Guide plate structure and probe array

Abstract

The present disclosure provides a guide plate structure and a probe array. The probe array includes a first probe, a second probe, and a first guide plate. The configurations of the first probe and the second probe in the probe array are different. The first guide plate has a first through hole and a second through hole. The first through hole receives the first probe, and the second through hole receives the second probe. The configurations of the first through hole and the second through hole on the first guide plate are different.

Description

Technical Field

[0001] This disclosure relates to a guide plate structure and a probe array. In particular, it relates to a guide plate structure with dissimilar perforations and a probe array using the guide plate structure. Background Technology

[0002] In the prior art, various integrated circuit chips require electrical testing during the manufacturing process. When the areas to be tested on the device under test (e.g., CoWoS, Chip-On-Wafer-On-Substrate) have different thicknesses, a probe array with a single probe structure cannot achieve consistent contact with the test areas of different thicknesses on the device under test.

[0003] The above description of "prior art" is merely a background description and does not acknowledge that the subject matter of this disclosure is disclosed. It does not constitute prior art in this disclosure, and no description of the above "prior art" should be considered part of this invention. Summary of the Invention

[0004] One embodiment of this disclosure provides a guide plate structure including a first guide plate. The first guide plate has: a first through hole for receiving a first probe; and a second through hole for receiving a second probe. The configuration of the first probe is different from the configuration of the second probe, and the configuration of the first through hole is different from the configuration of the second through hole.

[0005] In some embodiments, the length of the second probe is less than the length of the first probe, and the diameter of the second perforation is greater than the diameter of the first perforation.

[0006] In some embodiments, the guide plate structure further includes a second guide plate. The second guide plate has: a third through hole for receiving the first probe; and a fourth through hole for receiving the second probe, wherein the diameter of the third through hole is larger than the diameter of the fourth through hole.

[0007] In some embodiments, one end of the first probe is used to contact an object to be tested, and the distance between the first guide plate and the end of the first probe is less than the distance between the second guide plate and the end of the first probe.

[0008] In some embodiments, the length of the second probe is less than the length of the first probe, and the first and second perforations are tapered and narrow in opposite directions.

[0009] In some embodiments, one end of the first probe and one end of the second probe are used to contact a test object, the first perforation narrows in the direction of the first probe end, and the second perforation narrows in the opposite direction of the second probe end.

[0010] In some embodiments, the first guide plate has a cross-section along the thickness direction, and the shape of the first or second perforation on the cross-section is square, rectangular, trapezoidal or stepped.

[0011] Another embodiment of this disclosure provides a guide plate structure comprising a guide plate. The guide plate has: a first through-hole for receiving a first probe, wherein the first probe is used to probe a first block of a test object; and a second through-hole for receiving a second probe, wherein the second probe is used to probe a second block of the test object. The configuration of the first through-hole differs from the configuration of the second through-hole. When the guide plate moves relative to the first probe and the second probe, the first probe is offset and contacts the first block, and the second probe is offset and contacts the second block.

[0012] Another embodiment of this disclosure provides a probe array, comprising: a first probe, a second probe, and a first guide plate. The first probe and the second probe are configured differently in the probe array. The first guide plate has: a first through-hole for receiving the first probe; and a second through-hole for receiving the second probe. The first through-hole and the second through-hole are configured differently on the first guide plate.

[0013] In some embodiments, the length of the second probe is less than the length of the first probe, and the diameter of the second perforation is greater than the diameter of the first perforation.

[0014] In some embodiments, the probe array further includes a second guide plate. The second guide plate has: a third through-hole for receiving the first probe; and a fourth through-hole for receiving the second probe. The third aperture of the third through-hole is larger than the fourth aperture of the fourth through-hole.

[0015] In some embodiments, one end of the first probe is used to contact an object to be tested, and the distance between the first guide plate and the end of the first probe is less than the distance between the second guide plate and the end of the first probe.

[0016] In some embodiments, the length of the second probe is less than the length of the first probe, and the first and second perforations are tapered and narrow in opposite directions.

[0017] In some embodiments, one end of the first probe and one end of the second probe are used to contact a test object, the first perforation narrows in the direction of the first probe end, and the second perforation narrows in the opposite direction of the second probe end.

[0018] In some embodiments, the first guide plate has a cross-section along the thickness direction, and the shape of the first or second perforation on the cross-section is square, rectangular, trapezoidal or stepped.

[0019] The technical features and advantages of this disclosure have been summarized quite extensively above to provide a better understanding of the detailed description of this disclosure that follows. Other technical features and advantages constituting the subject matter of the claims will be described below. Those skilled in the art to which this disclosure pertains will understand that the concepts and specific embodiments disclosed below can be readily utilized to achieve the same purpose as this disclosure through modifications or design of other structures or processes. Those skilled in the art will also understand that such equivalent constructions cannot depart from the spirit and scope of this disclosure as defined by the appended claims. Attached Figure Description

[0020] The disclosure of the present invention can be more fully understood by referring to the accompanying drawings in conjunction with the embodiments and claims, wherein the same element symbols in the drawings refer to the same elements.

