A method and auxiliary device for integrating and aligning a microlens array with an infrared detector

Abstract

The application relates to a kind of microlens array and infrared detector integrated alignment method and auxiliary device, the method does not need to process alignment mark again, not only saves manufacturing cost, but also eliminates the optical performance of detector after integration caused by processing error between lens and chip due to alignment mark, the method is positioned through light path simulation, higher positioning accuracy, more in line with optical performance requirements, and operation is more convenient, the difficulty of repetitive operation is low, and adjustment is fast.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of infrared detection system, in particular to a kind of integrated alignment method and auxiliary device of microlens array and infrared detector. BACKGROUND

[0002] The conception of microlens array originates from compound eye structure in bionics, by adjusting the shape, focal length, arrangement structure mode, duty cycle of microlens in microlens array, certain optical performance can be realized, and the integration and performance of optical system are improved. With the continuous iteration development of optical field, microlens array lens has been an indispensable part in most optical systems, and has been widely used in digital projector, HUD imaging system, laser radar system, illumination system, infrared detection system and other fields. And in the infrared detection system, the matching degree between the array subunit of its microlens and the pixel of infrared detector chip (such as Figure 1 ) will directly affect the optical performance of the integrated detector. Relying on the traditional physical alignment method (such as Figure 2 ), the process is complex, and the alignment error is large, which cannot meet the existing accuracy requirements. Therefore, it is necessary to develop a more convenient and higher precision alignment method to ensure the optical performance of the infrared detection system. SUMMARY

[0003] The purpose of the present application is to provide a kind of integrated alignment method and auxiliary device of microlens array and infrared detector, which is beneficial to improve the precision and convenience of microlens array and infrared detector alignment.

[0004] In order to achieve the above purpose, the technical scheme adopted by the present application is: an integrated alignment method of microlens array and infrared detector, comprising the following steps:

[0005] S1, respectively select the lens replaceable supporting plate and the chip replaceable supporting plate matched with the microlens array lens and the detector chip, then oppositely arrange the lens replaceable supporting plate and the chip replaceable supporting plate and respectively fix them on the lower side of the lens adjusting mechanism of the auxiliary device and the upper side of the chip adjusting mechanism of the auxiliary device;

[0006] S2, put a standard block between the lens replaceable supporting plate and the chip replaceable supporting plate, adjust the height of the lens replaceable supporting plate to make it contact with the standard block;

[0007] S3, adjust the inclination angle of the chip replaceable supporting plate, and adjust the chip replaceable supporting plate and the lens replaceable supporting plate to parallel state;

[0008] S4, adjust the height of the lens replaceable support plate, take out the standard block, and then place the microlens array lens and the detector chip on the lens replaceable support plate and the chip replaceable support plate respectively, and align with the positioning column on the corresponding support plate;

[0009] S5, adjust the position of the detector chip in the horizontal X and Y coordinate directions, and adjust the XY coordinate positions of the detector chip and the microlens array lens to a roughly aligned state;

[0010] S6, turn on the computer and the infrared light source emitter of the auxiliary device, light up the detector chip, and adjust the auxiliary device by simulating the receiving state of the light path image point formed between the infrared standard lens of the auxiliary device and the microlens array lens on the detector chip, so that the microlens array lens and the detector chip are precisely aligned.

[0011] S7, after the alignment is completed, the microlens array lens and the detector chip are packaged and fixed.

[0012] Further, in step S4, the microlens array lens is adsorbed and fixed to the lower side of the lens replaceable support plate through the invalid area around the array structure area of the microlens array lens.

[0013] Further, the adjustment of step S5 is only performed once when replacing the support plate; when re-aligning the same type of microlens array lens and detector chip, step S5 is no longer performed, and the microlens array lens and the detector chip are directly aligned on the positioning column of the corresponding support plate for rapid positioning, and then step S6 is performed for precise alignment.

[0014] Further, in step S6, the auxiliary device is adjusted to precisely align the microlens array lens and the detector chip, which specifically includes the following steps:

[0015] 1) Adjust the height of the infrared standard lens, the microlens array lens and the detector chip, and adjust the focal length of the infrared standard lens and the microlens array lens until the image plane is concentrated;

[0016] 2) Adjust the inclination angle of the detector chip, and finely adjust the parallelism between the detector chip and the microlens array lens;

[0017] 3) Adjust the XY coordinate position and rotation of the detector chip, and finely adjust the plane position deviation between the detector chip and the microlens array lens, so as to realize precise alignment of the microlens array lens and the detector chip.

