondly detecting whether the bearing position 11 is offset.

[0059] As an optional solution for a vacuum coating system, the non-coating area cooling mechanism 32 includes an upper cooling component 321 and a lower cooling component 322. The upper cooling component 321 is located above the film carrier 1, and the lower cooling component 322 is located below the film carrier 1. By setting the upper cooling component 321 and the lower cooling component 322, the cooling of the coated film carrier 1 is made more complete.

[0060] Specifically, the upper cooling assembly 321 of the non-coating position is height-adjustable, and can contact the upper part of the film material carrier 1 for cooling; the lower cooling assembly 322 of the non-coating position is height-adjustable, and can contact the lower part of the film material carrier 1 for cooling. By making both the upper cooling assembly 321 and the lower cooling assembly 322 of the non-coating position height-adjustable, the cooling mechanism 32 of the non-coating position can contact the film material carrier 1 from both the upper and lower directions. On the one hand, the contact cooling can effectively improve the cooling effect; on the other hand, when the cooling mechanism 32 of the non-coating position is disengaged from the film material carrier 1, it will not interfere with the conveying of the film material carrier 1.

[0061] In this embodiment, the sidewall of the film carrier 1 is inclined outward, and the cooling assembly 321 on the non-coating position can abut against the sidewall of the film carrier 1 for cooling the upper part of the film carrier 1. It is worth noting that the upper edge of the film carrier 1 is provided with a flange 112. When the cooling assembly 321 on the non-coating position rises to the point where it disengages from the sidewall of the film carrier 1, the cooling assembly 321 on the non-coating position will not interfere with the flange 112, so as to ensure that the film carrier 1 can be transported normally.

[0062] Preferably, two cooling components 321 are provided on the non-coating positions, and the two cooling components 321 on the non-coating positions are respectively located on both sides of the film material carrier 1 to cool both sides of the film material carrier 1.

[0063] Furthermore, the non-coating area cooling assembly 321 includes a liquid cooling platform 3211 and a non-coating area cooling first driving member 3212 that drives the liquid cooling platform 3211 to move up and down; the liquid cooling platform 3211 is connected to the non-coating area cooling first driving member 3212 through a connecting plate 2213. Preferably, the connecting plate 3213 is provided with weight reduction holes, which helps to reduce the driving weight of the non-coating area cooling first driving member 3212 and makes the driving more reliable.

[0064] It is worth noting that, in order to allow coolant to flow into the liquid cooling platform 3211, the cooling assembly 321 on the non-coating site also includes a coolant pipe 3214 connected to the liquid cooling platform 3211, with the other end of the coolant pipe 3214 connected to a coolant supply device. Multiple coolant pipes 3214 can also be provided to improve cooling efficiency and effect.

[0065] In this embodiment, the non-coating area cooling assembly 322 includes a liquid cooling plate 3221 and a second driving member 3222 for driving the liquid cooling plate 3221 to move up and down.

[0066] Optionally, both the first driving component 3212 for cooling the non-coating area and the second driving component 3222 for cooling the non-coating area can be a driving cylinder or a driving motor. Both the first driving component 3212 and the second driving component 3222 for cooling the non-coating area are installed within the coating cavity 100 via a driving component mounting flange 3215. Further, the coating system is installed within the coating cavity 100 via a support column 120.

[0067] As an optional solution for the coating system, the non-coating area cooling mechanism 32 extends along the length of the film carrier 1, and the length of the non-coating area cooling mechanism 32 covers at least two or more carrier positions 11. This arrangement allows the non-coating area cooling mechanism 32 to be used for cooling multiple coated carrier positions 11, thus improving cooling efficiency.

[0068] This embodiment also discloses a vacuum coating method, employing the vacuum coating system described in any of the above embodiments. The vacuum coating method includes:

[0069] Close the vacuum valve 300 and the bypass valve, break the vacuum only in the transport chamber 200, open the switch door 210, and inject the coating material into the film carrier 1 in the transport chamber 200 or replace the film carrier 1.

[0070] Close the switch door 210 and open the bypass valve. When the vacuum level in the transport chamber 200 is close to that in the coating chamber 100, the bypass valve can be opened. The bypass valve connects the coating chamber 100 and the transport chamber 200, making the vacuum level in the transport chamber 200 the same as that in the coating chamber 100. At this time, open the vacuum valve 300, and the film carrier 1 is transported to the coating chamber 100 for coating through the conveying device 2.

[0071] The conveying device 2 conveys the first bearing position 11 of the film material carrier 1 to the coating position 110. The coating position cooling mechanism 31 and the non-coating position lower cooling component 322 rise, and the non-coating position upper cooling component 321 descends, cooling the film material carrier 1 that is being coated while clamping the film material carrier 1.