[0021] Figures 1A to 1B A schematic diagram illustrating probe arrays of some embodiments of this disclosure is shown.

[0022] Figures 2A to 2D A schematic diagram illustrating probe arrays of some embodiments of this disclosure is shown.

[0023] Figures 3A to 3B A schematic diagram illustrating probe arrays of some embodiments of this disclosure is shown.

[0024] Figures 4A to 4B A schematic diagram illustrating probe arrays of some embodiments of this disclosure is shown.

[0025] Figures 5A to 5D A schematic diagram illustrating probe arrays of some embodiments of this disclosure is shown.

[0026] The attached figures are labeled as follows:

[0027] 1: Probe array

[0028] 11: Guide plate structure

[0029] 111: Guide Plate

[0030] 111A: Perforation

[0031] 111B: Perforation

[0032] 13A: Probe

[0033] 13A1: Upper part

[0034] 13A2: Lower part

[0035] 13A3: One end

[0036] 13B: Probe

[0037] 13B1: Upper part

[0038] 13B2: Lower part

[0039] 13B3: One end

[0040] 2: Probe Array

[0041] 21: Guide plate structure

[0042] 211: Guide plate

[0043] 211A: Perforation

[0044] 211B: Perforation

[0045] 212: Guide plate

[0046] 212A: Perforation

[0047] 212B: Perforation

[0048] 23A: Probe

[0049] 23A1: Upper part

[0050] 23A2: Lower part

[0051] 23A3: One end

[0052] 23B: Probe

[0053] 23B1: Upper part

[0054] 23B2: Lower part

[0055] 23B3: One end

[0056] 3: Probe Array

[0057] 31: Guide plate structure

[0058] 311: Guide Plate

[0059] 311A: Perforation

[0060] 311B: Perforation

[0061] 33A: Probe

[0062] 33A1: Upper part

[0063] 33A2: Lower part

[0064] 33A3: One end

[0065] 33B: Probe

[0066] 33B1: Upper part

[0067] 33B2: Lower part

[0068] 33B3: One end

[0069] 4: Probe Array

[0070] 41: Guide plate structure

[0071] 411: Guide Plate

[0072] 411A: Perforation

[0073] 411B: Perforation

[0074] 43A: Probe

[0075] 43A1: Upper part

[0076] 43A2: Lower part

[0077] 43A3: One end

[0078] 43B: Probe

[0079] 43B1: Upper part

[0080] 43B2: Lower part

[0081] 43B3: One end

[0082] 5: Probe Array

[0083] 51: Guide plate structure

[0084] 511: Guide Plate

[0085] 511A: Perforation

[0086] 511B: Perforation

[0087] 512: Guide Plate

[0088] 512A: Perforation

[0089] 512B: Perforation

[0090] 513: Guide Plate

[0091] 5130: Perforation

[0092] 514: Guide Plate

[0093] 5140: Perforation

[0094] 53A: Probe

[0095] 53A1: Upper part

[0096] 53A2: Lower part

[0097] 53A3: One end

[0098] 53B: Probe

[0099] 53B1: Upper part

[0100] 53B2: Lower part

[0101] 53B3: One end Detailed Implementation

[0102] The following description of this disclosure, accompanied by the accompanying drawings which are incorporated in and form part of this specification, illustrates embodiments of the disclosure; however, the disclosure is not limited to these embodiments. Furthermore, the following embodiments may be appropriately integrated to complete another embodiment.

[0103] Terms such as “an embodiment,” “an embodiment,” “an exemplary embodiment,” “another embodiment,” and “another embodiment” indicate that the embodiments described in this disclosure may include specific features, structures, or characteristics; however, not every embodiment must include that specific feature, structure, or characteristic. Furthermore, repeated use of the phrase “in an embodiment” does not necessarily refer to the same embodiment, but may refer to the same embodiment.

[0104] To enable a full understanding of this disclosure, the following description provides detailed steps and structures. It is obvious that implementation of this disclosure does not limit the specific details known to those skilled in the art. Furthermore, known structures and steps are not detailed further to avoid unnecessarily limiting this disclosure. Preferred embodiments of this disclosure are detailed below. However, in addition to the detailed description, this disclosure can also be widely implemented in other embodiments. The scope of this disclosure is not limited to the detailed description, but is defined by the claims.

[0105] It should be understood that the following disclosure provides numerous different embodiments or examples for implementing various features of the invention. Specific embodiments or examples of components and arrangements are described below to simplify this disclosure. Of course, the various descriptions are merely examples and are not intended to be limiting. For example, the dimensions of elements are not limited to the disclosed range or values, but may depend on process conditions and / or the desired properties of the apparatus. Furthermore, the description of a first feature being formed "on" or "on" a second feature in the following description may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, thereby potentially preventing direct contact between the first and second features. For simplicity and clarity, various features may be drawn at any scale. In the drawings, some layers / features may be omitted for simplicity.