[0018] The application further provides an integrated alignment auxiliary device for a microlens array and an infrared detector, which is used for implementing the integrated alignment method and comprises a lens adjusting mechanism, a lens adjusting mechanism, a chip adjusting mechanism, an infrared light source emitter, a computer and a vacuum generator.

[0019] The infrared light source emitter is used for emitting infrared light sources, lighting the detector chip and simulating the receiving state of the light path image points formed between the infrared standard lens and the microlens array lens on the detector chip.

[0020] The lens adjusting mechanism is used for connecting the replaceable lens supporting plate and the microlens array lens and adjusting the vertical height of the replaceable lens supporting plate and the microlens array lens.

[0021] The chip adjusting mechanism is used for connecting the replaceable chip supporting plate and the detector chip and adjusting the tilt angle, the position in the horizontal X and Y coordinate directions and the rotation angle of the replaceable chip supporting plate and the detector chip.

[0022] The computer is installed with light path simulation software to receive and display the receiving state of the light path image points formed between the infrared standard lens and the microlens array lens on the detector chip.

[0023] The vacuum generator is used for generating negative pressure to adsorb the microlens array lens on the lower side of the replaceable lens supporting plate.

[0024] Further, the lens adjusting mechanism is provided with a lens connecting plate connected with the Z-axis vertical column, the center of the lens connecting plate is provided with a threaded hole connected with the infrared standard lens, the side of the lens connecting plate is provided with a lens Z-axis adjusting knob, the inside of the lens connecting plate is provided with a gear connected with the Z-axis sliding tooth on the Z-axis vertical column, which is used for adjusting the focal length between the infrared standard lens and the microlens array lens.

[0025] The lens adjusting mechanism is provided with a lens connecting plate connected with the Z-axis vertical column, the center of the lens connecting plate is provided with a threaded hole connected with the infrared standard lens, the side of the lens connecting plate is provided with a lens Z-axis adjusting knob, the inside of the lens connecting plate is provided with a gear connected with the Z-axis sliding tooth on the Z-axis vertical column, which is used for adjusting the focal length between the infrared standard lens and the microlens array lens.

[0026] The chip adjusting mechanism is provided with a bottom supporting plate, which is connected and fixed with the workbench by screws; the upper part of the bottom supporting plate is provided with a Z-axis adjusting device, which is provided with a Z-axis fine adjustment knob for accurate adjustment during focusing; the side surface of the Z-axis adjusting device is provided with a Z-axis fixing knob for locking and fixing after focusing adjustment; the upper part of the Z-axis adjusting device is provided with an inclination adjusting device, which is provided with a first inclination adjusting knob and a second inclination adjusting knob on the inclination adjusting connecting plate, for adjusting the inclination angle between the microlens array lens and the detector chip; the upper part of the inclination adjusting device is provided with an X / Y precision adjusting platform, which is provided with an X-axis adjusting knob, a Y-axis adjusting knob and an X / Y-axis fixing knob on the X / Y adjusting connecting plate, for X / Y position movement and fixation during alignment; the X / Y precision adjusting platform is provided with a rotating platform, which is provided with an adjusting knob and a fixing knob, for plane rotation adjustment during alignment; the rotating platform is provided with a threaded hole, which is connected and fixed with the replaceable chip supporting plate; the replaceable chip supporting plate is provided with a positioning column, for positioning the detector chip.

[0027] Further, a plurality of air suction holes are formed on the lower side surface of the replaceable lens supporting plate, and the positions of the air suction holes correspond to the positions of the invalid areas around the array structure area of the microlens array lens.

[0028] Compared with the prior art, the present application has the following beneficial effects: the integrated alignment method and auxiliary device for the microlens array and the infrared detector are provided, which do not need to separately process alignment marks, thereby saving the manufacturing cost, eliminating the processing error of the alignment marks between the lens and the chip, and improving the optical performance of the detector after integration; the method is aligned by light path simulation, which has higher precision than the traditional physical positioning, is more in line with the optical performance requirements, and is more convenient to operate, has low difficulty in repeated operation, and is fast to adjust. Therefore, the present application has strong practicability and broad application prospect. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 is a schematic diagram of the alignment of the microlens array and the detector pixel in the prior art;

[0030] Figure 2 is a schematic diagram of the traditional physical alignment method;

[0031] Figure 3 is a schematic diagram of the auxiliary device structure of the embodiment of the present application;

