Acoustic transducer and terminal device

Abstract

The application provides an acoustic transducer and a terminal device. The acoustic transducer comprises a substrate, a shell and a vibrating piece. The shell is connected to the substrate. The vibrating piece is arranged in the shell. A support frame is arranged between the substrate and the vibrating piece. The vibrating piece is in a plate structure. The vibrating piece comprises at least an anchor end, a driving force arm, a torsion arm and a diaphragm. Part of the structure of the driving force arm and part of the structure of the diaphragm are movably connected to the vibrating piece. The first end of the diaphragm is connected to the driving force arm. One end of the torsion arm is rotatably connected to the connection position of the diaphragm and the driving force arm. The other end of the torsion arm is connected to the anchor end and / or the support frame. At least part of the structure of the anchor end is fixedly connected to the support frame. The distance from the torsion arm to the second end of the diaphragm is greater than the distance from the torsion arm to the end of the driving force arm away from the diaphragm. When the driving force arm rotates around the torsion arm, the diaphragm can be driven to rotate around the torsion arm and enter an open state. The acoustic transducer has the advantages of small volume, large amplitude, low first-order resonance frequency f0, good low-frequency performance and high sound pressure level.

Description

Technical Field

[0001] This application relates to the field of audio equipment technology, and in particular to a sound transducer and terminal device. Background Technology

[0002] A piezoelectric microelectromechanical system (MEMS) acoustic transducer is a sound-generating device fabricated using MEMS technology. It incorporates piezoelectric materials, allowing it to convert electrical signals into vibrations of moving parts through the inverse piezoelectric effect. This vibration drives air vibrations and produces sound, thus converting the electrical signal into an audible audio signal. Compared to traditional acoustic transducers, piezoelectric MEMS transducers offer advantages such as small size, low power consumption, and ease of integration, making them promising for applications in various devices such as mobile phones, headphones, smart glasses, and smartwatches. Furthermore, piezoelectric MEMS transducers can not only be used for electro-acoustic energy conversion but also, by applying an initial bias voltage, control the opening and closing state of the transducer to increase or decrease the slit width, thereby achieving controllable physical transmission in headphones.

[0003] In related technologies, Figure 1 This is a schematic diagram of the internal structure of a piezoelectric MEMS loudspeaker, such as... Figure 1 As shown, piezoelectric material 56 is deposited on a single cantilever diaphragm 34. The piezoelectric material 56 deforms under the influence of a driving voltage, thereby driving the single cantilever diaphragm 34 to vibrate, which in turn drives the air to vibrate and produce sound. Because the piezoelectric MEMS acoustic transducer is small in size, the diaphragm used to drive the air is also small, resulting in a smaller maximum amplitude and a higher first-order resonant frequency f0. This significantly limits the low-frequency performance of the piezoelectric MEMS acoustic transducer and leads to a lower sound pressure level. A similar problem exists when using piezoelectric MEMS acoustic transducers to achieve physical transmission; the small size results in a smaller maximum static deformation of the transducer diaphragm, affecting the effectiveness of environmental sound physical transmission.

[0004] In related technologies, the method of increasing the diaphragm size of the piezoelectric MEMS acoustic transducer is usually used to solve the above problems. However, increasing the diaphragm size will also increase the size of the components that cooperate with the diaphragm, which will lead to an increase in the overall volume of the piezoelectric MEMS acoustic transducer. This conflicts with the miniaturization advantage of the piezoelectric MEMS acoustic transducer itself. Summary of the Invention

[0005] This application provides an acoustic transducer and a terminal device. The acoustic transducer can increase the amplitude of the diaphragm without increasing the volume, thereby increasing the sound pressure level and improving the acoustic transducer's sound-generating performance as a loudspeaker and its physical transmission performance as a dynamic switch.

[0006] A first aspect of this application provides an acoustic transducer, including a substrate, a housing, and a vibrating element. The housing is connected to the substrate, forming a cavity structure between the housing and the substrate. The vibrating element is disposed within the cavity structure, and a support frame is provided between the vibrating element and the substrate. When the vibrating element is in a closed state, it has a plate-like structure, and its outer edge is fixedly connected to the support frame. The vibrating element internally includes at least an anchoring end, a driving arm, and a diaphragm. A portion of the driving arm is movably connected to the vibrating element, a portion of the diaphragm is movably connected to the vibrating element, and a first end of the diaphragm is connected to the driving arm. The diaphragm is connected to a drive arm, with its second end extending away from the drive arm. At least one torsion arm is provided at the connection between the diaphragm and the drive arm. One end of the torsion arm is rotatably connected to the connection between the diaphragm and the drive arm, and the other end of the torsion arm is connected to the anchoring end and / or the support frame. At least a portion of the structure of the anchoring end is fixedly connected to the support frame. The distance from the torsion arm to the second end of the diaphragm is greater than the distance from the torsion arm to the end of the drive arm away from the diaphragm. When the vibrator is in the open state, a first voltage is applied to the vibrator, causing the drive arm to rotate around the torsion arm and thus rotating the diaphragm around the torsion arm.

[0007] The acoustic transducer provided in this application embodiment sets the vibrating element as a two-dimensional plate structure in the closed state, so that the driving arm, torsion arm, anchoring end, and diaphragm are all located in the same plane enclosed by the support frame. This saves space occupied by the vibrating element, thus ensuring the advantage of a small acoustic transducer size. By setting a torsion arm between the driving arm and the diaphragm, a lever structure is formed between the driving arm, torsion arm, and diaphragm. Since the distance from the torsion arm to the second end of the diaphragm is greater than the distance from the torsion arm to the end of the driving arm away from the diaphragm, a displacement amplification lever structure is formed between the driving arm and the diaphragm. Utilizing its geometric amplification characteristics, a small displacement at one end of the driving arm can be converted into a large displacement at one end of the diaphragm. This increases the maximum displacement of the diaphragm without increasing the diaphragm size, thereby reducing the first-order resonant frequency f0, improving the low-frequency performance of the piezoelectric MEMS acoustic transducer, and increasing the sound pressure level of the acoustic transducer.

[0008] In one possible implementation, the vibrating element further includes a piezoelectric arm; wherein the piezoelectric arm is disposed at the third and / or fourth end of the diaphragm; a portion of the piezoelectric arm near the support frame is fixedly connected to the support frame, another portion of the piezoelectric arm near the support frame is movably connected to the support frame, and the piezoelectric arm is movably connected to the anchoring end; the side of the piezoelectric arm near the driving arm is fixedly connected to the driving arm; a piezoelectric material is disposed on the piezoelectric arm, the piezoelectric material being used to drive the piezoelectric arm to deform, thereby causing the driving arm and the diaphragm to rotate around the torsion arm.

[0009] By setting a piezoelectric arm and placing a piezoelectric material on it, the piezoelectric arm can bend when a first voltage is applied, thereby causing the driving arm to move in the direction of the piezoelectric arm's movement. This causes the diaphragm to deform in the opposite direction to the piezoelectric arm's deformation, resulting in diaphragm displacement and thus driving air vibration to produce sound. By placing the piezoelectric arm at the third and / or fourth end of the diaphragm, the orthographic projection of the piezoelectric arm in the direction from the third to the fourth end of the diaphragm partially coincides with the orthographic projection of the driving arm in the same direction. This makes the size of the vibrating element smaller in the direction from the first to the second end of the diaphragm. This increases the length of the driving force transmission without increasing the size of the vibrating element in this direction, thereby lowering the first-order resonant frequency f0 of the acoustic transducer.

[0010] It is understandable that when the diaphragm vibrates back and forth, it can be used as a sound-generating device, and when the diaphragm is kept in the open state, it can be used as a physical transparent switch.

[0011] In one possible implementation, the diaphragm is provided with the piezoelectric material, which drives the diaphragm to rotate around the torsion arm, wherein the driving force of the piezoelectric material on the diaphragm and the driving force of the piezoelectric material on the torsion arm are in opposite directions.

[0012] By placing piezoelectric material on the diaphragm, a driving force can also be generated on the diaphragm. By setting the driving force of the diaphragm to be opposite in direction to the driving force of the piezoelectric arm, the displacement of the diaphragm can be further increased.

[0013] In one possible implementation, the anchoring end is provided with a piezoelectric material, the anchoring end is used to drive the anchoring end to reciprocate relative to the support frame, and the direction of movement of the anchoring end is the same as the direction of movement of the diaphragm.

[0014] By placing piezoelectric material on the anchoring end, a driving force can also be generated on the anchoring end. By setting the driving force at the anchoring end to be in the same direction as the driving force of the diaphragm, the displacement of the diaphragm can be further increased.

[0015] In one possible implementation, the number of piezoelectric arms is at least one; the number of anchoring ends is at least one; the number of driving arms is at least one; and the number of diaphragms is at least one.

[0016] In one possible implementation, in the direction from the third end to the fourth end of the diaphragm, the connection between the driving arm and the diaphragm is a strip-shaped transition section, and at least one end of the strip-shaped transition section is provided with the torsion arm.

[0017] By setting a torsion arm in the strip transition section, both the torsion arm and the diaphragm can be fixedly and rotatably connected to the anchor end and / or the support frame, thereby allowing the driving arm and the diaphragm to rotate relative to the torsion arm, forming a lever structure between the driving arm, the torsion arm, and the diaphragm.

[0018] In one possible implementation, the number of piezoelectric arms is two, and the number of diaphragms is one, with the two piezoelectric arms located at the third and fourth ends of the diaphragm, respectively; wherein a portion of the piezoelectric arm near the support frame is fixedly connected to the support frame, including: at least the second end of the piezoelectric arm is fixedly connected to the support frame; another portion of the piezoelectric arm near the support frame is movably connected to the support frame, including: a first gap exists between the other portion of the piezoelectric arm near the support frame and the support frame.

[0019] By setting a first gap, the piezoelectric arm and the support frame can be movably connected. The first gap has a simple structure, is easy to set up, and can reduce production costs.

[0020] In one possible implementation, there is one anchoring end located at the first end of the diaphragm; there are two driving arms located on opposite sides of the anchoring end; the first end of each piezoelectric arm is connected to one driving arm near the anchoring end, and each driving arm extends towards the diaphragm along the direction from the first end to the second end of the diaphragm.

[0021] By setting two driving arms, the diaphragm can be subjected to force on both sides, making the force on both ends of the diaphragm more balanced, making it easier to vibrate, and making the vibration more stable, thereby improving the quality of electro-acoustic conversion and ensuring better sound quality.

[0022] In one possible implementation, at least a portion of the structure of the anchoring end is fixedly connected to the support frame, including: a first end of the anchoring end is fixedly connected to the support frame; a portion of the structure of the diaphragm is movably connected to the vibrating element, including: a second gap exists between the second end of the anchoring end and the first end of the diaphragm; a portion of the structure of the driving arm is movably connected to the vibrating element, including: each driving arm has a third gap with the anchoring end on the side near the anchoring end, and the third gap communicates with the first gap.