[0106] Furthermore, for ease of explanation, spatial relative terms such as "beneath," "below," "lower," "above," and "upper" may be used herein to describe the relationship between one element or feature shown in the figures and another element or feature. These spatial relative terms are intended to encompass different orientations of the elements in use or operation, in addition to those shown in the figures. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein can be interpreted accordingly.

[0107] The guide plate structure of embodiments of this disclosure includes a guide plate with different configurations of perforations for receiving probes of different configurations in a probe array. When the guide plate moves relative to the probes, the probes are offset, and the probes located in the different configurations of perforations contact blocks of different thicknesses on the test object.

[0108] refer to Figure 1A This is a schematic diagram of a probe array 1 according to some embodiments of the present disclosure. Specifically, the probe array 1 includes: a guide plate structure 11, a first probe 13A, and a second probe 13B. The guide plate structure 11 includes a first guide plate 111. The first guide plate 111 has a first through hole 111A and a second through hole 111B. The first through hole 111A is used to receive the first probe 13A. The second through hole 111B is used to receive the second probe 13B. In some embodiments, the configuration of the first probe 13A (e.g., length, shape, arrangement, position in the through hole, etc.) is different from the configuration of the second probe 13B. In some embodiments, the configuration of the first through hole 111A (e.g., aperture size, shape, etc.) is different from the configuration of the second through hole 111B.

[0109] refer to Figure 1B This is a schematic diagram of a guide plate structure 11 used to guide probes according to some embodiments of the present disclosure. Specifically, the movable range of the upper part 13A1 of the first probe 13A and the upper part 13B1 of the second probe 13B is limited (e.g., by other mechanisms (not shown)). Since the configuration of the first perforation 111A is different from that of the second perforation 111B, when the first guide plate 111 moves relative to the first probe 13A and the second probe 13B (e.g., lateral relative displacement), the first perforation 111A and the second perforation 111B may respectively cause the lower part 13A2 of the first probe 13A and the lower part 13B2 of the second probe 13B to shift based on the range of movement of the first guide plate 111.

[0110] In some embodiments, since the first guide plate 111 has a thickness and the configuration of the first through hole 111A is different from the configuration of the second through hole 111B, the displacement of the first guide plate 111 will cause the offset of the lower part 13A2 of the first probe 13A to be different from the offset of the lower part 13B2 of the second probe 13B, further causing the height difference between one end 13A3 of the first probe 13A and one end 13B3 of the second probe 13B to change. In this way, the height difference between one end 13A3 of the first probe 13A and one end 13B3 of the second probe 13B can be controlled by: (1) adjusting the thickness of the first guide plate 111; (2) controlling the relative displacement of the first guide plate 111 with respect to the first probe 13A and the second probe 13B; (3) adjusting the configuration of the first through hole 111A and the second through hole 111B; or any combination of (1) to (3).

[0111] Accordingly, when one end 13A3 of the first probe 13A and one end 13B3 of the second probe 13B are used to contact different test blocks of the same object with different thicknesses, by controlling the height difference between one end 13A3 of the first probe 13A and one end 13B3 of the second probe 13B, the same contact pressure can be achieved when the two ends simultaneously contact test blocks of different thicknesses on the same object. In other words, by controlling the height difference between one end 13A3 of the first probe 13A and one end 13B3 of the second probe 13B, the two ends can achieve consistent contact when contacting test blocks of different thicknesses on the same object.

[0112] refer to Figure 2A This is a schematic diagram of a probe array 2 according to some embodiments of the present disclosure. Specifically, the probe array 2 includes: a guide plate structure 21, a first probe 23A, and a second probe 23B. The guide plate structure 21 includes a first guide plate 211 and a second guide plate 212. The first guide plate 211 has two through holes 211A and 211B. The second guide plate 212 has two through holes 212A and 212B. The through hole 211A of the first guide plate 211 and the through hole 212A of the second guide plate 212 are used to receive the first probe 23A. The through hole 211B of the first guide plate 211 and the through hole 212B of the second guide plate 212 are used to receive the second probe 23B.

[0113] In some embodiments, one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B are used to contact a test object (not shown). The distance between the first guide plate 211 and one end 23A3 of the first probe 23A is less than the distance between the second guide plate 212 and one end 23A of the first probe 23A, and the distance between the first guide plate 211 and one end 23B3 of the second probe 23B is less than the distance between the second guide plate 212 and one end 23B of the second probe 23B. In other words, the first guide plate 211 is located between the second guide plate 212 and one end 23A3 of the first probe 23A (or one end 23B3 of the second probe 23B).