[0032] Figure 4 is a schematic diagram of adjusting the replaceable chip supporting plate and the replaceable lens supporting plate to the parallel state in the embodiment of the present application;

[0033] Figure 5is the schematic diagram of the positioning column alignment of the microlens array lens, the detector chip and the corresponding supporting plate in the embodiment of the present application;

[0034] Figure 6 is the schematic diagram of the light path simulation in the embodiment of the present application;

[0035] Figure 7 is the schematic diagram of the shielding of the partial sub-units on the detector chip in the embodiment of the present application;

[0036] Figure 8 is the schematic diagram of the adjustment of the focal length of the infrared standard lens and the microlens array lens in the embodiment of the present application;

[0037] Figure 9 is the schematic diagram of the fine adjustment of the parallelism between the detector chip and the microlens array lens in the embodiment of the present application;

[0038] Figure 10 is the schematic diagram of the fine adjustment of the plane position deviation between the detector chip and the microlens array lens in the embodiment of the present application;

[0039] In the figure: 1-screw; 2-bottom supporting plate; 3-Z-axis fixed knob; 4-inclination adjustment connecting plate; 5-first inclination adjustment knob; 6-X / Y-axis fixed knob; 7-X-axis adjustment knob; 8-second inclination adjustment knob; 9-X / Y adjustment connecting plate; 10-Y-axis adjustment knob; 11-fixed knob; 12-adjustment knob; 13-rotary platform; 14-chip replaceable supporting plate; 15-detector chip; 16-Z-axis stand; 17-Z-axis sliding tooth; 18-microlens array lens; 19-lens replaceable supporting plate; 20-lens Z-axis adjustment knob; 21-air suction connector; 22-lens connecting plate; 23-lens Z-axis adjustment knob; 24-infrared standard lens; 25-Z-axis limiting screw; 26-Z-axis fine adjustment knob; 27-lens connecting plate. DETAILED DESCRIPTION

[0040] The present application will be further described below in conjunction with the accompanying drawings and embodiments.

[0041] It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs.

[0042] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0043] As shown in Figure 3 The embodiment provides an integrated alignment auxiliary device for microlens array and infrared detector, which comprises a lens adjusting mechanism provided with an infrared standard lens, a lens adjusting mechanism, a chip adjusting mechanism, an infrared light source emitter, a computer and a vacuum generator. The chip adjusting mechanism, the lens adjusting mechanism, the lens adjusting mechanism and the infrared light source emitter are sequentially arranged from bottom to top. The lens adjusting mechanism and the lens adjusting mechanism can move vertically up and down. The infrared light source emitter is used to emit infrared light source, light up the detector chip, and then simulate the receiving state of the light path image point formed between the infrared standard lens and the microlens array lens on the detector chip. The lens adjusting mechanism is used to connect the replaceable lens supporting plate and the microlens array lens, and adjust the vertical height of the replaceable lens supporting plate and the microlens array lens. The chip adjusting mechanism is used to connect the replaceable chip supporting plate and the detector chip, and adjust the tilt angle, the position in the horizontal X and Y coordinate direction and the rotation angle of the replaceable chip supporting plate and the detector chip. The computer is installed with light path simulation software, and is connected with the detector chip to receive and display the receiving state of the light path image point formed between the infrared standard lens and the microlens array lens on the detector chip. The computer is connected with the imaging system of the infrared standard lens, and the detector chip receives the light path image point. The receiving state of the light path focused between the infrared standard lens and the microlens array lens on the chip is transmitted to the computer. The vacuum generator is used to generate negative pressure to adsorb the microlens array lens on the lower side of the replaceable lens supporting plate.

[0044] Specifically, the lens adjusting mechanism is provided with a lens connecting plate 27 connected with the Z-axis vertical column 16. The center of the lens connecting plate 27 is provided with a threaded hole connected with the infrared standard lens 24. The side of the lens connecting plate 27 is provided with a lens Z-axis adjusting knob 23, and the inner side is provided with a gear connected with the Z-axis sliding tooth 17 on the Z-axis vertical column 16, which is used to adjust the focal length between the infrared standard lens and the microlens array lens.