[0072] When the first carrier position 11 is coated, the coating position cooling mechanism 31 and the non-coating position lower cooling component 322 rise and fall, the non-coating position upper cooling component 321 rises, and the film material carrier 1 continues to be conveyed by the conveying device 2 to convey the second carrier position 11 to the coating position 110 for coating and cooling again, until the last carrier position 11 is coated.

[0073] The conveying device 2 transports the coated film carrier 1 from the coating chamber 100 back to the transport chamber 200.

[0074] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A vacuum coating system, characterized in that, include: The coating chamber (100) and the transport chamber (200) are provided. The coating chamber (100) is used for coating, and the transport chamber (200) is used to hold the film material carrier (1). The film material carrier (1) is provided with a plurality of carrier positions (11), and the coating chamber (100) is provided with coating positions (110). The conveying device (2) can convey the film material carrier (1) in the conveying cavity (200) to the coating cavity (100) and convey the carrier position (11) to the coating position (110) in sequence; A cooling device (3) is provided in the coating chamber (100) for cooling the film material carrier (1) placed in the coating chamber (100); The cooling device (3) includes a coating position cooling mechanism (31) and a non-coating position cooling mechanism (32). The coating position cooling mechanism (31) is used to cool the bearing position (11) placed in the coating position (110), and the non-coating position cooling mechanism (32) is used to cool the bearing position (11) passing through the coating position (110). The coating cooling mechanism (31) includes a coolant column (311), which is disposed at the driving end of the coating cooling drive (312). The coating cooling drive (312) can drive the coolant column (311) to abut against the bearing position (11) placed in the coating position (110). The coolant column (311) is disposed below the film material bearing member (1). The non-coating position cooling mechanism (32) includes a non-coating position upper cooling component (321) and a non-coating position lower cooling component (322). The non-coating position upper cooling component (321) is located above the film material carrier (1), and the non-coating position lower cooling component (322) is located below the film material carrier (1). The upper cooling assembly (321) of the non-coating position can be raised and lowered, and the upper cooling assembly (321) of the non-coating position can abut against the upper part of the film material carrier (1) for cooling; the lower cooling assembly (322) of the non-coating position can be raised and lowered, and the lower cooling assembly (322) of the non-coating position can abut against the lower part of the film material carrier (1) for cooling. A cooling groove (111) is provided below the bearing position (11). The shape of the cooling groove (111) is adapted to the end of the coolant column (311) away from the coating cooling drive (312). The coating cooling drive (312) can drive the coolant column (311) to selectively place it in the cooling groove (111).

2. The vacuum coating system according to claim 1, characterized in that, The conveying device (2) includes a linear module (21) disposed in the conveying cavity (200). The linear module (21) is provided with a pusher (22) connected to the film material carrier (1). The linear module (21) can drive the pusher (22) to move.

3. The vacuum coating system according to claim 2, characterized in that, The linear module (21) includes a linear drive (211), a linear guide (212), and a slider (213) disposed on the linear guide (212). The linear drive (211) can drive the slider (213) to move on the linear guide (212), and the pusher (22) is disposed on the slider (213).

4. The vacuum coating system according to claim 3, characterized in that, The conveying device (2) further includes a support rail (23), which extends in the same direction as the linear guide rail (212), and the film material carrier (1) is slidably disposed on the support rail (23).

5. The vacuum coating system according to claim 4, characterized in that, The support guide rail (23) is provided with an adjusting guide wheel (231), which is used to adjust the level of the film material carrier (1).

6. The vacuum coating system according to claim 2, characterized in that, The film material carrier (1) is provided with a positioning hole (121), and the pusher (22) is provided with a pin (221), which can be placed in the positioning hole (121).

7. The vacuum coating system according to any one of claims 1-6, characterized in that, The cooling device (3) is adjustable in height. When the cooling device (3) comes into contact with the film material carrier (1), it cools the film material carrier (1).

8. The vacuum coating system according to any one of claims 1-6, characterized in that, A vacuum valve (300) and a bypass valve are provided between the coating chamber (100) and the transport chamber (200). The bypass valve is used to connect the coating chamber (100) and the transport chamber (200). The film carrier (1) can pass through the vacuum valve (300). The vacuum valve (300) is used to disconnect the connection between the coating chamber (100) and the transport chamber (200).

9. A vacuum coating method, characterized in that, The vacuum coating system as described in any one of claims 1-8, wherein the vacuum coating method comprises: The coating material is injected into the film carrier (1) within the transport cavity (200); The film material carrier (1) is conveyed so that the carrier position (11) is sequentially located at the coating position (110) for coating; The film carrier (1) is cooled during the coating process.

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