[0114] In some embodiments, the configuration of the first probe 23A (e.g., length, shape, arrangement, position in the perforation, etc.) differs from the configuration of the second probe 23B, the configuration of the perforation 211A (e.g., aperture size, shape, etc.) differs from the configuration of the perforation 211B, and the configuration of the perforation 212A (e.g., aperture size, shape, etc.) differs from the configuration of the perforation 212B. For ease of understanding, an example is given where the length of the first probe 23A is less than the length of the second probe 23B, the aperture of the perforation 211A is greater than the aperture of the perforation 211B, and the aperture of the perforation 212A is smaller than the aperture of the perforation 212B. The first guide plate 211 and the second guide plate 212 have a cross-section along the thickness direction, and the perforations 211A, 211B, 212A, and 212B have a square or rectangular shape on the cross-section. However, this is not intended to limit the embodiments of this disclosure.

[0115] refer to Figure 2B This is a schematic diagram of the guide plate structure 21 used to guide probes in some embodiments of this disclosure. Specifically, the movable range of the upper part 23A1 of the first probe 23A and the upper part 23B1 of the second probe 23B is restricted (e.g., by other mechanisms (not shown)). Since the aperture of the perforation 211B is small, when the first guide plate 211 moves relative to the first probe 23A and the second probe 23B (e.g., lateral relative displacement), the perforation 211B can cause the lower part 23B2 of the second probe 23B to shift.

[0116] In some embodiments, since the first guide plate 211 has a thickness and the diameter of the through hole 211A is larger than the diameter of the through hole 211B, the displacement of the first guide plate 211 will cause the lower part 23B2 of the second probe 23B to shift, further causing a change in the height difference between one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B. In this way, the height difference between one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B can be controlled by: (1) adjusting the thickness of the first guide plate 211; (2) controlling the relative displacement of the first guide plate 211 with respect to the first probe 23A and the second probe 23B; (3) adjusting the diameter of the through holes 211A and 211B; or any combination of (1) to (3).

[0117] refer to Figure 2C This is a schematic diagram of the guide plate structure 21 of some embodiments of the present disclosure for guiding probes. Specifically, when the second guide plate 212 moves (e.g., lateral relative displacement) relative to the first probe 23A and the second probe 23B, the lower part 23A2 of the first probe 23A can be offset due to the small aperture of the perforation 212A.

[0118] In some embodiments, since the second guide plate 212 has a thickness and the diameter of the through hole 212A is smaller than the diameter of the through hole 212B, the displacement of the second guide plate 212 will cause the lower part 23A2 of the first probe 23A to shift, and further cause the height difference between one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B to change. In this way, the height difference between one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B can be controlled by: (1) adjusting the thickness of the second guide plate 212; (2) controlling the relative displacement of the second guide plate 212 with respect to the first probe 23A and the second probe 23B; (3) adjusting the diameter of the through holes 212A and 212B; or any combination of (1) to (3).

[0119] refer to Figure 2D This is a schematic diagram of the guide plate structure 21 used to guide probes in some embodiments of this disclosure. Specifically, when the first guide plate 211 and the second guide plate 212 move relative to the first probe 23A and the second probe 23B (e.g., lateral relative displacement), the perforation 212A can cause the lower part 23A2 of the first probe 23A to shift, and the perforation 211B can cause the lower part 23B2 of the second probe 23B to shift.

[0120] In some embodiments, since the first guide plate 211 and the second guide plate 212 have thickness, and (1) the diameter of the through hole 211A is larger than the diameter of the through hole 211B; and (2) the diameter of the through hole 212A is smaller than the diameter of the through hole 212B, the displacement of the first guide plate 211 and the second guide plate 212 will cause the lower part 23A2 of the first probe 23A and the lower part 23B2 of the second probe 23B to shift, further making the distance from one end 23A3 of the first probe 23A to the through hole 212A consistent with the distance from one end 23B3 of the second probe 23B to the through hole 211B.

[0121] In this way, the distance from one end 23A3 of the first probe 23A to the perforation 212A and the distance from one end 23B3 of the second probe 23B to the perforation 211B can be kept consistent by: (1) adjusting the thickness of the first guide plate 211 and the second guide plate 212; (2) controlling the relative displacement of the first guide plate 211 and the second guide plate 212 relative to the first probe 23A and the second probe 23B to the perforation 211B by: (1) adjusting the thickness of the first guide plate 211 and the second guide plate 212A; (3) adjusting the diameter of the perforations 211A, 211B, 212A and 212B; or any combination of (1) to (3).

[0122] Accordingly, when one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B are used to contact different test blocks of different thicknesses on the same test object, by the aforementioned: (1) controlling the height difference between one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B; or (2) controlling the distance from one end 23A3 of the first probe 23A to the through hole 212A and the distance from one end 23B3 of the second probe 23B to the through hole 211B to maintain the same distance, one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B can have the same contact needle pressure when simultaneously contacting test blocks of different thicknesses on the same test object.

[0123] In other words, by controlling one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B as described above, the one end 23A3 of the first probe 23A and one end 23B3 of the second probe 23B can have consistent contact when they contact the test blocks of different thicknesses with the test object.