[0023] By fixing at least a portion of the structure of the anchoring end to the support frame, the anchoring end can be fixed, thereby providing a fulcrum force to the torsion arm. In other words, the anchoring end can provide support force to the torsion arm, allowing the drive arm and diaphragm to rotate about the torsion arm relative to the anchoring end (support frame), thus allowing the second end of the diaphragm to tilt upwards. A second gap allows the second end of the anchoring end to be movably connected to the first end of the diaphragm, enabling the diaphragm to rotate relative to the anchoring end, thereby increasing the maximum displacement of the second end of the diaphragm. A third gap allows the drive arm and the anchoring end to be movably connected, enabling the drive arm to rotate relative to the anchoring end.

[0024] In one possible implementation, the driving arm has a fourth gap with the piezoelectric arm on the side closest to the piezoelectric arm; a fifth gap is present between the third end of the diaphragm and the piezoelectric arm located at the third end of the diaphragm, and between the fourth end of the diaphragm and the piezoelectric arm located at the fourth end of the diaphragm; the fourth gap and the fifth gap are in communication.

[0025] In one possible implementation, a sixth gap is provided between the second end of the diaphragm and the support frame, and the sixth gap communicates with the fifth gap.

[0026] By providing a fourth slit, a movable connection is made between the driving arm and the piezoelectric arm. A fifth slit allows for a movable connection between the diaphragm and the piezoelectric arm. Since the fourth and fifth slits are connected, this extends the gap between the diaphragm and the piezoelectric arm, thereby reducing the constraint of the piezoelectric arm on the diaphragm and increasing the maximum displacement of the diaphragm. A sixth slit, connected to the fifth slit, allows the second end of the diaphragm to be raised.

[0027] In one possible implementation, there are two torsion arms, with one torsion arm provided at one end of each strip transition segment near the anchoring end; wherein one end of the torsion arm is rotatably connected to the strip transition segment, and the other end is fixedly connected to the anchoring end; or, one end of the torsion arm is fixedly connected to the strip transition segment, and the other end is rotatably connected to the anchoring end.

[0028] By setting two torsion arms so that both sides of the diaphragm have torsion arms, the two sides of the diaphragm can vibrate synchronously, thus ensuring the stability of the diaphragm vibration. Furthermore, by distributing the driving force on the two torsion arms, the stress on the individual torsion arm can be reduced, thereby extending the service life of the torsion arm.

[0029] In one possible implementation, there are two anchoring ends, located at the third and fourth ends of the diaphragm, respectively, and between the diaphragm and the piezoelectric arm; wherein at least a portion of the structure of each anchoring end is fixedly connected to the support frame, including: the anchoring end is fixedly connected to the support frame; a portion of the structure of the diaphragm is movably connected to the vibrating element, including: a first gap exists between the third end of the diaphragm and the anchoring end located at the third end of the diaphragm, and between the fourth end of the diaphragm and the anchoring end located at the fourth end of the diaphragm.

[0030] By setting two anchoring ends and one driving arm, the stability of the anchoring ends can be improved, thereby enhancing the stability of the piezoelectric arm, diaphragm, and driving arm. A first gap is provided to allow a portion of the diaphragm structure to be movably connected to the anchoring ends.

[0031] In one possible implementation, a second gap exists between the second end of the diaphragm and the support frame, and the first gap communicates with the second gap.

[0032] By setting a second gap, the diaphragm and the support frame are movably connected. By connecting the second gap and the first gap, the second end of the diaphragm can be tilted up.

[0033] In one possible implementation, the number of driving arms is one, and the driving arm is located at the first end of the diaphragm. The end of the driving arm near the support frame has a third gap with the support frame, and the third gap communicates with the first gap.

[0034] By setting a third gap, the driving arm is movably connected to the support frame. By connecting the third gap and the first gap, the piezoelectric arm and the driving arm can move in the same phase.

[0035] In one possible implementation, the first end of each piezoelectric arm is connected to the driving arm on the side near the anchor end; a portion of the structure of the driving arm is movably connected to the vibrating element, including: a fourth gap between the driving arm and the anchor end, and a fifth gap between the side of the piezoelectric arm near the anchor end and the anchor end, wherein the fourth gap and the fifth gap are in communication.

[0036] By setting a fourth gap to allow the drive arm and anchoring end to be movably connected, and by setting a fifth gap to allow the piezoelectric arm and anchoring end to be movably connected, the piezoelectric arm can be movably moved relative to the support frame.

[0037] In one possible implementation, there are two torsion arms; wherein, a torsion arm is provided at each end of the strip-shaped transition section; one end of the torsion arm is rotatably connected to the strip-shaped transition section, and the other end is fixedly connected to the anchoring end; or, one end of the torsion arm is fixedly connected to the strip-shaped transition section, and the other end is rotatably connected to the anchoring end.

[0038] In one possible implementation, there is one piezoelectric arm and two diaphragms, with the two diaphragms located at the third and fourth ends of the piezoelectric arm, respectively, and an anchoring end is provided between each diaphragm and the piezoelectric arm; wherein at least a portion of the structure of the anchoring end is fixedly connected to the support frame, including: the anchoring end is fixedly connected to the support frame; a portion of the structure of the piezoelectric arm near the support frame is fixedly connected to the support frame, including: at least the second end of the piezoelectric arm is fixedly connected to the support frame; another portion of the structure of the piezoelectric arm near the support frame is movably connected to the support frame, including: a first gap exists between the first end of the piezoelectric arm and the support frame.

[0039] By adjusting the position and number of the piezoelectric arm, drive arm, torsion arm, diaphragm, and anchoring end, the vibrating components can be configured with different structures to adapt to different application scenarios, thereby improving the applicability of the acoustic transducer.

[0040] In one possible implementation, a portion of the diaphragm structure is movably connected to the vibrating element, including: a second end of each diaphragm having a second gap with the support frame; a portion of the drive arm structure is movably connected to the vibrating element, including: a third gap between the side of each diaphragm near the anchor end and the anchor end; and a fourth gap between the end of each diaphragm away from the piezoelectric arm and the support frame; the second gap is in communication with the third gap and the fourth gap, respectively.

[0041] By setting a second and a fourth gap to allow a movable connection between the diaphragm and the support frame, and by setting a third gap to allow a movable connection between the diaphragm and the anchor end, the diaphragm can reciprocate relative to the support frame and the anchor end.

[0042] In one possible implementation, each of the diaphragms has a first end connected to a driving arm, and each driving arm is connected to the piezoelectric arm on the side closest to it; a portion of the structure of the driving arm is movably connected to the vibrating element, including: a fifth gap between the side of the driving arm located at the third end of the diaphragm and the support frame, and a sixth gap between the end of the driving arm away from the diaphragm and the support frame, wherein the fifth gap communicates with the sixth gap, and the sixth gap communicates with the first gap.

[0043] By setting the fifth and sixth intervals, a movable connection is made between the drive arm and the support frame, so that the drive arm can reciprocate relative to the support frame.

[0044] In one possible implementation, a portion of the structure of the driving arm is movably connected to the vibrating element, including: a seventh gap between the driving arm and the anchoring end located on the same side of the piezoelectric arm; an eighth gap between the third end of the piezoelectric arm and the anchoring end near the third end of the piezoelectric arm, and between the fourth end of the piezoelectric arm and the anchoring end near the fourth end of the piezoelectric arm, wherein the seventh gap and the eighth gap are connected.

[0045] By setting a seventh interval, the driving arm can be moved relative to the anchor end. By setting an eighth interval, the piezoelectric arm and the anchor end are movably connected, allowing the piezoelectric arm to move relative to the anchor end.

[0046] In one possible implementation, the number of torsion arms is four, with one torsion arm located at each end of the strip-shaped transition section; wherein, the torsion arm located between the anchoring end and the strip-shaped transition section has one end rotatably connected to the strip-shaped transition section and the other end fixedly connected to the anchoring end; or, one end is fixedly connected to the strip-shaped transition section and the other end rotatably connected to the anchoring end; the torsion arm located between the support frame and the strip-shaped transition section has one end rotatably connected to the strip-shaped transition section and the other end fixedly connected to the support frame; or, one end is fixedly connected to the strip-shaped transition section and the other end rotatably connected to the support frame.

[0047] By setting four torsion arms, the third and fourth ends of the diaphragm can be stably connected to the vibrating element, ensuring that each diaphragm can vibrate stably, thereby improving sound quality.

[0048] In one possible implementation, the anchoring end is a strip-shaped structure extending from the second end of the diaphragm toward the first end of the diaphragm.

[0049] By setting the anchoring end as a strip structure, the volume occupied by the anchoring end can be reduced, thereby allowing the diaphragm to be set larger, which in turn further increases the maximum displacement of the diaphragm.

[0050] In one possible implementation, there are multiple vibrating elements, which are distributed in a matrix on the support frame; wherein the vibrating elements are symmetrically arranged in the direction from the first end to the second end of the diaphragm; and the vibrating elements are arranged in an array in the direction from the third end to the fourth end of the diaphragm.

[0051] In one possible implementation, the diaphragms on adjacent vibrating members are movably connected in the direction from the first end to the second end of the diaphragm; in the direction from the third end to the fourth end of the diaphragm, two adjacent diaphragms share a piezoelectric arm, and the two ends of the piezoelectric arm are respectively connected to a driving arm of the diaphragm.

[0052] By setting multiple vibrators and distributing them in an array on the support frame, the space occupied by the support frame can be reduced. Furthermore, by having adjacent diaphragms share some slits, the planar space of the vibrators can be saved, thereby increasing the size of the diaphragms and ultimately improving their maximum amplitude. Additionally, when this acoustic transducer functions as a transparent switch, the transparency space can be increased by having the opposing diaphragm opening states in opposite directions.

[0053] In one possible implementation, a first vibration space exists between the vibrating element and the substrate, and a second vibration space exists between the vibrating element and the portion of the housing opposite the substrate; when the diaphragm is in the open state, the first vibration space and the second vibration space are connected.

[0054] In one possible implementation, the acoustic transducer is a loudspeaker; or, the acoustic transducer is a switch, wherein when the vibrating element of the acoustic transducer is in the open state, the switch is in the open state to allow sound to pass through; and when the vibrating element of the acoustic transducer is in the closed state, the switch is in the closed state to block sound from passing through.

[0055] A second aspect of this application provides a terminal device, including a housing and at least one acoustic transducer as described above; the acoustic transducer is located in the inner cavity of the housing.

[0056] The terminal device provided in this application, by setting the acoustic transducer as described above, can increase the maximum displacement of the diaphragm without increasing the volume, thereby reducing the first-order resonant frequency f0, improving the low-frequency performance of the piezoelectric MEMS acoustic transducer, increasing the sound pressure level of the acoustic transducer, and thus improving the sound quality of the terminal device. Attached Figure Description

[0057] Figure 1 This is a schematic diagram of the internal structure of a piezoelectric MEMS loudspeaker.