[0045] The lens adjusting mechanism is provided with a lens connecting plate 22 connected with the Z-axis vertical column 16, the center of the lens connecting plate 22 is provided with a light passing hole, the side of the lens connecting plate 22 is provided with a lens Z-axis adjusting knob 20, the inner side is provided with a gear connected with the Z-axis sliding tooth 17 on the Z-axis vertical column 16, for adjusting the focal length between the infrared standard lens and the microlens array lens; the lens connecting plate 22 is provided with a threaded hole connected and fixed with the lens replaceable supporting plate 19; the lens replaceable supporting plate 19 is provided with a positioning column for positioning the microlens array lens, the lower side of the lens replaceable supporting plate 19 is provided with a plurality of air suction holes, the side is provided with an air suction connector 21, the air suction holes are communicated with the air suction connector 21 through the internal airflow channel, the air suction connector 21 is connected with the vacuum generator, for adsorbing and fixing the microlens array lens. Wherein, the positions of the air suction holes correspond to the positions of the invalid areas around the array structure area of the microlens array lens.

[0046] The chip adjusting mechanism is provided with a bottom supporting plate 2 connected and fixed with the workbench by using a screw 1; the upper part of the bottom supporting plate 2 is provided with a Z-axis adjusting device, the Z-axis adjusting device is provided with a Z-axis fine adjusting knob 26 for accurate adjustment during focusing, the side of the Z-axis adjusting device is provided with a Z-axis fixed knob 3 for locking and fixing after the focusing adjustment is completed; the upper part of the Z-axis adjusting device is provided with an inclination adjusting device, the inclination adjusting connecting plate 4 of the inclination adjusting device is provided with a first inclination adjusting knob 5 and a second inclination adjusting knob 8, for adjusting the inclination angle between the microlens array lens and the detector chip; the upper part of the inclination adjusting device is provided with an X / Y precision adjusting platform, the X / Y adjusting connecting plate 9 of the X / Y precision adjusting platform is provided with an X-axis adjusting knob 7, a Y-axis adjusting knob 10 and an X / Y axis fixed knob 6, for X / Y position movement and fixation during alignment; the X / Y precision adjusting platform is provided with a rotating platform 13, the rotating platform 13 is provided with an adjusting knob 12 and a fixed knob 11, for plane rotation adjustment during alignment; the rotating platform 13 is provided with a threaded hole connected and fixed with the chip replaceable supporting plate 14; the chip replaceable supporting plate 14 is provided with a positioning column for positioning the detector chip.

[0047] Based on the above-mentioned auxiliary device, the integrated alignment method of the microlens array and the infrared detector is realized, which specifically includes the following steps:

[0048] S1, fix the auxiliary device; select the lens replaceable supporting plate and the chip replaceable supporting plate matched with the microlens array lens and the detector chip respectively, then oppositely arrange the lens replaceable supporting plate and the chip replaceable supporting plate and respectively fix them on the lower side of the lens adjusting mechanism of the auxiliary device and the upper side of the chip adjusting mechanism of the auxiliary device.

[0049] S2, put a standard block between the lens replaceable supporting plate and the chip replaceable supporting plate, adjust the height of the lens replaceable supporting plate (adjust the lens Z-axis adjusting knob), so that it is in contact with the standard block.

[0050] S3, adjust the tilt angle of the chip replaceable support plate (adjust the tilt adjustment knob a / β), adjust the chip replaceable support plate and the lens replaceable support plate to a parallel state, as shown in Figure 4 .

[0051] S4, adjust the height of the lens replaceable support plate (adjust the lens Z-axis adjustment knob), take out the standard block, and then place the microlens array lens and the detector chip on the lens replaceable support plate and the chip replaceable support plate, respectively, and align them with the positioning columns on the corresponding support plates, as shown in Figure 5 . Among them, the microlens array lens is adsorbed and fixed to the lower side of the lens replaceable support plate through the invalid area around its array structure area. The detector chip is directly supported on the chip replaceable support plate without additional fixation. Because the lower platform of the chip replaceable support plate is a precision fine adjustment knob, the detector chip will not be offset during adjustment.

[0052] S5, adjust the position of the detector chip in the horizontal X, Y coordinate direction (adjust the X / Y axis adjustment knob), adjust the XY coordinate position of the detector chip and the microlens array lens to a roughly aligned state, that is, adjust the positional deviation between the two to within a certain error range, so as to further accurately adjust and position in the next step.

[0053] It should be noted that the adjustment of step S5 is only performed once when replacing the support plate. When repositioning the same type of microlens array lens and detector chip, step S5 is not performed again, and the microlens array lens and the detector chip are directly aligned on the positioning columns of the corresponding support plates for quick positioning, and then step S6 is performed for accurate positioning.