[0124] refer to Figure 3A This is a schematic diagram of a probe array 3 according to some embodiments of the present disclosure. Specifically, the probe array 3 includes: a guide plate structure 31, a first probe 33A, and a second probe 33B. The guide plate structure 31 includes a first guide plate 311. The first guide plate 311 has a first through hole 311A ​​and a second through hole 311B. The first through hole 311A ​​is used to receive the first probe 33A. The second through hole 311B is used to receive the second probe 33B.

[0125] In some embodiments, one end 33A3 of the first probe 33A and one end 33B3 of the second probe 33B are used to contact a test object (not shown). The configuration of the first probe 33A (e.g., length, shape, arrangement, position in the perforation, etc.) differs from the configuration of the second probe 33B, and the configuration of the first perforation 311A ​​(e.g., aperture size, shape, etc.) differs from the configuration of the second perforation 311B. For ease of understanding, an example is taken where the length of the first probe 33A is greater than the length of the second probe 33B, and both the first perforation 311A ​​and the second perforation 311B are tapered. Specifically, the tapered shape of the first perforation 311A ​​narrows towards one end 33A3 of the first probe 33A, and the tapered shape of the second perforation 311B narrows in the opposite direction towards one end 33B3 of the second probe 33B. The first guide plate 311 and the second guide plate 312 have a cross-section along the thickness direction, and the shapes of the first perforation 311A ​​and the second perforation 311B on the cross-section are trapezoidal. However, it is not intended to limit the implementation of this disclosure.

[0126] refer to Figure 3B This is a schematic diagram of the guide plate structure 31 used to guide probes in some embodiments of this disclosure. Specifically, the movable range of the upper part 33A1 of the first probe 33A and the upper part 33B1 of the second probe 33B is restricted (e.g., by other mechanisms (not shown)). When the first guide plate 311 moves relative to the first probe 33A and the second probe 33B (e.g., lateral relative displacement), the first through hole 311A ​​and the second through hole 311B can respectively cause the lower part 33A2 of the first probe 33A and the lower part 33B2 of the second probe 33B to be offset.

[0127] In some embodiments, since the first guide plate 311 has a thickness and the tapered configuration of the first through hole 311A ​​is different from the tapered configuration of the second through hole 311B, the displacement of the first guide plate 311 will cause the lower part 33A2 of the first probe 33A and the lower part 33B2 of the second probe 33B to shift, further making the distance from one end 33A3 of the first probe 33A to the narrowest point of the through hole 311A ​​consistent with the distance from one end 33B3 of the second probe 33B to the narrowest point of the through hole 311B. In this way, the distance from one end 33A3 of the first probe 33A to the narrowest point of the perforation 311A ​​and the distance from one end 33B3 of the second probe 33B to the narrowest point of the perforation 311B can be kept consistent by: (1) adjusting the thickness of the first guide plate 311; (2) controlling the relative displacement of the first guide plate 311 relative to the first probe 33A and the second probe 33B to the narrowest point of the perforation 311B.

[0128] Accordingly, when one end 33A3 of the first probe 33A and one end 33B3 of the second probe 33B are used to contact different test blocks of different thicknesses on the same test object, by controlling the distance from one end 33A3 of the first probe 33A to the narrowest point of the perforation 311A ​​and the distance from one end 33B3 of the second probe 33B to the narrowest point of the perforation 311B, the first end 33A3 of the first probe 33A and the second end 33B3 of the second probe 33B can have the same contact pressure when simultaneously contacting test blocks of different thicknesses on the same test object. In other words, by controlling the distance from one end 33A3 of the first probe 33A to the narrowest point of the perforation 311A ​​and the second end 33B3 of the second probe 33B to the narrowest point of the perforation 311B, the first end 33A3 of the first probe 33A and the second end 33B3 of the second probe 33B can have consistent contact when contacting test blocks of different thicknesses on the same test object.

[0129] refer to Figure 4A This is a schematic diagram of a probe array 4 according to some embodiments of the present disclosure. Specifically, the probe array 4 includes: a guide plate structure 41, a first probe 43A, and a second probe 43B. The guide plate structure 41 includes a first guide plate 411. The first guide plate 411 has a first through hole 411A and a second through hole 411B. The first through hole 411A is used to receive the first probe 43A. The second through hole 411B is used to receive the second probe 43B.

[0130] In some embodiments, one end 43A3 of the first probe 43A and one end 43B3 of the second probe 43B are used to contact a test object (not shown). The configuration of the first probe 43A (e.g., length, shape, arrangement, position in the perforation, etc.) differs from the configuration of the second probe 43B, and the configuration of the first perforation 411A (e.g., aperture size, shape, etc.) differs from the configuration of the second perforation 411B. For ease of understanding, an example is taken where the length of the first probe 43A is greater than the length of the second probe 43B, and both the first perforation 411A and the second perforation 411B are stepped. Specifically, the stepped shape of the first perforation 411A narrows towards one end 43A3 of the first probe 43A, and the stepped shape of the second perforation 411B narrows in the opposite direction towards one end 43B3 of the second probe 43B. The first guide plate 411 and the second guide plate 412 have a cross-section along the thickness direction, and the first through hole 411A and the second through hole 411B are stepped in shape on the cross-section. However, this is not intended to limit the embodiments of this disclosure.