[0058] Figure 2 This is a schematic diagram of the structure of a terminal device provided in an embodiment of this application;

[0059] Figure 3 yes Figure 2 Cross-sectional view;

[0060] Figure 4 This is a schematic diagram of the structure of an acoustic transducer provided in one embodiment of this application;

[0061] Figure 5 yes Figure 4 An exploded view of the acoustic transducer shown;

[0062] Figure 6 yes Figure 4 A cross-sectional view of the acoustic transducer shown;

[0063] Figure 7A This is a schematic diagram of the structure of the vibrating element and support frame of an acoustic transducer according to an embodiment of this application;

[0064] Figure 7B This is a schematic diagram of the vibrating element and support frame of an acoustic transducer provided in one embodiment of this application from another angle;

[0065] Figure 8 This is a schematic diagram of the structure of an acoustic transducer with its vibrating element in a closed state, according to an embodiment of this application.

[0066] Figure 9 This is a schematic diagram of the structure of an acoustic transducer with its vibrating element in the open state, according to an embodiment of this application.

[0067] Figure 10 This is a schematic diagram illustrating the vibration principle of an acoustic transducer according to an embodiment of this application;

[0068] Figure 11 This application provides a frequency-maximum displacement curve of the diaphragm of an acoustic transducer according to one embodiment;

[0069] Figure 12 This application provides a frequency-sound pressure level curve of the diaphragm of an acoustic transducer according to an embodiment of the present application;

[0070] Figure 13 This is a schematic diagram of the structure of the vibrating element and support frame of an acoustic transducer according to an embodiment of this application;

[0071] Figure 14 This is a schematic diagram of the structure of the vibrating element and support frame of another acoustic transducer provided in one embodiment of this application;

[0072] Figure 15A yes Figure 14 The diagram shows the vibrating element and support frame of the acoustic transducer from another angle.

[0073] Figure 15B yes Figure 14 A schematic diagram of the vibrating component of the acoustic transducer provided in the diagram;

[0074] Figure 16 This is a schematic diagram of the structure of the vibrating element and support frame of another acoustic transducer provided in one embodiment of this application;

[0075] Figure 17A yes Figure 16 The diagram shows the vibrating element and support frame of the acoustic transducer from another angle.

[0076] Figure 17B yes Figure 16 A schematic diagram of the vibrating component of the acoustic transducer provided in the diagram;

[0077] Figure 18 This is a schematic diagram of the structure of the vibrating element and support frame of another acoustic transducer provided in one embodiment of this application;

[0078] Figure 19 This is a cross-sectional structural diagram of an acoustic transducer disposed in an earphone according to an embodiment of this application;

[0079] Figure 20 This is a schematic diagram of the structure of an earphone worn on the ear according to an embodiment of this application.

[0080] Explanation of reference numerals in the attached figures:

[0081] 1000 - Terminal equipment; 100 - Housing; 110 - Front housing; 111 - Sound outlet;

[0082] 112 - Sound transmission hole; 120 - Rear shell; 130 - Inner cavity of outer shell; 131 - Front sound cavity;

[0083] 132 - Rear acoustic cavity; 200 - Acoustic transducer; 210 - Substrate; 220 - Housing;

[0084] 221-Top wall; 222-Opening; 230-Support frame; 231-First end of support frame;

[0085] 232 - Second end of the support frame; 233 - Third end of the support frame; 234 - Fourth end of the support frame; 235 - Support arm;

[0086] 240 - Vibrating component;

[0087] 241 - Slit; 241a - First slit; 241b - Second slit; 241c - Third slit; 241d - Fourth slit;

[0088] 241e - Fifth slit; 241f - Sixth slit;

[0089] 241g - First gap; 241h - Second gap; 241i - Third gap; 241k - Fourth gap; 241m - Fifth gap;

[0090] 241n - First interval; 241p - Second interval; 241q - Third interval; 241r - Fourth interval; 241s - Fifth interval;

[0091] 241t - Sixth interval; 241w - Seventh interval; 241x - Eighth interval;

[0092] 242-Piezoelectric arm; 243-Anchoring end; 244-Driving arm; 245-Torsion arm;

[0093] 246 - Diaphragm; 246a - First end of diaphragm; 246b - Second end of diaphragm; 246c - Third end of diaphragm;

[0094] 246d - Fourth end of the diaphragm; 247 - Strip-shaped transition section; 248 - Piezoelectric material;

[0095] 250 - Cavity structure; 251 - First vibration space; 252 - Second vibration space;

[0096] 300 - loudspeaker; 400 - ear; 410 - auricle; 420 - concha; 430 - ear canal. Detailed Implementation

[0097] The terminology used in the implementation section of this application is for the purpose of explaining specific embodiments of this application only, and is not intended to limit this application.

[0098] Unless the context otherwise requires, throughout the specification and claims, the term "comprise" and its other forms, such as the third-person singular "comprises" and the present participle "comprising," are interpreted as open-ended and encompassing, meaning "including, but not limited to." In the description of the specification, terms such as "one embodiment," "some embodiments," "exemplary embodiments," "example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this disclosure. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples.

[0099] Furthermore, in this application, directional terms such as "front" and "rear" are defined relative to the orientation of the components shown in the accompanying drawings. It should be understood that these directional terms are relative concepts, used for relative description and clarification, and can change accordingly depending on the orientation of the components in the accompanying drawings.

[0100] In the embodiments of this application, "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0101] Figure 2 This is a schematic diagram of the structure of a terminal device 1000 provided in one embodiment of this application. Figure 3 yes Figure 2 Cross-sectional view. (Refer to...) Figure 2 and Figure 3 As shown, this application embodiment provides a terminal device 1000, which can be an earphone, including a housing 100 and a sound transducer 200 disposed in the inner cavity 130 of the housing (see reference). Figure 2 and Figure 3(As shown). The outer casing 100 includes a front casing 110 and a rear casing 120. The front casing 110 has a sound outlet 111, and one end of the acoustic transducer 200 faces the sound outlet 111. Additionally, the front casing 110 has a sound-permeable hole 112 communicating with the inner cavity 130 of the outer casing. The outer side of the sound-permeable hole 112 communicates with the environment, and the inner side communicates with the inner cavity 130 of the outer casing. Of course, in some embodiments, the sound-permeable hole 112 may not be provided. The number and location of the sound-permeable holes 112 are not further limited in this embodiment.

[0102] The acoustic transducer 200 is a device that converts electrical signals into acoustic signals. In this embodiment, the acoustic transducer 200 can be a piezoelectric MEMS acoustic transducer 200. Compared with traditional acoustic transducers 200, the piezoelectric MEMS acoustic transducer 200 has advantages such as small size, low power consumption, and easy integration, and therefore has significant application prospects in various terminal devices 1000 such as mobile phones, headphones, smart glasses, and smartwatches. The acoustic transducer 200 has commonly used acoustic indicators such as sound pressure level (SPL) and bandwidth.

[0103] It should be noted that the terminal device 1000 in this application embodiment includes, but is not limited to, handheld devices, in-vehicle devices, wearable devices, computing devices, or other processing devices connected to a wireless modem. For example, the terminal device 1000 may include cellular phones, smartphones, personal digital assistant (PDA) computers, tablet computers, laptop computers, in-vehicle computers, smartwatches, smart wristbands, pedometers, and other terminal devices 1000 with call functionality. In this application embodiment, the terminal device 1000 may also be referred to as a terminal. Call scenarios include, but are not limited to, indoor call scenarios, outdoor call scenarios, and in-vehicle call scenarios. Call scenarios may include quiet call scenarios, noisy call scenarios (e.g., streets, shopping malls, airports, stations, construction sites, in the rain, watching a game, concerts, etc.), cycling call scenarios, outdoor windy call scenarios, mono-ear call scenarios, binaural call scenarios, and other scenarios where calls can be made.

[0104] In existing piezoelectric MEMS acoustic transducers 200, the small size of the transducer itself directly results in a small maximum amplitude of the diaphragm 246 used to drive the air, and a relatively high first-order resonant frequency f0. These problems severely limit the low-frequency performance of the piezoelectric MEMS acoustic transducer 200 and lead to a low sound pressure level. A similar problem exists when using the piezoelectric MEMS acoustic transducer 200 to achieve physical transmission; the small size results in a small maximum static deformation of the diaphragm 246, severely affecting the effectiveness of environmental sound physical transmission.

[0105] To solve the above-mentioned technical problems, the related technologies usually adopt the method of increasing the size of the diaphragm 246 of the piezoelectric MEMS acoustic transducer 200. However, increasing the size of the diaphragm 246 will increase the size of the entire device, which conflicts with the miniaturization advantage of the piezoelectric MEMS acoustic transducer 200 itself.

[0106] To address the aforementioned issues, this application provides an acoustic transducer 200 that can increase the maximum amplitude of the diaphragm 246 without increasing its volume, thereby improving the sound pressure level. Furthermore, it also serves the same purpose when the piezoelectric MEMS acoustic transducer 200 performs physical transmission. The following description uses a piezoelectric MEMS acoustic transducer 200 as an example; in other embodiments, the piezoelectric MEMS acoustic transducer 200 in the following scheme can also be other acoustic transducers 200, such as an electromagnetic acoustic transducer 200.

[0107] Figure 4 This is a schematic diagram of the structure of an acoustic transducer 200 provided in one embodiment of this application; Figure 5 yes Figure 4 An exploded view of the acoustic transducer 200 shown; Figure 6 yes Figure 4 A cross-sectional view of the acoustic transducer 200 shown. (Combined with...) Figure 4 and Figure 5 As shown, the acoustic transducer 200 provided in this embodiment may include a substrate 210, a housing 220, a support frame 230, and a vibrating element 240. One side of the substrate 210 is connected to the housing 220. For example, the top wall 221 of the housing 220 is disposed opposite to the substrate 210, and a cavity structure 250 is formed between the housing 220 and the substrate 210 (e.g., ...). Figure 6 As shown, the vibrating element 240 is disposed inside the cavity structure 250, and the support frame 230 is disposed between the vibrating element 240 and the base plate 210.

[0108] For example, one end of the support frame 230 can be fixedly connected to the substrate 210, and the other end can be fixedly connected to the vibrating element 240. The support frame 230 can be an annular frame structure extending from the substrate 210 toward the top wall 221 of the housing 220, and the shape of the annular frame structure can be rectangular. Of course, in other embodiments, the annular frame structure can also be circular, triangular, polygonal, or other irregularly shaped structures. The specific shape of the annular frame structure is not specifically limited in this embodiment.

[0109] The vibrating element 240 has a first vibration space 251 between itself and the substrate 210, and a second vibration space 252 between itself and the top wall 221 of the housing 220. When the acoustic transducer 200 is powered on, a portion of the structure on the vibrating element 240 (e.g., the diaphragm 246) can reciprocate within the first vibration space 251 and the second vibration space 252.