[0054] S6, turn on the computer and infrared light source emitter of the auxiliary device, light up the detector chip, and adjust the shaft knobs in the auxiliary device to accurately position the microlens array lens and the detector chip by simulating the receiving state of the light path image point between the infrared standard lens of the auxiliary device and the microlens array lens on the detector chip. The light path simulation diagram is shown in Figure 6 . The specific steps of adjusting the auxiliary device to accurately position the microlens array lens and the detector chip are as follows.

[0055] For the sake of illustration and clarity, the following adjustment steps are described in four small units. In the actual positioning process, if there are too many sub-units, it is not convenient to observe, and part of the sub-units on the chip can be blocked to retain a small part for positioning, as shown in Figure 7 . But the blocking scheme is not limited to these three ways.

[0056] 1) Adjust the height of the infrared standard lens, microlens array lens, and detector chip (adjust the lens Z-axis adjustment knob, lens Z-axis adjustment knob, and Z-axis fine-tuning knob) to adjust the focal length of the infrared standard lens and microlens array lens until the image planes are converged. Figure 8 As shown. During the focusing process, the height of the infrared standard lens is generally adjusted (different lenses have different curvatures), while the heights of the microlens array lenses and the detector chip can also be adjusted until focus is achieved.

[0057] 2) Adjust the tilt angle of the detector chip to fine-tune the parallelism between the detector chip and the microlens array mirrors, such as... Figure 9 As shown.

[0058] 3) Adjust the XY coordinate position and rotation of the detector chip, and fine-tune the planar position deviation between the detector chip and the microlens array lenses, such as... Figure 10 As shown, this enables precise alignment between the microlens array lenses and the detector chip.

[0059] S7. After alignment, the microlens array lenses and detector chip are packaged and fixed.

[0060] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A method for integrating a microlens array with an infrared detector, characterized in that, Includes the following steps: S1. Select replacement support plates for lenses and chips that match the microlens array lens and detector chip respectively. Then set the replacement support plates for lenses and chips opposite each other and fix them to the lower side of the lens adjustment mechanism and the upper side of the chip adjustment mechanism of the auxiliary device respectively. S2. Place a standard block between the replaceable lens support plate and the replaceable chip support plate, and adjust the height of the replaceable lens support plate to make it contact the standard block. S3. Adjust the tilt angle of the chip replacement support plate to make the chip replacement support plate and the lens replacement support plate parallel. S4. Adjust the height of the replaceable lens support plate, take out the standard block, and then place the microlens array lens and the detector chip on the replaceable lens support plate and the replaceable chip support plate respectively, and align them with the positioning posts on the corresponding support plates. S5. Adjust the position of the detector chip in the horizontal X and Y coordinate directions to make the XY coordinate positions of the detector chip and the microlens array lens roughly aligned. S6. Turn on the computer and infrared light source transmitter of the auxiliary device, and light up the detector chip. By simulating the reception state of the light path image point formed between the infrared standard lens and the microlens array lens of the auxiliary device on the detector chip, adjust the auxiliary device to make the microlens array lens and the detector chip accurately aligned. S7. After alignment, the microlens array lenses and detector chip are packaged and fixed.

2. The method for integrating a microlens array and an infrared detector according to claim 1, characterized in that, In step S4, the microlens array lens is adsorbed and fixed to the underside of the lens replacement support plate through the ineffective area around its array structure region.

3. The method for integrating a microlens array and an infrared detector according to claim 1, characterized in that, The adjustment in step S5 is performed only once when the support plate is replaced. When re-aligning the same type of microlens array lens and detector chip, the adjustment in step S5 is not performed again. Instead, the microlens array lens and detector chip are directly aligned with the positioning posts on the corresponding support plate for quick positioning, and then the precise alignment in step S6 is performed.

4. The method for integrating a microlens array and an infrared detector according to claim 1, characterized in that, In step S6, the auxiliary device is adjusted to precisely align the microlens array lenses with the detector chip, specifically including the following steps: 1) Adjust the height of the infrared standard lens, microlens array lens and detector chip, and adjust the focal length of the infrared standard lens and microlens array lens until the image plane is concentrated. 2) Adjust the tilt angle of the detector chip to fine-tune the parallelism between the detector chip and the microlens array lenses; 3) Adjust the XY coordinate position and rotation of the detector chip, and fine-tune the planar position deviation between the detector chip and the microlens array lens, so as to achieve precise alignment between the microlens array lens and the detector chip.