[0131] refer to Figure 4BThis is a schematic diagram of the guide plate structure 41 used to guide probes in some embodiments of this disclosure. Specifically, the movable range of the upper part 43A1 of the first probe 43A and the upper part 43B1 of the second probe 43B is restricted (e.g., by other mechanisms (not shown)). When the first guide plate 411 moves relative to the first probe 43A and the second probe 43B (e.g., lateral relative displacement), the first through hole 411A and the second through hole 411B can respectively cause the lower part 43A2 of the first probe 43A and the lower part 43B2 of the second probe 43B to be offset.

[0132] In some embodiments, since the first guide plate 411 has a thickness and the stepped configuration of the first perforation 411A is different from the stepped configuration of the second perforation 411B, the displacement of the first guide plate 411 will cause the lower part 43A2 of the first probe 43A and the lower part 43B2 of the second probe 43B to shift, further making the distance from one end 43A3 of the first probe 43A to the narrowest point of the perforation 411A consistent with the distance from one end 43B3 of the second probe 43B to the narrowest point of the perforation 411B. In this way, the distance from one end 43A3 of the first probe 43A to the narrowest point of the perforation 411A and the distance from one end 43B3 of the second probe 43B to the narrowest point of the perforation 411B can be kept consistent by: (1) adjusting the thickness of the first guide plate 411; (2) controlling the relative displacement of the first guide plate 411 relative to the first probe 43A and the second probe 43B to the narrowest point of the perforation 411B.

[0133] Accordingly, when one end 43A3 of the first probe 43A and one end 43B3 of the second probe 43B are used to contact different test blocks of different thicknesses on the same test object, by controlling the distance from one end 43A3 of the first probe 43A to the narrowest point of the perforation 411A and the distance from one end 43B3 of the second probe 43B to the narrowest point of the perforation 411B, the first end 43A3 of the first probe 43A and the second end 43B3 of the second probe 43B can have the same contact pressure when simultaneously contacting test blocks of different thicknesses on the same test object. In other words, by controlling the distance from one end 43A3 of the first probe 43A to the narrowest point of the perforation 411A and the second end 43B3 of the second probe 43B to the narrowest point of the perforation 411B, the first end 43A3 of the first probe 43A and the second end 43B3 of the second probe 43B can have consistent contact when contacting test blocks of different thicknesses on the same test object.

[0134] refer to Figure 5AThis is a schematic diagram of a probe array 5 according to some embodiments of the present disclosure. Specifically, the probe array 5 includes: a guide plate structure 51, a plurality of first probes 53A, and a plurality of second probes 53B. The guide plate structure 51 includes: a first guide plate 511, a second guide plate 512, at least one third guide plate 513, and at least one fourth guide plate 514. The first guide plate 511 has a plurality of through holes 511A and a plurality of through holes 511B, and the second guide plate 512 has a plurality of through holes 512A and a plurality of through holes 512B. Each through hole 511A of the first guide plate 511 and each through hole 512A of the second guide plate 512 is used to receive a first probe 53A, and each through hole 511B of the first guide plate 511 and each through hole 512B of the second guide plate 512 is used to receive a second probe 53B.

[0135] At least one third guide plate 513 is disposed between the first guide plate 511 and the second guide plate 513, and has a plurality of through holes 5130. Each through hole 5130 of the third guide plate 513 is used to receive a first probe 51A or a second probe 53B. At least one fourth guide plate 514 has a plurality of through holes 5140, each through hole 5140 being used to receive a first probe 51A or a second probe 53B, thereby limiting the range of motion of the upper portion 51A1 of the first probe 51A and the upper portion 53B1 of the second probe 53B.

[0136] In some embodiments, one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B are respectively used to contact a first block 9A and a second block 9B of a test object 9. The first block 9A and the second block 9B have different thicknesses. The distance between the first guide plate 511 and one end 53A3 of the first probe 53A is less than the distance between the second guide plate 512 and one end 53A of the first probe 53A, and the distance between the first guide plate 511 and one end 53B3 of the second probe 53B is less than the distance between the second guide plate 512 and one end 53B of the second probe 53B. In other words, the first guide plate 511 is located between the second guide plate 512 and one end 53A3 of the first probe 53A (or one end 53B3 of the second probe 53B).