[0110] For example, when the acoustic transducer 200 is in a static state, the vibrating element 240 can be a plate-like structure or a sheet-like structure, etc. It is understood that the thickness of the plate-like structure or sheet-like structure is small so that the vibrating element 240 is lighter and facilitates the vibration of some structures on the vibrating element 240.

[0111] In some embodiments, the vibrating element 240 can be a sheet structure made of silicon material, and the diaphragm is a silicon diaphragm. Of course, in other embodiments, the sheet structure can also be made of other materials, which are not further limited in this embodiment.

[0112] It should be noted that the static state of the acoustic transducer 200 is the state in which the acoustic transducer 200 is stopped working, that is, the state in which no electrical signal is converted into a sound signal in the acoustic transducer 200.

[0113] The outer edge of the vibrating element 240 can be fixedly connected to the support frame 230, so that part of the internal structure of the vibrating element 240 can be suspended. By suspending part of the internal structure of the vibrating element 240, part of the structure on the vibrating element 240 can reciprocate within the first vibration space 251 and the second vibration space 252.

[0114] like Figure 5 As shown, an opening 222 may be provided on the top wall 221 of the housing 220. The latch is disposed opposite to the vibrating member 240 so that sound signals can be transmitted from the opening 222. Exemplarily, the shape of the opening 222 includes, but is not limited to, a rectangle, a circle, a polygon, or an irregular structure.

[0115] Figure 7A This is a schematic diagram of the structure of the vibrating element 240 and the support frame 230 of an acoustic transducer 200 provided in an embodiment of this application. Figure 7BThis is a structural schematic diagram of the vibrating element 240 and the support frame 230 of an acoustic transducer 200 provided in one embodiment of this application from another angle. Figure 8 This is a schematic diagram of the structure of an acoustic transducer 200 with its vibrating element 240 in a closed state, according to an embodiment of this application. (Combined with...) Figure 7A , Figure 7B and Figure 8 As shown, in this embodiment, the vibrating member 240 has a plurality of slits 241 inside, and the plurality of slits 241 can divide the vibrating member 240 into at least a plurality of components, wherein the plurality of components can include at least a piezoelectric arm 242, an anchoring end 243, a driving arm 244, a torsion arm 245 and a diaphragm 246.

[0116] It should be noted that the number of piezoelectric arm 242, anchor end 243, drive arm 244, torsion arm 245 and diaphragm 246 is not limited in this embodiment, and the quantitative relationship between piezoelectric arm 242, anchor end 243, drive arm 244, torsion arm 245 and diaphragm 246 can also be set according to specific circumstances, and is not further limited in this embodiment.

[0117] For example, the width of the slit 241 is less than or equal to 10 μm. Since the width of the slit 241 is very small, acoustic isolation can be achieved between the side of the vibrating member 240 facing the substrate 210 and the side of the substrate 210 facing the top wall 221 of the housing 220. In other words, acoustic isolation can be achieved between the first vibration space 251 and the second vibration space 252.

[0118] By providing multiple slits 241 inside the vibrating element 240, the vibrating element 240 is divided into multiple parts through the slits 241, which facilitates processing and allows for flexible design, thereby improving the applicability of the vibrating element 240.

[0119] The piezoelectric arm 242 is disposed at the third end 246c and / or the fourth end 246d of the diaphragm, and the orthographic projection of the piezoelectric arm 242 in the direction from the third end 246c to the fourth end 246d of the diaphragm coincides with the orthographic projection of the driving arm 244 in the direction from the third end 246c to the fourth end 246d of the diaphragm.

[0120] This allows the size of the vibrating element 240 in the direction from the first end 246a to the second end 246b of the diaphragm to be smaller. This increases the length of the driving force transmission without increasing the size of the vibrating element 240 in the direction from the first end 246a to the second end 246b of the diaphragm, thereby reducing the first resonant frequency f0 of the acoustic transducer 200.

[0121] By acoustically isolating the first vibration space 251 and the second vibration space 252, sound transmission between the first vibration space 251 and the second vibration space 252 is prevented when the acoustic transducer 200 is stationary. This prevents sound from propagating through the acoustic transducer 200 when it is stationary, thus giving the acoustic transducer 200 a sound-insulating function when stationary. For example, when the acoustic transducer 200 is installed on headphones, the headphones have a sound-insulating function when the headphones are turned off, thereby preventing noise from entering the user's ear 400 through the headphones.

[0122] The acoustic transducer 200 provided in this embodiment can be bent (e.g., by applying a bias voltage to the piezoelectric arm 242) under the drive of an electrical signal. Figure 9 As shown), the diaphragm 246 deforms in the opposite direction to the deformation of the piezoelectric arm 242, thereby increasing the slit 241 around the diaphragm 246, eliminating the acoustic isolation between the side of the structural vibrating member 240 facing the substrate 210 and the side of the substrate 210 facing the top wall 221 of the housing 220, and realizing the physical transmission function of ambient sound.

[0123] In this embodiment, the support frame 230 is a rectangular ring structure, wherein the four ends of the rectangle are the first end 231, the second end, the third end and the fourth end of the support frame, respectively. The first end and the second end are arranged opposite to each other, and the third end and the fourth end are arranged opposite to each other.

[0124] In addition, the end of the diaphragm 246 near the first end 231 of the support frame is the first end 246a of the diaphragm, the end of the diaphragm 246 near the second end 232 of the support frame is the second end 246b of the diaphragm, the end of the diaphragm 246 near the third end 233 of the support frame is the third end 246c of the diaphragm, and the fourth end of the diaphragm 246 near the first end 231 of the support frame is the fourth end 246d of the diaphragm.

[0125] The end of anchor 243 near the first end 231 of the support frame is the first end of anchor 243, the end of anchor 243 near the second end 232 of the support frame is the second end of anchor 243, the end of anchor 243 near the third end 233 of the support frame is the third end of anchor 243, and the four ends of anchor 243 near the first end 231 of the support frame are the fourth ends of anchor 243.

[0126] The end of the electric arm 242 near the first end 231 of the support frame is the first end of the electric arm 242, the end of the electric arm 242 near the second end 232 of the support frame is the second end of the electric arm 242, the end of the electric arm 242 near the third end 233 of the support frame is the third end of the electric arm 242, and the four ends of the electric arm 242 near the first end 231 of the support frame are the fourth ends of the electric arm 242.

[0127] The first end 231 of the driving arm 244 near the support frame is the first end of the driving arm 244, the second end 232 of the driving arm 244 near the support frame is the second end of the driving arm 244, the third end 233 of the driving arm 244 near the support frame is the third end of the driving arm 244, and the fourth end of the driving arm 244 near the first end 231 of the support frame is the fourth end of the driving arm 244.

[0128] Continue to participate Figure 8 As shown, the vibrating element 240 includes multiple components, which may include: two piezoelectric arms 242, two driving arms 244, two torsion arms 245, a diaphragm 246, and an anchoring end 243. The diaphragm 246 may be located at or near the center of the vibrating element 240. The two piezoelectric arms 242 are located at the third end 246c and the fourth end of the diaphragm, respectively. The anchoring end 243 is located at the first end 246a of the diaphragm, and the two driving arms 244 are located at the third end and the fourth end of the anchoring end 243, respectively.

[0129] In this embodiment, a portion of the piezoelectric arm 242 near the support frame 230 is fixedly connected to the support frame 230, and another portion of the piezoelectric arm 242 near the support frame 230 has a first gap 241a between it and the support frame 230.

[0130] For example, at least the second end of the piezoelectric arm 242 is fixedly connected to the support frame 230. For example, a portion of the third end of the piezoelectric arm 242 located at the third end 233 of the support frame is fixedly connected to the support frame 230, and another portion has a first gap 241a between itself and the support frame 230. The length of this first gap 241a at the third end of the piezoelectric arm 242 is not specifically limited in this embodiment; it can be one-half, two-thirds, three-quarters, or four-fifths of the total length of the third end of the piezoelectric arm 242. The portion of the third end of the piezoelectric arm 242 fixedly connected to the support frame 230 is close to the second end of the piezoelectric arm 242, and the first gap 241a exists between the first end of the piezoelectric arm 242 and the support frame 230.

[0131] For example, a portion of the fourth end of the piezoelectric arm 242 located at the fourth end 234 of the support frame is fixedly connected to the support frame 230, and another portion has a first gap 241a between it and the support frame 230. The length of the first gap 241a located at the fourth end of the piezoelectric arm 242 is not specifically limited in this embodiment of the application; it can be one-half, two-thirds, three-quarters, or four-fifths of the total length of the fourth end of the piezoelectric arm 242. The portion of the fourth end of the piezoelectric arm 242 fixedly connected to the support frame 230 is close to the second end of the piezoelectric arm 242, and the first gap 241a exists between the first end of the piezoelectric arm 242 and the support frame 230.

[0132] It should be noted that the greater the length of the first gap 241a between the electric arm 242 and the support frame 230, the greater the maximum deformation of the electric arm 242. Therefore, the length of the first gap 241a between the electric arm 242 and the support frame 230 can be set according to specific circumstances. In this embodiment, no further limitation is made.

[0133] In this embodiment, the first end of the anchoring end 243 is fixedly connected to the first end 231 of the support frame; the second end of the anchoring end 243 has a second gap 241b between it and the first end 246a of the diaphragm; each driving arm 244 has a third gap 241c with the anchoring end 243 on the side near the anchoring end 243, and the third gap 241c communicates with the first gap 241a, so that the piezoelectric arm 242 and the driving arm 244 are movably connected to the support frame 230 on the side near the first end 231 of the support frame, and the driving arm 244 and the anchoring end 243 are movably connected.

[0134] Each piezoelectric arm 242 has its first end near the anchoring end 243 connected to a driving arm 244. Each driving arm 244 extends towards the diaphragm 246 along the direction from the first end to the second end of the diaphragm 246. The side of the driving arm 244 near the piezoelectric arm 242 has a fourth gap 241d with the piezoelectric arm 242. There is a fifth gap 241e between the third end 246c of the diaphragm and the piezoelectric arm 242 located at the third end 246c of the diaphragm, and between the fourth end 246d of the diaphragm and the piezoelectric arm 242 located at the fourth end 246d of the diaphragm. The fourth gap 241d and the fifth gap 241e communicate with each other so that the diaphragm 246 can be movably connected to the piezoelectric arm 242, and a portion of the driving arm 244 near the diaphragm 246 can be movably connected to the piezoelectric arm 242.

[0135] A sixth gap 241f is provided between the second end 246b of the diaphragm and the support frame 230. The sixth gap 241f communicates with the fifth gap 241e, allowing the first end of the diaphragm to be movably connected to the support frame 230. The third end 246c and the fourth end of the diaphragm are both movably connected to the piezoelectric arm 242. This ensures that the second end 246b of the diaphragm can be tilted relative to the first end 246a of the diaphragm, and thus vibrate relative to the first end 246a of the diaphragm.