5. An integrated alignment auxiliary device for a microlens array and an infrared detector for implementing the integrated alignment method as described in any one of claims 1-4, characterized in that, It includes a lens adjustment mechanism with an infrared standard lens, a lens adjustment mechanism, a chip adjustment mechanism, an infrared light source emitter, a computer, and a vacuum generator. The chip adjustment mechanism, lens adjustment mechanism, lens adjustment mechanism, and infrared light source emitter are arranged sequentially from bottom to top. The lens adjustment mechanism and lens adjustment mechanism can move vertically up and down. The infrared light source emitter is used to emit infrared light to illuminate the detector chip, thereby simulating the reception state of the optical path image point formed between the infrared standard lens and the microlens array lens on the detector chip. The lens adjustment mechanism is used to connect the replaceable lens support plate and the microlens array lens, and to adjust the vertical height of the replaceable lens support plate and the microlens array lens. The chip adjustment mechanism is used to connect the chip replaceable support plate and the detector chip, and to adjust the tilt angle, position in the horizontal X and Y coordinate directions, and rotation angle of the chip replaceable support plate and the detector chip. The computer is equipped with optical path simulation software to receive and display the reception status of the optical path image points formed between the infrared standard lens and the microlens array lens on the detector chip. The vacuum generator is used to generate negative pressure to adsorb the microlens array lenses onto the underside of the lens replaceable support plate.

6. The integrated alignment aid device for a microlens array and an infrared detector according to claim 5, characterized in that, The lens adjustment mechanism is provided with a lens connecting plate (27) connected to the Z-axis column (16). The center of the lens connecting plate (27) is provided with a threaded hole connected to the infrared standard lens (24). The side of the lens connecting plate (27) is provided with a lens Z-axis adjustment knob (23), and the inner side is provided with a gear connected to the Z-axis sliding gear (17) on the Z-axis column (16) for adjusting the focal length between the infrared standard lens and the microlens array lens. The lens adjustment mechanism is provided with a lens connecting plate (22) connected to the Z-axis column (16). The center of the lens connecting plate (22) is provided with a light-transmitting hole. The side of the lens connecting plate (22) is provided with a lens Z-axis adjustment knob (20). The inner side is provided with a gear, which is connected to the Z-axis sliding gear (17) on the Z-axis column (16) for adjusting the focal length between the infrared standard lens and the microlens array lens. The lens connecting plate (22) is provided with a threaded hole, which is connected and fixed to the lens replaceable support plate (19). The lens replaceable support plate (19) is provided with a positioning column for positioning the microlens array lens. The lens replaceable support plate (19) is provided with an air suction hole on the lower side and an air suction connector (21) on the side. The air suction hole is connected to the air suction connector (21) through the internal airflow channel. The air suction connector (21) is connected to the vacuum generator for adsorption and fixation of the microlens array lens. The chip adjustment mechanism has a bottom support plate (2), which is fixed to the worktable with screws (1); the bottom support plate (2) has a Z-axis adjustment device on its upper part, which has a Z-axis fine adjustment knob (26) for accurate adjustment during focusing, and a Z-axis fixing knob (3) on the side of the Z-axis adjustment device for locking and fixing after focusing adjustment; the Z-axis adjustment device has a tilt adjustment device on its upper part, and a first tilt adjustment knob (5) and a second tilt adjustment knob (8) on its tilt adjustment connecting plate (4) for adjusting the tilt angle between the microlens array lens and the detector chip; the tilt adjustment An X / Y precision adjustment platform is provided above the joint device. The X / Y adjustment connecting plate (9) is provided with an X-axis adjustment knob (7), a Y-axis adjustment knob (10) and an X / Y axis fixing knob (6) for X / Y position movement and fixing during alignment. A rotating platform (13) is provided on the X / Y precision adjustment platform. An adjustment knob (12) and a fixing knob (11) are provided on the platform for planar rotation adjustment during alignment. A threaded hole is provided on the rotating platform (13) for connection and fixing with the chip replaceable support plate (14). A positioning post is provided on the chip replaceable support plate (14) for positioning the detector chip.

7. The integrated alignment aid device for a microlens array and an infrared detector according to claim 6, characterized in that, The lens can be replaced with a support plate with a number of air intake holes on the lower side, and the positions of the air intake holes correspond to the positions of the ineffective areas around the array structure area of ​​the microlens array lens.

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