[0137] In some embodiments, the configuration of the first probe 53A (e.g., length, shape, arrangement, position in the perforation, etc.) differs from the configuration of the second probe 53B, the configuration of the perforation 511A (e.g., aperture size, shape, etc.) differs from the configuration of the perforation 511B, and the configuration of the perforation 512A (e.g., aperture size, shape, etc.) differs from the configuration of the perforation 512B. For ease of understanding, an example is given where the length of the first probe 53A is less than the length of the second probe 53B, the aperture of the perforation 511A is greater than the aperture of the perforation 511B, and the aperture of the perforation 512A is smaller than the aperture of the perforation 512B. The first guide plate 511 and the second guide plate 512 have a cross-section along the thickness direction, and the perforations 511A, 511B, 512A, and 512B have a square or rectangular shape on the cross-section. However, this is not intended to limit the embodiments of this disclosure.

[0138] refer to Figure 5B This is a schematic diagram of a guide plate structure 51 used to guide probes in some embodiments of this disclosure. Specifically, the movable range of the upper part 53A1 of the first probe 53A and the upper part 53B1 of the second probe 53B is limited by at least one fourth guide plate 514. When the first guide plate 511 moves relative to the first probe 53A and the second probe 53B (e.g., lateral relative displacement), the lower part 53B2 of the second probe 53B can be offset due to the small aperture of the perforation 511B.

[0139] In some embodiments, since the first guide plate 511 has a thickness and the diameter of the through hole 511A is larger than the diameter of the through hole 511B, the displacement of the first guide plate 511 will cause the lower part 53B2 of the second probe 53B to shift, further causing a change in the height difference between one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B. In this way, the height difference between one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B can be controlled by: (1) adjusting the thickness of the first guide plate 511; (2) controlling the relative displacement of the first guide plate 511 with respect to the first probe 53A and the second probe 53B; (3) adjusting the diameter of the through holes 511A and 511B; or any combination of (1) to (3).

[0140] refer to Figure 5C This is a schematic diagram of the guide plate structure 51 used to guide probes in some embodiments of this disclosure. Specifically, when the second guide plate 512 moves (e.g., lateral relative displacement) relative to the first probe 53A and the second probe 53B, the lower part 53A2 of the first probe 53A can be offset due to the small aperture of the perforation 512A.

[0141] In some embodiments, since the second guide plate 512 has a thickness and the diameter of the through hole 512A is smaller than the diameter of the through hole 512B, the displacement of the second guide plate 512 will cause the lower part 53A2 of the first probe 53A to shift, and further cause the height difference between one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B to change. In this way, the height difference between one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B can be controlled by: (1) adjusting the thickness of the second guide plate 512; (2) controlling the relative displacement of the second guide plate 512 with respect to the first probe 53A and the second probe 53B; (3) adjusting the diameter of the through holes 512A and 512B; or any combination of (1) to (3).

[0142] refer to Figure 5D This is a schematic diagram of the guide plate structure 51 used to guide probes in some embodiments of this disclosure. Specifically, when the first guide plate 511 and the second guide plate 512 move relative to the first probe 53A and the second probe 53B (e.g., lateral relative displacement), the perforation 512A can cause the lower part 53A2 of the first probe 53A to shift, and the perforation 511B can cause the lower part 53B2 of the second probe 53B to shift.

[0143] In some embodiments, since the first guide plate 511 and the second guide plate 512 have a thickness, and (1) the diameter of the through hole 511A is larger than the diameter of the through hole 511B; and (2) the diameter of the through hole 512A is smaller than the diameter of the through hole 512B, the displacement of the first guide plate 511 and the second guide plate 512 will cause the lower part 53A2 of the first probe 53A and the lower part 53B2 of the second probe 53B to shift, further making the distance from one end 53A3 of the first probe 53A to the through hole 512A consistent with the distance from one end 53B3 of the second probe 53B to the through hole 511B.

[0144] In this way, the distance from one end 53A3 of the first probe 511 to the second guide plate 512 can be controlled to be consistent with the distance from one end 53B3 of the second probe 53B to the second probe 511B by: (1) adjusting the thickness of the first guide plate 511 and the second guide plate 512; (2) controlling the relative displacement of the first guide plate 511 and the second guide plate 512 relative to the first probe 53A and the second probe 53B3 relative to the second probe 511B by: (1) adjusting the thickness of the first guide plate 511 and the second guide plate 512A; or any combination of (1) to (3).

[0145] In some embodiments, since at least one third guide plate 513 is provided between the first guide plate 511 and the second guide plate 512, by: (1) adjusting the number of third guide plates 513 (increasing the distance between the first guide plate 511 and the second guide plate 512); and (2) adjusting the configuration of the through holes 5130 of the third guide plate 513 (for example, increasing the aperture of the through hole 5130 for receiving the first probe 53A, or decreasing the aperture of the through hole 5130 for receiving the second probe 53B), the height difference between one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B or the distance from one end 53A3 of the first probe 53A to the through hole 512A and the distance from one end 53B3 of the second probe 53B to the through hole 511B can also be controlled.