[0136] In some embodiments, the first slit 241a, the second slit 241b, the third slit 241c, the fourth slit 241d, the fifth slit 241e, and the sixth slit 241f are all slits 241. The widths of the first slit 241a, the second slit 241b, the third slit 241c, the fourth slit 241d, the fifth slit 241e, and the sixth slit 241f may be the same or different, but their widths are all less than or equal to 10 μm. The specific widths of the first slit 241a, the second slit 241b, the third slit 241c, the fourth slit 241d, the fifth slit 241e, and the sixth slit 241f are not further limited in this embodiment. In addition, their lengths are related to the size of the vibrating element 240. Therefore, the lengths of the first slit 241a, the second slit 241b, the third slit 241c, the fourth slit 241d, the fifth slit 241e, and the sixth slit 241f, as well as the proportional relationship between their lengths, are not further limited.

[0137] In one possible implementation, the connection between the driving arm 244 and the diaphragm 246 in the direction from the third end 246c to the fourth end of the diaphragm can be a strip-shaped transition segment 247, with a torsion arm 245 at one end of the strip-shaped transition segment 247. For example, there are two driving arms 244, so there can also be two torsion arms 245. Each strip-shaped transition segment 247 has a torsion arm 245 near the anchoring end 243; wherein one end of the torsion arm 245 is rotatably connected to the strip-shaped transition segment 247, and the other end is fixedly connected to the anchoring end 243; or, one end of the torsion arm 245 is fixedly connected to the strip-shaped transition segment 247, and the other end is rotatably connected to the anchoring end 243.

[0138] In some embodiments, the torsion arm 245 can be a rod-shaped cantilever structure as shown in the figure. Its simple structure and ease of installation simplify the structure of the vibrating element 240, thereby reducing costs. Of course, in other embodiments, the torsion arm 245 can also be other structures, such as a combination sleeve, shaft, spring, or a component structure including a combination sleeve, shaft, spring, etc. The specific design can be determined according to the specific circumstances, and is not further limited in this embodiment.

[0139] Figure 9This is a schematic diagram of the structure of an acoustic transducer 200 with its vibrating element 240 in the open state, according to an embodiment of this application.

[0140] It should be noted that the vibrating element 240 includes a closed state and an open state. The closed state refers to the state where all components of the vibrating element 240 are on the same plane; when the vibrating element 240 is in the closed state, the acoustic transducer 200 is in a stationary state. The open state of the vibrating element 240 refers to the state where the second end 246b of the diaphragm on the vibrating element 240 is raised relative to the second end 232 of the support frame. In the open state, the acoustic isolation between the side of the vibrating element 240 facing the substrate 210 and the side of the substrate 210 facing the top wall 221 of the housing 220 is broken. That is, when the second end 246b of the diaphragm 246 is raised relative to the second end 232 of the support frame, the first vibration space 251 and the second vibration space 252 are connected, thereby realizing the physical transmission function between the two sides of the vibrating element 240 of the acoustic transducer 200.

[0141] In one possible implementation, the first voltage can be a bias voltage. The bias voltage can be an AC bias voltage or a DC bias voltage. In other embodiments, the first voltage can also be other voltages, which are not further limited in this embodiment.

[0142] In this embodiment, a piezoelectric material 248 is disposed on the piezoelectric arm 242, and the piezoelectric material 248 deforms under the action of a bias voltage. Therefore, when a bias voltage is applied to the piezoelectric arm 242, the piezoelectric arm 242 will bend under the drive of an electrical signal (e.g., Figure 9 As shown in the figure, the driving arm 244 connected to the piezoelectric arm 242 moves together with the piezoelectric arm 242. Since the driving arm 244 is located at the first end of the piezoelectric arm 242 and the first end of the piezoelectric arm 242 is movably connected to the support frame 230, the first end of the piezoelectric arm 242 will drive the driving arm 244 to rotate around the torsion arm 245. Since the driving arm 244 and the diaphragm 246 are located on both sides of the torsion arm 245, when the driving arm 244 rotates around the torsion arm 245, it will drive the diaphragm 246 to rotate around the torsion arm 245 as well. Since the second end 246b of the diaphragm is movably connected to the second end 232 of the support frame, and the third end 246c and the fourth end of the diaphragm are movably connected to the piezoelectric arm 242 respectively, when the driving arm 244 rotates around the torsion arm 245, the first end 246a of the diaphragm will also rotate around the torsion arm 245, thereby causing the second end 246b, the third end and the fourth end of the diaphragm to be able to tilt relative to the support frame 230.

[0143] The piezoelectric material can be deposited onto the piezoelectric arm, anchor end, or diaphragm. The method for applying the piezoelectric force to the vibrating component is not further limited.

[0144] In other words, the driving arm 244, the torsion arm 245, and the diaphragm 246 form a lever-like structure, such as Figure 10 As shown, the driving arm 244 and the diaphragm 246 are fixedly connected, and the torsion arm 245 is disposed at the connection between the driving arm 244 and the diaphragm 246; that is, the torsion arm 245 is equivalent to the fulcrum of a lever. Figure 10 As shown, the x-direction is the direction from the first end 246a of the diaphragm to the second end, and the y-direction is the direction of movement of the driving arm 244 and the diaphragm 246. In the figure, the lower part is the direction of the side of the diaphragm 246 facing the substrate 210, and the upper part is the direction of the side of the diaphragm 246 facing the top wall 221 of the housing 220.

[0145] For example, when the drive arm 244 moves downward in the y-direction, it will cause the diaphragm 246 to move upward in the y-direction. Since the piezoelectric arm 242 and the drive arm 244 are fixedly connected, they are considered as a single component. Because the piezoelectric arm 242 is provided with piezoelectric material 248, when a bias voltage is applied to the piezoelectric arm 242, it will bend under the drive of an electrical signal. Since the piezoelectric arm 242 and the drive arm 244 are considered as a single component, the bending of the piezoelectric arm 242 will cause the drive arm 244 to move in the same direction as the piezoelectric arm 242.

[0146] In other words, when an electrical signal is applied to the piezoelectric arm 242, it can provide power to the drive arm 244, causing the drive arm 244 to move upward or downward along the y-direction, thereby causing the diaphragm 246 to move upward or downward along the y-direction. Of course, the direction of movement of the drive arm 244 is related to the direction of the bias voltage applied to the piezoelectric arm 242. That is, by changing the direction of the bias voltage applied to the piezoelectric arm 242, the deformation direction (i.e., the direction of movement) of the piezoelectric arm 242 can be changed, which in turn changes the direction of movement of the drive arm 244 and the diaphragm 246.

[0147] In one possible implementation, when the first voltage applied to the piezoelectric arm 242 is an AC bias voltage, the driving arm 244 can be made to reciprocate along the y direction, thereby causing the diaphragm 246 to reciprocate in the y direction (i.e., vibrate in the y direction), thus converting the electrical signal into a sound signal, thereby realizing the electro-acoustic conversion function of the acoustic transducer 200.

[0148] In this embodiment, as Figure 10As shown, the distance from the torsion arm 245 to the end of the driving arm 244 furthest from the diaphragm 246 is the first distance L1, and the distance from the torsion arm 245 to the end of the diaphragm 246 furthest from the driving arm 244 is the second distance L2, which is greater than the first distance L1. The displacement of the driving arm 244 along the y-direction is d1, and the displacement of the diaphragm 246 along the y-direction is d2. According to the geometric amplification characteristic of the lever principle, i.e., d1 / L1=d2 / L2, since the second distance L2 is greater than the first distance L1, the displacement d2 of the diaphragm 246 along the y-direction is greater than the displacement d1 of the driving arm 244 along the y-direction. In other words, the acoustic transducer 200 in this embodiment can amplify the small displacement d1 of the driving arm 244 into a large displacement d2 at the second end of the diaphragm 246, thereby increasing the maximum displacement of the diaphragm 246, thereby reducing the first-order resonant frequency f0 of the acoustic transducer 200, thereby improving the low-frequency performance of the piezoelectric MEMS acoustic transducer 200 and increasing the sound pressure level of the acoustic transducer 200.

[0149] Figure 11 This is a frequency-maximum displacement curve of the diaphragm 246 of an acoustic transducer 200 provided in one embodiment of this application, where the horizontal axis represents frequency in Hz and the vertical axis represents displacement in μm. Figure 11 As shown, curve m1 is the frequency-maximum displacement curve of the diaphragm 246 of the acoustic transducer 200 provided in this embodiment, and curve m2 is... Figure 1 The frequency-maximum displacement curves of the single cantilever diaphragm 246 show that, as can be seen from curves m1 and m2, the first-order resonant frequency f0 of the acoustic transducer 200 has decreased by about 50%, and the maximum amplitude has also increased.

[0150] Figure 12 This is a frequency-sound pressure level curve of the diaphragm 246 of an acoustic transducer 200 provided in one embodiment of this application, where the horizontal axis represents frequency in Hz and the vertical axis represents sound pressure level in dB. Figure 12 As shown, curve n1 is the frequency-sound pressure level curve of the diaphragm 246 of the acoustic transducer 200 provided in this embodiment, and n2 is... Figure 1 The frequency-sound pressure level curve of a single cantilever diaphragm 246 is shown below. Figure 12 As shown, the first-order resonant frequency f0 is reduced without introducing additional modes, and the sound pressure level is significantly improved compared to related technologies.

[0151] In addition, the acoustic transducer 200 in this embodiment of the application increases the maximum amplitude of the diaphragm 246, reduces the first-order resonant frequency f0, and increases the sound pressure level without increasing the volume of the acoustic transducer 200. Thus, the acoustic transducer 200 can maintain the advantage of small size while increasing the maximum amplitude of the diaphragm 246, reducing the first-order resonant frequency f0, and increasing the sound pressure level.

[0152] Of course, in some embodiments, such as Figure 13 As shown, in order to further increase the amplitude of the diaphragm 246, a piezoelectric material 248 can be covered on the diaphragm 246 and the anchoring end 243. The driving force directions of the diaphragm 246 and the anchoring end 243 are the same, and the driving force of the diaphragm 246 and the anchoring end 243 can be opposite to the driving force direction of the piezoelectric arm 242, thereby increasing the driving force on the diaphragm 246, further increasing the maximum amplitude of the diaphragm 246, and further reducing the first resonant frequency f0, thereby increasing the sound pressure level.

[0153] For example, when the diaphragm 246 and the anchoring end 243 are covered with piezoelectric material 248, the driving force on the diaphragm 246 and the anchoring end 243 can be made to be opposite to the driving force of the piezoelectric arm 242 by passing a bias voltage opposite to that of the piezoelectric arm 242 through the diaphragm 246 and the anchoring end 243.

[0154] Of course, in some embodiments, a piezoelectric material 248 may also be provided on the driving arm 244. The bias voltage applied to the driving arm 244 and the bias voltage applied to the piezoelectric arm 242 are in the same direction, thereby making the driving force of the driving arm 244 and the piezoelectric arm 242 in the same direction, thereby increasing the amplitude of the piezoelectric arm 242 and the driving arm 244, thereby increasing the maximum amplitude of the diaphragm 246, reducing the first resonant frequency f0, and increasing the sound pressure level.

[0155] It should be noted that piezoelectric material 248 may or may not be provided on the anchoring end 243. The specificity of whether piezoelectric material 248 is provided on the anchoring end 243, and the area of ​​the piezoelectric material 248, is not specifically limited in this embodiment. Similarly, piezoelectric material 248 may or may not be provided on the diaphragm 246. The specificity of whether piezoelectric material 248 is provided on the diaphragm 246, and the area of ​​the piezoelectric material 248, is not specifically limited in this embodiment. The piezoelectric material 248 on the driving arm 244 may or may not be provided. The specificity of whether piezoelectric material 248 is provided on the driving arm 244, and the area of ​​the piezoelectric material 248, is not specifically limited in this embodiment.

[0156] Of course, the connection relationship between the piezoelectric arm 242, the anchoring end 243, the driving arm 244, the torsion arm 245 and the diaphragm 246 includes, but is not limited to, the connection relationship between the piezoelectric arm 242, the anchoring end 243, the driving arm 244, the torsion arm 245 and the diaphragm 246. Figure 8The connection relationship shown is illustrated. In other embodiments, the connection relationship between the piezoelectric arm 242, anchor end 243, drive arm 244, torsion arm 245, and diaphragm 246 can also be in other forms. As long as the following conditions are met: a portion of the drive arm 244 is movably connected to the support frame 230; a portion of the drive arm 244 is fixedly connected to the first end 246a of the diaphragm; the second end 246b of the diaphragm extends away from the drive arm 244, and the second end 246b of the diaphragm is movably connected to the support frame 230; at least a portion of the anchor end 243 is fixedly connected to the support frame 230; at least one torsion arm 245 is provided at the connection point between the drive arm 244 and the diaphragm 246, and the torsion arm 245 is used to connect the connection point between the drive arm 244 and the diaphragm 246 and the anchor end 246. 3 and / or the support frame 230 are rotatably connected; the diaphragm 246 is movably connected to the anchor end 243 on the side near the anchor end 243, and the driving arm 244 is movably connected to the anchor end 243 on the side near the anchor end 243; a part of the piezoelectric arm 242 near the support frame 230 is fixedly connected to the support frame 230, and another part of the piezoelectric arm 242 near the support frame 230 is movably connected to the support frame 230, and the piezoelectric arm 242 is movably connected to the anchor end 243; the side of the piezoelectric arm 242 near the driving arm 244 is fixedly connected to the driving arm 244.

[0157] In other words, a lever structure can be formed between the driving arm 244, the torsion arm 245, and the diaphragm 246. The number and arrangement of the piezoelectric arm 242, driving arm 244, torsion arm 245, anchoring end 243, and diaphragm 246 can be adjusted. Specifically, there must be at least one piezoelectric arm 242; at least one anchoring end 243; at least one driving arm 244; and at least one diaphragm 246. The number and connection relationship of the piezoelectric arm 242, anchoring end 243, driving arm 244, torsion arm 245, and diaphragm 246 can be specifically set as needed.

[0158] Figure 14 This is a schematic diagram of the structure of the vibrating element 240 and the support frame 230 of another acoustic transducer 200 provided in an embodiment of this application. Figure 15A yes Figure 14 The diagram shows a structural schematic of the vibrating element 240 and the support frame 230 of the acoustic transducer 200 from another angle. Figure 15B yes Figure 14 The diagram below provides a structural schematic of the vibrating element 240 of the acoustic transducer 200. (See attached diagram.) Figure 14 , Figure 15A and Figure 15BAs shown in this embodiment, the vibrating element 240 includes multiple components, which may include: two piezoelectric arms 242, two anchoring ends 243, two torsion arms 245, a diaphragm 246, and a driving arm 244. The two anchoring ends 243 are located at the third end 246c and the fourth end of the diaphragm, respectively, and are situated between the diaphragm 246 and the piezoelectric arms 242. For example, the anchoring ends 243 may extend from the second end 246b of the diaphragm to the first end 246c. The 6a extends into a strip structure, and the anchoring end 243 is fixedly connected to the support frame 230. A support arm 235 for supporting the anchoring end 243 is provided on the support frame 230. A first gap 241g is provided between the third end 246c of the diaphragm and the anchoring end 243 located at the third end 246c of the diaphragm, and between the fourth end 246d of the diaphragm and the anchoring end 243 located at the fourth end of the diaphragm 246, so that the second end 246b of the diaphragm can be movably connected relative to the support frame 230.

[0159] and Figure 8 The embodiment shown is similar in that the portion of the piezoelectric arm 242 near the support frame 230 is fixedly connected to the support frame 230, and another portion of the piezoelectric arm 242 near the support frame 230 has a first gap 241a between it and the support frame 230.

[0160] For example, a second gap 241h exists between the second end 246b of the diaphragm and the support frame 230, and the first gap 241g communicates with the second gap 241h. A driving arm 244 is located at the first end 246a of the diaphragm, and a third gap 241i exists between the end of the driving arm 244 near the support frame 230 and the support frame 230, the third gap 241i communicating with the first gap 241a. The first gap 241a is a slit 241 between the piezoelectric arm 242 and the support frame 230.

[0161] In one possible implementation, the first end of each piezoelectric arm 242 is connected to the driving arm 244 on the side near the anchoring end 243; the side of the driving arm 244 near the anchoring end 243 is movably connected to the anchoring end 243, including: a fourth gap 241k between the driving arm 244 and the anchoring end 243, and a fifth gap 241m between the side of the piezoelectric arm 242 near the anchoring end 243 and the anchoring end 243, wherein the fourth gap 241k and the fifth gap 241m are connected.

[0162] It should be noted that the first gap 241g, the second gap 241h, the third gap 241i, the fourth gap 241k, and the fifth gap 241m are all slits 241. The widths of the first gap 241g, the second gap 241h, the third gap 241i, the fourth gap 241k, and the fifth gap 241m can be the same or different, but their widths are all less than or equal to 10μm. The specific widths of the first gap 241g, the second gap 241h, the third gap 241i, the fourth gap 241k, and the fifth gap 241m are not further limited in this embodiment. Furthermore, their lengths are related to the dimensions of the vibrating element 240; therefore, the lengths of the first gap 241g, the second gap 241h, the third gap 241i, the fourth gap 241k, and the fifth gap 241m, as well as the proportional relationships between their lengths, are not further limited.

[0163] In some embodiments, there are two torsion arms 245; wherein, a torsion arm 245 is provided at each end of the strip transition section 247; one end of the torsion arm 245 is rotatably connected to the strip transition section 247, and the other end is fixedly connected to the anchoring end 243; or, one end of the torsion arm 245 is fixedly connected to the strip transition section 247, and the other end is rotatably connected to the anchoring end 243.

[0164] It should be noted that, in the embodiments of this application, the quantitative relationship between the driving arm 244 and the diaphragm 246 is... Figure 8 The same implementation method applies, and the principle of diaphragm 246 vibration can be referred to in both. Figure 8 The description of the embodiments in this application will not be repeated here.

[0165] Furthermore, in this embodiment, the anchoring end 243 occupies a smaller space, the driving arm 244 is larger, and the strip-shaped transition section 247 at the connection between the driving arm 244 and the diaphragm 246 is also larger. Therefore, there are more force transmission points between the driving arm 244 and the diaphragm 246, making it easier to lift the second end 246b of the diaphragm. Because the connection between the driving arm 244 and the diaphragm 246 is larger, the connection stability between them is improved, thereby increasing the service life of the vibrating element 240.

[0166] In other embodiments, the number and arrangement of the piezoelectric arm 242, the driving arm 244, the torsion arm 245, the anchoring end 243, and the diaphragm 246 can also be in other forms. Figure 16 This is a schematic diagram of the structure of the vibrating element 240 and the support frame 230 of another acoustic transducer 200 provided in an embodiment of this application. Figure 17A yes Figure 16 The diagram shows the structure of the vibrating element 240 and the support frame 230 of the acoustic transducer 200 from another angle. Figure 17B yes Figure 16 The diagram shows the structure of the vibrating element 240 of the acoustic transducer 200.

[0167] like Figure 16 , Figure 17A and Figure 17B As shown in this embodiment, there is one piezoelectric arm 242 and two diaphragms 246. The two diaphragms 246 are located at the third and fourth ends of the piezoelectric arm 242, respectively. An anchoring end 243 is provided between each diaphragm 246 and the piezoelectric arm 242. The anchoring end 243 is fixedly connected to the support frame 230. The anchoring end 243 can be a strip-shaped structure extending from the second end 246b of the diaphragm to the first end 246a of the diaphragm. A support arm 235 for supporting the anchoring end 243 is provided on the support frame 230. At least the second end of the piezoelectric arm 242 is fixedly connected to the support frame 230. For example, the part of the piezoelectric arm 242 near the support frame 230 can be fixedly connected to the support frame 230. There is a first gap 241n between the first end of the piezoelectric arm 242 and the support frame 230.

[0168] In one possible implementation, each diaphragm has a second gap 241p between its second end 246b and the support frame 230; each diaphragm 246 has a third gap 241q between its side near the anchor end 243 and the anchor end 243; and each diaphragm 246 has a fourth gap 241r between its end away from the piezoelectric arm 242 and the support frame 230; the second gap 241p is connected to the third gap 241q and the fourth gap 241r respectively.

[0169] Each diaphragm has a first end 246a connected to a driving arm 244, and the side of each driving arm 244 closest to the piezoelectric arm 242 is connected to the piezoelectric arm 242. The driving arm 244 has a fifth interval 241s between the side of the third end 246c of the diaphragm and the support frame 230, and a sixth interval 241t between the end of the driving arm 244 away from the diaphragm 246 and the support frame 230. The fifth interval 241s and the sixth interval 241t are connected, and the sixth interval 241t is connected to the first interval 241n.

[0170] like Figure 16 As shown, there is a seventh interval 241w between the driving arm 244 and the anchoring end 243 on the same side of the piezoelectric arm 242; there is an eighth interval 241x between the third end of the piezoelectric arm 242 and the anchoring end 243 near the third end of the piezoelectric arm 242, and between the fourth end of the piezoelectric arm 242 and the anchoring end 243 near the fourth end of the piezoelectric arm 242, and the seventh interval 241w and the eighth interval 241x are connected.