[0146] Accordingly, when one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B are used to contact different test blocks 9A and 9B of the same test object 9 with different thicknesses, by the aforementioned: (1) controlling the height difference between one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B; or (2) controlling the distance from one end 53A3 of the first probe 53A to the through hole 512A and the distance from one end 53B3 of the second probe 53B to the through hole 511B, one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B can have the same contact needle pressure when simultaneously contacting test blocks 9A and 9B of the same test object with different thicknesses. In other words, by controlling one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B as described above, the one end 53A3 of the first probe 53A and one end 53B3 of the second probe 53B can have consistent contact when they contact the test blocks 9A and 9B with different thicknesses to be tested.

[0147] While this disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions, and alternatives can be made without departing from the spirit and scope of this disclosure as defined in the claims. For example, many of the processes described above can be implemented using different methods, and other processes or combinations thereof can be substituted for many of the processes described above.

[0148] Furthermore, the scope of this invention is not limited to the specific embodiments of the processes, machinery, manufacturing, material compositions, means, methods, and steps described in the specification. Those skilled in the art will understand from the disclosure of this document that existing or future processes, machinery, manufacturing, material compositions, means, methods, or steps that have the same function or achieve substantially the same results as the corresponding embodiments described herein can be used based on this disclosure. Accordingly, such processes, machinery, manufacturing, material compositions, means, methods, or steps are included within the scope of the claims of this invention.

Claims

1. A guide plate structure, comprising: A first guide plate has the following characteristics: A first perforation, receiving a first probe; and A second perforation receives a second probe, wherein, The configuration of the first probe is different from that of the second probe; The configuration of the first perforation is different from that of the second perforation; The overall length of the second probe is less than the overall length of the first probe, and the diameter of the second perforation is greater than the diameter of the first perforation. The guide plate structure also includes: A second guide plate has: A third perforation, receiving the first probe; and A fourth perforation is provided to receive the second probe, wherein the diameter of the third perforation is larger than the diameter of the fourth perforation. The diameter of the third perforation is larger than that of the first perforation, and the diameter of the fourth perforation is smaller than that of the second perforation.

2. The guide plate structure as described in claim 1, wherein, One end of the first probe is used to contact an object to be tested, and the distance between the first guide plate and the end of the first probe is less than the distance between the second guide plate and the end of the first probe.

3. The guide plate structure as described in claim 1, wherein, The length of the second probe is less than that of the first probe, and the first and second perforations are tapered and narrow in opposite directions.

4. The guide plate structure as described in claim 3, wherein, One end of the first probe and one end of the second probe are used to contact an object to be tested. The first perforation narrows in the direction of the first probe end, and the second perforation narrows in the opposite direction of the second probe end.

5. The guide plate structure as described in claim 1, wherein, The first guide plate has a cross section along the thickness direction, and the shape of the first or second perforation on the cross section is square, rectangular, trapezoidal or stepped.

6. A guide plate structure, comprising: A first guide plate has the following characteristics: A first perforation receives a first probe, wherein, The first probe is used to detect a first block of an object to be tested; and A second perforation receives a second probe, wherein the second probe is used to probe a second block of a test object; The configuration of the first perforation is different from that of the second perforation. When the first guide plate moves relative to the first probe and the second probe, the first probe is deflected and contacts the first block, and the second probe is deflected and contacts the second block. The guide plate structure also includes: A second guide plate has: A third perforation, receiving the first probe; and A fourth perforation is provided to receive the second probe, wherein the diameter of the third perforation is larger than the diameter of the fourth perforation. The second probe has a shorter overall length than the first probe, the second perforation has a larger diameter than the first perforation, the third perforation has a larger diameter than the fourth perforation, and the fourth perforation has a smaller diameter than the second perforation.

7. A probe array comprising: The first probe; A second probe, wherein, The first probe and the second probe are configured differently in the probe array; A first guide plate has the following characteristics: A first perforation, receiving the first probe; and A second through-hole for receiving the second probe, wherein the first through-hole and the second through-hole are configured differently on the first guide plate; and A second guide plate has: A third perforation, receiving the first probe; and A fourth perforation is provided to receive the second probe, wherein the diameter of the third perforation is larger than the diameter of the fourth perforation. The second probe has a shorter overall length than the first probe, the second perforation has a larger diameter than the first perforation, the third perforation has a larger diameter than the fourth perforation, and the fourth perforation has a smaller diameter than the second perforation.

8. The probe array as claimed in claim 7, wherein, One end of the first probe is used to contact an object to be tested, and the distance between the first guide plate and the end of the first probe is less than the distance between the second guide plate and the end of the first probe.

9. The probe array of claim 7, wherein the length of the second probe is less than the length of the first probe, and the first perforation and the second perforation are respectively tapered and narrow in opposite directions.

10. The probe array of claim 9, wherein, One end of the first probe and one end of the second probe are used to contact an object to be tested. The first perforation narrows in the direction of the first probe end, and the second perforation narrows in the opposite direction of the second probe end.

11. The probe array of claim 7, wherein, The first guide plate has a cross section along the thickness direction, and the shape of the first or second perforation on the cross section is square, rectangular, trapezoidal or stepped.

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