[0171] It should be noted that the first interval 241n, the second interval 241p, the third interval 241q, the fourth interval 241r, the fifth interval 241s, the sixth interval 241t, the seventh interval 241w, and the eighth interval 241x are all slits 241. The widths of the first interval 241n, the second interval 241p, the third interval 241q, the fourth interval 241r, the fifth interval 241s, the sixth interval 241t, the seventh interval 241w, and the eighth interval 241x can be the same or different, but their widths are all less than or equal to 10μm. The specific widths of the first interval 241n, the second interval 241p, the third interval 241q, the fourth interval 241r, the fifth interval 241s, the sixth interval 241t, the seventh interval 241w, and the eighth interval 241x are not further limited in this embodiment. In addition, their lengths are related to the dimensions of the vibrating element 240. Therefore, the lengths of the first interval 241n, the second interval 241p, the third interval 241q, the fourth interval 241r, the fifth interval 241s, the sixth interval 241t, the seventh interval 241w, and the eighth interval 241x, as well as the proportional relationships between their lengths, are not further limited.

[0172] In this embodiment, there can be four torsion arms 245, with one torsion arm 245 at each end of the strip transition section 247; wherein, the torsion arm 245 located between the anchoring end 243 and the strip transition section 247 has one end rotatably connected to the strip transition section 247 and the other end fixedly connected to the anchoring end 243; or, one end is fixedly connected to the strip transition section 247 and the other end is rotatably connected to the anchoring end 243; the torsion arm 245 located between the support frame 230 and the strip transition section 247 has one end rotatably connected to the strip transition section 247 and the other end fixedly connected to the support frame 230; or, one end is fixedly connected to the strip transition section 247 and the other end is rotatably connected to the support frame 230.

[0173] By setting four torsion arms 245, the third end 246c and the fourth end 246d of the diaphragm can be fixed by the torsion arms 245, which can improve the stability of the diaphragm 246 during vibration and thus extend the service life of the vibrating element 240. Of course, in some other embodiments, five, six or more torsion arms 245 can be set. The number of torsion arms 245 is not further limited in this embodiment.

[0174] Figure 18 This is a schematic diagram of the structure of the vibrating element 240 and the support frame 230 of another acoustic transducer 200 provided in an embodiment of this application. Figure 18As shown, there are multiple vibrating elements 240, which are distributed in a matrix on the support frame 230. The vibrating elements 240 are symmetrically arranged from the first end 246a to the second end 246b of the diaphragm, and arranged in an array from the third end to the fourth end of the diaphragm 246.

[0175] In this configuration, the diaphragms 246 on adjacent vibrating members 240 are movably connected in the direction from the first end 246a to the second end 246b of the diaphragm. For example, the diaphragms 246 of adjacent vibrating members 240 can share a slit 241. This saves space in the support frame 230 at the second end of the diaphragm 246, thereby increasing the size of the diaphragm 246 and increasing its maximum amplitude, thus lowering the first resonant frequency f0 and increasing the sound pressure level.

[0176] In the direction from the third end 246c to the fourth end 246d of the diaphragm, two adjacent diaphragms 246 can share a piezoelectric arm 242, and the two ends of the piezoelectric arm 242 are respectively connected to the driving arm 244 of a diaphragm 246. This can save the area occupied by the acoustic transducer 200 in the two-dimensional plane (i.e., the surface of the vibrating element when it is at rest), thereby improving the efficiency of the acoustic transducer 200 per unit area.

[0177] The acoustic transducer 200 provided in this embodiment is not only simple in structure and small in size, with a low first-order resonant frequency f0 and a high sound pressure level, but also highly flexible in design. Different configurations of the vibrating element 240 can be applied to different scenarios, making it highly adaptable.

[0178] It should be noted that in any of the above embodiments, the acoustic transducer 200 has an open state and a closed state for the vibrating element 240, and when the vibrating element 240 is in the open state, the first vibration space 251 and the second vibration space 252 are connected (in combination). Figure 6 and Figure 9 (As shown); when the vibrating element 240 is in the closed state, the first vibration space 251 and the second vibration space 252 are acoustically isolated by the diaphragm 246. Therefore, the acoustic transducer 200 in any of the above embodiments has the function of a physical transparent switch.

[0179] The following explanation uses terminal device 1000 as an example of headphones.

[0180] Figure 19 This is a cross-sectional structural diagram of an acoustic transducer 200 disposed in an earphone according to an embodiment of this application. Figure 20 This is a schematic diagram of the structure of an earphone worn on the ear 400 according to an embodiment of this application.

[0181] In some embodiments, such as semi-in-ear headphones or in-ear headphones, e.g. Figure 19 As shown, the headphones may include: a front shell 110, a rear shell 120, a speaker 300, and a piezoelectric MEMS acoustic transducer 200. A cavity is formed between the front shell 110 and the rear shell 120 to accommodate the speaker 300 and the piezoelectric MEMS acoustic transducer 200. The speaker 300 is disposed near the rear shell 120, and the piezoelectric MEMS acoustic transducer 200 is disposed on the side of the speaker 300 away from the rear shell 120, with a gap between them. A rear acoustic cavity 132 of the headphones is formed between the speaker 300 and the rear shell 120. The front shell 110 has a sound outlet 111, and a front acoustic cavity 131 is formed between the side of the speaker 300 near the sound outlet 111 and the interior of the front shell 110. The acoustic transducer 200 is disposed within the front acoustic cavity 131 and communicates with the sound outlet 111.

[0182] like Figure 20 As shown, when the headphones are in the wearing state, that is, when the headphones are worn on the user's ear 400, the front sound cavity 131 is connected to the user's ear canal 430 so that the sound emitted by the speaker 300 is transmitted to the user through the sound outlet 111, for example, to the user's ear canal 430.

[0183] The ear 400 includes an auricle 410, a concha 420, and an ear canal 430. The headphones are typically worn on the concha 420, with the headphone's sound outlet 111 facing the ear canal 430. In some embodiments, the sound outlet 111 can enter the user's concha 420, and may even enter the user's ear canal 430 (see reference). Figure 20 As shown in the figure, it has a noise isolation effect, resulting in a better user experience. For example, taking in-ear headphones as an example, the sound outlet 111 of the headphones may have an ear tip (or ear cover, not shown in the figure). When the sound outlet 111 and the ear tip are inserted into the ear canal 430, the ear tip has a good seal against the ear canal 430, thus having a good noise isolation effect and resulting in a better user experience.

[0184] In another possible implementation, the front shell 110 is provided with a sound-permeable hole 112 communicating with the front acoustic cavity 131. The outer side of the sound-permeable hole 112 is connected to the external environment, and the inner side is connected to the front acoustic cavity 131 (see...). Figure 2 As shown), since a sound transducer 200 is provided inside the front acoustic cavity 131, and when the first voltage applied to the piezoelectric arm 242 is a DC bias voltage, the diaphragm 246 can be opened. At this time, the sound hole 112 is connected to the sound transducer 200, and thus the sound hole 112 is connected to the sound outlet 111. Therefore, in use, when a DC bias voltage is applied to the sound transducer 200, the external environment can be connected to the ear canal 430 (e.g., ...). Figure 20 (As shown).

[0185] When wearing headphones, as the sound outlet 111 is inserted, the air inside the ear canal 430 is continuously compressed as the headphones (e.g., the sound outlet 111 and / or the ear tips) are inserted. For example, during the wearing of in-ear headphones, the ear tips on the sound outlet 111 or the sound outlet 111 will seal the ear canal 430 (see reference). Figure 20 As shown, this increases the pressure within the ear canal 430, causing discomfort and potentially damaging the user's eardrum. Furthermore, because the ear canal 430 connects to the front acoustic cavity 131, the pressure in the front acoustic cavity 131 also increases along with the pressure within the ear canal 430, which negatively impacts the low-frequency acoustic performance of the headphones. Additionally, the sealed cavity within the ear canal 430 amplifies the mid-to-low frequency components of the user's own speech, resulting in a booming sound when the user hears themselves speaking while wearing in-ear devices. This phenomenon, known as the "occlusion effect," severely affects the wearing experience of in-ear audio devices.

[0186] By installing a sound transducer 200 inside the front acoustic cavity 131 and opening a sound-permeable hole 112 on the front shell 110, thus, referring to Figure 20 As shown, when wearing headphones, the airflow in the ear canal 430 can be released to the external environment through the channel between the front acoustic cavity 131, the acoustic transducer 200 and the sound transmission hole 112, thereby quickly balancing the pressure in the ear canal 430 and the front acoustic cavity 131. This not only avoids the problem of wearing discomfort, but also ensures that the acoustic performance of the headphones is not affected.

[0187] Furthermore, by connecting the ear canal 430 to the external environment, the acoustic transducer 200 can reduce or even avoid the "blockage effect." In addition, when the vibrating element 240 of the acoustic transducer 200 is in the open state, the ear canal 430 can be connected to the external environment, and ambient sound can be directly transmitted to the user's ear 400. This is more natural than the related technology of receiving ambient sound with a microphone and then playing it in the ear.

[0188] When the acoustic transducer 200 needs to vibrate to produce sound, the DC bias voltage can be switched to an AC bias voltage, causing the diaphragm 246 of the acoustic transducer 200 to vibrate reciprocally to produce sound. In other words, when the acoustic transducer 200 is in a quasi-static switching state under DC bias voltage, the opening and closing of the diaphragm 246 can be controlled, thereby controlling the connection and isolation between the external environment and the ear canal 430, thus realizing the function of a physical pass-through switch. When the acoustic transducer 200 vibrates under AC bias voltage, it can be used as a sound-generating device.

[0189] Of course, in Figure 18In the embodiment shown, by distributing multiple vibrating elements 240 in a matrix on the support frame 230, when the acoustic transducer 200 is used as a physical transmission switch, the gap can be increased and the effect of environmental transmission can be improved when two adjacent diaphragms 246 are pre-deformed in opposite directions in the direction from the first end to the second end of the diaphragm 246 to achieve the environmental transmission function.

[0190] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, an indirect connection through an intermediate medium, or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0191] The terms "first," "second," "third," "fourth," etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

Claims

1. A sound transducer, characterized in that, The device includes a base plate, a housing, and a vibrating element. The housing is connected to the base plate, and a cavity structure is formed between the housing and the base plate. The vibrating element is disposed within the cavity structure, and a support frame is provided between the vibrating element and the base plate. When the vibrating element is in the closed state, the vibrating element is a plate-like structure, and the outer edge of the vibrating element is fixedly connected to the support frame; The vibrating element internally includes at least an anchoring end, a driving arm, and a diaphragm, wherein... A portion of the structure of the driving arm is movably connected to the vibrating element, a portion of the structure of the diaphragm is movably connected to the vibrating element, a first end of the diaphragm is connected to the driving arm, and a second end of the diaphragm extends away from the driving arm; At least one torsion arm is provided at the connection between the diaphragm and the driving arm. One end of the torsion arm is rotatably connected to the connection between the diaphragm and the driving arm, and the other end of the torsion arm is connected to the anchor end and / or the support frame. At least a portion of the structure of the anchor end is fixedly connected to the support frame. The distance from the torsion arm to the second end of the diaphragm is greater than the distance from the torsion arm to the end of the driving arm away from the diaphragm; When the vibrator is in the open state, a first voltage is applied to the vibrator, the driving arm rotates around the torsion arm, and the diaphragm rotates around the torsion arm, causing the vibration to enter the open state.

2. The acoustic transducer according to claim 1, characterized in that, The vibrating component also includes a piezoelectric arm; wherein... The piezoelectric arm is disposed at the third end and / or the fourth end of the diaphragm, and the orthographic projection of the piezoelectric arm in the direction from the third end to the fourth end of the diaphragm partially overlaps with the orthographic projection of the driving arm in the direction from the third end to the fourth end of the diaphragm. A portion of the piezoelectric arm near the support frame is fixedly connected to the support frame, another portion of the piezoelectric arm near the support frame is movably connected to the support frame, and the piezoelectric arm is movably connected to the anchoring end. The side of the piezoelectric arm closest to the driving arm is fixedly connected to the driving arm. The piezoelectric arm is provided with a piezoelectric material, which is used to drive the piezoelectric arm to deform, so as to drive the driving arm and the diaphragm to rotate around the torsion arm.

3. The acoustic transducer according to claim 2, characterized in that, The diaphragm is provided with the piezoelectric material, which drives the diaphragm to rotate around the torsion arm. The driving force of the piezoelectric material on the diaphragm is opposite in direction to the driving force of the piezoelectric material on the piezoelectric arm.

4. The acoustic transducer according to any one of claims 2 or 3, characterized in that, The anchoring end is provided with piezoelectric material, and the anchoring end is used to drive the anchoring end to reciprocate relative to the support frame, and the direction of movement of the anchoring end is the same as the direction of movement of the diaphragm.

5. The acoustic transducer according to claim 2 or 3, characterized in that, The number of piezoelectric arms is at least one; The number of anchoring ends is at least one; The number of driving arms is at least one; The number of diaphragms is at least one.

6. The acoustic transducer according to claim 2 or 3, characterized in that, In the direction from the third end to the fourth end of the diaphragm, the connection between the driving arm and the diaphragm is a strip-shaped transition section, and at least one end of the strip-shaped transition section is provided with the torsion arm.

7. The acoustic transducer according to claim 6, characterized in that, The number of piezoelectric arms is two, and the number of diaphragms is one. The two piezoelectric arms are located at the third and fourth ends of the diaphragm, respectively. The piezoelectric arm is fixedly connected to the support frame via a portion of its structure near the support frame, including: at least the second end of the piezoelectric arm is fixedly connected to the support frame; The other part of the piezoelectric arm near the support frame is movably connected to the support frame, including: a first gap between the other part of the piezoelectric arm near the support frame and the support frame.

8. The acoustic transducer according to claim 7, characterized in that, The number of anchoring ends is one, and the anchoring end is located at the first end of the diaphragm; wherein... The number of driving arms is two, and the two driving arms are respectively located on both sides of the anchoring end; Each of the piezoelectric arms has its first end connected to a driving arm on the side near the anchoring end, and each driving arm extends in the direction from the first end to the second end of the diaphragm toward the diaphragm.

9. The acoustic transducer according to claim 7 or 8, characterized in that, At least a portion of the structure of the anchoring end is fixedly connected to the support frame, including: a first end of the anchoring end is fixedly connected to the support frame; Part of the structure of the diaphragm is movably connected to the vibrating element, including: a second gap between the second end of the anchoring end and the first end of the diaphragm; A portion of the structure of the driving arm is movably connected to the vibrating element, including: each driving arm has a third gap with the anchoring end on the side near the anchoring end, and the third gap communicates with the first gap.

10. The acoustic transducer according to claim 7 or 8, characterized in that, The driving arm has a fourth gap with the piezoelectric arm on the side closest to the piezoelectric arm; A fifth gap is present between the third end of the diaphragm and the piezoelectric arm located at the third end of the diaphragm, and between the fourth end of the diaphragm and the piezoelectric arm located at the fourth end of the diaphragm. The fourth gap and the fifth gap are connected.

11. The acoustic transducer according to claim 10, characterized in that, There is a sixth gap between the second end of the diaphragm and the support frame, and the sixth gap is connected to the fifth gap.

12. The acoustic transducer according to claim 7 or 8, characterized in that, The number of torsion arms is two, with one torsion arm located at the end of each strip-shaped transition section near the anchoring end; wherein... One end of the torsion arm is rotatably connected to the strip-shaped transition section, and the other end is fixedly connected to the anchoring end; or, one end of the torsion arm is fixedly connected to the strip-shaped transition section, and the other end is rotatably connected to the anchoring end.

13. The acoustic transducer according to claim 7, characterized in that, The number of anchoring ends is two, and the two anchoring ends are respectively located at the third and fourth ends of the diaphragm, and are located between the diaphragm and the piezoelectric arm; wherein, At least a portion of the structure of the anchoring end is fixedly connected to the support frame, including: the anchoring end is fixedly connected to the support frame; The diaphragm is partially connected to the vibrating element, including: a first gap between the third end of the diaphragm and the anchoring end located at the third end of the diaphragm, and between the fourth end of the diaphragm and the anchoring end located at the fourth end of the diaphragm.

14. The acoustic transducer according to claim 13, characterized in that, There is a second gap between the second end of the diaphragm and the support frame, and the first gap and the second gap are in communication.

15. The acoustic transducer according to claim 13 or 14, characterized in that, The number of driving arms is one, and the driving arm is located at the first end of the diaphragm. The end of the driving arm near the support frame has a third gap with the support frame, and the third gap communicates with the first gap.

16. The acoustic transducer according to claim 13 or 14, characterized in that, The first end of each of the piezoelectric arms is connected to the driving arm on the side near the anchoring end; A portion of the structure of the driving arm is movably connected to the vibrating element, including: a fourth gap between the driving arm and the anchoring end, and a fifth gap between the side of the piezoelectric arm near the anchoring end and the anchoring end, wherein the fourth gap and the fifth gap are connected.

17. The acoustic transducer according to claim 13 or 14, characterized in that, The number of torsion arms is two; among them... Each end of the strip-shaped transition section is provided with a torsion arm; One end of the torsion arm is rotatably connected to the strip-shaped transition section, and the other end is fixedly connected to the anchoring end; or, one end of the torsion arm is fixedly connected to the strip-shaped transition section, and the other end is rotatably connected to the anchoring end.

18. The acoustic transducer according to claim 6, characterized in that, The piezoelectric arm is one in number, and the diaphragm is two in number. The two diaphragms are located at the third and fourth ends of the piezoelectric arm, respectively, and an anchoring end is provided between each diaphragm and the piezoelectric arm. At least a portion of the structure of the anchoring end is fixedly connected to the support frame, including: the anchoring end is fixedly connected to the support frame; The piezoelectric arm is fixedly connected to the support frame via a portion of its structure near the support frame, including: at least the second end of the piezoelectric arm is fixedly connected to the support frame; Another part of the structure of the piezoelectric arm near the support frame is movably connected to the support frame, including: a first gap between the first end of the piezoelectric arm and the support frame.

19. The acoustic transducer according to claim 18, characterized in that, A portion of the structure of the diaphragm is movably connected to the vibrating element, including: a second gap between the second end of each diaphragm and the support frame; A portion of the structure of the driving arm is movably connected to the vibrating element, including: each of the diaphragms has a third gap between its side near the anchor end and the anchor end; Furthermore, each of the diaphragms has a fourth gap between its end away from the piezoelectric arm and the support frame; the second gap is connected to the third gap and the fourth gap, respectively.

20. The acoustic transducer according to claim 18 or 19, characterized in that, Each of the diaphragms is connected to a driving arm at its first end, and each driving arm is connected to the piezoelectric arm on the side closest to the piezoelectric arm. The structure of the driving arm is movably connected to the vibrating element, including: a fifth gap between the driving arm located at the third end of the diaphragm and the support frame, a sixth gap between the end of the driving arm away from the diaphragm and the support frame, the fifth gap communicating with the sixth gap, and the sixth gap communicating with the first gap.

21. The acoustic transducer according to claim 18 or 19, characterized in that, A portion of the structure of the driving arm is movably connected to the vibrating element, including: a seventh interval between the driving arm and the anchoring end located on the same side of the piezoelectric arm; There is an eighth interval between the third end of the piezoelectric arm and the anchoring end near the third end of the piezoelectric arm, and between the fourth end of the piezoelectric arm and the anchoring end near the fourth end of the piezoelectric arm, and the seventh interval and the eighth interval are connected.

22. The acoustic transducer according to claim 18 or 19, characterized in that, The number of torsion arms is four, with one torsion arm located at each end of the strip-shaped transition section; wherein, The torsion arm located between the anchoring end and the strip-shaped transition section has one end rotatably connected to the strip-shaped transition section and the other end fixedly connected to the anchoring end; or, one end is fixedly connected to the strip-shaped transition section and the other end is rotatably connected to the anchoring end. The torsion arm located between the support frame and the strip transition section has one end rotatably connected to the strip transition section and the other end fixedly connected to the support frame; or, one end is fixedly connected to the strip transition section and the other end is rotatably connected to the support frame.

23. The acoustic transducer according to claim 13 or 14, characterized in that, The anchoring end is a strip-shaped structure extending from the second end of the diaphragm toward the first end of the diaphragm.

24. The acoustic transducer according to claim 2 or 3, characterized in that, The number of vibrating elements is multiple, and the multiple vibrating elements are distributed in a matrix on the support frame; wherein... The vibrating elements are symmetrically arranged in the direction from the first end to the second end of the diaphragm; The vibrating elements are arranged in an array in the direction from the third end to the fourth end of the diaphragm.

25. The acoustic transducer according to claim 24, characterized in that, In the direction from the first end to the second end of the diaphragm, the diaphragms on adjacent vibrating elements are movably connected; In the direction from the third end to the fourth end of the diaphragm, two adjacent diaphragms share a piezoelectric arm, and the two ends of the piezoelectric arm are respectively connected to the driving arm of the diaphragm.

26. The acoustic transducer according to claim 2 or 3, characterized in that, There is a first vibration space between the vibrating element and the substrate, and a second vibration space between the vibrating element and the portion of the housing opposite to the substrate; when the diaphragm is in the open state, the first vibration space and the second vibration space are connected.

27. The acoustic transducer according to any one of claims 1-3, characterized in that, The acoustic transducer is a loudspeaker; or... The acoustic transducer is a switch, and when the vibrating element of the acoustic transducer is in the open state, the switch is in the open state to allow sound to pass through; when the vibrating element of the acoustic transducer is in the closed state, the switch is in the closed state to block sound from passing through.

28. A terminal device, characterized in that, It includes a housing and at least one acoustic transducer as described in any one of claims 1-27; the acoustic transducer is located in the inner cavity of the housing.

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